JP2570672B2 - Micro rotating device - Google Patents
Micro rotating deviceInfo
- Publication number
- JP2570672B2 JP2570672B2 JP63046691A JP4669188A JP2570672B2 JP 2570672 B2 JP2570672 B2 JP 2570672B2 JP 63046691 A JP63046691 A JP 63046691A JP 4669188 A JP4669188 A JP 4669188A JP 2570672 B2 JP2570672 B2 JP 2570672B2
- Authority
- JP
- Japan
- Prior art keywords
- rotation
- rotating
- output shaft
- elastic member
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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- Support Of The Bearing (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、位置合わせ精度が要求される半導体製造工
程や宇宙空間のような真空環境下での使用に好適な微小
回転装置に関する。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a micro-rotating device suitable for use in a semiconductor manufacturing process requiring alignment accuracy or in a vacuum environment such as outer space.
一般に回転機器では、その回転軸の支持が転がり軸受
とかすべり軸受等の軸受が用いられる。しかし１回転未
満の微小な回転角で高速揺動運転を行うと、回転軸と軸
受との接触面に十分な潤滑剤がゆきわたりにくくなり、
潤滑不良による摩耗や焼付きが発明する。又、高真空下
で使用すると、軸受に通常用いられる潤滑剤からは、内
臓物質がガスとして放出されて環境を汚染するので好ま
しくない。Generally, in a rotating device, a bearing such as a rolling bearing or a sliding bearing is used for supporting the rotating shaft. However, when high-speed swing operation is performed at a small rotation angle of less than one rotation, sufficient lubricant hardly spreads on the contact surface between the rotating shaft and the bearing.
Invents wear and seizure due to poor lubrication. Further, it is not preferable to use the bearing under a high vacuum, since the visceral substance is released as a gas from the lubricant usually used for the bearing and pollutes the environment.
そのため、高真空用の特殊なグリスや固体潤滑剤等の
ガス放出の少ない潤滑剤を使用せざるを得ないが、高価
であり、しかも使用中軸受摩耗が発生して、回動精度等
の性能が劣化することは避け難い。For this reason, it is necessary to use a lubricant that emits little gas, such as a special grease or solid lubricant for high vacuum, but it is expensive, and in addition, bearing wear occurs during use, and performance such as rotation accuracy etc. Deterioration is inevitable.
本発明は、このような従来の問題点を解消するもので
あり、潤滑剤を必要とせずに微小角度の揺動回転を長期
間繰り返すことが可能で、且つ回転中心の狂いが生じな
い微小回転装置を提供することを目的としている。The present invention is intended to solve such a conventional problem, and it is possible to repeat the oscillating rotation of a small angle for a long period of time without requiring a lubricant, and to perform a small rotation without causing a deviation of the rotation center. It is intended to provide a device.
上記の目的を達成する本発明は、回転中心とその円周
位置にある固定部との間で、回転方向にのみ撓み得るよ
うに張設された弾性部材により、前記回転中心において
微小回転可能に支持された回転部と、この回転部に回転
トルクのみを伝達するように連結された回転駆動手段と
を備えたものである。The present invention that achieves the above object provides an elastic member stretched so as to be able to bend only in the rotation direction between a rotation center and a fixed portion at a circumferential position thereof, so that the rotation can be minutely performed at the rotation center. The rotating unit includes a supported rotating unit, and a rotation driving unit connected so as to transmit only rotating torque to the rotating unit.
上記弾性部材は、一端側が固定部に、他端側が回転部
に固着された複数の薄板を放射状に配して構成すると効
果的である。It is effective that the elastic member is constituted by arranging a plurality of thin plates radially arranged with one end side fixed to the fixed part and the other end side fixed to the rotating part.
そして上記薄板には、張力付与手段により張力を付与
するとよい。Then, tension may be applied to the thin plate by a tension applying unit.
また、回転駆動手段の出力軸と回転部とを、回転中心
を中心とする円弧面を有する減速機構を介して、回転ト
ルクのみを伝達するように連結することもできる。Further, the output shaft of the rotation driving means and the rotating portion may be connected via a speed reduction mechanism having an arc surface centered on the rotation center so as to transmit only the rotation torque.
