JP2739028B2 - Electrostatic drive type micro gripper - Google Patents
Electrostatic drive type micro gripperInfo
- Publication number
- JP2739028B2 JP2739028B2 JP20545793A JP20545793A JP2739028B2 JP 2739028 B2 JP2739028 B2 JP 2739028B2 JP 20545793 A JP20545793 A JP 20545793A JP 20545793 A JP20545793 A JP 20545793A JP 2739028 B2 JP2739028 B2 JP 2739028B2
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- mover
- gripper
- finger
- electrostatic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Description
【０００１】[0001]
【産業上の利用分野】本発明は、マイクロマシンとし
て、微小なワークをハンドリングするための静電駆動式
マイクログリッパに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrostatic drive type micro gripper for handling a minute work as a micro machine.
【０００２】[0002]
【従来の技術】最近では、マイクロマシニングの技術進
歩とともに、静電力を駆動源として動作する各種方式の
超小形の静電アクチュエータが提案されており、その一
形態として微小なワークをハンドリングするためのマイ
クログリッパがある。かかる静電駆動式マイクログリッ
パについては各種駆動方式が提案されており、その一例
として図４で示すように、支点１にばね部を介して支持
した左右一対のフィンガー２ａ，２ｂの駆動手段によく
知られたくし歯形静電アクチュエータ３を採用し、該静
電アクチュエータの３くし歯形電極３ａと３ｂとの間に
外部からドライバ（図示せず）を介して印加する電圧を
ＯＮ／ＯＦＦ制御してフィンガー２ａ，２ｂを矢印方向
に駆動して開閉操作するようにした静電駆動式のマイク
ログリッパ（自動ピンセット）が、例えば書籍「マイク
ロマシンの世界」（著者：藤田 博之，工業調査会発
行）の４１ページに紹介されて公知である。2. Description of the Related Art Recently, with the advance of micromachining technology, various types of ultra-small electrostatic actuators that operate by using electrostatic force as a driving source have been proposed. There are micro grippers. Various driving methods have been proposed for such an electrostatic drive type micro gripper. As shown in FIG. 4, as an example, a drive means for a pair of left and right fingers 2a and 2b supported on a fulcrum 1 via a spring portion is often used. A known comb-shaped electrostatic actuator 3 is employed, and a voltage applied from the outside via a driver (not shown) between the three comb-shaped electrodes 3a and 3b of the electrostatic actuator is turned on / off to control the finger. An electrostatically driven micro gripper (automatic tweezers) that drives the 2a and 2b in the direction of the arrow to open and close is described in, for example, the book "The World of Micromachines" (author: Hiroyuki Fujita, published by the Industrial Research Institute, page 41). And is publicly known.
【０００３】[0003]
【発明が解決しようとする課題】ところで、前記の図示
例のように、くし歯形静電アクチュエータの電極に印加
する電圧を単にＯＮ／ＯＦＦする二つの制御モードで左
右一対のフィンガーを開閉位置に駆動するようにしたマ
イクログリッパでは、左右のフィンガーが連動して同時
に動き、かつその開閉ストローク（移動量）は一定であ
る。By the way, as shown in the above-mentioned example, the pair of left and right fingers is driven to the open / close position in two control modes in which the voltage applied to the electrodes of the comb-shaped electrostatic actuator is simply turned on / off. In such a micro gripper, the left and right fingers move simultaneously in conjunction with each other, and their opening and closing strokes (movement amounts) are constant.
【０００４】このために、ワーク（被把持物）のサイズ
に対応してフィンガーの開き，閉じ具合を調節すること
ができない。また、左右のフィンガーは通常の機械式メ
カニカルハンドと同様に互いに連動して開閉位置へ移動
するので、ワークを把持する際にグリッパとの間の相対
位置関係によっては片方のフィンガーが先にワークに突
き当たってワークを動かしてしまうなどの不具合が生じ
ることがある。For this reason, the degree of opening and closing of the fingers cannot be adjusted according to the size of the work (object to be grasped). Also, since the left and right fingers move to the open / close position in conjunction with each other as in the case of a normal mechanical mechanical hand, when gripping a workpiece, one finger may first contact the workpiece depending on the relative positional relationship with the gripper. In some cases, such a problem that the workpiece is moved by hitting the workpiece may occur.
【０００５】かかる点、ワークのサイズ，ワークとフィ
ンガーとの相対位置に対応してフィンガーの開度，およ
び各フィンガーの送り量を個別に調整制御できれば、前
記のような問題を解消してワークのソフトハンドリング
が行えるなど、マイクログリッパとしての機能も向上す
る。本発明は上記の点にかんがみなされたものであり、
グリッパの開き間隔，開閉動作に伴う各フィンガーの送
り量を個別制御して把持すべきワークのサイズにフレキ
シブルに対応できるようにした従来にない新規な静電駆
動式マイクログリッパを提供することにある。[0005] In this respect, if the opening degree of the finger and the feed amount of each finger can be individually adjusted and controlled in accordance with the size of the work, the relative position of the work and the finger, the above-described problem can be solved and the work of the work can be solved. The function as a micro gripper such as soft handling can be improved. The present invention has been made in view of the above points,
It is an object of the present invention to provide an unprecedented new electrostatic drive type micro gripper that can individually control the opening distance of the gripper and the feed amount of each finger accompanying the opening / closing operation to flexibly respond to the size of a workpiece to be gripped. .
【０００６】[0006]
【課題を解決するための手段】上記目的を達成するため
に、本発明のマイクログリッパは、左右に向かい合わせ
に並ぶ一対のフィンガーと、上下方向に位置をずらして
各フィンガーより内側に突出してた可動子と、各可動子
との間に微小間隔を隔てて上下側に対向配備した一対の
固定子と、上下に並ぶ可動子の間に微小間隔を隔てて介
挿した搬送子と、該搬送子を可動子と平行な方向に定振
幅で往復動操作する静電アクチュエータとからなり、静
電アクチュエータによる搬送子の往復動と、この動作に
同期して外部からの電圧印加により可動子を固定子, 搬
送子へ交互に吸着させてフィンガーを歩進的に開閉操作
するよう構成するものとする。Means for Solving the Problems To achieve the above object, a micro gripper of the present invention has a pair of fingers arranged side by side to the left and right, and protrudes inward from each finger with their positions shifted vertically. A movable element, a pair of stators disposed on the upper and lower sides facing each other with a small interval between each movable element, a transport element interposed at a small interval between the movable elements arranged vertically, The actuator consists of an electrostatic actuator that reciprocates at a constant amplitude in the direction parallel to the mover. The mover is fixed by reciprocating the carrier by the electrostatic actuator and applying an external voltage in synchronization with this operation. The finger and the carrier are alternately attracted to each other to open and close the finger step by step.
【０００７】ここで、前記可動子，固定子，搬送子の相
互間で、対向し合う面の少なくとも一方には電気絶縁層
を被着するのがよい。また、前記構成のマイクログリッ
パに対し、各フィンガーの開閉動作を独立的に制御して
ハンドリング性の自由度を高めるために、搬送子を２個
に分けて各可動子と個別に対向配置し、かつ各搬送子ご
とに静電アクチュエータを設けて構成することができ
る。Here, an electric insulating layer is preferably applied to at least one of the opposing surfaces among the mover, stator and carrier. Further, in order to independently control the opening and closing operation of each finger with respect to the micro gripper having the above-described configuration and increase the degree of freedom of handling, the carrier is divided into two parts and individually arranged to face each movable element, Further, an electrostatic actuator can be provided for each carrier.
【０００８】[0008]
【作用】上記の構成において、静電アクチュエータの操
作で搬送子を往復動させつつ、搬送子がその振幅の一方
端に位置するときに外部からの電圧印加によりフィンガ
ーに設けた可動子を搬送子に吸着し、そのまま搬送子が
振幅の他端に達したときに可動子との吸着を解除すると
同時に可動子を固定子に吸着させる操作を１ステップと
して、このステップ操作を繰り返すことにより、フィン
ガーは摩擦なしに搬送子の振幅とステップ数に対応して
開方向，あるいは閉方向に歩進移動する。このようなス
トローク操作を左右一対の各フィンガーに対して交互に
行うことにより、フィンガーの開，閉位置をワークのサ
イズに合わせて調整制御しつつ、グリッパを開閉してワ
ークを把持することができる。In the above arrangement, while the carrier is reciprocated by the operation of the electrostatic actuator, when the carrier is located at one end of its amplitude, the movable member provided on the finger by applying a voltage from the outside is used as the carrier. When the carrier reaches the other end of the amplitude as it is, the operation of releasing the adsorption with the mover and simultaneously adsorbing the mover to the stator as one step is performed, and this step operation is repeated. The robot moves stepwise in the opening direction or the closing direction according to the amplitude of the carrier and the number of steps without friction. By performing such a stroke operation alternately for a pair of left and right fingers, the gripper can be opened and closed to grip the work while the opening and closing positions of the fingers are adjusted and controlled according to the size of the work. .
【０００９】この場合に、吸着状態では可動子，固定
子，搬送子の間互間が絶縁層で隔離されているので電気
的に短絡することがない。そして、往復動する搬送子の
往路で一方のフィンガーを移動操作し、復路で他方のフ
ィンガーを移動操作することにより、１個の搬送子の往
復運動を利用してグリッパを開閉できる。また、搬送子
を２個に分けて各可動子と個々に対向配置し、かつ各搬
送子ごとに静電アクチュエータを設けた構成とすること
により、左右の各フィンガーを独立的に移動制御できる
ので、より自由度の高いグリッパの開閉動作が得られ
る。In this case, since the movable element, the stator and the carrier are separated from each other by the insulating layer in the attracted state, there is no electrical short circuit. Then, the gripper can be opened and closed using the reciprocating motion of one carrier by moving and operating one finger on the outward path of the reciprocating carrier and moving the other finger on the return path. In addition, since the carrier is divided into two parts, each movable element is individually arranged to face each movable element, and the electrostatic actuator is provided for each carrier, the left and right fingers can be independently moved and controlled. Thus, the opening and closing operation of the gripper with a higher degree of freedom can be obtained.
【００１０】[0010]
【実施例】以下、本発明の実施例を図面に基づいて説明
する。 実施例１：図１において、４ａ，４ｂは左右一対のフィ
ンガーであり、各フィンガー１ａ，１ｂには上下に位置
をずらして互い違いに並ぶよう内側に向けて張り出した
可動子４ａ，４ｂが設けてある。また、可動子４ａ，４
ｂに対向して、可動子４ａの上面側，および可動子４ｂ
の下面側には一対の固定子５ａ，５ｂが数十μｍ以下の
微小間隔を隔てて設けてある。さらに、可動子４ａと４
ｂとの間には微小間隔を隔てて搬送子７が介挿配備され
ており、かつ該搬送子７は可動子と平行な方向に定振幅
で往復動操作する静電アクチュエータ８に連結されてい
る。ここで、固定子６ａ，６ｂおよび搬送子７の可動子
５ａ，５ｂとの対向面には、後記のように電圧印加によ
り静電吸着させた際の短絡を防ぐために電気絶縁層９が
被着形成されている。Embodiments of the present invention will be described below with reference to the drawings. Embodiment 1 In FIG. 1, reference numerals 4a and 4b denote a pair of left and right fingers, and movable fingers 4a and 4b are provided on the respective fingers 1a and 1b so as to be shifted in the vertical direction so as to be staggered inward. is there. The movers 4a, 4
b, the upper surface of the mover 4a and the mover 4b
A pair of stators 5a and 5b are provided on the lower surface side of the device at a minute interval of several tens μm or less. Furthermore, the movers 4a and 4
b, a carrier 7 is interposed at a small interval, and the carrier 7 is connected to an electrostatic actuator 8 that reciprocates at a constant amplitude in a direction parallel to the mover. I have. Here, an electric insulating layer 9 is attached to the surfaces of the stators 6a, 6b and the carrier 7 facing the movers 5a, 5b in order to prevent a short circuit when electrostatically attracted by applying a voltage as described later. Is formed.
