JP2526794B2 - Tilt detection device - Google Patents
Tilt detection deviceInfo
- Publication number
- JP2526794B2 JP2526794B2 JP5191511A JP19151193A JP2526794B2 JP 2526794 B2 JP2526794 B2 JP 2526794B2 JP 5191511 A JP5191511 A JP 5191511A JP 19151193 A JP19151193 A JP 19151193A JP 2526794 B2 JP2526794 B2 JP 2526794B2
- Authority
- JP
- Japan
- Prior art keywords
- optical system
- displacement
- sample surface
- detecting
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は傾き検出装置に関し、特
にＹＡＧレーザで回路パターンを修正する際の回路パタ
ーン面の傾きを検出する傾き検出装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a tilt detecting device, and more particularly to a tilt detecting device for detecting a tilt of a circuit pattern surface when a circuit pattern is corrected by a YAG laser.
【０００２】[0002]
【従来の技術】図４は、たとえば特開平１−２５９２０
８号公報に示される従来の傾き検出装置の一例を示す。
図４を参照すると、この傾き検出装置は、レーザ光源１
４と、レーザ光源１４からの光束を被測定物１７上に集
光する対物レンズ１６と、レーザ光源１４と被測定物１
７との間に配置されるものであって被測定物１７上に線
像を形成する例えば凹状円筒レンズのような一方向性光
学素子１５と、被測定物１７からの反射光によって対物
レンズ１６と被測定物１７との距離を焦点ずれとして検
出する焦点ずれ検出用光学手段１８と、焦点ずれ検出用
光学手段１８を通過した光を検出する少なくとも２つに
分割された分割光検出器２０とを有している。ここで図
４（ｂ）は図４（ａ）の側面図である。図４（ｃ）の１
８は物体表面の形状変化に応じて変化を与える焦点ずれ
検出用光学手段である。2. Description of the Related Art FIG. 4 shows, for example, JP-A-1-25920.
An example of a conventional inclination detection device shown in Japanese Patent No. 8 is shown.
Referring to FIG. 4, this tilt detecting device is provided with a laser light source 1
4, the objective lens 16 for condensing the light flux from the laser light source 14 onto the DUT 17, the laser light source 14 and the DUT 1.
7 and a unidirectional optical element 15 such as a concave cylindrical lens for forming a line image on the object to be measured 17, and an objective lens 16 by reflected light from the object to be measured 17. Defocus detection optical means 18 for detecting the distance between the object and the object to be measured 17 as defocus, and at least two split photodetectors 20 for detecting the light that has passed through the defocus detection optical means 18. have. Here, FIG. 4B is a side view of FIG. 1 in FIG. 4 (c)
Reference numeral 8 denotes defocus detecting optical means for changing the shape of the object surface.
【０００３】次に作用を説明する。レーザ光源１４を出
たレーザ光束は一方向性光学素子１５および対物レンズ
１６を通過した後、被測定物１７の表面上に集光され
る。ここでレーザ光束は一方向性光学素子１５の作用に
より非点収差を生じ、被測定物１７上で図４（ｄ）のよ
うな線像１９を形成する。この線像１９の向きをｘ軸、
これと直交する向きをｙ軸とする。被測定物１７で反射
された戻り光は焦点ずれ検出用光学手段１８を通過後分
割光検出器２０に達する。分割光検出器２０上での集光
状態が図４（ｅ）の拡大図で示されている。分割光検出
器２０はｙ軸方向において少なくとも２分割された素子
の集まりを１単位とする検出部２０Ａ′，２０Ｂ′…を
形成している。これらの検出部２０Ａ′，２０Ｂ′…は
少なくとも２個からなり、線像１９の線分方向であるｘ
軸方向に沿って配列されている。ここで図４（ｄ）の被
測定物１７上の線像１９のうち、点Ａの位置で反射され
た戻り光に着目すると、この点Ａの戻り光は図４（ｅ）
の検出部２０Ａ′に達する。従って焦点ずれ検出用光学
手段１８の作用によって、検出部２０Ａ′の出力信号か
ら被測定物１７上の点Ａの微少変位または表面粗さを測
定することができる。同様に被測定物の他の点Ｂ，Ｃ…
と対応する検出部２０Ｂ′，２０Ｃ′…により点Ｂ，Ｃ
…での表面形状を測定することができる。以上のよう
に、この例は被測定物上での線像方向における複数の位
置に関する表面形状を同時に測定できるものであり、被
測定物の傾きがわかる。Next, the operation will be described. The laser light flux emitted from the laser light source 14 passes through the unidirectional optical element 15 and the objective lens 16, and then is focused on the surface of the DUT 17. Here, the laser light flux produces astigmatism due to the action of the unidirectional optical element 15, and forms a line image 19 as shown in FIG. The direction of this line image 19 is the x-axis,
The direction orthogonal to this is the y-axis. The return light reflected by the DUT 17 reaches the split photodetector 20 after passing through the defocus detection optical means 18. The condensed state on the split photodetector 20 is shown in an enlarged view of FIG. The split photodetector 20 forms detection units 20A ′, 20B ′ ... In which a unit of at least two split elements in the y-axis direction is one unit. These detecting units 20A ', 20B' ... consist of at least two, and are x in the line segment direction of the line image 19.
