JP2782750B2 - Method for manufacturing electrostrictive effect element - Google Patents
Method for manufacturing electrostrictive effect elementInfo
- Publication number
- JP2782750B2 JP2782750B2 JP32518588A JP32518588A JP2782750B2 JP 2782750 B2 JP2782750 B2 JP 2782750B2 JP 32518588 A JP32518588 A JP 32518588A JP 32518588 A JP32518588 A JP 32518588A JP 2782750 B2 JP2782750 B2 JP 2782750B2
- Authority
- JP
- Japan
- Prior art keywords
- laminate
- manufacturing
- resin
- effect element
- laminates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は電歪効果素子の製造方法に関し、特に複数の
積層体を接合して作製する電歪効果素子の製造方法に関
する。Description: TECHNICAL FIELD The present invention relates to a method for manufacturing an electrostrictive element, and more particularly to a method for manufacturing an electrostrictive element manufactured by joining a plurality of laminates.
従来、積層体の電歪効果発生方向の高さの寸法は、焼
結時のデラミネーション発生防止のため制限されてお
り、現在では20mm程度までとされている。積層された電
極間の距離が100μｍ程度で電歪効果発生方向の寸法が2
0mmの電歪効果素子の変位量は約20μｍであり、それ以
上の変位量を求める場合、複数個の積層体を接着剤にて
接合し、各積層体の外部引き出し端子であるリード線を
極性を合せて接続し、１個の電歪効果素子としている。Conventionally, the dimension of the height of the laminate in the direction in which the electrostriction effect occurs is limited to prevent the occurrence of delamination during sintering, and is currently limited to about 20 mm. The distance between the stacked electrodes is about 100 μm and the dimension in the electrostriction effect generation direction is 2
The displacement of the 0 mm electrostrictive effect element is about 20 μm, and when a displacement larger than that is obtained, a plurality of laminates are joined with an adhesive, and the lead wire, which is the external lead-out terminal of each laminate, is polarized. Are connected together to form one electrostrictive effect element.
第５図は従来の製造方法により作製された電歪効果素
子の縦断面図、第６図は従来の製造方法の接合工程での
縦断面図である。FIG. 5 is a vertical cross-sectional view of an electrostrictive effect element manufactured by a conventional manufacturing method, and FIG. 6 is a vertical cross-sectional view of a bonding step of the conventional manufacturing method.
この接合方法を説明すると、第６図に示すように、ま
ず接着治具15の切込み溝15aに、セラミック材と内部電
極２が交互に積層された積層体１を挿入し、積層体１の
端面に接着剤を塗布して他の積層体１を張り合わせ、押
え板16を介してネジ締め等により積層体１に圧力をかけ
ながら恒温槽（図示詳細）にて接着材を硬化させ、積層
体１を接合し、次に積層体１の対向する側面にそれぞれ
露出する内部電極２の一方の端面を各側面において絶縁
材４で絶縁し、内部電極２の露出する端面を一層おきに
接続する外部電極３を形成し、外部電極３に極性を合せ
てリード線５を半田６で接続し、静電塗装により樹脂７
により外装を行なう。The joining method will be described. As shown in FIG. 6, first, the laminated body 1 in which the ceramic material and the internal electrode 2 are alternately laminated is inserted into the cut groove 15a of the bonding jig 15, and the end face of the laminated body 1 is inserted. An adhesive is applied to the laminate 1 and the other laminate 1 is adhered to the laminate. The adhesive is cured in a thermostat (details shown in the drawing) while applying pressure to the laminate 1 by screwing or the like via the holding plate 16 to thereby cure the laminate. Then, one end face of the internal electrode 2 exposed on the opposing side face of the laminate 1 is insulated on each side face by the insulating material 4 and the external electrode connecting the exposed end face of the internal electrode 2 alternately is provided. 3 is formed, the lead wire 5 is connected to the external electrode 3 with the polarity by soldering 6, and the resin 7 is formed by electrostatic coating.
Exterior.
上述した従来の電歪効果素子の製造方法は、次のよう
な欠点がある。The above-described conventional method for manufacturing an electrostrictive effect element has the following disadvantages.
ｉ）積層体の接着時、絶縁物、外部電極を含む積層体の
外形寸法にて位置決めをするため、積層体間での歪発生
面の中心位置のずれが大きい。i) When bonding the laminates, positioning is performed based on the outer dimensions of the laminate including the insulator and the external electrode, so that the displacement of the center position of the strain generating surface between the laminates is large.
ii）積層体を接合してから外装を行なうため積層体側面
に積層体接着治具や他の部品等が触れることにより積層
体表面にキズ、カケ、ワレが生じ、絶縁不良の原因とな
る。ii) Since a laminate bonding jig or other components come into contact with a side surface of the laminate to perform exterior packaging after joining the laminate, scratches, chips, and cracks are generated on the surface of the laminate, causing insulation failure.
本発明の電歪効果素子の製造方法は、セラミック層と
内部電極とを交互に積層して積層体を形成し、積層体の
相対向する両側面のそれぞれに内部電極端部を一層おき
に接続する外部電極を形成し、外部電極に外部引き出し
端子を取付けた後に積層体を絶縁性樹脂層で被覆する、
電歪効果素子の製造方法において、積層体の両端面と、
端面から一定寸法の側面部とに樹脂が付着しないように
樹脂外装する工程と、枠状の部材の両側から樹脂が付着
していない２つの積層体の端部を枠状の部材に嵌合さ
せ、両積層体を接合する工程と、各積層体のそれぞれの
外部引き出し端子を互いに接続する工程とを有すること
を特徴とする。In the method for manufacturing an electrostrictive effect element according to the present invention, a ceramic layer and internal electrodes are alternately laminated to form a laminate, and internal electrode ends are alternately connected to each of both opposing side surfaces of the laminate. Forming an external electrode to be applied, covering the laminate with an insulating resin layer after attaching an external lead terminal to the external electrode,
In the method for manufacturing an electrostrictive effect element, both end faces of the laminate,
A step of coating the resin so that the resin does not adhere to the side surface of a certain dimension from the end face, and fitting the ends of the two laminates to which the resin does not adhere from both sides of the frame-like member to the frame-like member. And a step of joining both laminates, and a step of connecting respective external lead terminals of each laminate to each other.
本発明は、セラミック層にて接合の位置決めを行い、
積層体単体で外装を行ってから接合するものである。The present invention performs the positioning of the joint with the ceramic layer,
The exterior of the laminate alone is bonded after joining.
次に、本発明の実施例について図面を参照して説明す
る。Next, embodiments of the present invention will be described with reference to the drawings.
第１図は本発明の製造方法により作製された電歪効果
素子の一実施例の縦断面図、第２図〜第４図は第１図の
電歪効果素子の製造方法の各工程の縦断面図、横断面図
である。FIG. 1 is a longitudinal sectional view of one embodiment of an electrostrictive effect element produced by the production method of the present invention, and FIGS. 2 to 4 are longitudinal sections of each step of the method for producing the electrostrictive effect element of FIG. It is a front view and a cross-sectional view.
まず、従来の方法と同様な方法で作製された、積層体
１の外部電極３にリード線５を半田６にて接続する（第
２図）。次に、積層体１の上下端部をマスキング治具10
によりマスキングし静電塗装により外装樹脂７で外装す
る（第３図）。この時、外装樹脂７が付着しない塗り逃
げ部1a,1bが形成される。次に、塗り逃げ部1a,1bが形成
された１つの積層体１の上端部の塗り逃げ部1aにセラミ
ック、ステンレス等の枠状の部材８を嵌合させ、上端面
に接着剤を塗り、他の積層体１の下端部1bを積層体１の
上方から枠状の部材８に嵌合するように取付ける（第４
図（ａ））。この時、下端部1bに嵌合する枠状の部材９
は上端部1aに嵌合する枠状の部材８の厚さの1/2であ
り、積層体１の塗り逃げ部1a,1bの長さと同じである。
次に、ベース13に設置された断面馬蹄形の２個の接着治
具11にて積層体１の外側面を覆い２個の接着治具11をネ
ジ12にて固定する（第４図（ｂ））。次に、接着治具11
にて固定したまま積層体１の上端面にベース13と平行で
ある押え板14により約5kgの圧力をかけ、接着剤を常温
硬化させる。次に、押え板14、接着治具11を取りはず
し、上下の積層体１のリード線５を極性を合せて半田６
にて接合し、電歪効果素子（第１図）が完成する。First, a lead wire 5 is connected to the external electrode 3 of the laminated body 1 by solder 6 manufactured by a method similar to the conventional method (FIG. 2). Next, the upper and lower ends of the laminated body 1 are
And exteriorly covered with an exterior resin 7 by electrostatic coating (FIG. 3). At this time, the coating escape portions 1a and 1b to which the exterior resin 7 does not adhere are formed. Next, a frame-shaped member 8 made of ceramic, stainless steel, or the like is fitted to the coating relief portion 1a at the upper end of the one laminated body 1 on which the coating relief portions 1a and 1b are formed, and an adhesive is applied to the upper end surface. The lower end 1b of the other laminate 1 is attached so as to fit into the frame-shaped member 8 from above the laminate 1 (fourth).
Figure (a). At this time, the frame-shaped member 9 fitted to the lower end portion 1b
Is 1/2 of the thickness of the frame-shaped member 8 fitted to the upper end portion 1a, and is the same as the length of the coating escape portions 1a and 1b of the laminate 1.
Next, the outer surface of the laminate 1 is covered with two bonding jigs 11 each having a horseshoe cross section installed on the base 13, and the two bonding jigs 11 are fixed with screws 12 (FIG. 4B). ). Next, the bonding jig 11
A pressure of about 5 kg is applied to the upper end surface of the laminated body 1 by the pressing plate 14 parallel to the base 13 while the adhesive is fixed, and the adhesive is cured at room temperature. Next, the holding plate 14 and the bonding jig 11 are removed, and the lead wires 5 of the upper and lower laminates 1 are matched in polarity and solder 6
To complete the electrostrictive effect element (FIG. 1).
本実施例では２個の積層体の接合を示したが、同様な
方法で３個以上の積層体の接合が可能であり、また積層
体の外形が角形であるが、円形であっても同様な方法で
行なえることはいうまでもない。In this embodiment, the joining of two laminates is shown, but the joining of three or more laminates is possible by the same method, and the outer shape of the laminate is square. Needless to say, this can be done in any way.
以上説明したように本発明は、次のような効果があ
る。As described above, the present invention has the following effects.
ｉ）積層体のセラミック層で位置決めを行うため、歪発
生方向の中心位置ずれがなくなり、接合された積層体の
上下端面の平行度や垂直度がよくなり位置ずれによる応
力が発生せず積層体の折れやキレツ等が発生しなくな
る。i) Since the positioning is performed by the ceramic layers of the laminate, the center position shift in the strain generation direction is eliminated, the parallelism and the perpendicularity of the upper and lower end surfaces of the joined laminate are improved, and no stress is generated due to the position shift. No breaks or cracks will occur.
ii）積層体を外装してから接合するため積層体表面にキ
ズ、カケ、ワレが少なくなり、電気的絶縁の信頼性が向
上する。ii) Since the laminated body is packaged and then joined, scratches, chips and cracks on the laminated body surface are reduced, and the reliability of electrical insulation is improved.
第１図は本発明の製造方法により作製された電歪効果素
子の一実施例の縦断面図、第２図、第３図は本実施例の
製造方法の各工程における縦断面図、第４図（ａ）は本
実施例の製造方法の接合工程での縦断面図、第４図
（ｂ）は本実施例の製造方法の接合工程での横断面図、
第５図は従来の製造方法による電歪効果素子の縦断面
図、第６図は従来の製造方法の接合工程での縦断面図で
ある。 １……積層体、２……内部電極、 ３……外部電極、４……絶縁材、 ５……リード線、６……半田、 ７……外装樹脂、8,9……枠状の部材、 10……マスキング治具、11,15……接着治具、 12,17……ネジ、13……ベース、 14,16……押え板。FIG. 1 is a longitudinal sectional view of one embodiment of an electrostrictive effect element produced by the production method of the present invention, and FIGS. 2 and 3 are longitudinal sectional views of each step of the production method of this embodiment. FIG. 4A is a longitudinal sectional view in a joining step of the manufacturing method of the present embodiment, FIG. 4B is a transverse sectional view of the joining step in the producing method of the present embodiment,
FIG. 5 is a vertical cross-sectional view of an electrostrictive effect element according to a conventional manufacturing method, and FIG. 6 is a vertical cross-sectional view at a joining step of the conventional manufacturing method. DESCRIPTION OF SYMBOLS 1 ... laminated body, 2 ... internal electrode, 3 ... external electrode, 4 ... insulating material, 5 ... lead wire, 6 ... solder, 7 ... exterior resin, 8, 9 ... frame-shaped member , 10 ... Masking jig, 11,15 ... Adhesive jig, 12,17 ... Screw, 13 ... Base, 14,16 ... Presser plate.
Claims (1)
を交互に積層して積層体を形成し、該積層体の相対向す
る両側面のそれぞれに該内部電極端部を一層おきに接続
する外部電極を形成し、該外部電極に外部引き出し端子
を取付けた後に前記積層体を絶縁性樹脂で被覆する、電
歪効果素子の製造方法において、 積層体の両端面と、該端面から一定寸法の側面部とに樹
脂が付着しないように樹脂外装する工程と、 枠状の部材の両側から前記樹脂が付着していない２つの
積層体の端部を前記枠状の部材に嵌合させ、該両積層体
を接合する工程と、 前記各積層体のそれぞれの外部引き出し端子を互いに接
続する工程とを有することを特徴とする電歪効果素子の
製造方法。1. A laminated body is formed by alternately laminating a sheet-like piezoelectric ceramic material and an internal electrode, and the internal electrode ends are connected alternately to each of both opposing side surfaces of the laminated body. Forming an external electrode, covering the laminate with an insulating resin after attaching an external lead-out terminal to the external electrode, a method for manufacturing an electrostrictive element, wherein both end faces of the laminate and a fixed dimension from the end face are provided. A step of packaging the resin so that the resin does not adhere to the side surfaces; and fitting the ends of the two laminates to which the resin does not adhere from both sides of the frame-like member to the frame-like member. A method for manufacturing an electrostrictive element, comprising: a step of joining a laminate; and a step of connecting external lead terminals of each of the laminates to each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32518588A JP2782750B2 (en) | 1988-12-22 | 1988-12-22 | Method for manufacturing electrostrictive effect element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32518588A JP2782750B2 (en) | 1988-12-22 | 1988-12-22 | Method for manufacturing electrostrictive effect element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02170480A JPH02170480A (en) | 1990-07-02 |
| JP2782750B2 true JP2782750B2 (en) | 1998-08-06 |
Family
ID=18173957
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32518588A Expired - Lifetime JP2782750B2 (en) | 1988-12-22 | 1988-12-22 | Method for manufacturing electrostrictive effect element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2782750B2 (en) |
-
1988
- 1988-12-22 JP JP32518588A patent/JP2782750B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02170480A (en) | 1990-07-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH05160459A (en) | Laminated displacement element | |
| JP3111946B2 (en) | Piezoelectric transformer | |
| JP2782750B2 (en) | Method for manufacturing electrostrictive effect element | |
| JP2001210886A (en) | Stacked type piezoelectric actuator | |
| JPH034576A (en) | Laminated type piezoelectric element | |
| JP2007264095A (en) | Vibration plate and vibration wave driving device | |
| JP2707782B2 (en) | Multilayer piezoelectric element | |
| JP2508314B2 (en) | Method for manufacturing laminated piezoelectric element | |
| JPH0366822B2 (en) | ||
| JP7172401B2 (en) | Piezoelectric actuators and piezoelectric drives | |
| JP3250918B2 (en) | Multilayer piezoelectric element | |
| JP2002354591A (en) | Array type ultrasonic probe | |
| JPH084739Y2 (en) | Chip type piezoelectric component | |
| JPS6041272A (en) | Piezoelectric displacement element | |
| JP3010835B2 (en) | Piezo actuator | |
| JPH03155176A (en) | Manufacture of laminated piezoelectric element | |
| JP3572208B2 (en) | Multilayer piezoelectric actuator | |
| JP2945980B2 (en) | Ultrasonic probe | |
| JP3589065B2 (en) | Power board and method of manufacturing the same | |
| JPH0442947Y2 (en) | ||
| JPS61292980A (en) | Laminating type piezoelectric actuator | |
| JPH04167579A (en) | Electrostrictive effect element and manufacture thereof | |
| JPH0496286A (en) | Manufacture of laminated piezoelectric element | |
| JPH04333294A (en) | Laminated type piezoelectric actuator element | |
| JPH02137282A (en) | Electrostriction effect element and its sheathing method |