JP2869829B2 - Liquid crystal display device - Google Patents
Liquid crystal display deviceInfo
- Publication number
- JP2869829B2 JP2869829B2 JP3291885A JP29188591A JP2869829B2 JP 2869829 B2 JP2869829 B2 JP 2869829B2 JP 3291885 A JP3291885 A JP 3291885A JP 29188591 A JP29188591 A JP 29188591A JP 2869829 B2 JP2869829 B2 JP 2869829B2
- Authority
- JP
- Japan
- Prior art keywords
- liquid crystal
- stripe
- electrode
- crystal display
- display device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
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- Liquid Crystal (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、それぞれがストライプ
状電極群を有する一対の基板間に液晶を挟持してなる液
晶表示素子に関し、特にストライプ状電極群パターン形
成時のストライプに対する平行方向の継ぎ目を同一面上
の非表示部に配置することにより、機械精度上の継ぎ目
のズレを人間の目で視認できなくした液晶表示素子に関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal display device in which a liquid crystal is sandwiched between a pair of substrates each having a stripe electrode group, and more particularly, to a seam in a direction parallel to a stripe when a stripe electrode group pattern is formed. The present invention relates to a liquid crystal display device in which a gap between joints on mechanical accuracy cannot be visually recognized by human eyes by arranging in a non-display portion on the same surface.
【０００２】[0002]
【従来の技術】液晶表示素子は、対向する一対の基板
と、これらの基板の対向面上に相互に交差するように形
成された一対のストライプ状電極群により構成されてい
る。このようなストライプ状電極群を各々の基板上に形
成するためのフォトリソ工程において、特に１０インチ
程度以上の表示面積をもちかつ分解能が４［ｐｅｌ］程
度以上の高精細な液晶表示素子では、露光によるパター
ン焼付け時に、高解像度と場合によってはストライプ電
極の電気抵抗を低減させるためや画素間を遮光するため
の不透明電極部材の重ね焼き時の重ね精度が必要である
ため、その性能を満たすような、例えばＭＰＡ−１５０
０（キヤノン製）のような露光装置で一方または両基板
上の各々のストライプ状電極群を平行方向でも分割して
継ぎ合わせることによって形成することが行なわれる。
この際のストライプに対する平行方向の継ぎ目は、従
来、同位置基板上の一本のストライプ電極上に配置され
ていた。2. Description of the Related Art A liquid crystal display device comprises a pair of substrates facing each other and a pair of stripe-like electrodes formed on the facing surfaces of these substrates so as to intersect each other. In a photolithography process for forming such a stripe-shaped electrode group on each substrate, in particular, in a high-definition liquid crystal display element having a display area of about 10 inches or more and a resolution of about 4 [pel] or more, exposure is difficult. At the time of pattern baking, it is necessary to have a high resolution and, in some cases, to reduce the electric resistance of the stripe electrode or to superimpose the opaque electrode member in order to block the light between the pixels, so that the performance is satisfied. , For example, MPA-150
This is performed by dividing each stripe-shaped electrode group on one or both substrates in a parallel direction and joining them with an exposure apparatus such as 0 (manufactured by Canon).
In this case, the seam in the direction parallel to the stripe has conventionally been arranged on one stripe electrode on the same position substrate.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、上記従
来例では実際に液晶を挟持させ、相互に交差するように
配置したストライプ状電極群を介して印加される電圧に
よって液晶を駆動して表示させた場合、一方または両基
板上の各々のストライプ状電極群の平行方向の継ぎ目が
配置された一本のストライプ電極は、継ぎ目の機械（露
光装置）精度上のストライプに対する平行方向のズレが
大きい場合には、他のストライプ電極と電極巾が異なる
ため、この部分と対向基板側のストライプ電極群を交差
してできる画素の大きさも他の画素と異なり（開口面積
の違い）それが人間の目にも視認されてしまう。However, in the above-mentioned prior art, the liquid crystal is actually sandwiched, and the liquid crystal is driven by a voltage applied through a group of striped electrodes arranged so as to intersect with each other to display. In such a case, one stripe electrode in which parallel seams of the respective stripe-shaped electrode groups on one or both substrates are arranged has a large displacement in the parallel direction with respect to the stripe on mechanical (exposure apparatus) accuracy of the seam. Has a different electrode width from the other stripe electrodes, so the size of the pixel formed by intersecting this part and the stripe electrode group on the counter substrate side is also different from the other pixels (difference in opening area), It will be visually recognized.
