JP2969161B2 - Ultrasonic probe - Google Patents
Ultrasonic probeInfo
- Publication number
- JP2969161B2 JP2969161B2 JP7931092A JP7931092A JP2969161B2 JP 2969161 B2 JP2969161 B2 JP 2969161B2 JP 7931092 A JP7931092 A JP 7931092A JP 7931092 A JP7931092 A JP 7931092A JP 2969161 B2 JP2969161 B2 JP 2969161B2
- Authority
- JP
- Japan
- Prior art keywords
- acoustic
- case
- probe
- probe unit
- ultrasonic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Description
【０００１】[0001]
【産業上の利用分野】本発明は医用の超音波探触子を利
用分野とし、特に消毒液や滅菌用等の薬品の浸透を排除
して特性を良好に維持する配列型の超音波探触子（配列
型探触子とする）に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a medical ultrasonic probe, and more particularly, to an array type ultrasonic probe which maintains good characteristics by eliminating permeation of a disinfectant or a sterilizing chemical. Element (to be an array type probe).
【０００２】[0002]
【発明の背景】配列型探触子は、複数個の微小圧電片を
並べてセクタあるいはリニア駆動等の電子走査され、超
音波診断装置に超音波の送受波部として有用される。そ
して、近年では、特に、薬品等の侵入により、音響的特
性の低下を来すことから、これらを防止することが望ま
れている。2. Description of the Related Art An array-type probe is provided with a plurality of micro piezoelectric pieces arranged side by side and electronically scanned by a sector or linear drive, and is used as an ultrasonic wave transmitting / receiving section in an ultrasonic diagnostic apparatus. In recent years, in particular, since acoustic properties are deteriorated due to invasion of chemicals or the like, it is desired to prevent such deterioration.
【０００３】[0003]
【従来技術】第２図は従来例を説明する超音波探触子の
図で、同図（ａ）は外観図、同図（ｂ）はＡ−Ａ’断面
図である。配列型探触子は、超音波発生源としての複数
の微小圧電片１を例えばチタン酸ジルコン酸鉛（通称Ｐ
ＺＴ）として形成される。そして、両主面に駆動電極
（未図示）を有し、その複数個を幅方向としてバッキン
グ材２上に並べられる。通常では、微小圧電片１間には
その強度を維持するために充填材３が埋設される。但
し、充填材３は、微小圧電片１間の音響的結合を防止し
てその超音波特性を維持する必要から、例えば音響イン
ピーダンスが小さく音響減衰の大きいシリコン系の樹脂
が選定される。そして、微小圧電片群（以下、圧電片群
とする）の超音波送受波面となる前面に音響整合層４を
形成し、さらに音響レンズ５を被着される。音響整合層
４は生体への送受波効率を高めるため、例えば二層構造
とし、一層目４ａをエポキシ系、二層目４ｂをポリウレ
タン系の樹脂として、生体の音響インピーダンスに順次
接近するようにする。音響レンズ５は超音波を収束して
効率を高めるために使用されるが、その材料は、音速や
生体への密着性等の関係からシリコン材が選定される。
そして、凸状のレンズ本体を音響整合層の前面にして、
圧電片群を脚部内に嵌挿する（以下、これらを便宜上探
触子ユニット６とする）。探触子ユニット６は、音響レ
ンズ５をケース７の開口面から露出させた状態で、ケー
ス７内に収容されて保持固定される。なお、圧電片群の
電極に接続するフレキシブル基板や、これをケース７外
に導出するケーブルの図及びその説明は省略する。2. Description of the Related Art FIG. 2 is a view of an ultrasonic probe for explaining a conventional example. FIG. 2 (a) is an external view and FIG. 2 (b) is a sectional view taken along the line AA '. The array type probe uses a plurality of micro piezoelectric pieces 1 as an ultrasonic wave generating source, for example, lead zirconate titanate (commonly called P
ZT). Then, both main surfaces have drive electrodes (not shown), and a plurality of the drive electrodes are arranged on the backing material 2 in a width direction. Normally, a filler 3 is buried between the micro piezoelectric pieces 1 to maintain the strength. However, since the filler 3 is required to prevent acoustic coupling between the micro piezoelectric pieces 1 and maintain its ultrasonic characteristics, for example, a silicon resin having a small acoustic impedance and a large acoustic attenuation is selected. Then, an acoustic matching layer 4 is formed on the front surface serving as an ultrasonic wave transmitting / receiving surface of the small piezoelectric piece group (hereinafter, referred to as a piezoelectric piece group), and an acoustic lens 5 is further attached. The acoustic matching layer 4 has, for example, a two-layer structure in order to increase the efficiency of transmitting and receiving waves to and from the living body. The first layer 4a is made of an epoxy resin and the second layer 4b is made of a polyurethane resin so as to sequentially approach the acoustic impedance of the living body. . The acoustic lens 5 is used to converge the ultrasonic wave to increase the efficiency, and a silicon material is selected as the material from the relationship of the sound speed, the adhesion to the living body, and the like.
