JP2847599B2 - Hazardous substance detection agent manufacturing equipment - Google Patents
Hazardous substance detection agent manufacturing equipmentInfo
- Publication number
- JP2847599B2 JP2847599B2 JP4208575A JP20857592A JP2847599B2 JP 2847599 B2 JP2847599 B2 JP 2847599B2 JP 4208575 A JP4208575 A JP 4208575A JP 20857592 A JP20857592 A JP 20857592A JP 2847599 B2 JP2847599 B2 JP 2847599B2
- Authority
- JP
- Japan
- Prior art keywords
- reagent
- manufacturing equipment
- base material
- cylindrical body
- rotating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は有害物質の検知剤製造装
置、特に半導体の製造工程等で使用される特殊ガス中の
有害物質を検知する検知剤の製造装置に関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for producing a detecting agent for harmful substances, and more particularly to an apparatus for detecting a harmful substance in a special gas used in a semiconductor manufacturing process.
【０００２】[0002]
【従来の技術】一般に、半導体の製造工程等で使用され
る特殊ガスは、その使用後特殊ガス中に含まれている有
害物質を除去して無害化する必要があり、そのため、上
記有害物質を吸着する吸着剤を充填した吸着筒を有する
除害装置が使用されている。2. Description of the Related Art In general, special gases used in semiconductor manufacturing processes and the like must be detoxified by removing harmful substances contained in the special gases after use. An abatement apparatus having an adsorption column filled with an adsorbent to be adsorbed is used.
【０００３】然しながらこの吸着剤はその使用によって
能力が次第に小さくなるものであり、このためこの除害
装置に用いる吸着筒の吸着剤の効能が継続しているか終
了したか判別するための検知剤が使用されている。[0003] However, the capacity of the adsorbent is gradually reduced by its use. Therefore, a detecting agent for judging whether the adsorbent of the adsorbent cylinder used in this detoxifying apparatus has continued its effectiveness or has ended has been used. in use.
【０００４】この検知剤は原料としての活性アルミナや
シリカゲルを大きな金属製の皿状の容器に入れ、重クロ
ム酸ナトリウム、燐モリブデン酸、臭化第二水銀、硫酸
等の試薬を攪拌しながら注入し、更に水又はエチルアル
コールを散布し、試薬が原料に均一に添加されるように
ゴム手袋をした人手で混合し、その後、天日で乾燥させ
て完成させていた。[0004] This detecting agent is prepared by placing activated alumina or silica gel as a raw material in a large metal dish-shaped container, and injecting reagents such as sodium dichromate, phosphomolybdic acid, mercuric bromide and sulfuric acid while stirring. Further, water or ethyl alcohol was sprayed, and the mixture was manually mixed with rubber gloves so that the reagent was uniformly added to the raw materials, and then dried on the sun to complete the reaction.
【０００５】[0005]
【発明が解決しようとする課題】上記のように従来技術
では人手による混合と天日による乾燥で有害物質の検知
剤を製造しており、上記試薬に使う薬剤や、エチルアル
コールの蒸気によって人体に悪影響を及ぼすおそれがあ
った。As described above, in the prior art, a detecting agent for harmful substances is manufactured by manual mixing and drying by sunlight, and the agent used for the above reagent or the vapor of ethyl alcohol is applied to the human body. There was a risk of adverse effects.
【０００６】本発明は上記の欠点を除くようにしたもの
である。The present invention has been made to eliminate the above disadvantages.
【０００７】本発明の有害物質の検知剤製造装置は、活
性アルミナやシリカゲルの原料母材を入れて攪拌するた
めの回転容器と、この回転容器を回転する手段と、上記
回転容器に形成した排気口と、この排気口に連絡した排
気筒と、有毒性溶液状試薬を計量する手段と、計量した
所定量の試薬を圧縮空気で上記回転容器内に短時間に押
し出し噴霧する手段と、上記回転容器内に乾燥用加熱気
体を吹き込む手段とより成ることを特徴とする。[0007] The apparatus for producing a harmful substance detecting agent of the present invention is prepared by adding a raw material base material of activated alumina or silica gel and stirring it.
A rotating container fit, and means for rotating the rotary container, an exhaust port formed in the rotating container, exhaust in communication to the exhaust port
Cylinder, means for measuring toxic solution reagents,
A predetermined amount of reagent is pressed into the rotating container with compressed air in a short time.
