JP2911395B2 - Pressure device for ultrasonic bonding - Google Patents
Pressure device for ultrasonic bondingInfo
- Publication number
- JP2911395B2 JP2911395B2 JP7213505A JP21350595A JP2911395B2 JP 2911395 B2 JP2911395 B2 JP 2911395B2 JP 7213505 A JP7213505 A JP 7213505A JP 21350595 A JP21350595 A JP 21350595A JP 2911395 B2 JP2911395 B2 JP 2911395B2
- Authority
- JP
- Japan
- Prior art keywords
- stopper
- resonator
- main body
- apparatus main
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Pressure Welding/Diffusion-Bonding (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
- Control Of Presses (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、複数の被接合部
材の互いに重ね合わされた被接合部分を所定周波数を有
する超音波振動で接合する超音波接合に用いられる加圧
装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pressurizing apparatus used in ultrasonic bonding for bonding superposed portions of a plurality of members to be bonded by ultrasonic vibration having a predetermined frequency.
【０００２】[0002]
【従来の技術】超音波接合としては、特公昭５４−１３
３４９号公報に開示されたように、超音波振動を発生す
る振動子の出力端に共振器を結合し、受け台を共振器の
接合作用部に近づく方向に所定距離移動することによ
り、共振器に設けられた接合作用部と受け台とでそれら
の間に複数の被接合部材の互いに重ね合わされた被接合
部分を加圧した状態に保持し、振動子から接合作用部に
超音波振動を伝達することにより、被接合部分を接合す
ることが知られている。2. Description of the Related Art For ultrasonic bonding, Japanese Patent Publication No. 54-13 / 1979
As disclosed in Japanese Patent Application Publication No. 349/349, a resonator is coupled to an output end of a vibrator that generates ultrasonic vibrations, and a pedestal is moved a predetermined distance in a direction approaching a joining action portion of the resonator, thereby obtaining a resonator. The ultrasonic wave vibration is transmitted from the vibrator to the joint acting portion by holding the joined portions of the plurality of joined members in a pressurized state between the joint actuating portion and the pedestal provided between the members. It is known that the parts to be joined are joined together.
【０００３】[0003]
【発明が解決しようとする課題】しかし、従来の超音波
接合装置は、受け台を結合した油圧シリンダの駆動によ
って被接合部分を受け台と共振器の接合作用部とで加圧
保持するだけであることから、加圧保持状態下での被接
合部分の厚さが油圧シリンダの設定移動量で一定値に固
定されるので、１つの超音波接合装置で接合できる被接
合部材の種類が限定されてしまう。換言するならば、加
圧保持状態下での被接合部分の厚さを変える場合には、
受け台の上方に共振器を静止状態で保持している支持部
材の長さを変更しなければならず、装置の取り扱いが面
倒である。However, the conventional ultrasonic welding apparatus merely presses and holds the portion to be welded by the receiving cylinder and the joining operation portion of the resonator by driving the hydraulic cylinder connected to the receiving table. Since the thickness of the portion to be joined under the pressure holding state is fixed to a fixed value by the set movement amount of the hydraulic cylinder, the types of members to be joined that can be joined by one ultrasonic joining device are limited. Would. In other words, when changing the thickness of the part to be joined under the pressure holding state,
The length of the support member that holds the resonator stationary above the cradle must be changed, which makes the device cumbersome.
【０００４】そこで、この発明は、加圧保持状態下での
被接合部分の厚さを適切な値に設定して、接合強度を安
定させることができる超音波接合装置を提供しようとす
るものである。Accordingly, an object of the present invention is to provide an ultrasonic bonding apparatus capable of stabilizing the bonding strength by setting the thickness of a portion to be bonded under a pressure holding state to an appropriate value. is there.
【０００５】[0005]
【課題を解決するための手段】この発明は、装置本体に
取り付けられた昇降駆動用のエアシリンダと、エアシリ
ンダのピストンロッドに共振器を両端支持状態で保持す
るホルダを連結すると共に加圧力調整動作を行うための
カップリング機構と、エアシリンダの下降限度位置への
停止以前にホルダの移動を規制するストッパ機構とを備
え、ストッパ機構を、装置本体に少なくとも３点以上に
配置されたガイド部材と、これらのガイド部材に摺接係
合されたストッパと、このストッパ及び装置本体に跨設
され当該ストッパを昇降操作する操作部材とで構成した
ことを特徴としている。この構成によれば、エアシリン
ダが下降動作し、共振器の接合作用部が受け台との共同
で被接合部分を加圧保持するとき、ストッパがホルダの
下降を規制すると、その規制下でのエアシリンダの下降
動作でカップリング機構が圧縮されて加圧力調整動作を
行う。また、操作部材を回転操作することにより、スト
ッパを装置本体に３点以上配置されたガイドレールに摺
接係合した状態で円滑に平行に昇降して所望の上下位置
に適切に調整し、被接合部分への加圧しすぎによる損傷
が発生するのを阻止すると共に、適切な加圧保持状態で
接合強度を安定させることができる。According to the present invention, an air cylinder for driving up and down mounted on an apparatus body, a holder for holding a resonator in a state where both ends are supported by a piston rod of the air cylinder and a pressing force adjustment are provided. A coupling mechanism for performing the operation, and a stopper mechanism for restricting the movement of the holder before stopping the air cylinder to the lower limit position, wherein the stopper mechanism is provided at at least three points on the apparatus main body. And a stopper slidably engaged with these guide members, and an operating member laid across the stopper and the apparatus main body to operate the stopper up and down. According to this configuration, when the air cylinder moves down and the joining action portion of the resonator presses and holds the joined portion together with the pedestal, if the stopper regulates the lowering of the holder, the stopper under the regulation is The coupling mechanism is compressed by the lowering operation of the air cylinder to perform the pressing force adjusting operation. In addition, by rotating the operation member, the stopper is smoothly raised and lowered in parallel with the slide rails engaged with three or more guide rails arranged on the apparatus main body, and is appropriately adjusted to a desired vertical position. Damage due to excessive pressurization of the joint portion can be prevented, and the joint strength can be stabilized in an appropriate pressurized state.
