JP2564432Y2 - Adjustment jig for substrate transfer - Google Patents
Adjustment jig for substrate transferInfo
- Publication number
- JP2564432Y2 JP2564432Y2 JP3460693U JP3460693U JP2564432Y2 JP 2564432 Y2 JP2564432 Y2 JP 2564432Y2 JP 3460693 U JP3460693 U JP 3460693U JP 3460693 U JP3460693 U JP 3460693U JP 2564432 Y2 JP2564432 Y2 JP 2564432Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrate holding
- positioning member
- holding
- transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【０００１】[0001]
【産業上の利用分野】本考案は、調整治具、特に、基板
を保持する基板搬送装置と基板保持装置との間の基板保
持溝の相対位置を調整するための基板移載用調整治具に
関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an adjusting jig, and more particularly, to a substrate holding device between a substrate transfer device and a substrate holding device.
The present invention relates to a substrate transfer adjusting jig for adjusting a relative position of a holding groove .
【０００２】[0002]
【従来の技術】半導体基板や液晶用ガラス基板等の薄板
状の被処理基板（以下、単に基板と記す）を表面処理す
る場合には、基板を処理槽内に浸漬して処理する浸漬型
の基板処理装置が一般に用いられる。この種の基板処理
装置は、基板の表面処理を行うための基板処理槽を有す
る基板処理部と、濡れた基板を乾燥させるための基板乾
燥部と、キャリアに収納された基板を取り出すととも
に、処理が終了した基板をキャリア内に収納するための
基板移載部と、基板移載部、基板処理部及び基板乾燥部
との間で基板を搬送する基板搬送ロボットとを備えてい
る。2. Description of the Related Art When performing surface treatment on a thin substrate (hereinafter simply referred to as a substrate) such as a semiconductor substrate or a glass substrate for a liquid crystal, an immersion type in which the substrate is immersed in a processing bath to perform the treatment. A substrate processing apparatus is generally used. This type of substrate processing apparatus includes a substrate processing section having a substrate processing tank for performing a surface treatment of a substrate, a substrate drying section for drying a wet substrate, and taking out a substrate stored in a carrier and performing processing. And a substrate transfer robot for transferring the substrate between the substrate transfer unit, the substrate processing unit, and the substrate drying unit.
【０００３】基板搬送ロボットは、１対の開閉する基板
挟持アームを備えており、各処理部は、基板挟持アーム
との間で基板を授受するための基板保持具を備えてい
る。これらのアーム及び保持具には基板を保持するため
の保持溝が形成されており、通常、基板挟持アームは基
板の両側を保持溝により挟持し、基板保持具は基板の下
部を保持溝により保持している。[0003] The substrate transfer robot has a pair of substrate holding arms that can be opened and closed, and each processing unit has a substrate holder for transferring a substrate to and from the substrate holding arm. A holding groove for holding the substrate is formed in these arms and holding members. Usually, the substrate holding arm holds both sides of the substrate with holding grooves, and the substrate holding member holds the lower portion of the substrate with holding grooves. doing.
【０００４】この種の基板処理装置においては、基板挟
持アームと基板保持具との間の相対位置の調整（取り合
い調整）を以下のようにして行っている。まず、ダミー
の基板を基板保持具に２〜４枚程度保持させる。そし
て、この基板保持具に対向する位置に基板挟持アームを
移動させ、アームを開いた状態で移載位置まで下降させ
る。この状態で基板挟持アームに形成された保持溝とダ
ミーの基板との前後方向（基板の並設方向）のずれを目
視により確認し、基板保持具に保持されたダミーの基板
に対して保持溝が対向するように基板保持アームの前後
方向の位置を調整してずれを解消する。続いて、基板保
持アームの開閉の繰り返しと、基板保持アームを閉じた
状態での基板の上下移動とを行い、基板に対する引っ掛
かりや基板に対して負荷が作用しているか否かを確認す
る。最後に、基板保持アームで基板を掴み、上下移動さ
せて基板の回転を抑えながら基板保持アームの中心と基
板保持具の中心とを合わせる。In this type of substrate processing apparatus, the relative position between the substrate holding arm and the substrate holder (adjustment adjustment) is adjusted as follows. First, about two to four dummy substrates are held by the substrate holder. Then, the substrate holding arm is moved to a position facing the substrate holder, and is lowered to the transfer position with the arm opened. In this state, the deviation between the holding groove formed on the substrate holding arm and the dummy substrate in the front-rear direction (the direction in which the substrates are arranged) is visually checked, and the holding groove is held against the dummy substrate held by the substrate holder. The position of the substrate holding arm in the front-rear direction is adjusted so as to face each other to eliminate the displacement. Subsequently, the opening and closing of the substrate holding arm is repeated, and the substrate is moved up and down with the substrate holding arm closed, to check whether the substrate is caught or a load is acting on the substrate. Lastly, the substrate is grasped by the substrate holding arm, and is moved up and down so that the center of the substrate holding arm is aligned with the center of the substrate holder while suppressing the rotation of the substrate.
