JP2676520B2 - Manufacturing method of magnetic head - Google Patents
Manufacturing method of magnetic headInfo
- Publication number
- JP2676520B2 JP2676520B2 JP63052310A JP5231088A JP2676520B2 JP 2676520 B2 JP2676520 B2 JP 2676520B2 JP 63052310 A JP63052310 A JP 63052310A JP 5231088 A JP5231088 A JP 5231088A JP 2676520 B2 JP2676520 B2 JP 2676520B2
- Authority
- JP
- Japan
- Prior art keywords
- bonding
- magnetic
- glass
- film
- glass film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Magnetic Heads (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は磁気ヘッドの製造方法に係り、特に浮動式磁
気ヘッドの接合方法に関する。The present invention relates to a method for manufacturing a magnetic head, and more particularly to a method for joining floating magnetic heads.
一般に浮動式磁気ヘッドの構造は第１図（ａ）に示す
ようにMn−Zn系フェライト等の磁性体からなるスライダ
ー１と同じくMn−Zn系フェライト等の磁性体からなる略
コ字状のコア２とを所定間隔のギャップ部３を形成する
ようにガラスにより結合した、一般にモノリシックタイ
プと称される構造と、第１図（ｂ）に示すようにセラミ
ックス等の非磁性体からなるスライダー４の一部に溝4b
を形成し、Mn−Zn系フェライト等の磁性体からなり一対
の磁気コア2a,2bを組合せ、所定間隔のギャップ部３を
形成するようにガラスで結合した後、この磁気コア2a,2
bをガラス等の接合材でスライダー４の溝4bに固定した
コンボジットタイプと称される構造が公知である。な
お、５は前記磁気コア２及び2aに巻装されたコイルであ
り、4aはコイル５の巻装スペースを保持するための溝で
ある。Generally, the structure of a floating magnetic head is, as shown in FIG. 1A, a slider 1 made of a magnetic material such as Mn-Zn ferrite and a substantially U-shaped core made of a magnetic material such as Mn-Zn ferrite. 2 and 2 are joined by glass so as to form a gap portion 3 at a predetermined interval, which is generally called a monolithic type structure, and a slider 4 made of a non-magnetic material such as ceramics as shown in FIG. 1 (b). Groove 4b in part
, A pair of magnetic cores 2a, 2b made of a magnetic material such as Mn-Zn ferrite are combined, and the two magnetic cores 2a, 2b are bonded with glass so as to form a gap portion 3 at a predetermined interval.
A structure called a convoyit type in which b is fixed to the groove 4b of the slider 4 with a bonding material such as glass is known. Reference numeral 5 is a coil wound around the magnetic cores 2 and 2a, and 4a is a groove for holding a winding space for the coil 5.
以下に磁気ヘッドのギャップ部の製造方法を説明する
と、第２図（ａ）、第２図（ｂ）は第１図（ｂ）の磁気
コア2a,2bのギャップ部３を拡大して示したものであ
る。基本的には第１図（ａ）のギャップ部３も同一なの
で説明を省略する。The method of manufacturing the gap portion of the magnetic head will be described below. FIGS. 2 (a) and 2 (b) show the gap portion 3 of the magnetic cores 2a and 2b in FIG. 1 (b) in an enlarged manner. It is a thing. Basically, the gap portion 3 in FIG.
一対の磁気コア2a,2bのギャップ対向面2c及び2dにSiO
2等からなる非磁性膜６をスパッタリング等の手段によ
り所定の厚さ形成する。SiO on the gap facing surfaces 2c and 2d of the pair of magnetic cores 2a and 2b.
A nonmagnetic film 6 made of 2 or the like is formed to a predetermined thickness by means such as sputtering.
