JP3006111B2 - Method of manufacturing piezoelectric actuator element for pulse droplet deposition device - Google Patents
Method of manufacturing piezoelectric actuator element for pulse droplet deposition deviceInfo
- Publication number
- JP3006111B2 JP3006111B2 JP3043406A JP4340691A JP3006111B2 JP 3006111 B2 JP3006111 B2 JP 3006111B2 JP 3043406 A JP3043406 A JP 3043406A JP 4340691 A JP4340691 A JP 4340691A JP 3006111 B2 JP3006111 B2 JP 3006111B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- ink
- actuator element
- piezoelectric actuator
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/10—Finger type piezoelectric elements
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、パルス滴付着装置用圧
電アクチュエータ素子の製造方法に関し、例えば、圧電
素子のせん断変形を利用したパルス滴インクジェットプ
リンタヘッド用圧電アクチュエータ素子の製造方法に関
するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a piezoelectric actuator element for a pulse droplet applying apparatus, and more particularly to a method for manufacturing a piezoelectric actuator element for a pulse droplet ink jet printer head utilizing shear deformation of a piezoelectric element. .
【０００２】[0002]
【従来の技術】従来、圧電素子のせん断変形を利用した
パルス滴付着装置の構成及び製造方法について特開昭６
３ー２４７０５１号公報に記載されている。該パルス滴
付着装置及び圧電アクチュエータ素子の構成例を図５に
示す。このパルス滴付着装置は多数のインク噴射孔４１
を有する液滴噴射ノズルプレート４２と、該ノズルプレ
ートが接続された多数のインク溝４３（圧力チャンバ
ー）と側面４４に駆動用電極が形成された圧電材料から
なるせん断変形圧電アクチュエータ４５と、インク補充
のための給液機構（図示せず）から構成されている。上
記パルス滴付着装置は駆動電極に電界を印加すると圧電
材料がせん断変形を起こしインク溝の容積変化をひきお
こす。その結果としてインク溝中の液圧が変化しノズル
プレートの噴射孔からインクが噴射される。2. Description of the Related Art Heretofore, a configuration and a manufacturing method of a pulse droplet deposition apparatus utilizing shear deformation of a piezoelectric element have been disclosed in Japanese Patent Application Laid-Open No. Sho 6 (1994).
No. 3,247,051. FIG. 5 shows a configuration example of the pulse droplet deposition device and the piezoelectric actuator element. This pulse droplet deposition device has a large number of ink ejection holes 41.
A nozzle plate 42 having a plurality of ink grooves 43 (pressure chambers) to which the nozzle plate is connected, a shear deformation piezoelectric actuator 45 made of a piezoelectric material having driving electrodes formed on side surfaces 44, and ink replenishment. And a liquid supply mechanism (not shown). When an electric field is applied to the drive electrode, the above-described pulse droplet deposition apparatus causes a shear deformation of the piezoelectric material, causing a change in volume of the ink groove. As a result, the liquid pressure in the ink groove changes, and ink is ejected from the ejection holes of the nozzle plate.
【０００３】複数個のインク溝を有する圧電アクチュエ
ータの製造方法としては、基板上に接合された圧電材料
または圧電材料そのものにダイアモンドカッターブレー
ドや、レーザ等を用いてインク溝を形成するという方法
が提示されていた。この様な圧電アクチュエータ素子を
インクジェットプリンタヘッドに応用する場合インク噴
射ノズル孔の集積度を向上させるためにはインク溝を高
精度に多数個形成する必要があった。また圧電材料のせ
ん断変形を有効に利用するには圧電材料の壁の幅寸法に
対して高さ寸法を大きくする必要があった。As a method of manufacturing a piezoelectric actuator having a plurality of ink grooves, there is proposed a method of forming ink grooves in a piezoelectric material bonded to a substrate or in a piezoelectric material itself using a diamond cutter blade, a laser, or the like. It had been. When such a piezoelectric actuator element is applied to an ink jet printer head, it is necessary to form a large number of ink grooves with high precision in order to improve the degree of integration of ink jet nozzle holes. Further, in order to effectively utilize the shear deformation of the piezoelectric material, it was necessary to make the height dimension larger than the width dimension of the piezoelectric material wall.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、上記で
示したダイアモンドカッターブレードや、レーザ等を用
いてインク溝を形成するという方法では、圧電材料のせ
ん断変形に有効な深いインク溝を加工する場合、製造方
法として極めて能率が低く、また加工による歩留りが悪
い上、寸法・ピッチ精度的にも要求を満足することは困
難であった。However, in the above-described method of forming ink grooves using a diamond cutter blade, a laser, or the like, when deep ink grooves effective for shear deformation of a piezoelectric material are processed, It is extremely inefficient as a manufacturing method, the yield by processing is poor, and it is difficult to satisfy the requirements in terms of dimensions and pitch accuracy.
