JP2838688B2 - Vacuum cleaning device - Google Patents
Vacuum cleaning deviceInfo
- Publication number
- JP2838688B2 JP2838688B2 JP24126396A JP24126396A JP2838688B2 JP 2838688 B2 JP2838688 B2 JP 2838688B2 JP 24126396 A JP24126396 A JP 24126396A JP 24126396 A JP24126396 A JP 24126396A JP 2838688 B2 JP2838688 B2 JP 2838688B2
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- tank
- heating
- vacuum
- cleaning liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Description
【0001】[0001]
【発明の属する技術分野】本発明は、汚れの付着した金
属部品などの被洗浄物を、可燃性の洗浄液などを用いて
真空中で洗浄した後、迅速に真空乾燥させる真空洗浄装
置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum cleaning apparatus for cleaning an object to be cleaned such as a contaminated metal part in a vacuum using a flammable cleaning liquid and then quickly drying the vacuum.
【0002】[0002]
【発明が解決しようとする課題】フロンやトリエタンの
全廃後にも拘わらず、理想的な代替洗浄剤の開発が進ま
ない中、汎用性や価格上の利点から、水溶性洗剤や炭化
水素溶剤への切替えが積極的に推進されている。その中
でも、溶剤系洗浄液の簡便さから炭化水素溶剤が注目さ
れており、かかる洗浄液を用いた真空洗浄装置が各種提
案されている。しかしながら、いずれの真空洗浄装置
も、洗浄性能が十分ではないか、或いは装置構成が複雑
であるという問題点があった。本発明は、この問題点に
着目してなされたものであって、簡易な装置構成であり
ながら、確実かつ迅速な洗浄動作を実現する真空洗浄装
置を提供することを目的とする。[0005] Despite the elimination of CFCs and triethane, despite the elimination of the development of ideal substitutes, the use of water-soluble detergents and hydrocarbon solvents due to versatility and cost advantages has been increasing. Switching is being actively promoted. Above all, hydrocarbon solvents have attracted attention due to the simplicity of solvent-based cleaning liquids, and various vacuum cleaning apparatuses using such cleaning liquids have been proposed. However, all of the vacuum cleaning apparatuses have a problem that the cleaning performance is not sufficient or the apparatus configuration is complicated. The present invention has been made in view of this problem, and an object of the present invention is to provide a vacuum cleaning apparatus which realizes a reliable and quick cleaning operation with a simple apparatus configuration.
【0003】[0003]
【課題を解決するための手段】上記の目的を達成するた
め、請求項1に係る真空洗浄装置は、減圧機構(5)に
接続されており、被洗浄物の浸漬洗浄および真空乾燥に
用いる洗浄槽(1)と、第1の加熱機構(9)を備え
て、加温状態の洗浄液を貯留している加温槽(2)と、
前記加温槽からの洗浄液を受け、これを第2の加熱機構
(10)によって更に加熱して沸騰させた後、冷却機構
(4a)によって液化凝縮する蒸留再生槽(4)と、前
記減圧機構(5)に接続されて減圧されていると共に、
前記加温槽に接続されていることにより、前記蒸留再生
槽を減圧状態に維持する減圧槽(3)と、前記洗浄槽お
よび前記加温槽に接続され、前記加温槽に貯留されてい
る加温状態の洗浄液を前記洗浄槽に供給する一方、前記
洗浄槽の洗浄液を前記加温槽に回収する循環機構(7)
とを備えている。In order to achieve the above object, a vacuum cleaning apparatus according to claim 1 is connected to a pressure reducing mechanism (5), and is used for immersion cleaning and vacuum drying of an object to be cleaned. A heating tank (2) including a tank (1), a first heating mechanism (9), and storing a cleaning liquid in a heated state;
A distillation / regeneration tank (4) which receives the cleaning liquid from the heating tank, further heats it by a second heating mechanism (10), brings it to a boil, and liquefies and condenses it with a cooling mechanism (4a); While being connected to (5) and being decompressed,
By being connected to the heating tank, the distillation tank is connected to the cleaning tank and the heating tank, and is stored in the heating tank. A circulating mechanism (7) for supplying a cleaning liquid in a heated state to the cleaning tank and recovering the cleaning liquid in the cleaning tank to the heating tank;
And
【0004】また、請求項2に係る真空洗浄装置は、第
1の加熱機構(9)を備えて、加温状態の洗浄液を貯留
している加温槽(2)と、第2の加熱機構(14)を備
えると共に、第1の減圧機構(5A)に接続されている
洗浄槽(1)と、第2の減圧機構(5B)に接続されて
減圧されていると共に、前記洗浄槽および前記加温槽に
接続されていて、前記洗浄槽からの洗浄蒸気を蒸留再生
して前記加温槽に供給する減圧槽(3)と、前記洗浄槽
の洗浄液を前記加温槽に回収する洗浄液回収機構(7)
とを備えており、非洗浄時と蒸気洗浄時には、前記加温
槽の洗浄液が前記洗浄槽に供給されて沸騰された後、こ
の洗浄蒸気が前記減圧槽においてが液化回収される一
方、真空乾燥時には、前記洗浄液回収機構によって洗浄
液が回収された後、適宜なタイミングで前記第1の減圧
機構(5A)が機能して、洗浄槽の真空度を上げること
によって被洗浄物を迅速に乾燥させるようにしている。A vacuum cleaning apparatus according to a second aspect of the present invention includes a first heating mechanism (9), a heating tank (2) storing a cleaning liquid in a heated state, and a second heating mechanism. (14), the cleaning tank (1) connected to the first decompression mechanism (5A), and the decompression connected to the second decompression mechanism (5B). A decompression tank (3) connected to the heating tank and supplying distillation vapor from the cleaning tank to the cleaning tank by distillation and regeneration, and a cleaning liquid recovery for collecting the cleaning liquid from the cleaning tank to the heating tank. Mechanism (7)
During non-cleaning and steam cleaning, after the cleaning liquid in the heating tank is supplied to the cleaning tank and boiled, the cleaning steam is liquefied and recovered in the decompression tank, while vacuum drying is performed. In some cases, after the cleaning liquid is recovered by the cleaning liquid recovery mechanism, the first decompression mechanism (5A) functions at an appropriate timing to increase the degree of vacuum in the cleaning tank to quickly dry the object to be cleaned. I have to.
【0005】[0005]
【発明の実施の態様】以下、実施例に基づいて、この発
明を更に詳細に説明する。 〔第1実施例〕図1〜図3は、第1実施例に係る真空洗
浄装置EQ1の構成を略記したものであり、それぞれ、
非洗浄時(図1)、浸漬洗浄時(図2)、真空乾燥時
(図3)を示している。この真空洗浄装置EQ1は、被
洗浄物の浸漬洗浄および真空乾燥に用いる洗浄槽1と、
洗浄液を加温状態で貯留する加温槽2と、真空ポンプ5
によって連続的に減圧される減圧槽3と、洗浄液を減圧
状態下で沸騰させて液化回収する蒸留再生槽4と、冷却
機構6aを備えるコールドトラップ6と、洗浄槽1と加
温槽2の間で洗浄液を循環させる循環ポンプ7と、装置
各部の連通管を開閉するバルブVA 〜VH と、装置全体
の動作を制御する制御部(図示せず)とで構成されてい
る。なお、真空ポンプ5は、減圧槽3を介して、洗浄槽
1、加温槽2、蒸留再生槽4を適宜に減圧するようにな
っている。図示の通り、洗浄槽1は、開閉蓋1aによっ
て密閉可能に構成されており、その内部には超音波装置
1bを備えている。また、洗浄槽1の真空度は、圧力計
8によって計測できるようになっている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in more detail with reference to embodiments. First Embodiment FIGS. 1 to 3 schematically show the structure of a vacuum cleaning apparatus EQ1 according to a first embodiment.
