JP2023163815A - Sheet pasting device and sheet pasting method - Google Patents

Sheet pasting device and sheet pasting method Download PDF

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Publication number
JP2023163815A
JP2023163815A JP2022074968A JP2022074968A JP2023163815A JP 2023163815 A JP2023163815 A JP 2023163815A JP 2022074968 A JP2022074968 A JP 2022074968A JP 2022074968 A JP2022074968 A JP 2022074968A JP 2023163815 A JP2023163815 A JP 2023163815A
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Japan
Prior art keywords
adhesive sheet
sheet
pasting
adherend
pressing
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JP2022074968A
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Japanese (ja)
Inventor
喬城 野末
Motoki Nozue
厚史 上道
Atsushi Uemichi
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Lintec Corp
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Lintec Corp
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Priority to JP2022074968A priority Critical patent/JP2023163815A/en
Priority to TW112106366A priority patent/TW202343627A/en
Priority to CN202310426880.8A priority patent/CN116978816A/en
Priority to DE102023110010.6A priority patent/DE102023110010A1/en
Publication of JP2023163815A publication Critical patent/JP2023163815A/en
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H35/00—Delivering articles from cutting or line-perforating machines; Article or web delivery apparatus incorporating cutting or line-perforating devices, e.g. adhesive tape dispensers
    • B65H35/0006—Article or web delivery apparatus incorporating cutting or line-perforating devices
    • B65H35/0013—Article or web delivery apparatus incorporating cutting or line-perforating devices and applying the article or the web by adhesive to a surface
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2301/00—Handling processes for sheets or webs
    • B65H2301/50—Auxiliary process performed during handling process
    • B65H2301/51—Modifying a characteristic of handled material
    • B65H2301/516—Securing handled material to another material
    • B65H2301/5163—Applying label, tab to handled material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2601/00—Problem to be solved or advantage achieved
    • B65H2601/20—Avoiding or preventing undesirable effects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L2221/6834—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used to protect an active side of a device or wafer

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Labeling Devices (AREA)

Abstract

To provide a sheet pasting device and a sheet pasting method that can prevent a protected portion protected by attaching an adhesive sheet to an adherend from being contaminated in the next step, etc.SOLUTION: A sheet pasting device EA includes supply means 10 for supplying an adhesive sheet AS and pasting means 20 for overlapping an end part ASF in a supply direction and a rear part ASR in the supply direction of the adhesive sheet AS supplied by the supply means 10 to form an overlapping portion ASP, and pasting the adhesive sheet AS to an adherend WK. The sheet pasting device EA further includes re-pressing means 30 for re-pressing the overlapping portions ASP that have been pressed by the pasting means 20.SELECTED DRAWING: Figure 1

Description

本発明は、シート貼付装置およびシート貼付方法に関する。 The present invention relates to a sheet pasting device and a sheet pasting method.

接着シートの供給方向先端部と供給方向後端部とを重ね合わせて重なり部を形成し、当該接着シートを被着体に貼付するシート貼付装置が知られている（例えば、特許文献１参照）。 A sheet pasting device is known that overlaps the leading end in the feeding direction and the trailing end in the feeding direction of an adhesive sheet to form an overlapping part, and then affixes the adhesive sheet to an adherend (see, for example, Patent Document 1). .

特開２０２２－３０８７７号公報Japanese Patent Application Publication No. 2022-30877

特許文献１に記載されたテープ貼り付けシステム１（シート貼付装置）では、使用される保護テープ２７（接着シート）の構成や組成等によっては、ウェハＷ（被着体）に対する貼付力が十分であっても、自身の接着面の反対側である反接着面に対する貼付力が不十分である場合がある。このような場合、例えば、接着シートを貼付して特定の保護部を保護した被着体を液体中に浸したり、気体中に晒したりして所定の処理を施す次工程やその他の工程等の次工程等において、接着シートの重なり部における供給方向後端部の接着面が、供給方向先端部の反接着面から剥がれ、その剥がれた部分から液体や気体等の異物が侵入し、被着体に接着シートを貼付して保護した保護部が汚染されてしまうという不都合を発生する。 In the tape pasting system 1 (sheet pasting device) described in Patent Document 1, depending on the structure and composition of the protective tape 27 (adhesive sheet) used, the pasting force to the wafer W (adherent) may not be sufficient. Even if there is, the adhesion force to the anti-adhesive surface opposite to the adhesive surface may be insufficient. In such a case, for example, the adherend may be affixed with an adhesive sheet to protect a specific protected area, and the adherend may be immersed in a liquid or exposed to a gas to perform a predetermined treatment, or other processes. In the next process, etc., the adhesive surface at the rear end in the supply direction of the overlapping part of the adhesive sheet peels off from the anti-adhesive surface at the leading end in the supply direction, and foreign matter such as liquid or gas enters from the peeled part, causing the adherend to This causes an inconvenience in that the protected area protected by pasting an adhesive sheet on the area becomes contaminated.

本発明の目的は、被着体に接着シートを貼付して保護した保護部が次工程等において汚染されることを防止することができるシート貼付装置およびシート貼付方法を提供することにある。 An object of the present invention is to provide a sheet pasting device and a sheet pasting method that can prevent a protective portion protected by pasting an adhesive sheet onto an adherend from being contaminated in the next process.

本発明は、請求項に記載した構成を採用した。 The present invention employs the configuration described in the claims.

本発明によれば、貼付手段で押圧された重なり部を再押圧するので、被着体に接着シートを貼付して保護した保護部が次工程等において汚染されることを防止することができる。 According to the present invention, since the overlapping portion pressed by the pasting means is pressed again, it is possible to prevent the protective portion protected by pasting the adhesive sheet onto the adherend from being contaminated in the next process or the like.

本発明の一実施形態に係るシート貼付装置の説明図および同装置の動作説明図。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an explanatory diagram of a sheet pasting device and an operation diagram of the same according to an embodiment of the present invention. シート貼付装置の説明図および同装置の動作説明図。An explanatory diagram of a sheet pasting device and an explanatory diagram of the operation of the same device.

以下、本発明の一実施形態を図面に基づいて説明する。
なお、本実施形態におけるＸ軸、Ｙ軸、Ｚ軸は、それぞれが直交する関係にあり、Ｘ軸およびＹ軸は、所定平面内の軸とし、Ｚ軸は、前記所定平面に直交する軸とする。さらに、本実施形態では、図１（Ａ）に示すＹ軸と平行な矢印ＤＲ方向から観た場合を基準とし、図を指定することなく方向を示した場合、「上」がＺ軸の矢印方向で「下」がその逆方向、「左」がＸ軸の矢印方向で「右」がその逆方向、「前」がＹ軸と平行な図１中手前方向で「後」がその逆方向とする。なお、図１（Ｄ）は、図１（Ａ）のＡＡ矢視図、（Ｅ）は、図１（Ａ）のＢＢ矢視図。 Hereinafter, one embodiment of the present invention will be described based on the drawings.
Note that the X-axis, Y-axis, and Z-axis in this embodiment are orthogonal to each other, and the X-axis and Y-axis are axes within a predetermined plane, and the Z-axis is an axis perpendicular to the predetermined plane. do. Furthermore, in this embodiment, when viewed from the arrow DR direction parallel to the Y-axis shown in FIG. In the direction, "down" is the opposite direction, "left" is the direction of the arrow on the X axis, "right" is the opposite direction, "front" is parallel to the Y axis, and "back" is the opposite direction. shall be. Note that FIG. 1(D) is a view taken in the direction of the AA arrow in FIG. 1(A), and (E) is a view taken in the direction of the BB arrow in FIG. 1(A).

本発明のシート貼付装置ＥＡは、接着シートＡＳを供給する供給工程を実施する供給手段１０と、供給手段１０で供給された接着シートＡＳの供給方向先端部ＡＳＦと供給方向後端部ＡＳＲとを重ね合わせて重なり部ＡＳＰ（図２（Ｂ）～（Ｅ）参照）を形成し、当該接着シートＡＳを被着体ＷＫに押圧して貼付する貼付工程を実施する貼付手段２０と、貼付手段１０で押圧された重なり部ＡＳＰを再押圧する再押圧工程を実施する再押圧手段３０と、接着シートＡＳに所定のエネルギーとしての熱を付与するエネルギー付与工程を実施するエネルギー付与手段４０と、再押圧手段３０による重なり部ＡＳＰの再押圧の際、接着シートＡＳが被着体ＷＫの外縁端面ＷＫ３から浮き上がることを規制する浮き上がり規制工程を実施する浮き上がり規制手段５０とを備えている。
なお、本実施形態の接着シートＡＳは、所定のエネルギーとしての熱によって接着力が増加するものが採用されている。
また、本実施形態の被着体ＷＫは、被着体中心ＷＫＣを中心とする円形形状のものが採用されている。 The sheet pasting apparatus EA of the present invention includes a supplying means 10 that performs a supplying process of supplying the adhesive sheet AS, and a leading end ASF in the supplying direction and a trailing end ASR in the supplying direction of the adhesive sheet AS supplied by the supplying means 10. A pasting means 20 that performs a pasting process of overlapping to form an overlapping part ASP (see FIGS. 2B to 2E) and pressing and pasting the adhesive sheet AS to an adherend WK, and a pasting means 10. a re-pressing means 30 that performs a re-pressing step of re-pressing the overlapped portion ASP that has been pressed; an energy-applying means 40 that performs an energy-applying step of applying heat as predetermined energy to the adhesive sheet AS; The adhesive sheet AS is provided with a lifting control means 50 that performs a lifting control step for controlling the adhesive sheet AS from lifting up from the outer edge end surface WK3 of the adherend WK when the overlapping portion ASP is pressed again by the means 30.
Note that the adhesive sheet AS of this embodiment is one whose adhesive strength increases with heat as predetermined energy.
Further, the adherend WK of this embodiment has a circular shape centered at the adherend center WKC.

供給手段１０は、当該供給手段１０を構成する各部材を直接的または間接的に支持する支持部材１１と、接着シートＡＳが帯状の剥離シートＲＬに仮着された原反ＲＳを支持する支持ローラ１２と、原反ＲＳを案内するガイドローラ１３と、剥離縁１４Ａで剥離シートＲＬを折り返し、当該剥離シートＲＬから接着シートＡＳを剥離する剥離手段としての剥離板１４と、駆動機器としての回動モータ１５Ａの図示しない出力軸に支持され、ピンチローラ１５Ｂとで剥離シートＲＬを挟み込む駆動ローラ１５と、図示しない駆動機器の出力軸に支持され、シート貼付装置ＥＡの自動運転が行われている間、ピンチローラ１５Ｂとの間に存在する剥離シートＲＬに常に所定の張力を付与し、当該剥離シートＲＬを回収する回収手段としての回収ローラ１６と、被着体ＷＫに貼付される接着シートＡＳに張力を付与する張力付与手段１７とを備えている。
張力付与手段１７は、トルク制御が可能な駆動機器としての回動モータ１７Ａと、その図示しない出力軸に支持され、ピンチローラ１７Ｂとで原反ＲＳを挟み込む駆動ローラ１７Ｃとを備えている。 The supply means 10 includes a support member 11 that directly or indirectly supports each member constituting the supply means 10, and a support roller that supports the raw fabric RS on which the adhesive sheet AS is temporarily attached to the strip-shaped release sheet RL. 12, a guide roller 13 that guides the original fabric RS, a peeling plate 14 as a peeling means that folds back the release sheet RL at the peeling edge 14A and peels the adhesive sheet AS from the release sheet RL, and a rotating drive device. The drive roller 15 is supported by the output shaft (not shown) of the motor 15A, and pinches the release sheet RL between the pinch roller 15B, and the output shaft of a drive device (not shown), while the sheet pasting device EA is automatically operated. , the collection roller 16 as a collection means that always applies a predetermined tension to the release sheet RL existing between the pinch roller 15B and collects the release sheet RL, and the adhesive sheet AS attached to the adherend WK. A tension applying means 17 for applying tension is provided.
The tension applying means 17 includes a rotary motor 17A as a drive device capable of torque control, and a drive roller 17C supported by its output shaft (not shown) and pinching the raw fabric RS with a pinch roller 17B.

貼付手段２０は、図示しないブラケットに回転可能に支持され、供給手段１０で供給された接着シートＡＳにはみ出し領域ＡＳＨが形成されるように、当該接着シートＡＳを被着体ＷＫの外縁端面ＷＫ３に押圧する押圧部材としての押圧ローラ２１と、図示しないブラケットに回転可能に支持された押圧部材としての第１、第２、第３押圧ローラ２２、２３、２４と、駆動機器としてのリニアモータ２５と、そのスライダ２５Ａに支持された駆動機器としての回動モータ２６と、その出力軸２６Ａに支持され、減圧ポンプや真空エジェクタ等の図示しない減圧手段（保持手段）によって吸着保持が可能な支持面２７Ａを有する支持テーブル２７とを備え、被着体ＷＫの一方の面ＷＫ１の外縁部および他方の面ＷＫ２の外縁部と、当該一方の面ＷＫ１および他方の面ＷＫ２の間に位置する外縁端面ＷＫ３とに接着シートＡＳを貼付する構成となっている。支持テーブル２７は、回動モータ２６によってテーブル中心２７Ｃを中心に回転する構成となっている。
なお、本実施形態では、押圧ローラ２１は、図１（Ｂ）、（Ｃ）に示すように、被着体ＷＫの被着体中心ＷＫＣがローラ配置中心ＲＣに配置された際、供給手段１０から供給された接着シートＡＳを当該被着体ＷＫの外縁端面ＷＫ３に押圧可能な位置に配置されている。また、第１、第２、第３押圧ローラ２２、２３、２４は、図１（Ｂ）、（Ｄ）～（Ｆ）に示すように、それぞれ上下一対とされ、被着体ＷＫの被着体中心ＷＫＣがローラ配置中心ＲＣに配置された際、当該被着体ＷＫの外縁端面ＷＫ３に貼付された接着シートＡＳのはみ出し領域ＡＳＨを、それぞれ一方の面ＷＫ１方向および他方の面ＷＫ２方向に折り曲げ可能な位置に配設されている。本実施形態では、第１、第２、第３押圧ローラ２２、２３、２４は、Ｚ軸に対してそれぞれ３０度、６０度、９０度ローラ配置中心ＲＣ方向に傾斜した回転軸を中心に回転するようになっている。 The pasting means 20 is rotatably supported by a bracket (not shown), and applies the adhesive sheet AS to the outer edge surface WK3 of the adherend WK so that a protruding area ASH is formed in the adhesive sheet AS supplied by the supply means 10. A pressing roller 21 as a pressing member that presses, first, second, and third pressing rollers 22, 23, and 24 as pressing members rotatably supported by a bracket (not shown), and a linear motor 25 as a driving device. , a rotary motor 26 as a driving device supported by the slider 25A, and a support surface 27A supported by its output shaft 26A and capable of being held by suction by a decompression means (holding means) not shown, such as a decompression pump or a vacuum ejector. an outer edge of one surface WK1 and an outer edge of the other surface WK2 of the adherend WK, and an outer edge end surface WK3 located between the one surface WK1 and the other surface WK2. The structure is such that an adhesive sheet AS is attached to the holder. The support table 27 is configured to rotate around a table center 27C by a rotation motor 26.
In this embodiment, as shown in FIGS. 1(B) and 1(C), when the adherend center WKC of the adherend WK is placed at the roller arrangement center RC, the pressing roller 21 The adhesive sheet AS supplied from the adhesive sheet AS is placed at a position where it can be pressed against the outer edge end surface WK3 of the adherend WK. In addition, the first, second, and third pressing rollers 22, 23, and 24, as shown in FIG. When the body center WKC is arranged at the roller arrangement center RC, the protruding area ASH of the adhesive sheet AS attached to the outer edge end surface WK3 of the adherend WK is bent in the direction of one surface WK1 and the direction of the other surface WK2, respectively. placed in a possible location. In this embodiment, the first, second, and third pressure rollers 22, 23, and 24 rotate around rotational axes that are inclined in the direction of the roller arrangement center RC at 30 degrees, 60 degrees, and 90 degrees, respectively, with respect to the Z axis. It is supposed to be done.

再押圧手段３０は、上下一対の駆動機器としての直動モータ３１と、各直動モータ３１の出力軸３１Ａにそれぞれ支持された押圧部材としての押圧板３２とを備えている。
なお、本実施形態では、再押圧手段３０は、一方の面ＷＫ１の外縁部および他方の面ＷＫ２の外縁部に接着シートＡＳを押し付けて重なり部ＡＳＰを再押圧するようになっている。 The re-pressing means 30 includes a pair of upper and lower direct-acting motors 31 as drive devices, and a pressing plate 32 as a pressing member supported by the output shaft 31A of each direct-acting motor 31, respectively.
In this embodiment, the re-pressing means 30 presses the adhesive sheet AS against the outer edge of one surface WK1 and the outer edge of the other surface WK2 to re-press the overlapped portion ASP.

エネルギー付与手段４０は、コイルヒータやヒートパイプの加熱側等の加熱機器４１を備え、各押圧板３２の内部に配置されている。 The energy applying means 40 includes a heating device 41 such as a coil heater or a heating side of a heat pipe, and is arranged inside each press plate 32 .

浮き上がり規制手段５０は、駆動機器としての直動モータ５１と、直動モータ５１の出力軸５１Ａに支持され、接着シートＡＳを外縁端面ＷＫ３に押圧する規制部材としての規制板５２とを備えている。 The lifting control means 50 includes a direct-acting motor 51 as a driving device, and a regulating plate 52 as a regulating member that is supported by an output shaft 51A of the direct-acting motor 51 and presses the adhesive sheet AS against the outer edge end surface WK3. .

以上のシート貼付装置ＥＡの動作を説明する。
先ず、図１（Ａ）中実線で示す初期位置に各部材が配置されたシート貼付装置ＥＡに対し、当該シート貼付装置ＥＡの使用者（以下、単に「使用者」という）が同図のように原反ＲＳをセットした後、操作パネルやパーソナルコンピュータ等の図示しない操作手段を介して自動運転開始の信号を入力する。すると、供給手段１０が回動モータ１５Ａ、１７Ａを駆動し、原反ＲＳを繰り出して図１（Ａ）に示すように、先頭の接着シートＡＳの供給方向先端部ＡＳＦが剥離板１４の剥離縁１４Ａで所定長さ剥離されると、回動モータ１５Ａ、１７Ａの駆動を停止する。 The operation of the above sheet pasting device EA will be explained.
First, a user of the sheet applicator EA (hereinafter simply referred to as "user") sets the sheet applicator EA in which each member is placed at the initial position shown by the solid line in FIG. After setting the original fabric RS, a signal to start automatic operation is inputted via an operation means (not shown) such as an operation panel or a personal computer. Then, the supply means 10 drives the rotary motors 15A and 17A to feed out the original fabric RS, and as shown in FIG. When a predetermined length is peeled off at 14A, the rotation motors 15A and 17A are stopped.

次いで、使用者または多関節ロボットやベルトコンベア等の図示しない搬送手段が、図１（Ａ）に示すように、被着体中心ＷＫＣがテーブル中心２７Ｃと重なるように、被着体ＷＫを支持面２７Ａ上に載置すると、移動手段３０が図示しない減圧手段を駆動し、当該支持面２７Ａでの吸着保持を開始する。その後、貼付手段２０がリニアモータ２５を駆動し、図１（Ｂ）に示すように、テーブル中心２７Ｃ（被着体中心ＷＫＣ）がローラ配置中心ＲＣと一致するように被着体ＷＫを左方へ移動させ、リニアモータ２５の駆動を停止する。次に、供給手段１０および貼付手段２０が回動モータモータ１５Ａ、１７Ａ、２６を駆動し、上方から見下ろした上面視で被着体ＷＫを反時計方向ＲＤに回転させつつ接着シートＡＳを供給する。これにより、接着シートＡＳは、押圧ローラ２１によって押圧され、図１（Ｂ）、（Ｃ）に示すように、はみ出し領域ＡＳＨが形成された状態で外縁端面ＷＫ３に貼付された後、図１（Ｄ）、（Ｅ）、（Ｆ）に示すように、第１、第２、第３押圧ローラ２２、２３、２４によってはみ出し領域ＡＳＨが段階的に折り曲げられ、被着体ＷＫの一方の面ＷＫ１および他方の面ＷＫ２に貼付される。 Next, as shown in FIG. 1(A), the user or a transport means (not shown) such as an articulated robot or a belt conveyor moves the adherend WK onto the support surface so that the center WKC of the adherend overlaps the center 27C of the table. When placed on the supporting surface 27A, the moving means 30 drives a pressure reducing means (not shown) to start suction and holding on the supporting surface 27A. Thereafter, the pasting means 20 drives the linear motor 25 to move the adherend WK to the left so that the table center 27C (adherent center WKC) coincides with the roller arrangement center RC. , and the driving of the linear motor 25 is stopped. Next, the supplying means 10 and the pasting means 20 drive the rotary motors 15A, 17A, and 26 to supply the adhesive sheet AS while rotating the adherend WK in the counterclockwise direction RD when viewed from above. . As a result, the adhesive sheet AS is pressed by the pressure roller 21 and is attached to the outer edge end surface WK3 with the protruding area ASH formed as shown in FIGS. 1(B) and 1(C). As shown in D), (E), and (F), the protruding area ASH is folded in stages by the first, second, and third pressing rollers 22, 23, and 24, and one surface WK1 of the adherend WK is folded. and the other side WK2.

そして、先頭の接着シートＡＳに続く次の接着シートＡＳの供給方向先端部ＡＳＦが剥離板１４の剥離縁１４Ａで所定長さ剥離されると、供給手段１０が回動モータ１５Ａ、１７Ａの駆動を停止し、原反ＲＳの繰り出しを停止する。次いで、先頭の接着シートＡＳの供給方向後端部ＡＳＲのはみ出し領域ＡＳＨが、第３押圧ローラ２４によって被着体ＷＫの一方の面ＷＫ１および他方の面ＷＫ２に貼付されて一体物ＵＰが形成されると、図２（Ｄ）に示すように、供給方向先端部ＡＳＦと供給方向後端部ＡＳＲとが相互に重なり合って重なり部ＡＳＰが形成される。その後、図２（Ａ）に示すように、重なり部ＡＳＰが押圧板３２の間に位置すると、貼付手段２０が回動モータ２６の駆動を停止する。 When the leading end ASF in the feeding direction of the next adhesive sheet AS following the first adhesive sheet AS is peeled off for a predetermined length by the peeling edge 14A of the peeling plate 14, the feeding means 10 starts driving the rotation motors 15A and 17A. and stops feeding out the original fabric RS. Next, the protruding area ASH of the rear end portion ASR in the feeding direction of the leading adhesive sheet AS is pasted to one surface WK1 and the other surface WK2 of the adherend WK by the third pressing roller 24 to form an integrated object UP. Then, as shown in FIG. 2(D), the supply direction leading end ASF and the supply direction rear end ASR overlap each other to form an overlapping part ASP. Thereafter, as shown in FIG. 2(A), when the overlapping portion ASP is positioned between the pressing plates 32, the pasting means 20 stops driving the rotation motor 26.

次に、浮き上がり規制手段５０が直動モータ５１を駆動し、図２（Ａ）中二点鎖線で示すように、規制板５２を移動させて重なり部ＡＳＰの側方を外縁端面ＷＫ３に押し付ける。そして、再押圧手段３０およびエネルギー付与手段４０が直動モータ３１および加熱機器４１を駆動し、図２（Ａ）中二点鎖線および図２（Ｂ）に示すように、押圧板３２を相互に接近させて重なり部ＡＳＰを再押圧する。これにより、接着シートＡＳは、自身の反接着面に対する貼付力が不十分であったとしても、再押圧手段３０の再押圧によって当該反接着面に対する貼付力が増加する。この際、再押圧手段３０は、図２（Ｃ）、（Ｅ）に示すように、重なり部ＡＳＰが変形する程度に当該重なり部ＡＳＰを再押圧してもよいし、図２（Ｂ）、（Ｄ）に示したような重なり部ＡＳＰの周囲に形成された空洞ＨＷや当該空洞ＨＷへの入口ＥＲが押し潰される程度に当該重なり部ＡＳＰを再押圧してもよいし、空洞ＨＷや当該空洞ＨＷへの入口ＥＲが押し潰されない程度に当該重なり部ＡＳＰを再押圧してもよいし、重なり部ＡＳＰが変形しない程度に当該重なり部ＡＳＰを再押圧してもよい。また、接着シートＡＳは、エネルギー付与手段４０によって付与される熱によって接着力が増加し、反接着面に対する接着力がさらに増加するようになる。 Next, the floating regulating means 50 drives the direct-acting motor 51 to move the regulating plate 52 and press the side of the overlapping portion ASP against the outer edge end surface WK3, as shown by the two-dot chain line in FIG. 2(A). Then, the re-pressing means 30 and the energy applying means 40 drive the direct-acting motor 31 and the heating device 41, and as shown in the chain double-dashed line in FIG. 2(A) and in FIG. 2(B), the pressing plates 32 are mutually Bring them close and press the overlapped part ASP again. As a result, even if the adhesive sheet AS has insufficient sticking force to its own anti-adhesive surface, the adhesion force to the anti-adhesive surface is increased by re-pressing by the re-pressing means 30. At this time, the re-pressing means 30 may re-press the overlapping part ASP to the extent that the overlapping part ASP is deformed, as shown in FIGS. 2(C) and (E), or The overlapped part ASP may be pressed again to the extent that the cavity HW formed around the overlapped part ASP and the entrance ER to the cavity HW as shown in (D) are crushed, or the cavity HW and the The overlapping portion ASP may be pressed again to an extent that the entrance ER to the cavity HW is not crushed, or the overlapping portion ASP may be pressed again to an extent that the overlapping portion ASP is not deformed. Further, the adhesive force of the adhesive sheet AS increases due to the heat applied by the energy applying means 40, and the adhesive force to the non-adhesive surface further increases.

次いで、重なり部ＡＳＰへの再押圧が完了すると、エネルギー付与手段４０が加熱機器４１の駆動を停止した後、再押圧手段３０および浮き上がり規制手段５０が直動モータ３１、５１を駆動し、各押圧板３２および規制板５２を初期位置に復帰させる。その後、貼付手段２０がリニアモータ２５を駆動し、支持テーブル２７を初期位置に復帰させた後、図示しない減圧手段の駆動を停止し、支持面２７Ａでの吸着保持を解除する。次に、使用者または図示しない搬送手段が一体物ＵＰを支持面２７Ａ上から取り去り、当該一体物ＵＰをめっき工程やドライエッチング工程等の次工程に搬送し、以降上記同様の動作が繰り返される。 Next, when the re-pressing on the overlapped portion ASP is completed, the energy applying means 40 stops driving the heating device 41, and then the re-pressing means 30 and the floating regulating means 50 drive the linear motors 31 and 51, and each press The plate 32 and the regulating plate 52 are returned to their initial positions. Thereafter, the pasting means 20 drives the linear motor 25 to return the support table 27 to its initial position, and then stops driving the pressure reducing means (not shown) to release the adsorption and holding on the support surface 27A. Next, the user or a transport means (not shown) removes the integral object UP from the support surface 27A, and transports the integral object UP to the next process such as a plating process or a dry etching process, and thereafter the same operation as described above is repeated.

以上のような実施形態によれば、貼付手段２０で押圧された重なり部ＡＳＰを再押圧するので、被着体ＷＫに接着シートＡＳを貼付して保護した保護部が次工程等において汚染されることを防止することができる。 According to the above-described embodiment, since the overlapping portion ASP pressed by the pasting means 20 is pressed again, the protective portion protected by pasting the adhesive sheet AS to the adherend WK is contaminated in the next process, etc. This can be prevented.

本発明における手段および工程は、それら手段および工程について説明した動作、機能または工程を果たすことができる限りなんら限定されることはなく、まして、前記実施形態で示した単なる一実施形態の構成物や工程に全く限定されることはない。例えば、供給手段は、接着シートを供給可能なものであればどんなものでもよく、出願当初の技術常識に照らし合わせてその技術範囲内のものであればなんら限定されることはない（その他の手段および工程も同じ）。 The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described with respect to the means and steps; It is not limited at all to the process. For example, the supply means may be any means as long as it can supply the adhesive sheet, and there are no limitations as long as it is within the technical scope in light of the common general knowledge at the time of filing (other means and the same process).

供給手段１０は、帯状の剥離シートＲＬに仮着された帯状の接着シート基材に閉ループ状または短寸幅方向全体の切込が形成されることで、その切込で仕切られた所定の領域が接着シートＡＳとされた原反ＲＳから当該接着シートＡＳを剥離して供給してもよいし、帯状の剥離シートＲＬに帯状の接着シート基材が仮着された帯状接着シート原反を採用し、当該帯状接着シート原反を繰り出す途中で、接着シート基材に閉ループ状または短寸幅方向全体の切込を切断手段としての切断刃で形成し、その切込で仕切られた所定の領域が接着シートＡＳとされた原反ＲＳから当該接着シートＡＳを剥離して供給してもよいし、帯状の剥離シートＲＬに帯状の接着シートＡＳが仮着された原反ＲＳから当該帯状の接着シートＡＳを剥離して供給してもよいし、巻回されることなく、例えばファンフォールド折りにされた原反ＲＳから接着シートＡＳを剥離して供給してもよいし、巻回することなく、例えばファンフォールド折りにしたり、シュレッダ等で切り刻んだり、無造作に集積したりして剥離シートＲＬを回収する回収手段を採用してもよいし、回収手段を採用しなくてもよいし、剥離シートＲＬに仮着されていない接着シートＡＳを繰り出して供給してもよいし、被着体ＷＫに貼付された接着シートＡＳを所定の長さに切断する切断手段を備えていてもよい。
供給手段１０は、接着シートＡＳが、弾性変形が可能なものとされた場合、外縁端面ＷＫ３に接着シートＡＳを貼付する際、回動モータ１７Ａを駆動し、駆動ローラ１７Ｃを介して接着シートＡＳから加わるトルクを検知して、当該トルクが常に所定の値となるようにしながら接着シートＡＳを供給することで、被着体ＷＫに貼付される接着シートＡＳに張力を付与してもよい。これにより、弾性変形が可能な接着シートＡＳは、内在する弾性復元力により、はみ出し領域ＡＳＨが一方の面ＷＫ１方向や他の面ＷＫ２方向に折れ曲がった折れ曲がり姿勢となる。この場合、はみ出し領域ＡＳＨは、折れ曲がり姿勢の状態から第１、第２、第３押圧ローラ２２、２３、２４を介して、一方の面ＷＫ１の外縁部および他方の面ＷＫ２の外縁部に貼付されてもよいし、折れ曲がり姿勢となることで、第１、第２、第３押圧ローラ２２、２３、２４を介さずに、一方の面ＷＫ１の外縁部および他方の面ＷＫ２の外縁部に貼付されてもよい。
張力付与手段１７は、原反ＲＳや接着シートＡＳを摺動可能に把持し、この把持力を調整して被着体ＷＫに貼付される接着シートＡＳに張力を付与したり、トルク制御ができない回動モータ１７Ａが採用されたりしてもよいし、接着シートＡＳの特性、特質、性質、材質、組成、構成、形状、寸法および重量や、雰囲気の条件、その他の要因等の諸条件を考慮して接着シートＡＳに付与する所定の張力を使用者が任意に決定することができるし、本発明のシート貼付装置ＥＡに備わっていてもよいし、備わっていなくてもよい。
なお、上記の実施形態では、張力付与手段１７を供給手段１０の構成物として説明したが、当該張力付与手段１７は、供給手段１０の構成物ではなく独立した構成されてもよく、例えば、剥離板１４と押圧ローラ２１との間に位置し、被着体ＷＫに貼付される接着シートＡＳに張力を付与してもよい。 The supply means 10 is provided by forming a closed loop cut or a notch in the entire width direction of the short dimension in the band-shaped adhesive sheet base material temporarily attached to the band-shaped release sheet RL, thereby supplying a predetermined area partitioned by the cut. The adhesive sheet AS may be peeled off and supplied from the original fabric RS which has been made into the adhesive sheet AS, or a band-shaped adhesive sheet original fabric in which a band-shaped adhesive sheet base material is temporarily attached to a band-shaped release sheet RL is used. Then, in the middle of unwinding the belt-shaped adhesive sheet raw material, a cut in the adhesive sheet base material in a closed loop shape or across the entire short width direction is formed with a cutting blade serving as a cutting means, and a predetermined area partitioned by the cut is formed. The adhesive sheet AS may be peeled off and supplied from the original fabric RS on which the adhesive sheet AS is made, or the adhesive sheet AS may be peeled off from the original fabric RS on which the adhesive sheet AS is temporarily attached to the release sheet RL. The sheet AS may be peeled off and supplied, or the adhesive sheet AS may be peeled off and fed from the fan-folded original fabric RS without being wound, for example, or without being wound. For example, a collection means for collecting the release sheet RL by fan-folding it, cutting it into pieces with a shredder, etc., or randomly accumulating it, or it is not necessary to adopt a collection means, or the release sheet RL The adhesive sheet AS that is not temporarily attached to the RL may be fed out, or a cutting means may be provided to cut the adhesive sheet AS attached to the adherend WK into a predetermined length.
When the adhesive sheet AS is elastically deformable, the supply means 10 drives the rotary motor 17A to apply the adhesive sheet AS to the outer edge surface WK3 via the driving roller 17C. Tension may be applied to the adhesive sheet AS attached to the adherend WK by detecting the torque applied from the adhesive sheet AS and supplying the adhesive sheet AS while ensuring that the torque is always at a predetermined value. As a result, the elastically deformable adhesive sheet AS assumes a bent posture in which the protruding region ASH is bent in the direction of one surface WK1 and the direction of the other surface WK2 due to the inherent elastic restoring force. In this case, the protruding area ASH is pasted from the bent position to the outer edge of one surface WK1 and the outer edge of the other surface WK2 via the first, second, and third pressing rollers 22, 23, and 24. Alternatively, by being in a bent position, it can be attached to the outer edge of one surface WK1 and the outer edge of the other surface WK2 without using the first, second, and third pressing rollers 22, 23, and 24. It's okay.
The tension applying means 17 slidably grips the original fabric RS and the adhesive sheet AS, adjusts this gripping force to apply tension to the adhesive sheet AS attached to the adherend WK, and cannot perform torque control. The rotation motor 17A may be adopted, and various conditions such as the characteristics, properties, properties, material, composition, configuration, shape, dimensions, and weight of the adhesive sheet AS, atmospheric conditions, and other factors are taken into consideration. The user can arbitrarily determine the predetermined tension to be applied to the adhesive sheet AS, and the sheet pasting device EA of the present invention may or may not be provided with the tension.
In the above embodiment, the tension applying means 17 has been described as a component of the supply means 10, but the tension applying means 17 may be configured independently instead of being a component of the supply means 10. Tension may be applied to the adhesive sheet AS located between the plate 14 and the pressing roller 21 and attached to the adherend WK.

貼付手段２０は、被着体ＷＫを移動させることなくまたは移動させつつ押圧部材を移動させ、被着体ＷＫに接着シートＡＳを貼付してもよいし、例えば、被着体ＷＫの一方の面ＷＫ１のみに接着シートＡＳを貼付したり、被着体ＷＫの他方の面ＷＫ２のみに接着シートＡＳを貼付したり、被着体ＷＫの外縁端面ＷＫ３のみに接着シートＡＳを貼付したり、被着体ＷＫの一方の面ＷＫ１および外縁端面ＷＫ３に接着シートＡＳを貼付したり、被着体ＷＫの一方の面ＷＫ１や他方の面ＷＫ２の中央部に接着シートＡＳを貼付したりしてもよく、どこに貼付してもよいし、保持面２７Ａでの吸着保持ができない支持テーブル２７が採用されてもよいし、被着体ＷＫに接着シートＡＳを貼付する際、当該被着体ＷＫを支持テーブル２７とで挟み込む上押え手段を備えていてもよいし、第１、第２、第３押圧ローラ２２、２３、２４が上下一対でなく、被着体ＷＫの一方の面ＷＫ１側のみまたは他方の面ＷＫ２側のみに設けられていてもよいし、第１、第２、第３押圧ローラ２２、２３、２４が、Ｚ軸に対してそれぞれ１３度、４７度、９１度といった角度でローラ配置中心ＲＣ方向に傾斜した回転軸を中心に回転するようになっていてもよいし、前記実施形態では、第１、第２、第３押圧ローラ２２、２３、２４の３体の押圧部材を採用し、接着シートＡＳを３段階で被着体ＷＫに貼付したが、４体以上の押圧部材を採用し、接着シートＡＳを４段階以上で被着体ＷＫに貼付したり、２体以下の押圧部材を採用し、接着シートＡＳを２段階以下で被着体ＷＫに貼付したりしてもよいし、押圧部材として第１、第２、第３押圧ローラ２２、２３、２４に代えてまたは併用して、ガイド板、回行ベルトまたはエアの吹付け等を採用し、接着シートＡＳを被着体ＷＫに貼付してもよいし、リニアモータ２５、回動モータ２６および支持テーブル２７に代えてまたは併用して、例えば、他の装置や図示しない駆動機器等によって、被着体ＷＫを押圧ローラ２１や第１、第２、第３押圧ローラ２２、２３、２４に対して相対移動させ、接着シートＡＳを被着体ＷＫに貼付してもよいし、第１、第２、第３押圧ローラ２２、２３、２４がなくてもよい。
貼付手段２０は、被着体ＷＫに接着シートＡＳを貼付しつつ、接着シートＡＳの供給方向先端部ＡＳＦと供給方向後端部ＡＳＲとを重ね合わせて重なり部ＡＳＰを形成し、当該接着シートＡＳを被着体ＷＫに押圧して貼付してもよいし、予め接着シートＡＳの供給方向先端部ＡＳＦと供給方向後端部ＡＳＲとを重ね合わせて重なり部ＡＳＰを形成した後、当該接着シートＡＳを被着体ＷＫに押圧して貼付してもよく、重なり部ＡＳＰを形成した後、当該接着シートＡＳを被着体ＷＫに押圧して貼付する場合、例えば、押圧ローラ２１の代わりに、駆動機器としての直動モータの出力軸に支持され、減圧ポンプや真空エジェクタ等の図示しない減圧手段（保持手段）によって吸着保持が可能な保持部材を採用し、この保持部材で接着シートＡＳを保持する際に重なり部ＡＳＰを形成し、当該保持部材で保持した接着シートＡＳを被着体ＷＫに押圧して貼付する構成としてもよい。 The pasting means 20 may move the pressing member without or while moving the adherend WK to apply the adhesive sheet AS to the adherend WK, or, for example, may apply the adhesive sheet AS to one side of the adherend WK. The adhesive sheet AS may be attached only to WK1, the adhesive sheet AS may be attached only to the other surface WK2 of the adherend WK, the adhesive sheet AS may be attached only to the outer edge surface WK3 of the adherend WK, or the adhesive sheet AS may be attached only to the outer edge surface WK3 of the adherend WK. The adhesive sheet AS may be attached to one surface WK1 and the outer edge surface WK3 of the body WK, or the adhesive sheet AS may be attached to the center of one surface WK1 and the other surface WK2 of the adherend WK, It may be attached anywhere, and a support table 27 that cannot be held by suction on the holding surface 27A may be used. When attaching the adhesive sheet AS to the adherend WK, the adherend WK may be attached to the support table 27. The first, second, and third pressing rollers 22, 23, and 24 may be provided with upper and lower pressing rollers 22, 23, and 24 not as a pair of upper and lower rollers, but only on one surface WK1 side of the adherend WK or on the other surface. It may be provided only on the WK2 side, or the first, second, and third pressure rollers 22, 23, and 24 may be provided at roller arrangement centers RC at angles of 13 degrees, 47 degrees, and 91 degrees, respectively, with respect to the Z axis. Alternatively, in the embodiment, three pressing members, the first, second, and third pressing rollers 22, 23, and 24, are used. Although the adhesive sheet AS was attached to the adherend WK in three stages, four or more pressing members were adopted, and the adhesive sheet AS was applied to the adherend WK in four or more stages, or two or less pressing members were used. The adhesive sheet AS may be applied to the adherend WK in two steps or less, or it may be used instead of or in combination with the first, second, and third pressing rollers 22, 23, and 24 as pressing members. The adhesive sheet AS may be attached to the adherend WK by using a guide plate, a rotating belt, or air blowing, or in place of or in combination with the linear motor 25, rotation motor 26, and support table 27. Then, for example, the adherend WK is moved relative to the pressure roller 21 and the first, second, and third pressure rollers 22, 23, and 24 by another device or a drive device (not shown), and the adhesive sheet AS is moved. may be attached to the adherend WK, or the first, second, and third pressing rollers 22, 23, and 24 may be omitted.
The pasting means 20 applies the adhesive sheet AS to the adherend WK, overlaps the leading end ASF in the supply direction and the rear end ASR in the supply direction of the adhesive sheet AS to form an overlapping part ASP, and applies the adhesive sheet AS to the adherend WK. Alternatively, the leading end ASF in the feeding direction and the trailing end ASR in the feeding direction of the adhesive sheet AS may be overlapped in advance to form an overlapping part ASP, and then the adhesive sheet AS The adhesive sheet AS may be pressed and attached to the adherend WK, and after forming the overlapping portion ASP, when the adhesive sheet AS is pressed and attached to the adherend WK, for example, instead of the pressing roller 21, a driving A holding member is adopted that is supported by the output shaft of a direct-acting motor as a device and can be held by suction by a pressure reducing means (holding means) not shown such as a pressure reducing pump or a vacuum ejector, and the adhesive sheet AS is held by this holding member. At the same time, an overlapping portion ASP may be formed, and the adhesive sheet AS held by the holding member may be pressed and attached to the adherend WK.

再押圧手段３０は、被着体ＷＫの一方の面ＷＫ１に形成された重なり部ＡＳＰのみを再押圧したり、被着体ＷＫの他方の面ＷＫ２に形成された重なり部ＡＳＰのみを再押圧したり、被着体ＷＫの外縁端面ＷＫ３に形成された重なり部ＡＳＰのみを再押圧したりしてもよく、被着体ＷＫの何れの位置に形成された重なり部ＡＳＰを再押圧してもよいし、直動モータ３１や押圧板３２が上下一対ではなく、例えば、被着体ＷＫの一方の面ＷＫ１側のみに配置されていたり、被着体ＷＫの他方の面ＷＫ２側のみに配置されていたり、被着体ＷＫの外縁端面ＷＫ３側のみに配置されていたりしてもよいし、押圧板３２と支持テーブル２７とで重なり部ＡＳＰを再押圧する構成としてもよいし、押圧板３２の材質が、ゴムや樹脂等の弾性変形が可能なもので構成されていたり、金属や硝子等の弾性変形が不能なもので構成されていたりしてもよいし、直動モータ３１や押圧板３２に代えてまたは併用して、ガイド板、回行ベルトまたはエアの吹付け等で、重なり部ＡＳＰを再押圧してもよいし、重なり部ＡＳＰ全体を再押圧したり、重なり部ＡＳＰ全体を再押圧することなく、当該重なり部ＡＳＰの一部のみを再押圧したりしてもよい。 The repressing means 30 represses only the overlapping portion ASP formed on one surface WK1 of the adherend WK, or represses only the overlapping portion ASP formed on the other surface WK2 of the adherend WK. Alternatively, only the overlapping portion ASP formed on the outer edge end surface WK3 of the adherend WK may be pressed again, or the overlapping portion ASP formed at any position on the adherend WK may be pressed again. However, the linear motor 31 and the pressing plate 32 are not arranged in a pair of upper and lower parts, but are arranged only on one surface WK1 side of the adherend WK, or only on the other surface WK2 side of the adherend WK. Alternatively, it may be arranged only on the outer edge end surface WK3 side of the adherend WK, or the overlapping part ASP may be pressed again by the press plate 32 and the support table 27, or the material of the press plate 32 may be However, it may be made of a material that can be elastically deformed such as rubber or resin, or may be made of a material that cannot be elastically deformed such as metal or glass. Alternatively or in combination, the overlapping portion ASP may be pressed again using a guide plate, rotating belt, air blowing, etc., the entire overlapping portion ASP may be repressed, or the entire overlapping portion ASP may be repressed. Alternatively, only a part of the overlapping portion ASP may be pressed again.

エネルギー付与手段４０は、所定のエネルギーとして、紫外線、赤外線、可視光線、音波、Ｘ線またはガンマ線等の電磁波や、熱湯や熱風等の熱等を付与するものでもよく、接着シートＡＳの特性、特質、性質、材質、組成および構成等を考慮して当該接着シートの接着力を増加できるものを任意に採用することができるし、押圧板３２の外部に配置されていてもよいし、規制板５２の内部に配置されていてもよいし、再押圧手段３０で重なり部ＡＳＰを再押圧する前に、接着シートＡＳに所定のエネルギーを付与して当該接着シートＡＳの接着力を増加させてもよいし、本発明のシート貼付装置ＥＡに備わっていてもよいし、備わっていなくてもよい。 The energy applying means 40 may apply electromagnetic waves such as ultraviolet rays, infrared rays, visible rays, sound waves, X-rays, or gamma rays, or heat such as hot water or hot air as predetermined energy, and may apply energy such as heat such as hot water or hot air. , it is possible to arbitrarily adopt an adhesive sheet that can increase the adhesive force of the adhesive sheet in consideration of properties, materials, compositions, configurations, etc., and it may be arranged outside the pressure plate 32, or the regulation plate 52 The adhesive force of the adhesive sheet AS may be increased by applying a predetermined energy to the adhesive sheet AS before repressing the overlapping portion ASP with the repressing means 30. However, the sheet pasting device EA of the present invention may or may not be provided with it.

浮き上がり規制手段５０は、規制板５２の材質が、ゴムや樹脂等の弾性変形が可能なもので構成されていたり、金属や硝子等の弾性変形が不能なもので構成されていたりしてもよいし、直動モータ５１や規制板５２に代えてまたは併用して、ガイド板、回行ベルトまたはエアの吹付け等で、接着シートＡＳが被着体ＷＫの外縁端面ＷＫ３から浮き上がることを規制してもよいし、本発明のシート貼付装置ＥＡに備わっていてもよいし、備わっていなくてもよい。 The material of the regulating plate 52 of the lifting regulating means 50 may be made of a material that can be elastically deformed such as rubber or resin, or may be made of a material that cannot be elastically deformed such as metal or glass. However, instead of or in combination with the direct-acting motor 51 and the regulating plate 52, a guide plate, a rotating belt, or air blowing can be used to prevent the adhesive sheet AS from rising from the outer edge surface WK3 of the adherend WK. It may be provided in the sheet pasting apparatus EA of the present invention, or it may not be provided.

シート貼付装置ＥＡは、１つまたは複数の被着体ＷＫに１枚の接着シートＡＳを貼付したり、１つまたは複数の被着体ＷＫに複数の接着シートＡＳを貼付したりしてもよいし、被着体ＷＫの一方の面ＷＫ１側および他方の面ＷＫ２側のうち少なくとも一方に、金属、硝子、樹脂、他の接着シート等の支持部材を配置したり貼付したりして、接着シートＡＳで当該被着体ＷＫと支持部材とを一体化させてもよい。
シート貼付装置ＥＡは、接着シートＡＳが所定の第２エネルギーによって変形が可能なものとされた場合、図１（Ａ）中二点鎖線で示すように、接着シートＡＳに所定の第２エネルギーを付与する第２エネルギー付与手段６０を備えていてもよい。このような第２エネルギー付与手段６０は、押圧ローラ２１と再押圧手段３０との間に設けてもよいし、剥離板１４と押圧ローラ２１との間に設けてもよい。このような構成とすることで、シート貼付装置ＥＡは、はみ出し領域ＡＳＨが形成されるようにして接着シートＡＳを外縁端面ＷＫ３に貼付した後、当該はみ出し領域ＡＳＨに第２エネルギーを付与して変形させ、当該はみ出し領域ＡＳＨが一方の面ＷＫ１方向や他の面ＷＫ２方向に折れ曲がった折れ曲がり姿勢とすることができる。この場合、はみ出し領域ＡＳＨは、折れ曲がり姿勢の状態から第１、第２、第３押圧ローラ２２、２３、２４を介して、一方の面ＷＫ１の外縁部および他方の面ＷＫ２の外縁部に貼付されてもよいし、折れ曲がり姿勢となることで、第１、第２、第３押圧ローラ２２、２３、２４を介さずに、一方の面ＷＫ１の外縁部および他方の面ＷＫ２の外縁部に貼付されてもよい。
なお、第２エネルギーによって変形が可能な接着シートＡＳとしては、紫外線、赤外線、可視光線、音波、Ｘ線またはガンマ線等の電磁波や、熱湯や熱風等の熱等を第２エネルギーとして変形するものやそれ以外のエネルギーによって変形するものでもよい。
また、第２エネルギー付与手段としては、紫外線、赤外線、可視光線、音波、Ｘ線またはガンマ線等の電磁波や、熱湯や熱風等の熱等を付与するものでもよく、接着シートＡＳの特性、特質、性質、材質、組成および構成等を考慮して当該接着シートを変形させることができるものを任意に採用することができる。 The sheet applying device EA may apply one adhesive sheet AS to one or more adherends WK, or apply a plurality of adhesive sheets AS to one or more adherends WK. Then, a supporting member such as metal, glass, resin, or other adhesive sheet is placed or attached to at least one of one surface WK1 side and the other surface WK2 side of the adherend WK, and an adhesive sheet is formed. The adherend WK and the support member may be integrated with AS.
When the adhesive sheet AS can be deformed by a predetermined second energy, the sheet pasting device EA applies a predetermined second energy to the adhesive sheet AS, as shown by the chain double-dashed line in FIG. 1(A). A second energy applying means 60 may be provided. Such a second energy applying means 60 may be provided between the pressing roller 21 and the re-pressing means 30, or between the peeling plate 14 and the pressing roller 21. With such a configuration, the sheet adhering device EA applies the second energy to the protruding area ASH to deform it after adhering the adhesive sheet AS to the outer edge end surface WK3 so that the protruding area ASH is formed. The protruding region ASH can be bent in the direction of one surface WK1 and the other surface WK2. In this case, the protruding area ASH is pasted from the bent position to the outer edge of one surface WK1 and the outer edge of the other surface WK2 via the first, second, and third pressing rollers 22, 23, and 24. Alternatively, by being in a bent position, it can be attached to the outer edge of one surface WK1 and the outer edge of the other surface WK2 without using the first, second, and third pressing rollers 22, 23, and 24. It's okay.
Note that adhesive sheets AS that can be deformed by second energy include those that can be deformed by using electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays, or gamma rays, or heat such as hot water or hot air as second energy. It may also be a material that is deformed by other energy.
Further, the second energy applying means may be one that applies electromagnetic waves such as ultraviolet rays, infrared rays, visible rays, sound waves, X-rays, or gamma rays, or heat such as boiling water or hot air. Any material that can deform the adhesive sheet can be adopted in consideration of properties, materials, compositions, configurations, etc.

接着シートＡＳは、所定のエネルギーによって接着力が増加しないものでもよいし、所定の第２エネルギーによって変形しないものでもよい。
所定のエネルギーや所定の第２エネルギーによって接着力が増加したり変形したりする接着シートＡＳは、収縮を伴って接着力が増加したり変形したりしてもよいし、膨張を伴って接着力が増加したり変形したりしてもよいし、収縮も膨張も伴うことなく接着力が増加したり変形したりするものでもよい。
被着体ＷＫは、一方の面ＷＫ１側および他方の面ＷＫ２側のうち少なくとも一方に、環状または非環状の凸部が形成されていてもよいし、一方の面ＷＫ１側および他方の面ＷＫ２側のうち少なくとも一方に、金属、硝子、樹脂、他の接着シート等の支持部材が取り付けられていてもよい。 The adhesive sheet AS may be one in which the adhesive force does not increase with a predetermined energy, or may not be deformed with a predetermined second energy.
Adhesive sheet AS whose adhesive force increases or deforms with a predetermined energy or a predetermined second energy may increase the adhesive force or deform with contraction, or increase the adhesive force with expansion. may be increased or deformed, or the adhesive force may be increased or deformed without shrinkage or expansion.
The adherend WK may have an annular or non-annular convex portion formed on at least one of one surface WK1 side and the other surface WK2 side, or one surface WK1 side and the other surface WK2 side. A supporting member such as metal, glass, resin, or other adhesive sheet may be attached to at least one of them.

本発明における接着シートＡＳ、他の接着シート、支持部材および被着体ＷＫの材質、種別、形状等は、特に限定されることはない。例えば、接着シートＡＳ、他の接着シート、支持部材および被着体ＷＫは、円形、楕円形、三角形や四角形等の多角形、その他の形状であってもよいし、接着シートＡＳや他の接着シートは、感圧接着性、感熱接着性等の接着形態のものであってもよく、感熱接着性の接着シートＡＳや他の接着シートが採用された場合は、当該接着シートＡＳや他の接着シートを加熱する適宜なコイルヒータやヒートパイプの加熱側等の加熱手段を設けるといった適宜な方法で接着されればよい。また、このような接着シートＡＳや他の接着シートは、例えば、接着剤層だけの単層のもの、基材と接着剤層とが積層された２層のもの、基材と接着剤層との間に１または複数の中間層が積層された３層または３層以上のもの、基材の上面に１または複数のカバー層が積層された３層または３層以上のもの、基材、中間層またはカバー層が剥離可能に設けられたもの、接着剤層のみからなる単層の両面接着シート、１または複数の中間層の両最外面に接着剤層が積層された両面接着シート等、どのようなものでもよい。さらに、支持部材や被着体ＷＫとしては、例えば、食品、樹脂容器、シリコン半導体ウエハや化合物半導体ウエハ等の半導体ウエハ、回路基板、光ディスク等の情報記録基板、ガラス板、鋼板、陶器、木板または樹脂等の単体物であってもよいし、それら２つ以上で形成された複合物であってもよく、任意の形態の部材や物品なども対象とすることができる。なお、接着シートＡＳや他の接着シートは、機能的、用途的な読み方に換え、例えば、情報記載用ラベル、装飾用ラベル、保護シート、ダイシングテープ、ダイアタッチフィルム、ダイボンディングテープ、記録層形成樹脂シート等の任意のシート、フィルム、テープ等でもよい。 The materials, types, shapes, etc. of the adhesive sheet AS, other adhesive sheets, supporting members, and adherends WK in the present invention are not particularly limited. For example, the adhesive sheet AS, other adhesive sheets, supporting members, and adherends WK may be circular, oval, polygonal such as triangles and quadrangles, or other shapes, or the adhesive sheet AS and other adhesive sheets may be The sheet may be of an adhesive type such as a pressure-sensitive adhesive or a heat-sensitive adhesive, and if a heat-sensitive adhesive sheet AS or other adhesive sheet is adopted, the adhesive sheet AS or other adhesive sheet may be used. The adhesive may be bonded by an appropriate method such as providing a heating means such as an appropriate coil heater or heating side of a heat pipe to heat the sheet. In addition, such adhesive sheets AS and other adhesive sheets include, for example, single-layer adhesive sheets, two-layer adhesive sheets with a base material and an adhesive layer laminated, and adhesive sheets with a base material and an adhesive layer. Three layers or three or more layers with one or more intermediate layers laminated between them, three or more layers with one or more cover layers laminated on the top surface of the base material, base material, intermediate layer A double-sided adhesive sheet with a removable layer or cover layer, a single-layer double-sided adhesive sheet consisting only of an adhesive layer, a double-sided adhesive sheet with an adhesive layer laminated on both outermost surfaces of one or more intermediate layers, etc. Something like this is fine. Furthermore, the supporting member and the adherend WK include, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit boards, information recording substrates such as optical disks, glass plates, steel plates, ceramics, wooden plates, etc. The object may be a single object such as a resin, or a composite formed of two or more of them, and members or articles of any form can be targeted. Adhesive sheet AS and other adhesive sheets can be read in terms of functionality and usage, such as information writing labels, decorative labels, protective sheets, dicing tapes, die attach films, die bonding tapes, and recording layer formation. Any sheet such as a resin sheet, film, tape, etc. may be used.

前記実施形態における駆動機器は、回動モータ、直動モータ、リニアモータ、単軸ロボット、２軸または３軸以上の関節を備えた所謂多関節ロボット等の電動機器、エアシリンダ、油圧シリンダ、ロッドレスシリンダおよびロータリシリンダ等のアクチュエータ等が単体で採用されてもよいし、それら電動機器やアクチュエータ等が直接的又は間接的に組み合わされたものが採用されてもよいし、それら電動機器やアクチュエータ等の出力部に対するトルク制御や速度制御等が可能なものや不能なものが採用されてもよい。 The drive devices in the embodiment include rotary motors, direct-acting motors, linear motors, single-axis robots, so-called multi-joint robots with two or more axes of joints, and other electric devices, air cylinders, hydraulic cylinders, and rods. Actuators such as non-resistance cylinders and rotary cylinders may be used alone, or a direct or indirect combination of these electric devices and actuators may be used, and these electric devices, actuators, etc. It is also possible to adopt a device that allows torque control, speed control, etc. for the output portion of the device, or a device that does not allow torque control or speed control.

前記実施形態において、ローラ等の回転部材が採用されている場合、当該回転部材を回転駆動させる駆動機器を備えてもよいし、回転部材の表面や回転部材自体をゴムや樹脂等の変形可能な部材で構成してもよいし、回転部材の表面や回転部材自体を変形しない部材で構成してもよいし、ローラの代わりに回転するまたは回転しないシャフトやブレード等の他の部材を採用してもよいし、押圧ローラ、押圧板３２または押圧ヘッド等の押圧手段や押圧部材または規制部材といった被押圧物を押圧するものが採用されている場合、上記で例示したものに代えてまたは併用して、ローラ、丸棒、ブレード材、ブラシ状部材の他、大気やガス等の気体の吹き付けによるものを採用してもよいし、押圧するものをゴム、樹脂、スポンジ等の変形可能な部材で構成してもよいし、金属や硝子等の変形しない部材で構成してもよいし、剥離板や剥離ローラ等の剥離手段や剥離部材といった被剥離物を剥離するものが採用されている場合、上記で例示したものに代えてまたは併用して、板状部材、丸棒、ローラ等の部材を採用してもよいし、剥離するものをゴムや樹脂等の変形可能な部材で構成してもよいし、変形しない部材で構成してもよいし、支持（保持）手段や支持（保持）部材等の被支持部材（被保持部材）を支持（保持）するものが採用されている場合、メカチャックやチャックシリンダ等の把持手段、クーロン力、接着剤（接着シート、接着テープ）、粘着剤（粘着シート、粘着テープ）、磁力、ベルヌーイ吸着、吸引吸着、駆動機器等で被支持部材を支持（保持）する構成を採用してもよいし、切断手段や切断部材等の被切断部材を切断または、被切断部材に切込や切断線を形成するものが採用されている場合、上記で例示したものに代えてまたは併用して、カッター刃、レーザカッタ、イオンビーム、火力、熱、水圧、電熱線、気体や液体等の吹付け等で切断するものを採用したり、適宜な駆動機器を組み合わせたもので切断するものを移動させて切断するようにしたりしてもよい。 In the above embodiment, when a rotating member such as a roller is employed, a driving device for rotationally driving the rotating member may be provided, or the surface of the rotating member or the rotating member itself may be made of deformable material such as rubber or resin. It may be made of a member, the surface of the rotating member or the rotating member itself may be made of a member that does not deform, or other members such as rotating or non-rotating shafts or blades may be used instead of the roller. Alternatively, if a pressing means such as a pressing roller, pressing plate 32, or pressing head, or a pressing member or regulating member that presses the object to be pressed is employed, it may be used in place of or in combination with the examples exemplified above. In addition to rollers, round bars, blade materials, and brush-like members, it is also possible to use a device that uses air or gas to be blown, or the pressing device is made of a deformable member such as rubber, resin, or sponge. Alternatively, it may be made of a non-deformable member such as metal or glass.If a peeling means such as a peeling plate or a peeling roller or a peeling member that peels off the object is used, the above-mentioned In place of or in combination with the examples given above, members such as plate-shaped members, round bars, rollers, etc. may be adopted, and the material to be peeled off may be constructed of deformable members such as rubber or resin. However, it may be composed of a member that does not deform, and if a support (holding) means or a support (holding) member that supports (holds) the supported member (held member) is adopted, a mechanical chuck is used. Supporting (holding) the supported member using gripping means such as or chuck cylinders, Coulomb force, adhesives (adhesive sheets, adhesive tapes), adhesives (adhesive sheets, adhesive tapes), magnetic force, Bernoulli adsorption, suction adsorption, drive equipment, etc. ) may be adopted, or if a cutting means or a cutting member that cuts the member to be cut or forms a cut or a cutting line in the member to be cut is employed, the above-mentioned configuration may be adopted. Instead of, or in combination with, a cutter blade, laser cutter, ion beam, thermal power, heat, water pressure, heating wire, spraying of gas or liquid, etc. are used for cutting, or a combination of appropriate drive equipment is used. The object to be cut may be moved and cut using a tool.

ＥＡ…シート貼付装置
１０…供給手段
１７…張力付与手段
２０…貼付手段
３０…再押圧手段
４０…エネルギー付与手段
５０…浮き上がり規制手段
６０…第２エネルギー付与手段
ＡＳ…接着シート
ＡＳＦ…供給方向先端部
ＡＳＰ…重なり部
ＡＳＲ…供給方向後端部
ＷＫ…被着体
ＷＫ１…一方の面
ＷＫ２…他方の面
ＷＫ３…外縁端面 EA... Sheet pasting device 10... Supply means 17... Tension imparting means 20... Pasting means 30... Re-pressing means 40... Energy imparting means 50... Lifting control means 60... Second energy imparting means AS... Adhesive sheet ASF... Leading end in supply direction ASP...overlapping part ASR...rear end in supply direction WK...adherent WK1...one surface WK2...other surface WK3...outer edge end surface

Claims (6)

接着シートを供給する供給手段と、
前記供給手段で供給された前記接着シートの供給方向先端部と供給方向後端部とを重ね合わせて重なり部を形成し、当該接着シートを被着体に押圧して貼付する貼付手段とを備えたシート貼付装置において、
前記貼付手段で押圧された前記重なり部を再押圧する再押圧手段をさらに備えていることを特徴とするシート貼付装置。 a supply means for supplying an adhesive sheet;
and a pasting means for overlapping the leading end in the feeding direction and the trailing end in the feeding direction of the adhesive sheet supplied by the feeding means to form an overlapping part, and pressing and pasting the adhesive sheet onto an adherend. In the sheet pasting device,
A sheet pasting device further comprising re-pressing means for re-pressing the overlapping portion pressed by the pasting means. 前記接着シートは、所定のエネルギーによって接着力が増加可能とされ、
前記接着シートに前記所定のエネルギーを付与するエネルギー付与手段を備えていることを特徴とする請求項１に記載のシート貼付装置。 The adhesive sheet has an adhesive force that can be increased by a predetermined amount of energy,
The sheet pasting device according to claim 1, further comprising an energy applying means for applying the predetermined energy to the adhesive sheet. 前記貼付手段は、前記被着体の一方の面の外縁部および他方の面の外縁部と、当該一方の面および他方の面の間に位置する外縁端面とに前記接着シートを貼付し、
前記再押圧手段は、前記一方の面の外縁部および他方の面の外縁部に前記接着シートを押し付けて前記重なり部を再押圧し、
前記再押圧手段による前記重なり部の再押圧の際、前記接着シートが前記被着体の外縁端面から浮き上がることを規制する浮き上がり規制手段を備えていることを特徴とする請求項１または請求項２に記載のシート貼付装置。 The attaching means attaches the adhesive sheet to an outer edge of one surface of the adherend, an outer edge of the other surface, and an outer edge end surface located between the one surface and the other surface,
The re-pressing means presses the adhesive sheet against the outer edge of the one surface and the outer edge of the other surface to re-press the overlapping portion,
Claim 1 or Claim 2, further comprising lifting-up restricting means for restricting the adhesive sheet from lifting up from the outer edge end surface of the adherend when the overlapping portion is pressed again by the re-pressing unit. The sheet pasting device described in . 前記接着シートは、弾性変形が可能とされ、
被着体に貼付される接着シートに張力を付与する張力付与手段を備えていることを特徴とする請求項１または請求項２に記載のシート貼付装置。 The adhesive sheet is capable of elastic deformation,
3. The sheet pasting device according to claim 1, further comprising a tension applying means for applying tension to the adhesive sheet pasted to the adherend. 前記接着シートは、所定の第２エネルギーによって変形が可能とされ、
前記接着シートに前記所定の第２エネルギーを付与する第２エネルギー付与手段を備えていることを特徴とする請求項１または請求項２に記載のシート貼付装置。 The adhesive sheet is deformable by a predetermined second energy,
3. The sheet pasting device according to claim 1, further comprising second energy applying means for applying the predetermined second energy to the adhesive sheet. 接着シートを供給する供給工程と、
前記供給工程で供給された前記接着シートの供給方向先端部と供給方向後端部とを重ね合わせて重なり部を形成し、当該接着シートを被着体に押圧して貼付する貼付工程とを実施するシート貼付方法において、
前記貼付工程で押圧された前記重なり部を再押圧する再押圧工程をさらに実施することを特徴とするシート貼付方法。 A supply process of supplying an adhesive sheet;
A pasting step is performed in which the leading end in the feeding direction and the trailing end in the feeding direction of the adhesive sheet supplied in the feeding step are overlapped to form an overlapping portion, and the adhesive sheet is pressed and pasted onto an adherend. In the sheet pasting method,
A sheet pasting method characterized by further carrying out a re-pressing step of re-pressing the overlapping portions pressed in the pasting step.
JP2022074968A 2022-04-28 2022-04-28 Sheet pasting device and sheet pasting method Pending JP2023163815A (en)

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TW112106366A TW202343627A (en) 2022-04-28 2023-02-22 Sheet attaching device and sheet attaching method characterized by preventing a protection part performing a protection by attaching an attaching sheet onto an attached body from being contaminated in the next process
CN202310426880.8A CN116978816A (en) 2022-04-28 2023-04-20 Sheet bonding apparatus and sheet bonding method
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