JP2851374B2 - Pyrolytic boron nitride heat-resistant container - Google Patents
Pyrolytic boron nitride heat-resistant containerInfo
- Publication number
- JP2851374B2 JP2851374B2 JP2138609A JP13860990A JP2851374B2 JP 2851374 B2 JP2851374 B2 JP 2851374B2 JP 2138609 A JP2138609 A JP 2138609A JP 13860990 A JP13860990 A JP 13860990A JP 2851374 B2 JP2851374 B2 JP 2851374B2
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- Prior art keywords
- boron nitride
- peel strength
- pyrolytic boron
- resistant container
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は熱分解窒化ほう素製耐熱容器、特には構造を
変更することによって局部破壊など起り難くした、した
がって寿命の長い、金属蒸着用蒸発ボート、ガリウム−
砒素などの単結晶引上げ用るつぼとして有用とされる熱
分解窒化ほう素製耐熱容器に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a heat-resistant container made of pyrolytic boron nitride, and in particular, has a structure that is less susceptible to local destruction such as local destruction, and therefore has a longer life, and thus has a longer life. Boat, gallium-
The present invention relates to a pyrolytic boron nitride heat-resistant container which is useful as a crucible for pulling a single crystal such as arsenic.
（従来の技術） 熱分解窒化ほう素製耐熱容器は三塩化ほう素（BCl3）
やジボラン（B2H6）などのほう素化合物とアンモニアと
を原料とし、これらを高温下に減圧で、またはプラズマ
やCVD法で熱分解して窒化ほう素とし、これを黒鉛、グ
ラファイトなどの表面に蒸着させるか、またこれをその
表面から引剥すことによって製造されている。(Prior art) Heat-resistant container made of pyrolytic boron nitride is boron trichloride (BCl 3 )
And boron as the raw material and diborane (B 2 H 6 ) and ammonia, and these are thermally decomposed at high temperature under reduced pressure or by plasma or CVD to form boron nitride, which is then converted to graphite, graphite, etc. It is manufactured by vapor deposition on a surface or by peeling it from the surface.
（解決されるべき課題） しかして、このようにして作られた耐熱容器はアルミ
ニウムなどの金属蒸着用ボートとして、またMBE用るつ
ぼあるいはガリウム−砒素などのようなIII−Ｖ族化合
物引上げ用るつぼとして用いられているが、これらの用
途は使用温度が極めて高温であるために室温にまで冷却
されたときの残メルトとの収縮差が大きく、熱分解窒化
ほう素が成長方向に垂直な（Ｃ面）に高度に配向してい
るために＜Ｃ面＞方向（厚み方向）が弱く、剥離し易
い。したがって、この方向に破壊し易く、使用回数が小
さいという欠点があることから、これについては多層構
造のものが各種提案されている（特開昭55−145169号，
特開昭61−23759号，特開昭61−285382号，特開昭61−2
85383号，特開昭61−268442号公報参照）。(Problems to be solved) However, the heat-resistant container thus made is used as a boat for metal deposition of aluminum or the like, or as a crucible for MBE or a crucible for pulling III-V compounds such as gallium-arsenic. In these applications, the use temperature is extremely high, so the difference in shrinkage from the residual melt when cooled to room temperature is large, and pyrolytic boron nitride is perpendicular to the growth direction (C plane). ), The <C-plane> direction (thickness direction) is weak and easily peeled. Therefore, it has the drawback that it is easily broken in this direction and the number of times of use is small. For this purpose, various multilayer structures have been proposed (JP-A-55-145169,
JP-A-61-23759, JP-A-61-285382, JP-A-61-2
No. 85383, JP-A-61-268442).
