JP2022529602A - Vig組立体用の特殊被覆ガラス - Google Patents
Vig組立体用の特殊被覆ガラス Download PDFInfo
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- JP2022529602A JP2022529602A JP2021559791A JP2021559791A JP2022529602A JP 2022529602 A JP2022529602 A JP 2022529602A JP 2021559791 A JP2021559791 A JP 2021559791A JP 2021559791 A JP2021559791 A JP 2021559791A JP 2022529602 A JP2022529602 A JP 2022529602A
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- Prior art keywords
- layer
- coated glass
- glass pane
- coating
- dielectric
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- 239000011521 glass Substances 0.000 title claims abstract description 241
- 238000000576 coating method Methods 0.000 claims abstract description 162
- 239000011248 coating agent Substances 0.000 claims abstract description 140
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims abstract description 115
- 229910052756 noble gas Inorganic materials 0.000 claims abstract description 105
- 229910052786 argon Inorganic materials 0.000 claims abstract description 58
- 239000000758 substrate Substances 0.000 claims abstract description 45
- 238000004519 manufacturing process Methods 0.000 claims abstract description 21
- 239000010410 layer Substances 0.000 claims description 245
- 239000012298 atmosphere Substances 0.000 claims description 64
- 239000002346 layers by function Substances 0.000 claims description 59
- 238000000034 method Methods 0.000 claims description 59
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 52
- 239000007789 gas Substances 0.000 claims description 50
- 230000004888 barrier function Effects 0.000 claims description 48
- 229910052751 metal Inorganic materials 0.000 claims description 37
- 239000002184 metal Substances 0.000 claims description 36
- 238000010438 heat treatment Methods 0.000 claims description 26
- 239000011787 zinc oxide Substances 0.000 claims description 26
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- 238000000151 deposition Methods 0.000 claims description 21
- 238000010899 nucleation Methods 0.000 claims description 21
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 20
- 238000004544 sputter deposition Methods 0.000 claims description 20
- 229910052709 silver Inorganic materials 0.000 claims description 19
- 239000004332 silver Substances 0.000 claims description 19
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 16
- 239000000203 mixture Substances 0.000 claims description 15
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 14
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 13
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 13
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- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 10
- 229910052719 titanium Inorganic materials 0.000 claims description 10
