JP2994853B2 - Liquid crystal display device defect repair method - Google Patents
Liquid crystal display device defect repair methodInfo
- Publication number
- JP2994853B2 JP2994853B2 JP4120845A JP12084592A JP2994853B2 JP 2994853 B2 JP2994853 B2 JP 2994853B2 JP 4120845 A JP4120845 A JP 4120845A JP 12084592 A JP12084592 A JP 12084592A JP 2994853 B2 JP2994853 B2 JP 2994853B2
- Authority
- JP
- Japan
- Prior art keywords
- liquid crystal
- crystal display
- display device
- picture element
- alignment film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/50—Protective arrangements
- G02F2201/506—Repairing, e.g. with redundant arrangement against defective part
- G02F2201/508—Pseudo repairing, e.g. a defective part is brought into a condition in which it does not disturb the functioning of the device
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Liquid Crystal (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、例えばアクティブマト
リクス型液晶表示装置などの液晶表示装置及びその輝点
欠陥修正方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal display device such as an active matrix type liquid crystal display device and a method of correcting a bright spot defect.
【０００２】[0002]
【従来の技術】液晶表示装置は、マトリクス状に配設さ
れた絵素部分に設けた電極への電圧印加を制御すること
により、その絵素部分において光を透過させたり遮蔽さ
せたりし、これを全絵素に対して行うことにより表示を
行うように構成されている。特に、アクティブマトリク
ス駆動方式の液晶表示装置では、貼り合わされた一対の
ガラス基板の一方のガラス基板上にマトリクス状に配列
された絵素電極に、ＴＦＴ（薄膜トランジスタ）を接続
し、該ＴＦＴのスイッチング動作により、各絵素電極に
電圧を印加して表示動作を行うように構成されている。2. Description of the Related Art A liquid crystal display device controls the application of a voltage to an electrode provided in a pixel portion arranged in a matrix, thereby transmitting or blocking light in the pixel portion. Is performed on all picture elements to perform display. In particular, in an active matrix driving type liquid crystal display device, a TFT (thin film transistor) is connected to picture element electrodes arranged in a matrix on one of a pair of glass substrates bonded to each other, and a switching operation of the TFT is performed. Thus, the display operation is performed by applying a voltage to each pixel electrode.
【０００３】ところで、上述したＴＦＴは、ガラス基板
上にゲート、ソース及びドレインの各電極や配線等の金
属薄膜を積層した多層構造である。そのＴＦＴの作製
は、上記各金属薄膜をガラス基板上に積層する工程と、
該金属薄膜をパターニングする工程とを繰り返して行わ
れる。このため、全てのＴＦＴを欠陥のない完全なもの
として作製するには、製造工程において各種条件を維持
管理するために非常な努力を要する。The above-described TFT has a multilayer structure in which metal thin films such as gate, source and drain electrodes and wiring are laminated on a glass substrate. The production of the TFT includes a step of laminating each of the above metal thin films on a glass substrate,
The step of patterning the metal thin film is repeatedly performed. For this reason, in order to manufacture all TFTs as complete without defects, a great effort is required to maintain various conditions in the manufacturing process.
【０００４】それ故、場合によっては、正常なＴＦＴ特
性が得られない欠陥ＴＦＴの発生や、絵素電極やＴＦＴ
へ電圧を印加する配線における短絡、断線等の発生を避
けられず、このために絵素電極に正常な電圧を印加する
ことができずに、表示を制御できない不良絵素が存在す
る液晶表示装置が製造されるという不都合があった。加
えて、上述した不良絵素を有する液晶表示装置において
は、表示部の画素に対応する電極に電圧を印加して光を
遮蔽する場合、光遮蔽部分に不良絵素が存在すると、そ
の不良絵素部分では光を遮蔽することができずに輝点と
なって不良表示となる。また、表示部周りの周囲の画素
で光を遮蔽する状態とする場合においても、光遮蔽部分
に輝点が生じて不良表示となるため、表示品位が著しく
低下するという難点があった。[0004] Therefore, depending on the case, a defective TFT that cannot obtain normal TFT characteristics may be generated, or a picture element electrode or a TFT may not be obtained.