【０００５】本発明は、上述した問題点を解決するため
になされたものであり、インク溝の集積度が高く圧電材
料のせん断変形が有効利用できる形状を有するインクジ
ェットプリンタヘッド用圧電アクチュエータ素子を安価
に製造する方法を提示することを目的とする。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and it is an inexpensive piezoelectric actuator element for an ink jet printer head having a high degree of integration of ink grooves and a shape capable of effectively utilizing the shear deformation of a piezoelectric material. The purpose of the present invention is to provide a manufacturing method.
【０００６】[0006]
【課題を解決するための手段】この目的を達成するため
に本発明の製造方法は圧電材料とインク溝形成材料が交
互に複数枚積層された積層体を製造する工程と、該積層
体を所望の形状に加工し基板上に接合する工程と、該基
板上に接合された積層体中の複数のインク溝形成材料を
除去する工程からなる。In order to achieve this object, a manufacturing method according to the present invention comprises the steps of manufacturing a laminate in which a plurality of piezoelectric materials and ink groove forming materials are alternately laminated, and And bonding to the substrate, and removing a plurality of ink groove forming materials in the laminated body bonded to the substrate.
【０００７】[0007]
【作用】上記の工程を有する本発明の製造方法では、圧
電材料とインク溝形成材料が交互に複数枚積層された積
層体を製造する工程にて、圧電材料層とインク溝形成材
料層の厚みを精度良く管理することで後の工程で形成さ
れる複数個の圧電材料の壁とインク溝の寸法精度及びピ
ッチ精度が確保される。前工程で製造された積層体を所
望の形状に加工し基板上に接合する工程では、圧電材料
とインク溝形成材料が一体化された状態で接合されるの
で双方の寸法精度及びピッチ精度は保存される。また大
きな接合面積にて良好な接合が実施されるため圧電材料
と基板の間に圧電材料にせん断変形を発生させる場合に
十分な強度を有する固定端が実現できる。また基板上に
接合された積層体中の複数のインク溝形成材料を除去す
る工程ではインク溝の形成を機械加工やレーザ加工によ
らず、インク溝形成材料の熱的、化学的手法による除去
という方法で実施できるので複数個の圧電材料の壁とイ
ンク溝の寸法精度及びピッチ精度が確保できる。According to the manufacturing method of the present invention having the above steps, in the step of manufacturing a laminate in which a plurality of piezoelectric materials and ink groove forming materials are alternately stacked, the thickness of the piezoelectric material layer and the ink groove forming material layer is changed. By precisely managing the dimensional accuracy and the pitch accuracy of the walls and the ink grooves of the plurality of piezoelectric materials formed in a later step, are ensured. In the process of processing the laminate manufactured in the previous process into a desired shape and joining it on the substrate, the piezoelectric material and the ink groove forming material are joined in an integrated state, so both dimensional accuracy and pitch accuracy are preserved Is done. In addition, since good bonding is performed with a large bonding area, a fixed end having sufficient strength can be realized when shear deformation occurs in the piezoelectric material between the piezoelectric material and the substrate. In the step of removing the plurality of ink groove forming materials in the laminated body bonded on the substrate, the formation of the ink grooves is performed by thermal or chemical removal of the ink groove forming material without using mechanical processing or laser processing. Since this method can be used, the dimensional accuracy and pitch accuracy of the plurality of piezoelectric material walls and ink grooves can be ensured.
