JP2534111B2 - Vibration support mechanism - Google Patents
Vibration support mechanismInfo
- Publication number
- JP2534111B2 JP2534111B2 JP23709488A JP23709488A JP2534111B2 JP 2534111 B2 JP2534111 B2 JP 2534111B2 JP 23709488 A JP23709488 A JP 23709488A JP 23709488 A JP23709488 A JP 23709488A JP 2534111 B2 JP2534111 B2 JP 2534111B2
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- vibrating body
- vibrating
- vibration
- spring member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
- G02B26/121—Mechanical drive devices for polygonal mirrors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Description
【発明の詳細な説明】 ［産業上の利用分野］ 本発明は振動体支持機構に関し、一層詳細には、例え
ば、ばね材等の機械的な共振現象を利用してミラーを偏
向させるミラー振動型光偏向器において、前記ミラーを
振動軸に固定し、この振動軸をＪ字形状に湾曲形成した
ばね部材を介して支持するよう構成した振動体支持機構
に関する。Description: TECHNICAL FIELD The present invention relates to a vibrating body support mechanism, and more specifically, a mirror vibrating type that deflects a mirror by utilizing a mechanical resonance phenomenon of a spring material or the like. In an optical deflector, the present invention relates to a vibrating body support mechanism in which the mirror is fixed to a vibrating shaft and the vibrating shaft is supported via a J-shaped curved spring member.
［発明の背景］ 近年、ミラーを高速度で振動させ、あるいは回転させ
ることにより画像等の二次元情報を処理する光スキャナ
ーが広範に用いられている。例えば、コンピュータ出力
マイクロフイルム、レーザマーキング、非接触印刷、通
信、軍事用ナイトビジョン等、レーザや赤外の応用分野
においてその需要が拡大している。BACKGROUND OF THE INVENTION In recent years, optical scanners that process two-dimensional information such as images by vibrating or rotating a mirror at high speed have been widely used. For example, the demand is expanding in laser and infrared application fields such as computer output microfilm, laser marking, contactless printing, communication, and military night vision.
前記光スキャナーは高精度、高い再現性、長時間運転
性が要求されると共に応答が速く低慣性であることが望
ましい。この光スキャナーの中、ばね部材の機械的な共
振現象を利用してミラーを正弦的に振動させ偏向を行う
ものとして、細い金属線等の捩じりを利用したトーショ
ンバー方式、板ばねの捩じりを利用したタウトバンド方
式、振動軸に取着された板ばねにミラーを支持させたフ
レキシュラルピボット方式等が挙げられる。The optical scanner is required to have high accuracy, high reproducibility, and long-term drivability, and it is desirable that it has a quick response and low inertia. The optical scanner uses a mechanical resonance phenomenon of the spring member to vibrate the mirror sinusoidally to perform deflection. A taut band method using twisting, a flexural pivot method in which a mirror is supported by a leaf spring attached to a vibrating shaft, and the like can be given.
この中でフレキシュラルピボット方式を採用した光ス
キャナーの要部を第１図ａに示す。参照符号２はミラー
振動体を示し、このミラー振動体２は、実質的に、振動
軸４とミラー６と板状ばね部材4a乃至4dとから構成され
る。振動軸４は長尺な板体からなり、この中央部には連
結部材6aを介してミラー６が取着されている。前記板状
ばね部材4a、4bおよび4c、4dは互いに交差し、一端が振
動軸４に夫々取着されると共に、他端が第１図ｂ、ｃに
示す支持８に取着される。この場合、前記板状ばね部材
4a、4bおよび4c、4dの交差位置Ｏは前記ミラー６と前記
振動軸４および連結部材6aを合わせた可動部９の重心の
位置と一致するように設定される。このミラー振動体２
は図示しない駆動機構により前記交差位置Ｏを中心に矢
印方向に振動するように構成されている。The main part of the optical scanner adopting the flexural pivot method is shown in FIG. 1a. Reference numeral 2 indicates a mirror vibrating body, and the mirror vibrating body 2 is substantially composed of a vibrating shaft 4, a mirror 6, and plate-shaped spring members 4a to 4d. The vibrating shaft 4 is made of a long plate, and a mirror 6 is attached to the center of the vibrating shaft 4 via a connecting member 6a. The leaf spring members 4a, 4b and 4c, 4d intersect each other, one end of which is attached to the vibration shaft 4 and the other end of which is attached to the support 8 shown in FIGS. In this case, the plate spring member
The intersection position O of 4a, 4b and 4c, 4d is set so as to coincide with the position of the center of gravity of the movable portion 9 including the mirror 6, the vibration shaft 4 and the connecting member 6a. This mirror oscillator 2
Is configured to vibrate in the direction of the arrow around the intersection position O by a drive mechanism (not shown).
