JP2023029246A - マイクロ発光ダイオード表示装置 - Google Patents
マイクロ発光ダイオード表示装置 Download PDFInfo
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- 238000000407 epitaxy Methods 0.000 claims abstract description 11
- 239000004065 semiconductor Substances 0.000 description 29
- 229910052751 metal Inorganic materials 0.000 description 26
- 239000002184 metal Substances 0.000 description 26
- 239000000758 substrate Substances 0.000 description 7
- 230000006798 recombination Effects 0.000 description 5
- 238000005215 recombination Methods 0.000 description 5
- 239000004020 conductor Substances 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000002096 quantum dot Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/15—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission
- H01L27/153—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars
- H01L27/156—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars two-dimensional arrays
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/075—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00
- H01L25/0753—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00 the devices being arranged next to each other
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/62—Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
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- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Led Devices (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Led Device Packages (AREA)
Abstract
【解決手段】回路基板と、エピタキシー構造と、導電層を含むマイクロ発光ダイオード表示装置が提供される。エピタキシー構造は、回路基板に電気的に接続され、且つ接続層と複数の発光メサとを含む。複数の発光メサは、接続層上に配置され、接続層の厚さは、複数の発光メサの厚さよりも薄く、接続層は、複数の発光メサにより露出された第1の表面と、第1の表面の反対側の第2の表面を有する。導電層は、接続層の第2の表面上に配置され、第2の表面の複数のサブ領域を露出し、接続層への導電層の垂直投影は、接続層への第1の表面の垂直投影と重なり合う。
【選択図】図1B
Description
10、10A:接続層
10H:貫通孔
20:発光メサ
20G:発光メサグループ
30、30A、30B、30B1、30B2、50、30C、30T:導電層
40:半導体パッド
101:第1の表面
102、102A:第2の表面
102P:3次元パターン
102S、102G:サブエリア
120、130、140、150:接合金属層
140E:エピタキシャルセクション
201:第1の型の半導体層
202:第2の型の半導体層
203:発光層
220:絶縁層
A1:表示領域
A2:非表示領域
C1:回路基板
D1:第1の方向
D2:第2の方向
D3:第3の方向
ES、ES1:エピタキシー構造
G、G’:溝
PX:表示サブピクセル
Claims (8)
- 回路基板と、
前記回路基板に電気的に接続されたエピタキシー構造であって、
接続層と、
前記接続層上に配置された複数の発光メサと、を備え、前記接続層の厚さが前記発光メサの厚さよりも薄く、前記接続層が前記発光メサによって露出された第1の表面と該第1の表面の反対側の第2の表面を有する、エピタキシー構造と、
前記接続層の前記第2表面に配置された第1の導電層であって、前記接続層への前記第1の導電層の垂直投影が、前記接続層への前記第1の表面の垂直投影と重なり合う、第1の導電層と、
を備える、マイクロ発光ダイオード表示装置。 - 前記接続層への前記第1の導電層の垂直投影が第1の投影であり、前記接続層への前記第1の表面の垂直投影が第2の投影であり、前記第1投影と前記第2の投影の重なり合う部分の面積が、前記第2の投影の面積の0.5倍以上である、請求項1に記載のマイクロ発光ダイオード表示装置。
- 前記第1の導電層の厚さが、前記エピタキシー構造の厚さ以下である、請求項1に記載のマイクロ発光ダイオード表示装置。
- 前記第1の導電層が前記第2の表面の複数のサブエリアを露出し、前記サブエリアがそれぞれ前記発光メサに対応する、請求項1に記載のマイクロ発光ダイオード表示装置。
- 前記発光メサが複数の発光メサグループにグループ化され、前記第1の導電層が前記第2の表面の複数のサブエリアを露出し、前記サブエリアがそれぞれ前記発光メサグループに対応する、請求項1に記載のマイクロ発光ダイオード表示装置。
- 前記第1の導電層は、前記接続層を貫通する貫通孔内に配置され、前記回路基板に電気的に接続している、請求項1に記載のマイクロ発光ダイオード表示装置。
- 前記接続層の前記第1の表面に配置された第2の導電層をさらに備える、請求項1に記載のマイクロ発光ダイオード表示装置。
- 回路基板と、
前記回路基板に電気的に接続されたエピタキシー構造であって、接続層と、該接続層上に配置された複数の発光メサとを備え、前記接続層が前記発光メサによって露出された第1の表面および該第1の表面と反対側の第2の表面を有する、エピタキシー構造と、
前記接続層の第2の表面上に配置され、前記第2の表面を完全に覆う透明導電層と、
を備える、マイクロ発光ダイオード表示装置。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW110130934A TWI784681B (zh) | 2021-08-20 | 2021-08-20 | 微型發光二極體顯示裝置 |
TW110130934 | 2021-08-20 | ||
TW111124466A TWI833265B (zh) | 2021-08-20 | 2022-06-30 | 微型發光二極體顯示裝置 |
TW111124466 | 2022-06-30 |
Publications (2)
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JP2023029246A true JP2023029246A (ja) | 2023-03-03 |
JP7423706B2 JP7423706B2 (ja) | 2024-01-29 |
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JP2022119618A Active JP7423706B2 (ja) | 2021-08-20 | 2022-07-27 | マイクロ発光ダイオード表示装置 |
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JP (1) | JP7423706B2 (ja) |
KR (1) | KR20230028180A (ja) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020100302A1 (ja) * | 2018-11-16 | 2020-05-22 | 堺ディスプレイプロダクト株式会社 | マイクロledデバイスおよびその製造方法 |
US20200303585A1 (en) * | 2017-08-08 | 2020-09-24 | PlayNitride Inc. | Micro light emitting diode device and manufacturing method thereof |
JP2021089427A (ja) * | 2019-12-04 | 2021-06-10 | ▲ナイ▼創▲顕▼示科技股▲ふん▼有限公司 | マイクロ発光ダイオードディスプレイパネル |
US20210183301A1 (en) * | 2019-12-11 | 2021-06-17 | Samsung Electronics Co., Ltd. | Display apparatus and method of manufacturing the same |
CN113299803A (zh) * | 2021-06-11 | 2021-08-24 | 苏州大学 | 一种Micro LED芯片单体器件的制备方法、显示模块及显示装置 |
US20220131040A1 (en) * | 2020-10-26 | 2022-04-28 | PlayNitride Display Co., Ltd. | Micro light-emitting diode display |
-
2022
- 2022-07-27 JP JP2022119618A patent/JP7423706B2/ja active Active
- 2022-08-19 KR KR1020220104123A patent/KR20230028180A/ko not_active Application Discontinuation
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20200303585A1 (en) * | 2017-08-08 | 2020-09-24 | PlayNitride Inc. | Micro light emitting diode device and manufacturing method thereof |
WO2020100302A1 (ja) * | 2018-11-16 | 2020-05-22 | 堺ディスプレイプロダクト株式会社 | マイクロledデバイスおよびその製造方法 |
JP2021089427A (ja) * | 2019-12-04 | 2021-06-10 | ▲ナイ▼創▲顕▼示科技股▲ふん▼有限公司 | マイクロ発光ダイオードディスプレイパネル |
US20210183301A1 (en) * | 2019-12-11 | 2021-06-17 | Samsung Electronics Co., Ltd. | Display apparatus and method of manufacturing the same |
US20220131040A1 (en) * | 2020-10-26 | 2022-04-28 | PlayNitride Display Co., Ltd. | Micro light-emitting diode display |
CN113299803A (zh) * | 2021-06-11 | 2021-08-24 | 苏州大学 | 一种Micro LED芯片单体器件的制备方法、显示模块及显示装置 |
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KR20230028180A (ko) | 2023-02-28 |
JP7423706B2 (ja) | 2024-01-29 |
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