【０００５】[0005]
【考案が解決しようとする課題】前記従来の調整方法で
は、作業者の経験や感覚に頼るところが多く、作業者の
技量差等により取り合い誤差が発生する。また、基板挟
持アームの中心と基板保持具の中心とが正確に合致して
いるか否かを確認できない。これに加え、取り合いの調
整に際して、目視による確認作業に頼っているので、調
整値を数値的に表すことができない。このため、基板挟
持アームと基板保持具との間の取り合い調整に長時間を
要する。In the above-mentioned conventional adjusting method, there are many places that rely on the experience and feeling of the operator, and an error occurs due to a difference in the skill of the operator. In addition, it cannot be confirmed whether or not the center of the substrate holding arm and the center of the substrate holder exactly match. In addition, the adjustment value cannot be represented numerically because the adjustment is based on the visual confirmation work. Therefore, it takes a long time to adjust the connection between the substrate holding arm and the substrate holder.
【０００６】本考案の目的は、２つの保持装置間の相対
位置の調整を短時間に行えるようにすることにある。An object of the present invention is to make it possible to adjust the relative position between two holding devices in a short time.
【０００７】[0007]
【課題を解決するための手段】本考案に係る基板移載用
調整治具は、所定の間隔で形成された複数の基板保持溝
により基板を保持して搬送する基板搬送装置と、前記所
定間隔と同間隔で形成された複数の基板保持溝を有し基
板搬送装置により搬送されてきた複数の基板を保持溝で
受ける基板保持装置との間の基板保持溝の相対位置を調
整するための基板移載用調整治具である。この治具は、
第１位置決め部材と第２位置決め部材と表示部とを備え
ている。According to the present invention, there is provided a substrate transfer adjusting jig comprising a plurality of substrate holding grooves formed at predetermined intervals.
A substrate transport device for holding and transporting the substrate by the
A base with a plurality of substrate holding grooves formed at the same interval as the regular interval
Multiple substrates transported by the plate transport device are held by holding grooves
This is a substrate transfer adjusting jig for adjusting a relative position of a substrate holding groove between the substrate holding device and a receiving substrate holding device . This jig
The display device includes a first positioning member, a second positioning member, and a display unit.
【０００８】第１位置決め部材は、基板搬送装置の少な
くとも一部の基板保持溝に差し込み可能なダミー部を有
し、基板搬送装置に保持され得る。第２位置決め部材
は、基板保持装置の少なくとも一部の基板保持溝に差し
込み可能なダミー部を有し、基板保持装置に保持され得
る。表示部は、第１位置決め部材と第２位置決め部材と
に設けられ、基板搬送装置から基板保持装置へ基板を移
載する状態における両位置決め部材の相対位置関係を表
示可能である。[0008] The first positioning member is a small part of the substrate transfer device.
At least a dummy part that can be inserted into some board holding grooves
Then, it can be held by the substrate transfer device. Second positioning member
Is inserted into at least a part of the substrate holding groove of the substrate holding device.
That can be held by the substrate holding device.
You. The display unit is provided on the first positioning member and the second positioning member, and transfers the substrate from the substrate transfer device to the substrate holding device.
The relative positional relationship between the two positioning members in the mounted state can be displayed.