【００１１】なお、前記の静電アクチュエータ８は、例
えば本発明と同一発明者が先に発明した特願平３−２３
２０８４号に開示されているくし歯形のリニア静電アク
チュエータを採用するものとする。そして、前記の可動
子５ａ，５ｂ、固定子６ａ，６ｂ、および搬送子７は、
図示されてないドライバを介して直流電源より個々に＋
極，または−極の電圧が印加されるように制御回路が組
まれている。The above-mentioned electrostatic actuator 8 is, for example, disclosed in Japanese Patent Application No. Hei.
It is assumed that a comb-shaped linear electrostatic actuator disclosed in Japanese Patent No. 2084 is adopted. The movers 5a and 5b, the stators 6a and 6b, and the carrier 7
+ Individually from a DC power supply via a driver (not shown)
A control circuit is configured so that a pole or-pole voltage is applied.
【００１２】次に上記マイクログリッパの動作原理を図
３（ａ）〜（ｆ）により説明する。なお、図中の各部品
に付した＋，−の符号は印加電圧の極性を表している。 （１）まず、（ａ）図のグリッパ開放位置で搬送７を静
電アクチュエータ８の操作により左右方向（矢印Ｐ）に
定振幅で振動させる。この際に搬送子７と可動子５ａ，
５ｂは同電位とし、可動子５ａ，５ｂと固定子６ａ，６
ｂとの間に電圧を印加して可動子を固定子に静電力で吸
着保持させておく。Next, the operation principle of the micro gripper will be described with reference to FIGS. Note that the + and-signs attached to each component in the drawing indicate the polarity of the applied voltage. (1) First, the conveyor 7 is vibrated at a constant amplitude in the left-right direction (arrow P) by operating the electrostatic actuator 8 at the gripper open position in FIG. At this time, the carrier 7 and the mover 5a,
5b has the same potential, and the movers 5a, 5b and the stators 6a, 6
A voltage is applied between the movable member b and the movable member to attract and hold the movable member to the stator by electrostatic force.
【００１３】（２）次に、搬送子７の振動周期に同期さ
せて、搬送子が左端に移動したときにタイミングを合わ
せて可動子５ａと固定子６ａを同電位に切換えて吸着を
釈放するとともに、搬送子７との間に電圧を印加して可
動子５ａを搬送子７に吸着させる。（（ｂ）図参照） （３）これにより、搬送子７は可動子５ａを吸着したま
ま、静電アクチュエータ８の振動操作でフィンガー４ａ
を１ピッチ分（搬送子の振幅）だけ右側に歩進移動す
る。（（ｃ）図参照） （４）そして、搬送子７が振動振幅の右側端に達したと
ころで、搬送子７と可動子５ａとを同電位にして吸着を
解き、かつ可動子５ａと固定子６ａとの間に電圧を印加
して可動子５ａを固定子６ａに吸着させると同時に、フ
ィンガー４ｂに設けた可動子５ｂと固定子６ｂとを同電
位とし、搬送子７との間に電圧を印加して搬送子７に可
動子５ｂを吸着させる。（（ｄ）図参照） （５）これにより、搬送子７は可動子５ｂを吸着したま
ま静電アクチュエータ８の振動操作でフィンガー４ｂを
左側に歩進移動させる。（（ｅ）図参照） （６）そして、搬送子７が振動振幅の左側端に達したと
ころで、搬送子７と可動子５ｂとを同電位にして吸着を
解き、かつ可動子５ｂと固定子６ｂとの間に電圧を印加
して可動子５ｂを固定子６ｂに吸着させると同時に、再
び可動子５ａと固定子６ａとを同電位とし、搬送子７と
の間に電圧を印加して可動子５ａを搬送子７に吸着させ
る。（（ｆ）図参照） 以上の操作を１ステップとして、前記（２）〜（６）の
操作を繰り返し行うことにより、左右のフィンガー４
ａ，４ｂは先端の相互間隔を狭めるように開位置から閉
位置に向け歩進移動してワークを把持する。この場合に
フィンガーの保持力は可動子と固定子との間に印加する
電圧で与えられ、ワークのサイズに対応してフィンガー
４ａ，４ｂの送り量（搬送子７の振幅×ステップの繰り
返し数）を調整すれば、ワークのサイズに左右されるこ
となくワークがフィンガー間に正しく把持される。ま
た、前記操作を逆の手順で行えば、フィンガー４ａ，４
ｂは閉位置から開位置に向けて移動する。この場合にフ
ィンガーの送り量を制御することで、グリッパの開放状
態におけるフィンガーの開度を広範囲に調節できる。(2) Next, in synchronism with the oscillation cycle of the carrier 7, when the carrier moves to the left end, the movable member 5a and the stator 6a are switched to the same potential and the suction is released at the same timing. At the same time, a voltage is applied between the transfer element 7 and the mover 5 a to be attracted to the transfer element 7. (See FIG. (B).) (3) Thus, the carrier 7 is held by the movable member 5a while the finger 4a is operated by the vibration operation of the electrostatic actuator 8.