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- 150000004706 metal oxides Chemical class 0.000 claims description 9
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 8
- 150000004767 nitrides Chemical class 0.000 claims description 8
- 239000011135 tin Substances 0.000 claims description 8
- 229910052718 tin Inorganic materials 0.000 claims description 8
- KBEVZHAXWGOKCP-UHFFFAOYSA-N zinc oxygen(2-) tin(4+) Chemical compound [O--].[O--].[O--].[Zn++].[Sn+4] KBEVZHAXWGOKCP-UHFFFAOYSA-N 0.000 claims description 8
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 7
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- 239000010703 silicon Substances 0.000 claims description 7
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- 230000002829 reductive effect Effects 0.000 claims description 6
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 5
- 238000001816 cooling Methods 0.000 claims description 5
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- 229910045601 alloy Inorganic materials 0.000 claims description 4
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- 150000002835 noble gases Chemical class 0.000 abstract description 12
- 238000009413 insulation Methods 0.000 abstract description 11
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- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 5
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
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- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
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- 229910000617 Mangalloy Inorganic materials 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
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- 238000002844 melting Methods 0.000 description 2
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- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
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- 239000005361 soda-lime glass Substances 0.000 description 2
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- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
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- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
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- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
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- 240000007594 Oryza sativa Species 0.000 description 1
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- BAQNULZQXCKSQW-UHFFFAOYSA-N oxygen(2-);titanium(4+) Chemical compound [O-2].[O-2].[O-2].[O-2].[Ti+4].[Ti+4] BAQNULZQXCKSQW-UHFFFAOYSA-N 0.000 description 1
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- HUAUNKAZQWMVFY-UHFFFAOYSA-M sodium;oxocalcium;hydroxide Chemical compound [OH-].[Na+].[Ca]=O HUAUNKAZQWMVFY-UHFFFAOYSA-M 0.000 description 1
