JP2525846B2 - Surface defect inspection equipment - Google Patents
Surface defect inspection equipmentInfo
- Publication number
- JP2525846B2 JP2525846B2 JP63023792A JP2379288A JP2525846B2 JP 2525846 B2 JP2525846 B2 JP 2525846B2 JP 63023792 A JP63023792 A JP 63023792A JP 2379288 A JP2379288 A JP 2379288A JP 2525846 B2 JP2525846 B2 JP 2525846B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- curved
- dimensional camera
- defect inspection
- rotating body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は自動車部品等のように表面が湾曲した曲線回
転体を被検査物とし、この表面における傷等の表面欠陥
を検査するための表面欠陥検査装置に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention uses a curved rotating body having a curved surface, such as an automobile part, as an object to be inspected, and a surface for inspecting surface defects such as scratches on the surface. Defect inspection device.
（従来の技術） 自動車部品等の種々の部品の中には、表面に湾曲面が
形成され、母線としての曲線を回転中心の回りで回転さ
せて得られる表面形状を呈する曲線回転体があり、これ
らの部品の表面に切削加工や研削加工を施した後に、表
面が所定の精度で加工されたか否か、つまり表面に傷等
の欠陥が発生したか否かを自動的に検査するために、表
面欠陥検査装置が用いられている。(Prior Art) Among various parts such as automobile parts, there is a curved rotator having a curved surface formed and having a surface shape obtained by rotating a curve as a generatrix around a rotation center, In order to automatically inspect whether or not the surface has been processed with a predetermined accuracy, that is, whether a defect such as a scratch has occurred on the surface after performing cutting or grinding on the surface of these parts, A surface defect inspection device is used.
第３図は上述のような曲線回転体の表面欠陥を検査す
るために従来用いられていた表面欠陥検査装置を示す図
である。図示しない回転軸によって回転自在となった曲
線回転体１には、１つの光源２から面状となった光が所
定の角度で照射されるようになっており、この面光源２
から曲線回転体１で反射した光を受光するための一次元
カメラ３が、曲線回転体１に対向して配置されている。
この一次元カメラ３の内部には、CCD等からなる光電セ
ンサ、つまりラインセンサが組込まれている。FIG. 3 is a view showing a surface defect inspection apparatus which has been conventionally used for inspecting the surface defect of the curved rotating body as described above. A curvilinear rotator 1 which is rotatable by a rotation shaft (not shown) is irradiated with planar light from one light source 2 at a predetermined angle.
A one-dimensional camera 3 for receiving the light reflected by the curved rotator 1 is arranged to face the curved rotator 1.
A photoelectric sensor such as a CCD, that is, a line sensor is incorporated in the one-dimensional camera 3.
この一次元カメラ３に入射する反射光は、回転体１の
表面が回転方向には円形となっているために、曲線回転
体１の表面で光源２からの光が接する部分で線状となっ
て入射する。Since the surface of the rotating body 1 is circular in the rotation direction, the reflected light incident on the one-dimensional camera 3 becomes linear at the portion where the light from the light source 2 contacts the surface of the curved rotating body 1. Incident.
（発明が解決しようとする問題点） このような従来の表面欠陥検査装置にあっては、回転
体１の表面が回転体１の回転中心軸Ｏを含む平面内では
湾曲しており、線状となって一次元カメラ３内に入射す
る光は、前記回転中心軸Ｏに対して大きく傾斜した部分
は光軸からずれる部分程、反射光量が減少することにな
る。図示する形状の被検査物における反射光量に対応し
たサンサ出力と、被検査物である回転体１の軸方向の位
置との関係を示すと第３図の通りである。(Problems to be Solved by the Invention) In such a conventional surface defect inspection apparatus, the surface of the rotating body 1 is curved in a plane including the rotation center axis O of the rotating body 1 and has a linear shape. Therefore, the amount of light incident on the one-dimensional camera 3 decreases as the portion greatly inclined with respect to the rotation center axis O deviates from the optical axis. FIG. 3 shows the relationship between the sensor output corresponding to the amount of reflected light in the inspected object having the illustrated shape and the axial position of the rotating body 1 which is the inspected object.
