JP2023085792A5 - - Google Patents
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- JP2023085792A5 JP2023085792A5 JP2021200022A JP2021200022A JP2023085792A5 JP 2023085792 A5 JP2023085792 A5 JP 2023085792A5 JP 2021200022 A JP2021200022 A JP 2021200022A JP 2021200022 A JP2021200022 A JP 2021200022A JP 2023085792 A5 JP2023085792 A5 JP 2023085792A5
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- 229910052718 tin Inorganic materials 0.000 claims description 74
- 229910052697 platinum Inorganic materials 0.000 claims description 72
- 229910052782 aluminium Inorganic materials 0.000 claims description 71
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- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 73
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Description
本開示は、例えば、半導体・電子部品の分野で、ウエハ、基板等を低温から高温で熱処理する種々の熱処理装置の熱反射板として利用でき、加熱・冷却の１サイクルに要する時間が短く、かつ、高反射率を有することから熱処理装置の省エネルギー化が可能であり、また、汚染を抑制することが可能な熱反射板に関する。 INDUSTRIAL APPLICABILITY The present disclosure can be used, for example, in the field of semiconductors and electronic components as a heat reflecting plate for various heat treatment apparatuses that heat treat wafers, substrates, etc. from low to high temperatures, and the time required for one heating/cooling cycle is short. The present invention relates to a heat reflecting plate that has a high reflectance and thus can save energy in a heat treatment apparatus and can suppress contamination.
半導体ウエハの製造または処理工程においては、半導体ウエハに各種の性質を付与するため熱処理作業が行われている。例えば、半導体ウエハを高純度石英製の炉芯管に収納し、炉芯管内の雰囲気を制御して、熱処理作業が行われる。この熱処理工程に使用される熱処理装置では、炉内の高温維持と炉床部への熱放散を防止するため、炉内と炉床との間に炉開口部を塞ぐように保温体（蓋体）が設けられている。 2. Description of the Related Art In manufacturing or processing semiconductor wafers, heat treatment operations are performed to impart various properties to the semiconductor wafers. For example, a semiconductor wafer is housed in a furnace core tube made of high-purity quartz, and the heat treatment operation is performed by controlling the atmosphere inside the furnace core tube. In the heat treatment equipment used in this heat treatment process, a heat insulator (lid ) is provided.
このような保温体としては、熱処理室の開口部を閉塞し、互いに離間して積層され、かつ熱処理室に露出する石英板を有する保温体があり、石英板は表面が平滑で気泡がなく、石英板の内部に金薄膜が形成されていて、金薄膜は、金蒸着により形成されたという特徴がある（例えば、特許文献１を参照。）。 As such a heat insulating body, there is a heat insulating body that has quartz plates that close the opening of the heat treatment chamber, are laminated at a distance from each other, and are exposed to the heat treatment chamber, and the quartz plates have a smooth surface and are free of bubbles. A gold thin film is formed inside the quartz plate, and the gold thin film is characterized by being formed by gold vapor deposition (for example, see Patent Document 1).
また、石英管を中心に通すための孔及び石英ロッドを通すための孔を有する石英板の上に、白金（Ｐｔ）及び酸化物（ＳｉＯやＰｂＯなど）の混合物に有機物を加えてペースト状にしたものをスクリーン印刷により塗布し、これを焼き固めることにより抵抗発熱体よりなる例えば厚さ５～１０ミクロンの反射面を形成する技術の開示がある（例えば、特許文献２を参照。）。 In addition, organic matter is added to a mixture of platinum (Pt) and oxides (SiO, PbO, etc.) and made into a paste on a quartz plate that has a hole for passing a quartz tube through the center and a hole for passing a quartz rod. There is a technique disclosed in which a reflective surface made of a resistive heating element, for example, 5 to 10 microns in thickness is formed by coating the coating by screen printing and baking it to form a reflective surface having a thickness of, for example, 5 to 10 microns (see, for example, Patent Document 2).
縦型熱処理炉の断熱構造体が、複数本の支柱と、これら支柱に上下方向に所定間隔で設けられた複数枚の反射性を有する遮熱板とから構成されている技術の開示がある（例えば、特許文献３を参照。）。特許文献３によれば、遮熱板は、反射膜と、この反射膜の表面を被覆する透明石英層とから形成されている。この遮熱板を形成する一つの方法としては、透明石英層を形成する円形の一対の透明石英板を用い、その一方の透明石英板の片方の面に反射膜を設け、この反射膜をもう一方の透明石英板との間で挟み込み、両透明石英板の周縁部を溶接して密封および一体化する方法がある。 There is a disclosure of a technology in which a heat insulating structure for a vertical heat treatment furnace is composed of a plurality of columns and a plurality of reflective heat shield plates provided on these columns at predetermined intervals in the vertical direction ( For example, see Patent Document 3). According to Patent Document 3, the heat shield plate is formed from a reflective film and a transparent quartz layer covering the surface of the reflective film. One method for forming this heat shield is to use a pair of circular transparent quartz plates that form a transparent quartz layer, provide a reflective film on one side of one of the transparent quartz plates, and then attach the reflective film to the other side. There is a method in which it is sandwiched between one transparent quartz plate and the peripheral edges of both transparent quartz plates are welded to seal and integrate the transparent quartz plate.
特許文献１では、金属汚染防止の保温体があることで、炉体の加熱・冷却の応答を遅らせてしまい、結果、熱処理サイクルに時間を要してしまう。また、石英板は金属汚染防止のために外周を溶接する必要があり、高い反射率を保持させるためには石英板面積に占める金属膜面積を多くとるために、石英板同士の接合幅を極力小さくすることが必要である。これが行われていない特許文献１では、熱処理温度までの昇温プロファイル、温度保持プロファイル、降温プロファイルを有する熱処理工程において、加熱・冷却の応答を遅らせ、所望の各プロファイルに対してズレを生じさせ、また、熱処理１サイクルに要する時間を長引かせ、結果として生産効率の低下を生じさせるという問題があった。 In Patent Document 1, the presence of a heat insulating body to prevent metal contamination delays the heating and cooling response of the furnace body, resulting in a longer heat treatment cycle. In addition, it is necessary to weld the outer periphery of the quartz plate to prevent metal contamination, and in order to maintain high reflectance, the joint width of the quartz plates should be minimized to increase the area of the metal film in the area of the quartz plate. It is necessary to make it smaller. In Patent Document 1, where this is not done, in a heat treatment process that has a temperature increase profile, a temperature maintenance profile, and a temperature decrease profile up to the heat treatment temperature, the response of heating and cooling is delayed, causing a deviation from each desired profile, Furthermore, there is a problem in that the time required for one heat treatment cycle is prolonged, resulting in a decrease in production efficiency.
特許文献２では、反射板兼ヒーターとしての利用のため、中央に石英管でヒーター導通箇所を設けているが、当構造によって一部輻射熱を遮蔽しきれない箇所が発生する。より高い省エネルギー化のためには、反射面積率を多く取り、尚且つ反射板及び外装となる石英をより薄くし、熱容量を下げる必要がある。 In Patent Document 2, a quartz tube is provided in the center to provide a heater conduction point for use as a reflector and a heater, but this structure results in some areas where the radiant heat cannot be completely shielded. In order to achieve higher energy savings, it is necessary to increase the reflection area ratio, make the quartz used as the reflector and the exterior thinner, and lower the heat capacity.
特許文献３では、石英板で挟み込み、溶接を行う手法がとられているが、熱の影響を受けるため、薄膜で実施する際には膜が剥がれてしまう問題があり、溶接幅を小さくすることも困難である。さらに内部を真空に保ちながら溶接することは難しく、高温使用時の内圧上昇によって薄膜が破損するリスクは避けられない。また透明石英を流し込み作製する手法においても、金属薄膜に実施する場合は熱的、物理的ダメージを避けることはできず、透明石英を薄く作ることも困難である。また、特許文献３においても、遮熱板は、熱処理工程において、加熱・冷却の応答を遅らせ、所望の各プロファイルに対してズレを生じさせ、また、熱処理１サイクルに要する時間を長引かせ、結果として生産効率の低下を生じさせるという問題があった。 Patent Document 3 uses a method of sandwiching quartz plates and welding, but since it is affected by heat, there is a problem that the film peels off when using a thin film, so it is necessary to reduce the welding width. is also difficult. Furthermore, it is difficult to weld while maintaining a vacuum inside, and there is an unavoidable risk that the thin film will be damaged due to the increase in internal pressure during high-temperature use. Furthermore, even in the method of pouring transparent quartz, thermal and physical damage cannot be avoided when applying it to a metal thin film, and it is difficult to make transparent quartz thin. Further, in Patent Document 3, the heat shield plate delays the response of heating and cooling in the heat treatment process, causes deviations from each desired profile, and also prolongs the time required for one heat treatment cycle, resulting in As a result, there was a problem in that it caused a decrease in production efficiency.
本開示は、従来手法よりも反射面積率をより多く確保することができ、熱容量が小さく省エネルギー化が可能で、高反射率を有し、炉内の汚染が抑制され、熱応答性の良い熱反射板を提供することを目的とする。 The present disclosure can secure a larger reflection area ratio than conventional methods, has a small heat capacity and can save energy, has a high reflectance, suppresses contamination inside the furnace, and has a heat sink with good thermal response. The purpose is to provide a reflector.
本発明者らは、鋭意検討した結果、熱反射板の１ｍｍ２における板状外装及び反射体の厚さ方向の熱容量を所定範囲にすることによって上記課題が解決されることを見出し、本発明を完成させた。すなわち、本発明に係る熱反射板は、板状外装と、該板状外装の内部に配置されて該板状外装によって外周囲が完全に覆われてなり、かつ、該板状外装の一方の表面に入射した赤外線を反射する反射体と、を有する熱反射板であって、前記反射体は、薄膜、板又は箔であり、前記熱反射板は、１ｍｍ２における板状外装及び反射体の厚さ方向の熱容量の合計が０．０００４～０．００８０（Ｊ／Ｋ）であることを特徴とする。 As a result of extensive studies, the present inventors found that the above problem can be solved by setting the heat capacity in the thickness direction of the plate-like exterior and reflector in a 1 mm 2 range of the heat reflector to a predetermined range, and have developed the present invention. Completed. That is, the heat reflecting plate according to the present invention includes a plate-shaped exterior, and is arranged inside the plate-shaped exterior so that the outer periphery is completely covered by the plate-shaped exterior, and one of the plate-shaped exterior a reflector that reflects infrared rays incident on the surface, the reflector is a thin film, a plate, or a foil, and the heat reflector has a plate-like exterior and a reflector of 1 mm2 . It is characterized by a total heat capacity in the thickness direction of 0.0004 to 0.0080 (J/K).
本発明に係る熱反射板では、前記反射体の少なくとも反射面を含む表面層は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなるか、又は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる群から選ばれる少なくともいずれか１種を含む合金からなることが好ましい。 In the heat reflecting plate according to the present invention, the surface layer including at least the reflective surface of the reflector includes Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, consisting of Au, Ag or Cu, or selected from the group consisting of Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or Cu It is preferable that the alloy be made of an alloy containing at least one of these types.
本発明に係る熱反射板では、前記板状外装の材質はシリカ又はシリコンであることが好ましい。 In the heat reflecting plate according to the present invention, the material of the plate-like exterior is preferably silica or silicon.
本発明に係る熱反射板では、前記板状外装は、第１外装板と第２外装板とが対向して配置されて周縁部同士が周縁に沿って環状に連続して接合された合わせ板の構造を有することが好ましい。板状外装及び反射体を薄くできるので、熱容量を小さくすることができる。 In the heat reflecting plate according to the present invention, the plate-shaped exterior is a laminated plate in which a first exterior plate and a second exterior plate are arranged facing each other and whose peripheral parts are continuously joined in an annular shape along the peripheral edge. It is preferable to have the following structure. Since the plate-like exterior and the reflector can be made thinner, the heat capacity can be reduced.
本発明に係る熱反射板では、前記合わせ板の構造は、前記第１外装板及び前記第２外装板の対向し合う面の間に設けられ、かつ、前記第１外装板側及び前記第２外装板側の少なくとも一方に前記周縁部同士の接合部によって密閉されているキャビティを有し、該キャビティ内に前記反射体が配置されていることが好ましい。反射体が密閉空間であるキャビティ内にあるため、周縁部同士の接合部に、反射体に起因する剥がす方向の応力がかかりにくく、反射体の破損による炉内の汚染を抑制することができる。さらに板状外装と反射体の熱膨張差による破損を回避できる。 In the heat reflecting plate according to the present invention, the structure of the laminated plate is such that the laminated plate is provided between opposing surfaces of the first exterior plate and the second exterior plate, and is provided on the first exterior plate side and the second exterior plate side. It is preferable that at least one of the exterior plates has a cavity that is sealed by a joint between the peripheral edges, and that the reflector is disposed within the cavity. Since the reflector is located in the cavity, which is a sealed space, stress in the peeling direction due to the reflector is not easily applied to the joint between the peripheral edges, and it is possible to suppress contamination in the furnace due to breakage of the reflector. Furthermore, damage due to the difference in thermal expansion between the plate-shaped exterior and the reflector can be avoided.
本発明に係る熱反射板では、前記キャビティを少なくとも前記第１外装板側に有し、前記第１外装板の前記キャビティ内の表面上に前記反射体として形成した薄膜を有し、該薄膜は、前記第１外装板の前記キャビティ内の表面側から順に、下地膜と、前記反射面を含む表面層としての反射膜と、を有する積層膜であり、前記下地膜は、Ｔａ、Ｍｏ、Ｔｉ、Ｚｒ、Ｎｂ、Ｃｒ、Ｗ、Ｃｏ又はＮｉからなるか、又は、Ｔａ、Ｍｏ、Ｔｉ、Ｚｒ、Ｎｂ、Ｃｒ、Ｗ、Ｃｏ及びＮｉからなる群から選ばれる少なくともいずれか１種を含む合金からなり、前記反射膜は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなるか、又は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる群から選ばれる少なくともいずれか１種を含む合金からなり、前記下地膜と前記反射膜とが異なる組成を有していることが好ましい。第１外装板のキャビティ内の表面上に反射体を形成しているため、周縁部同士の接合部に、反射体に起因する剥がす方向の応力がかかりにくく、反射体の破損による炉内の汚染を抑制することができる。さらに板状外装と反射体の熱膨張差による破損を回避できる。 The heat reflecting plate according to the present invention has the cavity at least on the first exterior plate side, and has a thin film formed as the reflector on the surface inside the cavity of the first exterior plate, and the thin film is , a laminated film including, in order from the surface side in the cavity of the first exterior plate, a base film and a reflective film as a surface layer including the reflective surface, the base film comprising Ta, Mo, and Ti. , Zr, Nb, Cr, W, Co, or Ni, or an alloy containing at least one selected from the group consisting of Ta, Mo, Ti, Zr, Nb, Cr, W, Co, and Ni. The reflective film is made of Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag, or Cu, or Ir, Pt, The base film is made of an alloy containing at least one selected from the group consisting of Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag, or Cu; Preferably, the reflective film has a different composition from the reflective film. Since the reflector is formed on the surface inside the cavity of the first exterior plate, stress in the peeling direction caused by the reflector is less likely to be applied to the joint between the peripheral edges, which prevents contamination in the furnace due to breakage of the reflector. can be suppressed. Furthermore, damage due to the difference in thermal expansion between the plate-shaped exterior and the reflector can be avoided.
本発明に係る熱反射板では、前記第１外装板が平板であり、前記キャビティを前記第２外装板側に有し、前記第１外装板の表面上に前記反射体として形成した薄膜を有し、該薄膜は、前記第１外装板の表面側から順に、下地膜と、前記反射面を含む表面層としての反射膜と、を有する積層膜であり、前記下地膜は、Ｔａ、Ｍｏ、Ｔｉ、Ｚｒ、Ｎｂ、Ｃｒ、Ｗ、Ｃｏ又はＮｉからなるか、又は、Ｔａ、Ｍｏ、Ｔｉ、Ｚｒ、Ｎｂ、Ｃｒ、Ｗ、Ｃｏ及びＮｉからなる群から選ばれる少なくともいずれか１種を含む合金からなり、前記反射膜は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなるか、又は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる群から選ばれる少なくともいずれか１種を含む合金からなり、前記下地膜と前記反射膜とが異なる組成を有していることが好ましい。平板である第１外装板に反射体としての薄膜を形成するため、生産性に優れた熱反射板とすることができる。 In the heat reflecting plate according to the present invention, the first exterior plate is a flat plate, has the cavity on the second exterior plate side, and has a thin film formed as the reflector on the surface of the first exterior plate. The thin film is a laminated film including, in order from the surface side of the first exterior plate, a base film and a reflective film as a surface layer including the reflective surface, and the base film includes Ta, Mo, An alloy consisting of Ti, Zr, Nb, Cr, W, Co or Ni, or containing at least one selected from the group consisting of Ta, Mo, Ti, Zr, Nb, Cr, W, Co and Ni The reflective film is made of Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or Cu, or Ir, Pt , Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag, or Cu. It is preferable that the reflective film and the reflective film have different compositions. Since a thin film as a reflector is formed on the first exterior plate, which is a flat plate, a heat reflecting plate with excellent productivity can be obtained.
本発明に係る熱反射板では、前記反射体が、板又は箔であり、かつ、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなるか、又は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる群から選ばれる少なくともいずれか１種を含む合金からなることが好ましい。キャビティ内に反射体としての板又は箔が収容された状態となっており、板又は箔の腐食が生じにくい。さらに、周縁部同士の接合部に、板又は箔に起因する剥がす方向の応力がかかりにくい。 In the heat reflecting plate according to the present invention, the reflector is a plate or a foil, and Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, consisting of Au, Ag or Cu, or selected from the group consisting of Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or Cu It is preferable that the alloy be made of an alloy containing at least one of these types. A plate or foil serving as a reflector is housed in the cavity, and corrosion of the plate or foil is less likely to occur. Furthermore, stress in the peeling direction due to the plate or foil is less likely to be applied to the joint between the peripheral edges.
本発明に係る熱反射板では、前記キャビティ内の圧力は、大気圧未満の減圧となっていることが好ましい。熱処理時にキャビティの内圧が高まることを抑制することができ、炉内の汚染をより抑制することができる。 In the heat reflecting plate according to the present invention, it is preferable that the pressure inside the cavity is reduced to less than atmospheric pressure. It is possible to suppress an increase in the internal pressure of the cavity during heat treatment, and it is possible to further suppress contamination in the furnace.
本発明に係る熱反射板では、（１）前記第１外装板は、前記周縁部に設けられた土手部と該土手部で取り囲まれて前記キャビティを構成する凹部とを有し、前記第２外装板は、平板状であるか、又は、（２）前記第１外装板は、平板状であり、前記第２外装板は、前記周縁部に設けられた土手部と該土手部で取り囲まれて前記キャビティを構成する凹部とを有することが好ましい。第１外装板に凹部を設けることで、板状外装内にキャビティを簡易な構造で設けることができる。あるいは、第２外装板に凹部を設けることで、板状外装内にキャビティを簡易な構造で設けることができる。 In the heat reflecting plate according to the present invention, (1) the first exterior plate has a bank provided at the peripheral edge and a recess surrounded by the bank to constitute the cavity; The exterior plate is flat, or (2) the first exterior plate is flat, and the second exterior plate is surrounded by a bank provided at the peripheral edge and the bank. It is preferable to have a concave portion constituting the cavity. By providing the recess in the first exterior plate, a cavity can be provided within the plate-like exterior with a simple structure. Alternatively, by providing a recess in the second exterior plate, a cavity can be provided within the plate-like exterior with a simple structure.
本発明に係る熱反射板では、前記熱反射板は、前記キャビティ内で前記合わせ板の構造の対向する面同士の間を立設する少なくとも１本の支柱部を有することが好ましい。支柱部によって合わせ板構造の接合強度を高めることができる。 In the heat reflecting plate according to the present invention, it is preferable that the heat reflecting plate has at least one support that stands between opposing surfaces of the structure of the laminated plate within the cavity. The support portions can increase the joint strength of the laminated plate structure.
本発明に係る熱反射板では、前記支柱部が、柱状又は筒状である形態を含む。柱状又は筒状とすることで、接合強度を高めつつ、反射体の面積を広くとることが出来る。 The heat reflecting plate according to the present invention includes a configuration in which the support portion is columnar or cylindrical. By forming the reflector into a columnar or cylindrical shape, the area of the reflector can be increased while increasing the bonding strength.
本発明に係る熱反射板では、前記熱反射板は、前記支柱部を複数有し、該支柱部は筒状であり、かつ、各支柱部は互いに筒壁の一部を共有した３次元空間充填構造を有することが好ましい。３次元空間充填構造とすることで接合強度を高めつつ、反射体の面積を広くとることが出来、さらに反射板そのものの強度を高めることができる。 In the heat reflecting plate according to the present invention, the heat reflecting plate has a plurality of support portions, the support portions are cylindrical, and each support portion is a three-dimensional space in which a portion of the cylinder wall is shared with each other. It is preferable to have a filling structure. By having a three-dimensional space-filling structure, the area of the reflector can be increased while increasing the bonding strength, and the strength of the reflector itself can be increased.
本発明に係る熱反射板では、前記３次元空間充填構造は、ハニカム構造、矩形格子構造、方形格子構造又はひし形格子構造である形態を包含する。 In the heat reflecting plate according to the present invention, the three-dimensional space filling structure includes a honeycomb structure, a rectangular lattice structure, a square lattice structure, or a rhombic lattice structure.
本発明に係る熱反射板では、前記第１外装板及び前記第２外装板の対向し合う面は互いに平坦面であり、前記反射体は、前記第２外装板側の前記第１外装板の表面のうち前記周縁部同士の環状の接合部の内側の領域に形成された薄膜であり、該薄膜は、前記第１外装板の表面側から順に、下地膜と、前記反射面を含む表面層としての反射膜と、を有する積層膜であり、前記下地膜は、Ｔａ、Ｍｏ、Ｔｉ、Ｚｒ、Ｎｂ、Ｃｒ、Ｗ、Ｃｏ又はＮｉからなるか、又は、Ｔａ、Ｍｏ、Ｔｉ、Ｚｒ、Ｎｂ、Ｃｒ、Ｗ、Ｃｏ及びＮｉからなる群から選ばれる少なくともいずれか１種を含む合金からなり、前記反射膜は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなるか、又は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる群から選ばれる少なくともいずれか１種を含む合金からなり、前記下地膜と前記反射膜とが異なる組成を有していることが好ましい。反射体と第２外装板の部分接触により生じる干渉縞をより抑制することができる。 In the heat reflecting plate according to the present invention, opposing surfaces of the first exterior plate and the second exterior plate are flat surfaces, and the reflector is arranged on the first exterior plate on the side of the second exterior plate. It is a thin film formed on the inner region of the annular joint between the peripheral edges of the surface, and the thin film includes, in order from the surface side of the first exterior plate, a base film and a surface layer including the reflective surface. The base film is made of Ta, Mo, Ti, Zr, Nb, Cr, W, Co, or Ni, or is made of Ta, Mo, Ti, Zr, Nb. , Cr, W, Co, and Ni, and the reflective film includes Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Consisting of Ni, Fe, Sn, Ge, Au, Ag or Cu, or Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag It is preferable that the undercoat film and the reflective film have different compositions, and are made of an alloy containing at least one selected from the group consisting of Cu or Cu. Interference fringes caused by partial contact between the reflector and the second exterior plate can be further suppressed.
本発明に係る熱反射板では、前記キャビティを少なくとも前記第１外装板側に有し、前記第１外装板の前記キャビティ内の表面上に前記反射体として形成した薄膜を有し、該薄膜は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる膜か、又は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕを５０質量％以上含む合金膜であることが好ましい。これらの金属膜又はこれらの金属を５０質量％以上含む合金膜であるときは、反射体として形成した薄膜が単層膜であってもよい。 The heat reflecting plate according to the present invention has the cavity at least on the first exterior plate side, and has a thin film formed as the reflector on the surface inside the cavity of the first exterior plate, and the thin film is , Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or Cu, or Ir, Pt, Rh, Ru, Re , Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag, or Cu in an amount of 50% by mass or more. In the case of these metal films or alloy films containing 50% by mass or more of these metals, the thin film formed as a reflector may be a single layer film.
本発明に係る熱反射板では、前記第１外装板が平板であり、前記キャビティを前記第２外装板側に有し、前記第１外装板の表面上に前記反射体として形成した薄膜を有し、該薄膜は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる膜か、又は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕを５０質量％以上含む合金膜であることが好ましい。これらの金属膜又はこれらの金属を５０質量％以上含む合金膜であるときは、反射体として形成した薄膜が単層膜であってもよい。 In the heat reflecting plate according to the present invention, the first exterior plate is a flat plate, has the cavity on the second exterior plate side, and has a thin film formed as the reflector on the surface of the first exterior plate. However, the thin film is a film made of Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or Cu, or Ir, Pt, The alloy film preferably contains 50% by mass or more of Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag, or Cu. In the case of these metal films or alloy films containing 50% by mass or more of these metals, the thin film formed as a reflector may be a single layer film.
本発明に係る熱反射板では、前記第１外装板及び前記第２外装板の対向し合う面は互いに平坦面であり、前記反射体は、前記第２外装板側の前記第１外装板の表面のうち前記周縁部同士の環状の接合部の内側の領域に形成された薄膜であり、該薄膜は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる膜か、又は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕを５０質量％以上含む合金膜であることが好ましい。これらの金属膜又はこれらの金属を５０質量％以上含む合金膜であるときは、反射体として形成した薄膜が単層膜であってもよい。 In the heat reflecting plate according to the present invention, opposing surfaces of the first exterior plate and the second exterior plate are flat surfaces, and the reflector is arranged on the first exterior plate on the side of the second exterior plate. A thin film formed on the inner surface of the annular joint between the peripheral parts, and the thin film includes Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, A film made of Fe, Sn, Ge, Au, Ag or Cu, or a film made of Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or An alloy film containing 50% by mass or more of Cu is preferable. In the case of these metal films or alloy films containing 50% by mass or more of these metals, the thin film formed as a reflector may be a single layer film.
本発明に係る熱反射板では、前記キャビティを前記第１外装板側及び前記第２外装板側に有し、前記第１外装板の前記キャビティ内の表面上に前記反射体として形成した薄膜を有し、該薄膜は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる膜か、又は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕを５０質量％以上含む合金膜であることが好ましい。これらの金属膜又はこれらの金属を５０質量％以上含む合金膜であるときは、反射体として形成した薄膜が単層膜であってもよい。 The heat reflecting plate according to the present invention has the cavities on the first exterior plate side and the second exterior plate side, and includes a thin film formed as the reflector on the surface inside the cavity of the first exterior plate. The thin film is a film made of Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or Cu, or a film made of Ir, Pt. , Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag, or Cu in an amount of 50% by mass or more. In the case of these metal films or alloy films containing 50% by mass or more of these metals, the thin film formed as a reflector may be a single layer film.
本発明に係る熱反射板では、前記反射体の厚さは、０．０１μｍ以上５ｍｍ以下であることが好ましい。反射体による輻射熱の反射効率を保持しつつ、熱反射板の熱容量を小さくすることができる。 In the heat reflecting plate according to the present invention, the thickness of the reflector is preferably 0.01 μm or more and 5 mm or less. The heat capacity of the heat reflecting plate can be reduced while maintaining the efficiency of reflecting radiant heat by the reflector.
本発明に係る熱反射板では、前記周縁部同士の接合部は、表面活性化接合部であることが好ましい。一般的な溶接手法よりも接合幅を短くすることで、より輻射熱を炉内へ反射させることができる。また、反射体である薄膜が接合プロセスによる熱的、物理的ダメージを受けにくい。また、接合部における接合強度が高められており、熱反射板はより長寿命となり、また耐食性が高まり、炉内の汚染が抑制される。 In the heat reflecting plate according to the present invention, it is preferable that the joint between the peripheral portions is a surface activated joint. By making the joint width shorter than in common welding methods, more radiant heat can be reflected back into the furnace. In addition, the thin film that is the reflector is less susceptible to thermal and physical damage caused by the bonding process. Furthermore, the joint strength at the joints is increased, the life of the heat reflecting plate is longer, corrosion resistance is increased, and contamination inside the furnace is suppressed.
本発明に係る熱反射板は、次の熱反射板を包含する。 The heat reflecting plate according to the present invention includes the following heat reflecting plate.
板状外装と、A plate-like exterior,
該板状外装の内部に配置されて該板状外装によって外周囲が完全に覆われてなり、かつ、該板状外装の一方の表面に入射した赤外線を反射する反射体と、を有する熱反射板であって、a heat reflector that is disposed inside the plate-like exterior and whose outer periphery is completely covered by the plate-like exterior, and which reflects infrared rays incident on one surface of the plate-like exterior; A board,
前記板状外装は、平板状の第１外装板の平坦面と平板状の第２外装板の平坦面とが対向して配置されて周縁部同士が周縁に沿って環状に連続して接合された接合部を有する合わせ板の構造を有し、In the plate-shaped exterior, a flat surface of a flat first exterior plate and a flat surface of a flat second exterior plate are arranged to face each other, and the peripheral edges are continuously joined in an annular shape along the peripheral edge. It has a laminated board structure with a joint part,
前記反射体は、前記第１外装板の平坦面のうち前記周縁部同士の環状の接合部の内側の領域に形成された薄膜であり、The reflector is a thin film formed in a region inside the annular joint between the peripheral edges of the flat surface of the first exterior plate,
前記第１外装板及び前記第２外装板の外側板面は全面にわたって平坦面であり、The outer plate surfaces of the first exterior plate and the second exterior plate are flat surfaces over the entire surface,
前記薄膜の周縁に囲まれる全面が反射面であり、かつ、The entire surface surrounded by the periphery of the thin film is a reflective surface, and
前記反射体は、薄膜、板又は箔であり、The reflector is a thin film, plate or foil,
前記熱反射板は、１ｍｍThe heat reflecting plate has a thickness of 1 mm.
２2
における板状外装及び反射体の厚さ方向の熱容量の合計が０．０００４～０．００８０（Ｊ／Ｋ）であることを特徴とする熱反射板。A heat reflecting plate characterized in that the total heat capacity in the thickness direction of the plate-like exterior and the reflector is 0.0004 to 0.0080 (J/K).
本発明に係る熱反射板では、前記薄膜は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる膜か、又は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕを５０質量％以上含む合金膜であり、かつ、前記薄膜が単層膜であることが好ましい。In the heat reflecting plate according to the present invention, the thin film may be a film made of Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag, or Cu. or an alloy film containing 50% by mass or more of Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag, or Cu, and Preferably, the thin film is a single layer film.
本発明に係る熱反射板では、前記薄膜は、前記第１外装板の表面側から順に、下地膜と、前記反射面を含む表面層としての反射膜と、を有する積層膜であり、In the heat reflecting plate according to the present invention, the thin film is a laminated film having, in order from the surface side of the first exterior plate, a base film and a reflective film as a surface layer including the reflective surface,
前記下地膜は、Ｔａ、Ｍｏ、Ｔｉ、Ｚｒ、Ｎｂ、Ｃｒ、Ｗ、Ｃｏ又はＮｉからなるか、又は、Ｔａ、Ｍｏ、Ｔｉ、Ｚｒ、Ｎｂ、Ｃｒ、Ｗ、Ｃｏ及びＮｉからなる群から選ばれる少なくともいずれか１種を含む合金からなり、The base film is made of Ta, Mo, Ti, Zr, Nb, Cr, W, Co, or Ni, or selected from the group consisting of Ta, Mo, Ti, Zr, Nb, Cr, W, Co, and Ni. consisting of an alloy containing at least one of
前記反射膜は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなるか、又は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる群から選ばれる少なくともいずれか１種を含む合金からなり、The reflective film is made of Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag, or Cu, or Ir, Pt, Rh, Consisting of an alloy containing at least one selected from the group consisting of Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or Cu,
前記下地膜と前記反射膜とが異なる組成を有していることが好ましい。It is preferable that the base film and the reflective film have different compositions.
本発明に係る熱反射板では、前記接合部は、第１外装板及び第２外装板にキャビティを設けずに、平板状の第１外装板の平坦面と平板状の第２外装板の平坦面とが対向して配置されて、第１外装板及び第２外装板の応力変形によって周縁部同士が周縁に沿って環状に連続して接合された接合部である形態を包含する。In the heat reflecting plate according to the present invention, the joint portion is formed between the flat surface of the flat first exterior plate and the flat surface of the flat second exterior plate without providing a cavity in the first exterior plate and the second exterior plate. This includes a form in which the surfaces are arranged facing each other and the peripheral edges are joined continuously in an annular shape along the peripheral edge by stress deformation of the first exterior plate and the second exterior plate.
本発明に係る熱反射板では、前記薄膜は、前記第１外装板の平坦面のうち前記周縁部同士の環状の接合部の内側の領域の全面に形成されていることが好ましい。In the heat reflecting plate according to the present invention, it is preferable that the thin film is formed on the entire area of the flat surface of the first exterior plate inside the annular joint between the peripheral edges.
本発明に係る熱反射板では、前記薄膜の厚さは、１０ｎｍ以上５００ｎｍ以下であることが好ましい。In the heat reflecting plate according to the present invention, the thickness of the thin film is preferably 10 nm or more and 500 nm or less.
本開示によれば、従来手法よりも反射面積率をより多く確保することができ、熱容量が小さく省エネルギー化が可能で、高反射率を有し、炉内の汚染が抑制され、熱応答性の良い熱反射板を提供することができる。 According to the present disclosure, it is possible to secure a larger reflection area ratio than conventional methods, it has a small heat capacity and can save energy, it has a high reflectance, contamination inside the furnace is suppressed, and thermal responsiveness is improved. It can provide a good heat reflector.
以降、本発明について実施形態を示して詳細に説明するが本発明はこれらの記載に限定して解釈されない。本発明の効果を奏する限り、実施形態は種々の変形をしてもよい。 Hereinafter, the present invention will be described in detail by showing embodiments, but the present invention should not be interpreted as being limited to these descriptions. The embodiments may be modified in various ways as long as the effects of the present invention are achieved.
（反射体が薄膜である形態）
図１及び図２を参照して、本実施形態に係る熱反射板について説明する。本実施形態に係る熱反射板１００は、板状外装１と、板状外装１の内部に配置されて板状外装１によって外周囲が完全に覆われてなり、かつ、板状外装１の一方の表面に入射した赤外線を反射する反射体５と、を有する。図１においては、紙面に向かう方向が赤外線の入射方向である。図２においては、上から下に向かう方向が赤外線の入射方向である。反射体５は薄膜であり、反射体５の少なくとも反射面を含む表面層は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなるか、又は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる群から選ばれる少なくともいずれか１種を含む合金からなることが好ましい。図２では、反射体５が積層膜である形態が示されており、下地膜３の上に反射面を含む表面層としての反射膜４が形成されている。このとき、反射体５は貫通孔や凹凸などを設けずに該反射体の周縁に囲まれる全面が反射面であることが好ましい。
(form where the reflector is a thin film)
A heat reflecting plate according to this embodiment will be described with reference to FIGS. 1 and 2. The heat reflecting plate 100 according to the present embodiment includes a plate-shaped exterior 1, a plate-shaped exterior 1, which is disposed inside the plate-shaped exterior 1, and whose outer periphery is completely covered by the plate-shaped exterior 1, and one side of the plate-shaped exterior 1. and a reflector 5 that reflects infrared rays incident on the surface of the reflector 5. In FIG. 1, the direction toward the page is the incident direction of infrared rays. In FIG. 2, the direction from top to bottom is the incident direction of infrared rays. The reflector 5 is a thin film, and the surface layer of the reflector 5 including at least the reflective surface is made of Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au. , Ag or Cu, or at least one selected from the group consisting of Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or Cu. It is preferable that the alloy be made of an alloy containing one of these types. In FIG. 2, a configuration in which the reflector 5 is a laminated film is shown, and a reflective film 4 as a surface layer including a reflective surface is formed on the base film 3. At this time, it is preferable that the reflector 5 has no through holes or irregularities, and the entire surface surrounded by the periphery of the reflector is a reflective surface.
本実施形態に係る熱反射板１００は、１ｍｍ２における板状外装及び反射体の厚さ方向の熱容量の合計が０．０００４～０．００８０（Ｊ／Ｋ）であり、好ましくは０．００２３～０．００７０（Ｊ／Ｋ）であり、より好ましくは０．００３０～０．００６０（Ｊ／Ｋ）である。１ｍｍ２における板状外装及び反射体の厚さ方向の熱容量は、反射体５と反射体５の外周囲を完全に覆う板状外装１とを有する熱反射板１００の熱容量を、赤外線の入射面の面積で除した値に相当する。赤外線の入射面の面積とは、図１及び図２を例として説明すると、図１では熱反射板１００における赤外線の入射面の全体が示されているが、入射面には、図２によれば、反射体５が見える領域と周縁部同士の接合部２が見える領域とがあるところ、これら両方を含む領域の面積、すなわち、反射体５を正面に見た板状外装１の板面の面積全体を指す。１ｍｍ２における板状外装及び反射体の厚さ方向の熱容量の合計が０．０００４（Ｊ／Ｋ）未満であると、板状外装の厚みの不足による破損、または、反射体の厚みの不足による赤外線の透過が発生することで反射性能が低下する可能性があり、０．００８０（Ｊ／Ｋ）を超えると、熱容量の合計が大きすぎて熱処理工程において、加熱・冷却の応答を遅らせ、所望の各プロファイルに対してズレを生じさせ、また、熱処理１サイクルに要する時間を長引かせ、結果として生産効率の低下を生じさせる。 The heat reflecting plate 100 according to the present embodiment has a total heat capacity in the thickness direction of the plate-like exterior and the reflector in 1 mm 2 of 0.0004 to 0.0080 (J/K), preferably 0.0023 to 0.0080 (J/K). It is 0.0070 (J/K), more preferably 0.0030 to 0.0060 (J/K). The heat capacity in the thickness direction of the plate-like exterior and the reflector at 1 mm 2 is the heat capacity of the heat reflecting plate 100 having the reflector 5 and the plate-like exterior 1 that completely covers the outer periphery of the reflector 5, It corresponds to the value divided by the area of . The area of the infrared ray incident surface is explained using FIGS. 1 and 2 as examples. FIG. 1 shows the entire infrared ray incident surface of the heat reflecting plate 100, but the area of the infrared ray incident surface is as shown in FIG. For example, where there is an area where the reflector 5 is visible and an area where the joint 2 between the peripheral edges is visible, the area of the area including both of these areas, that is, the area of the plate surface of the plate-like exterior 1 when the reflector 5 is viewed from the front. Refers to the entire area. If the total heat capacity in the thickness direction of the plate-shaped exterior and reflector at 1 mm 2 is less than 0.0004 (J/K), damage may occur due to insufficient thickness of the plate-shaped exterior or reflector. Reflection performance may deteriorate due to the transmission of infrared rays, and if it exceeds 0.0080 (J/K), the total heat capacity will be too large, delaying the response of heating and cooling in the heat treatment process, and achieving the desired result. In addition, the time required for one cycle of heat treatment is prolonged, resulting in a decrease in production efficiency.
なお、本実施形態における熱反射板は、１ｍｍ２における板状外装及び反射体の厚さ方向の熱容量の合計が上記範囲を満たすことが必要である。この範囲を満たすことに加えて炉体の熱応答性をさらに良好にするために、面内方向における板状外装に対する反射体の面積の割合が大きいこと及び反射体に用いられる反射材料の反射率が高いことがより好ましい。例えば、使用する炉体及び基板の大きさに合わせて熱反射板を設計するが、熱反射板の大きさは、直径が５０ｍｍ以上の円板形状もしくは一辺が５０ｍｍ以上の多角形状における板状外装とすることが好ましい。加えて熱反射板の厚さを、例えば、１～３．４ｍｍ、好ましくは１～３ｍｍとなるべく薄くすることが好ましい。加えて前記円板形状もしくは多角形状の面内方向の面積になるべく近い面積、例えば、反射面積率でいえば８０％以上となるように反射体を設けることが好ましい。加えて反射体に用いられる金属材料又は合金材料は、高い反射率、例えば８０％以上の反射率を持つ金属材料又は合金材料を選定することが好ましい。ここで、「面内方向」の面とは、熱反射板の反射面を含む板面のことをさす。 In addition, in the heat reflecting plate in this embodiment, the total heat capacity in the thickness direction of the plate-like exterior and the reflector at 1 mm 2 needs to satisfy the above range. In addition to satisfying this range, in order to further improve the thermal response of the furnace body, the area ratio of the reflector to the plate-shaped exterior in the in-plane direction is large, and the reflectance of the reflective material used for the reflector is It is more preferable that the value is high. For example, a heat reflector is designed according to the size of the furnace body and substrate to be used. It is preferable that In addition, it is preferable to make the thickness of the heat reflecting plate as thin as possible, for example, 1 to 3.4 mm, preferably 1 to 3 mm. In addition, it is preferable to provide the reflector so that the area is as close as possible to the area in the in-plane direction of the disc-shaped or polygonal shape, for example, the reflection area ratio is 80% or more. In addition, it is preferable to select a metal material or alloy material used for the reflector that has a high reflectance, for example, a reflectance of 80% or more. Here, the "in-plane direction" surface refers to the plate surface including the reflective surface of the heat reflecting plate.
熱反射板１００では、板状外装１は、第１外装板１ａと第２外装板１ｂとが対向して配置されて周縁部同士が周縁に沿って環状に連続して接合された合わせ板の構造を有することが好ましい。図２において、第１外装板１ａと第２外装板１ｂとは、周縁部同士の接合部２によって、合わせ板の構造を形成している。周縁部同士の接合部２は、図１に示すように、板状外装１の周縁に沿って環状に連続している。図１では、周縁部同士の接合部２は、第２外装板１ｂを透視して第１外装板１ａと第２外装板１ｂとの境界部としてみることができ、グレーの領域として図示した。合わせ板の構造とすることで、板状外装を薄くできるので、熱容量を小さくすることができる。 In the heat reflecting plate 100, the plate-like exterior plate 1 is made of a laminated plate in which a first exterior plate 1a and a second exterior plate 1b are arranged facing each other and their peripheral edges are continuously joined in an annular shape along the peripheral edge. It is preferable to have a structure. In FIG. 2, the first exterior plate 1a and the second exterior plate 1b form a laminated plate structure with joints 2 between their peripheral edges. As shown in FIG. 1, the joint 2 between the peripheral edges is continuous in an annular shape along the peripheral edge of the plate-shaped exterior 1. In FIG. 1, the joint 2 between the peripheral edges can be seen as a boundary between the first exterior plate 1a and the second exterior plate 1b when looking through the second exterior plate 1b, and is illustrated as a gray area. By using a laminated plate structure, the plate-like exterior can be made thinner, so the heat capacity can be reduced.
反射体５を正面に見た板状外装１の形状は、例えば、円形、楕円形、長方形又は正方形であり、円形が好ましい。また、反射体５を正面に見たシリカ板１の外側板面は、貫通孔や凹凸などを設けずに平坦面であることが好ましい。円形の直径は、例えば、５～５０ｃｍである。周縁部同士の接合部２の環状形状の幅は、例えば０．５～２０ｍｍである。板状外装１の肉厚は１～３．４ｍｍであることが好ましく、１～３ｍｍであることがより好ましい。第１外装板１ａの肉厚は０．１～１．７ｍｍであることが好ましく、０．５～１．５ｍｍであることがより好ましい。第２外装板１ｂの肉厚は０．１～１．７ｍｍであることが好ましく、０．５～１．５ｍｍであることがより好ましい。反射体５を正面に見た板状外装１の板面に対する反射体５の反射面積率は、８０％以上であることが好ましく、８７％以上であることがより好ましく、９０％以上であることがさらに好ましい。 The shape of the plate-like exterior 1 when the reflector 5 is viewed from the front is, for example, circular, oval, rectangular, or square, and preferably circular. Further, it is preferable that the outer surface of the silica plate 1 when the reflector 5 is viewed from the front is a flat surface without any through holes or irregularities. The diameter of the circle is, for example, 5 to 50 cm. The width of the annular joint 2 between the peripheral edges is, for example, 0.5 to 20 mm. The wall thickness of the plate-shaped exterior 1 is preferably 1 to 3.4 mm, more preferably 1 to 3 mm. The thickness of the first exterior plate 1a is preferably 0.1 to 1.7 mm, more preferably 0.5 to 1.5 mm. The thickness of the second exterior plate 1b is preferably 0.1 to 1.7 mm, more preferably 0.5 to 1.5 mm. The reflection area ratio of the reflector 5 to the plate surface of the plate-shaped exterior 1 when the reflector 5 is viewed from the front is preferably 80% or more, more preferably 87% or more, and 90% or more. is even more preferable.
板状外装１の材質はシリカ又はシリコンであることが好ましい。材料強度、また赤外線を吸収せずに透過できる点でシリカが好ましく、熱容量が小さい点でシリコンが好ましい。シリカは、結晶性シリカ又は非晶質シリカである形態を包含する。板状外装１の不純物濃度は、１００ｐｐｍ以下、好ましくは９０ｐｐｍ以下である。なお、本実施形態は、板状外装１の材質がシリコンである形態において、シリコンの表面が酸化されてシリカになっている形態を包含する。 The material of the plate-shaped exterior 1 is preferably silica or silicon. Silica is preferable because of its material strength and ability to transmit infrared rays without absorbing it, and silicon is preferable because it has a small heat capacity. Silica includes forms that are crystalline silica or amorphous silica. The impurity concentration of the plate-shaped exterior 1 is 100 ppm or less, preferably 90 ppm or less. Note that the present embodiment includes an embodiment in which the material of the plate-shaped exterior 1 is silicon, and an embodiment in which the surface of the silicon is oxidized to become silica.
熱反射板１００では、合わせ板の構造は、第１外装板１ａ及び第２外装板１ｂの対向し合う面の間に設けられ、かつ、第１外装板１ａ側及び第２外装板１ｂ側の少なくとも一方に周縁部同士の接合部２によって密閉されているキャビティ１２を有し、キャビティ１２内に反射体５が配置されていることが好ましい。キャビティ１２は、第１外装板１ａ側に設けられた形態、第１外装板１ａ側及び第２外装板１ｂ側の両側に設けられた形態及び第２外装板１ｂ側に設けられた形態がある。図２ではキャビティ１２が、第１外装板１ａ側に設けられた形態を示している。この形態では、第１外装板１ａの一方の表面に凹部が設けられており、第２外装板１ｂは凹部がない平板であり、第１外装板１ａ及び第２外装板１ｂの合わせ板の構造とすることで、キャビティ１２は、第１外装板１ａ側に設けられる。その結果、キャビティ１２は、第１外装板１ａ及び第２外装板１ｂの対向し合う面の第１外装板１ａ側のみに設けられ、かつ、周縁部同士の接合部２によって密閉されている。反射体５が密閉空間であるキャビティ１２内にあるため、周縁部同士の接合部に、反射体に起因する剥がす方向の応力がかかりにくく、反射体の破損による炉内の汚染を抑制することができる。さらに板状外装と反射体の熱膨張差による破損を回避できる。 In the heat reflecting plate 100, the structure of the laminated plate is that it is provided between the opposing surfaces of the first exterior plate 1a and the second exterior plate 1b, and that the laminated plates are provided on the first exterior plate 1a side and the second exterior plate 1b side. It is preferable to have a cavity 12 sealed on at least one side by a joint 2 between peripheral parts, and a reflector 5 to be disposed within the cavity 12. The cavity 12 is provided on the first exterior plate 1a side, on both sides of the first exterior plate 1a and second exterior plate 1b, and on the second exterior plate 1b side. . FIG. 2 shows a configuration in which the cavity 12 is provided on the first exterior plate 1a side. In this form, a concave portion is provided on one surface of the first exterior plate 1a, the second exterior plate 1b is a flat plate without a concave portion, and the structure of the mating plates of the first exterior plate 1a and the second exterior plate 1b is By doing so, the cavity 12 is provided on the first exterior plate 1a side. As a result, the cavity 12 is provided only on the first exterior plate 1a side of the opposing surfaces of the first exterior plate 1a and the second exterior plate 1b, and is sealed by the joint 2 between the peripheral edges. Since the reflector 5 is located in the cavity 12, which is a sealed space, stress in the peeling direction due to the reflector is less likely to be applied to the joint between the peripheral edges, and contamination in the furnace due to breakage of the reflector can be suppressed. can. Furthermore, damage due to the difference in thermal expansion between the plate-shaped exterior and the reflector can be avoided.
図３では、キャビティ１２が、第１外装板１ａ側及び第２外装板１ｂ側の両側にわたって設けられた形態を示している。この形態では、第１外装板１ａの一方の表面に凹部が設けられており、第２外装板１ｂの一方の表面に凹部が設けられており、凹部同士が合わさるように、第１外装板１ａ及び第２外装板１ｂの合わせ板の構造とする。その結果、キャビティ１２は、第１外装板１ａ及び第２外装板１ｂの対向し合う面の第１外装板１ａ側及び第２外装板１ｂ側の両方に設けられる。 FIG. 3 shows a configuration in which the cavity 12 is provided across both sides of the first exterior plate 1a and the second exterior plate 1b. In this form, a concave portion is provided on one surface of the first exterior plate 1a, a concave portion is provided on one surface of the second exterior plate 1b, and the first exterior plate 1a is and the structure of the second exterior plate 1b is a laminated plate. As a result, the cavities 12 are provided on both the first exterior plate 1a side and the second exterior plate 1b side of the opposing surfaces of the first exterior plate 1a and the second exterior plate 1b.
図４では、キャビティ１２が、第２外装板１ｂ側に設けられた形態を示している。この形態では、第１外装板１ａは凹部がない平板であり、第２外装板１ｂの一方の表面に凹部が設けられており、第１外装板１ａ及び第２外装板１ｂの合わせ板の構造とすることで、キャビティ１２は、第２外装板１ｂ側に設けられる。その結果、キャビティ１２は、第１外装板１ａ及び第２外装板１ｂの対向し合う面の第２外装板１ｂ側のみに設けられる。 FIG. 4 shows a configuration in which the cavity 12 is provided on the second exterior plate 1b side. In this form, the first exterior plate 1a is a flat plate without a recess, the second exterior plate 1b is provided with a recess on one surface, and the structure of the mating plate of the first exterior plate 1a and the second exterior plate 1b is By doing so, the cavity 12 is provided on the second exterior plate 1b side. As a result, the cavity 12 is provided only on the second exterior plate 1b side of the opposing surfaces of the first exterior plate 1a and the second exterior plate 1b.
キャビティ１２の高さ（図２では、上下方向の長さ）は、０．１μｍ～５ｍｍであることが好ましく、０．１μｍ～１ｍｍであることがより好ましい。キャビティ１２は、第１外装板１ａ側にのみ凹部を設ける形態、第１外装板１ａ側及び第２外装板１ｂ側の両方に凹部を設ける形態及び第２外装板１ｂ側にのみ凹部を設ける形態の３態様があるが、いずれの形態でも、凹部によって、第１外装板１ａの周縁部及び／又は第２外装板１ｂの周縁部に土手部１１が形成される。図２の形態では、第１外装板１ａに形成された土手部１１の天面は、向い合せに配置される第２外装板１ｂの平板部分と接合され、周縁部同士の接合部２が形成される。図３の形態では、第１外装板１ａと第２外装板１ｂの土手部１１の天面同士が接合され、周縁部同士の接合部２が形成される。また、図４の形態では、第２外装板１ｂに形成された土手部１１の天面は、向い合せに配置される第１外装板１ａの平板部分と接合され、周縁部同士の接合部２が形成される。凹部は、例えばエッチング法などによって形成することができる。 The height of the cavity 12 (the length in the vertical direction in FIG. 2) is preferably 0.1 μm to 5 mm, more preferably 0.1 μm to 1 mm. The cavity 12 has a configuration in which the recess is provided only on the first exterior plate 1a side, a configuration in which the recess is provided in both the first exterior plate 1a side and the second exterior plate 1b side, and a configuration in which the recess is provided only in the second exterior plate 1b side. There are three modes, but in any mode, the bank portion 11 is formed by the recess at the peripheral edge of the first exterior plate 1a and/or the peripheral edge of the second exterior plate 1b. In the form of FIG. 2, the top surface of the bank portion 11 formed on the first exterior plate 1a is joined to the flat plate portion of the second exterior plate 1b arranged facing each other, and a joint 2 between the peripheral edges is formed. be done. In the form of FIG. 3, the top surfaces of the bank portions 11 of the first exterior plate 1a and the second exterior plate 1b are joined to form a joint 2 between the peripheral edges. In addition, in the form of FIG. 4, the top surface of the bank part 11 formed on the second exterior plate 1b is joined to the flat plate part of the first exterior plate 1a arranged facing each other, and the joint 2 between the peripheral parts is formed. The recessed portion can be formed by, for example, an etching method.
本実施形態に係る熱反射板１００では、図２に示すように、第１外装板１ａは、周縁部に設けられた土手部１１と土手部１１で取り囲まれてキャビティ１２を構成する凹部とを有し、第２外装板１ｂは、平板状であることが好ましい。第１外装板１ａのみに凹部を設けることで、板状外装内にキャビティ１２を簡易な構造で設けることができる。このような形態を有する熱反射板は、図２の他、図５、図８、図１２又は図１５に例示された熱反射板１０３，１０６，１０９，１１２がある。 In the heat reflecting plate 100 according to the present embodiment, as shown in FIG. It is preferable that the second exterior plate 1b has a flat plate shape. By providing the recess only in the first exterior plate 1a, the cavity 12 can be provided within the plate-like exterior with a simple structure. Heat reflecting plates having such a configuration include heat reflecting plates 103, 106, 109, and 112 illustrated in FIG. 5, FIG. 8, FIG. 12, or FIG. 15 in addition to FIG. 2.
本実施形態に係る熱反射板１０２では、図４に示すように、第１外装板１ａは、平板状であり、第２外装板１ｂは、周縁部に設けられた土手部１１と土手部１１で取り囲まれてキャビティ１２を構成する凹部とを有することが好ましい。第２外装板１ｂのみに凹部を設けることで、板状外装内にキャビティ１２を簡易な構造で設けることができる。このような形態を有する熱反射板は、図４の他、図７、図１１又は図１４に例示された熱反射板１０５，１０８，１１１がある。 In the heat reflecting plate 102 according to the present embodiment, as shown in FIG. It is preferable to have a concave portion surrounded by a concave portion forming the cavity 12. By providing the recess only in the second exterior plate 1b, the cavity 12 can be provided within the plate-like exterior with a simple structure. Heat reflecting plates having such a configuration include heat reflecting plates 105, 108, and 111 illustrated in FIG. 7, FIG. 11, or FIG. 14 in addition to FIG. 4.
図２又は図３に示すように、本実施形態に係る熱反射板１００，１０１では、キャビティ１２を少なくとも第１外装板１ａ側に有し、第１外装板１ａのキャビティ１２内の表面上に反射体５として形成した薄膜を有し、薄膜は、第１外装板１ａのキャビティ１２内の表面側から順に、下地膜３と、反射面を含む表面層としての反射膜４と、を有する積層膜であり、下地膜３は、Ｔａ、Ｍｏ、Ｔｉ、Ｚｒ、Ｎｂ、Ｃｒ、Ｗ、Ｃｏ又はＮｉからなるか、又は、Ｔａ、Ｍｏ、Ｔｉ、Ｚｒ、Ｎｂ、Ｃｒ、Ｗ、Ｃｏ及びＮｉからなる群から選ばれる少なくともいずれか１種を含む合金からなり、反射膜４は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなるか、又は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる群から選ばれる少なくともいずれか１種を含む合金からなり、下地膜３と反射膜４とが異なる組成を有していることが好ましい。第１外装板のキャビティ内の表面上に反射体を形成しているため、周縁部同士の接合部に、反射体に起因する剥がす方向の応力がかかりにくく、反射体の破損による炉内の汚染を抑制することができる。さらに板状外装と反射体の熱膨張差による破損を回避できる。反射体５が薄膜であり、薄膜が積層膜である場合は、反射体５の少なくとも反射面を含む表面層は、反射膜４に対応する。積層膜である反射体５は、第１外装板１ａのキャビティ１２内の表面、すなわち、凹部の底面に形成されている。積層膜である反射体５は、凹部の底面の全面積に対して５０～１００％の面積で形成されていることが好ましく、８０～１００％の面積で形成されていることがより好ましい。反射体５の膜厚は、１０～１５００ｎｍであることが好ましく、２０～４００ｎｍであることがより好ましい。 As shown in FIG. 2 or 3, the heat reflecting plates 100, 101 according to the present embodiment have a cavity 12 at least on the first exterior plate 1a side, and have a cavity 12 on the inner surface of the cavity 12 of the first exterior plate 1a. It has a thin film formed as a reflector 5, and the thin film is a laminated layer including, in order from the surface side inside the cavity 12 of the first exterior plate 1a, a base film 3 and a reflective film 4 as a surface layer including a reflective surface. The base film 3 is made of Ta, Mo, Ti, Zr, Nb, Cr, W, Co, or Ni, or is made of Ta, Mo, Ti, Zr, Nb, Cr, W, Co, and Ni. The reflective film 4 is made of an alloy containing at least one selected from the group consisting of Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, and Au. , Ag or Cu, or at least one selected from the group consisting of Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or Cu. It is preferable that the base film 3 and the reflective film 4 are made of an alloy containing one of these and have different compositions. Since the reflector is formed on the surface inside the cavity of the first exterior plate, stress in the peeling direction caused by the reflector is less likely to be applied to the joint between the peripheral edges, which prevents contamination in the furnace due to breakage of the reflector. can be suppressed. Furthermore, damage due to the difference in thermal expansion between the plate-shaped exterior and the reflector can be avoided. When the reflector 5 is a thin film and the thin film is a laminated film, the surface layer of the reflector 5 including at least the reflective surface corresponds to the reflective film 4 . The reflector 5, which is a laminated film, is formed on the surface inside the cavity 12 of the first exterior plate 1a, that is, on the bottom surface of the recess. The reflector 5, which is a laminated film, is preferably formed with an area of 50 to 100%, more preferably 80 to 100%, of the total area of the bottom surface of the recess. The film thickness of the reflector 5 is preferably 10 to 1500 nm, more preferably 20 to 400 nm.
下地膜３は、Ｔａ、Ｍｏ、Ｔｉ、Ｚｒ、Ｎｂ、Ｃｒ、Ｗ、Ｃｏ又はＮｉからなるか、又は、Ｔａ、Ｍｏ、Ｔｉ、Ｚｒ、Ｎｂ、Ｃｒ、Ｗ、Ｃｏ及びＮｉからなる群から選ばれる少なくともいずれか１種を含む合金からなることが好ましい。このような金属又は合金は、融点が高く、かつ、板状外装との密着性に優れている。下地膜３は、例えば、スパッタ膜、塗布膜、ＣＶＤ、蒸着等で得られる薄膜であることが好ましい。Ｔａ、Ｍｏ、Ｔｉ、Ｚｒ、Ｎｂ、Ｃｒ、Ｗ、Ｃｏ及びＮｉからなる群から選ばれる少なくともいずれか１種を含む合金としては、これらの元素のいずれか一種を最多質量にて含む合金であることが好ましく、より好ましくはＴａ、Ｍｏ、Ｔｉ、Ｚｒ、Ｎｂ、Ｃｒ、Ｗ、Ｃｏ又はＮｉを５０質量％以上含有する合金、さらに好ましくは６０質量％以上含有する合金、最も好ましくは７０質量％以上含有する合金であり、例えば、Ｔａ‐Ｍｏ系合金、Ｔａ‐Ｃｒ系合金又はＣｒ‐Ｃｏ系合金である。下地膜３の膜厚は、５～５００ｎｍであることが好ましく、１０～１００ｎｍであることがより好ましい。下地膜３は反射膜４の密着性を向上させる。 The base film 3 is made of Ta, Mo, Ti, Zr, Nb, Cr, W, Co, or Ni, or selected from the group consisting of Ta, Mo, Ti, Zr, Nb, Cr, W, Co, and Ni. It is preferable that the alloy be made of an alloy containing at least one of the following. Such metals or alloys have a high melting point and excellent adhesion to the plate-like exterior. The base film 3 is preferably a thin film obtained by, for example, sputtering, coating, CVD, vapor deposition, or the like. An alloy containing at least one selected from the group consisting of Ta, Mo, Ti, Zr, Nb, Cr, W, Co, and Ni is an alloy containing one of these elements in the largest amount by mass. is preferable, more preferably an alloy containing 50% by mass or more of Ta, Mo, Ti, Zr, Nb, Cr, W, Co or Ni, still more preferably an alloy containing 60% by mass or more, most preferably 70% by mass. It is an alloy containing the above, for example, a Ta-Mo based alloy, a Ta-Cr based alloy, or a Cr-Co based alloy. The thickness of the base film 3 is preferably 5 to 500 nm, more preferably 10 to 100 nm. The base film 3 improves the adhesion of the reflective film 4.
反射膜４は下地膜３の表面に堆積していることが好ましい。反射膜４は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなるか、又は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる群から選ばれる少なくともいずれか１種を含む合金からなることが好ましい。このような金属又は合金は、融点が高く、かつ、赤外線の反射率が高い。また下地膜との反応性が少ない。反射膜４は、例えば、スパッタ膜、塗布膜、ＣＶＤ、蒸着等で得られる薄膜であることが好ましい。Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる群から選ばれる少なくともいずれか１種を含む合金としては、これらの元素のいずれか一種を最多質量にて含む合金であることが好ましく、より好ましくはＩｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕを５０質量％以上含有する合金、さらに好ましくは６０質量％以上含有する合金、最も好ましくは７０質量％以上含有する合金であり、例えば、Ｉｒ‐Ｐｔ系合金、Ｉｒ‐Ｒｈ系合金又はＰｔ‐Ｒｕ系合金である。反射膜４の膜厚は、５～１０００ｎｍであることが好ましく、１０～３００ｎｍであることがより好ましい。 Preferably, the reflective film 4 is deposited on the surface of the base film 3. The reflective film 4 is made of Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag, or Cu, or Ir, Pt, Rh, It is preferable to use an alloy containing at least one selected from the group consisting of Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag, or Cu. Such metals or alloys have a high melting point and a high reflectance of infrared rays. It also has little reactivity with the underlying film. The reflective film 4 is preferably a thin film obtained by, for example, sputtering, coating, CVD, vapor deposition, or the like. The alloy containing at least one selected from the group consisting of Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or Cu, It is preferable that the alloy contains the largest amount of any one of these elements, more preferably Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge. , an alloy containing Au, Ag or Cu in an amount of 50% by mass or more, more preferably an alloy containing 60% by mass or more, and most preferably an alloy containing 70% by mass or more, such as an Ir-Pt alloy, an Ir-Rh Pt-Ru alloy or Pt-Ru alloy. The thickness of the reflective film 4 is preferably 5 to 1000 nm, more preferably 10 to 300 nm.
積層膜としたときの下地膜３と反射膜４の好適な組み合わせとしては、下地膜３／反射膜４は、Ｔａ膜／Ｉｒ膜、Ｔａ膜／Ｐｔ膜、Ｍｏ膜／Ｉｒ膜などである。積層膜の膜厚は、１０～１５００ｎｍであることが好ましく、２０～４００ｎｍであることがより好ましい。 Preferred combinations of the base film 3 and the reflective film 4 when used as a laminated film include a Ta film/Ir film, a Ta film/Pt film, a Mo film/Ir film, etc. as the base film 3/reflective film 4. The thickness of the laminated film is preferably 10 to 1500 nm, more preferably 20 to 400 nm.
図５又は図６に示すように、反射体５の厚さがキャビティ１２の高さと等しい、すなわち、反射膜４が第２外装板１ｂの表面に接触している形態であってもよい。反射膜４と第２外装板が部分的に接触することで発生する干渉縞が低減される。下地膜３は、第１外装板１ａのキャビティ１２内の表面（凹部の底面）に堆積していることが好ましく、反射膜４は下地膜３の表面に堆積していることが好ましい。反射膜４は第２外装板１ｂの表面に接触しているが、第２外装板１ｂの表面に形成されていない、すなわち堆積したものではないことが好ましい。 As shown in FIG. 5 or 6, the thickness of the reflector 5 may be equal to the height of the cavity 12, that is, the reflective film 4 may be in contact with the surface of the second exterior plate 1b. Interference fringes caused by partial contact between the reflective film 4 and the second exterior plate are reduced. The base film 3 is preferably deposited on the surface inside the cavity 12 of the first exterior plate 1a (the bottom surface of the recess), and the reflective film 4 is preferably deposited on the surface of the base film 3. Although the reflective film 4 is in contact with the surface of the second exterior plate 1b, it is preferable that it is not formed on the surface of the second exterior plate 1b, that is, it is not deposited.
図４に示すように、本実施形態に係る熱反射板１０２では、第１外装板１ａが平板であり、キャビティ１２を第２外装板１ｂ側に有し、第１外装板１ａの表面上に反射体５として形成した薄膜を有し、薄膜は、第１外装板１ａの表面側から順に、下地膜３と、反射面を含む表面層としての反射膜４と、を有する積層膜であり、下地膜３は、Ｔａ、Ｍｏ、Ｔｉ、Ｚｒ、Ｎｂ、Ｃｒ、Ｗ、Ｃｏ又はＮｉからなるか、又は、Ｔａ、Ｍｏ、Ｔｉ、Ｚｒ、Ｎｂ、Ｃｒ、Ｗ、Ｃｏ及びＮｉからなる群から選ばれる少なくともいずれか１種を含む合金からなり、反射膜４は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなるか、又は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる群から選ばれる少なくともいずれか１種を含む合金からなることが好ましい。図４に示した形態は、第１外装板１ａが平板であり、キャビティ１２を第２外装板１ｂ側に有する点が、図２又は図３に示した形態と異なるが、他は同様である。平板である第１外装板１ａに反射体としての薄膜を形成するため、生産性に優れた熱反射板とすることができる。 As shown in FIG. 4, in the heat reflecting plate 102 according to the present embodiment, the first exterior plate 1a is a flat plate, and the cavity 12 is provided on the second exterior plate 1b side. It has a thin film formed as a reflector 5, and the thin film is a laminated film having, in order from the surface side of the first exterior plate 1a, a base film 3 and a reflective film 4 as a surface layer including a reflective surface, The base film 3 is made of Ta, Mo, Ti, Zr, Nb, Cr, W, Co, or Ni, or selected from the group consisting of Ta, Mo, Ti, Zr, Nb, Cr, W, Co, and Ni. The reflective film 4 is made of an alloy containing at least one of Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag, or Cu. or at least one selected from the group consisting of Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag, or Cu. It is preferable that the alloy be made of an alloy containing. The form shown in FIG. 4 differs from the form shown in FIG. 2 or 3 in that the first exterior plate 1a is a flat plate and the cavity 12 is provided on the second exterior plate 1b side, but the other aspects are the same. . Since a thin film as a reflector is formed on the first exterior plate 1a, which is a flat plate, a heat reflecting plate with excellent productivity can be obtained.
図７に示すように、反射体５の厚さがキャビティ１２の高さと等しい、すなわち、反射膜４が第２外装板１ｂの表面（凹部の底面）に接触している形態であってもよい。反射膜４と第２外装板が部分的に接触することで発生する干渉縞が低減される。下地膜３は、第１外装板１ａの表面に堆積していることが好ましく、反射膜４は下地膜３の表面に堆積していることが好ましい。図７に示した形態は、第１外装板１ａが平板であり、キャビティ１２を第２外装板１ｂ側に有する点が、図５又は図６に示した形態と異なるが、他は同様である。平板である第１外装板１ａに反射体としての薄膜を形成するため、生産性に優れた熱反射板とすることができる。 As shown in FIG. 7, the thickness of the reflector 5 may be equal to the height of the cavity 12, that is, the reflective film 4 may be in contact with the surface of the second exterior plate 1b (the bottom surface of the recess). . Interference fringes caused by partial contact between the reflective film 4 and the second exterior plate are reduced. The base film 3 is preferably deposited on the surface of the first exterior plate 1a, and the reflective film 4 is preferably deposited on the surface of the base film 3. The form shown in FIG. 7 differs from the form shown in FIG. 5 or 6 in that the first exterior plate 1a is a flat plate and the cavity 12 is provided on the second exterior plate 1b side, but the rest is the same. . Since a thin film as a reflector is formed on the first exterior plate 1a, which is a flat plate, a heat reflecting plate with excellent productivity can be obtained.
図８、図１０～図１４に示すように、本実施形態に係る熱反射板１０６～１１１は、キャビティ１２内で合わせ板の構造の対向する面同士の間を立設する少なくとも１本の支柱部６を有することが好ましい。支柱部６によって合わせ板の構造の接合強度を高めることができる。支柱部６としては、例えば、図８又は図１２に示すように、第１外装板１ａの凹部の底面から延び、支柱部６の天面が平板状の第２外装板１ｂの表面と接合された形態がある。支柱部６が第１外装板１ａの凹部の底面のみから延びる形態とするためには、例えば、第１外装板１ａのみについてエッチングによって凹部を形成することで土手部１１を形成するが、このとき、土手部１１を非エッチング箇所とするのと同様に支柱部６を非エッチング箇所とすることによって形成することができる。また支柱部６としては、例えば、図１０又は図１３に示すように、第１外装板１ａの凹部の底面から延び、かつ、第２外装板１ｂの凹部の底面から延び、支柱部６の天面同士が接合された形態がある。支柱部６が第１外装板１ａの凹部の底面及び第２外装板１ｂの凹部の底面の両方から延びる形態とするためには、例えば、第１外装板１ａ及び第２外装板１ｂについてエッチングによって凹部を形成することで土手部１１を形成するが、このとき、土手部１１を非エッチング箇所とするのと同様に支柱部６を非エッチング箇所とすることによって形成することができる。さらに支柱部６としては、例えば、図１１又は図１４に示すように、第２外装板１ｂの凹部の底面から延び、支柱部６の天面が平板状の第１外装板１ａの表面と接合された形態がある。支柱部６が第２外装板１ｂの凹部の底面のみから延びる形態とするためには、例えば、第２外装板１ｂのみについてエッチングによって凹部を形成することで土手部１１を形成し、このとき支柱部６を非エッチング箇所とすることによって形成することができる。図中、支柱部６と第１外装板１ａ若しくは第２外装板１ｂとの接合部、又は支柱部６同士の接合部を接合部７で示した。 As shown in FIG. 8, FIG. 10 to FIG. It is preferable to have a portion 6. The support portions 6 can increase the joint strength of the laminated plate structure. For example, as shown in FIG. 8 or 12, the column 6 extends from the bottom of the recess of the first exterior plate 1a, and the top surface of the column 6 is joined to the surface of the flat second exterior plate 1b. There are several forms. In order to make the support column 6 extend only from the bottom of the recess of the first exterior plate 1a, for example, the embankment 11 is formed by etching only the first exterior plate 1a. , can be formed by making the column part 6 a non-etched part in the same way as the bank part 11 is made a non-etched part. Further, as shown in FIG. 10 or 13, for example, the support column 6 extends from the bottom of the recess of the first exterior plate 1a, extends from the bottom of the recess of the second exterior plate 1b, and extends from the top of the support column 6. There is a form in which the surfaces are joined together. In order to make the support column 6 extend from both the bottom of the recess of the first exterior plate 1a and the bottom of the recess of the second exterior plate 1b, for example, the first exterior plate 1a and the second exterior plate 1b are etched. The bank portion 11 is formed by forming a recessed portion, but at this time, it can be formed by making the support portion 6 a non-etched portion in the same way as the bank portion 11 is a non-etched portion. Furthermore, as shown in FIG. 11 or 14, the support column 6 extends from the bottom surface of the recess of the second exterior plate 1b, and the top surface of the support column 6 is joined to the surface of the flat first exterior plate 1a. There is a form that has been made. In order to make the strut portion 6 extend only from the bottom of the recess of the second exterior plate 1b, for example, the bank portion 11 is formed by etching only the second exterior plate 1b. It can be formed by making the portion 6 a non-etched portion. In the figure, the joint portion between the support portion 6 and the first exterior plate 1a or the second exterior plate 1b, or the joint portion between the support portions 6 is indicated as a joint portion 7.
図８、図１０～図１４に示した熱反射板１０６～１１１について、反射体５については、図２～図７に示した熱反射板１００～１０５と同様である。このとき、支柱部６の外側に形成された反射体５には貫通孔や凹凸などを設けずに支柱部６の外側にある該反射体の内周及び該反射体の周縁に囲まれる全面が反射面であることが好ましい。 Regarding the heat reflection plates 106 to 111 shown in FIGS. 8 and 10 to 14, the reflector 5 is the same as the heat reflection plates 100 to 105 shown in FIGS. 2 to 7. At this time, the entire surface surrounded by the inner periphery of the reflector and the periphery of the reflector on the outside of the support column 6 is not provided with through holes or unevenness in the reflector 5 formed on the outside of the support column 6. Preferably, it is a reflective surface.
次に支柱部６の形状について説明する。本実施形態に係る熱反射板１０６～１１１では、支柱部６が、柱状又は筒状である形態を含む。支柱部６の主軸の横断面の形状は、円形、楕円形又は三角形以上の多角形であることが好ましい。三角形以上の多角形では正方形又は正六角形であることが好ましい。さらに、熱反射板は、図９に示すように、支柱部６を複数有し、支柱部６は筒状であり、かつ、各支柱部６は互いに筒壁の一部を共有した３次元空間充填構造を有することが好ましい。３次元空間充填構造とすることで接合強度を高めつつ、反射体の面積を広くとることが出来、さらに反射板そのものの強度を高めることが可能である。３次元空間充填構造は、ハニカム構造、矩形格子構造、方形格子構造又はひし形格子構造である形態を包含する。図９では、ハニカム構造の支柱部を有する熱反射板１００を図示している。ハニカム構造は、六角筒形を隙間なく並べた構造、好ましくは正六角筒形を隙間なく並べた構造である。矩形格子構造は断面長方形の角筒形を隙間なく並べた構造である。方形格子構造は断面正方形の角筒形を隙間なく並べた構造である。ひし形格子構造は断面ひし形の角筒形を隙間なく並べた構造である。ここで、３次元空間充填構造の支柱部６の筒状の内側に反射体５を形成するときは、形成後の反射体５には貫通孔や凹凸などを設けずに支柱部６の筒状の内側にある該反射体の周縁に囲まれる全面が反射面であることが好ましい。 Next, the shape of the support column 6 will be explained. In the heat reflecting plates 106 to 111 according to the present embodiment, the support portions 6 may have a columnar or cylindrical shape. The cross-sectional shape of the main axis of the support column 6 is preferably circular, elliptical, or a triangular or larger polygon. For polygons larger than triangles, squares or regular hexagons are preferred. Furthermore, as shown in FIG. 9, the heat reflecting plate has a plurality of support portions 6, each support portion 6 is cylindrical, and each support portion 6 is a three-dimensional space in which a portion of the cylinder wall is shared with each other. It is preferable to have a filling structure. By having a three-dimensional space-filling structure, it is possible to increase the area of the reflector while increasing the bonding strength, and it is also possible to increase the strength of the reflector itself. The three-dimensional space-filling structure includes forms that are honeycomb structures, rectangular lattice structures, square lattice structures, or rhombic lattice structures. FIG. 9 shows a heat reflecting plate 100 having pillars having a honeycomb structure. The honeycomb structure is a structure in which hexagonal cylinders are arranged without gaps, preferably regular hexagonal cylinders are arranged without gaps. A rectangular lattice structure is a structure in which rectangular cylinders with a rectangular cross section are arranged without gaps. A rectangular lattice structure is a structure in which rectangular cylinders with a square cross section are arranged without gaps. A rhombic lattice structure is a structure in which rectangular cylinders with a rhombic cross section are arranged without gaps. Here, when forming the reflector 5 inside the cylindrical shape of the support column 6 having a three-dimensional space-filling structure, the reflector 5 after formation is not provided with through holes or unevenness, and the cylindrical shape of the support column 6 is It is preferable that the entire surface surrounded by the periphery of the reflector located inside the reflector is a reflective surface.
本実施形態に係る熱反射板では、図２０に示すように、第１外装板１ａ及び第２外装板１ｂの対向し合う面は互いに平坦面であり、反射体５は、第２外装板１ｂ側の第１外装板１ａの表面のうち周縁部同士の環状の接合部２の内側の領域に形成された薄膜であり、薄膜は、第１外装板１ａの表面側から順に、下地膜と、反射面を含む表面層としての反射膜と、を有する積層膜であり、下地膜は、Ｔａ、Ｍｏ、Ｔｉ、Ｚｒ、Ｎｂ、Ｃｒ、Ｗ、Ｃｏ又はＮｉからなるか、又は、Ｔａ、Ｍｏ、Ｔｉ、Ｚｒ、Ｎｂ、Ｃｒ、Ｗ、Ｃｏ及びＮｉからなる群から選ばれる少なくともいずれか１種を含む合金からなり、反射膜は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなるか、又は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる群から選ばれる少なくともいずれか１種を含む合金からなり、下地膜と反射膜とが異なる組成を有していることが好ましい。なお、図２０において、反射体５が積層膜である形態の図示は省略した。下地膜は、第１外装板の表面に堆積していることが好ましく、反射膜は下地膜の表面に堆積していることが好ましい。反射膜は第２外装板の表面に接触しているが、第２外装板の表面に形成されていない、すなわち堆積したものではないことが好ましい。このような構造とすることで、生産性に優れた熱反射板とすることができる。また、反射体を第２外装板により密着させることができ、干渉縞をより抑制することができる。積層膜の膜厚は１０～５００ｎｍであることが好ましい。積層膜の膜厚を小さくすることで、キャビティ１２を設けていなくても、第１外装板及び第２外装板の応力変形によって周縁部同士の環状の接合部を設けることができ、積層膜が板状外装内によって外周囲が完全に覆われることが可能となる。反射体５の金属又は合金の選定理由は、図２～図７に示した熱反射板１００～１０５と同様である。 In the heat reflecting plate according to this embodiment, as shown in FIG. 20, the opposing surfaces of the first exterior plate 1a and the second exterior plate 1b are flat surfaces, and the reflector 5 is This is a thin film formed in the inner region of the annular joint 2 between the peripheral edges of the surface of the first exterior plate 1a on the side, and the thin film is formed of a base film and a base film in order from the surface side of the first exterior plate 1a. It is a laminated film having a reflective film as a surface layer including a reflective surface, and the base film is made of Ta, Mo, Ti, Zr, Nb, Cr, W, Co or Ni, or Ta, Mo, The reflective film is made of an alloy containing at least one selected from the group consisting of Ti, Zr, Nb, Cr, W, Co, and Ni, and the reflective film contains Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Consisting of Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or Cu, or Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge , Au, Ag, or Cu, and the base film and the reflective film preferably have different compositions. In addition, in FIG. 20, illustration of the form in which the reflector 5 is a laminated film is omitted. The base film is preferably deposited on the surface of the first exterior plate, and the reflective film is preferably deposited on the surface of the base film. Although the reflective film is in contact with the surface of the second exterior plate, it is preferable that it is not formed on the surface of the second exterior plate, that is, it is not deposited on the surface of the second exterior plate. With such a structure, a heat reflecting plate with excellent productivity can be obtained. Moreover, the reflector can be brought into close contact with the second exterior plate, and interference fringes can be further suppressed. The thickness of the laminated film is preferably 10 to 500 nm. By reducing the thickness of the laminated film, even if the cavity 12 is not provided, it is possible to provide an annular joint between the peripheral edges due to stress deformation of the first exterior plate and the second exterior plate, and the laminated film The outer periphery can be completely covered by the inside of the plate-like exterior. The reason for selecting the metal or alloy for the reflector 5 is the same as that for the heat reflecting plates 100 to 105 shown in FIGS. 2 to 7.
（反射体として形成した薄膜が所定の金属膜又は所定の金属を含む合金膜である形態１）
本実施形態に係る熱反射板では、キャビティを少なくとも第１外装板側に有し、第１外装板のキャビティ内の表面上に反射体として形成した薄膜を有し、薄膜は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる膜か、又は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕを５０質量％以上含む合金膜であることが好ましい。Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる膜か、又は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕを５０質量％以上含む合金膜であるときは、反射体として形成した薄膜が単層膜であってもよい。本実施形態に係る熱反射板は、図２、図５、図８又は図１２において、積層膜である反射体５をＩｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる膜か、又は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕを５０質量％以上含む合金膜に置換した構造を有する。また、図３、図６、図１０又は図１３の板状外装１のように、キャビティ１２が、第１外装板１ａ側及び第２外装板１ｂ側の両側にわたって設けられた形態であってもよい。この形態では、第１外装板１ａの一方の表面に凹部が設けられており、第２外装板１ｂの一方の表面に凹部が設けられており、凹部同士が合わさるように、第１外装板１ａ及び第２外装板１ｂの合わせ板の構造とする。その結果、キャビティ１２は、第１外装板１ａ及び第２外装板１ｂの対向し合う面の第１外装板１ａ側及び第２外装板１ｂ側の両方に設けられる。なお、本実施形態に係る熱反射板の赤外線の入射方向は、上から下に向かう方向又は下から上に向かう方向のいずれでもよい。
(Form 1 in which the thin film formed as a reflector is a predetermined metal film or an alloy film containing a predetermined metal)
The heat reflecting plate according to the present embodiment has a cavity at least on the first exterior plate side, and has a thin film formed as a reflector on the surface inside the cavity of the first exterior plate, and the thin film includes Ir, Pt, A film made of Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or Cu, or Ir, Pt, Rh, Ru, Re, Hf, Mo, An alloy film containing 50% by mass or more of Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag, or Cu is preferable. A film made of Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or Cu, or Ir, Pt, Rh, Ru, Re, If it is an alloy film containing 50% by mass or more of Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or Cu, even if the thin film formed as a reflector is a single layer film. good. In the heat reflecting plate according to the present embodiment, in FIG. 2, FIG. 5, FIG. 8, or FIG. , Ni, Fe, Sn, Ge, Au, Ag or Cu, or Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au , has a structure in which Ag or Cu is replaced with an alloy film containing 50% by mass or more. Further, even if the cavity 12 is provided across both sides of the first exterior plate 1a and the second exterior plate 1b, as in the plate-shaped exterior 1 of FIG. 3, FIG. 6, FIG. 10, or FIG. good. In this form, a concave portion is provided on one surface of the first exterior plate 1a, a concave portion is provided on one surface of the second exterior plate 1b, and the first exterior plate 1a is and the structure of the second exterior plate 1b is a laminated plate. As a result, the cavities 12 are provided on both the first exterior plate 1a side and the second exterior plate 1b side of the opposing surfaces of the first exterior plate 1a and the second exterior plate 1b. Note that the direction of incidence of infrared rays on the heat reflecting plate according to the present embodiment may be either a direction from top to bottom or a direction from bottom to top.
（反射体として形成した薄膜が所定の金属膜又は所定の金属を含む合金膜である形態２）
本実施形態に係る熱反射板では、第１外装板が平板であり、キャビティを第２外装板側に有し、第１外装板の表面上に反射体として形成した薄膜を有し、薄膜は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる膜か、又は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕを５０質量％以上含む合金膜であることが好ましい。Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる膜か、又は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕを５０質量％以上含む合金膜であるときは、反射体として形成した薄膜が単層膜であってもよい。本実施形態に係る熱反射板は、図４、図７、図１１又は図１４において、積層膜である反射体５をＩｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる膜か、又は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕを５０質量％以上含む合金膜に置換した構造を有する。なお、本実施形態に係る熱反射板の赤外線の入射方向は、上から下に向かう方向又は下から上に向かう方向のいずれでもよい。
(Form 2 in which the thin film formed as a reflector is a predetermined metal film or an alloy film containing a predetermined metal)
In the heat reflecting plate according to the present embodiment, the first exterior plate is a flat plate, has a cavity on the second exterior plate side, has a thin film formed as a reflector on the surface of the first exterior plate, and has a thin film formed as a reflector on the surface of the first exterior plate. , Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or Cu, or Ir, Pt, Rh, Ru, Re , Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag, or Cu in an amount of 50% by mass or more. A film made of Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or Cu, or Ir, Pt, Rh, Ru, Re, If it is an alloy film containing 50% by mass or more of Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or Cu, even if the thin film formed as a reflector is a single layer film. good. In the heat reflecting plate according to the present embodiment, in FIG. 4, FIG. 7, FIG. 11 or FIG. , Ni, Fe, Sn, Ge, Au, Ag or Cu, or Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au , has a structure in which Ag or Cu is replaced with an alloy film containing 50% by mass or more. Note that the direction of incidence of infrared rays on the heat reflecting plate according to the present embodiment may be either a direction from top to bottom or a direction from bottom to top.
（反射体として形成した薄膜が所定の金属膜又は所定の金属を含む合金膜である形態３）
本実施形態に係る熱反射板では、第１外装板及び第２外装板の対向し合う面は互いに平坦面であり、反射体は、第２外装板側の第１外装板の表面のうち周縁部同士の環状の接合部の内側の領域に形成された薄膜であり、薄膜は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる膜か、又は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕを５０質量％以上含む合金膜であることが好ましい。Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる膜か、又は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕを５０質量％以上含む合金膜であるときは、反射体として形成した薄膜が単層膜であってもよい。本実施形態に係る熱反射板は、図２０において、反射体５をＩｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる膜か、又は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕを５０質量％以上含む合金膜に置換した構造を有する。なお、本実施形態に係る熱反射板の赤外線の入射方向は、上から下に向かう方向又は下から上に向かう方向のいずれでもよい。
(Form 3 in which the thin film formed as a reflector is a predetermined metal film or an alloy film containing a predetermined metal)
In the heat reflecting plate according to the present embodiment, the opposing surfaces of the first exterior plate and the second exterior plate are flat surfaces, and the reflector is located at the peripheral edge of the surface of the first exterior plate on the second exterior plate side. This is a thin film formed in the inner region of the annular joint between parts, and the thin film includes Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, A film made of Au, Ag or Cu, or 50% by mass or more of Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or Cu Preferably, it is an alloy film containing. A film made of Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or Cu, or Ir, Pt, Rh, Ru, Re, If it is an alloy film containing 50% by mass or more of Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or Cu, even if the thin film formed as a reflector is a single layer film. good. In the heat reflecting plate according to this embodiment, the reflector 5 is made of Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or A film made of Cu or an alloy film containing 50% by mass or more of Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or Cu. It has a substituted structure. Note that the direction of incidence of infrared rays on the heat reflecting plate according to the present embodiment may be either a direction from top to bottom or a direction from bottom to top.
（反射体として形成した薄膜が所定の金属膜又は所定の金属を含む合金膜である形態４）
本実施形態に係る熱反射板では、キャビティを第１外装板側及び第２外装板側に有し、第１外装板のキャビティ内の表面上に反射体として形成した薄膜を有し、薄膜は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる膜か、又は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕを５０質量％以上含む合金膜であることが好ましい。Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる膜か、又は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕを５０質量％以上含む合金膜であるときは、反射体として形成した薄膜が単層膜であってもよい。本実施形態に係る熱反射板は、図３、図６、図１０又は図１３において、積層膜である反射体５をＩｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる膜か、又は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕを５０質量％以上含む合金膜に置換した構造を有する。なお、本実施形態に係る熱反射板の赤外線の入射方向は、上から下に向かう方向又は下から上に向かう方向のいずれでもよい。
(Form 4 in which the thin film formed as a reflector is a predetermined metal film or an alloy film containing a predetermined metal)
The heat reflecting plate according to the present embodiment has cavities on the first exterior plate side and the second exterior plate side, and has a thin film formed as a reflector on the surface inside the cavity of the first exterior plate, and the thin film is , Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or Cu, or Ir, Pt, Rh, Ru, Re , Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag, or Cu in an amount of 50% by mass or more. A film made of Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or Cu, or Ir, Pt, Rh, Ru, Re, If it is an alloy film containing 50% by mass or more of Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or Cu, even if the thin film formed as a reflector is a single layer film. good. In the heat reflecting plate according to the present embodiment, in FIG. 3, FIG. 6, FIG. 10, or FIG. , Ni, Fe, Sn, Ge, Au, Ag or Cu, or Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au , has a structure in which Ag or Cu is replaced with an alloy film containing 50% by mass or more. Note that the direction of incidence of infrared rays on the heat reflecting plate according to the present embodiment may be either a direction from top to bottom or a direction from bottom to top.
形態１～４において、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕを５０質量％以上含む合金膜においてＩｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕの含有率は、それぞれ５０質量％以上であることが好ましいが、６０質量％以上であることがより好ましく、７０質量％以上であることがさらに好ましい。Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる膜か、又は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕを５０質量％以上含む合金膜は、積層膜である反射体５と同様の膜厚で形成されることが好ましく、また、凹部の底面への薄膜の形成の面積比率は、積層膜である反射体５と同様の範囲で形成されることが好ましい。 In forms 1 to 4, in the alloy film containing 50% by mass or more of Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or Cu, Ir, The content of Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or Cu is preferably 50% by mass or more, but 60% by mass % or more, and even more preferably 70% by mass or more. A film made of Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or Cu, or Ir, Pt, Rh, Ru, Re, The alloy film containing 50% by mass or more of Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag, or Cu must be formed with the same thickness as the reflector 5, which is a laminated film. It is preferable that the area ratio of the thin film formed on the bottom surface of the recess is in the same range as that of the reflector 5 which is a laminated film.
本実施形態に係る熱反射板では、周縁部同士の接合部２は、表面活性化接合部であることが好ましい。さらに支柱部６を含む接合部７は表面活性化接合部であることが好ましい。比較的低温での接合が可能な為、反射膜に熱的、物理的ダメージが無く接合することが可能であり、また、内部を真空に保ったまま接合することで接合部における接合強度が高められており、熱反射板はより長寿命となり、また耐食性が高まり、炉内の汚染が抑制される。表面活性化接合部とは、接合し合う部位の少なくとも一方を表面活性化状態とした後、接合部位同士を、押圧をかけて合わせることにより原子レベルで表面組織を一体化して接合した部位をいう。接合し合う部位の両方を表面活性化状態とした後、接合部位同士を、押圧をかけて合わせることがより好ましい。板状外装同士の接合では、シリコン皮膜を製膜した後、表面活性化状態とし、その後、接合部位同士を、押圧をかけて合わせることとしてもよい。表面活性化接合部には、常温活性化接合部とプラズマ活性化接合部とがある。常温活性化接合部には、例えば、高速原子ビームを用いて表面活性化して接合した接合部、Ｓｉ等の活性金属を用いてナノ密着層を形成して表面活性化して接合した接合部、イオンビームを用いて表面活性化して接合した接合部がある。プラズマ活性化接合部には、例えば、酸素プラズマを用いて表面活性化して接合した接合部、窒素プラズマを用いて表面活性化して接合した接合部がある。周縁部同士の接合部２を表面活性化接合部とすることで、接合部におけるリークを低減でき、例えば、キャビティ内を真空に保つことで高温時の内圧上昇による板状外装の破損を防ぐことができる。表面活性化接合部を形成する方法については、例えば、特許文献４～６を参照できる。 In the heat reflecting plate according to this embodiment, it is preferable that the joints 2 between the peripheral parts are surface activated joints. Further, it is preferable that the joint section 7 including the strut section 6 is a surface-activated joint section. Since bonding can be performed at relatively low temperatures, it is possible to bond without thermal or physical damage to the reflective film, and by bonding while keeping the interior vacuum, the bonding strength at the bonded part is increased. As a result, the heat reflector has a longer lifespan, is more resistant to corrosion, and contamination inside the furnace is suppressed. A surface-activated joint is a joint where at least one of the parts to be joined is brought into a surface-activated state, and then the joint parts are brought together by applying pressure to integrate the surface structure at the atomic level. . It is more preferable to bring both of the joining parts into a surface activated state and then apply pressure to bring the joining parts together. In joining the plate-shaped exteriors, the silicone film may be formed, the surface activated, and then the joint parts may be pressed together. Surface activated joints include cold activated joints and plasma activated joints. Room-temperature activated joints include, for example, joints whose surface has been activated using a high-speed atomic beam, joints whose surface has been activated by forming a nano-adhesive layer using an active metal such as Si, and joints whose surface has been activated using ionized metals. There are joints that are bonded by surface activation using a beam. Examples of the plasma-activated joint include a joint formed by surface activation using oxygen plasma and a joint formed by surface activation using nitrogen plasma. By making the joint 2 between the peripheral edges a surface-activated joint, it is possible to reduce leakage at the joint, and for example, by keeping the inside of the cavity in a vacuum, it is possible to prevent damage to the plate-shaped exterior due to an increase in internal pressure at high temperatures. I can do it. For methods of forming surface activated junctions, reference may be made, for example, to Patent Documents 4 to 6.
本実施形態に係る熱反射板では、キャビティ１２内の圧力は、大気圧未満の減圧となっていることが好ましい。キャビティ１２内の圧力は、１０－２Ｐａ以下であることがより好ましい。熱処理時にキャビティ１２の内圧が高まることを抑制することができ、炉内の汚染をより抑制することができる。また、高温時の反射膜の劣化を抑制できる。 In the heat reflecting plate according to this embodiment, the pressure inside the cavity 12 is preferably reduced to less than atmospheric pressure. More preferably, the pressure inside the cavity 12 is 10 −2 Pa or less. It is possible to suppress an increase in the internal pressure of the cavity 12 during heat treatment, and it is possible to further suppress contamination in the furnace. Furthermore, deterioration of the reflective film at high temperatures can be suppressed.
（反射体が板である形態）
本実施形態に係る熱反射板１１２では、図１５に示すように、反射体８が板であり、かつ、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなるか、又は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる群から選ばれる少なくともいずれか１種を含む合金からなることが好ましい。Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる群から選ばれる少なくともいずれか１種を含む合金としては、これらの元素のいずれか一種を最多質量にて含む合金であることが好ましく、より好ましくはＩｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕを５０質量％以上含有する合金、さらに好ましくは６０質量％以上含有する合金、最も好ましくは７０質量％以上含有する合金であり、例えば、Ｉｒ‐Ｐｔ系合金、Ｉｒ‐Ｒｈ系合金又はＰｔ‐Ｒｕ系合金である。キャビティ１２内に反射体としての板が収容された状態となっており、板の腐食が生じにくい。さらに、周縁部同士の接合部に、板に起因する剥がす方向の応力がかかりにくい。板である反射体８は、凹部の底面の全面積に対して５０～１００％の面積で形成されていることが好ましく、８０～１００％の面積で形成されていることがより好ましい。反射体が板である形態においても、熱反射板１１２は、１ｍｍ２における板状外装及び反射体の厚さ方向の熱容量の合計が０．０００４～０．００８０（Ｊ／Ｋ）であり、好ましくは０．００２３～０．００７０（Ｊ／Ｋ）であり、より好ましくは０．００３０～０．００６０（Ｊ／Ｋ）である。
(form where the reflector is a plate)
In the heat reflecting plate 112 according to the present embodiment, as shown in FIG. 15, the reflector 8 is a plate, and includes Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, consisting of Fe, Sn, Ge, Au, Ag or Cu, or Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or Cu It is preferable that the alloy be made of an alloy containing at least one selected from the group consisting of: The alloy containing at least one selected from the group consisting of Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or Cu, It is preferable that the alloy contains the largest amount of any one of these elements, more preferably Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge. , an alloy containing Au, Ag or Cu in an amount of 50% by mass or more, more preferably an alloy containing 60% by mass or more, and most preferably an alloy containing 70% by mass or more, such as an Ir-Pt alloy, an Ir-Rh Pt-Ru alloy or Pt-Ru alloy. A plate serving as a reflector is housed in the cavity 12, and corrosion of the plate is less likely to occur. Furthermore, stress in the peeling direction due to the plate is less likely to be applied to the joint between the peripheral edges. The reflector 8, which is a plate, preferably has an area of 50 to 100%, more preferably 80 to 100%, of the total area of the bottom of the recess. Even in the case where the reflector is a plate, the heat reflector 112 preferably has a total heat capacity of 0.0004 to 0.0080 (J/K) in the thickness direction of the plate-like exterior and the reflector in 1 mm 2 . is 0.0023 to 0.0070 (J/K), more preferably 0.0030 to 0.0060 (J/K).
（反射体が箔である形態）
本実施形態に係る熱反射板では、反射体が箔であり、かつ、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなるか、又は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる群から選ばれる少なくともいずれか１種を含む合金からなることが好ましい（不図示）。Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる群から選ばれる少なくともいずれか１種を含む合金としては、これらの元素のいずれか一種を最多質量にて含む合金であることが好ましく、より好ましくはＩｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕを５０質量％以上含有する合金、より好ましくは６０質量％以上含有する合金、最も好ましくは７０質量％以上含有する合金であり、例えば、Ｉｒ‐Ｐｔ系合金、Ｉｒ‐Ｒｈ系合金又はＰｔ‐Ｒｕ系合金である。図１５において、反射体８が板である代わりに箔がキャビティ１２内に収容された状態となっており、箔の腐食が生じにくい。さらに、周縁部同士の接合部に、箔に起因する剥がす方向の応力がかかりにくい。箔である反射体は、凹部の底面の全面積に対して５０～１００％の面積で形成されていることが好ましく、８０～１００％の面積で形成されていることがより好ましい。反射体が箔である形態においても、熱反射板１１２は、１ｍｍ２における板状外装及び反射体の厚さ方向の熱容量の合計が０．０００４～０．００８０（Ｊ／Ｋ）であり、好ましくは０．００２３～０．００７０（Ｊ／Ｋ）であり、より好ましくは０．００３０～０．００６０（Ｊ／Ｋ）である。
(form where the reflector is foil)
In the heat reflecting plate according to the present embodiment, the reflector is a foil, and Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or Cu, or at least one selected from the group consisting of Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag, or Cu. It is preferable that the alloy be made of an alloy containing one kind (not shown). The alloy containing at least one selected from the group consisting of Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or Cu, It is preferable that the alloy contains the largest amount of any one of these elements, more preferably Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge. , an alloy containing 50% by mass or more of Au, Ag or Cu, more preferably an alloy containing 60% by mass or more, most preferably an alloy containing 70% by mass or more, such as Ir-Pt alloy, Ir-Rh Pt-Ru alloy or Pt-Ru alloy. In FIG. 15, instead of the reflector 8 being a plate, a foil is housed in the cavity 12, and corrosion of the foil is less likely to occur. Furthermore, stress in the peeling direction due to the foil is less likely to be applied to the joint between the peripheral edges. The reflector, which is a foil, preferably has an area of 50 to 100%, more preferably 80 to 100%, of the total area of the bottom of the recess. Even in the case where the reflector is a foil, the heat reflector 112 preferably has a total heat capacity of 0.0004 to 0.0080 (J/K) in the thickness direction of the plate-like exterior and the reflector in 1 mm 2 . is 0.0023 to 0.0070 (J/K), more preferably 0.0030 to 0.0060 (J/K).
本実施形態に係る熱反射板では、反射体の厚さは０．０１μｍ～５ｍｍであることが好ましく、０．０２μｍ～２ｍｍであることがより好ましい。反射体による高い反射効率を保持しつつ、熱反射板の熱容量を小さくすることができる。反射体の厚さが０．０１μｍ未満であると反射効率の保持が難しくなり、５ｍｍを超えると反射体の熱量が大きくなりすぎる場合がある。そして、反射体が薄膜である場合、積層膜の膜厚は１０ｎｍ以上１５００ｎｍ以下であることが好ましく、２０ｎｍ以上４００ｎｍ以下であることがより好ましい。反射体が板である場合、板厚は０．５ｍｍ以上５．０ｍｍ以下であることが好ましく、０．５ｍｍ以上２．０ｍｍ以下であることがより好ましい。反射体が箔である場合、箔の厚さは３μｍ以上２．０ｍｍ以下であることが好ましく、８μｍ以上１．０ｍｍ以下であることがより好ましい。 In the heat reflecting plate according to this embodiment, the thickness of the reflector is preferably 0.01 μm to 5 mm, more preferably 0.02 μm to 2 mm. The heat capacity of the heat reflecting plate can be reduced while maintaining high reflection efficiency by the reflector. If the thickness of the reflector is less than 0.01 μm, it will be difficult to maintain the reflection efficiency, and if it exceeds 5 mm, the amount of heat of the reflector may become too large. When the reflector is a thin film, the thickness of the laminated film is preferably 10 nm or more and 1500 nm or less, more preferably 20 nm or more and 400 nm or less. When the reflector is a plate, the plate thickness is preferably 0.5 mm or more and 5.0 mm or less, more preferably 0.5 mm or more and 2.0 mm or less. When the reflector is a foil, the thickness of the foil is preferably 3 μm or more and 2.0 mm or less, more preferably 8 μm or more and 1.0 mm or less.
本実施形態では、キャビティを有するとき、キャビティの高さ（図２では、上下方向の長さ）から反射体の厚さを差し引いた値、すなわちキャビティ内の高さ方向の隙間が２００μｍ以下であることが好ましく、１００μｍ以下であることがより好ましい。キャビティ内の高さ方向の隙間が２００μｍを超えると、大気圧による板状外装の変形が大きくなり、その結果、接合部付近に掛かる応力が大きくなり、結合部の割れが生じるおそれがある。 In this embodiment, when a cavity is provided, the value obtained by subtracting the thickness of the reflector from the height of the cavity (the length in the vertical direction in FIG. 2), that is, the gap in the height direction within the cavity is 200 μm or less. It is preferably 100 μm or less, and more preferably 100 μm or less. If the gap in the height direction within the cavity exceeds 200 μm, the deformation of the plate-like exterior due to atmospheric pressure will increase, and as a result, the stress applied to the vicinity of the joint will increase, and there is a risk that the joint will crack.
図２～図８、図１０～図１４においては、赤外線の入射方向は上から下に向かう方向である。図１５においては、赤外線の入射方向は上から下に向かう方向又は下から上に向かう方向のいずれでもよい。なお、熱処理装置において、保温体は被加熱基板の温度を保温するために必要ではあるが、本実施形態に係る熱反射板のための保温体は必ずしも必要ではない。保温体がない場合、本実施形態に係る熱反射板は、熱処理温度までの昇温プロファイル、温度保持プロファイル、降温プロファイルを有する熱処理工程において、加熱・冷却の応答を遅らせることなく、所望の各プロファイルに対してズレを生じ難くし、また、熱処理１サイクルに要する時間を長引かせることがなく、結果として生産効率の低下を生じさせない。 In FIGS. 2 to 8 and 10 to 14, the direction of incidence of infrared rays is from top to bottom. In FIG. 15, the direction of incidence of infrared rays may be either from top to bottom or from bottom to top. Note that in the heat treatment apparatus, although the heat insulating body is necessary to maintain the temperature of the substrate to be heated, the heat insulating body is not necessarily required for the heat reflecting plate according to the present embodiment. When there is no heat insulator, the heat reflector according to this embodiment can achieve each desired profile without delaying the heating/cooling response in a heat treatment process that has a temperature increase profile, a temperature maintenance profile, and a temperature decrease profile up to the heat treatment temperature. In addition, the time required for one cycle of heat treatment is not prolonged, and as a result, production efficiency is not reduced.
以下、実施例を示しながら本発明についてさらに詳細に説明するが、本発明は実施例に限定して解釈されない。 Hereinafter, the present invention will be explained in more detail while showing examples, but the present invention should not be interpreted as being limited to the examples.
（比較例１）
まず、外周３００ｍｍ、厚み４．０ｍｍの不透明石英を準備した。次に、紫外可視分光光度計（（株））島津製作所製 型式：ＵＶ－３１００ＰＣ）を用いて不透明石英の反射率を測定した。測定した反射率の結果を図２１示す。１０００℃のときに本比較例における不透明石英では２０００ｎｍ以上の波長において５％以下の反射率を有することが確認できた。このとき、比較例１における熱反射板全体の厚さは４．００００ｍｍ、反射面積率は１００．００％であった。次に、前記不透明石英の１ｍｍ２における板厚外装及び反射体の厚さ方向の熱容量の合計を算出したところ、０．００９２（Ｊ／Ｋ）であった。
(Comparative example 1)
First, opaque quartz with an outer circumference of 300 mm and a thickness of 4.0 mm was prepared. Next, the reflectance of the opaque quartz was measured using a UV-visible spectrophotometer (manufactured by Shimadzu Corporation, model: UV-3100PC). FIG. 21 shows the measured reflectance results. At 1000° C., it was confirmed that the opaque quartz in this comparative example had a reflectance of 5% or less at wavelengths of 2000 nm or more. At this time, the overall thickness of the heat reflection plate in Comparative Example 1 was 4.0000 mm, and the reflection area ratio was 100.00%. Next, the total heat capacity of the opaque quartz in the thickness direction of the plate exterior and the reflector in a thickness of 1 mm 2 was calculated to be 0.0092 (J/K).
（実施例１）
（反射体が積層膜である形態）
図２に示した熱反射板を作製する。まず、外周３００ｍｍ、厚み１．２ｍｍの板状外装２枚を準備し、それぞれ第１外装板、第２外装板とした。次に、第１外装板の外周から幅１０ｍｍを第２外装板との接合部として残し、それ以外の箇所についてはエッチングを行い、深さ１μｍのキャビティのための凹部を設けた。次に、第１外装板の凹部の底面に下地膜としてＴａをスパッタリング法によって５０ｎｍ成膜し、下地膜の上に反射膜としてＩｒをスパッタリング法によって１５０ｎｍ成膜し、反射体を形成した。次に、紫外可視分光光度計（(株)島津製作所製 型式：ＵＶ－３１００ＰＣ）を用いて反射体の反射率を測定した。測定した反射率の結果を図１６に示す。測定は、反射体の表面に測定のための光を直接当てて行った。また、（数１）を用いて１０００℃における物質が放射する黒体放射の波長と放射量の関係を算出した。算出結果を図１７に示す。
(form in which the reflector is a laminated film)
A heat reflecting plate shown in FIG. 2 is manufactured. First, two plate-shaped exterior plates having an outer circumference of 300 mm and a thickness of 1.2 mm were prepared, and were used as a first exterior plate and a second exterior plate, respectively. Next, a 10 mm width from the outer periphery of the first exterior plate was left as a joint with the second exterior plate, and the other parts were etched to provide a recessed part for a cavity with a depth of 1 μm. Next, a 50 nm thick Ta film was formed by sputtering as a base film on the bottom of the recess of the first exterior plate, and a 150 nm thick Ir film was formed on top of the base film by sputtering to form a reflector. Next, the reflectance of the reflector was measured using a UV-visible spectrophotometer (manufactured by Shimadzu Corporation, model: UV-3100PC). The measured reflectance results are shown in FIG. 16. The measurement was performed by directly shining light for measurement onto the surface of the reflector. Furthermore, the relationship between the wavelength of blackbody radiation emitted by a substance at 1000° C. and the amount of radiation was calculated using (Equation 1). The calculation results are shown in FIG.
（実施例２）
（反射体が積層膜である形態）
まず、外周３００ｍｍ、厚み１．２ｍｍの板状外装２枚を準備し、それぞれ第１外装板、第２外装板とした。次に、第１外装板の外周から幅５ｍｍ分を第２外装板との接合部としてマスキングした。次に、マスキングした第１外装板の面に下地膜としてＴａをスパッタリング法によって５０ｎｍ成膜し、下地膜の上に反射膜としてＩｒをスパッタリング法によって１５０ｎｍ成膜し、反射体を形成した。次に、マスキングを除去した。反射体は実施例１の反射体と同じであり、図１６に示した反射特性と同じ特性を有していた。次に、反射体を形成した平板状の第１外装板と平板状の第２外装板を接合するために、真空度１０-２Ｐａ以下の真空中で、高速原子ビームを第１外装板の接合部に照射して表面活性化し、第１外装板に第２外装板を押し付けることで熱反射板を作製した。このとき、実施例２における熱反射板全体の厚さは２．４００２ｍｍ、反射面積率は９６．６７％であった。熱反射板を作製後、１ｍｍ２における板厚外装及び反射体の厚さ方向の熱容量の合計を算出したところ、０．００５５（Ｊ／Ｋ）であった。熱反射板を１０００℃まで昇温する際の必要な熱量は熱容量に比例するため、実施例２の熱反射板は、比較例１の不透明石英より熱反射性が高いとともに電力消費量を４０．２２％削減することができた。
(Example 2)
(form in which the reflector is a laminated film)
First, two plate-shaped exterior plates having an outer circumference of 300 mm and a thickness of 1.2 mm were prepared, and were used as a first exterior plate and a second exterior plate, respectively. Next, a 5 mm width from the outer periphery of the first exterior plate was masked as a joint with the second exterior plate. Next, a 50 nm thick Ta film was formed as a base film on the masked surface of the first exterior plate by a sputtering method, and a 150 nm thick Ir film was formed on the base film as a reflective film by a sputtering method to form a reflector. Next, the masking was removed. The reflector was the same as the reflector of Example 1 and had the same reflection characteristics as shown in FIG. Next, in order to bond the flat first exterior plate on which the reflector is formed and the flat second exterior plate, a high-speed atomic beam is applied to the first exterior plate in a vacuum with a degree of vacuum of 10 -2 Pa or less. A heat reflecting plate was produced by irradiating the joint portion to activate the surface and pressing the second exterior plate against the first exterior plate. At this time, the total thickness of the heat reflection plate in Example 2 was 2.4002 mm, and the reflection area ratio was 96.67%. After producing the heat reflecting plate, the total heat capacity in the thickness direction of the plate exterior and the reflector at a thickness of 1 mm 2 was calculated to be 0.0055 (J/K). Since the amount of heat required to raise the temperature of the heat reflector to 1000°C is proportional to its heat capacity, the heat reflector of Example 2 has higher heat reflectivity than the opaque quartz of Comparative Example 1 and reduces power consumption by 40. We were able to reduce this by 22%.
（実施例３）
（反射体が積層膜である形態）
まず、外周３００ｍｍ、厚み１．２ｍｍの板状外装２枚を準備し、それぞれ第１外装板、第２外装板とした。次に、第１外装板の外周から幅５ｍｍ分を第２外装板との接合部としてマスキングした。次に、マスキングした第１外装板の面に下地膜としてＴａをスパッタリング法によって５０ｎｍ成膜し、前記下地膜の上に反射膜としてＩｒをスパッタリング法によって１５０ｎｍ成膜し、反射体を形成した。次に、マスキングを除去した。反射体は実施例１の反射体と同じであり、図１６に示した反射特性と同じ特性を有していた。次に、反射体を形成した平板状の第１外装板と平板状の第２外装板を接合するために、酸素プラズマを第１外装板の接合部に接触させて表面活性化し、第１外装板に第２外装板を押し付けることで熱反射板を作製した。このとき、実施例３における熱反射板全体の厚さは２．４００２ｍｍ、反射面積率は９６．６７％であった。熱反射板を作製後、１ｍｍ２における板状外装及び反射体の厚さ方向の熱容量の合計を算出したところ、０．００５５（Ｊ／Ｋ）であった。熱反射板を１０００℃まで昇温する際の必要な熱量は熱容量に比例するため、実施例３の熱反射板は、比較例１の不透明石英より熱反射性が高いとともに電力消費量を４０．２２％削減することができた。
(Example 3)
(form in which the reflector is a laminated film)
First, two plate-shaped exterior plates having an outer circumference of 300 mm and a thickness of 1.2 mm were prepared, and were used as a first exterior plate and a second exterior plate, respectively. Next, a 5 mm width from the outer periphery of the first exterior plate was masked as a joint with the second exterior plate. Next, a 50 nm thick Ta film was formed as a base film on the masked surface of the first exterior plate by a sputtering method, and a 150 nm thick Ir film was formed on the base film by a sputtering method as a reflective film to form a reflector. Next, the masking was removed. The reflector was the same as the reflector of Example 1 and had the same reflection characteristics as shown in FIG. Next, in order to join the flat first exterior plate on which the reflector is formed and the flat second exterior plate, oxygen plasma is brought into contact with the joint part of the first exterior plate to activate the surface, and the first exterior plate A heat reflecting plate was produced by pressing a second exterior plate onto the plate. At this time, the total thickness of the heat reflection plate in Example 3 was 2.4002 mm, and the reflection area ratio was 96.67%. After producing the heat reflecting plate, the total heat capacity in the thickness direction of the plate-shaped exterior and the reflector at 1 mm 2 was calculated to be 0.0055 (J/K). Since the amount of heat required to raise the temperature of the heat reflector to 1000°C is proportional to its heat capacity, the heat reflector of Example 3 has higher heat reflectivity than the opaque quartz of Comparative Example 1 and reduces power consumption by 40. We were able to reduce this by 22%.
（実施例４）
（反射体が積層膜であり、ハニカム形状の支柱部がある形態）
図１２に示した熱反射板を作製する。まず、外周３００ｍｍ、厚み１．２ｍｍの板状外装２枚を準備し、それぞれ第１外装板、第２外装板とした。次に、第１外装板の外周から幅１０ｍｍ分をマスキングし、その後、それ以外の箇所で、正六角形の幅１０ｍｍ（１辺の長さは５．７７ｍｍ）、壁柱厚み０．３ｍｍのハニカム形状の支柱部に相当する箇所にマスキングをした後、エッチングを行い、深さ１μｍのキャビティのための凹部を設けた。次に、マスキングした第１外装板の凹部の底面に下地膜としてＴａをスパッタリング法によって５０ｎｍ成膜し、下地膜の上に反射膜としてＩｒをスパッタリング法によって１５０ｎｍ成膜し、反射体を形成した。次に、マスキングを除去した。本実施例の反射体は実施例１の反射体に対してハニカム構造を持たせたものである。図１６に示した反射率は、全面が反射膜である形態の値を示しているところ、本実施例のハニカム構造を有する反射膜は、全面に対して反射膜部分の面積比率が９４.３４％であるため、本実施例の反射特性は図１６に示す反射率に対して、０．９４３４を乗じた反射率を有するものと考えられる。次に、反射体を形成した第１外装板と平板状の第２外装板を接合するために、真空度１０-２Ｐａ以下の真空中で、高速原子ビームを第１外装板の接合部２及び支柱部に照射して表面活性化し、第１外装板に第２外装板を押し付けることで接合し、熱反射板を作製した。このとき、実施例４における熱反射板全体の厚さは２．４０００ｍｍ、反射面積率は８８．０５％であった。熱反射板を作製後、１ｍｍ２における板状外装及び反射体の厚さ方向の熱容量の合計を算出したところ、０．００５５（Ｊ／Ｋ）であった。熱反射板を１０００℃まで昇温する際の必要な熱量は熱容量に比例するため、実施例４の熱反射板は、比較例１の不透明石英より熱反射性が高いとともに電力消費量を４０．２２％削減することができた。
(Example 4)
(The reflector is a laminated film and has honeycomb-shaped pillars)
A heat reflecting plate shown in FIG. 12 is manufactured. First, two plate-shaped exterior plates having an outer circumference of 300 mm and a thickness of 1.2 mm were prepared, and were used as a first exterior plate and a second exterior plate, respectively. Next, mask a 10 mm width from the outer periphery of the first exterior plate, and then make a regular hexagonal honeycomb with a width of 10 mm (one side length is 5.77 mm) and a wall pillar thickness of 0.3 mm. After masking the portions corresponding to the pillars of the shape, etching was performed to provide a recessed portion for a cavity with a depth of 1 μm. Next, a 50 nm thick Ta film was formed by sputtering as a base film on the bottom of the recess of the masked first exterior plate, and a 150 nm thick Ir film was formed on the base film by sputtering as a reflective film to form a reflector. . Next, the masking was removed. The reflector of this example has a honeycomb structure compared to the reflector of Example 1. The reflectance shown in FIG. 16 shows the value when the entire surface is a reflective film, and the reflective film with the honeycomb structure of this example has an area ratio of the reflective film portion to the entire surface of 94.34. %, it is considered that the reflection characteristics of this example have a reflectance obtained by multiplying the reflectance shown in FIG. 16 by 0.9434. Next, in order to join the first exterior plate on which the reflector is formed and the flat second exterior plate, a high-speed atomic beam is applied to the joint part 2 of the first exterior plate in a vacuum with a degree of vacuum of 10 -2 Pa or less. A heat reflecting plate was produced by irradiating the pillars with irradiation to activate the surface, and pressing the second exterior plate onto the first exterior plate to join them. At this time, the total thickness of the heat reflection plate in Example 4 was 2.4000 mm, and the reflection area ratio was 88.05%. After producing the heat reflecting plate, the total heat capacity in the thickness direction of the plate-shaped exterior and the reflector at 1 mm 2 was calculated to be 0.0055 (J/K). Since the amount of heat required to raise the temperature of the heat reflector to 1000°C is proportional to its heat capacity, the heat reflector of Example 4 has higher heat reflectivity than the opaque quartz of Comparative Example 1 and reduces power consumption by 40. We were able to reduce this by 22%.
（実施例５）
（反射体がＰｔ箔である形態）
図１５に示した熱反射板を作製する。まず、外周３００ｍｍ、厚み１．２ｍｍの板状外装２枚を準備し、それぞれ第１外装板、第２外装板とした。次に、第１外装板の外周から幅７ｍｍを第２外装板との接合部として残し、それ以外の箇所については切削加工を行い、深さ０．２ｍｍのキャビティのための凹部を設けた。次に、第１外装板の凹部の底面に、外周２８４ｍｍ、厚み１００μｍのＰｔ箔を配置し、反射体を形成した。次に、紫外可視分光光度計（(株)島津製作所製 型式：ＵＶ－３１００ＰＣ）を用いて前記反射体の反射率を測定した。測定した反射率を図１８に示す。測定は、反射体の表面に測定のための光を直接当てて行った。図１８の結果、１０００℃のときに本実施例における反射体では２０００ｎｍ以上の波長において８０％以上の反射率を有することが確認できた。次に、反射体を配置した第１外装板と平板状の第２外装板を接合するために、真空度１０-２Ｐａ以下の真空中で、高速原子ビームを第１外装板の接合部に照射して表面活性化し、第１外装板に第２外装板を押し付けることで接合し、熱反射板を作製した。このとき、実施例５における熱反射板全体の厚さは２．４０００ｍｍ、反射面積率は９５．３３％であった。熱反射板を作製後、１ｍｍ２における板状外装及び反射体の厚さ方向の熱容量の合計を算出したところ、０．００５６（Ｊ／Ｋ）であった。熱反射板を１０００℃まで昇温する際の必要な熱量は熱容量に比例するため、実施例５の熱反射板は、比較例１の不透明石英より熱反射性が高いとともに電力消費量を３９．１３％削減することができた。
(Example 5)
(form in which the reflector is Pt foil)
A heat reflecting plate shown in FIG. 15 is manufactured. First, two plate-shaped exterior plates having an outer circumference of 300 mm and a thickness of 1.2 mm were prepared, and were used as a first exterior plate and a second exterior plate, respectively. Next, a width of 7 mm from the outer periphery of the first exterior plate was left as a joint with the second exterior plate, and the other parts were cut to provide a recessed part for a cavity with a depth of 0.2 mm. Next, a Pt foil having an outer circumference of 284 mm and a thickness of 100 μm was placed on the bottom of the recessed portion of the first exterior plate to form a reflector. Next, the reflectance of the reflector was measured using an ultraviolet-visible spectrophotometer (manufactured by Shimadzu Corporation, model: UV-3100PC). The measured reflectance is shown in FIG. The measurement was performed by directly shining light for measurement onto the surface of the reflector. As a result of FIG. 18, it was confirmed that the reflector in this example had a reflectance of 80% or more at a wavelength of 2000 nm or more at 1000°C. Next, in order to join the first exterior plate on which the reflector is arranged and the flat second exterior plate, a high-speed atomic beam is applied to the joint of the first exterior plate in a vacuum with a degree of vacuum of 10 -2 Pa or less. The surface was activated by irradiation, and the second exterior plate was pressed and bonded to the first exterior plate to produce a heat reflecting plate. At this time, the total thickness of the heat reflection plate in Example 5 was 2.4000 mm, and the reflection area ratio was 95.33%. After producing the heat reflecting plate, the total heat capacity in the thickness direction of the plate-shaped exterior and the reflector at 1 mm 2 was calculated to be 0.0056 (J/K). Since the amount of heat required to raise the temperature of the heat reflector to 1000°C is proportional to its heat capacity, the heat reflector of Example 5 has higher heat reflectivity than the opaque quartz of Comparative Example 1 and reduces power consumption by 39. We were able to reduce this by 13%.
（実施例６）
（反射体がＭｏ膜である形態）
まず、外周３００ｍｍ、厚み１．２ｍｍの板状外装２枚を準備し、それぞれ第１外装板、第２外装板とした。次に、第１外装板の外周から幅５ｍｍ分を第２外装板との接合部としてマスキングした。次に、マスキングした第１外装板の面に反射体としてＭｏをスパッタリング法によって２００ｎｍ成膜した。次に、マスキングを除去した。次に、紫外可視分光光度計（（株））島津製作所製 型式：ＵＶ－３１００ＰＣ）を用いて反射体の反射率を測定した。測定した反射率の結果を図１９に示す。測定は、反射体の表面に測定のための光を直接当てて行った。また、図１９の結果、１０００℃のときに本実施例における反射体では２０００ｎｍ以上の波長において８０％以上の反射率を有することが確認できた。次に、反射体を形成した第１外装板と平板状の第２外装板を接合するために、真空度１０‐２Ｐａ以下の真空中で、高速原子ビームを第１外装板の接合部に照射して表面活性化し、第１外装板に第２外装板を押し付けることで熱反射板を作製した。このとき、実施例６における熱反射板全体の厚さは２．４００２ｍｍ、反射面積率は９６．６７％であった。熱反射板を作製後、１ｍｍ２における板状外装及び反射体の厚さ方向の熱容量の合計を算出したところ、０．００５５（Ｊ／Ｋ）であった。熱反射板を１０００℃まで昇温する際の必要な熱量は熱容量に比例するため、実施例６の熱反射板は、比較例１の不透明石英より熱反射性が高いとともに電力消費量を４０．２２％削減することができた。
(Example 6)
(Form in which the reflector is a Mo film)
First, two plate-shaped exterior plates having an outer circumference of 300 mm and a thickness of 1.2 mm were prepared, and were used as a first exterior plate and a second exterior plate, respectively. Next, a 5 mm width from the outer periphery of the first exterior plate was masked as a joint with the second exterior plate. Next, a 200 nm film of Mo was formed as a reflector on the masked surface of the first exterior plate by sputtering. Next, the masking was removed. Next, the reflectance of the reflector was measured using an ultraviolet-visible spectrophotometer (manufactured by Shimadzu Corporation, model: UV-3100PC). The results of the measured reflectance are shown in FIG. The measurement was performed by directly shining light for measurement onto the surface of the reflector. Moreover, as a result of FIG. 19, it was confirmed that the reflector in this example had a reflectance of 80% or more at a wavelength of 2000 nm or more at 1000°C. Next, in order to join the first exterior plate on which the reflector was formed and the flat second exterior plate, a high-speed atomic beam was applied to the joint of the first exterior plate in a vacuum with a degree of vacuum of 10-2 Pa or less. The surface was activated by irradiation, and a heat reflecting plate was produced by pressing the second exterior plate against the first exterior plate. At this time, the total thickness of the heat reflection plate in Example 6 was 2.4002 mm, and the reflection area ratio was 96.67%. After producing the heat reflecting plate, the total heat capacity in the thickness direction of the plate-shaped exterior and the reflector at 1 mm 2 was calculated to be 0.0055 (J/K). Since the amount of heat required to raise the temperature of the heat reflector to 1000°C is proportional to its heat capacity, the heat reflector of Example 6 has higher heat reflectivity than the opaque quartz of Comparative Example 1 and reduces power consumption by 40. We were able to reduce this by 22%.
（実施例７）
（反射体がＭｏ膜、かつ石英板厚みが１．７ｍｍである形態）
まず、外周３００ｍｍ、厚み１．７ｍｍの板状外装２枚を準備し、それぞれ第１外装板、第２外装板とした。次に、第１外装板の外周から幅５ｍｍ分を第２外装板との接合部としてマスキングした。次に、マスキングした第１外装板の面に反射体としてＭｏをスパッタリング法によって２００ｎｍ成膜した。次に、マスキングを除去した。反射体は実施例６の反射体と同じであり、図１９に示した反射特性と同じ特性を有していた。次に、反射体を形成した第１外装板と平板状の第２外装板を接合するために、真空度１０‐２Ｐａ以下の真空中で、高速原子ビームを第１外装板の接合部に照射して表面活性化し、第１外装板に第２外装板を押し付けることで熱反射板を作製した。このとき、実施例７における熱反射板全体の厚さは３．４００２ｍｍ、反射面積率は９６．６７％であった。熱反射板を作製後、１ｍｍ２における板状外装及び反射体の厚さ方向の熱容量の合計を算出したところ、０．００７９（Ｊ／Ｋ）であった。熱反射板を１０００℃まで昇温する際の必要な熱量は熱容量に比例するため、実施例７の熱反射板は、比較例１の不透明石英より熱反射性が高いとともに電力消費量を１４．１３％削減することができた。
(Example 7)
(A configuration in which the reflector is a Mo film and the quartz plate thickness is 1.7 mm)
First, two plate-shaped exterior plates having an outer circumference of 300 mm and a thickness of 1.7 mm were prepared, and were used as a first exterior plate and a second exterior plate, respectively. Next, a 5 mm width from the outer periphery of the first exterior plate was masked as a joint with the second exterior plate. Next, a 200 nm film of Mo was formed as a reflector on the masked surface of the first exterior plate by sputtering. Next, the masking was removed. The reflector was the same as the reflector of Example 6 and had the same reflection characteristics as shown in FIG. Next, in order to join the first exterior plate on which the reflector was formed and the flat second exterior plate, a high-speed atomic beam was applied to the joint of the first exterior plate in a vacuum with a degree of vacuum of 10-2 Pa or less. The surface was activated by irradiation, and a heat reflecting plate was produced by pressing the second exterior plate against the first exterior plate. At this time, the total thickness of the heat reflection plate in Example 7 was 3.4002 mm, and the reflection area ratio was 96.67%. After producing the heat reflecting plate, the total heat capacity in the thickness direction of the plate-shaped exterior and the reflector at 1 mm 2 was calculated to be 0.0079 (J/K). Since the amount of heat required to raise the temperature of the heat reflector to 1000°C is proportional to its heat capacity, the heat reflector of Example 7 has higher heat reflectivity than the opaque quartz of Comparative Example 1, and reduces power consumption by 14. We were able to reduce this by 13%.
（実施例８）
（反射体がＭｏ膜、かつ石英板厚みが０．５ｍｍである形態）
まず、外周１００ｍｍ、厚み０．５ｍｍの板状外装２枚を準備し、それぞれ第１外装板、第２外装板とした。次に、第１外装板の外周から幅５ｍｍ分を第２外装板との接合部としてマスキングした。次に、マスキングした第１外装板の面に反射体としてＭｏをスパッタリング法によって２００ｎｍ成膜した。次に、マスキングを除去した。反射体は実施例６の反射体と同じであり、図１９に示した反射特性と同じ特性を有していた。次に、反射体を形成した第１外装板と平板状の第２外装板を接合するために、真空度１０‐２Ｐａ以下の真空中で、高速原子ビームを第１外装板の接合部に照射して表面活性化し、第１外装板に第２外装板を押し付けることで熱反射板を作製した。このとき、実施例８における熱反射板全体の厚さは１．０００２ｍｍ、反射面積率は９０．００％であった。熱反射板を作製後、１ｍｍ２における板状外装及び反射体の厚さ方向の熱容量の合計を算出したところ、０．００２３（Ｊ／Ｋ）であった。熱反射板を１０００℃まで昇温する際の必要な熱量は熱容量に比例するため、実施例８の熱反射板は、比較例１の不透明石英より熱反射性が高いとともに電力消費量を７５．００％削減することができた。
(Example 8)
(A configuration in which the reflector is a Mo film and the quartz plate thickness is 0.5 mm)
First, two plate-shaped exterior plates having an outer circumference of 100 mm and a thickness of 0.5 mm were prepared, and were used as a first exterior plate and a second exterior plate, respectively. Next, a 5 mm width from the outer periphery of the first exterior plate was masked as a joint with the second exterior plate. Next, a 200 nm film of Mo was formed as a reflector on the masked surface of the first exterior plate by sputtering. Next, the masking was removed. The reflector was the same as the reflector of Example 6 and had the same reflection characteristics as shown in FIG. Next, in order to join the first exterior plate on which the reflector was formed and the flat second exterior plate, a high-speed atomic beam was applied to the joint of the first exterior plate in a vacuum with a degree of vacuum of 10-2 Pa or less. The surface was activated by irradiation, and a heat reflecting plate was produced by pressing the second exterior plate against the first exterior plate. At this time, the total thickness of the heat reflection plate in Example 8 was 1.0002 mm, and the reflection area ratio was 90.00%. After producing the heat reflecting plate, the total heat capacity in the thickness direction of the plate-shaped exterior and the reflector at 1 mm 2 was calculated to be 0.0023 (J/K). Since the amount of heat required to raise the temperature of a heat reflector to 1000°C is proportional to its heat capacity, the heat reflector of Example 8 has higher heat reflectivity than the opaque quartz of Comparative Example 1 and reduces power consumption by 75. We were able to reduce this by 00%.
１００～１１２ 熱反射板
１ 板状外装
１ａ 第１外装板
１ｂ 第２外装板
２ 周縁部同士の接合部
３ 下地膜
４ 反射膜
５ 反射体
６ 支柱部
７ 支柱部を含む接合部
８ 反射体
１１ 土手部
１２ キャビティ
100 to 112 Heat reflecting plate 1 Plate-like exterior 1a First exterior plate 1b Second exterior plate 2 Joint portion between peripheral parts 3 Base film 4 Reflective film 5 Reflector 6 Support column 7 Joint portion 8 including the support column Reflector 11 Bank part 12 cavity
Claims (8)
該板状外装の内部に配置されて該板状外装によって外周囲が完全に覆われてなり、かつ、該板状外装の一方の表面に入射した赤外線を反射する反射体と、を有する熱反射板であって、
前記板状外装は、平板状の第１外装板の平坦面と平板状の第２外装板の平坦面とが対向して配置されて周縁部同士が周縁に沿って環状に連続して接合された接合部を有する合わせ板の構造を有し、
前記反射体は、前記第１外装板の平坦面のうち前記周縁部同士の環状の接合部の内側の領域に形成された薄膜であり、
前記第１外装板及び前記第２外装板の外側板面は全面にわたって平坦面であり、
前記薄膜の周縁に囲まれる全面が反射面であり、かつ、
前記反射体は、薄膜、板又は箔であり、
前記熱反射板は、１ｍｍ２における板状外装及び反射体の厚さ方向の熱容量の合計が０．０００４～０．００８０（Ｊ／Ｋ）であることを特徴とする熱反射板。 A plate-like exterior,
a heat reflector that is disposed inside the plate-like exterior and whose outer periphery is completely covered by the plate-like exterior, and which reflects infrared rays incident on one surface of the plate-like exterior; A board,
In the plate-shaped exterior, a flat surface of a flat first exterior plate and a flat surface of a flat second exterior plate are arranged to face each other, and the peripheral edges are continuously joined in an annular shape along the peripheral edge. It has a laminated board structure with a joint part,
The reflector is a thin film formed in a region inside the annular joint between the peripheral edges of the flat surface of the first exterior plate,
The outer plate surfaces of the first exterior plate and the second exterior plate are flat surfaces over the entire surface,
The entire surface surrounded by the periphery of the thin film is a reflective surface, and
The reflector is a thin film, plate or foil,
The heat reflecting plate is characterized in that the total heat capacity in the thickness direction of the plate-like exterior and the reflector at 1 mm 2 is 0.0004 to 0.0080 (J/K).
前記下地膜は、Ｔａ、Ｍｏ、Ｔｉ、Ｚｒ、Ｎｂ、Ｃｒ、Ｗ、Ｃｏ又はＮｉからなるか、又は、Ｔａ、Ｍｏ、Ｔｉ、Ｚｒ、Ｎｂ、Ｃｒ、Ｗ、Ｃｏ及びＮｉからなる群から選ばれる少なくともいずれか１種を含む合金からなり、The base film is made of Ta, Mo, Ti, Zr, Nb, Cr, W, Co, or Ni, or selected from the group consisting of Ta, Mo, Ti, Zr, Nb, Cr, W, Co, and Ni. consisting of an alloy containing at least one of
前記反射膜は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなるか、又は、Ｉｒ、Ｐｔ、Ｒｈ、Ｒｕ、Ｒｅ、Ｈｆ、Ｍｏ、Ａｌ、Ｍｇ、Ｃｏ、Ｎｉ、Ｆｅ、Ｓｎ、Ｇｅ、Ａｕ、Ａｇ又はＣｕからなる群から選ばれる少なくともいずれか１種を含む合金からなり、The reflective film is made of Ir, Pt, Rh, Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag, or Cu, or Ir, Pt, Rh, Consisting of an alloy containing at least one selected from the group consisting of Ru, Re, Hf, Mo, Al, Mg, Co, Ni, Fe, Sn, Ge, Au, Ag or Cu,
前記下地膜と前記反射膜とが異なる組成を有していることを特徴とする請求項１に記載の熱反射板。The heat reflecting plate according to claim 1, wherein the base film and the reflective film have different compositions.
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| JP2021200022A JP7477491B2 (en) | 2021-12-09 | 2021-12-09 | Heat reflector |
| PCT/JP2022/043587 WO2023106132A1 (en) | 2021-12-09 | 2022-11-25 | Heat reflection plate |
| TW111146132A TW202329249A (en) | 2021-12-09 | 2022-12-01 | Heat reflection plate |
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| JP2021200022A JP7477491B2 (en) | 2021-12-09 | 2021-12-09 | Heat reflector |
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| JP3423131B2 (en) * | 1995-11-20 | 2003-07-07 | 東京エレクトロン株式会社 | Heat treatment equipment and treatment equipment |
| JP4185194B2 (en) | 1997-07-31 | 2008-11-26 | コバレントマテリアル株式会社 | Carbon heater |
| JPH1197448A (en) * | 1997-09-18 | 1999-04-09 | Kemitoronikusu:Kk | Apparatus and method for heat treatment of semiconductor crystal |
| JPH11340157A (en) * | 1998-05-29 | 1999-12-10 | Sony Corp | Apparatus and method for optical irradiation heat treatment |
| JP3467565B2 (en) * | 1998-11-16 | 2003-11-17 | 坂口電熱株式会社 | Heating furnace with heat radiation reflector |
| JP2001102319A (en) | 1999-09-29 | 2001-04-13 | Toshiba Ceramics Co Ltd | Heat treatment apparatus |
| JP2002100462A (en) | 2000-09-25 | 2002-04-05 | Ibiden Co Ltd | Hot plate |
| JP2010212160A (en) | 2009-03-11 | 2010-09-24 | Sumitomo Heavy Ind Ltd | Reflecting plate for heater |
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