A liquid crystal display device in which a defective picture element whose display cannot be controlled because a normal voltage cannot be applied to the picture element electrode due to unavoidable occurrence of a short circuit, disconnection, etc. in a wiring for applying a voltage to the However, there is a disadvantage that is manufactured. In addition, in the above-described liquid crystal display device having a defective picture element, when a voltage is applied to an electrode corresponding to a pixel of the display section to block light, if a defective picture element exists in the light shielding portion, the defective picture element is displayed. In the elementary part, the light cannot be shielded and becomes a bright spot, resulting in a defective display. Further, even in a case where light is shielded by surrounding pixels around the display unit, there is a problem that a bright spot is generated in the light shielded portion and a defective display is performed, so that display quality is significantly reduced.
【０００５】このような不良絵素の発生を防止する方法
としては、従来、各絵素電極に２本の配線を接続する冗
長回路を採用し、一方の配線が破損しても、他方の配線
により表示に影響が生じないようにしている。又、不良
表示を修正する方法としては、従来、輝点画素を透過す
る光の光路上に遮蔽手段を形成し、この遮蔽手段により
不良絵素部分が輝点として見えないようにする方法が採
用されており、その遮蔽手段の形成は、例えば表示装置
に備わったガラス基板の表面に樹脂インクを塗布して不
透明とすること等によっている。As a method for preventing the occurrence of such defective picture elements, a redundant circuit for connecting two wirings to each picture element electrode has conventionally been adopted. To prevent the display from being affected. Conventionally, as a method of correcting a defective display, a method of forming a shielding means on an optical path of light transmitted through a bright spot pixel so that a defective picture element portion is not seen as a bright spot by the shielding means is adopted. The shielding means is formed, for example, by applying resin ink to the surface of a glass substrate provided in the display device to make it opaque.
【０００６】[0006]
【発明が解決しようとする課題】しかしながら、上述し
た冗長回路により不良絵素の発生を防止する場合は、余
分に配線を設けているので回路が複雑になり、また配線
が増加する為に設計や製造が困難となり、更に配線の増
加により配線面積が増加して絵素電極の面積、即ち開口
面積が縮小されるために表示輝度が低下する。しかも、
両方の配線が破損した場合には、輝点の発生を防ぐこと
ができないという問題があった。However, when the defective picture element is prevented from being generated by the above-mentioned redundant circuit, the extra wiring is provided, which complicates the circuit. Manufacturing becomes difficult, and furthermore, the wiring area increases due to the increase in the number of wirings, and the area of the picture element electrode, that is, the opening area is reduced, so that the display luminance is reduced. Moreover,
When both wirings are damaged, there is a problem that the generation of a bright spot cannot be prevented.
【０００７】一方、上述した遮蔽手段により不良表示を
修正する場合は、照明光の光路系が異なると、照明光学
系毎に遮蔽手段の形成位置、即ち遮蔽位置が異なるた
め、遮光位置を決定するのに複雑な計算や労力を費や
し、また、光の散乱等を考慮すると、輝点となる不良絵
素よりも大きい範囲にわたり遮光手段を形成する必要が
ある場合もあり、隣接する正常絵素部までもが遮光され
るという問題があった。On the other hand, when the defective display is corrected by the above-mentioned shielding means, if the optical path system of the illumination light is different, the position where the shielding means is formed, that is, the shielding position is different for each illumination optical system. However, considering complicated calculations and labor, and light scattering, etc., it may be necessary to form the light shielding means over a larger area than the defective picture element that becomes a bright spot. There was a problem that even the light was blocked.
【０００８】本発明は、このような従来技術の課題を解
決すべくなされたものであり、表示輝度を低下させるこ
となく輝点欠陥の発生を防止でき、しかも不良絵素部分
のみを精度よく修正できる液晶表示装置及びその輝点欠
陥修正方法を提供することを目的とする。The present invention has been made to solve such problems of the prior art, and can prevent the occurrence of a bright spot defect without lowering the display luminance, and can correct only a defective picture element portion with high accuracy. It is an object of the present invention to provide a liquid crystal display device and a bright spot defect repairing method thereof.
【０００９】[0009]
【課題を解決するための手段】本発明は、液晶層を挟ん
で対向配設された２つのガラス基板各々の液晶層側に配
向膜が形成されていると共に、前記一方のガラス基板に
表示用絵素部がマトリクス状に配列された液晶表示装置
の欠陥修正方法において、前記表示用絵素部の欠陥絵素
に対応する領域の配向膜に前記ガラス基板を介してＸｅ
Ｆエキシマレーザを照射し、配向膜を破壊・除去するこ
とを特徴とする。 According to the present invention, there is provided a liquid crystal display having a liquid crystal layer interposed therebetween.