上記のように構成された微小回転装置は、転がり軸
受，すべり軸受のような軸受を用いないのでグリース等
の潤滑剤を全く必要とせず、高真空中でも環境汚染が発
生しない。その駆動手段を回転駆動させると、回転トル
クのみが回転部に伝達されて、その回転トルクが弾性部
材の回転方向の弾性力と均衡するまで、回転部が微小角
度回転する。The micro-rotating device configured as described above does not use bearings such as rolling bearings and sliding bearings, and therefore does not require any lubricant such as grease, and does not cause environmental pollution even in a high vacuum. When the driving unit is driven to rotate, only the rotation torque is transmitted to the rotation unit, and the rotation unit rotates by a small angle until the rotation torque is balanced with the elastic force of the elastic member in the rotation direction.
その場合、弾性部材の厚みが薄い程、回転中心の位置
が正確に保たれる。厚いとその厚みのバラツキや取付け
位置のずれ等が重なって大きくなり、位置精度が悪くな
る。In this case, the position of the rotation center is more accurately maintained as the thickness of the elastic member is smaller. If the thickness is too large, variations in the thickness, displacement of the mounting position, and the like will overlap and become large, resulting in poor positional accuracy.
また、弾性部材に張力を付与することで、厚さが薄い
にもかかわらず大きな剛性が得られるから、回転中心の
位置が一層安定する。In addition, by applying tension to the elastic member, a large rigidity can be obtained even though the thickness is small, so that the position of the rotation center is further stabilized.
減速機構を組み込む場合も、その減速機構の重量が回
転部材に加わらないように支持して、回転中心の偏移を
防止し、精密な回動が得られる。Even when the speed reduction mechanism is incorporated, the weight of the speed reduction mechanism is supported so as not to be added to the rotating member, thereby preventing the rotation center from being shifted and achieving precise rotation.
以下、本発明の実施例を図面を参照して説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
第１図及び第２図は、本発明の一実施例を示すもので
あり、回転駆動手段である電動機１の出力軸２に、微小
回転機構３が直結されている。FIGS. 1 and 2 show an embodiment of the present invention, in which a minute rotating mechanism 3 is directly connected to an output shaft 2 of a motor 1 which is a rotation driving means.
この微小回転機構３は、回転中心Ｏの位置にある回転
部４と、その円周位置にある固定部５との間に、弾性部
材６を張設して形成されており、その回転中心Ｏが電動
機の出力軸２と同心とされ両者は固定されている。した
がって回転部４には電動機１の回転トルクのみが加えら
れるものである。The minute rotation mechanism 3 is formed by stretching an elastic member 6 between a rotation part 4 at a position of a rotation center O and a fixed part 5 at a circumferential position thereof. Are concentric with the output shaft 2 of the motor, and both are fixed. Therefore, only the rotating torque of the electric motor 1 is applied to the rotating section 4.
この場合の弾性部材６は、例えば厚さの薄い鋼板４枚
で構成されている。各薄鋼板は長さ方向（矢符号ａ方
向）及び幅方向（矢符号ｂ方向）の作用力に対しては強
いが、回転方向（矢符号ｃ及びｄ方向）には最も弱いば
ね常数となるように幅方向を回転幅方向に合わせて、一
端は回転部４に他端は固定部５にそれぞれ固定されてい
る。微小回転装置の回転精度の精密化を図るには、この
鋼板からなる弾性部材６の板厚が薄い方が望ましい。一
方、薄いと剛性が小さいから、弱い力が作用しただけで
容易に変形し易く、回転部４に対する支持力が不安定に
なる。これに対処するため、この実施例では弾性部材６
に張力付与手段により張力を付与して、剛性を高めてい
る。In this case, the elastic member 6 is composed of, for example, four thin steel plates. Each thin steel plate is strong against the acting force in the length direction (arrow a direction) and the width direction (arrow b direction), but has the weakest spring constant in the rotating direction (arrow c and d directions). One end is fixed to the rotating portion 4 and the other end is fixed to the fixing portion 5 with the width direction aligned with the rotation width direction. In order to improve the rotation accuracy of the micro-rotating device, it is desirable that the elastic member 6 made of the steel plate has a small thickness. On the other hand, if it is thin, the rigidity is small, so that it is easily deformed only by the application of a weak force, and the supporting force for the rotating part 4 becomes unstable. In order to cope with this, in this embodiment, the elastic member 6 is used.
The rigidity is increased by applying a tension to the tongue by a tension applying means.
その張力付与手段としては、例えば加熱手段や機械的
引っ張り手段等が利用できる。前者の場合は、弾性部材
６を加熱し、その温度が使用温度の上限より高い膨張状
態で固着する。その後、使用温度になれば、収縮により
高い張力が与えられる。又、後者の場合であれば、図示
しないが、例えば固定部５は、フレームにねじを介して
取付け、回転中心Ｏに対して直径方向に幾らか位置調整
ができるように形成する。そして、回転部４と固定部５
の間隔を最小に調整して両者4,5に弾性部材６の端部を
それぞれ固着した後、ねじを利用して固定部５を外方に
移動させれば、各弾性部材６には高い張力が与えらえ
る。As the tension applying means, for example, a heating means or a mechanical pulling means can be used. In the former case, the elastic member 6 is heated and fixed in an expanded state whose temperature is higher than the upper limit of the use temperature. Thereafter, when the temperature reaches a use temperature, a high tension is given by shrinkage. In the latter case, although not shown, for example, the fixing portion 5 is attached to the frame via a screw, and is formed so that the position can be adjusted somewhat in the diameter direction with respect to the rotation center O. And the rotating part 4 and the fixed part 5
After the ends of the elastic members 6 are fixed to the two 4 and 5, respectively, and the fixing portion 5 is moved outward using screws, a high tension is applied to each elastic member 6. Is given.
次に作用をのべる。 Next, the operation will be described.
電動機１を起動して、その出力軸２を第１図の矢符号
ｃ方向に微小回転させると、同心の回転部４には回転ト
ルクのみが伝達される。したがって、回転中心Ｏが径方
向に偏って移動することはなく、極めて精密な回動が得
られる。また、たとえ出力軸２に対し横方向力が作用し
たとしても、回転部４は回転中心Ｏに向け弾性部材６で
予圧されており、回転中心Ｏの位置は径方向に殆ど変化
しない。When the motor 1 is started and its output shaft 2 is slightly rotated in the direction of the arrow c in FIG. 1, only the rotating torque is transmitted to the concentric rotating unit 4. Therefore, the rotation center O does not move deviated in the radial direction, and extremely precise rotation can be obtained. Even if a lateral force acts on the output shaft 2, the rotating portion 4 is pre-pressed toward the rotation center O by the elastic member 6, and the position of the rotation center O hardly changes in the radial direction.
更にまた、各薄鋼板製の弾性部材６は幅方向に強い抵
抗力を有しているため、これに支えられた回転部４は回
転の軸方向には全く移動しない。Furthermore, since the elastic member 6 made of each thin steel plate has a strong resistance in the width direction, the rotating portion 4 supported by the elastic member 6 does not move at all in the axial direction of rotation.
これに対してばね定数の弱い電動機１の回転方向に
は、弾性部材６が第２図のように容易に湾曲するから、
微小回転機構３の回転部４が電動機１の出力軸２と共に
微小回転する。On the other hand, in the rotation direction of the electric motor 1 having a weak spring constant, the elastic member 6 easily bends as shown in FIG.
The rotating part 4 of the minute rotating mechanism 3 minutely rotates together with the output shaft 2 of the electric motor 1.
このようにして、出力軸２の先端おいて、軸方向の移
動や、回転中心Ｏの偏移の無い、精密な回転出力が取り
出される。In this way, a precise rotational output without axial movement or displacement of the rotation center O is taken out at the tip of the output shaft 2.
しかも、微小回転機構の回転部４は、摩擦面が全くな
い構造で支持されるから摩耗がなく、潤滑剤も不要であ
って、矢符号c,d方向への微小角度の高速揺動運転や高
真空下での長期運転にも支障がない。In addition, since the rotating portion 4 of the micro-rotating mechanism is supported by a structure having no friction surface, there is no wear and no lubricant is required. There is no problem in long-term operation under high vacuum.
第３図、第４図は第二の実施例を示す。 3 and 4 show a second embodiment.
これは、電動機10のケース10A内の軸受位置に、一体
型の微小回転機構３を組み込んだものである。This is one in which an integrated small rotation mechanism 3 is incorporated at a bearing position in a case 10A of the electric motor 10.
すなわち、この微小回転機構３は、中心の回転部14
と、電動機のケース10Aの内面に嵌めこまれるリング状
の固定部15と、薄板状の弾性部材16とが一体に形成され
ている。そして、通常は電動機10の出力軸２の軸受（潤
滑剤を使用する例えば転がり軸受等の軸受）が取付けら
れるべき個所に配設固定されている。That is, the minute rotating mechanism 3 is provided with a central rotating unit 14.
In addition, a ring-shaped fixing portion 15 fitted into the inner surface of the case 10A of the electric motor and a thin plate-shaped elastic member 16 are integrally formed. Usually, the bearing of the output shaft 2 of the electric motor 10 (for example, a bearing such as a rolling bearing using a lubricant) is arranged and fixed at a place where the bearing is to be attached.
図中、11はステータ、12はロータであり、いま、ステ
ータ11の励磁力でロータ12が回転力ｅを受けると、出力
軸２に嵌着された微小回転機構３の回転部14が回転力を
受けて微小回転し、弾性部16が第２図の場合と同様に湾
曲変形することにより、上記第一の実施例のものと同様
の機能を果たす。In the figure, reference numeral 11 denotes a stator, and 12 denotes a rotor. When the rotor 12 receives a rotation force e by the excitation force of the stator 11, the rotation unit 14 of the minute rotation mechanism 3 fitted to the output shaft 2 rotates the rotation force. In response to this, it rotates minutely, and the elastic portion 16 bends and deforms in the same manner as in FIG. 2, thereby performing the same function as that of the first embodiment.
第５図、第６図は第三の実施例を示す。 FIG. 5 and FIG. 6 show a third embodiment.
このものは、第１図に示すものと略同様の微小回転機
構3,3を前後１組に配設するとともに、その回転部4,4を
回転板20で一体的に結合したものを、電動機１と共にフ
レーム21に取りつけて、その電動機１の出力軸２と回転
板20とを、減速機構22を介して連結したものである。In this motor, a micro-rotating mechanism 3, 3 substantially the same as that shown in FIG. 1 is disposed in a front and rear pair, and its rotating parts 4, 4 are integrally connected by a rotating plate 20. 1 is attached to a frame 21, and the output shaft 2 of the electric motor 1 and the rotary plate 20 are connected via a speed reduction mechanism 22.
上記の減速機構22は、回転中心Ｏを中心とする円弧面
23を有する円弧板24と、この円弧板24と電動機の出力軸
２とを結合するスチールベルト25,26を備えている。The above-described speed reduction mechanism 22 has an arc surface centered on the rotation center O.
An arc plate 24 having 23 and steel belts 25 and 26 connecting the arc plate 24 and the output shaft 2 of the electric motor are provided.
その円弧板24は、回転板20の上面で且つ両支持部の中
央位置に一体に固着され、回転板20とともに回転中心Ｏ
を中心として矢符号f1及びg1方向に回動可能である。ス
チールベルト25の一端は円弧板24の円弧面23の上端側
に、ねじ27で固定され、他端は電動機の出力軸２に半回
転分程巻きつけた後ねじ28で出力軸２に固定されてい
る。また、他方のスチールベルト26の一端は円弧板24の
円弧面23の下端側に、ねじ29で固定されている。他端は
電動機の出力軸２に、上記スチールベルト25とは反対方
向で半回転分程巻きつけた後、ねじ30で出力軸２に固定
されている。The arc plate 24 is integrally fixed on the upper surface of the rotary plate 20 and at the center position of both support portions, and together with the rotary plate 20, the center of rotation O
It is rotatable in arrow sign f 1 and g 1 direction about the. One end of the steel belt 25 is fixed to the upper end side of the arc surface 23 of the arc plate 24 with a screw 27, and the other end is wound around the output shaft 2 of the electric motor by a half turn and then fixed to the output shaft 2 with the screw 28. ing. Further, one end of the other steel belt 26 is fixed to the lower end side of the arc surface 23 of the arc plate 24 with screws 29. The other end is wound around the output shaft 2 of the electric motor by a half turn in a direction opposite to the steel belt 25, and is fixed to the output shaft 2 by screws 30.
このように構成することにより、回転板20の重量は、
スチールベルト25,26を介して電動機の出力軸２により
支えられ、回転部４への円弧板24により偏荷重は除かれ
る。そのため、回転部４には電動機１による回転トルク
のみが加えられることとなり、偏荷重による回転モーメ
ントはなく、回転中心Ｏの偏移は発生しない。With this configuration, the weight of the rotating plate 20 is
The load is supported by the output shaft 2 of the electric motor via the steel belts 25 and 26, and the eccentric load is removed by the arc plate 24 to the rotating part 4. Therefore, only the rotating torque from the electric motor 1 is applied to the rotating part 4, and there is no rotating moment due to the unbalanced load, and no shift of the rotation center O occurs.
いま、電動機１を起動して、その出力軸２を第５図の
矢符号ｆ方向に微小回転させると、スチールベルト26は
出力軸２に巻きつく。一方、スチールベルト25は出力軸
２から離れる。その結果、円弧板24は円弧面23沿いに矢
符号f1方向への移動力を受け、回転部4,回転板260と共
に回転中心Ｏを軸に微小回転する。出力軸２をｇ方向に
逆回転させると、スチールベルト25が出力軸２に巻きつ
き、一方、スチールベルト26は出力軸２から離れる。そ
の結果、円弧板24は円弧面23沿いに矢符号g1方向への移
動力を受け、回転部4,回転板20と共に回転中心Ｏを軸
に、上記とは逆方向に微小回転する。Now, when the electric motor 1 is started and its output shaft 2 is slightly rotated in the direction indicated by the arrow f in FIG. 5, the steel belt 26 is wound around the output shaft 2. On the other hand, the steel belt 25 is separated from the output shaft 2. Consequently, arc plate 24 receives a moving force to Yafugo f 1 direction along the arc surface 23, rotating unit 4, minutely rotating the rotational center O in the axial with rotating plate 260. When the output shaft 2 is reversely rotated in the direction g, the steel belt 25 winds around the output shaft 2, while the steel belt 26 moves away from the output shaft 2. Consequently, arc plate 24 receives a moving force to Yafugo g 1 direction along the arc surface 23, rotating section 4, the shaft center of rotation O with the rotary plate 20, and the minutely rotated in the reverse direction.
したがって、円弧板24の半径をＲ、出力軸２の半径を
ｒとすると、出力軸２の回転は減速比r/Rに減速され、
回転板20ひいては回転部４を回転させることができる。Therefore, if the radius of the arc plate 24 is R and the radius of the output shaft 2 is r, the rotation of the output shaft 2 is reduced to a reduction ratio r / R,
The rotating plate 20 and thus the rotating unit 4 can be rotated.
なお、この実施例における弾性部材６も、前記と同様
に所定の張力を付与して張設されている。The elastic member 6 in this embodiment is also stretched by applying a predetermined tension in the same manner as described above.
また、上記各実施例では、回転部４を４枚の弾性部材
６で支持する場合を述べたが、これに限定されるもので
はなく、２枚以上であればよい。Further, in each of the above embodiments, the case where the rotating portion 4 is supported by the four elastic members 6 has been described.
以上説明したように、本発明によれば、上記の如く構
成したため、次のような種々の効果が得られる。As described above, according to the present invention, since the configuration is as described above, the following various effects can be obtained.
回転部を回転方向にのみ撓み易い弾性部材で支持し、
この回転部に駆動種の回転トルクのみを伝達するものと
したため、潤滑剤が不要であり、且つ高速揺動運動であ
っても摩耗なしに長期間の作動が可能である。The rotating part is supported by an elastic member that easily bends only in the direction of rotation,
Since only the rotation torque of the driving type is transmitted to the rotating portion, no lubricant is required, and operation can be performed for a long period of time without wear even in high-speed oscillating motion.
また、高真空下でも潤滑不良の問題は全く発生せず、
又潤滑剤で環境を汚染することもない。Also, the problem of poor lubrication does not occur at all even under high vacuum,
Also, the environment is not polluted by the lubricant.
また、回転部を支持する弾性部材に張力を付与するこ
とにより剛性を高め、厚さを薄くすることができて、回
転中心の位置精度を極めて精密にすることが可能であ
る。Further, by applying tension to the elastic member supporting the rotating portion, the rigidity can be increased and the thickness can be reduced, and the positional accuracy of the center of rotation can be made extremely precise.
また、減速機構は、その重量を駆動手段の出力軸で支
承するものとしたため、回転部に重量のアンバランスは
なく、回転中心の偏移が防止できて、長期の運転でも回
転精度の劣化がない。In addition, since the deceleration mechanism has its weight supported by the output shaft of the driving means, there is no weight imbalance in the rotating part, and the shift of the rotation center can be prevented, and the deterioration of the rotation accuracy even during long-term operation is reduced. Absent.
第１図は本発明の第一の実施例の要部斜視図、第２図は
作用を説明するためのその正面図、第３図は第二の実施
例の縦断面図、第４図は第３図のIV−IV線断面図、第５
図は第三の実施例の正面図、第６図は第５図のVI−VI線
断面図である。 １は電動機（回転駆動手段）、２は出力軸、３は微小回
転機構、４は回転部、５は固定部、６は弾性部材、22は
減速機構、23は円弧面。FIG. 1 is a perspective view of a main part of a first embodiment of the present invention, FIG. 2 is a front view for explaining the operation, FIG. 3 is a longitudinal sectional view of the second embodiment, and FIG. 5 is a sectional view taken along the line IV-IV in FIG.
FIG. 6 is a front view of the third embodiment, and FIG. 6 is a sectional view taken along line VI-VI of FIG. 1 is an electric motor (rotation driving means), 2 is an output shaft, 3 is a minute rotating mechanism, 4 is a rotating section, 5 is a fixed section, 6 is an elastic member, 22 is a speed reducing mechanism, and 23 is an arc surface.
Claims (4)
間で、回転方向にのみ撓み得るように張設された弾性部
材により、前記回転中心において微小回転可能に支持さ
れた回転部と、この回転部に回転トルクのみを伝達する
ように連結された回転駆動手段とを備えた微小回転装
置。1. A rotating portion supported by a resilient member stretched so as to be able to bend only in the rotating direction between a center of rotation and a fixed portion at a circumferential position thereof so as to be capable of minute rotation at the center of rotation. And a rotary drive unit connected to the rotary unit so as to transmit only rotary torque.
回転部に固着された複数の薄板からなる請求項１記載の
微小回転装置。2. The micro-rotating device according to claim 1, wherein the elastic member comprises a plurality of thin plates having one end fixed to the fixed portion and the other end fixed to the rotating portion.
してある請求項２記載の微小回転装置。3. The micro-rotating device according to claim 2, wherein tension is applied to the thin plate by tension applying means.
中心を中心とする円弧面を有する減速機構を介して連結
された請求項１、２又は３記載の微小回転装置。4. The micro rotary device according to claim 1, wherein the output shaft of the rotary drive means and the rotary portion are connected via a reduction mechanism having an arc surface centered on the rotation center.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63046691A JP2570672B2 (en) | 1988-02-29 | 1988-02-29 | Micro rotating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63046691A JP2570672B2 (en) | 1988-02-29 | 1988-02-29 | Micro rotating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01220716A JPH01220716A (en) | 1989-09-04 |
| JP2570672B2 true JP2570672B2 (en) | 1997-01-08 |
Family
ID=12754405
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63046691A Expired - Fee Related JP2570672B2 (en) | 1988-02-29 | 1988-02-29 | Micro rotating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2570672B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103573807B (en) * | 2012-07-31 | 2016-05-25 | 常州工学院 | The supporting of radial arrays formula elastic torsion |
| JP6056074B2 (en) * | 2012-08-28 | 2017-01-11 | 学校法人福岡大学 | Forward / reverse fine rotation bearing |
-
1988
- 1988-02-29 JP JP63046691A patent/JP2570672B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01220716A (en) | 1989-09-04 |
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| LAPS | Cancellation because of no payment of annual fees |