It is arranged along the axial direction. Here, focusing on the return light reflected at the position of the point A in the line image 19 on the DUT 17 in FIG. 4D, the return light at the point A is shown in FIG.
To the detection unit 20A '. Therefore, by the action of the defocus detecting optical means 18, it is possible to measure the minute displacement or the surface roughness of the point A on the object to be measured 17 from the output signal of the detecting section 20A '. Similarly, other points B, C ...
By the detecting units 20B ', 20C' ...
It is possible to measure the surface shape at. As described above, in this example, the surface shapes at a plurality of positions in the line image direction on the measured object can be simultaneously measured, and the inclination of the measured object can be known.
【０００４】[0004]
【発明が解決しようとする課題】この従来の傾き検出装
置は、被測定物の表面の傾きをある任意方向の一次元方
向に分布した複数位置で同時に測定するため、二次元の
傾きを測定する場合被測定物と装置とを相対的にもう一
次元走査する必要があり走査機構が増え装置が複雑にな
り傾き検出時間が長くなる。Since this conventional inclination detecting apparatus simultaneously measures the inclination of the surface of the object to be measured at a plurality of positions distributed in a certain one-dimensional direction, it measures the two-dimensional inclination. In this case, it is necessary to relatively one-dimensionally scan the object to be measured and the device, which increases the scanning mechanism and complicates the device, thus lengthening the tilt detection time.
【０００５】[0005]
【課題を解決するための手段】本発明の傾き検出装置
は、試料面上に焦点を位置する集光レンズと、この集光
レンズ光軸上に光軸を配置する第１の変位検出光学系
と、前記試料面と反対側の前記集光レンズ焦点位置を光
軸が通り前記第１の変位検出光学系と重ならない第２の
変位検出光学系と、前記試料面と反対側の前記集光レン
ズ焦点位置を光軸が通り前記第１の変位検出光学系およ
び前記第２の変位検出光学系の光軸と同一平面内に入ら
ない第３の変位検出光学系とを備える。An inclination detecting apparatus according to the present invention comprises a condenser lens having a focal point on a sample surface, and a first displacement detecting optical system having an optical axis on the optical axis of the condenser lens. And a second displacement detection optical system whose optical axis passes through the focal point of the condenser lens on the side opposite to the sample surface and does not overlap with the first displacement detection optical system, and the condenser on the side opposite to the sample surface. An optical axis passes through the lens focal point position, and a third displacement detection optical system that does not enter the same plane as the optical axes of the first displacement detection optical system and the second displacement detection optical system is provided.
【０００６】また、本発明の傾き検出装置は、前記変位
検出光学系がレーザー光を用いた非点収差方式変位検出
光学系であることを特徴とする。Further, the tilt detecting apparatus of the present invention is characterized in that the displacement detecting optical system is an astigmatism type displacement detecting optical system using a laser beam.
【０００７】さらに、本発明の傾き検出装置は、前記変
位検出光学系は１つで光偏向素子を前記試料面側と反対
側の前記集光レンズ焦点位置上、またはリレーレンズ系
をはさんだ共焦点位置上におき光路をＸＹ方向に切換え
ることを特徴とする。Further, in the tilt detecting device of the present invention, the displacement detecting optical system is one, and the light deflecting element is located on the focal point of the condenser lens on the side opposite to the sample surface side or across the relay lens system. It is characterized in that the optical path is placed on the focus position and the optical path is switched in the XY directions.
【０００８】[0008]
【実施例】次に、本発明について図面を参照して説明す
る。図１は本発明の一実施例の構成図である。図１を参
照すると、この傾き検出装置において、第１の変位検出
光学系２により集光レンズ１の中心光軸上の試料表面５
の光軸方向変位を検出し、その他に第２の変位検出光学
系３、第３の変位検出光学系４により試料表面５上の他
の２点の光軸方向変位を検出することによって試料表面
５の傾きを知ることができる。ここで各各の変位検出光
学系２，３および４の光軸は集光レンズ１の試料表面５
とは反対側焦点位置を通ることによって集光レンズ１の
中心光軸と平行になり従って各各の変位検出光学系２，
３および４の検出する変位は集光レンズ１の中心光軸方
向の変位となり正確に試料表面５の傾きを求めることが
できる。また変位検出光学系を３つでなくスペースの許
す限り増やすことが可能であるため、試料表面５の傾き
だけでなく表面形状の測定に応用することも可能であ
る。本発明の主な用途であるＹＡＧレーザで回路パター
ンを修正する用途に用いる際には、例えば集光レンズ１
と変位検出光学系との間に波長選択性ミラーであるダイ
クロイックミラーを入れ変位検出光学系の光は透過、回
路パターン加工用のＹＡＧレーザ光は反射にしてＹＡＧ
レーザ光路を導入することにより試料表面５の加工が即
時に可能となる。Next, the present invention will be described with reference to the drawings. FIG. 1 is a block diagram of an embodiment of the present invention. Referring to FIG. 1, in this tilt detection device, a sample surface 5 on the central optical axis of the condenser lens 1 is moved by the first displacement detection optical system 2.
Of the sample surface by detecting the displacements of the other two points on the sample surface 5 by the second displacement detection optical system 3 and the third displacement detection optical system 4 in addition to the above. You can know the inclination of 5. Here, the optical axes of the respective displacement detection optical systems 2, 3 and 4 are the sample surface 5 of the condenser lens 1.
By passing through the focal point on the side opposite to, it becomes parallel to the central optical axis of the condenser lens 1, and therefore each displacement detection optical system 2,
The displacements detected by 3 and 4 become displacements in the direction of the central optical axis of the condenser lens 1, and the inclination of the sample surface 5 can be accurately obtained. Moreover, since it is possible to increase the number of displacement detecting optical systems as much as possible, instead of three, it is possible to apply not only to the inclination of the sample surface 5 but also to the measurement of the surface shape. When used for the purpose of correcting the circuit pattern with the YAG laser, which is the main application of the present invention, for example, the condenser lens 1
A dichroic mirror, which is a wavelength-selective mirror, is inserted between the displacement detection optical system and the displacement detection optical system, and the light of the displacement detection optical system is transmitted, and the YAG laser light for processing the circuit pattern is reflected to the YAG.
By introducing the laser optical path, the sample surface 5 can be immediately processed.
【０００９】図２は変位検出光学系の一実施例である非
点収差方式変位検出光学系の構成図、図３は図２の変位
検出光学系の作用説明するための４分割センサ上のレー
ザ集光スポットの形状の変化を示す説明図である。図２
および図３を参照すると、レーザ６を出射した光はビー
ムエキスパンダ７を通ってビーム径をやや拡げる。偏向
ビームスプリッタ８はレーザ６から出射したレーザ光が
透過するように偏向の向きを決めておく。レーザ光は偏
向ビームスプリッタ８を通り１／４波長板９を通り円偏
向になる。さらに、このレーザ光は集光レンズ１を通り
試料表面５上で集光し反射光はもときた光路を偏向の向
きが入射前と逆回りの円偏向となり戻る。さらに、この
レーザ光は１／４波長板９を通り偏光面が以前と垂直な
直線偏光となり、このため偏光ビームスプリッタ８で反
射されシリンドルカルレンズ１０を通り一方向のみ収束
光となり、さらにレンズ１１を通り非点収差をおこし、
４分割センサ１２に入射する。４分割センサ１２にあた
るレーザ集光スポットの形状は集光レンズ１と試料表面
５との間の変位検出光学系の光路長が焦点距離と等しく
なるとき図３（２）のように円形となるようにシリンド
リカルレンズ１０とレンズ１１と４分割センサ１２と間
の位置関係を調整しておけば、焦点ずれの際に図３
（１）および（３）のようにレーザ焦点スポット形状が
なることにより４分割センサからの出力をみることで集
光レンズ１と試料表面５の間の変位を検出できる。FIG. 2 is a block diagram of an astigmatism type displacement detection optical system which is an example of the displacement detection optical system, and FIG. 3 is a laser on a four-division sensor for explaining the operation of the displacement detection optical system of FIG. It is explanatory drawing which shows the change of the shape of a condensing spot. Figure 2
With reference to FIG. 3 and FIG. 3, the light emitted from the laser 6 passes through the beam expander 7 and slightly expands the beam diameter. The deflection beam splitter 8 determines the direction of deflection so that the laser light emitted from the laser 6 is transmitted. The laser light passes through the deflecting beam splitter 8 and the quarter wavelength plate 9 to be circularly polarized. Further, this laser light passes through the condenser lens 1 and is condensed on the surface 5 of the sample, and the reflected light returns to the original optical path in the direction of the circular polarization in which the direction of deflection is opposite to that before the incidence. Further, this laser light passes through the quarter-wave plate 9 and becomes a linearly polarized light whose polarization plane is perpendicular to the previous one. Therefore, the laser light is reflected by the polarization beam splitter 8, passes through the cylindrical lens 10, and becomes a convergent light in only one direction. Astigmatism is caused through 11
It is incident on the four-division sensor 12. When the optical path length of the displacement detection optical system between the condenser lens 1 and the sample surface 5 becomes equal to the focal length, the shape of the laser focused spot corresponding to the four-division sensor 12 becomes circular as shown in FIG. If the positional relationship among the cylindrical lens 10, the lens 11 and the four-division sensor 12 is adjusted, when the focal point shifts, as shown in FIG.
The displacement between the condenser lens 1 and the sample surface 5 can be detected by observing the output from the four-division sensor due to the laser focal spot shape as in (1) and (3).
【００１０】また、変位検出光学系は１つで光偏光素子
例えばガルバノミラー等を集光レンズ１に関して試料表
面５側と反対側の集光レンズ１の焦点位置上、または凸
レンズを組合わせたリレーレンズ系をはさんだ共焦点位
置上におき光路を偏光走査することによっても試料表面
５上の各点の変位を測定でき試料表面５の傾きを求める
ことができる。Further, there is only one displacement detecting optical system, and a light polarizing element such as a galvano mirror is located on the focal point of the condenser lens 1 on the side opposite to the sample surface 5 side with respect to the condenser lens 1, or a relay in which a convex lens is combined. The displacement of each point on the sample surface 5 can also be measured and the tilt of the sample surface 5 can be obtained by placing the lens system on the confocal position and scanning the optical path with polarization.
【００１１】[0011]
【発明の効果】以上説明したように、本発明によれば、
被測定物表面の高さを３点測定することにより二次元的
に傾きを求めるので、従来の傾き検出装置のように被測
定物と傾き検出装置を相対的に一次元走査する機構が不
要になり、装置の構成がより単純になり、傾き検出時間
を短縮できる。As described above, according to the present invention,
Since the inclination is obtained two-dimensionally by measuring the height of the surface of the object to be measured at three points, a mechanism for relatively one-dimensionally scanning the object to be measured and the inclination detecting device unlike the conventional inclination detecting device is unnecessary. Therefore, the structure of the device becomes simpler, and the tilt detection time can be shortened.
【図１】本発明の一実施例の構成を示す図であるFIG. 1 is a diagram showing a configuration of an exemplary embodiment of the present invention.
【図２】この実施例の変位検出光学系の一実施例を示す
構成図である。FIG. 2 is a configuration diagram showing an example of a displacement detection optical system of this example.
【図３】この実施例の変位検出光学系における４分割セ
ンサ上にレーザ集光スポット形状の変位を示す説明図で
ある。FIG. 3 is an explanatory diagram showing displacement of a laser focused spot shape on a four-division sensor in the displacement detection optical system of this embodiment.
【図４】従来例を説明する図である。FIG. 4 is a diagram illustrating a conventional example.
１ 集光レンズ ２ 第１の変位検出光学系 ３ 第２の変位検出光学系 ４ 第３の変位検出光学系 ５ 試料表面 ６ レーザ ７ ビームエキスパンダ ８ 偏光ビームスプリッタ ９ １／４波長板 １０ シリンドリカルレンズ １１ レンズ １２ ４分割センサ １３ レーザビームスポット 1 Condensing Lens 2 First Displacement Detection Optical System 3 Second Displacement Detection Optical System 4 Third Displacement Detection Optical System 5 Sample Surface 6 Laser 7 Beam Expander 8 Polarizing Beam Splitter 9 1/4 Wave Plate 10 Cylindrical Lens 11 lens 12 4-division sensor 13 laser beam spot
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭59−184804（ＪＰ，Ａ) 特開 昭63−222202（ＪＰ，Ａ) 特開 昭60−186705（ＪＰ，Ａ) 特開 昭64−16904（ＪＰ，Ａ) 特開 平１−259208（ＪＰ，Ａ) 特開 昭62−75303（ＪＰ，Ａ) 特開 昭62−259012（ＪＰ，Ａ) 特開 昭63−179207（ＪＰ，Ａ) 特開 昭60−144606（ＪＰ，Ａ) 特開 昭63−225109（ＪＰ，Ａ) 特開 昭63−225108（ＪＰ，Ａ) 特開 昭64−57103（ＪＰ，Ａ) 実開 昭63−177703（ＪＰ，Ｕ) 特公 平６−25659（ＪＰ，Ｂ２) 特公 平６−72776（ＪＰ，Ｂ２) ─────────────────────────────────────────────────── ─── Continuation of the front page (56) Reference JP-A 59-184804 (JP, A) JP-A 63-222202 (JP, A) JP-A 60-186705 (JP, A) JP-A 64- 16904 (JP, A) JP 1-259208 (JP, A) JP 62-75303 (JP, A) JP 62-259012 (JP, A) JP 63-179207 (JP, A) JP-A-60-144606 (JP, A) JP-A-63-225109 (JP, A) JP-A-63-225108 (JP, A) JP-A-64-57103 (JP, A) Practical application Sho-63-177703 (JP, U) Japanese Patent Publication 6-25659 (JP, B2) Japanese Patent Publication 6-72776 (JP, B2)
Claims (3)
と、この集光レンズ光軸上に光軸を配置する第１の変位
検出光学系と、前記試料面と反対側の前記集光レンズ焦
点位置を光軸が通り前記第１の変位検出光学系と重なら
ない第２の変位検出光学系と、前記試料面と反対側の前
記集光レンズ焦点位置を光軸が通り前記第１の変位検出
光学系および前記第２の変位検出光学系の光軸と同一平
面内に入らない第３の変位検出光学系とを備えることを
特徴とする傾き検出装置。1. A condenser lens having a focal point on the sample surface, a first displacement detection optical system having an optical axis on the condenser lens optical axis, and the condenser lens on the opposite side of the sample surface. A second displacement detection optical system whose optical axis passes through the lens focal position and does not overlap with the first displacement detection optical system, and an optical axis which passes through the condensing lens focal position on the opposite side of the sample surface from the first displacement detection optical system. An inclination detecting device comprising: a displacement detecting optical system and a third displacement detecting optical system which is not in the same plane as an optical axis of the second displacement detecting optical system.
た非点収差方式変位検出光学系であることを特徴とする
請求項１記載の傾き検出装置。2. The tilt detecting device according to claim 1, wherein the displacement detecting optical system is an astigmatism type displacement detecting optical system using a laser beam.
を前記試料面側と反対側の前記集光レンズ焦点位置上、
またはリレーレンズ系をはさんだ共焦点位置上におき光
路をＸＹ方向に切換えることを特徴とする請求項１記載
の傾き検出装置。3. A displacement detecting optical system is provided, and an optical deflector is provided on the focal point of the condenser lens on the side opposite to the sample surface side.
2. The tilt detecting device according to claim 1, wherein the optical path is switched in the XY directions by placing it on a confocal position sandwiching a relay lens system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5191511A JP2526794B2 (en) | 1993-08-03 | 1993-08-03 | Tilt detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5191511A JP2526794B2 (en) | 1993-08-03 | 1993-08-03 | Tilt detection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0743133A JPH0743133A (en) | 1995-02-10 |
| JP2526794B2 true JP2526794B2 (en) | 1996-08-21 |
Family
ID=16275877
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5191511A Expired - Fee Related JP2526794B2 (en) | 1993-08-03 | 1993-08-03 | Tilt detection device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2526794B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6283943B2 (en) * | 2014-06-26 | 2018-02-28 | 株式会社カツラ・オプト・システムズ | Image sensor position measuring method and light projection device used in the method |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59184804A (en) * | 1983-04-04 | 1984-10-20 | Mitsubishi Electric Corp | Optical distance sensor |
| JPS63222202A (en) * | 1987-03-12 | 1988-09-16 | Toyota Motor Corp | Apparatus for measuring distance and angle of inclination |
-
1993
- 1993-08-03 JP JP5191511A patent/JP2526794B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0743133A (en) | 1995-02-10 |
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| Date | Code | Title | Description |
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| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 19960416 |
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| LAPS | Cancellation because of no payment of annual fees |