【０００４】また、一方または両基板上の各々のストラ
イプ電極の電気抵抗を低減させるためや、画素間を遮光
するための不透明電極部材を更に重ねて形成する場合に
は、各ストライプ状電極群の継ぎ目が配置された一本の
ストライプ電極は平行方向の継ぎ目の機械精度上のスト
ライプに対する平行方向のズレが大きい場合には、やは
り画素上に表われてしまうため、人間の目に視認されて
しまう。以上のことにより表示品位を低下させてしまう
欠点があった。In order to reduce the electric resistance of each stripe electrode on one or both substrates or to form an opaque electrode member for further shielding light between pixels, the stripe electrode group is formed by overlapping each other. One stripe electrode on which the seam is arranged has a large deviation in the parallel direction from the stripe on the mechanical accuracy of the parallel seam, so that the stripe electrode also appears on the pixel and is visually recognized by human eyes. . As a result, there is a disadvantage that the display quality is reduced.
【０００５】本発明は、上述の従来例における問題点に
鑑みてなされたもので、基板上にストライプ電極群を形
成するためのフォトリソ工程におけるパターン焼き付け
を分割露光によって行なう液晶表示素子において、その
分割露光による継ぎ目のズレによる画素のバラツキを視
認しにくくして表示品位の低下を防止することを目的と
する。SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems in the prior art, and has been developed in a liquid crystal display device in which pattern printing in a photolithography process for forming a stripe electrode group on a substrate is performed by divided exposure. It is an object of the present invention to make it difficult to visually recognize a variation in pixels due to a displacement of a seam due to exposure, thereby preventing a deterioration in display quality.
【０００６】[0006]
【課題を解決するための手段】上記の目的を達成するた
め、本発明では、対向する一対の基板と、それらの基板
の対向面上に表示面から見て相互に交差するように配置
された一対のストライプ状電極群と、これらストライプ
状電極群を介して印加される電圧によって駆動される液
晶とを有し、前記一方または両基板上の各々のストライ
プ状電極群がフォトリソ工程におけるパターン焼付け時
にストライプに対し平行方向で２つ以上に分割露光され
て形成されたものである液晶表示素子において、前記分
割露光による継ぎ目を、同一面上の２本のストライプ電
極間を含む非表示部に配置したことを特徴とする。In order to achieve the above object, according to the present invention, a pair of opposing substrates are arranged on the opposing surfaces of the substrates so as to intersect each other when viewed from the display surface. A pair of stripe-shaped electrode groups, and a liquid crystal driven by a voltage applied through these stripe-shaped electrode groups, and each of the stripe-shaped electrode groups on the one or both substrates is subjected to pattern printing in a photolithography process. In a liquid crystal display element formed by performing two or more divisional exposures in a direction parallel to a stripe, a seam formed by the divisional exposure is arranged in a non-display part including between two stripe electrodes on the same surface. It is characterized by the following.
【０００７】ストライプ電極の電気抵抗を低減させる等
のための不透明金属部材を有する液晶表示素子において
は、前記非表示部として、さらに前記不透明金属部材の
領域を含ませることができる。In a liquid crystal display device having an opaque metal member for reducing the electric resistance of the stripe electrode or the like, the non-display portion may further include a region of the opaque metal member.
【０００８】[0008]
【作用】本発明によれば、ストライプ状電極パターン形
成時のストライプ方向に対する平行方向の継ぎ目の機械
精度上のズレを同一面上の画素間と不透明金属部材を含
む非表示部に配置することにより、液晶を駆動して表示
させても継ぎ目の機械精度上のズレの影響が表示画面上
には表われないようにすることができる。According to the present invention, the deviation of the mechanical accuracy of the seam in the direction parallel to the stripe direction when the stripe-shaped electrode pattern is formed is arranged between the pixels on the same surface and in the non-display portion including the opaque metal member. Even if the liquid crystal is driven and displayed, the effect of the displacement on the mechanical accuracy of the seam can be prevented from appearing on the display screen.
【０００９】以下、本発明を図面を用いて詳細に説明す
る。Hereinafter, the present invention will be described in detail with reference to the drawings.
【００１０】図１は本発明の一実施例に係る液晶表示素
子の電極部の平面図である。図１において、１は画素電
極である透明電極、２は画素間である。第１象限と第２
象限の継ぎ目４は画素間２上に位置しており、この継ぎ
目４においてｘ，ｙ方向の継ぎ目ズレ４ｘ，４ｙが生じ
ている。また、１’および２’は対向基板の透明電極お
よび画素間である。ここで、第１象限と第２象限はそれ
ぞれフォトリソ工程において、焼き付けが１回の露光で
行なわれる範囲である。すなわち、本例は、例えば１回
目で第１象限を露光し、２回目で第２象限を露光したよ
うな場合を示している。FIG. 1 is a plan view of an electrode portion of a liquid crystal display device according to one embodiment of the present invention. In FIG. 1, 1 is a transparent electrode which is a pixel electrode, and 2 is between pixels. 1st quadrant and 2nd quadrant
The joint 4 of the quadrant is located between the pixels 2, and the joint 4 has joint deviations 4 x and 4 y in the x and y directions. Also, 1 ′ and 2 ′ are between the transparent electrode of the opposing substrate and the pixel. Here, the first quadrant and the second quadrant are ranges in which printing is performed by one exposure in the photolithography process. That is, this example shows a case where the first quadrant is exposed for the first time and the second quadrant is exposed for the second time.
【００１１】図２は図１の表示画素を表す平面図であ
る。図１および図２において、継ぎ目４を含む画素間巾
２ｂは、本来の画素間巾２ａとｘ方向の継ぎ目ズレ４ｘ
だけ異なるが、非表示部であるためにそのズレは視認さ
れない。FIG. 2 is a plan view showing the display pixel of FIG. 1 and 2, the width 2b between pixels including the seam 4 is different from the original width 2a between pixels by a seam shift 4x in the x direction.
However, the difference is not visually recognized because of the non-display portion.
【００１２】図３は従来の液晶表示素子の電極群の平面
図の一例であり、第１象限と第２象限の継ぎ目４は、透
明電極１上に位置している。図４は図３の表示画素を表
す平面図である。図３および図４において継ぎ目４を含
む画素巾１ｂは本来の画素巾１ａとｘ方向の継ぎ目ズレ
４ｘだけ異なるため、実際の表示素子として見た場合、
１ラインのみの輝度が他と異なり、人間の目に視認され
る。FIG. 3 is an example of a plan view of an electrode group of a conventional liquid crystal display element. A joint 4 in a first quadrant and a second quadrant is located on a transparent electrode 1. FIG. 4 is a plan view showing the display pixel of FIG. In FIGS. 3 and 4, the pixel width 1b including the seam 4 is different from the original pixel width 1a by the seam shift 4x in the x direction.
The luminance of only one line is different from the others and is visible to human eyes.
【００１３】[0013]
【実施例１】以下、本発明の実施例を説明する。Embodiment 1 An embodiment of the present invention will be described below.
