JP2658412B2 - Method of spraying ceramic on metal foil - Google Patents
Method of spraying ceramic on metal foilInfo
- Publication number
- JP2658412B2 JP2658412B2 JP1194901A JP19490189A JP2658412B2 JP 2658412 B2 JP2658412 B2 JP 2658412B2 JP 1194901 A JP1194901 A JP 1194901A JP 19490189 A JP19490189 A JP 19490189A JP 2658412 B2 JP2658412 B2 JP 2658412B2
- Authority
- JP
- Japan
- Prior art keywords
- metal foil
- sprayed
- ceramic
- spraying
- foil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Coating By Spraying Or Casting (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は、生産性にすぐれるセラミック溶射金属箔の
製造方法に関する。Description: TECHNICAL FIELD The present invention relates to a method for producing a ceramic sprayed metal foil having excellent productivity.
（従来の技術） セラミック溶射は、セラミックコーティングの一手法
として広く知られている。特にプラズマ溶射法の出現以
来、その量産性にすぐれることから主に金属製品の耐摩
耗性、耐熱性、表面硬度、電気絶縁性、断熱性等の改
良、すなわち表面改質に広く用いられている。(Prior Art) Ceramic spraying is widely known as one technique of ceramic coating. Especially since the emergence of the plasma spraying method, it has been widely used for the improvement of wear resistance, heat resistance, surface hardness, electric insulation, heat insulation etc. I have.
ところが、このセラミック溶射を利用して肉厚の薄い
金属箔にセラミック層を形成しようとすると大きな問題
点がある。However, there is a large problem when it is attempted to form a ceramic layer on a thin metal foil using this ceramic spraying.
それは、セラミックの溶射の原因が酸素−アセチレン
ガスの燃焼炎あるいはアルゴンガス、窒素ガス、ヘリウ
ムガス等のプラズマ炎などの超高温雰囲気中に溶射材料
であるセラミックを供給してこれを溶融させ、溶融物を
被溶射面に衝突させ、冷却、固化させるものであるため
である。The reason for this is that the ceramic that is sprayed is supplied to an ultra-high temperature atmosphere such as a combustion flame of oxygen-acetylene gas or a plasma flame of argon gas, nitrogen gas, helium gas, etc. This is because the object collides with the surface to be sprayed, and is cooled and solidified.
すなわち、一般的な被溶射体である金属板、金属ロー
ル等に溶射する条件で金属箔にセラミックを溶射する
と、溶射時に金属箔に溶融状態で固着したセラミックの
熱が金属箔に蓄積し、その熱によって金属箔が酸化した
りあるいは金属箔が溶融して破断したりして満足な製品
は得られない。That is, when the ceramic is sprayed on the metal foil under the condition of spraying on a metal plate, a metal roll, etc., which is a general object to be sprayed, heat of the ceramic fixed in a molten state to the metal foil at the time of spraying accumulates on the metal foil. A satisfactory product cannot be obtained because the metal foil is oxidized by heat or the metal foil is melted and broken.
これを改善するためには、セラミック溶射において一
般に行われている溶射ガンの両わきにエアノズルを設
け、被溶射面に冷却エアを吹き付けながら溶射する方法
が考えられるが、この方法を用いても溶射時の金属箔の
変色あるいは破断を防止することはできない。In order to improve this, it is conceivable to provide an air nozzle on both sides of the spray gun, which is generally used in ceramic spraying, and spray while cooling air is sprayed on the surface to be sprayed. Discoloration or breakage of the metal foil at the time cannot be prevented.
従来の技術を用いて欠陥のないセラミック溶射金属箔
を得る方法は、種々検討した結果溶射条件を金属箔への
熱影響を少なくする方向で行うしかないことがわかっ
た。すなわち、溶射ガンの出力を低下し、しかもセラミ
ックの単位時間当たりの溶射量を極めて少なくしなけれ
ばならない。As a result of various studies, it has been found that the only method of obtaining a ceramic sprayed metal foil having no defect using the conventional technique is to perform the spraying condition in a direction in which the thermal effect on the metal foil is reduced. That is, the output of the spray gun must be reduced, and the spray amount of the ceramic per unit time must be extremely small.
（発明が解決しようとする課題） しかし、上記の方法によれば良好なセラミック溶射金
属箔を得ることができるが、この方法には大きな問題点
がある。(Problems to be Solved by the Invention) However, according to the above method, a good ceramic sprayed metal foil can be obtained, but this method has a serious problem.