Are disposed on the liquid crystal layer side of each of the two glass substrates opposed to each other.
A facing film is formed and the one glass substrate is
Liquid crystal display device in which display picture elements are arranged in a matrix
The defect picture element of the display picture element portion.
Xe on the alignment film in the region corresponding to
Irradiate F excimer laser to destroy and remove alignment film
And features.
【００１０】本発明は、液晶層を挟んで対向配設された
２つの基板各々の液晶層側に配向膜が形成されていると
共に、前記一方のガラス基板に表示用絵素部がマトリク
ス状に配列された液晶表示装置の欠陥修正方法におい
て、前記液晶表示装置の両側にそれぞれ偏光板を配置し
た後、各絵素部を駆動して欠陥絵素部を検出する工程
と、前記ガラス基板と前記偏光板の間に配置された反射
ミラーから、前記表示用絵素部の欠陥絵素に対応する領
域の配向膜に前記ガラス基板を介してエキシマレーザを
照射し、配向膜を破壊・除去する工程とを有することを
特徴とする。 According to the present invention, the liquid crystal layer is opposed to the liquid crystal layer.
If an alignment film is formed on the liquid crystal layer side of each of the two substrates
In both cases, the picture element for display is made of a matrix on the one glass substrate.
Of defect correction method for liquid crystal display devices arranged in a matrix
A polarizing plate is disposed on each side of the liquid crystal display device.
After that, the step of driving each picture element to detect a defective picture element
And a reflection disposed between the glass substrate and the polarizing plate.
From the mirror, the area corresponding to the defective picture element in the display picture element section
Excimer laser to the alignment film in the region through the glass substrate
Irradiating to destroy and remove the alignment film.
Features.
【００１１】[0011]
【作用】本発明にあっては、各絵素部のうち輝点欠陥絵
素部における配向膜が、破壊・除去されている。このた
め、破壊・除去された配向膜と接する液晶部分では、液
晶の旋光性がなくなり、それまで輝点となっていた輝点
欠陥絵素部が暗点となる。また、その修正にエキシマレ
ーザを使用するので、ガラス基板を透過する波長を選ぶ
ことができ、光化学反応にて配向膜を破壊・除去するの
で熱的影響もなく、更には波長が短いために狭い開口部
に対しても充分な分解能が得られる。 従って、輝点欠陥
絵素部に隣接する薄膜トランジスタや配線に熱的損傷を
与えることなく、輝点欠陥絵素部の配向膜のみを精度よ
く破壊・除去することが可能である。According to the present invention, the alignment film in the bright spot defect pixel portion of each pixel portion is destroyed and removed. For this reason, in the liquid crystal portion in contact with the broken or removed alignment film, the optical rotation of the liquid crystal is lost, and the bright spot defect picture element portion, which has been a bright spot, becomes a dark spot. Also, since an excimer laser is used for the correction, select the wavelength that transmits the glass substrate.
It can destroy and remove the alignment film by photochemical reaction.
Narrow opening due to short wavelength and no thermal effect
, A sufficient resolution can be obtained. Therefore, bright spot defects
Thermal damage to thin film transistors and wiring adjacent to the pixel
Without giving, it is possible to accurately destroy and remove only the alignment film of the bright spot defective picture element portion.
【００１２】[0012]
【実施例】以下、本発明の実施例を説明する。Embodiments of the present invention will be described below.
【００１３】図１は本発明の輝点欠陥修正方法により修
正された液晶表示装置の一部を示す断面図、図２は図１
と同一部分における修正前の断面図である。この液晶表
示装置は、間に液晶層１２を挟んで対向配設されたＴＦ
Ｔ基板７と対向基板６とを有する。ＴＦＴ基板７は、ガ
ラス基板８ａの上にＴＦＴ１４と絵素電極１３とがマト
リクス状に形成され、その上の液晶層１２側に配向膜１
１ａが全面にわたり形成されている。一方の対向基板６
は、ガラス基板８ｂの上にブラックマスク９と、対向電
極１０と、配向膜１１ｂとがこの順に形成されており、
この配向膜１１ｂを液晶層１２側にして配設されてい
る。FIG. 1 is a cross-sectional view showing a part of a liquid crystal display device corrected by the bright spot defect correcting method of the present invention, and FIG.
It is sectional drawing before correction in the same part as. This liquid crystal display device has a TF disposed oppositely with a liquid crystal layer 12 interposed therebetween.
It has a T substrate 7 and a counter substrate 6. In the TFT substrate 7, TFTs 14 and picture element electrodes 13 are formed in a matrix on a glass substrate 8a, and the alignment film 1 is formed on the liquid crystal layer 12 side thereon.
1a is formed over the entire surface. One counter substrate 6
Has a black mask 9, a counter electrode 10, and an alignment film 11b formed in this order on a glass substrate 8b.
The alignment film 11b is disposed on the liquid crystal layer 12 side.
【００１４】かかる構成の液晶表示装置に適用される本
発明の輝点欠陥修正方法は、以下のように行われる。先
ず、液晶表示装置の背面に設けた上記光源（図示せず）
からの照明光を液晶表示装置に照射する状態で、液晶表
示装置を駆動させる。これにより、本来暗点である筈の
絵素部が輝点となっていると、その部分が輝点欠陥絵素
部Ａであると判定される。The bright spot defect correcting method of the present invention applied to the liquid crystal display device having such a configuration is performed as follows. First, the light source (not shown) provided on the back of the liquid crystal display device
The liquid crystal display device is driven in a state in which the illumination light from is irradiated on the liquid crystal display device. As a result, if the picture element that should be a dark spot is a bright spot, it is determined that the defective picture element A is a bright spot defect.
【００１５】次いで、エキシマレーザ加工装置を使用し
て、図２に示すように輝点欠陥絵素部Ａのあるブラック
マスク９の開口部にエキシマレーザ光を照射する。この
照射は、例えばガラス基板８ａ側とガラス基板８ｂ側の
両方から行い、図１に示すように配向膜１１ａ、１１ｂ
を破壊・除去する。Next, as shown in FIG. 2, an excimer laser beam is applied to the opening of the black mask 9 having the bright spot defect picture element portion A using an excimer laser processing apparatus. This irradiation is performed, for example, from both the glass substrate 8a side and the glass substrate 8b side, and as shown in FIG.
Destroy and remove.
【００１６】このように処理された液晶表示装置は、輝
点欠陥絵素部Ａに存在した配向膜１１ａ、１１ｂが破壊
・除去されて消失しているので、その消失した部分の配
向膜１１ａ、１１ｂと接する液晶層１２の旋光性がなく
なり、それまで輝点となっていた輝点欠陥部が暗点とな
ることにより輝点欠陥絵素部Ａが修正される。In the liquid crystal display device thus treated, since the alignment films 11a and 11b existing in the bright spot defect picture element portion A are destroyed and removed and disappear, the alignment films 11a and 11b in the disappeared portions are removed. The optical rotation of the liquid crystal layer 12 in contact with the liquid crystal layer 11b disappears, and the bright spot defect portion, which has been a bright spot, becomes a dark spot, thereby correcting the bright spot defect picture element portion A.
【００１７】その修正原理を、液晶表示装置にＴＮ−Ｌ
ＣＤを用いた場合を例に挙げ、図３に基づきより詳細に
説明する。図３（ａ）に示すように、配向膜２、２で挟
まれた液晶層４に電圧を印加しない場合、入射側偏光フ
ィルム１に入射した光５は、入射側偏光フィルム１にて
振動方向が一方向のものだけになり、液晶層４の９０°
捩れ構造にて光振動方向が９０°回転（旋光）し、この
回転により偏光方向が入射側偏光フィルム１と９０°異
なる出射側偏光フィルター３を透過することとなり、そ
の光透過部分の絵素部では明点となる。これに対し、図
３（ｂ）に示すように、液晶層４に電圧を印加すると、
液晶層４の９０°捩れ構造が崩れるため、光振動方向が
９０°回転（旋光）せず、このために出射側偏光フィル
ター３で遮光されることとなり、暗点となる。The correction principle is based on the TN-L
A case where a CD is used will be described as an example, and a more detailed description will be given based on FIG. As shown in FIG. 3A, when no voltage is applied to the liquid crystal layer 4 sandwiched between the alignment films 2 and 2, the light 5 incident on the incident-side polarizing film 1 oscillates in the incident-side polarizing film 1. Is only in one direction, and 90 ° of the liquid crystal layer 4
The light oscillation direction is rotated by 90 ° (rotation) by the twisted structure, and this rotation causes the light to pass through the output-side polarization filter 3 whose polarization direction is different from that of the incident-side polarization film 1 by 90 °. Now it is a bright point. On the other hand, when a voltage is applied to the liquid crystal layer 4 as shown in FIG.