【０００６】[0006]
【発明の実施の形態】図３は実施形態１として共振器を
縦置き状態に配置した超音波接合装置の外観を示し、装
置本体１の前壁１ａの前面にはホルダ２をガイド機構３
を介して昇降する状態に組み付けてある。このホルダ２
は振動子４の出力端に図外のねじで同軸状態に結合され
た共振器５を両端支持した状態で縦置き状態に保持して
いる。振動子４は図外の超音波発振器から電線６を介し
て受けた電気的なエネルギにより所定周波数を有する縦
波の超音波振動を発生して出力する、いわゆる、電気エ
ネルギを機械エネルギに変換する逆圧電素子または磁歪
素子などからなる電気音響変換器または電気振動変換器
になっている。共振器５は良好な音響特性を有するチタ
ンなどのような合金にて振動子４から出力された超音波
振動と所定の共振周波数で共振する棒状になっており、
振動変換部５ａの十字形の前後方向端部に一体に接合作
用部５ｂを有すると共に、共振器５をホルダ２に両端支
持の状態に保持するための支持部５ｃを一体に備えてい
る。また、装置本体１の上部にはホルダ２を上方に付勢
するコイルスプリングのような弾性部材７を有し、特
に、弾性部材７はエアシリンダ１０に図外の圧力空気供
給回路から上昇動作用の圧力空気が未供給状態である場
合に、ホルダ２を自重で落下するのを防止すると共に上
昇限度位置に保持する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 3 shows the appearance of an ultrasonic bonding apparatus in which resonators are arranged vertically as a first embodiment. A holder 2 is provided on the front surface of a front wall 1a of the apparatus main body 1 with a guide mechanism 3.
It is assembled so that it can be moved up and down via. This holder 2
A resonator 5 which is coaxially coupled to an output end of the vibrator 4 by a screw (not shown) is supported vertically and held vertically. The vibrator 4 generates and outputs longitudinal ultrasonic vibration having a predetermined frequency based on electric energy received via an electric wire 6 from an ultrasonic oscillator (not shown), that is, converts electrical energy into mechanical energy. It is an electroacoustic transducer or an electric vibration transducer composed of an inverse piezoelectric element or a magnetostrictive element. The resonator 5 is made of an alloy such as titanium having good acoustic characteristics and has a rod-like shape that resonates with ultrasonic vibration output from the vibrator 4 at a predetermined resonance frequency.
The vibration converting portion 5a has a joint acting portion 5b integrally with a cross-shaped front-back end of the cross-shaped portion, and is integrally provided with a support portion 5c for holding the resonator 5 in a state where both ends are supported by the holder 2. Further, an elastic member 7 such as a coil spring for urging the holder 2 upward is provided at an upper portion of the apparatus main body 1. In particular, the elastic member 7 is attached to the air cylinder 10 for a lifting operation from a pressure air supply circuit (not shown). When the pressurized air is not supplied, the holder 2 is prevented from dropping by its own weight and is held at the ascending limit position.
【０００７】図１は前記共振器５を昇降する加圧装置９
を示し、装置本体１の上下前後左右の壁１ａ，１ｂ，１
ｃ，１ｄ，１ｅ，１ｆで囲まれた内部空間１ｇの内部に
おいて、昇降駆動用のエアシリンダ１０がそのピストン
ロッド１０ａを下方に向けた状態で装置本体１の上壁１
ｅに装着されている。装置本体１の前壁１ａには逃げ孔
１１を形成してあり、この逃げ孔１１にホルダ２の左右
方向中央部の背面より突出した取付部２ａを前壁１ａの
前面より内部空間１ｇの内部に向けて挿入してピストン
ロッド１０ａの下端にカップリング機構１２を介して連
結したことにより、共振器５が装置本体１の前壁１ａの
前面で両端支持された状態で縦置き状態に配置されてい
る。カップリング機構１２はピストンロッド１０ａに結
合された上部ベース１２ａと、これの下部に所定間隔を
以て結合された中間ベース１２ｂと、これの下部にガイ
ドロッド１２ｃを介して上下動する状態に取り付けられ
た下部ベース１２ｄと、下部ベース１２ｄと中間ベース
１２ｂとの間に配置されて下部ベース１２ｄを下方に付
勢するコイルスプリングのような弾性部材１２ｅとを備
えている。下部ベース１２ｄの下面にはホルダ２の取付
部２ａの上面を重ね合わせて図外のねじで取り付けてあ
ると共に、中間ベース１２ｂにはトリガ機構１３の支持
部材１３ａを突設してある。支持部材１３ａは前壁１ａ
の逃げ孔１１及びホルダ２に形成された逃げ孔１４を経
て前方に突出されており、その支持部材１３ａの先端に
はトリガ機構１３の操作部材１３ｂを装着してある。操
作部材１３ｂは支持部材１３ａより上方の部分を手動で
回転操作することにより図外のボルト・ナット機構を介
して支持部材１３ａより下方の部分の突出量を調整する
ようになっている。支持部材１３ａとその下方で対向す
るトリガ機構１３の可動部材１３ｃ及びスイッチ部１３
ｄはホルダ２の前面に取り付けられている。可動部材１
３ｃはホルダ２に突設されたブラケット１３ｅに上下動
可能で上方に抜け止めされた状態に装着されていると共
にコイルスプリングのような弾性部材１３ｆで上方に付
勢されている。スイッチ部１３ｄはその中央に形成され
た貫通孔に挿入された可動部材１３ｃを検出してオン動
作するホトセンサのような無接触タイプの図外のスイッ
チを有している。また、装置本体１の内部空間１ｇには
ストッパ機構１５を設けてある。ストッパ機構１５は、
図１及び図２に示すように、ホルダ２の取付部２ａより
下部において、装置本体１の左右壁１ｃ，１ｄに４点配
置を以て図外のねじで取り付けられた被ガイド部材とし
てのガイドレール１５ａと、これらのガイドレール１５
ａに上下方向に摺接係合する状態に装着された被ガイド
部材としてのスライダ１５ｂと、これらのスライダ１５
ｂを左右側縁に図外のねじで取り付けられた前面視コ字
形のストッパ１５ｃと、ストッパ１５ｃと装置本体１の
上壁１ｅとに跨設された操作部材１５ｄと、ストッパ位
置固定手段としてのねじ１５ｅとを備えている。操作部
材１５ｄは上壁１ｅより上方の部分を手動で回転操作す
ることにより図外のボルト・ナット機構を介して上壁１
ｅより下方の部分を上下動させると共にストッパ１５ｃ
に抜け止めされた状態で回転して、ストッパ１５ｃをガ
イドレール１５ａに沿って昇降操作するようになってい
る。ねじ１５ｅは装置本体１の左右壁１ｃ，１ｄに上下
方向に縦長に形成された長孔１５ｆに装置本体１の外側
より挿入し、前後に並設されたガイドレール１５ａの間
を経て、ストッパ１５ｃの側面に形成された図外のねじ
孔に締結されている。再び図１において、装置本体１の
前壁１ａより前方に延びた下壁１ｆ上には受け台１６を
共振器５の最前部で下側に位置する接合作用部５ｂより
も下方で当該接合作用部５ｂと対向する状態に設置して
ある。FIG. 1 shows a pressurizing device 9 for raising and lowering the resonator 5.
