JP2773998B2 - Light detection device - Google Patents
Light detection deviceInfo
- Publication number
- JP2773998B2 JP2773998B2 JP3237316A JP23731691A JP2773998B2 JP 2773998 B2 JP2773998 B2 JP 2773998B2 JP 3237316 A JP3237316 A JP 3237316A JP 23731691 A JP23731691 A JP 23731691A JP 2773998 B2 JP2773998 B2 JP 2773998B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- optical fiber
- photoelectric conversion
- conversion unit
- photodetector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001514 detection method Methods 0.000 title description 5
- 239000013307 optical fiber Substances 0.000 claims description 40
- 230000003287 optical effect Effects 0.000 claims description 15
- 238000006243 chemical reaction Methods 0.000 claims description 11
- 238000005259 measurement Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/52—PV systems with concentrators
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Photovoltaic Devices (AREA)
Description
【０００１】[0001]
【産業上の利用分野】この発明は発光素子の検査または
位置検出用に使用される光検知装置に関し、特に出射光
を光ファイバに導く構成を有するものに関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a light detecting device used for inspection or position detection of a light emitting element, and more particularly to a device having a structure for guiding emitted light to an optical fiber.
【０００２】[0002]
【従来の技術】図３は従来の光ファイバを用いた光検知
装置の光の入力方法を示す概略図であり、図において、
１は半導体レーザダイオード（以下ＬＤと略す）、２は
ＬＤ１より外部へ出射されたレーザ光であり、２ａは集
光前のものであり、２ｂはレンズ３にて集光されたもの
を示す。５は集光されたレーザ光２の焦点であり、４は
レンズ３によって集光されたレーザ光２ｂを取り込む光
ファイバであり、その後段には図示しない光検出器が配
置されている。また、ｘ，ｙ，ｚは光ファイバ４に取り
込まれるレーザ光２ｂの入力が最大になるように光ファ
イバ４を走査する方向である。2. Description of the Related Art FIG. 3 is a schematic view showing a light input method of a conventional photodetector using an optical fiber.
Reference numeral 1 denotes a semiconductor laser diode (hereinafter abbreviated as LD), 2 denotes laser light emitted from the LD 1 to the outside, 2a denotes a light before being condensed, and 2b denotes a light condensed by a lens 3. Reference numeral 5 denotes a focal point of the condensed laser light 2, reference numeral 4 denotes an optical fiber for taking in the laser light 2 b condensed by the lens 3, and a photodetector (not shown) is arranged at a subsequent stage. Further, x, y, and z are directions in which the optical fiber 4 is scanned so that the input of the laser light 2b taken into the optical fiber 4 is maximized.
【０００３】次に動作について説明する。ＬＤ１より出
射されたレーザ光２ａはレンズ３によって集光される。
この集光されたレーザ光２ｂを光ファイバ４に最大限入
力できるように、光ファイバ４をｘ，ｙ，ｚ方向に走査
させ、レーザ光２の焦点５に位置合わせをする。そして
光ファイバ４に入力した光は図示しない光検出器にてそ
の光量等が検出される。Next, the operation will be described. The laser light 2 a emitted from the LD 1 is collected by the lens 3.
The optical fiber 4 is scanned in the x, y, and z directions so that the converged laser light 2 b can be input to the optical fiber 4 to the maximum, and the laser light 2 is aligned with the focal point 5. The light input to the optical fiber 4 is detected by a light detector (not shown).
【０００４】[0004]
【発明が解決しようとする課題】従来の光検知装置は以
上のように構成されており、光ファイバへの光の入力
は、集光されたレーザ光の焦点位置に光ファイバを位置
調整するのに多くの時間を要するなどの問題点があっ
た。The conventional light detecting device is constructed as described above, and the light input to the optical fiber is performed by adjusting the position of the optical fiber to the focal position of the focused laser light. However, there is a problem that it takes a lot of time.
【０００５】この発明は上記のような問題点を解消する
ためになされたもので、光ファイバと入射する光の光軸
合わせが短時間でできるとともに、スペクトル特性だけ
でなく光出力特性等の測定も行うことができる光検知装
置を得ることを目的とする。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and enables alignment of an optical fiber and incident light in a short time, and measurement of not only spectral characteristics but also optical output characteristics. It is an object of the present invention to obtain a light detection device capable of performing the above-described operations.
【０００６】[0006]
【課題を解決するための手段】この発明に係る光検知装
置は、複数の受光領域を有する光電変換部と、該光電変
換部を貫通して該光電変換部に固定された光ファイバと
を備えたものである。A photodetecting device according to the present invention includes a photoelectric conversion unit having a plurality of light receiving regions, and an optical fiber penetrating the photoelectric conversion unit and fixed to the photoelectric conversion unit. It is a thing.
【０００７】[0007]
【作用】この発明においては、光電変換部の複数の受光
領域の各光起電力に基づいて光ファイバを上記光電変換
部とともに移動させて、光ファイバへの光の入力が最大
となるように位置決めするようにしたから、迅速に光源
からの出射光の光軸を見出し、光軸合わせを行うことが
できる。According to the present invention, an optical fiber is converted into an optical fiber on the basis of each photoelectromotive force of a plurality of light receiving areas of a photoelectric conversion section.
Is moved together with the parts, since the input light to the optical fiber is to be positioned so as to maximize, quickly find the optical axis of the light emitted from the light source, it is possible to perform optical axis alignment.
【０００８】また、光軸を合わせる際に、上記光電変換
部の各受光領域で生じた光起電力から光出力特性を検出
することができる。Further, when the optical axes are aligned, the light output characteristics can be detected from the photoelectromotive force generated in each light receiving area of the photoelectric conversion unit.
【０００９】[0009]
【実施例】以下、この発明の一実施例による光検出装置
を図について説明する。図１において、図３と同一符号
は同一または相当部分を示し、６は４分割光検知器であ
り、４分割された光検知部６ａ，６ｂ，６ｃ，６ｄから
構成されており、それぞれの検知部でＯ／Ｅ変換された
光起電力７ａ，７ｂ，７ｃ，７ｄが得られるようになっ
ている。また上記４分割された光検知部６ａ，６ｂ，６
ｃ，６ｄの中心部には光ファイバ４が配置されている。BRIEF DESCRIPTION OF THE DRAWINGS FIG. In FIG. 1, the same reference numerals as those in FIG. 3 denote the same or corresponding parts. Reference numeral 6 denotes a four-divided photodetector, which is composed of four divided photodetectors 6a, 6b, 6c, and 6d. The photovoltaic powers 7a, 7b, 7c, 7d O / E converted by the sections are obtained. Further, the four divided photodetectors 6a, 6b, 6
An optical fiber 4 is arranged at the center of c and 6d.
【００１０】次に動作について説明する。ＬＤ１から出
射されたレーザ光２ａはレンズ３で集光される。集光さ
れたレーザ光２ｂは光検知器６の４つの光検知部６ａ，
６ｂ，６ｃ，６ｄで検知され、各々の光検知部より得ら
れる光起電力７ａ，７ｂ，７ｃ，７ｄによりモニタされ
る。このとき、７ａ＝７ｂ＝７ｃ＝７ｄとなるように、
光検知器６をｘ，ｙ方向に走査させて、光ファイバ４と
レーザ光２ｂの光軸を合わせ、さらにｚ方向に走査させ
て光ファイバ４へのレーザ光２ｂの入力が最大となる焦
点５に合わせるようにしてアライメントする。Next, the operation will be described. The laser light 2 a emitted from the LD 1 is collected by the lens 3. The condensed laser light 2b is applied to four light detectors 6a,
It is detected by 6b, 6c, 6d and monitored by photovoltaics 7a, 7b, 7c, 7d obtained from the respective photodetectors. At this time, 7a = 7b = 7c = 7d,
The optical detector 6 x, by scanning in the y-direction, combined optical axis of the optical fiber 4 and the laser beam 2b, by further scanning in the z-direction input of the laser beam 2b in the optical fiber 4 becomes maximum focal Align to match 5.
【００１１】このようにして、アライメント後に光ファ
イバ４から取り込まれたレーザ光２のスペクトルが光フ
ァイバ４の他端に接続される図示しない光検知器により
測定される。またアライメント中に各光検知部の出力の
合計光起電力（７ａ＋７ｂ＋７ｃ＋７ｄ）により全光出
力の測定がされる。In this manner, the spectrum of the laser beam 2 taken in from the optical fiber 4 after the alignment is measured by a photodetector (not shown) connected to the other end of the optical fiber 4. During the alignment, the total light output is measured by the total photoelectromotive force (7a + 7b + 7c + 7d) of the outputs of the respective light detection units.
