JP3001956B2 - Disk type ultrasonic motor - Google Patents
Disk type ultrasonic motorInfo
- Publication number
- JP3001956B2 JP3001956B2 JP2288686A JP28868690A JP3001956B2 JP 3001956 B2 JP3001956 B2 JP 3001956B2 JP 2288686 A JP2288686 A JP 2288686A JP 28868690 A JP28868690 A JP 28868690A JP 3001956 B2 JP3001956 B2 JP 3001956B2
- Authority
- JP
- Japan
- Prior art keywords
- friction material
- concave portion
- ultrasonic motor
- elastic
- moving body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
【発明の詳細な説明】 産業上の利用分野 本発明は圧電体の弾性振動を用いて駆動力を発生する
円板型調音波モータに関するものである。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a disc-type sonic motor that generates a driving force by using elastic vibration of a piezoelectric body.
従来の技術 近年、圧電セラミック等の圧電体を貼合わせた振動体
に弾性振動を励振し、これを駆動源とした超音波モータ
が、例えばNMR（核磁気共鳴装置）等の強磁場中の駆動
用モータとして注目されている。2. Description of the Related Art In recent years, an elastic vibration is excited in a vibrating body in which a piezoelectric body such as a piezoelectric ceramic is bonded, and an ultrasonic motor using this as a driving source is driven in a strong magnetic field such as an NMR (nuclear magnetic resonance apparatus). It is attracting attention as an application motor.
以下、図面を参照しながら円板型超音波モータの従来
技術について詳細に説明する。Hereinafter, the related art of the disk-type ultrasonic motor will be described in detail with reference to the drawings.
第６図は径方向２次、周方向３次以上の振動モードで
励振される円板型超音波モータの切り欠き斜視図であ
り、円板形の弾性体８に円板形圧電体９を貼り合わせて
振動体６を構成している。振動体６上には円環状に等間
隔に突起体10が設けられている。11は耐磨耗性材料の摩
擦材、12は弾性体であり、互いに貼り合せられて移動体
３を構成している。移動体３は摩擦材11を介して振動体
６と加圧接触している。圧電体９に電界を印加すると振
動体６の周方向に曲げ振動の進行波が励振され、移動体
３を駆動する。尚、同図中の矢印は移動体３の回転方向
を示す。FIG. 6 is a cutaway perspective view of a disk-type ultrasonic motor that is excited in a vibration mode of radial second order and circumferential third or higher, in which a disk-shaped piezoelectric body 9 is mounted on a disk-shaped elastic body 8. The vibrating body 6 is formed by pasting. Protrusions 10 are provided on the vibrator 6 at equal intervals in an annular shape. Numeral 11 denotes a friction material made of an abrasion-resistant material, and numeral 12 denotes an elastic body. The moving body 3 is in pressure contact with the vibrating body 6 via the friction material 11. When an electric field is applied to the piezoelectric body 9, a traveling wave of bending vibration is excited in the circumferential direction of the vibrating body 6 to drive the moving body 3. Note that the arrow in the figure indicates the rotation direction of the moving body 3.
第７図は第６図の円板型超音波モータに使用した圧電
体９の電極構造の一例を示している。同図では円周方向
に４波の弾性波が励振されるようにしてある。電極は図
中に示したように＋＋−−の順序で分極されており、各
電極は４分の１波長（90度）に相当している。この電極
を＋−＋−の順序で接続することによって、位置的およ
び位相的に90度ずれた電極ＡとＢが構成される。FIG. 7 shows an example of the electrode structure of the piezoelectric body 9 used in the disk-type ultrasonic motor of FIG. In the figure, four elastic waves are excited in the circumferential direction. The electrodes are polarized in the order of ++-, as shown, with each electrode corresponding to a quarter wavelength (90 degrees). By connecting these electrodes in the order of +-+-, electrodes A and B which are shifted in position and in phase by 90 degrees are formed.
