JP2680536B2 - Vacuum fitting - Google Patents
Vacuum fittingInfo
- Publication number
- JP2680536B2 JP2680536B2 JP5322924A JP32292493A JP2680536B2 JP 2680536 B2 JP2680536 B2 JP 2680536B2 JP 5322924 A JP5322924 A JP 5322924A JP 32292493 A JP32292493 A JP 32292493A JP 2680536 B2 JP2680536 B2 JP 2680536B2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- flange portion
- joint
- pipe
- flange
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Flanged Joints, Insulating Joints, And Other Joints (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、超高真空の真空配管及
び容器の接続部分に用いられる真空気密シールの真空継
手に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum joint of a vacuum airtight seal used in a connecting portion of an ultrahigh vacuum vacuum pipe and a container.
【０００２】[0002]
【従来の技術】従来の超高真空気密シール継手のフラン
ジ材は、ステンレス鋼やアルミニウム合金等単一金属で
作られ、同質材料の真空容器や真空部品に溶接され、熱
膨張係数の同じガスケットを挟んで真空シールが達成さ
れて来た。ステンレス鋼は耐熱強度、耐腐食性、機械切
削良好性、溶接良好性等多くの特徴を有することから高
真空容器及び超高真空容器のナイフシール継手として広
く普及している。また、アルミニウム合金継手の場合
は、低放射化、熱伝導良好性、低輻射率、伸延良好性、
軽量等ステンレス鋼には無い特徴を持つので、その特徴
を生かした加速器等に用いられている。2. Description of the Related Art The flange material of a conventional ultra-high vacuum airtight seal joint is made of a single metal such as stainless steel or aluminum alloy and is welded to a vacuum container or a vacuum component made of the same material, and a gasket having the same coefficient of thermal expansion is used. A vacuum seal has been achieved by sandwiching it. Stainless steel is widely used as a knife seal joint for high-vacuum containers and ultra-high-vacuum containers because it has many features such as heat resistance, corrosion resistance, good machine cutting, and good weldability. Also, in the case of aluminum alloy joints, low emission, good thermal conductivity, low emissivity, good elongation,
Since it has characteristics such as lightweight that stainless steel does not have, it is used in accelerators and other applications that take advantage of these characteristics.
【０００３】しかし、どちらの真空継手の場合も10-8Pa
以下の超高真空領域に用いられる場合は、真空に対する
長手方向の内壁面はガス放出速度を低減化するための特
殊表面処理を行うとともに、真空排気時には容器全体
を、ベーキング（ガス放出のための加熱処理）によって
加熱し、真空内壁より放出されるガスをあらかじめ低下
させておく操作が必要である。However, in the case of either vacuum joint, 10 -8 Pa
When used in the following ultra-high vacuum regions, the inner wall surface in the longitudinal direction with respect to the vacuum is subjected to a special surface treatment to reduce the gas release rate, and the entire container is baked (for gas release) during vacuum evacuation. It is necessary to perform an operation of heating by heat treatment) to reduce the gas released from the inner wall of the vacuum in advance.
【０００４】ところが、これらの真空継手が加速器や超
高真空試験装置等の部品として使用される場合、その継
手の長手方向の真空内壁は、電子、イオン、γ線、Ｘ
線、紫外線等の各種の荷電粒子線、電磁波（以下放射線
と称する）の照射を受ける。このとき、壁に吸着又は化
学結合しているガス分子は、放射線の刺激を受けてガス
分子の離脱が起こる。ステンレス鋼、アルミニウム合金
の両壁材は、酸化物表面からなっているので、表面がこ
の放射線照射を受けると、酸化物形成が破壊され、化学
的に活性な酸素原子や酸素分子が飛び出し、また酸化物
層に吸蔵されているガスもこの刺激で放出されるので、
超高真空状態を崩す。また、有害なガス分子が悪影響を
及ぼし正確な表面分析が困難になったり、加速器のビー
ムの寿命を縮めてしまう。However, when these vacuum joints are used as parts for accelerators, ultra-high vacuum testers, etc., the vacuum inner wall in the longitudinal direction of the joints has electrons, ions, γ rays, X rays.
It is irradiated with various charged particle beams such as rays and ultraviolet rays, and electromagnetic waves (hereinafter referred to as radiation). At this time, the gas molecules adsorbed or chemically bound to the wall are stimulated by the radiation to be released. Since both wall materials of stainless steel and aluminum alloy consist of an oxide surface, when the surface is exposed to this radiation, the oxide formation is destroyed, chemically active oxygen atoms and oxygen molecules jump out, and The gas stored in the oxide layer is also released by this stimulus,
Break the ultra-high vacuum state. In addition, harmful gas molecules adversely affect the accuracy of surface analysis, and shorten the life of the accelerator beam.
【０００５】このような問題を解決するには、前記真空
継手を放射線刺激によるガス放出の少ない金属を用いて
作るのが最も良い。In order to solve such a problem, it is best to make the vacuum joint by using a metal that emits little gas due to radiation stimulation.
【０００６】最近、Ｘ線照射と材料のガス放出の関係
が、シンクロトロン放射光を用いて詳しく調べられた
（真空学会誌、真空第３３巻２８６頁、１９９０年
版）。この結果に基けば、最もガス放出の少ない材料は
真空溶解無酸素銅を機械切削した表面である。そのガス
放出の相対値は、従来のステンレス鋼やアルミニウム合
金より２桁ないし３桁低い値をもっている。銅の酸化膜
は薄く、真空中でベークされると酸化面が容易に還元さ
れ、純金属表面になる結果と考えられている。従って、
真空継手をこの真空溶解無酸素銅を用いて製作すれば、
超高真空状態で、放射線照射を受けても、有害なガス放
出のない真空継手を提供することができる。Recently, the relationship between X-ray irradiation and outgassing of materials has been investigated in detail using synchrotron radiation (Vacuum Society of Japan, Vol. 33, p. 286, 1990 edition). Based on this result, the least outgassing material is the machined surface of vacuum melted oxygen free copper. The relative value of the gas release is two or three orders of magnitude lower than that of conventional stainless steel and aluminum alloys. It is considered that the oxide film of copper is thin, and when it is baked in vacuum, the oxide surface is easily reduced and becomes a pure metal surface. Therefore,
If you make a vacuum joint using this vacuum melting oxygen-free copper,
It is possible to provide a vacuum joint that does not release harmful gas even when irradiated with radiation in an ultrahigh vacuum state.
