JP2876032B2 - Electric discharge machine - Google Patents
Electric discharge machineInfo
- Publication number
- JP2876032B2 JP2876032B2 JP1184296A JP18429689A JP2876032B2 JP 2876032 B2 JP2876032 B2 JP 2876032B2 JP 1184296 A JP1184296 A JP 1184296A JP 18429689 A JP18429689 A JP 18429689A JP 2876032 B2 JP2876032 B2 JP 2876032B2
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- axis
- image information
- electric discharge
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Description
【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION
本発明は、相対向する被加工体と電極間の加工間隙に
加工液を供給した状態で放電パルスを繰返し発生させる
と共に両者間に相対的加工送りを与えて所定形状に加工
する放電加工装置に関する。The present invention relates to an electric discharge machining apparatus that repeatedly generates a discharge pulse in a state in which a machining fluid is supplied to a machining gap between a workpiece and an electrode facing each other, and gives a relative machining feed between the two to form a predetermined shape. .
従来の放電加工装置に於ては、被加工体の電極に対す
るXY二軸平面に於ける相対位置の検出に光学照準器が利
用されている。 第４図は、その一例であり、図に於て14はベッド、15
はコラム、16は主軸頭、17は主軸、18は電極である。19
はクロステーブルで、該テーブル上に固定された被加工
体１をハンドル20を操作して水平移動する。21は光学照
準器で、主軸頭16に鉛直に取付けた軸22の下端に該軸を
中心として回動可能に設けられており、主軸17の先端に
取付けた電極18を下降させて放電加工するときは、回動
させて加工位置から退避させる。 被加工体１の位置出しを行なうときは、光学照準器21
を退避位置から回動させて照準位置にセットし、標線の
刻まれた照準鏡によって位置出しする。 第５図のように、先ず、接眼部から覗きながら照準標
線の例えば十字標線Ｍを被加工体１の任意の基準点Ｏに
合せ、この基準点Ｏから設計図面上の寸法をＸ軸及びＹ
軸にとって位置出しする。即ち、位置決め用尺度を読み
ながらハンドル20を操作してクロステーブル19を移動
し、被加工体１のＯ点からＸ軸にX1、Ｙ軸にY1移動させ
たＰ点位置に十字標線Ｍを移動させることによって、被
加工体１を電極18に対して位置出しする。この状態で放
電加工を開始して加工送りすることにより、例えばハッ
チングした形状の穴明け加工が行なわれる。2. Description of the Related Art In a conventional electric discharge machine, an optical sight is used to detect a relative position of a workpiece on an XY biaxial plane with respect to an electrode. FIG. 4 shows an example, in which 14 is a bed, and 15 is a bed.
Is a column, 16 is a spindle head, 17 is a spindle, and 18 is an electrode. 19
Is a cross table for horizontally moving the workpiece 1 fixed on the table by operating the handle 20. Reference numeral 21 denotes an optical sight, which is provided at the lower end of a shaft 22 vertically attached to the spindle head 16 so as to be rotatable around the axis, and lowers an electrode 18 attached to the tip of the spindle 17 to perform electric discharge machining. At this time, it is rotated and retracted from the processing position. When positioning the workpiece 1, the optical sight 21
Is rotated from the retreat position to the aiming position, and is positioned by the aiming mirror with the marked line. As shown in FIG. 5, first, while looking through the eyepiece, a cross mark line M, for example, of the aiming mark is aligned with an arbitrary reference point O of the workpiece 1, and the dimension on the design drawing is changed from this reference point O to X. Axis and Y
Position the axis. That is, the cross table 19 is moved by operating the handle 20 while reading the positioning scale, and the cross mark line is formed at the point P, which is moved from the point O of the workpiece 1 to the X axis by X 1 and the Y axis by Y 1. By moving M, the workpiece 1 is positioned with respect to the electrode 18. In this state, by starting the electric discharge machining and performing machining feed, for example, a hatched shape is formed.
このように従来は、光学照準器を使用し、位置出し尺
度を読みながら目測によりテーブルを手動操作して移動
させることによって、被加工体の位置出しを行なってい
たから、位置出しを高精度に行なうことができず、また
能率的でない欠点があった。 又、従来の型彫形式の放電加工装置に於ては、電極又
は電極と別個に設けた測定電極を用いて、接触検知によ
り位置出しを行なっており、又、ワイヤカット放電加工
装置に於ては、被加工体と電極との接触検知により位置
出しを行なっていた。又、上記各種の方法とNC装置とを
組合わせた方法もあるが、適度の形状及び寸法の認知及
び測定により位置出しを簡易、且つ自動的に行なうには
種々の問題があった。As described above, conventionally, the position of the workpiece was determined by manually operating the table by visual measurement while reading the positioning scale using an optical sight, thereby performing the positioning with high accuracy. And it was not efficient. Further, in the conventional EDM machine of the engraving type, positioning is performed by detecting contact using an electrode or a measuring electrode provided separately from the electrode. Has been performing positioning by detecting contact between the workpiece and the electrode. There is also a method in which the above-mentioned various methods are combined with an NC device. However, there are various problems in performing simple and automatic positioning by recognizing and measuring an appropriate shape and dimensions.
本発明は、叙上の問題点の解消を目的として発明され
たものであって、この目的を達成するため、本発明の放
電加工装置は、XY二軸平面上に取付けた被加工体の表面
をXY二軸平面に垂直に上方から撮像するカメラと、該カ
メラにより撮像された画像情報を２値化処理し２値画像
情報として記憶する画像処理装置と、記憶された２値画
像情報に基づき演算処理し、被加工体を前記電極に対し
てＸ軸及びＹ軸に相対的に移動させるＸ軸モータとＹ軸
モータの各ドライバに制御信号を加えて、被加工体の前
記電極に対するXY二軸平面に於ける相対位置を所定位置
に位置出しする数値制御装置とを設けて成ることを特徴
とする。The present invention has been made for the purpose of solving the above-mentioned problems, and in order to achieve this object, the electric discharge machining apparatus of the present invention has a surface of a workpiece mounted on an XY biaxial plane. A camera that images the image vertically from the top in the XY biaxial plane, an image processing apparatus that binarizes the image information captured by the camera and stores it as binary image information, and based on the stored binary image information. A control signal is applied to each driver of an X-axis motor and a Y-axis motor for performing arithmetic processing and moving the workpiece relative to the electrode in the X-axis and the Y-axis. A numerical controller for positioning the relative position on the axial plane to a predetermined position.
本発明は、カメラを用いて被加工体の形状、加工穴の
形状等を撮像し、得られた画像情報を２値画像に画像処
理し、この２値画像情報に基づいて、即ち連続した面、
線として検出した情報に基づいてNC装置により位置出し
を自動的に行なうようにしたから、位置出しを高精度に
自動的に容易に行なうことが可能である。The present invention captures the shape of a workpiece, the shape of a processed hole, and the like using a camera, performs image processing on the obtained image information into a binary image, and based on the binary image information, that is, a continuous surface. ,
Since the positioning is automatically performed by the NC device based on the information detected as a line, it is possible to automatically and easily perform the positioning with high accuracy.
【実施例】 以下、本発明の一実施例を図面に基づいて説明する。 第１図は、本発明をワイヤカット放電加工装置に適用
した場合の一実施例装置の全体を示す構成図であり、１
は加工台２のXY二軸平面上に取付けた被加工体、３は被
加工体１の上下両側に設けた一対のガイド4,5間に所定
張力で張架されて軸方向に走行移動するワイヤ電極、６
はXYクロステーブル、7,8はXYクロステーブル６をＸ軸
及びＹ軸に移動させるＸ軸モータ及びＹ軸モータ、９は
NC装置、10は図示しない加工ヘッドに固定してあるいは
回転式移動可能に、XY二軸平面に垂直に設けられたオー
ト・フォーカス（自動焦点調整）機能を有するカメラ、
11はカメラ10の撮像信号と画像処理する装置、12はキー
ボード、13はCRT表示装置であり、ワイヤカット放電加
工時には、対向する被加工体１とワイヤ電極３間の加工
間隙に、加工ヘッドに固定して設けた上部ガイド４を内
蔵する加工液供給ノズルから加工液を噴射供給しつつ、
図示しない加工用電源から被加工体１とワイヤ電極３間
に間欠的な電圧パルスを印加して繰返し放電パルスを発
生させると共に、モータ7,8を駆動制御してテーブル６
を移動させることにより被加工体１に加工送りを与えて
所定輪郭形状の切断加工が行なわれる。 第２図は、NC装置９及び画像処理装置11の具合的構造
図であり、画像処理装置11は、エッジ部等の処理や特徴
量の抽出等の所謂画像処理を行なう装置であって、メモ
リ116に記憶されている画像処理プログラムに基づくCPU
115の命令により、カメラ10から入力した撮像信号をア
ンプ111で増幅した後、２値化装置112に於て、しきい値
テーブル113に設定した被加工体表面に焦点を合せたと
きのしきい値と大小を比較し判別して２値化処理を行な
い、得られた２値画像情報を２値化フレームメモリ114
に記憶する。メモリ114の記憶信号は、画像処理装置11
側の入出力インターフェイス117とNC装置９側の入出力
インターフェイス91との間で転送され、NC制御装置９
は、転送されたメモリ114の記憶信号をメモリ93の位置
出しプログラムに基づいてCPU92により演算処理し、得
られた制御信号をテーブルドライバ94に加えてモータ7,
8を駆動し、テーブル６を移動制御して被加工体１を所
定位置に位置出しする。尚、NC制御装置９は、位置出し
制御だけでなく、プログラムにしたがって加工送りを与
えて所定輪郭形状のワイヤカット放電加工を行なう制御
装置としても兼用される。 以上の構成に於て、カメラ10を必要に応じ回転移動さ
せ、またテーブル６を移動することにより、XY二軸平面
に垂直に上方から被加工体１表面の所要の目的部分又は
全面を撮像する。この際、カメラ10の焦点が被加工体１
の表面にオート・フォーカス機能により合せられ、被加
工体１の表面の端部や加工により切抜いた穴の周縁部分
に明暗が現われた像として撮像される。撮像された画像
情報は画像処理装置11で２値化処理される。２値化装置
112は入力する画像情報をしきい値により弁別し２値画
像に画像処理して、メモリ114に順次記憶する。NC装置
９は、メモリ114に記憶された２値画像情報を読み出
し、演算処理して得られた被加工体１の位置出し基準位
置をCRT表示装置13に出力して表示する。又、メモリ114
に記憶された２値画像情報から加工形状寸法を計測し、
得られた計測値を表示することも可能である。それ等の
表示は第３図のように、面、線として連続したパターン
であり、（ａ）図は被加工体１の基準位置として用いる
角部の像であり、この位置情報を利用して位置出しを行
なうことができる。又、（ｂ）図は被加工体１を波形形
状にワイヤカットした加工形状の計測値であり、（ｃ）
図は加工形状の計測値に基づいてオフセットをかけて再
加工する場合の例を示し、画像処理装置11による２値画
像情報から演算処理して得られた計測値を実線として表
示、NC装置９のメモリ93に予め記憶されている目標値を
破線として表示すれば、加工形状と目標形状との差異を
一目で明瞭に認識することができ、またNC装置９により
両者の偏差δを演算処理して求めることにより、加工形
状の精度を自動的に測定することができ、又更に、得ら
れた偏差δに応じた制御信号をドライバ94に加えてテー
ブル６を移動させることにより、自動的に所要量のオフ
セットを与えた状態で再加工することができ、加工形状
の計測値と目標値が一致するまでこの再加工を自動的に
繰返して所定寸法形状に仕上げることができる。 尚、本発明は、ワイヤカット放電加工装置に限らず、
棒状、縮小形状電極を用いて遊星揺動運動させながら加
工する型彫形式の放電加工装置に於ても同様に適用する
ことができる。Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a configuration diagram showing an entire apparatus according to an embodiment when the present invention is applied to a wire cut electric discharge machine.
Is a workpiece mounted on the XY biaxial plane of the processing table 2, and 3 is stretched by a predetermined tension between a pair of guides 4 and 5 provided on both upper and lower sides of the workpiece 1 and travels in the axial direction. Wire electrode, 6
Is an XY cross table, 7 and 8 are X and Y axis motors for moving the XY cross table 6 in the X and Y axes, and 9 is
NC device, 10 is a camera having an auto focus (automatic focus adjustment) function, which is fixed to a processing head (not shown) or rotatably movable, and is provided perpendicular to the XY biaxial plane.
Reference numeral 11 denotes a device for processing the image signal of the camera 10 and the image, 12 denotes a keyboard, and 13 denotes a CRT display device. While injecting and supplying the machining fluid from the machining fluid supply nozzle incorporating the fixedly provided upper guide 4,
An intermittent voltage pulse is applied between the workpiece 1 and the wire electrode 3 from a processing power supply (not shown) to generate a repetitive discharge pulse, and the motors 7 and 8 are driven and controlled to drive the table 6.
Is moved to give a processing feed to the workpiece 1 to perform cutting of a predetermined contour shape. FIG. 2 is a specific structural diagram of the NC device 9 and the image processing device 11. The image processing device 11 is a device that performs so-called image processing such as processing of an edge portion and the like and extraction of a feature amount. CPU based on the image processing program stored in 116
After the imaging signal input from the camera 10 is amplified by the amplifier 111 according to the instruction 115, the threshold value when the binarization device 112 focuses on the surface of the workpiece set in the threshold value table 113. The values are compared and discriminated to perform binarization processing, and the obtained binary image information is stored in a binarization frame memory 114.
To memorize. The signal stored in the memory 114 is transmitted to the image processing device 11
Between the input / output interface 117 of the NC device 9 and the input / output interface 91 of the NC device 9
The CPU 92 performs an arithmetic process on the transferred storage signal of the memory 114 based on the positioning program of the memory 93, and adds the obtained control signal to the table driver 94 to add the motor 7,
8 is driven to control the movement of the table 6 to position the workpiece 1 at a predetermined position. The NC control device 9 is used not only for positioning control but also as a control device for performing a wire cut electric discharge machining of a predetermined contour shape by giving a machining feed according to a program. In the above configuration, the camera 10 is rotated and moved as necessary, and the table 6 is moved to image a desired target portion or the entire surface of the surface of the workpiece 1 from above, perpendicular to the XY biaxial plane. . At this time, the focus of the camera 10 is
Is focused by the auto-focus function, and the image is captured as an image in which light and dark appear at the edge of the surface of the workpiece 1 and the peripheral portion of the hole cut out by processing. The captured image information is binarized by the image processing device 11. Binarization device
Reference numeral 112 discriminates input image information by a threshold value, performs image processing on a binary image, and sequentially stores the binary image in the memory 114. The NC device 9 reads out the binary image information stored in the memory 114, and outputs to the CRT display device 13 the position reference reference position of the workpiece 1 obtained by the arithmetic processing and displays it. Also, the memory 114
From the binary image information stored in the
It is also possible to display the obtained measured values. These displays are continuous patterns as planes and lines as shown in FIG. 3, and FIG. 3A is an image of a corner used as a reference position of the workpiece 1, and the position information is utilized by using the position information. Positioning can be performed. (B) is a measured value of a processed shape obtained by wire-cutting the workpiece 1 into a corrugated shape;
The figure shows an example of reworking with an offset based on the measured value of the machined shape. The measured value obtained by performing arithmetic processing from the binary image information by the image processing device 11 is displayed as a solid line, and the NC device 9 If the target value stored in advance in the memory 93 is displayed as a broken line, the difference between the processed shape and the target shape can be clearly recognized at a glance, and the deviation δ between the two is calculated by the NC device 9. Thus, the accuracy of the machined shape can be automatically measured. Further, by adding a control signal corresponding to the obtained deviation δ to the driver 94 and moving the table 6, the required accuracy is automatically obtained. Rework can be performed in a state where an offset of the amount is given, and this rework can be automatically repeated until the measured value of the processed shape matches the target value to finish the shape to a predetermined size. In addition, the present invention is not limited to the wire electric discharge machine,
The present invention can be similarly applied to a die-sinking type electric discharge machine which performs machining while making a planetary swing motion using a rod-shaped or reduced-shaped electrode.
以上説明した通り、本発明によれば、カメラを用いて
被加工体の形状、加工穴の形状等を撮像し、得られた二
次元走査の画像情報を画像処理装置によって２値画像に
変換し、この２値画像情報に基づきNC制御装置で演算処
理することによって、Ｘ軸ドライバ及びＹ軸ドライバに
駆動信号を加えて電極と被加工体とをXY二軸平面に於て
相対的に移動制御して所定位置に位置出しするようにし
たから、被加工体の電極に対するXY二軸平面上の相対的
位置出しを自動的に能率良く高精度に行なうことができ
る。As described above, according to the present invention, the shape of a workpiece, the shape of a processing hole, and the like are imaged using a camera, and the obtained two-dimensional scanning image information is converted into a binary image by an image processing device. The NC controller performs arithmetic processing based on the binary image information to apply drive signals to the X-axis driver and the Y-axis driver to control the relative movement of the electrode and the workpiece in the XY two-axis plane. Then, relative positioning on the XY biaxial plane with respect to the electrode of the workpiece can be automatically and efficiently performed with high accuracy.
第１図は本発明の一実施例装置の全体を示す構成図、第
２図は第１図の一部の具体的構造図、第３図は表示画面
の説明図、第４図は従来の装置の全体を示す構成図、第
５図は第４図の装置に於ける位置出し操作の説明図であ
る。 １……被加工体 ３……ワイヤ電極 ６……XYクロステーブル ７……Ｘ軸データ ８……Ｙ軸モータ ９……数値制御装置 10……カメラ 11……画像処理装置 13……CRT表示装置FIG. 1 is a block diagram showing the whole apparatus of one embodiment of the present invention, FIG. 2 is a specific structural diagram of a part of FIG. 1, FIG. 3 is an explanatory diagram of a display screen, and FIG. FIG. 5 is an explanatory view of a positioning operation in the apparatus shown in FIG. 1 Workpiece 3 Wire electrode 6 XY cross table 7 X-axis data 8 Y-axis motor 9 Numerical control unit 10 Camera 11 Image processing unit 13 CRT display apparatus
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6，ＤＢ名) B23H 7/26 - 7/32 ──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int.Cl. 6 , DB name) B23H 7/26-7/32
Claims (1)
加工液を供給した状態で放電パルスを繰返し発生させる
と共に両者間に相対的加工送りを与えて所定形状に加工
する放電加工装置に於て、XY二軸平面上に取付けた被加
工体の表面をXY二軸平面に垂直に上方から撮像するカメ
ラと、該カメラにより撮像された画像情報を２値化処理
し２値画像情報として記憶する画像処理装置と、記憶さ
れた２値画像情報に基づき演算処理し、被加工体を前記
電極に対してＸ軸及びＹ軸に相対的に移動させるＸ軸モ
ータとＹ軸モータの各ドライバに制御信号を加えて、被
加工体の前記電極に対するXY二軸平面に於ける相対位置
を所定位置に位置出しする数値制御装置とを設けて成る
ことを特徴とする放電加工装置。An electric discharge machining apparatus for repeatedly generating a discharge pulse in a state in which a machining liquid is supplied to a machining gap between a workpiece and an electrode facing each other, and applying a relative machining feed between the two to form a predetermined shape. A camera for imaging the surface of the workpiece mounted on the XY biaxial plane from above perpendicularly to the XY biaxial plane, and binarizing the image information captured by the camera to obtain binary image information And an X-axis motor and a Y-axis motor that perform arithmetic processing based on the stored binary image information and move the workpiece relative to the electrodes in the X-axis and the Y-axis. An electric discharge machining apparatus, comprising: a numerical control device for applying a control signal to a driver to set a relative position of the workpiece to the electrode in the XY biaxial plane at a predetermined position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1184296A JP2876032B2 (en) | 1989-07-17 | 1989-07-17 | Electric discharge machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1184296A JP2876032B2 (en) | 1989-07-17 | 1989-07-17 | Electric discharge machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0349833A JPH0349833A (en) | 1991-03-04 |
| JP2876032B2 true JP2876032B2 (en) | 1999-03-31 |
Family
ID=16150850
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1184296A Expired - Fee Related JP2876032B2 (en) | 1989-07-17 | 1989-07-17 | Electric discharge machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2876032B2 (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5291415A (en) * | 1991-12-13 | 1994-03-01 | Hughes Aircraft Company | Method to determine tool paths for thinning and correcting errors in thickness profiles of films |
