JP2524061Y2 - Piezoelectric element displacement mechanical amplification mechanism - Google Patents
Piezoelectric element displacement mechanical amplification mechanismInfo
- Publication number
- JP2524061Y2 JP2524061Y2 JP1990033052U JP3305290U JP2524061Y2 JP 2524061 Y2 JP2524061 Y2 JP 2524061Y2 JP 1990033052 U JP1990033052 U JP 1990033052U JP 3305290 U JP3305290 U JP 3305290U JP 2524061 Y2 JP2524061 Y2 JP 2524061Y2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- displacement
- amplification mechanism
- mechanical
- beams
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006073 displacement reaction Methods 0.000 title claims description 72
- 230000007246 mechanism Effects 0.000 title claims description 59
- 230000003321 amplification Effects 0.000 title claims description 38
- 238000003199 nucleic acid amplification method Methods 0.000 title claims description 38
- 239000000758 substrate Substances 0.000 claims description 6
- 239000002184 metal Substances 0.000 description 9
- 239000000463 material Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 5
- 239000007769 metal material Substances 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
【考案の詳細な説明】 〔産業上の利用分野〕 本考案は圧電素子変位機械的増幅機構に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a piezoelectric element displacement mechanical amplification mechanism.
第５図は、この種の機械的増幅機構の従来例を示す斜
視図である。FIG. 5 is a perspective view showing a conventional example of this type of mechanical amplification mechanism.
この機械的増幅機構は、圧電素子11の変位を第２ヒン
ジ12a,12bを介して伝達し拡大する二本のレバーアーム1
3a,13bと、取付基板14と、レバーアーム13a,13bと取付
基板14とを接続する第１ヒンジ15a,15bと、そのレバー
アーム13a,13bで挟むように接続された変位増幅手段と
しての梁16とから構成されている。This mechanical amplifying mechanism transmits the displacement of the piezoelectric element 11 via the second hinges 12a and 12b to enlarge the two lever arms 1
3a, 13b, a mounting board 14, first hinges 15a, 15b connecting the lever arms 13a, 13b and the mounting board 14, and beams as displacement amplification means connected to be sandwiched between the lever arms 13a, 13b. It consists of 16 and.
このように構成された機械的増幅機構において、圧電
素子11に電圧を印加すると、圧電素子11の変位は第２ヒ
ンジ12a,12bを介して各々レバーアーム13a,13bに伝えら
れ、レバーアーム13a,13bに伝えられた変位は第１ヒン
ジ15a,15bに支点としてテコの原理にてレバーアーム13
a,13bの先端で拡大される。In the mechanical amplification mechanism configured as described above, when a voltage is applied to the piezoelectric element 11, the displacement of the piezoelectric element 11 is transmitted to the lever arms 13a and 13b via the second hinges 12a and 12b, respectively, and the lever arms 13a and 13b are moved. The displacement transmitted to the lever arm 13b is applied to the first hinges 15a and 15b as a fulcrum according to the principle of leverage.
It is enlarged at the tip of a, 13b.
しかるにレバーアーム13a,13bにより挟持された梁16
の両端には軸方向の変位が伝えられ、梁16に周知の座屈
理論により中央に最大変位17が発生する。However, the beam 16 held by the lever arms 13a and 13b
The axial displacement is transmitted to both ends of the beam 16, and a maximum displacement 17 is generated at the center of the beam 16 by the well-known buckling theory.
その後、印加電圧を零ボルトにすると圧電素子11の変
位は復帰し梁16の変位も同時に復帰する。Thereafter, when the applied voltage is set to zero volt, the displacement of the piezoelectric element 11 returns, and the displacement of the beam 16 also returns at the same time.
上述した従来の圧電素子変位機械的増幅機構は、変位
増幅手段である梁が１個であるので、１個の機械的増幅
機構から一つの出力しか得られず、出力を複数必要とす
る時、その出力の数だけ機械的増幅機構を組み合せるこ
とになり、機械的増幅機構として形状が大きくなるばか
りでなく、コストも高くなってしまうという欠点があ
る。The above-described conventional piezoelectric element displacement mechanical amplification mechanism has only one beam as the displacement amplification means, so that only one output can be obtained from one mechanical amplification mechanism. The mechanical amplifying mechanism is combined by the number of the outputs, so that the mechanical amplifying mechanism not only has a large shape but also has a disadvantage of increasing the cost.
本考案の目的は、複数の出力が得られる圧電素子変位
機械的増幅機構を提供することである。An object of the present invention is to provide a piezoelectric element displacement mechanical amplifying mechanism capable of obtaining a plurality of outputs.
本考案の圧電素子変位機械的増幅機構は、取付基板
と、取付基板の両側面に中間部が第１のヒンジで接続さ
れ一端に圧電素子がそれぞれ第２のヒンジで接続されて
いる二本のレバーアームと、該二本のレバーアームの他
端に接続されている、変位増幅手段としての梁を含み、
圧電素子の変位を前記レバーアームによって拡大伝達し
前記梁の中央で梁の軸方向に垂直な方向に増幅出力する
圧電素子変位機械的増幅機構において、前記梁が複数設
けられている。とくに、少なくとも二つの梁は前記圧電
素子の変位方向軸に直交する面内で互いに直交する方向
に変位するように前記レバーアームに接続されているこ
とを特徴とする圧電変位機械的増幅機構が得られる。The piezoelectric element displacement mechanical amplifying mechanism of the present invention comprises a mounting substrate, and two intermediate portions connected on both sides of the mounting substrate by a first hinge and a piezoelectric element connected to one end by a second hinge. A lever arm, connected to the other ends of the two lever arms, including a beam as displacement amplification means,
A plurality of beams are provided in a piezoelectric element displacement mechanical amplification mechanism that enlarges and transmits a displacement of a piezoelectric element by the lever arm and amplifies and outputs the center of the beam in a direction perpendicular to the axial direction of the beam. In particular, a piezoelectric displacement mechanical amplification mechanism is characterized in that at least two beams are connected to the lever arm so as to be displaced in directions perpendicular to each other in a plane perpendicular to the displacement direction axis of the piezoelectric element. Can be
変位増幅手段としての梁が複数設けられているので、
１個の圧電素子変位機械増幅機構から複数の出力が得ら
れる。Since multiple beams are provided as displacement amplification means,
A plurality of outputs can be obtained from one piezoelectric element displacement mechanical amplification mechanism.
次に、本考案の実施例について図面を参照して説明す
る。Next, an embodiment of the present invention will be described with reference to the drawings.
第１図は本考案の第１の実施例の圧電素子変位機械的
増幅機構の斜視図である。FIG. 1 is a perspective view of a piezoelectric element displacement mechanical amplification mechanism according to a first embodiment of the present invention.
圧電素子１の両端はエポキシ樹脂などの接着剤で圧電
素子１の変位を伝達する手段としての細くくびれたＴ字
状の第２ヒンジ2a,2bの平端面に接続されている。第２
ヒンジ2a,2bはレバーアーム5a,5bに接続され、各々のレ
バーアーム5a,5bは変位伝達手段としてのテコの支点に
あたる細くくびれた第１ヒンジ4a,4bに接続されてい
る。また、第１ヒンジ4a,4bは取付基板３の両側面に接
続されている。第１ヒンジ4a,4b、第２ヒンジ2a,2b、取
付基板３およびレバーアーム5a,5bとからなる増幅機構
を備えた金具は、SUS304,42Ni−Fe材などの高剛性の材
料を用いて一体構造で製作されている。レバーアーム5
a,5bの先端にはばね性を有する金属材料をプレス打ち抜
きおよび曲げ加工で製造された梁６が二個、レバーアー
ム5a,5bをはさむようにしてリベット７の締結用機械要
素によって接続されている。Both ends of the piezoelectric element 1 are connected to the flat end faces of the narrow, T-shaped second hinges 2a and 2b as means for transmitting the displacement of the piezoelectric element 1 with an adhesive such as epoxy resin. Second
The hinges 2a, 2b are connected to lever arms 5a, 5b, and each lever arm 5a, 5b is connected to a thin and narrow first hinge 4a, 4b corresponding to a fulcrum of a lever as a displacement transmitting means. The first hinges 4a, 4b are connected to both side surfaces of the mounting board 3. A metal fitting provided with an amplification mechanism including the first hinges 4a, 4b, the second hinges 2a, 2b, the mounting board 3, and the lever arms 5a, 5b is integrally formed using a highly rigid material such as SUS304, 42Ni-Fe. It is manufactured with a structure. Lever arm 5
At the tips of a and 5b, two beams 6 manufactured by pressing and bending a metal material having a spring property are connected by a mechanical element for fastening a rivet 7 so as to sandwich the lever arms 5a and 5b. .
このように構成された圧電素子変位機械的増幅機構に
おいて、圧電素子１に電圧を印加すると、圧電素子１の
変位は第２ヒンジ2a,2bを介して各々レバーアーム5a,5b
に伝えられ、レバーアーム5a,5bに伝えられた変位は第
１ヒンジ4a,4bを支点としてテコの原理にてレバーアー
ム5a,5bの先端でが拡大される。In the piezoelectric element displacement mechanical amplification mechanism configured as described above, when a voltage is applied to the piezoelectric element 1, the displacement of the piezoelectric element 1 is changed via the second hinges 2a and 2b to the lever arms 5a and 5b, respectively.
The displacement transmitted to the lever arms 5a and 5b is enlarged at the distal ends of the lever arms 5a and 5b by the lever principle with the first hinges 4a and 4b as fulcrums.
しかるにレバーアーム5a,5bにより挟持された二個の
梁６の両端には軸方向の変位が伝えられ、梁６には周知
の座屈理論により中央に最大変位８が発生する。However, axial displacement is transmitted to both ends of the two beams 6 sandwiched by the lever arms 5a and 5b, and a maximum displacement 8 occurs at the center of the beams 6 according to a well-known buckling theory.
この実施例においては、１セットの圧電素子変位機械
的増幅機構から二つの出力が得られ、その出力の方向は
圧電素子変位機械的増幅機構の板厚方向と一緒である。In this embodiment, two outputs are obtained from one set of the piezoelectric element displacement mechanical amplification mechanism, and the direction of the output is the same as the thickness direction of the piezoelectric element displacement mechanical amplification mechanism.
以上具体的に示すと、縦弾性係数14.8×103kg/mm2の4
2Ni−Fe材4mm厚さのものをワイヤカット放電加工手段で
外形35mm×30mmの増幅機構を備えた金具を製作した。こ
れに、従来知られているチタン酸ジルコン酸鉛（PZT）
系セラミックスを積層した圧電素子１およびSUS304材か
らなる梁６を二個取り付けた圧電素子圧電素子変位機械
的増幅機構において、圧電素子１にDC150Vの電圧を印加
すると、圧電素子１の両端で発生する９μｍの変位が、
この機械的増幅機構を通じて拡大され、各々の梁６の中
央で0.20mmの最大変位８が得られた。そして、150V,300
Hz、矩形波の電圧を圧電素子１に印加すると108回以上
の動的寿命が得られた。Specifically, the modulus of longitudinal elasticity is 14.8 × 10 3 kg / mm 2
A 2Ni-Fe material having a thickness of 4 mm was fabricated by wire cut electric discharge machining with a metal fitting having an amplifying mechanism with an outer diameter of 35 mm x 30 mm. In addition, conventionally known lead zirconate titanate (PZT)
When a voltage of 150 V DC is applied to the piezoelectric element 1 in the piezoelectric element displacement mechanical amplification mechanism in which the piezoelectric element 1 in which the ceramics are laminated and the two beams 6 made of SUS304 are attached, the piezoelectric element 1 is generated at both ends of the piezoelectric element 1. 9 μm displacement
Enlarged through this mechanical amplification mechanism, a maximum displacement 8 of 0.20 mm was obtained at the center of each beam 6. And 150V, 300
When a rectangular wave voltage of Hz was applied to the piezoelectric element 1, a dynamic life of 10 8 times or more was obtained.
また、従来の出力を一つしか持たない機械的増幅機構
で同一の効果を得ようとすると圧電素子変位機械的増幅
機構を２セット並列に組み合せることになり、形状が厚
さ8mm、外形35mm×30mmになるのに対して、この実施例
は厚さ4mm、外形35mm×30mmの形状に収まり、圧電素子
変位機械的増幅機構が必要とするスペースは1/2となっ
た。そして、コストも従来の圧電素子変位機械的増幅機
構のほぼ１セット分ですんだ。Also, if the same effect is to be obtained with a conventional mechanical amplification mechanism having only one output, two sets of piezoelectric element displacement mechanical amplification mechanisms will be combined in parallel, and the shape will be 8 mm thick and 35 mm outside In contrast to the case of × 30 mm, this example fits in the shape of 4 mm in thickness and 35 mm × 30 mm in outer shape, and the space required for the piezoelectric element displacement mechanical amplification mechanism is halved. And the cost is almost one set of the conventional piezoelectric element displacement mechanical amplification mechanism.
第２図（ａ）は本考案の第２の実施例の圧電素子変位
機械的増幅機構の斜視図、第２図（ｂ）は第２図（ａ）
のＡ−Ａ断面のかしめ部位の拡大断面図である。FIG. 2 (a) is a perspective view of a piezoelectric element displacement mechanical amplification mechanism according to a second embodiment of the present invention, and FIG. 2 (b) is FIG. 2 (a).
It is an expanded sectional view of the crimping part of the AA cross section of FIG.
本実施例は、第１ヒンジ4a,4b、第２ヒンジ2a,2b、取
付基板３およびレバーアーム5a,5bとからなる増幅機構
を備えた金具をあらかじめ剛性の高い金属材料の薄い金
属板９（0.15〜0.5mmの厚さ）をプレス打ち抜き加工す
る際、取付基板３およびレバーアーム5a,5bの要所要所
に任意の形状の一部を半抜きまたは全周を半抜きして角
型のかしめ部10を形成し一枚づつ重ねてはさみつけ、か
しめ部10の突起10aの切口面9aの摩擦力で密着積層した
積層構造を有している。In this embodiment, a metal fitting provided with an amplification mechanism including the first hinges 4a and 4b, the second hinges 2a and 2b, the mounting board 3 and the lever arms 5a and 5b is previously thin metal plate 9 made of a highly rigid metal material. When press stamping (0.15 to 0.5 mm thick), a part of an arbitrary shape is partially cut out or the whole circumference is half cut out at a necessary portion of the mounting substrate 3 and the lever arms 5a and 5b, and a square caulking is performed. It has a layered structure in which the portions 10 are formed, one by one, sandwiched one by one, and tightly laminated by the frictional force of the cut surface 9a of the projection 10a of the caulking portion 10.
レバーアーム5a,5bの先端には、第１の実施例と同様
にばね性を有する金属材料をプレス打ち抜きおよび曲げ
加工で製造された梁６が二個、レバーアーム5a,5bをは
さむようにしてリベット７の締結用機械要素によって接
続されている。動作は第１の実施例と同じである。At the tips of the lever arms 5a and 5b, two beams 6 made by press-punching and bending a metal material having a spring property as in the first embodiment are riveted so as to sandwich the lever arms 5a and 5b. 7 are connected by a fastening mechanical element. The operation is the same as in the first embodiment.
第２の実施例の圧電素子変位機械的増幅機構におい
て、縦弾性係数14.8×108kg/mm2の42Ni−Fe材0.4mm厚さ
のものをプレス打ち抜き加工する際、取付基板３および
レバーアーム5a,5bに角型の全周を半抜き加工したかし
め部10をそれぞれ３カ所および２カ所形成し、10枚重ね
積層厚4mm、外形35mm×30mmの増幅機構を備えた金具を
製作した。これに、第１の実施例と同様に積層構造の圧
電素子１およびSUS304材からなる梁６を二組取付けた機
械的増幅機構において、圧電素子１にDC150Vの電圧を印
加すると各々の梁６の中央で0.20mmの最大変位８が得ら
れた。そして、150V、300Hz、矩形波の電圧を印加する
と108回以上の動的寿命が得られた。In the piezoelectric element displacement mechanical amplifying mechanism of the second embodiment, when a 42Ni-Fe material having a longitudinal elastic modulus of 14.8 × 10 8 kg / mm 2 and a thickness of 0.4 mm is press-punched, the mounting substrate 3 and the lever arm are used. The caulking portions 10 were formed in three places and two places by half-cutting the entire circumference of the square on 5a and 5b, respectively, and ten pieces were laminated to produce a metal fitting with an amplification mechanism of 4 mm thick and 35 mm x 30 mm in outer size. When a voltage of 150 V DC is applied to the piezoelectric element 1 in a mechanical amplifying mechanism in which two sets of the piezoelectric element 1 having a laminated structure and the beam 6 made of SUS304 material are attached similarly to the first embodiment, A maximum displacement 8 of 0.20 mm was obtained at the center. Then, 150 V, 300 Hz, 10 8 times or more dynamic life of applying a voltage of the rectangular wave was obtained.
また、第１の実施例のワイヤカット放電加工手段で製
造した同一の効果を有する増幅機構を備えた金具に対し
て、製造コストが1/10以下となった。In addition, the manufacturing cost was reduced to 1/10 or less of the metal fitting provided with the amplifying mechanism having the same effect manufactured by the wire cut electric discharge machining means of the first embodiment.
第３図は本考案の第３の実施例の圧電素子変位機械的
増幅機構の斜視図である。FIG. 3 is a perspective view of a piezoelectric element displacement mechanical amplification mechanism according to a third embodiment of the present invention.
本実施例では２個梁６が向きを90°（度）変えてレバ
ーアーム5a,5bにリベット７の締結用機械要素によって
接続されている。In this embodiment, the two beams 6 are connected to the lever arms 5a, 5b by a mechanical element for fastening the rivets 7 while changing the direction by 90 degrees (degrees).
この実施例では１セットの機械的増幅機構から二つの
出力が得られ、その出力方向はレバーアーム5a,5bの軸
方向と一緒であり、第２の実施例と同様積層構造で、動
作は第1,第２の実施例と同じである。In this embodiment, two outputs are obtained from one set of mechanical amplifying mechanisms, and the output direction is the same as the axial direction of the lever arms 5a and 5b. 1, the same as the second embodiment.
第３の実施例の圧電素子変位機械的増幅機構において
も、第２の実施例と同様に42Ni−Fe材を用いた積層厚4m
m、外形35mm×30mmの増幅機構を備えた金具を製作し、
これに積層構造の圧電素子１とSUS304材からなる梁６を
二個取り付けた。In the piezoelectric element displacement mechanical amplifying mechanism of the third embodiment, a layer thickness of 4 m using 42Ni-Fe material was used similarly to the second embodiment.
m, metal fittings with an amplifying mechanism of 35 mm x 30 mm
To this, two piezoelectric elements 1 having a laminated structure and two beams 6 made of SUS304 material were attached.
この圧電素子変位機械的増幅機構において、圧電素子
１にDC150Vの電圧を印加すると各々の梁６の中央で0.4m
mの最大変位８が得られ、150V、300Hz、矩形波の電圧を
印加すると108回以上の動的寿命が得られた。In this piezoelectric element displacement mechanical amplification mechanism, when a voltage of DC 150 V is applied to the piezoelectric element 1, the center of each beam 6 becomes 0.4 m
A maximum displacement of 8 m was obtained, and a dynamic life of 10 8 times or more was obtained when a voltage of 150 V, 300 Hz, and rectangular wave was applied.
第４図（ａ）は本考案の第４の実施例の圧電素子変位
機械的増幅機構の斜視図、第４図（ｂ）は第４図（ａ）
の実施例の梁６の配置を示す平面図である。FIG. 4 (a) is a perspective view of a piezoelectric element displacement mechanical amplification mechanism according to a fourth embodiment of the present invention, and FIG. 4 (b) is FIG. 4 (a).
It is a top view showing arrangement of beam 6 of an example.
本実施例の圧電素子変位機械的増幅機構は、第２の実
施例の圧電素子変位の機械的増幅機構にもう一個梁6aを
設け、梁6aの中央で発生する最大変位8aの方向がレバー
アーム5a,5bの軸方向と一緒になっている。In the piezoelectric element displacement mechanical amplification mechanism of the present embodiment, another beam 6a is provided in the piezoelectric element displacement mechanical amplification mechanism of the second embodiment, and the direction of the maximum displacement 8a generated at the center of the beam 6a is the lever arm. It is aligned with the axial direction of 5a and 5b.
本実施例の圧電素子変位機械的増幅機構は第2,第３の
実施例と同様積層構造で、動作は第１〜第３の実施例と
一緒である。The piezoelectric element displacement mechanical amplifying mechanism of this embodiment has the same laminated structure as the second and third embodiments, and operates in the same manner as the first to third embodiments.
第４の実施例の圧電素子変位機械的増幅機構において
も、第２、第３の実施例と同様に42Ni−Fe材を用いた積
層厚4mm、外形35mm×30mmの増幅機構を備えた金具を製
作し、これに積層構造の圧電素子１とSUS304材からなる
梁６を二個、梁6aを一個取り付けた。In the piezoelectric element displacement mechanical amplifying mechanism of the fourth embodiment, similarly to the second and third embodiments, a metal fitting provided with an amplifying mechanism having a laminated thickness of 4 mm and an outer diameter of 35 mm × 30 mm using 42Ni—Fe material is used. A piezoelectric element 1 having a laminated structure and two beams 6 made of SUS304 material and one beam 6a were attached thereto.
この圧電素子変位機械的増幅機構において、圧電素子
１にDC150Vの電圧を印加すると、各々の梁６の中央に0.
16mmの最大変位８ともう一個の梁6aの中央に0.19mmの最
大変位8aが得られ、150V、200Hz、矩形波の電圧を印加
すると108以上の動的寿命が得られた。In this piezoelectric element displacement mechanical amplifying mechanism, when a voltage of DC 150 V is applied to the piezoelectric element 1, the center of each beam 6 is set at 0.
A maximum displacement 8 of 16 mm and a maximum displacement 8a of 0.19 mm were obtained at the center of the other beam 6a, and a dynamic life of 10 8 or more was obtained when a rectangular wave voltage of 150 V, 200 Hz was applied.
従来の出力を一つしか持たない圧電素子変位機械的増
幅機構で同一の効果を得ようとすると圧電素子変位機械
的増幅機構を３セット並列に組み合せることになり、形
状が厚さ12mm、外形35mm×30mmになるのに対して、本実
施例は厚さ4mm、外形35mm×30mmの形状に収まり、圧電
素子変位機械的増幅機構が必要とするスペースは1/3と
なり、コストは従来の圧電素子変位機械的増幅機構のほ
ぼ１セット分ですんだ。In order to obtain the same effect with the conventional piezoelectric element displacement mechanical amplification mechanism that has only one output, three sets of piezoelectric element displacement mechanical amplification mechanisms are combined in parallel, the shape is 12 mm thick and the outer shape In contrast to 35 mm x 30 mm, this embodiment fits in the shape of 4 mm in thickness and 35 mm x 30 mm in outer shape, the space required for the piezoelectric element displacement mechanical amplification mechanism is reduced to 1/3, and the cost is It is almost one set of element displacement mechanical amplification mechanism.
以上説明したように本考案は、変位増幅手段としての
梁を複数設けることにより、１セットの圧電素子変位機
械的増幅機構から複数の出力を得ることができるので、
従来の圧電素子変位機械的増幅機構が複数の出力を得る
ためにその数だけ圧電素子変位機械的増幅機構を組み合
せて形状が大きくなり、コストも高くなってしまうよう
な欠点が無くなり、機械的増幅機構１セットの形状に小
型化でき、しかもほぼ１セットのコストで済む効果があ
る。As described above, in the present invention, by providing a plurality of beams as displacement amplifying means, a plurality of outputs can be obtained from a set of piezoelectric element displacement mechanical amplifying mechanisms.
In order to obtain multiple outputs, the conventional piezoelectric element displacement mechanical amplifying mechanism combines the number of piezoelectric element displacement mechanical amplifying mechanisms to increase the size and eliminate the drawback of increasing the cost. There is an effect that the size of the mechanism can be reduced to one set, and the cost can be reduced to almost one set.
第１図は本考案の第１の実施例を示す圧電素子変位機械
的増幅機構の斜視図、第２図（ａ）は本考案の第２の実
施例を示す圧電素子変位機械的増幅機構の斜視図、第２
図（ｂ）は第２図（ａ）のＡ−Ａ断面のかしめ部の拡大
断面図、第３図は本考案の第３の実施例を示す圧電素子
変位機械的増幅機構の斜視図、第４図（ａ）は本考案の
第４の実施例を示す圧電素子変位機械的増幅機構の斜視
図、第４図（ｂ）は第４図（ａ）の実施例の梁６の配置
を示す平面図、第５図は従来の圧電素子変位機械的増幅
機構の一例を示す斜視図である。 1,11……圧電素子、2a,2b,12a,12b……第２ヒンジ、3,1
4……取付基板、4a,4b,15a,15bd……第１ヒンジ、5a,5
b,13a,13b……レバーアーム、6,6a,16……梁、７……リ
ベット、8,8a,17……最大変位、９……薄い金属板、9a
……切口面、10……かしめ部、10a……突起。FIG. 1 is a perspective view of a piezoelectric element displacement mechanical amplifying mechanism showing a first embodiment of the present invention, and FIG. 2 (a) is a piezoelectric element displacement mechanical amplifying mechanism showing a second embodiment of the present invention. Perspective view, second
FIG. 2 (b) is an enlarged sectional view of a swaged portion taken along the line AA in FIG. 2 (a), FIG. 3 is a perspective view of a piezoelectric element displacement mechanical amplifying mechanism showing a third embodiment of the present invention, FIG. FIG. 4 (a) is a perspective view of a piezoelectric element displacement mechanical amplifying mechanism showing a fourth embodiment of the present invention, and FIG. 4 (b) shows the arrangement of beams 6 in the embodiment of FIG. 4 (a). FIG. 5 is a plan view and FIG. 5 is a perspective view showing an example of a conventional piezoelectric element displacement mechanical amplification mechanism. 1,11 ... piezoelectric element, 2a, 2b, 12a, 12b ... second hinge, 3,1
4 mounting board, 4a, 4b, 15a, 15bd first hinge, 5a, 5
b, 13a, 13b ... lever arm, 6, 6a, 16 ... beam, 7 ... rivet, 8, 8a, 17 ... maximum displacement, 9 ... thin metal plate, 9a
... cut surface, 10 ... caulked portion, 10a ... projection.
Claims (1)
第１のヒンジで接続され一端に圧電素子がそれぞれ第２
のヒンジで接続されている二本のレバーアームと、該二
本のレバーアームの他端に接続されている、変位増幅手
段としての梁を含み、圧電素子の変位を前記レバーアー
ムによって拡大伝達し前記梁の軸方向に垂直な方向に増
幅出力する圧電素子変位機械的増幅機構において、前記
梁が複数の設けられているとともに、少なくとも二つの
梁は前記圧電素子の変位方向軸に直交する面内で互いに
直交する方向に変位するように前記レバーアームに接続
されていることを特徴とする圧電変位機械的増幅機構。An intermediate portion is connected to both sides of the mounting substrate by a first hinge, and a piezoelectric element is provided at one end of the mounting substrate.
And two beams connected to the other ends of the two lever arms and serving as displacement amplifying means, and the displacement of the piezoelectric element is enlarged and transmitted by the lever arms. In a piezoelectric element displacement mechanical amplification mechanism that amplifies and outputs a beam in a direction perpendicular to the axial direction of the beam, a plurality of the beams are provided, and at least two beams are in a plane orthogonal to a displacement direction axis of the piezoelectric element. A piezoelectric displacement mechanical amplifying mechanism connected to the lever arm so as to be displaced in directions perpendicular to each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990033052U JP2524061Y2 (en) | 1990-03-29 | 1990-03-29 | Piezoelectric element displacement mechanical amplification mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990033052U JP2524061Y2 (en) | 1990-03-29 | 1990-03-29 | Piezoelectric element displacement mechanical amplification mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03124790U JPH03124790U (en) | 1991-12-17 |
| JP2524061Y2 true JP2524061Y2 (en) | 1997-01-29 |
Family
ID=31536409
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990033052U Expired - Lifetime JP2524061Y2 (en) | 1990-03-29 | 1990-03-29 | Piezoelectric element displacement mechanical amplification mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2524061Y2 (en) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59178985A (en) * | 1983-03-28 | 1984-10-11 | Nec Corp | Mechanical amplifying mechanism |
| JPH01161790A (en) * | 1987-12-17 | 1989-06-26 | Nec Corp | Displacement enlarging mechanism for piezoelectric actuator |
-
1990
- 1990-03-29 JP JP1990033052U patent/JP2524061Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03124790U (en) | 1991-12-17 |
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