【０００８】[0008]
【実施例】以下、本発明を具体化した一実施例を図面を
参照して説明する。図１から図４に本実施例の製造工程
を示す。図１は圧電材料２とインク溝形成材料３が交互
に積層された積層体を示す。圧電材料２として厚み方向
（０．２ｍｍ方向）に分極処理された１６×１６×０．
２ｍｍ寸法のＴｏｋｉｎ製圧電セラミックス板（材質Ｎ
−２１）を用いた。この圧電セラミックス板の１６×１
６ｍｍの両面全体にインク溝形成材料３としてアクリル
系樹脂をスクリーン印刷法にて０．０６ｍｍの厚みに形
成した。該インク溝形成材料３の形成された圧電セラミ
ックス板を４９枚積層し接着治具（図示せず）中にて８
０℃３０ｍｉｎ熱処理した。こうして厚み０．２ｍｍで
ある４９層の圧電セラミックス層と厚み０．１ｍｍであ
る４８層のインク溝形成材料としてのアクリル樹脂層に
て構成された外形寸法１６×１６×１６ｍｍの積層体１
を得た。DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. 1 to 4 show the manufacturing process of this embodiment. FIG. 1 shows a laminate in which piezoelectric materials 2 and ink groove forming materials 3 are alternately laminated. As the piezoelectric material 2, a 16 × 16 × 0.1 polarized in the thickness direction (0.2 mm direction).
Tokin piezoelectric ceramic plate of 2 mm size (material N
-21) was used. 16 × 1 of this piezoelectric ceramic plate
An acrylic resin as the ink groove forming material 3 was formed to a thickness of 0.06 mm by screen printing on the entire surface of 6 mm. Forty-nine piezoelectric ceramic plates on which the ink groove forming material 3 has been formed are laminated, and are stacked in an adhesive jig (not shown).
Heat treatment was performed at 0 ° C. for 30 minutes. Thus, a laminate 1 having an outer dimension of 16 × 16 × 16 mm constituted by 49 piezoelectric ceramic layers having a thickness of 0.2 mm and 48 acrylic resin layers as ink groove forming materials having a thickness of 0.1 mm.
I got
【０００９】図２は切断された積層体を基板上に接着し
た状態を示す。前の工程で得られた積層体１は、積層方
向と垂直方向に０．４ｍｍの厚みに切断砥石を用いて切
断され、厚み０．４ｍｍのアルミナセラミックス製の基
板６に接着層７を介して接着し接合体１０とされた。接
着剤としてはエポキシ系加熱硬化型接着剤を用い１００
℃３０ｍｉｎの熱処理で強固に接着した。FIG. 2 shows a state where the cut laminate is adhered to a substrate. The laminate 1 obtained in the previous step is cut in a direction perpendicular to the lamination direction to a thickness of 0.4 mm using a cutting grindstone, and is attached to a 0.4 mm-thick alumina ceramic substrate 6 via an adhesive layer 7. The bonded body 10 was bonded. As the adhesive, an epoxy-based heat-curable adhesive is used and 100
Bonded firmly by heat treatment at ℃ 30 min.
【００１０】上記接合体を溶剤としてアセトンを用いる
ことでインク溝形成材料としてのアクリル樹脂層を完全
に溶出した。こうして４９個の０．２×０．４×１６ｍ
ｍ寸法の圧電セラミックスの壁と４８個の０．１×０．
４×１６ｍｍのインク溝が形成された圧電素子１１を得
た。By using acetone as a solvent for the above-mentioned bonded body, an acrylic resin layer as an ink groove forming material was completely eluted. Thus 49 pieces of 0.2 × 0.4 × 16m
m-sized piezoelectric ceramic wall and 48 0.1 × 0.
A piezoelectric element 11 having a 4 × 16 mm ink groove was obtained.
【００１１】図３は駆動電極が形成されたインクジェッ
トプリンタヘッド用圧電アクチュエータ素子である。イ
ンク溝が形成された上記圧電素子の圧電セラミックス壁
の側面以外の部分にマスキングを行ったのち駆動電極材
料としてニッケルをスパッタした。マスキング材と共に
不要部分のニッケルスッパタ膜を除去することで側面に
駆動電極９を形成した。得られたインクジェットプリン
タヘッド用圧電アクチュエータ素子１２は１６×１６×
０．８ｍｍの外形寸法を有し１６×１６ｍｍの面に幅
０．２ｍｍ高さ０．４ｍｍ長さ１６ｍｍで幅方向ピッチ
０．３ｍｍの４９個の圧電セラミックスの平行な壁が形
成されている。該圧電セラミックス壁は、分極方向５が
厚み（高さ）方向であり駆動電極が圧電セラミックス壁
の側面両面に形成されているので分極方向と駆動電界方
向が直交する方向になっている。そのため駆動電界印加
時には圧電セラミックス壁はせん断変形を発生する。ま
た圧電セラミックス壁の幅寸法と厚み（高さ）寸法の比
は２となり効率のよいせん断変形が起こる。平行な圧電
セラミックス壁の間に形成された溝がインク溝（インク
のマルチ流路）となる。従ってインク溝はインクジェッ
トプリンタヘッド用圧電アクチュエータ素子の１６×１
６ｍｍの面に幅０．１ｍｍ深さ０．４ｍｍ長さ１６ｍｍ
で幅方向ピッチ０．３ｍｍに４８個形成されていること
になる。該インク溝の形状寸法及び容積は圧電セラミッ
クス壁の側面に形成された駆動電極に電界が印加される
ことにより生ずる圧電セラミックス壁のせん断変形で変
化し、インク溝中のインクの液圧が変化する。その結果
としてインクの噴射が行われることとなる。FIG . 3 shows a piezoelectric actuator element for an ink jet printer head on which drive electrodes are formed. After masking was performed on portions other than the side surfaces of the piezoelectric ceramic wall of the piezoelectric element in which the ink grooves were formed, nickel was sputtered as a drive electrode material. The drive electrode 9 was formed on the side surface by removing an unnecessary portion of the nickel sputtering film together with the masking material. The obtained piezoelectric actuator element 12 for an ink jet printer head is 16 × 16 ×
Forty-eight parallel walls of piezoelectric ceramics having an outer dimension of 0.8 mm, a width of 0.2 mm, a height of 0.4 mm, a length of 16 mm and a pitch of 0.3 mm in the width direction are formed on a 16 × 16 mm surface. In the piezoelectric ceramic wall, the polarization direction 5 is the thickness (height) direction and the drive electrodes are formed on both side surfaces of the piezoelectric ceramic wall, so that the polarization direction and the drive electric field direction are orthogonal to each other. Therefore, when a driving electric field is applied, the piezoelectric ceramic wall undergoes shear deformation. In addition, the ratio of the width dimension to the thickness (height) dimension of the piezoelectric ceramic wall is 2, and efficient shear deformation occurs. The groove formed between the parallel piezoelectric ceramic walls becomes an ink groove (multi-channel of ink). Therefore, the ink groove is 16 × 1 of the piezoelectric actuator element for the ink jet printer head.
0.1mm width, 0.4mm depth, 16mm length on 6mm surface
This means that 48 pieces are formed at a pitch of 0.3 mm in the width direction. The shape and size of the ink groove change due to the shear deformation of the piezoelectric ceramic wall caused by the application of an electric field to the drive electrode formed on the side surface of the piezoelectric ceramic wall, and the ink pressure in the ink groove changes. . As a result, ink is ejected.
【００１２】本実施例の製造工程では分極された圧電セ
ラミックスに１００℃程度の熱が加わる。一般に圧電材
料は強誘電性を消失する温度（キュリー温度）が存在
し、いったん分極処理された圧電材料がキュリー温度以
上の温度にさらされると分極がはずれてしまう。圧電材
料のせん断変形を利用したこのような圧電アクチュエー
タ素子ではインクジェットプリンタヘッド用圧電アクチ
ュエータ素子としてプリンタヘッドに組み込んでしまっ
た場合再度分極処理を施すことはきわめて困難である。
しかし本実施例で用いた圧電セラミックス材料はキュリ
ー温度が約３００℃と高く製造工程中の熱処理及び素子
駆動時の発熱に対し安定であり初期の分極状態がほとん
ど維持されている。他の実施例を図面を参照して説明す
る。図４に前記の方法とは異なった方法にて形成された
積層体を示す。その製造方法は圧電材料２として厚み方
向（０．２ｍｍ方向）に分極処理された１６×１６×
０．２ｍｍ寸法のＴｏｋｉｎ製圧電セラミックス板（材
質Ｎ−２１）を用い、該圧電セラミックス板１６×１６
ｍｍの面のコーナー部に１×１×０．１ｍｍのスペーサ
ー材２１をはさみ圧電セラミックス板を４９枚を接着治
具（図示せず）に設置した。これにインク溝形成材料３
として液状のアクリル系樹脂を流し込んだ後８０℃３０
ｍｉｎ熱処理した。こうして厚み０．２ｍｍである４９
層の圧電セラミックス層と厚み０．１ｍｍである４８層
のインク溝形成材料としてのアクリル樹脂層にて構成さ
れた外形寸法１６×１６×１６ｍｍの積層体１を得た。
以下の工程は前実施例に準じて行った。得られたインク
ジェットプリンタヘッド用圧電アクチュエータ素子は精
度のよいスペーサー材２１によってインク溝の幅寸法精
度が決定されるので圧電セラミックス素子に形成された
４８個のインク溝の寸法精度及びピッチ精度は極めて良
好となる。In the manufacturing process of this embodiment, heat of about 100 ° C. is applied to the polarized piezoelectric ceramics. In general, a piezoelectric material has a temperature (Curie temperature) at which ferroelectricity disappears, and once a polarized piezoelectric material is exposed to a temperature equal to or higher than the Curie temperature, polarization is lost. In such a piezoelectric actuator element utilizing the shear deformation of a piezoelectric material, it is extremely difficult to perform a polarization process again when the piezoelectric actuator element is incorporated in a printer head as a piezoelectric actuator element for an ink jet printer head.