【０００７】更に、最近開発された変調昇温脱離法（真
空、第３３巻１５４ 頁、１９９０版）を用いて真空溶
解無酸素銅の表面処理方法とガス放出の関係を調べた結
果を図１に示す。図１の曲線Ｃｕ−ＥＰに示されている
ように、リン酸希釈液で行われた普通の電解研磨処理が
最も低いガス放出を示している（機械研磨と電解研磨を
組み合わせた複合電解研磨はかえって良くない）。真空
装置のベーキングは、主に真空内壁に吸着する水分子を
追い出すために行われるが、電解研磨処理された無酸素
銅が最も低く、ピークの位置は約８０℃で、ステンレス
鋼のピーク値３５０ ℃は勿論、これまで報告されてい
る最も低いアルミニウムのピーク値１８０℃に比較して
も、遥かに低い。従って、真空溶解銅を用いた真空継手
は超高真空部品として最適であると言える。しかし、無
酸素銅を真空継手として用いようとすると次のような欠
点を克服しなければならない。Furthermore, the result of investigation of the relationship between the surface treatment method of vacuum-melted oxygen-free copper and gas release using the recently developed modulated temperature programmed desorption method (vacuum, Vol. 33, p. 154, 1990 edition) is shown. Shown in 1. As shown by the curve Cu-EP in FIG. 1, the conventional electropolishing treatment performed with a dilute phosphoric acid solution shows the lowest outgassing (composite electropolishing combining mechanical polishing and electropolishing It's not good). Baking of the vacuum device is mainly performed to drive out water molecules adsorbed on the inner wall of the vacuum, but the oxygen-free copper electrolytically polished is the lowest, the peak position is about 80 ° C., and the peak value of the stainless steel is 350. C. Of course, it is much lower than the lowest reported aluminum peak value of 180 ° C. of course. Therefore, it can be said that the vacuum joint using the vacuum-melted copper is optimal as an ultra-high vacuum component. However, if oxygen-free copper is used as a vacuum joint, the following drawbacks must be overcome.
【０００８】[0008]
【発明が解決しようとする課題】金属ガスケットを挟む
ナイフエッジ型真空継手は、繰り返しのベーキングと、
ガスケット交換がなされたとしても、気密シールが保持
又は再現され、且つ低いガス放出状態を形成しなければ
ならない。銅は非常に軟らかく熱膨張係数がステンレス
鋼と同じであることから、従来はガスケットとして使用
されてきた。従って、無酸素銅を、挟み付ける側のフラ
ンジに用いることは不可能であり、ナイフエッジ部分は
硬度の高い金属に置き換え、且つ前記真空基本特性、す
なわち繰り返しのベーキングとガスケット交換に耐え、
放射線照射によるガス放出を最小にする工夫をしなけれ
ばならない。A knife-edge type vacuum joint which sandwiches a metal gasket is formed by repeated baking.
Even if the gasket is replaced, the hermetic seal must be retained or replicated and a low outgassing condition created. Copper has been conventionally used as a gasket because it is very soft and has the same coefficient of thermal expansion as stainless steel. Therefore, it is impossible to use oxygen-free copper for the sandwiching side flange, the knife edge part is replaced with a metal having high hardness, and the vacuum basic characteristic, that is, withstanding repeated baking and gasket exchange,
Measures must be taken to minimize outgassing due to radiation irradiation.
【０００９】また、銅の熱伝導性はステンレス鋼の約２
０倍、アルミニウムの約２倍あり、融点はアルミニウム
の６６０ ℃に対して１０８４℃と高く、溶接性が非常
に悪い。従って、ステンレス鋼同士、アルミニウム同士
等の従来の溶接に用いられて来たＴＩＧ溶接は前記溶接
に用いることは不可能である。銅同士又は銅と他の金属
を接合するには、接合部に融点の低い金属を流し込むロ
ー付けか、エネルギー集中密度の高い電子ビーム溶接し
かない。実際の報告ではステンレスフランジ等の異種金
属溶接は、ロー付けで行っている（真空第３３巻２８６
頁、１９９０年版）。しかし、超高真空に使用される真
空容器の場合は、ベーキングを行う必要があるから、フ
ラックスを用いる低融点金属を流し込むロー付けの真空
継手には問題があり、信頼性は落ちる。残された唯一の
方法は電子ビーム溶接だけである。この場合、溶接は真
空内面側で溶接しなければならない。そうでないと真空
側には溶接時に溶解しない部分の隙間が残り、ガス放出
の原因となり好ましくないからである。The thermal conductivity of copper is about 2 that of stainless steel.
The melting point is 0 times, about twice that of aluminum, and the melting point is as high as 1084 ° C. compared to 660 ° C. of aluminum, and the weldability is very poor. Therefore, the TIG welding that has been used for the conventional welding of stainless steels, aluminum, etc. cannot be used for the above welding. In order to bond copper to each other or copper to another metal, brazing for pouring a metal having a low melting point into the joint or electron beam welding having a high energy concentration density is used. In actual reports, welding of dissimilar metals such as stainless steel flanges is done by brazing (Vacuum 33, 286).
Page, 1990 version). However, in the case of a vacuum container used for ultra-high vacuum, since it is necessary to perform baking, there is a problem with the brazed vacuum joint for pouring a low melting point metal using a flux, and the reliability is lowered. The only remaining method is electron beam welding. In this case, the welding must be performed on the inner surface of the vacuum. If this is not the case, a gap is left on the vacuum side that does not melt during welding, which is a cause of gas release and is not desirable.
【００１０】超高真空部品として使用される真空継手と
して大切な要素の一つとして、真空内壁の表面処理があ
る。酸化されやすい銅の場合、真空容器組み立て後にお
いて、表面の酸化物を除去することが必要である。一
方、継手を電子ビームで溶接すると、溶接は真空中で行
われるため、溶接時に電子ビームによって溶解した金属
が蒸気となって周辺の壁に飛散し、継手を汚してしま
う。溶接時、電子ビームの行われる部分以外をカバー等
により遮蔽する方法も考えられるが、完全とは言えな
い。従って、電子ビームによって製作される真空継手
は、製作後に真空内壁を１００％電解研磨出来る構造を
有しなければならず、また、電解液が真空容器内部の隙
間に残らないようにする必要があり、この点からも溶接
は１００％内部から行える構造を備えていなければなら
ない。One of the important elements as a vacuum joint used as an ultra-high vacuum component is the surface treatment of the vacuum inner wall. In the case of copper which is easily oxidized, it is necessary to remove the surface oxide after the vacuum container is assembled. On the other hand, when the joint is welded with an electron beam, since the welding is performed in a vacuum, the metal melted by the electron beam at the time of welding becomes vapor and scatters on the surrounding wall, thus contaminating the joint. A method of shielding a portion other than the portion where the electron beam is applied with a cover or the like at the time of welding can be considered, but it cannot be said to be perfect. Therefore, the vacuum joint manufactured by the electron beam must have a structure capable of 100% electrolytic polishing of the inner wall of the vacuum after manufacturing, and it is necessary to prevent the electrolytic solution from remaining in the gap inside the vacuum container. From this point as well, welding must have a structure capable of being performed 100% from the inside.
【００１１】これら超高真空領域に用いられる真空継手
は、数１００℃の加熱によるベーキングが繰り返し行わ
れる。しかし、銅は非常に酸化され易く、１００℃以上
のベーク時には非常に強い酸化を受け、大気に接する表
面は黒く変色してしまう。従って、銅を真空継手として
使用する場合は、大気側に接する部分には何等かの酸化
防止対策を施さなければならない。The vacuum joint used in these ultra-high vacuum regions is repeatedly baked by heating at several hundreds of degrees Celsius. However, copper is very easily oxidized, and when it is baked at 100 ° C. or higher, it is very strongly oxidized, and the surface in contact with the atmosphere is discolored black. Therefore, when copper is used as a vacuum joint, some oxidation prevention measures must be taken on the portion in contact with the atmosphere side.
【００１２】しかるに、この発明は、このような現状に
鑑みてなされたものであって、その目的とするところ
は、前記放射線照射による等、ガス放出の最も少ない電
解研磨処理を施した真空溶解無酸素銅を用いた真空継手
を提供するために、真空継手として不可欠な、繰り返し
のベーキングとガスケット交換によって気密シールを達
成できる真空継手の構造と表面処理法を提供しようとす
るものである。However, the present invention has been made in view of the above circumstances, and an object of the present invention is to perform vacuum melting without electrolysis polishing which causes the least gas emission, such as by irradiation with the radiation. In order to provide a vacuum joint using oxygen copper, it is an object of the present invention to provide a vacuum joint structure and a surface treatment method, which are indispensable as a vacuum joint and can achieve a hermetic seal by repeated baking and gasket replacement.
【００１３】[0013]
【課題を解決するための手段】すなわち、本発明は、前
記の目的を達成するために、金属ガスケットをナイフエ
ッジで挟んで気密シールを達成するフランジ部を設けた
真空継手において、前記真空継手をパイプ部と、前記パ
イプの両端開口部側又は一側開口部側に接合されるナイ
フエッジ付きのフランジ部とに分割構成し、前記パイプ
部を無酸素銅により、また前記フランジ部を無酸素銅以
外の金属により形成し、前記パイプ部と前記フランジ部
の接合部を電子ビームにより溶融接着させて一体的に連
結構成した真空継手である。[Means for Solving the Problems] That is, in order to achieve the above-mentioned object, the present invention provides a vacuum joint provided with a flange portion for achieving an airtight seal by sandwiching a metal gasket with knife edges. A pipe part and a flange part with a knife edge that is joined to both end opening sides or one side opening part side of the pipe are divided, the pipe part is made of oxygen-free copper, and the flange part is made of oxygen-free copper It is a vacuum joint formed of a metal other than the above, and a joint portion of the pipe portion and the flange portion is melt-bonded by an electron beam to be integrally connected.
【００１４】[0014]
【作用】本発明による真空継手によれば、電子ビーム溶
接が真空側のナイフエッジ内周両側で行われるため、溶
接後真空内面だけを１００％電解研磨による表面クリー
ニング処理を行うことができる。また、大気に触れる外
側の部分は、酸化防止の表面処理（メッキ）を電子ビー
ム溶接前に行うことによって、電解研磨に支障を来さな
いようにすることができる。従って、真空継手の表面処
理としては最もクリーンな状態を保つことができるの
で、継手に種々の測定器が取付けて行われる実験中に各
種の放射線が、この真空容器の内壁を照射しても、壁の
クリーン状態は保たれ、壁からのガス放出を最小にする
ことが可能となる。また、長期間使用の後、真空内壁が
汚染された場合は、再び電解を満たして内面に電解研磨
再処理を施すことが可能である。特に、ナイフエッジを
形成するフランジ部に時効硬化型金属のベリリウム銅合
金を用いた場合は、焼入れ前にナイフエッジ部を切削加
工し、且つ電解研磨後にベーキングすれば、ベリウム銅
合金の硬化作用によって、ナイフエッジは鋼のように硬
くなり、従来のステンレスエッジのように老化によるダ
レや、キズの発生が生じなくなる。According to the vacuum joint of the present invention, since electron beam welding is performed on both inner peripheral edges of the knife edge on the vacuum side, only the vacuum inner surface can be surface-cleaned by 100% electrolytic polishing after welding. In addition, the outside portion exposed to the atmosphere can be prevented from being hindered by electrolytic polishing by performing surface treatment (plating) for preventing oxidation before electron beam welding. Therefore, it is possible to maintain the cleanest condition for the surface treatment of the vacuum joint, so even if various types of radiation irradiate the inner wall of this vacuum container during the experiments conducted with various measuring instruments attached to the joint, The walls are kept clean, allowing outgassing from the walls to be minimized. If the vacuum inner wall is contaminated after long-term use, it is possible to refill it with electrolysis and subject the inner surface to electrolytic polishing retreatment. In particular, when a beryllium copper alloy of age hardening type metal is used for the flange portion forming the knife edge, the knife edge portion is cut before quenching, and if baking is performed after electrolytic polishing, the hardening action of the beryllium copper alloy The knife edge becomes hard like steel, and unlike the conventional stainless steel edge, sagging due to aging and scratches do not occur.
【００１５】[0015]
【００１６】[0016]
【実施例】以下、本発明の一実施例について、図面を参
照しながら詳細に説明する。図２は、本発明の一実施例
を示す断面図である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to the drawings. FIG. 2 is a sectional view showing one embodiment of the present invention.
【００１７】図中、Ａはパイプ部、ＢはパイプＡの両端
開口部側又は一側開口部側に接合されるフランジ部で、
これらのパイプ部Ａとフランジ部Ｂは予め別々に形成さ
れた後、ボルトで分離可能に接合された分割式のもので
ある。上記フランジ部Ｂは、金属ガスケットをナイフエ
ッツジで挟んで気密シールを達成するとともに締め付け
ボルトを取付けるためのもので、一側（外側）内周縁寄
りにナイフエッジ１，１’が一体的に切削形成されてい
る。このフランジ部Ｂはベリリウム銅合金又はステンレ
ス鋼を材質としている。一方、パイプ部Ａは真空溶解無
酸素銅からなる所定長の筒状体で、長手方向両端部には
フランジ部Ｂ嵌合用の小径部が形成されている。また、
パイプ部Ａの外壁２には酸化防止のための表面処理、例
えば黒酸化クロームメッキ３が施されている。上記フラ
ンジ部Ａの小径部Ｔに嵌合された後、両者の接合部は、
パイプ部Ａの開口部２ａ，２ｂの対向方向（矢印Ｃ，
Ｃ’方向）から電子ビームで溶接されて一体的に連結構
成される。４は溶接の痕跡である。In the drawing, A is a pipe portion, B is a flange portion joined to both end opening sides or one side opening side of the pipe A,
The pipe portion A and the flange portion B are separately formed in advance and then separably joined by bolts. The flange portion B is for sandwiching a metal gasket with a knife edge to achieve an airtight seal and for attaching a tightening bolt, and knife edges 1, 1 ′ are integrally cut and formed near one side (outer side) inner peripheral edge. ing. The flange portion B is made of beryllium copper alloy or stainless steel. On the other hand, the pipe portion A is a tubular body made of vacuum-melted oxygen-free copper and having a predetermined length, and has a small diameter portion for fitting the flange portion B at both longitudinal ends. Also,
The outer wall 2 of the pipe portion A is surface-treated to prevent oxidation, for example, black oxide chrome plating 3. After being fitted to the small diameter portion T of the flange portion A, the joint portion between them is
The direction in which the openings 2a and 2b of the pipe part A face each other (arrow C,
It is welded by an electron beam from the C'direction) and integrally connected. 4 is a trace of welding.
【００１８】図２は長い無酸素銅のパイプ部Ａの両側に
ベリリウム銅合金又はステンレス鋼のフランジＢを電子
ビーム溶接した場合の実施例であるが、パイプ部Ａが長
手方向中途部のａ，ａ’線上で切断される場合も併用し
ている。即ちこの切断面を他の真空容器に溶接する場合
もある。FIG. 2 shows an embodiment in which beryllium copper alloy or stainless steel flanges B are electron beam welded to both sides of a long oxygen-free copper pipe portion A. It is also used when cutting along the a'line. That is, this cut surface may be welded to another vacuum container.
【００１９】図３は、電子ビーム溶接完了後、真空側の
電解研磨の様子を示すものである。５，５’は電極間絶
縁を兼ねた電解液漏れ押さえ蓋である。６，６’はゴム
絶縁ガスケットで、このガスケット６，６’は液漏れを
防ぐとともに、電解研磨時にフランジ部Ｂに形成された
ナイフエッジ１，１’の保護部材としての役目を持つ。FIG. 3 shows a state of electrolytic polishing on the vacuum side after completion of electron beam welding. Reference numerals 5 and 5 ′ are electrolyte solution leakage prevention lids that also serve as insulation between electrodes. Reference numerals 6 and 6'denotes rubber insulating gaskets. The gaskets 6 and 6'prevent liquid leakage and also serve as protective members for the knife edges 1, 1'formed on the flange portion B during electrolytic polishing.
【００２０】図示の状態において、パイプ部Ａ内に電解
液７を満した後、パイプ部Ａを正極に、電解電極８を負
極にして電流を流し、パイプ部Ａの内側表面９を電解研
磨する。電解研磨完了後、洗浄、乾燥すれば、真空継手
として最良の効果を発揮することになる。In the state shown in the figure, after the pipe portion A is filled with the electrolytic solution 7, a current is passed by using the pipe portion A as a positive electrode and the electrolytic electrode 8 as a negative electrode to electropolish the inner surface 9 of the pipe portion A. . If it is washed and dried after completion of electrolytic polishing, the best effect as a vacuum joint will be exhibited.
【００２１】図４は、本発明の真空継手を実際に接続し
た場合のシール断面を示す。ガスケット１０に電解研磨
処理をした真空溶解無酸素銅を用い、且つフランジＢに
銅合金を用いた場合は、真空内面は１００％電解研磨さ
れた銅表面となるため、放射線照射を受けた場合のガス
放出を最小にすることが可能となる。また、フランジ部
Ｂにステンレス鋼を用いた場合でも、真空内面に現われ
るステンレス鋼表面はナイフエッジ１の内周面ｂの部分
だけとなるので、ガス放出に対する欠点を最小にするこ
とが可能となる。FIG. 4 shows a seal cross section when the vacuum joint of the present invention is actually connected. When the electrolysis-polished vacuum-melted oxygen-free copper is used for the gasket 10 and the copper alloy is used for the flange B, the inner surface of the vacuum is a 100% electro-polished copper surface. It is possible to minimize outgassing. Further, even when stainless steel is used for the flange portion B, the stainless steel surface that appears in the vacuum inner surface is only the inner peripheral surface b of the knife edge 1, so it is possible to minimize the drawbacks against gas release. .
【００２２】本発明は、前述したように、エネルギー密
度の高く銅の溶接が可能な電子ビームを用いて溶接を行
い、柔らかな真空溶解無酸素銅のパイプ部Ａと、銅と熱
膨張率が等しく硬度の高いステンレス鋼又は銅合金から
なるフランジ部Ｂを接合して一体化したので、放射線照
射下の超高真空環境でガス放出が少なく、且つ結合強度
の十分な真空継手を形成することができた。As described above, according to the present invention, welding is performed using an electron beam having a high energy density and capable of welding copper, and the pipe portion A of soft vacuum-melting oxygen-free copper and the coefficient of thermal expansion of copper are Since the flange portion B made of stainless steel or copper alloy having an equally high hardness is joined and integrated, it is possible to form a vacuum joint with little gas emission and sufficient bonding strength in an ultrahigh vacuum environment under irradiation of radiation. did it.
【００２３】また、電子ビーム溶接はパイプ部Ａの開口
部に対し対向方向から行うので、真空内壁側に溶接漏れ
や溶接ムラができることなく、従って溶接ムラ等に起因
する隙間からのガス放出はない。Further, since the electron beam welding is performed from the direction opposite to the opening of the pipe A, there is no welding leakage or uneven welding on the vacuum inner wall side, and therefore, no gas is released from the gap due to uneven welding. .
【００２４】更に、パイプ部Ａとフランジ部Ｂとを溶接
して両者を一体化した後に真空継手内部にリン酸希釈液
等の電解液７を満たした状態で、真空内壁面の電解研磨
を行うので、溶接等による継手内面の汚れを効果的に洗
浄できるとともに継手内壁面の平滑化が成されガス分子
の吸着を防止することができる上に、酸化膜層の除去を
行うことができる。Furthermore, after the pipe portion A and the flange portion B are welded to integrate them, the vacuum joint is filled with an electrolytic solution 7 such as a phosphoric acid diluting solution, and the inner wall surface of the vacuum is electropolished. Therefore, dirt on the inner surface of the joint due to welding or the like can be effectively cleaned, the inner wall surface of the joint can be smoothed to prevent adsorption of gas molecules, and the oxide film layer can be removed.
【００２５】更にまた、継手内部を真空状態にして全体
を加熱するベーキング処理を行うことにより、内面に付
着する水分子を脱離させるとともに、最終的な酸化膜層
の還元を行い、継手内面を清浄な純金属状態にすること
ができる。Furthermore, by performing a baking process in which the inside of the joint is evacuated to heat the whole, water molecules adhering to the inner surface are desorbed, and the final oxide film layer is reduced to clean the inner surface of the joint. It can be in a clean pure metal state.
【００２６】そして、ベーキング処理のために大気に晒
される継手外面には、溶接前に黒亜鉛メッキ等の表面処
理を施すので酸化が防止される。The outer surface of the joint exposed to the atmosphere for the baking treatment is subjected to a surface treatment such as black zinc plating before welding, so that the oxidation is prevented.
【００２７】また、フランジ部Ｂに時効硬化性があるベ
リリウム銅を用いると、予めフランジ部Ｂに切削加工さ
れているナイフエッジ１，１’は、最終段階のベーキン
グ処理により焼入れがなされてナイフエッジ１，１’は
鋼のように硬化し、非常に耐久性の高い気密シールを構
成するものとなる。この点については後に詳述する。If beryllium copper, which has an age hardening property, is used for the flange portion B, the knife edges 1, 1 ′ that have been machined in advance on the flange portion B are hardened by the baking process in the final stage, and the knife edge is then cut. 1,1 'hardens like steel and constitutes a very durable hermetic seal. This will be described in detail later.
【００２８】とりわけ、フランジ部Ｂにベリリウム銅を
使用した継手を真空容器の測定用のポートに用いた場
合、熱陰極イオンゲージや熱陰極イオン源残留ガス分析
計等の発熱を伴う測定機からの熱を、フランジ部Ｂは非
常に良く伝導し、伝導冷却効果により測定器からの熱に
よってフランジ部Ｂが加熱されてガス放出を増大させる
ことがないので、測定器の精度を損なわない。更に、銅
の低輻射率の効果によって、測定器のフィラメントから
の輻射熱を吸収せず反射するのでフィラメントの昇温を
防げず、そのためフィラメントの消費電力を押さえるこ
とができる。このような効果が得られたのは、とりもな
おさず、真空壁材料として最大の効果を発揮できる真空
溶解無酸素銅を真空継手として提供するために、真空継
手をナイフエッジ１，１’を有するフランジ部Ｂと真空
関連部品取付用のパイプ部Ａの二領域に分離し、ガス放
出の大勢を占める領域（パイプＡ）に酸化防止処理を外
壁に施した真空溶解無酸素銅を用い、ナイフエッジを形
成するフランジ部Ｂにはパイプ部Ａと同じ熱膨張係数を
持ち、且つ高硬度のステンレス鋼又は銅合金を用い、パ
イプ部Ａとフランジ部Ａの接合部を電子ビームによって
熔融溶接して両者を一体化し、電解研磨を施すことが可
能で、且つ真空側、大気側の表面処理可能な構造とした
からに外ならない。In particular, when a joint using beryllium copper for the flange portion B is used for the measurement port of the vacuum container, it is possible to measure from a measuring instrument accompanied by heat generation such as a hot cathode ion gauge or a hot cathode ion source residual gas analyzer. The flange portion B conducts heat very well, and the flange portion B is not heated by the heat from the measuring instrument due to the conduction cooling effect to increase the gas emission, so that the accuracy of the measuring instrument is not impaired. Further, due to the effect of the low emissivity of copper, radiant heat from the filament of the measuring instrument is not absorbed and reflected, so that the temperature rise of the filament cannot be prevented and therefore the power consumption of the filament can be suppressed. Such an effect was obtained in the first place, in order to provide vacuum-melting oxygen-free copper, which can exert the maximum effect as a vacuum wall material, as a vacuum joint, the vacuum joint was provided with knife edges 1, 1 '. A knife is used, which is separated into two areas, a flange portion B and a pipe portion A for attaching vacuum-related parts, and vacuum melting oxygen-free copper whose outer wall is subjected to antioxidation treatment in the region (pipe A) that accounts for the majority of gas release. The flange portion B forming the edge has the same coefficient of thermal expansion as the pipe portion A and is made of high hardness stainless steel or copper alloy, and the joint portion between the pipe portion A and the flange portion A is melt-welded by an electron beam. Both are integrated, and electrolytic polishing can be performed, and the surface treatment can be performed on the vacuum side and the atmosphere side.
【００２９】勿論、本発明による無酸素銅パイプ部Ａと
フランジ部Ｂの異種金属接合は、円形パイプに限ったも
のではなく、その断面は、楕円、長方形、等いかなる形
状のものであってもよい。Of course, the dissimilar metal joint between the oxygen-free copper pipe portion A and the flange portion B according to the present invention is not limited to a circular pipe, and its cross section may be any shape such as an ellipse or a rectangle. Good.
【００３０】なお、本発明に係る真空継手は、パイプ部
Ａを長く形成して真空容器としても使用できる。The vacuum joint according to the present invention can be used as a vacuum container by forming the pipe portion A long.
【００３１】次に、本発明の他の実施例を図５を用いて
説明する。Next, another embodiment of the present invention will be described with reference to FIG.
【００３２】図５において、２１，２１は互いに対向し
て配置される２つの銅合金製フランジ継手を示してお
り、各フランジ継手２１はフランジ部２２と真空容器に
溶接される管接続部２３とを備え、双方のフランジ継手
２１，２１が、各フランジ部２２の内面に形成されたシ
−ル面２２ａ，２２ａ間に軟質金属製のメタルガスケッ
ト２９を介在させて、締め付けボルト２４により締め付
けられるようになっている。２６は、メタルガスケット
２９を収容するためにシ−ル面２２ａ，２２ａに形成さ
れた円環状のシ−ル材収容スペ−スを示している。ナイ
フエッジ２５，２５はシ−ル材収容スぺ−ス２６内に形
成されており、エッジ２５，２５は締め付けボルトによ
ってメタルガスケット２９に喰い込み、シ−ルが形成さ
れる。In FIG. 5, reference numerals 21 and 21 denote two copper alloy flange joints arranged to face each other. Each flange joint 21 includes a flange portion 22 and a pipe connecting portion 23 welded to a vacuum container. Both flange joints 21, 21 are tightened by tightening bolts 24 with a metal gasket 29 made of a soft metal interposed between seal surfaces 22a, 22a formed on the inner surface of each flange portion 22. It has become. Reference numeral 26 denotes an annular seal material accommodation space formed on the seal surfaces 22a, 22a for accommodating the metal gasket 29. The knife edges 25, 25 are formed in a seal material accommodation space 26, and the edges 25, 25 are bited into a metal gasket 29 by a tightening bolt to form a seal.
【００３３】フランジ継手２１，２１は、全体を通常の
ベリリウム銅合金やリン青銅合金等の時効硬化型銅合金
の圧延板材及び丸棒を切削加工することにより形成され
ており、その表面には酸化防止被膜として無電解ニッケ
ルメッキによる表面処理がおこなわれており、硬質表層
２８が形成されている。無電解ニッケルメッキの厚さは
５〜２０μｍが適当であり、フランジ継手全表面でも、
また、エッジを含む大気に接する外表面にだけ限定して
も良い。なお、フランジ継手２１，２１の管接続部２３
には真空容器を含む真空部品がそれぞれ溶接によって取
り付けられる。また、実施例では無電解ニッケルメッキ
を施したが、これに限られずに無電解コバルトメッキ等
他の無電解メッキを用いてよい。もっとも、無電解メッ
キは、ベーキングが１５０℃迄の場合は、酸化の可能性
がないので不要である。The flange joints 21 and 21 are entirely formed by cutting a rolled plate material and a round bar of an age hardening type copper alloy such as a usual beryllium copper alloy or phosphor bronze alloy, and the surface thereof is oxidized. A surface treatment by electroless nickel plating is performed as an anti-coating film, and a hard surface layer 28 is formed. The appropriate thickness of electroless nickel plating is 5 to 20 μm, and even on the entire surface of the flange joint,
Further, it may be limited to only the outer surface which is in contact with the atmosphere including the edge. The pipe connecting portion 23 of the flange joint 21, 21
Vacuum components including a vacuum container are attached to each by welding. Further, in the embodiment, electroless nickel plating is applied, but the present invention is not limited to this, and other electroless plating such as electroless cobalt plating may be used. However, electroless plating is unnecessary when baking is performed up to 150 ° C. because there is no possibility of oxidation.
【００３４】なお、ベリリウム銅合金やリン青銅合金等
の時効硬化型銅合金はスプリングに使われる金属である
ため、これによって構成されたフランジ継手は強硬であ
り、ナイフエッジは刃物のように硬く鋭く形成すること
ができ、損傷を受けにくくなる。従って、対抗するシ−
ル面２２ａ，２２ａ間に軟質金属の無酸素銅のメタルガ
スケット２９を介在させてボルト２４で締め付けると、
ナイフエッジ部２５，２５がメタルガスケット２９に喰
い込みシ−ルを達成することができる。Since age-hardening type copper alloys such as beryllium copper alloys and phosphor bronze alloys are metals used for springs, the flange joint formed by them is hard and the knife edge is hard and sharp like a blade. It can be formed and is less susceptible to damage. Therefore, the opposing sea
When a metal gasket 29 of oxygen-free copper, which is a soft metal, is interposed between the ruled surfaces 22a, 22a and tightened with bolts 24,
The knife edge portions 25, 25 can bite into the metal gasket 29 to achieve a seal.
【００３５】また、シ−ル面に形成されたナイフエッジ
部の無電解ニッケルメッキ２８は、無酸素銅ガスケット
２９がフランジのシ−ル面に溶着するのを防止する働き
を持ち、更に管接続部２３の内面２７にも無電解ニッケ
ルメッキを施した場合は、銅合金素材からのガス放出を
抑制することができ、フッ素以外のガスに対する対腐食
性を向上させることができる。Further, the electroless nickel plating 28 on the knife edge portion formed on the seal surface has a function of preventing the oxygen-free copper gasket 29 from being welded to the seal surface of the flange, and further the pipe connection. When the electroless nickel plating is also applied to the inner surface 27 of the portion 23, gas release from the copper alloy material can be suppressed, and corrosion resistance to gases other than fluorine can be improved.
【００３６】なお、この実施例では、銅合金製フランジ
材としてベリリウム銅合金とリン青銅合金の例を示した
が、材料はこれに限られずに、無酸素銅ガスケットより
硬く、ナイフエッジを形成できる時効硬化型銅合金であ
れば、チタニウム銅合金、クロム銅合金、タングステン
銅合金等いかなる銅合金であっても構わない。また、酸
化防止被膜として無電解ニッケルメッキの例を示した
が、これに代えて硬質クロ−ムメッキや銀メッキ、金メ
ッキ等のメッキは勿論、大気側に限れば有機物ペイント
であってもかまわない。In this embodiment, the beryllium copper alloy and the phosphor bronze alloy are used as the flange material made of copper alloy, but the material is not limited to this, and the material is harder than the oxygen-free copper gasket and can form the knife edge. Any age-hardening type copper alloy such as titanium copper alloy, chromium copper alloy, tungsten copper alloy, etc. may be used. Although an example of electroless nickel plating is shown as the anti-oxidation coating, instead of this, hard chromium plating, silver plating, gold plating or the like may be used, and organic paint may be used as long as it is on the atmosphere side.
【００３７】更に、上記の実施例では、断面がほぼ円形
の通常の丸棒を切削加工して、フランジ部及び管接続部
が一体のフランジ継手を作製しているが、フランジ部が
角形のもの、楕円形のもの等いかなる形状であっても十
分適応できるものである。ようは、シ−ル材を２つのフ
ランジで挟んで気密を保持するフランジ継手において、
フランジ部が時効硬化型銅合金で構成されていることを
特徴とする銅合金製フランジ継手であれば、いかなる形
状であっても本発明を実施することができるものであ
る。Further, in the above-mentioned embodiment, a normal round bar having a substantially circular cross section is machined to produce a flange joint in which the flange portion and the pipe connecting portion are integrated, but the flange portion has a square shape. Any shape, such as an elliptical shape, can be sufficiently applied. In a flange joint that holds the seal material between two flanges to maintain airtightness,
The present invention can be carried out in any shape as long as it is a copper alloy flange joint characterized in that the flange portion is made of an age hardening type copper alloy.
【００３８】[0038]
【発明の効果】以上説明したように、本発明は、真空継
手をパイプ部と、前記パイプの両端開口部側又は一側開
口部側に接合されるナイフエッジ付きのフランジ部とに
分割構成し、前記パイプ部を無酸素銅により、また前記
フランジ部を無酸素銅以外の金属により形成し、前記パ
イプ部と前記フランジ部の接合部を電子ビームにより溶
融接着させて一体的に連結構成したので、電子ビーム溶
接が真空側のナイフエッジ内周面側で行われるため、溶
接後真空内面だけを１００％電解研磨による表面クリー
ニング処理を行うことができる。また、大気に触れる外
側の部分は、酸化防止の表面処理を電子ビーム溶接前に
行うことによって、電解研磨に支障を来さないようにす
ることができる。従って、真空継手の表面処理としては
最もクリーンな状態を保つことができるので、継手に種
々の測定器が取り付けて行われる実験中に各種の放射線
が、この真空容器を照射しても、壁のクリーンな状態は
保たれ、壁からのガス放出を最小にすることが可能とな
る。また、長時間使用の後、真空内壁が汚染された場合
は、再び電解液を満たして内面に電解研磨際処理を施す
こと可能である。特にナイフエッジを形成するフランジ
部に時効硬化型金属のベリリウム銅合金を用いた場合
は、焼入れ前にナイフエッジ部を切削加工し、且つ電解
研磨後にベーキングすれば、ベリリウム銅合金の硬化作
用によって、ナイフエッジは鋼のように硬くなり、従来
のステンレスエッジのように老化によるダレや、キズの
発生が生じなくなる等極めて有用な効果を奏する。As described above, according to the present invention, the vacuum joint is divided into a pipe portion and a flange portion with a knife edge which is joined to both end opening side or one side opening side of the pipe. Since the pipe portion is made of oxygen-free copper and the flange portion is made of a metal other than oxygen-free copper, the joint portion of the pipe portion and the flange portion is melt-bonded by an electron beam to be integrally connected. Since the electron beam welding is performed on the inner peripheral surface side of the knife edge on the vacuum side, only the vacuum inner surface can be subjected to surface cleaning treatment by 100% electrolytic polishing after welding. Further, the outer portion exposed to the atmosphere can be prevented from being hindered in electrolytic polishing by performing surface treatment for oxidation prevention before electron beam welding. Therefore, it is possible to maintain the cleanest condition for the surface treatment of the vacuum joint, so even if various kinds of radiation irradiate this vacuum container during the experiment in which various measuring devices are attached to the joint, A clean condition is maintained, allowing for minimal outgassing from the wall. Further, when the vacuum inner wall is contaminated after long-term use, it is possible to refill with the electrolytic solution and subject the inner surface to electrolytic polishing. Especially when using a beryllium copper alloy of age hardening type metal for the flange portion forming the knife edge, if the knife edge portion is cut before quenching, and baking is performed after electrolytic polishing, by the hardening action of the beryllium copper alloy, The knife edge becomes hard like steel, and has a very useful effect such as sagging due to aging and generation of scratches unlike the conventional stainless steel edge.
【００３９】[0039]
【００４０】[0040]
【００４１】[0041]
【００４２】（２）銅合金により製作されたフランジ継
手において、同フランジ継手のフランジ部が、その全表
面又は大気に接する一部分に、酸化防止被膜として、無
電解ニッケルメッキを施した場合は、繰り返しのベ−キ
ングに耐えること可能となり、更に無酸素銅のガスケッ
トとフランジのシ−ル面との溶着を防止することが可能
となる。(2) In the case of a flange joint made of a copper alloy, when the entire surface of the flange joint of the flange joint or a portion in contact with the atmosphere is subjected to electroless nickel plating as an antioxidant coating, the repetition is repeated. It is possible to withstand the above baking and to prevent welding between the oxygen-free copper gasket and the seal surface of the flange.
【図１】昇温脱離方法による各種金属の水分子の脱離ス
ペクトル図である。FIG. 1 is a desorption spectrum diagram of water molecules of various metals by a temperature programmed desorption method.
【図２】銅パイプとステンレス鋼又は銅合金フランジの
組み合わせと電子ビーム溶接法の説明図である。FIG. 2 is an explanatory view of a combination of a copper pipe and a stainless steel or copper alloy flange and an electron beam welding method.
【図３】電解研磨法の説明図である。FIG. 3 is an explanatory diagram of an electrolytic polishing method.
【図４】２つの真空継手を接合した状態の部分拡大断面
図である。FIG. 4 is a partially enlarged cross-sectional view of a state in which two vacuum joints are joined.
【図５】本発明の他の実施例を示す銅合金製フランジ継
手の側断面図である。FIG. 5 is a side sectional view of a copper alloy flange joint showing another embodiment of the present invention.
Ａ パイプ部 Ｂ フランジ部 １，１’ ナイフエッジ ２ パイプ部の外壁 ３ 酸化防止のための表面処理（黒酸化クロームメッ
キ） ４ 電子ビームの溶接の痕跡 ５，５’ 電解液漏れ押さえ蓋 ６，６’ ゴム絶縁ガスケット ７ 電解液（リン酸電解研磨液） ８ 電解電極 ９ パイプ部の表面 １０ 真空溶解無酸素銅ガスケット ２１ フランジ継手 ２２ フランジ部分 ２２ａ フランジ面 ２３ 管接続部 ２４ 締め付けボルト ２５ ナイフエッジ ２６ シ−ル材収容スペ−ス ２７ 真空内壁 ２８ 酸化防止被膜 ２９ メタルガスケットA Pipe part B Flange part 1,1 'Knife edge 2 Outer wall of pipe part 3 Surface treatment to prevent oxidation (black oxide chrome plating) 4 Trace of electron beam welding 5,5' Electrolyte leak prevention lid 6,6 '' Rubber insulation gasket 7 Electrolyte solution (phosphoric acid electropolishing solution) 8 Electrode electrode 9 Surface of pipe part 10 Vacuum melting oxygen-free copper gasket 21 Flange joint 22 Flange part 22a Flange surface 23 Pipe connection part 24 Tightening bolt 25 Knife edge 26 Si − Space for housing material 27 Vacuum inner wall 28 Antioxidant film 29 Metal gasket
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｆ１６Ｌ 23/16 ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification code Office reference number FI technical display area F16L 23/16
Claims (6)
気密シールを達成するフランジ部を設けた真空継手にお
いて、前記真空継手をパイプ部と、前記パイプの両端開
口部側又は一側開口部側に接合されるナイフエッジ付き
のフランジ部とに分割構成し、前記パイプ部を無酸素銅
により、また前記フランジ部を無酸素銅以外の金属によ
り形成し、前記パイプ部と前記フランジ部の接合部を電
子ビームにより溶融接着させて一体的に連結構成したこ
とを特徴とする真空継手。1. A vacuum joint provided with a flange portion for sandwiching a metal gasket with knife edges to achieve an airtight seal, wherein the vacuum joint is joined to a pipe portion and both end opening side or one side opening side of the pipe. And a flange portion with a knife edge, the pipe portion is made of oxygen-free copper, the flange portion is made of a metal other than oxygen-free copper, and the joint portion of the pipe portion and the flange portion is made electronically. A vacuum joint characterized in that the beams are melt-bonded and integrally connected to each other.
酸素銅より高硬度の銅合金で形成したことを特徴とする
請求項１記載の真空継手。2. The vacuum joint according to claim 1, wherein the flange portion with the knife edge is formed of a copper alloy having a hardness higher than that of oxygen-free copper.
テンレス鋼で形成したことを特徴とする請求項１記載の
真空継手。3. The vacuum joint according to claim 1, wherein the flange portion with the knife edge is made of stainless steel.
されることを特徴とする請求項１又は請求項３記載の真
空継手。4. The vacuum joint according to claim 1, wherein an inner surface of the pipe portion is electrolytically polished.
も一方の大気に接する外壁部分は、酸化防止の表面処理
が施されていることを特徴とする請求項１、請求項２、
請求項３又は請求項４記載の真空継手。5. The outer wall portion of at least one of the pipe portion and the flange portion, which is in contact with the atmosphere, is surface-treated to prevent oxidation.
The vacuum joint according to claim 3 or 4.
温時効硬化型合金で製作し、ナイフエッジ切削後に前記
フランジ部を時効硬化させることを特徴とする請求項１
又は請求項２記載の真空継手。6. The flange portion with the knife edge is made of a temperature rising age hardening alloy, and the flange portion is age hardened after cutting the knife edge.
Alternatively, the vacuum joint according to claim 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5322924A JP2680536B2 (en) | 1993-03-26 | 1993-12-21 | Vacuum fitting |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5-91950 | 1993-03-26 | ||
| JP9195093 | 1993-03-26 | ||
| JP5322924A JP2680536B2 (en) | 1993-03-26 | 1993-12-21 | Vacuum fitting |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0724584A JPH0724584A (en) | 1995-01-27 |
| JP2680536B2 true JP2680536B2 (en) | 1997-11-19 |
Family
ID=26433380
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5322924A Expired - Lifetime JP2680536B2 (en) | 1993-03-26 | 1993-12-21 | Vacuum fitting |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2680536B2 (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5517189B2 (en) * | 2009-06-17 | 2014-06-11 | 大阪サニタリー金属工業協同組合 | Pipe fittings for liquid food production equipment |
| KR101078164B1 (en) * | 2010-03-11 | 2011-10-28 | 포항공과대학교 산학협력단 | Electron beam generating apparatus and method of manufacturing the same |
| JP5409739B2 (en) * | 2011-09-27 | 2014-02-05 | 株式会社日立製作所 | Junction structure, electrical contact, and manufacturing method thereof |
| CN103706926A (en) * | 2013-09-13 | 2014-04-09 | 汪正友 | Process for connecting lined stainless steel clad pipes with flanges |
| KR101887500B1 (en) * | 2017-11-14 | 2018-08-10 | 마선일 | Construction Method of Pipeline for XLPE Production and Pipeline Constructed by the Same Method |
| US10772167B2 (en) | 2018-02-26 | 2020-09-08 | Communications & Power Industries Llc | Waveguide flange system |
| CN108581165A (en) * | 2018-04-16 | 2018-09-28 | 淮南新能源研究中心 | A kind of oxygen-free copper welding parameter of electron beam prediction computational methods |
| WO2023058463A1 (en) * | 2021-10-05 | 2023-04-13 | Ｊｆｅスチール株式会社 | Stainless steel and copper joint, manufacturing method therefor, and stainless steel and copper joining method |
| JP7243952B1 (en) * | 2021-10-05 | 2023-03-22 | Ｊｆｅスチール株式会社 | Joined body of stainless steel and copper, manufacturing method thereof, and joining method of stainless steel and copper |
| CN114160931A (en) * | 2021-12-30 | 2022-03-11 | 武昌船舶重工集团有限公司 | Welding method of copper tube and brass flange |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0475403U (en) * | 1990-11-14 | 1992-07-01 |
-
1993
- 1993-12-21 JP JP5322924A patent/JP2680536B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0724584A (en) | 1995-01-27 |
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