JP2790879B2 - Fluid pressure control method and apparatus - Google Patents
Fluid pressure control method and apparatusInfo
- Publication number
- JP2790879B2 JP2790879B2 JP1311856A JP31185689A JP2790879B2 JP 2790879 B2 JP2790879 B2 JP 2790879B2 JP 1311856 A JP1311856 A JP 1311856A JP 31185689 A JP31185689 A JP 31185689A JP 2790879 B2 JP2790879 B2 JP 2790879B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- variable means
- conductance
- fluid
- valve opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Control Of Fluid Pressure (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は流体排出路のコンダクタンスを調節して流体
の圧力を制御する流体圧力制御方法及び装置に関する。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for controlling a fluid pressure by adjusting the conductance of a fluid discharge passage to control the pressure of a fluid.
従来、流体排出路のコンダクタンスを調節して流体の
圧力を制御する場合には例えば第６図に示すようにガス
供給源11から真空室12に一定の気体（ガス）を流してこ
れを流体排出路13を介して排気装置（ポンプ）14により
排出する系において、真空室12と排気装置14との間の流
体排出路13にバタフライバルブあるいはバリアブルオリ
フィスバルブ等のコンダクタンス可変手段15を設けると
共に、真空室12の圧力を圧力検出器16により測定し、こ
の圧力検出器16の測定値に基づいて手動で、またはPI,P
ID,その他のディジタル方式等の圧力制御器17によりモ
ータ10を介してコンダクタンス可変手段15を調節して真
空室12の圧力を所望の一定値に維持する流体圧力制御方
法が一般的に用いられている。Conventionally, when the pressure of a fluid is controlled by adjusting the conductance of a fluid discharge passage, for example, as shown in FIG. 6, a certain gas (gas) is supplied from a gas supply source 11 to a vacuum chamber 12 to discharge the fluid. In a system for exhausting by an exhaust device (pump) 14 through a passage 13, a fluid discharge passage 13 between the vacuum chamber 12 and the exhaust device 14 is provided with a conductance variable means 15 such as a butterfly valve or a variable orifice valve, and The pressure in the chamber 12 is measured by a pressure detector 16 and based on the measured value of the pressure detector 16 manually or PI, P
A fluid pressure control method of maintaining the pressure of the vacuum chamber 12 at a desired constant value by adjusting the conductance variable means 15 via the motor 10 by a pressure controller 17 such as an ID or other digital system is generally used. I have.
この流体圧力制御方法によればコンダクタンス可変手
段15の弁開度と流体排出路13におけるコンダクタンス可
変手段15より上流側の気体の圧力との関係は例えば第７
図に示すような関係となる。第７図において、特性曲線
Ａはコンダクタンス可変手段15として弁開度０で全閉と
なる構造のものを用いた場合の特性曲線であり、特性曲
線Ｂはコンダクタンス可変手段15として弁開度０でも全
閉とならずに流体排出路13のコンダクタンスが一定のコ
ンダクタンスとなる構造のものを用いた場合の特性曲線
である。According to this fluid pressure control method, the relationship between the valve opening of the conductance variable means 15 and the pressure of the gas upstream of the conductance variable means 15 in the fluid discharge path 13 is, for example, the seventh.
The relationship is as shown in the figure. In FIG. 7, a characteristic curve A is a characteristic curve when a conductance varying means 15 having a structure that is fully closed at a valve opening of 0 is used, and a characteristic curve B is obtained when the conductance varying means 15 has a valve opening of 0. 6 is a characteristic curve in a case where a fluid discharge passage 13 having a constant conductance without being fully closed is used.
特性曲線A,Bのいずれでもコンダクタンス可変手段15
の弁開度がある程度以上大きくなると、コンダクタンス
可変手段15の弁開度を調節しても流体排出路13のコンダ
クタンスの変化が僅かとなって気体の圧力調整が殆どで
きなくなってしまう。また、逆にコンダクタンス可変手
段15の弁開度が０に近いところではコンダクタンス可変
手段15の弁開度を僅かに調節しても流体排出路13のコン
ダクタンスが非常に大きく変化して気体の圧力変化が非
常に大きくなってしまい、気体の圧力調整が難しい。こ
れは特に特性曲線Ａの場合に著しい。このため、コンダ
クタンス可変手段15は圧力制御性良好範囲が存在するこ
とになり、この範囲以外での圧力制御が困難である。In both the characteristic curves A and B, the conductance variable means 15
When the valve opening degree of the valve becomes larger than a certain degree, even if the valve opening degree of the conductance variable means 15 is adjusted, the change in the conductance of the fluid discharge passage 13 becomes small, and the pressure adjustment of the gas becomes almost impossible. Conversely, when the valve opening of the conductance variable means 15 is close to 0, even if the valve opening of the conductance variable means 15 is slightly adjusted, the conductance of the fluid discharge path 13 changes very greatly, and the gas pressure changes. Becomes very large, and it is difficult to adjust the gas pressure. This is particularly noticeable in the case of characteristic curve A. Therefore, the conductance varying means 15 has a good pressure controllability range, and it is difficult to control the pressure outside this range.
このような問題に対処するため、例えば特開昭59−65
319号公報記載のものでは流体の圧力測定値と予め設定
されている圧力目標値との偏差の積分値及び微分値に制
御パラメータを乗じ、その和をもってコンダクタンス可
変手段の弁開度を調節する液体圧力制御方法において、
液体の微小圧力変化内における流体の流量とコンダクタ
ンス可変手段の弁開度をプロセス量とする流体の圧力変
化とコンダクタンス可変手段の弁開度との線形モデルの
特性値を算出し、この特性値に基づいて制御応答時間の
交差周波数が一定となるように上記制御パラメータを調
整している。また、特開昭62−78615号公報記載のもの
では真空室の圧力を測定して圧力制御器に入力し、この
圧力制御器がコンダクタンス可変手段の弁開度と真空室
の圧力との関係の近似式を記憶していて真空室の圧力変
化の傾きを算出し、その傾きによってコンダクタンス可
変手段の弁開度を調整している。さらに、実開昭63−53
107号公報記載のものではコンダクタンス可変手段に可
変抵抗器を連結してその抵抗値をコンダクタンス可変手
段の弁開度によって変化させ、この可変抵抗器の抵抗値
を抵抗電圧変換回路により電圧に変換してこの電圧によ
り圧力制御器でコンダクタンス可変手段を調節してい
る。In order to deal with such a problem, for example, Japanese Unexamined Patent Publication No.
Japanese Patent Publication No. 319 discloses a liquid in which the control parameter is multiplied by an integral value and a differential value of a deviation between a pressure measurement value of a fluid and a preset pressure target value, and the sum thereof is used to adjust the valve opening of the conductance variable means. In the pressure control method,
Calculate the characteristic value of a linear model of the pressure change of the fluid and the valve opening of the conductance variable means with the flow rate of the fluid within the minute pressure change of the liquid and the valve opening degree of the conductance variable means as the process amount, and calculate this characteristic value. The control parameters are adjusted so that the intersection frequency of the control response time is constant based on the control parameters. Further, in Japanese Patent Application Laid-Open No. 62-78615, the pressure in a vacuum chamber is measured and input to a pressure controller, and this pressure controller determines the relationship between the valve opening degree of the conductance variable means and the pressure in the vacuum chamber. The approximate expression is stored, the gradient of the pressure change in the vacuum chamber is calculated, and the valve opening of the conductance variable means is adjusted based on the gradient. Furthermore, 63-53
In the device disclosed in Japanese Patent No. 107, a variable resistor is connected to the conductance variable means, the resistance value is changed by the valve opening of the conductance variable means, and the resistance value of the variable resistor is converted into a voltage by a resistance-voltage conversion circuit. The lever voltage adjusts the conductance variable means by the pressure controller.
しかし、これらの特開昭59−65319号公報，特開昭62
−78615号公報及び実開昭63−53107号公報記載の流体圧
力制御方法であっても流体の流量や設定圧力の広い範囲
で流体の圧力制御を行うのは困難であり、液体の圧力制
御に用いる装置も複雑なものとなってしまった。しかも
排気装置の能力を流体の最大流量，最小設定圧力に見合
った高いものにする必要があり、コンダクタンス可変手
段も広い範囲で常に良好な制御性を持つ必要がある。However, Japanese Patent Application Laid-Open Nos.
Even with the fluid pressure control methods described in -78615 and JP-A-63-53107, it is difficult to perform fluid pressure control over a wide range of fluid flow rates and set pressures. The equipment used has also become complicated. In addition, the capacity of the exhaust device needs to be high enough to correspond to the maximum flow rate and the minimum set pressure of the fluid, and the conductance variable means must always have good controllability over a wide range.
そこで、上記不具合を解消するため、第８図に示すよ
うにコンダクタンス可変手段として大きなコンダクタン
ス可変手段15Lと小さなコンダクタンス可変手段15Sとを
並列に用いるようにしたものが実開昭58−167912号公報
により提案されている。Therefore, in order to solve the above problem, as shown in FIG. 8, a large conductance variable means 15L and a small conductance variable means 15S are used in parallel as the conductance variable means. Proposed.
上記実開昭58−167912号公報記載のものでは例えばコ
ンダクタンス可変手段15Sが第７図の特性曲線Ｂのよう
な特性を有し、かつコンダクタンス可変手段15Lが第７
図の特性曲線Ａのような特性を有している場合、コンダ
クタンス可変手段15L,15Sの弁開度と流体排出路13にお
けるコンダクタンス可変手段15L,15Sより上流側の流体
の圧力との関係が第９図に示す特性曲線のようになる。
このため、コンダクタンス可変手段15Lの弁開度が大き
くなるにつれてコンダクタンス可変手段15Sの弁開度調
節による圧力制御範囲が狭まってしまい、かつ第９図の
特性曲線の傾きがコンダクタンス可変手段15Lの弁開度
により変化して圧力制御のための係数が変化することに
なり、圧力制御が難しい。さらに、制御可能圧力範囲自
体を高い圧力側に広くすることができず、また２つのコ
ンダクタンス可変手段15L,15Sを並列に接続するので、
配管が複雑になる。上記のような欠点は前記コンダクタ
ンス可変手段15L,15Sの特性の仮定に限らず同様に生ず
る。In the device disclosed in Japanese Utility Model Application Laid-Open No. 167912/1983, for example, the conductance varying means 15S has a characteristic as shown by the characteristic curve B in FIG.
In the case of having a characteristic such as the characteristic curve A in the figure, the relationship between the valve opening degree of the conductance variable means 15L, 15S and the pressure of the fluid in the fluid discharge path 13 on the upstream side of the conductance variable means 15L, 15S is the first. The characteristic curve is as shown in FIG.
For this reason, as the valve opening of the conductance variable means 15L increases, the pressure control range by adjusting the valve opening of the conductance variable means 15S decreases, and the slope of the characteristic curve in FIG. The coefficient for pressure control changes depending on the degree, and pressure control is difficult. Further, the controllable pressure range itself cannot be widened to a higher pressure side, and the two conductance variable means 15L and 15S are connected in parallel, so that
Piping becomes complicated. The above-mentioned disadvantages occur not only in the assumption of the characteristics of the conductance varying means 15L and 15S, but similarly occur.
本発明は上記欠点を改善し、流体の流量と設定圧力の
広い範囲で精密な圧力制御を行うことができて装置を簡
単にできる流体圧力制御方法及び装置を提供することを
目的とする。SUMMARY OF THE INVENTION An object of the present invention is to provide a fluid pressure control method and apparatus capable of solving the above-mentioned drawbacks and capable of performing precise pressure control in a wide range of a fluid flow rate and a set pressure, thereby simplifying the apparatus.
請求項１記載の発明は、流体排出路中に弁開度の変化
で前記流体排出路のコンダクタンスを変化させる第１の
コンダクタンス可変手段を設け、この第１のコンダクタ
ンス可変手段の弁開度の可変で前記流体排出路のコンダ
クタンスを変化させることによって前記流体排出路にお
ける前記第１のコンダクタンス可変手段より上流側の流
体の圧力を制御する流体圧力制御方法において、前記流
体排出路に第２のコンダクタンス可変手段を前記第１の
コンダクタンス可変手段と直列に設け、流体の圧力制御
に際して先ず前記第１のコンダクタンス可変手段の弁開
度を、前記第１のコンダクタンス可変手段の弁開度と前
記上流側の流体の圧力との関係が前記第２のコンダクタ
ンス可変手段の弁開度に応じてほぼ圧力の大小方向に平
行に移動する圧力制御良好範囲に設定し、次いで前記第
２のコンダクタンス可変手段の弁開度を前記上流側の流
体の圧力が略所定の値となるように設定し、その後、前
記第１のコンダクタンス可変手段の弁開度を、前記第１
のコンダクタンス可変手段の弁開度と前記上流側の流体
の圧力との関係が前記第２のコンダクタンス可変手段の
弁開度に応じてほぼ圧力の大小方向に平行に移動する圧
力制御良好範囲で前記上流側の流体の圧力が前記所定の
値を維持するように調整する。According to the first aspect of the present invention, there is provided a first conductance variable means for changing the conductance of the fluid discharge path by changing the valve opening degree in the fluid discharge path, and the first conductance variable means varies the valve opening degree. A fluid conductance control method for controlling the pressure of fluid upstream of the first conductance varying means in the fluid discharge passage by changing the conductance of the fluid discharge passage. Means is provided in series with the first conductance variable means, and in controlling the pressure of the fluid, first, the valve opening of the first conductance variable means is set to the valve opening of the first conductance variable means and the fluid on the upstream side. The pressure control is such that the relationship with the pressure moves in parallel with the direction of the pressure in accordance with the valve opening of the second conductance variable means. Set to a good range, then set the valve opening of the second conductance variable means so that the pressure of the fluid on the upstream side becomes substantially a predetermined value, and then open the valve of the first conductance variable means. Degree, the first
The relationship between the valve opening degree of the conductance variable means and the pressure of the fluid on the upstream side is substantially parallel to the direction of the pressure according to the valve opening degree of the second conductance variable means. The pressure of the fluid on the upstream side is adjusted so as to maintain the predetermined value.
請求項２記載の発明は、流体排出路中に直列に設けら
れ各々弁開度の変化で前記流体排出路のコンダクタンス
を変化させる第１のコンダクタンス可変手段及び第２の
コンダクタンス可変手段と、この第１のコンダクタンス
可変手段の弁開度を可変して前記流体排出路のコンダク
タンスを前記第１のコンダクタンス可変手段及び第２の
コンダクタンス可変手段より上流側の流体の圧力が所定
の値となるように制御する圧力制御器とを備え、流体の
圧力制御に際して先ず前記第１のコンダクタンス可変手
段の弁開度を、前記第１のコンダクタンス可変手段の弁
開度と前記上流側の流体の圧力との関係が前記第２のコ
ンダクタンス可変手段の弁開度に応じてほぼ圧力の大小
方向に平行に移動する圧力制御良好範囲に設定し、次い
で前記第２のコンダクタンス可変手段の弁開度を前記上
流側の流体の圧力が略前記所定の値となるように設定
し、その後、前記圧力制御器により前記第１のコンダク
タンス可変手段の弁開度を、前記第１のコンダクタンス
可変手段の弁開度と前記上流側の流体の圧力との関係が
前記第２のコンダクタンス可変手段の弁開度に応じてほ
ぼ圧力の大小方向に平行に移動する圧力制御良好範囲で
前記上流側の流体の圧力が前記所定の値を維持するよう
に制御するものである。According to a second aspect of the present invention, a first conductance variable means and a second conductance variable means which are provided in series in a fluid discharge path and each change the conductance of the fluid discharge path by changing the valve opening degree, and The conductance of the fluid discharge path is controlled by varying the valve opening of the first conductance variable means so that the pressure of the fluid upstream of the first conductance variable means and the second conductance variable means becomes a predetermined value. A pressure controller for controlling the pressure of the fluid. First, when controlling the pressure of the fluid, the relationship between the valve opening of the first conductance variable means and the pressure of the fluid on the upstream side is determined. A pressure control good range is set in which the second conductance variable means moves in parallel in the direction of the pressure in accordance with the valve opening degree of the second conductance varying means. The valve opening of the variable means is set so that the pressure of the fluid on the upstream side is substantially the predetermined value, and then the valve opening of the first variable conductance is set by the pressure controller. The relationship between the valve opening degree of the first conductance variable means and the pressure of the fluid on the upstream side is within a good pressure control range in which the relation is substantially parallel to the direction of the pressure according to the valve opening degree of the second conductance variable means. The pressure of the upstream fluid is controlled so as to maintain the predetermined value.
請求項２記載の発明では、圧力制御器は第１のコンダ
クタンス可変手段の弁開度を可変して流体排出路のコン
ダクタンスを第１のコンダクタンス可変手段及び第２の
コンダクタンス可変手段より上流側の流体の圧力が所定
の値となるように制御する、流体の圧力制御に際して、
先ず、第１のコンダクタンス可変手段の弁開度を、第１
のコンダクタンス可変手段の弁開度と第１のコンダクタ
ンス可変手段及び第２のコンダクタンス可変手段より上
流側の流体の圧力との関係が第２のコンダクタンス可変
手段の弁開度に応じてほぼ圧力の大小方向に平行に移動
する圧力制御良好範囲に設定し、次いで第２のコンダク
タンス可変手段の弁開度を前記上流側の流体の圧力が略
前記所定の値となるように設定し、その後、圧力制御器
により第１のコンダクタンス可変手段の弁開度を、第１
のコンダクタンス可変手段の弁開度と前記上流側の流体
の圧力との関係が前記第２のコンダクタンス可変手段の
弁開度に応じてほぼ圧力の大小方向に平行に移動する圧
力制御良好範囲で前記上流側の流体の圧力が前記所定の
値を維持するように制御する。According to the second aspect of the present invention, the pressure controller changes the valve opening of the first conductance variable means to increase the conductance of the fluid discharge passage upstream of the first conductance variable means and the second conductance variable means. When controlling the pressure of the fluid to control the pressure of the fluid to a predetermined value,
First, the valve opening of the first conductance variable means is set to the first
The relationship between the valve opening degree of the conductance variable means and the pressure of the fluid upstream of the first conductance variable means and the second conductance variable means depends on the valve opening degree of the second conductance variable means. Pressure control moving parallel to the direction is set in a good range, then the valve opening of the second conductance variable means is set so that the pressure of the upstream fluid is substantially the predetermined value, and then the pressure control is performed. The valve opening of the first conductance variable means is controlled by the
The relationship between the valve opening degree of the conductance variable means and the pressure of the fluid on the upstream side is substantially parallel to the direction of the pressure according to the valve opening degree of the second conductance variable means. The pressure of the fluid on the upstream side is controlled to maintain the predetermined value.
まず、本発明の実施例の原理について説明する。 First, the principle of the embodiment of the present invention will be described.
第１図に示すようにほぼ一定流量の気体が流れる流体
排出路13の途中に２つのコンダクタンス可変手段18,19
が直列に接続され、このコンダクタンス可変手段18,19
は例えばバタフライバルブあるいはバリアブルオリフィ
スバルブ等のコンダクタンス可変手段が用いられる。流
体排出路13におけるコンダクタンス可変手段18,19より
上流側の気体の圧力はコンダクタンス可変手段18,19の
各弁開度V1,V2に応じて第２図に示すように変化する。
ただし、コンダクタンス可変手段18は第７図の特性曲線
Ｂのような特性を有し、コンダクタンス可変手段19は第
７図の特性曲線Ａのような特性を有する。前述した実開
昭58−167912号公報記載のものでは第９図に示すように
コンダクタンス可変手段15Lの弁開度に応じてコンダク
タンス可変手段15Sの弁開度０の時の最大設定圧付近の
特性曲線力だけが主に変化するが、第１図に示すように
流体排出路13の途中に２つのコンダクタンス可変手段1
8,19を直列に接続した場合には第２図に示すようにコン
ダクタンス可変手段18の弁開度V1と流体排出路13におけ
るコンダクタンス可変手段18より上流側の気体の圧力と
の関係を示す特性曲線，，…がコンダクタンス可
変手段19の弁開度V2（3.0゜,3.3゜,3.6゜…）に応じて
ほぼ圧力の大小方向へ平行に移動することがわかる。こ
のことはコンダクタンス可変手段18による圧力制御性良
好範入がコンダクタンス可変手段19の弁開度V2によらず
ほぼ一定であり、しかも圧力制御のための係数（特性曲
線の傾き）が変わらないことを示している。As shown in FIG. 1, two conductance variable means 18 and 19 are provided in the middle of a fluid discharge passage 13 through which a substantially constant flow rate of gas flows.
Are connected in series, and the conductance variable means 18, 19
For example, a variable conductance means such as a butterfly valve or a variable orifice valve is used. The pressure of the gas upstream of the conductance variable means 18 and 19 in the fluid discharge path 13 changes as shown in FIG. 2 in accordance with the respective valve openings V1 and V2 of the conductance variable means 18 and 19.
However, the conductance varying means 18 has a characteristic like a characteristic curve B in FIG. 7, and the conductance varying means 19 has a characteristic like a characteristic curve A in FIG. As shown in FIG. 9, the characteristic disclosed in Japanese Utility Model Application Laid-Open No. 167912/1983 shows a characteristic near the maximum set pressure when the valve opening of the conductance variable means 15S is 0 according to the valve opening of the conductance variable means 15L. Although only the curving force changes mainly, as shown in FIG.
When the valves 8 and 19 are connected in series, as shown in FIG. 2, a characteristic indicating the relationship between the valve opening V1 of the conductance variable means 18 and the pressure of the gas upstream of the conductance variable means 18 in the fluid discharge path 13. It can be seen that the curves,... Move substantially parallel to the direction of the pressure according to the valve opening V2 (3.0 °, 3.3 °, 3.6 °...) Of the conductance variable means 19. This means that the good range of the pressure controllability by the conductance variable means 18 is almost constant irrespective of the valve opening V2 of the conductance variable means 19 and that the coefficient for pressure control (the slope of the characteristic curve) does not change. Is shown.
そこで、本発明の実施例においては定常状態で主とし
て圧力制御を行うコンダクタンス可変手段18の弁開度を
流体の圧力制御に際して先ず、その圧力制御性良好範囲
の中央近傍に設定し、次いでコンダクタンス可変手段19
の弁開度を調節してコンダクタンス可変手段18より上流
側の気体の圧力が略所望の値になるように設定する。以
後はコンダクタンス可変手段18の弁開度を調節してコン
ダクタンス可変手段18より上流側の気体の圧力を略所望
の値に維持するようにする。その後、コンダクタンス可
変手段18の弁開度がコンダクタンス可変手段18の圧力制
御性良好範囲を逸脱しそうな状態となった場合には再度
コンダクタンス可変手段19の弁開度を調節し、常にコン
ダクタンス可変手段18の弁開度をコンダクタンス可変手
段18の圧力制御性良好範囲内で調節して精密な圧力制御
を行う。ここに、流体排出路13のコンダクタンス可変手
段18,19により可変される各コンダクタンスをそれぞれC
1,C2とすると、その合成コンダクタンスＣは で与えられる。これはコンダクタンス可変手段18,19の
弁開度制御の順序には無関係であるが、実際に圧力制御
を行う際には主として常時圧力制御を行っているコンダ
クタンス可変手段18を被制御対象（上流側気体）の近く
に設ける方がよい。即ち、コンダクタンス可変手段18を
コンダクタンス可変手段19より上流側に設けてコンダク
タンス可変手段19を下流側に設けることにより、ヒステ
リシスが少なくなり、より安定した圧力制御を行うこと
ができる。Therefore, in the embodiment of the present invention, the valve opening degree of the conductance variable means 18 which mainly performs pressure control in a steady state is set at the vicinity of the center of the pressure controllability good range at the time of controlling the fluid pressure, and then the conductance variable means 19
Is adjusted so that the pressure of the gas upstream of the conductance variable means 18 becomes a substantially desired value. Thereafter, the valve opening of the conductance variable means 18 is adjusted to maintain the gas pressure upstream of the conductance variable means 18 at a substantially desired value. Thereafter, when the valve opening degree of the conductance variable means 18 is likely to deviate from the good pressure controllability range of the conductance variable means 18, the valve opening degree of the conductance variable means 19 is adjusted again, and the conductance variable means 18 is constantly adjusted. The valve opening is adjusted within the good pressure controllability range of the conductance variable means 18 to perform precise pressure control. Here, each conductance that is varied by the conductance varying means 18 and 19 of the fluid discharge path 13 is represented by C
Assuming that 1, C2, the resultant conductance C is Given by This is irrelevant to the order of the valve opening degree control of the conductance variable means 18 and 19, but when actually performing the pressure control, the conductance variable means 18 which is constantly performing the pressure control is mainly controlled by the controlled object (upstream side). Gas). That is, by providing the conductance variable means 18 upstream of the conductance variable means 19 and providing the conductance variable means 19 on the downstream side, hysteresis is reduced, and more stable pressure control can be performed.
第３図は本発明の一実施例で用いた流体圧力制御装置
を示す。FIG. 3 shows a fluid pressure control device used in one embodiment of the present invention.
ガス供給源11から真空室17に一定流量のガスが流され
てこれが流体排出路13を介して排気装置（ポンプ）14に
より排出される。流体排出路13の途中にはコンダクタン
ス可変手段18,19が直列に接続され、コンダクタンス可
変手段18はコンダクタンス可変手段19より上流側に設け
られる。真空室17内の圧力が圧力検出器16により測定さ
れ、オペレータは上述のように流体の圧力制御に際して
先ず、コンダクタンス可変手段18の弁開度をその圧力制
御性良好範囲の中央近傍に手動で設定し、次いで圧力検
出器16の測定値を参照しながらコンダクタンス可変手段
19の弁開度を手動で調節してコンダクタンス可変手段18
より上流側の気体の圧力が略所望の値になるように設定
する。以後、オペレータは圧力検出器16の測定値を参照
しながらコンダクタンス可変手段18の弁開度を手動で調
節してコンダクタンス可変手段18より上流側の気体の圧
力を略所望の値に維持するようにする。その後、オペレ
ータはコンダクタンス可変手段18の弁開度がコンダクタ
ンス可変手段18の圧力制御性良好範囲を逸脱しそうな状
態となった場合には再度コンダクタンス可変手段19の弁
開度を手動で調節し、常にコンダクタンス可変手段18の
弁開度をコンダクタンス可変手段18の圧力制御性良好範
囲内で調節して精密な圧力制御を行う。この実施例では
最も簡単な装置にて圧力制御を行うことができる。A constant flow rate of gas flows from the gas supply source 11 into the vacuum chamber 17, and the gas is discharged by the exhaust device (pump) 14 through the fluid discharge path 13. Variable conductance means 18 and 19 are connected in series in the middle of the fluid discharge path 13, and the variable conductance means 18 is provided upstream of the variable conductance means 19. The pressure in the vacuum chamber 17 is measured by the pressure detector 16, and the operator manually sets the valve opening of the conductance variable means 18 near the center of the good pressure controllability range when controlling the pressure of the fluid as described above. Then, while referring to the measured value of the pressure detector 16, the conductance variable means
Manually adjusting the valve opening of 19 to change the conductance 18
The pressure of the gas on the more upstream side is set to a substantially desired value. Thereafter, the operator manually adjusts the valve opening of the conductance variable means 18 while referring to the measurement value of the pressure detector 16 so as to maintain the pressure of the gas upstream of the conductance variable means 18 at a substantially desired value. I do. Thereafter, the operator manually adjusts again the valve opening degree of the conductance variable means 19 when the valve opening degree of the conductance variable means 18 is likely to deviate from the pressure controllability good range of the conductance variable means 18, and always adjusts the valve opening degree. Precise pressure control is performed by adjusting the valve opening of the conductance variable means 18 within the range of good pressure controllability of the conductance variable means 18. In this embodiment, pressure control can be performed with the simplest device.
第４図は本発明の他の実施例で用いた流体圧力制御装
置を示す。FIG. 4 shows a fluid pressure control device used in another embodiment of the present invention.
この流体圧力制御装置は第３図の装置において、コン
ダクタンス可変手段18はモータ23で駆動されて弁開度が
変化し、圧力制御器20がそのモータ23を圧力検出器16か
らの圧力測定信号に応じて制御するようにしたものであ
る。この圧力制御器20はPIあるいはPID等の圧力制御を
行うものが用いられる。オペレータは流体の圧力制御に
際して先ず、圧力制御器20の機能を停止させた状態でコ
ンダクタンス可変手段18の弁開度をその圧力制御性良好
範囲の中央近傍に手動で設定し、次いで圧力検出器16の
測定値を参照しながらコンダクタンス可変手段19の弁開
度を手動で調節してコンダクタンス可変手段18より上流
側の気体の圧力が略所望の値になるように設定する。以
後、オペレータは圧力検出器16の機能を有効にして圧力
制御を自動的に行わせ、コンダクタンス可変手段18の弁
開度がコンダクタンス可変手段18の圧力制御性良好範囲
を逸脱しそうな状態となった場合には再度コンダクタン
ス可変手段19の弁開度を手動で調節し、常にコンダクタ
ンス可変手段18の弁開度をコンダクタンス可変手段18の
圧力制御性良好範囲内で調節させる。This fluid pressure control device is the same as the device shown in FIG. 3 except that the conductance variable means 18 is driven by a motor 23 to change the valve opening, and the pressure controller 20 converts the motor 23 into a pressure measurement signal from the pressure detector 16. It is controlled in accordance with this. The pressure controller 20 that performs pressure control such as PI or PID is used. When controlling the pressure of the fluid, the operator first manually sets the valve opening of the conductance variable means 18 near the center of the good pressure controllability range while the function of the pressure controller 20 is stopped, and then the pressure detector 16 The valve opening of the conductance variable means 19 is manually adjusted with reference to the measured value of the above to set the pressure of the gas upstream of the conductance variable means 18 to a substantially desired value. Thereafter, the operator enables the function of the pressure detector 16 to automatically perform pressure control, and the valve opening of the conductance variable means 18 is likely to deviate from the good pressure controllability range of the conductance variable means 18. In such a case, the valve opening of the conductance variable means 19 is manually adjusted again, and the valve opening of the conductance variable means 18 is constantly adjusted within the good pressure controllability range of the conductance variable means 18.
この実施例では第３図の装置に圧力制御器20及びモー
タ23を付加するだけで広い範囲で節密な圧力制御を自動
的に行うことができる。In this embodiment, it is possible to automatically perform tight pressure control over a wide range simply by adding the pressure controller 20 and the motor 23 to the apparatus shown in FIG.
第５図は本発明の他の実施例で用いた流体圧力制御装
置を示す。FIG. 5 shows a fluid pressure control device used in another embodiment of the present invention.
この流体圧力制御装置は全自動で圧力制御を行うもの
であり、第４図の装置において、コンダクタンス可変手
段18の弁開度を検出する弁開度検出器21と，圧力制御器
22と，モータ24とが設けられている。コンダクタンス可
変手段19はモータ24で駆動されて弁開度が変化する。圧
力制御器22は弁開度検出器21からの弁開度検出信号によ
りコンダクタンス可変手段18の弁開度がコンダクタンス
可変手段18の圧力制御性良好範囲を逸脱しようとするか
逸脱したこと（圧力制御性良好範囲の中央近傍より所定
の値以上偏移したこと）を検出し、上記モータ24を駆動
してコンダクタンス可変手段19の弁開度をコンダクタン
ス可変手段18の弁開度がコンダクタンス可変手段18の圧
力制御性良好範囲内に戻るように調節する。流体の圧力
制御に際して先ず、圧力制御器20の機能を停止させた状
態でコンダクタンス可変手段18の弁開度を設定するが、
このときコンダクタンス可変手段18の弁開度設定をコン
ダクタンス可変手段18の圧力制御性良好範囲の中央近傍
に限定する方法と、コンダクタンス可変手段18の弁開度
をコンダクタンス可変手段18の圧力制御性良好範囲全域
とする方法あるいは、コンダクタンス可変手段18の圧力
制御性良好範囲の中央近傍と全域との中間的範囲に限定
する方法とがある。換言すればコンダクタンス可変手段
18の弁開度の上記中央近傍からの偏移検出の不感帯幅を
狭くする方法と，広くする方法とがある。一般的にはそ
の不感帯幅はある程度広くした方が全体の圧力制御のオ
ーバーシュート，ハンチングを防いでスムーズな圧力制
御を行える。この不感帯幅の上下限値は気体の流量，ポ
ンプ14の排気能力，各部のコンダクタンスの分布によっ
て異なるので、予め実験的に求めるか算出することによ
って設定すればよい。This fluid pressure control device is for fully automatic pressure control. In the device shown in FIG. 4, a valve opening detector 21 for detecting the valve opening of the conductance variable means 18 and a pressure controller
22 and a motor 24 are provided. The conductance varying means 19 is driven by the motor 24 to change the valve opening. The pressure controller 22 determines that the valve opening degree of the conductance variable means 18 attempts to deviate from the good pressure controllability range of the conductance variable means 18 based on the valve opening detection signal from the valve opening degree detector 21 (pressure control). And the motor 24 is driven to change the valve opening degree of the conductance variable means 19 to the value obtained by shifting the valve opening degree of the conductance variable means 18 to that of the conductance variable means 18. Adjust so as to return to within the good pressure controllability range. At the time of fluid pressure control, first, the valve opening of the conductance variable means 18 is set while the function of the pressure controller 20 is stopped,
At this time, a method of limiting the valve opening degree of the conductance variable means 18 to the vicinity of the center of the good pressure controllability range of the conductance variable means 18 and a method of setting the valve opening degree of the conductance variable means 18 to the good pressure controllability range of the conductance variable means 18 There is a method of setting the whole range or a method of limiting the range to an intermediate range between the vicinity of the center of the good range of the pressure controllability of the conductance varying means 18 and the whole range. In other words, conductance variable means
There are a method of narrowing the width of the dead zone for detecting deviation of the valve opening from the vicinity of the center and a method of widening the width. Generally, if the dead zone width is increased to some extent, overshoot and hunting of the entire pressure control can be prevented and smooth pressure control can be performed. Since the upper and lower limits of the dead zone width vary depending on the gas flow rate, the pumping capacity of the pump 14, and the distribution of the conductance of each part, the upper and lower limits may be set by experimentally obtaining or calculating them in advance.
オペレータは流体の圧力制御に際して先ず、圧力制御
器20の機能を停止させた状態でコンダクタンス可変手段
18の弁開度を例えばその圧力制御性良好範囲の中央近傍
に手動で設定し、次いで圧力検出器16の測定値を参照し
ながらコンダクタンス可変手段19の弁開度を手動で調節
してコンダクタンス可変手段18より上流側の気体の圧力
が略所望の値になるように設定して初期状態を定める。
このとき、コンダクタンス可変手段19の弁開度は圧力制
御器20の出力信号に応じてモータ24を制御してコンダク
タンス可変手段19を自動的に調節するようにしてもよ
く、また圧力検出器16の出力信号を圧力制御器22に入力
してコンダクタンス可変手段19を自動的に調節するよう
にしてもよく、さらに別の圧力制御器を設けて圧力検出
器21の出力信号に応じてモータ24を制御することにより
ンダクタンス可変手段19を自動的に調節するようにして
もよい。次に圧力制御器20の機能を有効にして圧力制御
の初期状態から定常的圧力制御状態に切換えるが、この
切換は手動で行ってもよいし、圧力制御器20と圧力制御
器22との有機的結合により自動的に行うようにしてもよ
い。When controlling the pressure of the fluid, the operator first sets the conductance variable means in a state where the function of the pressure controller 20 is stopped.
For example, by manually setting the valve opening of the valve 18 near the center of the good pressure controllability range, and then manually adjusting the valve opening of the conductance variable means 19 while referring to the measured value of the pressure detector 16, the conductance can be varied. The initial state is determined by setting the pressure of the gas upstream of the means 18 to a substantially desired value.
At this time, the valve opening degree of the conductance variable means 19 may control the motor 24 according to the output signal of the pressure controller 20 to automatically adjust the conductance variable means 19. An output signal may be input to the pressure controller 22 to automatically adjust the conductance variable means 19, and another pressure controller may be provided to control the motor 24 according to the output signal of the pressure detector 21. By doing so, the conductance varying means 19 may be automatically adjusted. Next, the function of the pressure controller 20 is enabled to switch from the initial state of the pressure control to the steady pressure control state.This switching may be performed manually, or the organic control between the pressure controller 20 and the pressure controller 22 may be performed. It may be performed automatically by a dynamic connection.
なお、本発明は上記実施例に限定されるものではな
く、例えばコンダクタンス可変手段18,19にバタフライ
バルブあるいはバリアブルオリフィスバルブ以外のコン
ダクタンス可変手段を用いてもよい。また、流体が分子
流の場合に限らず粘性流あるいは中間流の場合にも本発
明を同様に適用することができる。It should be noted that the present invention is not limited to the above embodiment, and for example, conductance variable means other than a butterfly valve or a variable orifice valve may be used for the conductance variable means 18 and 19. Further, the present invention can be similarly applied not only to a case where the fluid is a molecular flow but also to a case where the fluid is a viscous flow or an intermediate flow.
請求項１記載の発明によれば、流体排出路中に弁開度
の変化で前記流体排出路のコンダクタンスを変化させる
第１のコンダクタンス可変手段を設け、この第１のコン
ダクタンス可変手段の弁開度の可変で前記流体排出路の
コンダクタンスを変化させることによって前記流体排出
路における前記第１のコンダクタンス可変手段より上流
側の流体の圧力を制御する流体圧力制御方法において、
前記流体排出路に第２のコンダクタンス可変手段を前記
第１のコンダクタンス可変手段と直列に設け、流体圧力
制御に際して先ず前記第１のコンダクタンス可変手段の
弁開度を、前記第１のコンダクタンス可変手段の弁開度
と前記上流側の流体の圧力との関係が前記第２のコンダ
クタンス可変手段の弁開度に応じてほぼ圧力の大小方向
に平行に移動する圧力制御良好範囲に設定し、次いで前
記第２のコンダクタンス可変手段の弁開度を前記上流側
の流体の圧力が略所定の値となるように設定し、その
後、前記第１のコンダクタンス可変手段の弁開度を、前
記第１のコンダクタンス可変手段の弁開度と前記上流側
の流体の圧力との関係が前記第２のコンダクタンス可変
手段の弁開度に応じてほぼ圧力の大小方向に平行に移動
する圧力制御良好範囲で前記上流側の流体の圧力が前記
所定の値を維持するように調整するので、広い範囲（流
体の流量及び／又は設定圧力及び／又は流体排出能力の
広い範囲）で圧力制御を行うことができ、かつ常に第１
のコンダクタンス可変手段の最も圧力制御に適した動作
点で圧力制御を行うことができて精密でスムーズな圧力
制御を行うことができる。さらに、第１のコンダクタン
ス可変手段及び第２のコンダクタンス可変手段を直列に
設けたことにより構成が簡単になる。According to the first aspect of the present invention, the first conductance variable means for changing the conductance of the fluid discharge path by changing the valve opening degree in the fluid discharge path is provided, and the valve opening degree of the first conductance variable means is provided. A fluid pressure control method for controlling the pressure of fluid upstream of the first conductance variable means in the fluid discharge path by changing the conductance of the fluid discharge path by varying
A second conductance variable means is provided in the fluid discharge path in series with the first conductance variable means, and at the time of fluid pressure control, first, a valve opening of the first conductance variable means is set to a value corresponding to the first conductance variable means. The relationship between the valve opening and the pressure of the fluid on the upstream side is set in a good pressure control range in which the second conductance variable means moves in parallel in the direction of the pressure substantially in accordance with the valve opening, and then the 2 is set so that the pressure of the fluid on the upstream side becomes substantially a predetermined value, and then the valve opening of the first conductance variable means is set to the first conductance variable value. A pressure control good range in which the relationship between the valve opening degree of the means and the pressure of the upstream fluid moves substantially in parallel with the magnitude of the pressure in accordance with the valve opening degree of the second conductance variable means. Since the pressure of the fluid on the upstream side is adjusted so as to maintain the predetermined value, it is possible to perform pressure control over a wide range (a flow rate of a fluid and / or a set pressure and / or a wide range of a fluid discharge capacity). Can and always be the first
The pressure control can be performed at the operating point most suitable for the pressure control of the conductance variable means, and accurate and smooth pressure control can be performed. Furthermore, the configuration is simplified by providing the first conductance variable means and the second conductance variable means in series.
また、請求項２記載の発明によれば、流体排出路中に
直列に設けられ各々弁開度の変化で前記流体排出路のコ
ンダクタンスを変化させる第１のコンダクタンス可変手
段及び第２のコンダクタンス可変手段と、この第１のコ
ンダクタンス可変手段の弁開度を可変して前記流体排出
路のコンダクタンスを前記第１のコンダクタンス可変手
段及び第２のコンダクタンス可変手段より上流側の流体
の圧力が所定の値となるように制御する圧力制御器とを
備え、流体の圧力制御に際して先ず前記第１のコンダク
タンス可変手段の弁開度を、前記第１のコンダクタンス
可変手段の弁開度と前記上流側の流体の圧力との関係が
前記第２のコンダクタンス可変手段の弁開度に応じてほ
ぼ圧力の大小方向に平行に移動する圧力制御良好範囲に
設定し、次いで前記第２のコンダクタンス可変手段の弁
開度を前記上流側の流体の圧力が略前記所定の値となる
ように設定し、その後、前記圧力制御器により前記第１
のコンダクタンス可変手段の弁開度を、前記第１のコン
ダクタンス可変手段の弁開度と前記上流側の流体の圧力
との関係が前記第２のコンダクタンス可変手段の弁開度
に応じてほぼ圧力の大小方向に平行に移動する圧力制御
良好範囲で前記上流側の流体の圧力が前記所定の値を維
持するように制御するので、オペレータの継続的な操作
を必要とせずに自動的に請求項１記載の発明と同様な効
果が得られる。According to the second aspect of the present invention, the first conductance variable means and the second conductance variable means which are provided in series in the fluid discharge path and each change the conductance of the fluid discharge path by changing the valve opening degree. And the valve opening of the first conductance variable means is varied to change the conductance of the fluid discharge path so that the pressure of the fluid upstream of the first conductance variable means and the second conductance variable means becomes a predetermined value. And a pressure controller for controlling the pressure of the fluid. First, when controlling the pressure of the fluid, the valve opening degree of the first conductance variable means is changed to the valve opening degree of the first conductance variable means and the pressure of the upstream fluid. Is set in a good pressure control range in which the second conductance variable means moves substantially in parallel in the direction of the magnitude of the pressure in accordance with the valve opening degree of the second conductance variable means. The valve opening degree of the second variable conductance means to set so that the pressure of the upstream side of the fluid becomes substantially the predetermined value, then the by the pressure controller first
The relationship between the valve opening of the first conductance variable means and the pressure of the fluid on the upstream side is substantially equal to the pressure of the valve according to the valve opening of the second conductance variable means. The pressure of the fluid on the upstream side is controlled so as to maintain the predetermined value in a good pressure control range that moves in parallel with the magnitude direction, so that the operator does not need continuous operation automatically and automatically. The same effects as those of the described invention can be obtained.
第１図は本発明の実施例の原理を説明するための流体圧
力制御装置を示すブロック図、第２図は同流体圧力制御
装置の特性図、第３図乃至第５図は本発明の各実施例で
用いた流体圧力制御装置を示すブロック図、第６図は従
来の流体圧力制御装置の一例を示すブロック図、第７図
は同流体圧力制御装置の特性図、第８図は従来の流体圧
力制御装置の他の例を示すブロック図、第９図は同流体
圧力制御装置の特性図である。 13……流体排出路、18,19……コンダクタンス可変手
段、20……圧力制御器。FIG. 1 is a block diagram showing a fluid pressure control device for explaining the principle of the embodiment of the present invention, FIG. 2 is a characteristic diagram of the fluid pressure control device, and FIGS. FIG. 6 is a block diagram illustrating an example of a conventional fluid pressure control device, FIG. 7 is a characteristic diagram of the fluid pressure control device, and FIG. FIG. 9 is a block diagram showing another example of the fluid pressure control device, and FIG. 9 is a characteristic diagram of the fluid pressure control device. 13: fluid discharge path, 18, 19: conductance variable means, 20: pressure controller.
Claims (2)
出路のコンダクタンスを変化させる第１のコンダクタン
ス可変手段を設け、この第１のコンダクタンス可変手段
の弁開度の可変で前記流体排出路のコンダクタンスを変
化させることによって前記流体排出路における前記第１
のコンダクタンス可変手段より上流側の流体の圧力を制
御する流体圧力制御方法において、前記流体排出路に第
２のコンダクタンス可変手段を前記第１のコンダクタン
ス可変手段と直列に設け、流体の圧力制御に際して先ず
前記第１のコンダクタンス可変手段の弁開度を、前記第
１のコンダクタンス可変手段の弁開度と前記上流側の流
体の圧力との関係が前記第２のコンダクタンス可変手段
の弁開度に応じてほぼ圧力の大小方向に平行に移動する
圧力制御良好範囲に設定し、次いで前記第２のコンダク
タンス可変手段の弁開度を前記上流側の流体の圧力が略
所定の値となるように設定し、その後、前記第１のコン
ダクタンス可変手段の弁開度を、前記第１のコンダクタ
ンス可変手段の弁開度と前記上流側の流体の圧力との関
係が前記第２のコンダクタンス可変手段の弁開度に応じ
てほぼ圧力の大小方向に平行に移動する圧力制御良好範
囲で前記上流側の流体の圧力が前記所定の値を維持する
ように調整することを特徴とする流体圧力制御方法。A first conductance variable means for changing a conductance of the fluid discharge path by changing a valve opening degree in the fluid discharge path; By changing the conductance of the discharge passage, the first in the fluid discharge passage is changed.
In the fluid pressure control method for controlling the pressure of the fluid on the upstream side of the conductance variable means, a second conductance variable means is provided in the fluid discharge path in series with the first conductance variable means. The relationship between the valve opening degree of the first conductance variable means and the pressure of the fluid on the upstream side depends on the valve opening degree of the second conductance variable means. A pressure control good range that moves substantially in parallel with the direction of the pressure is set to a good range, and then the valve opening of the second conductance variable means is set so that the pressure of the upstream fluid becomes a substantially predetermined value, Thereafter, the relationship between the valve opening degree of the first conductance variable means and the pressure of the fluid on the upstream side is determined by the second coefficient. A fluid characterized in that the pressure of the fluid on the upstream side is adjusted to maintain the predetermined value within a good pressure control range that moves substantially in parallel with the magnitude of the pressure in accordance with the valve opening of the variable conductance means. Pressure control method.
の変化で前記流体排出路のコンダクタンスを変化させる
第１のコンダクタンス可変手段及び第２のコンダクタン
ス可変手段と、この第１のコンダクタンス可変手段の弁
開度を可変して前記流体排出路のコンダクタンスを前記
第１のコンダクタンス可変手段及び第２のコンダクタン
ス可変手段より上流側の流体の圧力が所定の値となるよ
うに制御する圧力制御器とを備え、流体の圧力制御に際
して先ず前記第１のコンダクタンス可変手段の弁開度
を、前記第１のコンダクタンス可変手段の弁開度と前記
上流側の流体の圧力との関係が前記第２のコンダクタン
ス可変手段の弁開度に応じてほぼ圧力の大小方向に平行
に移動する圧力制御良好範囲に設定し、次いで前記第２
のコンダクタンス可変手段の弁開度を前記上流側の流体
の圧力が略前記所定の値となるように設定し、その後、
前記圧力制御器により前記第１のコンダクタンス可変手
段の弁開度を、前記第１のコンダクタンス可変手段の弁
開度と前記上流側の流体の圧力との関係が前記第２のコ
ンダクタンス可変手段の弁開度に応じてほぼ圧力の大小
方向に平行に移動する圧力制御良好範囲で前記上流側の
流体の圧力が前記所定の値を維持するように制御するこ
とを特徴とする流体圧力制御装置。2. A first conductance variable means and a second conductance variable means which are provided in series in a fluid discharge path, and each of which varies the conductance of the fluid discharge path according to a change in a valve opening degree, and the first conductance. Pressure control for varying the valve opening of the variable means to control the conductance of the fluid discharge path so that the pressure of the fluid upstream of the first and second conductance variable means has a predetermined value. When controlling the pressure of the fluid, first, the valve opening degree of the first conductance variable means, and the relationship between the valve opening degree of the first conductance variable means and the pressure of the fluid on the upstream side are the second. The pressure control is set in a good pressure control range that moves in parallel with the magnitude of the pressure in accordance with the valve opening of the conductance variable means.
The valve opening degree of the conductance variable means is set such that the pressure of the fluid on the upstream side becomes substantially the predetermined value, and thereafter,
The pressure controller controls the valve opening of the first conductance variable means, and the relationship between the valve opening of the first conductance variable means and the pressure of the fluid on the upstream side is the valve of the second conductance variable means. A fluid pressure control device, wherein the pressure of the fluid on the upstream side is controlled so as to maintain the predetermined value in a good pressure control range in which the pressure is moved substantially in parallel with the magnitude direction of the pressure according to the opening degree.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1311856A JP2790879B2 (en) | 1989-11-30 | 1989-11-30 | Fluid pressure control method and apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1311856A JP2790879B2 (en) | 1989-11-30 | 1989-11-30 | Fluid pressure control method and apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03171306A JPH03171306A (en) | 1991-07-24 |
| JP2790879B2 true JP2790879B2 (en) | 1998-08-27 |
Family
ID=18022242
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1311856A Expired - Fee Related JP2790879B2 (en) | 1989-11-30 | 1989-11-30 | Fluid pressure control method and apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2790879B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7369920B2 (en) * | 2006-03-21 | 2008-05-06 | Mks Instruments, Inc. | Pressure control system with optimized performance |
| JP5854335B2 (en) | 2013-11-20 | 2016-02-09 | プログレッシオ合同会社 | Processing chamber pressure control method and processing chamber pressure control apparatus |
| JP6375486B1 (en) | 2017-09-27 | 2018-08-22 | イノビータ ピーティーイー リミテッド | Processing chamber pressure control method and processing chamber pressure control apparatus |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5524125B2 (en) * | 1974-03-06 | 1980-06-27 | ||
| JPS5148084A (en) * | 1974-10-23 | 1976-04-24 | Hitachi Ltd | 2 dangenatsuseigyosochi |
| JPS5815214U (en) * | 1981-07-16 | 1983-01-31 | 株式会社東芝 | Deaerator pressure control device |
| JPS5965319A (en) * | 1982-10-04 | 1984-04-13 | Toshiba Corp | Control method for fluid pressure |
| JPS6278615A (en) * | 1985-10-02 | 1987-04-10 | Hitachi Ltd | Pressure control method |
-
1989
- 1989-11-30 JP JP1311856A patent/JP2790879B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03171306A (en) | 1991-07-24 |
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