And upper, lower, front, rear, left and right walls 1a, 1b, 1 of the apparatus main body 1.
In an internal space 1g surrounded by c, 1d, 1e, and 1f, the upper cylinder 1 of the apparatus main body 1 with the air cylinder 10 for driving up and down with the piston rod 10a directed downward is provided.
e. An escape hole 11 is formed in a front wall 1a of the apparatus main body 1, and a mounting portion 2a protruding from a rear surface of a central portion of the holder 2 in the left-right direction is formed in the escape hole 11 in the interior space 1g from the front surface of the front wall 1a. And coupled to the lower end of the piston rod 10a via the coupling mechanism 12 so that the resonator 5 is disposed vertically with both ends supported by the front surface of the front wall 1a of the apparatus main body 1. ing. The coupling mechanism 12 is attached to an upper base 12a connected to the piston rod 10a, an intermediate base 12b connected to the lower part of the upper base 12a at a predetermined interval, and a lower part of the coupling base 12 via a guide rod 12c. A lower base 12d and an elastic member 12e, such as a coil spring, disposed between the lower base 12d and the intermediate base 12b to urge the lower base 12d downward. On the lower surface of the lower base 12d, the upper surface of the mounting portion 2a of the holder 2 is superimposed and attached with a screw (not shown), and a support member 13a of the trigger mechanism 13 is projected from the intermediate base 12b. The support member 13a is a front wall 1a.
The support member 13a projects forward through an escape hole 11 formed in the holder 2 and an escape hole 14 formed in the holder 2, and an operation member 13b of a trigger mechanism 13 is mounted on a tip end of the support member 13a. The operation member 13b is configured to manually rotate the portion above the support member 13a to adjust the amount of protrusion of the portion below the support member 13a via a bolt / nut mechanism (not shown). The movable member 13c and the switch unit 13 of the trigger mechanism 13 which oppose the support member 13a below the support member 13a
d is attached to the front surface of the holder 2. Movable member 1
Reference numeral 3c is mounted on a bracket 13e protruding from the holder 2 so as to be movable up and down so as to be prevented from coming off, and is urged upward by an elastic member 13f such as a coil spring. The switch section 13d has a non-contact type non-illustrated switch such as a photo sensor that detects a movable member 13c inserted into a through hole formed in the center thereof and turns on. Further, a stopper mechanism 15 is provided in the internal space 1g of the apparatus main body 1. The stopper mechanism 15
As shown in FIGS. 1 and 2, a guide rail 15 a as a guided member is attached to the left and right walls 1 c and 1 d of the apparatus main body 1 at four points below the mounting portion 2 a of the holder 2 by screws (not shown). And these guide rails 15
a slider 15b as a guided member mounted in a state of slidingly engaging with
b, a U-shaped stopper 15c attached to the left and right side edges with screws (not shown), an operation member 15d provided between the stopper 15c and the upper wall 1e of the apparatus body 1, and a stopper position fixing means. And a screw 15e. The operation member 15d is operated by manually rotating the upper portion of the upper wall 1e, so that the upper wall 1 is moved via a bolt and nut mechanism (not shown).
e, the part below the upper and lower parts is moved up and down,
In this state, the stopper 15c is moved up and down along the guide rail 15a. The screw 15e is inserted from the outside of the apparatus main body 1 into an elongated hole 15f formed vertically in the left and right walls 1c and 1d of the apparatus main body 1 from the outside of the apparatus main body 1, passes through the guide rails 15a arranged in front and rear, and then stops. Are screwed into screw holes (not shown) formed on the side surfaces of the. In FIG. 1 again, on the lower wall 1f extending forward from the front wall 1a of the apparatus main body 1, a pedestal 16 is provided at the forefront of the resonator 5 below the bonding operation portion 5b located below. It is installed in a state facing the part 5b.
【０００８】したがって、この実施形態１の構造によれ
ば、図外の圧力空気供給回路の空気供給経路切り替えに
より、エアシリンダ１０のピストンロッド１０ａが縮小
駆動して、接合作用部５ｂが所定距離上昇した後、ピス
トンロッド１０ａの縮小駆動が停止し、接合作用部５ｂ
が上昇限度位置に停止することにより、図４のａ図に示
すように、接合作用部５ｂの下面と受け台１６の上面と
の間に被接合部分入出用の所定空間を形成させておく。
この状態において、受け台１６の上面の接合作業領域に
複数の被接合部材Ｗ１，Ｗ２の互いに重ね合わされた被
接合部分Ｗａを重ね合わせた状態で搭載する。そして、
圧力空気供給回路の空気供給経路切り替えにより、ピス
トンロッド１０ａが伸長駆動すると、図４のｂ図に示す
ように、受け台１６の上面に搭載された被接合部分Ｗａ
の上面が共振器５の接合作用部５ｂの下面に押圧されて
接触すると共に、被接合部分Ｗａの下面が受け台１６の
上面に押圧されて接触し、被接合部分Ｗａが受け台１６
と接合作用部５ｂとでそれらの間に加圧された状態に保
持される。Therefore, according to the structure of the first embodiment, by switching the air supply path of the pressure air supply circuit (not shown), the piston rod 10a of the air cylinder 10 is driven to contract, and the joining action portion 5b is raised by a predetermined distance. After that, the reduction drive of the piston rod 10a is stopped, and the joining action portion 5b
Is stopped at the ascending limit position, thereby forming a predetermined space for entering and exiting a portion to be joined between the lower surface of the joining action portion 5b and the upper surface of the receiving table 16 as shown in FIG.
In this state, the plurality of to-be-joined portions Wa of the plurality of to-be-joined members W1 and W2 are mounted on the joining work area on the upper surface of the cradle 16 in an overlapping manner. And
When the piston rod 10a is driven to extend by switching the air supply path of the pressure air supply circuit, as shown in FIG.
