JP3017816B2 - Fluid controller - Google Patents
Fluid controllerInfo
- Publication number
- JP3017816B2 JP3017816B2 JP3049150A JP4915091A JP3017816B2 JP 3017816 B2 JP3017816 B2 JP 3017816B2 JP 3049150 A JP3049150 A JP 3049150A JP 4915091 A JP4915091 A JP 4915091A JP 3017816 B2 JP3017816 B2 JP 3017816B2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- base
- valve seat
- seat
- fluid controller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000012530 fluid Substances 0.000 title claims description 48
- 239000002184 metal Substances 0.000 claims description 39
- 229910052751 metal Inorganic materials 0.000 claims description 39
- 239000010409 thin film Substances 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 8
- 229920003002 synthetic resin Polymers 0.000 claims description 5
- 239000000057 synthetic resin Substances 0.000 claims description 5
- 229920005989 resin Polymers 0.000 description 15
- 239000011347 resin Substances 0.000 description 15
- 230000002093 peripheral effect Effects 0.000 description 7
- 238000007789 sealing Methods 0.000 description 7
- 150000002739 metals Chemical class 0.000 description 6
- 239000000428 dust Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K25/00—Details relating to contact between valve members and seats
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
- F16K1/34—Cutting-off parts, e.g. valve members, seats
- F16K1/42—Valve seats
- F16K1/425—Attachment of the seat to the housing by plastical deformation, e.g. valve seat or housing being plastically deformed during mounting
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
- F16K1/34—Cutting-off parts, e.g. valve members, seats
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
- F16K1/34—Cutting-off parts, e.g. valve members, seats
- F16K1/36—Valve members
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Lift Valve (AREA)
- Temperature-Responsive Valves (AREA)
- Fluid-Driven Valves (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、主に半導体製造設備や
真空設備、医薬・食品製造設備等に於いて、利用される
流体制御器のシート部の改良に係り、耐久性とシール性
に優れ、しかも高いガス置換性とクリーン性とを備えた
流体制御器に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the improvement of a seat portion of a fluid controller used mainly in a semiconductor manufacturing facility, a vacuum facility, a pharmaceutical / food manufacturing facility, etc. The present invention relates to a fluid controller which is excellent and has high gas exchangeability and cleanness.
【０００２】[0002]
【従来の技術】一般に、流体制御器のシート部は金属と
樹脂の組合せか、又は金属同士の組合せにより構成され
ている。前者の金属と樹脂の組合せに係るシート部はシ
ール性や耐久性に比較的優れているため、当該シート部
を備えた流体制御器は半導体製造設備や医薬・食品製造
設備等に於いて広く実用に供されている。しかし、この
種、金属と樹脂の組合せに係るシート部を備えた流体制
御器にも、未解決の問題が多く残されている。先ず、第
１の問題は、ガスの置換性の問題である。一般に、ガス
は一旦細い隙間内へ侵入すると、これを排除するのが著
しく困難となる。ところが、金属と樹脂の組合せに係る
シート部では、樹脂を金属に固定、例えばステムの先端
に樹脂を固定する必要があり、必然的に金属・樹脂間の
組合せ隙間が生ずることになる。その結果、前記隙間へ
侵入したガスの排除が困難となり、ガスの置換性が悪化
することになる。第２の問題は樹脂からのガス放出の問
題である。樹脂内には各種のガス成分が吸着されてお
り、これが真空度の上昇と共に順次放出されることにな
る。その結果、真空設備に於いては、前記ガス放出によ
って真空度の低下や真空引き時間の長期化を招くことに
なる。尚、前述の如き問題の解決策として、樹脂体積や
樹脂の表面積を減少させる方法及び樹脂材料を改良して
ガスの放出を少なくする方法等が提案されているが、未
だ根本的な解決には至っていない。2. Description of the Related Art Generally, a seat portion of a fluid controller is constituted by a combination of a metal and a resin or a combination of metals. Because the former sheet part of the combination of metal and resin has relatively good sealing properties and durability, the fluid controller equipped with the sheet part is widely used in semiconductor manufacturing equipment, pharmaceutical and food manufacturing equipment, etc. Has been offered to. However, many unsolved problems still remain in this type of fluid controller provided with a sheet portion related to a combination of metal and resin. First, the first problem is the problem of gas replacement. Generally, once a gas has penetrated into a narrow gap, it is extremely difficult to eliminate it. However, in the sheet portion relating to the combination of metal and resin, it is necessary to fix the resin to the metal, for example, to fix the resin to the tip of the stem, and a combination gap between the metal and the resin necessarily occurs. As a result, it is difficult to remove the gas that has entered the gap, and the gas exchangeability deteriorates. The second problem is the problem of gas release from the resin. Various gas components are adsorbed in the resin, and are sequentially released as the degree of vacuum increases. As a result, in the vacuum equipment, the gas release causes a reduction in the degree of vacuum and a prolonged evacuation time. As a solution to the above-mentioned problems, a method of reducing the resin volume and the surface area of the resin and a method of improving the resin material to reduce the emission of gas have been proposed. Not reached.
【０００３】一方、後者の金属同士の組合せによるシー
ト部は、前述のような組合せ隙間の問題やガス放出の問
題が少なく、基本的には最も望ましいシート部の構成で
ある。そのため、図９乃至図１１の如き各種のシート部
の構成が多く実用に供されている。しかし、図９の如き
所謂コニカル型のシート部Ａでは、弁体Ｂが弁座Ｃに対
して摺動をするため摺動面に焼き付きを生じたり、或い
は摺動によって微粒粉塵が発生すると云う問題がある。
また、図１０の平面型シート部Ａには弁体Ｂと弁座Ｃ間
のシール性が相対的に低いと云う問題がある。更に図１
１の突型シート部Ａには、弁体Ｂと弁座Ｃとの接当部に
圧壊や打痕、剥離等が生じ易く、耐久性に劣ると云う難
点がある。尚、金属同士の組合せに係るシート部Ａに於
いてそのシール性を高めるためには、シート面の加工精
度の上昇、軟質金属の使用、シール部の面圧の上昇等を
図る必要がある。シート面の加工コストの上昇や微粒粉
塵の発生、圧壊や変形の発生等で様々な制約があり、シ
ール性及び耐久性に優れ、しかも高いガス置換性とクリ
ーン性を有するシート部Ａを備えた流体制御器の開発が
待望されている。[0003] On the other hand, the latter, which is a combination of metals, is less likely to suffer from the above-described combination gap and gas release, and is basically the most desirable configuration of the sheet. For this reason, various configurations of the sheet portion as shown in FIGS. 9 to 11 are widely used in practice. However, in the so-called conical seat portion A as shown in FIG. 9, the valve body B slides on the valve seat C, so that the sliding surface is seized or fine dust is generated by the sliding. There is.
Further, the flat seat portion A in FIG. 10 has a problem that the sealing property between the valve body B and the valve seat C is relatively low. Further FIG.
The projecting seat portion A has a drawback that the contact portion between the valve body B and the valve seat C is liable to be crushed, dented, peeled, and the like, and is inferior in durability. In order to enhance the sealing performance of the sheet portion A relating to the combination of metals, it is necessary to increase the processing accuracy of the sheet surface, use a soft metal, increase the surface pressure of the seal portion, and the like. There is a variety of restrictions due to the increase in processing cost of the sheet surface, generation of fine dust, crushing and deformation, etc., and the sheet portion A is excellent in sealing performance and durability, and has high gas exchangeability and cleanness. The development of a fluid controller is expected.
【０００４】[0004]
【発明が解決しようとする課題】本件発明は従前の制御
弁等に於ける上述の如き問題、すなわち（イ）金属・樹
脂組合せ型シート部を備えた流体制御器ではガス置換性
が悪く、ガス純度の低下を招き易いうえ、ガス放出によ
り真空度の低下等を招き易いこと、（ロ）金属同士の組
合せ型シート部を備えた流体制御器では、シール性及び
耐久性が低い上、微粒粉塵を生じ易いこと等の問題を解
決せんとするものであり、シール性、耐久性に優れ、し
かも高いガス置換性とクリーン性を有するメタルタッチ
型のシート部を備えた流体制御器を提供せんとするもの
である。SUMMARY OF THE INVENTION The present invention has the above-mentioned problems in conventional control valves and the like, that is, (a) a fluid controller provided with a metal / resin combination type sheet portion has poor gas exchangeability, Purity is apt to decrease, and the degree of vacuum is likely to decrease due to gas release. (B) A fluid controller provided with a combination type metal-to-metal sheet portion has low sealability and durability, and has fine dust particles. And a fluid controller with a metal touch-type seat that has excellent sealability and durability, and has high gas exchangeability and cleanness. Is what you do.
【０００５】[0005]
【課題を解決するための手段】本願請求項１に記載の発
明は、弁体６と弁座７から成るシート部Ａを備えた流体
制御器に於いて、弁座７へ当座する弁体６を弁体基部１
１と、弁体基部１１の外表面を覆い前記弁座７へ接当す
る金属薄膜製の皿状のカバー体９と、前記弁体基部１１
とカバー体９との間へ介設したゴム又は合成樹脂材製の
ディスク状のクッション体１０とから形成したことを発
明の基本構成とするものである。According to a first aspect of the present invention, there is provided a fluid controller provided with a seat portion A comprising a valve body 6 and a valve seat 7, and the valve body 6 seated on the valve seat 7 is provided. The valve body base 1
1, a plate-shaped cover member 9 made of a metal thin film and covering the outer surface of the valve body base 11 and abutting against the valve seat 7;
Made of rubber or synthetic resin material interposed between the
The basic structure of the present invention is that it is formed from the disk-shaped cushion body 10.
【０００６】また、本願請求項２に記載の発明は、弁体
６と弁座７から成るシート部Ａを備えた流体制御器に於
いて、弁体６が当座する弁座６を弁座基部１２と、弁座
基部１２の外表面を覆い前記弁体６が当接する水平部を
備えた金属薄膜製のカバー体９と、前記弁座基部１２と
カバー体９との間へ介設したゴム又は合成樹脂材製のク
ッション体１０とより形成したことを発明の基本構成と
するものである。According to a second aspect of the present invention, in a fluid controller provided with a seat portion A comprising a valve body 6 and a valve seat 7, the valve seat 6 on which the valve body 6 abuts is connected to a valve seat base. 12 and a horizontal portion that covers the outer surface of the valve seat base 12 and contacts the valve body 6.
The invention is characterized in that the cover body 9 is made of a metal thin film provided and a cushion body 10 made of rubber or synthetic resin material interposed between the valve seat base 12 and the cover body 9. This is a basic configuration.
【０００７】[0007]
【作用】請求項１に記載の流体制御器では、流体流路の
遮断時には、弁体６が弁座７側へ移動し、まずカバー体
９が弁座６へ当接する。更に、弁体６に面圧が加わるこ
とにより、カバー体９は弾力性を有するクッション体１
０を介して弁座７側へ押圧され、弁座７の外表面の形状
に沿って僅かに変形した状態で当座する。これにより、
流体通路が遮断される。また、弁体６に加わる面圧が開
放されることにより、僅かに弾性変形をしたカバー体９
及びクッション体１０は元の形状に復元すると共に、流
体通路が開放される。又、請求項２に記載の流体制御器
でも同様であり、弁体６が移動することにより、弁座側
のカバー体９及びクッション体１０が弁体６の外表面に
沿って僅かに弾性変形をし、流体通路が遮断される。In the fluid controller according to the first aspect, when the fluid flow path is shut off, the valve body 6 moves to the valve seat 7 side, and the cover body 9 first contacts the valve seat 6. Further, when the surface pressure is applied to the valve body 6, the cover body 9 becomes a cushion body 1 having elasticity.
The valve seat 7 is pressed to the valve seat 7 side through the valve seat 0 and is slightly deformed along the shape of the outer surface of the valve seat 7. This allows
The fluid passage is blocked. Further, when the surface pressure applied to the valve body 6 is released, the cover body 9 slightly elastically deformed is formed.
The cushion body 10 is restored to its original shape, and the fluid passage is opened. The same applies to the fluid controller according to the second aspect. When the valve 6 moves, the cover 9 and the cushion 10 on the valve seat side are slightly elastically deformed along the outer surface of the valve 6. And the fluid passage is shut off.
【０００８】[0008]
【実施例】以下、図面に基づいて本発明の実施例を説明
する。図１は本発明の第１実施例に係る流体制御器を示
すものであり、図に於いて１は弁箱、２はボンネット、
３はボンネットナット、４はステム、５は駆動部、６は
弁体、７は弁座である。前記弁箱１には流体入口１ａ、
流体出口１ｂ、弁室１ｃ、流体通路１ｄが夫々形成され
ており、また弁室１ｃの底面には、弁座７が形成されて
いる。当該弁箱１の上方にはボンネット２が配設されて
おり、ボンネットナット３を締込むことによりボンネッ
ト２が弁箱１に固設されている。また、前記ボンネット
２の内方にはステム３が摺動自在に挿通されており、そ
の下端部には弁体６が形成されており、その上端部には
駆動部５のピストン５ａが夫々固設されている。前記駆
動部５はピストン５ａとシリンダ５ｂとから形成されて
おり、流体送入口５ｃ、５ｄから作動用流体８を圧送す
ることにより、ステム４が上・下動される。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows a fluid controller according to a first embodiment of the present invention, in which 1 is a valve box, 2 is a bonnet,
3 is a bonnet nut, 4 is a stem, 5 is a drive unit, 6 is a valve body, and 7 is a valve seat. The valve box 1 has a fluid inlet 1a,
A fluid outlet 1b, a valve chamber 1c, and a fluid passage 1d are respectively formed, and a valve seat 7 is formed on the bottom surface of the valve chamber 1c. A bonnet 2 is provided above the valve box 1, and the bonnet 2 is fixed to the valve box 1 by tightening a bonnet nut 3. A stem 3 is slidably inserted into the bonnet 2, a valve body 6 is formed at a lower end thereof, and a piston 5 a of a driving unit 5 is fixed at an upper end thereof. Has been established. The drive section 5 is formed of a piston 5a and a cylinder 5b. The stem 4 is moved up and down by pumping the working fluid 8 from the fluid inlets 5c and 5d.
【０００９】本件発明の要部であるシート部Ａは前記弁
体６と弁座７とから構成されており、更にその弁体６
は、ステム４の下端部に相当する弁体基部１１と、金属
薄膜製のカバー体９と、弁体基部１１とカバー体９の間
に配設したクッション体１０とから形成されている。即
ち、前記金属薄膜製カバー体９は、ステム４の下端部、
即ち円柱状の弁体基部１１が挿入される円筒状の窪部９
ａと、窪部９ａの上端部に設けられた鍔部９ｂとから一
体的に形成されており、本実施例に於いてはニッケル又
はニッケル合金製の薄膜をプレス加工するか、電着成形
することによりカバー体９が一体成形されている。ま
た、当該金属薄膜製のカバー体９は、その鍔部９ｂ外周
縁を弁箱１とボンネット２間へ気密に挾着すると共に、
窪部９ａ内へステム４の下端を挿入した状態で弁室１ｃ
内に配設されており、ボンネット２を締込むことによ
り、前記カバー体９を介して弁室１ｃの気密性が保持さ
れている。尚、本実施例ではシート部Ａとダイヤフラム
を一体化した構造のカバー体９としているが、カバー体
９の形態が如何なるものであってもよいことは勿論であ
る。The seat portion A, which is a main part of the present invention, comprises the valve body 6 and the valve seat 7.
Is formed of a valve body base 11 corresponding to the lower end of the stem 4, a cover body 9 made of a metal thin film, and a cushion body 10 disposed between the valve body base 11 and the cover body 9. That is, the cover member 9 made of a metal thin film includes a lower end portion of the stem 4,
That is, the cylindrical recess 9 into which the cylindrical valve body base 11 is inserted.
a and a flange 9b provided at the upper end of the recess 9a. In this embodiment, a thin film made of nickel or a nickel alloy is pressed or electrodeposited. Thereby, the cover body 9 is integrally formed. Further, the cover body 9 made of the metal thin film hermetically clamps the outer peripheral edge of the flange portion 9b between the valve box 1 and the bonnet 2, and
The valve chamber 1c with the lower end of the stem 4 inserted into the recess 9a
The airtightness of the valve chamber 1c is maintained through the cover body 9 by tightening the bonnet 2. In this embodiment, the cover member 9 has a structure in which the seat portion A and the diaphragm are integrated, but it goes without saying that the cover member 9 may have any form.
【００１０】一方、前記クッション体１０は適当な弾力
性と柔軟性を保持する材料、例えばゴム、合成樹脂、コ
イルスプリング等から形成されており、本実施例では、
フッ素ゴムを用いて予かじめ前記窪部９ａの底部へ挿着
可能なディスク体状に成形したクッション体１０を、カ
バー体９と弁体基部１１の間へ挿入するようにしてい
る。尚、本実施例では前述の如く予かじめ成形加工した
クッション体１０を使用しているが、弾性を有する樹脂
等をカバー体の窪部９ａ内へ直接流し込むか若しくは充
填するようにしても良い。また、本実施例では前記シー
ト部Ａをピストン駆動構造の制御弁へ適用しているが、
当該シート部Ａを適用する流体制御器が如何なる構造、
例えばリリーフ弁やチェッキ弁、減圧弁、であってもよ
いことは勿論である。On the other hand, the cushion body 10 is formed of a material having appropriate elasticity and flexibility, for example, rubber, synthetic resin, coil spring, or the like.