Means for spraying out and characterized in that it consists more and means for blowing drying heated gas <br/> body to the rotating container.
【０００８】[0008]
【実施例】以下図面によって本発明の実施例を説明す
る。Embodiments of the present invention will be described below with reference to the drawings.
【０００９】本発明においては図１及び図２に示すよう
に、原料母材となる活性アルミナやシリカゲルの粉状材
を回転自在ならしめた例えば八角形状の筒体１内にこの
筒体１の側面の一部を開いて入れ、この筒体１を形成す
る側壁内面には図３に示すように互いに異なる面の中央
端部に例えば３角形状の固定翼または邪魔板２を突設
し、上記筒体１の一端面３には排気筒（図示せず）に連
通する排気口４を設け、他端面５の中心部には中空回転
軸６の一端を固定せしめる。In the present invention, as shown in FIGS. 1 and 2, an activated octagonal cylindrical body 1 in which a powdered material of activated alumina or silica gel as a raw material base material is rotatably arranged. A part of the side surface is opened, and a fixed wing or a baffle plate 2 having, for example, a triangular shape is protruded from an inner surface of a side wall forming the cylindrical body 1 at a center end of different surfaces as shown in FIG. An exhaust port 4 communicating with an exhaust pipe (not shown) is provided at one end face 3 of the cylindrical body 1, and one end of a hollow rotary shaft 6 is fixed to the center of the other end face 5.
【００１０】上記中空回転軸６は支持台７上に設けた２
個の支持部８によって回転自在に支持し、上記回転軸６
の中間部に鎖車９を固定し、この鎖車９は上記支持台７
内に設けた回転機構（図示せず）により鎖１０を介し
て、例えば毎分１回転程度の速度で回転せしめるように
する。[0010] The hollow rotary shaft 6 is provided on a support 7.
Rotatably supported by the plurality of support portions 8,
The chain wheel 9 is fixed to an intermediate portion of the support base 7 and
A rotation mechanism (not shown) provided therein rotates through the chain 10 at a speed of, for example, about one revolution per minute.
【００１１】また、上記中空回転軸６の他端からその中
心孔を貫通して延び上記筒体１内に開口する例えば外管
１１と内管１２とより成る２重管を設け、上記外管１１
の上記筒体１内の開口端には空気吹出し口１３を形成
し、中空回転軸６外の他端には上記支持台７内に設置し
た送風機（図示せず）からの例えば水柱１ｍゲージ以下
の送風空気を電熱器等（図示せず）で加熱せしめて得た
所定圧の乾燥用送風空気を導入できるようにし、上記内
管１２の上記筒体１内の開口端には噴霧器１４を取り付
け、中空回転軸６外の他端には上記試薬をエチルアルコ
ール等の溶剤に溶かして得た溶液状試薬の所定量を導入
できるようにする。A double pipe comprising, for example, an outer pipe 11 and an inner pipe 12 extending from the other end of the hollow rotary shaft 6 through the center hole thereof and opening into the cylindrical body 1 is provided. 11
An air outlet 13 is formed at an open end in the cylindrical body 1 and, for example, a water column of 1 m gauge or less from a blower (not shown) installed in the support base 7 at the other end outside the hollow rotary shaft 6. The blast air is heated by an electric heater or the like (not shown) so that blast air for drying at a predetermined pressure can be introduced, and a sprayer 14 is attached to an open end of the inner pipe 12 in the cylindrical body 1. A predetermined amount of a solution reagent obtained by dissolving the above reagent in a solvent such as ethyl alcohol is introduced into the other end outside the hollow rotary shaft 6.
【００１２】上記所定量の溶液状試薬を導入するために
は、例えば上記溶液状試薬を貯留する貯留槽（図示せ
ず）から支持台７に取り付けた計量シリンダー１５内に
溶液状試薬を導き、上記支持台７内に設定した圧縮機
（図示せず）からの例えば１．５ｋｇ／ｃｍ2 Ｇ（水柱
１５ｍ）の圧縮空気によってこれを押圧し、計量シリン
ダー１５から上記内管１２内に上記溶液状試薬に溶けて
いる固体の分離沈澱をさけるため短時間に押し出すよう
にする。In order to introduce the predetermined amount of the solution reagent, for example, the solution reagent is guided from a storage tank (not shown) for storing the solution reagent into a measuring cylinder 15 attached to the support base 7. This is pressed by compressed air of, for example, 1.5 kg / cm 2 G (water column 15 m) from a compressor (not shown) set in the support table 7, and the solution is introduced into the inner tube 12 from the measuring cylinder 15. Extrude in a short time to avoid separation and precipitation of solids dissolved in the reagent.