Is pressed against and contacts the lower surface of the joining action portion 5b of the resonator 5, and the lower surface of the portion to be joined Wa is pressed and contacts the upper surface of the pedestal 16, so that the portion Wa to be joined becomes
And the joint action part 5b are kept in a state where they are pressurized.
【０００９】引き続くピストンロッド１０ａの伸長駆動
により、図４のｃ図に示すように、ホルダ２の取付部２
ａの下面がストッパ機構１５のストッパ１５ｃの上面に
当接して、ホルダ２の下降動作がストッパ機構１５で規
制された状態となり、接合作用部５ｂによる被接合部分
Ｗａの加圧保持状態での厚さが一定となる一方、上記取
付部２ａのストッパ１５ｃへの当接後でのピストンロッ
ド１０ａの伸長駆動により、カップリング機構１２の中
間ベース１２ｂと下部ベース１２ｄとの間の間隔が狭ま
って弾性部材１２ｅが圧縮され、この弾性部材１２ｅの
圧縮に伴って増加した弾性力が下部ベース１２ｄ及びホ
ルダ２を経由して共振器５の接合作用部５ｂに伝達して
被接合部分Ｗａの加圧力を増すと共に、下部ベース１２
ｄがストッパ１５ｃで行き止まり状態のままで、中間ベ
ース１２ｂと下部ベース１２ｄとの間の間隔が狭くなる
のに伴って、トリガ機構１３の操作部材１３ｂが可動部
材１３ｃを押し下げる。さらに引き続くピストンロッド
１０ａの伸長駆動により、図４のｄ図に示すように、カ
ップリング機構１２の中間ベース１２ｂと下部ベース１
２ｄとの間隔がさらに狭くなって、接合作用部５ｂによ
る被接合部分Ｗａの加圧力が増加すると共に、トリガ機
構１３の操作部材１３ｂが可動部材１３ｃをさらに押し
下げ、この押し下げられた可動部材１３ｃをスイッチ部
１３ｄが検出してオン信号を図外の制御部に出力し、こ
の制御部が図外の超音波発振器の動作を開始させて振動
子４に電気的なエネルギを供給して振動子４に超音波振
動を発生させる。この超音波振動に共振器５が共振し、
接合作用部５ｂがエアシリンダ１０による加圧方向と直
交する方向に最大振動振幅を以て振動して被接合部分Ｗ
ａを非溶解接合する。この被接合部分Ｗａの接合完了後
において、空気供給回路の空気供給経路の切り替えによ
り、エアシリンダ１０が縮小駆動し、図４のｃ図、ｂ図
を経てａ図の状態となり、接合作用部５ｂが下降限度位
置から上昇限度位置に停止する過程で、トリガ機構１３
のスイッチ部１３ｄが可動部材１３ｃの検出状態を解除
されてオフ信号を制御部に出力し、振動子４の発振が停
止すると共に、接合作用部５ｂと受け台１６とによる被
接合部分Ｗａへの加圧保持が解除された後に、受け台１
６の上面と接合作用部５ｂの下面が上記接合の完了した
被接合部分Ｗａから瞬時に離れ、当該接合の完了した被
接合部分Ｗａを介して一体となった複数の被接合部材Ｗ
１，Ｗ２を受け台１６と接合作用部５ｂとの間の所定空
間から取り出すことによって、接合の一工程が終了す
る。By the subsequent extension drive of the piston rod 10a, as shown in FIG.
The lower surface of a is in contact with the upper surface of the stopper 15c of the stopper mechanism 15, and the lowering operation of the holder 2 is restricted by the stopper mechanism 15. While the distance between the intermediate base 12b and the lower base 12d of the coupling mechanism 12 is reduced by the extension drive of the piston rod 10a after the attachment portion 2a comes into contact with the stopper 15c, and the elasticity is reduced. The member 12e is compressed, and the elastic force increased by the compression of the elastic member 12e is transmitted to the joining action portion 5b of the resonator 5 via the lower base 12d and the holder 2, and the pressing force of the joined portion Wa is reduced. As it increases, the lower base 12
As the distance between the intermediate base 12b and the lower base 12d becomes narrower while d stops at the stopper 15c, the operating member 13b of the trigger mechanism 13 pushes down the movable member 13c. As shown in FIG. 4D, the intermediate base 12b and the lower base 1 of the coupling mechanism 12 are further driven by the extension drive of the piston rod 10a.
The distance between the movable member 13c and the movable member 13c is further reduced by the operation member 13b of the trigger mechanism 13 further depressing the movable member 13c. The switch unit 13d detects and outputs an ON signal to a control unit (not shown), which starts operation of an ultrasonic oscillator (not shown) to supply electric energy to the vibrator 4 and To generate ultrasonic vibration. The resonator 5 resonates with this ultrasonic vibration,
The joining portion 5b vibrates with a maximum vibration amplitude in a direction orthogonal to the direction of pressurization by the air cylinder 10, and the joined portion W
a is non-melt bonded. After the joining of the parts Wa to be joined is completed, the air cylinder 10 is reduced and driven by the switching of the air supply path of the air supply circuit to the state shown in FIG. 4A through FIG. 4C and FIG. Is stopped from the lower limit position to the upper limit position, the trigger mechanism 13
13d is released from the detection state of the movable member 13c and outputs an OFF signal to the control unit, the oscillation of the vibrator 4 is stopped, and the connection to the part Wa to be joined by the joining action part 5b and the pedestal 16 is performed. After the pressure holding is released,
6 and the lower surface of the joining action portion 5b are instantaneously separated from the joined portion Wa where the joining is completed, and the plurality of joined members W are integrated via the joined portion Wa where the joining is completed.
1, W2 is taken out of the predetermined space between the receiving table 16 and the joining action portion 5b, thereby completing one joining step.