ここで、前記板状ばね部材4a乃至4dの長さをｌとし、
ミラー振動体２を振れ角±θだけ振動させた場合、交差
位置Ｏは、 で与えられる。従って、（１）式より諒解されるよう
に、交差位置Ｏは前記板状ばね部材4a乃至4dの長さｌに
比例して変動し、また、ミラーの振れ角θを大きくする
とそれにつれて交差位置Ｏの変動も大きくなる。Here, the length of the plate-shaped spring members 4a to 4d is 1, and
When the mirror vibrating body 2 is vibrated by the deflection angle ± θ, the intersection position O is Given in. Therefore, as is clear from the equation (1), the crossing position O fluctuates in proportion to the length l of the plate-shaped spring members 4a to 4d, and when the deflection angle θ of the mirror is increased, the crossing position O increases accordingly. The fluctuation of O also becomes large.
ところで、前記ミラー振動体２においては、ミラー６
に入射する光ビームの偏向動作を高精度に行わせるた
め、当該可動部９の重心の位置が前記板状ばね部材4a乃
至4dの交差位置Ｏに一致するよう連結部材6aを介して前
記振動軸４に取着している。従って、構造がその分複雑
なものとなっている。また、ミラー６の振れ角θを十分
に確保するためには板状ばね部材4a乃至4dの長さｌを大
きくせねばならず、そのために装置が大型化する不都合
も生じる。さらに、前述のように、ミラー振動体２の交
差位置Ｏの変動は板状ばね部材4a乃至4dの長さｌに比例
するため、前記板状ばね部材4a乃至4dの長さｌを大きく
するとミラー振動体２の交差位置Ｏの変動が大きくな
る。この場合、ミラー振動体２によって走査される光ビ
ームのウォブルが無視出来なくなる虞があると共に、重
心の移動によって生ずる回転以外の振動が増加し、従っ
て、ミラーの振れ角θが制限される結果となる。一方、
板状ばね部材4a乃至4dを短くして交差位置Ｏの変動を抑
えミラーの振れ角θを十分に確保しようとすると、前記
板状ばね部材4a乃至4dに過大な応力がかかり、寿命が短
くなるという不都合が露呈する。By the way, in the mirror vibrating body 2, the mirror 6
In order to perform the deflection operation of the light beam incident on the high precision, the position of the center of gravity of the movable part 9 is matched with the crossing position O of the plate spring members 4a to 4d via the connecting member 6a. Attached to 4. Therefore, the structure is complicated accordingly. Further, in order to sufficiently secure the deflection angle θ of the mirror 6, the length l of the plate-shaped spring members 4a to 4d must be increased, which causes a problem that the device becomes large. Further, as described above, the variation of the crossing position O of the mirror vibrating body 2 is proportional to the length l of the plate spring members 4a to 4d. Therefore, if the length l of the plate spring members 4a to 4d is increased, The variation of the crossing position O of the vibrating body 2 becomes large. In this case, the wobble of the light beam scanned by the mirror vibrating body 2 may not be negligible, and vibrations other than rotation caused by the movement of the center of gravity increase, so that the deflection angle θ of the mirror is limited. Become. on the other hand,
If it is attempted to shorten the plate spring members 4a to 4d to suppress the variation of the crossing position O and sufficiently secure the deflection angle θ of the mirror, excessive stress is applied to the plate spring members 4a to 4d, and the life is shortened. The inconvenience is exposed.