A cushion body 10 formed into a disk shape which can be inserted into the bottom of the recess 9a in advance using fluorine rubber is inserted between the cover body 9 and the valve body base 11. In the present embodiment, the cushion body 10 preformed and processed as described above is used. However, an elastic resin or the like may be directly poured into the recess 9a of the cover body or filled. . In this embodiment, the seat portion A is applied to a control valve having a piston drive structure.
What kind of structure is the fluid controller to which the seat portion A is applied,
For example, a relief valve, a check valve, or a pressure reducing valve may be used.
【００１１】図２は本件発明の第２実施例に係る流体制
御器のシート部Ａを示すものである。当該第２実施例で
は、弁体６がステム４の下端に形成した弁体基部１１
と、弁体基部１１を覆う皿形状の金属薄膜製のカバー体
９と、弁体基部１１とカバー体９間に介挿したコイルス
プリング製のリング状のクッション体１０とから形成さ
れている。また、前記弁体基部１１とカバー体９には、
前記リング状のクッション体１０を挿着するための断面
形状が半円形のガイド溝１１ａ及びガイド溝９ｃが夫々
形成されている。更に、前記皿形状のカバー体９の上端
周縁は弁体基部１１の外周面へ溶接されている。FIG. 2 shows a seat portion A of a fluid controller according to a second embodiment of the present invention. In the second embodiment, the valve element 6 has a valve element base 11 formed at the lower end of the stem 4.
The cover 9 is made of a dish-shaped metal thin film covering the valve base 11 and a ring-shaped cushion 10 made of a coil spring interposed between the valve base 11 and the cover 9. The valve body base 11 and the cover body 9 include:
A guide groove 11a and a guide groove 9c each having a semicircular cross section for inserting the ring-shaped cushion body 10 are formed. Further, the peripheral edge of the upper end of the dish-shaped cover body 9 is welded to the outer peripheral surface of the valve body base 11.
【００１２】図３は本発明で用いるシール部Ａの第３実
施例を示すものである。本実施例では、コイルスプリン
グ製のリング状のクッション体１０が平面状の弁体基部
１１とガイド溝９ｃを有するカバー体９の間に介挿され
ている。FIG. 3 shows a third embodiment of the seal portion A used in the present invention. In this embodiment, a ring-shaped cushion body 10 made of a coil spring is interposed between a planar valve body base 11 and a cover body 9 having a guide groove 9c.
【００１３】図４は本発明で用いるシール部Ａの第４実
施例を示すものである。本実施例では、断面視に於いて
球面状の接触部９ｄを有する皿形状のカバー体９がステ
ム４下端の弁体基部１１へ嵌合され、その上端周縁がス
テム４の外周面へ溶接されている。また、クッション体
１０として弁体基部１１とカバー体９との間にゴム等が
充填されている。FIG. 4 shows a fourth embodiment of the seal portion A used in the present invention. In the present embodiment, a dish-shaped cover body 9 having a spherical contact portion 9d in a sectional view is fitted to the valve body base 11 at the lower end of the stem 4, and the upper peripheral edge thereof is welded to the outer peripheral surface of the stem 4. ing. Further, the cushion body 10 is filled with rubber or the like between the valve body base 11 and the cover body 9.
【００１４】図５は、本発明で使用するシール部Ａの第
５実施例を示すものである。本実施例では、中央に流体
通路１１ｃを有する弁体基部１１の下端部にＵ字形の断
面形状を有するリング状のカバー体９が嵌合され、その
内・外壁の上端周縁が夫々弁体基部１１の外周面へ溶接
されている。FIG. 5 shows a fifth embodiment of the seal portion A used in the present invention. In the present embodiment, a ring-shaped cover body 9 having a U-shaped cross-sectional shape is fitted to the lower end of a valve body base 11 having a fluid passage 11c at the center, and the upper and lower edges of the inner and outer walls are respectively formed by the valve body base. 11 is welded to the outer peripheral surface.
【００１５】図６、図７及び図８は、本件発明で用いる
シール部Ａの第６実施例、第７実施例及び第８実施例を
示すものであり、弁座７側に金属薄膜製カバー体９とク
ッション体１０を夫々設けたものである。即ち、図６の
第６実施例に於いては、弁座７が弁室１ｃの底面の一部
から成る弁座基部１２と、流体通路１ｄを囲繞して弁座
基部１２上に設けたコイルスプリング製のリング状のク
ッション体１０と、クッション体１０を覆うリング状の
金属薄膜製のカバー体９とから形成されており、カバー
体９の内・外壁の端部は夫々弁座基部１２へ溶接されて
いる。また、図７の第７実施例に於いては、弁座基部１
２及びカバー体９に夫々リング状のガイド溝１２ａ及び
ガイド溝９ｃが形成されており、両ガイド溝１２ａ、９
ｃ内へコイルスプリング製のリング状のクッション体１
０が挿着されている。更に、図８の第８実施例に於いて
は、弁座基部１２とカバー体９との間にゴム等の充填材
がクッション体１０として充填されており、且つ弁体基
部１１の方には断面形状がほぼ半球状の接触部１１ｂを
形成したものである。FIGS. 6, 7 and 8 show a sixth embodiment, a seventh embodiment and an eighth embodiment of the seal portion A used in the present invention, wherein a cover made of a metal thin film is provided on the valve seat 7 side. The body 9 and the cushion body 10 are provided respectively. That is, in the sixth embodiment shown in FIG. 6, the valve seat 7 is formed on the valve seat base 12 which is a part of the bottom surface of the valve chamber 1c and the coil provided on the valve seat base 12 so as to surround the fluid passage 1d. A ring-shaped cushion body 10 made of a spring and a ring-shaped metal thin-film cover body 9 covering the cushion body 10 are formed. Ends of inner and outer walls of the cover body 9 are respectively connected to a valve seat base 12. Welded. Further, in the seventh embodiment shown in FIG.
A ring-shaped guide groove 12a and a guide groove 9c are formed on the cover 2 and the cover body 9, respectively.