To the right by one pitch (the amplitude of the carrier). (4) When the carrier 7 reaches the right end of the vibration amplitude, the carrier 7 and the mover 5a are set to the same potential to release the suction, and the mover 5a and the stator are disengaged. At the same time as applying a voltage between the movable member 5a and the stator 6a, the movable member 5b and the stator 6b provided on the finger 4b are set to the same potential, and a voltage is applied between the movable member 5a and the carrier 7 at the same time. By applying the voltage, the mover 5b is attracted to the carrier 7. (See FIG. (D).) (5) Thus, the carrier 7 moves the finger 4b to the left by the vibration operation of the electrostatic actuator 8 while holding the movable element 5b. (See FIG. 7E.) (6) When the carrier 7 reaches the left end of the vibration amplitude, the carrier 7 and the mover 5b are set to the same potential to release the adsorption, and the mover 5b and the stator are disengaged. 6b, the movable element 5b is attracted to the stator 6b, and at the same time, the movable element 5a and the stator 6a are set to the same potential again, and a voltage is applied between the movable element 5b and the carrier 7 to move the movable element 5b. The child 5a is attracted to the carrier 7. (Refer to (f) of FIG ..) The above operations are defined as one step, and the above operations (2) to (6) are repeatedly performed, whereby the left and right fingers 4 are moved.
The workpieces a and 4b are stepped from the open position to the closed position so as to grip the work so as to narrow the interval between the tips. In this case, the holding force of the finger is given by the voltage applied between the mover and the stator. Is adjusted, the work can be correctly grasped between the fingers regardless of the size of the work. If the above operation is performed in the reverse order, the fingers 4a, 4
b moves from the closed position to the open position. In this case, by controlling the feed amount of the finger, the opening degree of the finger in the open state of the gripper can be adjusted over a wide range.
【００１４】実施例２：図２は実施例１をさらに発展さ
せた本発明の別な実施例を示すものである。なお、図２
では固定子は省略して描かれてない。この実施例におい
ては、搬送子を２個の搬送子７ａ，７ｂに分けてそれぞ
れ可動子５ａ，５ｂに対向させるとともに、各搬送子７
ａ，７ｂを各独立した静電アクチュエータ８ａ，８ｂに
連結して個別に振動操作するように構成されている。Embodiment 2 FIG. 2 shows another embodiment of the present invention, which is a further development of Embodiment 1. Note that FIG.
Then the stator is not drawn abbreviated. In this embodiment, the carrier is divided into two carriers 7a and 7b and opposed to the movers 5a and 5b, respectively.
a and 7b are connected to independent electrostatic actuators 8a and 8b, respectively, so that they are individually operated to vibrate.
【００１５】かかる構成において、フィンガー４ａは可
動子５ａ，固定子６ａ，搬送子７ａ，静電アクチュエー
タ８ａからなる駆動系により、またフィンガー４ｂは可
動子５ｂ，固定子６ｂ，搬送子７ｂ，静電アクチュエー
タ８ｂからなる駆動系によりそれぞれ独立的に歩進制御
される。これにより、マイクログリッパとしてより自由
度の高い開閉動作が得られる。In this configuration, the finger 4a is driven by a drive system including a mover 5a, a stator 6a, a carrier 7a, and an electrostatic actuator 8a, and the finger 4b is a mover 5b, a stator 6b, a carrier 7b, an electrostatic actuator. The stepping control is independently performed by a driving system including the actuator 8b. Thereby, a more flexible opening and closing operation can be obtained as a micro gripper.
【００１６】[0016]
【発明の効果】以上述べたように本発明の構成によれ
ば、次記の効果を奏する。 （１）可動子を歩進移動させる過程では摩擦力の働くこ
とがないので、マイクロマシンで問題となる摩擦損失を
解消して、グリッパのフィンガーを小さな駆動力で円滑
に開閉操作することができる。As described above, according to the structure of the present invention, the following effects can be obtained. (1) Since no frictional force acts in the process of moving the mover step by step, frictional loss, which is a problem in the micromachine, is eliminated, and the fingers of the gripper can be smoothly opened and closed with a small driving force.
【００１７】（２）また、開閉操作に際して歩進移動す
る各フィンガーの送り量を制御することで、把持すべき
ワークのサイズに対応してグリッパの開度を広範囲に調
整できるとともに、ワークに過大な力を加えることなく
適正な把持力でハンドリングすることが可能となる。 （３）特に、左右のフィンガーを個々に独立した搬送
子，静電アクチュエータで移動制御することにより、よ
り自由度の高い把持動作が達成できる。(2) The opening of the gripper can be adjusted over a wide range in accordance with the size of the work to be gripped by controlling the feed amount of each finger that moves stepwise during the opening / closing operation, and the work becomes excessively large. It is possible to handle with an appropriate gripping force without applying an excessive force. (3) In particular, by controlling the movement of the left and right fingers by independent carriers and electrostatic actuators, a gripping operation with a higher degree of freedom can be achieved.
【図１】本発明の実施例１に対応するマイクログリッパ
の構成斜視図FIG. 1 is a configuration perspective view of a micro gripper corresponding to a first embodiment of the present invention.
【図２】本発明の実施例２に対応するマイクログリッパ
の構成斜視図FIG. 2 is a configuration perspective view of a micro gripper corresponding to a second embodiment of the present invention.
【図３】図１の構成によるグリッパの開閉動作原理図で
あり、（ａ）〜（ｆ）はそれぞれ１ステップの動作推移
を表す図FIGS. 3A to 3F are diagrams showing the principle of opening / closing operation of the gripper according to the configuration of FIG. 1, wherein FIGS.
【図４】従来におけるマイクログリッパの一例を示す構
成図FIG. 4 is a configuration diagram showing an example of a conventional micro gripper.
４ａ，４ｂ フィンガー ５ａ，５ｂ 可動子 ６ａ，６ｂ 固定子 ７，７ａ，７ｂ 搬送子 ８，８ａ，８ｂ 静電アクチュエータ 4a, 4b Fingers 5a, 5b Mover 6a, 6b Stator 7, 7a, 7b Carrier 8, 8a, 8b Electrostatic actuator
Claims (3)
してワークを把持する静電駆動式マイクログリッパであ
って、向かい合わせに並ぶ左右一対のフィンガーと、上
下方向に位置をずらして各フィンガーより内側に突出し
た可動子と、各可動子との間に微小間隔を隔ててその上
下側に対向配備した一対の固定子と、上下に並ぶ可動子
の間に微小間隔を隔てて介挿した搬送子と、該搬送子を
可動子と平行な方向に定振幅で往復動操作する静電アク
チュエータとからなり、静電アクチュエータによる搬送
子の往復動と、この動作に同期して外部からの電圧印加
により可動子を固定子, 搬送子へ交互に吸着させてフィ
ンガーを開閉方向に歩進駆動することを特徴とする静電
駆動式マイクログリッパ。1. An electrostatically driven micro gripper for gripping a workpiece by operating a finger to open and close by driving an electrostatic force, comprising: a pair of left and right fingers facing each other; A mover protruding inward, a pair of stators arranged on the upper and lower sides facing each other with a small gap between each mover, and a conveyance inserted with a small gap between movers arranged vertically And an electrostatic actuator that reciprocates the carrier with a constant amplitude in a direction parallel to the mover. The carrier is reciprocated by the electrostatic actuator, and an external voltage is applied in synchronization with the operation. An electrostatically driven micro gripper characterized in that a mover is alternately attracted to a stator and a carrier by means of a finger to drive a finger stepwise in an opening and closing direction.
て、可動子，固定子，搬送子の相互間で対向し合う面の
少なくとも一方に電気絶縁層を被着したことを特徴とす
る静電駆動式マイクログリッパ。2. An electrostatic drive type micro-gripper according to claim 1, wherein an electrically insulating layer is applied to at least one of opposing surfaces of the mover, stator and carrier. Micro gripper.
て、搬送子を２個に分けて各可動子と個別に対向配置
し、かつ各搬送子ごとに静電アクチュエータを設けたこ
とを特徴とする静電駆動式マイクログリッパ。3. The micro-gripper according to claim 1, wherein the transport element is divided into two parts, each movable element is individually opposed to each movable element, and an electrostatic actuator is provided for each transport element. Electric drive type micro gripper.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20545793A JP2739028B2 (en) | 1993-08-20 | 1993-08-20 | Electrostatic drive type micro gripper |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20545793A JP2739028B2 (en) | 1993-08-20 | 1993-08-20 | Electrostatic drive type micro gripper |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0752072A JPH0752072A (en) | 1995-02-28 |
| JP2739028B2 true JP2739028B2 (en) | 1998-04-08 |
Family
ID=16507201
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20545793A Expired - Fee Related JP2739028B2 (en) | 1993-08-20 | 1993-08-20 | Electrostatic drive type micro gripper |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2739028B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003105175A1 (en) * | 2002-06-11 | 2003-12-18 | 松下電器産業株式会社 | Switch |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6669256B2 (en) | 2000-03-08 | 2003-12-30 | Yoshikazu Nakayama | Nanotweezers and nanomanipulator |
| DE10114551C1 (en) * | 2001-03-24 | 2002-10-02 | Karlsruhe Forschzent | microgrippers |
| JP2004345009A (en) * | 2003-05-21 | 2004-12-09 | Japan Science & Technology Agency | Micro three-dimensional structure manipulator |
| CN1319847C (en) * | 2004-06-04 | 2007-06-06 | 大连理工大学 | Electrothermal-driven flexile micro-gripper |
| JP4529012B2 (en) | 2004-07-16 | 2010-08-25 | アオイ電子株式会社 | Nano gripper device |
| JP2006026827A (en) | 2004-07-16 | 2006-02-02 | Aoi Electronics Co Ltd | Nano-gripper device with length measuring function |
| JP4643192B2 (en) * | 2004-07-16 | 2011-03-02 | アオイ電子株式会社 | Gripper |
| CN100398430C (en) * | 2004-08-12 | 2008-07-02 | 大连理工大学 | Flexible electric heat driven micro pliers |
| CN110202596A (en) * | 2018-06-12 | 2019-09-06 | 上海炫一电气有限公司 | A kind of clamping device |
-
1993
- 1993-08-20 JP JP20545793A patent/JP2739028B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003105175A1 (en) * | 2002-06-11 | 2003-12-18 | 松下電器産業株式会社 | Switch |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0752072A (en) | 1995-02-28 |
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