JP2516471B2 - measuring device - Google Patents
measuring deviceInfo
- Publication number
- JP2516471B2 JP2516471B2 JP2298321A JP29832190A JP2516471B2 JP 2516471 B2 JP2516471 B2 JP 2516471B2 JP 2298321 A JP2298321 A JP 2298321A JP 29832190 A JP29832190 A JP 29832190A JP 2516471 B2 JP2516471 B2 JP 2516471B2
- Authority
- JP
- Japan
- Prior art keywords
- moving
- amount
- scanning
- detection
- detecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Description
【発明の詳細な説明】 ［産業上の利用分野］ この発明は、例えば表面粗さ測定や輪郭測定或いは部
分真円度測定といったように、検出手段が被測定物を走
査検出することによって、測定をおこなう測定装置に関
する。詳しくは、走査検出させるために、検出手段と被
測定物を相対移動させるが、その相対移動の量を設定す
ることに関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention provides a method for measuring a target object by scanning detection of the object, such as surface roughness measurement, contour measurement or partial roundness measurement. The present invention relates to a measuring device for performing. More specifically, in order to perform scanning detection, the detection means and the object to be measured are moved relative to each other, and the amount of the relative movement is set.
［従来の技術］ 検出手段が被測定物を走査検出することによって測定
をおこなう従来の測定装置1aは第３図に示すように、走
査検出に関わる検出手段5aと被測定物4aの相対移動の量
を、相対移動をおこなう前に、つまり走査検出する前に
予め移動量設定手段22aで設定する構成になっていた。[Prior Art] As shown in FIG. 3, a conventional measuring apparatus 1a that performs measurement by detecting and scanning an object to be measured by a detecting means detects a relative movement of the detecting means 5a and the object to be measured 4a related to scanning detection. The amount is previously set by the moving amount setting means 22a before performing the relative movement, that is, before scanning detection.
或いは、測定者が移動手段6aを作動して検出手段5aと
被測定物4aを相対移動させ、所望の位置で移動手段6aの
作動を停止させることによって相対移動の量を決めてい
た。Alternatively, the measurer operates the moving means 6a to relatively move the detecting means 5a and the object to be measured 4a, and stops the operation of the moving means 6a at a desired position to determine the amount of relative movement.
［発明が解決しようとする課題］ 測定装置1aは第３図に示すように、移動手段6aによっ
ておこなわれる検出手段2aと被測定物4aの相対移動の量
を、制御手段12aに信号入力して走査検出前に設定して
おこなう構成であった。このため、例えば設定した移動
の量が50mmであるのに対し被測定物の距離が48mmといっ
たように、その設定した移動の量が被測定物4aの検出走
査される量より大きい場合では、被測定物4aを越えて検
出手段5aが走査してしまうという問題が生じる。[Problems to be Solved by the Invention] As shown in FIG. 3, the measuring device 1a inputs a signal to the control means 12a of the amount of relative movement between the detection means 2a and the DUT 4a performed by the movement means 6a. The configuration was performed before scanning detection. Therefore, when the set amount of movement is larger than the detected and scanned amount of the DUT 4a, for example, the distance of the DUT is 48 mm while the set amount of movement is 50 mm, There arises a problem that the detection means 5a scans beyond the measurement object 4a.
又、被測定物4aの検出走査できる量が不明な測定で
は、予め相対移動の量を設定することをおこなわず、相
対移動させて走査検出をおこない、所望の位置に達した
ら移動手段6aの作動を停止することによって、上記の問
題を解決する方法が考えられる。Further, in the measurement in which the amount that can be detected and scanned by the object to be measured 4a is unknown, the amount of relative movement is not set in advance, relative scanning is performed to perform scanning detection, and when the desired position is reached, the movement means 6a is operated. There is a possible solution to the above problem by stopping.
しかし、走査検出による測定では一般に移動量が一定
である複数個のデータを検出することが多く、移動の量
を検出走査しながら所望の位置で停止することで決めら
れるという方法では、各検出走査の量を一定にとること
ができないという問題があった。殊に、今日のように、
表面粗さ測定、輪郭測定、部分真円度測定等では三次元
的な測定結果が求められ、各測定の走査検出に関わる移
動の量は一定であることがより重要になって来ている。However, in the measurement by scanning detection, generally, a plurality of data whose movement amount is constant is often detected, and in the method of determining the movement amount by stopping at a desired position while performing detection scanning, each detection scanning is performed. There was a problem that the amount of could not be kept constant. Especially like today,
Three-dimensional measurement results are required for surface roughness measurement, contour measurement, partial circularity measurement, and the like, and it is becoming more important that the amount of movement involved in scanning detection in each measurement is constant.
この発明は上記の事情に鑑みてなされたものであり、
検出手段と被測定物を相対移動させ走査検出することで
測定をおこない、検出走査において検出手段が被測定物
を越えて走査することがなく、又複数個のデータを取る
際には各データの走査検出に関わる移動距離を簡便に一
定にとることができる測定装置を提供するものである。The present invention has been made in view of the above circumstances,
Measurement is performed by moving the detection means and the object to be measured relative to each other to perform scanning detection, the detection means does not scan over the object to be measured in detection scanning, and when a plurality of data are taken, each data An object of the present invention is to provide a measuring device that can easily keep a constant moving distance related to scanning detection.
［課題を解決するための手段］ この発明は、走査検出するように検出手段と被測定物
を相対移動させ、所望の位置でその移動を停止させた際
に、その移動の量が記憶される記憶手段を備えて構成し
た測定装置である。[Means for Solving the Problem] According to the present invention, the amount of movement is stored when the detection means and the object to be measured are relatively moved so as to perform scanning detection and the movement is stopped at a desired position. It is a measuring device configured to include storage means.
その詳細な構成は、被測定物を載置する載置部材と、
被測定物を所定方向へ検出走査する検出手段と、前記検
出手段をその走査方向に移動可能な移動手段と、前記検
出手段からの信号を演算処理する演算手段と、前記演算
手段の演算結果を表示する表示手段と、を備えた測定装
置において、前記載置部材を前記移動手段の移動方向と
略直交方向へ予め設定された量だけを平行移動可能な載
置移動手段と、前記検出手段の移動手段をマニュアル作
動させた際にその作動量を記憶する記憶手段と、前記載
置移動手段を予め設定した移動距離だけを作動させた場
合に、前記記憶手段に記憶された作動量だけを、前記移
動手段に作動させるように制御する制御手段と、前記検
出手段からの信号を演算処理する演算手段と、演算手段
の演算結果を表示する表示手段が備えられてなる測定装
置である。The detailed configuration is a mounting member for mounting an object to be measured,
The detecting means for detecting and scanning the object to be measured in a predetermined direction, the moving means capable of moving the detecting means in the scanning direction, the calculating means for calculating the signal from the detecting means, and the calculation result of the calculating means. In a measuring device including display means for displaying, the placing member which can move the placing member in parallel in a direction substantially orthogonal to the moving direction of the moving means by a preset amount, and the detecting means. When the moving means is manually operated, the storage means stores the operating amount, and when the placement moving means is operated only by a preset moving distance, only the operating amount stored in the storing means, The measuring device is provided with control means for controlling the moving means to operate, arithmetic means for arithmetically processing a signal from the detecting means, and display means for displaying an arithmetic result of the arithmetic means.
［作用］ ある測定の走査検出に関わる、検出手段と被測定物の
相対移動の量は、まず被測定物に対し一走査を行って移
動手段の移動量（検出手段の走査量）を記憶手段に記憶
させ、それ以降の測定において載置移動手段を予め設定
した移動距離だけを作動させて測定位置を変えた場合
に、記憶手段に記憶される移動量だけ移動手段を作動さ
せることができる。[Operation] Regarding the amount of relative movement of the detection means and the object to be measured relating to the scanning detection of a certain measurement, first, one scan is performed on the object to be measured and the movement amount of the moving means (scanning amount of the detecting means) is stored in the memory means When the mounting moving means is operated only by a preset moving distance and the measurement position is changed in the subsequent measurement, the moving means can be operated by the moving amount stored in the storing means.
［実施例］ この発明を、第１〜２図に示す実施例に基づき詳述す
る。しかし、この実施例によってこの発明が限定される
ものではない。Embodiments The present invention will be described in detail based on the embodiments shown in FIGS. However, the present invention is not limited to this embodiment.
表面粗さを測定する測定装置１は第１〜２図に示すよ
うに、基台２と、基台２に垂直に立設された支柱３と、
検出手段５と、検出手段５を前後方向（矢印Ａ方向）に
移動させるための移動手段６と、移動手段６の作動の量
である移動距離を記憶する記憶手段７と、被測定物４を
載置し、その状態で被測定物４を検出手段５の移動方向
と水平垂直方向（矢印Ｂ方向）に移動させ得る載置移動
手段８と、移動手段６を上下方向（矢印Ｃ方向）にスラ
イド可能に保持するスライド手段９と、検出手段５から
の信号を演算処理する演算手段10と、演算手段10の算出
した結果を表示する表示手段11と、移動手段６、記憶手
段７、載置移動手段８、スライド手段９、演算手段10、
表示手段11等の制御をおこなう制御手段12が備えられて
いる。As shown in FIGS. 1 and 2, a measuring device 1 for measuring surface roughness includes a base 2 and a support 3 vertically provided on the base 2.
The detecting means 5, the moving means 6 for moving the detecting means 5 in the front-back direction (direction of arrow A), the storing means 7 for storing the moving distance which is the amount of operation of the moving means 6, and the DUT 4. Placement and movement means 8 for placing and moving the DUT 4 in the horizontal and vertical direction (arrow B direction) with respect to the movement direction of the detection means 5 in that state, and the movement means 6 in the vertical direction (arrow C direction). Sliding means 9 for slidably holding, arithmetic means 10 for arithmetically processing the signal from the detecting means 5, display means 11 for displaying the result calculated by the arithmetic means 10, moving means 6, storage means 7, and placement. Moving means 8, sliding means 9, computing means 10,
A control means 12 for controlling the display means 11 and the like is provided.
基台２の前面は、測定装置１をマニュアル及び一部自
動で操作するための操作パネル13になっている。基台２
の上部には、被測定物（図示省略）や載置移動手段８を
搭載するための定盤14が配設されている。The front surface of the base 2 is an operation panel 13 for operating the measuring apparatus 1 manually and partially automatically. Base 2
A platen 14 for mounting an object to be measured (not shown) and the mounting / moving means 8 is disposed on the upper part of the table.
検出手段５は、走査して被測定物４の表面粗さを接触
式に検出するものである。The detection means 5 scans and detects the surface roughness of the DUT 4 in a contact type.
移動手段６は、検出手段ホルダ15、モータ、ボールネ
ジ、スライダ、ガイド（以上図示省略）等を備え、検出
手段５を矢印Ａ方向に移動させるものである。移動手段
６には、移動量、つまり移動手段６の作動の量を光学式
に検出する作動量検出手段16が備えられている。The moving means 6 includes a detecting means holder 15, a motor, a ball screw, a slider, a guide (not shown), and the like, and moves the detecting means 5 in the direction of arrow A. The moving means 6 is provided with an operating amount detecting means 16 for optically detecting the moving amount, that is, the operating amount of the moving means 6.
記憶手段７は、作動量検出手段16からの信号を受け、
移動手段６が作動した量を記憶するものである。The storage means 7 receives the signal from the operation amount detection means 16,
The amount of movement of the moving means 6 is stored.
載置移動手段８は、モータ、ボールネジ、スライダ、
ガイド（以上、図示省略）等を備え、ベース17に対して
載置部材18が矢印Ｂ方向に所望の量だけ移動できる構成
になっている。The placement moving means 8 includes a motor, a ball screw, a slider,
A guide (above, not shown) and the like are provided, and the mounting member 18 can be moved with respect to the base 17 in the direction of arrow B by a desired amount.
スライド手段９は、支柱３、ボールネジ19、モータ
（図示省略）、連結部材20等を備え、移動手段６を矢印
Ｃ方向にスライドさせるものである。The slide means 9 includes a column 3, a ball screw 19, a motor (not shown), a connecting member 20, etc., and slides the moving means 6 in the direction of arrow C.
演算手段10は、検出手段５からの信号を制御手段12の
指令に基づき所定の演算処理をおこなうものである。The calculation means 10 performs a predetermined calculation process on the signal from the detection means 5 based on a command from the control means 12.
表示手段11は、演算手段10からの信号を受けて演算結
果を表示するものである。また、表示手段11は、操作パ
ネル13及びマウス21で操作信号を制御手段12に入力した
際に、その内容を表示するものである。The display means 11 receives a signal from the calculation means 10 and displays the calculation result. Further, the display means 11 displays the contents when an operation signal is input to the control means 12 with the operation panel 13 and the mouse 21.
以下において、測定装置１の使用を説明する。 In the following, the use of the measuring device 1 will be explained.
まず、検出手段５の検出先端部の下方に位置するよう
にして、被測定物４を載置移動手段８に載置する。First, the DUT 4 is placed on the placement moving means 8 so as to be positioned below the detection tip of the detection means 5.
次に、スライド手段９を作動させて検出手段５を矢印
Ｃ下方向にスライドさせると、検出手段５が被測定物４
に接触する位置に至ってスライド手段９は停止する。Next, when the detecting means 5 is slid in the downward direction of the arrow C by actuating the slide means 9, the detecting means 5 causes the object to be measured 4 to move.
The slide means 9 stops at the position where the slide means 9 comes into contact with.
ここで、操作パネル13を操作して移動手段６を矢印Ａ
後方向に移動させて走査検出を行う。走査検出している
検出手段５が被測定物４に対して所望の位置に至った
ら、移動手段６の作動を停止する。この走査検出の際、
作動量検出手段16は、検出手段５の検出走査距離、つま
り移動手段６の作動の量を検出する。更に、移動手段６
が作動を停止すると、移動手段６の作動の量が記憶手段
７に記憶される。Here, the operation panel 13 is operated to move the moving means 6 by the arrow A.
Scanning is carried out by moving it backward. When the detecting means 5 which is performing the scanning detection reaches a desired position with respect to the DUT 4, the operation of the moving means 6 is stopped. When this scan is detected,
The operation amount detecting means 16 detects the detection scanning distance of the detecting means 5, that is, the amount of operation of the moving means 6. Furthermore, the moving means 6
When the operation of the moving means 6 is stopped, the amount of operation of the moving means 6 is stored in the storage means 7.
続いて、連続測定をおこなうようにマウス21を操作し
て制御手段12に信号を送る。制御手段12は移動手段６
に、検出手段５を矢印Ａ前方向に記憶手段７に記憶され
た作動の量だけを移動させるための信号を出力する。Then, the mouse 21 is operated to send a signal to the control means 12 so as to perform continuous measurement. The control means 12 is the moving means 6
Then, a signal for moving the detecting means 5 in the forward direction of the arrow A by the amount of actuation stored in the storing means 7 is output.
移動手段６が作動して検出手段５を矢印Ａ前方向に移
動し終わると、制御手段12は載置移動手段８に矢印Ｂ前
方向に予め設定した移動距離だけ作動する信号を出力す
る。When the moving means 6 is actuated and the detecting means 5 has finished moving in the front direction of the arrow A, the control means 12 outputs to the placement moving means 8 a signal for operating a predetermined moving distance in the front direction of the arrow B.
載置移動手段８が作動してベース17に対して載置部材
18が矢印Ｂ前方向に前記設定距離だけ移動し終わると、
制御手段12は移動手段６に記憶手段に記憶されている作
動の量だけ作動して検出手段５を矢印Ａ後方向に移動す
るための信号を出力する。移動手段６は作動して、検出
手段５は最初の走査検出と同じ距離だけ走査検出し、そ
の検出結果を演算手段10に信号で送る。The mounting moving means 8 operates to mount the mounting member on the base 17.
When 18 has finished moving in the direction of arrow B by the set distance,
The control means 12 operates the moving means 6 by the amount of the operation stored in the storage means and outputs a signal for moving the detecting means 5 in the rearward direction of the arrow A. The moving means 6 operates, the detecting means 5 scans and detects the same distance as the first scan detection, and sends the detection result to the arithmetic means 10 as a signal.
この後、検出手段５は、移動手段６及び載置移動手段
８の作動によって、初めに設定した距離を予め設定した
回数だけ被測定物４を走査検出し、測定結果を演算手段
10に出力する。After that, the detecting means 5 scans and detects the object to be measured 4 a preset number of times at the initially set distance by the operation of the moving means 6 and the placement moving means 8, and calculates the measurement result.
Output to 10.
測定者は検出手段５の検出が終了すると、マウス21を
操作し、所望に応じて、記憶手段７に記憶されている記
憶のクリア、演算手段10において検出手段５からの検出
結果を所望通りの演算処理、演算結果の表示手段11への
表示及びクリア等をおこなうとよい。Upon completion of detection by the detecting means 5, the measurer operates the mouse 21 to clear the memory stored in the storing means 7 as desired, and the calculating means 10 obtains the detection result from the detecting means 5 as desired. It is advisable to perform calculation processing, display of calculation results on the display means 11, clearing, and the like.
上述した走査検出において、第一回目に走査検出しな
がら検出手段５の走査させるべき距離を決めると、第二
回目以降の検出手段５の走査検出は走査させるべき同じ
距離だけを走査できることにより、被測定物を越えて検
出手段５を走査させる畏れがなく、又、得られる測定結
果は走査検出の距離が一定であって取り扱いが容易とな
っている。In the above-mentioned scanning detection, if the distance to be scanned by the detecting means 5 is determined while the first scanning is being detected, the scanning detection of the detecting means 5 after the second scanning can scan only the same distance to be scanned. There is no fear of scanning the detection means 5 over the object to be measured, and the obtained measurement result has a constant scanning detection distance and is easy to handle.
測定手段１では移動手段６が検出手段５を移動する構
成になっているが、被測定物４の側が移動する構成、検
出手段５と被測定物４が共に移動する構成であってもよ
い。Although the moving means 6 moves the detecting means 5 in the measuring means 1, the measuring means 4 may move on the side of the DUT 4, or the detecting means 5 and the measuring object 4 may move together.
測定手段１は表面粗さを測定する構成であるが、輪郭
測定、部分真円度測定等であってもよい。The measuring means 1 is configured to measure surface roughness, but may be contour measurement, partial roundness measurement, or the like.
測定手段１は移動手段６が、移動距離を設定するため
の最初の検出走査は低速で、２回目以降の検出走査は高
速で作動する構成であってもよい。The measuring unit 1 may be configured such that the moving unit 6 operates at a low speed for the first detection scan for setting the moving distance and at a high speed for the second and subsequent detection scans.
［発明の効果］ この発明によれば、被測定物を所定方向へ検出走査す
る検出手段と、検出手段を所定の走査方向に移動可能な
移動手段と、検出手段からの信号を演算処理する演算手
段と、演算手段の演算結果を表示する表示手段と、を設
け、載置部材を移動手段の移動方向と略直交方向へ予め
設定された量だけを平行移動可能な載置移動手段と、検
出手段の移動手段をマニュアル作動させた際にその作動
量を記憶する記憶手段と、前記載置移動手段を予め設定
した移動量だけを作動させた場合に、前記記憶手段に記
憶された作動量だけを、前記移動手段に作動させるよう
に制御する制御手段と、を備えている。従って、一走査
によって移動手段の作動量を一度記憶手段に記憶させて
しまえば、検出手段が被測定物を越えて走査することは
ない。また、本発明は一走査終了毎に載置移動手段は予
め設定された量だけ移動して載置部材を平行移動させ、
走査位置を変更した後に検出走査を行う構成である。従
って、同一被測定物の異なる走査位置において測定条件
のほぼ一致した走査データをとることができ、一被測定
物に対し走査量が一定である複数個のデータを検出する
ことが可能となる。[Effects of the Invention] According to the present invention, the detecting means for detecting and scanning the object to be measured in the predetermined direction, the moving means capable of moving the detecting means in the predetermined scanning direction, and the arithmetic operation for processing the signal from the detecting means. Means and a display means for displaying a calculation result of the calculating means, and the placement moving means capable of moving the placement member in parallel in a direction substantially orthogonal to the moving direction of the moving means by a preset amount, and detecting Storage means for storing the operation amount when the moving means of the means is manually operated, and only the operation amount stored in the storage means when the placement moving means is operated by a preset movement amount. And control means for controlling the moving means to operate. Therefore, once the operation amount of the moving means is stored in the storage means by one scanning, the detecting means does not scan beyond the measured object. Further, according to the present invention, the placement moving means moves a preset amount every time one scanning is completed to move the placement member in parallel,
This is a configuration in which detection scanning is performed after changing the scanning position. Therefore, it is possible to obtain scan data in which the measurement conditions are substantially the same at different scanning positions of the same measured object, and it is possible to detect a plurality of data with a constant scanning amount for one measured object.
第１図はこの発明の一実施例を示す斜視図、第２図はこ
の実施例の構成説明図、第３図は従来例の第２図相当図
である。 １……測定装置、 ２……基台、３……支柱、 ４……非測定物、５……検出手段、 ６……移動手段、７……記憶手段、 ８……載置移動手段、９……スライド手段、 10……演算手段、11……表示手段、 12……演算手段、13……走査パネル、 21……マウス。FIG. 1 is a perspective view showing an embodiment of the present invention, FIG. 2 is a configuration explanatory view of this embodiment, and FIG. 3 is a view corresponding to FIG. 2 of a conventional example. 1 ... Measuring device, 2 ... Base, 3 ... Post, 4 ... Non-measuring object, 5 ... Detecting means, 6 ... Moving means, 7 ... Storage means, 8 ... Placement moving means, 9 ... slide means, 10 ... computing means, 11 ... display means, 12 ... computing means, 13 ... scanning panel, 21 ... mouse.
Claims (1)
予め設定された量だけを平行移動可能な載置移動手段
と、 前記検出手段の移動手段をマニュアル作動させた際にそ
の作動量を記憶する記憶手段と、 前記載置移動手段を予め設定した移動距離だけを作動さ
せた場合に、前記記憶手段に記憶された作動量だけを、
前記移動手段に作動させるように制御する制御手段と、 が備えられてなる測定装置。1. A mounting member for mounting an object to be measured, a detecting means for detecting and scanning the object to be measured in a predetermined direction, a moving means capable of moving the detecting means in the scanning direction, and the detecting means. In a measuring device comprising: a calculation means for calculating the signal of the calculation means; and a display means for displaying the calculation result of the calculation means, the placing member is preset in a direction substantially orthogonal to the moving direction of the moving means. Placement moving means that can move only the amount in parallel, storage means that stores the amount of operation when the moving means of the detecting means is manually operated, and the moving distance that the placement moving means described above operates only in advance. In this case, only the operation amount stored in the storage means,
A measuring device comprising: a control unit that controls the moving unit to operate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2298321A JP2516471B2 (en) | 1990-11-02 | 1990-11-02 | measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2298321A JP2516471B2 (en) | 1990-11-02 | 1990-11-02 | measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04169809A JPH04169809A (en) | 1992-06-17 |
| JP2516471B2 true JP2516471B2 (en) | 1996-07-24 |
Family
ID=17858140
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2298321A Expired - Lifetime JP2516471B2 (en) | 1990-11-02 | 1990-11-02 | measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2516471B2 (en) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5658606A (en) * | 1979-10-19 | 1981-05-21 | Mitsutoyo Mfg Co Ltd | Iterative measurement |
| JPS58198710A (en) * | 1982-05-13 | 1983-11-18 | Nippon Sheet Glass Co Ltd | Automatic checking device |
| JPS60174807U (en) * | 1984-04-28 | 1985-11-19 | 株式会社東芝 | Profile meter trolley runaway prevention device |
| JPS63238507A (en) * | 1987-03-27 | 1988-10-04 | Fujita Corp | Measuring method for cracking |
| JPS63304112A (en) * | 1987-06-04 | 1988-12-12 | Mitsubishi Electric Corp | Shape measuring instrument |
| JPH074492Y2 (en) * | 1989-02-03 | 1995-02-01 | 工業技術院長 | Scanning tunneling microscope |
-
1990
- 1990-11-02 JP JP2298321A patent/JP2516471B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04169809A (en) | 1992-06-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3629461B2 (en) | How to enter commands to switch dimension measurement columns and their measurement modes | |
| JPS61105411A (en) | Measuring method of multidimensional measuring machine | |
| JP7272743B2 (en) | Control method for surface texture measuring device | |
| EP2312263A1 (en) | Offset Amount Calibrating Method and Surface Profile Measuring Machine | |
| CN107076552B (en) | Method and coordinate measuring machine for single-point scanning of workpieces | |
| JPH0339241B2 (en) | ||
| JPS60122304A (en) | Automatic size measuring device | |
| JP2005121370A (en) | Surface shape measuring apparatus and method | |
| JP2516471B2 (en) | measuring device | |
| JP2000039302A (en) | Profile measuring instrument | |
| JPH05107051A (en) | Measuring machine | |
| JP2950660B2 (en) | Surface roughness measuring device | |
| JP2007333442A (en) | Shape measurement method | |
| JPH0821722A (en) | Method and equipment for measuring shape | |
| JP2000310591A (en) | Static friction tester and method for measuring coefficient of static friction | |
| JPH0587557A (en) | Three dimensional measurement device | |
| JPH0682218A (en) | Optical type measuring apparatus | |
| KR100235769B1 (en) | Apparatus for determining acceptability of an object by three dimensional comparision | |
| JPS61213625A (en) | Generator for measurement signal | |
| JPH02251717A (en) | Surface-roughness measuring apparatus | |
| JP3250817B2 (en) | Leveling device | |
| JP2006119092A (en) | Paralleling device and paralleling method | |
| JPH04169818A (en) | Measuring apparatus | |
| JPH0626841Y2 (en) | Thin film strength measuring device | |
| JPH04168304A (en) | Determining apparatus for position of origin for image processing |