| DE10135587C2 (en) | 2001-07-20 | 2003-06-18 | Eads Deutschland Gmbh | Eroding device with an eroding head for removing metallic connecting elements |
| JP4591760B2 (en) * | 2004-11-11 | 2010-12-01 | 株式会社村田製作所 | Electric discharge machining apparatus and electric discharge machining method |
| CN101890543B (en) * | 2010-06-24 | 2012-05-09 | 无锡微研有限公司 | CCD camera monitoring module of ultrafine electric spark machine tool |
| JP5426733B2 (en) * | 2012-07-10 | 2014-02-26 | ファナック株式会社 | Wire electric discharge machine and automatic programming device for wire electric discharge machine |
| JP5986253B1 (en) * | 2015-03-27 | 2016-09-06 | ファナック株式会社 | Wire electric discharge machine equipped with means for adjusting attachment position of workpiece |
| JP6208727B2 (en) * | 2015-09-28 | 2017-10-04 | ファナック株式会社 | Wire electrical discharge machine with measurement function by touch probe with workpiece immersed in machining fluid |
| CN115815715A (en) * | 2022-08-27 | 2023-03-21 | 北京石油化工学院 | Electric spark ultrasonic composite non-deterioration layer processing technology method for aviation blade air film hole |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61182727A (en) * | 1985-02-08 | 1986-08-15 | Brother Ind Ltd | Wire perpendicularity adjusting device of wire-cut electric discharge machine |
| JP2593499B2 (en) * | 1987-12-29 | 1997-03-26 | 川崎製鉄株式会社 | Crane position detection and control device |
-
1989
- 1989-07-17 JP JP1184296A patent/JP2876032B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0349833A (en) | 1991-03-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE102018102333B4 (en) | LASER PROCESSING SYSTEM WITH LASER PROCESSING HEAD AND IMAGING DEVICE | |
| KR970010889B1 (en) | Laser beam machine and method for setting focus of laser beam machine | |
| US4678976A (en) | Path-controlled machining method | |
| JP5725796B2 (en) | Tool measuring method and measuring device, and machine tool | |
| US6031200A (en) | In-process kerf measurement system | |
| JP2876032B2 (en) | Electric discharge machine | |
| JPH06191001A (en) | Stylus-displacement adjusting apparatus for gravure engraving machine | |
| DE102015216858A1 (en) | Laser processing device | |
| WO2018047312A1 (en) | Workpiece measurement method | |
| JP3215193B2 (en) | Method and apparatus for measuring blade shape of rotary tool | |
| US20060007449A1 (en) | Method for measuring a contour of a workpiece by scanning | |
| JP2000074644A (en) | Measuring apparatus of rod type cutting tool and measuring method of drill which uses the measuring apparatus | |
| US5339103A (en) | Part machining programming using a camera interchangeable with maching nozzle | |
| JP4615238B2 (en) | Laser processing equipment | |
| KR20050023657A (en) | Apparatus and method for an auto focus laser marking editable on the real image. | |
| JP3066659B2 (en) | Processing point correction method and device for laser processing machine | |
| JPH071294A (en) | Optical type work shape measuring device in numerically controlled machine tool | |
| KR940000363B1 (en) | Indicating method for scale | |
| JP3605832B2 (en) | Polishing tool control device | |
| JP3558660B2 (en) | Grinding equipment | |
| JP3205183B2 (en) | Teaching device | |
| JP2822314B2 (en) | Laser processing equipment | |
| JPH11320143A (en) | Device and method for additional processing | |
| JPH05318278A (en) | X-y table drive control device of machine tool | |
| JPH0976125A (en) | Three-dimensional electric discharge machining method and device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080122 Year of fee payment: 9 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090122 Year of fee payment: 10 |
|
| LAPS | Cancellation because of no payment of annual fees |