Since the 90 ° twisted structure of the liquid crystal layer 4 is broken, the light oscillation direction does not rotate (rotate) by 90 °, so that the light is shielded by the output side polarizing filter 3 and becomes a dark spot.
【００１８】したがって、本発明は、上記配向膜２をエ
キシマレーザ光にて破壊・除去し、輝点欠陥絵素部の液
晶層の９０°捩れ構造を崩すことにより、輝点を暗点に
して修正している。なお、破壊・除去する配向膜は、Ｔ
ＦＴ基板７側の配向膜１１ａだけでも、或は対向基板６
側の配向膜１１ｂだけでもよい。Accordingly, in the present invention, the alignment film 2 is destroyed and removed by excimer laser light, and the 90 ° twisted structure of the liquid crystal layer in the pixel portion of the bright spot defect is broken to make the bright spot a dark spot. Corrected. The alignment film to be destroyed / removed is T
Only the alignment film 11a on the FT substrate 7 side or the facing substrate 6
Only the alignment film 11b on the side may be used.
【００１９】図４に、本発明の輝点欠陥修正方法に適用
可能なエキシマレーザ加工装置を示す。この装置は、エ
キシマレーザ発振器１６から輝点欠陥修正用のレーザビ
ーム１８を出射し、出射されたレーザビーム１８をマス
クパターン１７に通して反射ミラー１９で反射させた
後、縮小レンズ２０を経て載置台２２上に載置された液
晶表示装置２１に上側から集光照射する。一方、レーザ
ビーム１８とは別に、液晶表示装置２１の下側に設けた
図示しない光源から発せられた照明光２４を偏光フィル
ター２３ａを通過させて液晶表示装置２１に照射し、液
晶表示装置２１を透過して偏光フィルター２３ｂを通過
した照明光２４に基づいて、液晶表示装置２１の上方に
設けたカメラ２５にて液晶表示装置２１を拡大観察でき
るように構成されている。なお、カメラ２５により液晶
表示装置２１の拡大観察が可能なように、載置台２２は
液晶表示装置２１の周辺部を支持する部分を除いて中空
の筒状体となっており、また反射ミラー１９は紫外線を
反射し可視光線を透過するものを使用している。更に、
載置台２２は、レーザビーム１８を液晶表示装置２１の
輝点修正部に照射できるように移動可能になっている。
上記マスクパターン１７は、輝点欠陥絵素部の外形サイ
ズを、縮小レンズ２０の縮小率分だけ拡大した大きさの
パターンが形成されたものであり、該マスクパターン１
７を通ったレーザビーム１８を縮小露光させて輝点欠陥
絵素部に精度よく照射できるようになっている。FIG. 4 shows an excimer laser processing apparatus applicable to the bright spot defect correction method of the present invention. This device emits a laser beam 18 for correcting a bright spot defect from an excimer laser oscillator 16, passes the emitted laser beam 18 through a mask pattern 17, reflects the laser beam 18 on a reflection mirror 19, and mounts the laser beam 18 via a reduction lens 20. The liquid crystal display device 21 mounted on the mounting table 22 is condensed and irradiated from above. On the other hand, separately from the laser beam 18, illumination light 24 emitted from a light source (not shown) provided below the liquid crystal display device 21 is passed through the polarizing filter 23 a to irradiate the liquid crystal display device 21. The liquid crystal display device 21 is configured to be magnified and observable by a camera 25 provided above the liquid crystal display device 21 based on the illumination light 24 transmitted through the polarizing filter 23b. The mounting table 22 is a hollow cylindrical member except for a portion supporting the peripheral portion of the liquid crystal display device 21 so that the liquid crystal display device 21 can be magnified and observed by the camera 25. Are those that reflect ultraviolet light and transmit visible light. Furthermore,
The mounting table 22 is movable so that the laser beam 18 can be applied to the bright spot correction unit of the liquid crystal display device 21.