次に、前記非磁性膜６の少くともいずれか一方に接合
用ガラス膜７をスパッタリング等の手段により所定の厚
さ形成する。次に前記接合用ガラス膜７を介して一対の
磁気コア2a,2bを突き合わせて固定し、次に前記磁気コ
ア2a,2bによって形成されたギャップ部近傍に棒状ある
いは粉末状の補強用ガラス８を配置した後、前記接合用
ガラス膜７と補強用ガラス８とが溶融するまで加熱して
両者を結合している。Next, a bonding glass film 7 is formed to a predetermined thickness on at least one of the non-magnetic films 6 by means such as sputtering. Next, a pair of magnetic cores 2a, 2b are butted and fixed via the bonding glass film 7, and then a rod-shaped or powder-shaped reinforcing glass 8 is provided in the vicinity of the gap formed by the magnetic cores 2a, 2b. After the arrangement, the bonding glass film 7 and the reinforcing glass 8 are heated until they are melted to bond them.
なお、前記非磁性膜６は前記接合用ガラス膜７および
補強用ガラス８より軟化点温度は高く上記加熱温度では
軟化せず、さらに前記非磁性膜６の膜厚寸法はギャップ
部３の幅寸法により任意に設定すればよく、通常、ギャ
ップ部３の幅寸法は約0.6〜1.0μｍとなっている。また
接合用ガラス膜７を厚く形成することによって、前記補
強用ガラス８を省略してもよい。The nonmagnetic film 6 has a higher softening point temperature than the bonding glass film 7 and the reinforcing glass 8 and does not soften at the above heating temperature. Further, the film thickness of the nonmagnetic film 6 is the width of the gap portion 3. The width dimension of the gap portion 3 is usually about 0.6 to 1.0 μm. The reinforcing glass 8 may be omitted by forming the bonding glass film 7 thick.
しかし、上記従来の磁気ヘッドの製造方法において
は、前記接合用ガラス膜７と補強用ガラス８の溶融時
に、前記接合用ガラス膜７と補強用ガラス８中に気泡7a
が発生し、磁気ヘッドの信頼性を著るしく悪化させると
いう欠点があった。However, in the conventional method of manufacturing a magnetic head described above, when the bonding glass film 7 and the reinforcing glass 8 are melted, bubbles 7a are formed in the bonding glass film 7 and the reinforcing glass 8.
Occurs, and the reliability of the magnetic head is significantly deteriorated.
本発明はかかる上記欠点を解決するためになされたも
ので、接合用ガラス膜中の気泡の発生を減少させ、磁気
ヘッドの信頼性を向上させると共に結合強度の大きい磁
気ヘッドの製造方法を提供することを目的とする。The present invention has been made to solve the above-mentioned drawbacks, and provides a method of manufacturing a magnetic head that reduces the generation of bubbles in the bonding glass film, improves the reliability of the magnetic head, and has a high bonding strength. The purpose is to
本発明に係る磁気ヘッドの製造方法は、一対の磁性体
の少くとも何れか一方のギャップ対向面に磁気ヘッドの
ギャップとなる非磁性体膜を形成し、該非磁性体膜上、
又は前記磁性体のギャップ対向面上に接合用ガラス膜を
スパッタリングにより設け、さらに、補強用ガラスを前
記一対の磁性体が形成するギャップ近傍に載置し、前記
接合用ガラス膜と補強用ガラスの溶融により前記一対の
磁性体を結合する磁気ヘッドの製造方法において、前記
接合用ガラス膜と前記補強用ガラスとの転移温度（Tg）
の差を50℃〜150℃の範囲に規制すると共に、接合時の
加熱温度を前記接合用ガラス膜の軟化点温度と等しい
か、それよりも50℃高い温度の範囲内に設定したことを
特徴とするものである。A method of manufacturing a magnetic head according to the present invention comprises forming a non-magnetic material film, which serves as a gap of a magnetic head, on at least one gap facing surface of a pair of magnetic materials, and forming a non-magnetic material film on the non-magnetic material film,
Alternatively, a bonding glass film is provided on the gap facing surface of the magnetic body by sputtering, and further reinforcing glass is placed in the vicinity of the gap formed by the pair of magnetic bodies, and the bonding glass film and the reinforcing glass are In a method of manufacturing a magnetic head in which a pair of magnetic materials are combined by melting, a transition temperature (Tg) between the bonding glass film and the reinforcing glass
Is regulated in the range of 50 ℃ ~ 150 ℃, the heating temperature at the time of bonding is equal to the softening point temperature of the glass film for bonding, or is set within the range of 50 ℃ higher than that It is what
本発明においては、接合用ガラス膜と補強用ガラスと
の転移点温度（Tg）の差を規制すると共に、結合時の加
熱温度を接合用ガラス膜の軟化点温度と等しいか、それ
より50℃高いところまでの範囲内に設定したため気泡の
発生が抑えられると共に、接合強度が大きく信頼性の高
い磁気ヘッドが得られる。In the present invention, while controlling the difference in transition point temperature (Tg) between the bonding glass film and the reinforcing glass, the heating temperature at the time of bonding is equal to or higher than the softening point temperature of the bonding glass film, or 50 ° C. Since it is set within the range up to a high place, the generation of bubbles can be suppressed, and a magnetic head having high bonding strength and high reliability can be obtained.
