JP2567473Y2 - Single axis coarse / fine movement device - Google Patents
Single axis coarse / fine movement deviceInfo
- Publication number
- JP2567473Y2 JP2567473Y2 JP3960292U JP3960292U JP2567473Y2 JP 2567473 Y2 JP2567473 Y2 JP 2567473Y2 JP 3960292 U JP3960292 U JP 3960292U JP 3960292 U JP3960292 U JP 3960292U JP 2567473 Y2 JP2567473 Y2 JP 2567473Y2
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- Japan
- Prior art keywords
- shaft
- coarse
- friction
- fine
- fine movement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Description
【０００１】[0001]
【産業上の利用分野】本考案は、実体顕微鏡等の精密機
械における粗微動焦準装置として用いることのできる粗
微動装置に係り、さらに詳しくは遊星摩擦車機構を備え
た一軸式粗微動装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coarse / fine movement device which can be used as a coarse / fine movement focusing device in a precision machine such as a stereomicroscope, and more particularly to a single-axis coarse / fine movement device having a planetary friction wheel mechanism. .
【０００２】[0002]
【従来の技術】従来、遊星鋼球（ボ―ル）を用いて粗動
及び微動を行う装置が知られており、例えば実公昭３３
−１６４６１号公報には図５及び図６に示す粗微動装置
が記載されている。2. Description of the Related Art Conventionally, a device for performing coarse and fine movements using a planetary steel ball (ball) has been known.
Japanese Patent Publication No. 16461 describes a coarse / fine movement device shown in FIGS.
【０００３】同公報に示された粗微動装置は、図５に示
すように、顕微鏡鏡体部（図示しない）が固定された中
ガイド１が、鋼球３を介して、焦準マウント５に固定さ
れた外ガイド７に沿って、上下動可能に支持されてい
る。[0003] In the coarse and fine movement apparatus disclosed in the publication, as shown in FIG. 5, a middle guide 1 to which a microscope body (not shown) is fixed is attached to a focusing mount 5 via a steel ball 3. It is vertically movably supported along the fixed outer guide 7.
【０００４】焦準マウント５には、軸受９が固定されて
おり、この軸受９に粗動軸１１が回転可能に支持されて
いる。この粗動軸１１の中央部には、歯車１３が形成さ
れており、この歯車１３は、中ガイド１に一体的に設け
られたラック１５と噛み合っている。[0004] A bearing 9 is fixed to the focusing mount 5, and a coarse movement shaft 11 is rotatably supported by the bearing 9. A gear 13 is formed at the center of the coarse movement shaft 11, and the gear 13 meshes with a rack 15 provided integrally with the middle guide 1.
【０００５】一方、粗動軸１１に微動軸１７が回転可能
に支持されており、その両端には夫々微動ハンドル１
９，２１が固定されている。また、粗動軸１１の両端に
は夫々微動ハンドル２３，２５が固定されている。On the other hand, a fine movement shaft 17 is rotatably supported by the coarse movement shaft 11, and a fine movement handle 1 is provided at both ends thereof.
9, 21 are fixed. Fine movement handles 23 and 25 are fixed to both ends of the coarse movement shaft 11, respectively.
【０００６】また、粗動軸１１を支承している軸受９の
一端には、円錐面２７が形成されており、この円錐面２
７には、図７に示すように、粗動軸１１の一端に回転自
在に保持された３つの鋼球２９が接触している。A conical surface 27 is formed at one end of the bearing 9 which supports the coarse movement shaft 11.
As shown in FIG. 7, three steel balls 29 rotatably held at one end of the coarse movement shaft 11 are in contact with 7.
【０００７】上記各鋼球２９は、軸受９にねじ込まれた
ナット３１によって押圧されたばね３３及び円錐リング
３５を介して、円錐面２７に押圧接触すると同時に、微
動軸１７にも押圧接触している。Each of the steel balls 29 is in contact with the conical surface 27 via a spring 33 and a conical ring 35 which are pressed by a nut 31 screwed into the bearing 9, and is also in contact with the fine movement shaft 17. .
【０００８】以上のように構成された粗微動装置では、
粗動ハンドル２３又は２５を回転することによって、粗
動軸１１が直接回転し、その粗動軸１１に形成された歯
車１３及び歯車１３と噛合しているラック１５を介して
中ガイド１に伝達される。この結果、中ガイド１が、外
ガイド７に沿って上下動する。In the coarse / fine movement device configured as described above,
By rotating the coarse movement handle 23 or 25, the coarse movement shaft 11 is directly rotated and transmitted to the middle guide 1 via the gear 13 formed on the coarse movement shaft 11 and the rack 15 meshed with the gear 13. Is done. As a result, the middle guide 1 moves up and down along the outer guide 7.
【０００９】また、微動ハンドル１９又は２１を回転さ
せることによって、鋼球２９が微動軸１７の軸心を中心
に遊星回転し、その時、粗動軸１１が鋼球２９に押され
て回転する。Further, by rotating the fine movement handle 19 or 21, the steel ball 29 rotates planetarily about the axis of the fine movement shaft 17, and at this time, the coarse movement shaft 11 is pushed by the steel ball 29 and rotates.
【００１０】この時の微動軸１７と粗動軸１１との回転
角度の比は、鋼球２９と、微動軸１７及び円錐面２７
と、の接触点での滑りが発生しないとした場合、微動軸
１７の中心から鋼球２９と微動軸１７の接触点までの距
離をＲ１、微動軸１７の中心から鋼球２９と円錐面２７
の接触点までの距離をＲ２とすると、微動軸１７の回転
角θ1 に対し、粗動軸１１の回転角θ2 は、 θ2 ＝θ1 ／｛( Ｒ２／Ｒ１）＋１｝ である。At this time, the rotation angle ratio between the fine movement shaft 17 and the coarse movement shaft 11 is determined by the steel ball 29, the fine movement shaft 17 and the conical surface 27.
If no slip occurs at the contact point of the fine motion shaft 17, the distance from the center of the fine motion shaft 17 to the contact point of the steel ball 29 and the fine motion shaft 17 is R1, and the distance between the center of the fine motion shaft 17 and the steel ball 29 and the conical surface 27 is R1.
When the distance to the contact points and R2, to the rotational angle theta 1 of the fine shaft 17, the rotation angle theta 2 of Sodojiku 11 is θ 2 = θ 1 / {( R2 / R1) +1}.