しかし、このような多層構造のものは剥離を起す弱い
面が層内部にも多数存在するので内部で剥離があると局
部破壊を起し、ついには穴があいてしまうという欠点が
ある。特にLEC法によるガリウム−砒素単結晶を引上用
るつぼとして用いた場合には封止剤としてのB2O3がるつ
ぼ底部に固着し、これを除去する際に局部破壊が起って
穴があいてしまうために、るつぼ寿命が短かくなるとい
う問題点が生じている。However, such a multilayer structure has a drawback that since there are many weak surfaces on which peeling occurs inside the layer, if there is peeling inside, local destruction occurs, and eventually a hole is formed. In particular, when a gallium-arsenic single crystal by the LEC method is used as a crucible for pulling up, B 2 O 3 as a sealant adheres to the bottom of the crucible, and when this is removed, local destruction occurs and a hole is formed. This causes a problem that the life of the crucible is shortened.
（課題を解決する手段） 本発明はこのような不利を解決した熱分解窒化ほう素
製耐熱容器に関するものであり、これは剥離強度の大き
な層と小さな層が交互に積層された多層構造よりなる熱
分解窒化ほう素製耐熱容器であって、少なくとも該剥離
強度の小さな層は、前記多層構造の内側に位置する層か
ら外側に位置する層に向かって剥離強度が次第に増加し
ていることを特徴とするものである。(Means for Solving the Problems) The present invention relates to a heat-resistant container made of pyrolytic boron nitride which solves such disadvantages, and has a multilayer structure in which layers having large peel strength and layers having small peel strength are alternately laminated. A heat-resistant container made of pyrolytic boron nitride, wherein at least the layer having a small peel strength gradually increases in peel strength from a layer located inside the multilayer structure to a layer located outside the multilayer structure. It is assumed that.
すなわち、本発明者らは局部破壊などの起り難い、し
たがって寿命の長い熱分解窒化ほう素耐熱容器の開発に
ついて種々検討した結果、この容器を剥離強度の大きな
層と小さな層が交互に積層された多層構造のものとする
と共に、剥離強度の小さな層をその剥離強度が内側に位
置する層から外側に位置する層に次第に増加するような
ものとしたところ、剥離強度の最小値の層が常に内表面
近くに存在することになるためにこの剥離は常にその層
から起き、したがって深部剥離による局部破壊が防止で
きることを見出して本発明を完成させた。In other words, the present inventors have conducted various studies on the development of a pyrolytic boron nitride heat-resistant container that is unlikely to cause local destruction and the like, and thus has a long life. As a result, layers having a large peel strength and small layers have been alternately laminated on this container. When a layer having a small peel strength is gradually increased from a layer located inside to a layer located outside, the layer having the minimum peel strength is always set to the inner layer. The present invention was completed by finding that this delamination always occurred from the layer because it would be near the surface, and thus local destruction due to deep delamination could be prevented.
以下、これをさらに詳述する。 Hereinafter, this will be described in more detail.
（作用） 本発明の熱分解窒化ほう素製耐熱容器は剥離強度の大
きさ層と小さな層が交互に積層されたものとすると共
に、少なくともこの剥離強度の小さな層はその剥離強度
が内側に位置する層から外側に位置する層に次第に増加
するようにしたものであり、この剥離強度は5kg/cm2未
満の場合には使用中に剥離の生じるおそれがあることか
ら少なくとも5kg/cm2とする必要があるが、これが150kg
/cm2より大きくなると内部応力が発生し易くなって自然
剥離を生じるおそれがあり、これはまた工業的な生産も
困難であることから、この剥離強度は厚さ方向（＜Ｃ面
＞方向）に1mm当り５〜150kg/cm2、好ましくは10〜50kg
/cm2の勾配で設けるようにすればよい。(Function) The heat-resistant container made of pyrolytic boron nitride according to the present invention has a layer having a large peel strength and a layer having a small peel strength alternately laminated, and at least the layer having a small peel strength has the peel strength positioned inside. a layer to be obtained by such increases gradually in a layer positioned outside, the peel strength is at least 5 kg / cm 2 since in the case of less than 5 kg / cm 2 there is a possibility of occurrence of peeling during use It is necessary, but this is 150 kg
If it exceeds / cm 2 , internal stress is likely to occur and spontaneous peeling may occur, which is also difficult to produce industrially. Therefore, this peeling strength is in the thickness direction (<C plane> direction). 5 to 150 kg / cm 2 per mm, preferably 10 to 50 kg
It may be provided at a gradient of / cm 2 .
