JP2795574B2 - Method for producing silicon carbide body - Google Patents
Method for producing silicon carbide bodyInfo
- Publication number
- JP2795574B2 JP2795574B2 JP1923592A JP1923592A JP2795574B2 JP 2795574 B2 JP2795574 B2 JP 2795574B2 JP 1923592 A JP1923592 A JP 1923592A JP 1923592 A JP1923592 A JP 1923592A JP 2795574 B2 JP2795574 B2 JP 2795574B2
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- Prior art keywords
- silicon carbide
- crystal
- torr
- pressure
- aluminum
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Description
【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION
【０００１】[0001]
【産業上の利用分野】本発明は、高品質の炭化珪素体の
製造方法に関し、さらに詳しくは、所定の結晶構造に制
御された炭化珪素体の製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a high-quality silicon carbide body, and more particularly, to a method for producing a silicon carbide body having a predetermined crystal structure.
【０００２】[0002]
【従来の技術】炭化珪素は、耐酸性および耐アルカリ性
に優れ、かつ高エネルギー線による損傷を受け難いとい
う耐久性の特に優れた材料であるため、半導体材料をは
じめとする多方面に使用されている。半導体材料への炭
化珪素の使用は、古くは１９６０年代以前から行われて
いる。それは、炭化珪素が、多形（化学組成が同一で結
晶構造が異なることをいう）という特色を有し、その多
形に従って、禁制帯幅を２．２ｅＶから３．３ｅＶまで
任意に選択できるからであり、さらに、半導体デバイス
に用いた場合には、その動作可能な温度領域も他の材料
に比べて極めて範囲が広いからである。2. Description of the Related Art Silicon carbide is a material having excellent resistance to acids and alkalis, and is particularly excellent in durability such that it is not easily damaged by high-energy rays. Therefore, silicon carbide is used in various fields including semiconductor materials. I have. The use of silicon carbide for semiconductor materials has been practiced since the 1960s. This is because silicon carbide has a characteristic of polymorphism (meaning that the chemical composition is the same and the crystal structure is different), and the forbidden band width can be arbitrarily selected from 2.2 eV to 3.3 eV according to the polymorphism. Further, when used in a semiconductor device, the operable temperature range is much wider than other materials.
【０００３】ところで、炭化珪素を産業上利用するため
には、ある程度の大きさを有する高品質な単結晶である
ことが要求される。このため従来、アチェソン法と呼ば
れる化学反応を利用するか、またはレーリー法と呼ばれ
る昇華再結晶法を利用して目的規模の大きさに単結晶を
成長させる方法；あるいはこれらの方法により得られた
炭化珪素の単結晶を基板として用い、その基板上に気相
エピタシャル成長法、あるいは液相エピタキシャル成長
法により炭化珪素を成長させ、目的規模の単結晶を得る
方法が採用されていた。[0003] In order to use silicon carbide industrially, it is required that the silicon carbide be a high-quality single crystal having a certain size. For this reason, conventionally, a method of growing a single crystal to a target scale using a chemical reaction called the Acheson method or a sublimation recrystallization method called the Rayleigh method; or the carbonization obtained by these methods A method has been adopted in which a single crystal of silicon is used as a substrate, and silicon carbide is grown on the substrate by a vapor phase epitaxial growth method or a liquid phase epitaxial growth method to obtain a single crystal of a desired scale.
【０００４】[0004]
【発明が解決しようとする課題】しかし、上述した従来
方法を利用して炭化珪素結晶を得る場合に、多形を十分
に制御できない、つまり抵抗率が一定でありかつ特定の
禁制帯幅を有する、所望の結晶構造を有する炭化珪素が
得られないという欠点がある。However, when a silicon carbide crystal is obtained by using the above-mentioned conventional method, the polymorph cannot be sufficiently controlled, that is, the resistivity is constant and a specific forbidden band width is required. However, there is a disadvantage that silicon carbide having a desired crystal structure cannot be obtained.
【０００５】本発明は、このような課題を解決するため
になされたものであり、その目的とするところは、多形
を充分に制御できる炭化珪素体の製造方法を提供するこ
とにある。[0005] The present invention has been made to solve such problems, and an object of the present invention is to provide a method for producing a silicon carbide body capable of sufficiently controlling polymorphism.
【０００６】[0006]
【課題を解決するための手段】本発明の炭化珪素体の製
造方法は、抵抗率が一定であり、所定の結晶構造を有す
る均質性の高いバルク炭化珪素結晶の製造を目的として
いる。SUMMARY OF THE INVENTION The object of the present invention is to provide a method for producing a silicon carbide body having a constant resistivity and a predetermined crystal structure and having high homogeneity.
【０００７】本発明の炭化珪素体の製造方法は、昇華再
結晶法を利用した炭化珪素体の製造方法であって、所定
の割合でアルミニウムを含む炭化珪素粉末を、窒素を含
む不活性ガス雰囲気下で昇華させ、再結晶する工程を包
含し、該昇華の再結晶時に、該窒素を含む不活性雰囲気
ガスの圧力を２００ｔｏｒｒ以下とし、かつ圧力の変化
を毎分５ｔｏｒｒ以下とすることを特徴とする。A method for producing a silicon carbide body according to the present invention is a method for producing a silicon carbide body utilizing a sublimation recrystallization method, wherein silicon carbide powder containing aluminum at a predetermined ratio is mixed with an inert gas atmosphere containing nitrogen. Sublimating and recrystallizing under the atmosphere, wherein during the recrystallization of the sublimation, the pressure of the inert gas containing nitrogen is set to 200 torr or less, and the pressure change is set to 5 torr or less per minute. I do.
【０００８】本発明方法においては、所定の割合でアル
ミニウムを含む炭化珪素粉末が原料粉末として用いられ
る。この炭化珪素粉末は、高純度の炭化珪素粉末に高純
度の炭化アルミニウム粉末を加え不活性雰囲気中１９０
０℃程度の温度で焼成して得られる。原料粉末中のアル
ミニウムの含有量は、炭化珪素の所望の結晶形、抵抗率
などにより異なるが、通常、約１原子％以下であること
が望ましい。アルミニウムが過剰であると新たな相の形
成が誘発され、結晶性の高い炭化珪素単結晶の成長を妨
げるためである。In the method of the present invention, silicon carbide powder containing aluminum at a predetermined ratio is used as a raw material powder. This silicon carbide powder is prepared by adding high-purity aluminum carbide powder to high-purity silicon carbide powder,
It is obtained by firing at a temperature of about 0 ° C. The content of aluminum in the raw material powder varies depending on the desired crystal form, resistivity, and the like of silicon carbide, but is usually preferably about 1 atomic% or less. If the amount of aluminum is excessive, formation of a new phase is induced, which hinders growth of a silicon carbide single crystal having high crystallinity.
【０００９】本発明方法においては、上記原料粉末を、
窒素を含む不活性ガス雰囲気下、２０００℃以上の温度
で気化させ、所定の炭化珪素種結晶上へ再結晶させる。
不活性ガス中の窒素の濃度は、通常１容量％以下、好ま
しくは０．２容量％程度であり、窒素以外の不活性ガス
としてはアルゴンなどが使用される。この昇華・再結晶
は、通常、まず初期成長時には２００ｔｏｒｒ程度と比
較的高い雰囲気圧力下で行ない、次いで、毎分１〜５ｔ
ｏｒｒ程度の比較的ゆっくりとした速さで雰囲気圧力で
下げることで、結晶成長の速度を徐々に上昇させる。こ
れ以上の速さで圧力を下げると、不均一な結晶ができや
すいので注意を要する。通常、最終的に、３０ｔｏｒｒ
程度の雰囲気圧力として結晶の成長を行う。あるいは成
長時の雰囲気圧力は、３０〜２００ｔｏｒｒ程度という
ような比較的ゆっくりとした成長条件のままであっても
よい。このようにして所望の結晶構造を有する炭化珪素
結晶がバルク状で得られる。In the method of the present invention, the raw material powder is
Vaporization is performed at a temperature of 2000 ° C. or more in an atmosphere of an inert gas containing nitrogen, and recrystallized on a predetermined silicon carbide seed crystal.
The concentration of nitrogen in the inert gas is usually 1% by volume or less, preferably about 0.2% by volume. As the inert gas other than nitrogen, argon or the like is used. This sublimation / recrystallization is usually performed under a relatively high atmospheric pressure of about 200 torr during initial growth, and then 1 to 5 t / min.
The crystal growth rate is gradually increased by lowering the atmospheric pressure at a relatively slow speed of about orr. Care must be taken if the pressure is reduced at a speed higher than this, since non-uniform crystals tend to be formed. Usually, finally, 30 torr
Crystal growth is performed at an atmospheric pressure of about the same level. Alternatively, the atmospheric pressure during the growth may be kept at a relatively slow growth condition of about 30 to 200 torr. Thus, a silicon carbide crystal having a desired crystal structure is obtained in a bulk state.
【００１０】[0010]
【作用】本発明方法において、原料粉末中に含有される
アルミニウムの含有率、雰囲気中の窒素の割合、および
雰囲気圧力の変化速度を適宜選択することにより所望の
結晶構造および抵抗率を有する炭化珪素体が得られる。
例えば、原料粉末中の炭化珪素に対するアルミニウムの
原子比を約５０ｐｐｍとし、雰囲気中の窒素含有率を
０．１容量％程度とし、上記条件により徐々に減圧した
場合には、６Ｈ型の結晶構造を有する炭化珪素体が得ら
れる。このとき、窒素を含む雰囲気中で形成されやすい
１５Ｒの結晶構造を有する炭化珪素体は、アルミニウム
が原料粉末中に含有されているため、形成されない。６
Ｈ型の炭化珪素結晶は、室温で３．０ｅＶの禁制帯幅を
有し、例えば、青色ダイオードの原料として用いられ
る。In the method of the present invention, silicon carbide having a desired crystal structure and resistivity can be obtained by appropriately selecting the content of aluminum contained in the raw material powder, the proportion of nitrogen in the atmosphere, and the rate of change of the atmosphere pressure. The body is obtained.
For example, when the atomic ratio of aluminum to silicon carbide in the raw material powder is set to about 50 ppm, the nitrogen content in the atmosphere is set to about 0.1% by volume, and the pressure is gradually reduced under the above conditions, the crystal structure of the 6H type becomes A silicon carbide body having the same is obtained. At this time, a silicon carbide body having a 15R crystal structure that is easily formed in an atmosphere containing nitrogen is not formed because aluminum is contained in the raw material powder. 6
The H-type silicon carbide crystal has a bandgap of 3.0 eV at room temperature and is used, for example, as a raw material for a blue diode.
【００１１】本発明方法においては、３０〜２００ｔｏ
ｒｒ程度の雰囲気圧力において、好ましくは２００ｔｏ
ｒｒ程度の雰囲気圧力から上記のように徐々に圧力を下
げていくことにより、均一な単結晶の形成が行われ得
る。結晶成長時において、窒素添加量を適当に選択する
ことにより結晶形の異なる結晶層を積層すること、ある
いは、極性及び濃度の異なる結晶を複数層形成すること
も可能である。In the method of the present invention, 30 to 200 to
At an atmospheric pressure of about rr, preferably 200 to
By gradually reducing the pressure from the atmospheric pressure of about rr as described above, a uniform single crystal can be formed. At the time of crystal growth, it is also possible to stack crystal layers having different crystal forms or to form a plurality of crystals having different polarities and concentrations by appropriately selecting the amount of nitrogen to be added.
【００１２】[0012]
【実施例】以下、本発明の実施例を図面を参照しながら
詳細に説明する。Embodiments of the present invention will be described below in detail with reference to the drawings.
【００１３】（実施例１）原料となるアルミニウム含有
炭化珪素粉末は、メタンガスおよびシランガスの混合物
の熱分解により得られた高純度の炭化粉末１００００重
量部、および純度４Ｎの炭化アルミニウム（Ａｌ4Ｃ3）
粉末１重量部を密閉黒鉛坩堝に入れ、アルゴン雰囲気中
２０００℃の温度で１０分間焼成することにより、炭化
珪素に対するアルミニウムの原子比が５０ｐｐｍとなる
ように調整して得た。Example 1 An aluminum-containing silicon carbide powder as a raw material was composed of 10,000 parts by weight of a high-purity carbonized powder obtained by thermal decomposition of a mixture of methane gas and silane gas, and 4N-purity aluminum carbide (Al 4 C 3). )
One part by weight of the powder was placed in a closed graphite crucible, and baked at a temperature of 2000 ° C. for 10 minutes in an argon atmosphere, so that the atomic ratio of aluminum to silicon carbide was adjusted to 50 ppm.
【００１４】本実施例においては、図１に示す炭化珪素
体製造装置を用いた。この装置は、チェンバー５内に黒
鉛製坩堝１を有し、該坩堝１は、チェンバー５の周囲に
配した加熱装置により加熱され得る。この坩堝１内に
は、炭化珪素結晶を成長させるための基板が載置される
（図示しない）。この装置は、チェンバー５内の系にガ
スを供給するためのガス供給装置４および系内の圧力を
調整するための排気装置８および圧力制御弁７を有し、
さらに系内の温度を調節する温度制御装置６を有する。
坩堝１はチェンバー５内において断熱材２により断熱さ
れている。In this embodiment, a silicon carbide body manufacturing apparatus shown in FIG. 1 was used. This device has a graphite crucible 1 in a chamber 5, which can be heated by a heating device arranged around the chamber 5. In crucible 1, a substrate for growing a silicon carbide crystal is placed (not shown). This device has a gas supply device 4 for supplying gas to the system in the chamber 5 and an exhaust device 8 and a pressure control valve 7 for adjusting the pressure in the system.
Further, a temperature control device 6 for adjusting the temperature in the system is provided.
The crucible 1 is insulated by a heat insulating material 2 in a chamber 5.
【００１５】まず、上述の方法で得た原料粉末を予め高
純度処理の施された黒鉛製坩堝１に充填し、種結晶とし
て６Ｈ型炭化珪素単結晶を基板に装填し、坩堝１内の所
定の位置に該基板を配置した。次に、室温付近で、排気
装置８により充分に系内の排気を行った後、ガス供給装
置４からアルゴンガスを供給し、圧力制御弁７を用い
て、７００ｔｏｒｒ、２００ｓｃｃｍのＡｒガス雰囲気
とし、加熱装置３および温度制御装置６を用いて２１０
０℃の温度にまで昇温させた。坩堝１の温度が定常状態
となった後、排気装置８により２００ｔｏｒｒまで徐々
に減圧した。Ａｒガスに対し窒素ガスを０．１容量％に
なるように混合してから、排気装置８により、最初は毎
分１ｔｏｒｒの速さで、次いで毎分５ｔｏｒｒの速さに
まで徐々に減圧の速度を速めながら、３５ｔｏｒｒ、２
００ｓｃｃｍの雰囲気になるまで減圧し、この雰囲気下
で約４時間炭化珪素結晶の成長を行った。このようにし
て抵抗率が０．２０Ωｃｍであり、厚さが８ｍｍの均一
な結晶を得た。First, the raw material powder obtained by the above-described method is charged into a graphite crucible 1 which has been subjected to a high-purity treatment in advance, and a 6H-type silicon carbide single crystal is loaded on a substrate as a seed crystal. The substrate was arranged at the position of. Next, at around room temperature, after exhausting the inside of the system sufficiently by the exhaust device 8, argon gas is supplied from the gas supply device 4, and the pressure control valve 7 is used to make the Ar gas atmosphere at 700 torr and 200 sccm. 210 using the heating device 3 and the temperature control device 6
The temperature was raised to a temperature of 0 ° C. After the temperature of the crucible 1 reached a steady state, the pressure was gradually reduced to 200 torr by the exhaust device 8. After mixing the nitrogen gas with the Ar gas so as to be 0.1% by volume, the evacuation device 8 gradually reduces the pressure at a speed of 1 torr per minute at first and then at a speed of 5 torr per minute. 35 torr, 2
The pressure was reduced to an atmosphere of 00 sccm, and silicon carbide crystals were grown in this atmosphere for about 4 hours. Thus, a uniform crystal having a resistivity of 0.20 Ωcm and a thickness of 8 mm was obtained.
【００１６】得られたバルクの結晶構造をＸ線回折法
（Ｘ線源としてＣｕのＫα線を用いた）、およびラマン
散乱法により調べたところ各々図２および図３に示すス
ペクトルが得られた。図２において、（００・６）から
の反射が２θ＝３５°で得られ、（００・１２）からの
反射が２θ＝７５°で得られ、さらに２θ＝２３°、２
９°、４２°および４８°で反射ピークが得られた。図
３におけるラマンスペクトルでは、７８８ｃｍ-1に主ピ
ークが認められる。従って、この炭化珪素結晶は６Ｈ型
であることがわかる。The crystal structure of the obtained bulk was examined by an X-ray diffraction method (using Kα ray of Cu as an X-ray source) and a Raman scattering method, and the spectra shown in FIGS. 2 and 3 were obtained, respectively. . In FIG. 2, the reflection from (00 · 6) is obtained at 2θ = 35 °, the reflection from (00 · 12) is obtained at 2θ = 75 °, and further, 2θ = 23 °,
Reflection peaks were obtained at 9 °, 42 ° and 48 °. In the Raman spectrum in FIG. 3, a main peak is observed at 788 cm −1 . Therefore, it is understood that this silicon carbide crystal is of 6H type.
【００１７】（実施例２）Ａｒガスに対する窒素ガスの
量を０．２容量％としたこと以外は実施例１と同様に操
作を行った。その結果、抵抗率が０．０４Ωｃｍであ
り、厚さが８ｍｍの均一な結晶を得た。Example 2 The same operation as in Example 1 was performed except that the amount of nitrogen gas with respect to Ar gas was set to 0.2% by volume. As a result, a uniform crystal having a resistivity of 0.04 Ωcm and a thickness of 8 mm was obtained.
【００１８】得られたバルクの結晶構造をＸ線回折法
（Ｘ線源としてＣｕのＫα線を用いた）、およびラマン
散乱法により調べたところ各々図４および図５に示すス
ペクトルが得られた。図４において、（００・４）から
の反射が２θ＝３５°で得られ、（００・８）からの反
射が２θ＝７５°で得られ、さらに２θ＝２６°および
４５°で反射ピークが得られた。図５におけるラマンス
ペクトルでは、７７６ｃｍ-1に主ピークが認められる。
従って、この炭化珪素結晶は４Ｈ型であることがわか
る。When the crystal structure of the obtained bulk was examined by X-ray diffraction (using Kα ray of Cu as an X-ray source) and Raman scattering, spectra shown in FIGS. 4 and 5 were obtained, respectively. . In FIG. 4, the reflection from (00 · 4) is obtained at 2θ = 35 °, the reflection from (00 · 8) is obtained at 2θ = 75 °, and the reflection peaks at 2θ = 26 ° and 45 °. Obtained. In the Raman spectrum in FIG. 5, a main peak is observed at 776 cm -1 .
Therefore, it can be seen that this silicon carbide crystal is of the 4H type.
【００１９】（実施例３）原料炭化珪素中に含まれるア
ルミニウムの量を原子比で１０ｐｐｍとしたこと以外
は、実施例１と同様に操作を行った。その結果、抵抗率
が０．１５Ωｍであり、厚さが８ｍｍの均一な６Ｈ型の
結晶を得た。Example 3 The same operation as in Example 1 was carried out except that the amount of aluminum contained in the starting silicon carbide was changed to 10 ppm by atomic ratio. As a result, a uniform 6H crystal having a resistivity of 0.15 Ωm and a thickness of 8 mm was obtained.
【００２０】（比較例１）実施例と同一の原料と実施例
と起源を同じくする種結晶とを図１に示す昇華再結晶装
置に同様に配置した。実施例と同様の工程により２１０
０℃の温度でＡｒガスに約０．２容量％の窒素ガスを混
合し、２００ｔｏｒｒ、２００ｓｃｃｍの雰囲気から毎
分１０ｔｏｒｒの速さで減圧した。このようにして実施
例と同様な結晶の成長条件にまで減圧し、炭化珪素結晶
の成長を行った。(Comparative Example 1) The same raw material as in the example and a seed crystal having the same origin as in the example were similarly arranged in the sublimation recrystallization apparatus shown in FIG. According to the same process as in the embodiment, 210
At a temperature of 0 ° C., about 0.2% by volume of nitrogen gas was mixed with Ar gas, and the pressure was reduced at a rate of 10 torr per minute from an atmosphere of 200 torr and 200 sccm. Thus, the pressure was reduced to the same crystal growth condition as in the example, and silicon carbide crystal was grown.
【００２１】得られた結晶の構造についてラマン散乱法
により調べたところ４Ｈ型、１５Ｒ型、および６Ｈ型の
結晶が混在していることが判った。When the structure of the obtained crystal was examined by Raman scattering method, it was found that crystals of 4H type, 15R type and 6H type were mixed.
【００２２】（比較例２）原料粉末中にアルミニウムを
含まないことを除いては、実施例と同様の条件で炭化珪
素結晶を得た。これについて抵抗率および結晶構造を調
べたところ、抵抗率は０．１Ωｃｍで全体に均一であっ
たことが、１５Ｒおよび６Ｈ型の結晶が不均一に分布し
ていることが判った。Comparative Example 2 A silicon carbide crystal was obtained under the same conditions as in the example except that aluminum was not contained in the raw material powder. Examination of the resistivity and the crystal structure revealed that the resistivity was 0.1 Ωcm and uniform throughout, and that the 15R and 6H type crystals were unevenly distributed.
【００２３】[0023]
【発明の効果】本発明によれば、このように、結晶構造
および抵抗率が均一な炭化珪素体が制御性良く製造され
得る。本発明による結晶の多形性が制御された炭化珪素
体を用いることにより従来よりも高機能の半導体素子が
提供され得、さらに新規特性を有する機能素子の開発も
可能となる。According to the present invention, a silicon carbide body having a uniform crystal structure and resistivity can be manufactured with good controllability. By using the silicon carbide body in which the polymorphism of the crystal is controlled according to the present invention, a highly functional semiconductor device can be provided, and a functional device having novel characteristics can be developed.
【図１】本発明の製造方法に用いられる炭化珪素体の製
造装置を示す模式図である。FIG. 1 is a schematic view showing an apparatus for manufacturing a silicon carbide body used in the manufacturing method of the present invention.
【図２】本発明方法により得られた炭化珪素結晶のＸ線
回折スペクトルである。FIG. 2 is an X-ray diffraction spectrum of a silicon carbide crystal obtained by the method of the present invention.
【図３】本発明方法により得られた炭化珪素結晶の散乱
ラマンスペクトルである。FIG. 3 is a scattering Raman spectrum of a silicon carbide crystal obtained by the method of the present invention.
【図４】本発明方法により得られた炭化珪素結晶のＸ線
回折スペクトルである。FIG. 4 is an X-ray diffraction spectrum of a silicon carbide crystal obtained by the method of the present invention.
【図５】本発明方法により得られた炭化珪素結晶の散乱
ラマンスペクトルである。FIG. 5 is a scattering Raman spectrum of a silicon carbide crystal obtained by the method of the present invention.
１ 黒鉛製坩堝 ２ 断熱材 ３ 加熱装置 ４ ガス供給系 ５ チャンバー ６ 温度制御装置 ７ 圧力制御弁 ８ 排気装置 DESCRIPTION OF SYMBOLS 1 Graphite crucible 2 Heat insulation material 3 Heating device 4 Gas supply system 5 Chamber 6 Temperature control device 7 Pressure control valve 8 Exhaust device
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6，ＤＢ名) C30B 23/00 C30B 28/00 - 35/00──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int. Cl. 6 , DB name) C30B 23/00 C30B 28/00-35/00
Claims (3)
方法であって、 所定の割合でアルミニウムを含む炭化珪素粉末を、窒素
を含む不活性ガス雰囲気下で昇華させ、再結晶する工程
を包含し、 該昇華および再結晶時に、該窒素を含む不活性雰囲気ガ
スの圧力を２００ｔｏｒｒ以下とし、かつ圧力の変化を
毎分５ｔｏｒｒ以下とする、 炭化珪素体の製造方法。1. A method for producing a silicon carbide body using a sublimation recrystallization method, wherein a silicon carbide powder containing aluminum at a predetermined ratio is sublimated in an inert gas atmosphere containing nitrogen and recrystallized. A method for producing a silicon carbide body, wherein during the sublimation and recrystallization, the pressure of the inert atmosphere gas containing nitrogen is set to 200 torr or less, and the pressure change is set to 5 torr or less per minute.
量が、１原子％以下である請求項１に記載の製造方法。2. The method according to claim 1, wherein the content of aluminum in the silicon carbide powder is 1 atomic % or less.
合で含有する、請求項１に記載の製造方法。3. The method according to claim 1, wherein the inert gas contains nitrogen at a ratio of 1% by volume or less.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1923592A JP2795574B2 (en) | 1992-02-04 | 1992-02-04 | Method for producing silicon carbide body |
| US08/156,472 US5433167A (en) | 1992-02-04 | 1993-11-23 | Method of producing silicon-carbide single crystals by sublimation recrystallization process using a seed crystal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1923592A JP2795574B2 (en) | 1992-02-04 | 1992-02-04 | Method for producing silicon carbide body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05221796A JPH05221796A (en) | 1993-08-31 |
| JP2795574B2 true JP2795574B2 (en) | 1998-09-10 |
Family
ID=11993729
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1923592A Expired - Fee Related JP2795574B2 (en) | 1992-02-04 | 1992-02-04 | Method for producing silicon carbide body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2795574B2 (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5937317A (en) * | 1997-05-08 | 1999-08-10 | Northrop Grumman Corporation | Method of making a low resistivity silicon carbide boule |
| JP4697235B2 (en) | 2008-01-29 | 2011-06-08 | トヨタ自動車株式会社 | Method for producing p-type SiC semiconductor single crystal and p-type SiC semiconductor single crystal produced thereby |
| JP5117902B2 (en) * | 2008-03-25 | 2013-01-16 | 株式会社ブリヂストン | Method for producing silicon carbide single crystal |
| JP5487888B2 (en) * | 2009-11-10 | 2014-05-14 | トヨタ自動車株式会社 | Method for producing n-type SiC single crystal |
| JP5355533B2 (en) | 2010-11-09 | 2013-11-27 | 新日鐵住金株式会社 | Method for producing n-type SiC single crystal |
| JP2013060328A (en) * | 2011-09-14 | 2013-04-04 | Sumitomo Electric Ind Ltd | Method for manufacturing silicon carbide crystal |
| KR102340110B1 (en) * | 2019-10-29 | 2021-12-17 | 주식회사 쎄닉 | Silicon carbide ingot, wafer and manufacturing method of the same |
| CN113322520A (en) * | 2020-02-28 | 2021-08-31 | Skc株式会社 | Wafer and method for manufacturing the same |
| KR102195325B1 (en) * | 2020-06-16 | 2020-12-24 | 에스케이씨 주식회사 | Silicon carbide ingot, wafer and manufacturing method of the same |
-
1992
- 1992-02-04 JP JP1923592A patent/JP2795574B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05221796A (en) | 1993-08-31 |
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