Ring-shaped cushion body 1 made of coil spring into c
0 is inserted. Further, in the eighth embodiment shown in FIG. 8, a filler such as rubber is filled between the valve seat base 12 and the cover body 9 as the cushion body 10, and the valve body base 11 is directed toward the valve body base 11. The cross-sectional shape has a substantially hemispherical contact portion 11b.
【００１６】尚、前記各実施例に於いては、金属薄膜製
のカバー体９の端部周縁を弁体基部１１または弁座基部
１２へ夫々溶接するようにしているが、溶接以外の方法
例えば接着や圧接、かしめ等によって気密にカバー体９
を固設することも可能である。また、弁体基部１１、弁
座基部１２、カバー体９及びクッション体１０等の形態
は、カバー体９がクッション体１０により弾性的に弁座
基部１２若しくは弁体基部１１へ接当して流体通路が開
・閉されるものであれば、前記各実施例に示した以外の
如何なる形態であってもよい。In each of the above embodiments, the peripheral edge of the end of the cover member 9 made of a metal thin film is welded to the valve body base 11 or the valve seat base 12, respectively. The cover body 9 is airtightly bonded, pressed, crimped or the like
Can be fixed. Further, the valve body base portion 11, the valve seat base portion 12, the cover body 9, the cushion body 10 and the like are configured such that the cover body 9 is elastically contacted with the valve seat base portion 12 or the valve body base portion 11 by the cushion body 10 so that the fluid is formed. As long as the passage is opened / closed, any form other than that shown in the above embodiments may be used.
【００１７】次に、本発明に係る流体制御器の作動を弁
体６側にカバー体９及びクッション体１０を設けた場合
について説明する。駆動部５によってステム４が作動さ
れ、弁体６が下降すると、先ず金属薄膜製カバー体９が
弁座７へ当接する。次に、引き続きステム４が僅かな距
離だけ下降されることにより、カバー体９は弾力性を有
するクッション体１０を介して弁座７上へ押圧され、カ
バー９の外表面は弁座７の外表面の形状に沿って僅かに
変形した状態で当座する。これにより流体通路が密閉さ
れる。この時、カバー体９は金属の薄膜により形成され
ているため、弁座７の外表面へ無理なく接当し、所謂馴
染みのよい高い密着性が得られる。又、カバー体９はク
ッション体１０を介して弾性的に弁座７へ接当し、比較
的大きな面圧が加わった場合でも弁座７やカバー体９の
外表面に打痕等の傷が付かないうえ、摩擦による微粒粉
塵の発生も皆無となる。弁体６を引き上げることによ
り、先ず面圧の印加により若干弾性変形されていたカバ
ー体９と内部のクッション体１０が夫々当初の形状に復
元する。引き続き弁体６を引き上げることにより、カバ
ー体９が弁座基部１２から離れ、流体通路が開放され
る。Next, the operation of the fluid controller according to the present invention will be described for the case where the cover 9 and the cushion 10 are provided on the valve 6 side. When the stem 4 is actuated by the drive unit 5 and the valve body 6 is lowered, first, the metal thin-film cover body 9 comes into contact with the valve seat 7. Next, by continuing to lower the stem 4 by a small distance, the cover body 9 is pressed onto the valve seat 7 via the elastic cushion body 10, and the outer surface of the cover 9 is moved outside the valve seat 7. It sits slightly deformed along the shape of the surface. This seals the fluid passage. At this time, since the cover body 9 is formed of a thin metal film, the cover body 9 is brought into contact with the outer surface of the valve seat 7 without difficulty, and so-called familiar and high adhesion is obtained. Further, the cover body 9 elastically contacts the valve seat 7 via the cushion body 10, and even when a relatively large surface pressure is applied, scratches such as dents are formed on the outer surfaces of the valve seat 7 and the cover body 9. In addition, there is no generation of fine dust due to friction. When the valve body 6 is pulled up, first, the cover body 9 and the inner cushion body 10 which have been slightly elastically deformed by the application of the surface pressure are restored to their original shapes. By continuing to pull up the valve body 6, the cover body 9 is separated from the valve seat base 12, and the fluid passage is opened.
【００１８】[0018]
【発明の効果】本発明に於いては、流体制御器のシート
部Ａを形成する弁体６若しくは弁座７を、弁体基部１１
若しくは弁座基部１２と、弁体基部１１若しくは弁座基
部１２の外表面を覆う金属薄膜製のカバー体９と、弁体
基部１１若しくは弁座基部１２とカバー体９との間へ介
設した弾性材製のクッション体１０とより形成する構成
としているため、次の様な秀れた効用が奏される。 （１） 金属薄膜製のカバー体としているため、接触部
の馴染みが良く、適度のシート面圧を加えることによ
り、高いシール性を確保することが出来ると共に、クッ
ション体の弾性力により、面圧を取り除けばカバー体は
元の形態に容易に復元し、シール性が阻害されることは
全く無い。 （２） 金属薄膜製のカバー体が弾性をもってリフトに
弁座面（若しくは弁体側）へ接当するため、弁座面等に
傷が付き難く、シート部の耐久性が著しく向上すると共
に、摩擦による微粒粉塵の発生も殆ど無く、クリーン性
が著しく向上する。 （３） 金属薄膜製のカバー体によってクッション体が
ゴム等の場合でも内部ガスの放出が完全に遮断され、真
空装置へ適用した場合でもガス放出による真空度の低下
は全く起こらない。 （４） 金属薄膜製のカバー体によって弁体基部１１若
しくは弁座基部１２が完全に覆われているため、従前の
樹脂・金属の組合せに係るシート部Ａのように組合せ隙
間が生ずることは全く無く、所謂ガス置換性が著しく向
上すると共に、流体の種類とは関係なしにクッション体
の材質を選定することが出来る。 （５） 金属薄膜は比較的表面処理や成形加工が容易で
あり、その結果安価に高精度なシート部Ａを形成するこ
とが出来ると共に、高温にも容易に耐えることが出来
る。 （６） カバー体の形状が比較的簡単なため、加工性の
点から使用する金属薄膜の材質に制約を受けることは殆
ど無く、流体の種類に応じて適宜に金属薄膜の材質を選
定することが出来る。 （７） 比較的低い面圧で高いシール性が得られるた
め、流体制御器の駆動系の大幅な小形化が可能となる。 本件発明は上述のとおり、秀れた実用的効用を奏するも
のである。According to the present invention, the valve 6 or the valve seat 7 forming the seat portion A of the fluid controller is replaced with the valve base 11.
Alternatively, a cover body 9 made of a metal thin film that covers the outer surface of the valve seat base 12, the valve body base 11 or the valve seat base 12, and the valve body base 11 or the valve seat base 12 and the cover body 9 are interposed. Since it is configured to be formed with the cushion body 10 made of an elastic material, the following excellent effects are achieved. (1) Since the cover member is made of a metal thin film, the contact portion is well adapted and a high sealing property can be secured by applying an appropriate sheet surface pressure. When the cover is removed, the cover body is easily restored to the original shape, and the sealing property is not impaired at all. (2) Since the cover body made of a metal thin film elastically contacts the lift against the valve seat surface (or the valve body side), the valve seat surface and the like are hardly damaged, and the durability of the seat portion is remarkably improved, and the friction is increased. There is almost no generation of fine dust, and cleanness is significantly improved. (3) Even when the cushion body is made of rubber or the like, the release of the internal gas is completely shut off by the cover body made of the metal thin film, and the degree of vacuum does not decrease at all due to the gas release even when applied to a vacuum device. (4) Since the valve body base 11 or the valve seat base 12 is completely covered by the cover member made of a metal thin film, there is absolutely no formation of a combination gap as in the case of the sheet portion A according to the conventional combination of resin and metal. In addition, the so-called gas displacement property is remarkably improved, and the material of the cushion body can be selected regardless of the type of the fluid. (5) The metal thin film can be relatively easily subjected to surface treatment and molding, and as a result, a highly accurate sheet portion A can be formed at low cost and can easily withstand high temperatures. (6) Since the shape of the cover is relatively simple, there is almost no restriction on the material of the metal thin film to be used from the viewpoint of workability, and the material of the metal thin film is appropriately selected according to the type of fluid. Can be done. (7) Since a high sealing property can be obtained with a relatively low surface pressure, the drive system of the fluid controller can be significantly reduced in size. As described above, the present invention has excellent practical utility.
【図１】本発明の第１実施例に係る流体制御器の縦断面
図である。FIG. 1 is a longitudinal sectional view of a fluid controller according to a first embodiment of the present invention.
【図２】本発明の第２実施例に係る流体制御器のシート
部Ａを示す断面図である。FIG. 2 is a sectional view showing a seat portion A of a fluid controller according to a second embodiment of the present invention.
【図３】本発明の第３実施例に係る流体制御器のシート
部Ａを示す断面図である。FIG. 3 is a sectional view showing a seat section A of a fluid controller according to a third embodiment of the present invention.
【図４】本発明の第４実施例に係る流体制御器のシート
部Ａを示す断面図である。FIG. 4 is a sectional view showing a seat portion A of a fluid controller according to a fourth embodiment of the present invention.
【図５】本発明の第５実施例に係る流体制御器のシート
部Ａを示す断面図である。FIG. 5 is a sectional view showing a seat portion A of a fluid controller according to a fifth embodiment of the present invention.
【図６】本発明の第６実施例に係る流体制御器のシート
部Ａを示す断面図である。FIG. 6 is a sectional view showing a seat portion A of a fluid controller according to a sixth embodiment of the present invention.
【図７】本発明の第７実施例に係る流体制御器のシート
部Ａを示す断面図である。FIG. 7 is a sectional view showing a seat portion A of a fluid controller according to a seventh embodiment of the present invention.
【図８】本発明の第８実施例に係る流体制御器のシート
部Ａを示す断面図である。FIG. 8 is a sectional view showing a seat portion A of a fluid controller according to an eighth embodiment of the present invention.
【図９】従前の金属同士の組合せに係るシート部の説明
図である。FIG. 9 is an explanatory diagram of a sheet portion related to a combination of conventional metals.
【図１０】従前の金属同士の組合せに係る他のシート部
の説明図である。FIG. 10 is an explanatory diagram of another sheet portion related to a combination of conventional metals.
【図１１】従前の金属同士の組合せに係る更に他のシー
ト部の説明図である。FIG. 11 is an explanatory diagram of still another sheet portion related to a combination of conventional metals.
Ａはシート部、１は弁箱、２はボンネット、３はボンネ
ットナット、４はステム、５は駆動部、６は弁体、７は
弁座、８は作動用流体、９は金属薄膜製のカバー体、１
０はクッション体、１１は弁体基部、１２は弁座基部。A is a seat portion, 1 is a valve box, 2 is a bonnet, 3 is a bonnet nut, 4 is a stem, 5 is a driving portion, 6 is a valve body, 7 is a valve seat, 8 is a working fluid, and 9 is a metal thin film. Cover body, 1
0 is a cushion body, 11 is a valve body base, and 12 is a valve seat base.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭61−282673（ＪＰ，Ａ) 実開 平３−107588（ＪＰ，Ｕ) 実開 昭52−55771（ＪＰ，Ｕ) 実開 平３−98377（ＪＰ，Ｕ) (58)調査した分野(Int.Cl.7，ＤＢ名) F16K 1/36 F16K 31/122 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-61-282673 (JP, A) JP-A 3-107588 (JP, U) JP-A 52-55771 (JP, U) 98377 (JP, U) (58) Field surveyed (Int. Cl. 7 , DB name) F16K 1/36 F16K 31/122
Claims (2)
部（Ａ）を備えた流体制御器に於いて、弁座（７）へ当
座する弁体（６）を弁体基部（１１）と、弁体基部（１
１）の外表面を覆い前記弁座（７）へ接当する金属薄膜
製の皿状のカバー体（９）と、前記弁体基部（１１）と
カバー体（９）との間へ介設したゴム又は合成樹脂材製
のディスク状のクッション体（１０）とより形成したこ
とを特徴とする流体制御器。In a fluid controller provided with a seat portion (A) comprising a valve body (6) and a valve seat (7), a valve body (6) abutting on a valve seat (7) is connected to a valve body base. (11) and the valve element base (1
(1) a cover plate (9) made of a metal thin film that covers the outer surface and contacts the valve seat (7), and is interposed between the valve base (11) and the cover (9). Made of rubber or synthetic resin material
And a disk-shaped cushion body (10).
部（Ａ）を備えた流体制御器に於いて、弁体（６）が当
座する弁座（６）を弁座基部（１２）と、弁座基部（１
２）の外表面を覆い前記弁体（６）が接当する水平部を
備えた金属薄膜製のカバー体（９）と、前記弁座基部
（１２）とカバー体（９）との間へ介設したゴム又は合
成樹脂製のクッション体（１０）とより形成したことを
特徴とする流体制御器。2. A fluid controller provided with a seat portion (A) comprising a valve element (6) and a valve seat (7), wherein a valve seat (6) on which the valve element (6) abuts is connected to a valve seat base. (12) and the valve base (1
The horizontal portion covering the outer surface of 2) and contacting the valve element (6)
A cover member (9) made of a metal thin film provided, and a rubber member or a cover member interposed between the valve seat base (12) and the cover member (9).
A fluid controller comprising a cushion body (10) made of synthetic resin .
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3049150A JP3017816B2 (en) | 1991-02-20 | 1991-02-20 | Fluid controller |
| EP92300450A EP0500207B1 (en) | 1991-02-20 | 1992-01-17 | Fluid flow controller |
| DE69212609T DE69212609T2 (en) | 1991-02-20 | 1992-01-17 | Flow controller |
| SG1996001125A SG44502A1 (en) | 1991-02-20 | 1992-01-17 | Fluid flow controller |
| US07/832,343 US5178366A (en) | 1991-02-20 | 1992-02-07 | Valve seal |
| CA002060984A CA2060984C (en) | 1991-02-20 | 1992-02-11 | Fluid flow controller |
| KR1019920002322A KR970002000B1 (en) | 1991-02-20 | 1992-02-17 | Fluid flow controller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3049150A JP3017816B2 (en) | 1991-02-20 | 1991-02-20 | Fluid controller |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05118447A JPH05118447A (en) | 1993-05-14 |
| JP3017816B2 true JP3017816B2 (en) | 2000-03-13 |
Family
ID=12823071
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3049150A Expired - Fee Related JP3017816B2 (en) | 1991-02-20 | 1991-02-20 | Fluid controller |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US5178366A (en) |
| EP (1) | EP0500207B1 (en) |
| JP (1) | JP3017816B2 (en) |
| KR (1) | KR970002000B1 (en) |
| CA (1) | CA2060984C (en) |
| DE (1) | DE69212609T2 (en) |
| SG (1) | SG44502A1 (en) |
Families Citing this family (37)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5295662A (en) * | 1991-08-26 | 1994-03-22 | Masako Kiyohara | Fluid flow-controller with improved diaphragm |
| US5433710A (en) * | 1993-03-16 | 1995-07-18 | Minimed, Inc. | Medication infusion pump with fluoropolymer valve seat |
| JPH07102387A (en) * | 1993-10-01 | 1995-04-18 | Fuji Electric Co Ltd | Mechanism parts and formation of film thereon |
| JPH07102383A (en) * | 1993-10-01 | 1995-04-18 | Fuji Electric Co Ltd | Mechanism element |
| WO1996000095A1 (en) * | 1994-06-23 | 1996-01-04 | Minimed Inc. | Medication infusion pump with fluoropolymer valve seat |
| TW342429B (en) * | 1995-07-14 | 1998-10-11 | Tadahiro Omi | Fluid control system and valve used in it |
| US6443942B2 (en) | 1996-11-01 | 2002-09-03 | Minimed, Inc. | Medication device with protein stabilizing surface coating |
| US6000416A (en) * | 1997-06-04 | 1999-12-14 | Furon Company | Compact valve with rolling diaphragm poppet |
| US5967173A (en) * | 1997-07-14 | 1999-10-19 | Furon Corporation | Diaphragm valve with leak detection |
| US6086039A (en) * | 1999-04-07 | 2000-07-11 | Saint-Gobain Performance Plastics Corporation | High-efficiency poppet and seat assembly |
| US6896238B2 (en) * | 2000-04-20 | 2005-05-24 | Agilent Technologies, Inc. | Extended range diaphragm valve and method for making same |
| KR100437721B1 (en) * | 2001-06-28 | 2004-06-26 | 탱크테크 (주) | Safety valve of tank for storing and carrying oil or chemical substance |
| DE10153142A1 (en) * | 2001-10-27 | 2003-05-22 | Itw Oberflaechentechnik Gmbh | Valve needle, in particular for spray coating liquid |
| BR0206232B1 (en) * | 2001-10-29 | 2014-11-04 | Bermad Ltd Partnership | ROLLING DIAPHRAGM CONTROL VALVE |
| US9492111B2 (en) * | 2002-04-22 | 2016-11-15 | Medtronic Minimed, Inc. | Methods and materials for stabilizing analyte sensors |
| US7813780B2 (en) | 2005-12-13 | 2010-10-12 | Medtronic Minimed, Inc. | Biosensors and methods for making and using them |
| US20070227907A1 (en) * | 2006-04-04 | 2007-10-04 | Rajiv Shah | Methods and materials for controlling the electrochemistry of analyte sensors |
| DE10246230A1 (en) | 2002-10-04 | 2004-04-29 | Robert Bosch Gmbh | Injector and process for its manufacture |
| US9237865B2 (en) * | 2002-10-18 | 2016-01-19 | Medtronic Minimed, Inc. | Analyte sensors and methods for making and using them |
| US20040074785A1 (en) * | 2002-10-18 | 2004-04-22 | Holker James D. | Analyte sensors and methods for making them |
| US20050272989A1 (en) * | 2004-06-04 | 2005-12-08 | Medtronic Minimed, Inc. | Analyte sensors and methods for making and using them |
| US7140591B2 (en) * | 2003-07-02 | 2006-11-28 | Ocenco, Inc. | Post valve having an annular valve seat |
| DE102004024215A1 (en) * | 2004-05-15 | 2005-12-08 | L'orange Gmbh | control valve |
| JP5138863B2 (en) * | 2004-12-10 | 2013-02-06 | Ｃｋｄ株式会社 | Diaphragm valve |
| US8660628B2 (en) * | 2009-12-21 | 2014-02-25 | Medtronic Minimed, Inc. | Analyte sensors comprising blended membrane compositions and methods for making and using them |
| KR101800924B1 (en) | 2011-02-02 | 2017-11-23 | 시케이디 가부시키가이샤 | Vacuum control valve, vacuum control apparatus, and computer readable recording medium |
| JP5993191B2 (en) * | 2012-04-23 | 2016-09-14 | Ckd株式会社 | Linear actuator, vacuum control device and computer program |
| KR102181634B1 (en) * | 2014-06-11 | 2020-11-24 | 현대모비스 주식회사 | Solenoid valve |
| JP6193955B2 (en) * | 2014-12-11 | 2017-09-06 | Ckd株式会社 | Fluid control valve |
| DE102015203486A1 (en) * | 2015-02-26 | 2016-09-01 | Minimax Gmbh & Co. Kg | Valve for switching fluids, extinguishing system and process |
| EP3354946B1 (en) * | 2015-08-05 | 2020-11-25 | Kabushiki Kaisha Fujikin | Valve |
| WO2019154342A1 (en) * | 2018-02-11 | 2019-08-15 | 浙江盾安机械有限公司 | Electronic expansion valve |
| KR102011940B1 (en) * | 2018-02-27 | 2019-08-19 | 동아대학교 산학협력단 | Check valve for bending section using multiful spring tension |
| KR102094484B1 (en) * | 2018-10-23 | 2020-03-27 | 엠티에이치콘트롤밸브(주) | Lift check valve |
| KR102193789B1 (en) * | 2020-07-29 | 2020-12-22 | (주)엠엑스앤 | Electrolyte valve |
| KR20220020629A (en) | 2020-08-12 | 2022-02-21 | 배동균 | centrifugal pump |
| NL2029450B1 (en) * | 2021-10-18 | 2023-05-19 | Berkin Bv | Fluid flow device, comprising a flow control device with a sealing portion provided with a non-stick layer having one or more discontinuities. |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB190512461A (en) * | 1905-06-15 | 1905-08-17 | John Mc Kirdy | An Improved Scraper for Cleaning Ship's Decks, Hulls, and the like. |
| US1427680A (en) * | 1918-09-26 | 1922-08-29 | George J Uckotter | Valve |
| US1527154A (en) * | 1920-03-23 | 1925-02-17 | American Radiator Co | Packless valve |
| DE690379C (en) * | 1935-04-28 | 1940-04-24 | Schaeffer & Budenberg G M B H | Sealing for shut-off valves, gate valves or the like for high pressures and temperatures |
| DE659838C (en) * | 1937-02-05 | 1938-05-11 | Aeg | Control valve for electrical pressure gas switch |
| US2402950A (en) * | 1943-04-13 | 1946-07-02 | Merlyn M Culver | Molded part and method of forming same |
| US2519541A (en) * | 1947-11-08 | 1950-08-22 | Fluid Control Engineering Co | Valve construction |
| US3399695A (en) * | 1966-11-25 | 1968-09-03 | Theodore A. Stehlin | Valve including elastomeric boot with sealing ring |
| US3508739A (en) * | 1968-10-17 | 1970-04-28 | Nasa | Metal valve pintle with encapsulated elastomeric body |
| CA1017314A (en) * | 1973-12-05 | 1977-09-13 | Werner K. Priese | Pressure loaded sealing arrangement |
| US4126295A (en) * | 1976-09-22 | 1978-11-21 | International Telephone And Telegraph Corporation | Ball valve having metal seat rings |
| DE2724790A1 (en) * | 1977-05-27 | 1978-11-30 | Realmeca | Removable valve seat assembly - has annular member held in position by collar in housing |
| FR2509003B1 (en) * | 1981-07-01 | 1985-07-05 | Cefilac | GASKET FOR HIGH OR LOW TEMPERATURES IN STATIC OR DYNAMIC CONDITIONS |
-
1991
- 1991-02-20 JP JP3049150A patent/JP3017816B2/en not_active Expired - Fee Related
-
1992
- 1992-01-17 SG SG1996001125A patent/SG44502A1/en unknown
- 1992-01-17 DE DE69212609T patent/DE69212609T2/en not_active Expired - Fee Related
- 1992-01-17 EP EP92300450A patent/EP0500207B1/en not_active Expired - Lifetime
- 1992-02-07 US US07/832,343 patent/US5178366A/en not_active Expired - Lifetime
- 1992-02-11 CA CA002060984A patent/CA2060984C/en not_active Expired - Fee Related
- 1992-02-17 KR KR1019920002322A patent/KR970002000B1/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR970002000B1 (en) | 1997-02-20 |
| CA2060984C (en) | 1997-03-25 |
| DE69212609D1 (en) | 1996-09-12 |
| CA2060984A1 (en) | 1992-08-21 |
| DE69212609T2 (en) | 1997-03-27 |
| EP0500207A3 (en) | 1992-10-07 |
| JPH05118447A (en) | 1993-05-14 |
| KR920016921A (en) | 1992-09-25 |
| US5178366A (en) | 1993-01-12 |
| EP0500207A2 (en) | 1992-08-26 |
| SG44502A1 (en) | 1997-12-19 |
| EP0500207B1 (en) | 1996-08-07 |
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