【０００９】[0009]
【作用】本考案に係る基板移載用調整治具では、基板搬
送装置に第１位置決め部材を保持させる。また、基板保
持装置に第２位置決め部材を保持させる。このとき、そ
れぞれの位置決め部材は、基板の保持姿勢に対応して保
持される。この状態で基板搬送装置と基板保持装置とを
それぞれの移載位置に配置させる。そして、表示部によ
り両位置決め部材の相対位置関係を確認し、これにより
基板搬送装置と基板保持装置の基板保持溝の相対位置関
係を確認する。With the substrate transfer adjusting jig according to the present invention, the substrate
The feeding device holds the first positioning member. In addition, the substrate holding
The holding device holds the second positioning member . At this time, each of the positioning members are coercive <br/> lifting corresponding to the holding position of the substrate. In this state, the substrate transfer device and the substrate holding device are arranged at the respective transfer positions. Then, the display unit confirms the relative positional relationship between the two positioning members , and thereby,
The relative position of the substrate holding groove of the substrate transfer device and the substrate holding device
Check the staff .
【００１０】ここでは、移載位置において基板搬送装置
の基板保持溝と基板保持装置の基板保持溝との相対位置
関係が表示部に表示されることになるので、基板搬送装
置と基板保持装置とを移載位置に移動させるだけで簡単
に相対位置関係を確認できる。このため、この相対位置
関係を参考にして両装置の移載の際の相対位置を容易に
調整でき、取り合い調整を短時間で行える。In this case, the substrate transfer device is located at the transfer position.
Since the relative positional relationship between the substrate holding groove and the substrate holding grooves of the substrate holding apparatus is to be displayed on the display unit, the substrate conveying instrumentation
The relative positional relationship can be easily confirmed simply by moving the mounting position and the substrate holding device to the transfer position. For this reason, the relative position at the time of transfer of both apparatuses can be easily adjusted with reference to this relative positional relationship, and the adjustment can be performed in a short time.
【００１１】[0011]
【実施例】図１において、本考案の一実施例による調整
治具１は、基板搬送ロボットの基板挟持アームでの基板
の保持姿勢に対応して基板挟持アームに配置保持され得
る第１位置決め部材２と、洗浄槽内や基板乾燥部で用い
られる基板保持具での基板の保持姿勢に対応して基板保
持具に配置保持され得る第２位置決め部材３とを有して
いる。これらの位置決め部材２，３の合計重量は最大枚
数移載時の基板の重量に合致させている。In FIG. 1, an adjusting jig 1 according to an embodiment of the present invention is a first positioning member which can be arranged and held on a substrate holding arm corresponding to a holding posture of a substrate by a substrate holding arm of a substrate transfer robot. 2 and a second positioning member 3 that can be arranged and held by the substrate holder in accordance with the holding posture of the substrate by the substrate holder used in the cleaning tank or the substrate drying unit. The total weight of these positioning members 2 and 3 is matched with the weight of the substrate when transferring the maximum number of substrates.
【００１２】第１位置決め部材２は、ポリ塩化ビニル樹
脂製であり、円柱の両側の一部を平行に切り取った形状
であり、上下に平行な面を有している。第１位置決め部
材２の両側面には、外方に張り出した４対のダミー部４
が間隔を隔てて配置されている。このダミー部４の外形
は基板保持アームで保持され得る基板の保持部分と同形
状である。また、第１位置決め部材２の軸方向の両端部
には、外方と上方とに開口する切欠き部５が形成されて
いる。切欠き部５の底部中央には、表示部を構成する十
字マーク７が形成された透明ガラス板６が設けられてい
る。この両端の切欠き部５に隣接して、両側方にダミー
部４と平行に張り出した角棒状の支持部材８が配置され
ている。支持部材８は、基板挟持アームの保持溝が形成
されたつなぎ部材に第１位置決め部材２を支持させかつ
位置決めするためのものである。さらに第１位置決め部
材２の上面には、軸方向及びそれと直交する方向の水平
度を確認するための水準器９，１０が配置されている。The first positioning member 2 is made of polyvinyl chloride resin, has a shape in which a part of both sides of a cylinder is cut out in parallel, and has a plane parallel to the top and bottom. Four pairs of dummy portions 4 projecting outward are provided on both side surfaces of the first positioning member 2.