つまり、金属箔への熱影響を低くするために溶射ガン
の出力を低くし、しかもセラミックの単位時間当たりの
溶射量を極めて少なくしているために極めて生産性が低
い点である。That is, the output of the thermal spray gun is reduced to reduce the thermal effect on the metal foil, and the thermal spray amount per unit time of the ceramic is extremely reduced, so that the productivity is extremely low.
さらに説明すると、セラミックの単位時間当たりの溶
射量はセラミック層の成膜速度にほぼ正比例する。した
がって、溶射量を極めて少なくするということは生産性
を極めて低くすることになる。また、溶射ガンの出力を
低くするとセラミックを溶融させる炎の温度が低くなる
ためにセラミックは溶融しにくくなる。そのために、溶
射ガンへのセラミック供給量が同量であっても、溶射ガ
ンの出力が低いとセラミックの溶融が不完全であり、ま
た溶融したものも温度が低いために被溶射体に付着しに
くく、付着効率が低くなる。More specifically, the amount of ceramic sprayed per unit time is almost directly proportional to the film forming speed of the ceramic layer. Therefore, making the amount of thermal spray extremely small results in extremely low productivity. Further, when the output of the thermal spray gun is lowered, the temperature of the flame for melting the ceramic is lowered, so that the ceramic is hardly melted. For this reason, even if the amount of ceramic supplied to the spray gun is the same, if the output of the spray gun is low, the melting of the ceramic is incomplete, and the molten material has a low temperature and adheres to the object to be sprayed. And the adhesion efficiency is low.
これらのために従来の技術で、金属箔にセラミックを
溶融してセラミック層を形成するのは極めて生産性が低
いものであり、金属板など肉厚の厚いものへ溶射する場
合と比例するとその溶射時間は10倍から20倍程度を要し
とても量産化は望めない。For these reasons, it is extremely low productivity to form a ceramic layer by melting a ceramic on a metal foil in the conventional technology, and the spraying is performed in proportion to the case of spraying a thick material such as a metal plate. The time is about 10 to 20 times and mass production cannot be expected.
本発明は上記の欠点を改良し、高生産性なセラミック
溶射金属箔の製造方法を提供するものである。The present invention improves the above-mentioned drawbacks and provides a method for producing a ceramic sprayed metal foil with high productivity.
（課題を解決するための手段） すなわち、本発明は金属箔を一方から巻出し他方へ巻
き取る装置の巻出側と巻取側の間での金属箔へのセラミ
ック溶射層の形成を、一担巻出し・巻取装置を停止し金
属箔を静止させ被溶射箇所の両端部を固定するとともに
該金属箔の下方にあらかじめ設置しておいた複数個の水
シャワーノズルから水を噴出させて金属箔の被溶射面裏
面に水を接触させることによって冷却しながら金属箔の
被溶射面に溶射を行い所定のセラミック溶射層を形成す
る工程と該セラミック溶射層を形成した後巻出し・巻取
り装置を駆動し、次に溶射すべき金属箔上の箇所を所定
の位置に移動させる工程との繰り返しで行うことを特徴
とするものである。(Means for Solving the Problems) That is, the present invention relates to a method for forming a ceramic sprayed layer on a metal foil between an unwinding side and a winding side of an apparatus for unwinding a metal foil from one side to another side. Stopping the unwinding / winding device, stopping the metal foil, fixing both ends of the sprayed portion, and spraying water from a plurality of water shower nozzles previously installed below the metal foil to discharge the metal. A step of spraying the sprayed surface of the metal foil to form a predetermined ceramic sprayed layer while cooling by bringing water into contact with the back surface of the sprayed surface of the foil, and an unwinding / winding device after forming the ceramic sprayed layer , And a step of moving a portion on the metal foil to be sprayed next to a predetermined position.
従来の技術では、被溶射体の冷却は溶射ガンに取り付
けたエアノズルから圧縮空気を噴射し被溶射面に吹きつ
ける方法がもっぱら用いられている。ところが、この方
法では肉厚の薄い金属箔への溶射においては、金属箔は
一般の被溶射体であるバルク材に比べると肉厚が薄いた
めに熱容量が小さく、そのために溶射時に金属箔に与え
られた熱は金属箔に蓄積しやすく、金属箔はその熱によ
り変色あるいは破断等が生じやすい。したがって、金属
箔に効率よくしかも変色、破断等を発生させずにセラミ
ックを溶射するにはより効果的な冷却法が必要である。In the prior art, a method of spraying compressed air from an air nozzle attached to a thermal spray gun and spraying the compressed air onto a thermal sprayed surface is mainly used for cooling the thermal sprayed body. However, in this method, when spraying a thin metal foil, the heat capacity is small because the metal foil is thinner than a bulk material which is a general object to be sprayed. The heat is easily accumulated in the metal foil, and the metal foil is liable to be discolored or broken by the heat. Therefore, a more effective cooling method is required to spray the ceramic efficiently without causing discoloration, breakage, and the like on the metal foil.
そこで、本発明者らは効果的な冷却法を種々検討した
結果、金属箔の裏面にその下に設けた水スプレーノズル
から冷却水をシャワー状に噴出、接触させて冷却しなが
ら溶射する方法が効果的であることを見い出した。Accordingly, the present inventors have studied various effective cooling methods, and as a result, a method of spraying cooling water from a water spray nozzle provided on the back surface of the metal foil in a shower shape, contacting and spraying cooling while cooling. Found to be effective.
このようにすると、水スプレーノズルからシャワー状
に噴出した水は金属箔の裏面に当たり、溶射時に金属箔
に伝えられた熱をすばやく奪い取ってくれる。それによ
って溶射時の金属箔の過熱を防止することができる。In this way, the water spouted from the water spray nozzle in the form of a shower hits the back surface of the metal foil and quickly removes the heat transferred to the metal foil during thermal spraying. Thus, overheating of the metal foil during thermal spraying can be prevented.
なお、金属箔の裏面を水で冷却する方法は種々考えら
れるが、本発明において水スプレーノズルを用いるのは
次のような利点がある。すなわち、水スプレーノズルか
ら噴出した水はシャワー状であり、小さな水滴となって
四方へ広がり金属箔の裏面を少ない水量でむらなく濡ら
すことができる。また、金属箔の裏面には常に新しい冷
たい水が当たるために常に一定の冷却能力に保つことが
できる。Although various methods for cooling the back surface of the metal foil with water are conceivable, using a water spray nozzle in the present invention has the following advantages. That is, the water spouted from the water spray nozzle has a shower shape, spreads in four directions as small water droplets, and can evenly wet the back surface of the metal foil with a small amount of water. In addition, since the fresh cold water always hits the back surface of the metal foil, it is possible to always maintain a constant cooling capacity.
金属箔の被溶者面の裏面をもれなく、むらなく冷却す
ることは非常に重要であり、たとえば水の接触していな
い部分があると、その部分はとたんに溶射時に変色等の
欠陥が発生してしまう。したがって、溶射を効率良く行
うにはスプレーノズルは複数個必要であり、広い面積を
冷却することが必要である。It is very important for the metal foil to be cooled evenly without leaking the back side of the surface to be welded.For example, if there is a part that does not come in contact with water, that part will cause defects such as discoloration at the time of thermal spraying. Resulting in. Therefore, in order to perform thermal spraying efficiently, a plurality of spray nozzles are required, and it is necessary to cool a large area.
また、本発明においては金属箔へのセラミック溶射
は、金属箔を一方から巻き出し他方へ巻き取る途中で行
う方法を採用している。この方法は、金属箔を切断し金
属箔を治具へ取り付けてから溶射を行う従来のバッチ式
の方法に比較し、ロール状の金属箔を切断することなく
連続的に金属箔へセラミック溶射層を形成するために非
常に生産性が優れる。しかし、この金属箔を一方から巻
出し他方へ巻き取る途中で溶射を行う方法において、従
来は溶射中も金属箔は巻出装置から巻取装置へ移動して
いた。そのため被溶射面の金属箔の両端部を固定するこ
とが困難であった。従って、溶射された金属箔は、溶射
時のセラミックと金属箔の熱収縮差による変形によって
しわを有するものであった。Further, in the present invention, a method is employed in which ceramic spraying on the metal foil is performed while the metal foil is unwound from one side and wound up on the other. This method is different from the conventional batch-type method in which the metal foil is cut, the metal foil is attached to a jig, and then sprayed.The ceramic sprayed layer is continuously applied to the metal foil without cutting the roll-shaped metal foil. Very good productivity to form. However, in the method of performing thermal spraying while unwinding the metal foil from one side and winding the other side to the other side, the metal foil has conventionally been moved from the unwinding device to the winding device even during the thermal spraying. Therefore, it has been difficult to fix both ends of the metal foil on the surface to be sprayed. Therefore, the thermally sprayed metal foil had wrinkles due to deformation due to the difference in thermal contraction between the ceramic and the metal foil during thermal spraying.
そこで、本発明では金属箔を一方から巻出し他方へ巻
取る装置の巻出側と巻取側の間での金属箔へのセラミッ
ク溶射層の形成を、一旦巻出し・巻取装置を停止し金属
箔を静止させ被溶射箇所の両端部を固定して行うことに
より、溶射時のセラミックと金属箔の熱収縮の差による
セラミック溶射銅箔の変形を形成することができる。Therefore, in the present invention, the formation of the ceramic sprayed layer on the metal foil between the unwinding side and the winding side of the apparatus for unwinding the metal foil from one side to the other side, temporarily stopping the unwinding and winding apparatus. By fixing the metal foil and fixing both ends of the portion to be sprayed, deformation of the ceramic sprayed copper foil due to a difference in thermal shrinkage between the ceramic and the metal foil at the time of spraying can be formed.
すなわち、本発明の方法では金属箔を一方から巻出し
他方へ巻き取る途中で溶射を行う方法の高い生産性を保
ちながら、かつしわのない良好なセラミック溶射金属箔
を得ることができる。That is, in the method of the present invention, it is possible to obtain a good ceramic-sprayed metal foil without wrinkles while maintaining the high productivity of the method of performing thermal spraying while unwinding the metal foil from one side and winding it on the other side.
ここで、被溶射箇所の金属箔の両端部の固定には、エ
アシリンダ、油圧シリンダ等を使用して金属箔の両端部
を上下からはさんで固定する方法が利用できる。また
は、第２図に示すような吸引装置４を用いて吸引装置の
開口面11を被溶射箇所の金属箔の両端部に接するように
設置して、開口部11内の空気を真空吸引することによっ
て金属箔端部を開口面11に吸着させて固定する方法が適
用できる。Here, in order to fix both ends of the metal foil at the sprayed portion, a method of fixing the both ends of the metal foil from above and below using an air cylinder, a hydraulic cylinder or the like can be used. Alternatively, using a suction device 4 as shown in FIG. 2, the opening surface 11 of the suction device is installed so as to be in contact with both ends of the metal foil at the sprayed portion, and the air in the opening 11 is suctioned by vacuum. Thus, a method of adsorbing and fixing the end portion of the metal foil to the opening surface 11 can be applied.
なお、本発明に用いられる金属箔は銅箔、ニッケル
箔、アルミニウム箔、亜鉛箔、銀箔、ステンレス箔、イ
ンバー合金箔などの一般に用いられる金属箔、あるいは
これらの合金、クラッド箔などが挙げられる。その中で
も銅箔はプリント配線板としてセラミック溶射銅箔を用
いる場合、回路層として最も用いやすく、非常に有用で
あり、特に好適である。The metal foil used in the present invention may be a commonly used metal foil such as a copper foil, a nickel foil, an aluminum foil, a zinc foil, a silver foil, a stainless steel foil, an invar alloy foil, or an alloy or clad foil thereof. Among them, when using a ceramic sprayed copper foil as a printed wiring board, copper foil is most easily used as a circuit layer, is very useful, and is particularly preferable.
また、溶射するセラミックとしてはアルミナ、チタニ
ア、ジルコニア、カルシア、マグネシア、チタン酸バリ
ウム、クロミア、ムライト、スピネル、コージェライト
等のセラミックを用いることができる。その中でもプリ
ント配線板に用いる場合を考えると、セラミック基板と
して実績があり溶射性も良いアルミナが好適である。Further, as the ceramic to be sprayed, ceramics such as alumina, titania, zirconia, calcia, magnesia, barium titanate, chromia, mullite, spinel and cordierite can be used. Among them, considering the case of using it for a printed wiring board, alumina which has a proven track record as a ceramic substrate and has good thermal spraying properties is preferable.
（作 用） 従来の技術では溶射時の熱影響により金属箔に変色、
溶断などの欠陥が発生しやすく、これを防止するために
は溶射ガンの出力を極力低くし、しかも単位時間当たり
の溶射量を極めて少なくする必要があった。そのために
量産性は極めて低く、歩留りすなわち金属箔へのセラミ
ックの付着効率も低いものであった。(Operation) In the conventional technology, the metal foil discolors due to the heat effect during thermal spraying.
Defects such as fusing easily occur. To prevent this, it is necessary to reduce the output of the spray gun as much as possible and to extremely reduce the amount of spray per unit time. Therefore, the mass productivity was extremely low, and the yield, that is, the efficiency of attaching the ceramic to the metal foil was low.
ところが本発明の方法によれば、金属箔の被溶射面の
裏面はその下に設けたスプレーノズルから噴出する水が
噴射し絶えず冷却しているので、溶射時に金属箔に伝え
られた熱はすばやく水に伝わり溶射時の金属箔の過熱を
防止することができる。それによって従来は不可能であ
った。一般的なバルク材への溶射と同様な高出力・大量
溶射が可能となり著しく量産性、歩留りを向上すること
ができる。However, according to the method of the present invention, since the water sprayed from the spray nozzle provided below the back surface of the sprayed surface of the metal foil is constantly cooled by jetting, the heat transferred to the metal foil at the time of spraying quickly. It can be transmitted to water to prevent overheating of the metal foil during thermal spraying. This has not been possible previously. The same high-output and large-volume thermal spraying as the general thermal spraying on bulk materials can be performed, and mass productivity and yield can be remarkably improved.
さらに本発明は、金属箔への溶射を金属箔の巻出装置
と巻取装置の間で行うため非常に生産性が優れている。Further, in the present invention, the thermal spraying on the metal foil is performed between the unwinding device and the winding device of the metal foil, so that the productivity is extremely excellent.
また、溶射中には一旦巻出し巻取装置を停止し金属箔
を静止させ被溶射箇所の端部を固定するので、セラミッ
クと金属箔の熱収縮の差によって発生する変形を防止す
ることが可能であり、良好なセラミック溶射銅箔が得ら
れる。Also, during thermal spraying, the unwinding and winding device is stopped once, the metal foil is stopped, and the end of the sprayed part is fixed, so it is possible to prevent deformation caused by the difference in thermal shrinkage between ceramic and metal foil. And a good ceramic sprayed copper foil is obtained.
（実施例） 本発明の一実施例を第１図及び第２図に基づき説明す
る。幅540mm、厚み18μｍのロール状の銅箔１を巻出装
置２から巻出し、巻取装置３へ巻取るように取り付け
た。巻出し装置２、巻出装置３を停止し銅箔１を静止さ
せ、銅箔１下面に設置した吸引装置４で銅箔１を吸引装
置４の開口部11に吸着して固定する。吸引装置４の外観
を第２図に示す。吸引装置４は銅箔１と接触する面、す
なわち上面に開口部11を有し、該開口部11は銅箔１の被
溶射面６の裏面を取り囲む形になっている。(Embodiment) An embodiment of the present invention will be described with reference to FIG. 1 and FIG. A roll-shaped copper foil 1 having a width of 540 mm and a thickness of 18 μm was unwound from the unwinding device 2, and was mounted so as to be wound on the winding device 3. The unwinding device 2 and the unwinding device 3 are stopped, the copper foil 1 is stopped, and the copper foil 1 is sucked and fixed to the opening 11 of the suction device 4 by the suction device 4 installed on the lower surface of the copper foil 1. FIG. 2 shows the external appearance of the suction device 4. The suction device 4 has an opening 11 on the surface in contact with the copper foil 1, that is, on the upper surface, and the opening 11 surrounds the back surface of the sprayed surface 6 of the copper foil 1.
この吸引装置４はホース12で真空ポンプ（図示せず）
に接続されており、開口部11内の空気を吸引することに
より銅箔１端部を開口部11に吸着する構造となってい
る。このようにして被溶射面６の両端部を固定した銅箔
の裏面に対して銅箔１の被溶射面６の下方、すなわち吸
引装置４の内側に設置した複数の水スプレーノズル５か
らシャワー状の水を噴出し、銅箔１を冷却した。水スプ
レーノズル５は被溶射面６の裏面をむらなく冷却するた
めに100個設置した。このようにして被溶射面６の裏面
に水をあてて冷却しながら被溶射面６にプラズマ溶射ガ
ン７を用いてアルミナ溶射層を100μｍの厚さに形成し
た。このときのプラズマ溶射ガンの出力は、従来金属箔
への溶射には適用できなかった一般のバルク材へ溶融す
るときの条件と同等以上である溶射電流900A、アルミナ
供給量50g/minとした。This suction device 4 is connected to a hose 12 by a vacuum pump (not shown).
The end of the copper foil 1 is sucked into the opening 11 by sucking the air in the opening 11. In this manner, the plurality of water spray nozzles 5 installed below the sprayed surface 6 of the copper foil 1, that is, inside the suction device 4, form a shower with respect to the back surface of the copper foil to which both ends of the sprayed surface 6 are fixed. Of water was spouted to cool the copper foil 1. One hundred water spray nozzles 5 were provided to cool the back surface of the sprayed surface 6 evenly. In this manner, an alumina sprayed layer was formed to a thickness of 100 μm on the sprayed surface 6 by using the plasma spray gun 7 while cooling by spraying water on the back surface of the sprayed surface 6. At this time, the output of the plasma spray gun was set to a spraying current of 900 A and an alumina supply rate of 50 g / min, which are equal to or higher than the conditions for melting into a general bulk material which could not be applied to the conventional metal foil spraying.
このようにして一つの被溶射面６へのアルミナ溶射を
完了した後には、被溶射面６の端部の固定を解除し巻出
装置２、巻取装置３を駆動し、次に溶射すべき銅箔１上
の被溶射面６を所定の位置にまで移動させた。After completing the alumina spraying on one sprayed surface 6 in this way, the fixing of the end of the sprayed surface 6 is released, the unwinding device 2 and the winding device 3 are driven, and then the spraying is to be performed. The sprayed surface 6 on the copper foil 1 was moved to a predetermined position.
以上の工程を繰り返し行いロール状の銅箔１に対し、
銅箔１を切断することなく溶射を行った。By repeating the above steps, for the roll-shaped copper foil 1,
Thermal spraying was performed without cutting the copper foil 1.
このようにしてアルミナ溶射層を形成した銅箔１は、
従来問題となっていた銅箔１の過熱による変色や破断、
さらに溶射時のアルミナと銅箔１の熱収縮の差によって
起こる変形やしわは全く発生しなかった。すなわち、銅
箔１の被溶射面６の裏面をスプレーノズル５から噴出さ
せた水で冷却することにより、銅箔１の過熱による変色
や破断を防止するとともに被溶射面６の銅箔１の端部を
吸引装置４の開口部11に吸着して固定することによって
溶射時のアルミナと銅箔１の熱収縮の差によって起こる
変形やしわの発生を防止することもできた。The copper foil 1 on which the alumina sprayed layer is formed as described above,
Discoloration or breakage due to overheating of the copper foil 1, which has been a problem in the past,
Furthermore, no deformation or wrinkling occurred due to the difference in thermal shrinkage between the alumina and the copper foil 1 during thermal spraying. That is, by cooling the back surface of the sprayed surface 6 of the copper foil 1 with water jetted from the spray nozzle 5, discoloration or breakage due to overheating of the copper foil 1 is prevented, and the end of the copper foil 1 of the sprayed surface 6 is prevented. By adsorbing and fixing the portion to the opening 11 of the suction device 4, deformation and wrinkling caused by a difference in thermal shrinkage between the alumina and the copper foil 1 during thermal spraying could be prevented.
その結果、大きさ540mm角の被溶射面６へアルミナ溶
射層を100μｍの厚さで形成するのに要した時間は、従
来の変色を防止するために溶射出力を絞って溶射する方
法で50min以上であったのにくらべ、本発明の方法で
は、その1/10以下の5minであり著しく量産性を高めるこ
とができた。さらに、本発明の方法ではロール状の銅箔
１を切断することなく、巻出し・巻取りの途中で銅箔１
へ溶射ができるため非常に能率的である。As a result, the time required to form an alumina sprayed layer with a thickness of 100 μm on the sprayed surface 6 having a size of 540 mm square is 50 min or more by the conventional method of spraying with a reduced spraying output to prevent discoloration. In comparison with the method of the present invention, the method of the present invention was 5 min, which is 1/10 or less of that, and the mass productivity was significantly improved. Further, in the method of the present invention, the copper foil 1 is not cut during the unwinding and winding without cutting the rolled copper foil 1.
It is very efficient because thermal spraying is possible.
（発明の効果） 以上述べてきたように、本発明の方法、すなわち金属
箔を一方から巻出し他方へ巻き取る装置の巻き出し・巻
取側の間での金属箔へのセラミック溶射層の形成を、一
旦巻出し・巻取装置を停止し金属箔を静止させ、被溶射
部の金属箔両端部を固定するとともに金属箔の下方に設
置した複数個の水シャワーノズルから水を噴出させて金
属箔の被溶射面裏面に水を接触させることによって冷却
しながら金属箔の被溶射面に溶射を行い所定のセラミッ
ク溶射層を形成する工程と該セラミック溶射層を形成し
た後巻出し・巻取装置を駆動し、次に溶射すべき金属箔
上の箇所を所定の位置にまで移動させる工程との繰り返
しで行うことを特徴とする金属箔へのセラミックの溶射
方法を用いれば、金属箔の過熱による変色や破断、さら
に溶射時のセラミックと金属箔の熱収縮の差によって発
生する変形やしわを防止しながら、一般バルク材への溶
射時と同等以上の溶射出力で溶射が可能となり、量産性
にすぐれた金属箔へのセラミック溶射ができる。(Effects of the Invention) As described above, the method of the present invention, that is, the formation of a ceramic sprayed layer on a metal foil between the unwinding and winding sides of an apparatus for unwinding a metal foil from one side to another side. Once the unwinding / winding device is stopped, the metal foil is stopped, and both ends of the metal foil to be sprayed are fixed, and water is jetted out from a plurality of water shower nozzles installed below the metal foil. A step of forming a predetermined ceramic sprayed layer by spraying the sprayed surface of the metal foil while cooling by bringing water into contact with the back surface of the sprayed surface of the foil, and an unwinding / winding device after forming the ceramic sprayed layer By using a method of spraying ceramic onto the metal foil, which is performed by repeating the process of moving the point on the metal foil to be sprayed to a predetermined position to a predetermined position, by overheating of the metal foil, Discoloration, breakage, and even melting While preventing deformation and wrinkles caused by the difference in thermal shrinkage between ceramic and metal foil at the time of firing, spraying is possible with a spraying power equal to or higher than that of spraying general bulk materials, resulting in metal foil with excellent mass productivity Ceramic spraying.
第１図は本発明の一実施例である銅箔へのアルミナ溶射
の様子を示す斜視図、第２図は本発明の吸引装置の斜視
図である。 符号の説明 １……銅箔、２……巻出装置 ３……巻取装置、４……吸引装置 ５……水スプレーノズル、６……被溶射面 ７……プラズマ溶射ガン 11……開口部、12……ホースFIG. 1 is a perspective view showing a state of spraying alumina onto a copper foil as one embodiment of the present invention, and FIG. 2 is a perspective view of a suction device of the present invention. DESCRIPTION OF SYMBOLS 1 ... Copper foil 2 ... Unwinding device 3 ... Winding device 4 ... Suction device 5 ... Water spray nozzle, 6 ... Surface to be sprayed 7 ... Plasma spray gun 11 ... Opening Part, 12 ... hose
フロントページの続き (56)参考文献 特開 平２−258965（ＪＰ，Ａ) 特開 平２−80549（ＪＰ，Ａ) 特開 平２−80548（ＪＰ，Ａ) 特開 昭62−256955（ＪＰ，Ａ) 特開 昭63−86855（ＪＰ，Ａ) 特開 昭54−137331（ＪＰ，Ａ)Continuation of the front page (56) References JP-A-2-258965 (JP, A) JP-A-2-80549 (JP, A) JP-A-2-80548 (JP, A) JP-A-62-256955 (JP) JP-A-63-86855 (JP, A) JP-A-54-137331 (JP, A)
Claims (4)
置の巻き出し・巻取側の間での金属箔へのセラミック溶
射層の形成を、一旦巻出し・巻取装置を停止し金属箔を
静止させ被溶射部の金属箔両端部を固定するとともに該
金属箔の下方に設置した複数個のシャワーノズルから水
を噴出させて金属箔の被溶射面裏面に水を接触させなが
ら金属箔の被溶射面に溶射を行い所定のセラミック溶射
層を形成する工程と、該セラミック溶射層を形成した後
巻出し・巻取装置を駆動し、次に溶射すべき金属箔上の
箇所を所定の位置にまで移動させる工程との繰り返しで
行うことを特徴とする金属箔へのセラミックの溶射方
法。1. A method for forming a ceramic sprayed layer on a metal foil between an unwinding and winding side of an apparatus for unwinding and winding up a metal foil from one side to the other side. While holding the foil stationary, fixing both ends of the metal foil of the sprayed portion and spraying water from a plurality of shower nozzles installed below the metal foil, the metal foil is brought into contact with the back surface of the sprayed surface of the metal foil with water. Forming a predetermined ceramic sprayed layer by spraying on the surface to be sprayed, and driving the unwinding / winding device after the ceramic sprayed layer is formed, and then a predetermined position on the metal foil to be sprayed is specified. A method of spraying ceramic onto a metal foil, which is performed by repeating a step of moving the ceramic to a position.
の両端部を吸引機能を有する吸引装置の開口部に吸着さ
せることによって行う請求項１記載の金属箔へのセラミ
ックの溶射方法。2. The thermal spraying of ceramics on a metal foil according to claim 1, wherein both ends of the metal foil of the portion to be sprayed are fixed by sucking both ends of the metal foil into openings of a suction device having a suction function. Method.
へのセラミックの溶射方法。3. The method according to claim 1, wherein the metal foil is a copper foil.
するものである請求項１記載の金属箔へのセラミックの
溶射方法。4. The method for spraying ceramic onto a metal foil according to claim 1, wherein the ceramic to be sprayed contains alumina as a main component.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1194901A JP2658412B2 (en) | 1989-07-27 | 1989-07-27 | Method of spraying ceramic on metal foil |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1194901A JP2658412B2 (en) | 1989-07-27 | 1989-07-27 | Method of spraying ceramic on metal foil |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0361354A JPH0361354A (en) | 1991-03-18 |
| JP2658412B2 true JP2658412B2 (en) | 1997-09-30 |
Family
ID=16332217
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1194901A Expired - Lifetime JP2658412B2 (en) | 1989-07-27 | 1989-07-27 | Method of spraying ceramic on metal foil |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2658412B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009246391A (en) * | 2009-07-27 | 2009-10-22 | Kyocera Corp | Method of manufacturing ceramic wiring board |
-
1989
- 1989-07-27 JP JP1194901A patent/JP2658412B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009246391A (en) * | 2009-07-27 | 2009-10-22 | Kyocera Corp | Method of manufacturing ceramic wiring board |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0361354A (en) | 1991-03-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5045365A (en) | Process for producing metal foil coated with flame sprayed ceramic | |
| JP2658412B2 (en) | Method of spraying ceramic on metal foil | |
| JP2569756B2 (en) | Manufacturing method of ceramic sprayed metal foil | |
| JP2715471B2 (en) | Method of spraying ceramic on metal foil | |
| JP2658371B2 (en) | Method of spraying ceramic on metal foil | |
| JP3536513B2 (en) | Metal ribbon manufacturing equipment | |
| KR100194091B1 (en) | Method and continuous casting of molten metal strand | |
| JP3241531B2 (en) | Metal ribbon production method and production nozzle | |
| EP0124684B1 (en) | Casting in a thermally-induced, low density atmosphere | |
| JPH0592536A (en) | Method and device for peeling off from base layer area covered with adhesive layer of thermoplastic material | |
| CA1071938A (en) | Method and apparatus for forming metal oxide coating on the surface of glass sheet | |
| JPH06102825B2 (en) | How to spray ceramics on metal foil | |
| JPS6135873A (en) | Plasma jet spraying method and apparatus | |
| JP2939381B2 (en) | Method of forming copper film on ceramic surface | |
| JPS6232684Y2 (en) | ||
| JPS60199552A (en) | Production of thin metallic strip | |
| JPS6036599Y2 (en) | Steel strip shake prevention device in continuous hot-dip galvanizing equipment | |
| JPH06279970A (en) | Hot dip coating method and device therefor | |
| Tsunekawa et al. | Cooling Properties of Various Cooling Methods for Aluminium Semicontinuous Casting | |
| JP3406720B2 (en) | Winding method of rapidly solidified ribbon | |
| JPH0114677Y2 (en) | ||
| JPS61293637A (en) | Nozzle for producing broad metallic strip | |
| JPH01312060A (en) | Wiping nozzle | |
| JPH04105777A (en) | Production and equipment for production of aluminum clad steel plate | |
| JPH07241651A (en) | Production of rapidly solidified strip |