［発明の目的］ 本発明は前記の不都合を克服するためになされたもの
であって、振動体をＪ字形状に湾曲させたばね部材を介
して支持することにより、構造が単純で且つ振動中心の
変動を抑えることが出来ると共に、振動振幅を十分確保
することが可能となる振動体支持機構を提供することを
目的とする。[Object of the Invention] The present invention has been made in order to overcome the above-mentioned inconveniences, and supports a vibrating body through a spring member curved in a J-shape, so that the structure is simple and the vibration center is It is an object of the present invention to provide a vibrating body support mechanism capable of suppressing fluctuations and ensuring a sufficient vibration amplitude.
［目的を達成するための手段］ 前記の目的を達成するために、本発明はＪ字形状に湾
曲形成した少なくとも２つのばね部材を夫々の略中央部
において交差させ、各ばね部材の一端部を支持体に固着
する一方、前記各ばね部材の他端部に振動体を取着し、
ばね部材の弾性によって前記振動体を振動させるように
構成することを特徴とする振動体支持機構。[Means for Achieving the Object] In order to achieve the above-mentioned object, the present invention intersects at least two spring members curved in a J-shape at respective substantially central portions thereof and connects one end portion of each spring member. While being fixed to the support, a vibrating body is attached to the other end of each spring member,
A vibrating body support mechanism, wherein the vibrating body is vibrated by elasticity of a spring member.
［実施態様］ 次に、本発明に係る振動体支持機構について好適な実
施態様を挙げ、添付の図面を参照しながら以下詳細に説
明する。[Embodiments] Next, preferred embodiments of the vibrating member support mechanism according to the present invention will be described in detail below with reference to the accompanying drawings.
第２図において、参照符号10は本実施態様に係るミラ
ー振動型光偏向器を示し、このミラー振動型光偏向器10
は円筒管形状の筐体12を含む。筐体12は円周上に沿って
略180°切り欠いた開口部14を有しており、後述するミ
ラーがこの開口部14に臨むよう前記筐体12内に内装され
る。In FIG. 2, reference numeral 10 indicates a mirror vibration type optical deflector according to this embodiment.
Includes a cylindrical tube-shaped housing 12. The housing 12 has an opening 14 cut out by approximately 180 ° along the circumference, and a mirror, which will be described later, is installed inside the housing 12 so as to face the opening 14.
筐体12内には断面円弧状の支持体16が固設される。ま
た、前記筐体12内の上部には後述する振動軸の駆動源で
あるソレノイド18が設けられる。下方に延在する前記ソ
レノイド18の駆動軸20には角柱の振動軸22が取着され
る。そして、前記振動軸22の中間部には反射面が扁平な
ミラー24が前記筐体12の開口部14に臨んで取り付けられ
る。この場合、ミラー24と振動軸22および駆動軸20とか
ら構成される可動部29の重心位置が振動中心と一致する
ように設定される。A support 16 having an arcuate cross section is fixedly provided in the housing 12. Further, a solenoid 18, which is a drive source of a vibration shaft described later, is provided in the upper portion of the housing 12. A vibration shaft 22 of a prism is attached to a drive shaft 20 of the solenoid 18 extending downward. A mirror 24 having a flat reflecting surface is attached to the middle of the vibration shaft 22 so as to face the opening 14 of the housing 12. In this case, the position of the center of gravity of the movable portion 29 including the mirror 24, the vibration shaft 22, and the drive shaft 20 is set so as to coincide with the vibration center.
前記振動軸22の上下両端部近傍にはＪ字形状に湾曲し
た板ばね26a、26bおよび28a、28bの一端部が取着され、
また、前記板ばね26a、26bおよび28a、28bの他端部は前
記支持体16に取着される。この場合、前記Ｊ字形状の板
ばね26a、26bおよび28a、28bはその中央部において夫々
略直角に交差して配置される。板ばね26a、26bおよび28
a、28bの交差位置は可動部29の重心の位置に一致するよ
うに配置される。Near the upper and lower ends of the vibrating shaft 22, one ends of leaf springs 26a, 26b and 28a, 28b curved in a J shape are attached.
The other ends of the leaf springs 26a, 26b and 28a, 28b are attached to the support 16. In this case, the J-shaped leaf springs 26a, 26b and 28a, 28b are arranged so as to intersect each other at a substantially right angle at their central portions. Leaf springs 26a, 26b and 28
The intersection position of a and 28b is arranged so as to coincide with the position of the center of gravity of the movable portion 29.
ここで、前記Ｊ字形状の板ばね26a、26bおよび28a、2
8bの外形形状を第３図に示す。同図において、板ばね26
a、26bおよび28a、28bは略Ｊ字形状に湾曲して形成され
ており、短片30と長片32とこれらを連結する連結部38と
から構成される。前記短片30の端部34には前記振動軸22
に取着するための取付孔34a、34bが穿設されている。ま
た、前記長片32の端部36には前記支持体16に取着するた
めの取付孔36a、36bが穿設されている。Here, the J-shaped leaf springs 26a, 26b and 28a, 2
The external shape of 8b is shown in FIG. In the figure, the leaf spring 26
Each of a, 26b and 28a, 28b is formed to be curved in a substantially J shape, and is composed of a short piece 30, a long piece 32, and a connecting portion 38 connecting these pieces. The vibrating shaft 22 is provided at the end 34 of the short piece 30.
Mounting holes 34a, 34b for attaching to the are formed. Further, attachment holes 36a and 36b for attaching to the support 16 are formed in the end portion 36 of the long piece 32.
本実施態様に係るミラー振動型光偏向器は基本的には
以上のように構成されるものであり、次にその作用並び
に効果について説明する。The mirror vibration type optical deflector according to the present embodiment is basically configured as described above, and its operation and effect will be described below.
この場合、本実施態様に係るミラー振動型光偏向器が
適用される画像走査装置の例を挙げて説明する。In this case, an example of an image scanning device to which the mirror vibration type optical deflector according to the present embodiment is applied will be described.
先ず、原稿あるいは記録担体等の被走査体に対して光
ビームを走査させるにあたり、第２図に示すように、ソ
レノイド18に対して外部より交番電流を供給する。この
場合、ソレノイド18は駆動軸20を揺動させ、これによっ
て振動軸22に取着されたミラー24が振動する。そこで、
ミラー24に入射した光ビームＬは前記ミラー24によって
反射偏向され、図示しない走査レンズを介して原稿等の
被走査体上を走査し、画像の読取あるいは記録が行われ
る。First, when a light beam is scanned on an object to be scanned such as a document or a record carrier, an alternating current is externally supplied to the solenoid 18 as shown in FIG. In this case, the solenoid 18 causes the drive shaft 20 to swing, which causes the mirror 24 attached to the vibrating shaft 22 to vibrate. Therefore,
The light beam L incident on the mirror 24 is reflected and deflected by the mirror 24, scans an object to be scanned such as a document through a scanning lens (not shown), and an image is read or recorded.
ここで、前記振動軸22の両端部側はＪ字形状の板ばね
26a、26bおよび28a、28bを介して支持体16に取着されて
いる。そして、前記Ｊ字形状の板ばね26a、26bおよび28
a、28bは第３図に示す交差位置Ｏにおいて夫々交差する
ように構成されており、ソレノイド18より与えられる駆
動力に対して板ばね26a、26bおよび28a、28bが共振し、
ミラー24が第２図に示す矢印方向に振動する。Here, both ends of the vibration shaft 22 are J-shaped leaf springs.
It is attached to the support 16 via 26a, 26b and 28a, 28b. Then, the J-shaped leaf springs 26a, 26b and 28 are formed.
a and 28b are configured to cross each other at the crossing position O shown in FIG. 3, and the leaf springs 26a, 26b and 28a, 28b resonate with the driving force given by the solenoid 18,
The mirror 24 vibrates in the direction of the arrow shown in FIG.
この場合、板ばね26a、26bおよび28a、28bの交差位置
Ｏは、座標系を第４図ａ、ｂに示すように設定した場合
において、振れ角θに対し、 で与えられる。ここで、l1は板ばね26a、26b、28a、28b
の長片32の長さを示し、l2は板ばね26a、26b、28a、28b
の短片の長さを示す。In this case, the intersecting position O of the leaf springs 26a, 26b and 28a, 28b is set with respect to the deflection angle θ when the coordinate system is set as shown in FIGS. Given in. Where l 1 is a leaf spring 26a, 26b, 28a, 28b
Shows the length of the long piece 32 of L, and l 2 is the leaf spring 26a, 26b, 28a, 28b.
Shows the length of the short piece.
そこで、第１図に示す従来の支持機構では、板状ばね
部材4a乃至4dの交差位置Ｏは板状ばね部材4a乃至4dの長
さｌに比例して変動している（（１）式参照）。これに
対し、本実施態様に係るミラー振動型光偏向器10では、
交差位置Ｏは、（２）式に示すように、板ばね26a、26b
および28a、28bの長片32の長さl1と短片30の長さl2との
差に比例して変動する。従って、従来のように、ミラー
の振れ角θを十分確保するために必要な板状ばね部材4a
乃至4dの長さｌと、本実施態様に係るミラー振動型光偏
向器10に適用される板ばね26a、26b、28a、28bの長片32
の長さl1を等しいものとして考察すると、本実施態様に
係るミラー振動型光偏向器10における交差位置Ｏの変動
は従来に比較して明らかに小さくなることが容易に諒解
されよう。一方、振動軸22は実質的に板ばね26a、26b、
28a、28bの短片30と長片32とを和した長さ（l1＋l2）の
ばね力により支持されているので、長さ（l1＋l2）の直
線状の板ばねを使用することによって得られる振れ角と
同等の振れ角を確保することが出来る。この結果、十分
な振れ角θを確保した状態で極めて高精度な画像読取あ
るいは記録を行うことが出来る。また、板ばね26a、26
b、28a、28bをＪ字形状とすることによりミラー24を振
動軸22に近接することが出来、これによって、従来の連
結部材6aを省略し構造を簡易なものとすることが可能と
なる。さらに、ミラー24を収容する筐体12を小さくする
ことが出来るので装置の小型化も可能となる。Therefore, in the conventional support mechanism shown in FIG. 1, the crossing position O of the plate-shaped spring members 4a to 4d fluctuates in proportion to the length 1 of the plate-shaped spring members 4a to 4d (see the formula (1)). ). On the other hand, in the mirror vibration type optical deflector 10 according to the present embodiment,
The crossing position O is determined by the leaf springs 26a, 26b as shown in the equation (2).
And 28a, 28b fluctuate in proportion to the difference between the length l 1 of the long piece 32 and the length l 2 of the short piece 30. Therefore, as in the conventional case, the plate-shaped spring member 4a necessary to sufficiently secure the deflection angle θ of the mirror is provided.
To 4d and a long piece 32 of the leaf springs 26a, 26b, 28a, 28b applied to the mirror vibration type optical deflector 10 according to the present embodiment.
Considering that the lengths l 1 are equal, it will be easily understood that the variation of the crossing position O in the mirror vibration type optical deflector 10 according to this embodiment is significantly smaller than that of the conventional one. On the other hand, the vibrating shaft 22 is substantially composed of the leaf springs 26a, 26b,
Since it is supported by the spring force of the length (l 1 + l 2 ) that is the sum of the short piece 30 and the long piece 32 of 28a, 28b, use a straight leaf spring of the length (l 1 + l 2 ). It is possible to secure a deflection angle equivalent to the deflection angle obtained by. As a result, it is possible to read or record an image with extremely high accuracy while ensuring a sufficient deflection angle θ. In addition, the leaf springs 26a, 26
By making b, 28a, 28b J-shaped, the mirror 24 can be brought close to the vibrating shaft 22, and thus the conventional connecting member 6a can be omitted and the structure can be simplified. Furthermore, since the housing 12 that houses the mirror 24 can be made smaller, the device can be made smaller.
なお、Ｊ字形状の板ばね26a、26b、28a、28bを 板厚:T＝0.5mm 材質：ばね鋼 ヤング率:E20,000kg/mm2 となる素材で構成した場合、交差位置Ｏを中心としたミ
ラー24の振れ角θに対するトルク特性は、第５図に示す
ように、略線型性を呈する。なお、回転角０°付近のば
ね定数ｋは ｋ＝0.04kgcm/dag＝0.225Nm/rad であり、振れ角θが大きくなるに従ってばね定数ｋが大
きくなるような非線型性が存在する。然しながら、振れ
角θが±15°の範囲内においては、ばね定数ｋの変化は
数パーセント以内であり、用途にもよるが、線型である
として差支えない場合が多い。前記板ばね26a、26b、28
a、28bを用いて慣性モーメントＪ＝１×10-6kgm2の振動
軸22を支持し共振させた場合の共振周波数ｆは振れ角θ
＝０°の時、 となり、共振特性は第６図のようになる。この場合、振
れ角θの増加に伴って共振周波数ｆが変化する特性を示
すが実用上問題はないことが判明している。When the J-shaped leaf springs 26a, 26b, 28a, 28b are made of a material having a plate thickness: T = 0.5 mm, a material: spring steel, and a Young's modulus: E20,000 kg / mm 2 , the intersection position O is centered. The torque characteristic of the mirror 24 with respect to the deflection angle θ exhibits a substantially linear characteristic as shown in FIG. The spring constant k in the vicinity of the rotation angle of 0 ° is k = 0.04 kgcm / dag = 0.225 Nm / rad, and there is non-linearity in which the spring constant k increases as the deflection angle θ increases. However, when the deflection angle θ is within a range of ± 15 °, the change of the spring constant k is within a few percent, and depending on the application, it is often the case that it is a linear type. The leaf springs 26a, 26b, 28
The resonance frequency f when the vibration axis 22 having the moment of inertia J = 1 × 10 −6 kgm 2 is supported and resonated using a and 28b is the deflection angle θ.
= 0 °, And the resonance characteristics are as shown in FIG. In this case, the resonance frequency f changes with the increase of the deflection angle θ, but it has been found that there is no practical problem.
［発明の効果］ 以上のように、本発明によれば、Ｊ字形状に湾曲させ
た複数のばね部材を交差させ、前記ばね部材の一端部を
支持体に固定する一方、他端部に振動体を取着し、共振
現象を利用して前記振動体を振動させるように構成して
いる。この場合、振動体はばね部材による振動中心に配
設することが出来るため、その取付構造は極めて簡易な
ものとなる。また、前記振動中心の変動はばね部材をＪ
字形状とすることで振動体の振れ角を確保した状態で十
分小さく抑制されるため、振動体の極めて高精度な振動
特性を得ることが出来る。従って、この機構を光スキャ
ナーに適用した場合、高速回転に起因する回転以外の振
動やミラーのウォブル等を抑制することが出来、高精度
な光走査が可能となる。さらに、Ｊ字形状のばね部材は
振れ角に対するトルク特性が略線型性を示し、また、前
記ばね部材による共振特性は非常にシャープな特性であ
るため、安定し且つ高精度な光走査が可能となる。[Effects of the Invention] As described above, according to the present invention, a plurality of J-shaped curved spring members are crossed to fix one end of the spring member to the support while vibrating the other end. The body is attached, and the resonance phenomenon is utilized to vibrate the vibrating body. In this case, since the vibrating body can be arranged at the center of vibration by the spring member, its mounting structure becomes extremely simple. In addition, the fluctuation of the vibration center causes the spring member to
By forming the shape of the character, the vibration angle of the vibrating body is suppressed to be sufficiently small in a state where it is ensured, so that the vibration characteristic of the vibrating body with extremely high accuracy can be obtained. Therefore, when this mechanism is applied to an optical scanner, vibrations other than rotation due to high-speed rotation, wobble of the mirror, and the like can be suppressed, and high-precision optical scanning can be performed. Further, the J-shaped spring member has a substantially linear torque characteristic with respect to the deflection angle, and the resonance characteristic of the spring member is very sharp, so that stable and highly accurate optical scanning is possible. Become.
以上、本発明について好適な実施態様を挙げて説明し
たが、本発明はこの実施態様に限定されるものではな
く、本発明の要旨を逸脱しない範囲において種々の改良
並びに設計の変更が可能なことは勿論である。Although the present invention has been described above with reference to the preferred embodiments, the present invention is not limited to these embodiments, and various improvements and design changes can be made without departing from the scope of the present invention. Of course.
第１図は従来技術に係るフレキシュラルピボット方式を
用いた光スキャナーの説明図、 第２図は本発明に係る振動体支持機構が適用されるミラ
ー振動型光偏向器の要部構成斜視図、 第３図は第２図におけるＪ字形状のばね部材の形状説明
図、 第４図は第２図に示すミラー振動型光偏向器の作用説明
図、 第５図は第２図に示すミラーの振れ角に対するトルク特
性図、 第６図は第２図に示すミラーの共振特性図である。 10…ミラー振動型光偏向器、12…筐体 16…支持体、18…ソレノイド 20…駆動軸、22…振動軸 24…ミラー 26a、26b、28a、28b…板ばね 30…短片、32…長片FIG. 1 is an explanatory view of an optical scanner using a flexural pivot system according to the related art, and FIG. 2 is a perspective view of a mirror vibration type optical deflector to which a vibrating body support mechanism according to the present invention is applied. 3, FIG. 3 is an explanatory view of the shape of the J-shaped spring member in FIG. 2, FIG. 4 is an explanatory view of the operation of the mirror vibration type optical deflector shown in FIG. 2, and FIG. 5 is a mirror shown in FIG. FIG. 6 is a torque characteristic diagram with respect to the deflection angle of FIG. 10 ... Mirror vibration type optical deflector, 12 ... Housing 16 ... Support, 18 ... Solenoid 20 ... Drive axis, 22 ... Vibration axis 24 ... Mirror 26a, 26b, 28a, 28b ... Leaf spring 30 ... Short piece, 32 ... Long Piece
Claims (3)
ばね部材を夫々の略中央部において交差させ、各ばね部
材の一端部を支持体に固着する一方、前記各ばね部材の
他端部に振動体を取着し、ばね部材の弾性によって前記
振動体を振動させるように構成することを特徴とする振
動体支持機構。1. At least two spring members curved in a J-shape are intersected at their substantially central portions so that one end of each spring member is fixed to a support and the other end of each spring member is fixed. A vibrating body support mechanism, wherein a vibrating body is attached, and the vibrating body is vibrated by elasticity of a spring member.
ラー振動型光偏向器を構成する偏向ミラーであることを
特徴とする振動体支持機構。2. The vibrating body supporting mechanism according to claim 1, wherein the vibrating body is a deflecting mirror that constitutes a mirror vibrating optical deflector.
材の共振現象を用いて、前記振動体を共振振動させるよ
うに構成することを特徴とする振動体支持機構。3. The vibrating body support mechanism according to claim 1, wherein the vibrating body is resonated and vibrated by using the resonance phenomenon of the spring member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23709488A JP2534111B2 (en) | 1988-09-20 | 1988-09-20 | Vibration support mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23709488A JP2534111B2 (en) | 1988-09-20 | 1988-09-20 | Vibration support mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0283520A JPH0283520A (en) | 1990-03-23 |
| JP2534111B2 true JP2534111B2 (en) | 1996-09-11 |
Family
ID=17010322
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23709488A Expired - Fee Related JP2534111B2 (en) | 1988-09-20 | 1988-09-20 | Vibration support mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2534111B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4724936B2 (en) * | 2000-04-28 | 2011-07-13 | 株式会社デンソー | Optical scanner and two-dimensional scanning system |
-
1988
- 1988-09-20 JP JP23709488A patent/JP2534111B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0283520A (en) | 1990-03-23 |
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