Are arranged at intervals. The outer shape of the dummy portion 4 has the same shape as the holding portion of the substrate that can be held by the substrate holding arm. At both ends in the axial direction of the first positioning member 2, cutouts 5 that open outward and upward are formed. At the center of the bottom of the notch 5, a transparent glass plate 6 on which a cross mark 7 constituting a display unit is formed is provided. Adjacent to the notches 5 at both ends, support members 8 in the form of square bars projecting in parallel with the dummy portion 4 are arranged on both sides. The support member 8 is for supporting and positioning the first positioning member 2 on the connecting member having the holding groove of the substrate holding arm formed therein. Further, on the upper surface of the first positioning member 2, levelers 9, 10 for checking the horizontality in the axial direction and the direction orthogonal thereto are arranged.
【００１３】第２位置決め部材３は、ポリ塩化ビニル樹
脂製であり、第１位置決め部材２とともに円柱の一部を
形成する形状である。また、上下には平行な面が形成さ
れており、上面は第１位置決め部材２の下面に密着可能
であり、これらの面は同面積である。第２位置決め部材
３には、第１位置決め部材２のダミー部４と重ね合わせ
ることにより基板の略半分の大きさになる形状のダミー
部１１がダミー部４と同間隔で設けられている。また、
第２位置決め部材３の軸方向の両端部の十字マーク７に
対向する位置には、軸方向とそれと交差する方向のイン
ジケータ（表示部）１３が形成されている。インジケー
タ１３には、例えば両方向に１ｍｍ単位で２０ｍｍの目
盛りが刻まれている。また、インジケータ１３より内側
には、基板保持具の保持溝が形成されたつなぎ部材に第
２位置決め部材３を支持させかつ位置決めするための角
棒状の支持部材１２が配置されている。さらに第２位置
決め部材３の上面には、２方向の水平度を確認するため
の水準器１４，１５が配置されている。The second positioning member 3 is made of polyvinyl chloride resin and has a shape that forms a part of a cylinder together with the first positioning member 2. Also, parallel surfaces are formed on the upper and lower sides, and the upper surface can be in close contact with the lower surface of the first positioning member 2, and these surfaces have the same area. The second positioning member 3 is provided with a dummy portion 11 having a shape that is substantially half the size of the substrate by being overlapped with the dummy portion 4 of the first positioning member 2 at the same interval as the dummy portion 4. Also,
Indicators (display units) 13 in the axial direction and in a direction intersecting with the axial direction are formed at positions opposite to the cross mark 7 at both axial ends of the second positioning member 3. The indicator 13 has, for example, a scale of 20 mm in units of 1 mm in both directions. Further, inside the indicator 13, a square rod-shaped support member 12 for supporting and positioning the second positioning member 3 on the connecting member formed with the holding groove of the substrate holder is arranged. Further, on the upper surface of the second positioning member 3, levelers 14, 15 for confirming horizontality in two directions are arranged.
【００１４】図２に、この調整治具１により調整される
浸漬型基板洗浄装置２１を示す。基板洗浄装置２１は、
多数の基板を収容したキャリアＣの搬入・搬出部２２
と、キャリアＣからの基板を取り出しまたはキャリアＣ
への基板の装填を行う基板移載部２３と、キャリアＣを
洗浄するためのキャリア洗浄器３ａと、搬入・搬出部と
基板移載部３とキャリア洗浄器３ａとの間でキャリアＣ
を移載するキャリア移載ロボット２４と、複数の基板を
一括して洗浄する洗浄処理部２５と、基板の液切り及び
乾燥を行うための基板乾燥部２６と、基板移載部２３で
キャリアＣから取り出した複数の基板を一括保持して洗
浄処理部２５及び基板乾燥部２６に搬送する基板搬送ロ
ボット２７とから構成されている。FIG. 2 shows an immersion type substrate cleaning apparatus 21 adjusted by the adjustment jig 1. The substrate cleaning device 21 includes:
Carry-in / carry-out section 22 for carrier C containing a large number of substrates
And taking out the substrate from carrier C or carrier C
Transfer section 23 for loading a substrate onto the carrier, a carrier cleaning device 3a for cleaning the carrier C, and a carrier C between the loading / unloading section, the substrate transfer section 3 and the carrier cleaning device 3a.