【００１０】特に、前記接合の一工程において、ストッ
パ１５ｃの上下位置調整は接合作用部５ｂによる被接合
部分Ｗａの加圧保持状態下での厚さを決める上で重要で
ある。このようなことから、この実施形態１では、図２
に示すように、ストッパ１５ｃを装置本体１に４点配置
したガイドレール１５ａにスライダ１５ｂを介して摺接
係合してあるから、操作部材１５ｄの装置本体１より上
方の部分を手動で回転操作するだけで、ストッパ１５ｃ
をガイドレール１５ａに沿って円滑に平行に昇降して所
望の上下位置に適切に調整することができ、被接合部分
Ｗａに加圧しすぎによる損傷が発生するのを阻止すると
共に、適切な加圧保持状態で接合強度を安定させること
ができる。また、この実施形態１では、ねじ１５ｅを設
けてあるから、ねじ１５ｅを緩めた後に、操作部材１５
ｄを回転操作してストッパ１５ｃの上下位置調整を行
い、その後、ねじ１５ｅをストッパ１５ｃに装置本体１
の左右壁１ｃ，１ｄを介在させて締結すれば、上下位置
調整されたストッパ１５ｃが装置本体１に固定されるの
で、ストッパ１５ｃによるホルダ２の移動規制位置を安
定させることができる。この実施形態１では図４のｄ図
で超音波振動を発生するようにしたが、トリガ機構１３
の操作部材１３ｂの支持部材１３ａより下方への突出量
を調整すれば、図４のｂ図またはｃ図で超音波振動を発
生することもできる。In particular, in one step of the joining, the adjustment of the vertical position of the stopper 15c is important in determining the thickness of the portion Wa to be joined under the pressure holding state by the joining action portion 5b. For this reason, in the first embodiment, FIG.
As shown in (1), the stopper 15c is slidably engaged with the guide rail 15a, which is disposed at four points on the apparatus main body 1, via the slider 15b, so that the portion of the operation member 15d above the apparatus main body 1 is manually rotated. Just stop the stopper 15c
Can be moved up and down smoothly and parallel along the guide rails 15a to properly adjust it to a desired vertical position, thereby preventing damage to be caused by excessive pressurization of the portion Wa to be joined and proper pressurization. The bonding strength can be stabilized in the holding state. Further, in the first embodiment, since the screw 15e is provided, the operation member 15
d is rotated to adjust the vertical position of the stopper 15c.
When the fastening is performed with the left and right walls 1c and 1d interposed therebetween, the stopper 15c whose vertical position has been adjusted is fixed to the apparatus main body 1, so that the movement restricting position of the holder 2 by the stopper 15c can be stabilized. In the first embodiment, the ultrasonic vibration is generated as shown in FIG.
By adjusting the amount by which the operation member 13b projects downward from the support member 13a, ultrasonic vibration can also be generated in FIG. 4B or FIG.
【００１１】図９は実施形態２として共振器を横置き状
態に配置した超音波接合装置の外観を示し、装置本体２
０が前面の下部に左前方及び左右に開放された作業空間
２１を有し、この作業空間２１の内部に振動子２２の出
力端に同軸状に図外のねじで結合された共振器２３をホ
ルダ２４で両端支持した横置き態に配置してある。共振
器２３は、横方向中央部より外側に突出する接合作用部
２３ａを有していると共に、図６に示すアルミニウムの
ような軽金属製のスライダ２５の下部に図外のねじで取
り付けられている。FIG. 9 shows the appearance of an ultrasonic bonding apparatus according to a second embodiment in which resonators are arranged in a horizontal state.
0 has a working space 21 opened to the left front and left and right at the lower part of the front surface, and a resonator 23 coaxially coupled to the output end of the vibrator 22 with a screw (not shown) inside the working space 21. The holder 24 is placed in a horizontal position with both ends supported. The resonator 23 has a joint portion 23a projecting outward from the center in the lateral direction, and is attached to a lower portion of a slider 25 made of light metal such as aluminum shown in FIG. 6 with a screw (not shown). .
【００１２】図５は前記共振器２３を昇降する加圧装置
２６の正面図、図６は図５のＢ−Ｂ線断面図で、これら
の図４及び図５において、前記装置本体１の作業空間２
１の上部を区画する部分の上下後左右の壁２０ａ，２０
ｂ，２０ｃ，２０ｄ，２０ｅで囲まれた内部空間２０ｇ
の内部において、上壁２０ａに昇降駆動用のエアシリン
ダ２７をそのピストンロッド２７ａを下方に向けた状態
で装着してあると共に、後壁２０ｃに前記スライダ２５
を摺接係合して昇降ガイドするガイドレール２８（図６
では図示省略）を取り付けてある。スライダ２５の中央
部に設けれた取付部２５ａにはピストンロッド２７ａの
下端にカップリング機構２９を介して連結してあると共
に、スライダ２５の底部が内部空間２０ｇの下壁２０ｂ
に形成された逃げ孔３０から作業空間２１に突出し、そ
の下部にホルダ２４を取り付けたことにより、共振器２
３が装置本体２０の作業空間２１の内部に両端支持され
た状態で縦置き状態に配置されている。カップリング機
構２９はピストンロッド２７ａに結合された上部ベース
２９ａと、これの下部にガイドロッド２９ｂを介して上
下動する状態に取り付けられた下部ベース２９ｃと、上
部ベース２９ａに取り付けられたショックアブゾーバ２
９ｄと、ショックアブーバ２９ｄの下方で下部ベース２
９ｃに突設された当接部２９ｅと備えている。また、上
部ベース２９ａの側部にはトリガ機構３１の支持部材３
１ａを突設してある。支持部材３１ａの先端にはトリガ
機構３１の操作部材３１ｂを装着してある。操作部材３
１ｂは支持部材３１ａより上方の部分を手動で回転操作
することにより図外のボルト・ナット機構を介して支持
部材３１ａより下方の部分の突出量を調整するようにな
っている。支持部材３１ａとその下方で対向するトリガ
機構３１の可動部材３１ｃ及びスイッチ部３１ｄはスラ
イダ２５に取り付けられている。可動部材３１ｃはスラ
イダ２５に突設されたブラケット３１ｅに上下動可能で
上方に抜け止めされた状態に装着されていると共にコイ
ルスプリングのような弾性部材３１ｆで上方に付勢され
ている。スイッチ部３１ｄはその中央に形成された貫通
孔に挿入された可動部材３１ｃを検出してオン動作する
無接触タイプの図外のスイッチを有している。また、装
置本体２０の内部空間２０ｇにはストッパ機構３２を設
けてある。ストッパ機構３２は、図６及び図７に示すよ
うに、内部空間２０ｇの下壁２０ｂの前部に立設された
ガイドポスト３２ａと、ガイドポスト３２ａと内部空間
２０ｇの後壁２０ｃとに４点配置を以て図外のねじで取
り付けられたガイドレール３２ｂと、ガイドレール３２
ｂに上下方向に摺接係合する状態に装着されたスライダ
３２ｃと、スライダ３２ｃが前後縁に図外のねじで取り
付けられた側面視コ字形のストッパ３２ｄと、ガイドポ
スト３２ａを抱持する状態でストッパ３２ｄの前面にね
じ３２ｅで取り付けれられたストッパ位置固定手段とし
てのブロック３２ｆと、ブロック３２ｆとガイドポスト