The mask pattern 17 is formed by forming a pattern having a size obtained by enlarging the outer size of the bright spot defective picture element portion by the reduction ratio of the reduction lens 20.
The laser beam 18 having passed through 7 is subjected to a reduced exposure, so that it can be accurately irradiated to a bright spot defective picture element portion.
【００２０】このエキシマレーザ加工装置による輝点欠
陥修正は以下のように行われる。The bright spot defect correction by this excimer laser processing apparatus is performed as follows.
【００２１】先ず、載置台２２の上に液晶表示装置２１
を前面側を上にして載置する。続いて、その液晶表示装
置２１の背面に設けた上記光源（図示せず）から照明光
２４を液晶表示装置２１に照射する状態で、液晶表示装
置２１を駆動させる。これにより、本来暗点である筈の
絵素部が輝点となっていると、その部分が輝点欠陥絵素
部であると判定される。First, the liquid crystal display 21 is placed on the mounting table 22.
With the front side up. Subsequently, the liquid crystal display device 21 is driven in a state in which the liquid crystal display device 21 is irradiated with illumination light 24 from the light source (not shown) provided on the back surface of the liquid crystal display device 21. As a result, if a picture element that should be a dark spot is a bright spot, that part is determined to be a bright spot defective picture element.
【００２２】次に、このようにして判定された輝点欠陥
絵素部に、エキシマレーザ発振器１６から出射したレー
ザビーム１８を、マスクパターン１７、反射ミラー１９
および縮小レンズ２０を経て集光照射し、欠陥修正す
る。Next, the laser beam 18 emitted from the excimer laser oscillator 16 is applied to the bright spot defect picture element portion determined in this manner by the mask pattern 17 and the reflection mirror 19.
Then, the light is condensed and irradiated through the reduction lens 20 to correct the defect.
【００２３】なお、このエキシマレーザ加工装置に使用
されるレーザ波長例としては、ＸｅＣｌによる場合は３
０８ｍｍ、ＸｅＦによる場合は３５１ｍｍである。ま
た、液晶表示装置２１のガラス基板の透過率は、３０８
ｍｍで２０％程度、３５１ｍｍで９０％程度であった。
この透過率に合わせて照射レーザパワーの調整を行うこ
とを要する。Incidentally, as an example of the laser wavelength used in this excimer laser processing apparatus, when using XeCl, 3
08 mm, and 351 mm when using XeF. The transmittance of the glass substrate of the liquid crystal display device 21 is 308
mm was about 20%, and 351 mm was about 90%.
It is necessary to adjust the irradiation laser power in accordance with the transmittance.
【００２４】本発明では使用するレーザ光としてエキシ
マレーザ光に限定している。その理由は、以下の通りで
ある。ＣＯ2レーザやＹＡＧレーザを使用することも考
えられるが、これらのレーザ光は熱影響が大きく、また
波長も長い為、輝点欠陥絵素部の配向膜だけを破壊する
ことが非常に困難である。これに対し、エキシマレーザ
光を使用する場合は、ガラス基板を透過する波長を選べ
ること、光化学反応にて配向膜を破壊・除去できるので
熱的影響がないこと、及び波長が短いために、例えば５
０μｍ×１００μｍの狭い開口部に対しても充分な分解
能がえられること等の特徴を有し、輝点欠陥絵素部の配
向膜のみを破壊する事が可能であるという理由である。In the present invention, the laser light used is limited to excimer laser light. The reason is as follows. Although it is conceivable to use a CO 2 laser or a YAG laser, these laser lights have a large thermal effect and have a long wavelength. is there. On the other hand, when excimer laser light is used, the wavelength that transmits the glass substrate can be selected, and the alignment film can be destroyed / removed by a photochemical reaction, so that there is no thermal effect. 5
It is characterized in that a sufficient resolution can be obtained even for a narrow opening of 0 μm × 100 μm, and the reason is that it is possible to destroy only the alignment film of the luminescent spot defective picture element portion.
