JP2542238Y2 - Conveying device for heated work in vacuum - Google Patents
Conveying device for heated work in vacuumInfo
- Publication number
- JP2542238Y2 JP2542238Y2 JP1550791U JP1550791U JP2542238Y2 JP 2542238 Y2 JP2542238 Y2 JP 2542238Y2 JP 1550791 U JP1550791 U JP 1550791U JP 1550791 U JP1550791 U JP 1550791U JP 2542238 Y2 JP2542238 Y2 JP 2542238Y2
- Authority
- JP
- Japan
- Prior art keywords
- holder
- work
- heat
- moving body
- heated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【０００１】[0001]
【産業上の利用分野】本考案は、真空室内に於いて成膜
等の処理が施される加熱されたウエハ等の加熱ワークを
搬送する搬送装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transfer device for transferring a heated work such as a heated wafer on which a process such as film formation is performed in a vacuum chamber.
【０００２】[0002]
【従来の技術】従来、図１に見られるように、真空室ａ
内で熱源ｂにより加熱されたウエハｃを、プーリーｄに
張設した金属製ベルトｅに取り付けたテーブル状の金属
製のホルダｆに載せ、該プーリーｄを真空室ａの外部か
ら減速機ｇを介して電動機ｈにより回転することにより
該ホルダｆ上のウエハｃを搬送する搬送装置が知られて
いる。2. Description of the Related Art Conventionally, as shown in FIG.
The wafer c heated by the heat source b is placed on a table-shaped metal holder f attached to a metal belt e stretched on a pulley d, and the pulley d is moved from outside the vacuum chamber a to a speed reducer g. There is known a transfer device that transfers a wafer c on the holder f by being rotated by an electric motor h via an electric motor h.
【０００３】また、真空室内に、磁気固定子とこれより
磁気浮上する磁気浮上体とを設け、該磁気浮上体に取り
付けた金属製のホルダでウエハを搬送する磁気浮上式搬
送装置も知られている。There is also known a magnetic levitation type transfer apparatus in which a magnetic stator and a magnetic levitation body which magnetically levitates therefrom are provided in a vacuum chamber, and a wafer is transferred by a metal holder attached to the magnetic levitation body. I have.
【０００４】[0004]
【考案が解決しようとする課題】従来の搬送装置は、上
記のようにウエハｃが直接、金属製のホルダｆ或いはベ
ルトｅに載せられて搬送されるので、熱源ｂにより加熱
されたウエハｃは、目的地に搬送されるまでの間に、放
射冷却の他に金属との接触による熱伝導によっても熱を
奪われ、ウエハ温度がすぐに下降してしまい、所定の温
度に維持しながらウエハｃの処理を行うことが難しかっ
た。また、ウエハｃを所定の温度で処理するためには、
ウエハが温度降下する分を見込んで予め高い温度に加熱
する必要があり、これに伴ないプーリーその他の駆動機
器が余計に加熱され、その寿命が短くなる欠点があっ
た。In the conventional transfer apparatus, the wafer c is directly transferred on the metal holder f or the belt e as described above, so that the wafer c heated by the heat source b is not transferred. Before being transported to the destination, heat is taken away not only by radiative cooling but also by heat conduction due to contact with a metal, and the temperature of the wafer immediately drops. Was difficult to perform. In order to process the wafer c at a predetermined temperature,
It is necessary to heat the wafer to a high temperature in advance in anticipation of the temperature drop of the wafer, and the pulleys and other driving devices are additionally heated, and the life of the pulley is shortened.
【０００５】更に、ウエハｃの裏面と金属製のホルダｆ
やベルトｅとの接触部の摩擦が少ないため、搬送中にウ
エハｃの位置がずれることがしばしば発生し、位置決め
が狂いがちである不都合があった。Further, a back surface of the wafer c and a metal holder f
The position of the wafer c often shifts during the transfer due to little friction between the wafer c and the contact portion with the belt e, and there has been a disadvantage that the positioning tends to be incorrect.