【００１４】３００×３２０×ｔ１．１（ｍｍ）のガラ
ス基板２枚にそれぞれスパッタ法で透明電極（ＩＴＯ）
１０００Åを成膜し、フォトリソグラフィ技術を用いて
ストライプ状電極群を形成した。この時の露光はキヤノ
ン製ＭＰＡ−１５００を用い、４分割露光にて画素間で
継ぐようにして行なった。形成されたストライプ状電極
群の形状を図１に示す。図１における透明電極１の巾を
２３０μｍ、画素間２の巾を１２μｍとした。継ぎ目ズ
レ４ｘ，４ｙはいずれも１．５μｍであった。A transparent electrode (ITO) was formed on each of two 300 × 320 × t1.1 (mm) glass substrates by sputtering.
A 1000 .ANG. Film was formed, and a striped electrode group was formed using a photolithography technique. The exposure at this time was performed by using a MPA-1500 manufactured by Canon Inc. so that the pixels were connected by four-division exposure. FIG. 1 shows the shape of the formed striped electrode group. The width of the transparent electrode 1 in FIG. 1 was 230 μm, and the width between the pixels 2 was 12 μm. Each of the joint deviations 4x and 4y was 1.5 μm.
【００１５】前記ガラス基板２枚を貼合せ、液晶を封入
し図１および図２に示す液晶表示素子を形成し、駆動し
たところ４分割の継ぎ目は全く視認されなかった。The two glass substrates were bonded together, and liquid crystal was sealed therein to form the liquid crystal display device shown in FIGS. 1 and 2. When the device was driven, no four-part seams were visible.
【００１６】[0016]
【実施例２】図５は本発明の他の実施例の液晶表示素子
の電極群の平面図の一例である。Embodiment 2 FIG. 5 is an example of a plan view of an electrode group of a liquid crystal display device according to another embodiment of the present invention.
【００１７】図５において、画素となる透明電極１に沿
って接して電極抵抗の低い金属電極３が形成され、該金
属電極３には対向基板の画素間を遮光する遮光部３３が
形成されている。ここで実際は対向基板側にも同様に金
属電極３’および遮光部３３’が形成されるのが一般的
であるが簡単のため図では省略した。In FIG. 5, a metal electrode 3 having a low electrode resistance is formed in contact with a transparent electrode 1 serving as a pixel, and a light-shielding portion 33 for shielding light between pixels of an opposite substrate is formed on the metal electrode 3. I have. In practice, the metal electrode 3 'and the light-shielding portion 33' are generally formed on the counter substrate side in the same manner, but are omitted in the drawing for simplicity.
【００１８】図５において、第１象限と第２象限の継ぎ
目４は、画素間２上に位置されている。また、継ぎ目の
ｘ方向のズレ４ｘのみでなく、遮光部３３があるために
継ぎ目のｙ方向のズレ４ｙにより、第１象限と第２象限
の画素の位置ズレが発生するが、遮光部３３の巾３３ａ
が対向基板の画素間巾２’ａと継ぎ目のｙ方向のズレ４
ｙを合わせたものより大きければ実際の表示画素の大き
さには変化は無く、また表示画素内に継ぎ目の形状が表
われることも無いため、継ぎ目は視認されない。In FIG. 5, the joint 4 between the first quadrant and the second quadrant is located on the space 2 between pixels. Further, not only the displacement 4x in the x direction of the seam but also the displacement 4y in the y direction of the seam due to the presence of the light shielding portion 33 causes displacement of the pixels in the first quadrant and the second quadrant. Width 33a
Is the displacement 4 in the y direction of the seam between the pixel width 2′a of the opposing substrate and the seam.
If the value is larger than the sum of y, the actual size of the display pixel does not change, and the shape of the seam does not appear in the display pixel, so the seam is not visually recognized.
【００１９】図５の液晶表示素子は次のようにして作成
した。すなわち、３００×３２０×ｔ１．１（ｍｍ）の
ガラス基板２枚にそれぞれ実施例１と同様の方法で厚さ
１２００Åのストライプ状透明電極群を形成し、その上
に同じくスパッタ法で金属電極としてＭｏを３０００Å
成膜し、透明電極と同様の方法で図５のパターン形状を
有する金属電極付きのストライプ電極群を形成した。こ
の時の透明電極および１および１’の巾は２２０μｍ、
金属電極３および３’（図示しない）の巾は２０μｍ、
金属電極の遮光部３３および３３’（図示しない）の巾
は３０μｍ、画素間２の巾は１０μｍとした。継ぎ目ズ
レ４ｘおよび４ｙは１．２μｍであった。The liquid crystal display device shown in FIG. 5 was prepared as follows. That is, a stripe-shaped transparent electrode group having a thickness of 1200 mm is formed on each of two glass substrates of 300 × 320 × t1.1 (mm) in the same manner as in Example 1, and a metal electrode is formed thereon by the same sputtering method. 3000 Mo
Films were formed, and a stripe electrode group with a metal electrode having the pattern shape of FIG. 5 was formed in the same manner as the transparent electrode. At this time, the width of the transparent electrode and 1 and 1 ′ is 220 μm,
The width of the metal electrodes 3 and 3 ′ (not shown) is 20 μm,
The width of the light shielding portions 33 and 33 ′ (not shown) of the metal electrode was 30 μm, and the width between the pixels 2 was 10 μm. The seam shifts 4x and 4y were 1.2 μm.
【００２０】前記ガラス基板２枚を貼合せ図４に示す液
晶表示素子を形成し、駆動したところ４分割の継ぎ目は
全く視認されなかった。The two glass substrates were bonded to each other to form a liquid crystal display device shown in FIG. 4, and when the liquid crystal display device was driven, four joints were not visually recognized at all.
【００２１】[0021]
【発明の効果】以上説明したように、本発明によれば、
ストライプ電極群パターン形成時のストライプに対する
平行方向の継ぎ目を同一面上の非表示部に配置すること
により、機械精度上の誤差から発生する継ぎ目のズレの
許容を大きくしても、表示品位の低下の全くない液晶表
示素子を提供することができる。As described above, according to the present invention,
By arranging seams in the direction parallel to the stripe at the time of forming the stripe electrode group pattern in the non-display part on the same plane, the display quality is deteriorated even if the tolerance of seam deviation caused by an error in mechanical accuracy is increased. A liquid crystal display element free from any problem can be provided.
【図１】 本発明の一実施例に係る液晶表示素子の電極
部の一例を示す平面図である。FIG. 1 is a plan view showing an example of an electrode section of a liquid crystal display device according to one embodiment of the present invention.
【図２】 図１の液晶表示素子の表示画素を示す平面図
である。FIG. 2 is a plan view showing a display pixel of the liquid crystal display device of FIG.
【図３】 従来例の液晶表示素子の電極部の平面図の一
例を示す平面図である。FIG. 3 is a plan view showing an example of a plan view of an electrode portion of a conventional liquid crystal display element.
【図４】 図４の液晶表示素子の表示画素を示す平面図
である。FIG. 4 is a plan view showing a display pixel of the liquid crystal display device of FIG.
【図５】 本発明の別の実施例に係る液晶表示素子の電
極部の平面図である。FIG. 5 is a plan view of an electrode part of a liquid crystal display device according to another embodiment of the present invention.
１：透明電極、１’：対向基板の透明電極、２：画素
間、２’：対向基板の画素間、３：金属電極、３３：金
属電極３の対向基板画素間の遮光部、４：継ぎ目、４
ｘ：継ぎ目のｘ方向のズレ、４ｙ：継ぎ目のｙ方向のズ
レ。1: Transparent electrode, 1 ': Transparent electrode of opposing substrate, 2: Between pixels, 2': Between pixels of opposing substrate, 3: Metal electrode, 33: Light shielding portion between opposing substrate pixels of metal electrode 3, 4: Seam , 4
x: displacement of the joint in the x direction, 4y: displacement of the joint in the y direction.
