JP2972495B2 - Laser diode element visual inspection device - Google Patents
Laser diode element visual inspection deviceInfo
- Publication number
- JP2972495B2 JP2972495B2 JP5197170A JP19717093A JP2972495B2 JP 2972495 B2 JP2972495 B2 JP 2972495B2 JP 5197170 A JP5197170 A JP 5197170A JP 19717093 A JP19717093 A JP 19717093A JP 2972495 B2 JP2972495 B2 JP 2972495B2
- Authority
- JP
- Japan
- Prior art keywords
- laser diode
- diode element
- defective
- tray
- control unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Semiconductor Lasers (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明はレーザーダイオード素子
外観検査装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser diode device appearance inspection apparatus.
【０００２】[0002]
【従来の技術】従来のレーザーダイオード素子の外観検
査は、図３にに示すように手作業でレーザーダイオード
素子１を透明のトレイ１３に収納し、そのトレイ１３を
顕微鏡１１の載置台１２に載せて検査していた。又レー
ザーダイオード素子１の反対面を見る場合は図４に示す
ように透明トレイ１３を裏返しトレイの外側から検査を
行なっていた。2. Description of the Related Art As shown in FIG. 3, a conventional laser diode element is inspected for its appearance by manually placing a laser diode element 1 in a transparent tray 13 and placing the tray 13 on a mounting table 12 of a microscope 11. Had been inspected. When looking at the opposite surface of the laser diode element 1, as shown in FIG. 4, the transparent tray 13 was turned upside down and the inspection was performed from outside the tray.
【０００３】さらにレーザーダイオード素子１の両発光
端面を検査する場合は、図５に示すように、顕微鏡１１
の載置台１２を任意の角度で傾斜させて固定できる傾斜
載置台１４となっており、その状態でレーザーダイオー
ド素子収納トレイ１３を載せて検査を行なっていた。Further, when inspecting both light emitting end faces of the laser diode element 1, as shown in FIG.
The mounting table 12 is an inclined mounting table 14 that can be fixed by being inclined at an arbitrary angle, and the laser diode element storage tray 13 is mounted in this state for inspection.
【０００４】[0004]
【発明が解決しようとする課題】この従来の顕微鏡によ
るレーザーダイオード素子の外観検査方法では作業性が
悪く、検査に膨大な時間を要していた。In this conventional method for inspecting the appearance of a laser diode element using a microscope, workability is poor, and an enormous amount of time is required for the inspection.
【０００５】又、作業者の習熟度によって外観検査基準
にばらつきがあり、正しい検査が行なわれないという問
題点がしばしば発生していた。[0005] In addition, there is a problem that the appearance inspection standard varies depending on the skill level of the operator, and a correct inspection is not performed.
【０００６】さらにはピンセットによる不良素子の除去
と良品素子の整列を行っており、その時点で外観不良を
引き起す要因にもなっていた。Further, the removal of defective elements by tweezers and the alignment of non-defective elements have been performed, and at that time, it has been a factor of causing poor appearance.
【０００７】[0007]
【課題を解決するための手段】本発明のレーザーダイオ
ード素子外観検査装置は、レーザーダイオード素子のＰ
面，Ｎ面及び両発光端面を映像にするカメラ及びモニタ
テレビと、レーザーダイオード素子を１個ずつハンドリ
ングして供給及び収納，外観不良素子の廃棄を行なうハ
ンドラリングアームと、ハンドリングアームを制御する
制御部と、検査面の映像を順次切換える映像切換制御部
と、良品整列トレイと不良廃棄トレイとを備えている。According to the present invention, there is provided a laser diode element appearance inspection apparatus comprising: a laser diode element;
A camera and monitor television for imaging the surface, the N surface, and both light-emitting end surfaces, a handling arm for handling and supplying and storing laser diode elements one by one, and discarding defective appearance elements, and a control for controlling the handling arm. Unit, an image switching control unit for sequentially switching images on the inspection surface, a non-defective product alignment tray, and a defective disposal tray.
【０００８】[0008]
【実施例】次に本発明について図面を参照して説明す
る。DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described with reference to the drawings.
【０００９】図１は本発明の第１の実施例の概略図であ
る。FIG. 1 is a schematic diagram of a first embodiment of the present invention.
【００１０】レーザーダイオード素子１は載置台１２に
載置される。載置台１２は素子搭載部が透明である。こ
の載置台１２に隣接してハンドリングアーム１０が設置
され、さらに、ハンドリングアーム１０に近接して良品
整列トレイ９、不良品廃棄トレイ８が設置されている。
ハンドリングアーム１０は従来から用いられているもの
が利用できる。この実施例では先端に素子吸着ノズルを
備えた真空吸着型のものを使用した。The laser diode element 1 is mounted on a mounting table 12. The mounting table 12 has a transparent element mounting portion. A handling arm 10 is installed adjacent to the mounting table 12, and a non-defective product sorting tray 9 and a defective product disposal tray 8 are installed near the handling arm 10.
A conventionally used handling arm can be used. In this embodiment, a vacuum suction type having an element suction nozzle at the tip was used.
【００１１】載置台の周囲には、さらに、ＣＣＤカメラ
３が配置されている。このＣＣＤカメラ３は、レーザー
ダイオード素子１のＰ面，Ｎ面、発光面を映す為に、カ
メラ保持具４で保持され、レーザーダイオード素子１の
上下及び両脇に合計４台配置されている。各々のＣＣＤ
カメラ３は映像切換制御部（市販品、菱光社製、自動映
像切換器、ＴＡ−２０４Ａ）５に接続されており、モニ
ターテレビ６に順次映像を映し出す。A CCD camera 3 is further provided around the mounting table. The CCD cameras 3 are held by camera holders 4 so as to project the P surface, the N surface, and the light emitting surface of the laser diode element 1, and a total of four CCD cameras 3 are arranged above, below, and on both sides of the laser diode element 1. Each CCD
The camera 3 is connected to an image switching control unit (commercially available, manufactured by Ryoko Co., Ltd., automatic image switcher, TA-204A) 5 and sequentially displays images on a monitor television 6.
【００１２】作業者はモニタテレビに順次映し出される
各ＣＣＤカメラ３からの映像を順次目視検査し、不良と
判断した時点でハンドラー制御部７に信号を送る。ま
た、順次映し出される映像の最後の映像まで到達しても
不良が見つからない場合は、その素子は良品であるの
で、その旨ハンドラー制御部７に入力する。The operator sequentially visually inspects the images from the CCD cameras 3 sequentially projected on the monitor television, and sends a signal to the handler control unit 7 when it is determined that the image is defective. If no defect is found even when the last image of the sequentially displayed images reaches the last image, the element is a non-defective element, and the fact is input to the handler control unit 7.
【００１３】ハンドラー制御部７はマイコンで構成され
ており、作業者により入力された信号に基づいてハンド
リングアーム１０に制御信号を出力する。このハンドラ
ー制御部の動作を図６に示す。The handler control unit 7 is constituted by a microcomputer, and outputs a control signal to the handling arm 10 based on a signal input by an operator. FIG. 6 shows the operation of the handler control unit.
【００１４】ハンドリングアームはハンドーラー制御部
７の制御信号に基づいて、素子上方へのアーム先端の移
動、素子吸着、アーム旋回、吸着解除の一連の動作を繰
返し、良品は良品整列トレイに整列し、不良品は不良品
廃棄トレイに排出した後、初期位置に復帰する。The handling arm repeats a series of operations of moving the tip of the arm above the element, adsorbing the element, turning the arm, and releasing the adsorption based on the control signal of the handler control section 7, and the non-defective products are aligned on the non-defective product alignment tray. After the defective product is discharged to the defective product disposal tray, it returns to the initial position.
【００１５】図２は本発明の第２の実施例の斜視図であ
る。この実施例は、カメラ保持具４が多関節ロボットと
なっており１台のＣＣＤカメラ３でＰ面，Ｎ面，両発光
面を順次観子姿勢に自動的に切換る。この姿勢制御はハ
ンドラー制御で行う。この場合のハンドラー制御部は映
像切換制御部の機能を兼ね、図７に示す動作をする。FIG. 2 is a perspective view of a second embodiment of the present invention. In this embodiment, the camera holder 4 is an articulated robot, and one CCD camera 3 automatically switches the P-plane, the N-plane, and both of the light-emitting surfaces sequentially to the observer posture. This attitude control is performed by handler control. In this case, the handler control unit also functions as a video switching control unit and performs the operation shown in FIG.
【００１６】第２の実施例の場合、複数個のカメラ３を
必要としない為映像切換制御部５が不要となり、メカ的
に簡易なものとなる。さらにカメラ３の設定角度を任意
に選択できる為、レーザーダイオード素子１の外観の発
見しにくい微細な傷等も判断できるという有意性があ
る。In the case of the second embodiment, since a plurality of cameras 3 are not required, the video switching control section 5 is not required, and the mechanism is mechanically simple. Further, since the setting angle of the camera 3 can be arbitrarily selected, there is a significance that it is possible to judge a minute flaw or the like in which the appearance of the laser diode element 1 is difficult to find.
【００１７】[0017]
【発明の効果】以上説明したように本発明は、レーザー
ダイオード素子のＰ面，Ｎ面，両発光面の状態をカメラ
でとらえて、それを順次モニタテレビ上に映像として、
自動的に１個ずつあらわすことによって、わずらわしい
手作業を排除することが可能となった。またレーザーダ
イオード素子１個ずつ自動的にハンドリングしてピンセ
ットによって外観を損うことなく良品を整列し、不良品
を廃棄することが可能となり、処理能力と歩留を向上せ
しめる効果を有する。さらにモニタテレビ上に映像を映
し出せることによって、複数の作業者が同時に状態を把
握することが可能となり、作業者間のが間検査基準のば
らつきをなくすることができる効果を有する。As described above, according to the present invention, the states of the P-plane, the N-plane, and both light-emitting planes of the laser diode element are captured by a camera, and the images are sequentially displayed on a monitor television as images.
By automatically representing them one by one, it has become possible to eliminate troublesome manual work. In addition, it is possible to automatically handle the laser diode elements one by one and to arrange the non-defective products without impairing the appearance by tweezers, and to discard the defective products, which has an effect of improving the processing capacity and the yield. Further, since the image can be displayed on the monitor television, a plurality of workers can grasp the state at the same time, and there is an effect that it is possible to eliminate the variation of the inspection standard between workers.
【図１】本発明の第１の実施例の斜視図。FIG. 1 is a perspective view of a first embodiment of the present invention.
【図２】第２の実施例の斜視図。FIG. 2 is a perspective view of a second embodiment.
【図３】従来のＰ面，Ｎ面を検査する方法を示す斜視
図。FIG. 3 is a perspective view showing a conventional method for inspecting a P plane and an N plane.
【図４】反対面を検査するときのトレイの載置方法を示
す断面図。FIG. 4 is a cross-sectional view showing a tray mounting method when inspecting the opposite surface.
【図５】従来の両発光端面を検査する方法を示す斜視
図。FIG. 5 is a perspective view showing a conventional method for inspecting both light emitting end faces.
【図６】第１の実施例のハンドラー制御部の動作を示す
図。FIG. 6 is a diagram illustrating an operation of a handler control unit according to the first embodiment.
【図７】第２の実施例のハンドラー制御部の動作を示す
図。FIG. 7 is a diagram illustrating an operation of a handler control unit according to the second embodiment.
１ レーザーダイオード素子 ３ カメラ ４ カメラ保持具 ５ 映像切換え制御部 ６ モニタテレビ ７ ハンドラー制御部 ８ 不良廃棄トレイ ９ 良品整列トレイ １０ ハンドリングアーム １１ 顕微鏡 １２ 載置台 １３ 透明トレイ １４ 傾斜載置台 DESCRIPTION OF SYMBOLS 1 Laser diode element 3 Camera 4 Camera holder 5 Video switching control part 6 Monitor television 7 Handler control part 8 Defective disposal tray 9 Good product alignment tray 10 Handling arm 11 Microscope 12 Mounting table 13 Transparent tray 14 Inclined mounting table
Claims (1)
び両発光端面を映像にするカメラ及びモニタテレビと、
レーザーダイオード素子を１個ずつハンドリングして供
給及び収納，外観不良素子の廃棄を行なうハンドリング
アームと、ハンドリングアームを制御する制御部と、検
査面の映像を順次切換える映像切換え制御部分と、良品
整列トレイと、不良廃棄トレイとを少くとも備えたこと
を特徴とするレーザーダイオード素子外観検査装置。A camera and a monitor television for displaying images on a P-plane, an N-plane and both light-emitting end faces of a laser diode element;
A handling arm for handling and supplying and storing laser diode elements one by one, and discarding defective appearance elements, a control unit for controlling the handling arm, an image switching control unit for sequentially switching images on the inspection surface, and a non-defective product alignment tray. A laser diode element visual inspection device comprising at least a defective waste tray.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5197170A JP2972495B2 (en) | 1993-08-09 | 1993-08-09 | Laser diode element visual inspection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5197170A JP2972495B2 (en) | 1993-08-09 | 1993-08-09 | Laser diode element visual inspection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0750327A JPH0750327A (en) | 1995-02-21 |
| JP2972495B2 true JP2972495B2 (en) | 1999-11-08 |
Family
ID=16369962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5197170A Expired - Fee Related JP2972495B2 (en) | 1993-08-09 | 1993-08-09 | Laser diode element visual inspection device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2972495B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100371314B1 (en) * | 2000-01-20 | 2003-02-07 | 엘지전자 주식회사 | Inspection Apparatus and Method of Laser Diode |
| KR100547656B1 (en) * | 2003-05-27 | 2006-01-31 | (주) 핸들러월드 | Handler device for micro module inspection |
| JP2007019237A (en) * | 2005-07-07 | 2007-01-25 | Tokyo Seimitsu Co Ltd | Probing device for double-sided light emitting element |
| KR101595840B1 (en) * | 2009-09-03 | 2016-02-29 | (주)제이티 | Inspection apparatus for inspecting device method for inspecting device |
| CN107407890A (en) * | 2015-03-20 | 2017-11-28 | 应用材料公司 | The fault detect of laser diode |
-
1993
- 1993-08-09 JP JP5197170A patent/JP2972495B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0750327A (en) | 1995-02-21 |
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