また、この剥離強度の分布は第１図または第２図に示
したようなものが例示されるが、これはその剥離強度の
小さな層の剥離強度が＜Ｃ面＞方向に順次増加するもの
であればよい。The distribution of the peeling strength is exemplified by those shown in FIG. 1 or FIG. 2, in which the peeling strength of a layer having a small peeling strength is sequentially increased in the <C plane> direction. I just need.
また、この熱分解窒化ほう素製耐熱容器の製造は従来
公知の方法に準じて行えばよく、したがってこれは例え
ば三塩化ほう素（BCl3）またはジボラン（B2H6）とアン
モニアとの混合ガスを反応炉内に供給し、加熱して熱分
解反応を行なわせて熱分解窒化ほう素とし、これを黒鉛
などの基材の表面に窒化ほう素の＜Ｃ面＞方向に熱化学
蒸着させればよいが、この際内側から外側に＜Ｃ面＞方
向（厚さ方向）にその剥離強度の小さな層の剥離強度を
増加させる必要がある。The production of the heat-resistant container made of pyrolytic boron nitride may be carried out in accordance with a conventionally known method. Therefore, for example, it is possible to mix boron trichloride (BCl 3 ) or diborane (B 2 H 6 ) with ammonia. A gas is supplied into a reaction furnace and heated to cause a thermal decomposition reaction to form pyrolytic boron nitride, which is thermally chemical vapor deposited on the surface of a substrate such as graphite in the <C plane> direction of boron nitride. At this time, it is necessary to increase the peel strength of the layer having a small peel strength from the inside to the outside in the <C plane> direction (thickness direction).
また、この剥離強度の＜Ｃ面＞方向のコントロールは
＜Ｃ面＞方向に熱分解窒化ほう素を蒸着させる際の層の
成長速度を制御することによって行なうことができる
が、この成長速度は蒸着温度、圧力、原料供給速度の少
なくとも１つを制御すれば得られる。The control of the peel strength in the <C-plane> direction can be performed by controlling the growth rate of the layer when the pyrolytic boron nitride is deposited in the <C-plane> direction. It can be obtained by controlling at least one of the temperature, pressure, and raw material supply rate.
しかして、この蒸着温度については温度が高いほど成
長速度が大きくなり、これは例えばこの反応を熱CVD法
で行なわせる場合には1,600℃未満では得られる窒化ほ
う素膜の剥離強度が低く、2,000℃以上とすると芯金の
黒鉛の窒化ほう素との間で反応が起るので、これは1,60
0〜2,000℃の温度で行なって反応速度をコントロールす
ればよい。As for the deposition temperature, the higher the temperature, the higher the growth rate.For example, when this reaction is performed by a thermal CVD method, the peeling strength of the obtained boron nitride film is lower at 1600 ° C. or lower, and 2,000 ° C. If the temperature is higher than ℃, a reaction occurs with the boron nitride of the graphite of the core metal.
The reaction may be performed at a temperature of 0 to 2,000 ° C. to control the reaction rate.
したがって、本発明の方法では1,600℃で反応を開始
させ、徐々に昇温して1,900〜2,000℃まで連続的に昇温
させるようにすればよい。また、この圧力については高
圧であるほど成長速度は大きくなるけれども、これは熱
CVD反応の開始される0.1トールから反応を開始させ、徐
々に昇圧を続けて20トールに達するようにすればよく、
原料供給の変化については例えばBCl3またはB2H6とアン
モニアとをN/Bのモル比が1.0〜5.0の範囲となるように
すればよいが、これらの供給量を大きくすると成長速度
が大きくなるので、これによれば形成される熱分解窒化
ほう素蒸着膜の各層の剥離強度を増減させることができ
る。Therefore, in the method of the present invention, the reaction may be started at 1,600 ° C., and the temperature may be gradually increased to continuously increase from 1,900 to 2,000 ° C. As for the pressure, the higher the pressure, the higher the growth rate.
The reaction may be started from 0.1 Torr at which the CVD reaction is started, and the pressure may be gradually increased to reach 20 Torr,
For the change of the raw material supply, for example, the molar ratio of N / B of BCl 3 or B 2 H 6 and ammonia may be in the range of 1.0 to 5.0, but the growth rate increases as the supply amount of these increases. Accordingly, the peel strength of each layer of the pyrolytic boron nitride vapor deposition film to be formed can be increased or decreased.
（実施例） つぎに本発明の実施例および比較例をあげるが、例中
における剥離強度はつぎの方法による測定結果を示した
ものである。(Examples) Examples and comparative examples of the present invention will be described below. In the examples, the peel strengths show the measurement results by the following methods.
（剥離強度の測定法） 第８図（ａ）に示した一定面積の円盤に引張り棒を取
りつけた釘状の治具（スタッド）１を熱分解窒化ほう素
板２に接着剤３で張りつけ、ついで第８図ｂ）に示した
ようにこのスタッド１をオートグラフによって引上げ窒
化ほう素板２が剥離したときの値を読み取り、これを５
つのサンプルについて行なってその平均値をサンプルの
剥離強度とした。(Measurement Method of Peeling Strength) A nail-shaped jig (stud) 1 in which a tension bar is attached to a disk having a fixed area shown in FIG. 8A is attached to a pyrolytic boron nitride plate 2 with an adhesive 3. Then, as shown in FIG. 8b), the stud 1 was pulled up by an autograph, and the value obtained when the boron nitride plate 2 was peeled was read.
The average value was determined as the peel strength of the sample.
実施例１ 直径150mm、長さ150mmのグラファイトの芯金を炉内に
設置し、この炉内に三塩化ほう素とアンモニアガスとを
モル比1/3の混合ガスとして、その供給量を第３図のよ
うに変えて供給し、炉内温度1,850℃、反応圧力２トー
ルで反応をさせて熱分解反応で生成した窒化ほう素を芯
金上に熱化学蒸着させ、反応終了後窒素ガスを導入して
常温まで冷却してからグラフイト芯金上に蒸着された熱
分解窒化ほう素容器を取り外した。Example 1 A graphite cored bar having a diameter of 150 mm and a length of 150 mm was placed in a furnace, and a mixed gas of boron trichloride and ammonia gas having a molar ratio of 1/3 was supplied in the furnace. As shown in the figure, the reactor is supplied at a temperature of 1,850 ° C and a reaction pressure of 2 Torr, and the boron nitride generated by the thermal decomposition reaction is thermochemically vapor-deposited on the core metal. After the reaction, nitrogen gas is introduced. After cooling to room temperature, the pyrolytic boron nitride container deposited on the graphite core was removed.
このようにして得た熱分解窒化ほう素容器は厚さが1m
mで、剥離強度が最小10kg/cm2、最大50kg/cm2、剥離強
度分布が第１図に示したとおりのものであった。The pyrolytic boron nitride container thus obtained has a thickness of 1 m.
m, the minimum peel strength was 10 kg / cm 2 , the maximum was 50 kg / cm 2 , and the peel strength distribution was as shown in FIG.
ついで、この容器の評価のために、器内にB2O3200gを
入れ、窒素ガス雰囲気中で1,200℃に加熱し、１時間保
持したのち室温まで冷却して器中から溶融したB2O3を抜
き取り、このときの容器から内面剥離による重量減少を
測定したが、この操作を25回くり返して重量減少をしら
べたところ、第７図に示したとおりの結果が得られ、こ
の容器をGa−As化合物の引上げに使用したところ、25回
使用後も異常はなかった。Then, for evaluation of the container, putting the B 2 O 3 200 g in the vessel was heated to 1,200 ° C. in a nitrogen gas atmosphere, B was melted from within by cooling to room temperature After 1 hour the vessel 2 O 3 was taken out, and the weight loss due to the peeling of the inner surface was measured from the container at this time.The operation was repeated 25 times and the weight loss was examined. As a result, the result shown in FIG. 7 was obtained. When used for pulling up -As compounds, there was no abnormality after 25 uses.
実施例２ 実施例１における原料ガス供給量を第４図に示したよ
うに５／分と２／分に変化させ、化学蒸着反応時に
おける蒸着温度を1,850℃から1,950℃に連続的に変化さ
せた以外は実施例１と同じ条件で化学蒸着反応させたと
ころ、厚さが1mmで剥離強度の最小10kg/cm2、最大50kg/
cm2、剥離強度分布が第２図に示したとおりである熱分
解窒化ほう素容器が得られ、このものについて実施例１
と同じ方法でB2O3を添加、溶融し、これを抜き取ったと
きの平均重量減少を測定したところ、これは第７図に示
したとおりの結果であった。また、このものはこれをGa
−As化合物の引上げに使用したところ、25回使用後も異
常はなかった。Example 2 The raw material gas supply rate in Example 1 was changed to 5 / min and 2 / min as shown in FIG. 4, and the deposition temperature during the chemical vapor deposition reaction was continuously changed from 1,850 ° C. to 1,950 ° C. The chemical vapor deposition reaction was performed under the same conditions as in Example 1 except that the thickness was 1 mm, the peel strength was minimum 10 kg / cm 2 , and the maximum was 50 kg / cm 2 .
A pyrolytic boron nitride container having a cm 2 and a peel strength distribution as shown in FIG. 2 was obtained.
When B 2 O 3 was added and melted in the same manner as in the above, the average weight loss when the B 2 O 3 was extracted was measured. The result was as shown in FIG. Also, this one
When used for pulling up -As compounds, there was no abnormality after 25 uses.
比較例２ 実施例２と同じ方法でグラファイト芯金上に熱分解窒
化ほう素を化学蒸着させるに当って、この反応温度を1,
850℃に一定させ（第６図）、この圧力も２トールで一
定として反応を行なったところ、得られた容器は厚さ1m
mであったが、このものは剥離強度が第５図に示したよ
うな最小値20kg/cm2と最大値50kg/cm2の分布を有するも
のであり、このものについて実施例１と同様の方法で、
B2O3の添加、溶融、抜き取りに伴なう平均重量減少を測
定したところ第７図に示したとおりの結果が得られ、ま
た、これをGa−As化合物の引上げに使用したところ、こ
れは５回の使用で穴が開き、寿命の短かいものであっ
た。Comparative Example 2 In the same manner as in Example 2, when the pyrolytic boron nitride was chemically vapor-deposited on the graphite core metal, the reaction temperature was set to 1,
The reaction was carried out at a constant 850 ° C. (FIG. 6) and the pressure was kept constant at 2 Torr.
Although a was the m, the ones are those peel strength has a distribution of minimum 20 kg / cm 2 and maximum 50 kg / cm 2 as shown in FIG. 5, in the same manner as in Example 1. About this product By the way,
The average weight loss accompanying the addition, melting, and withdrawal of B 2 O 3 was measured, and the results shown in FIG. 7 were obtained. Further, when this was used for pulling up a Ga-As compound, The hole was opened five times and the life was short.
（発明の効果） 本発明によれば剥離強度の最小値の層が常に内表面近
くに存在することになり、この剥離は常にその層から発
生するので深部剥離による局部破壊が防止でき、したが
って寿命の長いものになるという有利性が与えられる。(Effect of the Invention) According to the present invention, a layer having the minimum peel strength always exists near the inner surface, and since this peeling always occurs from the layer, local destruction due to deep peeling can be prevented, and thus the life can be reduced. The advantage is that it becomes longer.
第１図、第２図は本発明の熱分解窒化ほう素製耐熱容器
の剥離強度の分布図、第３図は実施例１における熱分解
窒化ほう素製耐熱容器製造するときの原料ガス供給量と
反応時間との関係図、第４図は実施例２における熱分解
窒化ほう素製耐熱容器を製造するときの原料ガス供給量
と反応時間との関係図、第５図は比較例で使用した熱分
解窒化ほう素製耐熱容器の剥離強度分布図、第６図は比
較例における熱分解窒化ほう素製耐熱容器を製造すると
きの原料ガス供給量と反応時間との関係図、第７図は実
施例1,2、比較例におけるB2O3溶解繰り返し数とルツボ
重量との相関図、第８図は剥離強度の測定方法の縦断面
図を示したものである。1 and 2 are distribution diagrams of the peeling strength of the pyrolytic boron nitride heat-resistant container of the present invention, and FIG. 3 is a raw material gas supply amount when producing the pyrolytic boron nitride heat-resistant container in Example 1. FIG. 4 is a graph showing the relationship between the supply amount of the raw material gas and the reaction time when producing the heat-resistant container made of pyrolytic boron nitride in Example 2, and FIG. 5 is used in the comparative example. FIG. 6 is a diagram showing the relationship between the supply amount of the raw material gas and the reaction time when producing the heat-resistant container made of pyrolytic boron nitride in the comparative example, and FIG. FIG. 8 shows a correlation diagram between the number of repetitions of dissolving B 2 O 3 and the crucible weight in Examples 1 and 2 and Comparative Example, and FIG. 8 shows a longitudinal sectional view of a method for measuring peel strength.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 久保田 芳宏 群馬県安中市磯部２丁目13番１号 信越 化学工業株式会社精密機能材料研究所内 (56)参考文献 特開 昭61−23759（ＪＰ，Ａ) 特開 昭64−45800（ＪＰ，Ａ) 特開 昭61−236685（ＪＰ，Ａ) 特開 昭63−28858（ＪＰ，Ａ) 特公 昭55−44154（ＪＰ，Ｂ２) 特公 昭56−17428（ＪＰ，Ｂ２) (58)調査した分野(Int.Cl.6，ＤＢ名) C23C 14/00 - 14/58 C23C 16/00 - 16/56──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Yoshihiro Kubota 2-13-1, Isobe, Annaka-shi, Gunma Shin-Etsu Chemical Co., Ltd. Precision Functional Materials Laboratory (56) References JP-A 61-23759 (JP, A) JP-A-64-45800 (JP, A) JP-A-61-236685 (JP, A) JP-A-63-28858 (JP, A) JP-B-55-44154 (JP, B2) JP-B-56 -17428 (JP, B2) (58) Fields investigated (Int. Cl. 6 , DB name) C23C 14/00-14/58 C23C 16/00-16/56
Claims (1)
層された多層構造よりなる熱分解窒化ほう素製耐熱容器
であって、少なくとも該剥離強度の小さな層は、前記多
層構造の内側に位置する層から外側に位置する層に向か
って剥離強度が次第に増加していることを特徴とする熱
分解窒化ほう素製耐熱容器。1. A heat-resistant container made of a pyrolytic boron nitride having a multilayer structure in which layers having a large peel strength and layers having a small peel strength are alternately laminated, wherein at least the layer having a small peel strength is provided inside the multilayer structure. A heat-resistant container made of pyrolytic boron nitride, wherein the peel strength gradually increases from a layer located to a layer located outside.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2138609A JP2851374B2 (en) | 1990-05-30 | 1990-05-30 | Pyrolytic boron nitride heat-resistant container |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2138609A JP2851374B2 (en) | 1990-05-30 | 1990-05-30 | Pyrolytic boron nitride heat-resistant container |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0432561A JPH0432561A (en) | 1992-02-04 |
| JP2851374B2 true JP2851374B2 (en) | 1999-01-27 |
Family
ID=15226085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2138609A Expired - Lifetime JP2851374B2 (en) | 1990-05-30 | 1990-05-30 | Pyrolytic boron nitride heat-resistant container |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2851374B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6670025B2 (en) * | 2001-05-24 | 2003-12-30 | General Electric Company | Pyrolytic boron nitride crucible and method |
| CN105603388B (en) * | 2016-01-22 | 2018-05-15 | 山东国晶新材料有限公司 | A kind of preparation method of long-life pyrolytic boron nitride crucible |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6123759A (en) * | 1984-07-11 | 1986-02-01 | Showa Denko Kk | Vessel made of thermally decomposed boron nitride |
-
1990
- 1990-05-30 JP JP2138609A patent/JP2851374B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0432561A (en) | 1992-02-04 |
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