本発明の磁気ヘッドの製造方法は、前記従来例とほと
んど同様であり、相違点は接合用ガラス膜と補強用ガラ
スの転移点温度の差を規制すると共に、結合時の加熱温
度を前記接合用ガラス膜の軟化点温度と等しいかあるい
は50℃高いところまでの範囲に設定したことにある。す
なわち、本発明は第２図（ａ）、（ｂ）に示したように
フェライ等の磁性体からなる磁気コア2a,2bのギャップ
対向面2c及び2dに、SiO2等からなる非磁性膜６をスパッ
タリング等によりそれぞれ約0.3μｍ形成する。The manufacturing method of the magnetic head of the present invention is almost the same as the above-mentioned conventional example, the difference is that the difference in the transition point temperature of the bonding glass film and the reinforcing glass is regulated, and the heating temperature at the time of bonding is set to the above-mentioned bonding temperature. It is set to a range equal to or higher than the softening point temperature of the glass film by 50 ° C. That is, according to the present invention, as shown in FIGS. 2A and 2B, the nonmagnetic film 6 made of SiO 2 or the like is formed on the gap facing surfaces 2c and 2d of the magnetic cores 2a, 2b made of a magnetic material such as Ferei. To a thickness of about 0.3 μm by sputtering or the like.
次に、前記非磁性膜６の少くとも一方に所定の膜厚の
接合用ガラス膜７をスパッタリング等の適宜の手段によ
り形成し、次に、前記磁気コア2a及び磁気コア2bを突き
合わせて固定する。次に前記磁気コア2a,2bによって形
成されるギャップ近傍に前記接合用ガラス膜７より転移
点温度が50℃〜150℃低い、例えば棒状あるいは粉末状
あるいはペースト状の補強ガラス８を載置する。実施例
においては接合用ガラス膜７の転移点温度が400℃〜450
℃のものを使用し、補強用ガラス８としては転移点温度
が250℃〜400℃のものを使用している。なお、転移点温
度とは溶融し液化状態のガラスが冷却すると急激に固体
化するところの温度である。Next, a bonding glass film 7 having a predetermined thickness is formed on at least one side of the non-magnetic film 6 by an appropriate means such as sputtering, and then the magnetic core 2a and the magnetic core 2b are butted and fixed. . Next, a reinforcing glass 8 having a transition point temperature lower than that of the bonding glass film 7 by 50 ° C. to 150 ° C., for example, a rod-like, powdery or paste-like glass 8 is placed near the gap formed by the magnetic cores 2a and 2b. In the examples, the transition temperature of the bonding glass film 7 is 400 ° C to 450 ° C.
A glass having a transition temperature of 250 to 400 ° C. is used as the reinforcing glass 8. The transition temperature is the temperature at which the glass in a molten and liquefied state rapidly solidifies when cooled.
次に、前記接合用ガラス膜７の軟化点温度に等しいか
前記軟化点温度より50℃高い範囲内の温度、実施例にお
いては約500℃〜550℃の温度で加熱し、前記接合用ガラ
ス膜７と補強用ガラス８とを溶融し、磁気コア2aと2bと
を結合する。なお、軟化点温度とはガラスの加熱温度を
徐々に上昇していった場合固体から急激に液体状に移る
点の温度である。Next, the bonding glass film 7 is heated at a temperature equal to or higher than the softening point temperature of the bonding glass film 7 by 50 ° C., in the embodiment, about 500 ° C. to 550 ° C. 7 and the reinforcing glass 8 are melted to bond the magnetic cores 2a and 2b. The softening point temperature is the temperature at which the glass rapidly transitions from a solid to a liquid when the heating temperature of the glass is gradually increased.
ところで、第３図は種々の実験の結果をグラフ化した
ので、横軸に接合用ガラス膜７と補強用ガラス８との転
移点温度の差を示し、縦軸に気泡の発生数を示してい
る。なお、気泡の発生数の測定はギャップ部を拡大し実
測して求めた。実線Ａは結合時の加熱温度を接合用ガラ
ス膜の軟化点温度〜50℃高いところまでの範囲内にした
もので、破線Ｂは軟化点温度を上記範囲より約50℃高く
したものである。以上の実験結果から気泡7aの数によっ
て実用レベルを規定すると、気泡の発生傾向は前記転移
点温度差が50℃〜150℃、接合用ガラス膜７の軟化点温
度が等しいかあるいはそれより50℃高い温度の範囲内で
加熱した場合には曲線が急峻に変化するも気泡の発生は
少く、上記の条件以外のところでは気泡の発生が多くな
り実用上使用できないことが判明した。さらに、接合用
ガラス膜７中に生じる気泡の発生状況により結合強度を
実験測定した結果、気泡の発生が大きい程結合強度は劣
化する傾向にあることも判明した。By the way, since FIG. 3 is a graph of the results of various experiments, the horizontal axis shows the difference in transition temperature between the bonding glass film 7 and the reinforcing glass 8, and the vertical axis shows the number of bubbles generated. There is. The number of bubbles generated was measured by enlarging the gap portion and measuring it. The solid line A indicates that the heating temperature at the time of bonding is within the range from the softening point temperature of the bonding glass film to 50 ° C. higher, and the broken line B indicates that the softening point temperature is about 50 ° C. higher than the above range. From the above experimental results, if the practical level is defined by the number of bubbles 7a, the tendency of bubbles is that the transition temperature difference is 50 ° C to 150 ° C, the softening point temperature of the bonding glass film 7 is equal to or 50 ° C. It was found that when heated within a high temperature range, the curve sharply changed, but the number of bubbles was small, and the number of bubbles was large under the conditions other than the above, which made it practically unusable. Furthermore, as a result of experimentally measuring the bonding strength depending on the generation state of bubbles generated in the bonding glass film 7, it was found that the bonding strength tends to deteriorate as the generation of bubbles increases.
以上の実験結果から接合用ガラス膜と補強用ガラスの
転移点温度差が50℃〜150℃で、かつ、結合加熱温度が
接合用ガラス膜の軟化点温度に等しいかあるいは前記軟
化点温度より50℃高い温度範囲内であれば気泡の発生数
が少なく、結合強度も大きくなるので信頼性の高い磁気
ヘッドを得ることができる。From the above experimental results, the transition temperature difference between the bonding glass film and the reinforcing glass is 50 ° C to 150 ° C, and the bonding heating temperature is equal to or higher than the softening point temperature of the bonding glass film. When the temperature is in the high temperature range of ° C, the number of bubbles generated is small and the bonding strength is high, so that a highly reliable magnetic head can be obtained.
なお、前記実施例では浮動式磁気ヘッドについて説明
したがフェライト等の磁性体からなる一対の磁気コアを
ガラスを使用して結合し、ギャップ部を形成するVTR用
映像ヘッド等にも適用し得ること勿論である。Although the floating magnetic head has been described in the above embodiment, it can be applied to a VTR video head or the like in which a pair of magnetic cores made of a magnetic material such as ferrite are coupled using glass to form a gap. Of course.
叙上のように、本発明は一対の磁性体の少なくとも何
れか一方のギャップ対向面に非磁性体膜を形成し、該非
磁性体膜上に接合用ガラス膜をスパッタリング等で形成
した後、結合し、ギャップ近傍に補強用ガラスを配置
し、次に加熱して上記接合用ガラス膜を溶融して結合す
る磁気ヘッドの製造方法において、接合用ガラス膜と補
強用ガラスの転移点温度の差を50℃〜150℃に規定する
と共に、加熱温度を前記接合用ガラス膜の軟化点温度に
等しいか、それより50℃高い温度範囲内に規制すること
により、加熱結合時において接合用ガラス膜中に気泡の
発生を抑えることができると共に、結合強度も補強ガラ
スを使用しているので十分大きくすることができる。As described above, the present invention forms a non-magnetic material film on at least one gap facing surface of a pair of magnetic materials, forms a bonding glass film on the non-magnetic material film by sputtering, etc. Then, the reinforcing glass is arranged in the vicinity of the gap, and then, in the method of manufacturing the magnetic head in which the above bonding glass film is melted and bonded by heating, the difference in transition point temperature between the bonding glass film and the reinforcing glass is measured. While prescribing to 50 ℃ ~ 150 ℃, the heating temperature is equal to the softening point temperature of the bonding glass film, or by regulating within a temperature range higher by 50 ℃ than that, in the bonding glass film during heat bonding. The generation of bubbles can be suppressed, and the bonding strength can be sufficiently increased because the reinforcing glass is used.
又、接合用ガラス膜と補強用ガラスの転移温度及び接
合用ガラス膜の軟化点温度を事前に調べることは容易で
あり、上記の転移点温度と軟化点温度が明確なガラス素
材を組合せて使用する場合にも本発明の条件さえ満たす
ならば容易に気泡の発生が少ない磁気ヘッドを得ること
ができるという顕著な効果を奏する。In addition, it is easy to check the transition temperature of the bonding glass film and the reinforcing glass and the softening point temperature of the bonding glass film in advance, and use the above-mentioned glass materials with a clear transition point temperature and softening point temperature in combination. Even in this case, a remarkable effect that a magnetic head with few bubbles can be easily obtained if the conditions of the present invention are satisfied is obtained.
第１図（ａ）、（ｂ）は従来の浮動式磁気ヘッドの斜視
図、第２図（ａ）、（ｂ）はギャップ部の要部拡大図、
第３図は接合用ガラス膜と補強用ガラスとの転移点温度
差と加熱温度による気泡の発生状況を示すグラフであ
る。 図において、 1,4……スライダー、2,2a,2b……磁気コア、３……ギャ
ップ部、６……非磁性膜、７……接合用ガラス膜、８…
…補強用ガラス。1 (a) and 1 (b) are perspective views of a conventional floating magnetic head, and FIGS. 2 (a) and 2 (b) are enlarged views of a main portion of a gap portion.
FIG. 3 is a graph showing the difference in transition point temperature between the bonding glass film and the reinforcing glass and the generation of bubbles due to the heating temperature. In the figure, 1,4 ... slider, 2,2a, 2b ... magnetic core, 3 ... gap part, 6 ... nonmagnetic film, 7 ... bonding glass film, 8 ...
... Reinforcing glass.
Claims (1)
ップ対向面に磁気ヘッドのギャップとなる非磁性体膜を
形成し、該非磁性体膜上、又は前記磁性体のギャップ対
向面上に接合用ガラス膜をスパッタリングにより設け、
さらに、補強用ガラスを前記一対の磁性体が形成するギ
ャップ近傍に載置し、前記接合用ガラス膜と補強用ガラ
スの溶融により前記一対の磁性体を結合する磁気ヘッド
の製造方法において、前記接合用ガラス膜に対する前記
補強用ガラスの転移点温度（Tg）を50℃〜150℃低い範
囲に規制すると共に、接合時の加熱温度を前記接合用ガ
ラス膜の軟化点温度と等しいか、軟化点温度より50℃高
い温度の範囲内に設定したことを特徴とする磁気ヘッド
の製造方法。1. A non-magnetic film serving as a gap of a magnetic head is formed on at least one of the gap facing surfaces of a pair of magnetic bodies, and the non-magnetic film is formed on the non-magnetic film or on the gap facing surface of the magnetic body. Provide a glass film for bonding by sputtering,
Further, in the method of manufacturing a magnetic head, wherein reinforcing glass is placed in the vicinity of a gap formed by the pair of magnetic bodies, and the pair of magnetic bodies is bonded by melting the bonding glass film and the reinforcing glass. The transition temperature (Tg) of the reinforcing glass with respect to the glass film for use is regulated in the range of 50 ° C to 150 ° C lower, and the heating temperature at the time of bonding is equal to or lower than the softening point temperature of the bonding glass film. A method of manufacturing a magnetic head, characterized in that the temperature is set within a range of 50 ° C. higher.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63052310A JP2676520B2 (en) | 1988-03-04 | 1988-03-04 | Manufacturing method of magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63052310A JP2676520B2 (en) | 1988-03-04 | 1988-03-04 | Manufacturing method of magnetic head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01227207A JPH01227207A (en) | 1989-09-11 |
| JP2676520B2 true JP2676520B2 (en) | 1997-11-17 |
Family
ID=12911210
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63052310A Expired - Fee Related JP2676520B2 (en) | 1988-03-04 | 1988-03-04 | Manufacturing method of magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2676520B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5519556A (en) * | 1992-12-14 | 1996-05-21 | Sony Corporation | Magnetic head having separate fusion glass and laminating glass with a track adjustment groove in a magnetic core block |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59107414A (en) * | 1982-12-09 | 1984-06-21 | Tdk Corp | Magnetic head |
| JPS6134712A (en) * | 1984-07-25 | 1986-02-19 | Hitachi Denshi Ltd | Manufacture of magnetic head |
-
1988
- 1988-03-04 JP JP63052310A patent/JP2676520B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01227207A (en) | 1989-09-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2676520B2 (en) | Manufacturing method of magnetic head | |
| JPS6349847Y2 (en) | ||
| JP2656615B2 (en) | Magnetic head | |
| JPS59167821A (en) | Core assembly of magnetic head and its manufacture | |
| JPH07320223A (en) | Magnetic head | |
| JPH0110731Y2 (en) | ||
| KR0180053B1 (en) | Magnetic head core and method of fabrication thereof | |
| JPH03222109A (en) | Production of magnetic head | |
| EP0353998A1 (en) | Magnetic Head | |
| JPH04355208A (en) | Magnetic head device | |
| JPH05120824A (en) | Floating type magnetic head | |
| JPH0762888B2 (en) | Magnetic head | |
| JPH01220110A (en) | Gap forming method for magnetic head | |
| JPH03194711A (en) | Magnetic head | |
| JPH027210A (en) | Manufacture of magnetic head | |
| JPH05205211A (en) | Floating-type magnetic head | |
| JPH04229407A (en) | Magnetic head | |
| JPH0258712A (en) | Magnetic head and its manufacture | |
| JPH0349125B2 (en) | ||
| JPH0250307A (en) | Manufacture of magnetic head | |
| JPS60243809A (en) | Magnetic head and its production | |
| JPS6346610A (en) | Magnetic head | |
| JP2001067609A (en) | Magnetic head and its manufacture | |
| JP2001076310A (en) | Magnetic head and its production | |
| JPS63179412A (en) | Gap forming method for magnetic head |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |