JP2023020749A - Electrode device for ultra-high temperature heating furnace - Google Patents

Electrode device for ultra-high temperature heating furnace Download PDF

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JP2023020749A
JP2023020749A JP2021126293A JP2021126293A JP2023020749A JP 2023020749 A JP2023020749 A JP 2023020749A JP 2021126293 A JP2021126293 A JP 2021126293A JP 2021126293 A JP2021126293 A JP 2021126293A JP 2023020749 A JP2023020749 A JP 2023020749A
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sleeve
electrode portion
heating furnace
furnace
insulator
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JP7081030B1 (en
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浩也 稲本
Hiroya Inamoto
照昌 金井
Terumasa Kanai
上士 岡島
Joji Okajima
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Noritake Co Ltd
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Abstract

To provide an electrode device for an ultra-high temperature heating furnace capable of suppressing erosion of a ceramic insulator that supports a graphite electrode part in a circular tubular sleeve.SOLUTION: A sleeve 64 includes therein a ceramic shield 84 having a higher melting point than a second circular tubular insulator 82. The ceramic shield is provided between the second circular tubular insulator 82 made of alumina porcelain, which is a ceramic insulator, and an opening of the sleeve 64 so as to shield the second circular tubular insulator 82. Thereby, it is possible to prevent erosion of the second circular tubular insulator 82, which supports a graphite electrode part 68 in the circular tubular sleeve 64. Thus, it is possible to greatly improve the operating rate.SELECTED DRAWING: Figure 5

Description

本発明は、ヒータを用いて熱処理を行なう超高温加熱炉の電極装置の構造に関する。 The present invention relates to the structure of an electrode device for an ultra-high temperature heating furnace that performs heat treatment using a heater.

カーボン繊維やグラファイトシート、燃料電池用ガス拡散層基材等を製造するための黒鉛化処理等では、２０００℃以上の超高温領域で熱処理を行なうことが求められている。このような２０００℃程度の超高温領域で熱処理が行なわれる超高温加熱炉では、炉内に設けられたカーボンヒータに給電する電極装置が、炉壁を貫通した状態で備えられる。このような超高温加熱炉に用いられる電極装置は、カーボンヒータに接続された黒鉛電極部と、その黒鉛電極部に高融点金属製の接続部を介して接続された水冷金属電極部とを備え、炉体に貫通する状態で設けられた円管状のスリーブ内に、たとえばアルミナ製の円環状或いは円筒状のセラミックス絶縁体を介して支持されている。たとえば特許文献１に記載された電極装置がそれである。 In the graphitization process for producing carbon fibers, graphite sheets, fuel cell gas diffusion layer substrates, etc., it is required to perform heat treatment in an ultra-high temperature range of 2000° C. or higher. In such an ultra-high temperature heating furnace in which heat treatment is performed in an ultra-high temperature range of about 2000° C., an electrode device for supplying power to a carbon heater provided in the furnace is provided in a state of penetrating the furnace wall. An electrode device used in such an ultra-high temperature heating furnace comprises a graphite electrode section connected to a carbon heater, and a water-cooled metal electrode section connected to the graphite electrode section through a connection section made of a high-melting-point metal. , and is supported in a cylindrical sleeve that penetrates the furnace body, via an annular or cylindrical ceramic insulator made of alumina, for example. For example, the electrode device described in Patent Document 1 is one of them.

これにより、水冷金属電極部の接続部が高温によって機械的強度が著しく損なわれることが抑制され、２０００℃以上の超高温領域で熱処理を行なうことが可能になったとされている。 It is said that this suppresses the mechanical strength of the connecting portion of the water-cooled metal electrode portion from being significantly damaged by high temperature, making it possible to perform heat treatment in an ultra-high temperature range of 2000° C. or higher.

実開昭５８－９０６９４号公報Japanese Utility Model Laid-Open No. 58-90694

ところで、上記の電極装置では、黒鉛電極部、高融点金属製の接続部、および水冷金属電極部のうち、円管状のスリーブ内において少なくとも黒鉛電極部を支持するセラミックス絶縁体は、円管状のスリーブの開口側から入射する高エネルギの輻射線に晒されることや、構造的にスリーブ内において移動し易い場合には、スリーブの開口側へ移動して、炉内からの高エネルギの輻射線に一層晒されるので、溶損する恐れがあった。このような不都合は、２５００℃から３０００℃の超高温領域となるほど、顕著となっていた。 By the way, in the above-described electrode device, among the graphite electrode portion, the refractory metal connection portion, and the water-cooled metal electrode portion, the ceramic insulator that supports at least the graphite electrode portion in the cylindrical sleeve is the cylindrical sleeve. When exposed to high-energy radiation incident from the opening side of the furnace, or when it is structurally easy to move within the sleeve, move to the opening side of the sleeve and receive more high-energy radiation from the inside of the furnace. Since it was exposed, there was a risk of it being eroded. Such inconveniences became more conspicuous as the temperature range increased from 2500°C to 3000°C.

本発明は、以上の事情を背景として為されたものであり、その目的とするところは、円管状のスリーブ内において黒鉛電極部を支持するセラミックス絶縁体の溶損を抑制することができる超高温加熱炉の電極装置を提供することにある。 The present invention has been made against the background of the above circumstances, and an object thereof is to provide an ultra-high temperature ceramics insulator capable of suppressing melting damage of ceramic insulators supporting graphite electrodes in a cylindrical sleeve. An object of the present invention is to provide an electrode device for a heating furnace.

本発明者等は、以上の事情を背景として種々検討を重ねた結果、炉壁を貫通して設けられたスリーブの開口とスリーブ内において、黒鉛電極部等を支持するセラミックス絶縁体とスリーブの開口との間に黒鉛電極部の外周面から突き出す突起を設けると、セラミックス絶縁体の溶損が好適に抑制されることを見出した。本発明はかかる知見に基づいてなされたものである。 The inventors of the present invention conducted various investigations against the background of the above circumstances, and as a result, found that the opening of the sleeve provided through the furnace wall and the ceramic insulator supporting the graphite electrode part etc. in the sleeve and the opening of the sleeve It has been found that if a protrusion protruding from the outer peripheral surface of the graphite electrode portion is provided between the and the ceramic insulator, the erosion of the ceramic insulator can be suitably suppressed. The present invention has been made based on such findings.

すなわち、第１発明の要旨とするところは、（ａ）金属電極部と前記金属電極部に接続された黒鉛電極部とを備え、超高温加熱炉の炉壁を貫通して固設されたスリーブ内に前記黒鉛電極部がセラミックス絶縁体を径方向に介して配置され、前記黒鉛電極部が前記炉壁の内側に配置されているカーボンヒータに接続された、超高温加熱炉の電極装置であって、（ｂ）前記スリーブ内において、前記セラミックス絶縁体と前記スリーブの開口との間に黒鉛電極部の外周面から突き出す突起を、備えることにある。 That is, the gist of the first invention is (a) a sleeve provided with a metal electrode portion and a graphite electrode portion connected to the metal electrode portion, and fixed through the furnace wall of an ultra-high temperature heating furnace. An electrode device for an ultra-high temperature heating furnace, wherein the graphite electrode portion is arranged inside the furnace via a ceramic insulator in the radial direction, and the graphite electrode portion is connected to a carbon heater arranged inside the furnace wall. and (b) in the sleeve, a protrusion protruding from the outer peripheral surface of the graphite electrode section is provided between the ceramic insulator and the opening of the sleeve.

第２発明の要旨とするところは、第１発明において、前記超高温加熱炉は、６面の炉壁で囲まれた炉室を有し、前記カーボンヒータは、前記６面の炉壁の内側にそれぞれ配置されていることにある。 The gist of the second invention is that in the first invention, the ultrahigh-temperature heating furnace has a furnace chamber surrounded by six furnace walls, and the carbon heater is located inside the six furnace walls. is arranged in each.

第３発明の要旨とするところは、第１発明又は第２発明において、前記スリーブ内において、前記セラミックス絶縁体と突起との間に、前記セラミックス絶縁体よりも高融点を有するセラミックス遮蔽物が、配置されていることにある。 The gist of the third invention is that in the first invention or the second invention, a ceramic shield having a melting point higher than that of the ceramic insulator is provided between the ceramic insulator and the projection in the sleeve, It is located.

第４発明の要旨とするところは、第３発明において、前記セラミックス絶縁体は、アルミナ磁器であり、前記セラミックス遮蔽物は、窒化アルミニウム、炭化珪素、ジルコニア、窒化ホウ素のうちのいずれかの材料から製造されたものであることにある。 The gist of the fourth invention is that in the third invention, the ceramic insulator is alumina porcelain, and the ceramic shield is made of any one of aluminum nitride, silicon carbide, zirconia, and boron nitride. It is manufactured.

すなわち、第１発明の超高温加熱炉の電極装置によれば、金属電極部と前記金属電極部に接続された黒鉛電極部とを備え、超高温加熱炉の炉壁を貫通して固設されたスリーブ内に前記黒鉛電極部がセラミックス絶縁体を径方向に介して配置され、前記黒鉛電極部が前記炉壁の内側に配置されているカーボンヒータに接続された、超高温加熱炉の電極装置であって、前記スリーブ内において、前記セラミックス絶縁体と前記スリーブの開口との間に黒鉛電極部の外周面から突き出す突起を、備えている。これにより、炉内からスリーブ内へ入射する輻射線が、黒鉛電極部の外周面から突き出す突起によって遮られるので、黒鉛電極部を電気的絶縁状態で支持するセラミックス絶縁体の溶損が好適に抑制される。また、特に電極装置が外殻の天井や扉に設けられる場合において、前記セラミックス絶縁体が前記突起に干渉して前記スリーブ内から脱落することが好適に抑制される。 That is, according to the electrode device for an ultrahigh temperature heating furnace of the first invention, the metal electrode portion and the graphite electrode portion connected to the metal electrode portion are provided, and are fixedly installed through the furnace wall of the ultrahigh temperature heating furnace. an electrode device for an ultra-high temperature heating furnace, wherein the graphite electrode portion is arranged in a sleeve with a ceramic insulator interposed in the radial direction, and the graphite electrode portion is connected to a carbon heater arranged inside the furnace wall. A projection protruding from the outer peripheral surface of the graphite electrode portion is provided between the ceramic insulator and the opening of the sleeve in the sleeve. As a result, the projections protruding from the outer peripheral surface of the graphite electrode block the radiation entering the sleeve from the furnace, so that the ceramic insulator that supports the graphite electrode in an electrically insulated state is preferably prevented from being damaged by melting. be done. Moreover, especially when the electrode device is provided on the ceiling or the door of the outer shell, it is possible to preferably prevent the ceramic insulator from interfering with the protrusion and falling out of the sleeve.

第２発明の超高温加熱炉の電極装置によれば、前記超高温加熱炉は、６面の炉壁で囲まれた炉室を有し、前記カーボンヒータは、前記６面の炉壁の内側にそれぞれ配置されていることから、超高温の炉室内からの高いエネルギの輻射線が円管状のスリーブ内へ入射しても、黒鉛電極部の外周面から突き出す突起によって、黒鉛電極部を電気的絶縁状態で支持するセラミックス絶縁体の溶損を抑制することができる。 According to the electrode device for the ultra-high temperature heating furnace of the second invention, the ultra-high temperature heating furnace has a furnace chamber surrounded by six furnace walls, and the carbon heater is located inside the six furnace walls. Therefore, even if high-energy radiation from the ultra-high temperature furnace chamber enters the cylindrical sleeve, the projections protruding from the outer peripheral surface of the graphite electrode section electrically connect the graphite electrode section. It is possible to suppress melting damage of the ceramic insulator that is supported in an insulated state.

第３発明の超高温加熱炉の電極装置によれば、前記スリーブ内において、前記セラミックス絶縁体と突起との間に、前記セラミックス絶縁体よりも高融点を有するセラミックス遮蔽物が、配置されているので、円管状のスリーブ内において黒鉛電極部を電気的絶縁状態で支持するセラミックス絶縁体の溶損を抑制することができる。 According to the electrode device for the ultra-high temperature heating furnace of the third invention, a ceramic shield having a melting point higher than that of the ceramic insulator is arranged between the ceramic insulator and the projection in the sleeve. Therefore, it is possible to suppress melting damage of the ceramic insulator that supports the graphite electrode portion in an electrically insulating state within the cylindrical sleeve.

第４発明の超高温加熱炉の電極装置によれば、前記セラミックス絶縁体は、アルミナ磁器であり、前記セラミックス遮蔽物は、窒化アルミニウム、炭化珪素、ジルコニア、窒化ホウ素のうちのいずれかの材料から製造されたものである。セラミックス絶縁体は、アルミナ磁器よりも高融点の窒化アルミニウム、炭化珪素、ジルコニア、窒化ホウ素から構成されるので、円管状のスリーブ内において黒鉛電極部を支持するセラミックス絶縁体の溶損を抑制することができる。 According to the electrode device for an ultrahigh-temperature heating furnace of the fourth invention, the ceramic insulator is alumina porcelain, and the ceramic shield is made of any one of aluminum nitride, silicon carbide, zirconia, and boron nitride. It is manufactured. Since the ceramic insulator is composed of aluminum nitride, silicon carbide, zirconia, and boron nitride, which have a higher melting point than alumina porcelain, the ceramic insulator supporting the graphite electrode portion in the cylindrical sleeve is prevented from being damaged by melting. can be done.

本発明の一実施例の超高温加熱炉の一例を、一部を切り欠いて示す正面図である。BRIEF DESCRIPTION OF THE DRAWINGS It is a front view which notches and shows an example of the ultra-high-temperature heating furnace of one Example of this invention. 図１の超高温加熱炉の平面断面図であって、図１のＩＩ－ＩＩ視断面図である。FIG. 2 is a plan cross-sectional view of the ultra-high temperature heating furnace of FIG. 1, and is a cross-sectional view taken along the line II-II of FIG. 1; 図１の超高温加熱炉の縦断面図であって、図１のＩＩＩ－ＩＩＩ視断面図である。FIG. 2 is a vertical cross-sectional view of the ultra-high temperature heating furnace of FIG. 1, and is a cross-sectional view taken along line III-III of FIG. 1; 図１の超高温加熱炉に備えられている電極を拡大して説明する断面図である。FIG. 2 is a cross-sectional view explaining an enlarged electrode provided in the ultra-high temperature heating furnace of FIG. 1 ; 図４の電極装置の要部を拡大して示す図である。FIG. 5 is an enlarged view of a main part of the electrode device of FIG. 4; 本発明の他の実施例の電極装置の要部を拡大して示す図であって、図５に相当する図である。FIG. 6 is a view corresponding to FIG. 5 and showing an enlarged main part of an electrode device according to another embodiment of the present invention;

以下、本発明の一実施例を図面を参照して詳細に説明する。 An embodiment of the present invention will now be described in detail with reference to the drawings.

図１は、本発明の一実施例の超高温加熱炉（以下、加熱炉という）１０を、一部を切り欠いて示す正面図である。図２は、加熱炉１０の平面断面図を示し、図３は、加熱炉１０の縦断面図を示している。加熱炉１０は、基台１１上に固設された箱型の外殻１２と、外殻１２の内側に設けられた角筒型断熱ユニット１４および平型断熱ユニット１６と、外殻１２と角筒型断熱ユニット１４または平型断熱ユニット１６とを貫通する複数個の電極装置１８の先端部に支持されることにより、角筒型断熱ユニット１４および平型断熱ユニット１６の内側において箱型の外殻１２の６面に沿ってそれぞれ設けられたカーボンヒータ２０と、カーボンヒータ２０のそれぞれの内側において図示しない被処理物を６面加熱状態で載置するために外殻１２に着脱可能に固定された載置台２１とを備えている。 FIG. 1 is a partially cutaway front view of an ultra-high temperature heating furnace (hereinafter referred to as a heating furnace) 10 according to one embodiment of the present invention. 2 shows a plan sectional view of the heating furnace 10, and FIG. 3 shows a longitudinal sectional view of the heating furnace 10. As shown in FIG. The heating furnace 10 includes a box-shaped outer shell 12 fixed on a base 11, a rectangular tube-shaped heat insulating unit 14 and a flat heat insulating unit 16 provided inside the outer shell 12, and an outer shell 12 and a corner unit. By being supported by the distal end portions of the plurality of electrode devices 18 penetrating the cylindrical heat insulating unit 14 or the flat heat insulating unit 16, a box-shaped outer wall is formed inside the rectangular cylindrical heat insulating unit 14 and the flat heat insulating unit 16. Carbon heaters 20 respectively provided along the six surfaces of the shell 12, and detachably fixed to the outer shell 12 for placing an object to be processed (not shown) inside each of the carbon heaters 20 while the six surfaces are heated. and a mounting table 21 that is mounted on the substrate.

箱型の外殻１２は、その６面のうちの水平方向に対向する２面を除く４面に対応した角筒型の外殻本体２２と、上記水平方向に対向する２面に対応する外殻本体２２の正面側開口２４および裏面側開口２６をそれぞれ気密に閉じる一対の正面側外殻板２８および裏面側外殻板３０とを、備えている。正面側外殻板２８の周縁部は、複数個のアクチュエータ付締結装置３２によって着脱可能すなわち開閉可能に外殻本体２２の正面側開口２４に締結され、裏面側外殻板３０の周縁部は、複数個のハンドル付締結装置３４によって着脱可能すなわち開閉可能に外殻本体２２の裏面側開口２６に締結されている。なお、一対の正面側外殻板２８および裏面側外殻板３０の一方のみが開閉可能に外殻本体２２に締結され、他方は外殻本体２２に固定されていてもよい。 The box-shaped outer shell 12 has a square cylindrical outer shell body 22 corresponding to four of its six faces except two faces facing in the horizontal direction, and an outer shell corresponding to the two faces facing in the horizontal direction. A pair of front side outer shell plate 28 and back side outer shell plate 30 are provided to airtightly close the front side opening 24 and the back side opening 26 of the shell body 22, respectively. The peripheral portion of the front side outer shell plate 28 is detachably fastened to the front side opening 24 of the outer shell body 22 by a plurality of fastening devices 32 with actuators, that is, can be opened and closed. It is fastened to the rear side opening 26 of the outer shell body 22 by means of fastening devices 34 with a plurality of handles so as to be detachable, that is, openable and closable. Note that only one of the pair of front side shell plate 28 and back side shell plate 30 may be fastened to the shell body 22 so as to be openable and closable, and the other may be fixed to the shell body 22 .

外殻本体２２と一対の正面側外殻板２８および裏面側外殻板３０とは、複数の補強リブ板３６を有する外板３８と、外板３８との間に冷媒を通る間隙Ｄを隔てて外板３８に液密に固定された内板４０とを、それぞれ備えている。外殻本体２２と正面側外殻板２８および裏面側外殻板３０とは、それぞれ耐熱鋼板たとえばステンレス鋼板製であって、外殻１２の温度上昇を抑制し、角筒型断熱ユニット１４および平型断熱ユニット１６を冷却するための液冷ジャケットとしても機能している。正面側外殻板２８は、被処理物を出し入れするときに開閉される扉として機能し、裏面側外殻板３０は、複数枚のカーボン繊維製のフェルト４６、および、一対の外側挟持板４８および内側挟持板５０等の断熱部材を交換する作業を行なうときに開閉される扉として機能する。 The outer shell body 22 and a pair of the front side outer shell plate 28 and the back side outer shell plate 30 are separated from each other by an outer plate 38 having a plurality of reinforcing rib plates 36 and a gap D between which the refrigerant passes. and an inner plate 40 secured to the outer plate 38 in a liquid-tight manner. The outer shell body 22, the front outer shell plate 28, and the back outer shell plate 30 are each made of a heat-resistant steel plate, such as a stainless steel plate. It also functions as a liquid cooling jacket for cooling the mold insulation unit 16 . The front side outer shell plate 28 functions as a door that is opened and closed when the object to be processed is put in and taken out, and the back side outer shell plate 30 includes a plurality of carbon fiber felts 46 and a pair of outer holding plates 48. And it functions as a door that is opened and closed when the work of replacing the heat insulating member such as the inner clamping plate 50 is performed.

角筒型断熱ユニット１４は、外殻１２の６面のうちの前記相対向する２面を除く４面に対応する外殻本体２２内に位置し、複数の電極装置１８により外殻本体２２着脱可能に設けられた、耐熱鋼製たとえばステンレス鋼製の内枠材４２と、外殻１２の４面の内壁面すなわち外殻本体２２の４面に対向するように内枠材４２に固定された複数個の断熱パネル４４とを、一体的に有し、外殻本体２２内に載置されている。本実施例では、外殻１２および断熱パネル４４が、加熱炉１０の６面の炉壁を構成し、６面の炉壁の内側にはカーボンヒータ２０が設けられ、加熱炉１０内には、その６面の炉壁に囲まれた炉室が形成されている。炉室内において、カーボンヒータ２０により囲まれた空間が、超高温とされるようになっている。 The prismatic heat-insulating unit 14 is positioned inside the outer shell body 22 corresponding to four of the six faces of the outer shell 12 except for the two opposing faces. An inner frame member 42 made of heat-resistant steel, such as stainless steel, which can be provided, is fixed to the inner frame member 42 so as to face the four inner wall surfaces of the outer shell 12, that is, the four surfaces of the outer shell main body 22. A plurality of heat insulating panels 44 are integrally mounted within the outer shell body 22 . In this embodiment, the outer shell 12 and the heat insulation panel 44 constitute six furnace walls of the heating furnace 10, and a carbon heater 20 is provided inside the six furnace walls. A furnace chamber surrounded by the six furnace walls is formed. In the furnace chamber, the space surrounded by the carbon heater 20 is made to be extremely high temperature.

断熱パネル４４は、所定厚みに積層された複数枚のカーボン繊維製のフェルト４６が、一対の外側挟持板４８および内側挟持板５０の積層体によりカーボン繊維製のフェルト４６の厚み方向に挟持されたものであり、それらを貫通耐熱ボルト５２によって内枠材４２に着脱可能に固定されている。本実施例では、それら複数枚のカーボン繊維製のフェルト４６、および、一対の外側挟持板４８および内側挟持板５０が、断熱部材として機能している。 The heat insulating panel 44 is formed by stacking a plurality of carbon fiber felts 46 with a predetermined thickness and sandwiching them in the thickness direction of the carbon fiber felts 46 by a laminate of a pair of outer sandwiching plates 48 and inner sandwiching plates 50 . They are detachably fixed to the inner frame member 42 by through heat-resistant bolts 52 . In this embodiment, the plurality of carbon fiber felts 46 and the pair of outer holding plate 48 and inner holding plate 50 function as heat insulating members.

図４は、外殻１２に固定されてカーボンヒータ２０を支持する電極装置１８を示している。電極装置１８は、炉壁を構成する外殻本体２２、および正面側外殻板２８または裏面側外殻板３０と断熱パネル４４とにそれぞれ貫通した状態で設けられているが、相互に同様に構成されているので、図９では外殻本体２２に設けられた例を代表して示している。図９において、外殻本体２２には、電極装置１８を通すための円管部材６２が外殻本体２２を貫通した状態で外殻本体２２に溶接によって液密に設けられており、断熱パネル４４には、黒鉛製円管状のスリーブ６４が断熱パネル４４を貫通した状態で固設されている。 FIG. 4 shows an electrode assembly 18 fixed to the shell 12 to support the carbon heater 20 . The electrode device 18 is provided so as to pass through the outer shell body 22 constituting the furnace wall, the front side outer shell plate 28 or the back side outer shell plate 30, and the heat insulating panel 44, respectively. Therefore, FIG. 9 shows an example provided on the outer shell main body 22 as a representative. In FIG. 9, the outer shell body 22 is liquid-tightly welded to the outer shell body 22 with a cylindrical member 62 through which the electrode device 18 is passed. , a tubular sleeve 64 made of graphite is fixed in a state of penetrating the heat insulating panel 44 .

電極装置１８は、短円柱状の金属電極部６６と、金属電極部６６に同心状態で連ねて固定された円柱状の黒鉛電極部６８とを、備えている。金属電極部６６には、外側端面に開口する止まり穴７０が形成されており、止まり穴７０には、止まり穴７０内に冷却水を循環させる配管７２が接続されている。金属電極部６６は、熱良導体である銅、銅合金、アルミニウム合金等の金属導電体から構成されており、加熱炉１０の稼働時には水等の冷媒により常時冷却される水冷電極部である。 The electrode device 18 includes a short cylindrical metal electrode portion 66 and a cylindrical graphite electrode portion 68 concentrically connected to and fixed to the metal electrode portion 66 . A blind hole 70 opening to the outer end face is formed in the metal electrode portion 66 , and a pipe 72 for circulating cooling water in the blind hole 70 is connected to the blind hole 70 . The metal electrode portion 66 is made of a metal conductor such as copper, a copper alloy, an aluminum alloy, etc., which is a good thermal conductor, and is a water-cooled electrode portion that is constantly cooled by a coolant such as water when the heating furnace 10 is in operation.

外殻本体２２の外側には、電極装置１８を固定するための所定厚みの座板７４が溶接によって固定されており、金属電極部６６から外周側に一体的に突き出した取付フランジ７６が絶縁シート７８を介して締結ねじ７９によって座板７４に締結されることにより、電極装置１８が円管部材６２を貫通した状態で外殻本体２２に固定されている。円管部材６２の内周面と金属電極部６６の外周面との間には、円管部材６２よりも小径の第１円管状碍子８０が径方向に介在させられており、円管部材６２と金属電極部６６との間の電気的な絶縁が維持されている。 A seat plate 74 having a predetermined thickness for fixing the electrode device 18 is fixed to the outside of the outer shell body 22 by welding. The electrode device 18 is fixed to the outer shell main body 22 while passing through the circular tube member 62 by being fastened to the seat plate 74 by fastening screws 79 via 78 . Between the inner peripheral surface of the circular tubular member 62 and the outer peripheral surface of the metal electrode portion 66, a first tubular insulator 80 having a diameter smaller than that of the tubular member 62 is interposed in the radial direction. and the metal electrode portion 66 are maintained electrically insulated.

金属電極部６６に同心状態で連ねて固定された円柱状の黒鉛電極部６８は、好適には、金属電極部６６よりも大径で、第１円管状碍子８０の外径と略同径である。黒鉛電極部６８の外側端部には、黒鉛電極部６８の外周面とスリーブ６４の内周面との間で径方向に介在する状態で、第１円管状碍子８０の端部と重なる第２円管状碍子８２が嵌め着けられて、黒鉛電極部６８の電気的な絶縁が維持されている。第２円管状碍子８２は、その外側端部を除いて黒鉛製円管状のスリーブ６４内に嵌め入れられ、黒鉛電極部６８の外周面とスリーブ６４の内周面との間においてセラミックス絶縁体として機能している。これにより、黒鉛電極部６８の外側端部が、第２円筒状碍子８２によって被覆されている。また、黒鉛製円管状のスリーブ６４とその内側に挿入されている円柱状の黒鉛電極部６８との間に、所定の隙間Ｐが形成されている。第１円管状碍子８０および第２円管状碍子８２は、それぞれセラミック絶縁体であり、好適にはアルミナ磁器製である。 The cylindrical graphite electrode portion 68 concentrically fixed to the metal electrode portion 66 preferably has a diameter larger than that of the metal electrode portion 66 and substantially the same diameter as the outer diameter of the first cylindrical insulator 80 . be. At the outer end portion of the graphite electrode portion 68 , a second electrode portion overlaps the end portion of the first tubular insulator 80 while being radially interposed between the outer peripheral surface of the graphite electrode portion 68 and the inner peripheral surface of the sleeve 64 . A cylindrical insulator 82 is fitted to maintain electrical insulation of the graphite electrode portion 68 . The second tubular insulator 82 is fitted into the graphite tubular sleeve 64 except for its outer end, and functions as a ceramic insulator between the outer peripheral surface of the graphite electrode portion 68 and the inner peripheral surface of the sleeve 64. It is functioning. Thereby, the outer end of the graphite electrode portion 68 is covered with the second cylindrical insulator 82 . A predetermined gap P is formed between the cylindrical sleeve 64 made of graphite and the cylindrical graphite electrode portion 68 inserted therein. The first tubular insulator 80 and the second tubular insulator 82 are each ceramic insulators, preferably made of alumina porcelain.

図５に拡大して示すように、黒鉛製円管状のスリーブ６４内において第２円管状碍子８２とスリーブ６４の内側開口との間には、第２円管状碍子８２とスリーブ６４の内側開口との間の黒鉛電極部６８の外周面には、セラミックス遮蔽物８４とスリーブ６４の開口との間に環状の突起８５が、径方向外側へ突き出した状態で形成されている。この突起８５は、カーボンヒータ２０や炉内からスリーブ６４内へ入射する輻射線を遮蔽して第２円管状碍子８２を保護するために、第２円管状碍子８２の径方向高さと同様の高さ寸法を有しているが、必ずしも円管状碍子８２の径方向高さと同様の高さ寸法を有していなくてもよい。また、突起８５は、周方向において連続して突き出した環状突起であることが望ましいが、第２円管状碍子８２への輻射線の遮蔽に寄与する形状であれば、第２円管状碍子８２の径方向高さよりも低くてもよいし、周方向の一部が切り欠かかれていてもよい。 As shown in an enlarged view in FIG. 5 , in the graphite cylindrical sleeve 64 , between the second cylindrical insulator 82 and the inner opening of the sleeve 64 , the second cylindrical insulator 82 and the inner opening of the sleeve 64 are arranged. An annular protrusion 85 is formed on the outer peripheral surface of the graphite electrode portion 68 between the ceramic shield 84 and the opening of the sleeve 64 so as to protrude radially outward. The projection 85 has a height similar to the radial height of the second tubular insulator 82 in order to shield the second tubular insulator 82 from radiation entering the sleeve 64 from the carbon heater 20 or the furnace. Although it has a height dimension, it does not necessarily have the same height dimension as the radial height of the cylindrical insulator 82 . The protrusion 85 is preferably an annular protrusion that continuously protrudes in the circumferential direction. It may be lower than the radial height, or may be partially cut away in the circumferential direction.

図４に戻って、黒鉛電極部６８の内側端部が、カーボンヒータ２０の端部が連結されたブロック９０に着脱可能に連結されることで、電極装置１８がカーボンヒータ２０を支持した状態でカーボンヒータ２０に接続されている。カーボンヒータ２０は、電極装置１８から低電圧且つ高電流の電力が供給されることにより、２０００℃～３０００℃の超高温領域で発熱させられる。 Returning to FIG. 4, the inner end portion of the graphite electrode portion 68 is detachably connected to the block 90 to which the end portion of the carbon heater 20 is connected, so that the electrode device 18 supports the carbon heater 20. It is connected to the carbon heater 20 . The carbon heater 20 is supplied with low-voltage, high-current power from the electrode device 18 to generate heat in a very high temperature range of 2000.degree. C. to 3000.degree.

加熱炉１０では、載置台２１上の被処理物に対して、非酸化性雰囲気たとえば窒素やアルゴン等の不活性ガス雰囲気下において２０００℃～３０００℃の超高温領域、好ましくは２５００℃～３０００℃の超高温領域で黒鉛化処理が繰り替えされると、カーボン繊維製のフェルト４６、断熱ボード５４、黒鉛板５６などの断熱部材が消耗するので、所定の周期で、角筒型断熱ユニット１４および平型断熱ユニット１６の交換が行なわれる。このとき、載置台２１、カーボンヒータ２０、電極装置１８、図示しない温度センサ等を取り外すことで、断熱部材が消耗した角筒型断熱ユニット１４および平型断熱ユニット１６を容易に取り外すことができ、且つ新たな角筒型断熱ユニット１４および平型断熱ユニット１６を位置決めして電極装置１８、カーボンヒータ２０等を装着することで、位置決めされ且つ固定される。 In the heating furnace 10, the object to be processed on the mounting table 21 is heated to an ultra-high temperature range of 2000° C. to 3000° C., preferably 2500° C. to 3000° C., in a non-oxidizing atmosphere such as an inert gas atmosphere such as nitrogen or argon. If the graphitization process is repeated in the ultra-high temperature region of , the heat insulating members such as the carbon fiber felt 46, the heat insulating board 54, and the graphite plate 56 will wear out. The mold insulation unit 16 is replaced. At this time, by removing the mounting table 21, the carbon heater 20, the electrode device 18, the temperature sensor (not shown), etc., it is possible to easily remove the rectangular tubular heat insulating unit 14 and the flat heat insulating unit 16 whose heat insulating members have worn out. By positioning the new prismatic heat insulating unit 14 and the flat heat insulating unit 16 and attaching the electrode device 18, the carbon heater 20, etc., they are positioned and fixed.

以上のように構成された加熱炉１０では、載置台２１上の被処理物に対して、非酸化性雰囲気下たとえば窒素やアルゴン等の不活性ガス雰囲気下において２０００℃～３０００℃の超高温領域、たとえば２５００℃～３０００℃の超高温領域で黒鉛化処理が行なわれる場合には、炉内のカーボンヒータ２０等から高エネルギの輻射線が発生し、スリーブ６４の内側開口内へ入り込む。このとき、黒鉛電極部８８の外周面から突き出した突起８５が、アルミナ磁器製の第２円管状碍子８２を高エネルギの輻射線から遮蔽するので、第２円管状碍子８２が高エネルギの輻射線を受けることが回避され、第２円管状碍子８２の溶損が抑制される。 In the heating furnace 10 configured as described above, the object to be processed on the mounting table 21 is heated to an ultra-high temperature range of 2000° C. to 3000° C. in a non-oxidizing atmosphere such as an inert gas atmosphere such as nitrogen or argon. For example, when graphitization is performed in an ultra-high temperature range of 2500° C. to 3000° C., high-energy radiation is generated from the carbon heater 20 and the like in the furnace and enters the inner opening of the sleeve 64 . At this time, since the projections 85 protruding from the outer peripheral surface of the graphite electrode portion 88 shield the second cylindrical insulator 82 made of alumina porcelain from high-energy radiation, the second cylindrical insulator 82 is exposed to high-energy radiation. This prevents the second cylindrical insulator 82 from being subjected to the erosion, thereby suppressing the erosion of the second cylindrical insulator 82 .

上述のように、本実施例の加熱炉１０の電極装置１８によれば、スリーブ６４内において、セラミックス絶縁体であるアルミナ磁器製の第２円管状碍子８２とスリーブ６４の開口との間に、黒鉛電極部８８の外周面から突き出した突起８５が設けられ、第２円管状碍子８２がスリーブ６４内に入射する輻射線から遮蔽される。これにより、円管状のスリーブ６４内において黒鉛電極部６８を支持する第２円管状碍子８２の溶損を抑制することができる。また、特に電極装置１８の配置姿勢によっては、第２円管状碍子８２のスリーブ６４からの脱落が突起８５により阻止される。特に電極装置１８が外殻１２の天井や、扉として機能する正面側外殻板２８に設けられる場合には、そのような効果が顕著となる。 As described above, according to the electrode device 18 of the heating furnace 10 of the present embodiment, in the sleeve 64, between the second cylindrical insulator 82 made of alumina porcelain, which is a ceramic insulator, and the opening of the sleeve 64, A protrusion 85 protruding from the outer peripheral surface of the graphite electrode portion 88 is provided to shield the second tubular insulator 82 from radiation incident on the sleeve 64 . As a result, the second cylindrical insulator 82 supporting the graphite electrode portion 68 inside the cylindrical sleeve 64 can be prevented from being eroded. Moreover, the protrusion 85 prevents the second cylindrical insulator 82 from falling off from the sleeve 64 depending on the arrangement posture of the electrode device 18 . Such an effect is particularly pronounced when the electrode device 18 is provided on the ceiling of the outer shell 12 or on the front outer shell plate 28 that functions as a door.

また、本実施例の加熱炉１０の電極装置１８によれば、超高温加熱炉１０は、６面の炉壁で囲まれた炉室を有し、カーボンヒータ２０は、６面の炉壁の内側にそれぞれ配置されていることから、超高温の炉室内からの高いエネルギの輻射線が円管状のスリーブ６４内へ入射しても、黒鉛電極部８８の外周面から突き出す突起８５によって、黒鉛電極部８８を電気的絶縁状態で支持する第２円環状碍子（セラミックス絶縁体）８２の溶損を抑制することができる。 Further, according to the electrode device 18 of the heating furnace 10 of the present embodiment, the ultra-high temperature heating furnace 10 has a furnace chamber surrounded by six furnace walls, and the carbon heater 20 has six furnace walls. Since they are arranged inside, even if high-energy radiation from the ultra-high-temperature furnace chamber enters the cylindrical sleeve 64, the projections 85 protruding from the outer peripheral surface of the graphite electrode portion 88 prevent the graphite electrode from Melting damage of the second annular insulator (ceramic insulator) 82 that supports the portion 88 in an electrically insulated state can be suppressed.

次に、本発明の他の実施例の電極装置１１８を説明する。なお、以下の説明において前述の実施例と共通する部分には同一の符号を付して説明を省略する。 An electrode device 118 according to another embodiment of the invention will now be described. In the following description, the same reference numerals are given to the parts common to the above-described embodiment, and the description thereof is omitted.

図６において、電極装置１１８は、電極装置１８に対して、第２円管状碍子８２と突起８５との間に、カーボンヒータ２０や炉内からの輻射線から第２円管状碍子８２を遮蔽する円環状のセラミックス遮蔽物８４が介在させられている点で相違し、他は同様に構成されている。 6, the electrode device 118 shields the second cylindrical insulator 82 from radiation from the carbon heater 20 and the inside of the furnace between the second cylindrical insulator 82 and the projection 85 with respect to the electrode device 18. The difference is that an annular ceramic shielding object 84 is interposed, and the other structures are the same.

電極装置１１８は、黒鉛製円管状のスリーブ６４内において第２円管状碍子８２と突起８５との間に、カーボンヒータ２０や炉内からの輻射線に対して第２円管状碍子８２を遮蔽する円環状のセラミックス遮蔽物８４を、備えている。セラミックス遮蔽物８４は、第２円管状碍子８２の融点よりも高い融点を有する物質、たとえば窒化アルミニウム、炭化珪素、ジルコニア、窒化ホウ素のうちのいずれかのセラミック材料から構成されている。 The electrode device 118 shields the second cylindrical insulator 82 from the radiation from the carbon heater 20 and the inside of the furnace, between the second cylindrical insulator 82 and the protrusion 85 in the graphite cylindrical sleeve 64. An annular ceramic shield 84 is provided. The ceramic shield 84 is made of a material having a melting point higher than that of the second cylindrical insulator 82, such as aluminum nitride, silicon carbide, zirconia, or boron nitride.

本実施例の加熱炉１０の電極装置１１８によれば、スリーブ６４内において、セラミックス絶縁体であるアルミナ磁器製の第２円管状碍子８２と突起８５との間に、第２円管状碍子８２を輻射線から遮蔽するセラミックス遮蔽物８４が、備えられているので、円管状のスリーブ６４内において黒鉛電極部６８を支持する第２円管状碍子８２の溶損が一層抑制される。 According to the electrode device 118 of the heating furnace 10 of the present embodiment, the second cylindrical insulator 82 is interposed between the second cylindrical insulator 82 made of alumina porcelain, which is a ceramic insulator, and the projection 85 in the sleeve 64. Since the ceramic shield 84 for shielding against radiation is provided, the second cylindrical insulator 82 supporting the graphite electrode portion 68 inside the cylindrical sleeve 64 is further suppressed from being eroded.

また、本実施例の加熱炉１０の電極装置１８によれば、セラミックス遮蔽物８４は、窒化アルミニウム、炭化珪素、ジルコニア、窒化ホウ素のうちのいずれかの材料から製造されたものである。それら窒化アルミニウム、炭化珪素、ジルコニア、窒化ホウ素は、アルミナ磁器製の第２円管状碍子８２よりも高融点であるので、円管状のスリーブ６４内において黒鉛電極部６８を支持する第２円管状碍子８２の溶損を抑制することができる。 Further, according to the electrode device 18 of the heating furnace 10 of this embodiment, the ceramic shield 84 is made of any one of aluminum nitride, silicon carbide, zirconia, and boron nitride. Aluminum nitride, silicon carbide, zirconia, and boron nitride have a higher melting point than the second cylindrical insulator 82 made of alumina porcelain. Erosion of 82 can be suppressed.

以上、本発明を図面に基づいて説明したが、本発明はその他の態様においても適用される。 Although the present invention has been described above with reference to the drawings, the present invention is also applicable to other aspects.

たとえば、前述の実施例において、スリーブ６４内において、円環状のセラミックス遮蔽物８４が、第２円管状碍子８２とスリーブ６４の開口との間に１個配置されていたが、複数個のセラミックス遮蔽物８４が配置されていてもよい。 For example, in the above-described embodiment, one annular ceramic shield 84 was arranged between the second cylindrical insulator 82 and the opening of the sleeve 64 in the sleeve 64. An object 84 may be placed.

また、前述の実施例において、円環状の突起８５あるいはセラミックス遮蔽物８４は、第２円管状碍子８２に隣接した位置に配設されていたが、必ずしも隣接した位置でなく、スリーブ６４内であれば、第２円管状碍子８２から離隔した位置であってもよい。 In the above-described embodiment, the annular protrusion 85 or the ceramic shield 84 was disposed adjacent to the second cylindrical insulator 82, but it is not necessarily adjacent to the insulator 82, and may be within the sleeve 64. For example, it may be located away from the second tubular insulator 82 .

また、前述の実施例において、金属電極部６６と金属電極部６６に接続された黒鉛電極部６８とが直接接続されていたが、たとえばモリブデン等の高融点金属製の接続部材を介して間接的に接続されていてもよい。 In addition, in the above-described embodiment, the metal electrode portion 66 and the graphite electrode portion 68 connected to the metal electrode portion 66 are directly connected. may be connected to

また、前述の実施例において、突起８５の高さは、第２円管状碍子８２と同程度の高さであったが、第２円管状碍子８２の高さより低くてもよい。この場合でも、突起８５が、輻射線を遮蔽する機能を持つ。 Moreover, although the height of the projection 85 is approximately the same as the height of the second tubular insulator 82 in the above-described embodiment, it may be lower than the height of the second tubular insulator 82 . Even in this case, the protrusion 85 has the function of shielding radiation.

また、前述の実施例において、突起８５は、黒鉛電極部６８の外周面のうちの第２円管状碍子８２又はセラミックス遮蔽物８４に隣接した位置から突設されていたが、セラミックス遮蔽物８４とスリーブ６４の開口との間の位置に突設されていてもよい。 In the above-described embodiment, the protrusion 85 protrudes from the outer peripheral surface of the graphite electrode portion 68 at a position adjacent to the second cylindrical insulator 82 or the ceramic shield 84 . It may protrude at a position between the opening of the sleeve 64 .

また、前述の実施例の電極装置１８は、単独炉形式の超高温加熱炉１０の炉室を囲む炉壁に備えられていたが、たとえば連続炉形式の超高温加熱炉やシャトル炉形式の超高温加熱炉の炉壁に備えられていてもよい。 Further, the electrode device 18 of the above embodiment is provided on the furnace wall surrounding the furnace chamber of the single furnace type ultrahigh temperature heating furnace 10, but for example, the continuous furnace type ultrahigh temperature heating furnace and the shuttle furnace type It may be provided on the furnace wall of the high-temperature heating furnace.

その他、一々例示はしないが、本発明はその趣旨を逸脱しない範囲内において種々の変更が加えられて実施されるものである。 In addition, although not exemplified one by one, the present invention can be implemented with various modifications within the scope of the invention.

１０：超高温加熱炉
１８、１１８：電極装置
６４：スリーブ
６４ａ：スリーブの開口
６６：金属電極部
６８：黒鉛電極部
８２：第２アルミナ碍子（セラミックス絶縁体）
８４：セラミックス遮蔽物
８５：突起 10: Ultra-high temperature heating furnace 18, 118: Electrode device 64: Sleeve 64a: Sleeve opening 66: Metal electrode portion 68: Graphite electrode portion 82: Second alumina insulator (ceramic insulator)
84: Ceramic shield 85: Protrusion

すなわち、第１発明の要旨とするところは、（ａ）金属電極部と前記金属電極部に連ねて接続された黒鉛電極部とを備え、超高温加熱炉の炉壁を構成する水冷式の外殻および断熱パネルをそれぞれ貫通して固設された円筒部材及びリーブ内に前記黒鉛電極部の外側端部がセラミックス絶縁体を径方向に介して配置され、前記黒鉛電極部の内側端部が前記炉壁の内側に配置されているカーボンヒータに接続された、超高温加熱炉の電極装置であって、（ｂ）前記スリーブ内において、前記セラミックス絶縁体と前記スリーブの開口との間に黒鉛電極部の外周面から突き出す突起を、備え、（ｃ）前記金属電極部は、前記炉壁に固定され、（ｄ）前記金属電極部には、冷却水を循環させる配管が接続された止まり穴が形成されていることにある。 That is, the gist of the first invention is (a) a water-cooled outer wall of an ultrahigh-temperature heating furnace comprising a metal electrode portion and a graphite electrode portion connected in series with the metal electrode portion; The outer end of the graphite electrode portion is arranged in a cylindrical member and rib fixed through the shell and the heat insulating panel, respectively , with the ceramic insulator interposed in the radial direction. An electrode assembly for an ultra-high temperature furnace connected to a carbon heater located inside a furnace wall, comprising: (b) a graphite electrode within said sleeve between said ceramic insulator and said opening in said sleeve; (c) the metal electrode portion is fixed to the furnace wall; and (d) the metal electrode portion has a blind hole connected to a pipe for circulating cooling water. It is in being formed .

すなわち、第１発明の超高温加熱炉の電極装置によれば、金属電極部と前記金属電極部に連ねて接続された黒鉛電極部とを備え、超高温加熱炉の炉壁を構成する水冷式の外殻および断熱パネルをそれぞれ貫通して固設された円筒部材及びスリーブ内に前記黒鉛電極部の外側端部がセラミックス絶縁体を径方向に介して配置され、前記黒鉛電極部の内側端部が前記炉壁の内側に配置されているカーボンヒータに接続された、超高温加熱炉の電極装置であって、前記スリーブ内において、前記セラミックス絶縁体と前記スリーブの開口との間に黒鉛電極部の外周面から突き出す突起を、備え、前記金属電極部は、前記炉壁に固定され、前記金属電極部には、冷却水を循環させる配管が接続された止まり穴が形成されている。これにより、炉内からスリーブ内へ入射する輻射線が、黒鉛電極部の外周面から突き出す突起によって遮られるので、黒鉛電極部を電気的絶縁状態で支持するセラミックス絶縁体の溶損が好適に抑制される。また、特に電極装置が外殻の天井や扉に設けられる場合において、前記セラミックス絶縁体が前記突起に干渉して前記スリーブ内から脱落することが好適に抑制される。 That is, according to the electrode device for an ultrahigh-temperature heating furnace of the first invention, the water-cooled type is provided with a metal electrode portion and a graphite electrode portion connected in series with the metal electrode portion, and constitutes the furnace wall of the ultrahigh-temperature heating furnace. The outer end portion of the graphite electrode portion is arranged in a cylindrical member and a sleeve which are fixed through the outer shell and the heat insulating panel, respectively, with the ceramic insulator interposed in the radial direction, and the inner end portion of the graphite electrode portion is connected to a carbon heater disposed inside the furnace wall, wherein a graphite electrode portion is provided in the sleeve between the ceramic insulator and the opening of the sleeve The metal electrode portion is fixed to the furnace wall, and the metal electrode portion is formed with a blind hole to which a pipe for circulating cooling water is connected. As a result, the projections protruding from the outer peripheral surface of the graphite electrode block the radiation entering the sleeve from the furnace, so that the ceramic insulator that supports the graphite electrode in an electrically insulated state is preferably prevented from being damaged by melting. be done. Moreover, especially when the electrode device is provided on the ceiling or the door of the outer shell, it is possible to preferably prevent the ceramic insulator from interfering with the protrusion and falling out of the sleeve.

すなわち、第１発明の要旨とするところは、（ａ）金属電極部と前記金属電極部に連ねて接続された黒鉛電極部とを備え、超高温加熱炉の炉壁を構成する水冷式の外殻および断熱パネルをそれぞれ貫通して固設された円筒部材及びリーブ内に前記黒鉛電極部の外側端部がセラミックス絶縁体を径方向に介して配置され、前記黒鉛電極部の内側端部が前記炉壁の内側に前記炉壁の内壁面と平行に配置されている長手状の一対のカーボンヒータに接続された、超高温領域で黒鉛化処理を行なう超高温加熱炉の電極装置であって、（ｂ）前記スリーブ内において、前記セラミックス絶縁体と前記スリーブの開口との間に黒鉛電極部の外周面から突き出す突起を、備え、（ｃ）前記金属電極部は、前記炉壁に固定され、（ｄ）前記金属電極部には、冷却水を循環させる配管が接続された止まり穴が形成され、（ｅ）前記黒鉛電極部の内側端部は、前記炉壁の内側において、前記炉壁の内壁面と平行な長手状のブロックを介して前記一対のカーボンヒータの端部と接続され、（ｆ）前記長手状のブロックは、前記黒鉛電極部の径よりも大きい幅寸法を有し、（ｇ）前記長手状のブロックの長手方向の中央部に前記黒鉛電極部の内側端部が接続され、前記長手状のブロックの長手方向の両端部に前記一対のカーボンヒータの端部がそれぞれ接続されていることにある。 That is, the gist of the first invention is (a) a water-cooled outer wall of an ultrahigh-temperature heating furnace comprising a metal electrode portion and a graphite electrode portion connected in series with the metal electrode portion; The outer end of the graphite electrode portion is arranged in a cylindrical member and rib fixed through the shell and the heat insulating panel, respectively, with the ceramic insulator interposed in the radial direction. An electrode device of an ultra-high temperature heating furnace for graphitization in an ultra-high temperature region , connected to a pair of longitudinal carbon heaters arranged inside the furnace wall parallel to the inner wall surface of the furnace wall, (b) a projection protruding from the outer peripheral surface of the graphite electrode section between the ceramic insulator and the opening of the sleeve within the sleeve; (c) the metal electrode section is fixed to the furnace wall; (d) the metal electrode portion is formed with a blind hole connected to a pipe for circulating cooling water; It is connected to the ends of the pair of carbon heaters via a longitudinal block parallel to the inner wall surface, (f) the longitudinal block has a width dimension larger than the diameter of the graphite electrode part, ( g) The inner ends of the graphite electrodes are connected to the central portion of the longitudinal block in the longitudinal direction, and the ends of the pair of carbon heaters are connected to both ends of the longitudinal block in the longitudinal direction. There is

第１発明の超高温加熱炉の電極装置によれば、金属電極部と前記金属電極部に連ねて接続された黒鉛電極部とを備え、超高温加熱炉の炉壁を構成する水冷式の外殻および断熱パネルをそれぞれ貫通して固設された円筒部材及びスリーブ内に前記黒鉛電極部の外側端部がセラミックス絶縁体を径方向に介して配置され、前記黒鉛電極部の内側端部が前記炉壁の内側に配置されているカーボンヒータに接続された、超高温加熱炉の電極装置であって、前記スリーブ内において、前記セラミックス絶縁体と前記スリーブの開口との間に黒鉛電極部の外周面から突き出す突起を、備え、前記金属電極部は、前記炉壁に固定され、前記金属電極部には、冷却水を循環させる配管が接続された止まり穴が形成され、前記黒鉛電極部の内側端部は、前記炉壁の内側において、前記炉壁の内壁面と平行な長手状のブロックを介して前記一対のカーボンヒータの端部と接続され、前記長手状のブロックは、前記黒鉛電極部の径よりも大きい幅寸法を有し、前記長手状のブロックの長手方向の中央部に前記黒鉛電極部の内側端部が接続され、前記長手状のブロックの長手方向の両端部に前記一対のカーボンヒータの端部がそれぞれ接続されている。これにより、炉内からスリーブ内へ入射する輻射線が、黒鉛電極部の外周面から突き出す突起によって遮られるので、黒鉛電極部を電気的絶縁状態で支持するセラミックス絶縁体の溶損が好適に抑制される。また、特に電極装置が外殻の天井や扉に設けられる場合において、前記セラミックス絶縁体が前記突起に干渉して前記スリーブ内から脱落することが好適に抑制される。 According to the electrode device for an ultrahigh-temperature heating furnace of the first invention, the water-cooled outer wall of the ultrahigh-temperature heating furnace is provided with a metal electrode portion and a graphite electrode portion connected in series with the metal electrode portion. The outer ends of the graphite electrodes are arranged in a cylindrical member and a sleeve fixed through the shell and the heat insulating panel, respectively, with ceramic insulators interposed in the radial direction. An electrode device for an ultrahigh-temperature heating furnace connected to a carbon heater arranged inside the furnace wall, wherein the outer periphery of a graphite electrode portion is positioned between the ceramic insulator and the opening of the sleeve within the sleeve. The metal electrode part is fixed to the furnace wall, the metal electrode part is formed with a blind hole connected to a pipe for circulating cooling water , and the inside of the graphite electrode part is provided with a protrusion protruding from the surface. The end portions are connected to the end portions of the pair of carbon heaters via longitudinal blocks parallel to the inner wall surface of the furnace wall inside the furnace wall, and the longitudinal blocks are connected to the graphite electrode portions. The inner end of the graphite electrode portion is connected to the central portion of the longitudinal block in the longitudinal direction, and the pair of electrodes are connected to the longitudinal ends of the longitudinal block. The ends of the carbon heater are connected respectively . As a result, the projections protruding from the outer peripheral surface of the graphite electrode block the radiation entering the sleeve from the furnace, so that the ceramic insulator that supports the graphite electrode in an electrically insulated state is preferably prevented from being damaged by melting. be done. Moreover, especially when the electrode device is provided on the ceiling or the door of the outer shell, it is possible to preferably prevent the ceramic insulator from interfering with the protrusion and falling out of the sleeve.

Claims (4)

金属電極部と前記金属電極部に接続された黒鉛電極部とを備え、超高温加熱炉の炉壁を貫通して固設されたスリーブ内に前記黒鉛電極部がセラミックス絶縁体を径方向に介して配置され、前記黒鉛電極部が前記超高温加熱の前記炉壁の内側に配置されているカーボンヒータに接続された、超高温加熱炉の電極装置であって、
前記スリーブ内において、前記セラミックス絶縁体と前記スリーブの開口との間に黒鉛電極部の外周面から突き出す突起を、備える
ことを特徴とする超高温加熱炉の電極装置。 Equipped with a metal electrode portion and a graphite electrode portion connected to the metal electrode portion, the graphite electrode portion extends radially through a ceramic insulator in a sleeve fixed through the furnace wall of the ultra-high temperature heating furnace. An electrode device for an ultrahigh-temperature heating furnace, wherein the graphite electrode portion is connected to a carbon heater disposed inside the furnace wall for ultrahigh-temperature heating,
An electrode device for an ultra-high temperature heating furnace, comprising: a projection protruding from an outer peripheral surface of a graphite electrode portion between the ceramic insulator and the opening of the sleeve in the sleeve. 第２発明の要旨とするところは、第１発明において、前記超高温加熱炉は、６面の炉壁で囲まれた炉室を有し、前記カーボンヒータは、前記６面の炉壁の内側にそれぞれ配置されている
ことを特徴とする請求項１の超高温加熱炉の電極装置。 The gist of the second invention is that in the first invention, the ultrahigh-temperature heating furnace has a furnace chamber surrounded by six furnace walls, and the carbon heater is located inside the six furnace walls. 2. The electrode device for an ultra-high temperature heating furnace according to claim 1, wherein the electrode device is arranged in each of the . 前記スリーブ内において、前記セラミックス絶縁体と突起との間に、前記セラミックス絶縁体よりも高融点を有するセラミックス遮蔽物が、配置されている
を特徴とする請求項１又は２の超高温加熱炉の電極装置。 3. The ultra-high temperature heating furnace according to claim 1, wherein a ceramic shield having a melting point higher than that of said ceramic insulator is arranged in said sleeve between said ceramic insulator and said projection. electrode device. 前記セラミックス絶縁体は、アルミナ磁器であり、
前記セラミックス遮蔽物は、窒化アルミニウム、炭化珪素、ジルコニア、窒化ホウ素のうちのいずれかの材料から製造されたものである
ことを特徴とする請求項３の超高温加熱炉の電極装置。
The ceramic insulator is alumina porcelain,
4. An electrode device for an ultrahigh temperature heating furnace according to claim 3, wherein said ceramic shield is made of any one of aluminum nitride, silicon carbide, zirconia and boron nitride.
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