JP2809068B2 - Substrate with anti-reflective coating - Google Patents
Substrate with anti-reflective coatingInfo
- Publication number
- JP2809068B2 JP2809068B2 JP27217293A JP27217293A JP2809068B2 JP 2809068 B2 JP2809068 B2 JP 2809068B2 JP 27217293 A JP27217293 A JP 27217293A JP 27217293 A JP27217293 A JP 27217293A JP 2809068 B2 JP2809068 B2 JP 2809068B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- substrate
- sio
- mixed
- tio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
- Gas-Filled Discharge Tubes (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、蛍光表示管・プラズマ
ディスプレイ・電界発光表示装置等の各種表示装置乃至
これらの原理を用いた光源において有用な反射防止膜付
基板に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to various display devices such as a fluorescent display tube, a plasma display and an electroluminescent display device, and a substrate having an antireflection film useful in a light source using these principles.
【０００２】[0002]
【従来の技術】蛍光表示管の外囲器において、その表示
面側の基板に反射防止膜を設けたものが知られている。
特開昭６３−２１３２４５号公報には、透光性の前面基
板の内面に形成された陽極の発光表示を、該前面基板を
介して観察する前面発光形の蛍光表示管において、該前
面基板に反射防止膜を設けた例が記載されている。2. Description of the Related Art There is known an envelope of a fluorescent display tube in which an antireflection film is provided on a substrate on the display surface side.
JP-A-63-213245 discloses a front emission type fluorescent display tube in which a light emitting display of an anode formed on an inner surface of a light-transmitting front substrate is observed through the front substrate. An example in which an antireflection film is provided is described.
【０００３】この蛍光表示管は、図４に示すように、ソ
ーダライムガラスから成る透光性の基板を前面基板１０
０としている。前面基板１００の内面には透光性のある
ＴｉＯ2 膜１０１が形成され、さらにその上には所定パ
ターンの導体１０２がＡｌによって形成されている。図
示はしないが、この所定パターンの導体１０２の部分に
は蛍光体が被着され、この導体１０２を除く前面基板１
００上には絶縁層が被着されている。そして、前記Ｔｉ
Ｏ2 膜１０１は、Ａｌの前記導体１０２に接している部
分が熱処理によって有色化して反射防止膜となり、蛍光
体の発光を前面基板１００の外側から観察した際の視認
性を向上させている。[0003] As shown in FIG. 4, a translucent substrate made of soda lime glass is provided on a front substrate 10 as shown in FIG.
It is set to 0. A translucent TiO 2 film 101 is formed on the inner surface of the front substrate 100, and a conductor 102 having a predetermined pattern is further formed thereon by Al. Although not shown, a fluorescent substance is applied to the portion of the conductor 102 having the predetermined pattern, and the front substrate 1 excluding the conductor 102 is provided.
On 00, an insulating layer is applied. And the Ti
In the O 2 film 101, the portion of the Al that is in contact with the conductor 102 is colored by the heat treatment to form an anti-reflection film, thereby improving the visibility of the emission of the phosphor when observed from outside the front substrate 100.
【０００４】[0004]
【発明が解決しようとする課題】前述したＴｉＯ2 膜の
単層構造では、反射防止の機能は得られるが、ソーダラ
イムガラスに対するアルカリ遮蔽膜としての効果は得ら
れない。ソーダライムガラスに含まれるＮａ2 Ｏ3 が電
解するとＮａ+ イオンが生じてマイナス電極側に移動
し、前記絶縁層中のＰｂＯを還元してＰｂを樹枝状に析
出させる。これは鉛樹と呼ばれ、絶縁層の絶縁抵抗を低
下させる原因となる。またＮａの拡散により、蛍光体が
劣化してしまうこともある。このような不都合の原因と
なるアルカリイオンの拡散を、従来のＴｉＯ2 膜の単層
構造で抑えることはできなかった。The above-described single-layer structure of the TiO 2 film provides an antireflection function, but does not provide an effect as an alkali shielding film for soda lime glass. When Na 2 O 3 contained in the soda lime glass is electrolyzed, Na + ions are generated and move to the negative electrode side, and PbO in the insulating layer is reduced to precipitate Pb in a dendritic manner. This is called a lead tree and causes the insulation resistance of the insulating layer to decrease. Further, the phosphor may be deteriorated due to the diffusion of Na. Diffusion of alkali ions causing such inconvenience could not be suppressed by the conventional single-layer structure of the TiO 2 film.
【０００５】本発明は、アルカリ遮蔽効果と反射防止効
果を兼備した反射防止膜付基板を提供することを目的と
している。An object of the present invention is to provide a substrate with an antireflection film having both an alkali shielding effect and an antireflection effect.
【０００６】[0006]
【課題を解決するための手段】請求項１に記載された反
射防止膜付基板は、透光性の基板と、前記基板上に形成
されたＳｉＯ2 膜と、前記ＳｉＯ2 膜上に形成されたＴ
ｉ，Ｗ，Ｍｏ，Ｖ，Ｎｂから選ばれた金属の酸化物とＳ
ｉＯ2 との混合膜と、前記混合膜上に形成された金属薄
膜から成る導体パターン層とを有し、前記導体パターン
層に相対する前記混合膜が有色化されていることを特徴
とする。Means for Solving the Problems] antireflection film-substrate according to claim 1 includes a light-transmitting substrate, and SiO 2 film formed on the substrate, is formed on the SiO 2 film T
oxides of metals selected from i, W, Mo, V, Nb and S
It has a mixed film with iO 2 and a conductive pattern layer made of a metal thin film formed on the mixed film, wherein the mixed film facing the conductive pattern layer is colored.
【０００７】請求項２に記載された反射防止膜付基板
は、請求項１記載の反射防止膜付基板において、前記金
属の酸化物がＴｉＯ2 であり、前記混合膜中のＳｉＯ2
の混合量が３〜１５％であることを特徴としている。According to a second aspect of the present invention, there is provided the substrate with an anti-reflection film according to the first aspect, wherein the oxide of the metal is TiO 2 , and SiO 2 in the mixed film is used.
Is 3 to 15%.
【０００８】[0008]
【作用】金属の酸化物とＳｉＯ2 から成る反射防止膜と
しての混合膜は、金属の酸化物のみから成る従来の反射
防止膜よりも強度が高く、透光性の基板上に形成された
ＳｉＯ2 膜から剥がれにくい。ＳｉＯ2 膜はアルカリ遮
蔽作用を有する。The mixed film as an antireflection film composed of a metal oxide and SiO 2 has higher strength than a conventional antireflection film composed of only a metal oxide, and is formed on a light-transmitting substrate. 2 It is hard to peel off from the film. The SiO 2 film has an alkali shielding effect.
【０００９】[0009]
【実施例】本発明者は、アルカリ遮蔽効果と反射防止効
果を同時に実現する従来知られていない手段として、ま
ずアルカリ遮蔽膜と反射防止膜を積層させる着想を得
た。しかしながら、従来のアルカリ遮蔽膜であるＳｉＯ
2 膜の上に、単にＴｉＯ2 膜を形成しただけでは、Ａｌ
をパターニングする工程においてＴｉＯ2 膜が剥離して
しまい、反射防止効果が得られなくなるという問題点が
あることが判明した。そこで本発明者は、さらに鋭意研
究を続けた結果、このような問題点を解決する手段を見
いだすに至ったのである。以下に、図１〜図３と表１及
び表２を参照して本発明の一実施例を説明する。本実施
例は、発光素子である蛍光表示管の外囲器に有用な反射
防止膜付基板１に関する。DESCRIPTION OF THE PREFERRED EMBODIMENTS The inventor of the present invention has firstly obtained an idea of laminating an alkali shielding film and an antireflection film as a previously unknown means for simultaneously realizing an alkali shielding effect and an antireflection effect. However, the conventional alkali shielding film of SiO
By simply forming a TiO 2 film on the two films,
It has been found that there is a problem that the TiO 2 film is peeled off in the step of patterning, and the antireflection effect cannot be obtained. The inventor of the present invention has conducted further studies and has found a means for solving such a problem. An embodiment of the present invention will be described below with reference to FIGS. 1 to 3 and Tables 1 and 2. The present embodiment relates to a substrate 1 having an antireflection film useful for an envelope of a fluorescent display tube as a light emitting element.
【００１０】図１に示すように、ソーダライムガラスか
ら成る透光性の基板２の上には、アルカリ遮蔽膜として
ＳｉＯ2 膜３が形成されている。このＳｉＯ2 膜３は、
従来のＳｉＯ2 膜３と異なり塩素を含まない。ＳｉＯ2
膜中の塩素は焼成工程において基板中のＮａイオンを引
き寄せてしまい、前述したような鉛樹等の問題を発生さ
せる。そこで、本実施例ではＳｉＯ2 形成液を製造する
際に、ＨＣｌを用いて原料物質を加水分解する工程をと
らず、製品中にＣｌが汚染物質として残留しないように
配慮した。As shown in FIG. 1, an SiO 2 film 3 is formed as an alkali shielding film on a translucent substrate 2 made of soda lime glass. This SiO 2 film 3
Unlike the conventional SiO 2 film 3, it does not contain chlorine. SiO 2
Chlorine in the film attracts Na ions in the substrate in the firing step, and causes the above-described problems such as lead trees. Therefore, in the present embodiment, when producing the SiO 2 forming liquid, a step of hydrolyzing the raw material using HCl was not taken, and care was taken not to leave Cl as a contaminant in the product.
【００１１】具体的には、テトラエトキシシランのモノ
マー（Ｃ2 Ｈ5 Ｏ）4 Ｓｉに水を加え、さらに加水分解
反応と縮合反応を早めるための触媒として、Ｃｌを含ま
ない酸、例えばプロピオン酸や酢酸等の有機酸を加え
る。かかる反応を室温で攪拌しながら行わせ、形成液を
得る。これをロールコータ等を用いて前記基板２に塗布
して成膜し、これを乾燥した後５００〜５４０℃で焼成
する。形成液中に含まれていた有機酸は燃焼して分解
し、基板の表面にはＣｌを含まない有機ＳｉＯ2 ポリマ
ーから成るアルカリ遮蔽膜が得られる。More specifically, water is added to tetraethoxysilane monomer (C 2 H 5 O) 4 Si, and an acid containing no Cl such as propionic acid is used as a catalyst for accelerating the hydrolysis and condensation reactions. And an organic acid such as acetic acid. This reaction is carried out at room temperature with stirring to obtain a forming solution. This is applied to the substrate 2 using a roll coater or the like to form a film, which is dried and then fired at 500 to 540 ° C. The organic acid contained in the forming solution is decomposed by burning, and an alkali shielding film made of an organic SiO 2 polymer containing no Cl is obtained on the surface of the substrate.
【００１２】前記ＳｉＯ2 膜３の厚さは本実施例では１
０００〜２０００オングストロームとした。この厚さ
は、形成液の粘度で調整できる。形成液の粘度を高くす
れば膜厚は大きくなり、粘度を小さくすれば膜厚も小さ
くなる。The thickness of the SiO 2 film 3 is 1 in this embodiment.
2,000 to 2,000 angstroms. This thickness can be adjusted by the viscosity of the forming liquid. The film thickness increases as the viscosity of the forming liquid increases, and the film thickness decreases as the viscosity decreases.
【００１３】次に、前記基板２上に形成されたＳｉＯ2
膜３の上には、金属の酸化物と前述したＳｉＯ2 を含む
混合膜４が形成されている。混合膜４の厚さは３００〜
５００オングストロームである。混合膜４を形成する形
成液は、有機Ｔｉ溶液に、前記有機ＳｉＯ2 ポリマーを
含む形成液を混合して得る。Next, the SiO 2 formed on the substrate 2
On the film 3, a mixed film 4 containing a metal oxide and the above-mentioned SiO 2 is formed. The thickness of the mixed film 4 is 300 to
500 angstroms. The forming liquid for forming the mixed film 4 is obtained by mixing the forming liquid containing the organic SiO 2 polymer with the organic Ti solution.
【００１４】前記有機Ｔｉ溶液を含む有機Ｔｉ化合物と
しては、テトラアルコキシチタンの化合物群としてテト
ライソプロキシチタン（ＴＰＴ）、テトラ−ｎ−プトキ
シチタン（ＴＢＴ）等がある。Examples of the organic Ti compound containing the organic Ti solution include tetraisoproxititanium (TPT) and tetra-n-butoxytitanium (TBT) as a group of tetraalkoxytitanium compounds.
【００１５】このような有機Ｔｉと前述したＳｉＯ2 を
含む形成液を、ロールコータ等を用いて前記ＳｉＯ2 膜
３上に塗布し、成膜する。これを乾燥して焼成すれば、
ＴｉＯ2 とＳｉＯ2 を含む前記混合膜４が得られる。The forming liquid containing such organic Ti and the above-mentioned SiO 2 is applied onto the SiO 2 film 3 using a roll coater or the like to form a film. If this is dried and fired,
The mixed film 4 containing TiO 2 and SiO 2 is obtained.
【００１６】次に、前記混合膜４の上には、Ａｌから成
る導体パターン層５が形成されている。この導体パター
ン層５は、前記混合膜４の上にスパッタ法でＡｌ膜をべ
たに形成し、これをフォトリソグラフィ法でパターニン
グして形成する。この導体パターン層５は、蛍光表示管
の基板においては透光性の陽極導体となる部分であり、
この上に蛍光体が被着される。Next, a conductive pattern layer 5 made of Al is formed on the mixed film 4. The conductor pattern layer 5 is formed by forming an Al film on the mixed film 4 by a sputtering method and patterning the solid film by a photolithography method. The conductor pattern layer 5 is a portion that becomes a translucent anode conductor on the substrate of the fluorescent display tube,
A phosphor is deposited on this.
【００１７】本実施例において、ＳｉＯ2 膜３と混合膜
４と導電パターン層５が積層された前記基板２は、蛍光
表示管の製造における焼成工程等において焼成される。
これによって、高温で活性化されたＡｌが混合膜４中の
ＴｉＯ2 の酸素の一部を奪う。このため透明なＴｉＯ2
の内、導電パターン層５に相対した部分は還元されて有
色化している。In this embodiment, the substrate 2 on which the SiO 2 film 3, the mixed film 4, and the conductive pattern layer 5 are laminated is fired in a firing step in the manufacture of a fluorescent display tube.
As a result, Al activated at a high temperature takes away a part of the oxygen of TiO 2 in the mixed film 4. For this reason, transparent TiO 2
Of these, the portion facing the conductive pattern layer 5 is reduced and colored.
【００１８】本実施例によれば、（Ｔｉ，Ｓｉ）Ｏ2 を
含む混合膜４は、ＳｉＯ2 膜３に対して剥離しにくい。
これは、一つにはＳｉＯ2 膜３に接する混合膜４の境界
面にもＳｉＯ2 膜が形成され、両膜が境界面においてよ
くなじんでいるからであると考えられる。また、ＴｉＯ
2 膜にＳｉＯ2 が混合すると、全体としての膨張係数は
ＴｉＯ2 の膨張係数からより低いＳｉＯ2 の膨張係数に
近づく。このため、従来の反射防止膜であるＴｉＯ2 が
蛍光表示管の駆動時等の温度上昇によって剥がれ易かっ
たのに対し、より膨張係数の小さい本実施例の混合膜４
は基板２との膨張係数の違いによって剥がれにくいもの
と考えられる。さらに、混合膜の方が、ＴｉＯ2 のみの
膜よりも強度が高いためもあると考えられる。According to the present embodiment, the mixed film 4 containing (Ti, Si) O 2 is hardly peeled off from the SiO 2 film 3.
This is considered to be because the SiO 2 film is also formed on the boundary surface of the mixed film 4 which is in contact with the SiO 2 film 3, and both films are well adapted at the boundary surface. Also, TiO
When SiO 2 is mixed in the two films, the overall expansion coefficient approaches the lower SiO 2 expansion coefficient from the TiO 2 expansion coefficient. For this reason, while the conventional antireflection film TiO 2 was easily peeled off due to a rise in temperature during driving of the fluorescent display tube or the like, the mixed film 4 of this embodiment having a smaller expansion coefficient was used.
Is considered to be difficult to peel off due to a difference in expansion coefficient from the substrate 2. Further, it is considered that the strength of the mixed film is higher than that of the film containing only TiO 2 .
【００１９】また、本実施例によれば、Ｃｌを含まない
ＳｉＯ2 膜３はアルカリ遮蔽膜として高い効果を有し、
蛍光表示管の基板に応用した場合に従来問題となってい
た鉛樹等の不都合は解消された。According to this embodiment, the SiO 2 film 3 containing no Cl has a high effect as an alkali shielding film,
The inconvenience of a lead tree or the like, which has been a problem in the past when applied to a substrate of a fluorescent display tube, has been solved.
【００２０】次に、前記実施例における混合膜４のより
具体的な構成例及びその作用効果について説明する。次
に示す表１は、前記混合膜を形成する際の形成液におけ
る有機Ｓｉの重量％と、混合膜表面におけるＳｉのＴｉ
に対する存在比と、混合膜表面におけるＮａのＴｉに対
する存在比との関係を、従来のＴｉＯ2 膜との対比にお
いて示したものである。Next, a more specific configuration example of the mixed film 4 in the above embodiment and its function and effect will be described. Table 1 below shows the weight percent of organic Si in the forming solution when forming the mixed film and the Ti of Si on the surface of the mixed film.
And the relationship between the abundance ratio of Na and Ti on the surface of the mixed film in comparison with a conventional TiO 2 film.
【００２１】[0021]
【表１】 [Table 1]
【００２２】表１から明らかなように、Ｓｉの調合割合
が多くなる程、混合膜の表面にＳｉＯ2 が多くなる。従
って、前述したようにアルカリ遮蔽膜である前記ＳｉＯ
2 膜とのなじみが良くなると考えられる。As is clear from Table 1, as the proportion of Si increases, the amount of SiO 2 on the surface of the mixed film increases. Therefore, as described above, the alkali shielding film SiO 2
It is considered that the compatibility with the two films is improved.
【００２３】表１の右欄及びこれをグラフ化した図２に
示すように、本実施例によれば混合膜の表面におけるＮ
ａの析出量はＴｉ比で０．０４以下であり、従来のＴｉ
Ｏ2膜の場合の０．２１を大幅に下回っており、実用上
問題ないと考えられる比０．１の半分以下の値である。As shown in the right column of Table 1 and FIG. 2 which is a graph thereof, according to the present embodiment, N
a is 0.04 or less in Ti ratio,
The value is much lower than 0.21 in the case of the O 2 film, and is a value of half or less of the ratio 0.1, which is considered to be practically acceptable.
【００２４】一般に基板からのＮａの析出によって蛍光
表示管の蛍光体は劣化し、またカソードが毒化されるた
め、使用につれて蛍光表示管の発光表示輝度は低下して
いく。しかしながら本実施例によれば、前述のようにＮ
ａの析出が従来より抑えられているので、所定時間点灯
後の輝度残存率は高い。実験によれば、１６８時間点灯
した後の輝度残存率は、本実施例を１００％とすると、
従来例は８０％しかなかった。In general, the phosphor of the fluorescent display tube is degraded by the precipitation of Na from the substrate, and the cathode is poisoned, so that the light emitting display luminance of the fluorescent display tube decreases with use. However, according to the present embodiment, as described above, N
Since the precipitation of “a” is suppressed more than before, the luminance remaining ratio after lighting for a predetermined time is high. According to the experiment, the luminance remaining ratio after lighting for 168 hours is 100% in this embodiment.
The conventional example had only 80%.
【００２５】次に示す表２は、前記混合膜を形成する際
の形成液における有機Ｓｉの重量％と、混合膜の膜強度
（ｍＮ）との関係を、従来のＴｉＯ2 膜との対比におい
て示したものである。Table 2 below shows the relationship between the weight percent of organic Si in the forming solution when forming the mixed film and the film strength (mN) of the mixed film in comparison with a conventional TiO 2 film. It is shown.
【００２６】[0026]
【表２】 [Table 2]
【００２７】表１及びこれをグラフ化した図３に示すよ
うに、本実施例によれば混合膜の強度が概ね２５０から
３００付近で一定しており、従来のＴｉＯ2 膜の強度を
大幅に上回っている。従って、前述したようにアルカリ
遮蔽膜である前記ＳｉＯ2 膜３と剥がれにくくなったと
考えられる。As shown in Table 1 and FIG. 3 which is a graph thereof, according to the present embodiment, the strength of the mixed film is substantially constant at about 250 to 300, and the strength of the conventional TiO 2 film is greatly reduced. Better than Therefore, as described above, it is considered that the film was hardly peeled off from the SiO 2 film 3 serving as the alkali shielding film.
【００２８】以上説明した一実施例においては、前記混
合膜４が含む金属酸化物としてＴｉＯ2 を例示した。こ
の他、Ｗ，Ｍｏ，Ｖ，Ｎｂ等の金属の酸化物も本発明に
おける混合膜に使用できる。In the embodiment described above, TiO 2 is exemplified as the metal oxide contained in the mixed film 4. In addition, oxides of metals such as W, Mo, V, and Nb can be used for the mixed film in the present invention.
【００２９】[0029]
【発明の効果】本発明によれば、基板上にアルカリ遮蔽
膜としてＳｉＯ2 膜を設け、その上にＴｉＯ2 等に金属
酸化物とＳｉＯ2 を含む混合膜を反射防止膜として設け
た。このため、基板から析出するＮａ量は従来の約１／
５以下になり、充分なアルカリ遮蔽効果が得られた。According to the present invention, an SiO 2 film is provided as an alkali shielding film on a substrate, and a mixed film containing a metal oxide and SiO 2 on TiO 2 or the like is provided thereon as an antireflection film. Therefore, the amount of Na precipitated from the substrate is about 1 /
5 or less, and a sufficient alkali shielding effect was obtained.
【００３０】また、混合膜は、ＴｉＯ2 膜より強度が強
く、ＴｉＯ2 膜より熱膨張係数が小さいので、ＳｉＯ2
膜に対して剥離しにくく、従来品より良好な反射効果が
得られる。Further, mixed film, than the intensity is strong TiO 2 film, the thermal expansion coefficient than the TiO 2 film is small, SiO 2
The film is hardly peeled off, and a better reflection effect than conventional products can be obtained.
【００３１】更に混合膜は有色化されているので、対面
する金属薄膜の反射率を低下させるという反射防止効果
を有する。Further, since the mixed film is colored, it has an antireflection effect of reducing the reflectance of the metal thin film facing the mixed film.
【図１】本発明の一実施例の断面図である。FIG. 1 is a sectional view of one embodiment of the present invention.
【図２】本発明の一実施例において、混合膜の表面にお
けるＮａ／Ｔｉ比と、形成液における調合割合Ｓｉ／Ｔ
ｉ（％）との関係を示すグラフである。FIG. 2 shows an embodiment of the present invention, in which the ratio of Na / Ti on the surface of the mixed film and the mixing ratio of Si / T in the forming solution.
It is a graph which shows the relationship with i (%).
【図３】本発明の一実施例において、混合膜の膜強度
と、形成液における調合割合Ｓｉ／Ｔｉ（％）との関係
を示すグラフである。FIG. 3 is a graph showing a relationship between a film strength of a mixed film and a blending ratio Si / Ti (%) in a forming solution in one example of the present invention.
【図４】従来の反射防止膜を有する反射防止膜付基板の
断面図である。FIG. 4 is a cross-sectional view of a substrate with an antireflection film having a conventional antireflection film.
１ 反射防止膜付基板 ２ 透光性の基板 ３ ＳｉＯ2 膜 ４ 混合膜 ５ 導電パターン層1 substrate of the antireflection film with the substrate 2 light-transmissive 3 SiO 2 film 4 mixed film 5 conductive pattern layer
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6，ＤＢ名) H01J 5/50 H01J 29/88 H01J 31/12 - 31/15 H01J 17/16──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 6 , DB name) H01J 5/50 H01J 29/88 H01J 31/12-31/15 H01J 17/16
Claims (2)
たＳｉＯ2 膜と、前記ＳｉＯ2 膜上に形成されたＴｉ，
Ｗ，Ｍｏ，Ｖ，Ｎｂから選ばれた金属の酸化物とＳｉＯ
2 との混合膜と、前記混合膜上に形成された金属薄膜か
ら成る導体パターン層とを有し、前記導体パターン層に
相対する前記混合膜が有色化されていることを特徴とす
る反射防止膜付基板。1. A light-transmitting substrate, a SiO 2 film formed on the substrate, and a Ti film formed on the SiO 2 film.
Oxide of metal selected from W, Mo, V, Nb and SiO
2 and a conductive pattern layer made of a metal thin film formed on the mixed film, wherein the mixed film facing the conductive pattern layer is colored. Substrate with film.
記混合膜中のＳｉＯ 2 の混合量が３〜１５％である請求
項１記載の反射防止膜付基板。2. The method according to claim 1, wherein the metal oxide is TiO.TwoAnd before
SiO in the mixed film TwoIs 3 to 15%
Item 2. The substrate with an antireflection film according to Item 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27217293A JP2809068B2 (en) | 1993-10-29 | 1993-10-29 | Substrate with anti-reflective coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27217293A JP2809068B2 (en) | 1993-10-29 | 1993-10-29 | Substrate with anti-reflective coating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07130307A JPH07130307A (en) | 1995-05-19 |
| JP2809068B2 true JP2809068B2 (en) | 1998-10-08 |
Family
ID=17510082
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27217293A Expired - Lifetime JP2809068B2 (en) | 1993-10-29 | 1993-10-29 | Substrate with anti-reflective coating |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2809068B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6718947B1 (en) | 1999-08-20 | 2004-04-13 | Robert Bosch Gmbh | Fuel injection method and systems for an internal combustion engine |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09180657A (en) * | 1995-12-22 | 1997-07-11 | Futaba Corp | Fluorescent character display tube |
| JP3739163B2 (en) | 1997-03-31 | 2006-01-25 | 三菱電機株式会社 | Plasma display panel |
| KR100346422B1 (en) * | 1998-08-26 | 2002-08-01 | 엘지전자주식회사 | Anti-reflection anti-static film |
| WO2000026937A1 (en) | 1998-10-29 | 2000-05-11 | Mitsubishi Denki Kabushiki Kaisha | Ac plane discharge plasma display panel |
| JP2006302747A (en) * | 2005-04-22 | 2006-11-02 | Asahi Glass Co Ltd | Reflection preventive film for field emission display, and field emission display device |
| JP4953169B2 (en) * | 2008-06-13 | 2012-06-13 | 日本電気硝子株式会社 | Support frame forming material |
| CN102159971A (en) | 2008-10-17 | 2011-08-17 | 株式会社爱发科 | Antireflective film formation method, antireflective film, and film formation device |
-
1993
- 1993-10-29 JP JP27217293A patent/JP2809068B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6718947B1 (en) | 1999-08-20 | 2004-04-13 | Robert Bosch Gmbh | Fuel injection method and systems for an internal combustion engine |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07130307A (en) | 1995-05-19 |
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