図示するようなセンサ出力信号によって、被検査物１
の表面の欠陥状態を検査するには、センサ出力信号によ
って得られた映像波形信号から、被検査物１の表面が適
正な状態となっているか否かの基準となるスレッショル
ドレベル、つまり、閾値を求め、このスレッショルドレ
ベルよりも映像信号波形が高ければ、表面が適正な状態
となっていると判定される。逆に、低ければその部分に
傷等の表面欠陥が存在すると判定される。これらの判定
は自動的になされ、被検査物１の回転位置と、中心軸Ｏ
方向における位置とが記憶媒体に記憶されることにな
る。The object to be inspected 1 according to the sensor output signal as shown in the figure.
In order to inspect the defect state of the surface of, the threshold level, that is, the threshold value, which is a reference for whether the surface of the inspection object 1 is in an appropriate state, is determined from the video waveform signal obtained by the sensor output signal. If the video signal waveform is higher than this threshold level, it is determined that the surface is in a proper state. On the contrary, if it is low, it is determined that there is a surface defect such as a scratch in that portion. These determinations are automatically made, and the rotational position of the inspection object 1 and the central axis O
The position in the direction will be stored in the storage medium.
しかしながら、上述したような、従来の表面欠陥検査
装置にあっては、センサからの出力信号自体が、被検査
物１の湾曲状態に応じて、中心軸Ｏ方向の位置によって
は、図示するようにセンサ出力が変化することになる。
このために、反射光量が少ない部分では、表面に発生し
た傷等の欠陥部分と、正常な部分とでコントラストが減
り、表面欠陥検出精度が低下してしまうという問題点が
あった。However, in the conventional surface defect inspection apparatus as described above, the output signal itself from the sensor is, as shown in the drawing, depending on the position in the central axis O direction depending on the curved state of the inspection object 1. The sensor output will change.
For this reason, in the portion where the amount of reflected light is small, there is a problem that the contrast between the defective portion such as a scratch generated on the surface and the normal portion is reduced, and the surface defect detection accuracy is lowered.
本発明は上記従来技術の問題点に鑑みてなされたもの
であり、湾曲した曲線回転体の表面からの正反射光が曲
線回転体の回転中心軸に沿う方向の全体に渡りほぼ均一
な光量で一次元カメラに入射するようにして、表面欠陥
検査精度を向上させることを目的とする。The present invention has been made in view of the above-mentioned problems of the prior art, and the specularly reflected light from the surface of the curved curving body has a substantially uniform light amount over the entire direction along the rotation center axis of the curving body. The objective is to improve the surface defect inspection accuracy by making the light incident on the one-dimensional camera.
（問題点を解決するための手段） 上記目的を達成するための本発明は、表面に湾曲面が
形成され、母線としての曲線を回転中心の回りで回転さ
せて得られる表面形状を呈する曲線回転体に、光源から
の光を照射し、前記曲線回転体の表面における母線を介
して線状に反射する反射光を受光する一次元カメラを前
記曲線回転体に対向して配置して前記曲線回転体の表面
を検査するようにした表面欠陥検査装置において、前記
光源は、前記曲線回転体の表面における母線をそれぞれ
直線に近似して区分した複数の部分に向けてそれぞれ照
射すると共に、これらの各部分からの正反射光が前記一
次元カメラに入射されるように前記曲線回転体の隣接し
て配置され、かつ前記各部分から前記一次元カメラに入
射される正反射光の光量が均一となるように正反射率に
応じて照射光の光量が調整されてなる表面欠陥検査装置
である。(Means for Solving the Problems) The present invention for achieving the above-mentioned object is a curvilinear rotation exhibiting a surface shape in which a curved surface is formed and a curve as a generatrix is rotated around a rotation center. The one-dimensional camera that irradiates the body with light from a light source and receives the reflected light that is linearly reflected via the generatrix on the surface of the curved rotator is arranged facing the curved rotator and the curved rotation is performed. In the surface defect inspection apparatus configured to inspect the surface of the body, the light source irradiates a plurality of portions, which are respectively approximated to straight lines with the generatrixes on the surface of the curved rotating body, and each of these is performed. Arranged adjacent to the curvilinear rotator so that specularly reflected light from a part is incident on the one-dimensional camera, and the amount of specularly reflected light incident on the one-dimensional camera from each part is uniform. So In addition, the surface defect inspection apparatus is one in which the amount of irradiation light is adjusted according to the regular reflectance.