【００１３】更に、上記噴霧器１４からの溶液状試薬の
噴霧は上記筒体１を回転しながら行い、同時に上記送風
機からの送風空気を電熱器に通して得た乾燥用送風空気
を上記外管１１の空気吹出し口１３から吹き出すように
し、これらの操作は上記支持台７に設けたコントロール
ボックス１６によって制御できるようにする。Further, the spraying of the solution reagent from the sprayer 14 is performed while rotating the cylindrical body 1 and, at the same time, the blowing air for drying obtained by passing the blowing air from the blower through an electric heater to the outer tube 11. The operation is performed by a control box 16 provided on the support base 7.
【００１４】なお、上記計量シリンダー１５は支持台７
から取り外して洗浄し別の試薬のために使用できるよう
にし、また必要に応じて筒体１及び外管１１、内管１
２、噴霧器１４等を洗浄可能ならしめるのが好ましい。The measuring cylinder 15 is mounted on the support 7.
And wash it to make it available for another reagent. If necessary, the cylinder 1 and the outer tube 11 and the inner tube 1
2. It is preferable that the sprayer 14 and the like can be washed.
【００１５】本発明の有害物質の検知剤製造装置は上記
のような構成であるから、粒状の原料母材を筒体１内に
入れ、この筒体１を例えば毎分１回転せしめれば、原料
母材が邪魔板２によって左右に切り返されて混合され
る。従ってこの筒体１の回転中に原料母材に見合う一定
量の溶液状試薬を軽量シリンダー１５、内管１２及び噴
霧器１４を介して原料母材上に噴霧せしめれば試薬が原
料母材に均一に添加されるようになるからこの一定量の
噴霧と同時に、乾燥用加熱空気を外管１１及び空気吹出
し口１３から原料母材に吹き付け試薬を溶解するために
用いた溶剤を蒸発せしめれば、試薬が原料母材に深く浸
透することがなく、原料母材の表面全体に薄くムラなく
添加され乾燥されて得られた検知材を製品として得るこ
とができ、この製品は筒体１の側面の一部を開いて取り
出すことができる。なお、上記筒体１内に吹き込まれた
空気及び発生した有害蒸気は排気口４を介して排気筒よ
り成る排気ラインを介して排気される。Since the apparatus for producing a harmful substance detecting agent according to the present invention has the above-described configuration, a granular raw material base material is put into the cylindrical body 1 and the cylindrical body 1 is rotated, for example, once per minute. The raw material base material is cut right and left by the baffle plate 2 and mixed. Therefore, if a certain amount of solution reagent corresponding to the raw material base material is sprayed onto the raw material base material through the lightweight cylinder 15, the inner tube 12, and the sprayer 14 during the rotation of the cylindrical body 1, the reagent is uniform on the raw material base material. simultaneously with this amount of the spray from will be added to, if Seshimere evaporating the solvent using a drying heated air from the outer tube 11 and the air outlet 13 in order to dissolve the reagents blown to the raw material matrix, Reagent deeply immersed in base material
It is possible to obtain a detection material obtained by adding and drying the entire surface of the raw material base material thinly and uniformly without drying, and this product is obtained by removing a part of the side surface of the cylindrical body 1. Can be opened and taken out. Incidentally, harmful vapor blown air and generated in the cylinder body 1 is exhausted through the exhaust line comprising the exhaust pipe through the outlet 4.
【００１６】[0016]
【発明の効果】上記のように本発明の有害物質の検知剤
製造装置によれば検知材の製造を機械化でき人手を省く
ことができ、衛生的であり、その製造は天候に左右され
ず均一な製品を大量に簡単に製造できる。なお、筒体の
回転速度を遅くし、少ない回転数で製品を作るようにす
れば原料母材が粉体化せず原料母材の粒径とほぼ同じも
のを製品とすることができる。又溶液状試薬の噴霧に液
体ポンプを使用せず圧縮空気で噴霧させるので、液体ポ
ンプのメンテナンスや洗浄を必要としない利点がある。As described above, according to the apparatus for producing a harmful substance detecting agent of the present invention, the production of the detecting material can be mechanized, manpower can be saved, the sanitary condition can be obtained, and the production can be uniform regardless of the weather. Large quantities of simple products can be easily manufactured. If the rotational speed of the cylindrical body is reduced and the product is manufactured with a small number of rotations, the raw material base material does not turn into powder, and a product having substantially the same particle size as the raw material base material can be obtained. Further, since the solution reagent is sprayed with compressed air without using a liquid pump, there is an advantage that maintenance and cleaning of the liquid pump are not required.
【図１】本発明の有害物質の検知剤製造装置の側面図で
ある。FIG. 1 is a side view of an apparatus for producing a harmful substance detecting agent of the present invention.
【図２】本発明の有害物質の検知剤製造装置の正面図で
ある。FIG. 2 is a front view of the apparatus for producing a harmful substance detecting agent of the present invention.
【図３】本発明の有害物質の検知剤製造装置の筒体側壁
の一部の展開説明図である。FIG. 3 is a development explanatory view of a part of a cylindrical side wall of the harmful substance detecting agent manufacturing apparatus of the present invention.
１ 筒体 ２ 邪魔板 ３ 一端面 ４ 排気口 ５ 他端面 ６ 中空回転軸 ７ 支持台 ８ 支持部 ９ 鎖車 １０ 鎖 １１ 外管 １２ 内管 １３ 空気吹出し口 １４ 噴霧器 １５ 計量シリンダー １６ コントロールボックス DESCRIPTION OF SYMBOLS 1 Cylindrical body 2 Baffle plate 3 One end surface 4 Exhaust port 5 Other end surface 6 Hollow rotating shaft 7 Support stand 8 Support part 9 Chain wheel 10 Chain 11 Outer tube 12 Inner tube 13 Air outlet 14 Sprayer 15 Measuring cylinder 16 Control box
Claims (1)
入れて攪拌するための回転容器と、この回転容器を回転
する手段と、上記回転容器に形成した排気口と、この排
気口に連絡した排気筒と、有毒性溶液状試薬を計量する
手段と、計量した所定量の試薬を圧縮空気で上記回転容
器内に短時間に押し出し噴霧する手段と、上記回転容器
内に乾燥用加熱気体を吹き込む手段とより成ることを特
徴とする有害物質の検知剤製造装置。And 1. A activated alumina and rotary vessel for stirring putting raw base material of silica gel, and means for rotating the rotary container, an exhaust port formed in the rotary vessel, the discharge
Weigh the exhaust stack and the toxic solution reagent
Means, a means for extruding and spraying a predetermined amount of the measured amount of reagent into the rotating container with compressed air in a short time, and a means for blowing a heating gas for drying into the rotating container. Detector manufacturing equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4208575A JP2847599B2 (en) | 1992-07-14 | 1992-07-14 | Hazardous substance detection agent manufacturing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4208575A JP2847599B2 (en) | 1992-07-14 | 1992-07-14 | Hazardous substance detection agent manufacturing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0634620A JPH0634620A (en) | 1994-02-10 |
| JP2847599B2 true JP2847599B2 (en) | 1999-01-20 |
Family
ID=16558458
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4208575A Expired - Lifetime JP2847599B2 (en) | 1992-07-14 | 1992-07-14 | Hazardous substance detection agent manufacturing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2847599B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6497342B2 (en) | 2000-11-30 | 2002-12-24 | Mckesson Automated Healthcare, Inc. | Medicine feeder |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2603154B1 (en) * | 1986-09-02 | 1989-06-30 | Ceres | SEED FILMING PROCESS |
| JPS63267236A (en) * | 1987-04-23 | 1988-11-04 | Fuji Oil Co Ltd | Conjugated chocolate and production thereof |
| JP2981249B2 (en) * | 1990-03-05 | 1999-11-22 | フロイント産業株式会社 | Granulation coating apparatus and granulation coating method using the same |
-
1992
- 1992-07-14 JP JP4208575A patent/JP2847599B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0634620A (en) | 1994-02-10 |
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