JP2023103144A - Soft magnetic metal flat powder, resin composite sheet, and resin composite composition using the same - Google Patents

Soft magnetic metal flat powder, resin composite sheet, and resin composite composition using the same Download PDF

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JP2023103144A
JP2023103144A JP2022013691A JP2022013691A JP2023103144A JP 2023103144 A JP2023103144 A JP 2023103144A JP 2022013691 A JP2022013691 A JP 2022013691A JP 2022013691 A JP2022013691 A JP 2022013691A JP 2023103144 A JP2023103144 A JP 2023103144A
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soft magnetic
resin composite
metal flat
flat powder
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JP2023103144A5 (en
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宏 安井
Hiroshi Yasui
信彦 日笠
Nobuhiko Hikasa
信一 西山
Shinichi Nishiyama
直也 行吉
Naoya Yukiyoshi
健太 鶴崎
Kenta TSURUSAKI
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MATE Co Ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/06—Metallic powder characterised by the shape of the particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/07—Metallic powder characterised by particles having a nanoscale microstructure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/12—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
    • H01F1/14—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
    • H01F1/147—Alloys characterised by their composition
    • H01F1/153—Amorphous metallic alloys, e.g. glassy metals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/12—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
    • H01F1/14—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
    • H01F1/20—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys in the form of particles, e.g. powder
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K9/00—Screening of apparatus or components against electric or magnetic fields

Abstract

To provide a nanocrystalline soft magnetic metal flat powder with little change in the temperature coefficient of magnetic permeability and having high magnetic permeability and low core loss, a resin composite sheet using the material, and a resin composite composition for molding.SOLUTION: A magnetic permeability temperature coefficient Kn (n is 1, 2, 3) of nanocrystalline soft magnetic metal flat powder is expressed by the following formulas (1), (2), and (3) in the range of -40°C to 150°, and also in the range of C0≤K1≤0.20, -0.10≤K2≤0.10, and -0.15≤K3≤0.05, and higher soft magnetic properties can be obtained. K1=(μ(0°C)-μ(-40°C))/μ(-40°C) (1). K2=(μ(85°C)-μ(-40°C))/μ(-40°C) (2). K3=(μ(150°C)-μ(-40°C))/μ(-40°C) (3). μ: permeability (μ': real permeability, μ": imaginary permeability), μ(0°C): permeability at 0°C.SELECTED DRAWING: Figure 2

Description

発明の詳細な説明Detailed description of the invention

本発明は、通信機器や各種電子機器において不要電磁波対策として使用されるノイズ抑制部品や、電磁誘導装置で使用される磁気シールド部品、インダクタやリアクトルなどの電子部品用コアに用いられる軟磁性金属扁平粉末と、それを用いた樹脂複合シート並びに成形加工用樹脂複合組成物に関する。 The present invention relates to noise suppression parts used as countermeasures against unnecessary electromagnetic waves in communication equipment and various electronic devices, magnetic shield parts used in electromagnetic induction devices, soft magnetic metal flat powders used in cores for electronic parts such as inductors and reactors, resin composite sheets using the same, and resin composite compositions for molding.

通信機器や各種電子機器から不要電磁波が発生するため、外部および内部干渉による機器の誤動作や通信障害が問題となり各種の対策が行われているが、使用される電波の種類が増えるとともに、高周波数化も進んでいる。さらにコントロールＩＣの種類や、駆動周波数も多様化しており、問題がさらに顕在化してきている。 Unnecessary electromagnetic waves are generated from communication devices and various electronic devices, and various countermeasures are being taken to prevent device malfunctions and communication failures due to external and internal interference. Furthermore, the types of control ICs and driving frequencies are diversifying, and the problems are becoming more apparent.

また、通信機器や各種電子機器の薄型化、小型化が進み、電子部品の実装密度が飛躍的に高まったことで部品間や回路基板間の電磁干渉に起因する問題が頻発し、電磁波対策のためにノイズ対策用電子部品やフレキシブル磁性シート（樹脂複合シート）が使用されている。 In addition, communication equipment and various electronic devices have become thinner and smaller, and the mounting density of electronic components has increased dramatically. As a result, problems caused by electromagnetic interference between components and between circuit boards have frequently occurred.

一方で電磁波の有効利用が進んでおり、電磁誘導方式を利用したモバイル機器のペン入力や非接触充電が普及し、金属部品との干渉防止や磁界を有効に利用するためにコイル部品との組み合わせで、樹脂複合シートや成形加工品は磁気シールド材として使用されている。 On the other hand, the effective use of electromagnetic waves is progressing, and pen input and non-contact charging of mobile devices using the electromagnetic induction method are becoming popular, and resin composite sheets and molded products are used as magnetic shield materials in combination with coil parts to prevent interference with metal parts and effectively use magnetic fields.

電磁波ノイズ抑制や、磁気シールドのために使用される樹脂複合シートや成形加工品には、軟磁性金属扁平粉末が使用されている。これは扁平状に加工することにより反磁界係数が小さくなり、面内方向の透磁率が高くなることと、スネークの限界を超えてより高い周波数まで透磁率を維持できるようになるためである。電磁波ノイズ抑制のためには、透磁率の磁気損失を示す虚数透磁率μ’’を利用しており、磁気シールドでは透磁率の実数透磁率μ’が利用されている。 Soft magnetic metal flat powders are used in resin composite sheets and molded products used for electromagnetic wave noise suppression and magnetic shielding. This is because flat processing reduces the demagnetizing coefficient, increases the magnetic permeability in the in-plane direction, and makes it possible to maintain the magnetic permeability up to higher frequencies beyond the Snake limit. For electromagnetic wave noise suppression, the imaginary permeability μ″ that indicates the magnetic loss of the permeability is used, and the magnetic shield uses the real permeability μ′.

しかしながら、近年の装置の薄型化、小型化の進行で、電磁波ノイズ抑制や磁気シールド部品の実装スペースが限られるようになり、今まで以上に透磁率が高く、コアロスが低いような、所謂、軟磁気特性の高い、軟磁性金属扁平粉末を用いた樹脂複合シート並びに成形加工用の樹脂複合組成物への要求が高まっている。また、インダクタや昇圧回路用のリアクトルなどの電子部品でも小型化、損失低減と大電流対応のために、軟磁気特性の高いコア材料の要求がある。 However, with the progress of thinning and miniaturization of devices in recent years, the mounting space for electromagnetic noise suppression and magnetic shield parts has become limited, and the so-called soft magnetic properties such as higher magnetic permeability and lower core loss than ever before. There is an increasing demand for a resin composite sheet using soft magnetic metal flat powder and a resin composite composition for molding. There is also a demand for core materials with high soft magnetic properties in order to reduce the size of electronic components such as inductors and reactors for booster circuits, reduce losses, and support large currents.

従来、Ｆｅ基合金粉末を用いた軟磁性金属扁平粉末として、センダストと呼ばれるＦｅ－Ａｌ－Ｓｉ組成の扁平粉末の透磁率が高いことが知られており、特に結晶磁気異方性と磁歪がともにゼロでとなるＡｌ：５．４ｗｔ％、Ｓｉ：９．６ｗｔ％付近で、残部がＦｅと不可避の不純物からなる組成が優れている。このため、扁平粉末表面酸化を加味して組成を調整する特許第３７２２３９１（特許文献１）がある。一方で、特許第６５９２４２４（特許文献２）、特開２００５－２８１７８３（特許文献３）ではＡｌ、Ｓｉの組成を積極的に調整することで、より高い透磁率を得られることが提案されている。 Conventionally, as a soft magnetic metal flat powder using Fe-based alloy powder, it is known that flat powder of Fe-Al-Si composition called sendust has high magnetic permeability. For this reason, there is Japanese Patent No. 3722391 (Patent Literature 1) in which the composition is adjusted by considering the surface oxidation of the flat powder. On the other hand, Japanese Patent No. 6592424 (Patent Document 2) and Japanese Patent Application Laid-Open No. 2005-281783 (Patent Document 3) propose that a higher magnetic permeability can be obtained by positively adjusting the composition of Al and Si.

また、センダストを越える高い軟磁気特性が期待できるナノ結晶材料に関して、ナノ結晶軟磁性金属扁平粉末が、特許第２７０２７５７（特許文献４）、特開平１１－２６９５０９（特許文献５）で提案されている。さらに、特開２０２１－１１１７６６（特許文献６）では、各種機器が実際に動作する温度範囲で透磁率の変化が少なく、かつ、高い透磁率を得ることができるＦｅ－Ａｌ－Ｓｉ系の軟磁性金属扁平粉末が提案されている。 As for nanocrystalline materials expected to have higher soft magnetic properties than Sendust, nanocrystalline soft magnetic metal flat powders have been proposed in Japanese Patent No. 2702757 (Patent Document 4) and Japanese Patent Application Laid-Open No. 11-269509 (Patent Document 5). Furthermore, Japanese Patent Application Laid-Open No. 2021-111766 (Patent Document 6) proposes an Fe—Al—Si-based soft magnetic metal flat powder that has little change in magnetic permeability in the temperature range where various devices actually operate and can obtain high magnetic permeability.

特許第３７２２３９１Patent No. 3722391 特許第６５９２４２４Patent No. 6592424 特開２００５－２８１７８３JP 2005-281783 特許第２７０２７５７Patent No. 2702757 特開平１１－２６９５０９Japanese Patent Laid-Open No. 11-269509 特開２０２１－１１１７６６JP 2021-111766

通信機器や各種電子機器が実際に使用される際には周辺温度の変化や発熱があり、自動車では－４０～１５０℃、その他では－４０～８５℃での性能保証の要求がある。このため、最低でも－４０～８５℃の温度域で、樹脂複合シートや成形加工品は安定して高い電磁波ノイズ抑制や磁気シールド性能、あるいはコア材料としての軟磁気特性を確保する必要がある。特に、電磁誘導を利用した非接触給電では、充電時のバッテリーや、磁性材料を含めたコイル部品の磁気損失によるモジュールの発熱があるため、温度上昇により磁気シールド材の性能が低下すると磁気損失が増え、これによりさらに温度が上昇して性能が低下するという悪循環に陥り、充電効率が低下する問題がある。 When communication devices and various electronic devices are actually used, there are changes in ambient temperature and heat generation, and there is a demand for performance assurance at -40 to 150°C for automobiles and -40 to 85°C for others. For this reason, at least in the temperature range of -40 to 85°C, resin composite sheets and molded products must stably secure high electromagnetic noise suppression and magnetic shielding performance, or soft magnetic properties as core materials. In particular, in non-contact power supply using electromagnetic induction, the module generates heat due to magnetic loss in the battery and coil parts including magnetic materials during charging, so if the performance of the magnetic shield material deteriorates due to temperature rise, the magnetic loss increases.

しかしながら、一般的に透磁率を含む軟磁気特性の測定は常温でしか行われておらず、特許文献１、２、３、４および５では本発明でいう実際の使用温度範囲で安定した透磁率を得ることに関しての記載がない。さらに、ＮＦＣ用や非接触充電用で用いられているフェライト焼結体、あるいはプリクラックを入れたフェライトシート、アモルファスシート、ナノ結晶金属シート等と比較して、透磁率が不足しており、磁気シールド性能が十分では無い。 However, measurements of soft magnetic properties including magnetic permeability are generally performed only at room temperature, and Patent Documents 1, 2, 3, 4 and 5 do not describe obtaining stable magnetic permeability in the actual operating temperature range referred to in the present invention. Furthermore, compared to ferrite sintered bodies used for NFC and contactless charging, ferrite sheets with pre-cracks, amorphous sheets, nanocrystalline metal sheets, etc., the magnetic permeability is insufficient, and the magnetic shielding performance is insufficient.

また、特許文献４および５ではＦｅ基アモルファス薄帯を脆化処理後に粉砕した粉末を用いて扁平状に加工し、さらにナノ結晶化処理したナノ結晶軟磁性金属扁平粉末を用いることで高い軟磁気特性が得られると記載されているが、特許文献４では保磁力と飽和磁束密度に注目しており、透磁率に関する記載が無い。また、Ｄ５０平均粒径が小さく、アスペクト比も低い。特許文献５では保磁力に関する記載が無く、透磁率も十分高い値を有しているとはいえない。 Further, in Patent Documents 4 and 5, it is described that high soft magnetic properties can be obtained by processing an Fe-based amorphous ribbon into a flat shape using powder pulverized after embrittlement treatment, and using nanocrystalline soft magnetic metal flat powder subjected to nanocrystallization treatment. However, Patent Document 4 focuses on coercive force and saturation magnetic flux density, and does not describe magnetic permeability. In addition, the D50 average particle diameter is small and the aspect ratio is also low. In Patent Document 5, there is no description about coercive force, and it cannot be said that magnetic permeability has a sufficiently high value.

さらに樹脂複合シートには、透磁率を維持しつつ低いコアロスを有し、フレキシビリティーの高い薄肉製品の実現と、より高い透磁率と低いコアロスを有する製品への要求がある。フレキシビリティーの高い薄肉製品の実現のためには、粒径が小さくても軟磁気特性が高いナノ結晶軟磁性金属扁平粉末を用いて粉末配合量を下げる必要がある。さらに高透磁率化に対応するためには、ナノ結晶軟磁性金属扁平粉末の軟磁気特性を著しく向上させる必要がある。しかし、これらの両立は困難であり、ナノ結晶軟磁性金属扁平粉末の最適なナノ結晶化と、粒径とアスペクト比の調整、ならびに保磁力を低く抑えることで、フレキシビリティーと透磁率のいずれかに特徴を持たせた樹脂複合シートを提供することが必要である。また成形加工用の樹脂複合組成物でも薄肉化と高透磁率化の要求があり、透磁率を維持しつつ低いコアロスを有して薄肉化に対応できる樹脂複合組成物と、より高い透磁率と低いコアロスを有する樹脂複合組成物を提供することが必要である。 Furthermore, resin composite sheets are required to have low core loss while maintaining magnetic permeability, realize thin-walled products with high flexibility, and products with higher magnetic permeability and low core loss. In order to realize thin-walled products with high flexibility, it is necessary to use nanocrystalline soft magnetic metal flat powders that have high soft magnetic properties even if the particle size is small, and reduce the amount of powder blended. Furthermore, in order to cope with higher magnetic permeability, it is necessary to remarkably improve the soft magnetic properties of the nanocrystalline soft magnetic metal flat powder. However, it is difficult to achieve both of these, and it is necessary to provide a resin composite sheet that is characterized by either flexibility or magnetic permeability by optimally nano-crystallizing the nano-crystalline soft magnetic metal flat powder, adjusting the particle size and aspect ratio, and keeping the coercive force low. In addition, resin composite compositions for molding are also required to be thinner and have higher magnetic permeability, and it is necessary to provide a resin composite composition that has low core loss while maintaining magnetic permeability and can respond to thinning, and a resin composite composition that has higher magnetic permeability and low core loss.

本発明は、上記の課題を解決するためになされたものであって、ナノ結晶軟磁性金属扁平粉末を使用した樹脂複合シートまたは樹脂複合組成物成形品の－４０℃～１５０℃の範囲内での透磁率の温度係数の変化が少なく、かつ、高い透磁率と低いコアロスを有するナノ結晶軟磁性金属扁平粉末と、該材料を用いた高い透磁率と低いコアロスを有する樹脂複合シート並びに成形加工用の樹脂複合組成物を提供しようというものである。 The present invention was made to solve the above challenges, and the temperature coefficient of porcelain ratio is small and low permeability, with little change in porcelain composite sheets or resin complex composite composite composite composite composite composite composite composite composite composite composite composite composite composite composite composite composite composite squares. It is to provide a nano crystal soft magnetic metal flat powder, a resin composite sheet having a high permeability using a high permeability and a low coalos, and a resin composite composition for molding processing.

本発明は、上述した従来の軟磁性金属扁平粉末および該材料を用いた樹脂複合シート並びに成形加工用の樹脂複合組成物が有する課題を解決することにある。 An object of the present invention is to solve the problems associated with the above-described conventional soft magnetic metal flat powder, resin composite sheet using the material, and resin composite composition for molding.

本発明によれば、ナノ結晶粒子の粒径が５ｎｍ～３０ｎｍ未満、結晶化度が６５％～９５％未満で、さらに平均粒径Ｄ５０付近の粒径の粉末におけるアスペクト比が２０～８０未満、保磁力が２０Ａ／ｍ～１５０Ａ／ｍ未満であるナノ結晶軟磁性金属扁平粉末であって、該ナノ結晶軟磁性金属扁平粉末を使用した、樹脂複合シート、または、樹脂複合組成物を成形した物の透磁率の温度係数Ｋｎ（ｎは１、２、３）が、―４０℃～１５０℃以下の範囲で下記式（１）（２）（３）で示され、０≦Ｋ１≦０．２０、－０．１０≦Ｋ２≦０．１０、－０．１５≦Ｋ３≦０．０５の範囲にあることを特徴とする、ナノ結晶軟磁性金属扁平粉末。
Ｋ１＝（μ（０℃）－μ（－４０℃））／μ（－４０℃） （１）
Ｋ２＝（μ（８５℃）－μ（－４０℃））／μ（－４０℃） （２）
Ｋ３＝（μ（１５０℃）－μ（－４０℃））／μ（－４０℃） （３）
μ：透磁率（μ’：実数透磁率、μ”：虚数透磁率）、μ（０℃）：０℃の透磁率According to the present invention, the nanocrystalline soft magnetic metal flat powder has a particle size of 5 nm to less than 30 nm, a crystallinity of 65% to less than 95%, an aspect ratio of 20 to less than 80, and a coercive force of 20 A/m to less than 150 A/m in the powder having a particle size near the average particle size D50, and the resin composite sheet or resin composite composition is molded using the nanocrystalline soft magnetic metal flat powder. 1, 2, 3) are represented by the following formulas (1), (2), and (3) in the range of -40 ° C. to 150 ° C. or less, and are in the ranges of 0 ≤ K1 ≤ 0.20, -0.10 ≤ K2 ≤ 0.10, -0.15 ≤ K3 ≤ 0.05. Nanocrystalline soft magnetic metal flat powder.
K1 = (μ (0°C) - μ (-40°C)) / μ (-40°C) (1)
K2 = (μ (85°C) - μ (-40°C)) / μ (-40°C) (2)
K3=(μ(150°C)-μ(-40°C))/μ(-40°C) (3)
μ: magnetic permeability (μ': real number magnetic permeability, μ": imaginary number magnetic permeability), μ (0°C): magnetic permeability at 0°C

また本発明によれば、前記ナノ結晶軟磁性金属扁平粉末で、平均粒径Ｄ５０＝２０μｍ～４０μｍ未満で、Ｄ５０平均粒径付近の平均厚みが０．２μｍ～１．５μｍ未満であって、該ナノ結晶軟磁性金属扁平粉末を使用した、樹脂複合シートの保磁力が２０Ａ／ｍ～１００Ａ／ｍ未満であることを特徴とするナノ結晶軟磁性金属扁平粉末が得られる。 Further, according to the present invention, a nanocrystalline soft magnetic metal flat powder characterized by having an average particle size D50 of 20 μm to less than 40 μm, an average thickness near the D50 average particle size of 0.2 μm to less than 1.5 μm, and a resin composite sheet using the nanocrystalline soft magnetic metal flat powder having a coercive force of 20 A/m to less than 100 A/m can be obtained.

また本発明によれば、前記ナノ結晶軟磁性金属扁平粉末で、平均粒径Ｄ５０＝４０μｍ～１００μｍ未満で、Ｄ５０平均粒径付近の平均厚みが１．５μｍ～５μｍ未満であって、該ナノ結晶軟磁性金属扁平粉末を使用した、樹脂複合シートの保磁力が２０Ａ／ｍ～８０Ａ／ｍ未満であることを特徴とするナノ結晶軟磁性金属扁平粉末が得られる。 Further, according to the present invention, the nanocrystalline soft magnetic metal flat powder has an average particle size D50 of 40 μm to less than 100 μm, an average thickness near the D50 average particle size of 1.5 μm to less than 5 μm, and a resin composite sheet using the nanocrystalline soft magnetic metal flat powder having a coercive force of 20 A/m to less than 80 A/m.

また本発明によれば、前記ナノ結晶軟磁性金属扁平粉末と樹脂よりなり、保磁力が２０Ａ／ｍ～１００Ａ／ｍ未満で、さらに外径２０ｍｍ－内径１０ｍｍで厚みが０．１５ｍｍのリング状サンプルを３枚重ねた物を用いて、Ｂｍと周波数が５０ｍＴ－１００ｋＨｚの条件で測定した時のコアロスが５０ｋＷ／ｍ３～３００ｋＷ／ｍ３未満であることを特徴とする、樹脂複合シートが得られる。Further, according to the present invention, the core loss when measured under the conditions of Bm and frequency of 50 mT-100 kHz is 50 kW/m 3 to less than 300 kW/m 3 using a stack of three ring-shaped samples made of the nanocrystalline soft magnetic metal flat powder and resin, having a coercive force of 20 A/m to less than 100 A/m, and having an outer diameter of 20 mm, an inner diameter of 10 mm, and a thickness of 0.15 mm. A composite sheet is obtained.

また本発明によれば、前記ナノ結晶軟磁性金属扁平粉末と樹脂よりなり、外径１２．８ｍｍ－内径７．５ｍｍで厚み５ｍｍに成形加工した物を用いて、Ｂｍと周波数が５０ｍＴ－１００ｋＨｚの条件で測定した時のコアロスが１００ｋＷ／ｍ３～６００ｋＷ／ｍ３未満であることを特徴とする、成形加工用の樹脂複合組成物が得られる。Further, according to the present invention, a resin composite composition for molding, which is made of the nanocrystalline soft magnetic metal flat powder and a resin, is molded to have an outer diameter of 12.8 mm, an inner diameter of 7.5 mm, and a thickness of 5 mm, and has a core loss of 100 kW/m to less than 600 kW/m when measured under the conditions of Bm and frequency of 50 mT-100 kHz.

本発明は、ナノ結晶軟磁性金属扁平粉末を使用した樹脂複合シートまたは樹脂複合組成物成形品の－４０℃～１５０℃の範囲内での透磁率の温度係数の変化が少なく、かつ、高い透磁率と低いコアロスを有するナノ結晶軟磁性金属扁平粉末と、該材料を用いた高い透磁率と低いコアロスを有する樹脂複合シート並びに成形加工用の樹脂複合組成物を提供しようというものである。 The present invention aims to provide a nanocrystalline soft magnetic metal flat powder having high magnetic permeability and low core loss, and a resin composite sheet using the nanocrystalline soft magnetic metal flat powder or a resin composite composition molded article having high magnetic permeability and low core loss, and a resin composite composition for molding.

ナノ結晶金属扁平粉末を測定面に平行になるように配向させ、Ｃｕ管球を用いてＸＲＤ測定して得られた２θ＝４５°付近のｂｃｃ Ｆｅ（１１０）のピークを用いて、プロファイルフィッティング法で結晶化度を算出する方法を示した図である。FIG. 2 is a diagram showing a method for calculating the degree of crystallinity by a profile fitting method using the bcc Fe(110) peak near 2θ=45° obtained by XRD measurement using a Cu tube, with the nanocrystalline metal flat powder oriented parallel to the measurement surface. 実施例４と９、比較例１０と１１の軟磁性金属扁平粉末を用いた樹脂複合シートの、透磁率の温度依存性を示した図である。FIG. 10 is a diagram showing the temperature dependence of magnetic permeability of resin composite sheets using flat soft magnetic metal powders of Examples 4 and 9 and Comparative Examples 10 and 11;

以下、本発明について具体的な最良の形態について説明する。 BEST MODE FOR CARRYING OUT THE INVENTION Specific best modes of the present invention will be described below.

ナノ結晶軟磁性金属扁平粉末の原料となる非晶質合金は、単ロール法、双ロール法、メルトスピン法などの急冷法で作製でき、この他、水アトマイズ法、ガスアトマイズ法などでも作製することができるが、ナノ結晶相が生成しない限りにおいては特に限定するものではない。 The amorphous alloy, which is the raw material of the nanocrystalline soft magnetic metal flat powder, can be produced by a quenching method such as a single roll method, a twin roll method, or a melt spin method, and can also be produced by a water atomization method, a gas atomization method, or the like, but is not particularly limited as long as a nanocrystalline phase is not generated.

非晶質合金はＦｅ基合金で、例えばＦｅ－Ｓｉ－Ｂ－Ｎｂ－Ｃｕ組成や、Ｆｅ－Ｓｉ－Ｂ－Ｐ－Ｃｕ組成の物を用いることができ、必要に応じてＣｒ、Ｗ、Ｔａ、Ｈｆ、Ｔｉ、Ｎｉ、Ｃ等の微量成分を含んでいても良いが、結晶化処理でナノ結晶相が得られれば特に限定するものではない。 The amorphous alloy is an Fe-based alloy, for example, Fe-Si-B-Nb-Cu composition or Fe-Si-BP-Cu composition can be used, and if necessary, it may contain trace components such as Cr, W, Ta, Hf, Ti, Ni, C, etc., but is not particularly limited as long as a nanocrystalline phase can be obtained by crystallization treatment.

単ロール法、双ロール法、メルトスピン法等で得られる金属箔帯を用いる場合には、そのままでは扁平加工用原料を得るための粉砕が困難であることに加え、目的とする加工性を有する原料粉末を得るために、大気もしくは窒素ガス雰囲気、不活性ガス雰囲気あるいは真空中で２００℃を越えてナノ結晶化温度以下で脆化処理を行った後に、ボールミル、振動ミル、ピンミル、ハンマーミルなどで粉砕して、所定の粒径の扁平加工用の原料粉末を得ることができる。しかしながら、金属箔帯の製造工程内で脆化が進行している場合には、脆化処理は特に必要はなく、そのまま粉砕しても良い。また、金属箔帯の状態で扁平加工を行うことができる場合には、脆化処理や粉砕を省略することができる。 When using a metal foil belt obtained by the single roll method, twin roll method, melt spin method, etc., it is difficult to crush the flat -processed raw material as it is, and in order to obtain a raw material powder with the purpose of processing, the atmosphere or nitrogen gas atmosphere, inactive gas atmosphere or 200 ° C in the vacuum is 200 ° C. After the bracelion processing is performed beyond the nano crystallinated temperature, it can be crushed with a ball mill, vibration mill, pin mill, hammer mill, etc. to obtain a raw material powder for flat partition of the prescribed particle size. However, if embrittlement progresses during the manufacturing process of the metal foil strip, the embrittlement treatment is not particularly necessary, and the metal foil strip may be pulverized as it is. Further, when the metal foil strip can be flattened, embrittlement treatment and pulverization can be omitted.

水アトマイズ法、ガスアトマイズ法等で得られた粉末は脆化処理の必要は特には無いが、扁平粉末への加工性を調整するために、脆化処理を行った後に扁平加工用原料としても良い。 Powders obtained by the water atomization method, the gas atomization method, etc. do not particularly need to be embrittled, but in order to adjust the workability into flat powders, they may be used as raw materials for flattening after embrittlement treatment.

扁平加工は特に制限はないが、アトライター、ボールミル、振動ミルなどを用いて蒸留水もしくは有機溶剤の存在下で実施することができる。有機溶剤としてはトルエン、ヘキンサン、アルコール、エチレングリコールなどを用いることができ、加工中は装置内の雰囲気を調整してもよい。また、扁平化助剤としてステアリン酸などを加えてもよい。 The flattening process is not particularly limited, but can be carried out in the presence of distilled water or an organic solvent using an attritor, ball mill, vibration mill, or the like. Toluene, hexane, alcohol, ethylene glycol, or the like can be used as the organic solvent, and the atmosphere in the apparatus may be adjusted during processing. In addition, stearic acid or the like may be added as a flattening aid.

扁平加工後は、非晶質合金扁平粉末を窒素ガス雰囲気、不活性ガス雰囲気あるいは真空中で、結晶化温度以上で熱処理してナノ結晶相を生成させるが、扁平粉末がナノ結晶化に伴う体積収縮で自己破断して小径化することと、目的とする結晶粒径と結晶化度を実現できれば良く、特に熱処理装置や条件を限定するものではない。 After flattening, the amorphous alloy flat powder is heat-treated in a nitrogen gas atmosphere, an inert gas atmosphere, or in a vacuum at a temperature equal to or higher than the crystallization temperature to generate a nanocrystalline phase.

ナノ結晶軟磁性金属扁平粉末の平均粒径Ｄ５０付近の粉末におけるアスペクト比は２０～８０未満であり、保磁力が２０Ａ／ｍ～１５０Ａ／ｍ未満であることが望ましい。アスペクト比が２０未満だと反磁界係数が大きくなり、８０以上では加工性が低下する。しかし、アスペクト比が２０～８０未満であっても微粉末の割合が増えると保磁力が１５０Ａ／ｍ以上になり、樹脂複合シート、成形加工品の透磁率が低下する。このため、空気分級などで微粉末を除去して保磁力を調整しても良い。 It is desirable that the powder near the average particle size D50 of the nanocrystalline soft magnetic metal flat powder has an aspect ratio of 20 to less than 80 and a coercive force of 20 A/m to less than 150 A/m. If the aspect ratio is less than 20, the diamagnetic field coefficient becomes large, and if it is 80 or more, the workability deteriorates. However, even if the aspect ratio is 20 to less than 80, the coercive force becomes 150 A/m or more when the proportion of fine powder increases, and the magnetic permeability of the resin composite sheet and the molded product decreases. Therefore, the coercive force may be adjusted by removing fine powder by air classification or the like.

ナノ結晶軟磁性金属扁平粉末の平均粒子径Ｄ５０の測定は、Ｓｙｍｐａｔｅｃ社製のＨＥＬＯＳ／ＢＲ－ｍｕｌｔｉでＲ４を用いて測定を行った。得られた平均粒径Ｄ５０に対して、±１０％の粒径範囲の扁平粉末を空気分級で抽出し、エポキシ樹脂に埋め込み鏡面研磨して厚み測定用のサンプルを得た。アスペクト比は、扁平粉末は概ね円盤状であるため、直径／厚みで表わされるが、直径は平均粒径Ｄ５０の値とし、扁平粉末の厚みを走査型電子顕微鏡で計測してアスペクト比を求めた。アスペクト比は、樹脂複合シートもしくは成形品をエポキシ樹脂に埋め込み、平均的な長さと厚みを走査型電子顕微鏡で計測し、長さを直径に補正して求めても良い。 The average particle size D50 of the nanocrystalline soft magnetic metal flat powder was measured using HELOS/BR-multi R4 manufactured by Sympatec. A flat powder having a particle size range of ±10% of the obtained average particle size D50 was extracted by air classification, embedded in an epoxy resin, and mirror-polished to obtain a sample for thickness measurement. Since the flat powder is generally disk-shaped, the aspect ratio is represented by diameter/thickness. The diameter is the value of the average particle size D50, and the thickness of the flat powder is measured with a scanning electron microscope to obtain the aspect ratio. The aspect ratio may be obtained by embedding a resin composite sheet or molded article in an epoxy resin, measuring the average length and thickness with a scanning electron microscope, and correcting the length to the diameter.

透磁率の測定は、Ｋｅｙｓｉｇｈｔ社製のインピーダンスアナライザーＥ４９９１Ｂと磁性材料テストフィクスチャー１６４５４Ａと耐熱テストキットを用いて、恒温恒湿機中で－４０℃～１５０℃の温度範囲で行った。測定用サンプルは、樹脂複合シートと樹脂複合組成物を成形加工した物を使用した。樹脂複合シートでの測定サンプルは厚み０．１５ｍｍのシートから外径２０ｍｍ－内径１０ｍｍのリング状サンプルを抜き加工して作製した。成形加工品は、外径２０ｍｍ－内径２０ｍｍで厚み０．６ｍｍのサンプルを用いた。透磁率測定用のサンプル形状は特に限定するものではなく、透磁率を測定できれば良い。さらに、振動試料型磁力計（ＶＳＭ）、ＢＨアナライザー、ＬＣＲメーター等を用いて、樹脂複合シートあるいは成形加工品の状態、もしくは粉末の状態で測定しても良い。 The magnetic permeability was measured in a temperature range of -40°C to 150°C in a thermo-hygrostat using an impedance analyzer E4991B, a magnetic material test fixture 16454A and a heat resistance test kit manufactured by Keysight. As a measurement sample, a resin composite sheet and a molded resin composite composition were used. A measurement sample of the resin composite sheet was prepared by punching a ring-shaped sample with an outer diameter of 20 mm and an inner diameter of 10 mm from a sheet with a thickness of 0.15 mm. A sample having an outer diameter of 20 mm, an inner diameter of 20 mm and a thickness of 0.6 mm was used as the molded product. The shape of the sample for magnetic permeability measurement is not particularly limited as long as the magnetic permeability can be measured. Furthermore, it may be measured in the state of a resin composite sheet, a molded product, or in the state of powder using a vibrating sample magnetometer (VSM), BH analyzer, LCR meter, or the like.

保磁力は東北特殊鋼製の自動計測保磁力計Ｋ－ＨＣ１０００を用い印可磁場１４８ｋＡ／ｍで測定した。扁平粉末約１０ｍｇを、飛散しないように非磁性のテープで被覆し測定用サンプルとした。樹脂複合シートと樹脂複合組成物の成形品の保磁力測定には透磁率測定用のサンプルを用いた。保磁力の測定は振動試料型磁力計（ＶＳＭ）、ＢＨアナライザー等を用いても良い。 The coercive force was measured with an applied magnetic field of 148 kA/m using an automatic measuring coercive force meter K-HC1000 manufactured by Tohoku Specialty Steel. About 10 mg of the flat powder was covered with a non-magnetic tape so as not to scatter and used as a sample for measurement. A sample for magnetic permeability measurement was used to measure the coercive force of the resin composite sheet and the molded product of the resin composite composition. Coercive force may be measured using a vibrating sample magnetometer (VSM), BH analyzer, or the like.

ナノ結晶軟磁性金属扁平粉末のナノ結晶粒子の結晶粒径は５ｎｍ～３０ｎｍ未満であることが望ましく、５ｎｍ～２５ｎｍ未満であることがより好ましい。結晶粒径が５ｎｍ未満ではナノ結晶粒子成長が不十分で軟磁気特性が低くなり、３０ｎｍ以上になると結晶粒子の交流磁界に対する応答性が低下し、軟磁気特性が低下するためである。また、結晶化度が６５％～９５％未満であることが望ましく６５％～９０％未満であることがより好ましい。結晶化度が６５％未満だと結晶粒子生成が不十分であり、９５％以上になると結晶粒子の粗大化が生じて軟磁気特性が低下するためである。 The crystal grain size of the nanocrystalline particles of the nanocrystalline soft magnetic metal flat powder is preferably 5 nm to less than 30 nm, more preferably 5 nm to less than 25 nm. If the crystal grain size is less than 5 nm, the growth of the nanocrystalline grains is insufficient and the soft magnetic properties are lowered. Also, the degree of crystallinity is preferably 65% to less than 95%, more preferably 65% to less than 90%. If the degree of crystallinity is less than 65%, crystal grain formation is insufficient, and if the degree of crystallinity is 95% or more, the crystal grains become coarse and the soft magnetic properties deteriorate.

ナノ結晶粒子の結晶粒径は、ナノ結晶金属扁平粉末の平面が概ね測定面に平行なるように配向させ、Ｒｉｇａｋｕ社製の粉末Ｘ線回折装置ＭｉｎｉＦｌｅｘ６００でＣｕ管球を用いてＸＲＤ測定した結果より、２θ＝４５°付近のｂｃｃ Ｆｅ（１１０）のピークを用いてＳｈｅｒｒｅｒの式より求めた。結晶化度は前記ＸＲＤ測定結果より、Ｒｉｇａｋｕ社製ＳｍａｒｔＬａｂ Ｓｔｕｄｉｏ ＩＩ応用解析パッケージを用いてプロファイルフィッティング法で計算により求めた。計算には図１に示すように、ｂｃｃ Ｆｅ（１１０）のナノ結晶化前後の回折ピークの面積を用いた。結晶化度の厳密な測定は困難であり、ＸＲＤ測定結果より簡易的に求めた見掛けの結晶化度を、結晶化度とした。ＸＲＤ測定用のサンプルは粉末である必要はなく、ナノ結晶金属扁平粉末の平面が概ね測定面に平行なるようにシートおよび成形加工品をフォルダーにセットすれば良い。 The crystal grain size of the nanocrystalline particles was determined by Sherrer's formula using the peak of bcc Fe (110) near 2θ = 45° from the result of XRD measurement using a Cu tube with a powder X-ray diffractometer MiniFlex 600 manufactured by Rigaku, oriented so that the plane of the flat nanocrystalline metal powder was approximately parallel to the measurement surface. The degree of crystallinity was calculated from the XRD measurement result by profile fitting method using Rigaku's SmartLab Studio II application analysis package. For the calculation, as shown in FIG. 1, the areas of diffraction peaks before and after nanocrystallization of bcc Fe(110) were used. Strict measurement of the degree of crystallinity is difficult, and the apparent degree of crystallinity obtained simply from the XRD measurement results was used as the degree of crystallinity. The sample for XRD measurement does not have to be a powder, and the sheet and molded product can be set in a folder so that the plane of the nanocrystalline metal flat powder is generally parallel to the measurement surface.

ナノ結晶軟磁性金属扁平粉末は、平均粒径Ｄ５０＝２０μｍ～４０μｍ未満であることが望ましい。２０μｍより小さいと保磁力の高い微粉末が増加するために十分高い透磁率を得ることが困難となる。４０μｍ以上になると樹脂複合シートのフレキシビリティーが低下する。また、Ｄ５０平均粒径付近の平均厚みが０．２μｍ～１．５μｍ未満であることが望ましい。０．２μｍ未満になると比表面積が高くなりすぎるために加工性が低下し、１．５μｍ以上になるとアスペクト比が小さくなり、反磁界係数の増加により透磁率が低下する。該ナノ結晶軟磁性金属扁平粉末を使用した、樹脂複合シートの保磁力が２０Ａ／ｍ～１００Ａ／ｍ未満であることが望ましい。保磁力が１００Ａ／ｍ以上になると透磁率が低下する。 The nanocrystalline soft magnetic metal flat powder preferably has an average particle size D50 of 20 μm to less than 40 μm. If it is less than 20 μm, fine powder having a high coercive force increases, making it difficult to obtain a sufficiently high magnetic permeability. If the thickness is 40 μm or more, the flexibility of the resin composite sheet is lowered. In addition, it is desirable that the average thickness near the D50 average particle size is 0.2 μm to less than 1.5 μm. If it is less than 0.2 μm, the specific surface area becomes too large, resulting in deterioration of workability. It is desirable that the resin composite sheet using the nanocrystalline soft magnetic metal flat powder has a coercive force of 20 A/m to less than 100 A/m. When the coercive force is 100 A/m or more, the magnetic permeability decreases.

ナノ結晶軟磁性金属扁平粉末は、平均粒径Ｄ５０＝４０μｍ～１００μｍ未満であることが望ましい。４０μｍより小さいと、特に高い透磁率の要求に対してこれを満たすことができず、１００μｍ以上になると加工性が低下する。さらに、粗大扁平粉末には内在亀裂が含まれ、これが磁気ギャップとなって軟磁性の低下につながるため、空気分級や機械式篩で除去しても良い。また、Ｄ５０平均粒径付近の平均厚みが１．５μｍ～５μｍ未満であることが望ましい。１．５μｍ未満では保磁力の高い微粉末が増加し、５μｍ以上になると反磁界係数が大きくなり透磁率が低下する。該ナノ結晶軟磁性金属扁平粉末を使用した、樹脂複合シートの保磁力が２０Ａ／ｍ～８０Ａ／ｍ未満であることが望ましい。８０Ａ／ｍ以上になると透磁率が低下する。 The nanocrystalline soft magnetic metal flat powder preferably has an average particle size D50 of 40 μm to less than 100 μm. If the thickness is less than 40 μm, it is not possible to meet the requirement for a particularly high magnetic permeability, and if it exceeds 100 μm, workability decreases. Furthermore, since the coarse and flat powder contains internal cracks that form magnetic gaps and lead to a decrease in soft magnetism, they may be removed by air classification or mechanical sieving. In addition, it is desirable that the average thickness near the D50 average particle size is from 1.5 μm to less than 5 μm. If the particle size is less than 1.5 µm, fine powder having a high coercive force increases. It is desirable that the resin composite sheet using the nanocrystalline soft magnetic metal flat powder has a coercive force of 20 A/m to less than 80 A/m. If it becomes 80 A/m or more, the magnetic permeability will decrease.

さらに、かさ密度／真密度は０．０３４～０．０７６の範囲であることが望ましい。０．０３４より小さくなると扁平化が進みすぎ、取り扱いが困難となるとともに、過粉砕された微粉の増加と、輪郭が不均一となることで保磁力が高くなって透磁率が低下する。一方０．０７６を超えると扁平化が不十分となり、透磁率が低下する。かさ密度の測定はＪＩＳＺ２５０４に基づいて実施した。真密度は島津製作所製のＡｃｃｕＰｙｃ１３３０を用いて測定した。 Further, the bulk density/true density is preferably in the range of 0.034 to 0.076. If it is smaller than 0.034, the flattening progresses too much, making handling difficult, and the amount of excessively pulverized fine powder increases and the profile becomes uneven, resulting in an increase in coercive force and a decrease in magnetic permeability. On the other hand, when it exceeds 0.076, flattening becomes insufficient, and magnetic permeability decreases. Bulk density was measured according to JISZ2504. The true density was measured using AccuPyc1330 manufactured by Shimadzu Corporation.

樹脂複合シートは、ナノ結晶軟磁性金属扁平粉末と高分子材料とを所定の割合で配合し、公知の種々の方法でインク状にしてドクターコーティング、コンマコーティング、スクリーン印刷等でシート状の物を作製するが、さらにこれを各種のロールや、プレスで圧縮しても良い。また、ニーダー等で混練してロール成形して作製してもよく、さらにこれをプレスで圧縮しても良いが、樹脂複合シートの製造方法としてこれらに限定するものではない。シート作製時には磁場を印加して、ナノ結晶軟磁性金属扁平粉末の配向を制御することで、透磁率を高めることができる。 The resin composite sheet is produced by blending a nanocrystalline soft magnetic metal flat powder and a polymer material in a predetermined ratio, making it into an ink by various known methods, and using doctor coating, comma coating, screen printing, etc. to produce a sheet. Alternatively, the resin composite sheet may be produced by kneading with a kneader or the like and roll-molding it, and further compressing this with a press, but the production method of the resin composite sheet is not limited to these. Magnetic permeability can be increased by applying a magnetic field during sheet fabrication to control the orientation of the nanocrystalline soft magnetic metal flat powder.

高分子樹脂として、ポリウレタン系、アクリル系、シリコン系、エポキシ系、塩素化ポリエチレン系、クロロプレン系ゴム等を単独もしくは組み合わせて使用することができるが、特に限定するものではなく、１５０℃の耐熱性があることが望ましい。熱可塑性、熱硬化性についても特に限定するものではない。また、本発明の目的を損なわない範囲で、カップリング剤、分散剤、防錆剤などによる各種表面処理や、酸化防止剤、顔料、非磁性充填剤、熱伝導性充填剤等の各種添加剤を必要に応じて添加することができる。 Polyurethane-based, acrylic-based, silicon-based, epoxy-based, chlorinated polyethylene-based, chloroprene-based rubbers, etc. can be used alone or in combination as polymer resins, but they are not particularly limited, and heat resistance of 150° C. is desirable. Thermoplasticity and thermosetting properties are also not particularly limited. In addition, various additives such as various surface treatments such as coupling agents, dispersants, and rust inhibitors, antioxidants, pigments, non-magnetic fillers, and thermally conductive fillers can be added as necessary, as long as the objects of the present invention are not impaired.

樹脂複合シートは、保磁力が２０Ａ／ｍ～１００Ａ／ｍ未満であることが望ましく、８０Ａ／ｍ未満であることがより好ましい。１００Ａ／ｍ以上になると透磁率が低下する。またコアロスが５０ｋＷ／ｍ３～３００ｋＷ／ｍ３未満であることが望ましく、２００ｋＷ／ｍ３未満であることがより好ましい。コアロスが３００ｋＷ／ｍ３以上になると各種電子部品の磁性体部分に使用した場合には磁気損失が大きくなり部品性能が低下する。また非接触充電用の磁気シールド材として使用した場合には、磁気損失による充電効率の低下とこれに伴う発熱が大きな問題となる。全固形分に対してナノ結晶軟磁性金属扁平粉末の含有量が３５ｖｏｌ％～６５ｖｏｌ％未満であることが望ましい。より好ましくは、４０ｖｏｌ％～５５ｖｏｌ％未満である。３５ｖｏｌ％未満の場合には保磁力が１００Ａ／ｍ未満でも透磁率が低くなり、６５ｖｏｌ％以上になるとシート化が困難となり、透磁率が低下する。The resin composite sheet preferably has a coercive force of 20 A/m to less than 100 A/m, more preferably less than 80 A/m. If it becomes 100 A/m or more, the magnetic permeability will decrease. Also, the core loss is preferably 50 kW/m 3 to less than 300 kW/m 3 , more preferably less than 200 kW/m 3 . If the core loss is 300 kW/m 3 or more, the magnetic loss increases when used in the magnetic parts of various electronic parts, and the performance of the parts deteriorates. Also, when used as a magnetic shield material for non-contact charging, a reduction in charging efficiency due to magnetic loss and accompanying heat generation pose a serious problem. It is desirable that the content of the nanocrystalline soft magnetic metal flat powder is less than 35 vol % to less than 65 vol % with respect to the total solid content. More preferably from 40 vol% to less than 55 vol%. If it is less than 35 vol %, the magnetic permeability will be low even if the coercive force is less than 100 A/m.

コアロスは、岩崎通信機社製のＢＨアナライザーＳＹ－８２１９とエヌエフ回路設計ブロック社製の高速バイポーラ電源ＨＳＡ４０４１を用いて、樹脂複合シートと樹脂複合組成物の成形加工品で測定した。樹脂複合シートでの測定サンプルは厚み０．１５ｍｍのシートから外径２０ｍｍ－内径１０ｍｍのリング状サンプルを抜き加工し、これを３枚重ねた後に非磁性の樹脂プレートで挟みφ０．２６ｍｍの線材を二次巻きして作製した。一次側は１９ターン、二次側は５ターンとした。成形加工品は、外径２０ｍｍ－内径１０ｍｍで厚み０．６ｍｍのサンプルと、外径１２．８ｍｍ－内径７．５ｍｍで厚み５ｍｍのサンプルを準備し、外径２０ｍｍのサンプルでは一次側は１９ターン、二次側は５ターンの巻き線を施し、外径１２．８ｍｍのサンプルでは一次側は１５ターン、二次側は５ターンの巻き線を施して測定用サンプルとした。測定は２５℃の室温で、Ｂｍと周波数が５０ｍＴ－１００ｋＨｚの条件で実施した。 The core loss was measured using a BH analyzer SY-8219 manufactured by Iwasaki Tsushinki Co., Ltd. and a high-speed bipolar power source HSA4041 manufactured by N.F. A measurement sample with a resin composite sheet is obtained by punching a ring-shaped sample with an outer diameter of 20 mm and an inner diameter of 10 mm from a sheet with a thickness of 0.15 mm. The primary side had 19 turns and the secondary side had 5 turns. For the molded product, a sample with an outer diameter of 20 mm, an inner diameter of 10 mm, and a thickness of 0.6 mm was prepared, and a sample with an outer diameter of 12.8 mm, an inner diameter of 7.5 mm, and a thickness of 5 mm were prepared. The measurement was performed at a room temperature of 25° C. under conditions of Bm and frequency of 50 mT-100 kHz.

樹脂複合組成物は、ナノ結晶軟磁性金属扁平粉末と高分子樹脂とを混合し、ニーダーや二軸混練機で混練して得られるが、これらに限定されるものではなく、公知の種々の方法で作製することができる。全固形分に対してナノ結晶軟磁性金属扁平粉末の含有量が３５ｖｏｌ％～６５ｖｏｌ％未満であることが望ましい。より好ましくは４０ｖｏｌ％～６０ｖｏｌ％未満である。３５ｖｏｌ％未満の場合には成形物の透磁率が低くなり、６５ｖｏｌ％以上になると成形が困難となり、透磁率が低下する。またコアロスが１００ｋＷ／ｍ３～６００ｋＷ／ｍ３未満であることが望ましく、４００ｋＷ／ｍ３未満であることがより好ましいThe resin composite composition is obtained by mixing flat nanocrystalline soft magnetic metal powder and a polymer resin and kneading the mixture with a kneader or a twin-screw kneader, but is not limited to these, and can be prepared by various known methods. It is desirable that the content of the nanocrystalline soft magnetic metal flat powder is less than 35 vol % to less than 65 vol % with respect to the total solid content. More preferably from 40 vol% to less than 60 vol%. If it is less than 35 vol%, the magnetic permeability of the molded product will be low, and if it is 65 vol% or more, molding will become difficult and the magnetic permeability will decrease. Also, the core loss is preferably less than 100 kW/m 3 to 600 kW/m 3 , more preferably less than 400 kW/m 3

樹脂複合組成物は押出成形機、押出成形機、圧縮成形機等を用いて各種の形状に成形加工することができるが、これらに限定するものではない。成形の時には、扁平粉末を配向させるために、磁場をかけながら成形しても良い。 The resin composite composition can be molded into various shapes using an extruder, an extruder, a compression molding machine, etc., but is not limited to these. At the time of molding, the molding may be performed while applying a magnetic field in order to orient the flattened powder.

以下、本発明について実施例により具体的に説明する。 EXAMPLES Hereinafter, the present invention will be specifically described with reference to Examples.

実施例１～１２および比較例１～４と６～９で使用したナノ結晶軟磁性金属扁平粉末の作製には、単ロール法により作製した厚み２０μｍのＦｅ８３．３Ｓｉ７．７Ｂ２．０Ｎｂ５．７Ｃｕ１．３（ｗｔ％）組成のアモルファス薄帯を出発原料として用いた。これをＡｒ雰囲気中で実施例１～５と比較例１～４は４２０℃で、実施例６～１２と比較例６～９はそれぞれ２２０℃で１時間脆化処理した後に、ボールミルで７４μｍ以下に粉砕した。次いで粉砕粉末を、アトライターでエタノールを用いた湿式条件により扁平加工した。さらにＡｒ雰囲気中５６０℃で１時間のナノ結晶化処理を行った。For the preparation of the nanocrystalline soft magnetic metal flat powders used in Examples 1 to 12 and Comparative Examples 1 to 4 and 6 to 9, a 20 μm-thick Fe 83.3 Si 7.7 B 2.0 Nb 5.7 Cu 1.3 (wt %) composition amorphous ribbon prepared by a single roll method was used as a starting material. This was subjected to embrittlement treatment in an Ar atmosphere at 420° C. for Examples 1-5 and Comparative Examples 1-4, and at 220° C. for Examples 6-12 and Comparative Examples 6-9 for 1 hour, and then pulverized to 74 μm or less with a ball mill. The ground powder was then flattened by wet conditions with ethanol in an attritor. Further, a nano-crystallization treatment was performed in an Ar atmosphere at 560° C. for 1 hour.

実施例１～１２、比較例１～４、比較例６～９では得られたナノ結晶軟磁性金属扁平粉末を用い、全固形分に対して５０ｖｏｌ％となるように、耐熱温度１５０℃の熱硬化型アクリルゴム系混合樹脂をトルエンで希釈した樹脂溶液に配合後に分散させて、コーティング用の塗料を作製した。この塗料をコンマコーターで０．０５ｍｍ厚みに塗布し、磁場配向を行った後に５０℃で乾燥し溶剤を除去した。乾燥後のシートを６枚積層して１５０℃で１０ＭＰａの圧力で熱プレスし、厚み０．１５ｍｍの性能評価用の樹脂複合シートを得た。次に外形２０ｍｍ、内径１０ｍｍのドーナツ状に抜き加工し、透磁率と保磁力とコアロスを測定した。各温度での透磁率の実数部（μ’）は１ＭＨｚ、虚数部（μ’’）は１０ＭＨｚで測定した。 In Examples 1 to 12, Comparative Examples 1 to 4, and Comparative Examples 6 to 9, the obtained nanocrystalline soft magnetic metal flat powder was used, and a thermosetting acrylic rubber-based mixed resin having a heat resistance temperature of 150 ° C. was blended in a resin solution diluted with toluene so as to be 50 vol% with respect to the total solid content, and then dispersed to prepare a coating paint. This paint was applied with a comma coater to a thickness of 0.05 mm, and after magnetic field orientation, it was dried at 50° C. to remove the solvent. Six dried sheets were laminated and hot-pressed at 150° C. under a pressure of 10 MPa to obtain a resin composite sheet for performance evaluation with a thickness of 0.15 mm. Next, it was punched into a donut shape with an outer diameter of 20 mm and an inner diameter of 10 mm, and the magnetic permeability, coercive force and core loss were measured. The real part (μ′) and the imaginary part (μ″) of the magnetic permeability at each temperature were measured at 1 MHz and 10 MHz, respectively.

比較例５、１０では、ガスアトマイズ法により作製したＦｅ８４．８Ａｌ５．６Ｓｉ９．６（ｗｔ％）組成の合金粉末、比較例１１ではＦｅ８４．０Ａｌ７．０Ｓｉ９．０（ｗｔ％）組成の合金粉末を出発原料とし、アトライターで、エタノールを用いた湿式条件により扁平加工した後に、Ａｒ雰囲気中７００℃で１時間の熱処理を行った。この扁平粉末と耐熱温度１５０℃の熱硬化型アクリルゴム系混合樹脂を用いて樹脂複合シートを作成し、透磁率と保磁力とコアロスを測定した。各温度での透磁率の実数部（μ’）は１ＭＨｚ、虚数部（μ’’）は１０ＭＨｚで測定した。In Comparative Examples 5 and 10, an alloy powder having a composition of Fe 84.8 Al 5.6 Si 9.6 (wt %) produced by a gas atomization method, and an alloy powder having a composition of Fe 84.0 Al 7.0 Si 9.0 (wt %) in Comparative Example 11 was used as a starting material. A resin composite sheet was prepared using this flat powder and a thermosetting acrylic rubber mixed resin having a heat resistant temperature of 150° C., and the magnetic permeability, coercive force and core loss were measured. The real part (μ′) and the imaginary part (μ″) of the magnetic permeability at each temperature were measured at 1 MHz and 10 MHz, respectively.

表１に実施例１～５、比較例１～５を示す。実施例１～５は樹脂複合シートのフレキシビリティーを重視して、ナノ結晶金属扁平粉末の平均粒径が２０μｍ～４０μｍ未満で、かつ平均厚みが０．２～１．５μｍ未満で、ナノ結晶化処理後に所定のかさ密度／真密度の扁平粉末が得られるように扁平加工条件を調整した。さらに扁平加工工程で、ナノ結晶化処理後の保磁力が最低となるように、微粉末の発生を抑え、扁平粉末の輪郭が平滑になるように、スラリー濃度、粉砕メディアの衝突エネルギーなどの扁平加工条件を最適化した。同時に、扁平粉末の面内に制御された適度なマイクロクラックを導入した。 Table 1 shows Examples 1 to 5 and Comparative Examples 1 to 5. In Examples 1 to 5, the flexibility of the resin composite sheet was emphasized, and the flattening conditions were adjusted so that the nanocrystalline metal flat powder had an average particle size of 20 μm to less than 40 μm, an average thickness of 0.2 to less than 1.5 μm, and a flat powder having a predetermined bulk density/true density after the nanocrystallization treatment. Furthermore, in the flattening process, we optimized the flattening conditions such as the slurry concentration and the impact energy of the grinding media so that the coercive force after the nano-crystallization treatment would be minimized, the generation of fine powder would be suppressed, and the outline of the flattened powder would be smooth. At the same time, controlled moderate microcracks were introduced in the plane of the flat powder.

表２に実施例６～１２、比較例６～１１を示す。実施例６～１２は樹脂複合シートの透磁率を重視して、ナノ結晶軟磁性金属扁平粉末の平均粒径が４０μｍ～１００μｍ未満で、かつ平均厚みが１．５～５μｍ未満で、ナノ結晶化処理後に所定のかさ密度／真密度の扁平粉末が得られるように扁平加工条件を調整した。さらに扁平加工工程で、ナノ結晶化処理後の保磁力が最低となるように、微粉末の発生を抑え、扁平粉末の輪郭が平滑になるように、スラリー濃度、粉砕メディアの衝突エネルギーなどの扁平加工条件を最適化した。同時に、扁平粉末の面内に制御された適度なマイクロクラックを導入した。実施例８～１０では空気分級により、保磁力の高い微粉末と、内在亀裂が磁気ギャップとなり軟磁気特性に影響を及ぼす粗大扁平粉末をそれぞれ５ｗｔ％除去した。 Table 2 shows Examples 6 to 12 and Comparative Examples 6 to 11. In Examples 6 to 12, the magnetic permeability of the resin composite sheet was emphasized, and the flattening conditions were adjusted so that the nanocrystalline soft magnetic metal flat powder had an average particle diameter of 40 μm to less than 100 μm, an average thickness of 1.5 to less than 5 μm, and a flat powder having a predetermined bulk density/true density after the nanocrystallization treatment. Furthermore, in the flattening process, we optimized the flattening conditions such as the slurry concentration and the impact energy of the grinding media so that the coercive force after the nano-crystallization treatment would be minimized, the generation of fine powder would be suppressed, and the outline of the flattened powder would be smooth. At the same time, controlled moderate microcracks were introduced in the plane of the flat powder. In Examples 8 to 10, air classification was performed to remove 5 wt % of fine powder having high coercive force and 5 wt % of coarse and flat powder having internal cracks that act as magnetic gaps and affect soft magnetic properties.

表３に実施例１３と１４、比較例１２と１３を示す。実施例１３と１４、比較例１２と１３には、それぞれ実施例４のナノ結晶軟磁性金属扁平粉末と、比較例１０のＦｅ８４．８Ａｌ５．６Ｓｉ９．６（ｗｔ％）組成の軟磁性金属扁平粉末を用いた。この金属扁平粉末にシランカップリング剤で表面処理した後に耐熱ナイロン（ＰＡ－９Ｔ）と混合し、二軸混練機を用いて加熱混練することで樹脂複合組成物を得た。次いで、射出成形機を用いて厚み０．６ｍｍのプレート状成形品を作製し、外径２０ｍｍ－内径１０ｍｍで厚み０．６ｍｍに抜き加工したサンプルで、透磁率と保磁力を測定した。前記サンプル形状を形状１とし、ナノ結晶軟磁性金属扁平粉末の配向性が乱れた状態でのコアロスを測定するために、外形１２．８ｍｍ－内径７．５ｍｍで厚み５ｍｍのリング状成形品を形状２として準備した。形状１と形状２のサンプルに巻き線を施し、Ｂｍと周波数が５０ｍＴ－１００ｋＨｚの条件でコアロスを測定した。Table 3 shows Examples 13 and 14 and Comparative Examples 12 and 13. In Examples 13 and 14 and Comparative Examples 12 and 13 , the nanocrystalline soft magnetic metal flat powder of Example 4 and the Fe84.8Al5.6Si9.6 (wt%) composition soft magnetic metal flat powder of Comparative Example 10 were used, respectively. The flat metal powder was surface-treated with a silane coupling agent, mixed with heat-resistant nylon (PA-9T), and heat-kneaded using a twin-screw kneader to obtain a resin composite composition. Next, an injection molding machine was used to produce a plate-shaped molded article with a thickness of 0.6 mm, and the magnetic permeability and coercive force of the sample punched to a thickness of 0.6 mm with an outer diameter of 20 mm and an inner diameter of 10 mm were measured. The sample shape was Shape 1, and a ring-shaped molded product with an outer diameter of 12.8 mm, an inner diameter of 7.5 mm, and a thickness of 5 mm was prepared as Shape 2 in order to measure the core loss in a state where the orientation of the nanocrystalline soft magnetic metal flat powder was disturbed. The samples of shape 1 and shape 2 were wound, and the core loss was measured under the conditions of Bm and frequency of 50 mT-100 kHz.

Figure 2023103144000002
Figure 2023103144000002

Figure 2023103144000003
Figure 2023103144000003

Figure 2023103144000004
Figure 2023103144000004

表１より、実施例１～５はいずれも実数（１ＭＨｚ）および虚数透磁率（１０ＭＨｚ）の温度係数Ｋが－４０℃～１５０℃の範囲で０≦Ｋ１≦０．２０、－０．１０≦Ｋ２≦０．１０、－０．１５≦Ｋ３≦０．０５を満たしており、測定温度の透磁率への影響が軽微である。また、比較例１～４よりも高い実数および虚数透磁率を０℃で有しているとともに、コアロスがいずれも低い。比較例５のガスアトマイズ法により作製したＦｅ８４．８Ａｌ５．６Ｓｉ９．６（ｗｔ％）組成の合金粉末を用いた金属扁平粉末では、０℃で透磁率が最大になり、８５℃、１５０℃での透磁率の低下が顕著である。さらに、０℃での透磁率が大幅に不足しているともに、コアロスが高い。From Table 1, in all of Examples 1 to 5, the temperature coefficient K of the real number (1 MHz) and the imaginary number permeability (10 MHz) satisfies 0 ≤ K1 ≤ 0.20, -0.10 ≤ K2 ≤ 0.10, and -0.15 ≤ K3 ≤ 0.05 in the range of -40 ° C. to 150 ° C., and the influence of the measurement temperature on the magnetic permeability is minor. Moreover, they have higher real and imaginary magnetic permeability at 0° C. than those of Comparative Examples 1 to 4, and their core loss is low. In the metal flat powder using the alloy powder having the composition of Fe84.8Al5.6Si9.6 (wt%) produced by the gas atomization method of Comparative Example 5, the magnetic permeability was maximized at 0°C, and the magnetic permeability decreased significantly at 85°C and 150°C. Furthermore, the magnetic permeability at 0° C. is significantly deficient and the core loss is high.

表２より、実施例６～１２はいずれも実数（１ＭＨｚ）および虚数透磁率（１０ＭＨｚ）の温度係数Ｋが－４０℃～１５０℃の範囲で０≦Ｋ１≦０．２０、－０．１０≦Ｋ２≦０．１０、－０．１５≦Ｋ３≦０．０５を満たしており、測定温度の透磁率への影響が軽微である。また、比較例６～９よりも著しく高い実数および虚数透磁率を０℃で有していて、コアロスが低い。特に空気分級で微粉末と粗大扁平粉末を除去した実施例８～１０の透磁率は極めて高い値を示している。比較例１０のガスアトマイズ法により作製したＦｅ８４．８Ａｌ５．６Ｓｉ９．６（ｗｔ％）組成の合金粉末を用いた金属扁平粉末では、０℃で透磁率が最大になり、８５℃、１５０℃での低下が顕著である。さらに、０℃での透磁率が不足しており、コアロスが高い。比較例１１のＦｅ８４．０Ａｌ７．０Ｓｉ９．０（ｗｔ％）組成の合金粉末を用いた金属扁平粉末では、比較例１０よりは透磁率の温度依存性が小さいが、８５℃を越えると透磁率の低下が顕著となり、０℃での透磁率も不足しており、コアロスが高い。From Table 2, in all of Examples 6 to 12, the temperature coefficient K of the real number (1 MHz) and the imaginary number permeability (10 MHz) satisfies 0 ≤ K1 ≤ 0.20, -0.10 ≤ K2 ≤ 0.10, and -0.15 ≤ K3 ≤ 0.05 in the range of -40 ° C. to 150 ° C., and the influence of the measurement temperature on the magnetic permeability is minor. It also has significantly higher real and imaginary magnetic permeability at 0° C. than Comparative Examples 6-9 and low core loss. In particular, the magnetic permeability of Examples 8 to 10, in which fine powder and coarse flat powder were removed by air classification, showed extremely high values. In the metal flat powder using the alloy powder having the Fe84.8Al5.6Si9.6 (wt%) composition produced by the gas atomization method of Comparative Example 10, the magnetic permeability was maximized at 0°C, and decreased significantly at 85°C and 150°C. Furthermore, the magnetic permeability at 0° C. is insufficient and the core loss is high. In the metal flat powder using the Fe 84.0 Al 7.0 Si 9.0 (wt %) composition alloy powder of Comparative Example 11, the temperature dependence of the magnetic permeability is smaller than that of Comparative Example 10, but when the temperature exceeds 85 ° C., the magnetic permeability decreases significantly, the magnetic permeability at 0 ° C. is also insufficient, and the core loss is high.

図２に示すように、実施例４と９の実数透磁率（１ＭＨｚ）は０℃付近で極大値を示すが、比較例１０、１１よりも透磁率の温度変化が小さく、しかも高い値を示している。特に実施例９は－４０℃～１５０℃の温度範囲で著しく高い透磁率を有している。また、実施例１０は粒径が小さいにもかかわらず、比較例１０、１１よりも高い透磁率を有しており、同等の透磁率とするための扁平粉末配合量を減量でき、樹脂複合シートの薄肉化とフレキシビリティーの向上を実現できる。 As shown in FIG. 2, the real magnetic permeability (1 MHz) of Examples 4 and 9 shows a maximum value near 0° C., but the change in magnetic permeability with temperature is smaller than that of Comparative Examples 10 and 11, and also shows a high value. In particular, Example 9 has a remarkably high magnetic permeability in the temperature range of -40°C to 150°C. In addition, although the particle size is small, Example 10 has a higher magnetic permeability than Comparative Examples 10 and 11, and the amount of flat powder compounded to achieve the same magnetic permeability can be reduced, and the resin composite sheet can be made thinner and improved in flexibility.

表３より、実施例１３と１４はいずれも実数（１ＭＨｚ）および虚数透磁率（１０ＭＨｚ）の温度係数Ｋが－４０℃～１５０℃の範囲で０≦Ｋ１≦０．２０、－０．１０≦Ｋ２≦０．１０、－０．１５≦Ｋ３≦０．０５を満たしており、測定温度の透磁率への影響が軽微である。また、比較例１２よりも高い実数および虚数透磁率を０℃で有しており、粉末配合量の多い実施例１４においても比較例１２より成形加工性が優れている。このため成形加工品の薄肉化が容易となる。比較例１２は０℃の透磁率が極大値を示し、温度上昇に伴い透磁率が顕著に低下している。比較例１３は粉末配合量が多すぎたために成形できず、測定不可としている。コアロスは、ナノ結晶軟磁性金属扁平粉末の配向性の高い形状１、ランダム配向になっている形状２では、形状１の方が形状２よりも低い値を示すが、実施例１３と１４は比較例１２よりも著しく低い値を示している。 From Table 3, in both Examples 13 and 14, the temperature coefficient K of the real number (1 MHz) and the imaginary number permeability (10 MHz) satisfies 0 ≤ K1 ≤ 0.20, -0.10 ≤ K2 ≤ 0.10, and -0.15 ≤ K3 ≤ 0.05 in the range of -40 ° C. to 150 ° C., and the influence of the measurement temperature on the magnetic permeability is minor. Moreover, it has higher real and imaginary magnetic permeability at 0° C. than Comparative Example 12, and Example 14, which contains a large amount of powder, is superior to Comparative Example 12 in moldability. Therefore, it becomes easy to reduce the thickness of the molded product. In Comparative Example 12, the magnetic permeability at 0° C. shows a maximum value, and the magnetic permeability decreases remarkably as the temperature rises. Comparative Example 13 cannot be molded because the amount of powder blended is too large, and cannot be measured. Regarding core loss, shape 1 shows a lower value than shape 2 in shape 1 with high orientation of nanocrystalline soft magnetic metal flat powder and shape 2 in random orientation, but examples 13 and 14 show significantly lower values than comparative example 12.

Claims (5)

ナノ結晶粒子の粒径が５ｎｍ～３０ｎｍ未満、結晶化度が６５％～９５％未満であるナノ結晶軟磁性金属扁平粉末であって、平均粒径Ｄ５０付近の粒径の粉末におけるアスペクト比が２０～８０未満、保磁力が２０Ａ／ｍ～１５０Ａ／ｍ未満で、さらに該ナノ結晶軟磁性金属扁平粉末を使用した、樹脂複合シート、または、樹脂複合組成物を成形した物の透磁率の温度係数Ｋｎ（ｎは１、２、３）が、―４０℃～１５０℃以下の範囲で下記式（１）（２）（３）で示され、０≦Ｋ１≦０．２０、－０．１０≦Ｋ２≦０．１０、－０．１５≦Ｋ３≦０．０５の範囲にあることを特徴とする、ナノ結晶軟磁性金属扁平粉末。
Ｋ１＝（μ（０℃）－μ（－４０℃））／μ（－４０℃） （１）
Ｋ２＝（μ（８５℃）－μ（－４０℃））／μ（－４０℃） （２）
Ｋ３＝（μ（１５０℃）－μ（－４０℃））／μ（－４０℃） （３）
μ：透磁率（μ’：実数透磁率、μ”：虚数透磁率）、μ（０℃）：０℃の透磁率A nanocrystalline soft magnetic metal flat powder having a nanocrystalline particle size of 5 nm to less than 30 nm and a crystallinity of 65% to less than 95%, wherein the powder having a particle size near the average particle size D50 has an aspect ratio of 20 to less than 80 and a coercive force of 20 A/m to less than 150 A/m, and a resin composite sheet or a molded resin composite composition temperature coefficient Kn (n is 1, 2) of the magnetic permeability of the nanocrystalline soft magnetic metal flat powder. , 3) are represented by the following formulas (1), (2), and (3) in the range of −40° C. to 150° C. or less, and are in the ranges of 0≦K1≦0.20, −0.10≦K2≦0.10, and −0.15≦K3≦0.05. A nanocrystalline soft magnetic metal flat powder.
K1 = (μ (0°C) - μ (-40°C)) / μ (-40°C) (1)
K2 = (μ (85°C) - μ (-40°C)) / μ (-40°C) (2)
K3=(μ(150°C)-μ(-40°C))/μ(-40°C) (3)
μ: magnetic permeability (μ': real number magnetic permeability, μ": imaginary number magnetic permeability), μ (0°C): magnetic permeability at 0°C 請求項１に記載のナノ結晶軟磁性金属扁平粉末で、平均粒径Ｄ５０＝２０μｍ～４０μｍ未満で、Ｄ５０平均粒径付近の平均厚みが０．２μｍ～１．５μｍ未満であって、該ナノ結晶軟磁性金属扁平粉末を使用した、樹脂複合シートの保磁力が２０Ａ／ｍ～１００Ａ／ｍ未満であることを特徴とするナノ結晶軟磁性金属扁平粉末。 The nanocrystalline soft magnetic metal flat powder according to claim 1, wherein the average particle diameter D50 is 20 μm to less than 40 μm, the average thickness near the D50 average particle diameter is 0.2 μm to less than 1.5 μm, and the coercive force of the resin composite sheet using the nanocrystalline soft magnetic metal flat powder is 20 A / m to less than 100 A / m. 請求項１に記載のナノ結晶軟磁性金属扁平粉末で、平均粒径Ｄ５０＝４０μｍ～１００μｍ未満で、Ｄ５０平均粒径付近の平均厚みが１．５μｍ～５μｍ未満であって、該ナノ結晶軟磁性金属扁平粉末を使用した、樹脂複合シートの保磁力が２０Ａ／ｍ～８０Ａ／ｍ未満であることを特徴とするナノ結晶軟磁性金属扁平粉末。 The nanocrystalline soft magnetic metal flat powder according to claim 1, wherein the average particle size D50 is 40 μm to less than 100 μm, the average thickness near the D50 average particle size is 1.5 μm to less than 5 μm, and the coercive force of the resin composite sheet using the nanocrystalline soft magnetic metal flat powder is 20 A / m to less than 80 A / m. 請求項１から３のいずれかに記載のナノ結晶軟磁性金属扁平粉末と樹脂よりなり、保磁力が２０Ａ／ｍ～１００Ａ／ｍ未満で、さらに外径２０ｍｍ－内径１０ｍｍで厚みが０．１５ｍｍのリング状サンプルを３枚重ねた物を用いて、Ｂｍと周波数が５０ｍＴ－１００ｋＨｚの条件で測定した時のコアロスが５０～３００ｋＷ／ｍ３未満であることを特徴とする、樹脂複合シート。Nano crystal soft magnetic metal flat powder and resin described in any of claims 1 to 3, it is less than 20a / m to 100a / m, and the outer diameter is 20 mm -10 mm, and the thickness is 0.15 mm, and the ring -shaped sample is 0.15 mm. A resin composite sheet that is characterized by the fact that the Coalos when measured under the conditions of T -100 kHz is less than 50 to 300 kW / m3 . 請求項１から３のいずれかに記載のナノ結晶軟磁性金属扁平粉末と樹脂よりなり、外径１２．８ｍｍ－内径７．５ｍｍで厚み５ｍｍに成形加工した物を用いて、Ｂｍと周波数が５０ｍＴ－１００ｋＨｚの条件で測定した時のコアロスが１００～６００ｋＷ／ｍ３未満であることを特徴とする、成形加工用の樹脂複合組成物。A resin composite composition for molding, which is made of the nanocrystalline soft magnetic metal flat powder according to any one of claims 1 to 3 and a resin, and is molded to have an outer diameter of 12.8 mm, an inner diameter of 7.5 mm, and a thickness of 5 mm, and has a Bm and a frequency of 50 mT-100 kHz.
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JP6558887B2 (en) * 2014-11-14 2019-08-14 株式会社リケン Soft magnetic alloys and magnetic parts
JP7041819B2 (en) * 2020-01-11 2022-03-25 株式会社メイト Soft magnetic metal flat powder, resin composite sheet using it, and resin composite compound for molding processing

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