JP2619231B2 - Vacuum equipment - Google Patents
Vacuum equipmentInfo
- Publication number
- JP2619231B2 JP2619231B2 JP21025195A JP21025195A JP2619231B2 JP 2619231 B2 JP2619231 B2 JP 2619231B2 JP 21025195 A JP21025195 A JP 21025195A JP 21025195 A JP21025195 A JP 21025195A JP 2619231 B2 JP2619231 B2 JP 2619231B2
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- Japan
- Prior art keywords
- vacuum
- alloy
- degree
- present
- vacuum apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
【０００１】[0001]
【産業上の利用分野】本発明は、真空装置に関し、特に
真空度を向上させることが可能な合金を用いた真空装置
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum apparatus, and more particularly to a vacuum apparatus using an alloy capable of improving the degree of vacuum.
【０００２】[0002]
【従来の技術】従来、真空装置用の材料として、硬度、
耐酸化性に優れ、さらに非磁性材料であることからオー
ステナイト系ステンレス鋼等が用いられてきた。しかし
ながら、近年荷電粒子加速器、薄膜作成真空装置、表面
分析機器の需要の増大により超高真空の要求が高まって
きた。さらに加速器に至っては粒子の加速による熱の発
生が問題となり、放熱性をよくする方法が必要になって
きた。2. Description of the Related Art Conventionally, hardness, hardness,
Austenitic stainless steel or the like has been used because of its excellent oxidation resistance and nonmagnetic material. However, in recent years, the demand for an ultra-high vacuum has increased due to an increase in demand for a charged particle accelerator, a vacuum apparatus for preparing a thin film, and a surface analysis device. Further, in the case of an accelerator, the generation of heat due to the acceleration of particles becomes a problem, and a method for improving heat dissipation is required.
【０００３】この二つの問題点を解決するためにＡｌ合
金の利用が一部行なわれ初めているが、Ａｌ合金の特徴
は以下の通りである。 （１） 軽量で加工性に優れているために、多方面にわ
たる真空装置の複雑な構造を実現できる。 （２） 加速器の粒子線の直撃をうけても熱放散性が早
い。 （３） 低原子番号材料であるために放射化しにくく、
かつ放射減衰が速やかである。[0003] In order to solve these two problems, use of an Al alloy has been partially started. The characteristics of the Al alloy are as follows. (1) Since it is lightweight and excellent in workability, it is possible to realize a complicated structure of a vacuum apparatus in various fields. (2) The heat dissipation is fast even if the particle beam of the accelerator is hit directly. (3) It is hard to be activated because it is a low atomic number material,
In addition, radiation decay is rapid.
【０００４】しかしながら、従来のＡｌ合金を用いた真
空装置では高真空を実現することができないという問題
があった。However, there has been a problem that a high vacuum cannot be realized with a conventional vacuum device using an Al alloy.
【０００５】また、Ａｌ合金中にＭｇを添加することで
真空度を向上させることが試みられているが、まだ尚、
その真空度を十分に高めることができなかった。It has been attempted to improve the degree of vacuum by adding Mg to the Al alloy.
The degree of vacuum could not be sufficiently increased.
【０００６】[0006]
【発明が解決しようとする課題】上述したように、従来
のＡｌ合金を用いた真空装置では、高真空を実現できな
いという問題があった。本発明はこのような問題点に鑑
み、複雑な構造を実現でき、熱放散性が早いなどの特性
を持つＡｌ合金を用いつつ、高真空を実現し得る現像装
置を提供することを目的とする。As described above, a conventional vacuum apparatus using an Al alloy has a problem that a high vacuum cannot be realized. The present invention has been made in view of the above problems, and has as its object to provide a developing device capable of realizing a high vacuum while using an Al alloy having characteristics such as a rapid heat dissipation property that can realize a complicated structure. .