The time of non-cleaning (FIG. 1), the time of immersion cleaning (FIG. 2), and the time of vacuum drying (FIG. 3) are shown. The vacuum cleaning apparatus EQ1 includes a cleaning tank 1 used for immersion cleaning and vacuum drying of an object to be cleaned,
A heating tank 2 for storing the cleaning liquid in a heated state, and a vacuum pump 5
Tank 3, which is continuously depressurized by the pressure, a distillation regeneration tank 4 for boiling and liquefying and recovering the cleaning liquid under reduced pressure, a cold trap 6 having a cooling mechanism 6a, and a cleaning tank 1 and a heating tank 2. a circulation pump 7 for circulating the washing liquid in, and a de-and the valve V a ~V H for opening and closing the communication pipe of each part of the device, a control unit for controlling the operation of the entire apparatus (not shown). The vacuum pump 5 appropriately depressurizes the cleaning tank 1, the heating tank 2, and the distillation regeneration tank 4 via the depressurizing tank 3. As shown in the figure, the cleaning tank 1 is configured to be able to be hermetically closed by an opening / closing lid 1a, and has an ultrasonic device 1b inside. Further, the degree of vacuum in the cleaning tank 1 can be measured by the pressure gauge 8.
【0006】加温槽2と蒸留再生槽4は、真空ポンプ5
によって所定の減圧状態にあるが、加温槽2の洗浄液
は、加熱機構9によって沸騰しない程度に加温されてい
る一方、蒸留再生槽4の洗浄液は、加熱機構10によっ
て沸騰状態に加熱されている。そして、蒸留再生槽4に
は、冷却機構4aが設けられており、液化された洗浄液
は、連通管15Aを介して加温槽2に回収されるように
なっている。なお、各槽2,4の洗浄液の温度は、温度
計11,12の計測値によって管理されている。また、
加温槽2と蒸留再生槽4は、連通管15Bによって接続
されており、自然流入またはその他の手段によって、減
少した洗浄液が自動的に投入されるようになっている。
減圧槽3には、冷却機構3aが設けられており、洗浄槽
1や加温槽2から僅かに流入する洗浄蒸気は、機器外に
流出しないよう無駄なく液化回収されている。前述した
ように、加温槽2と蒸留再生槽4は、減圧槽3を介して
真空ポンプ5によって減圧されるが、圧力計13の計測
値に応じて制御バルブVH が自動的に開閉されることに
より、蒸留再生槽4と加温槽2が所定の減圧状態に維持
されるようになっている。The heating tank 2 and the distillation regeneration tank 4 are provided with a vacuum pump 5
Although the cleaning liquid in the heating tank 2 is heated to a degree not to boil by the heating mechanism 9, the cleaning liquid in the distillation regeneration tank 4 is heated to the boiling state by the heating mechanism 10. I have. The distillation regeneration tank 4 is provided with a cooling mechanism 4a, and the liquefied cleaning liquid is collected in the heating tank 2 via the communication pipe 15A. In addition, the temperature of the cleaning liquid in each of the tanks 2 and 4 is controlled by measured values of the thermometers 11 and 12. Also,
The heating tank 2 and the distillation regeneration tank 4 are connected by a communication pipe 15B, and the reduced washing liquid is automatically supplied by natural inflow or other means.
The decompression tank 3 is provided with a cooling mechanism 3a, and the cleaning steam slightly flowing from the cleaning tank 1 or the heating tank 2 is liquefied and collected without waste so as not to flow out of the apparatus. As described above, the heating tank 2 and the distillation regeneration tank 4 are depressurized by the vacuum pump 5 via the depressurization tank 3, and the control valve V H is automatically opened and closed according to the measurement value of the pressure gauge 13. Thereby, the distillation regeneration tank 4 and the heating tank 2 are maintained in a predetermined reduced pressure state.
【0007】続いて、上記の構成を備える真空洗浄装置
EQ1について、その動作内容を説明する。 (1)非洗浄時の動作(蒸留再生) 先ず、洗浄槽1には被洗浄物が投入されておらず、洗浄
槽1の開閉蓋1aが開放状態である場合について説明す
る(図1参照)。この真空洗浄装置EQ1では、開閉弁
VH は、圧力計13の計測値に応じて断続的に開閉され
るようになっており、非洗浄時にも、次の蒸留再生動作
が行われる。なお、このとき、開閉バルブVE ,VF ,
VB ,VC ,VA ,VG は全て閉鎖状態である。加温槽
2と蒸留再生槽4とは、減圧槽3を介して、真空ポンプ
5によって所定の真空度にまで減圧されているので、高
沸点の洗浄液を用いた場合でも、比較的低い温度におい
て、蒸留再生槽4の洗浄液が沸騰することになる。そし
て、沸騰した洗浄液は、蒸留再生槽4の冷却機構4aに
おいて液化されて蒸留再生される。蒸留再生槽4と加温
槽2とは連通管15Aによって連通されているので、蒸
留再生された洗浄液は、蒸留再生槽4から加温槽2に回
収される。また、加温槽2から蒸留再生槽4には、連通
管15Bを介して、自動的に洗浄液が補給されるので、
結局、蒸留再生槽4→加温槽2→蒸留再生槽4の蒸留再
生ラインが構築されることになる。この蒸留再生動作に
おいて、蒸留再生槽4には、所定の温度まで加温された
洗浄液が供給されるので、蒸留再生槽4では、洗浄液を
効率よく沸騰させることができる。なお、真空ポンプ5
によって吸引された洗浄蒸気は、減圧槽3の冷却機構3
aにおいて液化されて加温槽2に回収され、更に、真空
ポンプ5の排気側に設けたコールドトラップ6の冷却機
構6aにおいても、再度、凝縮されて洗浄蒸気の機器外
への流出を抑えている。Next, the operation of the vacuum cleaning apparatus EQ1 having the above configuration will be described. (1) Non-Washing Operation (Distillation Regeneration) First, a case in which an object to be washed is not put into the washing tank 1 and the opening / closing lid 1a of the washing tank 1 is in an open state will be described (see FIG. 1). . In this vacuum cleaning device EQ1, the on-off valve VH is opened and closed intermittently according to the measurement value of the pressure gauge 13, and the next distillation regeneration operation is performed even during non-cleaning. At this time, the opening and closing valve V E, V F,
V B, V C, V A , V G are all closed. Since the heating tank 2 and the distillation regeneration tank 4 are depressurized to a predetermined degree of vacuum by the vacuum pump 5 via the depressurizing tank 3, even when a high-boiling-point cleaning liquid is used, the heating tank 2 and the distillation regeneration tank 4 are kept at a relatively low temperature. Then, the cleaning liquid in the distillation regeneration tank 4 will boil. Then, the boiling cleaning liquid is liquefied in the cooling mechanism 4a of the distillation regeneration tank 4 and is distilled and regenerated. Since the distillation and regeneration tank 4 and the heating tank 2 are communicated with each other by the communication pipe 15A, the cleaning liquid subjected to the distillation and regeneration is recovered from the distillation and regeneration tank 4 to the heating tank 2. Further, the cleaning liquid is automatically replenished from the heating tank 2 to the distillation regeneration tank 4 via the communication pipe 15B.
As a result, a distillation regeneration line of the distillation regeneration tank 4 → the heating tank 2 → the distillation regeneration tank 4 is constructed. In this distillation regeneration operation, since the cleaning liquid heated to a predetermined temperature is supplied to the distillation regeneration tank 4, the cleaning liquid can be efficiently boiled in the distillation regeneration tank 4. The vacuum pump 5
The cleaning steam sucked by the cooling mechanism 3
In the cooling mechanism 6a of the cold trap 6 provided on the exhaust side of the vacuum pump 5, it is condensed again to suppress the outflow of the cleaning steam out of the equipment. I have.
【0008】(2)浸漬洗浄時の動作(浸漬洗浄+蒸留
再生) 被洗浄物を浸漬洗浄する場合には、洗浄槽1の中に被
洗浄物を投入して開閉蓋1aを密閉した後、先ず、開閉
バルブVE を開放する。なお、このときも、開閉バルブ
VH は、圧力計13に応じて断続的に開閉されている
が、開閉バルブVF ,VB ,VC ,VA ,VG は全て閉
鎖状態である。開閉バルブVE を開放すると、洗浄槽1
の空気は、減圧槽3を介して、真空ポンプ5によって吸
引される。そこで、圧力計8の計測値に基づいて制御し
て、洗浄槽1の真空度が加温槽2と同程度になるまで減
圧する。このようにして、洗浄槽1と加温槽2の真空度
を同一にした後、開閉弁VA ,VG を開放すると、加温
槽2から洗浄槽1に洗浄液が自然流入されることにな
る。なお、上記の説明では、開閉バルブVE を開放して
洗浄槽1を減圧したが、これに変えて、開閉バルブ
VB ,VC ,VG のいずれかを開放して、洗浄槽1を減
圧するのでも良い。 開閉バルブVA ,VG を開放して被洗浄物WRを浸す
まで洗浄液を満たしたら、次に、開閉バルブVB を開い
て循環ポンプ7の運転を開始して洗浄液を循環させる
(図2参照)。この洗浄装置EQ1では、洗浄槽1に供
給される洗浄液は、加温槽2において所定温度まで加温
されているので洗浄効果が高く、また、被洗浄物WR
は、浸漬洗浄されると共に加温されることになる。つま
り、洗浄槽1や加温槽2の真空度が低いことから、可燃
性の洗浄液であっても、引火点以上に加温することがで
き、洗浄液の温度が高いことによって、洗浄力の向上と
被洗浄物WRの加温とが実現される。なお、浸漬洗浄時
には、超音波装置1bによる超音波洗浄や噴流洗浄など
を併用すると洗浄効果を更に高めることができる。(2) Operation at the time of immersion cleaning (immersion cleaning + distillation regeneration) When the object to be cleaned is immersed and cleaned, the object to be cleaned is put into the cleaning tank 1 and the opening / closing lid 1a is closed. First, the opening / closing valve VE is opened. Also in this case, the opening and closing valve V H, are intermittently opened and closed in response to the pressure gauge 13, the opening and closing valve V F, V B, V C , V A, V G are all closed. When the open / close valve VE is opened, the cleaning tank 1
Is sucked by the vacuum pump 5 through the vacuum tank 3. Therefore, the pressure is reduced based on the value measured by the pressure gauge 8 until the degree of vacuum in the cleaning tank 1 becomes substantially equal to that in the heating tank 2. In this way, after the cleaning vessel 1 and the vacuum degree of the heating tank 2 to the same on-off valve V A, when opening the V G, to the cleaning tank 1 from heating tank 2 that cleaning liquid is naturally flows Become. In the above description it has been depressurized cleaning tank 1 by opening and closing valve V E, instead of this, the opening and closing valve V B, V C, by opening one of V G, the cleaning tank 1 The pressure may be reduced. Once filled the washing liquid to the opening and closing valve V A, by opening the V G immersing the object to be cleaned WR, then opens the opening and closing valve V B to start operation of the circulation pump 7 for circulating the cleaning fluid (see FIG. 2 ). In the cleaning device EQ1, the cleaning liquid supplied to the cleaning tank 1 is heated to a predetermined temperature in the heating tank 2, so that the cleaning effect is high, and the cleaning object WR is also cleaned.
Is heated while being immersed and washed. That is, since the degree of vacuum in the cleaning tank 1 and the heating tank 2 is low, even a flammable cleaning liquid can be heated to a temperature higher than the flash point, and the high temperature of the cleaning liquid improves the cleaning power. And the heating of the article to be cleaned WR. In addition, at the time of immersion cleaning, the cleaning effect can be further enhanced by using ultrasonic cleaning or jet cleaning with the ultrasonic device 1b in combination.
【0009】所定時間の浸漬洗浄処理が完了すると、
最初に、開閉バルブVA を閉じて洗浄液の供給を止め
る。そして、洗浄槽1の洗浄液が空になると、開閉バル
ブVB,VG を閉じて循環ポンプ7の運転を停止する。
なお、これら〜の動作中、蒸留再生槽4→加温槽2
→蒸留再生槽4の蒸留再生ラインは連続して機能してい
る。このように、この真空洗浄装置EQ1では、蒸留再
生を行いながら、加温洗浄が可能となるため、設備の簡
素化を図ることができる。また、同一の減圧状態にある
2つの槽について、洗浄液の加熱温度を異ならせること
により、蒸気発生と洗浄液の加熱とを実現しているの
で、減圧機構の使い分けなどの煩雑さが解消される。When the immersion cleaning process for a predetermined time is completed,
First, the supply of the cleaning liquid is stopped by closing the opening / closing valve VA . When the cleaning liquid in the cleaning tank 1 is empty, the opening and closing valve V B, to close the V G to stop the operation of the circulation pump 7.
During these operations, the distillation regeneration tank 4 → the heating tank 2
→ The distillation regeneration line of the distillation regeneration tank 4 functions continuously. As described above, in the vacuum cleaning apparatus EQ1, the cleaning by heating can be performed while performing the regeneration by distillation, so that the facility can be simplified. Further, since the generation of steam and the heating of the cleaning liquid are realized by making the heating temperature of the cleaning liquid different for the two tanks in the same reduced pressure state, the complexity of properly using the decompression mechanism is eliminated.
【0010】(3)真空乾燥時の動作(真空乾燥+蒸留
再生) 浸漬洗浄の動作が完了すると、開閉バルブVC を開放
する。このとき、開閉バルブVG ,VA ,VB ,VF ,
VE は、既に閉鎖されている。なお、開閉バルブV
H は、圧力計13の計測値に応じて断続的に開閉される
ので、加温槽2と蒸留再生槽4の減圧状態は維持され
る。開閉バルブVC が開放されたことにより、洗浄槽1
は、更に減圧されることになり、加温状態の被洗浄物に
付着している洗浄液は、真空乾燥されることになる(図
3参照)。そして、減圧槽3に導入された洗浄蒸気は、
冷却機構3aによって凝縮化される。この洗浄装置EQ
1では、浸漬洗浄時に被洗浄物が適度に加熱されている
ので最も良い加熱方法であり、真空乾燥時に、改めて温
風加熱や蒸気加熱によって被洗浄物を加熱する必要がな
くなり、円滑かつ迅速に真空乾燥の処理に移行すること
が可能となる。 上記の処理によって、ある程度の真空乾燥が完了した
ら、その後、開閉バルブVE を開放して、洗浄槽1をさ
らに減圧して、被洗浄物を迅速かつ確実に乾燥させる。
なお、このとき、開閉弁VC などを閉鎖しても良い。 真空乾燥の処理が終われば、開閉弁VE ,VC を閉じ
た後、開閉弁VF を開放して洗浄槽1の減圧状態を解除
する。これによって被洗浄物WRの取り出しが可能とな
る。[0010] (3) When the vacuum drying operation when the operation of the (vacuum drying + distillation playback) immersion cleaning is completed, opening and closing valve V C. At this time, the opening and closing valve V G, V A, V B , V F,
VE is already closed. The opening and closing valve V
Since H is opened and closed intermittently according to the measurement value of the pressure gauge 13, the reduced pressure state of the heating tank 2 and the distillation regeneration tank 4 is maintained. By opening and closing valve V C is opened, the cleaning tank 1
Is further reduced in pressure, and the cleaning liquid adhering to the heated object to be cleaned is vacuum dried (see FIG. 3). And the cleaning steam introduced into the decompression tank 3 is
It is condensed by the cooling mechanism 3a. This cleaning device EQ
The method 1 is the best heating method because the object to be cleaned is appropriately heated at the time of immersion cleaning. It is not necessary to heat the object to be cleaned again by hot air heating or steam heating at the time of vacuum drying. It is possible to shift to vacuum drying processing. By the above process and when complete a certain degree of vacuum drying, then, by opening the closing valve V E, the cleaning tank 1 further under reduced pressure, to quickly and reliably dry the washload.
At this time, it may be closed opening and closing valve V C. After completion the process of vacuum drying, the on-off valve V E, after closing the V C, to release the vacuum of the cleaning tank 1 by opening the on-off valve V F. Thus, the object to be cleaned WR can be taken out.
【0011】〔第2実施例〕図4〜図6は、第2実施例
に係る真空洗浄装置EQ2の構成を略記したものであ
り、それぞれ、蒸留再生時(図4)、蒸気洗浄時(図
5)、真空乾燥時(図6)を示している。この真空洗浄
装置EQ2は、被洗浄物の蒸気洗浄および真空乾燥に用
いる洗浄槽1と、洗浄液を加温状態で貯留する加温槽2
と、沸騰した洗浄液を液化回収する減圧槽3と、前記の
各槽を所定の真空度にまで減圧する真空ポンプ5A,5
Bと、冷却機構6aを備えるコールドトラップ6と、洗
浄槽1の洗浄液を加温槽2に回収する回収ポンプ7A
と、装置各部の連通管を開閉するバルブVA 〜VH と、
装置全体の動作を制御する制御部(図示せず)とで構成
されている。この洗浄装置EQ2では、洗浄槽1に加熱
機構14が設けられており、この洗浄槽1が、蒸気発生
槽を兼ねる点に大きな特徴がある。その他の点は、第1
実施例の場合とほぼ同様であり、同一の部分には同一の
番号が付番されている。[Second Embodiment] FIGS. 4 to 6 schematically show the structure of a vacuum cleaning apparatus EQ2 according to a second embodiment. The vacuum cleaning apparatus EQ2 is used during distillation regeneration (FIG. 4) and steam cleaning (FIG. 4). 5) and during vacuum drying (FIG. 6). The vacuum cleaning device EQ2 includes a cleaning tank 1 used for steam cleaning and vacuum drying of an object to be cleaned, and a heating tank 2 for storing a cleaning liquid in a heated state.
And a decompression tank 3 for liquefying and recovering the boiling cleaning liquid, and vacuum pumps 5A and 5 for depressurizing each of the tanks to a predetermined degree of vacuum.
B, a cold trap 6 having a cooling mechanism 6a, and a collection pump 7A for collecting the cleaning liquid in the cleaning tank 1 into the heating tank 2.
And valves VA to VH for opening and closing communication pipes of various parts of the device,
And a control unit (not shown) for controlling the operation of the entire apparatus. The cleaning device EQ2 has a large feature in that a heating mechanism 14 is provided in the cleaning tank 1, and the cleaning tank 1 also serves as a steam generation tank. Other points are the first
This is almost the same as the embodiment, and the same parts are given the same numbers.
【0012】以下、図4〜図6に示す真空洗浄装置EQ
2について、その動作内容を説明する。 (1)非洗浄時の蒸留再生の動作 洗浄槽1に非洗浄物が投入されていない場合(図4参
照)には、開閉弁VE ,VF ,VB ,VH は閉鎖状態で
あり、開閉弁VD ,VC ,VG は開放状態である。その
ため、洗浄槽1は真空ポンプ5Bの作用によって減圧さ
れる。なお、圧力計13の計測値に応じて制御弁VD が
開閉して、所定の真空度が維持される。この減圧状態に
おいて開閉弁VA を開放すると、加温状態の洗浄液が洗
浄槽1に流入される。洗浄槽1には、洗浄液を沸騰させ
るに十分な加熱機構14が設けられているので、流入し
た洗浄液は、減圧状態下、直ちに沸騰することになる。
そして、洗浄蒸気は、真空ポンプ5Bによって減圧槽3
に吸引され、減圧槽3の冷却機構3aによって液化され
る。つまり、洗浄槽1に非洗浄物が投入されていない状
態では、加温槽2→洗浄槽1(蒸気発生槽)→減圧槽3
の蒸留再生ラインが構築されることになる。A vacuum cleaning apparatus EQ shown in FIGS.
The operation contents of No. 2 will be described. (1) In a case where the non-cleaned in operation the cleaning tank 1 of the distillation regeneration during unwashed is not turned on (see FIG. 4), opening and closing valves V E, V F, V B , V H is in the closed state off valve V D, V C, V G is the open state. Therefore, the pressure in the cleaning tank 1 is reduced by the action of the vacuum pump 5B. The control valve V D in accordance with the measured value of the pressure gauge 13 is opened and closed, a predetermined degree of vacuum is maintained. When the on-off valve VA is opened in this depressurized state, the heated cleaning liquid flows into the cleaning tank 1. Since the cleaning tank 1 is provided with a heating mechanism 14 sufficient to boil the cleaning liquid, the flowing cleaning liquid immediately boils under reduced pressure.
The cleaning steam is supplied to the decompression tank 3 by the vacuum pump 5B.
And liquefied by the cooling mechanism 3a of the decompression tank 3. That is, in a state where the non-cleaning object is not put into the cleaning tank 1, the heating tank 2 → the cleaning tank 1 (steam generating tank) → the decompression tank 3
Will be constructed.
【0013】(2)蒸気洗浄時の動作 被洗浄物を蒸気洗浄する場合には、開閉弁VA を閉じ
た状態で開閉弁VB を開放し、回収ポンプ7Aを運転さ
せて洗浄槽1の洗浄液を空にする。その後、真空ポンプ
5Bの運転を停止して、開閉弁VC ,VB ,VG を閉じ
た後、開閉弁VF を開放して洗浄槽1の減圧状態を解除
する。なお、適宜なタイミングで開閉弁VH を開放し
て、蒸留再生された洗浄液を加温槽2に回収する。 次に、洗浄槽1に被洗浄物WRを投入した後、開閉弁
VE を開放して真空ポンプ5Aの運転を開始する。その
後、洗浄槽1が所定の減圧状態に達したら、真空ポンプ
5Aの運転を停止して開閉弁VE を閉じる。 続いて、開閉弁VC を開放して真空ポンプ5Bの運転
を開始すると共に、開閉弁VA を一定時間だけ開放し
て、加温槽2の洗浄液を洗浄槽1に所定量だけ流入させ
る。洗浄槽1の加熱機構14は、流入された洗浄液を沸
騰されるに十分な能力を有しているので、洗浄槽1で
は、被洗浄物WRに対して蒸気洗浄が行われることにな
る(図5参照)。加熱機構14により沸騰された洗浄蒸
気は、被洗浄物WRにおいて液化される一方、減圧槽3
に導入された洗浄蒸気は、冷却機構3aにおいて液化さ
れて蒸留再生される。 蒸気洗浄の処理が完了したら、開閉弁VB を開放する
と共に、回収ポンプ7Aを運転して、洗浄槽1に残って
いる洗浄液を加温槽2に回収する。なお、この動作に合
わせて、洗浄槽1の洗浄蒸気は、真空ポンプ5Bによっ
て、減圧槽3に吸収される。[0013] (2) When the operation object to be cleaned during the steam washing steam cleaning, opens the on-off valve V B is closed-off valve V A, of the cleaning tank 1 by operating the recovery pump 7A Empty the cleaning solution. Thereafter, stop operation of the vacuum pump 5B, on-off valve V C, V B, after closing the V G, to release the vacuum of the cleaning tank 1 by opening the on-off valve V F. In addition, the on-off valve VH is opened at an appropriate timing, and the cleaning liquid regenerated by distillation is collected in the heating tank 2. Next, after the object to be cleaned WR is put into the cleaning tank 1, the on-off valve VE is opened and the operation of the vacuum pump 5A is started. Thereafter, when the cleaning tank 1 reaches a predetermined reduced pressure state, the operation of the vacuum pump 5A is stopped and the on-off valve VE is closed. Then, it starts the operation of the vacuum pump 5B by opening the on-off valve V C, by opening the on-off valve V A predetermined time, to flow by a predetermined amount cleaning liquid heating tank 2 to the cleaning vessel 1. Since the heating mechanism 14 of the cleaning tank 1 has a sufficient capacity to boil the inflowing cleaning liquid, the cleaning object 1 is subjected to steam cleaning in the cleaning tank 1 (FIG. 5). The cleaning steam boiled by the heating mechanism 14 is liquefied in the cleaning object WR while the decompression tank 3
The cleaning steam introduced into the cooling mechanism 3a is liquefied in the cooling mechanism 3a and is regenerated by distillation. When the process of steam cleaning is completed, while opening the on-off valve V B, driving a recovery pump 7A, recovering the washing liquid remaining in the cleaning tank 1 to the heating tank 2. In accordance with this operation, the cleaning steam in the cleaning tank 1 is absorbed into the decompression tank 3 by the vacuum pump 5B.
【0014】(3)真空乾燥時の動作 その後、開閉弁VE を開放して真空ポンプ5Aの運転
を開始して、真空ポンプ5A,5Bによって洗浄槽1の
真空度を高める。すると、洗浄槽1の真空度が上がるこ
とに応じて洗浄液の沸点が低下して、被洗浄物WRの表
面にある洗浄液が急激に乾燥してゆく。 そして、真空乾燥の処理が完了すれば、真空ポンプ5
A,5Bの運転を停止して開閉弁VE ,VC を閉じた
後、開閉弁VF を開放する。これにより洗浄槽1の減圧
状態が解除されるので、洗浄処理を終えた被洗浄物WR
を洗浄槽1から取り出すことができる。これ以降は、新
たな被洗浄物を洗浄槽1に投入して蒸気洗浄処理を行う
か、或いは、被洗浄物を投入することなく、加温槽2→
洗浄槽1(蒸気発生槽)→減圧槽3の蒸留再生ラインで
蒸留再生処理を行うことができる。(3) Operation During Vacuum Drying Thereafter, the on-off valve VE is opened and the operation of the vacuum pump 5A is started, and the vacuum degree of the cleaning tank 1 is increased by the vacuum pumps 5A and 5B. Then, as the degree of vacuum in the cleaning tank 1 increases, the boiling point of the cleaning liquid decreases, and the cleaning liquid on the surface of the cleaning object WR rapidly dries. When the vacuum drying process is completed, the vacuum pump 5
A, stop the operation of 5B opening and closing valve V E, after closing the V C, to open the on-off valve V F. As a result, the reduced pressure state of the cleaning tank 1 is released, and the object to be cleaned WR after the cleaning process is completed.
Can be taken out of the washing tank 1. Thereafter, a new object to be cleaned is charged into the cleaning tank 1 to perform a steam cleaning process, or the heating tank 2 →
The distillation regeneration process can be performed in the distillation regeneration line from the washing tank 1 (steam generation tank) to the reduced pressure tank 3.
【0015】〔第3実施例〕図7は、第3実施例に係る
真空洗浄装置EQ3の構成を略記したものである。この
真空洗浄装置EQ3は、被洗浄物の浸漬洗浄および真空
乾燥に用いる洗浄槽1と、洗浄液を加温状態で貯留する
加温槽2と、沸騰した洗浄液を液化回収する減圧槽3
と、洗浄液を減圧状態下で沸騰させる蒸気発生槽4と、
前記の各槽を所定の真空度にまで減圧する真空ポンプ5
と、冷却機構6aを備えるコールドトラップ6と、洗浄
槽1と加温槽2の間で洗浄液を循環させる循環ポンプ7
と、装置各部の連通管を開閉するバルブVA 〜VI と、
装置全体の動作を制御する制御部(図示せず)とで構成
されている。第1実施例の場合と同様、加温槽2の洗浄
液は、加熱機構9によって沸騰しない程度に加温されて
いる一方、蒸気発生槽4の洗浄液は、加熱機構10によ
って沸騰状態に加熱されている。減圧槽3には、冷却機
構3aが設けられており、蒸気発生槽4から送られてく
る洗浄蒸気が液化回収されるようになっている。減圧槽
3と蒸気発生槽4とは、真空ポンプ5によって減圧され
るが、この実施例では、圧力計13の計測値に応じて制
御バルブVD が自動的に開閉されることにより、減圧槽
3や蒸気発生槽4が所定の減圧状態に維持されるように
なっている。[Third Embodiment] FIG. 7 schematically shows the structure of a vacuum cleaning apparatus EQ3 according to a third embodiment. The vacuum cleaning apparatus EQ3 includes a cleaning tank 1 used for immersion cleaning and vacuum drying of an object to be cleaned, a heating tank 2 for storing the cleaning liquid in a heated state, and a decompression tank 3 for liquefying and recovering the boiling cleaning liquid.
A steam generating tank 4 for boiling the cleaning liquid under reduced pressure;
Vacuum pump 5 for reducing the pressure in each of the tanks to a predetermined degree of vacuum
A cold trap 6 having a cooling mechanism 6a; and a circulating pump 7 for circulating a cleaning liquid between the cleaning tank 1 and the heating tank 2.
When a valve V A ~V I for opening and closing the communication pipe of each part of the device,
And a control unit (not shown) for controlling the operation of the entire apparatus. As in the case of the first embodiment, the cleaning liquid in the heating tank 2 is heated by the heating mechanism 9 to such an extent that it does not boil, while the cleaning liquid in the steam generation tank 4 is heated to a boiling state by the heating mechanism 10. I have. The decompression tank 3 is provided with a cooling mechanism 3a, and the cleaning steam sent from the steam generation tank 4 is liquefied and collected. A vacuum tank 3 and the steam generator tank 4 is being reduced pressure by the vacuum pump 5, in this embodiment, the control valve V D in accordance with the measured value of the pressure gauge 13 is automatically opened and closed, vacuum tank 3 and the steam generation tank 4 are maintained in a predetermined reduced pressure state.
【0016】続いて、上記の構成を備える真空洗浄装置
EQ3について、その動作内容を説明する。 (1)非洗浄時の動作(蒸留再生)先ず、洗浄槽1には
被洗浄物が投入されておらず、洗浄槽1の開閉蓋1aが
開放状態である場合について説明する。この真空洗浄装
置EQ3では、開閉弁VI は、被洗浄物を真空乾燥する
場合を除いて、常に開放状態になっているので、非洗浄
時にも、次の蒸留再生動作が行われることになる。な
お、このとき、開閉バルブVE ,VF ,VB ,VC ,V
A,VG は全て閉鎖状態である。減圧槽3と蒸気発生槽
4とは、真空ポンプ5によって所定の真空度にまで減圧
されているので、高沸点の洗浄液を用いた場合でも、比
較的低い温度において、蒸気発生槽4の洗浄液が沸騰す
ることになる。そして、沸騰した洗浄液は、減圧槽3に
導入された後、冷却機構3aにおいて液化されて蒸留再
生される。このとき、開閉バルブVH は、開放されてい
るので、蒸留再生された洗浄液は、減圧槽3から加温槽
2に回収される。また、加温槽2から蒸気発生槽4に
は、自動的に洗浄液が補給されるので、結局、蒸気発生
槽4→減圧槽3→加温槽2→蒸気発生槽4の蒸留再生ラ
インが構築されることになる。なお、真空ポンプ5に吸
引された洗浄蒸気は、コールドトラップ6の冷却機構6
aにおいて液化されて加温槽2に回収される。Next, the operation of the vacuum cleaning apparatus EQ3 having the above configuration will be described. (1) Non-Washing Operation (Distillation Regeneration) First, a case will be described in which the object to be cleaned is not put into the cleaning tank 1 and the opening / closing lid 1a of the cleaning tank 1 is open. In the vacuum cleaning apparatus EQ3, on-off valve V I, except when vacuum drying the article to be cleaned, so is always open, even during non-cleaning, so that the subsequent distillation reproducing operation is carried out . At this time, the opening and closing valves V E, V F, V B , V C, V
A, V G are all closed. Since the pressure in the depressurizing tank 3 and the steam generating tank 4 is reduced to a predetermined degree of vacuum by the vacuum pump 5, even when a high-boiling-point cleaning liquid is used, the cleaning liquid in the steam generating tank 4 is kept at a relatively low temperature. It will boil. Then, the boiling cleaning solution is introduced into the decompression tank 3 and then liquefied in the cooling mechanism 3a and is distilled and regenerated. At this time, since the opening / closing valve V H is open, the cleaning liquid regenerated by distillation is recovered from the decompression tank 3 to the heating tank 2. Further, since the cleaning liquid is automatically replenished from the heating tank 2 to the steam generation tank 4, a distillation regeneration line of the steam generation tank 4 → the depressurization tank 3 → the heating tank 2 → the steam generation tank 4 is eventually constructed. Will be done. The cleaning steam sucked by the vacuum pump 5 is supplied to the cooling mechanism 6 of the cold trap 6.
The liquid is liquefied in a and collected in the heating tank 2.
【0017】(2)浸漬洗浄時の動作(浸漬洗浄+蒸留
再生) 被洗浄物を浸漬洗浄する場合には、洗浄槽1の中に被
洗浄物を投入して開閉蓋1aを密閉した後、先ず、開閉
バルブVE を開放する。なお、このとき、開閉バルブV
I ,VH は開放状態であり、開閉バルブVF ,VB ,V
C ,VA ,VGは全て閉鎖状態である。開閉バルブVE
を開放すると、洗浄槽1の空気は、真空ポンプ5によっ
て吸引されるので、圧力計8の計測値に基づいて、洗浄
槽1の真空度が加温槽2と同程度になるまで減圧する。
このようにして、洗浄槽1と加温槽2の真空度を同一に
すると、その後、開閉弁VA ,VG を開放すると、加温
槽2から洗浄槽1に洗浄液が自然流入されることにな
る。なお、上記の説明では、開閉バルブVE を開放して
洗浄槽1を減圧したが、これに変えて、開閉バルブ
VB ,VC ,VG のいずれかを開放して、洗浄槽1を減
圧するのでも良い。 開閉バルブVA ,VG を開放して被洗浄物WRを浸す
まで洗浄液を満たしたら、次に、開閉バルブVB を開い
て循環ポンプ7の運転を開始して洗浄液を循環させる。 所定時間の浸漬洗浄処理が完了すると、最初に、開閉
バルブVA を閉じて洗浄液の供給を止める。そして、洗
浄槽1の洗浄液が空になると、開閉バルブVB,VG を
閉じて循環ポンプ7の運転を停止する。なお、これら
〜の動作中、蒸気発生槽4→減圧槽3→加温槽2→蒸
気発生槽4の蒸留再生ラインは連続して機能している。(2) Immersion Cleaning Operation (Immersion Cleaning + Distillation Regeneration) In the case of immersion cleaning of an object to be cleaned, the object to be cleaned is put into the cleaning tank 1 and the opening / closing lid 1a is closed. First, the opening / closing valve VE is opened. At this time, the open / close valve V
I, V H is an open state, the opening and closing valve V F, V B, V
C, V A, V G are all closed. Open / close valve V E
Is released, the air in the washing tank 1 is sucked by the vacuum pump 5, and the pressure in the washing tank 1 is reduced based on the value measured by the pressure gauge 8 until the degree of vacuum in the washing tank 1 becomes almost equal to that of the heating tank 2.
In this way, when the vacuum degree of the cleaning tank 1 and the heating tank 2 to the same, then off valves V A, when opening the V G, the cleaning liquid is naturally flows from the heating tank 2 to the cleaning vessel 1 become. In the above description it has been depressurized cleaning tank 1 by opening and closing valve V E, instead of this, the opening and closing valve V B, V C, by opening one of V G, the cleaning tank 1 The pressure may be reduced. Off valves V A, When meet washings to open the V G immersing the object to be cleaned WR, then starts the operation of the circulation pump 7 for circulating the cleaning liquid by opening and closing valve V B. When the immersion cleaning process for a predetermined time is completed, first, the opening and closing valve VA is closed to stop the supply of the cleaning liquid. When the cleaning liquid in the cleaning tank 1 is empty, the opening and closing valve V B, to close the V G to stop the operation of the circulation pump 7. In addition, during these operations, the distillation regeneration line of the steam generation tank 4 → the decompression tank 3 → the heating tank 2 → the steam generation tank 4 functions continuously.
【0018】(3)真空乾燥時の動作 浸漬洗浄の動作が完了すると、開閉バルブVI ,VH
を閉じると共に、開閉バルブVC を開放する。なお、開
閉バルブVG ,VA ,VB ,VF ,VE は、既に閉鎖さ
れている。開閉バルブVC が開放されたことにより、洗
浄槽1は、更に減圧されることになり、加温状態の被洗
浄物に付着している洗浄液は、真空乾燥されることにな
る。そして、減圧槽3に導入された洗浄蒸気は、冷却機
構3aによって凝縮化される。 上記の処理によって、ある程度の真空乾燥が完了した
ら、その後、開閉バルブVE を開放して、洗浄槽1をさ
らに減圧して、被洗浄物を迅速かつ確実に乾燥させる。
なお、このとき、開閉弁VC などを閉鎖しても良い。 真空乾燥の処理が終われば、開閉弁VE ,VC を閉じ
た後、開閉弁VF を開放して洗浄槽1の減圧状態を解除
する。これにより被洗浄物の取り出しが可能となり、ま
た、開閉弁VE ,VC を閉じた後、開閉弁VI とVH を
開放すれば、前述した蒸留再生動作が再開される。(3) Operation at the time of vacuum drying When the operation of immersion cleaning is completed, the open / close valves V I and V H
With the closing, opening and closing valve V C. Incidentally, the opening and closing valve V G, V A, V B , V F, V E is already closed. By opening and closing valve V C is opened, the cleaning tank 1 is made to be further reduced pressure cleaning liquid attached to the object to be cleaned in a heated state will be vacuum dried. Then, the cleaning steam introduced into the decompression tank 3 is condensed by the cooling mechanism 3a. By the above process and when complete a certain degree of vacuum drying, then, by opening the closing valve V E, the cleaning tank 1 further under reduced pressure, to quickly and reliably dry the washload.
At this time, it may be closed opening and closing valve V C. After completion the process of vacuum drying, the on-off valve V E, after closing the V C, to release the vacuum of the cleaning tank 1 by opening the on-off valve V F. This enables the removal of the object to be cleaned, also on-off valve V E, after closing the V C, if opening the on-off valve V I and V H, distillation regeneration operation described above is resumed.
【0019】[0019]
【発明の効果】以上説明したように、請求項1に係る真
空洗浄装置では、洗浄槽と加温槽と蒸留再生槽とが減圧
状態にあるので、可燃性溶剤であっても引火点以上に加
温することができる。そして、適度に加温された洗浄液
が供給されるので、洗浄液の洗浄力を向上させることが
できる。また、加温された洗浄液によって洗浄される過
程で被洗浄物が自動的に加温されるので、直ちに、以降
の真空乾燥に迅速に移行することができる。つまり、浸
漬洗浄の後に、改めて温風乾燥や蒸気加温する必要がな
く、最も効率の良い加熱方法である。また、請求項1に
係る真空洗浄装置は、洗浄槽と加温槽と蒸気発生槽とを
備えるので、洗浄動作を行いながら、同時に蒸留再生す
ることができて設備の簡素化を図ることができる。な
お、減圧機構は1つで足りるので、この点でも優れてい
る。請求項2に係る真空洗浄装置は、洗浄槽と加温槽と
減圧槽の3槽だけで構成されており簡素な設備でありな
がら、蒸留再生と蒸気洗浄と真空乾燥とを実現すること
が可能となる。また、加温槽と洗浄槽の内部に加熱機構
を備えているので、加温槽から供給された洗浄液を迅速
に沸騰させることができる。As described above, in the vacuum cleaning apparatus according to the first aspect, since the cleaning tank, the heating tank, and the distillation / regeneration tank are in a reduced pressure state, even if the solvent is a flammable solvent, it exceeds the flash point. Can be warmed. Since the appropriately heated cleaning liquid is supplied, the cleaning power of the cleaning liquid can be improved. In addition, since the object to be cleaned is automatically heated in the course of being cleaned by the heated cleaning liquid, it is possible to immediately shift to the subsequent vacuum drying immediately. In other words, there is no need to newly perform hot air drying or steam heating after immersion cleaning, and this is the most efficient heating method. Further, since the vacuum cleaning apparatus according to the first aspect includes the cleaning tank, the heating tank, and the steam generation tank, it is possible to simultaneously perform the distillation and regeneration while performing the cleaning operation, thereby simplifying the equipment. . In addition, since only one pressure reducing mechanism is sufficient, this point is also excellent. The vacuum cleaning apparatus according to claim 2 is composed of only three tanks, i.e., a cleaning tank, a heating tank, and a decompression tank, and can realize distillation regeneration, steam cleaning, and vacuum drying while being simple equipment. Becomes In addition, since the heating mechanism is provided inside the heating tank and the cleaning tank, the cleaning liquid supplied from the heating tank can be quickly boiled.
【図1】第1実施例に係る真空洗浄装置について、蒸留
再生の動作を説明する図面である。FIG. 1 is a drawing for explaining the operation of distillation regeneration in a vacuum cleaning apparatus according to a first embodiment.
【図2】第1実施例に係る真空洗浄装置について、浸浸
洗浄の動作を説明する図面である。FIG. 2 is a drawing for explaining the operation of immersion cleaning in the vacuum cleaning apparatus according to the first embodiment.
【図3】第1実施例に係る真空洗浄装置について、真空
乾燥の動作を説明する図面である。FIG. 3 is a drawing for explaining the vacuum drying operation of the vacuum cleaning apparatus according to the first embodiment.
【図4】第2実施例に係る真空洗浄装置について、蒸留
再生の動作を説明する図面である。FIG. 4 is a view for explaining the operation of distillation regeneration in a vacuum cleaning apparatus according to a second embodiment.
【図5】第2実施例に係る真空洗浄装置について、蒸気
洗浄の動作を説明する図面である。FIG. 5 is a view for explaining an operation of steam cleaning in a vacuum cleaning apparatus according to a second embodiment.
【図6】第2実施例に係る真空洗浄装置について、真空
乾燥の動作を説明する図面である。FIG. 6 is a drawing for explaining the vacuum drying operation of the vacuum cleaning apparatus according to the second embodiment.
【図7】第3実施例に係る真空洗浄装置の構成を略記し
た図面である。FIG. 7 is a diagram schematically illustrating a configuration of a vacuum cleaning apparatus according to a third embodiment.
EQ1 真空洗浄装置 EQ2 真空洗浄装置 EQ3 真空洗浄装置 1 洗浄槽 2 加温槽 3 減圧槽 4 蒸留再生槽(蒸気発生槽) 5 減圧機構(真空ポンプ) 5A 第1の減圧機構(真空ポンプ) 5B 第2の減圧機構(真空ポンプ) 7 循環機構(循環ポンプ) 7A 洗浄液回収機構(回収ポンプ) 9 第1の加熱機構 10 第2の加熱機構 14 第2の加熱機構 EQ1 Vacuum cleaning device EQ2 Vacuum cleaning device EQ3 Vacuum cleaning device 1 Cleaning tank 2 Heating tank 3 Decompression tank 4 Distillation regeneration tank (steam generation tank) 5 Decompression mechanism (vacuum pump) 5A First decompression mechanism (vacuum pump) 5B 2 decompression mechanism (vacuum pump) 7 circulation mechanism (circulation pump) 7A cleaning liquid recovery mechanism (recovery pump) 9 first heating mechanism 10 second heating mechanism 14 second heating mechanism
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平7−185202(JP,A) 特開 平6−269604(JP,A) 特開 平7−54174(JP,A) 特開 平7−166385(JP,A) 特開 平7−171301(JP,A) 特開 平5−78876(JP,A) 特開 平6−15239(JP,A) 特開 平7−80422(JP,A) 特開 昭52−12779(JP,A) 特開 平7−227581(JP,A) 特開 平5−179473(JP,A) 特開 平6−31103(JP,A) 実開 平7−17377(JP,U) 実開 平3−128478(JP,U) 特許2708844(JP,B2) 特公 平3−49633(JP,B2) 特公 平1−46162(JP,B2) (58)調査した分野(Int.Cl.6,DB名) B08B 3/00 - 3/14 C23G 5/00 - 5/04──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-7-185202 (JP, A) JP-A-6-269604 (JP, A) JP-A-7-54174 (JP, A) JP-A-7-185 166385 (JP, A) JP-A-7-171301 (JP, A) JP-A-5-78876 (JP, A) JP-A-6-15239 (JP, A) JP-A-7-80422 (JP, A) JP-A-52-12779 (JP, A) JP-A-7-227581 (JP, A) JP-A-5-179473 (JP, A) JP-A-6-31103 (JP, A) (JP, U) JP-A-3-128478 (JP, U) JP2708844 (JP, B2) JP-B3-49633 (JP, B2) JP-B1-46162 (JP, B2) (58) Field (Int.Cl. 6 , DB name) B08B 3/00-3/14 C23G 5/00-5/04
Claims (2)
浄物の浸漬洗浄および真空乾燥に用いる洗浄槽(1)
と、 第1の加熱機構(9)を備えて、加温状態の洗浄液を貯
留している加温槽(2)と、 前記加温槽からの洗浄液を受け、これを第2の加熱機構
(10)によって更に加熱して沸騰させた後、冷却機構
(4a)によって液化凝縮する蒸留再生槽(4)と、 前記減圧機構(5)に接続されて減圧されていると共
に、前記加温槽に接続されていることにより、前記蒸留
再生槽を減圧状態に維持する減圧槽(3)と、 前記洗浄槽および前記加温槽に接続され、前記加温槽に
貯留されている加温状態の洗浄液を前記洗浄槽に供給す
る一方、前記洗浄槽の洗浄液を前記加温槽に回収する循
環機構(7)と、 を備えることを特徴とする真空洗浄装置。A cleaning tank (1) connected to a pressure reducing mechanism (5) and used for immersion cleaning and vacuum drying of an object to be cleaned.
A heating tank (2) that includes a first heating mechanism (9) and stores a cleaning liquid in a heated state; and receives a cleaning liquid from the heating tank and supplies the cleaning liquid to the second heating mechanism ( After further heating and boiling by 10), the distillation regeneration tank (4), which is liquefied and condensed by the cooling mechanism (4a); By being connected, a decompression tank (3) for maintaining the distillation regeneration tank in a decompressed state, and a heated cleaning liquid connected to the cleaning tank and the heating tank and stored in the heating tank. And a circulation mechanism (7) for supplying the cleaning solution to the heating bath while supplying the cleaning solution to the heating bath.
態の洗浄液を貯留している加温槽(2)と、 第2の加熱機構(14)を備えると共に、第1の減圧機
構(5A)に接続されている洗浄槽(1)と、 第2の減圧機構(5B)に接続されて減圧されていると
共に、前記洗浄槽および前記加温槽に接続されていて、
前記洗浄槽からの洗浄蒸気を蒸留再生して前記加温槽に
供給する減圧槽(3)と、 前記洗浄槽の洗浄液を前記加温槽に回収する洗浄液回収
機構(7)とを備えており、 非洗浄時と蒸気洗浄時には、前記加温槽の洗浄液が前記
洗浄槽に供給されて沸騰された後、この洗浄蒸気が前記
減圧槽においてが液化回収される一方、 真空乾燥時には、前記洗浄液回収機構によって洗浄液が
回収された後、適宜なタイミングで前記第1の減圧機構
(5A)が機能して、洗浄槽の真空度を上げることによ
って被洗浄物を迅速に乾燥させるようにしたことを特徴
とする真空洗浄装置。2. A heating tank (2) which includes a first heating mechanism (9) and stores a cleaning liquid in a heated state, and a second heating mechanism (14). A cleaning tank (1) connected to a pressure reducing mechanism (5A), a pressure reducing mechanism connected to a second pressure reducing mechanism (5B), and connected to the cleaning tank and the heating tank;
A decompression tank (3) for distilling and regenerating the cleaning steam from the cleaning tank and supplying it to the heating tank; and a cleaning liquid recovery mechanism (7) for collecting the cleaning liquid in the cleaning tank to the heating tank. During non-cleaning and steam cleaning, the cleaning liquid in the heating tank is supplied to the cleaning tank and boiled, and then the cleaning steam is liquefied and recovered in the decompression tank. After the cleaning liquid is collected by the mechanism, the first pressure reducing mechanism (5A) functions at an appropriate timing to quickly dry the object to be cleaned by increasing the degree of vacuum in the cleaning tank. And vacuum cleaning equipment.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24126396A JP2838688B2 (en) | 1996-08-22 | 1996-08-22 | Vacuum cleaning device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24126396A JP2838688B2 (en) | 1996-08-22 | 1996-08-22 | Vacuum cleaning device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH1057909A JPH1057909A (en) | 1998-03-03 |
JP2838688B2 true JP2838688B2 (en) | 1998-12-16 |
Family
ID=17071657
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24126396A Expired - Lifetime JP2838688B2 (en) | 1996-08-22 | 1996-08-22 | Vacuum cleaning device |
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JP (1) | JP2838688B2 (en) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4574083B2 (en) * | 2001-08-20 | 2010-11-04 | 株式会社三社電機製作所 | Cleaning device |
JP2003236479A (en) * | 2001-12-14 | 2003-08-26 | Jh Corp | Method and apparatus for vacuum degreasing and washing |
EP2260953A4 (en) * | 2008-04-02 | 2012-07-04 | Infinity Entpr Inc | Cleaning system |
JP5541498B2 (en) * | 2010-03-10 | 2014-07-09 | 三浦工業株式会社 | Cleaning device |
JP2012061392A (en) * | 2010-09-14 | 2012-03-29 | Keiji Nakaya | Method for treating aluminum waste |
CN103128074B (en) * | 2011-11-25 | 2016-06-22 | 株式会社Ihi | Vacuum cleaner and vacuum cleaned method |
JP6014630B2 (en) | 2014-06-30 | 2016-10-25 | 株式会社Ihi | Cleaning device |
WO2016002811A1 (en) | 2014-06-30 | 2016-01-07 | 株式会社Ihi | Condenser and washing device |
JP6242032B1 (en) * | 2017-06-15 | 2017-12-06 | ジャパン・フィールド株式会社 | Vacuum distillation recovery equipment for cleaning solvent |
JP7093112B2 (en) * | 2019-03-29 | 2022-06-29 | アクア化学株式会社 | Cleaning liquid regeneration device, cleaning device and cleaning liquid regeneration method |
-
1996
- 1996-08-22 JP JP24126396A patent/JP2838688B2/en not_active Expired - Lifetime
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JPH1057909A (en) | 1998-03-03 |
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