【０００６】本考案は、真空中で搬送されるワークの温
度下降が小さく、余分の加熱を必要としない搬送装置を
提供することを目的とするものである。SUMMARY OF THE INVENTION It is an object of the present invention to provide a transfer apparatus in which the temperature of a work conveyed in a vacuum is small and does not require extra heating.
【０００７】[0007]
【課題を解決するための手段】本考案では、上記目的を
達成すべく、内部に熱源を有する真空室内に、水平方向
へ移動する移動体と、これに取り付けたホルダとを備え
て該ホルダに載置したワークを搬送する搬送装置を設け
るようにしたものに於いて、該ホルダのワーク載置面に
ワークを保持する耐熱性材料のピンを複数本設け、該ホ
ルダを断熱アームを介して該移動体に取り付けした。According to the present invention, in order to achieve the above object, in a vacuum chamber having a heat source therein, a moving body which moves in a horizontal direction and a holder attached thereto are provided. In a configuration in which a transfer device for transferring a mounted work is provided, a plurality of pins made of a heat-resistant material for holding a work is provided on a work mounting surface of the holder, and the holder is connected to the holder via a heat insulating arm. Attached to the moving body.
【０００８】[0008]
【作用】真空室内の熱源によりホルダ上のワークが加熱
されるが、該ワークはホルダに設けた耐熱ゴムにより保
持されているので、ワークからホルダに伝わる熱量が少
なくなり、また、ホルダは断熱アームで支承されている
ため、ホルダから移動体への伝熱量が少なくなり、搬送
中のワークの温度降下が小さくなる。これに伴ってワー
クの搬送中の温度低下を見込んでワークを高温に加熱す
る必要がなくなり、真空室内の搬送装置等の機器の熱損
傷が少なくなる。The work on the holder is heated by a heat source in the vacuum chamber. Since the work is held by the heat-resistant rubber provided on the holder, the amount of heat transmitted from the work to the holder is reduced. , The amount of heat transfer from the holder to the moving body is reduced, and the temperature drop of the work being transported is reduced. Accordingly, it is not necessary to heat the work to a high temperature in anticipation of a temperature decrease during the transfer of the work, and heat damage to equipment such as a transfer device in a vacuum chamber is reduced.
【０００９】[0009]
【実施例】本考案を磁気浮上式の搬送装置に適用した実
施例に基づき説明すると、図２に於いて、符号１は内部
の複数箇所に赤外線ランプ等の熱源２を備えた真空室を
示し、該真空室１内には固定して設けられた磁気固定子
３との間に発生する磁気力により浮上する移動体４が設
けられ、該移動体４にはシリコンウエハ等のワーク１２
を載置するホルダ５が間隔を存して複数個取り付けされ
る。該移動体４及びホルダ５は、磁気力の制御により熱
源２の下方から各熱源２の間の受渡し位置１３へと往復
移動し、該受渡し位置１３に於いて他の搬送手段例えば
図２の紙面と垂直方向へ移動する磁気浮上体から成る搬
送手段により次の処理工程へ送られる。１０はホルダ５
と移動体４との間に介在するように真空室１内に固定し
て設けられた熱シールド板で、該熱シールド板１０内に
冷却水を循環させて熱源２からの熱で移動体４が加熱さ
れることを防ぐようにした。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described with reference to an embodiment in which the present invention is applied to a magnetic levitation type transfer device. In FIG. In the vacuum chamber 1, there is provided a moving body 4 which floats by a magnetic force generated between the vacuum chamber 1 and a fixedly provided magnetic stator 3, and the moving body 4 includes a work 12 such as a silicon wafer.
Are mounted at intervals. The moving body 4 and the holder 5 reciprocate from below the heat source 2 to a transfer position 13 between the heat sources 2 under the control of the magnetic force. Then, it is transferred to the next processing step by a transporting means composed of a magnetic levitation moving vertically. 10 is a holder 5
A heat shield plate fixedly provided in the vacuum chamber 1 so as to be interposed between the heat shield plate 10 and the heat sink 2 so that cooling water is circulated in the heat shield plate 10 and heat from the heat source 2 Was prevented from being heated.
【００１０】該ホルダ５はＳＵＳで製作され、その詳細
は図４及び図５に示す如くであり、ワーク１２の受渡し
用の部材が進入できるように底板６の中央部に円形の切
欠７を形成すると共に、該底板６の周囲にワーク１２の
落下防止用の***縁８を形成し、さらに該底板６のワー
ク載置面の４か所にフッソ樹脂例えばパーフロロゴムか
ら成る耐熱ゴムのピン９を植設してワーク１２を該底面
６から浮かして保持するようにした。また、該ホルダ５
を例えばセラミック製の断熱アーム１１を介して移動体
４に取り付けし、該ホルダ５から移動体４へ熱が逃げな
いようにした。尚、該ホルダ５をセラミックまたはポリ
イミド或いは石英で製作することも可能であり、また、
ピン９はＳＵＳ、セラミック、ポリイミド或いは石英で
製作してもよく、さらに、断熱アーム１１をＳＵＳ、ポ
リイミド或いは石英で製作してもよい。The holder 5 is made of SUS, and details thereof are as shown in FIGS. 4 and 5. A circular notch 7 is formed at the center of the bottom plate 6 so that a member for transferring the work 12 can enter. At the same time, a raised edge 8 for preventing the work 12 from dropping is formed around the bottom plate 6, and pins 9 made of heat-resistant rubber made of fluoro resin, for example, perfluoro rubber, are planted at four places on the work mounting surface of the bottom plate 6. The work 12 was floated from the bottom surface 6 and held. The holder 5
Is attached to the moving body 4 via a heat insulating arm 11 made of ceramic, for example, so that heat does not escape from the holder 5 to the moving body 4. The holder 5 can be made of ceramic, polyimide, or quartz.
The pin 9 may be made of SUS, ceramic, polyimide or quartz, and the heat insulating arm 11 may be made of SUS, polyimide or quartz.
【００１１】図示の装置では、熱源２によりワーク１２
が所定の温度に加熱されると、磁気浮上している移動体
４が側方へ移動し、そこでワーク１２が他の搬送手段に
より受け取られ、次の処理位置へと移送されるが、該ワ
ーク１２はホルダ５に直接接触していないのでワーク１
２の熱がホルダ５へと逃げることがなく、また該ホルダ
５は断熱アーム１１により移動体４に取り付けられてい
るため、該ホルダ５から移動体４へ伝熱で逃げる熱量が
少なく、従ってワーク１２の搬送中の温度低下が小さく
なる。また、これに伴ってワーク１２の加熱温度も小さ
くすることができ、真空室１内の駆動用の機器が熱によ
り損傷することも防止できる。さらに、該ピン９をフッ
素ゴムで形成すると、移動体４の移動によりワーク１２
が位置ずれすることがなくなり、正確な位置決めが行え
る。In the illustrated apparatus, the work 12 is
Is heated to a predetermined temperature, the magnetically levitated moving body 4 moves to the side, where the workpiece 12 is received by another transport means and transported to the next processing position. Reference numeral 12 denotes a work 1
2 does not escape to the holder 5, and since the holder 5 is attached to the moving body 4 by the heat insulating arm 11, a small amount of heat escapes from the holder 5 to the moving body 4 by heat transfer. 12, the temperature drop during the conveyance is reduced. Accordingly, the heating temperature of the work 12 can be reduced, and the driving device in the vacuum chamber 1 can be prevented from being damaged by heat. Further, when the pin 9 is formed of fluoro rubber, the work 12
Does not shift, and accurate positioning can be performed.
【００１２】[0012]
【考案の効果】以上のように、本考案では、真空室内を
水平方向へ移動する搬送装置の移動体に取り付けたホル
ダのワーク載置面にワークを保持する耐熱性ピンを複数
本設け、該ホルダを断熱アームを介して該移動体に取り
付けしたので、ワークとホルダとの接触面積が少なくな
ると共にホルダから移動体への伝熱も小さくなり、加熱
されたワークの温度低下を防止でき、温度低下が少ない
のでワークを必要以上に加熱する必要がなくなるため、
真空室内の機器の熱による損傷を少なくし得、ピンを耐
熱性ゴムで構成すれば移動によるワークの位置ずれも防
止できる等の効果がある。As described above, according to the present invention, a plurality of heat-resistant pins for holding a work are provided on a work mounting surface of a holder attached to a moving body of a transfer device that moves horizontally in a vacuum chamber. Since the holder is attached to the moving body via the heat insulating arm, the contact area between the work and the holder is reduced, the heat transfer from the holder to the moving body is also reduced, and the temperature of the heated work can be prevented from lowering. Since there is little decrease, there is no need to heat the work more than necessary,
Damage due to heat of the equipment in the vacuum chamber can be reduced, and if the pins are made of heat-resistant rubber, there is an effect that displacement of the work due to movement can be prevented.
【図１】 従来例の截断側面図FIG. 1 is a cutaway side view of a conventional example.
【図２】 本考案の実施例の截断側面図FIG. 2 is a cutaway side view of the embodiment of the present invention.
【図３】 図２のＡ−Ａ線截断側面図FIG. 3 is a side view cut along the line AA of FIG. 2;
【図４】 図２のホルダの斜視図FIG. 4 is a perspective view of the holder of FIG. 2;
【図５】 図２のホルダの拡大断面図FIG. 5 is an enlarged sectional view of the holder of FIG. 2;
１ 真空室 ２ 熱源 ４ 移
動体 ５ ホルダ ９ ピン １１ 断
熱アーム １２ ワークDESCRIPTION OF SYMBOLS 1 Vacuum chamber 2 Heat source 4 Moving body 5 Holder 9 Pin 11 Insulated arm 12 Work
Claims (2)
向へ移動する移動体と、これに取り付けたホルダとを備
えて該ホルダに載置したワークを搬送する搬送装置を設
けるようにしたものに於いて、該ホルダのワーク載置面
にワークを保持する耐熱性材料のピンを複数本設け、該
ホルダを断熱アームを介して該移動体に取り付けしたこ
とを特徴とする真空中に於ける加熱ワークの搬送装置。1. A vacuum chamber having a heat source inside, a moving body that moves in a horizontal direction, and a holder attached to the moving body, and a transfer device that transfers a work placed on the holder is provided. Wherein a plurality of pins made of a heat-resistant material for holding a work are provided on a work mounting surface of the holder, and the holder is attached to the moving body via a heat insulating arm. Heated work transfer device.
に記載の真空中に於ける加熱ワークの搬送装置。2. The pin according to claim 1, wherein said pin is made of fluoro rubber.
3. The transfer device for a heated work in a vacuum according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1550791U JP2542238Y2 (en) | 1991-03-16 | 1991-03-16 | Conveying device for heated work in vacuum |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1550791U JP2542238Y2 (en) | 1991-03-16 | 1991-03-16 | Conveying device for heated work in vacuum |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04111743U JPH04111743U (en) | 1992-09-29 |
| JP2542238Y2 true JP2542238Y2 (en) | 1997-07-23 |
Family
ID=31902695
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1550791U Expired - Lifetime JP2542238Y2 (en) | 1991-03-16 | 1991-03-16 | Conveying device for heated work in vacuum |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2542238Y2 (en) |
-
1991
- 1991-03-16 JP JP1550791U patent/JP2542238Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04111743U (en) | 1992-09-29 |
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|---|---|---|---|
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| R250 | Receipt of annual fees |
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| EXPY | Cancellation because of completion of term |