【００２５】したがって、本発明によりＴＦＴ基板７側
の配向膜１１ａを破壊・除去する場合は、ＴＦＴ基板７
上にＴＦＴ１４や配線が絵素電極１３に接近した状態で
形成されていても、エキシマレーザ光の波長が３０８．
３５１ｍｍと短いので、ＴＦＴ１４や配線を傷付けるこ
となく行うことができるという利点も有る。Therefore, when the alignment film 11a on the TFT substrate 7 side is destroyed and removed according to the present invention, the TFT substrate 7
Even if the TFT 14 and the wiring are formed close to the pixel electrode 13, the wavelength of the excimer laser light is 308.
Since it is as short as 351 mm, there is also an advantage that the process can be performed without damaging the TFT 14 and the wiring.
【００２６】[0026]
【発明の効果】本発明は、液晶層を挟んで対向配設され
た２つのガラス基板を有する液晶表示装置において、ガ
ラス基板間に形成されている欠陥絵素に対応する領域の
配向膜をガラスに対する透過率の高いＸｅＦエキシマレ
ーザを照射して配向膜を破壊・除去するため、エキシマ
レーザのパワーを上げなくてもよく、さらに精度のよく
配向膜を破壊・除去することができる。 本発明は、液晶
層を挟んで対向配設された２つのガラス基板を有する液
晶表示装置の状態で、欠陥検査が行えると共に、エキシ
マレーザによる欠陥修正を行うことができる。 According to the present invention, the liquid crystal layer is disposed opposite to each other with the liquid crystal layer interposed therebetween.
In a liquid crystal display device having two glass substrates,
Of the area corresponding to the defective picture element formed between the glass substrates
XeF excimer with high transmittance to glass for alignment film
Excimer to irradiate the laser to destroy and remove the alignment film.
It is not necessary to increase the power of the laser
The alignment film can be destroyed and removed. The present invention relates to liquid crystal
Liquid having two glass substrates opposed to each other with a layer interposed
Defect inspection can be performed while the
The defect can be repaired by the malaser.
【図１】本発明の輝点欠陥修正方法を適用した後の液晶
表示装置を示す断面図。FIG. 1 is a cross-sectional view showing a liquid crystal display device after applying a bright spot defect repair method of the present invention.
【図２】本発明の輝点欠陥修正方法を適用する前の液晶
表示装置を示す断面図。FIG. 2 is a cross-sectional view showing a liquid crystal display device before applying the bright spot defect correction method of the present invention.
【図３】本発明の輝点欠陥修正原理を、液晶表示装置が
ＴＮ・ＬＣＤの場合を例に挙げて説明するための図。FIG. 3 is a view for explaining the principle of correcting a bright spot defect according to the present invention, taking a case where a liquid crystal display device is a TN LCD as an example.
【図４】本発明の輝点欠陥修正方法に適用できるエキシ
マレーザ加工装置例を示す模式図。FIG. 4 is a schematic view showing an example of an excimer laser processing apparatus applicable to the bright spot defect correction method of the present invention.
１ 偏光フィルター ２ 配向膜 ３ 液晶層 ５ 光 ６ 対向基板 ７ ＴＦＴ基板 ８ ガラス基板 ９ ブラックマスク １０ 対向電極 １１ａ、１１ｂ 配向膜 １２ 液晶層 １３ 絵素電極 １４ ＴＦＴ １６ エキシマレーザ発振器 １７ マスクパターン １８ レーザビーム １９ 反射ミラー ２０ 縮小レンズ ２１ 液晶表示装置 ２２ 載置台 ２３ａ、２３ｂ 偏光フィルター ２４ 照明光 ２５ カメラ DESCRIPTION OF SYMBOLS 1 Polarization filter 2 Alignment film 3 Liquid crystal layer 5 Light 6 Counter substrate 7 TFT substrate 8 Glass substrate 9 Black mask 10 Counter electrode 11a, 11b Alignment film 12 Liquid crystal layer 13 Pixel electrode 14 TFT 16 Excimer laser oscillator 17 Mask pattern 18 Laser beam DESCRIPTION OF SYMBOLS 19 Reflection mirror 20 Reduction lens 21 Liquid crystal display device 22 Mounting table 23a, 23b Polarization filter 24 Illumination light 25 Camera
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平２−127614（ＪＰ，Ａ) 特開 平２−196219（ＪＰ，Ａ) 特開 昭62−191804（ＪＰ，Ａ) (58)調査した分野(Int.Cl.6，ＤＢ名) G02F 1/1337 G02F 1/13 101 ────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-2-127614 (JP, A) JP-A-2-196219 (JP, A) JP-A-62-191804 (JP, A) (58) Field (Int.Cl. 6 , DB name) G02F 1/1337 G02F 1/13 101
Claims (2)
ス基板各々の液晶層側に配向膜が形成されていると共
に、前記一方のガラス基板に表示用絵素部がマトリクス
状に配列された液晶表示装置の欠陥修正方法において、 前記表示用絵素部の欠陥絵素に対応する領域の配向膜に
前記ガラス基板を介してＸｅＦエキシマレーザを照射
し、配向膜を破壊・除去することを特徴とする液晶表示
装置の欠陥修正方法。 1. Two glass elements disposed opposite to each other with a liquid crystal layer interposed therebetween.