【００１２】このように本実施例によれば、４分割され
た光検知部６ａ，６ｂ，６ｃ，６ｄから構成された光検
知器６の中心に光ファイバ４を貫通固定して配置し、各
光検知部における光起電力７ａ〜７ｄが等しくなるよう
に、光検知器６をｘ，ｙ方向に走査し、次いで光ファイ
バ４への入射光が最大となるように光検知器６をｚ方向
に走査することで、レーザ光の焦点５に光ファイバ４を
アライメントするようにしたから、迅速かつ確実に出射
光の光軸に光ファイバを合致させることができる。As described above, according to the present embodiment, the optical fiber 4 is fixedly penetrated at the center of the photodetector 6 composed of the four divided photodetectors 6a, 6b, 6c and 6d. The photodetector 6 is scanned in the x and y directions so that the photoelectromotive forces 7a to 7d in the photodetector become equal, and then the photodetector 6 is moved in the z direction so that the light incident on the optical fiber 4 is maximized. Since the optical fiber 4 is aligned with the focal point 5 of the laser light by performing the scanning, the optical fiber can be quickly and surely matched with the optical axis of the emitted light.
【００１３】また、光検知器６を走査する際に、各光検
知部より得られる光起電力７ａ，７ｂ，７ｃ，７ｄを合
計することで、レーザ光の光出力特性の測定をスペクト
ル特性の測定と同時に行うことができる。When scanning the photodetector 6, the sum of the photoelectromotive forces 7a, 7b, 7c and 7d obtained from the respective photodetectors allows the measurement of the optical output characteristics of the laser light to be performed to determine the spectral characteristics. It can be performed simultaneously with the measurement.
【００１４】なお上記実施例では光検知器６を４分割さ
れた光検知部から構成したが、光検知部の数はこれに限
られるものではなく、少なくとも３つ以上あればよい。In the above embodiment, the photodetector 6 is constituted by four divided photodetectors. However, the number of photodetectors is not limited to this, and at least three photodetectors may be used.
【００１５】次に本発明の第２の実施例について説明す
る。本実施例では光検知器６に代えてＣＣＤ８を用いた
ものである。すなわち図２に示すようにＣＣＤ８の中心
を貫通させて光ファイバ４を配置し、ＣＣＤ８の図示し
ない各出力端子の起電力をモニターして、ｘ及びｙ方向
で、光強度の最大となる位置を検出し、その位置に光フ
ァイバ４を移動させることで、光ファイバ４にレーザ光
２ｂの光軸を合わせる。このように構成することで、上
記実施例と同様の効果を得ることが可能で、かつＦＦＰ
特性の測定もできる。Next, a second embodiment of the present invention will be described. In this embodiment, a CCD 8 is used in place of the light detector 6. That optical fiber 4 arranged to penetrate the center of the CCD 8 as shown in FIG. 2, to monitor the electromotive force of each output terminal (not shown) of the CCD 8, x and y-direction
Then, the position where the light intensity becomes maximum is detected, and the optical fiber 4 is moved to that position, so that the optical axis of the laser beam 2b is aligned with the optical fiber 4. With such a configuration, it is possible to obtain the same effect as the above embodiment , and
Measurement of characteristics is also possible .
【００１６】なお上記各実施例では、光検知器６または
ＣＣＤ８の中心に光ファイバ４を配置するようにした
が、光ファイバ４は必ずしも上記部材の中心に配置する
必要はなく、光検知器６またはＣＣＤ８の中心と光ファ
イバ４の位置を補正するように信号処理することで、光
ファイバ４をレーザ光２ｂの光軸と一致させることがで
きる。In each of the above embodiments, the optical fiber 4 is arranged at the center of the photodetector 6 or the CCD 8. However, the optical fiber 4 does not necessarily have to be arranged at the center of the above member. Alternatively, by performing signal processing so as to correct the center of the CCD 8 and the position of the optical fiber 4, the optical fiber 4 can be made to coincide with the optical axis of the laser beam 2b.
【００１７】また各実施例ではレーザ光２をレンズ３を
用いて集光させるようにしたが、広がり角が小さい光等
を測定する場合は、レンズを用いて集光することなくそ
の光軸を光ファイバ４に導入するようにしてもよい。In each embodiment, the laser beam 2 is focused using the lens 3. However, when measuring light with a small divergence angle, the optical axis is not focused using the lens. The light may be introduced into the optical fiber 4.