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Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
- C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3618—Coatings of type glass/inorganic compound/other inorganic layers, at least one layer being metallic
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3639—Multilayers containing at least two functional metal layers
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
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- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3642—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating containing a metal layer
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
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- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3644—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3649—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer made of metals other than silver
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3652—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the coating stack containing at least one sacrificial layer to protect the metal from oxidation
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
- C03C17/366—Low-emissivity or solar control coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3681—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating being used in glazing, e.g. windows or windscreens
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
- C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B3/00—Window sashes, door leaves, or like elements for closing wall or like openings; Layout of fixed or moving closures, e.g. windows in wall or like openings; Features of rigidly-mounted outer frames relating to the mounting of wing frames
- E06B3/66—Units comprising two or more parallel glass or like panes permanently secured together
- E06B3/6612—Evacuated glazing units
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B3/00—Window sashes, door leaves, or like elements for closing wall or like openings; Layout of fixed or moving closures, e.g. windows in wall or like openings; Features of rigidly-mounted outer frames relating to the mounting of wing frames
- E06B3/66—Units comprising two or more parallel glass or like panes permanently secured together
- E06B3/663—Elements for spacing panes
- E06B3/66304—Discrete spacing elements, e.g. for evacuated glazing units
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B3/00—Window sashes, door leaves, or like elements for closing wall or like openings; Layout of fixed or moving closures, e.g. windows in wall or like openings; Features of rigidly-mounted outer frames relating to the mounting of wing frames
- E06B3/66—Units comprising two or more parallel glass or like panes permanently secured together
- E06B3/67—Units comprising two or more parallel glass or like panes permanently secured together characterised by additional arrangements or devices for heat or sound insulation or for controlled passage of light
- E06B3/6715—Units comprising two or more parallel glass or like panes permanently secured together characterised by additional arrangements or devices for heat or sound insulation or for controlled passage of light specially adapted for increased thermal insulation or for controlled passage of light
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B3/00—Window sashes, door leaves, or like elements for closing wall or like openings; Layout of fixed or moving closures, e.g. windows in wall or like openings; Features of rigidly-mounted outer frames relating to the mounting of wing frames
- E06B3/66—Units comprising two or more parallel glass or like panes permanently secured together
- E06B3/677—Evacuating or filling the gap between the panes ; Equilibration of inside and outside pressure; Preventing condensation in the gap between the panes; Cleaning the gap between the panes
- E06B3/6775—Evacuating or filling the gap during assembly
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/90—Other aspects of coatings
- C03C2217/94—Transparent conductive oxide layers [TCO] being part of a multilayer coating
- C03C2217/944—Layers comprising zinc oxide
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A30/00—Adapting or protecting infrastructure or their operation
- Y02A30/24—Structural elements or technologies for improving thermal insulation
- Y02A30/249—Glazing, e.g. vacuum glazing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B80/00—Architectural or constructional elements improving the thermal performance of buildings
- Y02B80/22—Glazing, e.g. vaccum glazing
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Abstract
Description
それぞれの赤外線反射機能層は誘電体コーティングで取り囲まれ、誘電体コーティングは1つ以上の誘電体層を含み、
それぞれの赤外線反射機能層は、そのすぐ上にあり、かつそれと接触するバリア層によって保護され、
それぞれの赤外線反射機能層及びバリア層以外の少なくとも1つの層が貴ガス、好ましくはアルゴンを含む、
被覆ガラスペインに関する。
i)赤外線反射機能層及びバリア層のみは、95%~100%の貴ガス、好ましくはアルゴンを含む雰囲気中で堆積され;
ii)金属ターゲットからの金属酸化物誘電体層は、95%~100%の酸素を含む雰囲気中で堆積され;
iii)その他の誘電体層は、ガス雰囲気中の貴ガスの体積比が90%以下となる雰囲気中で堆積される。
1つ以上の誘電体層から作られた誘電体コーティング;
赤外線反射機能層;
バリア層;
1つ以上の誘電体層から作られた誘電体コーティング、
を少なくとも含む交互配列である。
1つ以上の誘電体層から作られた誘電体コーティング;
赤外線反射機能層;
バリア層;
1つ以上の誘電体層から作られた誘電体コーティング;
赤外線反射機能層;
バリア層;
1つ以上の誘電体層から作られた誘電体コーティング、
を少なくとも含む交互配列である。
20~40nmの幾何学的厚さを有する、1つ以上の誘電体層から作られた誘電体コーティング;
2~10nmの幾何学的厚さを有する、好ましくはZnOを含む任意選択のシーディング層;
8~18nmの幾何学的厚さを有する、好ましくはAgを含む赤外線反射機能層;
1nm~12nm、好ましくは2nm~8nmの幾何学的厚さを有する、好ましくはZnOを含むバリア層;
40nm~100nm、好ましくは60~100nmの幾何学的厚さを有する、1つ以上の誘電体層から作られた誘電体コーティング;
2~10nmの幾何学的厚さを有する、好ましくはZnOを含む任意選択のシーディング層;
8~18nmの幾何学的厚さを有する、好ましくはAgを含む赤外線反射機能層;
1nm~12nm、好ましくは2~8nmの幾何学的厚さを有する、好ましくはZnOを含むバリア層;
10~45nmの幾何学的厚さを有する、1つ以上の誘電体層から作られた誘電体コーティング;及び
1つ以上の誘電体層を含み、1~10nmの厚さを有する、任意選択の保護トップコート、
を少なくとも含む交互配列である。
i)赤外線反射金属層及びバリア層のみは、95%~100%の貴ガス、好ましくはアルゴンを含む雰囲気中で堆積され;
ii)金属ターゲットから堆積される金属酸化物誘電体層は、95%~100%の酸素を含む雰囲気中で堆積され;
その他の誘電体層は、ガス雰囲気中の貴ガスの体積比が90%以下となる雰囲気中で堆積されることを特徴とする。
a)金属ターゲットからの誘電体層は、それらが金属酸化物層である場合、95%~100%の酸素を含む雰囲気中で堆積され;
b)それらが金属酸化物層ではない場合、ガス雰囲気中の貴ガスの体積比が90%以下となる雰囲気中で堆積される。
a)n個の赤外線反射機能層及びn+1個の誘電体コーティング(ここでn≧1である)の交互配列であって、
a.それぞれの赤外線反射機能層は誘電体コーティングで取り囲まれ、誘電体コーティングは1つ以上の誘電体層を含み、
b.それぞれの赤外線反射機能層は、そのすぐ上にあり、かつそれと接触するバリア層によって保護され、
それぞれの赤外線反射機能層及びバリア層以外の少なくとも1つの層が貴ガス、好ましくはアルゴンを含む、交互配列と、
b)任意選択的に、1つ以上の誘電体層を任意選択的に含む保護トップコートと;
c)任意選択的に、誘電体層を任意選択的に含み、少なくとも1つの赤外線反射機能層の下にあり、かつそれと接触するシーディング層と;
を含み、
それぞれの赤外線反射機能層及びバリア層以外の少なくとも1つの層は、誘電体コーティング、シーディング層、及び/又は保護トップコートの中から選択される誘電体層であり、貴ガス含有雰囲気下で堆積される誘電体層の全幾何学的厚さは少なくとも30nmであり、かつ120nm以下であり;
10-6mbar未満の圧力において、室温から460℃まで100分間で加熱し、460℃で20分間維持し、460℃から23℃まで100分間で冷却した後の被覆ガラスペインの被覆表面積当たりの放出可能な貴ガスの含有量が、被覆ガラスペイン1mm2当たり1.5×10-6mbar.cm3未満であり;
このような被覆ガラスペインが、ガラス基材をマグネトロンスパッタリング装置中に供給し、減圧におけるマグネトロンスパッタリングによってガラス基板上に層を堆積することを含む方法によって製造され、その堆積条件は以下の通りであり:
1)赤外反射金属層及びバリア層のみは、95%~100%の貴ガス、好ましくはアルゴンを含む雰囲気中で堆積され;
2)金属ターゲットから堆積される金属酸化物誘電体層は、95%~100%の酸素を含む雰囲気中で堆積され;
3)その他の誘電体層は、ガス雰囲気中の貴ガスの体積比が90%以下となる雰囲気中で堆積される、
被覆ガラスペインに関する。
a)n個の赤外線反射機能層及びn+1個の誘電体コーティング(ここでn≧1である)の交互配列であって、
それぞれの赤外線反射機能層は誘電体コーティングで取り囲まれ、誘電体コーティングは1つ以上の誘電体層を含み、
それぞれの赤外線反射機能層は、そのすぐ上にあり、かつそれと接触するバリア層によって保護され、
それぞれの赤外線反射機能層及びバリア層以外の少なくとも1つの層が貴ガス、好ましくはアルゴンを含む、交互配列と、
b)任意選択的に、1つ以上の誘電体層を任意選択的に含む保護トップコートと;
c)任意選択的に、誘電体層を任意選択的に含み、少なくとも1つの赤外線反射機能層の下にあり、かつそれと接触するシーディング層と;
を含み、
それぞれの赤外線反射機能層及びバリア層以外の少なくとも1つの層は、誘電体コーティング、シーディング層、及び/又は保護トップコートの中から選択される誘電体層であり、貴ガス含有雰囲気下で堆積される誘電体層の全幾何学的厚さは少なくとも30nmであり、かつ120nm以下であり;
10-6mbar未満の圧力において、室温から460℃まで100分間で加熱し、460℃で20分間維持し、460℃から23℃まで100分間で冷却した後の被覆ガラスペインの被覆表面積当たりの放出可能な貴ガスの含有量が、被覆ガラスペイン1mm2当たり1.5×10-6mbar.cm3未満であり;
このような被覆ガラスペインが、順に:
ガラス基材をマグネトロンスパッタリング装置中に供給し、
減圧におけるマグネトロンスパッタリングによってガラス基材上に層を堆積し、
300℃より高い温度(Temp>300℃)、好ましくは400℃より高い温度(Temp>400℃)、より好ましくは480℃より高い温度(Temp>480℃)で熱処理すること、
を含む方法によって製造される、被覆ガラスペインにも関する。
a)n個の赤外線反射機能層及びn+1個の誘電体コーティング(ここでn≧1である)の交互配列であって、
それぞれの赤外線反射機能層は誘電体コーティングで取り囲まれ、誘電体コーティングは1つ以上の誘電体層を含み、
それぞれの赤外線反射機能層は、そのすぐ上にあり、かつそれと接触するバリア層によって保護され、
それぞれの赤外線反射機能層及びバリア層以外の少なくとも1つの層が貴ガス、好ましくはアルゴンを含む、交互配列と、
b)任意選択的に、1つ以上の誘電体層を任意選択的に含む保護トップコートと;
c)任意選択的に、誘電体層を任意選択的に含み、少なくとも1つの赤外線反射機能層の下にあり、かつそれと接触するシーディング層と;
を含み、
それぞれの赤外線反射機能層及びバリア層以外の少なくとも1つの層は、誘電体コーティング、シーディング層、及び/又は保護トップコートの中から選択される誘電体層であり、貴ガス含有雰囲気下で堆積される誘電体層の全幾何学的厚さは少なくとも30nmであり、かつ120nm以下であり;
10-6mbar未満の圧力において、室温から460℃まで100分間で加熱し、460℃で20分間維持し、460℃から23℃まで100分間で冷却した後の被覆ガラスペインの被覆表面積当たりの放出可能な貴ガスの含有量が、被覆ガラスペイン1mm2当たり1.5×10-6mbar.cm3未満である、真空断熱グレージングを含む。
a)n個の赤外線反射機能層及びn+1個の誘電体コーティング(ここでn≧1である)の交互配列であって、
それぞれの赤外線反射機能層は誘電体コーティングで取り囲まれ、誘電体コーティングは1つ以上の誘電体層を含み、
それぞれの赤外線反射機能層は、そのすぐ上にあり、かつそれと接触するバリア層によって保護され、
それぞれの赤外線反射機能層及びバリア層以外の少なくとも1つの層が貴ガス、好ましくはアルゴンを含む、交互配列と、
b)任意選択的に、1つ以上の誘電体層を任意選択的に含む保護トップコートと;
c)任意選択的に、誘電体層を任意選択的に含み、少なくとも1つの赤外線反射機能層の下にあり、かつそれと接触するシーディング層と;
を含み、
それぞれの赤外線反射機能層及びバリア層以外の少なくとも1つの層は、誘電体コーティング、シーディング層、及び/又は保護トップコートの中から選択される誘電体層であり、貴ガス含有雰囲気下で堆積される誘電体層の全幾何学的厚さは少なくとも30nmであり、かつ120nm以下であり;
真空断熱グレージング内で、10-6mbar未満の圧力において、室温から460℃まで100分間で加熱し、460℃で20分間維持し、460℃から23℃まで100分間で冷却した後の被覆ガラスペインの被覆表面積当たりの放出可能な貴ガスの含有量が、被覆ガラスペイン1mm2当たり1.5×10-6mbar.cm3未満である、low-eコーティングが設けられたガラス基材を含む被覆ガラスペインの使用に関する。
Claims (16)
- low-eコーティングが設けられたガラス基材を含む被覆ガラスペインであって、前記low-eコーティングは:
a)n個の赤外線反射機能層及びn+1個の誘電体コーティング(ここでn≧1である)の交互配列であって、
a.それぞれの赤外線反射機能層は誘電体コーティングで取り囲まれ、前記誘電体コーティングは1つ以上の誘電体層を含み、
b.それぞれの赤外線反射機能層は、そのすぐ上にあり、かつそれと接触するバリア層によって保護され、
それぞれの赤外線反射機能層及び前記バリア層以外の少なくとも1つの層が貴ガス、好ましくはアルゴンを含む、交互配列と、
b)任意選択的に、1つ以上の誘電体層を任意選択的に含む保護トップコートと;
c)任意選択的に、誘電体層を任意選択的に含み、少なくとも1つの赤外線反射機能層の下にあり、かつそれと接触するシーディング層と;
を含み、
それぞれの赤外線反射機能層及び前記バリア層以外の少なくとも1つの層は、前記誘電体コーティング、前記シーディング層、及び/又は前記保護トップコートの中から選択される誘電体層であり、貴ガス含有雰囲気下で堆積される前記誘電体層の全幾何学的厚さは少なくとも30nmであり、かつ120nm以下であり;
10-6mbar未満の圧力において、室温から460℃まで100分間で加熱し、460℃で20分間維持し、460℃から23℃まで100分間で冷却した後の、前記被覆ガラスペインの被覆表面積当たりの放出可能な貴ガスの含有量が、被覆ガラスペイン1mm2当たり1.5×10-6mbar.cm3未満である、被覆ガラスペイン。 - 10-6mbar未満の圧力において、室温から460℃まで100分間で加熱し、460℃で20分間維持し、460℃から23℃まで100分間で冷却した後、前記被覆ガラスペインの被覆表面積当たりの前記放出可能な貴ガスの含有量が、被覆ガラスペイン1mm2当たり1.0×10-6mbar.cm3未満、好ましくは被覆ガラスペイン1mm2当たり0.5×10-6mbarcm3未満である、請求項1に記載の被覆ガラスペイン。
- 貴ガス含有雰囲気下で堆積された前記誘電体層の全幾何学的厚さが、少なくとも45nm、或いは少なくとも60nmである、請求項1又は2に記載の被覆ガラスペイン。
- 前記low-eコーティングの全幾何学的厚さが、70~300nm、好ましくは80~250nm、最も好ましくは90~190nmである、請求項1~3のいずれか一項に記載の被覆ガラスペイン。
- 前記赤外線反射機能層が、銀を含むか、又は銀からなる、請求項1~4のいずれか一項に記載の被覆ガラスペイン。
- 前記low-eコーティングが、前記ガラス基材から外側に向かってa)酸化亜鉛スズ層;b)酸化亜鉛ベースの層;c)銀層;d)バリア層;e)誘電体コーティングを含む、請求項1~5のいずれか一項に記載の被覆ガラスペイン。
- 前記low-eコーティングが、前記ガラス基材から外側に向かってa)酸化亜鉛スズ層を含む誘電体コーティング;b)酸化亜鉛ベースの層を含むシーディング層;c)銀の赤外線反射機能層;d)バリア層;e)誘電体コーティング、f)酸化亜鉛ベースの層;g)第2の銀の赤外線反射機能層;h)第2のバリア層;i)誘電体コーティングを含む、請求項1~6のいずれか一項に記載の被覆ガラスペイン。
- 少なくとも1つのバリア層が、金属、その酸化物、又は窒化物であり;前記金属が、チタン、亜鉛、ニッケル、クロム、又はそれらの中の1つを含むいずれかの合金からなるリストから選択され、特に、酸化亜鉛である、請求項1~7のいずれか一項に記載の被覆ガラスペイン。
- 少なくとも1つ誘電体コーティングが、チタン、ケイ素、亜鉛、スズ、ジルコニウム、又はそれらの混合物の酸化物又は窒化物のいずれかを含む1つ又は複数の誘電体層コーティングである、請求項1~8のいずれか一項に記載の被覆ガラスペイン。
- アルゴンを含む雰囲気中で堆積される誘電体層の全厚さが100nm以下、好ましくは90nm以下である、請求項1~9のいずれか一項に記載の被覆ガラスペイン。
- 請求項1~10のいずれか一項に記載の被覆ガラスペインを製造するための方法であって、前記方法は、ガラス基材をマグネトロンスパッタリング装置に供給し、減圧における陰極スパッタリングによってガラス基材上に前記層を堆積することを含み、
i)前記赤外線反射機能層及び前記バリア層のみは、95%~100%の貴ガス、好ましくはアルゴンを含む雰囲気中で堆積され;
ii)金属ターゲットからの金属酸化物誘電体層は、95%~100%の酸素を含む雰囲気中で堆積され;
iii)その他の誘電体層は、ガス雰囲気中の貴ガスの体積比が90%以下となる雰囲気中で堆積されることを特徴とする方法。 - 前記被覆ガラスペインが、300℃より高い、好ましくは400℃より高い、より好ましくは480℃より高い温度で熱処理される、請求項1~10のいずれか一項に記載の被覆ガラスペインの製造方法。
- 前記熱処理が、1bar以下、好ましくは10mbar以下、より好ましくは1mbar以下、最も好ましくは0.1mbar以下の圧力で行われる、請求項12に記載の方法。
- 加熱時間が、少なくとも0.5時間、好ましくは少なくとも2時間、より好ましくは少なくとも6時間である、請求項12又は13に記載の方法。
- 請求項1~10のいずれか一項に記載の少なくとも1つの被覆ガラスペインを含む真空断熱グレージングユニット。
- 1.00W/m2K以下、より好ましくは0.90W/m2K以下、最も好ましくは0.80W/m2K以下のU値を特徴とする請求項15に記載の真空断熱グレージング。
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