Transfer robot 24 for transferring a plurality of substrates, a cleaning processing unit 25 for simultaneously cleaning a plurality of substrates, a substrate drying unit 26 for performing liquid removal and drying of the substrates, and a carrier C for the substrate transfer unit 23. And a substrate transfer robot 27 that collectively holds a plurality of substrates taken out from the substrate and transports them to the cleaning processing unit 25 and the substrate drying unit 26.
【００１５】基板移載部２３は、キャリアＣを載置する
回転可能な２つのテーブル２８を有している。テーブル
２８は、キャリアＣを必要に応じて９０°回転させる。
テーブル２８の中心には、矩形の開口部が形成されてお
り、この開口の下方には、キャリアＣから基板Ｗを一括
して取り出すとともに、キャリアＣに基板を一括して装
填するための昇降可能な基板保持具（図示せず）が配置
されている。The substrate transfer section 23 has two rotatable tables 28 on which the carrier C is mounted. The table 28 rotates the carrier C by 90 ° as needed.
At the center of the table 28, a rectangular opening is formed. Below the opening, the substrate W can be taken out from the carrier C at one time, and can be moved up and down to load the substrate on the carrier C at one time. Substrate holder (not shown) is disposed.
【００１６】キャリア移載ロボット２４は、昇降及び回
転自在でありかつ図２の矢印Ａ方向に移動可能に構成さ
れている。キャリア移載ロボット２４は、搬入・搬出部
２２に搬入されたキャリアＣをテーブル２８上に移載
し、基板洗浄中においてキャリア洗浄器２３ａとテーブ
ル２８との間でキャリアＣを出し入れし、また洗浄済み
の基板を収容したキャリアをテーブル２８から搬入・搬
出部２２へ移載する。The carrier transfer robot 24 is configured to be movable up and down, rotatable, and movable in the direction of arrow A in FIG. The carrier transfer robot 24 transfers the carrier C carried into the carry-in / carry-out section 22 onto the table 28, moves the carrier C between the carrier cleaner 23a and the table 28 during substrate cleaning, and cleans the substrate C. The carrier accommodating the completed substrates is transferred from the table 28 to the loading / unloading section 22.
【００１７】基板搬送ロボット２７は、移動部３０内を
矢印Ｂ方向に移動可能であり、基板移載部２３の基板保
持具から受け取った複数の基板を挟持する基板挟持アー
ム（基板搬送装置）２９を有している。このロボット２
７は、基板挟持アーム２９が挟持した複数の基板を移動
部３０に沿って洗浄処理部２５及び基板乾燥部２６へ順
次搬送する。洗浄処理部２５は、オーバーフロー型のも
のであり、３つの洗浄槽３２と、洗浄槽３２に昇降自在
に設けられた基板保持具（基板保持装置）３１とを有し
ている。また、基板乾燥部２６には、基板を保持するた
めの基板保持具（図示せず）が設けられている。The substrate transfer robot 27 is movable in the direction of the arrow B in the moving section 30 and holds a plurality of substrates received from the substrate holder of the substrate transfer section 23 (a substrate transfer arm ). have. This robot 2
7 sequentially transports the plurality of substrates held by the substrate holding arm 29 to the cleaning processing unit 25 and the substrate drying unit 26 along the moving unit 30. The cleaning section 25 is of an overflow type, and includes three cleaning tanks 32 and a substrate holder (substrate holding device) 31 provided in the cleaning tank 32 so as to be able to move up and down. Further, the substrate drying unit 26 is provided with a substrate holder (not shown) for holding the substrate.
【００１８】基板挟持アーム２９は基板を両側から挟持
するものであり、図３に示すように、前後１対の側板３
３，３３と、側板３３の下端をつなぐ上下１対の下つな
ぎ部材３４ａ，３４ｂと、上端をつなぐ上つなぎ部材３
５ａ，３５ｂとを有している。側板３３及び両つなぎ部
材３４，３５は、それぞれ石英ガラス製である。下つな
ぎ部材３４ａ，３４ｂの内側の周面の一部には、軸方向
に並設された多数の基板保持溝３６が形成されている。
上つなぎ部材３５ａ，３５ｂには、２つのブラケット３
７が摺動可能に固定されている。ブラケット３７は、前
後方向に間隔を隔てて配置されており、開閉軸３８に固
定されている。この１対の開閉軸３８は、基板搬送ロボ
ット２７の本体３９に開閉可能に支持されている。The substrate holding arms 29 are for holding the substrate from both sides, and as shown in FIG.
, 33, a pair of lower connecting members 34a, 34b connecting the lower ends of the side plates 33, and an upper connecting member 3 connecting the upper ends.
5a and 35b. The side plate 33 and the connecting members 34 and 35 are each made of quartz glass. A large number of substrate holding grooves 36 are formed in a part of the inner peripheral surface of the lower connecting members 34a and 34b.
Two brackets 3 are provided on the upper connecting members 35a and 35b.
7 is slidably fixed. The brackets 37 are arranged at an interval in the front-rear direction, and are fixed to the opening / closing shaft 38. The pair of open / close shafts 38 is supported by a main body 39 of the substrate transfer robot 27 so as to be openable / closable.
【００１９】基板保持具３１は、基板を下側から保持す
るものであり、前後１対の保持板４０と、保持板４０の
下部をつなぐ３本のつなぎ部材４１とを有している。保
持板４０及びつなぎ部材４１は、それぞれ石英ガラス製
である。保持板４０は略倒立Ｔ字状であり、その上端に
は外方に突出する支持軸４２が固定されている。支持軸
４２は、軸受４３に支持されており、軸受４３は図示し
ない昇降機構に支持されている。つなぎ部材４１には、
軸方向に並設された多数の基板保持溝４５が基板保持溝
３６と同間隔で形成されている。The substrate holder 31 holds the substrate from below, and has a pair of front and rear holding plates 40 and three connecting members 41 connecting the lower portions of the holding plates 40. The holding plate 40 and the connecting member 41 are each made of quartz glass. The holding plate 40 has a substantially inverted T-shape, and a support shaft 42 protruding outward is fixed to an upper end thereof. The support shaft 42 is supported by a bearing 43, and the bearing 43 is supported by a lifting mechanism (not shown). In the connecting member 41,
A number of substrate holding grooves 45 arranged in the axial direction are formed at the same intervals as the substrate holding grooves 36.
【００２０】次に、調整治具１による基板挟持アーム２
９と基板保持具３１との相対位置の調整手順について説
明する。まず、図４に示すように、第１位置決め部材２
を基板挟持アーム２９に保持させる。ここでは、ダミー
部４をアーム２９の保持溝３６に差し込み、かつ基板挟
持アーム２９の上側の下つなぎ部材３４ａに第１位置決
め部材２の支持部材８を載置する。また、第２位置決め
部材３のダミー部１１を基板保持具３１の保持溝４５に
差し込み、かつつなぎ部材４１に第２位置決め部材３の
支持部材１２を載置する。このように、第１及び第２位
置決め部材２，３の支持部材８，１２をそれぞれつなぎ
部材３４ａ，４１に載置することにより、各位置決め部
材２，３の特に回転方向の位置決めを行うことができ、
アーム２９及び保持具３１に対する各位置決め部材２，
３の面の傾きを防止できる。Next, the substrate holding arm 2 by the adjusting jig 1
The procedure for adjusting the relative position between the substrate 9 and the substrate holder 31 will be described. First, as shown in FIG.
Is held by the substrate holding arm 29. Here, the dummy portion 4 is inserted into the holding groove 36 of the arm 29, and the support member 8 of the first positioning member 2 is placed on the lower connecting member 34 a above the substrate holding arm 29. Further, the dummy portion 11 of the second positioning member 3 is inserted into the holding groove 45 of the substrate holder 31, and the support member 12 of the second positioning member 3 is placed on the hook-and-loop member 41. In this manner, by placing the support members 8 and 12 of the first and second positioning members 2 and 3 on the connecting members 34a and 41, respectively, the positioning of the positioning members 2 and 3 particularly in the rotation direction can be performed. Can,
Each positioning member 2 for the arm 29 and the holder 31
The inclination of the surface 3 can be prevented.
【００２１】続いて水準器９，１０及び１４，１５によ
り水平度を確認する。そして水平度がずれている場合に
は、基板挟持アーム２９や基板保持具３１の取り付け部
分を調整して各位置決め部材２，３が水平になるように
する。これにより、基板挟持アーム２９及び基板保持具
３１の水平度の調整を行える。水平度の調整が終了する
と、基板挟持アーム２９と基板保持具３１とを移載位置
に昇降させ、図５に示すように、第１位置決め部材２と
第２位置決め部材３とを接触させる。この接触時におい
て、十字マーク７がインジケータ１３の中心に位置して
いない場合には、図６に示すように、十字マーク７がイ
ンジケータ１３の中心位置になるように基板挟持アーム
２９の前後及び左右方向の位置調整を取り付け部分で行
う。例えば前後方向の位置調整をブラケット３７の取り
付け位置の変更により、左右方向の位置調整をロボット
本体３９の取り付け位置の変更により行う。Subsequently, the levelness is confirmed by the spirit levels 9, 10 and 14, 15. If the horizontality is deviated, the mounting portions of the substrate holding arm 29 and the substrate holder 31 are adjusted so that the positioning members 2 and 3 are horizontal. Thereby, the horizontality of the substrate holding arm 29 and the substrate holder 31 can be adjusted. When the adjustment of the horizontality is completed, the substrate holding arm 29 and the substrate holder 31 are moved up and down to the transfer position, and the first positioning member 2 and the second positioning member 3 are brought into contact as shown in FIG. At this time, when the cross mark 7 is not located at the center of the indicator 13, as shown in FIG. Adjust the position in the direction at the mounting part. For example, the position adjustment in the front-back direction is performed by changing the mounting position of the bracket 37, and the position adjustment in the left-right direction is performed by changing the mounting position of the robot body 39.
【００２２】このように、十字マーク７とインジケータ
１３とにより基板挟持アーム２９と基板保持具３１との
水平面内のずれを数値的に簡単に確認できる。このた
め、このずれの数値分だけ基板挟持アーム２９の取り付
け位置を調整するだけよく、短時間で相対位置の調整が
行える。この調整を、各洗浄槽１２と基板乾燥部６とテ
ーブル８とで行い、基板挟持アーム２９と各部の基板保
持具との取り合いを調整する。続いて、ダミーのウエハ
を用いて、１枚から最大枚数まで段階的に基板の枚数を
変化させてランニング確認を行い、調整を終了する。As described above, the displacement between the substrate holding arm 29 and the substrate holder 31 in the horizontal plane can be easily confirmed numerically by the cross mark 7 and the indicator 13. Therefore, it is only necessary to adjust the mounting position of the substrate holding arm 29 by the value of the deviation, and the relative position can be adjusted in a short time. This adjustment is performed in each of the cleaning tanks 12, the substrate drying unit 6, and the table 8, and the engagement between the substrate holding arm 29 and the substrate holder of each unit is adjusted. Subsequently, using a dummy wafer, the number of substrates is changed stepwise from one to the maximum number, the running is confirmed, and the adjustment is completed.
【００２３】〔他の実施例〕 （ａ） 位置決め部材の合計重量を最大枚数搬送時の重
量に合わせる代わりに、位置決め部材を１〜数枚単位の
重量に変更できるようにすることにより、基板挟持アー
ムの撓み変化による基板保持具との取り合いの変化を確
認できる。 （ｂ） 本考案は、浸漬型の基板処理装置に限定される
ものではなく、その他、スピンドライヤーやＩＰＡベー
パー等の基板の処理時において基板の移載が必要な装置
にも適用できる。[Other Embodiments] (a) Instead of adjusting the total weight of the positioning members to the weight at the time of transporting the maximum number of sheets, the positioning members can be changed to the weight of one to several sheets, thereby holding the substrate. A change in engagement with the substrate holder due to a change in the bending of the arm can be confirmed. (B) The present invention is not limited to an immersion type substrate processing apparatus, but can also be applied to an apparatus such as a spin drier or an IPA vapor which requires transfer of a substrate during processing of the substrate.
【００２４】[0024]
【考案の効果】本考案に係る調整治具では、第１位置決
め部材と第２位置決め部材との相対位置関係が表示部に
より表示されるので、相対位置のずれを簡単に調整でき
る。このため調整時間が短縮する。In the adjusting jig according to the present invention, the relative positional relationship between the first positioning member and the second positioning member is displayed on the display unit, so that the relative positional deviation can be easily adjusted. Thus, the adjustment time is reduced.
【図１】本考案の一実施例による調整治具の斜視図。FIG. 1 is a perspective view of an adjustment jig according to an embodiment of the present invention.
【図２】調整治具が適用される基板処理装置の斜視概略
図。FIG. 2 is a schematic perspective view of a substrate processing apparatus to which an adjustment jig is applied.
【図３】基板挟持アーム及び基板保持具の斜視図。FIG. 3 is a perspective view of a substrate holding arm and a substrate holder.
【図４】調整手順を示す説明図。FIG. 4 is an explanatory diagram showing an adjustment procedure.
【図５】調整手順を示す説明図。FIG. 5 is an explanatory diagram showing an adjustment procedure.
【図６】インジケータ及び十字マークの平面拡大図。FIG. 6 is an enlarged plan view of an indicator and a cross mark.
１ 調整治具 ２ 第１位置決め部材 ３ 第２位置決め部材 ４，１１ ダミー部 ７ 十字マーク １３ インジケータ DESCRIPTION OF SYMBOLS 1 Adjusting jig 2 1st positioning member 3 2nd positioning member 4, 11 Dummy part 7 Cross mark 13 Indicator
Claims (1)
により基板を保持して搬送する基板搬送装置と、前記所
定間隔と同間隔で形成された複数の基板保持溝を有し前
記基板搬送装置により搬送されてきた複数の基板を保持
溝で受ける基板保持装置との間の基板保持溝の相対位置
を調整するための基板移載用調整治具であって、前記基板搬送装置の少なくとも一部の基板保持溝に差し
込み可能なダミー部を有し、前記基板搬送装置に 保持さ
れ得る第１位置決め部材と、前記基板保持装置の少なくとも一部の基板保持溝に差し
込み可能なダミー部を有し、前記基板保持装置に 保持さ
れ得る第２位置決め部材と、 前記第１位置決め部材と第２位置決め部材とに設けら
れ、前記基板搬送装置から前記基板保持装置へ基板を移
載する状態における前記両位置決め部材の相対位置関係
を表示可能な表示部と、 を備えた基板移載用調整治具。1. A plurality of substrate holding grooves formed at predetermined intervals.
A substrate transport device for holding and transporting the substrate by the
With multiple substrate holding grooves formed at the same interval as the regular interval
Holds multiple substrates transferred by the substrate transfer device
A substrate transfer adjusting jig for adjusting a relative position of a substrate holding groove with respect to a substrate holding device received by a groove , wherein the jig is inserted into at least a part of the substrate holding grooves of the substrate transfer device.
A first positioning member having a dummy portion capable of being inserted into the substrate holding device and being inserted into at least a part of the substrate holding groove of the substrate holding device;
A second positioning member that has a dummy portion that can be inserted therein and can be held by the substrate holding device; and is provided on the first positioning member and the second positioning member, and transfers a substrate from the substrate transfer device to the substrate holding device. Transfer
A display unit capable of displaying a relative positional relationship between the two positioning members in a mounted state .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3460693U JP2564432Y2 (en) | 1993-06-25 | 1993-06-25 | Adjustment jig for substrate transfer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3460693U JP2564432Y2 (en) | 1993-06-25 | 1993-06-25 | Adjustment jig for substrate transfer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH074439U JPH074439U (en) | 1995-01-24 |
| JP2564432Y2 true JP2564432Y2 (en) | 1998-03-09 |
Family
ID=12419026
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3460693U Expired - Lifetime JP2564432Y2 (en) | 1993-06-25 | 1993-06-25 | Adjustment jig for substrate transfer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2564432Y2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW469483B (en) * | 1999-04-19 | 2001-12-21 | Applied Materials Inc | Method and apparatus for aligning a cassette |
| TWI326633B (en) * | 2007-07-16 | 2010-07-01 | Au Optronics Corp | Polishing machine, loading apparatus and method of operating loading apparatus |
| CN116190294B (en) * | 2023-04-24 | 2023-07-25 | 上海果纳半导体技术有限公司 | Crown block teaching method |
-
1993
- 1993-06-25 JP JP3460693U patent/JP2564432Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH074439U (en) | 1995-01-24 |
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