【０００７】[0007]
【課題を解決するための手段および作用】本願第１の発
明は、Ｂｅ、Ｃａ、Ｓｍ、Ｔｍ及びＹｂの群から選ばれ
る少なくとも一種を３重量％以下、Ｓｉ、Ｃｕ、Ｚｎ、
Ｆｅ、Ｎｉ、ＭｎおよびＣｒの群から選ばれる少なくと
も一種を１０重量％以下、残部実質的にＡｌである合金
からなる内表面を有することを特徴とする真空装置であ
る。According to the first invention of the present application, at least one element selected from the group consisting of Be, Ca, Sm, Tm and Yb is 3% by weight or less, and Si, Cu, Zn,
A vacuum apparatus having an inner surface made of an alloy in which at least one selected from the group consisting of Fe, Ni, Mn, and Cr is 10% by weight or less, and the balance is substantially Al.
【０００８】本願第２の発明は、Ｂａ、Ｌｉ及びＳｒの
群から選ばれる少なくとも一種を３重量％以下、Ｓｉ、
Ｃｕ、Ｚｎ、Ｆｅ、Ｎｉ、ＭｎおよびＣｒの群から選ば
れる少なくとも一種を１０重量％以下、残部実質的にＡ
ｌである合金からなる内表面を有することを特徴とする
真空装置である。According to a second aspect of the present invention, at least one element selected from the group consisting of Ba, Li and Sr is contained in an amount of 3% by weight or less, Si,
At least one selected from the group consisting of Cu, Zn, Fe, Ni, Mn and Cr is not more than 10% by weight, and the balance is substantially A
1 is a vacuum apparatus having an inner surface made of an alloy that is 1.
【０００９】前記Ｂａ、Ｂｅ、Ｌｉ、Ｃａ、Ｓｒ、Ｓ
ｍ、ＴｍあるいはＹｂは、合金強度を強くするために強
度改善成分であり、Ｓｉ、Ｃｕ、Ｚｎ、Ｆｅ、Ｎｉ、Ｍ
ｎあるいはＣｒは、真空装置内の真空度を向上させるた
めの真空度向上成分である。The above Ba, Be, Li, Ca, Sr, S
m, Tm or Yb is a strength improving component for increasing the strength of the alloy, and includes Si, Cu, Zn, Fe, Ni, M
n or Cr is a vacuum degree improving component for improving the degree of vacuum in the vacuum device.
【００１０】本発明者らは、酸化物の標準生成自由エネ
ルギーΔＧ゜が低く、蒸気圧Ｐが高い元素がゲッター効
果が大きく、これらの元素を真空装置の内表面の合金中
に添加することで、真空装置内の真空度をより高める事
が可能になることに気付き本発明に至った。The present inventors have found that elements having a low standard free energy of formation ΔG ゜ of oxides and a high vapor pressure P have a large getter effect. By adding these elements to the alloy on the inner surface of the vacuum apparatus, The present inventors have found that it is possible to further increase the degree of vacuum in the vacuum apparatus, and have reached the present invention.
【００１１】具体的には、Ａｌ合金中に添加することで
ゲッター効果を有する元素は、少なくともＡｌよりも酸
化されやすいものである。また、蒸気圧力がＡｌよりも
低い元素は、全て合金表面に固定されてしまうため、Ａ
ｌよりも酸化されやすく、かつ酸化物での蒸気圧力がＡ
ｌよりも高い元素を添加した場合にゲッター効果が大き
い。Specifically, an element having a getter effect by being added to an Al alloy is one that is more easily oxidized than at least Al. In addition, since all elements having a lower vapor pressure than Al are fixed on the alloy surface, A
and the vapor pressure at the oxide is A
When an element higher than 1 is added, the getter effect is large.
【００１２】すなわちＡｌの酸化物の標準生成自由エネ
ルギーをΔＧ゜（Ａｌ2 Ｏ3 ）、任意の元素の酸化物の
標準生成自由エネルギーをΔＧ゜（Ｖ）、Ａｌの蒸気圧
をＰ（Ａｌ2 Ｏ3 ）、任意の元素の蒸気圧をＰ（Ｖ）と
した時に、 ΔＧ゜（Ａｌ2 Ｏ3 ） ＝−１１２１．９４＋０．２１６３Ｔ （kJ） ｌｏｇＰ（Ａｌ2 Ｏ3 ）＝−１６３８０Ｔ-1−ｌｏｇＴ＋２３２７（mmHg） であり（Ｔは絶対温度）、下記（１）、（２）式を満た
す元素がゲッター効果が大きく、このような元素を添加
したＡｌ合金を真空装置に用いれば高真空を実現できる
ことを本発明者らは見出だしたのである。ただし、本発
明の真空装置は０〜８７３℃の温度範囲内で用いられる
ため、前記（１）および（２）式は０〜８７３Ｋの範囲
内で満たすものでよい。０Ｋ以下はありえない温度であ
り、８７３Ｋ以上にするとＡｌ合金が軟らかくなり基体
としての役割を果たさなくなる。That is, the standard free energy of formation of Al oxide is ΔG ゜ (Al 2 O 3 ), the standard free energy of formation of oxide of any element is ΔG ゜ (V), and the vapor pressure of Al is P (Al 2 O 3 ), when the vapor pressure of an arbitrary element is P (V), ΔG ゜ (Al 2 O 3 ) =-1121.94 + 0.2163T (kJ) log P (Al 2 O 3 ) =-16380T -1- logT + 2327 (mmHg) (T is an absolute temperature), and an element satisfying the following formulas (1) and (2) has a large getter effect. A high vacuum is realized by using an Al alloy to which such an element is added in a vacuum device. The present inventors have found out what can be done. However, since the vacuum apparatus of the present invention is used within a temperature range of 0 to 873 ° C., the above expressions (1) and (2) may be satisfied within the range of 0 to 873K. Below 0K is an impossible temperature, and above 873K, the Al alloy becomes soft and does not serve as a substrate.
【００１３】 ΔＧ゜（Ｖ）＜ΔＧ゜（Ａｌ2 Ｏ3 ）・・・（１） Ｐ（Ｖ） ＞Ｐ（Ａｌ2 Ｏ3 ） ・・・（２） この条件を満たす元素としては、Ｂａ、Ｂｅ、Ｌｉ、Ｃ
ａ、Ｓｒ、Ｓｍ、Ｔｍ、ＹｂおよびＭｇが挙げれる。ΔG ゜ (V) <ΔG ゜ (Al 2 O 3 ) (1) P (V)> P (Al 2 O 3 ) (2) An element satisfying this condition is Ba. , Be, Li, C
a, Sr, Sm, Tm, Yb and Mg.
【００１４】本願第１の発明は、前記真空度改善成分の
うちＢｅ、Ｃａ、Ｓｍ、ＴｍおよびＹｂを用いることを
特徴としており、これらの成分はＬｉ、ＳｒあるいはＭ
ｇなどに比べて酸化しやすいために、特に短時間の加熱
で大きなゲッター効果を得ることや、加熱温度を比較的
低温に設定してもゲッター効果を得ることが可能とな
る。The first invention of the present application is characterized in that Be, Ca, Sm, Tm and Yb are used among the vacuum degree improving components, and these components are Li, Sr or Mb.
Since it is easily oxidized as compared with g or the like, it is possible to obtain a large getter effect particularly by heating for a short time, and to obtain a getter effect even if the heating temperature is set to a relatively low temperature.
【００１５】本願第２の発明は、前記真空度改善成分の
うちＢａ、ＬｉあるいはＳｒは他の真空度改善成分やＭ
ｇと比べ酸化物の蒸気圧が大きいために、真空装置内を
排気するための真空ポンプなどの負荷を軽減することが
可能となる。In the second invention of the present application, among the above-mentioned vacuum degree improving components, Ba, Li or Sr is the other vacuum degree improving component or M
Since the oxide has a higher vapor pressure than g, the load of a vacuum pump or the like for exhausting the inside of the vacuum device can be reduced.
【００１６】本発明に係る真空度改善成分の添加量を３
ｗｔ％以下としたのは、これ以上の添加量では加工性が
悪くなったり、Ｓｍ、Ｓｒなどの一部の金属は後に述べ
る強度改善成分と化合し、磁性体を作る可能性があるか
らである。これらの成分の好ましい添加量は０．０１〜
０．７ｗｔ％である。The amount of the vacuum degree improving component according to the present invention is 3
The reason why the content is set to be not more than wt% is that workability may be deteriorated if the added amount is more than that, and some metals such as Sm and Sr may combine with a strength improving component described later to form a magnetic material. is there. The preferred addition amount of these components is 0.01 to
0.7 wt%.
【００１７】図１は、押出し成形により作製した直後
の、本発明の真空装置表面からの添加元素の深さ方向分
布をイオンマイクロアナライザーで分析したものであ
る。材料は０．３Ｃａ−５Ｃｕ−１Ｓｉ−Ａｌを使用し
ており、図中の１がＣａ、２がＡｌ、３がＣｕ、４がＳ
ｉ，５がＯである。図より明らかなように表面にＣａが
濃縮していることが分かりＯとプロファイルが一致して
いることから一部は酸化物となっていることが推定され
る。FIG. 1 shows an ion microanalyzer for analyzing the distribution in the depth direction of the added element from the surface of the vacuum apparatus of the present invention immediately after it is produced by extrusion molding. The material used is 0.3Ca-5Cu-1Si-Al, 1 in the figure is Ca, 2 is Al, 3 is Cu, 4 is S
i and 5 are O. As is clear from the figure, it was found that Ca was concentrated on the surface, and since the profile matched that of O, it was presumed that part of the oxide was formed.
【００１８】この材料で直径３００ｍｍの円筒を作りロ
ータリーポンプを接続したターボ分子ポンプで排気速度
３００ｌ／Ｓで真空びきをし１０時間後のイオンゲージ
で真空度を測定すると１０-9ｍｍＨｇに達した。その後
べーキングを１５０℃で１５時間行った後常温に戻し真
空度を測ると１０-11 ｍｍＨｇとなっていた。この容器
を切出し内壁を先程と同様な方法でイオンマイクロアナ
ライザーを用いて測定したところ図２に示すようなプロ
ファイルを示した。この図より表面層のＣａが欠乏して
いることが分かる。[0018] reached 10 -9 mmHg when measuring the degree of vacuum in the ion gauge after vacuum Bikioshi 10 hours the material in diameter 300mm in the turbo molecular pump pumping speed 300 l / S which was connected to a rotary pump make cylinder . Thereafter, baking was carried out at 150 ° C. for 15 hours, and after returning to room temperature, the degree of vacuum was measured to be 10 −11 mmHg. The container was cut out, and the inner wall was measured using an ion microanalyzer in the same manner as described above, and a profile as shown in FIG. 2 was shown. From this figure, it can be seen that Ca in the surface layer is deficient.
【００１９】同様な実験を５Ｃｕ−１Ｓｉ−Ａｌの材料
について行っても真空度は１０-10ｍｍＨｇまでしか上
昇しないためＣａが表面層より蒸発して酸化物を作りゲ
ッター効果を起こしていることが分る。Even if a similar experiment is performed on a 5Cu-1Si-Al material, the degree of vacuum rises only up to 10 -10 mmHg, so that Ca evaporates from the surface layer to form an oxide, causing a getter effect. I understand.
【００２０】強度改善成分として１０ｗｔ％までのＳ
ｉ、Ｃｕ、Ｚｎ、Ｆｅ、Ｎｉ、ＭｎあるいはＣｒを含む
のはＡｌを硬くするためであり、１０ｗｔ％より多くす
ると加工性が悪くなる。これら成分の添加量は元素にも
よるが望ましくは０．５〜６ｗｔ％がよい。Up to 10 wt% of S as a strength improving component
The inclusion of i, Cu, Zn, Fe, Ni, Mn or Cr is for hardening Al, and if it is more than 10 wt%, the workability is deteriorated. The addition amount of these components depends on the element, but is desirably 0.5 to 6% by weight.
【００２１】また、通常真空装置の内表面は、Ｈ2 Ｏ、
ＣＯ2 が付着しないように鏡面加工を施したりして表面
積を小さくしているが、本発明に使用される合金は、表
面粗さを小さくする必要がない。すなわち表面積が大き
いとゲッター効果も大きくなるために鏡面加工などの工
程を省くことが可能となり、生産性を高めることが可能
となる。In general, the inner surface of the vacuum device is H 2 O,
Although the surface area is reduced by mirror finishing or the like so that CO 2 does not adhere, the alloy used in the present invention does not need to reduce the surface roughness. That is, if the surface area is large, the getter effect also becomes large, so that it is possible to omit steps such as mirror finishing, and it is possible to increase productivity.
【００２２】また、Ａｌ合金は、一般に硫化物、窒化物
あるいは燐化物などの介在物などが比較的多く、表面粗
さが小さいとこれら介在物がＡｌ合金表面から脱離し、
真空ポンプの摺動部に負荷を与えたり、蒸着、スパッタ
などに真空装置をしようする場合などは、得られる薄膜
にこれらの介在物などが付着するなどの不具合が生じ
る。このようなことを考慮すれば、ＪＩＳＢ０６０１で
示されるところの中心線、平均表面粗さＲａを２〜４０
μｍの粗面であることが望ましい。In addition, Al alloys generally contain relatively large amounts of inclusions such as sulfides, nitrides and phosphides, and when the surface roughness is small, these inclusions are detached from the surface of the Al alloy,
When a load is applied to a sliding portion of a vacuum pump or when a vacuum apparatus is used for vapor deposition, sputtering, or the like, problems such as adhesion of these inclusions to the obtained thin film occur. In consideration of this, the center line and the average surface roughness Ra shown in JIS B0601 are 2 to 40.
It is desirable that the surface be a rough surface of μm.
【００２３】本発明の真空装置は、超高真空を得るため
の装置には全て応用でき、粒子加速路、表面分析機器、
蒸着・スパッタ・イオンプレーティング装置イオン注入
装置気相化学反応装置に利用できるばかりでなく、真空
ポンプ、真空ゲージ用部材、真空用の配管、つぎてにも
利用できる。The vacuum apparatus of the present invention can be applied to any apparatus for obtaining an ultra-high vacuum, and includes a particle acceleration path, a surface analysis device,
It can be used not only for vapor deposition, sputtering, ion plating, ion implantation, gas phase chemical reaction, but also for vacuum pumps, vacuum gauge members, vacuum piping, and the like.
【００２４】上述したように、本発明の真空装置は、ベ
ーキングすることで表面に濃縮下真空度向上成分がゲッ
ター作用をおこし、真空度がベーキングしない場合と比
べ向上する。さらに室温で本願発明の真空装置を放置し
ていると再び真空度向上成分が表面に濃縮し、次のベー
キング時にまた効果を発揮する。As described above, in the vacuum apparatus of the present invention, a component for improving the degree of vacuum under concentration causes a getter effect on the surface by baking, and the degree of vacuum is improved as compared with a case where no baking is performed. Further, when the vacuum apparatus of the present invention is left at room temperature, the component for improving the degree of vacuum is concentrated on the surface again, and the effect is exhibited again at the next baking.
【００２５】[0025]
実施例１ 通常のバイヤ法によりアルミナを精製し、これを氷晶石
と混合して溶融塩電解を行い、アルミニウムに還元す
る。この際電解炉にたまった溶融アルミニウムを随時く
みだして真空炉に移し、４％のＣｕ、１％のＳｉ、０．
２％のＢａを添加しガス酸化物を取り除いてインゴット
を作製する。このインゴットを３４０ｍｍφの円柱とし
て切り出し、中空材前方押出し成形により肉厚２０ｍｍ
の円筒材を作製した。その後円筒の両端部にＴｉＮコー
ティングを行ったＣｕガスケットの接続用溝をつけたフ
ランジをアルゴンガスのもとでＴＩＧ溶接した。ヌード
イオンゲージが接続され、Ｃｕガスケット用の溝の切ら
れた蓋をボルト締めして一端を密閉した。溝を切られた
部分は前と同様のＴＩＮコーティングを行ってある。も
う一方は、ベローズのつけた蓋で同様に密閉して、ベロ
ーズの先はロータリーポンプを直接接続したターボ分子
ポンプに接続した。以上のような構造は図３に示す。Example 1 Alumina is purified by an ordinary viar method, mixed with cryolite, subjected to molten salt electrolysis, and reduced to aluminum. At this time, the molten aluminum accumulated in the electrolytic furnace was extracted at any time and transferred to a vacuum furnace, where 4% Cu, 1% Si, 0.
An ingot is prepared by adding 2% Ba and removing gas oxides. This ingot was cut out as a 340 mmφ cylinder, and the thickness of the ingot was reduced to 20 mm by extrusion extrusion.
Was manufactured. Thereafter, a flange having connection grooves of a Cu gasket coated with TiN on both ends of the cylinder was TIG-welded under argon gas. A nude ion gauge was connected and a lid with a groove for a Cu gasket was bolted to seal one end. The grooved portion has the same TIN coating as before. The other was similarly sealed with a lid fitted with bellows, and the tip of the bellows was connected to a turbo-molecular pump directly connected to a rotary pump. The above structure is shown in FIG.
【００２６】２００ｌ／ｓの速度で真空排気を行い５時
間後イオンゲージで真空装置内の真空度を測定したとこ
ろ５×１０-9ｍｍＨｇになったが、それ以上は上昇しな
かった。その後、巻線ヒーターを装置の外側に巻き１５
０℃で１０時間加熱した後、室温に戻し、改めて真空度
の測定をしたところ７×１０-11 ｍｍＨｇになり真空度
は向上した。Vacuum evacuation was performed at a rate of 200 l / s, and after 5 hours, the degree of vacuum in the vacuum apparatus was measured with an ion gauge. The result was 5 × 10 −9 mmHg, but it did not rise any more. After that, the winding heater is wound around the outside of the device.
After heating at 0 ° C. for 10 hours, the temperature was returned to room temperature, and the degree of vacuum was measured again. As a result, it was 7 × 10 −11 mmHg, and the degree of vacuum was improved.
【００２７】実施例２〜９ 基材を下に示す成分にして実施例１と同様な実験を行っ
た。Examples 2 to 9 The same experiment as in Example 1 was carried out using the base materials shown below.
【００２８】 ２．４Ｂａ−０．７Ｍｕ−３．５Ｃｕ−Ａｌ １．２Ｂｅ−８．５Ｓｉ−３．３Ｃｕ−Ａｌ ０．３Ｌｉ−９．２Ｓｉ−３．２Ｃｕ−Ａｌ ０．８Ｓｒ−３．５Ｎｉ−３．０Ｃｕ−Ａｌ １．０Ｓｍ−６．２Ｃｕ−０．４Ｎｉ−Ａｌ １．３Ｔｍ−１．８Ｍｎ−２．２Ｃｕ−Ａｌ ０．５Ｙｂ−２．１Ｍｎ−０．６Ｓｉ−Ａｌ ０．１Ｂｅ−０．１Ｃａ−３．５Ｃｕ−０．５Ｃｒ−Ａ
ｌ 同様な方法で真空度を測定したところ１０-11 ｍｍＨｇ
台で良好な真空度が得られた。2.4Ba-0.7Mu-3.5Cu-Al 1.2Be-8.5Si-3.3Cu-Al 0.3Li-9.2Si-3.2Cu-Al 0.8Sr-3.5Ni- 3.0Cu-Al 1.0Sm-6.2Cu-0.4Ni-Al 1.3Tm-1.8Mn-2.2Cu-Al 0.5Yb-2.1Mn-0.6Si-Al 0.1Be-0. 1Ca-3.5Cu-0.5Cr-A
l When the degree of vacuum was measured by the same method, 10-11 mmHg
Good vacuum was obtained on the table.
【００２９】[0029]
【発明の効果】本発明の真空装置によれば、軽量で加工
性の優れたＡｌ合金を用い、超高真空を実現することが
可能になる。According to the vacuum apparatus of the present invention, it is possible to realize an ultra-high vacuum by using an aluminum alloy which is lightweight and has excellent workability.
【図１】 イオンマイクロアナライザーによる本発明に
係る合金のベーキング前の各元素の深さ方向プロファイ
ル図。FIG. 1 is a depth profile of each element before baking of an alloy according to the present invention by an ion microanalyzer.
【図２】 イオンマイクロアナライザーによる本発明に
係る合金のベーキング後の各元素の深さ方向プロファイ
ル図。FIG. 2 is a depth profile of each element after baking of the alloy according to the present invention by an ion microanalyzer.
【図３】 本発明の真空装置の概略断面図。FIG. 3 is a schematic sectional view of a vacuum device of the present invention.
【符号の説明】 １…Ｃａ ２…Ａｌ ３…Ｃｕ ４…Ｓｉ ５…Ｏ ６…ヌードイオンゲージ ７…ベローズ ８…ターボ分子ポンプ ９…ロータリーポンプ[Description of Signs] 1 ... Ca 2 ... Al 3 ... Cu 4 ... Si 5 ... O 6 ... Nude ion gauge 7 ... Bellows 8 ... Turbo molecular pump 9 ... Rotary pump
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 「真空」第26巻第５号第９〜13頁 （1983) 田鍋他訳シュレーガー著「金属学入 門」（丸善株式会社）第162頁（昭34− ６−１) 「岩波理化学辞典第３版」（岩波書 店）第403頁ゲッター欄（1972−12−15) ────────────────────────────────────────────────── ─── Continuation of the front page (56) References “Vacuum” Vol. 26, No. 5, pp. 9-13 (1983) Tanabe et al. 34-6-1) "Iwanami Physical and Chemical Dictionary Third Edition" (Iwanami Shoten) Page 403, Getter column (1972-12-15)
Claims (2)
ら選ばれる少なくとも一種を３重量％以下、Ｓｉ、Ｃ
ｕ、Ｚｎ、Ｆｅ、Ｎｉ、ＭｎおよびＣｒの群から選ばれ
る少なくとも一種を１０重量％以下、残部実質的にＡｌ
である合金からなる内表面を有することを特徴とする真
空装置。1. The method according to claim 1, wherein at least one selected from the group consisting of Be, Ca, Sm, Tm and Yb is 3% by weight or less, Si, C
at least one selected from the group consisting of u, Zn, Fe, Ni, Mn and Cr, at most 10% by weight, with the balance being substantially Al
A vacuum apparatus having an inner surface made of an alloy that is:
なくとも一種を３重量％以下、Ｓｉ、Ｃｕ、Ｚｎ、Ｆ
ｅ、Ｎｉ、ＭｎおよびＣｒの群から選ばれる少なくとも
一種を１０重量％以下、残部実質的にＡｌである合金か
らなる内表面を有することを特徴とする真空装置。2. The method according to claim 1, wherein at least one selected from the group consisting of Ba, Li and Sr is at most 3% by weight, Si, Cu, Zn, F
A vacuum apparatus having an inner surface made of an alloy in which at least one selected from the group consisting of e, Ni, Mn, and Cr is 10% by weight or less, and the balance is substantially Al.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21025195A JP2619231B2 (en) | 1995-07-27 | 1995-07-27 | Vacuum equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21025195A JP2619231B2 (en) | 1995-07-27 | 1995-07-27 | Vacuum equipment |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60195752A Division JPH0661446B2 (en) | 1985-09-06 | 1985-09-06 | Vacuum device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0857290A JPH0857290A (en) | 1996-03-05 |
| JP2619231B2 true JP2619231B2 (en) | 1997-06-11 |
Family
ID=16586290
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21025195A Expired - Lifetime JP2619231B2 (en) | 1995-07-27 | 1995-07-27 | Vacuum equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2619231B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7462217B2 (en) | 2003-12-08 | 2008-12-09 | E.I. Du Pont De Nemours And Company | Method of preparation for the high performance thermoelectric material indium-cobalt-antimony |
| US7371960B2 (en) | 2003-12-08 | 2008-05-13 | E.I. Du Pont De Nemours And Company | Figure of merit in Ytterbium-Aluminum-Manganese intermetallic thermoelectric and method of preparation |
| EP1735846A2 (en) | 2004-04-14 | 2006-12-27 | E.I.Du pont de nemours and company | High performance thermoelectric materials and their method of preparation |
| CN103981406B (en) * | 2014-04-10 | 2016-04-13 | 安徽乾通教育制造有限公司 | A kind of Physical Experiment cabinet aluminium alloy extrusions and preparation method thereof |
-
1995
- 1995-07-27 JP JP21025195A patent/JP2619231B2/en not_active Expired - Lifetime
Non-Patent Citations (3)
| Title |
|---|
| 「岩波理化学辞典第３版」（岩波書店）第４０３頁ゲッター欄（１９７２−１２−１５） |
| 「真空」第２６巻第５号第９〜１３頁（１９８３） |
| 田鍋他訳シュレーガー著「金属学入門」（丸善株式会社）第１６２頁（昭３４−６−１） |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0857290A (en) | 1996-03-05 |
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