And make the convex lens body the front of the acoustic matching layer,
The group of piezoelectric pieces is inserted into the legs (hereinafter, these are referred to as a probe unit 6 for convenience). The probe unit 6 is held and fixed in the case 7 with the acoustic lens 5 exposed from the opening surface of the case 7. The illustration and description of a flexible board connected to the electrodes of the piezoelectric piece group and a cable for leading the flexible board out of the case 7 are omitted.
【０００４】[0004]
【従来技術の問題点】しかしながら、上記構成の超音波
探触子では、音響レンズ５を薬品の浸透性が大きなシリ
コン材とするため、その表面からあるいはケースとの間
隙から探触子ユニット６内に侵入する。そして、音響的
特性を阻害する問題があった。特に、充填材３としての
シリコン及び音響整合層４の二層目４ａのポリウレタン
に悪影響を及ぼす。このため、充填剤３や音響整合層４
は、超音波特性のみならず耐薬品性を考慮しての選定を
余儀なくされていた。例えば充填材３はウレタン系と
し、音響整合層４は一層目４ａをガラス系、二層目４ｂ
をエポキシ系を選択せざるを得ないこともあった。しか
し、このようなものでは、微小圧電片１間の独立性を損
うとともに、生体との充分な音響整合を行えず、超音波
特性を阻害する要因になっていた。このようなことか
ら、例えば音響レンズ５の表面あるいは裏面に耐薬性に
優れたポリイミドフィルムを貼付したり、音響レンズ５
にシリコンオイルを含浸させたりして、薬品の侵入を防
止することが提案されている。しかし、ポリイミドフィ
ルムを貼付する場合には、音響レンズが曲面であるため
に外周部分に折り目やシワができる。したがって、その
取扱作業を困難にすることに加えて、放射効率の低下
や、不要な反射波の発生を招く等の超音波特性にも悪影
響を及ぼす。そして、ポリイミドフィルムを貼付したと
しても、ケースと音響レンズとの間隙を埋めることはで
きない。また、音響レンズ５にシリコンオイルを入れる
場合には、使用環境変化により外部へ逆流出する虞もあ
り、シリコンオイルの量を制御することが困難である。
したがって、いずれの場合も、実際に採用することが非
現実的であった。However, in the ultrasonic probe having the above-described structure, since the acoustic lens 5 is made of a silicon material having a high permeability to chemicals, the acoustic lens 5 has a probe unit 6 from its surface or a gap with the case. Invade. Then, there is a problem that the acoustic characteristics are hindered. In particular, it adversely affects silicon as the filler 3 and polyurethane of the second layer 4 a of the acoustic matching layer 4. For this reason, the filler 3 and the acoustic matching layer 4
Had to be selected in consideration of not only ultrasonic characteristics but also chemical resistance. For example, the filler 3 is urethane-based, the acoustic matching layer 4 is a glass-based first layer 4a, and a second layer 4b.
In some cases, it was necessary to select an epoxy resin. However, such a structure impairs the independence between the micro piezoelectric pieces 1 and does not allow sufficient acoustic matching with a living body, thus hindering ultrasonic characteristics. For this reason, for example, a polyimide film having excellent chemical resistance is attached to the front or back surface of the acoustic lens 5 or the acoustic lens 5
It has been proposed to impregnate the product with silicon oil to prevent the invasion of chemicals. However, when the polyimide film is attached, the acoustic lens has a curved surface, so that the outer peripheral portion may be creased or wrinkled. Therefore, in addition to making the handling operation difficult, the ultrasonic characteristics such as a reduction in radiation efficiency and the generation of unnecessary reflected waves are adversely affected. And even if a polyimide film is stuck, the gap between the case and the acoustic lens cannot be filled. In addition, when silicon oil is put into the acoustic lens 5, there is a possibility that the oil will flow back to the outside due to a change in the use environment, and it is difficult to control the amount of silicon oil.
Therefore, in any case, it was impractical to actually adopt it.
【０００５】[0005]
【発明の目的】本発明は、耐薬性を向上して、しかも超
音波特性を良好に維持する配列型探触子を提供すること
を目的とする。SUMMARY OF THE INVENTION It is an object of the present invention to provide an array type probe which improves chemical resistance and maintains good ultrasonic characteristics.
【０００６】[0006]
【解決手段】本発明は、前述の音響レンズの表面を含む
ケース前面に耐薬品性の保護膜を蒸着により一体的に形
成し、探触子ユニット内部への薬品の浸透を防止したこ
とを解決手段とする。以下、本発明の一実施例を説明す
る。The present invention solves the problem that a chemical-resistant protective film is integrally formed on the front surface of a case including the surface of the above-mentioned acoustic lens by vapor deposition to prevent the penetration of a chemical into a probe unit. Means. Hereinafter, an embodiment of the present invention will be described.
【０００７】[0007]
【実施例】第１図は本発明の一実施例を説明する超音波
探触子の断面図である。なお、前従来例図と同一部分に
は同番号を付与してその説明は簡略する。配列型探触子
は、前述同様に、音響レンズ５をケース７の開口面から
露出させた状態で、探触子ユニット６をケース７内に収
容して保持固定される。但し、探触子ユニット６は、微
小圧電片１間に充填材３が埋設された圧電片群の前面に
音響整合層４を形成してさらに音響レンズ５を被着した
ものをいう。この実施例では、音響整合層４の一層目４
ａをエポキシ系、二層目４ｂをポリウレタン系の樹脂と
し、各微小圧電片１間に埋設する充填材３をシリコン系
の樹脂とする。そして、音響レンズ５を含むケース前面
に、ＣＶＤ（Chemical VaporDeposition）により、保護
膜８を形成する。保護膜８は耐薬性に優れたポリパラキ
シリレン系のプラスチックとし、その膜厚を１０μｍ程
度とする。すなわち、固形状のポリパラキシリレン系の
プラスチックを粉体状にして飛散させ、これを音響レン
ズ５の表面と、音響レンズ５とケース７の間隙部分と、
ケース７の上面に被着させて一体的に形成する。FIG. 1 is a sectional view of an ultrasonic probe illustrating an embodiment of the present invention. The same parts as those in the prior art are denoted by the same reference numerals, and description thereof will be simplified. As described above, the array-type probe holds and fixes the probe unit 6 in the case 7 with the acoustic lens 5 exposed from the opening surface of the case 7. However, the probe unit 6 refers to a unit in which the acoustic matching layer 4 is formed on the front surface of a group of piezoelectric pieces in which the filler 3 is embedded between the small piezoelectric pieces 1 and the acoustic lens 5 is further attached. In this embodiment, the first layer 4 of the acoustic matching layer 4
a is an epoxy resin, the second layer 4b is a polyurethane resin, and the filler 3 buried between the small piezoelectric pieces 1 is a silicon resin. Then, a protective film 8 is formed on the front surface of the case including the acoustic lens 5 by CVD (Chemical Vapor Deposition). The protective film 8 is made of a polyparaxylylene-based plastic having excellent chemical resistance, and has a thickness of about 10 μm. That is, the solid polyparaxylylene-based plastic is made into a powder and scattered, and the powder is dispersed on the surface of the acoustic lens 5 and the gap between the acoustic lens 5 and the case 7.
It is attached to the upper surface of the case 7 and integrally formed.
【０００８】このような構成であれば、ケース前面のす
べてに保護膜８を形成したので、音響レンズ５の表面あ
るいは音響レンズ５とケース７の間隙部分からの、薬品
の侵入を確実に防止できる。そして、保護膜８には、フ
ィルム貼着のときのように、折り目もシワも発生するこ
となく、また、フィルム（２０乃至３０μ程度）等に比
較し保護膜８を薄くできることからも超音波特性に与え
る影響も少ない。また、保護膜８はシリコンオイルとは
異なって固体であるため、使用環境によって変化するこ
とがなく、特性を一定に維持できる。また、この実施例
でのポリパラキシレン系のプラスチックは耐摩耗性に優
れ、体表面とのこすりで音響レンズ５が摩耗することを
防止できる。そして、薬品の侵入を確実に防止するの
で、充填材３や音響整合層４の材質について耐薬性を考
慮することなく、音響特性を優先（重視）して選定でき
るため、その選択幅を広げることができる。したがっ
て、本実施例のように、例えば各微小圧電片１間に埋設
する充填材３にシリコン系を、また音響整合層４の一層
目４ａにエポキシ系を、二層目４ｂにポリウレタン系を
選択できる。このようなことから、耐薬品性のみなら
ず、微小圧電片１間の独立性を維持して、生体との充分
な音響整合を行えることにより、総合的な超音波特性を
良好にできる。With this structure, since the protective film 8 is formed on the entire front surface of the case, the invasion of chemicals from the surface of the acoustic lens 5 or the gap between the acoustic lens 5 and the case 7 can be reliably prevented. . The protective film 8 does not have any folds or wrinkles as in the case of attaching a film, and has an ultrasonic characteristic because the protective film 8 can be made thinner than a film (about 20 to 30 μm) or the like. Has little effect on Further, since the protective film 8 is a solid unlike silicon oil, it does not change depending on the use environment and can maintain a constant characteristic. Further, the polyparaxylene-based plastic in this embodiment is excellent in abrasion resistance and can prevent the acoustic lens 5 from being worn by rubbing against the body surface. Since the invasion of chemicals is reliably prevented, the material of the filler 3 and the acoustic matching layer 4 can be selected with priority (emphasis) on the acoustic characteristics without considering the chemical resistance. Can be. Therefore, as in the present embodiment, for example, a silicon-based filler is selected for the filler 3 embedded between the micro piezoelectric pieces 1, an epoxy-based material is selected for the first layer 4a of the acoustic matching layer 4, and a polyurethane-based material is selected for the second layer 4b. it can. Thus, not only the chemical resistance but also the independence between the micro piezoelectric pieces 1 can be maintained and sufficient acoustic matching with the living body can be performed, so that the overall ultrasonic characteristics can be improved.
【０００９】[0009]
【他の事項】上記実施例では、音響整合層４は二層構造
としたが、一層構造あるいは三層以上の多層構造であっ
てもよい。また、保護膜８は、ＣＶＤにより形成すると
しが、これに限らずＰＶＤ（Physical Vapor Depositio
n）等であってもよく、要は、保護膜８としての材料を
粉末状にして付着させる方法であれば、特許請求の範囲
にていう蒸着に該当する。また、保護膜８は、ケース前
面に設けたが、ケース７の外周全面に設けてもよい。こ
の場合、ケースの材料についても耐薬性を考慮すること
なく、設計上有利である。また、充填材３はシリコン系
を、また音響整合層４の一層目４ａはエポキシ系、二層
目４ｂはポリウレタン系を選択したが、これに限らず他
のものであってもよく、要は、薬品の浸透しやすい部分
に、蒸着により保護膜８を設けて遮断し、これにより超
音波特性を維持させたものは、その実施形態に拘らず本
発明の技術的範囲に包含される。Others In the above embodiment, the acoustic matching layer 4 has a two-layer structure, but may have a single-layer structure or a multilayer structure having three or more layers. Also, the protective film 8 is formed by CVD, but is not limited to this, and PVD (Physical Vapor Depositio) is used.
n) may be used. In other words, any method may be used in which the material of the protective film 8 is powdered and adhered thereto, which corresponds to the vapor deposition described in the claims. Although the protective film 8 is provided on the front surface of the case, it may be provided on the entire outer periphery of the case 7. In this case, the material of the case is advantageous in design without considering chemical resistance. The filler 3 is made of a silicon material, the first layer 4a of the acoustic matching layer 4 is made of an epoxy material, and the second layer 4b is made of a polyurethane material. The protective film 8 is provided by vapor deposition in a portion where the chemical easily penetrates, and the protective film 8 is cut off, thereby maintaining the ultrasonic characteristics, and is included in the technical scope of the present invention regardless of the embodiment.
【０００９】[0009]
【発明の効果】本発明は、本発明は、音響レンズの表面
を含むケース前面に耐薬品性の保護膜を蒸着により一体
的に形成し、探触子ユニット内部への薬品の浸透を防止
したので、耐薬性を向上して超音波特性を良好に維持す
る配列型探触子を提供でき、実際的なメリットには非常
に大きなものがある。According to the present invention, a chemical resistant protective film is integrally formed on the front surface of the case including the surface of the acoustic lens by vapor deposition to prevent the penetration of the chemical into the probe unit. Therefore, it is possible to provide an array-type probe that improves the chemical resistance and maintains good ultrasonic characteristics, and the practical advantages are very large.
【第１図】本発明の一実施例を説明する超音波探触子の
断面図である。FIG. 1 is a cross-sectional view of an ultrasonic probe explaining one embodiment of the present invention.
【第２図】従来例を説明する超音波探触子の図で、同図
（ａ）は外観図、同図（ｂ）はＡ−Ａ’断面図である。FIG. 2 is a diagram of an ultrasonic probe for explaining a conventional example, wherein FIG. 2 (a) is an external view and FIG. 2 (b) is a cross-sectional view along AA ′.
１ 微小圧電片、２ バッキング材、３ 充填材、４
音響整合層、５ 音響レンズ、６ 探触子ユニット、７
ケース、８ 保護膜．1 micro piezoelectric piece, 2 backing material, 3 filler, 4
Acoustic matching layer, 5 acoustic lens, 6 probe unit, 7
Case, 8 protective film.
Claims (1)
設された圧電片群の前面に音響整合層を形成し、さらに
該音響整合層上にシリコン材からなる音響レンズを設け
て探触子ユニットとし、該探触子ユニットの音響レンズ
をケースの開口面から露出させた状態で、該探触子ユニ
ットを前記ケース内に収容して保持固定した超音波探触
子において、 前記音響レンズの表面を含むケース前面に耐薬品性の保
護膜を蒸着により一体的に形成し、上記探触子ユニット
内部への薬品の浸透を防止したことを特徴とする超音波
探触子。An acoustic matching layer is formed on the front surface of a group of piezoelectric pieces in which a filler is embedded in each gap between a plurality of micro piezoelectric pieces, and an acoustic lens made of a silicon material is provided on the acoustic matching layer. An ultrasonic probe in which the probe unit is housed in the case and held and fixed in a state where the probe unit is a probe unit and the acoustic lens of the probe unit is exposed from an opening surface of the case; An ultrasonic probe, wherein a chemical-resistant protective film is integrally formed on a front surface of a case including a surface of a lens by vapor deposition to prevent penetration of a chemical into the inside of the probe unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7931092A JP2969161B2 (en) | 1992-02-29 | 1992-02-29 | Ultrasonic probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7931092A JP2969161B2 (en) | 1992-02-29 | 1992-02-29 | Ultrasonic probe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05244689A JPH05244689A (en) | 1993-09-21 |
| JP2969161B2 true JP2969161B2 (en) | 1999-11-02 |
Family
ID=13686287
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7931092A Expired - Fee Related JP2969161B2 (en) | 1992-02-29 | 1992-02-29 | Ultrasonic probe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2969161B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4543258B2 (en) * | 2005-03-03 | 2010-09-15 | 本多電子株式会社 | Array-type ultrasonic probe |
| US9289191B2 (en) | 2011-10-12 | 2016-03-22 | Seno Medical Instruments, Inc. | System and method for acquiring optoacoustic data and producing parametric maps thereof |
| US20130338475A1 (en) * | 2012-06-13 | 2013-12-19 | Seno Medical Instruments, Inc. | Optoacoustic imaging system with fiber optic cable |
-
1992
- 1992-02-29 JP JP7931092A patent/JP2969161B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05244689A (en) | 1993-09-21 |
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