However, the piezoelectric ceramic material used in this embodiment has a high Curie temperature of about 300 ° C., and is stable against heat treatment during the manufacturing process and heat generation during element driving, and the initial polarization state is almost maintained. Another embodiment will be described with reference to the drawings. FIG. 4 shows a laminate formed by a method different from the above method. The manufacturing method is as follows. The piezoelectric material 2 is 16 × 16 × polarized in the thickness direction (0.2 mm direction).
A Tokin piezoelectric ceramic plate (material N-21) having a size of 0.2 mm is used, and the piezoelectric ceramic plate 16 × 16
A spacer member 21 of 1 × 1 × 0.1 mm was sandwiched between the corners of a surface having a thickness of 1 mm and 49 piezoelectric ceramic plates were mounted on an adhesive jig (not shown). Add ink groove forming material 3
80 ° C 30 after pouring liquid acrylic resin
min heat treatment. Thus, 49 having a thickness of 0.2 mm
A laminate 1 having an outer dimension of 16 × 16 × 16 mm, which was constituted by a piezoelectric ceramic layer having a thickness of 48 and an acrylic resin layer serving as a 48-layer ink groove forming material having a thickness of 0.1 mm, was obtained.
The following steps were performed according to the previous example. In the obtained piezoelectric actuator element for an ink jet printer head, the dimensional accuracy and pitch accuracy of the 48 ink grooves formed in the piezoelectric ceramic element are extremely good because the width dimension accuracy of the ink groove is determined by the high-precision spacer material 21. Becomes
【００１３】[0013]
【発明の効果】以上説明したことから明かなように、本
発明の製造方法によれば寸法精度及びピッチ精度が良好
な多数個の電圧印加によって効率の良いせん断変形を生
ずる形状寸法比を持った圧電材料の壁とインクの流路及
び圧力チャンバーとして動作するインク溝を有するパル
ス滴付着装置用圧電アクチュエータ素子を機械加工やレ
ーザ加工等による溝加工を施すことなく安価でしかも歩
留り良く製造することができる。As is apparent from the above description, according to the manufacturing method of the present invention, a shape-to-dimension ratio in which efficient shear deformation is generated by applying a large number of voltages having good dimensional accuracy and pitch accuracy is achieved. It is possible to manufacture a piezoelectric actuator element for a pulse droplet deposition apparatus having a piezoelectric material wall, an ink flow path, and an ink groove that operates as a pressure chamber, at low cost and with good yield without performing groove processing such as machining or laser processing. it can.
【図１】第一実施例のインクジェットプリンタヘッド用
圧電アクチュエータ素子の製造工程を示す概略図であ
る。FIG. 1 is a schematic view showing a manufacturing process of a piezoelectric actuator element for an ink jet printer head according to a first embodiment.
【図２】第一実施例のインクジェットプリンタヘッド用
圧電アクチュエータ素子の製造工程を示す概略図であ
る。FIG. 2 is a schematic view illustrating a manufacturing process of the piezoelectric actuator element for an ink jet printer head according to the first embodiment.
【図３】第一実施例のインクジェットプリンタヘッド用
圧電アクチュエータ素子の製造工程を示す概略図であ
る。FIG. 3 is a schematic view illustrating a manufacturing process of the piezoelectric actuator element for an ink jet printer head according to the first embodiment.