３２ａとの跨設された操作部材３２ｇとを備えており、
ねじ３２ｅを緩めた状態において、ブロック３２ｆより
上方に突出する操作部材３２ｇの部分を手動で回転操作
することにより、図外のボルト・ナット機構を介してブ
ロック３２ｆより下方に突出してガイドポスト３２ａに
固定された操作部材３２ｇの部分に沿ってブロック３２
ｆを上下動させ、このブロック３２ｆにねじ３２ｅで連
結されたストッパ３２ｄをガイドレール３２ｂに沿って
昇降操作するようになっている。また、作業空間２１の
背部を区画した装置本体２０の下部分は超音波接合装置
を例えば製造ラインなどに組み付けるためのベースを構
成する定盤３３の上に設置されており、この定盤３３の
上面には受け台３４を共振器２３の接合作用部２３ａと
上下方向で同軸状態に設置してある。また、作業空間２
１の内部において、図１に示す弾性部材７に相当する弾
性部材３５を設けてある。FIG. 5 is a front view of a pressurizing device 26 for raising and lowering the resonator 23, and FIG. 6 is a sectional view taken along the line BB of FIG. 5. In FIGS. Space 2
Left and right and left and right walls 20a, 20 of the portion defining the upper part
Internal space 20g surrounded by b, 20c, 20d, and 20e
, An air cylinder 27 for driving up and down is mounted on an upper wall 20a with its piston rod 27a directed downward, and the slider 25 is mounted on a rear wall 20c.
Guide rail 28 (FIG. 6)
(Not shown) is attached. An attachment portion 25a provided at the center of the slider 25 is connected to a lower end of a piston rod 27a via a coupling mechanism 29.
By projecting from the escape hole 30 formed in the work space 21 into the work space 21 and attaching the holder 24 therebelow, the resonator 2
3 is disposed in a vertical position with both ends supported inside a work space 21 of the apparatus main body 20. The coupling mechanism 29 includes an upper base 29a connected to the piston rod 27a, a lower base 29c mounted below the upper base 29a via a guide rod 29b, and a shock absorber mounted on the upper base 29a. 2
9d and the lower base 2 below the shock absorber 29d.
9c is provided with a contact portion 29e protrudingly provided. The support member 3 of the trigger mechanism 31 is provided on the side of the upper base 29a.
1a is protruded. The operation member 31b of the trigger mechanism 31 is mounted on the tip of the support member 31a. Operation member 3
Reference numeral 1b adjusts the amount of protrusion of the portion below the support member 31a by manually rotating the portion above the support member 31a via a bolt and nut mechanism (not shown). The movable member 31c and the switch portion 31d of the trigger mechanism 31, which oppose the support member 31a below, are attached to the slider 25. The movable member 31c is mounted on a bracket 31e protruding from the slider 25 so as to be movable up and down and is prevented from falling upward, and is urged upward by an elastic member 31f such as a coil spring. The switch unit 31d has a non-contact type non-illustrated switch that detects the movable member 31c inserted into the through hole formed in the center and turns on the switch. A stopper mechanism 32 is provided in the internal space 20g of the apparatus main body 20. As shown in FIGS. 6 and 7, the stopper mechanism 32 has four points: a guide post 32a erected at the front of the lower wall 20b of the internal space 20g, and a guide post 32a and a rear wall 20c of the internal space 20g. A guide rail 32b attached with screws (not shown) in an arrangement, and a guide rail 32
b, a slider 32c mounted in a state in which the slider 32c is vertically slidably engaged with the slider 32b, a U-shaped stopper 32d in which the slider 32c is attached to the front and rear edges with screws (not shown), and a state in which the guide post 32a is held. A block 32f as stopper position fixing means attached to the front surface of the stopper 32d with a screw 32e, and an operating member 32g laid across the block 32f and the guide post 32a.
In a state where the screw 32e is loosened, the portion of the operation member 32g protruding above the block 32f is manually rotated to thereby protrude downward from the block 32f via a bolt / nut mechanism (not shown) and to the guide post 32a. The block 32 extends along the fixed operation member 32g.
f is moved up and down, and a stopper 32d connected to the block 32f by a screw 32e is moved up and down along the guide rail 32b. The lower part of the apparatus main body 20 that divides the back of the work space 21 is installed on a surface plate 33 that constitutes a base for assembling the ultrasonic bonding apparatus to, for example, a production line. On the upper surface, a pedestal 34 is installed coaxially in the vertical direction with the joining action portion 23 a of the resonator 23. Work space 2
An elastic member 35 corresponding to the elastic member 7 shown in FIG.
