JP2855394B2 - Positioning / holding device for the object to be measured in the rotational shape symmetry surface profile measuring device - Google Patents
Positioning / holding device for the object to be measured in the rotational shape symmetry surface profile measuring deviceInfo
- Publication number
- JP2855394B2 JP2855394B2 JP5130493A JP5130493A JP2855394B2 JP 2855394 B2 JP2855394 B2 JP 2855394B2 JP 5130493 A JP5130493 A JP 5130493A JP 5130493 A JP5130493 A JP 5130493A JP 2855394 B2 JP2855394 B2 JP 2855394B2
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- Japan
- Prior art keywords
- measured
- holding
- positioning
- rotationally symmetric
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Mounting And Adjusting Of Optical Elements (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Description
【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION
【０００１】[0001]
【産業上の利用分野】本発明は、例えば１面が凸または
凹の回転対称面として形成され、他面が球面または回転
対称非球面或いは平面として形成された単レンズのレン
ズ面形状、特に、凸または凹の回転対称面が回転対称非
球面である単レンズの非球面形状を測定するのに好適な
レンズ面形状測定装置における被測定物の位置決め・保
持装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a lens surface shape of a single lens in which one surface is formed as a convex or concave rotationally symmetric surface and the other surface is formed as a spherical or rotationally symmetric aspherical surface or a flat surface. The present invention relates to a device for positioning and holding an object to be measured in a lens surface shape measuring device suitable for measuring the aspherical shape of a single lens whose convex or concave rotationally symmetric surface is a rotationally symmetric aspherical surface.
【０００２】[0002]
【従来の技術】回転対称非球面を対象とするレンズ面形
状測定装置としては、従来から幾つかの形式のものが知
られている。その１つの形式としては、例えば特開昭 6
1-70434 号公報に開示されているような構成の非球面レ
ンズの検査装置がある。2. Description of the Related Art Several types of lens surface shape measuring apparatuses for rotationally symmetric aspherical surfaces are known. One such format is described in, for example,
There is an inspection apparatus for an aspheric lens having a configuration as disclosed in Japanese Patent Application Laid-Open No. 1-70434.
【０００３】この従来の検査装置では、図６に示すよう
に、上端部が水平円板面として形成された基軸１が測定
装置本体上に垂直状態に設置され、測定すべき非球面単
レンズ４を着脱可能に保持するレンズ取付台３がこの基
軸１の中心軸線１ａに対し垂直に設けられる。この場
合、非球面単レンズ４は、測定対象の回転対称非球面が
横向きになる状態でレンズ取付台３に取り付けられるこ
とになる。In this conventional inspection apparatus, as shown in FIG. 6, a base shaft 1 having an upper end formed as a horizontal disk surface is installed vertically on a measurement apparatus main body, and an aspherical single lens 4 to be measured is provided. A lens mount 3 for detachably holding is provided perpendicular to the central axis 1a of the base shaft 1. In this case, the aspherical single lens 4 is attached to the lens mount 3 with the rotationally symmetric aspherical surface to be measured facing sideways.
【０００４】一方、ＸＹステージ６を具えたロータリテ
ーブル２が基軸１を中心として回転するように測定装置
本体上に設置され、非球面形状を測定するための触針子
７が、水平円板面と平行に設定した水平軸（触針子軸）
に沿って前進・後退可能な状態にロータリテーブル２の
ＸＹステージ６上に設置されることになる。On the other hand, a rotary table 2 provided with an XY stage 6 is installed on a measuring apparatus main body so as to rotate about a base shaft 1, and a stylus 7 for measuring an aspherical shape is provided with a horizontal disk surface. Horizontal axis set in parallel with
Is mounted on the XY stage 6 of the rotary table 2 so as to be able to advance and retreat along.
【０００５】そして、検査（測定）作業に際しては、先
ず、測定すべき非球面単レンズ４を測定対象非球面が横
向きになるように、且つ、測定対象非球面の基準曲率半
径の中心が基軸１の中心軸線１ａ上に位置するような状
態でレンズ取付台３に固定する。In the inspection (measurement) work, first, the aspherical single lens 4 to be measured is placed so that the aspherical surface to be measured is oriented sideways, and the center of the reference radius of curvature of the aspherical surface to be measured is the base axis 1. Is fixed to the lens mount 3 so as to be positioned on the center axis 1a of the lens mount 1.
【０００６】その後、ＸＹステージ６を利用して、例え
ば触針子７の先端部を測定対象非球面の頂点に位置させ
ると共に、適当な押圧力により触針子７の先端部をこの
非球面に接触させ、この状態でロータリテーブル２を基
軸１の周りに僅かずつ回転させる。Thereafter, the tip of the stylus 7 is positioned at the apex of the aspherical surface to be measured by using the XY stage 6, and the tip of the stylus 7 is moved to the aspherical surface by an appropriate pressing force. The rotary table 2 is rotated slightly around the base shaft 1 in this state.
【０００７】このように操作すると、触針子７は、測定
対象非球面の頂点からレンズの縁部に至るまで単レンズ
の直径方向に水平に変位し、この変位の過程で、触針子
７が測定対象非球面の光軸断面形状に倣って水平軸に沿
って前進または後退する。そして、このときの触針子７
の前進量または後退量とロータリテーブル２の回転量と
の関係から非球面レンズの非球面形状を測定するように
している。When operated in this manner, the stylus 7 is displaced horizontally in the diameter direction of the single lens from the vertex of the aspherical surface to be measured to the edge of the lens. In the course of this displacement, the stylus 7 Moves forward or backward along the horizontal axis according to the optical axis cross-sectional shape of the aspherical surface to be measured. And the stylus 7 at this time
The aspherical shape of the aspherical lens is measured from the relationship between the amount of advance or retreat and the amount of rotation of the rotary table 2.
【０００８】即ち、触針子７の走査量であるロータリテ
ーブル２の回動量は、ロータリエンコーダ８によって測
定され、一方、触針子７の変位量は、レーザ光源１２か
ら発射されハーフミラー１３を通りプリズム１４で反射
されハーフミラー１３を介して受光器１６に入射する光
が、レーザ光源１２からハーフミラー１３を介してプリ
ズム１５で反射されハーフミラー１３を通って受光器１
６に入射する光を参照光として干渉されることによって
カウンタ１７で測定され、回動量の測定値と変位量の測
定値とから非球面レンズ４の非球面形状が検査されるこ
ととなる。That is, the rotation amount of the rotary table 2, which is the scanning amount of the stylus 7, is measured by the rotary encoder 8, while the displacement amount of the stylus 7 is emitted from the laser light source 12 to move the half mirror 13. The light reflected by the prism 14 and incident on the light receiver 16 via the half mirror 13 is reflected from the laser light source 12 by the prism 15 via the half mirror 13, passes through the half mirror 13, and
The light incident on 6 is interfered with as reference light and is measured by the counter 17, and the aspherical shape of the aspherical lens 4 is inspected from the measured value of the rotation amount and the measured value of the displacement amount.
【０００９】また、他の形式としては、測定すべき非球
面単レンズを、上記従来例とは異なり、その測定対象非
球面を上向きの状態で装置本体に取り付ける構成のレン
ズ面形状測定装置がある。As another form, there is a lens surface shape measuring apparatus in which an aspherical single lens to be measured is attached to an apparatus main body with the aspherical surface to be measured facing upward, unlike the above conventional example. .
【００１０】この測定装置では、非球面単レンズを着脱
可能に保持するレンズ取付台が基盤上に設置され、触針
子支持アームがこのレンズ取付台に対して例えば水平方
向に直線的に変位可能な状態に設置される。そして、触
針子がこの触針子支持アームに対して自重により下降し
てレンズ面に接触し得るように設けられることになる。In this measuring apparatus, a lens mount for detachably holding an aspherical single lens is installed on a base, and a stylus support arm can be linearly displaced, for example, in a horizontal direction with respect to the lens mount. It is installed in a state. Then, the stylus is provided so as to be able to descend to the stylus support arm by its own weight and come into contact with the lens surface.
【００１１】この形式の測定装置では、測定作業に際し
て、触針子の先端部を測定対象非球面の頂点に位置さ
せ、その後、触針子支持アームを水平方向に変位させ
る。このように操作すると、触針子が測定対象非球面の
頂点からレンズの縁部に至るまで単レンズの直径方向に
変位するが、この変位の過程で、触針子が自重（または
適宜な加圧手段）により測定対象非球面の光軸断面形状
に倣って上下方向に変位する。In this type of measuring device, the tip of the stylus is positioned at the vertex of the aspherical surface to be measured during the measuring operation, and then the stylus support arm is displaced in the horizontal direction. When this operation is performed, the stylus is displaced in the diameter direction of the single lens from the vertex of the aspheric surface to be measured to the edge of the lens, and in the process of this displacement, the stylus loses its own weight (or an appropriate load). Pressure means) to displace in the vertical direction following the optical axis cross-sectional shape of the aspherical surface to be measured.
【００１２】そして、このときの触針子支持アームの水
平方向の変位量と触針子の上下方向の変位量との関係か
ら測定対象非球面の形状を測定するようにしている。The shape of the aspherical surface to be measured is measured from the relationship between the horizontal displacement of the stylus support arm and the vertical displacement of the stylus at this time.
【００１３】[0013]
【発明が解決しようとする課題】ところで、これらのレ
ンズ面形状測定装置では、いずれも、測定すべき非球面
単レンズをレンズ取付台に固定する際に測定対象非球面
の対称軸（光軸）をレンズ取付台の軸芯と正確に一致さ
せるように位置決め調整を行い、或いは、測定対象非球
面の対称軸を装置本体や触針子支持アームに対して所定
の角度に正確に設定調整を行わなくてはならないという
神経を使う作業を必要とし、しかも、その状態ないし姿
勢で非球面単レンズをレンズ取付台に固定するという煩
雑な作業を必要としている。In each of these lens surface shape measuring devices, when the aspherical single lens to be measured is fixed to the lens mount, the symmetry axis (optical axis) of the aspherical surface to be measured. Position adjustment is performed so that the axis of the lens mount is exactly the same as the axis of the lens mount, or the symmetrical axis of the aspherical surface to be measured is set and adjusted accurately at a predetermined angle with respect to the device body and the stylus support arm. This necessitates the use of nerves that are indispensable, and the complicated work of fixing the aspheric single lens to the lens mount in that state or posture.
【００１４】そして、従来のレンズ面形状測定装置で
は、いずれも、測定すべき非球面単レンズを保持する際
に、その外周面を利用して保持する方法を採用している
ため、単レンズの外周面の軸と測定対象非球面の対称軸
とが同軸に加工されていない場合には、測定作業に際し
て、その都度位置決め調整作業や固定作業を行わなけれ
ばならず、そのため、これらの作業に多大の時間を要す
るということが大きな欠点となっていた。[0014] In the conventional lens surface shape measuring apparatus, a method of holding the aspherical single lens to be measured by using the outer peripheral surface thereof when holding the single lens is adopted. If the axis of the outer peripheral surface and the symmetry axis of the aspherical surface to be measured are not coaxially machined, a positioning adjustment work and a fixing work must be performed each time the measurement work is performed. It takes a long time, which is a major drawback.
【００１５】そして、このことは、光学レンズにかぎら
ず、回転対象面を有する固体性物体、例えばレンズ金型
やミラーの面形状測定の場合でも同様である。[0015] This applies not only to the optical lens but also to the measurement of the surface shape of a solid object having a rotation target surface, for example, a lens mold or a mirror.
【００１６】本発明は、このような事情に鑑みてなされ
たもので、その目的とするところは、回転対称面の面形
状測定作業に際して、被測定物を一定の位置に再現性良
く設定すること、並びに、位置決め誤差に起因する測定
誤差の発生を少なくすることが可能であり、しかも、従
来のような煩雑な被測定物の位置決め調整作業や保持作
業等の容易化ないし不要化を実現し得る新しい回転対称
面の面形状測定装置における被測定物の位置決め・保持
装置を提供することにある。The present invention has been made in view of the above circumstances, and an object of the present invention is to set an object to be measured at a predetermined position with good reproducibility at the time of measuring the surface shape of a rotationally symmetric surface. In addition, it is possible to reduce the occurrence of a measurement error due to the positioning error, and furthermore, it is possible to simplify or eliminate complicated positioning adjustment work and holding work of the DUT as in the related art. It is an object of the present invention to provide a device for positioning and holding an object to be measured in a new rotationally symmetric surface profile measuring device.
【００１７】[0017]
【課題を解決するための手段】本発明は、上記の目的を
達成するために、少なくとも１面が回転対称面として形
成され、他面が球面または回転対称非球面或いは平面と
して形成された被測定物の回転対称面の面形状を測定す
る回転対称面の面形状測定装置における被測定部の位置
決め・保持装置において、前記位置決め・保持装置の本
体部と、中心部に空気通路が穿設され、面測定時に非測
定側の面となる前記被測定物の保持面を着脱可能に保持
する部分が円環形状部として形成され、所定の枢軸上に
回転可能に設けられた被測定物保持部材と、面測定時に
測定の対象となる前記被測定物の測定対象面と着脱可能
に接する部分が円環形状部として形成され、この円環形
状部が前記被測定物保持部材の円環形状部と正対するよ
うな状態で前記枢軸と同軸上に設けられた被測定物位置
決め部材と、この被測定物位置決め部材を前記枢軸上に
保持し、且つ、面形状の測定に際して、前記被測定物保
持部材の円環形状部と前記被測定物位置決め部材の円環
形状部との間で前記被測定物を挟持して前記被測定物の
２つの面を通る回転対象軸と前記所定の軸とを一致させ
るために、前記被測定物位置決め部材を前記枢軸に沿っ
て正逆方向に変位させ得るように前記本体部と一体的な
コラムに形成された案内手段に摺動自在に且つ任意の摺
動位置で一時的に固定可能に設けられた被測定物位置決
め部材支持部材と、面形状の測定に際して、前記被測定
物を保持した状態にある前記被測定物保持部材の前記空
気通路を減圧することによって前記被測定物の保持面を
前記被測定物保持部材の円環形状部に吸着させ得る着脱
可能固定手段と、を備え、前記被測定物を形成する２つ
の回転対称面を通る回転対称軸と前記枢軸とを一致させ
且つ前記被測定物を前記着脱可能固定手段により前記被
測定物保持部材に吸着固定させた状態で、前記被測定物
位置決め部材を前記被測定物から離間変位させ、前記被
測定物保持部材を回転させ得るように構成したことを特
徴とするものである。SUMMARY OF THE INVENTION In order to achieve the above object, the present invention provides a device to be measured in which at least one surface is formed as a rotationally symmetric surface and the other surface is formed as a spherical or rotationally symmetric aspherical surface or a plane. In the positioning and holding device of the measured part in the rotationally symmetric surface shape measuring device that measures the surface shape of the rotationally symmetric surface of the object, the main body of the positioning and holding device, and an air passage is drilled in the center, A part for detachably holding a holding surface of the object to be measured, which is a surface on the non-measurement side during surface measurement, is formed as an annular portion, and an object holding member rotatably provided on a predetermined pivot. The portion that detachably contacts the surface to be measured of the object to be measured during surface measurement is formed as an annular portion, and the annular portion is an annular portion of the object to be measured holding member. The pivots are positioned facing each other. And the object to be measured positioning member provided coaxially to hold the object to be measured positioning member on said pivot, and, for the measurement of surface shape, wherein an annular-shaped portion of the workpiece holding member to be The object to be measured is sandwiched between an annular portion of the object positioning member and the
In order to match the rotation target axis passing through the two surfaces with the predetermined axis, the main body portion and the main body portion are displaceable in the forward and reverse directions along the pivot axis. Integral
The guide means formed on the column is slidably and freely slidable.
An object-to-be-measured object positioning member supporting member which is provided so as to be temporarily fixable at a moving position, and the measurement object surface holding member which is in a state of holding the object to be measured when measuring the surface shape.
The holding surface of the object to be measured is
Detachable fixing means capable of being attracted to an annular portion of the object-to-be-measured holding member ;
The rotational axis of symmetry passing through the rotational symmetry plane
The object to be measured is attached to the object by the detachable fixing means.
In the state where the object to be measured is suction-fixed to the object
The positioning member is displaced away from the object to be measured, and
The measurement object holding member is configured to be rotatable .
【００１８】[0018]
【作用】上記のように構成された回転対称面の面形状測
定装置における被測定物の位置決め・保持装置は、被測
定物保持部材の円環形状部で被測定物の非測定面を保持
し、被測定物位置決め部材の円環形状部で被測定物の測
定対象面を上記被測定物保持部材側に押し付けると、被
測定物の両面を２つの円環形状部がその全周部分で均一
な加圧力および加圧反力で押圧して安定した姿勢をとる
ように作用する。The device for positioning and holding the object to be measured in the rotationally symmetric surface profile measuring apparatus configured as described above holds the non-measurement surface of the object to be measured by the annular portion of the object to be measured holding member. When the object-of-measurement surface of the object to be measured is pressed against the object-to-be-measured holding member by the annular portion of the object-to-be-measured positioning member, the two annular portions of both sides of the object to be measured are uniform over its entire circumference. It acts so as to take a stable posture by being pressed by an appropriate pressing force and pressing reaction force.
【００１９】この２つの円環形状部によって挟持された
被測定物が安定した姿勢状態となる位置が、被測定物の
２つの面を通る回転対称軸と所定軸とが一致した位置と
なる。The position where the object to be measured sandwiched by these two annular portions is in a stable posture state is the position where the axis of rotational symmetry passing through the two surfaces of the object to be measured coincides with the predetermined axis.
【００２０】[0020]
【実施例】以下、本発明をレンズ面形状測定装置のレン
ズ位置決め・保持装置に適用した場合の実施例に基づい
て、その構成および作用を説明する。図１に示すのは、
本発明をレンズ面形状測定装置のレンズ位置決め・保持
装置に適用した場合の実施例に係る側面外観図である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The construction and operation of the present invention will be described based on an embodiment in which the present invention is applied to a lens positioning / holding device of a lens surface shape measuring device. As shown in FIG.
FIG. 2 is a side view showing an outer appearance according to an embodiment when the present invention is applied to a lens positioning / holding device of a lens surface shape measuring device.
【００２１】図１において、１はレンズ面形状測定装置
におけるレンズ位置決め・保持装置の装置本体、２はこ
の装置本体１において基準回転軸３ａを中心軸として回
転可能に設けられた回転テーブル、４はこの回転テーブ
ル２上においてこの回転テーブル２と同軸的に設けられ
た下側ホルダーベースである。In FIG. 1, reference numeral 1 denotes a device main body of a lens positioning / holding device in a lens surface shape measuring device, 2 denotes a rotary table provided on the device main body 1 so as to be rotatable around a reference rotation shaft 3a as a center axis, A lower holder base provided on the turntable 2 coaxially with the turntable 2.
【００２２】この下側ホルダーベース４には、次に記す
被測定物保持部材としての下側ホルダー５を着脱可能に
保持し且つ正確に基準回転軸３ａに軸合せし得る構造の
下側着脱可能保持装置（図示なし）が設けられている。
なお、その構造は、それ自体公知の適宜の手段によって
構成するものとする。The lower holder base 4 detachably holds a lower holder 5 as an object-to-be-measured object holding member, which will be described below, and which can be accurately aligned with the reference rotation shaft 3a. A holding device (not shown) is provided.
In addition, the structure shall be comprised by appropriate means known per se.
【００２３】５はこの下側着脱可能保持装置により着脱
可能に且つ回転テーブル２と同軸的に下側ホルダーベー
ス４上に取り付けられた下側ホルダーで、例えば図２に
示すように筒状部材として構成され、その上端面の内周
部分は、測定すべき非球面単レンズＬの下側レンズ面Ｌ
ｂと接触する実質的に真円形状の円環形状部５ａとして
形成されている。Reference numeral 5 denotes a lower holder detachably mounted on the lower holder base 4 by the lower detachable holding device and coaxially with the rotary table 2, for example, as a cylindrical member as shown in FIG. The inner peripheral portion of the upper end surface is formed of a lower lens surface L of an aspheric single lens L to be measured.
It is formed as a substantially perfect circular ring-shaped portion 5a in contact with b.
【００２４】６は装置本体１から回転テーブル２および
下側ホルダーベース４を経て下側ホルダー５の中空部に
至るように形成された適宜の真空引き用の空気通路、７
はこの空気通路６の出口に当る装置本体１の外側面に設
けられたエアコネクタで、適宜構成の減圧装置８と結合
し得るように構成されている。そして、真空引き用の空
気通路６とエアコネクタ７と減圧装置８とにより減圧吸
着装置６〜８を構成することになる。Reference numeral 6 denotes an appropriate air passage for evacuation formed from the apparatus main body 1 to the hollow portion of the lower holder 5 via the rotary table 2 and the lower holder base 4;
Is an air connector provided on the outer surface of the apparatus main body 1 corresponding to the outlet of the air passage 6, and is configured so as to be able to be connected to an appropriately configured pressure reducing device 8. Then, the vacuum passage 6, the air connector 7, and the pressure reducing device 8 constitute the vacuum suction devices 6 to 8.
【００２５】９は装置本体１に立設されたコラムで、そ
の基準回転軸３ａ側の側面部には、基準回転軸３ａと同
軸に設定された押し付け軸３ｂと平行な垂直案内面を具
えた垂直案内手段（例えば蟻嵌合案内構造）９ａが設け
られている。Reference numeral 9 denotes a column erected on the apparatus main body 1 and has a vertical guide surface parallel to a pressing shaft 3b set coaxially with the reference rotating shaft 3a on a side surface portion on the reference rotating shaft 3a side. Vertical guide means (for example, a dovetail-fitting guide structure) 9a is provided.
【００２６】１０は側方に突出した支持アーム１０ａを
具えたスライド部材で、垂直案内手段９ａにより垂直案
内される状態でコラム９に支持され、しかも、適宜構造
の緊締手段１１により、任意の垂直方向位置でコラム９
に半固定し得るように構成されている。Reference numeral 10 denotes a slide member having a support arm 10a projecting to the side. The slide member 10 is supported by the column 9 while being vertically guided by the vertical guide means 9a. Column 9 in directional position
It is configured so that it can be semi-fixed.
【００２７】このスライド部材１０は、適宜構造のバラ
ンス手段、例えば吊り下げワイヤー１２ａ、反転ローラ
１２ｂおよび重錘１２ｃから成るバランス手段１２ａ〜
１２ｃにより、垂直方向（矢印Ａ方向）に軽く変位し得
るように構成することが好ましい。また、緊締手段１１
は、それ自体公知の適宜の手段によって構成するものと
する。The slide member 10 has an appropriately structured balancing means, for example, a balancing means 12a to 12c comprising a hanging wire 12a, a reversing roller 12b and a weight 12c.
By 12c, it is preferable to be configured so that it can be displaced lightly in the vertical direction (the direction of arrow A). Also, the tightening means 11
Is constituted by appropriate means known per se.
【００２８】１３はスライド部材１０の支持アーム１０
ａに設けられた上側ホルダーベースで、その軸が前述の
基準回転軸３ａと同軸的に設定された押し付け軸３ｂと
一致するように構成されている。Reference numeral 13 denotes a support arm 10 of the slide member 10.
The upper holder base provided at a is configured so that its axis coincides with the pressing shaft 3b set coaxially with the aforementioned reference rotation shaft 3a.
【００２９】この上側ホルダーベース１３には、前述し
た下側ホルダーベース４の場合と同様に、次に記す上側
ホルダー１４を着脱可能に保持し且つ正確に押し付け軸
３ｂに軸合せし得る構造の上側着脱可能保持装置（図示
なし）が設けられている。なお、その構造は、それ自体
公知の適宜の手段によって構成するものとする。As in the case of the lower holder base 4 described above, the upper holder base 13 has an upper structure having a structure capable of detachably holding the following upper holder 14 and accurately aligning the shaft with the pressing shaft 3b. A detachable holding device (not shown) is provided. In addition, the structure shall be comprised by appropriate means known per se.
【００３０】１４はこの上側着脱可能保持装置により着
脱可能に且つ押し付け軸３ｂと同軸的に上側ホルダーベ
ース１３上に取り付けられた被測定物位置決め部材とし
ての上側ホルダーで、例えば図３に示すように筒状部材
として構成され、その下端面の内周部分は、測定すべき
非球面単レンズＬの上側レンズ面（測定対象非球面）Ｌ
ａと接触するほぼ真円形状の円環形状部１４ａとして形
成されている。Reference numeral 14 denotes an upper holder as an object-to-be-measured positioning member which is detachably attached to the upper holder base 13 by the upper detachable holding device and is coaxial with the pressing shaft 3b, for example, as shown in FIG. An inner peripheral portion of a lower end surface of the cylindrical member is an upper lens surface (aspheric surface to be measured) L of the aspheric single lens L to be measured.
It is formed as a substantially perfect circular ring-shaped portion 14a that comes into contact with a.
【００３１】なお、前述した下側ホルダー５の円環形状
部５ａとこの上側ホルダー１４の円環形状部１４ａと
は、同じ内径のものとして形成することも、異なる内径
のものとして形成することもできる。また、下側ホルダ
ー５の外周面の断面形状と上側ホルダー１４の外周面の
断面形状についても、それぞれ任意の形状に決定するこ
とができる。The annular portion 5a of the lower holder 5 and the annular portion 14a of the upper holder 14 may be formed to have the same inner diameter or different inner diameters. it can. Also, the cross-sectional shape of the outer peripheral surface of the lower holder 5 and the cross-sectional shape of the outer peripheral surface of the upper holder 14 can be determined to be arbitrary shapes.
【００３２】１５は上側ホルダーベース１３と上側ホル
ダー１４との間に設けられた適宜構造の緩衝支持手段
で、非球面単レンズＬを下側ホルダー５の円環形状部５
ａと上側ホルダー１４の円環形状部１４ａとの間で挟持
したときに、上側ホルダーベース１３から加えられる過
度の押し付け力により、非球面単レンズＬを損傷させな
いようにするための予防手段であり、例えば、ホルダー
１４が押し付け軸３ｂに沿って上下する案内部を備えた
スプリング機構とすることもできる。Numeral 15 is a buffering support means of an appropriate structure provided between the upper holder base 13 and the upper holder 14, and the aspherical single lens L is connected to the annular portion 5 of the lower holder 5.
and a preventive means for preventing the aspherical single lens L from being damaged by an excessive pressing force applied from the upper holder base 13 when the aspherical single lens L is sandwiched between the upper holder 14 and the annular portion 14a of the upper holder 14. For example, a spring mechanism provided with a guide portion in which the holder 14 moves up and down along the pressing shaft 3b can be used.
【００３３】２０は例えば基準回転軸３ａおよび押し付
け軸３ｂに対して直交する方向（水平方向）に変位可能
に設けられた触針子支持アームで、その先端部分には、
非球面単レンズＬの測定対象非球面Ｌａと接触する触針
子２１を垂直方向に変位可能に案内する触針子上下案内
手段２２が設けられている。Reference numeral 20 denotes a stylus support arm which is displaceable in a direction (horizontal direction) perpendicular to the reference rotation shaft 3a and the pressing shaft 3b.
A stylus vertical guide means 22 is provided to guide the stylus 21 in contact with the aspheric surface La to be measured of the aspheric single lens L so as to be vertically displaceable.
【００３４】この触針子支持アーム２０は、例えば図示
なき適宜の水平方向変位案内手段により、水平直線軌跡
上を左右方向（Ｂ方向）に所定量変位し得るような状態
に設置され、しかも、測定作業時に、触針子２１を下側
ホルダー５の円環形状部５ａ上の非球面単レンズＬの上
側レンズ面Ｌａに上方から接触させ得るように、垂直方
向（Ｃ方向）にも調整変位可能に設けられている。The stylus support arm 20 is set in such a manner that it can be displaced by a predetermined amount on the horizontal linear trajectory in the horizontal direction (B direction) by, for example, an appropriate horizontal displacement guide means (not shown). During the measurement operation, the stylus 21 is also adjusted and displaced in the vertical direction (C direction) so that the stylus 21 can be brought into contact with the upper lens surface La of the aspherical single lens L on the annular portion 5a of the lower holder 5 from above. It is provided as possible.
【００３５】なお、触針子支持アーム２０の設置個所
は、装置本体１上でも回転テーブル２上でもよいが、こ
の例の場合、面形状測定装置（図示せず）のベースプレ
ート上に設置してもよい。The place where the stylus support arm 20 is installed may be on the apparatus main body 1 or the rotary table 2, but in this example, it is installed on a base plate of a surface shape measuring apparatus (not shown). Is also good.
【００３６】また、触針子２１は、弱い付勢力で下方に
付勢されるようにそれ自体公知の方法で構成され、さら
に、触針子２１が初期位置から上方に向って変位したと
き、および、上方変位位置から初期位置に向って変位し
たときには、その変位量を電気的または機械的に検出し
得るようにも構成されている。The stylus 21 is configured in a manner known per se so as to be urged downward by a weak urging force. Further, when the stylus 21 is displaced upward from the initial position, Also, when it is displaced from the upwardly displaced position toward the initial position, the amount of displacement can be detected electrically or mechanically.
【００３７】次に、このように構成された図示例のレン
ズ面形状測定装置のレンズ位置決め・保持装置の動作な
いし作用について説明する。測定に際しては、先ず緊締
手段１１を緩めてスライド部材１０を上昇させ、測定す
べき非球面単レンズＬをその測定対象非球面（上側レン
ズ面）Ｌａを上向きにした状態で下側ホルダー５の円環
形状部５ａ上に載置する。Next, the operation or action of the lens positioning / holding device of the lens surface shape measuring apparatus of the illustrated example configured as described above will be described. At the time of measurement, first, the tightening means 11 is loosened to raise the slide member 10, and the aspherical single lens L to be measured is circled on the lower holder 5 with the aspherical surface (upper lens surface) La to be measured facing upward. It is placed on the ring-shaped part 5a.
【００３８】この状態では、図２に示すように、測定対
象非球面Ｌａの回転対称中心点である頂点Ｌｃと非球面
単レンズＬの下側レンズ面Ｌｂの回転対称中心点である
頂点Ｌｄとを通る回転対称軸（光軸に相当する軸）Ｏが
基準回転軸３ａと一致する保証はないから、非球面単レ
ンズＬは、回転対称軸Ｏが基準回転軸３ａに対して傾い
た姿勢で下側ホルダー５の円環形状部５ａ上に位置する
ことになる。In this state, as shown in FIG. 2, the vertex Lc, which is the rotationally symmetric center point of the aspheric surface La to be measured, and the vertex Ld, which is the rotationally symmetric center point of the lower lens surface Lb of the aspherical single lens L, Since there is no guarantee that the rotationally symmetric axis (the axis corresponding to the optical axis) O passing through the optical axis coincides with the reference rotational axis 3a, the aspherical single lens L is placed in a posture in which the rotationally symmetric axis O is inclined with respect to the reference rotational axis 3a. It will be located on the ring-shaped portion 5a of the lower holder 5.
【００３９】この状態で、スライド部材１０を押し付け
軸３ｂに沿って緩やかに下降させて、上側ホルダー１４
の円環形状部１４ａを非球面単レンズＬの測定対象非球
面Ｌａに押し付けて、下側ホルダー５の円環形状部５ａ
と上側ホルダー１４の円環形状部１４ａとの間で非球面
単レンズＬを挟み込むように操作する。この際、緩衝支
持手段１５が作用して、非球面単レンズＬに対する上側
ホルダー１４の過度の押し付け力による悪影響を排除す
る。In this state, the slide member 10 is gently lowered along the pressing shaft 3b to
Is pressed against the aspheric surface La to be measured of the aspheric single lens L, and the annular portion 5a of the lower holder 5 is pressed.
The operation is performed so that the aspherical single lens L is sandwiched between the ring-shaped portion 14a of the upper holder 14 and the ring-shaped portion 14a. At this time, the buffer support means 15 acts to eliminate an adverse effect due to excessive pressing force of the upper holder 14 against the aspherical single lens L.
【００４０】このように、非球面単レンズＬが、２つの
円環形状部５ａ，１４ａで挟み込まれると、非球面単レ
ンズＬの下側レンズ面Ｌｂと測定対象非球面Ｌａとがそ
れぞれの円環形状部５ａ，１４ａに倣うように姿勢を変
えて、図３に示すように、２つの円環形状部５ａ，１４
ａの間の間隔が全周に亘って例えば「Ｄ」の値になった
状態で静止することになる。As described above, when the aspherical single lens L is sandwiched between the two annular portions 5a and 14a, the lower lens surface Lb of the aspherical single lens L and the aspheric surface La to be measured are respectively circular. The posture is changed so as to follow the ring-shaped portions 5a, 14a, and as shown in FIG.
The apparatus stands still in a state in which the interval between a has a value of, for example, "D" over the entire circumference.
【００４１】これは、測定対象非球面Ｌａが上側ホルダ
ー１４の円環形状部１４ａの全周囲部分から均一な力で
押され、しかも、この過程で、下側レンズ面Ｌｂが下側
ホルダー５の円環形状部５ａの全周部分から均一な反力
で押されて安定した姿勢を求めて揺動するからである。This is because the aspheric surface La to be measured is pressed with a uniform force from the entire periphery of the annular portion 14a of the upper holder 14, and in this process, the lower lens surface Lb is This is because it is pushed by a uniform reaction force from the entire peripheral portion of the ring-shaped portion 5a and swings in search of a stable posture.
【００４２】そして、この状態では、測定対象非球面Ｌ
ａの頂点Ｌｃと下側レンズ面Ｌｂの頂点Ｌｄとがいずれ
も基準回転軸３ａ（押し付け軸３ｂでもある）上に位置
することになり、この状態で回転テーブル２を回転させ
ても測定対象非球面Ｌａの頂点Ｌｃの位置が変化しなく
なる。In this state, the measurement target aspherical surface L
Both the vertex Lc of a and the vertex Ld of the lower lens surface Lb are located on the reference rotation axis 3a (which is also the pressing axis 3b). The position of the vertex Lc of the spherical surface La does not change.
【００４３】この状態に至ったならば、減圧吸着装置６
〜８を作動させ、非球面単レンズＬで蓋をされた状態に
ある下側ホルダー５の中空状部分の気圧を減少させるよ
うに操作する。When this state is reached, the decompression adsorption device 6
-8 are operated to reduce the air pressure in the hollow portion of the lower holder 5 covered with the aspherical single lens L.
【００４４】このように操作すると、非球面単レンズＬ
の測定対象非球面Ｌａに加えられる大気圧により、非球
面単レンズＬは、下側ホルダー５の円環形状部５ａ側に
吸引されることになって、そのときのレンズ姿勢で固定
されることになる。従って、この状態に至ったならば、
スライド部材１０を適当な位置まで上昇させ緊締手段１
１を用いてその位置に固定する。By operating as described above, the aspherical single lens L
Due to the atmospheric pressure applied to the measurement target aspheric surface La, the aspheric single lens L is attracted to the annular portion 5a side of the lower holder 5 and is fixed in the lens posture at that time. become. Therefore, if you reach this state,
Raise the slide member 10 to an appropriate position and tighten the tightening means 1.
Use 1 to fix in place.
【００４５】さて、スライド部材１０が上昇したなら
ば、触針子支持アーム２０を基準回転軸３ａに向って水
平直線軌跡上を左方（Ｂ方向）に移動して触針子２１の
先端部を測定対象非球面Ｌａに接触させ、さらに、その
先端部を測定対象非球面Ｌａの頂点Ｌｃに正確に位置さ
せる。When the slide member 10 is raised, the stylus support arm 20 is moved leftward (in the direction B) on the horizontal linear trajectory toward the reference rotation axis 3a, and the tip of the stylus 21 is moved. Is brought into contact with the aspherical surface La to be measured, and its tip is accurately positioned at the vertex Lc of the aspherical surface La to be measured.
【００４６】そして、このときの触針子２１の垂直方向
の位置と触針子支持アーム２０の水平方向の位置を確認
してから、触針子支持アーム２０を右方に緩やかに変位
させる。このように操作すると、その変位の過程で触針
子２１が自身に付与された弱い付勢力で垂直方向に下降
しながら、測定対象非球面Ｌａの軸断面非球面形状に倣
いつつ非球面単レンズＬの直径方向に縁部まで変位する
ことになる。After confirming the vertical position of the stylus 21 and the horizontal position of the stylus support arm 20 at this time, the stylus support arm 20 is gently displaced to the right. When operated in this manner, the stylus 21 descends in the vertical direction with a weak urging force applied to itself during the displacement process, and follows the aspherical cross section of the aspherical surface La to be measured while aspherical single lens. It will be displaced to the edge in the diameter direction of L.
【００４７】従って、このとき得られる触針子支持アー
ム２０の水平方向の変位量と触針子２１の垂直方向の変
位量とから測定対象非球面Ｌａの非球面形状を求めるこ
とができる。Therefore, the aspherical shape of the aspheric surface La to be measured can be obtained from the horizontal displacement of the stylus support arm 20 and the vertical displacement of the stylus 21 obtained at this time.
【００４８】そして、測定対象非球面Ｌａの非球面形状
が求められたならば、減圧吸着装置６〜８の作動を停止
すると共に、適宜の方法で下側ホルダー５の中空状部分
の気圧を大気の状態に復帰させて非球面単レンズＬを下
側ホルダー５から取り外し、測定作業を終了する。When the aspherical shape of the measurement target aspherical surface La is obtained, the operation of the vacuum suction devices 6 to 8 is stopped, and the air pressure of the hollow portion of the lower holder 5 is reduced to atmospheric pressure by an appropriate method. Then, the aspherical single lens L is removed from the lower holder 5, and the measurement operation is completed.
【００４９】このようにして１つの測定対象非球面Ｌａ
に対する非球面形状の測定作業が終了したならば、他の
非球面単レンズＬを下側ホルダー５の円環形状部５ａに
取り付けて次の測定作業を開始することになる。Thus, one aspheric surface La to be measured is obtained.
Is completed, another aspheric single lens L is attached to the annular portion 5a of the lower holder 5, and the next measurement operation is started.
【００５０】このとき、前述した測定対象の非球面単レ
ンズＬが両面非球面である単レンズである場合には、１
つの非球面の測定作業が終了したときに単レンズを逆向
きにして、上述の手順に従って他の非球面に対する測定
作業を行うようにする。At this time, if the aspherical single lens L to be measured is a single lens having both aspheric surfaces, 1
When the measurement operation for one aspheric surface is completed, the single lens is turned in the opposite direction, and the measurement operation for another aspheric surface is performed according to the above-described procedure.
【００５１】図４および図５に示すのは、下側ホルダー
５の円環形状部５ａおよび上側ホルダー１４の円環形状
部１４ａの変形例である。この場合、図４は、下側ホル
ダー５および上側ホルダー１４の上端面の内周部分を適
当な円錐面で面取りした部分を形成したときの例であ
り、図５は、それぞれの上端面の内周部分に適当な値の
丸みを持つ部分を形成したときの例である。FIGS. 4 and 5 show modified examples of the annular portion 5a of the lower holder 5 and the annular portion 14a of the upper holder 14. FIG. In this case, FIG. 4 shows an example in which the inner peripheral portions of the upper end surfaces of the lower holder 5 and the upper holder 14 are chamfered with an appropriate conical surface, and FIG. This is an example of a case where a portion having an appropriate roundness is formed in a peripheral portion.
【００５２】以上説明した実施例では、一対の下側ホル
ダー５および上側ホルダー１４を用いた例を示したが、
測定する非球面単レンズの大きさや非球面の形状等に応
じて内径の大きさや円環形状部５ａ、１４ａの形状を変
えた複数対の下側ホルダー５および上側ホルダー１４を
準備し、前述した下側着脱可能保持装置および上側着脱
可能保持装置を利用して、その都度、それぞれの測定に
適した下側ホルダー５および上側ホルダー１４に交換す
るようにすることもできる。In the embodiment described above, an example is shown in which a pair of lower holders 5 and upper holders 14 are used.
A plurality of pairs of the lower holder 5 and the upper holder 14 in which the size of the inner diameter and the shape of the annular portions 5a and 14a are changed in accordance with the size of the aspheric single lens to be measured, the shape of the aspheric surface, and the like are prepared, and described above. By using the lower detachable holding device and the upper detachable holding device, the lower holder 5 and the upper holder 14 suitable for each measurement can be replaced each time.
【００５３】以上、図示実施例について説明してきた
が、本発明は、これらの実施例に限定されるものではな
く、その要旨を逸脱しない範囲内で種々に変形実施する
ことが可能である。Although the illustrated embodiments have been described above, the present invention is not limited to these embodiments, and can be variously modified without departing from the scope of the invention.
【００５４】例えば、図示実施例では、一方の面または
両面が非球面となっている両凸の単レンズを対象として
説明したが、測定対象面が非球面である両凹の単レンズ
の場合であっても、また、保持側面（下側ホルダー５の
円環形状部５ａに接する面）が平面である凸または凹の
単レンズでも、本発明を適用することができる。For example, in the illustrated embodiment, a description has been given of a biconvex single lens in which one or both surfaces are aspherical. However, in the case of a biconcave single lens in which the surface to be measured is aspherical. However, the present invention can be applied to a convex or concave single lens having a flat holding side surface (a surface in contact with the annular portion 5a of the lower holder 5).
【００５５】また、図示実施例では、光学レンズを対象
として説明したが、回転対象面を有する固体性物体、例
えばレンズ金型やミラーの面形状測定の場合にも適用す
ることが可能である。In the illustrated embodiment, the optical lens has been described as an object. However, the present invention can also be applied to the measurement of the surface shape of a solid object having a rotation target surface, for example, a lens mold or a mirror.
【００５６】また、図示実施例では、測定対象面が非球
面である場合を例として説明したが球面の面形状測定に
も利用し得るのは勿論である。また、図示実施例では、
特許請求の範囲に記載された着脱可能固定手段として減
圧吸着装置６〜８を用いているが他形式の装置を利用し
てもよい。In the illustrated embodiment, the case where the surface to be measured is an aspheric surface has been described as an example. However, it is needless to say that the present invention can be used for measuring the surface shape of a spherical surface. In the illustrated embodiment,
Although the reduced-pressure suction devices 6 to 8 are used as the detachable fixing means described in the claims, other types of devices may be used.
【００５７】また、図示実施例では、非球面の形状測定
に当って、水平方向に変位する触針子支持アーム２０と
垂直方向に変位する触針子２１から成る手段を用いた
が、その測定方向は、水平方向と垂直方向との組合せに
限定されるものではなく、また、他の形式の非球面形状
測定手段を用いることも可能である。Further, in the illustrated embodiment, in order to measure the shape of the aspherical surface, a means comprising the stylus support arm 20 displaced in the horizontal direction and the stylus 21 displaced in the vertical direction is used. The direction is not limited to the combination of the horizontal direction and the vertical direction, and other types of aspherical shape measuring means can be used.
【００５８】さらに、図示実施例では、基準回転軸３ａ
と押し付け軸３ｂとを垂直方向に設定した例を示した
が、水平方向に設定しても、斜め方向に設定することも
可能である。Further, in the illustrated embodiment, the reference rotating shaft 3a
Although the example in which the and the pressing shaft 3b are set in the vertical direction has been described, it is also possible to set the horizontal direction or the oblique direction.
【００５９】さらにまた、第１図には示していないが、
上述したレンズ位置決め・保持装置は、レンズ面形状測
定装置のベースプレート上に設置され、このベースプレ
ート上で触針子２１の移動方向およびこれと直交する方
向に位置決めする送り機構や上記ベースプレートに対し
任意の角度で傾斜させることのできる傾斜機構を備える
ように構成してもよい。Further, although not shown in FIG.
The above-described lens positioning / holding device is installed on a base plate of a lens surface shape measuring device, and a feed mechanism for positioning the stylus 21 on the base plate in a moving direction and a direction orthogonal thereto, and an arbitrary position with respect to the base plate. You may comprise so that the inclination mechanism which can incline at an angle may be provided.
【００６０】このように構成した場合には、レンズ面形
状測定装置のベースプレートに対し、レンズ位置決め・
保持装置は、その位置や下側ホルダー５の基準回転軸３
ａ（および上側ホルダー１４の押し付け軸３ｂ）の角度
を任意に設定し得るようになる。In the case of such a configuration, the lens positioning and positioning are performed with respect to the base plate of the lens surface shape measuring device.
The holding device is used to adjust the position and the reference rotation axis 3 of the lower holder 5.
The angle of a (and the pressing shaft 3b of the upper holder 14) can be set arbitrarily.
【００６１】さらにまた、下側ホルダー５は、上述した
実施例の場合、円筒状部材として形成してあるが、必ら
ずしも全体が円筒状である必要はなく、例えば少なくと
もその上端面の内周部分が、被測定物の回転対称面の当
る部分のみ円環状に形成されていればよく、そして、被
測定物を吸着保持するための真空引き用の空気通路６と
連通する流通孔が穿設されていればよい。Furthermore, in the above-described embodiment, the lower holder 5 is formed as a cylindrical member. However, it is not always necessary that the lower holder 5 be entirely cylindrical. The inner peripheral portion may be formed in an annular shape only at a portion where the object to be measured touches the rotationally symmetric surface, and a flow hole communicating with a vacuum air passage 6 for sucking and holding the object to be measured is provided. What is necessary is just to be pierced.
【００６２】これと同様に、上側ホルダー１４も、全体
を円筒状部材として形成する必要はなく、例えばその下
端面内周部分が、被測定物の回転対称面の当る部分のみ
円環状に形成されていればよい。Similarly, the upper holder 14 does not need to be formed entirely as a cylindrical member. For example, the inner peripheral portion of the lower end surface is formed in an annular shape only at the portion where the rotationally symmetric surface of the measured object comes into contact. It should just be.
【００６３】さらにまた、回転テーブル２と下側ホルダ
ーベース４とは、別体に構成せず、一体物として構成し
てもよい。同様に、支持アーム１０ａと上側ホルダーベ
ース１３とは、別体に構成せず、一体物として構成して
もよい。Furthermore, the rotary table 2 and the lower holder base 4 may not be formed separately but may be formed integrally. Similarly, the support arm 10a and the upper holder base 13 may not be formed separately but may be formed integrally.
【００６４】[0064]
【発明の効果】以上述べたように、請求項１に係る発明
によれば、面測定時に測定の対象となる前記被測定物の
測定対象面と着脱可能に接する部分が円環形状部として
形成され、この円環形状部が前記被測定物保持部材の円
環形状部と正対するような状態で前記枢軸と同軸上に設
けられた被測定物位置決め部材を前記枢軸に沿って正逆
方向に変位させ得るように前記本体部と一体的なコラム
に形成された案内手段に摺動自在に且つ任意の摺動位置
で一時的に固定可能に被測定物位置決め部材支持部材を
設け、且つ、面形状の測定に際して、前記被測定物保持
部材の円環形状部と前記被測定物位置決め部材の円環形
状部との間で前記被測定物を挟持することで、被測定物
の２つの面を通る回転対象軸を、被測定物保持部材の所
定の枢軸に一致させることができるので、面形状測定作
業に際して、たとえ被測定物の外径と測定対称面の回転
対称軸とが同軸加工されていない場合であっても、被測
定物を一定の位置に再現性良く設定すること、並びに、
位置決め誤差に起因する測定誤差の発生を少なくするこ
とが可能であり、熟練を必要としないから人件費の大幅
な節約が実現され、しかも、従来のような被測定物の位
置決め調整作業や保持作業等を不要にさせあるいは、そ
の作業負担を軽減させ得る新しい回転対称面の面形状測
定装置における被測定物の位置決め・保持装置を提供す
ることができる。また、被測定物保持部材は、中心部に
空気通路が穿設され、面測定時に非測定側の面となる前
記被測定物の保持面を着脱可能に保持する部分が円環形
状部として形成され、所定の枢軸上に回転可能に設けら
れており、しかも、前記被測定物を保持した状態にある
前記被測定物保持部材の前記空気通路を減圧することに
よって前記被測定物の保持面を前記被測定物保持部材の
円環形状部に吸着させ得る着脱可能固定手段を設け、 前
記被測定物を形成する２つの回転対称面を通る回転対称
軸と前記枢軸とを一致させ且つ前記被測定物を前記着脱
可能固定手段により前記被測定物保持部材に吸着固定さ
せた状態で、前記被測定物位置決め部材を前記被測定物
から離間変位させ、前記被測定物保持部材を回転させ得
るように構成したから、被測定物の測 定対象面側は、何
らの障害となるものがなく、しかも被測定物のいわゆる
芯合せ動作、着脱動作、被測定物位置決め部材の退避動
作等が迅速に行われるから、多数の被測定物の面形状測
定を円滑に且つ能率よく行うことができる。 また、請求
項２に係る発明によれば、被測定物保持部材を本体部に
対して着脱可能に構成し、前記被測定物位置決め部材を
前記被測定物位置決め部材支持部材に対して着脱可能に
構成したから、被測定物保持部材および被測定物位置決
め部材を、複数種類準備しておくことで、いろいろな大
きさの被測定物を位置決め保持することができ、極めて
汎用性の高い面形状測定装置を提供することができる。
また、請求項３に係る発明によれば、前記被測定物を保
持した状態にある前記被測定物保持部材の空気通路部分
を、本体部に穿設した空気通路を介して連通された減圧
装置で減圧することによって、前記被測定物の保持面を
前記被測定物保持部材の円環形状部に吸着させ得る減圧
吸着手段を設けたから、被測定物を被測定物保持部材に
保持する機能と被測定物を回転させる機能とを、互いに
支障を与えることなく、充分に発揮させることができ
る。 また、請求項４に係る発明によれば、被測定物保持
部材の円環形状部および／または前記被測定物位置決め
部材の円環形状部に、面取り部分或いは丸み部分を設け
たので、被測定物に対する接触時の傷付きを可及的に少
なくし得る利点が得られる。 また、請求項５に係る発明
によれば、被測定物位置決め部材支持部材を、本体部に
固定的に設けられたコラムによって前記枢軸に沿って正
逆方向に変位可能に直線案内され、且つバランス手段に
よって軽快に変位し得るように構成したので、被測定物
位置決め部材を、枢軸に沿って正確に直進的に案内する
ことができることは勿論のこと、バランス手段によって
被測定物位置決め部材支持部材を移動させるための力が
実質的に僅かで済み、特に、被測定物位置決め部材を被
測定物に当接させるときに微妙な作業が要求されるが、
移動に要する力が小さくて済むために、殆ど支障を生じ
ない。さらに、また、請求項６に係る発明によれば、少
なくとも１面に凸または凹の回転対称非球面を有する単
レンズのレンズ面形状を測定するのに好適であり、量 産
されるレンズの形状測定に用いる場合であっても充分対
応可能である。 As described above, the invention according to claim 1 is described.
According to the measurement of the object to be measured at the time of surface measurement
The part that detachably contacts the surface to be measured is an annular part
And the annular portion is formed as a circle of the DUT holding member.
It is installed coaxially with the pivot so as to face the ring-shaped part.
Forward and backward along the pivot axis
A column integral with the body so that it can be displaced in the
Slidably on the guide means formed at any desired sliding position
The workpiece positioning member support member can be temporarily fixed with
Provided, and when measuring the surface shape, holding the object to be measured.
An annular portion of a member and an annular shape of the object-to-be-measured positioning member
The object to be measured is sandwiched between the
The rotation target axis passing through the two surfaces of
Since it can be made to coincide with a fixed axis , even when the outer diameter of the object and the rotational symmetry axis of the measurement symmetry plane are not coaxially machined, the object Setting with good reproducibility at the position of
It is possible to reduce the occurrence of measurement errors due to positioning errors, and there is no need for skill, so labor costs are greatly increased
In addition, the present invention eliminates the need for conventional positioning and adjusting work and holding work for the object to be measured, or reduces the work load. A positioning and holding device can be provided. The DUT holding member is located at the center.
Before the air passage is drilled and becomes the non-measurement side surface during surface measurement
The part for detachably holding the holding surface of the DUT is annular.
Formed as a shape, and provided rotatably on a predetermined pivot.
And it is in a state of holding the DUT.
Depressurizing the air passage of the DUT holding member.
Therefore, the holding surface of the object to be measured is
Provided removable fixing means which can be adsorbed to the annular-shaped portion, before
Rotational symmetry through two rotationally symmetric planes forming the object to be measured
Axis and the pivot are aligned, and the object to be measured is attached and detached.
Fixed to the object holding member by
In this state, the DUT positioning member is moved to the DUT.
Displaced away from the object to be measured and rotated.
Because you configured so that, measurement target surface of the object to be measured, what
There is no obstacle to them, and the so-called
Alignment operation, attachment / detachment operation, retraction movement of the workpiece positioning member
Work is performed quickly, so that the surface shape of many
Can be performed smoothly and efficiently. Also, billing
According to the invention of Item 2, the object-under-test holding member is attached to the main body.
The object to be measured positioning member
Detachable with respect to the DUT positioning member support member
Configuration, the DUT holding member and DUT positioning
By preparing multiple types of members, various large
Can hold the measured object
A highly versatile surface shape measuring device can be provided.
According to the third aspect of the present invention, the object to be measured is stored.
Air passage portion of the DUT holding member held
Through the air passage formed in the main body.
By reducing the pressure with the device, the holding surface of the object to be measured is
Reduced pressure that can be adsorbed to the annular portion of the DUT holding member
Since the suction means is provided, the object to be measured can be
The function of holding and the function of rotating the DUT
It can be fully demonstrated without any hindrance
You. According to the fourth aspect of the invention, the object to be measured is held.
Position of the ring-shaped part of the member and / or the object to be measured
Chamfered or rounded parts are provided in the annular part of the member
As a result, scratches during contact with the DUT are minimized.
There are advantages that can be eliminated. The invention according to claim 5
According to the above, the object to be measured positioning member support member is attached to the main body.
The column is fixed along the axis by a fixed column.
It is linearly guided so that it can be displaced in the opposite direction, and it is used as a balance
Therefore, it is configured to be able to be displaced lightly.
Guiding the positioning member straight and precisely along the pivot
Of course, you can
The force required to move the DUT support
Substantially only a small amount is required.
Sensitive work is required when contacting the measurement object,
The movement requires little force, causing almost no hindrance.
Absent. Still further, according to the invention of claim 6,
At least one surface having a convex or concave rotationally symmetric aspheric surface
It is suitable for measuring the lens surface shape of the lens, mass production
Even when used to measure the shape of the lens
It is available.
【図１】本発明をレンズ面形状測定装置のレンズ位置決
め・保持装置に適用した場合の実施例の全体構成を示す
側面図である。FIG. 1 is a side view showing the entire configuration of an embodiment in which the present invention is applied to a lens positioning / holding device of a lens surface shape measuring device.
【図２】図１のレンズ位置決め・保持装置に設けられた
下側ホルダーの円環形状部に測定すべき非球面単レンズ
を適当に載置したときの状態を示す部分的縦断面図であ
る。FIG. 2 is a partial longitudinal sectional view showing a state where an aspheric single lens to be measured is appropriately placed on an annular portion of a lower holder provided in the lens positioning / holding device of FIG. 1; .
【図３】図１のレンズ位置決め・保持装置に設けられた
下側ホルダーの円環形状部と上側ホルダーの円環形状部
とにより、測定すべき非球面単レンズを挟持したときの
状態を示す部分的縦断面図である。3 shows a state in which an aspherical single lens to be measured is sandwiched between a ring-shaped part of a lower holder and a ring-shaped part of an upper holder provided in the lens positioning / holding device of FIG. It is a partial longitudinal section.
【図４】図１のレンズ位置決め・保持装置に設けられた
下側ホルダーの円環形状部および上側ホルダーの円環形
状部の１つの変形例を示す部分的縦断面図である。FIG. 4 is a partial vertical sectional view showing one modification of the annular portion of the lower holder and the annular portion of the upper holder provided in the lens positioning / holding device of FIG. 1;
【図５】図１のレンズ位置決め・保持装置に設けられた
下側ホルダーの円環形状部および上側ホルダーの円環形
状部の他の変形例を示す部分的縦断面図である。FIG. 5 is a partial longitudinal sectional view showing another modification of the annular portion of the lower holder and the annular portion of the upper holder provided in the lens positioning / holding device of FIG. 1;
【図６】従来の非球面レンズの検査装置の一例を示す正
面断面図である。FIG. 6 is a front sectional view showing an example of a conventional aspherical lens inspection apparatus.
Ｌ 非球面単レンズ Ｏ 回転対称軸 Ｌａ 上側レンズ面（測定対象非球面） Ｌｂ 下側レンズ面 Ｌｃ，Ｌｄ 頂点 １ 装置本体 ２ 回転テーブル ３ａ 基準回転軸 ３ｂ 押し付け軸 ４ 下側ホルダーベース ５ 下側ホルダー ５ａ 円環形状部 ６〜８ 減圧吸着装置 ６ 真空引き用空気通路 ７ エアコネクタ ８ 減圧装置 ９ コラム ９ａ 垂直案内手段 １０ スライド部材 １０ａ 支持アーム １１ 緊締手段 １２ａ〜１２ｃ バランス手段 １２ａ 吊り下げワイヤー １２ｂ 反転ローラ １２ｃ 重錘 １３ 上側ホルダーベース １４ 上側ホルダー １４ａ 円環形状部 １５ 緩衝支持手段 ２０ 触針子支持アーム ２１ 触針子 ２２ 触針子上下案内手段 L Aspherical single lens O Rotational symmetry axis La Upper lens surface (aspheric surface to be measured) Lb Lower lens surface Lc, Ld Apex 1 Device body 2 Rotary table 3a Reference rotation axis 3b Pressing axis 4 Lower holder base 5 Lower holder Reference Signs List 5a Annular portion 6-8 Vacuum suction device 6 Vacuum air passage 7 Air connector 8 Pressure reducing device 9 Column 9a Vertical guide means 10 Slide member 10a Support arm 11 Tightening means 12a-12c Balance means 12a Hanging wire 12b Reversing roller 12c Weight 13 Upper Holder Base 14 Upper Holder 14a Annular Shaped Part 15 Buffer Supporting Means 20 Needle Support Arm 21 Contact Needle 22 Contact Needle Vertical Guide Means
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6，ＤＢ名) G01M 11/00 G02B 7/00──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 6 , DB name) G01M 11/00 G02B 7/00
Claims (6)
され、他面が球面または回転対称非球面或いは平面とし
て形成された被測定物の回転対称面の面形状を測定する
回転対称面の面形状測定装置における被測定部の位置決
め・保持装置において、 前記位置決め・保持装置の本体部と、中心部に空気通路が穿設され、 面測定時に非測定側の面
となる前記被測定物の保持面を着脱可能に保持する部分
が円環形状部として形成され、所定の枢軸上に回転可能
に設けられた被測定物保持部材と、 面測定時に測定の対象となる前記被測定物の測定対象面
と着脱可能に接する部分が円環形状部として形成され、
この円環形状部が前記被測定物保持部材の円環形状部と
正対するような状態で前記枢軸と同軸上に設けられた被
測定物位置決め部材と、 この被測定物位置決め部材を前記枢軸上に保持し、且
つ、面形状の測定に際して、前記被測定物保持部材の円
環形状部と前記被測定物位置決め部材の円環形状部との
間で前記被測定物を挟持して前記被測定物の２つの面を
通る回転対象軸と前記所定の軸とを一致させるために、
前記被測定物位置決め部材を前記枢軸に沿って正逆方向
に変位させ得るように前記本体部と一体的なコラムに形
成された案内手段に摺動自在に且つ任意の摺動位置で一
時的に固定可能に設けられた被測定物位置決め部材支持
部材と、 面形状の測定に際して、前記被測定物を保持した状態に
ある前記被測定物保持部材の前記空気通路を減圧するこ
とによって前記被測定物の保持面を前記被測定物保持部
材の円環形状部に吸着させ得る着脱可能固定手段と、 を備え、前記被測定物を形成する２つの回転対称面を通
る回転対称軸と前記枢軸とを一致させ且つ前記被測定物
を前記着脱可能固定手段により前記被測定物保持部材に
吸着固定させた状態で、前記被測定物位置決め部材を前
記被測定物から離間変位させ、前記被測定物保持部材を
回転させ得るように構成したことを特徴とする回転対称
面の面形状測定装置における被測定物の位置決め・保持
装置。1. A rotationally symmetric surface shape for measuring a rotationally symmetric surface shape of an object to be measured in which at least one surface is formed as a rotationally symmetric surface and another surface is formed as a spherical or rotationally symmetric aspherical surface or a plane. In the positioning / holding device for the measured portion in the measuring device, a main body portion of the positioning / holding device, and an air passage formed in a center portion, and a holding surface of the measured object serving as a non-measurement side surface during surface measurement. A part for detachably holding the object is formed as a ring-shaped part, and an object holding member rotatably provided on a predetermined pivot, and a surface to be measured of the object to be measured at the time of surface measurement The part that comes into contact with the detachable is formed as an annular part,
An object-positioning member provided coaxially with the pivot such that the annular portion faces the annular portion of the object-holding member; and held in, and, for the measurement of surface shape, wherein the device under test by sandwiching the object to be measured between the ring-shaped portion of the object to be measured positioning member an annular shaped portion of the workpiece holding member Two sides of an object
In order to match the rotational symmetry axis and said predetermined axis passing through,
The object-to-be-measured object positioning member is formed in a column integral with the main body so as to be displaceable in forward and reverse directions along the pivot.
Slidably and freely at any sliding position
An object-to-be-measured object positioning member supporting member provided so as to be temporally fixable , and in a state where the object to be measured is held when measuring a surface shape.
Depressurizing the air passage of the object-to-be-measured member.
The holding surface of the DUT is moved by the DUT holder
Detachable fixing means capable of being attracted to the annular portion of the material , wherein two rotationally symmetric surfaces forming the object to be measured are passed through.
The rotational axis of symmetry and the pivot axis coincide with each other and
To the DUT holding member by the detachable fixing means.
With the object-to-be-measured object positioning member being
The object to be measured is displaced away from the object to be measured,
A positioning and holding device for an object to be measured in a rotationally symmetric surface profile measuring device, characterized in that the device is configured to be rotatable.
状測定装置における被測定物の位置決め・保持装置にお
いて、 前記被測定物保持部材を前記本体部に対して着脱可能に
構成し、前記被測定物位置決め部材を前記被測定物位置
決め部材支持部材に対して着脱可能に構成したことを特
徴とする回転対称面の面形状測定装置における被測定物
の位置決め・保持装置。2. The device for positioning and holding an object to be measured in the apparatus for measuring the shape of a rotationally symmetric surface according to claim 1, wherein the object to be measured is detachably attached to the main body. A device for positioning and holding an object to be measured in a rotationally symmetric surface shape measuring apparatus, wherein the object to be measured positioning member is configured to be detachable from the object to be measured positioning member support member.
面の面形状測定装置における被測定物の位置決め・保持
装置において、 前記着脱可能固定手段を、前記被測定物を保持した状態
にある前記被測定物保持部材の空気通路部分を、本体部
に穿設した空気通路を介して連通された減圧装置で減圧
することによって、前記被測定物の保持面を前記被測定
物保持部材の円環形状部に吸着させ得る構成の減圧吸着
手段として構成したことを特徴とする回転対称面の面形
状測定装置における被測定物の位置決め・保持装置。3. The device for positioning and holding an object to be measured in the apparatus for measuring the shape of a rotationally symmetric surface according to claim 1 or 2, wherein the detachable fixing means holds the object to be measured. the air passage portion of the object to be measured retaining member, the main body portion
The pressure-reducing device connected through an air passage formed in the pressure-reducing device is configured as a pressure-reducing suction unit configured to be capable of adsorbing the holding surface of the object to be measured to the annular portion of the object-holding member. A positioning and holding device for an object to be measured in a rotationally symmetric surface profile measuring device, characterized in that:
た回転対称面の面形状測定装置における被測定物の位置
決め・保持装置において、 前記被測定物保持部材の円環形状部および／または前記
被測定物位置決め部材の円環形状部に、面取り部分或い
は丸み部分を設けたことを特徴とする回転対称面の面形
状測定装置における被測定物の位置決め・保持装置。4. The device for positioning and holding an object to be measured in the apparatus for measuring the surface shape of a rotationally symmetric surface according to claim 1, wherein the ring-shaped portion of the object to be measured holding member and / or A device for positioning and holding an object to be measured in a rotationally symmetric surface profile measuring device, wherein a chamfered portion or a rounded portion is provided in an annular portion of the object to be measured positioning member.
た回転対称面の面形状測定装置における被測定物の位置
決め・保持装置において、 前記被測定物位置決め部材支持部材を、前記本体部に固
定的に設けられたコラムによって前記枢軸に沿って正逆
方向に変位可能に直線案内され、且つバランス手段によ
って軽快に変位し得るように構成したことを特徴とする
回転対称面の面形状測定装置における被測定物の位置決
め・保持装置。5. A device for positioning and holding an object to be measured in a rotationally symmetric surface profile measuring apparatus according to claim 1, wherein the object to be measured positioning member support member is attached to the main body. It is linearly guided by a fixed column so as to be displaceable in the forward and reverse directions along the pivot axis , and
A positioning / holding device for an object to be measured in a rotationally symmetric surface profile measuring device, characterized in that the device can be displaced lightly .
た回転対称面の面形状測定装置における被測定物の位置
決め・保持装置において、 前記被測定物が少なくとも１面に凸または凹の回転対称
非球面を有する単レンズであることを特徴とする回転対
称面の面形状測定装置における被測定物の位置決め・保
持装置。6. The positioning / holding device for an object to be measured in the rotationally symmetric surface profile measuring apparatus according to claim 1, wherein the object to be measured is convex or concave on at least one surface. A positioning and holding device for an object to be measured in a rotationally symmetric surface profile measuring device, which is a single lens having a symmetric aspheric surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5130493A JP2855394B2 (en) | 1993-02-18 | 1993-02-18 | Positioning / holding device for the object to be measured in the rotational shape symmetry surface profile measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5130493A JP2855394B2 (en) | 1993-02-18 | 1993-02-18 | Positioning / holding device for the object to be measured in the rotational shape symmetry surface profile measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06241943A JPH06241943A (en) | 1994-09-02 |
| JP2855394B2 true JP2855394B2 (en) | 1999-02-10 |
Family
ID=12883184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5130493A Expired - Fee Related JP2855394B2 (en) | 1993-02-18 | 1993-02-18 | Positioning / holding device for the object to be measured in the rotational shape symmetry surface profile measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2855394B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19833590C1 (en) * | 1998-07-28 | 2000-03-30 | Dietmar Eifler | Process for welding an extended optical component to a metal fastening, its use and the optical assembly |
| CN106392932B (en) * | 2016-08-23 | 2018-02-16 | 中国科学院自动化研究所 | A kind of optical element clamping device and method |
-
1993
- 1993-02-18 JP JP5130493A patent/JP2855394B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06241943A (en) | 1994-09-02 |
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|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |