JP2684575B2 - Method and apparatus for producing high-concentration ozone water - Google Patents

Method and apparatus for producing high-concentration ozone water

Info

Publication number
JP2684575B2
JP2684575B2 JP1293092A JP29309289A JP2684575B2 JP 2684575 B2 JP2684575 B2 JP 2684575B2 JP 1293092 A JP1293092 A JP 1293092A JP 29309289 A JP29309289 A JP 29309289A JP 2684575 B2 JP2684575 B2 JP 2684575B2
Authority
JP
Japan
Prior art keywords
ozone
water
filter
gas
mixing tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1293092A
Other languages
Japanese (ja)
Other versions
JPH03154690A (en
Inventor
勲 澤本
善則 錦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
De Nora Permelec Ltd
Original Assignee
Permelec Electrode Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Permelec Electrode Ltd filed Critical Permelec Electrode Ltd
Priority to JP1293092A priority Critical patent/JP2684575B2/en
Publication of JPH03154690A publication Critical patent/JPH03154690A/en
Application granted granted Critical
Publication of JP2684575B2 publication Critical patent/JP2684575B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30Hydrogen technology
    • Y02E60/36Hydrogen production from non-carbon containing sources, e.g. by water electrolysis

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、水電解反応により生ずるオゾンガスを効率
良く水に溶解させて長期にわたって高純度で高濃度のオ
ゾン水を製造する方法及び装置に関する。
Description: TECHNICAL FIELD The present invention relates to a method and an apparatus for efficiently dissolving ozone gas generated by a water electrolysis reaction in water to produce high-purity and high-concentration ozone water over a long period of time.

(従来技術とその問題点) オゾンは強力でクリーンな酸化剤として注目されつつ
あり、特にその分解生成物が酸素であり従来から使用さ
れている塩素系のものと比較して残留物が被処理物中に
残留しないこと、分解速度が速くオゾンがそれ自身残留
せず二次公害の問題も全くないこと等の理由から水処理
用としての使用が増加している。
(Prior art and its problems) Ozone is attracting attention as a powerful and clean oxidizer, and its decomposition product is oxygen, and the residue is treated as compared with chlorine-based ones that have been used conventionally. It is increasingly used for water treatment because it does not remain in the product, it decomposes quickly, ozone does not itself remain, and there is no problem of secondary pollution.

このように酸化剤として有用なオゾンを発生させるた
めに従来から主として放電法及び電解法が採用されてい
るが、生成物の純度や操作の容易性から現在では電解法
が主流となっている。この電解法により発生したオゾン
を使用して水処理等を行うには気液混合状態で得られる
オゾン水をそのまま処理水と接触させたり、前記電解槽
の陽極室に被処理水を直接送り込んでオゾンと接触させ
たりしているが、前者ではオゾンが気泡状で存在するた
め被処理水との接触効率が悪くかつ電解槽で生ずるオゾ
ン水に電極物質等が混入し該物質が被処理水を汚染する
ことがあり、又後者の場合にも被処理水中の不純物によ
り電極等が汚染されるといった問題点があった。従って
多くの場合、気液混合状態で電解槽の陽極室で生成する
オゾンを一旦例えばフィルターを通して混合槽に供給し
該フィルターで不純物を除去するとともに該フィルター
で前記気液混合状態のオゾンを前記混合槽中に分散させ
てオゾンをほぼ完全に混合槽の水に溶解させガス状のオ
ゾンを含まない均一濃度のオゾン水を生成するようにし
ている。
As described above, the discharge method and the electrolysis method have been mainly used to generate ozone useful as an oxidant. However, the electrolysis method is now the mainstream because of the purity of the product and the ease of operation. To perform water treatment using ozone generated by this electrolysis method, ozone water obtained in a gas-liquid mixed state is brought into direct contact with the treated water, or the treated water is directly sent to the anode chamber of the electrolytic cell. Although it is contacted with ozone, in the former case, the ozone is present in the form of bubbles, so the contact efficiency with the water to be treated is poor and the ozone water generated in the electrolytic cell is mixed with electrode substances etc. In the latter case, there is a problem that the electrodes and the like are contaminated by impurities in the water to be treated. Therefore, in many cases, ozone generated in the anode chamber of the electrolytic cell in a gas-liquid mixed state is once supplied to the mixing tank through, for example, a filter, impurities are removed by the filter, and ozone in the gas-liquid mixed state is mixed by the filter. The ozone water is dispersed in the tank so that the ozone is almost completely dissolved in the water in the mixing tank to generate ozone water of a uniform concentration that does not contain gaseous ozone.

従来のフィルターとしては耐蝕性材料で形成された充
填材(ダッシリング等)が使用されている。前記オゾン
水は高濃度であるほど被処理水の処理効率が上昇しかつ
電解で生成するオゾンを有効に利用できるため好ましい
が、オゾンガス自体の水に対する溶解度が小さく、従来
のダッシリング等ではオゾン分散が十分に生ずるとは言
い難い。
As a conventional filter, a filler (dash ring or the like) made of a corrosion resistant material is used. The higher the concentration of the ozone water, the higher the treatment efficiency of the water to be treated and the effective use of ozone generated by electrolysis, which is preferable, but the solubility of ozone gas itself in water is small, and ozone dispersion in conventional dash ring or the like is difficult. It is hard to say that it will occur sufficiently.

電解により生成するオゾンを有効利用するため及び被
処理水を短時間で処理するためにもより高濃度のオゾン
水を製造することが好ましく、高濃度オゾン水を容易に
製造できる方法が要請されている。
In order to effectively use ozone generated by electrolysis and to treat water to be treated in a short time, it is preferable to produce ozone water having a higher concentration, and a method capable of easily producing high-concentration ozone water has been demanded. There is.

(発明の目的) 本発明は、上述した高濃度オゾンを製造し難く電解法
により生成したオゾンが無駄になりかつオゾン処理の効
率を上昇させ得ないという従来技術の欠点に鑑み、容易
に長期にわたって高純度で高濃度のオゾン水を得る方法
及び装置を提供することを目的とする。
(Object of the invention) In view of the drawbacks of the prior art that ozone produced by the electrolysis method is wasteful and the ozone treatment efficiency cannot be increased because it is difficult to produce high-concentration ozone described above, the present invention is easily and long-term. An object of the present invention is to provide a method and an apparatus for obtaining highly pure ozone water of high concentration.

(問題点を解決するための手段) 本発明は、第1に水を電解して電解槽の陽極室にオゾ
ン含有ガスを発生させ、該ガスを気液混合状態でチタン
短繊維の焼結体から成るフィルターを設置した混合槽に
供給し、該フィルターを通して該混合槽内の水に溶解さ
せ高濃度オゾン水を製造する方法であり、第2に水を電
解してその陽極室にオゾン含有ガスを発生させる電解
槽、及び気液混合状態の該オゾン含有ガスを通過させ分
散させるためのチタン短繊維の焼結体から成るフィルタ
ーが設置された混合槽を含んで成る高濃度オゾン水の製
造装置である。
(Means for Solving Problems) First, the present invention electrolyzes water to generate an ozone-containing gas in the anode chamber of an electrolytic cell, and the gas is mixed in a gas-liquid state to sinter a titanium short fiber sintered body. Is a method for producing high-concentration ozone water by dissolving the water in the mixing tank through the filter, and secondly electrolyzing the water to contain ozone-containing gas in the anode chamber. For producing high-concentration ozone water, which comprises an electrolysis tank for generating gas and a mixing tank in which a filter made of a sintered body of titanium short fibers for passing and dispersing the ozone-containing gas in a gas-liquid mixed state is installed. Is.

以下本発明を詳細に説明する。 Hereinafter, the present invention will be described in detail.

本発明は、気液混合状態で得られる電解法によるオゾ
ン含有ガスを目の細かいチタン短繊維焼結体、いわゆる
ビビリ繊維から成るフィルターが設置された混合槽に供
給し該フィルターを通過させることにより前記オゾン含
有ガスをより効果的に分散させて高濃度オゾン水を製造
しようとするものである。
The present invention, by supplying the ozone-containing gas obtained by the electrolysis method in a gas-liquid mixed state to a fine titanium short fiber sintered body, a mixing tank provided with a filter made of so-called chatter fiber and passing the filter. The ozone-containing gas is more effectively dispersed to produce high-concentration ozone water.

この短繊維焼結体から成るフィルターは三次元網状体
として形成され、縦方向の平行する多数の通孔が形成さ
れた従来のフィルターと比較して、該網状体内に空間が
不規則に形成されているため、該フィルター内を流れる
気液混合状態のオゾン含有ガスが不規則な流れを生じさ
せ、不規則な状態でフィルターから混合槽内に流れ出る
ため、該混合槽内での分散状態が非常に良好になり、従
って溶解度を高くなって高濃度オゾン水を容易に得るこ
とができるようになる。
The filter made of this short fiber sintered body is formed as a three-dimensional mesh body, and has an irregular space in the mesh body as compared with a conventional filter having a large number of through holes arranged in parallel in the longitudinal direction. Therefore, the ozone-containing gas in a gas-liquid mixed state flowing in the filter causes an irregular flow and flows out from the filter into the mixing tank in an irregular state, so that the dispersed state in the mixing tank is extremely high. Therefore, it becomes possible to easily obtain a high-concentration ozonized water by improving the solubility and increasing the solubility.

本発明に使用するフィルターはチタン製の短繊維を不
規則に絡み合わて焼結させたいわゆるビビリ繊維により
形成する。該繊維は、短繊維が不規則に絡み合わされて
いるため前述の通り一方から供給される気液混合状態の
オゾン含有ガスが他方から導出されるときに不規則な方
向に流れ出して前記混合槽内の水に十分に接触するた
め、オゾンが効率良く溶解して高濃度オゾン水を得るこ
とができる。他の条件にも依存するが、前記した従来の
ダッシリング等を使用するとオゾン濃度が約5ppmのオゾ
ン水しか得られないのに対し、本発明のフィルターによ
ると約20ppm以上のオゾン水を得ることができる。
The filter used in the present invention is formed of so-called chatter fibers which are obtained by randomly intertwining short fibers made of titanium and sintered. Since the short fibers are irregularly intertwined with each other, the ozone-containing gas in a gas-liquid mixed state supplied from one side flows out in an irregular direction when being discharged from the other side as described above, and the inside of the mixing tank Since it is in sufficient contact with water, ozone can be efficiently dissolved and highly concentrated ozone water can be obtained. Although depending on other conditions, the ozone concentration of only about 5 ppm can be obtained by using the above-mentioned conventional dash ring and the like, whereas the filter of the present invention can obtain ozone water of about 20 ppm or more. it can.

本発明のフィルターはチタン製とするがこれはオゾン
の有する酸化力に対する耐性を有しており化学的物理的
に安定であるからであり、ステンレス等では鉄、クロム
の溶出があり人体に対して有害であるため、本発明では
チタン製のフィルターを使用する。又使用するチタン短
繊維の長さ及び径は特に限定されないが、長さは1〜10
mm、径は1〜100μmとすることが好ましい。
The filter of the present invention is made of titanium because it has resistance to the oxidizing power of ozone and is chemically and physically stable, and in stainless steel, etc., iron and chromium are eluted and it is against the human body. The present invention uses a titanium filter because it is harmful. The length and diameter of the titanium short fibers used are not particularly limited, but the length is from 1 to 10
It is preferable that the diameter is mm and the diameter is 1 to 100 μm.

該フィルターの設置箇所は混合槽内部とし、該混合槽
内に、通常の電解法により生成させた気液混合状態のオ
ゾン含有ガスを導管等を通して供給し、更に該混合槽内
に設置された前記フィルターを通すことにより前述の通
り高濃度オゾン水が生成するが、フィルターを通過する
際にガス漏れが生じても全体が混合槽内に収容させてい
るため、ガス爆発等の危険が生ずることがない。
The filter is installed inside the mixing tank, and the ozone-containing gas in a gas-liquid mixed state produced by a usual electrolysis method is supplied into the mixing tank through a conduit or the like, and the filter is installed in the mixing tank. As described above, high-concentration ozone water is generated by passing through the filter, but even if a gas leak occurs when passing through the filter, the whole is contained in the mixing tank, so there is a risk of gas explosion or the like. Absent.

又本発明のフィルターは従来のフィルターと同様に濾
過機能を有し、例えば混合槽に供給される気液混合状態
のオゾン含有ガス中に混入する恐れのある電極物質等を
効率良く除去することができる。
Further, the filter of the present invention has a filtering function similar to a conventional filter, and can efficiently remove, for example, electrode substances which may be mixed in ozone-containing gas in a gas-liquid mixed state supplied to a mixing tank. it can.

(実施例) 以下添付図面に示す本発明を実施するためのフローシ
ートに基づいて本発明の実施例を説明するが、該実施例
は本発明を限定するものではない。
(Example) Hereinafter, an example of the present invention will be described based on a flow sheet for carrying out the present invention shown in the attached drawings, but the example does not limit the present invention.

実施例 添付図面に示すオゾン処理ラインを使用して次の条件
でオゾン水を製造した。
Example Using the ozone treatment line shown in the attached drawings, ozone water was produced under the following conditions.

電解有効面積90cm2の電解槽(電解オゾナイザー)1
に、陽極面に二酸化鉛粉末3を、陰極面に白金粉末4を
付着させた固体電解質であるナフィオン(商品名)製隔
膜2を装着して固体電解質型電解槽1とし、該電解槽1
内には純水1を満たした。該電解槽1に100A/dm2の電
流密度となるように通電することにより、オゾンを約15
重量%含有するオゾンと酸素の混合ガスが、27g/時(30
℃で約20/時)の割合(オゾンは4g/時)で得られ
た。前記混合ガスは前記陽極室5から導管7を通して、
市販の径が約30μmのチタン短繊維を焼結させて形成し
た直径10cm、厚さ1mmの円板状のフィルター8をその底
部に設置した混合槽9に下方から供給し、該フィルター
8を通過させ分散させて前記混合槽9内の水に溶解さ
せ、未溶解ガスは排出口10から大気に放散させた。
Electrolytic cell with 90 cm 2 of effective electrolysis area (electrolytic ozonizer)
A solid electrolyte type electrolytic cell 1 is prepared by mounting a Nafion (trade name) diaphragm 2 which is a solid electrolyte having a lead oxide powder 3 on the anode surface and a platinum powder 4 on the cathode surface.
The inside was filled with pure water 1. By supplying electricity to the electrolytic cell 1 at a current density of 100 A / dm 2 , ozone is removed at about 15
The mixed gas of ozone and oxygen, which is contained by weight%, is 27 g / hour (30
It was obtained at a rate of about 20 / hour (° C: 4 g / hour for ozone). The mixed gas is passed from the anode chamber 5 through the conduit 7,
A disc-shaped filter 8 having a diameter of 10 cm and a thickness of 1 mm formed by sintering a commercially available titanium short fiber having a diameter of about 30 μm is supplied from below to a mixing tank 9 installed at the bottom of the disc-shaped filter 8. Then, it was dispersed and dissolved in the water in the mixing tank 9, and the undissolved gas was diffused into the atmosphere through the outlet 10.

該混合槽9内に生成するオゾン水のオゾン濃度は20〜
30ppmの範囲内に維持された。
The ozone concentration of the ozone water generated in the mixing tank 9 is 20 to
It was kept within the range of 30ppm.

一方被処理水として25℃の純水を使用し1m3/時で該被
処理水を超純水製造ラインに供給し、全被処理水の30%
を分枝管11により分枝させて前記混合槽9に上方から供
給し、該混合槽9内のオゾン水と接触させて該被処理水
の酸化処理を行った。
On the other hand, pure water at 25 ° C is used as treated water, and the treated water is supplied to the ultrapure water production line at 1 m 3 / hour, and 30% of all treated water
Was branched by a branch pipe 11 and supplied to the mixing tank 9 from above, and contacted with ozone water in the mixing tank 9 to oxidize the water to be treated.

オゾンが溶解した分枝被処理水はポンプ12により、分
枝させなかった被処理水とともに、反応タンク13に供給
し、全被処理水をオゾンにより処理した。前記混合槽9
出口のオゾン水中のオゾン濃度は20ppm、排出口10のオ
ゾン濃度は5000ppmであった。又反応タンク13の被処理
水中のオゾン濃度は3.8ppmであった。又被処理水中への
チタンの溶解はなかった。
The branched treated water in which ozone was dissolved was supplied by the pump 12 to the reaction tank 13 together with the unbranched treated water, and all the treated water was treated with ozone. The mixing tank 9
The ozone concentration in the ozone water at the outlet was 20 ppm, and the ozone concentration at the outlet 10 was 5000 ppm. The ozone concentration in the water to be treated in the reaction tank 13 was 3.8 ppm. Further, titanium was not dissolved in the water to be treated.

比較例 チタン短繊維焼結体フィルターの代わりに、径が約30
μmである多数の通孔が形成されたステンレス304製の
直径10cm、厚さ1mmの円板状フィルターを使用して、実
施例と同一条件で電解により生成させたオゾン含有ガス
を混合槽に供給したところ、該混合槽内に生成するオゾ
ン水のオゾン濃度は5〜10ppmであり、又クロム及び鉄
等のオゾン水中への溶解があり、被処理水が汚染され
た。
Comparative Example Instead of the titanium short fiber sintered body filter, the diameter is about 30
Using a stainless-steel 304 disc-shaped filter with a diameter of 10 cm and a thickness of 1 mm in which a large number of through holes of μm were formed, ozone-containing gas generated by electrolysis under the same conditions as in the example was supplied to the mixing tank. As a result, the ozone concentration of the ozone water generated in the mixing tank was 5 to 10 ppm, and chromium, iron and the like were dissolved in the ozone water, and the water to be treated was contaminated.

(発明の効果) 本発明は、水の電界により生成する気液混合状態にあ
るオゾン含有ガスをフィルターを通して水中に分散させ
て高濃度オゾン水を製造する際に、該フィルターとして
チタン短繊維焼結体を使用することを特徴としている。
(Effects of the Invention) The present invention is a method of producing a high-concentration ozone water by dispersing an ozone-containing gas in a gas-liquid mixed state generated by an electric field of water into a water through a filter to produce titanium short fiber sintered as the filter. It is characterized by using the body.

該短繊維焼結体から成るフィルターは縦方向の平行す
る多数の通孔が形成された従来のフィルターと比較し
て、三次元網状体として形成され、該網状体内に空間が
不規則に形成されているため、該フィルター内を流れる
気液混合状態のオゾン含有ガスが不規則な流れを生じさ
せ、不規則な状態でフィルターから混合槽内に流れ出る
ため、該混合槽内での分散状態が非常に良好になり、従
って溶解度が高くなって高濃度オゾン水を容易に得るこ
とができるようになる。
The filter made of the short fiber sintered body is formed as a three-dimensional mesh body as compared with a conventional filter in which a large number of longitudinally parallel through holes are formed, and the spaces are irregularly formed in the mesh body. Therefore, the ozone-containing gas in a gas-liquid mixed state flowing in the filter causes an irregular flow and flows out from the filter into the mixing tank in an irregular state, so that the dispersed state in the mixing tank is extremely high. Therefore, the solubility becomes high, and the high-concentration ozone water can be easily obtained.

又フィルターが混合槽内に設置されているためガス漏
れの心配がなく、安全に操業を行うことができる。
Also, since the filter is installed in the mixing tank, there is no concern about gas leakage, and safe operation can be performed.

更に本発明に使用するフィルターはチタン製であり、
オゾンの酸化力に対する耐性があり、かつ被処理水を汚
染させず人体で無害であるため、長期間に亘って安全に
操業を継続することができる。
Further, the filter used in the present invention is made of titanium,
Since it has resistance to the oxidizing power of ozone and is harmless to the human body without contaminating the water to be treated, it is possible to safely continue the operation for a long period of time.

【図面の簡単な説明】[Brief description of the drawings]

添付図面は、本発明における、オゾン含有ガスによるオ
ゾン水の製造及び該及び水による被処理水の処理を行う
工程の一例を示すフローシートである。 1……電解槽、2……隔膜、 3……二酸化鉛粉末、4……白金粉末 5……陽極室、6……陰極室 7……導管、8……フィルター 9……混合槽、10……排出口 11……分枝管、12……ポンプ 13……反応タンク
The attached drawings are flow sheets showing an example of steps of producing ozone water using an ozone-containing gas and treating water to be treated with the ozone water according to the present invention. 1 ... Electrolyzer, 2 ... Separator, 3 ... Lead dioxide powder, 4 ... Platinum powder, 5 ... Anode chamber, 6 ... Cathode chamber, 7 ... Conduit, 8 ... Filter, 9 ... Mixing tank, 10 …… Discharge port 11 …… Branch pipe, 12 …… Pump 13 …… Reaction tank

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 FI 技術表示箇所 C25B 1/04 C25B 1/04 1/30 1/30 ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification code Internal reference number FI Technical indication C25B 1/04 C25B 1/04 1/30 1/30

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】水を電解して電解槽の陽極室にオゾン含有
ガスを発生させ、該ガスを気液混合状態でチタン短繊維
の焼結体から成るフィルターを設置した混合槽に供給
し、該フィルターを通して該混合槽内の水に溶解させ高
濃度オゾン水を製造する方法。
1. An electrolysis of water to generate an ozone-containing gas in an anode chamber of an electrolysis cell, and the gas is supplied in a gas-liquid mixture state to a mixing cell provided with a filter made of a titanium short fiber sintered body, A method for producing high-concentration ozone water by dissolving in water in the mixing tank through the filter.
【請求項2】水を電解してその陽極室にオゾン含有ガス
を発生させる電解槽、及び気液混合状態の前記オゾン含
有ガスを通過させ分散させるためのチタン短繊維の焼結
体から成るフィルターが設置された混合槽を含んで成る
高濃度オゾン水の製造装置。
2. A filter comprising an electrolytic cell for electrolyzing water to generate an ozone-containing gas in its anode chamber, and a titanium short fiber sintered body for passing and dispersing the ozone-containing gas in a gas-liquid mixed state. An apparatus for producing high-concentration ozone water, which comprises a mixing tank in which is installed.
JP1293092A 1989-11-10 1989-11-10 Method and apparatus for producing high-concentration ozone water Expired - Lifetime JP2684575B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1293092A JP2684575B2 (en) 1989-11-10 1989-11-10 Method and apparatus for producing high-concentration ozone water

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1293092A JP2684575B2 (en) 1989-11-10 1989-11-10 Method and apparatus for producing high-concentration ozone water

Publications (2)

Publication Number Publication Date
JPH03154690A JPH03154690A (en) 1991-07-02
JP2684575B2 true JP2684575B2 (en) 1997-12-03

Family

ID=17790328

Family Applications (1)

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Country Link
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Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5971368A (en) 1997-10-29 1999-10-26 Fsi International, Inc. System to increase the quantity of dissolved gas in a liquid and to maintain the increased quantity of dissolved gas in the liquid until utilized
US6235641B1 (en) 1998-10-30 2001-05-22 Fsi International Inc. Method and system to control the concentration of dissolved gas in a liquid
US6274506B1 (en) 1999-05-14 2001-08-14 Fsi International, Inc. Apparatus and method for dispensing processing fluid toward a substrate surface
US6406551B1 (en) 1999-05-14 2002-06-18 Fsi International, Inc. Method for treating a substrate with heat sensitive agents
WO2013004511A1 (en) * 2011-07-01 2013-01-10 BSH Bosch und Siemens Hausgeräte GmbH Water-bearing domestic appliance having at least one liquor storage means
JP6094241B2 (en) * 2012-04-27 2017-03-15 三菱化学株式会社 End member manufacturing method and photoreceptor drum unit manufacturing method

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0242533B1 (en) * 1986-03-11 1991-01-16 Ozonia AG Method and apparatus for conditioning feed-water by means of ozone for reverse osmosis
JPS6436784A (en) * 1987-04-08 1989-02-07 Nippon Medix Kk Ozone-producing mechanism
JPH038398Y2 (en) * 1987-08-14 1991-02-28
JPH01194994A (en) * 1988-01-29 1989-08-04 Ise Kagaku Kogyo Kk Preparation of ozone-containing water
JPH01207190A (en) * 1988-02-16 1989-08-21 Imusetsuku:Kk Device for dissolving ozone
JPH01231991A (en) * 1988-03-10 1989-09-18 Teru Kyushu Kk Device for producing ozone water

Also Published As

Publication number Publication date
JPH03154690A (en) 1991-07-02

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