【００１３】したがって、この実施形態２の構造によれ
ば、前記実施形態１と同様、受け台３４の上面の接合作
業領域に複数の被接合部材Ｗ１，Ｗ２の互いに重ね合わ
された被接合部分Ｗａを重ね合わせた状態で搭載し、ピ
ストンロッド２７ａの伸長駆動でスライダ２５を上昇限
度位置から下降限度位置へと駆動すると、その途中で、
スライダ２５の取付部２５ａの下面がストッパ機構３２
のストッパ３２ｄの上面に当接して、スライダ２５の下
降動作がストッパ機構３２で規制された状態となるのに
伴って、カップリング機構２９の下部ベース２９ｃと上
部ベース２９ａとの間隔が狭まり、ショックアブゾーバ
２９ｄの作動ロッド下端が当接部２９ｅの上面に当接
し、ショックアブゾーバ２９ｄがその作動ロッドの押し
縮められるのに伴う内部での作動油のオリフィスへの通
過にて一定の加圧力を下部ベース２９ｃからスライダ２
５、ホルダ２４を経由して共振器２３の接合作用部２３
ａに与え、共振器２３の接合作用部２３ａが受け台３４
との共同でそれらの間に被接合部分Ｗａを一定の加圧力
で保持する一方、トリガ機構３１の操作部材３１ｂが可
動部材３１ｃを押し下げる。引き続くピストンロッド１
０ａの伸長駆動により、カップリング機構２９の上部ベ
ース２９ａと下部ベース２９ｃとの間隔がさらに狭くな
って互いに当接する以前までにおいて、トリガ機構３１
の操作部材３１ｂが可動部材３１ｃをさらに押し下げ、
この押し下げられた可動部材３１ｃをスイッチ部３１ｄ
が検出してオン信号を図外の制御部に出力して振動子２
２に縦波の超音波振動を発生させ、この超音波振動に共
振した共振器２３の接合作用部２３ａが被接合部分Ｗａ
を非溶解接合する。この接合完了後におけるエアシリン
ダ２７の縮小駆動により、接合作用部２３ａが下降限度
位置から上昇限度位置に停止する過程で、トリガ機構３
１のスイッチ部３１ｄが可動部材３１ｃの検出状態を解
除されてオフ信号を制御部に出力し、振動子２２発振が
停止すると共に、接合作用部２３ａと受け台３４とによ
る被接合部分Ｗａへの加圧保持が解除された後に、接合
作用部２３ａと受け台３４との間から一体となった複数
の被接合部材Ｗ１，Ｗ２を取り出すことによって、接合
の一工程が終了する。Therefore, according to the structure of the second embodiment, similarly to the first embodiment, the joined portions Wa of the plurality of joined members W1 and W2 are overlapped with each other in the joining work area on the upper surface of the receiving base 34. When the slider 25 is driven from the upper limit position to the lower limit position by the extension drive of the piston rod 27a,
The lower surface of the mounting portion 25a of the slider 25 is
As the slider 25 comes into contact with the upper surface of the stopper 32d, the lowering operation of the slider 25 is restricted by the stopper mechanism 32, the distance between the lower base 29c and the upper base 29a of the coupling mechanism 29 is reduced, and the shock is reduced. The lower end of the operating rod of the absorber 29d abuts on the upper surface of the abutting portion 29e, and a constant pressure is applied when the hydraulic oil passes through the orifice inside the shock absorber 29d as the operating rod is compressed. Slider 2 from lower base 29c
5. Joining portion 23 of resonator 23 via holder 24
a, and the joining action portion 23a of the resonator 23 is
While the joint part Wa is held at a constant pressure between them in cooperation with the above, the operating member 31b of the trigger mechanism 31 pushes down the movable member 31c. Continued piston rod 1
By the extension driving of the coupling mechanism 29a, the interval between the upper base 29a and the lower base 29c of the coupling mechanism 29 is further reduced and before the trigger mechanism 31 is brought into contact with each other.
Operation member 31b further pushes down movable member 31c,
The depressed movable member 31c is connected to the switch unit 31d.
And outputs an ON signal to a control unit (not shown) to
2, a longitudinal ultrasonic vibration is generated, and the bonding action portion 23a of the resonator 23 that resonates with the ultrasonic vibration is connected to the portion Wa to be bonded.
Is non-dissolving bonded. When the air cylinder 27 is driven to contract after the completion of the joining, the joining mechanism 23a stops at the lower limit position from the lower limit position and moves to the upper limit position.
The first switch unit 31d releases the detection state of the movable member 31c, outputs an OFF signal to the control unit, stops the oscillation of the vibrator 22, stops the oscillation of the vibrator 22, and applies the signal to the portion Wa to be joined by the joining action unit 23a and the receiving stand 34. After the pressing and holding is released, one integrated process is completed by taking out a plurality of integrated members W1 and W2 from between the bonding operation portion 23a and the receiving table 34.
【００１４】特に、この実施形態２では、ストッパ機構
３２のねじ３２ｅを緩めた状態で、操作部材３２ｇの部
分を手動で回転操作すれば、ブロック３２ｆが上方また
は下方に移動し、このブロック３２ｆに伴い、ストッパ
３２ｄがねじ３２ｅを介して４点配置されたガイドレー
ル３２ｂに沿って平行に昇降して所望の上下位置に適切
に調整することができる。また、ストッパ３２ｄの上下
位置調整後に、ねじ３２ｅを締結すれば、ブロック３２
ｆがガイドポスト３２ａに当接した状態でストッパ３２
ｄを前方に引き寄せ、スライダ３２ｃがガイドレール３
２ｂに係合状態となり、上下位置調整されたストッパ３
２ｄが装置本体１に固定されるので、ストッパ３２ｄに
よるホルダ２の移動規制位置を安定させることができ
る。前記実施形態１〜２ではトリガ機構で被接合部分Ｗ
ａの加圧保持完了後に超音波振動を発生するようにした
が、トリガ機構を削除し、図外の制御部でのエアシリン
ダへの空気供給回路の空気供給経路の切り替え制御に基
づく電気的な処理で被接合部分Ｗａの加圧保持完了後、
または加圧保持以前のうちのいずれかにおいて、振動子
４に超音波振動を発生させることも可能である。前記実
施形態１〜２では振動子の出力端に共振器を直接結合し
た場合を図示して説明したが、共振器と振動子との間に
中間ブースタを使用して接合作用部での振動振幅を変化
させることも可能である。この中間ブースタは１／２波
長分の整数倍の長さを有する例えばチタン、アルミニウ
ムまたは焼き入れされた鉄などのいずれかの材質からな
る棒状の大径部分と小径部分との体積比で振動振幅の入
出力比（倍率）を変化させる構成になっている。In particular, in the second embodiment, if the operation member 32g is manually rotated while the screw 32e of the stopper mechanism 32 is loosened, the block 32f moves upward or downward, and Accordingly, the stopper 32d moves up and down in parallel along the guide rails 32b arranged at four points via the screws 32e, and can be appropriately adjusted to a desired vertical position. If the screw 32e is tightened after the vertical position of the stopper 32d is adjusted, the block 32
f is in contact with the guide post 32a.
d is drawn forward, and the slider 32c
2b is engaged with the stopper 3 whose vertical position has been adjusted.