Claims (3)
対向面上に表示面から見て相互に交差するように配置さ
れた一対のストライプ状電極群と、これらストライプ状
電極群を介して印加される電圧によって駆動される液晶
とを有し、前記一方または両基板上の各々のストライプ
状電極群がフォトリソ工程におけるパターン焼付け時に
ストライプに対し平行方向で２つ以上に分割露光されて
形成されたものである液晶表示素子において、前記分割
露光による継ぎ目を、同一面上の２本のストライプ電極
間を含む非表示部に配置したことを特徴とする液晶表示
素子。1. A pair of opposing substrates, a pair of stripe-shaped electrodes arranged on the opposing surfaces of the substrates so as to intersect each other as viewed from the display surface, and A liquid crystal driven by an applied voltage, wherein each of the stripe-shaped electrode groups on the one or both substrates is formed by being dividedly exposed to two or more in a direction parallel to the stripes during pattern printing in a photolithography process. A liquid crystal display device according to claim 1, wherein the seam formed by the divisional exposure is arranged in a non-display portion including between two stripe electrodes on the same surface.
電極上および／または近傍に形成された不透明金属部材
の領域を含む請求項１記載の液晶表示素子。2. The liquid crystal display device according to claim 1, wherein the non-display portion further includes a region of an opaque metal member formed on and / or near the stripe electrode.
極の電気抵抗を低減させるためのものである請求項２記
載の液晶表示素子。3. The liquid crystal display device according to claim 2, wherein the opaque metal member is for reducing the electric resistance of the stripe electrode.
Priority Applications (9)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3291885A JP2869829B2 (en) | 1991-10-14 | 1991-10-14 | Liquid crystal display device |
| US07/956,299 US5285300A (en) | 1991-10-07 | 1992-10-05 | Liquid crystal device |
| EP92117005A EP0536680B1 (en) | 1991-10-07 | 1992-10-06 | Liquid crystal device and liquid crystal injection method |
| AT92117005T ATE147169T1 (en) | 1991-10-07 | 1992-10-06 | LIQUID CRYSTAL DEVICE AND METHOD FOR FILLING THE LIQUID CRYSTAL |
| DE69232242T DE69232242T2 (en) | 1991-10-07 | 1992-10-06 | Liquid crystal display device and method for injecting the liquid crystal |
| DE69216348T DE69216348T2 (en) | 1991-10-07 | 1992-10-06 | Liquid crystal device and method for filling the liquid crystal |
| AT95113126T ATE209789T1 (en) | 1991-10-07 | 1992-10-06 | LIQUID CRYSTAL DISPLAY DEVICE AND METHOD FOR INJECTING THE LIQUID CRYSTAL |
| EP95113126A EP0687936B1 (en) | 1991-10-07 | 1992-10-06 | Liquid crystal device and liquid crystal injection method |
| US08/145,641 US5406398A (en) | 1991-10-07 | 1993-11-04 | Liquid crystal injection method using dummy electrodes |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3291885A JP2869829B2 (en) | 1991-10-14 | 1991-10-14 | Liquid crystal display device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05107548A JPH05107548A (en) | 1993-04-30 |
| JP2869829B2 true JP2869829B2 (en) | 1999-03-10 |
Family
ID=17774710
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3291885A Expired - Fee Related JP2869829B2 (en) | 1991-10-07 | 1991-10-14 | Liquid crystal display device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2869829B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3324119B2 (en) * | 1998-02-04 | 2002-09-17 | セイコーエプソン株式会社 | Liquid crystal devices and electronic equipment |
-
1991
- 1991-10-14 JP JP3291885A patent/JP2869829B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05107548A (en) | 1993-04-30 |
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