【００１８】[0018]
【発明の効果】以上のように、この発明に係る光検出装
置によれば、光電変換部の複数の受光領域の各光起電力
に基づいて光ファイバを上記光電変換部とともに移動さ
せて、光ファイバへの光の入力が最大となるように位置
決めするようにしたから、迅速に光ファイバと光軸のア
ライメントを行うことができ、また、光軸を合わせる際
に、上記光電変換部の各受光領域で生じた光起電力から
光出力特性を検出することができるという効果がある。As described above, according to the photodetecting device of the present invention, the optical fiber is moved together with the photoelectric conversion unit based on the photovoltaic power of each of the plurality of light receiving areas of the photoelectric conversion unit. Since the optical input to the fiber is positioned so as to be the maximum, the alignment of the optical fiber and the optical axis can be performed quickly. There is an effect that the light output characteristics can be detected from the photovoltaic power generated in the region.
【図１】この発明の一実施例による光検知装置の構成を
示す概略図である。FIG. 1 is a schematic diagram showing a configuration of a light detecting device according to an embodiment of the present invention.
【図２】この発明の他の実施例による光検知装置の構成
を示す概略図である。FIG. 2 is a schematic diagram showing a configuration of a light detection device according to another embodiment of the present invention.
【図３】従来の光ファイバ入力方式による光検知装置の
構成を示す概略図である。FIG. 3 is a schematic diagram showing a configuration of a conventional photodetector using an optical fiber input method.
１ ＬＤ ２ レーザ光 ３ レンズ ４ 光ファイバ ６ 光検知器 ８ ＣＣＤ DESCRIPTION OF SYMBOLS 1 LD 2 Laser beam 3 Lens 4 Optical fiber 6 Photodetector 8 CCD
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6，ＤＢ名) G01M 11/00 G01J 1/02 G01J 1/04──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 6 , DB name) G01M 11/00 G01J 1/02 G01J 1/04
Claims (1)
合致させて出射光を導入し、光検知を行う光検知装置に
おいて、 複数の受光領域を有する光電変換部と、 該光電変換部を貫通して該光電変換部に固定された光フ
ァイバとを備え、 上記光電変換部の各受光領域における光起電力に基づい
て上記光ファイバを上記光電変換部とともに移動させ、
該光ファイバに上記出射光の光軸を合致させるようにし
たことを特徴とする光検知装置。1. A photodetector for detecting light by introducing an outgoing light by aligning an optical fiber with an optical axis of an outgoing light from a light source, comprising: a photoelectric conversion unit having a plurality of light receiving regions; And an optical fiber fixed to the photoelectric conversion unit, and the optical fiber is moved together with the photoelectric conversion unit based on a photoelectromotive force in each light receiving region of the photoelectric conversion unit ,
A light detecting device, wherein an optical axis of the outgoing light is matched with the optical fiber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3237316A JP2773998B2 (en) | 1991-08-22 | 1991-08-22 | Light detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3237316A JP2773998B2 (en) | 1991-08-22 | 1991-08-22 | Light detection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0552702A JPH0552702A (en) | 1993-03-02 |
| JP2773998B2 true JP2773998B2 (en) | 1998-07-09 |
Family
ID=17013564
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3237316A Expired - Fee Related JP2773998B2 (en) | 1991-08-22 | 1991-08-22 | Light detection device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2773998B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112197712A (en) * | 2020-09-30 | 2021-01-08 | 中国科学院长春光学精密机械与物理研究所 | Beam waist radius measuring method and system based on Z scanning |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8026439B2 (en) | 2009-11-20 | 2011-09-27 | International Business Machines Corporation | Solar concentration system |
| US8490619B2 (en) * | 2009-11-20 | 2013-07-23 | International Business Machines Corporation | Solar energy alignment and collection system |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5694943U (en) * | 1979-12-24 | 1981-07-28 | ||
| JPH02203307A (en) * | 1989-01-31 | 1990-08-13 | Ando Electric Co Ltd | Mechanism for aligning optical axes of light emitting element and optical fiber |
| JPH0377903A (en) * | 1989-08-21 | 1991-04-03 | Fujio Aramaki | Method and device for condensing sunlight |
-
1991
- 1991-08-22 JP JP3237316A patent/JP2773998B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112197712A (en) * | 2020-09-30 | 2021-01-08 | 中国科学院长春光学精密机械与物理研究所 | Beam waist radius measuring method and system based on Z scanning |
| CN112197712B (en) * | 2020-09-30 | 2021-12-07 | 中国科学院长春光学精密机械与物理研究所 | Beam waist radius measuring method and system based on Z scanning |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0552702A (en) | 1993-03-02 |
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