When an alignment film is formed on the liquid crystal layer side of each substrate,
In addition, the display picture elements are arranged in a matrix on the one glass substrate.
In the method for correcting defects of a liquid crystal display device arranged in a matrix, the alignment film in a region corresponding to a defective picture element of the display picture element portion is provided.
XeF excimer laser irradiation through the glass substrate
Liquid crystal display characterized by destroying and removing the alignment film
Device defect repair method.
各々の液晶層側に配向膜が形成されていると共に、前記
一方のガラス基板に表示用絵素部がマトリクス状に配列
された液晶表示装置の欠陥修正方法において、 前記液晶表示装置の両側にそれぞれ偏光板を配置した
後、各絵素部を駆動して欠陥絵素部を検出する工程と、 前記ガラス基板と前記偏光板の間に配置された反射ミラ
ーから、前記表示用絵素部の欠陥絵素に対応する領域の
配向膜に前記ガラス基板を介してエキシマレーザを照射
し、配向膜を破壊・除去する工程とを有することを特徴
とする液晶表示装置の欠陥修正方法。 2. Two substrates disposed opposite to each other with a liquid crystal layer interposed therebetween.
An alignment film is formed on each liquid crystal layer side, and the
Display picture elements arranged in a matrix on one glass substrate
In the defect repair method for a liquid crystal display device, a polarizing plate is disposed on each side of the liquid crystal display device.
After that, a step of driving each picture element section to detect a defective picture element section, and a reflection mirror disposed between the glass substrate and the polarizing plate.
From the area corresponding to the defective picture element in the display picture element section.
Excimer laser irradiation on the alignment film through the glass substrate
And a step of destroying and removing the alignment film.
A defect repair method for a liquid crystal display device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4120845A JP2994853B2 (en) | 1992-05-13 | 1992-05-13 | Liquid crystal display device defect repair method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4120845A JP2994853B2 (en) | 1992-05-13 | 1992-05-13 | Liquid crystal display device defect repair method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05313167A JPH05313167A (en) | 1993-11-26 |
| JP2994853B2 true JP2994853B2 (en) | 1999-12-27 |
Family
ID=14796384
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4120845A Expired - Lifetime JP2994853B2 (en) | 1992-05-13 | 1992-05-13 | Liquid crystal display device defect repair method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2994853B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4660011B2 (en) * | 2001-05-16 | 2011-03-30 | 東芝モバイルディスプレイ株式会社 | Liquid crystal display device and manufacturing method thereof |
| JP3673742B2 (en) * | 2001-09-27 | 2005-07-20 | レーザーフロントテクノロジーズ株式会社 | Bright spot defect correcting method and apparatus for liquid crystal display device |
| JP4723915B2 (en) | 2005-06-03 | 2011-07-13 | 株式会社東芝 | Method and apparatus for repairing liquid crystal panel |
| JP4776291B2 (en) * | 2005-07-14 | 2011-09-21 | 株式会社東芝 | Liquid crystal panel and repair method thereof |
| JP4260219B2 (en) | 2006-05-16 | 2009-04-30 | シャープ株式会社 | Display panel manufacturing method, display panel manufacturing apparatus, and display panel |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02127614A (en) * | 1988-11-08 | 1990-05-16 | Fujitsu Ltd | Manufacture of active matrix type liquid crystal display device |
| JP2569406B2 (en) * | 1989-01-25 | 1997-01-08 | 工業技術院長 | Manufacturing method of liquid crystal alignment film using laser |
-
1992
- 1992-05-13 JP JP4120845A patent/JP2994853B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05313167A (en) | 1993-11-26 |
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