以上のように構成された円板型超音波モータの圧電体
９の電極ＡおよびＢに V1＝V0×sin（ωｔ） ……（１） V2＝V0×cos（ωｔ） ……（２） ただし、V0 :電圧の瞬時値 ω：角周波数 t :時間 で表される電圧V1およびV2をそれぞれ印加すれば、振動
体６には ξ＝ξ０×（cos（ωｔ）×cos（kx） ＋sin（ωｔ）×sin（kx）） ＝ξ０×cos（ωｔ−kx） ……（３） ただし ξ :曲げ振動の振幅値 ξ0:曲げ振動の瞬時値 k :波数（２π／λ） λ :波長 x :位置 で表せる、円周方向に進行する曲げ振動の進行波が励振
される。V 1 = V 0 × sin (ωt) (1) V 2 = V 0 × cos (ωt) is applied to the electrodes A and B of the piezoelectric body 9 of the disk-type ultrasonic motor configured as described above. (2) where V 0 : instantaneous value of voltage ω: angular frequency t: time If voltages V 1 and V 2 expressed by time are respectively applied, 振動 = ξ 0 × (cos (ωt) × cos (kx) + sin ( ωt) × sin (kx)) = ξ 0 × cos (ωt-kx) ...... (3) where ξ: bending vibration amplitude value ξ 0: bending the instantaneous value k of the vibration wave number ( 2π / λ) λ: wavelength x: position A traveling wave of circumferentially traveling bending vibration, which can be expressed by, is excited.
第８図は振動体６の表面のＡ点が進行波の励起によっ
て、長軸2w、短軸2uの楕円運動をし、振動体３上に加圧
して設置された移動体３が、楕円の頂点近傍で接触する
ことにより、摩擦力により波の進行方向とは逆方向にｖ
＝ω×ｕの速度で運動する様子を示している。FIG. 8 shows that the point A on the surface of the vibrating body 6 performs an elliptical motion of a long axis 2w and a short axis 2u by excitation of a traveling wave, and the moving body 3 placed under pressure on the vibrating body 3 has an elliptical shape. By contact near the vertex, frictional force causes v
= Ω x u.
第９図は、突起体10のない円板において２次振動モー
ドを励振した時の、半径方向の振動変位分布を示す。同
図より、円板の半径方向に振動変位の最大点と節円部13
（振動しないところ）が存在する。そして、径方向２次
の振動モードの場合、節円部でビスなどで支持固定がで
きると言う大きな特徴を持っていた。FIG. 9 shows the vibration displacement distribution in the radial direction when the secondary vibration mode is excited in the disk without the protrusion 10. From the figure, the maximum point of the vibration displacement in the radial direction of the
(Where it does not vibrate). In the case of the secondary vibration mode in the radial direction, there is a great feature that the fixing can be supported and fixed by screws or the like at the nodal circle portion.
このような構成の場合、モータの回転速度の向上を図
るために横方向変位ｕの拡大用として、機械加工の困難
な突起体を、振動振幅の最大点近傍で振動体６の移動体
３との接触面に設けている。さらに、駆動源が摩擦力で
あるため、移動体に設けられた摩擦材とそれに接触する
突起体10の平面精度（うねり等）が、モータ特性や可聴
域の騒音等に対して重要な要素となっている。In the case of such a configuration, in order to increase the rotational speed of the motor, a protrusion that is difficult to machine is used to increase the lateral displacement u by moving the protrusion that is difficult to machine with the moving body 3 of the vibrator 6 near the maximum point of the vibration amplitude. Is provided on the contact surface. Furthermore, since the driving source is a frictional force, the plane accuracy (swelling, etc.) of the friction material provided on the moving body and the projection 10 that comes into contact with the friction material is an important factor for motor characteristics, audible noise, and the like. Has become.
発明が解決しようとする課題 従来の円板型調音波モータは、振動体上に設けた突起
体と移動体を構成する摩擦材との平面精度が重要で、突
起体の振動体との付け根の機械強度や高さのばらつき
は、共振周波数ずれ・出力トルク・効率や駆動電極A,B
の面積の違いや圧電体と突起体を有する振動体との貼合
わせの位置ずれなどにより生じる不要振動の周波数と駆
動周波数とのビート成分などによる可聴域の騒音の発生
などモータ特性に直接影響を及ぼしている。そのため平
面精度の向上などから機械加工時間、加工精度さらにコ
ストの観点からも問題がある。Problems to be Solved by the Invention In the conventional disk-type sonic motor, the planar accuracy between the protrusion provided on the vibrating body and the friction material constituting the moving body is important, and the root of the protruding body with the vibrating body is important. Variations in mechanical strength and height are caused by deviations in resonance frequency, output torque, efficiency, drive electrodes A and B
Motor characteristics, such as noise in the audible range due to the beat component between the frequency of the unnecessary vibration and the drive frequency caused by the difference in the area of the piezoelectric element and the displacement of the bonding between the piezoelectric body and the vibrating body with protrusions. Has been exerted. For this reason, there is a problem in terms of machining time, machining accuracy, and cost due to improvement in planar accuracy.
また、振動体の静止状態における平面精度を向上さ
せ、振動体自身が各定在波間の振幅が同じで不要振動の
無い理想的な振動をすると仮定しても、径方向には第８
図のような振動変位量分布を持ち、現実と振動体と移動
体との完全な接触状態を得ることは不可能である。Further, even if it is assumed that the planar accuracy of the vibrating body in a stationary state is improved and the vibrating body itself has the same amplitude between the standing waves and performs ideal vibration without unnecessary vibration, the vibration in the radial direction is equal to the eighth.
It has a vibration displacement amount distribution as shown in the figure, and it is impossible to obtain a complete contact state between the actual vibration body and the moving body.
さらに、接触状態の良否がモータ特性のばらつきや騒
音の発生源等のモータとして実用上大きな問題を有して
いる。Further, the quality of the contact state has a serious problem in practical use as a motor such as a variation in motor characteristics and a source of noise.
そこで、本発明は上記従来の問題を解決する円板型超
音波モータの提供を目的としている。Therefore, an object of the present invention is to provide a disk-type ultrasonic motor that solves the above-mentioned conventional problems.
課題を解決するための手段 上記問題を解決する手段は、振動体に突起本部または
凹部を形成し、その形成面と接触する側の移動体を構成
する弾性体に円環状の凹部を設け、凹部を少なくとも覆
うように摩擦材を貼合わせた移動体および振動体構成と
するものである。Means for Solving the Problems A means for solving the above problem is to form a protrusion main portion or a concave portion on the vibrating body, provide an annular concave portion on the elastic body constituting the moving body on the side in contact with the formation surface, and provide a concave portion. And a moving body and a vibrating body with a friction material stuck so as to cover at least.
作 用 本発明の円板型超音波モータは、振動体の突起体部ま
たは凹部と接触する面の移動体を構成する弾性体に円環
状の凹部を設け、その凹部を少なくとも覆うように摩擦
材を貼合わせた移動体構成とすることにより、凹部上の
摩擦材に振動体の突起体部の加圧力が加えられた時に、
摩擦材の両端固定条件時の変形により突起体の面に沿う
と言う面補正効果のため、振動体と移動体との接触が容
易に確保できるものである。The disc-shaped ultrasonic motor according to the present invention is characterized in that an annular concave portion is provided on an elastic body constituting a moving body on a surface of a vibrating body which comes into contact with a protrusion or a concave portion, and a friction material is provided so as to cover at least the concave portion. When the pressing force of the protrusion of the vibrating body is applied to the friction material on the concave portion,
The contact between the vibrating body and the moving body can be easily ensured due to the surface correction effect that the friction material follows the surface of the protruding body due to deformation under the condition of fixing both ends.
また、上記面補正構造のために弾性進行波を発生する
各定在波振幅のアンバランスから生じる不要振動成分の
吸収作用により、可聴域の騒音の発生を防止でき、ばら
つきの少ない安定したモータ特性を得ることができるも
のである。In addition, the above-described surface correction structure absorbs unnecessary vibration components generated from the imbalance of the standing wave amplitudes that generate elastic traveling waves, thereby preventing the generation of noise in the audible range and achieving stable motor characteristics with little variation. Can be obtained.
実施例 以下、本発明を実施例の図面と共に詳細に説明する。Examples Hereinafter, the present invention will be described in detail with reference to the drawings of the examples.
（第１実施例） 第１図は本発明の円板型超音波モータの第１の実施例
における移動体の断面図である。(First Embodiment) FIG. 1 is a sectional view of a moving body in a first embodiment of a disk-type ultrasonic motor according to the present invention.
同図において、弾性体１は摩擦材２と共に円板状の移
動体３を構成し、弾性体１には、振動体の突起体部に接
する側に円環状の凹部４を設け、さらに、凹部４面を少
なくとも覆うように摩擦材２が弾性体に貼合わされて移
動体３を構成している。In FIG. 1, an elastic body 1 constitutes a disk-shaped moving body 3 together with a friction material 2, and the elastic body 1 is provided with an annular concave portion 4 on a side in contact with a protruding portion of the vibrating body. The moving body 3 is constituted by bonding the friction material 2 to the elastic body so as to cover at least the four surfaces.
上記構成の移動体３に、突起体を有する振動体とが第
６図の場合と同様にして摩擦材２を介して加圧すること
により円板型超音波モータが構成されている。A disk-type ultrasonic motor is formed by applying pressure to the moving body 3 having the above-mentioned structure via the friction material 2 in the same manner as in the case of FIG.
移動体を本実施例の構成とすることにより、第９図の
A,B電極で面積ずれや突起体を有する振動体との貼付け
位置ずれにより発生する各定在波間の振幅ばらつきによ
る不要振動や原理的に生じる径方向の振動変位の傾き
が、凹部４を設けることにより、凹部４上の摩擦材２が
振動変位分布に沿うように変形することによる面補正効
果で吸収できる。By using the structure of the present embodiment for the moving body, FIG.
A concave portion 4 is provided for unnecessary vibration due to amplitude variation between standing waves generated due to an area deviation or a positional deviation from a vibrating body having a protruding body at the A and B electrodes and a tilt of radial vibration displacement generated in principle. Thereby, the friction material 2 on the concave portion 4 can be absorbed by the surface correction effect due to the deformation along the vibration displacement distribution.
その結果、平面精度への許容範囲が拡大でき、機構加
工への制約や不要振動による不要振動周波数と駆動周波
数とのビート成分による可聴域の騒音を無くすることが
できる。As a result, the allowable range for the planar accuracy can be expanded, and noise in the audible range due to a beat component between an unnecessary vibration frequency and a drive frequency due to a restriction on mechanical processing and unnecessary vibration can be eliminated.
（第２実施例） 第２図は本発明の第２の実施例における移動体の断面
図であり、第３図は、本実施例における振動体の平面図
とその断面図である。また、第４図に上記移動体と振動
体を組合せた状態を断面図で示す。Second Embodiment FIG. 2 is a cross-sectional view of a moving body according to a second embodiment of the present invention, and FIG. 3 is a plan view and a cross-sectional view of a vibrating body according to the present embodiment. FIG. 4 is a sectional view showing a state in which the moving body and the vibrating body are combined.
第２図において、移動体３は、凹部４を持つ弾性体１
と貼合わされる凸部５を有する摩擦材２で構成されてい
る。In FIG. 2, a moving body 3 is an elastic body 1 having a recess 4.
And a friction material 2 having a convex portion 5 bonded thereto.
また、第３図では振動体６に凹部７が摩擦抵抗の増大
のために設けられている。In FIG. 3, a recess 7 is provided in the vibrating body 6 to increase frictional resistance.
上記凸部５の位置は、第３図に示した振動体６の凹部
７に相対し、第７図の振動モードにおいて振動の最大変
位量の位置に設けられるもので、振動体６と移動体３と
の接触位置の確定に対して大きな効果がある。The position of the convex portion 5 is provided at the position of the maximum displacement amount of the vibration in the vibration mode of FIG. 7 opposite to the concave portion 7 of the vibrating body 6 shown in FIG. There is a great effect on the determination of the contact position with No. 3.
凹部７の形状は、第５図（ａ），（ｂ），（ｃ）等の
ように各種考えられるがこの形状に限定されるものでは
ない。また、凹部４の形状も各種考えられるが、面補正
効果や不要振動の吸収効果があれば第５図に示す形状や
テーパ形状等でもよく、上記実施例を形状に限定される
ものではない。The shape of the recess 7 may be variously conceived as shown in FIGS. 5A, 5B, and 5C, but is not limited to this shape. Although various shapes of the concave portion 4 are conceivable, the shape shown in FIG. 5 and a tapered shape may be used as long as they have a surface correction effect and an effect of absorbing unnecessary vibration, and the shape of the above embodiment is not limited.
本構成の円板型超音波モータは、基本的には平板状の
円板である。そのため、振動体６の変位量よりも少し深
い程度の凹部７であればよく、第１実施例や従来例のよ
うな突起体の加工時に生じる歪等の機械加工上の課題
（精度、コスト等）が容易に解決される。The disk-type ultrasonic motor having this configuration is basically a flat disk. Therefore, it is sufficient that the concave portion 7 is slightly deeper than the displacement amount of the vibrating body 6, and mechanical problems (accuracy, cost, etc.) such as distortion generated at the time of processing the protruding body as in the first embodiment and the conventional example. ) Is easily resolved.
また、進行波を励振する各定在波の振幅のばらつきに
よる不要振動を移動体３の弾性体１に形成された凹部４
により吸収できるために、不要振動周波数と駆動周波数
とのビート成分による騒音や平面精度不良による振動体
６と移動体３との面接触状態の低下を防ぎ、モータの出
力トルクの向上や安定した特性を得ることができる。Unnecessary vibration due to variation in the amplitude of each standing wave that excites the traveling wave is generated by the concave portion 4 formed in the elastic body 1 of the moving body 3.
To prevent noise caused by the beat component between the unnecessary vibration frequency and the driving frequency and a decrease in the state of surface contact between the vibrating body 6 and the moving body 3 due to poor planar accuracy, thereby improving the output torque of the motor and achieving stable characteristics. Can be obtained.
一方、振動体６に設けた凹部７の数は、第１実施例や
従来例の突起体構造に比べて、非常に浅くできるため自
由に設定できる。なぜなら、突起体の高さの２乗に反比
例し、厚みに比例すると言う関係で突起体の共振特性が
決定されるため、突起体の機械強度を得るために振動体
６の駆動周波数から２倍以上に突起体の共振を設定する
事が安定な特性を得るには必要である。そのため、凹部
７の数の増加によりコギングが少なく低速回転性などの
安定したモータ特性を得ることができる。On the other hand, the number of the concave portions 7 provided in the vibrating body 6 can be set freely, since it can be made very shallow as compared with the projection structure of the first embodiment or the conventional example. This is because the resonance characteristic of the projection is inversely proportional to the square of the height of the projection and proportional to the thickness, so that the driving frequency of the vibrator 6 is doubled to obtain the mechanical strength of the projection. As described above, it is necessary to set the resonance of the projection in order to obtain stable characteristics. Therefore, a stable motor characteristic such as low-speed rotation can be obtained with less cogging due to an increase in the number of the concave portions 7.
尚、突起体の径方向幅は移動体３に設けられた凹部４
の径方向幅より小さい必要は特になく、形状に対する制
約も無いが、好ましくは、移動体３に設けられた凹部４
の径方向の幅が突起体幅より大きい方が不要振動の吸収
効果や面に沿う効果を大きくすることができる。The width of the projection in the radial direction is the same as that of the recess 4 provided on the moving body 3.
It is not particularly necessary to be smaller than the width in the radial direction, and there is no restriction on the shape.
If the width of the radial direction is larger than the width of the protrusion, the effect of absorbing unnecessary vibration and the effect along the surface can be increased.
さらに、第２実施例の凸部５を有する摩擦材２は、他
の実施例に適用してもなんら問題は生じない。Further, the friction material 2 having the convex portions 5 of the second embodiment does not cause any problem even when applied to other embodiments.
また、凹部４は、上記各実施例では空洞としている
が、例えばゴム系の材料やフェルト等のスポンジ状の材
料など摩擦材料に比べて、音速や弾性率の小さいものや
内部損失の大きな材料を充填してもよい。その場合に
は、不要振動に対するより大きな吸収効果が得られる。
この様に、凹部４は上記第１、第２の実施例の様に空洞
に限定されるものではない。Although the concave portion 4 is hollow in each of the above-described embodiments, a material having a low sound velocity or elastic modulus or a material having a large internal loss compared to a friction material such as a rubber material or a sponge material such as felt is used. It may be filled. In that case, a larger absorbing effect on unnecessary vibrations can be obtained.
Thus, the recess 4 is not limited to a cavity as in the first and second embodiments.
発明の効果 本発明では、移動体を構成する弾性体に円環状の凹部
を設け、少なくとも凹部を覆うように摩擦材を形成する
ことにより、振動体の面精度が悪くても摩擦材の変形に
よる面補正効果で振動体と移動体との接触状態を大幅に
改善することができる。Effect of the Invention In the present invention, an annular concave portion is provided in an elastic body constituting a moving body, and a friction material is formed so as to cover at least the concave portion. The state of contact between the vibrating body and the moving body can be greatly improved by the surface correction effect.
また、進行波を発生する各定在波の振幅ばらつきによ
る不要振動を吸収することにより、従来不要振動周波数
と駆動周波数とのビート成分による可聴域の騒音を抑制
することができる。In addition, by absorbing unnecessary vibration due to amplitude variation of each standing wave that generates a traveling wave, noise in the audible range due to a beat component between the unnecessary vibration frequency and the driving frequency can be suppressed.
さらに、振動体部に凹部を形成することにより、機械
加工上のコストや機械精度に対する制約条件を突起体を
形成する時よりも大幅に削減できる。また、凹部の数を
増加することによりコギング等の低減したモータ特性や
安定性の優れた円板型超音波モータが実現できるもので
ある。Further, by forming the concave portion in the vibrating body portion, it is possible to significantly reduce the cost in machining and the restriction on the mechanical accuracy as compared with the case of forming the protrusion. Also, by increasing the number of concave portions, a disk-type ultrasonic motor having excellent motor characteristics and stability with reduced cogging and the like can be realized.
第１図は本発明の円板型超音波モータの第１の実施例に
おける移動体の断面図、第２図は本発明の第２の実施例
における移動体の断面図、第３図は第２の実施例に用い
た振動体の平面図とその断面図、第４図は第２の実施例
における振動体と移動体の組合せ断面図、第５図は本発
明における凹部の他の形状例を示す断面図、第６図は従
来円板型超音波モータの切り欠き斜視図、第７図は第６
図の円板型超音波モータに用いた圧電体の形状と電極構
造を示す平面図、第８図は超音波モータの動作原理の説
明図、第９図は円板型超音波モータの径方向の振動変位
分布図である。 １、……弾性体、２、11……摩擦材、３……移動体、
４、７……凹部、５……凸部、６……振動体、８……弾
性体、９……圧電体、10……突起体FIG. 1 is a sectional view of a moving body in a first embodiment of a disk-type ultrasonic motor of the present invention, FIG. 2 is a sectional view of a moving body in a second embodiment of the present invention, and FIG. FIG. 4 is a plan view and a sectional view of the vibrating body used in the second embodiment, FIG. 4 is a sectional view showing a combination of the vibrating body and the moving body in the second embodiment, and FIG. FIG. 6 is a cutaway perspective view of a conventional disk-type ultrasonic motor, and FIG.
FIG. 8 is a plan view showing the shape and electrode structure of a piezoelectric body used in the disk-type ultrasonic motor shown in FIG. 8, FIG. 8 is an explanatory view of the operation principle of the ultrasonic motor, and FIG. FIG. 5 is a vibration displacement distribution diagram of FIG. 1, elastic body, 2, 11, friction material, 3, moving body,
4, 7 ... concave part, 5 ... convex part, 6 ... vibrating body, 8 ... elastic body, 9 ... piezoelectric body, 10 ... protruding body
───────────────────────────────────────────────────── フロントページの続き (72)発明者 武田 克 大阪府門真市大字門真1006番地 松下電 器産業株式会社内 (72)発明者 川崎 修 大阪府門真市大字門真1006番地 松下電 器産業株式会社内 (56)参考文献 実開 昭63−202193（ＪＰ，Ｕ) ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Katsu Takeda 1006 Kazuma Kadoma, Kadoma City, Osaka Prefecture Inside Matsushita Electric Industrial Co., Ltd. (56) References Japanese Utility Model Sho-63-202193 (JP, U)
Claims (3)
と突起体を有する弾性体とから構成される振動体に径方
向２次、周方向３次以上の弾性波を励振し、摩擦材と弾
性体とから構成される移動体を、前記振動体の前記突起
体と前記移動体の前記摩擦材とを各圧接触することによ
り駆動する円板型超音波モータにおいて、前記移動体の
前記弾性体に円環状の凹部を設け、少なくとも前記凹部
を覆うように前記摩擦材を形成することを特徴とする円
板型超音波モータ。1. A piezoelectric body is driven by an AC voltage to excite an elastic wave of second order in a radial direction and third order or more in a circumferential direction in a vibrating body composed of the piezoelectric body and an elastic body having a protrusion. A disc-type ultrasonic motor that drives a moving body composed of a friction material and an elastic body by making pressure contact between the protrusion of the vibrating body and the friction material of the moving body; A disk-shaped ultrasonic motor, wherein an annular concave portion is provided in the elastic body, and the friction material is formed so as to cover at least the concave portion.
と弾性体とから構成される振動体に径方向２次、周方向
３次以上の弾性波を励振し、摩擦材と弾性体とから構成
される移動体を、前記振動体と前記移動体の前記摩擦材
とを加圧接触することにより駆動する円板型超音波モー
タにおいて、前記振動体の前記弾性体に凹部を設けると
共に、前記移動体の前記弾性体に円環状の凹部を設け、
少なくとも前記移動体の凹部を覆うように前記摩擦材を
形成し、かつ前記摩擦材には、前記振動体の前記凹部に
相対する凸部を設けることを特徴とする円板型超音波モ
ータ。2. A piezoelectric body is driven by an AC voltage to excite an elastic wave of a second order in the radial direction and a third order or more in the circumferential direction to a vibrating body composed of the piezoelectric body and the elastic body, so that the friction material and the elastic material are elastically vibrated. In a disk-type ultrasonic motor that drives a moving body composed of a body by pressing the vibrating body and the friction material of the moving body under pressure, a concave portion is provided in the elastic body of the vibrating body. Along with this, an annular concave portion is provided in the elastic body of the moving body,
A disk-type ultrasonic motor, wherein the friction material is formed so as to cover at least a concave portion of the moving body, and the friction material is provided with a convex portion facing the concave portion of the vibrating body.
材に比べて内部損失の大きい材料を充填したことを特徴
とする請求項１または２記載の円板型超音波モータ。3. The disk-type ultrasonic motor according to claim 1, wherein the annular concave portion provided in the moving body is filled with a material having a larger internal loss than the friction material.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2288686A JP3001956B2 (en) | 1990-10-26 | 1990-10-26 | Disk type ultrasonic motor |
| US07/783,192 US5256928A (en) | 1990-10-26 | 1991-10-28 | Ultrasonic motor with a vibrator having recesses |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2288686A JP3001956B2 (en) | 1990-10-26 | 1990-10-26 | Disk type ultrasonic motor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04165969A JPH04165969A (en) | 1992-06-11 |
| JP3001956B2 true JP3001956B2 (en) | 2000-01-24 |
Family
ID=17733377
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2288686A Expired - Fee Related JP3001956B2 (en) | 1990-10-26 | 1990-10-26 | Disk type ultrasonic motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3001956B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10516349B2 (en) | 2015-12-04 | 2019-12-24 | Canon Kabushiki Kaisha | Method of driving vibration actuator with enhanced sliding efficiency, vibration drive device, and mechanical apparatus |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4641250B2 (en) * | 2005-11-15 | 2011-03-02 | 株式会社日立製作所 | NMR analyzer and sample management device |
| JP2008295234A (en) * | 2007-05-25 | 2008-12-04 | Canon Inc | Oscillatory wave drive unit |
| JP5627448B2 (en) * | 2010-12-28 | 2014-11-19 | キヤノン株式会社 | Vibration type driving device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63202193U (en) * | 1987-06-18 | 1988-12-27 |
-
1990
- 1990-10-26 JP JP2288686A patent/JP3001956B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10516349B2 (en) | 2015-12-04 | 2019-12-24 | Canon Kabushiki Kaisha | Method of driving vibration actuator with enhanced sliding efficiency, vibration drive device, and mechanical apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04165969A (en) | 1992-06-11 |
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