【図４】FIG. 4
第二実施例の製造方法で製造された積層体の概Outline of the laminated body manufactured by the manufacturing method of the second embodiment
略図である。It is a schematic diagram.
【図５】FIG. 5
圧電素子のせん断変形を利用したパルス滴付着Pulse drop attachment using shear deformation of piezoelectric element
装置（インクジェットプリンタヘッド）及び圧電アクチDevice (inkjet printer head) and piezoelectric actuator
ュエータ素子の構成例を示す概略図である。It is the schematic which shows the example of a structure of a heater element.
１ 積層体 ２ 圧電材料 ３ インク溝形成材料 ６ 基板 ８ インク溝 ９ 駆動電極 １２ 圧電アクチュエータ素子 DESCRIPTION OF SYMBOLS 1 Laminated body 2 Piezoelectric material 3 Ink groove forming material 6 Substrate 8 Ink groove 9 Drive electrode 12 Piezoelectric actuator element
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭63−247051（ＪＰ，Ａ) 特開 昭63−252750（ＪＰ，Ａ) 特開 平２−150355（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) B41J 2/16 B41J 2/045 B41J 2/055 H01L 41/083 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-63-247051 (JP, A) JP-A-63-252750 (JP, A) JP-A-2-150355 (JP, A) (58) Field (Int.Cl. 7 , DB name) B41J 2/16 B41J 2/045 B41J 2/055 H01L 41/083
Claims (1)
料に電界を印加するための駆動電極からなるパルス滴付
着装置用圧電アクチュエータ素子の製造方法に於て、圧
電材料とインク溝形成材料が交互に複数枚積層された積
層体を製造する工程と、該積層体を所望の形状に加工し
基板上に接合する工程と、該基板上に接合された積層体
中の複数のインク溝形成材料を除去する工程にて製造さ
れることを特徴とするパルス滴付着装置用圧電アクチュ
エータ素子の製造方法1. A method of manufacturing a piezoelectric actuator element for a pulse droplet deposition apparatus comprising a plurality of ink grooves, a piezoelectric material, and a drive electrode for applying an electric field to the piezoelectric material, wherein the piezoelectric material and the ink groove forming material are different from each other. A step of manufacturing a laminate in which a plurality of laminates are alternately laminated; a step of processing the laminate into a desired shape and joining the laminate to a substrate; and a plurality of ink groove forming materials in the laminate joined to the substrate. For manufacturing a piezoelectric actuator element for a pulse droplet deposition apparatus, which is manufactured in a step of removing a liquid droplet
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3043406A JP3006111B2 (en) | 1991-03-08 | 1991-03-08 | Method of manufacturing piezoelectric actuator element for pulse droplet deposition device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3043406A JP3006111B2 (en) | 1991-03-08 | 1991-03-08 | Method of manufacturing piezoelectric actuator element for pulse droplet deposition device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04279354A JPH04279354A (en) | 1992-10-05 |
| JP3006111B2 true JP3006111B2 (en) | 2000-02-07 |
Family
ID=12662876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3043406A Expired - Lifetime JP3006111B2 (en) | 1991-03-08 | 1991-03-08 | Method of manufacturing piezoelectric actuator element for pulse droplet deposition device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3006111B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5235352A (en) * | 1991-08-16 | 1993-08-10 | Compaq Computer Corporation | High density ink jet printhead |
| EP0928688A4 (en) * | 1997-07-03 | 2000-10-18 | Matsushita Electric Ind Co Ltd | Ink jet recording head and method of manufacturing the same |
| JP3849976B2 (en) * | 2001-01-25 | 2006-11-22 | 松下電器産業株式会社 | COMPOSITE PIEZOELECTRIC, ULTRASONIC PROBE FOR ULTRASONIC DIAGNOSTIC DEVICE, ULTRASONIC DIAGNOSTIC DEVICE, AND METHOD FOR PRODUCING COMPOSITE PIEZOELECTRIC |
| JP3857911B2 (en) * | 2001-12-06 | 2006-12-13 | 松下電器産業株式会社 | Composite piezoelectric material and manufacturing method thereof |
-
1991
- 1991-03-08 JP JP3043406A patent/JP3006111B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04279354A (en) | 1992-10-05 |
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