Since 2d is fixed to the apparatus main body 1, the movement restricting position of the holder 2 by the stopper 32d can be stabilized. In the first and second embodiments, the portion to be joined W
Although the ultrasonic vibration is generated after the completion of the pressurizing and holding of a, the trigger mechanism is deleted, and the electric control based on the switching control of the air supply path of the air supply circuit to the air cylinder by the control unit (not shown) is performed. After the completion of the pressurization and holding of the portion Wa to be joined in the processing,
Alternatively, it is also possible to cause the vibrator 4 to generate ultrasonic vibration before or during holding under pressure. In the first and second embodiments, the case where the resonator is directly coupled to the output terminal of the vibrator has been illustrated and described. However, the vibration amplitude at the joining action portion is provided by using an intermediate booster between the resonator and the vibrator. Can also be changed. This intermediate booster has a vibration amplitude based on a volume ratio between a large-diameter portion and a small-diameter portion of a rod-shaped material having a length that is an integral multiple of a half wavelength, such as titanium, aluminum, or quenched iron. The input / output ratio (magnification) is changed.
【図１】 実施形態１の手前側の側壁及び一部を切除し
た側面図。FIG. 1 is a side view of a first embodiment in which a side wall and a part thereof are cut away.
【図２】 図１のＡ−Ａ線断面図。FIG. 2 is a sectional view taken along line AA of FIG.
【図３】 実施形態１の外観を示す斜視図。FIG. 3 is a perspective view showing the appearance of the first embodiment.
【図４】 実施形態１の作用説明図。FIG. 4 is an operation explanatory view of the first embodiment.
【図５】 実施形態２の正面図。FIG. 5 is a front view of the second embodiment.
【図６】 図５のＢ−Ｂ線断面図。FIG. 6 is a sectional view taken along line BB of FIG. 5;
【図７】 実施形態２のストッパ機構を示す平面図。FIG. 7 is a plan view showing a stopper mechanism according to a second embodiment.
【図８】 実施形態２のスライダを示す斜視図。FIG. 8 is a perspective view showing a slider according to the second embodiment.
【図９】 実施形態２の外観を示す斜視図。FIG. 9 is a perspective view showing the appearance of the second embodiment.
１，２０ 装置本体、２，２４ ホルダ、４，２２ 振
動子、５，２３ 共振器、５ｂ，２３ａ 接合作用部、
９，２６ 加圧装置、１０，２７ エアシリンダ、１０
ａ，２７ａ ピストンロッド、１２，２９ カップリン
グ機構、１５，３２ ストッパ機構、１５ａ，３２ｂ
ガイドレール（カイド部材）、１５ｄ，３２ｇ 操作部
材。1,20 device body, 2,24 holder, 4,22 vibrator, 5,23 resonator, 5b, 23a
9,26 Pressurizing device, 10,27 Air cylinder, 10
a, 27a piston rod, 12, 29 coupling mechanism, 15, 32 stopper mechanism, 15a, 32b
Guide rail (guide member), 15d, 32g Operation member.
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6，ＤＢ名) B23K 20/00 - 20/26 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 6 , DB name) B23K 20/00-20/26
Claims (1)
結合された共振器を受け台から離れる方向に所定距離上
昇させることにより共振器の接合作用部と受け台との間
に複数の被接合部材の互いに重ね合わされた被接合部分
の出入用空間を形成する一方、共振器を受け台に近づく
方向に所定距離下降させることにより受け台と接合作用
部とでそれらの間に被接合部分を加圧した状態で保持す
る超音波接合用加圧装置において、装置本体に取り付け
られた昇降駆動用のエアシリンダと、このエアシリンダ
のピストンロッドに共振器を両端支持状態で保持するホ
ルダを連結すると共に加圧力調整動作を行うためのカッ
プリング機構と、エアシリンダの下降限度位置への停止
以前にホルダの移動を規制するストッパ機構とを備え、
このストッパ機構を、装置本体に少なくとも３点以上に
配置されたガイド部材と、これらのガイド部材に摺接係
合されたストッパと、このストッパ及び装置本体に跨設
され当該ストッパを昇降操作する操作部材とで構成した
ことを特徴とする超音波接合用加圧装置。A plurality of resonators coupled to an output end of a vibrator for generating ultrasonic vibrations are raised by a predetermined distance in a direction away from a receiving table, so that a plurality of resonators are connected between a joining action portion of the resonator and the receiving table. While forming a space for entry and exit of the superposed portions of the members to be bonded, the resonator is lowered by a predetermined distance in a direction approaching the cradle, so that the portion to be bonded between the cradle and the bonding action portion is formed between them. In an ultrasonic bonding pressurizing device that holds the pressure in a pressurized state, an air cylinder for lifting and lowering attached to the device body and a holder that holds the resonator in a state where both ends are supported by the piston rod of this air cylinder are connected. And a coupling mechanism for performing a pressing force adjustment operation, and a stopper mechanism for regulating the movement of the holder before stopping the air cylinder at the lower limit position,
The stopper mechanism includes a guide member disposed at at least three points in the apparatus main body, a stopper slidably engaged with the guide member, and an operation for straddling the stopper and the apparatus main body to operate the stopper vertically. A pressure device for ultrasonic bonding characterized by comprising a member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7213505A JP2911395B2 (en) | 1995-08-22 | 1995-08-22 | Pressure device for ultrasonic bonding |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7213505A JP2911395B2 (en) | 1995-08-22 | 1995-08-22 | Pressure device for ultrasonic bonding |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0957469A JPH0957469A (en) | 1997-03-04 |
| JP2911395B2 true JP2911395B2 (en) | 1999-06-23 |
Family
ID=16640314
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7213505A Expired - Fee Related JP2911395B2 (en) | 1995-08-22 | 1995-08-22 | Pressure device for ultrasonic bonding |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2911395B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102018210545A1 (en) | 2017-06-29 | 2019-01-03 | Ultex Corporation | Join resonator or join cradle |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100367024B1 (en) * | 2000-11-13 | 2003-01-09 | 주식회사 대영초음파 | The recipro cating devic of pressure board for super sonic wave device |
| US8439247B1 (en) * | 2011-11-04 | 2013-05-14 | GM Global Technology Operations LLC | Ultrasonic welding system with dynamic pressure control |
| CN104707889B (en) * | 2015-03-16 | 2016-08-17 | 东莞理工学院 | A kind of ultrasonic assistant Sheet Metal Forming Technology |
| CN111014935A (en) * | 2019-12-31 | 2020-04-17 | 珠海灵科自动化科技有限公司 | Ultrasonic welding machine |
-
1995
- 1995-08-22 JP JP7213505A patent/JP2911395B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102018210545A1 (en) | 2017-06-29 | 2019-01-03 | Ultex Corporation | Join resonator or join cradle |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0957469A (en) | 1997-03-04 |
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