（作用） 光源から被検査物である曲線回転体に照射される光
は、前記曲線回転体の表面における母線をそれぞれ直接
に近似して区分した複数の部分に向けて所定の光量で所
定の角度で入射することにより、それぞれの部分から一
次元カメラに入射する光は、被検査物の前記各部分から
の正反射光であり、しかも部分の全体で同一の光量で一
次元カメラのセンサ内に入射することになる。これによ
り、前記センサでは表面に欠陥があった場合とない場合
とでは明瞭に区別され、表面欠陥検出精度が向上するこ
ととなった。(Operation) The light emitted from the light source to the curved rotating body which is the object to be inspected is directed to a plurality of parts obtained by directly approximating the generatrixes on the surface of the curved rotating body at predetermined angles with a predetermined light amount. The light incident on the one-dimensional camera from each part is specularly reflected light from each part of the object to be inspected, and the whole part has the same light amount in the sensor of the one-dimensional camera. It will be incident. As a result, the sensor clearly distinguishes between the case where there is a surface defect and the case where there is no surface defect, and the surface defect detection accuracy is improved.
（実施例） 以下、図示する本発明の一実施例に基いて本発明を詳
細に説明する。(Example) Hereinafter, the present invention will be described in detail based on an example of the present invention shown in the drawings.
第１図は本発明の第１実施例に係る表面欠陥検査装置
を示す図であり、この図において、前記従来の装置にお
ける部位と共通する部位には同一の符号を付してある。FIG. 1 is a diagram showing a surface defect inspection apparatus according to a first embodiment of the present invention. In this figure, parts common to those of the conventional device are designated by the same reference numerals.
表面に湾曲面が形成され、母線としての曲線を回転中
心の回りで回転させて得られる表面形状を呈する曲線回
転体１は図示しない軸により回転自在となっており、こ
の曲線回転体１に対向して一次元カメ３が配置されてい
る。この一次元カメラ３の構造は、上述した場合と同様
であり、内部CCD素子からなるライセンサが組込まれて
いる。A curved rotator 1 having a curved surface formed and having a surface shape obtained by rotating a curve as a generatrix about a rotation center is rotatable by a shaft (not shown) and faces the curved rotator 1. Then, the one-dimensional turtle 3 is arranged. The structure of the one-dimensional camera 3 is the same as that described above, and a licensor composed of an internal CCD element is incorporated.
図示する形状の曲線回転体１の場合には、この回転体
１の表面はその湾曲した部分における母線をそれぞれ直
線に近似させた３つの部分L1〜L3に区分してある。これ
らの部分にそれぞれ別々に光を照射すべく、区分された
３つの部分に対応した３つの光源11〜13がそれぞれ被検
査物である曲線回転体１に対向して配置されている。そ
れぞれの光源11〜13は、３つの部分L1〜L3で反射して一
次元カメラ３に入射する光が、それぞれ正反射光となる
ように、所定の角度で設置されている。In the case of the curved rotating body 1 having the illustrated shape, the surface of the rotating body 1 is divided into three portions L1 to L3 in which the generatrixes of the curved portions are approximated to straight lines. In order to irradiate these portions with light separately, three light sources 11 to 13 corresponding to the three divided portions are arranged so as to face the curved rotating body 1 as the inspection object. Each of the light sources 11 to 13 is installed at a predetermined angle so that the light reflected by the three portions L1 to L3 and incident on the one-dimensional camera 3 becomes specularly reflected light.
したがって、上述のような本発明の表面欠陥検査装置
にあっては、一次元カメラ３内のセンサに入射する反射
光によって得られるこのセンサの出力は、第１図に示す
ように、被検査物１の中心軸Ｏに沿う方向の位置に応じ
て全体的に均一なものとなる。これにより、表面に凹部
や傷等の欠陥が存在した場合には、その部分からの反射
光は、他の部分に比較して、明瞭に暗部となって現れ、
センサによって確実に欠陥部が検出されることになる。
ただし、複数の区分されたそれぞれの部分では、入射角
つまり正反射率が異なることになるので、光源11〜13毎
に照射させる光量を変化させ、センサ出力が第１図にお
いて全体的に均一となるようにする必要がある。Therefore, in the surface defect inspection apparatus of the present invention as described above, the output of this sensor obtained by the reflected light incident on the sensor in the one-dimensional camera 3 is, as shown in FIG. According to the position of the No. 1 in the direction along the central axis O, it becomes uniform overall. As a result, when there is a defect such as a recess or a scratch on the surface, the reflected light from that portion clearly appears as a dark portion as compared with other portions,
The sensor reliably detects the defective portion.
However, since the incident angle, that is, the regular reflectance is different in each of the plurality of divided portions, the amount of light to be emitted is changed for each of the light sources 11 to 13 so that the sensor output is generally uniform in FIG. Need to be.
尚、被検査物である曲線回転体１の形状によっては、
４つ或はこれ以上の部分に区分するようにしても良い。In addition, depending on the shape of the curved rotating body 1 as the inspection object,
It may be divided into four or more parts.
第２図は本発明の第２実施例に係る表面欠陥検査装置
を示す図であり、この場合には１つの光源14を用いて、
この光源と曲線回転体１との間に、３つ区分された各部
分に相互に相違した所定の角度で光を照射させるため
に、フィルターが一体となった３つの反射ミラー15〜17
が配置されている。前記フィルターは曲線回転体１に向
かう光の量を調整するためのものであり、各々の部分L1
〜L3に所定の光度でかつ所定の角度で光源14からの光が
照射されることになる。この場合には、１つの光源と３
つの反射ミラー15〜17を含めて、３つの部分L1〜L3に相
互に相違した角度で被検査物に対して照射する光源が形
成されている。FIG. 2 is a diagram showing a surface defect inspection apparatus according to a second embodiment of the present invention, in which case one light source 14 is used.
Between the light source and the curved rotator 1, in order to irradiate light into each of the three divided parts at predetermined angles different from each other, three reflecting mirrors 15 to 17 integrated with a filter are provided.
Is arranged. The filter is for adjusting the amount of light traveling toward the curved rotator 1, and each portion L1
The light from the light source 14 is emitted to L3 at a predetermined light intensity and a predetermined angle. In this case, one light source and three
A light source for irradiating the object to be inspected at angles different from each other is formed in the three parts L1 to L3 including the reflection mirrors 15 to 17.
（発明の効果） 以上のように、本発明によれば、光源は、曲線回転体
の表面における母線をそれぞれ直線に近似して区分した
複数の部分に向けてそれぞれ照射すると共に、これらの
各部分からの正反射光が一次元カメラに入射されるよう
に前記曲線回転体に隣接して配置され、かつ前記各部分
から前記一次元カメラに入射される正反射光の光量が均
一となるように正反射率に応じて照射光の光量が調整さ
れているので、表面に湾曲面を有する曲線回転体からの
反射光は、前記各部分からの正反射光となって高い出力
感度を得ることができ、しかもこの各部分からの正反射
光は、全体的に一定の光量で一次元カメラ内のセンサに
入射することになり、曲線回転体の表面に傷等の表面欠
陥が発生していた場合には、センサ内にはその部分が暗
部として明瞭に現れ、表面欠陥検査の精度が大幅に向上
することとなった。(Effects of the Invention) As described above, according to the present invention, the light source irradiates a plurality of parts obtained by approximating the generatrixes on the surface of the curvilinear rotator to each other by approximating them to straight lines, and also at each of these parts. Is arranged adjacent to the curved rotating body so that the specularly reflected light from the one-dimensional camera is incident on the one-dimensional camera, and the light amount of the specularly-reflected light incident on the one-dimensional camera from each of the portions is uniform. Since the light amount of the irradiation light is adjusted according to the regular reflectance, the reflected light from the curved rotating body having the curved surface on the surface becomes the regular reflected light from each of the above parts, and high output sensitivity can be obtained. If the specularly reflected light from each of these parts is incident on the sensor in the one-dimensional camera with a constant amount of light as a whole, surface defects such as scratches occur on the surface of the curved rotating body. In the sensor, that part is Then, it became clear and the accuracy of the surface defect inspection was greatly improved.
第１図は本発明の一実施例に係る表面欠陥検査装置の概
略構造を示す斜視図、第２図は本発明の他の実施例に係
る表面欠陥検査装置の概略構造を示す斜視図、第３図は
従来の表面欠陥検査装置の概略構造を示す斜視図であ
る。 １……曲線回転体、３……一次元カメラ、11〜14……光
源。FIG. 1 is a perspective view showing a schematic structure of a surface defect inspection apparatus according to an embodiment of the present invention, and FIG. 2 is a perspective view showing a schematic structure of a surface defect inspection apparatus according to another embodiment of the present invention. FIG. 3 is a perspective view showing a schematic structure of a conventional surface defect inspection apparatus. 1 ... Curved rotating body, 3 ... One-dimensional camera, 11-14 ... Light source.
Claims (1)
線を回転中心の回りで回転させて得られる表面形状を呈
する曲線回転体に、光源からの光を照射し、前記曲線回
転体の表面における母線を介して線状に反射する反射光
を受光する一次元カメラを前記曲線回転体に対向して配
置して前記曲線回転体の表面を検査するようにした表面
欠陥検査装置において、 前記光源は、前記曲線回転体の表面における母線をそれ
ぞれ直線に近似して区分した複数の部分に向けてそれぞ
れ照射すると共に、これらの各部分からの正反射光が前
記一次元カメラに入射されるように前記曲線回転体に隣
接して配置され、かつ前記各部分から前記一次元カメラ
に入射される正反射光の光量が均一となるように正反射
率に応じて照射光の光量が調整されてなる表面欠陥検査
装置。1. A curved rotator having a curved surface formed on the surface and having a surface shape obtained by rotating a curve as a generatrix about a rotation center, is irradiated with light from a light source, and In a surface defect inspection apparatus configured to inspect a surface of the curved rotating body by arranging a one-dimensional camera that receives reflected light linearly reflected via a generatrix on the surface to inspect the surface of the curved rotating body, The light source irradiates a plurality of portions obtained by approximating the generatrix on the surface of the curved rotator to a straight line, and specularly reflected light from each of these portions is incident on the one-dimensional camera. Is arranged adjacent to the curved rotator, and the light amount of the irradiation light is adjusted according to the regular reflectance so that the light amount of the regular reflection light incident on the one-dimensional camera from each of the portions is uniform. Missing surface Defect inspection device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63023792A JP2525846B2 (en) | 1988-02-05 | 1988-02-05 | Surface defect inspection equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63023792A JP2525846B2 (en) | 1988-02-05 | 1988-02-05 | Surface defect inspection equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01201140A JPH01201140A (en) | 1989-08-14 |
| JP2525846B2 true JP2525846B2 (en) | 1996-08-21 |
Family
ID=12120175
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63023792A Expired - Lifetime JP2525846B2 (en) | 1988-02-05 | 1988-02-05 | Surface defect inspection equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2525846B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003090713A (en) * | 2001-09-18 | 2003-03-28 | Tokyo Weld Co Ltd | Appearance inspection method and device for chip part |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS446160Y1 (en) * | 1965-08-28 | 1969-03-05 | ||
| JPS53127783A (en) * | 1977-04-13 | 1978-11-08 | Omron Tateisi Electronics Co | Projection and reception system in optical surface inspection of spherical objects |
| JPH079403B2 (en) * | 1986-03-31 | 1995-02-01 | 三菱マテリアル株式会社 | Surface defect inspection method for objects |
-
1988
- 1988-02-05 JP JP63023792A patent/JP2525846B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01201140A (en) | 1989-08-14 |
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