【００１１】従って、微動ハンドル１９又は２１を回転
することによって、鋼球２９を介して粗動軸１１が減速
回転される。この減速回転力は、歯車１３及びラック１
５を介して中ガイド１に伝達される。この結果、中ガイ
ド１が、外ガイド７に沿って微動上下動される。また、
実開平３−４９５１１号公報には、上述した鋼球２２の
代わりに、一対の遊星摩擦車を用いた粗微動焦準装置が
記載されている。Therefore, by rotating the fine movement handle 19 or 21, the coarse movement shaft 11 is rotated at a reduced speed via the steel ball 29. This reduced rotational force is applied to the gear 13 and the rack 1
5 to the middle guide 1. As a result, the middle guide 1 is finely moved up and down along the outer guide 7. Also,
Japanese Utility Model Laid-Open Publication No. 3-49511 discloses a coarse / fine focusing device using a pair of planetary friction wheels instead of the steel ball 22 described above.
【００１２】同公報に記載された粗微動焦準装置の構成
を図７及び図８に示す。なお図７及び図８には、装置の
特徴部分の構成のみを示す。この装置は、微動軸３７に
形成した第１の円錐面３９と、この微動軸３７に回転可
能に嵌合した円錐環４１と、微動軸３７の回転力が減速
されて伝達されるピニオン軸（図示しない）を支持する
ピニオンケース４３と、このピニオンケース４３に固定
された第１の固定輪４５に形成された第２の円錐面４７
と、第１の固定輪４５に固定された第２の固定輪４９に
形成された第３の円錐面５１と、粗動軸３８に装着され
た軸５３を中心に回転可能な一対の第１及び第２の遊星
摩擦車５５、５７とを備えている。FIGS. 7 and 8 show the configuration of the coarse / fine focusing device described in the publication. 7 and 8 show only the configuration of the characteristic portion of the apparatus. This device includes a first conical surface 39 formed on a fine movement shaft 37, a conical ring 41 rotatably fitted on the fine movement shaft 37, and a pinion shaft ( (Not shown), and a second conical surface 47 formed on a first fixed wheel 45 fixed to the pinion case 43.
A third conical surface 51 formed on a second fixed wheel 49 fixed to the first fixed wheel 45, and a pair of first rotatable shafts 53 mounted on the coarse movement shaft 38. And second planetary friction wheels 55 and 57.
【００１３】第１の遊星摩擦車５５の外周は、第１の円
錐面３９及び第２の円錐面４７に接触し、第２の遊星摩
擦車５７の外周は、円錐環４１及び第３の円錐面５１に
接触している。これら第１及び第２の遊星摩擦車５５、
５７は、皿ばね５９によって互いにスラスト方向に押し
広げられ、前述した第１ないし第３の円錐面３９、４
７、５１及び円錐環４１に押圧されている。なお、符号
６１は、粗動ハンドルで、符号６３は、微動ハンドルで
ある。The outer periphery of the first planetary friction wheel 55 contacts the first conical surface 39 and the second conical surface 47, and the outer periphery of the second planetary friction wheel 57 has the conical ring 41 and the third conical surface. The surface 51 is in contact. These first and second planetary friction wheels 55,
57 are pushed apart in the thrust direction by a disc spring 59, and the above-described first to third conical surfaces 39, 4
7, 51 and the conical ring 41. Reference numeral 61 is a coarse movement handle, and reference numeral 63 is a fine movement handle.
【００１４】このような構成によれば、例えば、微動ハ
ンドル６３を回転することによって、第１の円錐面３９
が回転し、この第１の円錐面３９と接触している第１の
遊星摩擦車５５が、軸５３及び微動軸３７の回りで遊星
回転される。なお、第２の遊星摩擦車５７も、第１の遊
星摩擦車５５と同様に、軸５３及び微動軸３７の回りで
遊星回転される。According to such a configuration, for example, by rotating the fine movement handle 63, the first conical surface 39
Rotates, and the first planetary friction wheel 55 that is in contact with the first conical surface 39 is planetary-rotated around the shaft 53 and the fine movement shaft 37. In addition, the second planetary friction wheel 57 is also planetarily rotated around the shaft 53 and the fine movement shaft 37, like the first planetary friction wheel 55.
【００１５】[0015]
【考案が解決しようとする課題】ところで、図５及び図
６に示した粗微動装置では、減速比を大きくとろうとす
ると微動軸心から微動軸と鋼球との接触点までの距離Ｒ
１を小さくするか，もしくは、微動軸心から軸受の円錐
面と鋼球との接触点までの距離Ｒ２を大きくする必要が
ある。In the coarse and fine motion devices shown in FIGS. 5 and 6, when the reduction ratio is to be increased, the distance R from the fine motion axis to the contact point between the fine motion shaft and the steel ball is increased.
It is necessary to reduce 1 or increase the distance R2 from the fine movement axis to the contact point between the conical surface of the bearing and the steel ball.
【００１６】しかしながら、Ｒ１を小さくするには限度
があるのでＲ２を大きくすると、鋼球の直径も大きくす
る必要が生じ、粗動ハンドルの外径が大きくなるのみな
らず、軸方向のスペ―スも大きくなってしまうという問
題がある。However, since there is a limit in reducing R1, if R2 is increased, it is necessary to increase the diameter of the steel ball, which not only increases the outer diameter of the coarse movement handle but also increases the space in the axial direction. Also becomes large.
【００１７】また、微動ハンドルを回転させた場合、鋼
球は、自転しながら公転する（遊星運動）ので、粗動軸
との間では自転時の滑り接触をしながら、公転する力に
よって粗動軸を回転させる。従って、粗動軸と鋼球との
接触点では、滑り摩擦力が鋼球の自転を止めようとする
力として働くので、鋼球と軸受の円錐面及び微動軸との
接触点で滑りが生ぜずに粗動軸を確実に微動回転させる
ためには、鋼球により強い押圧力をかける必要がある等
の問題がある。Further, when the fine movement handle is rotated, the steel ball revolves while rotating (planetary motion), so that the steel ball makes a sliding contact with the coarse movement shaft during the rotation, and coarsely moves due to the revolving force. Rotate the shaft. Therefore, at the point of contact between the coarse motion shaft and the steel ball, the sliding friction force acts as a force to stop the rotation of the steel ball, so that slip occurs at the contact point between the steel ball and the conical surface of the bearing and the fine motion shaft. In order to surely finely rotate the coarse movement shaft without using it, there is a problem that a stronger pressing force needs to be applied to the steel ball.
【００１８】また、図７及び図８に示す装置では、一
旦、装置を組み立てた後においては、第１及び第２の遊
星摩擦車を付勢している皿ばねの力量を調節することが
不可能となり、保守・点検が困難となるという問題があ
る。しかも、各組毎に一対の遊星摩擦車が必要であるの
みならず、３組の遊星摩擦車間に夫々付勢バネが必要な
ことから、部品点数が増加して製造コストが上昇すると
いう問題がある。Further, in the apparatus shown in FIGS. 7 and 8, once the apparatus is assembled, it is impossible to adjust the amount of force of the disc spring biasing the first and second planetary friction wheels. There is a problem that maintenance and inspection become difficult. In addition, not only is a pair of planetary friction wheels necessary for each set, but also a biasing spring is required between the three sets of planetary friction wheels, so that the number of parts increases and the manufacturing cost increases. is there.
【００１９】本考案は、このような問題点を解決するた
めになされ、その目的は、簡単且つコンパクトな構成で
あると共に、軽い押圧力で遊星摩擦車を微動軸及び軸受
の夫々の摩擦面に確実に接触させることができ、さらに
部品の精度誤差を吸収することが可能でゴリ，ザラ，回
転ムラを無くし耐久性を向上し得る一軸式粗微動装置を
提供することにある。SUMMARY OF THE INVENTION The present invention has been made to solve such a problem, and its object is to provide a simple and compact structure, and to apply a planetary friction wheel to the respective friction surfaces of the fine shaft and the bearing with a small pressing force. It is an object of the present invention to provide a single-shaft coarse / fine movement device which can surely make contact with each other, can absorb a precision error of a part, eliminates rubbing, roughness, and uneven rotation, and can improve durability.
【００２０】[0020]
【課題を解決するための手段】このような目的を達成す
るために、本考案の一軸式粗微動装置は、同心状に配置
された粗動軸と微動軸とを有し、前記粗動軸に直接加え
られる回転によって移動体を粗動させ、前記微動軸に加
えられる回転を減速させて前記粗動軸へ伝達して当該粗
動軸を回転させることにより前記移動体を微動させるも
のにおいて、前記粗動軸の外周に設けられた摩擦車保持
部と、前記摩擦車保持部の前記粗動軸を中心とする同一
円周上の各位置に各々の偏心軸を回転自在に軸支され、
装置本体の摩擦面に各々の外周面を接触させた複数の遊
星摩擦車と、前記各遊星摩擦車と前記微動軸との間に介
在され、前記各遊星摩擦車に前記微動軸の回転を伝える
と共に前記摩擦面側へ押圧する押圧手段とを備え、少な
くとも一つの前記遊星摩擦車は、前記偏心軸を中心に回
転する偏心回転板と、この偏心回転板の外周面に転がり
部材を介して回転自在に保持され、前記摩擦面及び前記
押圧手段に接触する摩擦輪と、前記偏心回転板の中心部
より外周面に向けて前記転がり部材を押圧する弾性体と
からなる構成とした。In order to achieve the above object, a single-axis coarse / fine movement device according to the present invention has a coarse movement axis and a fine movement axis arranged concentrically. Coarsely moving the moving body by the rotation applied directly to the fine movement axis, by slowing down the rotation applied to the fine movement shaft, transmitting the coarse movement shaft to the coarse movement shaft, and finely moving the moving body, A friction wheel holding portion provided on the outer periphery of the coarse movement shaft, and each eccentric shaft is rotatably supported at each position on the same circumference around the coarse movement shaft of the friction wheel holding portion,
A plurality of planetary friction wheels whose respective outer peripheral surfaces are brought into contact with the friction surface of the apparatus main body, and are interposed between each of the planetary friction wheels and the fine movement shaft to transmit the rotation of the fine movement shaft to each of the planetary friction wheels. And at least one planetary friction wheel is provided with an eccentric rotary plate that rotates about the eccentric shaft, and a rotating member that rotates on an outer peripheral surface of the eccentric rotary plate via a rolling member. The friction ring is freely held and comes into contact with the friction surface and the pressing means, and the elastic body presses the rolling member from the center of the eccentric rotary plate toward the outer peripheral surface.
【００２１】[0021]
【作用】本考案の一軸式粗微動装置では、各遊星摩擦車
が押圧手段により微動軸及び装置本体の摩擦面とに接触
される。微動軸を回転させると、各遊星摩擦車が押圧手
段との間に生じる摩擦力によって自転すると共に、粗動
軸の回りを回転する。In the single-shaft coarse / fine movement device of the present invention, each planetary friction wheel is brought into contact with the fine movement shaft and the friction surface of the apparatus main body by the pressing means. When the fine movement shaft is rotated, each planetary friction wheel rotates by the frictional force generated between the planetary friction wheel and the pressing means, and rotates around the coarse movement shaft.
【００２２】この時、転がり部材を介して保持された摩
擦輪を有する遊星摩擦車では、摩擦輪と偏心回転板とが
同時に回転開始する。そして偏心回転板が弾性体の押圧
力を受けた転がり部材と摩擦輪との摩擦力で摩擦輪と同
方向に回転するが、偏心軸を中心に回転するので摩擦輪
内を１回転することなく弾性体の押圧力と偏心軸の回転
力とが釣り合う位置まで回転する。その後は転がり部材
と摩擦輪とが滑って偏心回転板は停止し、摩擦輪のみが
回転し、その回転が粗動軸へ伝達されて粗動軸が減速回
転される。At this time, in a planetary friction wheel having a friction wheel held via a rolling member, the friction wheel and the eccentric rotary plate start rotating at the same time. Then, the eccentric rotary plate rotates in the same direction as the friction wheel by the friction force between the rolling member and the friction wheel subjected to the pressing force of the elastic body, but rotates around the eccentric shaft, so that it does not make one rotation in the friction wheel. It rotates to a position where the pressing force of the elastic body and the rotational force of the eccentric shaft balance. Thereafter, the rolling member and the friction wheel slide, the eccentric rotary plate stops, only the friction wheel rotates, the rotation is transmitted to the coarse motion shaft, and the coarse motion shaft is decelerated and rotated.
【００２３】よって、粗微動に係わる構成部品に精度誤
差があると、偏心回転板に設けた弾性体が誤差補正分だ
け補正方向に伸縮して、偏心回転板と摩擦輪との位置関
係が、回転のゴリ，ザラ，ムラを無くし得る最適な状態
に保たれる。Therefore, if there is an accuracy error in the components related to the coarse and fine movements, the elastic body provided on the eccentric rotary plate expands and contracts in the correction direction by the error correction, and the positional relationship between the eccentric rotary plate and the friction wheel becomes It is maintained in an optimal state that can eliminate the rotation, roughness, and unevenness.
【００２４】[0024]
【実施例】以下、本考案の実施例に係る一軸式粗微動装
置について説明する。図１には、実施例となる一軸式粗
微動装置の断面構造が示されている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A single-shaft coarse / fine movement device according to an embodiment of the present invention will be described below. FIG. 1 shows a cross-sectional structure of a single-axis coarse / fine movement device according to an embodiment.
【００２５】本実施例の一軸式粗微動装置は、中ガイド
６５と外ガイド６９とを備えており、その中ガイド６５
は実体顕微鏡の鏡体部（図示しない）が固定され、且
つ、後述する歯車７７が噛合可能なラック７９が形成さ
れている。また外ガイド６９は焦準マウント６７に固定
されている。The single-axis coarse / fine movement device according to the present embodiment includes a middle guide 65 and an outer guide 69.
A rack 79 to which a mirror body (not shown) of the stereomicroscope is fixed and in which a gear 77 described later can be meshed is formed. The outer guide 69 is fixed to the focusing mount 67.
【００２６】外ガイド６９と中ガイド６５との間には鋼
球７１が転動自在に介挿されており、この鋼球７１を介
して中ガイド６５は、外ガイド６９に沿って上下動可能
に支持されている。A steel ball 71 is rotatably inserted between the outer guide 69 and the middle guide 65, and the middle guide 65 can move up and down along the outer guide 69 via the steel ball 71. It is supported by.
【００２７】また焦準マウント６７には、軸受７３が固
定されており、この軸受７３に筒状の粗動軸７５が回転
可能に嵌合されている。粗動軸７５の中央部には、前述
したラック７９と噛合可能な歯車７７が形成されてい
る。A bearing 73 is fixed to the focusing mount 67, and a cylindrical coarse movement shaft 75 is rotatably fitted to the bearing 73. A gear 77 that can mesh with the rack 79 described above is formed at the center of the coarse movement shaft 75.
【００２８】粗動軸７５の一端にはフランジ８１を介し
て第１の粗動ハンドル８３が固定されており、他端には
第２の粗動ハンドル８５が固定されている。また、軸受
７３の一端にはテンションリング８７が螺合されてい
る。このテンションリング８７を回転させて、皿ばね８
９の押圧力を変化させることによって、粗動軸７５のト
ルクを調節できるように構成されている。A first coarse movement handle 83 is fixed to one end of the coarse movement shaft 75 via a flange 81, and a second coarse movement handle 85 is fixed to the other end. A tension ring 87 is screwed to one end of the bearing 73. By rotating the tension ring 87, the disc spring 8
The torque of the coarse movement shaft 75 can be adjusted by changing the pressing force of No. 9.
【００２９】また粗動軸７５内には、微動軸９１が回転
可能に嵌合されている。その微動軸９１の一端には第１
の微動ハンドル９３が、また他端には第２の微動ハンド
ル９５がそれぞれ固定されている。A fine movement shaft 91 is rotatably fitted in the coarse movement shaft 75. The first end of the fine movement shaft 91 is
And a second fine movement handle 95 is fixed to the other end.
【００３０】粗動軸７５の他端部の外周面には、摩擦車
保持部材としてのフランジ部１００が形成されている。
このフランジ部１００の一方の側面には、粗動軸７５を
中心とする同一円周上に３つの遊星摩擦車１０１ａ，１
０１ｂ，１０１ｃが回転可能に支持されている。On the outer peripheral surface of the other end of the coarse movement shaft 75, a flange portion 100 as a friction wheel holding member is formed.
On one side surface of the flange portion 100, three planetary friction wheels 101a, 1
01b and 101c are rotatably supported.
【００３１】図１及び図３には、遊星摩擦車１０１ａの
断面構造が示されている。この遊星摩擦車１０１ａは、
偏心回転板１０２の偏心軸を摩擦車支持軸１０３にて回
転自在に支持されており、その偏心回転板１０２の外周
面に、転がり部材としての複数のコロ１０４ａ〜１０４
ｃを介して、摩擦輪１０５が偏心回転板１０２の周面上
を回転可能に保持されている。偏心回転板１０２の内部
には、その中心部から外周面に向けて放射状に３つの弾
性体１０６ａ〜１０６ｃが挿入されており、各々対応す
るコロ１０４ａ〜１０４ｃを外方に押圧している。FIGS. 1 and 3 show the sectional structure of the planetary friction wheel 101a. This planetary friction wheel 101a is
An eccentric shaft of the eccentric rotary plate 102 is rotatably supported by a friction wheel support shaft 103, and a plurality of rollers 104a to 104 as rolling members are provided on the outer peripheral surface of the eccentric rotary plate 102.
The friction wheel 105 is rotatably held on the peripheral surface of the eccentric rotary plate 102 via c. Inside the eccentric rotary plate 102, three elastic bodies 106a to 106c are radially inserted from the center to the outer peripheral surface, and press the corresponding rollers 104a to 104c outward.
【００３２】また遊星摩擦車１０１ｂ，１０１ｃは、フ
ランジ部１００にそれぞれ固定された摩擦車支持軸１０
７ｂ，１０７ｃに偏心回転板１０８ｂ，１０８ｃの偏心
軸が回転自在に支持され、その偏心回転板１０８の外周
面上を摩擦輪１０９ｂ，１０９ｃが回転可能に嵌合され
ている。Further, the planetary friction wheels 101b and 101c have friction wheel support shafts 10 fixed to the flange portion 100, respectively.
Eccentric shafts of the eccentric rotary plates 108b and 108c are rotatably supported by 7b and 107c, and friction wheels 109b and 109c are rotatably fitted on the outer peripheral surface of the eccentric rotary plate 108.
【００３３】上記各遊星摩擦車１０１ａ〜１０１ｃ及び
フランジ部１００は、軸受７３の他端部開口部内に配置
されるようになっており、その開口部内面が各遊星摩擦
車１０１ａ〜１０１ｃの外周面と接触する装置本体側の
摩擦面１１０となっている。一方、微動軸９１の他端部
であって上記遊星摩擦車と対向する位置に、上記各遊星
摩擦車の外周面の一方の縁部が接触する円錐面１１１を
有するフランジ部１１２が取付けられている。Each of the planetary friction wheels 101a to 101c and the flange portion 100 are arranged in the opening at the other end of the bearing 73, and the inner surface of the opening is the outer peripheral surface of each of the planetary friction wheels 101a to 101c. And a friction surface 110 on the apparatus main body side that comes into contact with the main body. On the other hand, a flange portion 112 having a conical surface 111 with which one edge of the outer peripheral surface of each of the planetary friction wheels is in contact with the other end of the fine movement shaft 91 and opposed to the planetary friction wheels is attached. I have.
【００３４】さらに微動軸９１の他端部には、円錐面１
１１に対面する位置に、３個の遊星摩擦車１０１ａ〜１
０１ｃの外周面の他方の縁部を押圧可能な円錐リング１
１３がスラスト方向（具体的には、円錐面１１１に接近
あるいは離間する方向）に移動可能に遊嵌されている。Further, the other end of the fine movement shaft 91 has a conical surface 1.
11, three planetary friction wheels 101a-1
Conical ring 1 capable of pressing the other edge of the outer peripheral surface of the outer ring 01c
13 is loosely fitted so as to be movable in the thrust direction (specifically, a direction approaching or separating from the conical surface 111).
【００３５】円錐リング１１３は、隣接して配置された
皿ばね１１４によって、円錐面１１１方向に押圧可能に
構成されている。また、皿ばね１１４は、微動軸９１に
回転自在に螺合されたナット１１５によって、このナッ
ト１１５と円錐リング１１３との間に挟持されている。
この結果、ナット１１５を回転して皿ばね１１４の押圧
力を変化させ、微動軸９１に回転可能に嵌合している円
錐リング１１３を介して、遊星摩擦車１０１ａ〜１０１
ｃの他方の外周縁部に押圧力を作用させることによっ
て、遊星摩擦車１０１ａ〜１０１ｃの一方の外周縁部は
円錐面１１１に押圧接触される。The conical ring 113 is configured to be able to be pressed in the direction of the conical surface 111 by a disc spring 114 arranged adjacently. Further, the disc spring 114 is held between the nut 115 and the conical ring 113 by a nut 115 rotatably screwed to the fine movement shaft 91.
As a result, the nut 115 is rotated to change the pressing force of the disc spring 114, and the planetary friction wheels 101a to 101 are rotated via the conical ring 113 rotatably fitted to the fine movement shaft 91.
By exerting a pressing force on the other outer peripheral edge of c, one outer peripheral edge of the planetary friction wheels 101a to 101c is pressed against the conical surface 111.
【００３６】従って、遊星摩擦車１０１ａ〜１０１ｃ
は、円錐リング１１３と円錐面１１１とからの合力を受
け、偏心回転板１０２，１０８ｂ，１０８ｃを摩擦車支
持軸１０３，１０７ｂ，１０７ｃの回りに回転させる。
この結果、遊星摩擦車１０１ａ〜１０１ｃがラジアル方
向に付勢され、遊星摩擦車１０１ａ〜１０１ｃの外周面
が軸受７３の摩擦面１１１に押圧接触される。このた
め、遊星摩擦車１０１ａ〜１０１ｃは、円錐面１１１及
び軸受７３の摩擦面１１０に対して最適な状態に押圧接
触される。次に、以上のように構成された本実施例の動
作について説明する。Therefore, the planetary friction wheels 101a to 101c
Receives the resultant force from the conical ring 113 and the conical surface 111, and rotates the eccentric rotary plates 102, 108b, 108c around the friction wheel support shafts 103, 107b, 107c.
As a result, the planetary friction wheels 101a to 101c are urged in the radial direction, and the outer peripheral surfaces of the planetary friction wheels 101a to 101c are pressed into contact with the friction surface 111 of the bearing 73. Therefore, the planetary friction wheels 101 a to 101 c are pressed against the conical surface 111 and the friction surface 110 of the bearing 73 in an optimal state. Next, the operation of the present embodiment configured as described above will be described.
【００３７】先ず、遊星摩擦車１０１ｂ，１０１ｃに関
する動作について説明する。第１又は第２の微動ハンド
ル９３又は９５を回転させることによって、微動軸９１
に取り付けられたフランジ部１１２が回転する。このフ
ランジ部１１２の回転により、円錐面１１１に接触して
いる遊星摩擦車１０１ｂ，１０１ｃは摩擦車支持軸１０
７ｂ，１０７ｃを中心に回転する。First, the operation of the planetary friction wheels 101b and 101c will be described. By rotating the first or second fine adjustment handle 93 or 95, the fine adjustment shaft 91 is adjusted.
The flange 112 attached to the shaft rotates. Due to the rotation of the flange portion 112, the planetary friction wheels 101b and 101c in contact with the conical surface 111 cause the friction wheel support shaft 10 to rotate.
7b and 107c rotate.
【００３８】ところが、各遊星摩擦車１０１ｂ，１０１
ｃは、軸受７３の摩擦面１１０にも接触しているため、
微動軸９１の回りにも回転する遊星運動をはじめ、摩擦
車支持軸１０７ｂ，１０７ｃを介して粗動軸７５を減速
回転させる。However, each of the planetary friction wheels 101b, 101
c is also in contact with the friction surface 110 of the bearing 73,
The coarse motion shaft 75 is decelerated and rotated via the friction wheel support shafts 107b and 107c, including the planetary motion rotating also around the fine motion shaft 91.
【００３９】この時、摩擦輪１０９ｂ，１０９ｃと偏心
回転板１０８ｂ，１０８ｃとの嵌合部には遊星摩擦車１
０１ｂ，１０１ｃの自転を押し止めようとする摩擦力が
発生する。しかし、遊星摩擦車１０１ｂ，１０１ｃの回
転軸心から摩擦力作用点（即ち、摩擦車支持軸１０７
ｂ，１０７ｃと偏心回転板１０８ｂ，１０８ｃとの嵌合
面）までの距離を、従来よりも小さくさせることがで
き、且つ、摩擦輪１０９ｂ，１０９ｃと偏心回転板１０
８ｂ，１０８ｃとの嵌合面を潤滑剤等により潤滑させる
こともできる。At this time, the planetary friction wheels 1 are provided at the fitting portions between the friction wheels 109b and 109c and the eccentric rotary plates 108b and 108c.
A frictional force is generated to stop the rotation of 01b and 101c. However, the point of action of the frictional force (that is, the frictional wheel support shaft 107) is set from the rotation axis of the planetary friction wheels 101b and 101c.
b, 107c and the eccentric rotary plates 108b, 108c) can be made smaller than before, and the friction wheels 109b, 109c and the eccentric rotary plates 10c,
8b, 108c can be lubricated with a lubricant or the like.
【００４０】このため、従来と比べて遊星摩擦車１０１
ｂ，１０１ｃの自転を押し止めようと作用する摩擦力
は、はるかに小さくさせることができる。この結果、皿
ばね１１４の押圧力を、それほど大きくしなくても、高
精度且つ円滑な遊星運動を得ることができる。Therefore, the planetary friction wheel 101 is
The frictional force acting to suppress the rotation of b, 101c can be made much smaller. As a result, high precision and smooth planetary motion can be obtained without increasing the pressing force of the disc spring 114 so much.
【００４１】一方、遊星摩擦車１０１ａは、他の遊星摩
擦車と同様に、摩擦輪１０５の外周面の両縁部がそれぞ
れ円錐面１１１と円錐リング１１３とで挟み込まれてい
るので、例えば微動軸９１を左回転した場合、摩擦輪１
０５は上記挟み込みの力による摩擦力で右回転をすると
同時に軸受７３の摩擦面１１１上を左回転する。On the other hand, in the planetary friction wheel 101a, like the other planetary friction wheels, both edges of the outer peripheral surface of the friction wheel 105 are sandwiched between the conical surface 111 and the conical ring 113, respectively. When 91 is rotated counterclockwise, friction wheel 1
Numeral 05 rotates clockwise by the frictional force of the pinching force and simultaneously rotates counterclockwise on the friction surface 111 of the bearing 73.
【００４２】その時、偏心回転板１０２は、弾性体１０
６ａ〜１０６ｃの押圧力を受けたコロ１０４ａ〜１０４
ｃと摩擦輪１０５との間の摩擦力で摩擦輪１０５と同方
向に回転する。At this time, the eccentric rotary plate 102 is
Rollers 104a-104 which received the pressing force of 6a-106c
The friction wheel 105 rotates in the same direction as the friction wheel 105 due to the frictional force between the friction wheel 105 and the friction wheel 105.
【００４３】ところが、偏心回転板１０２は、摩擦車支
持軸１０３を支点に回転するので、摩擦輪１０５の内部
を１回転まではせず、弾性体１０６ａ〜１０６ｃによる
保持力と偏心回転板１０２の回転力とが釣り合う位置ま
で来たところで回転を停止する。その後はコロ１０４ａ
〜１０４ｃと摩擦輪１０５とが滑って、摩擦輪１０５の
みが回転し、その摩擦輪１０５の回転力が減速回転して
粗動軸７５へ伝達される。その結果、粗動軸７５が回転
し、ラック７９を介して載物台などを微動させる。However, since the eccentric rotary plate 102 rotates about the friction wheel support shaft 103 as a fulcrum, the rotation of the eccentric rotary plate 102 and the holding force of the elastic bodies 106a to 106c are not performed until the inside of the friction wheel 105 rotates once. When it reaches a position where the rotational force is balanced, the rotation is stopped. After that, roller 104a
104c and the friction wheel 105 slip, only the friction wheel 105 rotates, and the rotational force of the friction wheel 105 is reduced and rotated and transmitted to the coarse movement shaft 75. As a result, the coarse movement shaft 75 rotates, and the stage or the like is finely moved via the rack 79.
【００４４】なお、微動軸９１の位置は、軸受７３と微
動軸円錐面１１１と円錐リング１１３とで挟み込まれた
各遊星摩擦車１０１ａ〜１０１ｃによって決定されるの
で、粗微動回転における回転偏心は、構成部品の精度誤
差の累積分が偏心量となる。その偏心量が回転ムラを誘
発する。また粗動軸７５を回転させると微動軸９１も回
転するので、微動軸９１が偏心すると粗動軸７５の回転
ムラを誘発することにもなる。The position of the fine movement shaft 91 is determined by each of the planetary friction wheels 101a to 101c sandwiched between the bearing 73, the fine movement shaft conical surface 111 and the conical ring 113. The cumulative amount of the accuracy error of the component part is the eccentricity. The eccentric amount induces rotation unevenness. Further, when the coarse movement shaft 75 is rotated, the fine movement shaft 91 is also rotated. Therefore, when the fine movement shaft 91 is eccentric, the rotation unevenness of the coarse movement shaft 75 is also induced.
【００４５】本実施例によれば、構成部品に精度誤差が
あると各弾性体１０６ａ〜１０６ｃがその誤差補正分だ
け補正方向に縮み、偏心回転板１０２と摩擦輪１０５と
の位置関係が常に最適な状態に保たれる。従って、構成
部品の精度誤差に起因する回転ムラ，ゴリ，ザラの発生
を防止することができる。According to this embodiment, if there is an accuracy error in the components, each of the elastic bodies 106a to 106c contracts in the correction direction by the error correction, and the positional relationship between the eccentric rotary plate 102 and the friction wheel 105 is always optimal. State is maintained. Therefore, it is possible to prevent the occurrence of rotation unevenness, rubbing, and roughness due to the accuracy error of the component parts.
【００４６】また粗微動回転開始時に、摩擦輪１０５と
偏心回転板１０２とが同時に回転を始めるので、摩擦輪
１０５と偏心回転板１０２との間の摩擦力は、摩擦輪１
０５を回転させようとする回転力よりも極めて小さなも
のとなる。従って、粗動軸７５及び微動軸９１の回転を
非常に滑らかに行うことができる。しかも、その他の遊
星摩擦車１０１ｂ，１０１ｃは、滑らかな動きの遊星摩
擦車１０１ａの動きに追従して、各々の回転開始時の動
きが滑らかになる。この様な追従動作によって、摩擦輪
１０５，１０９ｂ，１０９ｃと微動軸円錐面１１１及び
円錐リング１１３とにおけるスリップが防止される利点
もある。また、スリップが防止されることから、接触面
が削られることがなくなるので、部品の摩耗がなく、粗
微動の回転耐性を飛躍的に向上することができる。Further, at the start of the coarse and fine movement rotation, the friction wheel 105 and the eccentric rotary plate 102 start rotating simultaneously, so that the friction force between the friction wheel 105 and the eccentric rotary plate 102 is
The rotation force is extremely smaller than the rotation force for rotating the 05. Therefore, the rotation of the coarse movement shaft 75 and the fine movement shaft 91 can be performed very smoothly. In addition, the other planetary friction wheels 101b and 101c follow the smooth movement of the planetary friction wheel 101a, and the movement at the start of each rotation becomes smooth. By such a follow-up operation, there is also an advantage that slippage between the friction wheels 105, 109b, and 109c, the fine movement shaft conical surface 111 and the conical ring 113 is prevented. Further, since the slip is prevented, the contact surface is not scraped, so that there is no wear of the components and the rotation resistance of the coarse and fine movement can be remarkably improved.
【００４７】回転耐性の実験によれば、弾性体及びコロ
を備えていない遊星摩擦車では回転回数１０００〜３０
００回で回転不能になった。一方、本実施例の様に弾性
体及びコロを備えて偏心軸を自在に移動できるようにし
た摩擦輪１０５を１ケ入れて構成した遊星摩擦車機構で
は回転回数２０万回以上であっても回転不能になること
はなかった。According to the experiment of the rotation resistance, in the case of a planetary friction wheel having no elastic body and rollers, the number of rotations is 1000 to 30.
Rotation became impossible at 00 times. On the other hand, in a planetary friction wheel mechanism including one friction wheel 105 having an elastic body and a roller so that the eccentric shaft can freely move as in this embodiment, even if the number of rotations is 200,000 or more, There was no loss of rotation.
【００４８】また本実施例によれば、摩擦輪１０５と偏
心回転板１０２とが同時に回転開始して回転開始時の摩
擦輪１０５と偏心回転板１０２との間の摩擦力が小さい
ので、微動軸９１の回転始動に十分追従できる。よっ
て、摩擦輪１０５と偏心回転板１０２との嵌合寸法差に
よる間隙がガタとして手に伝えられることがない。Further, according to the present embodiment, the friction wheel 105 and the eccentric rotary plate 102 start rotating simultaneously and the frictional force between the friction wheel 105 and the eccentric rotary plate 102 at the start of rotation is small. It can sufficiently follow the rotation start of 91. Therefore, the gap caused by the difference in the fitting dimension between the friction wheel 105 and the eccentric rotary plate 102 is not transmitted to the hand as play.
【００４９】微動軸回転開始時に手に感じるガタは、微
動軸回転方向とは逆方向に摩擦輪を停止させようとする
摩擦力が回転力よりも大きいために偏心軸が間隙分だけ
移動後に強制的に摩擦車を回転させる量に相当する。従
って、本実施例の構成によれば、上記したように微動軸
回転開始時の摩擦力は極小なので、偏心回転板１０２が
摩擦輪１０５を強制回転させる前に摩擦輪１０５が回転
を開始し、間隙分が手に感じられない。At the start of the rotation of the fine movement shaft, the play which is felt by the hand is forcible after the eccentric shaft moves by the gap because the friction force for stopping the friction wheel in the direction opposite to the rotation direction of the fine movement shaft is larger than the rotation force. This is equivalent to the amount by which the friction wheel is rotated. Therefore, according to the configuration of the present embodiment, as described above, the frictional force at the start of rotation of the fine movement shaft is extremely small, so that the friction wheel 105 starts rotating before the eccentric rotary plate 102 forcibly rotates the friction wheel 105, I can't feel the gap in my hand.
【００５０】さらに本実施例によれば、従来の鋼球を使
用した場合と比較して偏平な遊星摩擦車１０１ａ〜１０
１ｃを使用できるので、装置のコンパクト化が達成され
る。また、遊星摩擦車１０１ａ〜１０１ｃと微動軸９１
の円錐面１１１及び軸受７３の摩擦面１１０との接触面
と、遊星摩擦車１０３と粗動軸７５との接触面と、が夫
々異なるため、遊星摩擦車１０１ａ〜１０１ｃと摩擦車
支持軸１０３，１０７ｂ，１０７ｃとの接触部分を潤滑
させることで、遊星摩擦車１０１ａ〜１０１ｃの摩擦損
失を更に減少させることができる。Further, according to the present embodiment, the planetary friction wheels 101a to 101a are flatter than those in the case where the conventional steel balls are used.
Since 1c can be used, the device can be made compact. Further, the planetary friction wheels 101a to 101c and the fine movement shaft 91
Since the contact surface between the conical surface 111 and the friction surface 110 of the bearing 73 and the contact surface between the planetary friction wheel 103 and the coarse movement shaft 75 are different from each other, the planetary friction wheels 101a to 101c and the friction wheel support shaft 103, By lubricating the contact portions with 107b and 107c, the friction loss of planetary friction wheels 101a to 101c can be further reduced.
【００５１】この結果、遊星摩擦車１０１ａ〜１０１ｃ
への押圧力をそれほど大きくしなくても高精度且つ円滑
な遊星運動が得られる。また、偏心回転板１０２，１０
８ｂ，１０８ｃを設けるという簡単な構成で遊星摩擦車
１０１ａ〜１０１ｃを確実に押圧接触させることができ
るので、製造コストも安価になる。As a result, the planetary friction wheels 101a to 101c
High precision and smooth planetary motion can be obtained without increasing the pressing force to the slab. In addition, the eccentric rotary plates 102 and 10
Since the planetary friction wheels 101a to 101c can be reliably brought into pressure contact with a simple configuration in which the 8b and 108c are provided, the manufacturing cost is also reduced.
【００５２】なお、回転耐性を向上させるための対策と
して、構成部品の硬度を次のような関係に設定してい
る。フランジ部１１２の円錐面１１１と円錐リング１１
３の硬度を最も高く設定し、以下、摩擦輪１０５、軸受
７３の順に硬度を低くする。摩擦輪１０５を押圧するコ
ロ１０４の硬度は、押圧力に応じて摩擦輪１０５よりも
高くしたり、あるいは低くしたりする。回転回数実験に
よれば、コロの硬度は摩擦輪の硬度に対して約１０％程
度低い硬度にしても何等問題はなかった。As a countermeasure for improving the rotation resistance, the hardness of the components is set in the following relationship. Conical surface 111 of flange 112 and conical ring 11
3 is set to the highest hardness, and thereafter, the hardness is reduced in the order of the friction wheel 105 and the bearing 73. The hardness of the roller 104 pressing the friction wheel 105 is made higher or lower than that of the friction wheel 105 according to the pressing force. According to the number of rotations experiment, there was no problem even if the hardness of the roller was about 10% lower than the hardness of the friction wheel.
【００５３】また粗微動回転時のゴリ，ザラを感じさせ
ない対策として、回転時に互いに押圧接触している各部
品の接触面を、０．４μｍ以下の粗さに仕上げることが
望ましい。Further, as a countermeasure for preventing a rough or coarse motion during the coarse and fine rotation, it is desirable to finish the contact surfaces of the parts which are in pressure contact with each other during the rotation with a roughness of 0.4 μm or less.
【００５４】さらに軸受７３の摩擦面１１０と摩擦輪１
０５との間のスリップを防止するためには、摩擦輪１０
５を円錐面１１１と円錐リング１１３とで強く挟んでも
良いが、例えば図４に示すように摩擦輪１０５の外周面
に凹部１１６を形成して、摩擦輪１０５と軸受け７３の
摩擦面１１０との接触面積を少なくし接触面の単位面積
当たりの押圧力を上げても良い。Further, the friction surface 110 of the bearing 73 and the friction wheel 1
In order to prevent slippage between the friction wheels 10 and
5 may be strongly sandwiched between the conical surface 111 and the conical ring 113. For example, a concave portion 116 is formed on the outer peripheral surface of the friction ring 105 as shown in FIG. The contact area may be reduced and the pressing force per unit area of the contact surface may be increased.
【００５５】[0055]
【考案の効果】以上詳記したように本考案によれば、簡
単且つコンパクトな構成であると共に、軽い押圧力で遊
星摩擦車を微動軸及び軸受の夫々の摩擦面に確実に接触
させることができ、さらに部品の精度誤差を吸収するこ
とが可能で回転ムラ，ゴリ，ザラを無くし耐久性を向上
し得る一軸式粗微動装置を提供できる。As described above in detail, according to the present invention, the planetary friction wheel can be brought into contact with the respective friction surfaces of the fine movement shaft and the bearing with a small pressing force while having a simple and compact structure. It is possible to provide a single-axis coarse / fine movement device capable of absorbing accuracy errors of parts, eliminating rotation unevenness, rubbing, and roughness, and improving durability.
【図１】本考案の一実施例に係る一軸式粗微動装置の全
体構成を示す断面図。FIG. 1 is a cross-sectional view showing an entire configuration of a single-axis coarse / fine movement device according to an embodiment of the present invention.
【図２】図１のＡ−Ａ線に沿う断面図。FIG. 2 is a sectional view taken along the line AA of FIG. 1;
【図３】弾性体及びコロを備えた遊星摩擦車に関連する
部分の断面図。FIG. 3 is a cross-sectional view of a portion related to a planetary friction wheel including an elastic body and rollers.
【図４】摩擦輪の変形例を示す図。FIG. 4 is a view showing a modification of the friction wheel.
【図５】従来の粗微動焦準装置の全体の構成を概略的に
示す断面図。FIG. 5 is a cross-sectional view schematically showing the entire configuration of a conventional coarse / fine focusing device.
【図６】図５のＢ−Ｂ線に沿う断面図。FIG. 6 is a sectional view taken along the line BB of FIG. 5;
【図７】従来の他の粗微動焦準装置のうち、その特徴部
分の構成を示す断面図。FIG. 7 is a cross-sectional view showing a configuration of a characteristic portion of another conventional coarse / fine focusing device.
【図８】図７のＣ−Ｃ線に沿う断面図。FIG. 8 is a sectional view taken along line CC of FIG. 7;
７３…軸受、７５…粗動軸、９１…微動軸、１００…粗
動軸のフランジ部、１０１ａ〜１０１ｃ…遊星摩擦車、
１０２，１０８ｂ，１０８ｃ…偏心回転板、１０３，１
０７ｂ，１０７ｃ…摩擦車支持軸、１０４ａ〜１０４ｃ
…コロ、１０５…回転輪、１０６ａ〜１０６ｃ…弾性
体、１１０…摩擦面、１１２…微動軸のフランジ部、１
１３…円錐リング。73: bearing, 75: coarse moving shaft, 91: fine moving shaft, 100: flange portion of the coarse moving shaft, 101a to 101c: planetary friction wheel,
102, 108b, 108c: eccentric rotary plate, 103, 1
07b, 107c: friction wheel support shaft, 104a to 104c
... Rollers, 105, rotating wheels, 106a to 106c, elastic bodies, 110, friction surfaces, 112, flange portions of fine movement shafts, 1
13 ... Conical ring.
Claims (1)
有し、前記粗動軸に直接加えられる回転によって移動体
を粗動させ、前記微動軸に加えられる回転を減速させて
前記粗動軸へ伝達して当該粗動軸を回転させることによ
り前記移動体を微動させる一軸式粗微動装置において、 前記粗動軸の外周に設けられた摩擦車保持部と、前記摩
擦車保持部の前記粗動軸を中心とする同一円周上の各位
置に各々の偏心軸を回転自在に軸支され、装置本体の摩
擦面に各々の外周面を接触させた複数の遊星摩擦車と、
前記各遊星摩擦車と前記微動軸との間に介在され、前記
各遊星摩擦車に前記微動軸の回転を伝えると共に前記摩
擦面側へ押圧する押圧手段とを備え、 少なくとも一つの前記遊星摩擦車は、前記偏心軸を中心
に回転する偏心回転板と、この偏心回転板の外周面に転
がり部材を介して回転自在に保持され、前記摩擦面及び
前記押圧手段に接触する摩擦輪と、前記偏心回転板の中
心部より外周面に向けて前記転がり部材を押圧する弾性
体とからなることを特徴とする一軸式粗微動装置。1. A coarse moving shaft and a fine moving shaft arranged concentrically, a moving body is coarsely moved by rotation directly applied to the coarse moving shaft, and the rotation applied to the fine moving shaft is decelerated. A single-shaft coarse / fine movement device for finely moving the moving body by transmitting to the coarse movement shaft and rotating the coarse movement shaft, wherein a friction wheel holding portion provided on an outer periphery of the coarse movement shaft; A plurality of planetary friction wheels in which each eccentric shaft is rotatably supported at each position on the same circumference around the coarse movement axis of the portion, and each outer peripheral surface is brought into contact with a friction surface of the apparatus main body; ,
Pressing means interposed between each of the planetary friction wheels and the fine movement shaft, for transmitting rotation of the fine movement shaft to each of the planetary friction wheels and pressing against the friction surface side, at least one of the planetary friction wheels An eccentric rotary plate rotating about the eccentric shaft, a friction wheel rotatably held on an outer peripheral surface of the eccentric rotary plate via a rolling member, and contacting the friction surface and the pressing means; A single-axis coarse / fine movement device, comprising: an elastic body that presses the rolling member from the center of the rotating plate toward the outer peripheral surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3960292U JP2567473Y2 (en) | 1992-06-10 | 1992-06-10 | Single axis coarse / fine movement device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3960292U JP2567473Y2 (en) | 1992-06-10 | 1992-06-10 | Single axis coarse / fine movement device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH062313U JPH062313U (en) | 1994-01-14 |
| JP2567473Y2 true JP2567473Y2 (en) | 1998-04-02 |
Family
ID=12557667
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3960292U Expired - Lifetime JP2567473Y2 (en) | 1992-06-10 | 1992-06-10 | Single axis coarse / fine movement device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2567473Y2 (en) |
-
1992
- 1992-06-10 JP JP3960292U patent/JP2567473Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH062313U (en) | 1994-01-14 |
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