JP2986556B2 - Sample positioning mechanism - Google Patents
Sample positioning mechanismInfo
- Publication number
- JP2986556B2 JP2986556B2 JP3005275A JP527591A JP2986556B2 JP 2986556 B2 JP2986556 B2 JP 2986556B2 JP 3005275 A JP3005275 A JP 3005275A JP 527591 A JP527591 A JP 527591A JP 2986556 B2 JP2986556 B2 JP 2986556B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- base
- mounting surface
- positioning
- corner
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Sampling And Sample Adjustment (AREA)
Description
【０００１】[0001]
【産業業上の利用分野】本発明は、薄板状の試料を該試
料に対して検査等を行う装置の所定位置に位置決めする
試料位置決め機構に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sample positioning mechanism for positioning a thin plate sample at a predetermined position of an apparatus for inspecting the sample.
【０００２】[0002]
【従来の技術】例えば、基準発振器等に用いられる水晶
振動子（水晶ウエハ）は、結晶塊を切断して薄板状に切
り出すことによって得るが、その場合に、切り出した水
晶振動子においては、切断面（カット面）と結晶格子面
とが用途に応じた所定の角度関係になっていることが必
要とされる。2. Description of the Related Art For example, a crystal oscillator (crystal wafer) used for a reference oscillator or the like is obtained by cutting a crystal lump and cutting it into a thin plate. It is necessary that the plane (cut plane) and the crystal lattice plane have a predetermined angular relationship according to the application.
【０００３】従って、一般に、切り出した水晶振動子に
ついては、カット面検査装置を使って、その切断面と結
晶格子面との間の角度が所定の角度であるか否かを調べ
るカット面検査を実施する。このカット面検査は、試料
である水晶振動子の表面（切断面）に一定の波長のＸ線
を入射させて、回折の生ずる入射角を求めることによっ
て、試料の切断面と結晶格子面との間の角度を求めるも
のであるが、精密に検査するためには、試料である水晶
振動子をカット面検査装置上の定位置に正確に位置決め
する試料位置決め機構が必要となる。[0003] Therefore, in general, for a cut crystal unit, a cut plane inspection is performed using a cut plane inspection apparatus to check whether or not the angle between the cut plane and the crystal lattice plane is a predetermined angle. carry out. In this cut surface inspection, X-rays of a certain wavelength are made incident on the surface (cut surface) of a quartz oscillator as a sample, and an incident angle at which diffraction occurs is obtained. Although the angle between them is determined, in order to perform a precise inspection, a sample positioning mechanism for accurately positioning a quartz oscillator, which is a sample, at a fixed position on a cut plane inspection apparatus is required.
【０００４】これまで、前記カット面検査装置に使用す
る位置決め機構としては、１基又は２基のエアシリンダ
等のアクチュエータを使って、カット面検査装置上に固
定されている基台に試料を押え付ける形式のものが開発
されている。この場合に、前記基台は、試料を載せる載
置面と、載置面上の試料の外周部を当接させることによ
って試料の載置面に沿う方向の移動を拘束する位置決め
突起とを具備した構成とされている。なお、従来の場
合、表面を研磨した平滑面自体を載置面とするものと、
複数の突起の先端部によって載置面を提供するようにし
たものとが開発されている。Hitherto, as a positioning mechanism used in the cut surface inspection apparatus, one or two actuators such as air cylinders are used to hold a sample on a base fixed on the cut surface inspection apparatus. Attached form has been developed. In this case, the base includes a mounting surface on which the sample is mounted, and a positioning protrusion that restrains movement of the sample in the direction along the mounting surface by abutting an outer peripheral portion of the sample on the mounting surface. The configuration is as follows. In the conventional case, the smooth surface itself with the polished surface itself as the mounting surface,
A configuration has been developed in which a mounting surface is provided by the tips of a plurality of protrusions.
【０００５】このような従来の位置決め機構では、基台
の載置部上に試料が載置されると、試料の外周部を位置
決め突起に当接させるための試料の微小移動と、および
試料を位置決め突起および載置面に当接した状態に保持
する付勢とを、前記アクチュエータによって行う。In such a conventional positioning mechanism, when a sample is placed on the mounting portion of the base, a minute movement of the sample for bringing the outer peripheral portion of the sample into contact with the positioning projection, and the sample is moved. The actuator is used to urge the positioning projection and the mounting surface to be kept in contact with each other.
【０００６】[0006]
【発明が解決しようとする課題】ところで、カット面検
査する水晶振動子は、通常、厚さが０．２ｍｍ以下で２
辺のそれぞれの長さが９ｍｍ程度の薄板状であり、表面
に局部的に外力が加わったり、外周部に圧縮を受けた場
合にたわみが生じ易いという難点がある。これに対し
て、従来の位置決め機構は、エアシリンダ等のアクチュ
エータによって試料を基台に押さえ付けるものであり、
該アクチュエータから試料に作用する力は、局部的で、
圧縮性のものとなる。By the way, a crystal unit to be inspected on a cut surface usually has a thickness of 0.2 mm or less and a thickness of 2 mm or less.
Each of the sides is a thin plate having a length of about 9 mm, and has a drawback in that, when an external force is locally applied to the surface or the outer peripheral portion is compressed, deflection is likely to occur. On the other hand, the conventional positioning mechanism presses the sample on the base with an actuator such as an air cylinder.
The force acting on the sample from the actuator is local,
It becomes compressible.
【０００７】従って、従来の位置決め機構による場合
は、アクチュエータからの外力で試料に生じるたわみに
よって、検査精度が低下する虞れがあった。なお、前述
した従来の位置決め機構の場合、基台における載置面の
提供の形式によって、たわみの発生程度が若干異なると
思える。即ち、表面を研磨した平滑面自体を載置面とし
たものと、複数の突起の先端部によって載置面を提供す
るものとでは、前者のもののほうが、たわみが生じ憎
い。しかし、前者のものは、基台の載置面と試料の表面
との間に塵埃等が介入して、載置面による位置決め精度
自体を大きく損なう虞れがある。[0007] Therefore, in the case of the conventional positioning mechanism, there is a possibility that the inspection accuracy may be reduced due to the bending of the sample caused by the external force from the actuator. In the case of the above-described conventional positioning mechanism, it is considered that the degree of deflection is slightly different depending on the type of provision of the mounting surface on the base. That is, in the case where the mounting surface is used as the mounting surface with the polished smooth surface itself, and in the case where the mounting surface is provided by the tips of the plurality of protrusions, the former is more unfavorable because of the deflection. However, in the former case, there is a possibility that dust or the like intervenes between the mounting surface of the base and the surface of the sample, and the positioning accuracy itself by the mounting surface may be greatly impaired.
【０００８】本発明は、前記事情に鑑みてなされたもの
で、試料の表面に局部的に外力を作用させることがな
く、しかも、試料の外周部に圧縮力を作用させることも
なく、基台上の定位置に薄板状の試料を位置決めするこ
とができ、従って、たわみが生じ易い薄板状の試料も、
たわみを生じさせずに高精度に位置決めすることができ
て、位置決め後の試料に対する検査等の処理精度を向上
させることのできる試料位置決め機構を提供することを
目的とする。The present invention has been made in view of the above circumstances, and does not apply an external force locally to the surface of a sample, and does not apply a compressive force to the outer peripheral portion of the sample. The thin plate sample can be positioned at the upper fixed position, and therefore, the thin plate sample that is likely to be bent is also
It is an object of the present invention to provide a sample positioning mechanism that can perform high-precision positioning without causing deflection and can improve processing accuracy such as inspection of a sample after positioning.
【０００９】[0009]
【課題を解決するための手段】請求項１に記載した試料
位置決め機構は、薄板状の試料を該試料に対して検査等
を行う装置の所定位置に位置決めするもので、前記試料
を載せる基台と、試料を前記基台の所定位置に密着した
状態に押える付勢手段とを備える。According to a first aspect of the present invention, there is provided a sample positioning mechanism for positioning a thin plate sample at a predetermined position of an apparatus for performing an inspection or the like on the sample. And urging means for pressing the sample in a state in which the sample is in close contact with a predetermined position on the base.
【００１０】そして、前記基台には、薄板状の試料の載
置面に先端を当接して試料の載置面に直交する方向の位
置決めをなす三つの突起部と、これら突起部に載置面を
当てた試料の外周を当接させることによって試料の載置
面に沿う方向の移動を拘束する隅部とを装備してなる。[0010] The base has three protruding portions which are positioned in the direction perpendicular to the sample mounting surface by abutting the tips on the sample mounting surface of the thin plate, and are mounted on these protruding portions. And a corner for restricting movement of the sample in the direction along the mounting surface by bringing the outer periphery of the sample into contact with the surface.
【００１１】また、前記付勢手段は、前記隅部を形成し
ている部材上に設けた穴からの真空吸引によって、試料
を前記突起部および隅部に密着させる構造とされてい
る。Further, the urging means has a structure in which the sample is brought into close contact with the protrusions and the corners by vacuum suction from a hole provided on the member forming the corners.
【００１２】請求項２および請求項３に記載の試料位置
決め機構は、試料を基台上に位置決めするために試料を
付勢する付勢手段として、請求項１の場合とは、別のも
のを使用したものである。According to a second aspect of the present invention, there is provided a sample positioning mechanism for urging a sample to position the sample on a base. Used.
【００１３】請求項２に記載の試料位置決め機構におけ
る付勢手段は、前記隅部の稜線部に向けて試料に気流を
吹き付けることによって、試料を前記突起部および隅部
に密着させる構造としている。According to a second aspect of the present invention, the urging means in the sample positioning mechanism has a structure in which the sample is brought into close contact with the protrusions and the corners by blowing an air current toward the ridges of the corners.
【００１４】請求項３に記載の試料位置決め記載におけ
る付勢手段は、前記試料に塗布される磁性粉と、磁性粉
の塗布された試料を突起群側および前記隅部の稜線部側
に磁力吸引する磁力体とで、試料を前記突起部および隅
部に密着させる構成としている。According to a third aspect of the present invention, in the sample positioning method, the urging means includes a magnetic attraction for applying the magnetic powder applied to the sample and the sample coated with the magnetic powder to the protrusion group side and the ridge line side of the corner. The sample is brought into close contact with the protrusions and the corners with the magnetic body.
【００１５】[0015]
【作用】本発明に係る試料位置決め機構では、試料を基
台の定位置に位置決めするための試料への付勢は、気圧
差あるいは磁力による吸引力で、機械的な接触による付
勢ではないため、試料の表面に局部的に外力を作用させ
ずに、しかも、試料の外周部に圧縮力を作用させること
もなく、基台上の定位置に試料を位置決めすることがで
きる。In the sample positioning mechanism according to the present invention, the bias to the sample for positioning the sample at the fixed position on the base is a suction force due to a pressure difference or a magnetic force, not a bias due to mechanical contact. The sample can be positioned at a fixed position on the base without locally applying an external force to the surface of the sample and without applying a compressive force to the outer peripheral portion of the sample.
【００１６】従って、試料が、たわみが生じ易い薄板状
のものであっても、たわみを生じさせずに高精度に位置
決めすることができて、位置決め後の試料に対する検査
等の処理精度を向上させることができる。Therefore, even if the sample is a thin plate which is likely to be bent, it can be positioned with high accuracy without causing bending, and the processing accuracy of the sample after positioning, such as inspection, can be improved. be able to.
【００１７】[0017]
【実施例】図１乃至図３は、本発明の一実施例の要部を
示したものである。この一実施例の試料位置決め機構
は、Ｘ線の回折作用を利用して薄板状の結晶性試料のカ
ット面検査を行うカット面検査装置に装備されるもので
あり、具体的には、図１乃至図３に示すように、水晶振
動子（ウエハ）等の薄板状の試料１を載せる基台２と、
前記試料１を前記基台２の所定位置に密着した状態に押
える付勢手段３とを備えてなる。1 to 3 show a main part of an embodiment of the present invention. The sample positioning mechanism of this embodiment is provided in a cut surface inspection apparatus that performs a cut surface inspection of a thin crystalline sample using an X-ray diffraction effect. 3, a base 2 on which a thin plate-shaped sample 1 such as a quartz oscillator (wafer) is placed;
And a biasing means 3 for pressing the sample 1 in a state in which the sample 1 is in close contact with a predetermined position of the base 2.
【００１８】前記基台２は、カット面検査装置（図示
略）の所定の位置に取り付けられる。この基台２は、水
平方向に延在する矩形平板状の基板部５と、この基板部
５の上に突設された３つの突起部６ａ，６ｂ，６ｃと、
前記基板部５の一角に隅部（コーナー部）７を提供する
一対の壁部材７ａ，７ｂとを具備してなる。The base 2 is attached to a predetermined position of a cut surface inspection device (not shown). The base 2 includes a rectangular flat plate-like substrate portion 5 extending in the horizontal direction, and three protrusions 6 a, 6 b, 6 c protruding from the substrate portion 5.
A pair of wall members 7a and 7b for providing a corner (corner) 7 at one corner of the substrate unit 5 is provided.
【００１９】前記試料１は、図示のように、その平坦な
下面１ａを載置面として、前記３つの突起部６ａ，６
ｂ，６ｃの上に載置される。即ち、前記３つの突起部６
ａ，６ｂ，６ｃは、試料１の載置面１ａに先端を当接し
て、試料１の載置面１ａに直交する方向の位置決めをな
すものある。３つの突起部６ａ，６ｂ，６ｃの内の２つ
６ａ，６ｂが、隅部７寄りの位置に設けられており、ま
た、残りの一つ６ｃが隅部７から離れた位置に設けられ
ている。なお、隅部７寄りに位置する２つの突起部６
ａ，６ｂは、隅部７と離れた突起部６ｃとを結ぶ線分に
ついて、線対象の配置にある。As shown in the figure, the sample 1 has a flat lower surface 1a as a mounting surface and the three projections 6a, 6a.
b, 6c. That is, the three protrusions 6
Reference numerals a, 6b, and 6c denote the positions in the direction perpendicular to the mounting surface 1a of the sample 1 by abutting the tips on the mounting surface 1a of the sample 1. Two of the three projections 6a, 6b, 6c are provided at a position near the corner 7, and the other one 6c is provided at a position away from the corner 7. I have. The two protrusions 6 located near the corner 7
Reference numerals a and 6b denote a line segment connecting the corner 7 and the protruding portion 6c separated from each other.
【００２０】また、前記隅部７は、突起部６ａ，６ｂ，
６ｃに載置面１ａを当てた試料１の外周を前記壁部材７
ａ，７ｂに当接させることによって、試料１の載置面１
ａに沿う方向の移動を拘束する。前記壁部材７ａと、壁
部材７ｂと基板部５のそれぞれは、互いに直交してい
る。また、この隅部７には、吸引用の穴８が貫通形成さ
れている。この穴８は、図１に示すように、試料１に面
する側で拡径し、試料１側における開口端８ａの幅寸法
ｗは、試料１の厚さ寸法ｔよりも大きくなっている。The corners 7 are formed with protrusions 6a, 6b,
The outer periphery of the sample 1 with the mounting surface 1a applied to the
a, 7b, the mounting surface 1 of the sample 1
The movement in the direction along a is restricted. The wall member 7a, the wall member 7b, and the substrate 5 are orthogonal to each other. Further, a suction hole 8 is formed through the corner 7. As shown in FIG. 1, the diameter of the hole 8 increases on the side facing the sample 1, and the width dimension w of the opening end 8 a on the sample 1 side is larger than the thickness dimension t of the sample 1.
【００２１】前記穴８の試料１とは反対側の開口部に
は、前記付勢手段３が接続される。この付勢手段３は、
前記穴８を介して、基台２上の試料１を隅部７の稜線部
に向けて真空吸引し、その吸引力によって、試料１を前
記突起部６ａ，６ｂ，６ｃおよび一隅部７の壁部材７
ａ，７ｂに密着させることによって、試料１を基台２の
定位置に位置決め（固定）する。従って、穴８によって
設定される吸引方向は、試料１の一角を斜め下方に引き
寄せるものが良い。The urging means 3 is connected to the opening of the hole 8 on the side opposite to the sample 1. This urging means 3
The sample 1 on the base 2 is vacuum-suctioned through the hole 8 toward the ridge line of the corner 7, and the sample 1 is moved by the suction force to the wall of the protrusions 6 a, 6 b, 6 c and the corner 7. Member 7
The sample 1 is positioned (fixed) at a fixed position on the base 2 by being brought into close contact with a and 7b. Therefore, it is preferable that the suction direction set by the hole 8 pulls one corner of the sample 1 obliquely downward.
【００２２】なお、補足説明すると、前記基板部５に貫
通した穴１０は入射Ｘ線１１を試料１に導くものであ
り、また基板部５に貫通した穴１２は、回折Ｘ線１３を
検出装置（図示略）側に導くものである。It should be noted that the hole 10 penetrating the substrate 5 guides the incident X-ray 11 to the sample 1, and the hole 12 penetrating the substrate 5 detects the diffracted X-ray 13. (Not shown).
【００２３】以上の一実施例では、試料１を前記突起部
６ａ，６ｂ，６ｃに載置した状態で前記付勢手段３を稼
働させると、前記穴８の拡径された開口端８ａおよび突
起部６ａ，６ｂ，６ｃによって基板部５と試料１の載置
面との間に確保された間隙１４によって、試料１を前記
隅部７の稜線部に向けて引き込む真空吸引力が試料１上
の広範囲に分布して作用する。そして、試料１は、この
吸引力によって、前記突起部６ａ，６ｂ，６ｃおよび一
隅部７の壁部材７ａ，７ｂに密着した状態に位置決めさ
れ、固定される。In the above embodiment, when the urging means 3 is operated with the sample 1 placed on the projections 6a, 6b, 6c, the diameter of the opening end 8a of the hole 8 and the projection are increased. Due to the gap 14 secured between the substrate 5 and the mounting surface of the sample 1 by the portions 6a, 6b, 6c, the vacuum suction force for drawing the sample 1 toward the ridge line of the corner 7 causes a vacuum suction force on the sample 1. It acts in a wide distribution. The sample 1 is positioned and fixed by the suction force in a state in which the sample 1 is in close contact with the protrusions 6a, 6b, 6c and the wall members 7a, 7b of the corners 7.
【００２４】このように、前記一実施例の試料位置決め
機構では、試料１を基台２の定位置に位置決めするため
に試料１に作用させる力が真空吸引力であり、試料１の
表面に局部的に外力を作用させずに、しかも、試料１の
外周部に圧縮力を作用させることもなく、基台２上の定
位置に試料１を位置決めすることができる。As described above, in the sample positioning mechanism of the above-described embodiment, the force applied to the sample 1 to position the sample 1 at the fixed position on the base 2 is the vacuum suction force, and the local force is applied to the surface of the sample 1. The sample 1 can be positioned at a fixed position on the base 2 without applying any external force and without applying a compressive force to the outer peripheral portion of the sample 1.
【００２５】従って、試料が、たわみが生じ易い薄板状
のものであっても、たわみを生じさせずに高精度に位置
決めすることができて、位置決め後の試料に対する検査
等の処理精度を向上させることができる。Therefore, even if the sample is a thin plate which is likely to be bent, it can be positioned with high accuracy without causing bending, and the processing accuracy of the sample after positioning, such as inspection, can be improved. be able to.
【００２６】なお、本発明に係る位置決め機構の場合、
位置決めのために試料１を付勢する付勢手段は、試料１
に隅部７の稜線部に向かう力を作用させるもので、しか
も作用する力が試料１の一部に局部的に作用するもので
なければ、一実施例の真空吸引のものには限定しない。In the case of the positioning mechanism according to the present invention,
The urging means for urging the sample 1 for positioning includes the sample 1
The present invention is not limited to the vacuum suction device of the embodiment, as long as a force is applied to the ridge of the corner 7 and the applied force does not locally act on a part of the sample 1.
【００２７】例えば、試料１を付勢する付勢手段は、前
記一隅部７の稜線部に向けて試料に気流（弱い圧縮空
気）を吹き付けることによって、試料１を前記突起部６
ａ，６ｂ，６ｃおよび一隅部７に密着させる構造として
も良い。また、前記付勢手段は、前記試料１の表面に塗
布される磁性粉と、磁性粉の塗布された試料１を突起部
６ａ，６ｂ，６ｃおよび前記一隅部７の稜線部側に磁力
吸引する磁力体とで、試料１を前記突起部６ａ，６ｂ，
６ｃおよび一隅部７に密着させる構成としても、良い。For example, the urging means for urging the sample 1 blows the sample 1 onto the projection 6 by blowing airflow (weak compressed air) toward the ridgeline of the one corner 7.
a, 6b, 6c and one corner 7 may be adhered to each other. Further, the urging means magnetically attracts the magnetic powder applied to the surface of the sample 1 and the sample 1 coated with the magnetic powder to the protrusions 6a, 6b, 6c and the ridge line side of the corner 7. With the magnetic body, the sample 1 is connected to the protrusions 6a, 6b,
It is good also as a structure which makes 6c and one corner part 7 closely_contact | adhered.
【００２８】また、前述の一実施例では、試料１を位置
決めするための隅部は、一つとしたが、試料１が多角形
等の場合には、その形状に応じた複数箇所に隅部を設け
ることとしても良い。In the above-described embodiment, the number of corners for positioning the sample 1 is one. However, when the sample 1 is a polygon or the like, the corners are formed at a plurality of positions corresponding to the shape. It may be provided.
【００２９】また、一実施例の場合、付勢手段３におけ
る吸引用の穴は単一で隅部の稜線部に設けるとしたが、
付勢手段３における吸引穴の設置位置および設置個数
は、一実施例のものに限らない。設置位置は、隅部を形
成している壁部材７ａ，７ｂ上の任意の位置に設定する
ことができ、また、それぞれの壁部材７ａ，７ｂ上に、
個別に吸引用の穴を設けるようにしても良い。In the case of one embodiment, the suction hole in the urging means 3 is provided as a single hole at the corner ridge.
The installation position and number of suction holes in the urging means 3 are not limited to those of the embodiment. The installation position can be set at an arbitrary position on the wall members 7a and 7b forming the corners, and on the respective wall members 7a and 7b,
A hole for suction may be provided individually.
【００３０】[0030]
【発明の効果】本発明に係る試料位置決め機構では、試
料を基台の定位置に位置決めするための試料への付勢
は、気圧差あるいは磁力による吸引力で、機械的な接触
による付勢ではないため、試料の表面に局部的に外力を
作用させずに、しかも、試料の外周部に圧縮力を作用さ
せることもなく、基台上の定位置に試料を位置決めする
ことができる。In the sample positioning mechanism according to the present invention, the bias to the sample for positioning the sample at a fixed position on the base is a suction force due to a pressure difference or a magnetic force, and is not a bias due to a mechanical contact. Therefore, the sample can be positioned at a fixed position on the base without locally applying an external force to the surface of the sample and without applying a compressive force to the outer peripheral portion of the sample.
【００３１】従って、試料が、たわみが生じ易い薄板状
のものであっても、たわみを生じさせずに高精度に位置
決めすることができて、位置決め後の試料に対する検査
等の処理精度を向上させることができる。Therefore, even if the sample is a thin plate which is apt to be bent, it can be positioned with high precision without causing bending, and the processing accuracy of the sample after positioning, such as inspection, can be improved. be able to.
【図１】本発明の一実施例の平面図である。FIG. 1 is a plan view of an embodiment of the present invention.
【図２】図１のイ−イ線に沿う断面図である。FIG. 2 is a sectional view taken along the line II in FIG.
【図３】図１のロ−ロ線に沿う断面図である。FIG. 3 is a cross-sectional view taken along a roll line in FIG. 1;
１ 試料 １ａ 載置面 ２ 基台 ３ 付勢手段 ５ 基板部 ７ 隅部 ７ａ 壁部材 ７ｂ 壁部材 ８ 穴 ８ａ 開口端 １０ 穴 １１ 入射Ｘ線 １２ 穴 １３ 回折Ｘ線 １４ 間隙 REFERENCE SIGNS LIST 1 sample 1a mounting surface 2 base 3 urging means 5 substrate part 7 corner part 7a wall member 7b wall member 8 hole 8a open end 10 hole 11 incident X-ray 12 hole 13 diffraction X-ray 14 gap
Claims (3)
行う装置の所定位置に位置決めする試料位置決め機構で
あって、 前記試料を載せる基台と、試料を前記基台の所定位置に
密着した状態に押える付勢手段とを備える構成とし、 前記基台には、薄板状の試料の載置面に先端を当接して
試料の載置面に直交する方向の位置決めをなす三つの突
起部と、これら突起部に載置面を当てた試料の外周を当
接させることによって試料の載置面に沿う方向の移動を
拘束する隅部とを装備し、 前記付勢手段は、前記隅部を形成している部材上に設け
た穴からの真空吸引によって、試料を前記突起部および
隅部に密着させる構造としたことを特徴とする試料位置
決め機構。1. A sample positioning mechanism for positioning a thin plate-shaped sample at a predetermined position of an apparatus for performing an inspection or the like on the sample, comprising: a base on which the sample is mounted; and a sample positioned at a predetermined position on the base. And a biasing means for pressing the sample in close contact with the base. The base has three protrusions for abutting the tip of the thin plate on the mounting surface of the sample and performing positioning in a direction perpendicular to the mounting surface of the sample. And a corner that restrains movement of the sample in the direction along the mounting surface by bringing the outer periphery of the sample in contact with the mounting surface into contact with these protrusions, wherein the urging means includes: A sample positioning mechanism having a structure in which a sample is brought into close contact with said protrusions and corners by vacuum suction from a hole provided on a member forming a portion.
行う装置の所定位置に位置決めする試料位置決め機構で
あって、 前記試料を載せる基台と、試料を前記基台の所定位置に
密着した状態に押える付勢手段とを備える構成とし、 前記基台には、薄板状の試料の載置面に先端を当接して
試料の載置面に直交する方向の位置決めをなす三つの突
起部と、これらの突起部に載置面を当てた試料の外周を
当接させることによって試料の載置面に沿う方向の移動
を拘束する隅部とを装備し、 前記付勢手段は、前記隅部の稜線部に向けて試料に気流
を吹き付けることによって、試料を前記突起部および隅
部に密着させる構造としたことを特徴とする試料位置決
め機構。2. A sample positioning mechanism for positioning a thin plate-shaped sample at a predetermined position of an apparatus for performing an inspection or the like on the sample, comprising: a base on which the sample is mounted; and a sample positioned at a predetermined position on the base. And a biasing means for pressing the sample in close contact with the base. The base has three protrusions for abutting the tip of the thin plate on the mounting surface of the sample and performing positioning in a direction perpendicular to the mounting surface of the sample. Part, and a corner that restrains movement of the sample in the direction along the mounting surface by abutting the outer periphery of the sample with the mounting surface on these projections; A sample positioning mechanism having a structure in which a sample is brought into close contact with the protrusions and the corners by blowing an air current toward the ridges of the corners.
行う装置の所定位置に位置決めする試料位置決め機構で
あって、 前記試料を載せる基台と、試料を前記基台の所定位置に
密着した状態に押える付勢手段とを備える構成とし、 前記基台には、薄板状の試料の載置面に先端を当接して
試料の載置面に直交する方向の位置決めをなす三つの突
起部と、これらの突起群に載置面を当てた試料の外周を
当接させることによって試料の載置面に沿う方向の移動
を拘束する隅部とを装備し、 前記付勢手段は、前記試料に塗布される磁性粉と、磁性
粉の塗布された試料を突起群側および前記隅部の稜線部
側に磁力吸引する磁力体とで、試料を前記突起部および
隅部に密着させる構成としたことを特徴とする試料位置
決め機構。3. A sample positioning mechanism for positioning a thin plate-shaped sample at a predetermined position of an apparatus for performing an inspection or the like on the sample, comprising: a base on which the sample is mounted; and a sample positioned at a predetermined position on the base. And a biasing means for pressing the sample in close contact with the base. The base has three protrusions for abutting the tip of the thin plate on the mounting surface of the sample and performing positioning in a direction perpendicular to the mounting surface of the sample. Part, and a corner that restrains movement of the sample in the direction along the mounting surface by abutting the outer periphery of the sample with the mounting surface on the group of projections; Magnetic powder applied to the sample, and a magnetic body that magnetically attracts the sample coated with the magnetic powder to the protrusion group side and the ridge line side of the corner, and the sample is brought into close contact with the protrusion and the corner. A sample positioning mechanism characterized in that:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3005275A JP2986556B2 (en) | 1991-01-21 | 1991-01-21 | Sample positioning mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3005275A JP2986556B2 (en) | 1991-01-21 | 1991-01-21 | Sample positioning mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0682397A JPH0682397A (en) | 1994-03-22 |
| JP2986556B2 true JP2986556B2 (en) | 1999-12-06 |
Family
ID=11606693
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3005275A Expired - Fee Related JP2986556B2 (en) | 1991-01-21 | 1991-01-21 | Sample positioning mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2986556B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6354605B2 (en) * | 2015-01-22 | 2018-07-11 | 株式会社島津製作所 | X-ray analyzer |
| JP6760811B2 (en) * | 2016-09-30 | 2020-09-23 | 株式会社ディスコ | Transport device |
| TW202035977A (en) * | 2019-03-20 | 2020-10-01 | 美商卡爾蔡司Ｓｍｔ公司 | Sample holder, system and method |
| CN113899689B (en) * | 2021-09-26 | 2022-08-09 | 江南大学 | Sample limiting and folding device for fabric wrinkle recovery in-situ detection and detection method |
-
1991
- 1991-01-21 JP JP3005275A patent/JP2986556B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0682397A (en) | 1994-03-22 |
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|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |