JP2024006017A - Temperature control device and inspection device - Google Patents
Temperature control device and inspection device Download PDFInfo
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- 238000007689 inspection Methods 0.000 title claims description 45
- 239000012530 fluid Substances 0.000 claims abstract description 190
- 239000003507 refrigerant Substances 0.000 claims abstract description 35
- 238000005057 refrigeration Methods 0.000 claims abstract description 31
- 238000011144 upstream manufacturing Methods 0.000 claims description 77
- 230000007246 mechanism Effects 0.000 claims description 30
- 230000007613 environmental effect Effects 0.000 abstract description 7
- 230000001629 suppression Effects 0.000 abstract 1
- 238000012360 testing method Methods 0.000 description 14
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 10
- 239000012267 brine Substances 0.000 description 10
- 239000007788 liquid Substances 0.000 description 10
- HPALAKNZSZLMCH-UHFFFAOYSA-M sodium;chloride;hydrate Chemical compound O.[Na+].[Cl-] HPALAKNZSZLMCH-UHFFFAOYSA-M 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 7
- 238000011084 recovery Methods 0.000 description 6
- 238000001816 cooling Methods 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
- 239000003570 air Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 4
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 229920002545 silicone oil Polymers 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B1/00—Compression machines, plants or systems with non-reversible cycle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/06—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point using expanders
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Other Air-Conditioning Systems (AREA)
Abstract
Description
本発明の実施の形態は、温度制御装置及び検査装置に関する。 Embodiments of the present invention relate to a temperature control device and an inspection device.
環境保護の観点から自然冷媒を用いる冷凍サイクル装置が注目されている。自然冷媒は、オゾン層破壊係数及び地球温暖化係数が一般的なフロン系の冷媒に対して極めて低い。そのため、自然冷媒は、環境保護の観点で極めて有用である。 Refrigeration cycle devices that use natural refrigerants are attracting attention from the perspective of environmental protection. Natural refrigerants have extremely low ozone layer depletion potential and global warming potential compared to common fluorocarbon-based refrigerants. Therefore, natural refrigerants are extremely useful from the viewpoint of environmental protection.
自然冷媒としては、例えば、アンモニア、二酸化炭素、空気、酸素、窒素等が挙げられる。このうちの空気、酸素、窒素は、沸点が極めて低いため、超低温帯での冷却を可能とする。 Examples of natural refrigerants include ammonia, carbon dioxide, air, oxygen, and nitrogen. Among these, air, oxygen, and nitrogen have extremely low boiling points, so they can be cooled at extremely low temperatures.
自然冷媒を用いる冷凍サイクル装置としては、空気を用いる空気冷凍サイクル装置が従来から知られている（例えば、特許文献１）。このような空気冷凍サイクル装置は大型冷凍庫等で既に用いられている。 As a refrigeration cycle device using a natural refrigerant, an air refrigeration cycle device using air is conventionally known (for example, Patent Document 1). Such air refrigeration cycle devices are already used in large freezers and the like.
ＬＳＩやＩＣ等の半導体装置の動作試験を行う際、ハンドラ装置と呼ばれる装置が用いられることがある。一般にハンドラ装置は、半導体装置を冷却及び加熱することが可能であり、これにより、冷却又は加熱された半導体装置の動作試験を可能とする。 2. Description of the Related Art When testing the operation of semiconductor devices such as LSIs and ICs, a device called a handler device is sometimes used. In general, a handler device is capable of cooling and heating a semiconductor device, thereby making it possible to test the operation of the cooled or heated semiconductor device.
従来の一般的なハンドラ装置は、半導体装置を冷却する手段として、ペルチェ素子又はフロン系の冷媒を循環させる冷凍装置を用いていた。 A conventional general handler device uses a Peltier element or a refrigeration device that circulates a fluorocarbon-based refrigerant as a means for cooling a semiconductor device.
しかしながら、ペルチェ素子は、望まれる温度条件によっては耐久性が十分でない場合がある。また、フロン系の冷媒は環境保護の観点で使用を制限されつつある。 However, Peltier elements may not have sufficient durability depending on desired temperature conditions. Furthermore, the use of fluorocarbon-based refrigerants is being restricted from the viewpoint of environmental protection.
また、フロン系の冷媒を循環させる冷凍装置をハンドラ装置で用いる場合、通常、冷凍装置の蒸発器によってブラインを冷却し、冷却したブラインを介して半導体装置を冷却する。そして、このようなハンドラ装置において半導体装置を加熱する場合には、半導体装置の冷却に使用したブラインをヒータによって加熱し、加熱したブラインで半導体装置を加熱する場合がある。しかしながら、冷却されたブラインを加熱して所望の温度まで上昇させる場合、ブラインが所望の温度に到達するまでの時間が長くなる。一方で、冷却用のハンドラ装置とは別に加熱用のハンドラ装置を用いてもよいが、冷却用のハンドラ装置と別の加熱用のハンドラ装置との間での半導体装置の入替に手間がかかる。また、使用機器の占有サイズ及びコストが大きくなり得る。 Furthermore, when a refrigeration device that circulates a fluorocarbon-based refrigerant is used in the handler device, the brine is usually cooled by the evaporator of the refrigeration device, and the semiconductor device is cooled through the cooled brine. When heating a semiconductor device in such a handler device, the brine used to cool the semiconductor device may be heated by a heater, and the semiconductor device may be heated with the heated brine. However, heating the cooled brine to the desired temperature increases the time it takes for the brine to reach the desired temperature. On the other hand, a heating handler device may be used separately from the cooling handler device, but it takes time and effort to replace the semiconductor device between the cooling handler device and another heating handler device. Additionally, the size and cost of the equipment used may increase.
そこで、本発明の課題は、自然冷媒を用いる冷凍サイクル装置を用いることで良好な環境性能を確保しつつ、耐久性を向上できるとともに装置サイズの大型化を抑制できる温度制御装置及び検査装置を提供することである。 Therefore, an object of the present invention is to provide a temperature control device and an inspection device that can improve durability while ensuring good environmental performance by using a refrigeration cycle device that uses a natural refrigerant, and can suppress the increase in device size. It is to be.
本発明の一実施の形態に係る温度制御装置は、圧縮機と、第１熱交換器と、膨張機と、第２熱交換器とを含み、前記圧縮機から流出する自然冷媒が前記第１熱交換器、前記膨張機及び前記第２熱交換器をこの順で通過した後、前記圧縮機に循環し、前記圧縮機と前記膨張機とが共通の駆動軸で連結される冷凍サイクル装置と、前記第１熱交換器に第１流体を流入させる第１側上流流路部と、前記第１熱交換器を通過する前記自然冷媒と熱交換して前記第１熱交換器から流出する前記第１流体を受け入れて通流させる第１側下流流路部と、を含む第１流体通路と、前記第２熱交換器に第２流体を流入させる第２側上流流路部と、前記第２熱交換器を通過する前記自然冷媒と熱交換して前記第２熱交換器から流出する前記第２流体を受け入れて通流させる第２側下流流路部と、を含む第２流体通路と、前記第１側下流流路部から流出する前記第１流体を受け入れて通流させた後、前記第１側上流流路部に流出させることが可能であるとともに、前記第２側下流流路部から流出する前記第２流体を受け入れて通流させた後、前記第２側上流流路部に流出させることが可能な伝熱部材と、を備え、前記伝熱部材を介して温度制御対象を温度制御する。 A temperature control device according to an embodiment of the present invention includes a compressor, a first heat exchanger, an expander, and a second heat exchanger, and the natural refrigerant flowing out from the compressor is supplied to the first heat exchanger. After passing through a heat exchanger, the expander, and the second heat exchanger in this order, the refrigeration cycle device is circulated to the compressor, and the compressor and the expander are connected by a common drive shaft. , a first side upstream flow path section that allows a first fluid to flow into the first heat exchanger; and a first side upstream flow path section that allows a first fluid to flow into the first heat exchanger; a first side downstream flow path section that receives and allows the first fluid to flow therethrough; a second side upstream flow path section that allows the second fluid to flow into the second heat exchanger; a second side downstream flow path section that exchanges heat with the natural refrigerant passing through the second heat exchanger and receives and flows the second fluid flowing out from the second heat exchanger; , the first fluid flowing out from the first side downstream flow path can be received and passed through, and then be allowed to flow out into the first side upstream flow path; a heat transfer member capable of receiving and flowing the second fluid flowing out from the section, and then allowing the second fluid to flow out to the second upstream flow path section, the temperature being controlled via the heat transfer member. to control the temperature.
一実施の形態に係る温度制御装置は、前記第１側下流流路部と前記第１側上流流路部とを接続する第１バイパス流路と、前記第１側下流流路部から前記伝熱部材へ通流する前記第１流体の流量と、前記第１バイパス流路を通流する前記第１流体の流量との割合を調節する第１弁機構と、前記第２側下流流路部と前記第２側上流流路部とを接続する第２バイパス流路と、前記第２側下流流路部から前記伝熱部材へ通流する前記第２流体の流量と、前記第２バイパス流路を通流する前記第２流体の流量との割合を調節する第２弁機構と、を更に備えてもよい。 The temperature control device according to one embodiment includes a first bypass flow path connecting the first side downstream flow path section and the first side upstream flow path section; a first valve mechanism that adjusts the ratio of the flow rate of the first fluid flowing to the heat member and the flow rate of the first fluid flowing through the first bypass flow path; and the second downstream flow path section. and the second side upstream flow path, a flow rate of the second fluid flowing from the second side downstream flow path to the heat transfer member, and the second bypass flow. It may further include a second valve mechanism that adjusts the ratio of the flow rate of the second fluid flowing through the passage.
前記伝熱部材に前記第１流体を通流させる際、前記第２弁機構は、前記伝熱部材における前記第２流体の通流を遮断し、前記第２バイパス流路における前記第２流体の通流を許容し、前記伝熱部材に前記第２流体を通流させる際、前記第１弁機構は、前記伝熱部材における前記第１流体の通流を遮断し、前記第１バイパス流路における前記第１流体の通流を許容してもよい。 When causing the first fluid to flow through the heat transfer member, the second valve mechanism blocks the flow of the second fluid through the heat transfer member and prevents the second fluid from flowing through the second bypass channel. When allowing flow and causing the second fluid to flow through the heat transfer member, the first valve mechanism blocks the flow of the first fluid through the heat transfer member and closes the first bypass flow path. The first fluid may be allowed to flow through the first fluid.
前記伝熱部材には、前記第１側下流流路部から流出する前記第１流体を受け入れて通流させた後、前記第１側上流流路部に流出させる複数の第１伝熱流路部が形成され、複数の前記第１伝熱流路部は、前記第１側下流流路部から分岐するように並列に位置してもよい。 The heat transfer member includes a plurality of first heat transfer flow path sections that receive and flow the first fluid flowing out from the first side downstream flow path section, and then flow out to the first side upstream flow path section. may be formed, and the plurality of first heat transfer flow path portions may be located in parallel so as to branch from the first side downstream flow path portion.
前記伝熱部材には、前記第２側下流流路部から流出する前記第２流体を受け入れて通流させた後、前記第２側上流流路部に流出させる複数の第２伝熱流路部が形成され、複数の前記第２伝熱流路部は、前記第２側下流流路部から分岐するように並列に位置してもよい。 The heat transfer member includes a plurality of second heat transfer flow path sections that receive and flow the second fluid flowing out from the second side downstream flow path section, and then flow out to the second side upstream flow path section. may be formed, and the plurality of second heat transfer flow path portions may be located in parallel so as to branch from the second side downstream flow path portion.
各前記第１伝熱流路部は、蛇行状、渦巻き状、螺旋状、又は流路面積を拡大させる形状の第１側インタフェース部分を含み、各前記第２伝熱流路部は、蛇行状、渦巻き状、螺旋状、又は流路面積を拡大させる形状の第２側インタフェース部分を含み、前記伝熱部材には、複数の温度制御部分が設けられ、複数の前記第１側インタフェース部分のいずれかと複数の前記第２側インタフェース部分のいずれかとが互いに近接して温調源を形成し、前記温調源上の前記伝熱部材の表面に前記温度制御部分が設けられてもよい。 Each of the first heat transfer flow path portions includes a first side interface portion having a meandering shape, a spiral shape, a spiral shape, or a shape that expands the flow path area; the heat transfer member includes a second side interface portion having a shape such as a shape, a spiral shape, or a shape that expands the flow path area; the heat transfer member is provided with a plurality of temperature control portions; may be close to each other to form a temperature control source, and the temperature control portion may be provided on a surface of the heat transfer member on the temperature control source.
また、一実施の形態に係る検査装置は、圧縮機と、第１熱交換器と、膨張機と、第２熱交換器とを含み、前記圧縮機から流出する自然冷媒が前記第１熱交換器、前記膨張機及び前記第２熱交換器をこの順で通過した後、前記圧縮機に循環し、前記圧縮機と前記膨張機とが共通の駆動軸で連結される冷凍サイクル装置と、前記第１熱交換器に第１流体を流入させる第１側上流流路部と、前記第１熱交換器を通過する前記自然冷媒と熱交換して前記第１熱交換器から流出する前記第１流体を受け入れて通流させる第１側下流流路部と、を含む第１流体通路と、前記第２熱交換器に第２流体を流入させる第２側上流流路部と、前記第２熱交換器を通過する前記自然冷媒と熱交換して前記第２熱交換器から流出する前記第２流体を受け入れて通流させる第２側下流流路部と、を含む第２流体通路と、前記第１側下流流路部から流出する前記第１流体を受け入れて通流させた後、前記第１側上流流路部に流出させることが可能であるとともに、前記第２側下流流路部から流出する前記第２流体を受け入れて通流させた後、前記第２側上流流路部に流出させることが可能な伝熱部材と、を備え、保持部材に保持された検査対象物又は前記伝熱部材に保持された検査対象物を前記伝熱部材によって温度制御する。 Further, the inspection device according to one embodiment includes a compressor, a first heat exchanger, an expander, and a second heat exchanger, and the natural refrigerant flowing out from the compressor is transferred to the first heat exchanger. a refrigeration cycle device in which the refrigeration cycle device passes through a heat exchanger, the expander, and the second heat exchanger in this order, and then circulates to the compressor, and the compressor and the expander are connected by a common drive shaft; a first-side upstream flow path section that allows a first fluid to flow into the first heat exchanger; and a first side upstream flow path section that allows the first fluid to flow into the first heat exchanger, and the first fluid that flows out from the first heat exchanger after exchanging heat with the natural refrigerant that passes through the first heat exchanger. a first side downstream flow path section that receives and allows fluid to flow therethrough, a second side upstream flow path section that allows the second fluid to flow into the second heat exchanger, and the second heat exchanger. a second fluid passageway including a second side downstream flow path section that exchanges heat with the natural refrigerant passing through the exchanger and receives and flows the second fluid flowing out from the second heat exchanger; After receiving the first fluid flowing out from the first side downstream flow path section and causing it to flow, it is possible to flow out into the first side upstream flow path section and from the second side downstream flow path section. a heat transfer member capable of receiving and flowing the second fluid flowing out, and then allowing the second fluid to flow out to the second side upstream flow path section; The temperature of the object to be inspected held by the heat member is controlled by the heat transfer member.
本発明によれば、良好な環境性能を確保しつつ、耐久性を向上できるとともに装置サイズの大型化を抑制できる。 According to the present invention, durability can be improved while ensuring good environmental performance, and an increase in device size can be suppressed.
以下、本発明の各実施の形態を説明する。 Embodiments of the present invention will be described below.
＜第１の実施の形態＞
図１は、本発明の第１の実施の形態にかかる検査装置Ｔ１の概略図である。図１に示す検査装置Ｔ１は、自然冷媒を循環させる冷凍サイクル装置１０と、第１流体を通流させる第１流体通路２０と、第２流体を通流させる第２流体通路３０と、第１流体通路２０及び第２流体通路３０に接続される伝熱部材４０と、保持部材５０と、コントローラ１００とを備える。ここで、冷凍サイクル装置１０、第１流体通路２０、第２流体通路３０及び伝熱部材４０は、温度制御装置１を構成している。
<First embodiment>
FIG. 1 is a schematic diagram of an inspection apparatus T1 according to a first embodiment of the present invention. The inspection device T1 shown in FIG. 1 includes a refrigeration cycle device 10 that circulates a natural refrigerant, a first fluid passage 20 that allows a first fluid to flow, a second fluid passage 30 that allows a second fluid to flow, and a first It includes a heat transfer member 40 connected to the fluid passage 20 and the second fluid passage 30, a holding member 50, and a controller 100. Here, the refrigeration cycle device 10, the first fluid passage 20, the second fluid passage 30, and the heat transfer member 40 constitute the temperature control device 1.
検査装置Ｔ１は、保持部材５０に保持された検査対象物６０を伝熱部材４０によって冷却又は加熱し、温度制御を行う。本実施の形態では検査対象物６０が一例としてＬＳＩ、ＩＣ等の電子部品である。検査装置Ｔ１は検査対象物６０を高温域又は低温域に温度制御した状態で検査対象物６０の動作試験を行うことができる。すなわち、本実施の形態に係る検査装置Ｔ１はハンドラ装置を含む検査装置である。ただし、検査対象物６０は特に限られず、本発明に係る検査装置は、検査対象としてウェハを検査するプローバを含む検査装置でもよい。また、本発明に係る検査装置は、テスタ等の各種検査装置も構成し得る。 The inspection device T1 cools or heats the inspection target 60 held by the holding member 50 using the heat transfer member 40, and performs temperature control. In this embodiment, the inspection object 60 is, for example, an electronic component such as an LSI or an IC. The inspection apparatus T1 can perform an operation test on the inspection object 60 while controlling the temperature of the inspection object 60 to a high temperature range or a low temperature range. That is, the testing device T1 according to the present embodiment is a testing device that includes a handler device. However, the inspection object 60 is not particularly limited, and the inspection apparatus according to the present invention may be an inspection apparatus including a prober that inspects a wafer as an inspection object. Further, the inspection device according to the present invention can also constitute various inspection devices such as a tester.
冷凍サイクル装置１０は、本実施の形態では自然冷媒としての空気を循環させる。すなわち、冷凍サイクル装置１０は、空気冷媒サイクル装置である。 In this embodiment, the refrigeration cycle device 10 circulates air as a natural refrigerant. That is, the refrigeration cycle device 10 is an air refrigerant cycle device.
冷凍サイクル装置１０は、圧縮機１１と、第１熱交換器１２と、回収熱交換器１３と、膨張機１４と、第２熱交換器１５とを含む。冷凍サイクル装置１０は、圧縮機１１、第１熱交換器１２、回収熱交換器１３、膨張機１４及び第２熱交換器１５を空気がこの順で循環するように冷媒循環路１６で接続する。空気は、圧縮機１１で圧縮された後、第１熱交換器１２及び回収熱交換器１３で段階的に冷却され、その後、膨張機１４に流入する。その後、空気は膨張機１４で膨張させられて、膨張機１４から流出する。 The refrigeration cycle device 10 includes a compressor 11 , a first heat exchanger 12 , a recovery heat exchanger 13 , an expander 14 , and a second heat exchanger 15 . The refrigeration cycle device 10 connects a compressor 11, a first heat exchanger 12, a recovery heat exchanger 13, an expander 14, and a second heat exchanger 15 with a refrigerant circulation path 16 so that air circulates in this order. . After being compressed by the compressor 11, the air is cooled in stages by the first heat exchanger 12 and the recovery heat exchanger 13, and then flows into the expander 14. Thereafter, the air is expanded by the expander 14 and flows out from the expander 14.
冷凍サイクル装置１０は、膨張機１４で膨張させた空気を例えば－１０℃～－１１０℃までの範囲で降温させて第２熱交換器１５に流入させることが可能となっている。第２熱交換器１５は、第２流体通路３０に接続されている。ここで、第２熱交換器１５は、流入した低温の空気で第２流体通路３０が通流させる第２流体を冷却することが可能となっている。そして、空気は、第２熱交換器１５を通過した後、圧縮機１１に循環する。 The refrigeration cycle device 10 is capable of lowering the temperature of the air expanded by the expander 14 to, for example, a range of -10° C. to -110° C., and allowing the air to flow into the second heat exchanger 15. The second heat exchanger 15 is connected to the second fluid passage 30. Here, the second heat exchanger 15 is capable of cooling the second fluid flowing through the second fluid passage 30 with the low-temperature air that has flowed therein. The air then circulates to the compressor 11 after passing through the second heat exchanger 15.
第２熱交換器１５から流出した空気は、詳しくは、圧縮機１１に循環する前に、回収熱交換器１３で第１熱交換器１２を流出した空気と熱交換する。これにより、膨張機１４に流入する前の空気が、第１熱交換器１２及び回収熱交換器１３で段階的に冷却される。一方で、第２熱交換器１５から流出した空気は、回収熱交換器１３で昇温された後、圧縮機１１に流入する。 Specifically, the air flowing out of the second heat exchanger 15 exchanges heat with the air flowing out of the first heat exchanger 12 in the recovery heat exchanger 13 before being circulated to the compressor 11 . Thereby, the air before flowing into the expander 14 is cooled in stages by the first heat exchanger 12 and the recovery heat exchanger 13. On the other hand, the air flowing out from the second heat exchanger 15 is heated in the recovery heat exchanger 13 and then flows into the compressor 11.
圧縮機１１は、流入した空気を圧縮した後、第１熱交換器１２に送る。圧縮機１１は、圧縮した空気を例えば８０℃以上に昇温させて第１熱交換器１２に流入させることが可能となっている。第１熱交換器１２は、第１流体通路２０に接続されている。ここで、第１熱交換器１２は、圧縮機１１から流出した高温の空気と第１流体とを熱交換させる。これにより、第１熱交換器１２は空気を冷却できる。また、第１流体を、第１熱交換器１２に流入した高温の空気によって加熱できる。 The compressor 11 compresses the air that has flowed in, and then sends it to the first heat exchanger 12 . The compressor 11 is capable of heating compressed air to, for example, 80° C. or higher and causing it to flow into the first heat exchanger 12 . The first heat exchanger 12 is connected to the first fluid passage 20 . Here, the first heat exchanger 12 exchanges heat between the high temperature air flowing out from the compressor 11 and the first fluid. Thereby, the first heat exchanger 12 can cool the air. Furthermore, the first fluid can be heated by the high temperature air that has flowed into the first heat exchanger 12.
また、圧縮機１１と膨張機１４とは、共通のモータ１７の駆動軸１７Ａで連結されている。これにより、駆動軸１７Ａの回転によって圧縮機１１と膨張機１４とが連動して回転する。 Further, the compressor 11 and the expander 14 are connected by a common drive shaft 17A of a motor 17. Thereby, the compressor 11 and the expander 14 are rotated in conjunction with the rotation of the drive shaft 17A.
なお、本実施の形態では冷凍サイクル装置１０が空気冷媒サイクル装置であるが、その他の形式の装置でもよい。冷凍サイクル装置１０は、自然冷媒として、窒素などを用いる冷凍サイクル装置でもよい。 In this embodiment, the refrigeration cycle device 10 is an air refrigerant cycle device, but other types of devices may be used. The refrigeration cycle device 10 may be a refrigeration cycle device that uses nitrogen or the like as a natural refrigerant.
第１流体通路２０は、第１側上流流路部２１と、第１側下流流路部２２とを含む。第１熱交換器１２は、図示しない第１流体が流入する流入口と、第１流体を流出させる流出口とを含む。第１側上流流路部２１の下流端開口は第１熱交換器１２の流入口に接続され、第１側下流流路部２２の上流端開口は第１熱交換器１２の流出口に接続されている。また、第１流体通路２０は、第１側上流流路部２１の上流端開口を伝熱部材４０に形成される流路部（後述の第１伝熱流路部４１）の下流端開口に接続し、第１側下流流路部２２の下流端開口を伝熱部材４０に形成される上記流路部の上流端開口に接続する。これにより、第１流体通路２０は伝熱部材４０と協働して閉じ回路を形成し、伝熱部材４０を介して第１流体を循環させる。 The first fluid passage 20 includes a first upstream flow path section 21 and a first downstream flow path section 22 . The first heat exchanger 12 includes an inlet into which a first fluid (not shown) flows, and an outlet through which the first fluid flows out. The downstream end opening of the first side upstream passage section 21 is connected to the inlet of the first heat exchanger 12, and the upstream end opening of the first side downstream passage section 22 is connected to the outlet of the first heat exchanger 12. has been done. Further, the first fluid passage 20 connects the upstream end opening of the first side upstream flow passage part 21 to the downstream end opening of a flow passage part (first heat transfer passage part 41 to be described later) formed in the heat transfer member 40. Then, the downstream end opening of the first side downstream flow path portion 22 is connected to the upstream end opening of the flow path portion formed in the heat transfer member 40 . Thereby, the first fluid passage 20 cooperates with the heat transfer member 40 to form a closed circuit, and the first fluid is circulated through the heat transfer member 40.
第１流体通路２０が伝熱部材４０を介して第１流体を循環させる場合、第１側上流流路部２１は、伝熱部材４０から流出した第１流体を通流させて第１熱交換器１２に流入させる。第１側下流流路部２２は、第１熱交換器１２で自然冷媒と熱交換した第１流体を受け入れて通流させる。第１側下流流路部２２には、第１側ポンプ２２Ａが設けられる。第１側ポンプ２２Ａは、第１流体を通流させるための駆動力を発生させる。なお、第１側ポンプ２２Ａの設置位置は特に限られず、例えば第１側上流流路部２１に第１側ポンプ２２Ａが設けられてもよい。 When the first fluid passage 20 circulates the first fluid via the heat transfer member 40, the first side upstream passage section 21 allows the first fluid flowing out from the heat transfer member 40 to flow therethrough for first heat exchange. Flow into the vessel 12. The first side downstream flow path section 22 receives the first fluid that has undergone heat exchange with the natural refrigerant in the first heat exchanger 12 and causes it to flow therethrough. The first downstream flow path section 22 is provided with a first pump 22A. The first side pump 22A generates a driving force for flowing the first fluid. Note that the installation position of the first side pump 22A is not particularly limited, and the first side pump 22A may be provided in the first side upstream passage section 21, for example.
また、本実施の形態では、第１側上流流路部２１と第１側下流流路部２２とを接続する第１バイパス流路２４と、第１側下流流路部２２から伝熱部材４０へ通流する第１流体の流量と、第１バイパス流路２４を通流する第１流体の流量との割合を調節する第１弁機構２６と、が設けられている。 In addition, in the present embodiment, the first bypass flow path 24 connects the first side upstream flow path section 21 and the first side downstream flow path section 22, and the heat transfer member 40 from the first side downstream flow path section 22 is provided. A first valve mechanism 26 is provided that adjusts the ratio of the flow rate of the first fluid flowing through the first bypass flow path 24 and the flow rate of the first fluid flowing through the first bypass flow path 24 .
第１バイパス流路２４は、詳しくは、第１側下流流路部２２における第１側ポンプ２２Ａの下流側の部分に接続されている。より詳しくは、本実施の形態における第１弁機構２６は、第１側三方弁２７を含んで構成される。第１側三方弁２７は、第１側第１ポート２７１と、第１側第２ポート２７２と、第１側第３ポート２７３とを含む。そして、第１側第１ポート２７１から第１側第２ポート２７２に至る流路は、第１側上流流路部２１の一部を構成している。そして、第１バイパス流路２４は、その上流端開口を第１側第３ポート２７３に接続し、その下流端開口を第１側下流流路部２２に接続している。 Specifically, the first bypass flow path 24 is connected to a downstream portion of the first side pump 22A in the first side downstream flow path portion 22. More specifically, the first valve mechanism 26 in this embodiment includes a first side three-way valve 27. The first side three-way valve 27 includes a first side first port 271, a first side second port 272, and a first side third port 273. The flow path from the first side first port 271 to the first side second port 272 constitutes a part of the first side upstream flow path section 21. The first bypass flow path 24 has its upstream end opening connected to the first side third port 273 and its downstream end opening connected to the first side downstream flow path portion 22 .
第１側三方弁２７は、第１側第１ポート２７１で受け入れられて第１側第２ポート２７２から流出する第１流体の流量と、第１側第１ポート２７１で受け入れられて第１側第３ポート２７３から流出する第１流体の流量との割合を調節できる。これにより、第１側下流流路部２２から伝熱部材４０へ通流する第１流体の流量と、第１バイパス流路２４を通流する第１流体の流量との割合を調節できる。 The first side three-way valve 27 controls the flow rate of the first fluid that is received at the first side first port 271 and flows out from the first side second port 272, and the flow rate of the first fluid that is received at the first side first port 271 and flows out from the first side second port 272. The ratio of the flow rate of the first fluid flowing out from the third port 273 can be adjusted. Thereby, the ratio of the flow rate of the first fluid flowing from the first side downstream flow path part 22 to the heat transfer member 40 and the flow rate of the first fluid flowing through the first bypass flow path 24 can be adjusted.
第１側三方弁２７が第１側第１ポート２７１と第１側第２ポート２７２とを接続し、第１側第１ポート２７１と第１側第３ポート２７３とを遮断した場合には、第１熱交換器１２から流出した第１流体は、伝熱部材４０を介して第１熱交換器１２に戻る。第１側三方弁２７が第１側第１ポート２７１と第１側第２ポート２７２とを遮断し、第１側第１ポート２７１と第１側第３ポート２７３とを接続した場合には、第１熱交換器１２から流出した第１流体は、伝熱部材４０を通過せず、第１バイパス流路２４を通って第１熱交換器１２に戻る。ここで、第１側上流流路部２１における第１バイパス流路２４の接続位置の上流側には第１側逆止弁２８が設けられる。第１側逆止弁２８は、第１バイパス流路２４から第１側上流流路部２１に流入した第１流体が逆流して伝熱部材４０に流入することを制限する。なお、第１弁機構２６は第１側三方弁２７を含んで構成されるが、２つ以上の二方弁を組み合わせた構成でもよい。 When the first side three-way valve 27 connects the first side first port 271 and the first side second port 272 and blocks the first side first port 271 and the first side third port 273, The first fluid flowing out of the first heat exchanger 12 returns to the first heat exchanger 12 via the heat transfer member 40 . When the first side three-way valve 27 blocks the first side first port 271 and the first side second port 272 and connects the first side first port 271 and the first side third port 273, The first fluid flowing out of the first heat exchanger 12 does not pass through the heat transfer member 40 but returns to the first heat exchanger 12 through the first bypass passage 24 . Here, a first side check valve 28 is provided upstream of the connection position of the first bypass flow path 24 in the first side upstream flow path portion 21 . The first side check valve 28 restricts the first fluid that has flowed into the first side upstream flow path section 21 from the first bypass flow path 24 from flowing backward into the heat transfer member 40 . Although the first valve mechanism 26 is configured to include a first side three-way valve 27, it may also be configured by combining two or more two-way valves.
第１流体は、一例として水である。ただし、第１流体は特に限られるものではなく、例えばブラインでもよい。ブラインはエーテル系液体でもよいし、フッ素系液体でもよい。また、第１流体はシリコーンオイルでもよい。また、第１流体は空気、窒素、アルゴン等の気体でもよい。 The first fluid is water, for example. However, the first fluid is not particularly limited, and may be brine, for example. The brine may be an ether liquid or a fluorine liquid. Additionally, the first fluid may be silicone oil. Further, the first fluid may be a gas such as air, nitrogen, or argon.
第２流体通路３０は、第２側上流流路部３１と、第２側下流流路部３２とを含む。第２熱交換器１５は、図示しない第２流体が流入する流入口と、第２流体を流出させる流出口とを含む。第２側上流流路部３１の下流端開口は第２熱交換器１５の流入口に接続され、第２側下流流路部３２の上流端開口は第２熱交換器１５の流出口に接続されている。また、第２流体通路３０は、第２側上流流路部３１の上流端開口を伝熱部材４０に形成される流路部（後述の第２伝熱流路部４２）の下流端開口に接続し、第２側下流流路部３２の下流端開口を伝熱部材４０に形成される上記流路部の上流端開口に接続する。これにより、第２流体通路３０は伝熱部材４０と協働して閉じ回路を形成し、伝熱部材４０を介して第２流体を循環させる。 The second fluid passage 30 includes a second upstream flow path section 31 and a second downstream flow path section 32 . The second heat exchanger 15 includes an inlet into which a second fluid (not shown) flows, and an outlet through which the second fluid flows out. The downstream end opening of the second side upstream flow path section 31 is connected to the inlet of the second heat exchanger 15, and the upstream end opening of the second side downstream flow path section 32 is connected to the outflow port of the second heat exchanger 15. has been done. Further, the second fluid passage 30 connects the upstream end opening of the second side upstream flow passage part 31 to the downstream end opening of a flow passage part (second heat transfer passage part 42 to be described later) formed in the heat transfer member 40. Then, the downstream end opening of the second side downstream flow path section 32 is connected to the upstream end opening of the flow path section formed in the heat transfer member 40 . Thereby, the second fluid passage 30 cooperates with the heat transfer member 40 to form a closed circuit, and the second fluid is circulated through the heat transfer member 40.
第２流体通路３０が伝熱部材４０を介して第２流体を循環させる場合、第２側上流流路部３１は、伝熱部材４０から流出した第２流体を通流させて第２熱交換器１５に流入させる。第２側下流流路部３２は、第２熱交換器１５で自然冷媒と熱交換した第２流体を受け入れて通流させる。第２側下流流路部３２には、第２側ポンプ３２Ａが設けられる。第２側ポンプ３２Ａは、第２流体を通流させるための駆動力を発生させる。なお、第２側ポンプ３２Ａの設置位置は特に限られず、例えば第２側上流流路部３１に第２側ポンプ３２Ａが設けられてもよい。 When the second fluid passage 30 circulates the second fluid via the heat transfer member 40, the second side upstream flow path section 31 allows the second fluid flowing out from the heat transfer member 40 to flow therethrough for second heat exchange. Flow into the vessel 15. The second downstream flow path section 32 receives the second fluid that has undergone heat exchange with the natural refrigerant in the second heat exchanger 15 and allows it to flow therethrough. The second side downstream flow path section 32 is provided with a second side pump 32A. The second side pump 32A generates a driving force for flowing the second fluid. Note that the installation position of the second side pump 32A is not particularly limited, and the second side pump 32A may be provided, for example, in the second side upstream channel section 31.
また、本実施の形態では、第２側上流流路部３１と第２側下流流路部３２とを接続する第２バイパス流路３４と、第２側下流流路部３２から伝熱部材４０へ通流する第２流体の流量と、第２バイパス流路３４を通流する第２流体の流量との割合を調節する第２弁機構３６と、が設けられている。 In addition, in the present embodiment, the second bypass flow path 34 connects the second side upstream flow path section 31 and the second side downstream flow path section 32, and the heat transfer member 40 from the second side downstream flow path section 32 is provided. A second valve mechanism 36 is provided that adjusts the ratio of the flow rate of the second fluid flowing through the second bypass flow path 34 and the flow rate of the second fluid flowing through the second bypass flow path 34 .
第２バイパス流路３４は、詳しくは、第２側下流流路部３２における第２側ポンプ３２Ａの下流側の部分に接続されている。より詳しくは、本実施の形態における第２弁機構３６は、第２側三方弁３７を含んで構成される。第２側三方弁３７は、第２側第１ポート３７１と、第２側第２ポート３７２と、第２側第３ポート３７３とを含む。そして、第２側第１ポート３７１から第２側第２ポート３７２に至る流路は、第２側下流流路部３２の一部を構成している。そして、第２バイパス流路３４は、その上流端開口を第２側第３ポート３７３に接続し、その下流端開口を第２側下流流路部３２に接続している。 Specifically, the second bypass flow path 34 is connected to a downstream portion of the second side pump 32A in the second side downstream flow path section 32. More specifically, the second valve mechanism 36 in this embodiment includes a second side three-way valve 37. The second side three-way valve 37 includes a second side first port 371, a second side second port 372, and a second side third port 373. The flow path from the second side first port 371 to the second side second port 372 constitutes a part of the second side downstream flow path section 32. The second bypass flow path 34 has its upstream end opening connected to the second side third port 373 and its downstream end opening connected to the second side downstream flow path section 32 .
第２側三方弁３７は、第２側第１ポート３７１で受け入れられて第２側第２ポート３７２から流出する第１流体の流量と、第２側第１ポート３７１で受け入れられて第２側第３ポート３７３から流出する第２流体の流量との割合を調節できる。これにより、第２側下流流路部３２から伝熱部材４０へ通流する第２流体の流量と、第２バイパス流路３４を通流する第２流体の流量との割合を調節できる。 The second side three-way valve 37 controls the flow rate of the first fluid that is received at the second side first port 371 and flows out from the second side second port 372, and the flow rate of the first fluid that is received at the second side first port 371 and flows out from the second side second port 372. The ratio of the flow rate of the second fluid flowing out from the third port 373 can be adjusted. Thereby, the ratio of the flow rate of the second fluid flowing from the second side downstream flow path section 32 to the heat transfer member 40 and the flow rate of the second fluid flowing through the second bypass flow path 34 can be adjusted.
第２側三方弁３７が第２側第１ポート３７１と第２側第２ポート３７２とを接続し、第２側第１ポート３７１と第２側第３ポート３７３とを遮断した場合には、第２熱交換器１５から流出した第２流体は、伝熱部材４０を介して第２熱交換器１５に戻る。第２側三方弁３７が第２側第１ポート３７１と第２側第２ポート３７２とを遮断し、第２側第１ポート３７１と第２側第３ポート３７３とを接続した場合には、第２熱交換器１５から流出した第２流体は、伝熱部材４０を通過せず、第２バイパス流路３４を通って第２熱交換器１５に戻る。ここで、第２側上流流路部３１における第２バイパス流路３４の接続位置の上流側には第２側逆止弁３８が設けられる。第２側逆止弁３８は、第２バイパス流路３４から第２側上流流路部３１に流入した第２流体が逆流して伝熱部材４０に流入することを制限する。なお、第２弁機構３６は第２側三方弁３７を含んで構成されるが、２つ以上の二方弁を組み合わせた構成でもよい。 When the second side three-way valve 37 connects the second side first port 371 and the second side second port 372 and blocks the second side first port 371 and the second side third port 373, The second fluid flowing out from the second heat exchanger 15 returns to the second heat exchanger 15 via the heat transfer member 40 . When the second side three-way valve 37 blocks the second side first port 371 and the second side second port 372 and connects the second side first port 371 and the second side third port 373, The second fluid flowing out of the second heat exchanger 15 returns to the second heat exchanger 15 through the second bypass passage 34 without passing through the heat transfer member 40 . Here, a second side check valve 38 is provided upstream of the connection position of the second bypass flow path 34 in the second side upstream flow path section 31 . The second side check valve 38 restricts the second fluid that has flowed into the second side upstream flow path section 31 from the second bypass flow path 34 from flowing backward into the heat transfer member 40 . Although the second valve mechanism 36 is configured to include a second side three-way valve 37, it may also be configured by combining two or more two-way valves.
本実施の形態では、基本的に、伝熱部材４０に第１流体を通流させる際、第２弁機構３６は、伝熱部材４０における第２流体の通流を遮断し、第２バイパス流路３４における第２流体の通流を許容する。一方で、伝熱部材４０に第２流体を通流させる際、第１弁機構２６は、伝熱部材４０における第１流体の通流を遮断し、第１バイパス流路２４における第１流体の通流を許容する。ただし、このような弁機構２６，３６の動作は特に限られず、伝熱部材４０に同時に第１流体及び第２流体が流入してもよい。なお、弁機構２６，３６は、コントローラ１００によって制御される。 In this embodiment, basically, when causing the first fluid to flow through the heat transfer member 40, the second valve mechanism 36 blocks the flow of the second fluid through the heat transfer member 40, and the second bypass flow Flow of the second fluid in the passage 34 is allowed. On the other hand, when causing the second fluid to flow through the heat transfer member 40 , the first valve mechanism 26 blocks the flow of the first fluid through the heat transfer member 40 and prevents the first fluid from flowing through the first bypass channel 24 . Allows flow. However, the operation of such valve mechanisms 26 and 36 is not particularly limited, and the first fluid and the second fluid may flow into the heat transfer member 40 at the same time. Note that the valve mechanisms 26 and 36 are controlled by a controller 100.
第２流体は、一例としてブラインである。ブラインはエーテル系液体でもよいし、フッ素系液体でもよい。ただし、第２流体は特に限られるものではなく、シリコーンオイルや、水でもよい。また、第２流体は空気、窒素、アルゴン等の気体でもよい。 The second fluid is brine, for example. The brine may be an ether liquid or a fluorine liquid. However, the second fluid is not particularly limited, and may be silicone oil or water. Further, the second fluid may be a gas such as air, nitrogen, or argon.
伝熱部材４０は、第１側下流流路部２２から流出する第１流体を受け入れて通流させた後、第１側上流流路部２１に流出させることが可能であるとともに、第２側下流流路部３２から流出する第２流体を受け入れて通流させた後、第２側上流流路部３１に流出させることが可能である。詳しくは、伝熱部材４０には、第１伝熱流路部４１と、第２伝熱流路部４２とが形成される。そして、第１伝熱流路部４１の上流端開口は、第１側下流流路部２２の下流端開口に接続され、第１伝熱流路部４１の下流端開口は、第１側上流流路部２１の上流端開口に接続される。また、第２伝熱流路部４２の上流端開口は、第２側下流流路部３２の下流端開口に接続され、第２伝熱流路部４２の下流端開口は、第２側上流流路部３１の上流端開口に接続される。 The heat transfer member 40 is capable of receiving the first fluid flowing out from the first side downstream flow path section 22 and allowing it to flow therethrough, and then allowing it to flow out into the first side upstream flow path section 21. After receiving the second fluid flowing out from the downstream flow path section 32 and causing it to flow, it can be made to flow out into the second side upstream flow path section 31 . Specifically, the heat transfer member 40 is formed with a first heat transfer channel section 41 and a second heat transfer channel section 42 . The upstream end opening of the first heat transfer flow path section 41 is connected to the downstream end opening of the first side downstream flow path section 22, and the downstream end opening of the first heat transfer flow path section 41 is connected to the first side upstream flow path. It is connected to the upstream end opening of section 21. Further, the upstream end opening of the second heat transfer channel section 42 is connected to the downstream end opening of the second side downstream channel section 32, and the downstream end opening of the second heat transfer channel section 42 is connected to the second side upstream channel section 32. It is connected to the upstream end opening of section 31.
本実施の形態における伝熱部材４０には、複数の第１伝熱流路部４１及び複数の第２伝熱流路部４２が形成されている。複数の第１伝熱流路部４１は、第１側下流流路部２２から分岐するように並列に位置する。複数の第２伝熱流路部４２は、第２側下流流路部３２から分岐するように並列に位置する。詳しくは、各第１伝熱流路部４１の上流端開口は、伝熱部材４０に形成される第１共通分配流路部４１Ａを介して第１側下流流路部２２の下流端開口に接続される。各第１伝熱流路部４１の下流端開口は、伝熱部材４０に形成される第１合流配流路部４１Ｂを介して第１側上流流路部２１の上流端開口に接続される。同様に、各第２伝熱流路部４２の上流端開口は、伝熱部材４０に形成される第２共通分配流路部４２Ａを介して第２側下流流路部３２の下流端開口に接続される。各第２伝熱流路部４２の下流端開口は、伝熱部材４０に形成される第２合流配流路部４２Ｂを介して第２側上流流路部３１の上流端開口に接続される。 A plurality of first heat transfer channel sections 41 and a plurality of second heat transfer channel sections 42 are formed in the heat transfer member 40 in this embodiment. The plurality of first heat transfer flow path sections 41 are located in parallel so as to branch from the first downstream flow path section 22 . The plurality of second heat transfer flow path sections 42 are located in parallel so as to branch from the second side downstream flow path section 32. Specifically, the upstream end opening of each first heat transfer channel section 41 is connected to the downstream end opening of the first side downstream channel section 22 via the first common distribution channel section 41A formed in the heat transfer member 40. be done. The downstream end opening of each first heat transfer channel section 41 is connected to the upstream end opening of the first side upstream channel section 21 via a first merging distribution channel section 41B formed in the heat transfer member 40. Similarly, the upstream end opening of each second heat transfer channel section 42 is connected to the downstream end opening of the second side downstream channel section 32 via a second common distribution channel section 42A formed in the heat transfer member 40. be done. The downstream end opening of each second heat transfer flow path section 42 is connected to the upstream end opening of the second side upstream flow path section 31 via a second merging distribution flow path section 42B formed in the heat transfer member 40.
なお、伝熱部材４０に形成される流路構成は上述の態様に限られない。例えば、第１共通分配流路部４１Ａ及び第１合流配流路部４１Ｂが形成されず、各第１伝熱流路部４１が直接的に第１側上流流路部２１及び第１側下流流路部２２に接続されてもよい。また、第１伝熱流路部４１及び第２伝熱流路部４２はそれぞれ、単一の流路でもよい。 Note that the flow path configuration formed in the heat transfer member 40 is not limited to the above-mentioned embodiment. For example, the first common distribution flow path section 41A and the first confluence distribution flow path section 41B are not formed, and each first heat transfer flow path section 41 directly connects the first side upstream flow path section 21 and the first side downstream flow path. 22. Further, each of the first heat transfer channel section 41 and the second heat transfer channel section 42 may be a single channel.
図２は、伝熱部材４０及び保持部材５０を示している。図１及び図２に示すように、本実施の形態における伝熱部材４０は板状である。そして、本実施の形態では、伝熱部材４０の一方の主面に凸状に***した複数の温度制御部分４４が設けられている。複数の温度制御部分４４は規則的に配置され、図示の例では一列に並ぶ。温度制御部分４４はマトリクス状や、千鳥配列にて配置されてもよい。検査装置Ｔ１は、温度制御部分４４のそれぞれを検査対象物６０に接触させることが可能となっている。これにより、複数の検査対象物６０を、それぞれ別の温度制御部分４４で温度制御できる。温度制御部分４４は***しているが、周囲の部分と面一でもよいし、凹んでいてもよい。 FIG. 2 shows the heat transfer member 40 and the holding member 50. As shown in FIGS. 1 and 2, the heat transfer member 40 in this embodiment has a plate shape. In this embodiment, a plurality of temperature control portions 44 are provided on one main surface of the heat transfer member 40 in a convex manner. The plurality of temperature control portions 44 are regularly arranged and lined up in a line in the illustrated example. The temperature control portions 44 may be arranged in a matrix or in a staggered arrangement. The inspection device T1 is capable of bringing each of the temperature control portions 44 into contact with the object to be inspected 60. Thereby, the temperature of the plurality of inspection objects 60 can be controlled by separate temperature control parts 44, respectively. Although the temperature control portion 44 is raised, it may be flush with the surrounding portion or may be recessed.
ここで、本実施の形態では、各第１伝熱流路部４１が蛇行状の第１側インタフェース部分４６を含む。各第２伝熱流路部４２は、蛇行状の第２側インタフェース部分４８を含む。そして、複数の第１側インタフェース部分４６のいずれかと複数の第２側インタフェース部分４８のいずれかとが互いに近接して温調源４０Ｓを形成する。そして、各温調源４０Ｓ上の伝熱部材４０の表面に上記の温度制御部分４４が設けられる。温調源４０Ｓは、温度制御部分４４の内部に位置する。 Here, in this embodiment, each first heat transfer channel section 41 includes a meandering first side interface section 46 . Each second heat transfer channel portion 42 includes a serpentine second side interface portion 48 . Then, one of the plurality of first side interface parts 46 and one of the plurality of second side interface parts 48 are close to each other to form a temperature control source 40S. The temperature control portion 44 described above is provided on the surface of the heat transfer member 40 on each temperature control source 40S. The temperature control source 40S is located inside the temperature control section 44.
伝熱部材４０は、第１流体通路２０からの第１流体及び／又は第２流体通路３０からの第２流体によって冷却又は加熱される。そして、互いに近接するペアである第１側インタフェース部分４６及び第２側インタフェース部分４８が温調源４０Ｓを構成し、この温調源４０Ｓによって伝熱部材４０の表面に設けられた温度制御部分４４が効率的に冷却又は加熱される。すなわち、第１側インタフェース部分４６及び第２側インタフェース部分４８では伝熱部材４０における所定面積当たりの流体接触時間が長く確保される。これにより、効率的な熱伝達又は吸熱が可能となる。 The heat transfer member 40 is cooled or heated by the first fluid from the first fluid passage 20 and/or the second fluid from the second fluid passage 30. The first side interface portion 46 and the second side interface portion 48, which are a pair close to each other, constitute a temperature control source 40S, and the temperature control portion 44 provided on the surface of the heat transfer member 40 is controlled by this temperature control source 40S. is efficiently cooled or heated. That is, in the first side interface portion 46 and the second side interface portion 48, a long fluid contact time per predetermined area of the heat transfer member 40 is ensured. This allows efficient heat transfer or heat absorption.
第１側インタフェース部分４６及び第２側インタフェース部分４８は、伝熱部材４０における所定面積当たりの流体接触時間を長く確保できる形状であればよく、例えば渦巻き状、螺旋状、又は流路面積を拡大させる形状等でもよい。伝熱部材４０の熱伝導率は高いことが好ましく、伝熱部材４０は、アルミニウム、アルミニウム合金等の金属で形成されることが好ましい。 The first side interface portion 46 and the second side interface portion 48 may have any shape that can ensure a long fluid contact time per predetermined area in the heat transfer member 40, such as a spiral shape, a spiral shape, or a shape that increases the flow path area. It may be a shape that allows The thermal conductivity of the heat transfer member 40 is preferably high, and the heat transfer member 40 is preferably formed of metal such as aluminum or aluminum alloy.
なお、本実施の形態では伝熱部材４０に第１伝熱流路部４１及び第２伝熱流路部４２が形成される。ただし、これに代えて、伝熱部材４０に、第１流体通路２０の一部及び第２流体通路３０の一部を収容する空間が形成されてもよい。この場合、伝熱部材４０は、第１流体通路２０の一部を介して第１流体により温度制御され、第２流体通路３０の一部を介して第２流体により温度制御される。 In addition, in this embodiment, the first heat transfer channel section 41 and the second heat transfer channel section 42 are formed in the heat transfer member 40. However, instead of this, a space may be formed in the heat transfer member 40 to accommodate a part of the first fluid passage 20 and a part of the second fluid passage 30. In this case, the temperature of the heat transfer member 40 is controlled by the first fluid through a portion of the first fluid passage 20, and the temperature of the heat transfer member 40 is controlled by the second fluid through a portion of the second fluid passage 30.
保持部材５０は、図２に示すように検査対象物６０の表面を露出させつつ収容する凹状の複数の収容部５１を有する。複数の収容部５１の配置パターンは、伝熱部材４０における温度制御部分４４の配置パターンと同じである。 As shown in FIG. 2, the holding member 50 has a plurality of concave accommodating portions 51 for accommodating the inspection target 60 while exposing its surface. The arrangement pattern of the plurality of accommodating parts 51 is the same as the arrangement pattern of the temperature control portion 44 in the heat transfer member 40.
本実施の形態では、検査装置Ｔ１が、図３に示すように伝熱部材４０の温度制御部分４４と保持部材５０に保持された検査対象物６０とが接触するように、伝熱部材４０と保持部材５０との相対距離を調整することが可能となっている。伝熱部材４０及び保持部材５０は、いずれか一方のみが移動可能に構成されてもよいし、両方が移動可能に構成されてもよい。なお、図示しないが、保持部材５０には電子部品である検査対象物６０に導通するコンタクトピンが設けられている。 In this embodiment, the inspection apparatus T1 connects the heat transfer member 40 so that the temperature control portion 44 of the heat transfer member 40 and the inspection object 60 held by the holding member 50 are in contact with each other, as shown in FIG. It is possible to adjust the relative distance to the holding member 50. Only one of the heat transfer member 40 and the holding member 50 may be configured to be movable, or both may be configured to be movable. Although not shown, the holding member 50 is provided with a contact pin that is electrically connected to the test object 60, which is an electronic component.
図１に戻り、コントローラ１００は、第１弁機構２６及び第２弁機構３６を制御できる。具体的には、コントローラ１００は、伝熱部材４０に第１流体を通流させる際、第１弁機構２６が、伝熱部材４０における第１流体の通流を許容し、第１バイパス流路２４における第１流体の通流を遮断するように、第１弁機構２６を制御する。また、この際、コントローラ１００は、第２弁機構３６が、伝熱部材４０における第２流体の通流を遮断し、第２バイパス流路３４における第２流体の通流を許容するように第２弁機構３６を制御する。一方で、伝熱部材４０に第２流体を通流させる際には、コントローラ１００は、上述と逆の状態に第１弁機構２６及び第２弁機構３６を制御する。また、コントローラ１００は、伝熱部材４０と保持部材５０との相対距離を調節でき、モータ１７の回転数も調節できる。 Returning to FIG. 1, the controller 100 can control the first valve mechanism 26 and the second valve mechanism 36. Specifically, when the controller 100 causes the first fluid to flow through the heat transfer member 40, the first valve mechanism 26 allows the first fluid to flow through the heat transfer member 40, and the first bypass flow path The first valve mechanism 26 is controlled to block the flow of the first fluid through the valve 24 . Further, at this time, the controller 100 controls the second valve mechanism 36 to block the flow of the second fluid in the heat transfer member 40 and allow the flow of the second fluid in the second bypass channel 34. Controls the two-valve mechanism 36. On the other hand, when causing the second fluid to flow through the heat transfer member 40, the controller 100 controls the first valve mechanism 26 and the second valve mechanism 36 to the opposite state to that described above. Further, the controller 100 can adjust the relative distance between the heat transfer member 40 and the holding member 50, and can also adjust the rotation speed of the motor 17.
コントローラ１００は、例えばＣＰＵ、ＲＯＭなどを含むコンピュータで構成されてもよく、この場合、ＲＯＭに格納されたプログラムに従い、各種処理を行う。また、コントローラ１００は、その他のプロセッサや電気回路（例えばＦＰＧＡ（Ｆｉｅｌｄ Ｐｒｏｇｒａｍｍａｂｌｅ Ｇａｔｅ Ａｌｌｅｙ）など）で構成されてもよい。 The controller 100 may be configured with a computer including, for example, a CPU, a ROM, etc. In this case, the controller 100 performs various processes according to programs stored in the ROM. Further, the controller 100 may be configured with other processors or electric circuits (for example, FPGA (Field Programmable Gate Alley), etc.).
以上に説明した本実施の形態に係る検査装置Ｔ１は、自然冷媒を用いる冷凍サイクル装置１０を用いることで良好な環境性能を確保できる。また、伝熱部材４０は、冷凍サイクル装置１０によって冷却又は加熱された第１流体及び／又は第２流体によって冷却又は加熱される。そして、伝熱部材４０は検査対象物６０を温度制御する機械的な構成であるため、良好な耐久性を確保できる。そして、検査装置Ｔ１は、単一の冷凍サイクル装置１０によって伝熱部材４０を冷却も加熱もできる。そのため、装置サイズの大型化を抑制できる。 The inspection device T1 according to the present embodiment described above can ensure good environmental performance by using the refrigeration cycle device 10 that uses a natural refrigerant. Further, the heat transfer member 40 is cooled or heated by the first fluid and/or the second fluid cooled or heated by the refrigeration cycle device 10. Since the heat transfer member 40 has a mechanical configuration that controls the temperature of the test object 60, good durability can be ensured. The inspection device T1 can cool and heat the heat transfer member 40 using the single refrigeration cycle device 10. Therefore, it is possible to suppress the increase in device size.
また、本実施の形態では、伝熱部材４０に第１流体を通流させる際、第２弁機構３６は、伝熱部材４０における第２流体の通流を遮断し、第２バイパス流路３４における第２流体の通流を許容する。伝熱部材４０に第２流体を通流させる際、第１弁機構２６は、伝熱部材４０における第１流体の通流を遮断し、第１バイパス流路２４における第１流体の通流を許容する。これにより、低温での温度制御と高温での温度制御との切り替え時間を抑制できる。 Further, in the present embodiment, when the first fluid is caused to flow through the heat transfer member 40, the second valve mechanism 36 blocks the flow of the second fluid through the heat transfer member 40, and the second bypass flow path 34 The second fluid is allowed to flow through the second fluid. When allowing the second fluid to flow through the heat transfer member 40, the first valve mechanism 26 blocks the flow of the first fluid through the heat transfer member 40 and prevents the flow of the first fluid through the first bypass channel 24. Allow. Thereby, the switching time between temperature control at low temperature and temperature control at high temperature can be suppressed.
また、伝熱部材４０において複数の第１伝熱流路部４１は、第１側下流流路部２２から分岐するように並列に位置する。複数の第２伝熱流路部４２は、第２側下流流路部３２から分岐するように並列に位置する。これにより、複数の検査対象物６０を効率的に温度制御できる。特に自然冷媒の冷凍サイクル装置１０は一般に大きい冷凍能力及び加熱能力を確保できる。そのため、本実施の形態によれば、複数の検査対象物６０を均一的に十分に冷却又は加熱できることで、信頼性の高い検査を効率的に行うことができる。 Further, in the heat transfer member 40 , the plurality of first heat transfer flow path portions 41 are located in parallel so as to branch from the first side downstream flow path portion 22 . The plurality of second heat transfer flow path sections 42 are located in parallel so as to branch from the second side downstream flow path section 32. Thereby, the temperature of the plurality of inspection objects 60 can be efficiently controlled. In particular, the refrigeration cycle device 10 using a natural refrigerant can generally ensure large refrigeration capacity and heating capacity. Therefore, according to the present embodiment, since the plurality of test objects 60 can be uniformly and sufficiently cooled or heated, highly reliable tests can be performed efficiently.
＜第２の実施の形態＞
次に、第２の実施の形態に係る検査装置Ｔ２について図４を参照しつつ説明する。本実施の形態における構成部分のうちの第１の実施の形態と同様のものには同一の符号を付す。以下では、第１の実施の形態との相違点のみを説明する。
<Second embodiment>
Next, an inspection apparatus T2 according to a second embodiment will be described with reference to FIG. 4. Components in this embodiment that are similar to those in the first embodiment are given the same reference numerals. In the following, only the differences from the first embodiment will be explained.
第２の実施の形態では伝熱部材４０が検査対象物６０を保持している。伝熱部材４０には、検査対象物６０を収容する凹状の複数の収容部兼温度制御部分４４’が形成されている。収容部兼温度制御部分４４’の周囲の伝熱部材４０の内部には、第１伝熱流路部４１の第１側インタフェース部分４６と第２伝熱流路部４２の第２側インタフェース部分４８とが位置している。 In the second embodiment, a heat transfer member 40 holds an object 60 to be inspected. The heat transfer member 40 is formed with a plurality of recessed storage/temperature control portions 44' for accommodating the test object 60. Inside the heat transfer member 40 around the accommodation portion/temperature control portion 44', there are a first side interface portion 46 of the first heat transfer flow path portion 41 and a second side interface portion 48 of the second heat transfer flow path portion 42. is located.
収容部兼温度制御部分４４’は、底面に載せたマウント部材４９を介して検査対象物６０を保持している。マウント部材４９は、収容部兼温度制御部分４４’の底面及び側面と接する。そして、第１伝熱流路部４１の第１側インタフェース部分４６と第２伝熱流路部４２の第２側インタフェース部分４８は、マウント部材４９を介して検査対象物６０を温度制御するように構成される。また、マウント部材４９には、検査対象物６０に導通するコンタクトピンが通されている。本実施の形態に係る検査装置Ｔ２はハンドラ装置を含む検査装置として構成されてもよいし、プローバを含む検査装置として構成されてもよいし、テスタ等として構成されてもよい。 The storage/temperature control part 44' holds the object to be inspected 60 via a mount member 49 placed on the bottom surface. The mount member 49 is in contact with the bottom and side surfaces of the housing/temperature control portion 44'. The first side interface portion 46 of the first heat transfer channel section 41 and the second side interface section 48 of the second heat transfer channel section 42 are configured to control the temperature of the test object 60 via the mount member 49. be done. Further, a contact pin that is electrically connected to the object to be inspected 60 is passed through the mount member 49 . The inspection device T2 according to the present embodiment may be configured as an inspection device including a handler device, may be configured as an inspection device including a prober, or may be configured as a tester or the like.
＜第３の実施の形態＞
次に、第３の実施の形態に係る検査装置Ｔ３について図５を参照しつつ説明する。本実施の形態における構成部分のうちの第１及び第２の実施の形態と同様のものには同一の符号を付す。以下では、第１及び第２の実施の形態との相違点のみを説明する。
<Third embodiment>
Next, an inspection apparatus T3 according to a third embodiment will be described with reference to FIG. 5. Components in this embodiment that are similar to those in the first and second embodiments are given the same reference numerals. Below, only the differences from the first and second embodiments will be explained.
第３の実施の形態では保持部材５０が検査対象物６０を収容する収容部５１を有する。そして、収容部５１の周囲における保持部材５０の内部に空気又は液体を通流させる流体ジャケット５２が形成される。流体ジャケット５２は、収容部５１で外部に開口し、空気又は液体を収容部５１に流入させることができる。本実施の形態では、収容部５１がマウント部材４９を保持し、マウント部材４９と収容部５１の底面との間に空間が形成される。そして、当該空間に流体ジャケット５２からの空気又は液体が収容部５１に流入する。これにより、流体ジャケット５２からの空気又は液体がマウント部材４９を介して検査対象物６０を冷却又は加熱する。 In the third embodiment, a holding member 50 has a housing section 51 that houses an object to be inspected 60 . Then, a fluid jacket 52 is formed that allows air or liquid to flow through the inside of the holding member 50 around the accommodating portion 51. The fluid jacket 52 is open to the outside at the housing portion 51 and can allow air or liquid to flow into the housing portion 51 . In this embodiment, the accommodating portion 51 holds the mount member 49, and a space is formed between the mount member 49 and the bottom surface of the accommodating portion 51. Then, air or liquid from the fluid jacket 52 flows into the space into the housing portion 51. Thereby, air or liquid from the fluid jacket 52 cools or heats the test object 60 via the mount member 49.
一方で、伝熱部材４０は、流体ジャケット５２を通流する空気又は液体を温度制御する流体ジャケット５２上で保持部材５０に接している。伝熱部材４０は、第１伝熱流路部４１及び／又は第２伝熱流路部４２により流体ジャケット５２を通流する空気又は液体を冷却又は加熱する。本実施の形態に係る検査装置Ｔ３はハンドラ装置を含む検査装置として構成されてもよいし、プローバを含む検査装置として構成されてもよいし、テスタ等として構成されてもよい。 On the other hand, the heat transfer member 40 is in contact with the holding member 50 on a fluid jacket 52 that controls the temperature of the air or liquid flowing through the fluid jacket 52. The heat transfer member 40 cools or heats the air or liquid flowing through the fluid jacket 52 using the first heat transfer channel section 41 and/or the second heat transfer channel section 42 . The inspection device T3 according to the present embodiment may be configured as an inspection device including a handler device, may be configured as an inspection device including a prober, or may be configured as a tester or the like.
＜第４の実施の形態＞
次に、第４の実施の形態に係る検査装置Ｔ４について図６を参照しつつ説明する。本実施の形態における構成部分のうちの第１乃至第３の実施の形態と同様のものには同一の符号を付す。以下では、第１乃至第３の実施の形態との相違点のみを説明する。
<Fourth embodiment>
Next, an inspection apparatus T4 according to a fourth embodiment will be described with reference to FIG. 6. Components in this embodiment that are similar to those in the first to third embodiments are given the same reference numerals. Below, only the differences from the first to third embodiments will be explained.
第３の実施の形態では、伝熱部材４０が保持部材５０に接し、保持部材５０の保持された検査対象物６０を保持部材５０を介して温度制御する。伝熱部材４０の構成は、第１の実施の形態と同様である。そして、検査装置Ｔ４は、検査対象物６０に接触されるプローブ７０を保持した可動プローブ台７１を備えている。 In the third embodiment, the heat transfer member 40 is in contact with the holding member 50, and the temperature of the test object 60 held by the holding member 50 is controlled via the holding member 50. The configuration of the heat transfer member 40 is similar to that of the first embodiment. The inspection device T4 includes a movable probe stand 71 that holds a probe 70 that is brought into contact with the inspection object 60.
以上、本発明の実施の形態を説明したが、本発明は以上に説明した実施の形態に限られるものではなく、上述の実施の形態には種々の変更を加えることができる。例えば上述の実施の形態では、第１流体通路２０及び第２流体通路３０が共通の伝熱部材４０に接続されている。これに代えて、互いに分離した第１伝熱部材と第２伝熱部材とが用いられてもよい。この場合、第１伝熱部材は、第１流体通路２０の第１側下流流路部２２から流出する第１流体を受け入れて通流させた後、第１側上流流路部２１に流出させる。第２伝熱部材は、第２流体通路３０の第２側下流流路部３２から流出する第２流体を受け入れて通流させた後、第２側上流流路部３１に流出させる。この場合、温度制御対象は、第１伝熱部材又は第２伝熱部材を介して温度制御される。 Although the embodiments of the present invention have been described above, the present invention is not limited to the embodiments described above, and various changes can be made to the embodiments described above. For example, in the embodiment described above, the first fluid passage 20 and the second fluid passage 30 are connected to a common heat transfer member 40. Instead of this, a first heat transfer member and a second heat transfer member that are separated from each other may be used. In this case, the first heat transfer member receives the first fluid flowing out from the first side downstream flow path section 22 of the first fluid passage 20 and causes it to flow therethrough, and then causes it to flow out to the first side upstream flow path section 21. . The second heat transfer member receives the second fluid flowing out from the second side downstream flow path section 32 of the second fluid passage 30 and causes the second fluid to flow therethrough, and then causes the second fluid to flow out into the second side upstream flow path section 31 . In this case, the temperature of the temperature controlled object is controlled via the first heat transfer member or the second heat transfer member.
Ｔ１, Ｔ２，Ｔ３，Ｔ４…検査装置
１…温度制御装置
１０…冷凍サイクル装置
１１…圧縮機
１２…第１熱交換器
１４…膨張機
１５…第２熱交換器
１６…冷媒循環路
１７…モータ
１７Ａ…駆動軸
２０…第１流体通路
２１…第１側上流流路部
２２…第１側下流流路部
２４…第１バイパス流路
２６…第１弁機構
２７…第１側三方弁
２８…第１側逆止弁
３０…第２流体通路
３１…第２側上流流路部
３２…第２側下流流路部
３４…第２バイパス流路
３６…第２弁機構
３７…第２側三方弁
３８…第２側逆止弁
４０…伝熱部材
４０Ｓ…温調源
４１…第１伝熱流路部
４２…第２伝熱流路部
４４…温度制御部分
４６…第１側インタフェース部分
４８…第２側インタフェース部分
５０…保持部材
６０…検査対象物
T1, T2, T3, T4... Inspection device 1... Temperature control device 10... Refrigeration cycle device 11... Compressor 12... First heat exchanger 14... Expander 15... Second heat exchanger 16... Refrigerant circulation path 17... Motor 17A... Drive shaft 20... First fluid passage 21... First side upstream passage section 22... First side downstream passage section 24... First bypass passage 26... First valve mechanism 27... First side three-way valve 28... First side check valve 30...Second fluid passage 31...Second side upstream passage section 32...Second side downstream passage section 34...Second bypass passage 36...Second valve mechanism 37...Second side three-way valve 38...Second side check valve 40...Heat transfer member 40S...Temperature adjustment source 41...First heat transfer channel section 42...Second heat transfer channel section 44...Temperature control section 46...First side interface section 48...Second Side interface portion 50...holding member 60...test object
Claims (7)
前記第１熱交換器に第１流体を流入させる第１側上流流路部と、前記第１熱交換器を通過する前記自然冷媒と熱交換して前記第１熱交換器から流出する前記第１流体を受け入れて通流させる第１側下流流路部と、を含む第１流体通路と、
前記第２熱交換器に第２流体を流入させる第２側上流流路部と、前記第２熱交換器を通過する前記自然冷媒と熱交換して前記第２熱交換器から流出する前記第２流体を受け入れて通流させる第２側下流流路部と、を含む第２流体通路と、
前記第１側下流流路部から流出する前記第１流体を受け入れて通流させた後、前記第１側上流流路部に流出させることが可能であるとともに、前記第２側下流流路部から流出する前記第２流体を受け入れて通流させた後、前記第２側上流流路部に流出させることが可能な伝熱部材と、を備え、
前記伝熱部材を介して温度制御対象を温度制御する、温度制御装置。 It includes a compressor, a first heat exchanger, an expander, and a second heat exchanger, and the natural refrigerant flowing out from the compressor is connected to the first heat exchanger, the expander, and the second heat exchanger. after passing through in this order, the refrigeration cycle device is circulated to the compressor, and the compressor and the expander are connected by a common drive shaft;
a first-side upstream flow path section that allows a first fluid to flow into the first heat exchanger, and a first side upstream flow path section that exchanges heat with the natural refrigerant passing through the first heat exchanger and flows out from the first heat exchanger. a first fluid passageway including a first side downstream flow passage section that receives and flows one fluid;
a second side upstream flow path section that allows a second fluid to flow into the second heat exchanger; and a second side upstream flow path section that flows out from the second heat exchanger after exchanging heat with the natural refrigerant that passes through the second heat exchanger. a second fluid passageway including a second side downstream flow passage section that receives and flows two fluids;
After receiving and flowing the first fluid flowing out from the first side downstream flow path section, it is possible to allow the first fluid to flow out into the first side upstream flow path section, and the second side downstream flow path section. a heat transfer member that can receive and flow the second fluid flowing out of the second fluid, and then allow the second fluid to flow out to the second upstream flow path section;
A temperature control device that controls the temperature of a temperature controlled object via the heat transfer member.
前記第１側下流流路部から前記伝熱部材へ通流する前記第１流体の流量と、前記第１バイパス流路を通流する前記第１流体の流量との割合を調節する第１弁機構と、
前記第２側下流流路部と前記第２側上流流路部とを接続する第２バイパス流路と、
前記第２側下流流路部から前記伝熱部材へ通流する前記第２流体の流量と、前記第２バイパス流路を通流する前記第２流体の流量との割合を調節する第２弁機構と、を更に備える、請求項１に記載の温度制御装置。 a first bypass flow path connecting the first side downstream flow path section and the first side upstream flow path section;
A first valve that adjusts the ratio of the flow rate of the first fluid flowing from the first downstream flow path section to the heat transfer member and the flow rate of the first fluid flowing through the first bypass flow path. mechanism and
a second bypass flow path connecting the second side downstream flow path section and the second side upstream flow path section;
a second valve that adjusts the ratio of the flow rate of the second fluid flowing from the second side downstream flow path section to the heat transfer member and the flow rate of the second fluid flowing through the second bypass flow path; The temperature control device according to claim 1, further comprising a mechanism.
前記伝熱部材に前記第２流体を通流させる際、前記第１弁機構は、前記伝熱部材における前記第１流体の通流を遮断し、前記第１バイパス流路における前記第１流体の通流を許容する、請求項２に記載の温度制御装置。 When causing the first fluid to flow through the heat transfer member, the second valve mechanism blocks the flow of the second fluid through the heat transfer member and prevents the second fluid from flowing through the second bypass channel. Allows flow,
When causing the second fluid to flow through the heat transfer member, the first valve mechanism blocks the flow of the first fluid through the heat transfer member and prevents the first fluid from flowing through the first bypass channel. The temperature control device according to claim 2, which allows flow.
各前記第２伝熱流路部は、蛇行状、渦巻き状、螺旋状、又は流路面積を拡大させる形状の第２側インタフェース部分を含み、
前記伝熱部材には、複数の温度制御部分が設けられ、
複数の前記第１側インタフェース部分のいずれかと複数の前記第２側インタフェース部分のいずれかとが互いに近接して温調源を形成し、前記温調源上の前記伝熱部材の表面に前記温度制御部分が設けられる、請求項５に記載の温度制御装置。 Each of the first heat transfer flow path portions includes a first side interface portion having a meandering shape, a spiral shape, a spiral shape, or a shape that expands the flow path area;
Each of the second heat transfer flow path portions includes a second side interface portion having a meandering shape, a spiral shape, a spiral shape, or a shape that expands the flow path area;
The heat transfer member is provided with a plurality of temperature control parts,
Any one of the plurality of first side interface parts and any one of the plurality of second side interface parts are close to each other to form a temperature control source, and the temperature control is applied to the surface of the heat transfer member on the temperature control source. 6. A temperature control device according to claim 5, wherein:
前記第１熱交換器に第１流体を流入させる第１側上流流路部と、前記第１熱交換器を通過する前記自然冷媒と熱交換して前記第１熱交換器から流出する前記第１流体を受け入れて通流させる第１側下流流路部と、を含む第１流体通路と、
前記第２熱交換器に第２流体を流入させる第２側上流流路部と、前記第２熱交換器を通過する前記自然冷媒と熱交換して前記第２熱交換器から流出する前記第２流体を受け入れて通流させる第２側下流流路部と、を含む第２流体通路と、
前記第１側下流流路部から流出する前記第１流体を受け入れて通流させた後、前記第１側上流流路部に流出させることが可能であるとともに、前記第２側下流流路部から流出する前記第２流体を受け入れて通流させた後、前記第２側上流流路部に流出させることが可能な伝熱部材と、を備え、
保持部材に保持された検査対象物又は前記伝熱部材に保持された検査対象物を前記伝熱部材によって温度制御する、検査装置。 It includes a compressor, a first heat exchanger, an expander, and a second heat exchanger, and the natural refrigerant flowing out from the compressor is connected to the first heat exchanger, the expander, and the second heat exchanger. A refrigeration cycle device in which the refrigeration cycle device is circulated to the compressor after passing through in this order, and the compressor and the expander are connected by a common drive shaft;
a first-side upstream flow path section that allows a first fluid to flow into the first heat exchanger, and a first side upstream flow path section that exchanges heat with the natural refrigerant passing through the first heat exchanger and flows out from the first heat exchanger. a first fluid passageway including a first side downstream flow passage section that receives and flows one fluid;
a second side upstream flow path section that allows a second fluid to flow into the second heat exchanger; and a second side upstream flow path section that allows a second fluid to flow into the second heat exchanger, and a second side upstream flow path section that exchanges heat with the natural refrigerant passing through the second heat exchanger and flows out from the second heat exchanger. a second fluid passageway including a second side downstream flow passage section that receives and flows two fluids;
The first fluid flowing out from the first side downstream flow path section can be received and passed through, and then be allowed to flow out into the first side upstream flow path section, and the second side downstream flow path section can be made to flow. a heat transfer member that can receive and flow the second fluid flowing out of the second fluid, and then flow the second fluid to the second upstream flow path section;
An inspection device that controls the temperature of an object to be inspected held by a holding member or an object to be inspected held by the heat transfer member using the heat transfer member.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022106548A JP2024006017A (en) | 2022-06-30 | 2022-06-30 | Temperature control device and inspection device |
| PCT/JP2023/023094 WO2024004816A1 (en) | 2022-06-30 | 2023-06-22 | Temperature control device and inspection device |
| TW112124085A TW202407267A (en) | 2022-06-30 | 2023-06-28 | Temperature control device and inspection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022106548A JP2024006017A (en) | 2022-06-30 | 2022-06-30 | Temperature control device and inspection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2024006017A true JP2024006017A (en) | 2024-01-17 |
Family
ID=89382913
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022106548A Pending JP2024006017A (en) | 2022-06-30 | 2022-06-30 | Temperature control device and inspection device |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2024006017A (en) |
| TW (1) | TW202407267A (en) |
| WO (1) | WO2024004816A1 (en) |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54107147A (en) * | 1978-02-08 | 1979-08-22 | Kobe Steel Ltd | Room temperature variable laboratory system |
| JP2002168551A (en) * | 2000-11-30 | 2002-06-14 | Tokyo Electron Ltd | Cooling device for electrode of treating device |
| JP3662238B2 (en) * | 2002-01-10 | 2005-06-22 | エスペック株式会社 | Cooling device and thermostatic device |
| DE102011082584A1 (en) * | 2011-09-13 | 2013-03-14 | Behr Gmbh & Co. Kg | Device for controlling the temperature of a plurality of components of a vehicle and vehicle system |
| JP6990058B2 (en) * | 2017-07-24 | 2022-01-12 | 伸和コントロールズ株式会社 | Temperature control device |
| JP6946113B2 (en) * | 2017-08-22 | 2021-10-06 | 株式会社前川製作所 | Air Refrigerant Refrigerant Equipment, Air Refrigerant Refrigerant System and Air Refrigerant Refrigerant Method |
| CN209961863U (en) * | 2019-04-17 | 2020-01-17 | 深圳市健坤五金有限公司 | Electronic equipment aging test device |
-
2022
- 2022-06-30 JP JP2022106548A patent/JP2024006017A/en active Pending
-
2023
- 2023-06-22 WO PCT/JP2023/023094 patent/WO2024004816A1/en unknown
- 2023-06-28 TW TW112124085A patent/TW202407267A/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| WO2024004816A1 (en) | 2024-01-04 |
| TW202407267A (en) | 2024-02-16 |
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