JP2022175476A - Flow channel device - Google Patents

Flow channel device Download PDF

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JP2022175476A
JP2022175476A JP2021081871A JP2021081871A JP2022175476A JP 2022175476 A JP2022175476 A JP 2022175476A JP 2021081871 A JP2021081871 A JP 2021081871A JP 2021081871 A JP2021081871 A JP 2021081871A JP 2022175476 A JP2022175476 A JP 2022175476A
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flow
flow path
channel
substrate
introduction
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亮 松岡
Akira Matsuoka
公二 野一色
Koji Noisshiki
伸理 市橋
Nobumasa Ichihashi
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Kobe Steel Ltd
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Priority to EP22168720.5A priority patent/EP4088810A1/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
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    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502769—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements
    • B01L3/502784—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements specially adapted for droplet or plug flow, e.g. digital microfluidics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/40—Mixing liquids with liquids; Emulsifying
    • B01F23/41—Emulsifying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/20—Jet mixers, i.e. mixers using high-speed fluid streams
    • B01F25/23—Mixing by intersecting jets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/40—Static mixers
    • B01F25/42—Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions
    • B01F25/43—Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction
    • B01F25/433—Mixing tubes wherein the shape of the tube influences the mixing, e.g. mixing tubes with varying cross-section or provided with inwardly extending profiles
    • B01F25/4331—Mixers with bended, curved, coiled, wounded mixing tubes or comprising elements for bending the flow
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F33/00—Other mixers; Mixing plants; Combinations of mixers
    • B01F33/30—Micromixers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F33/00—Other mixers; Mixing plants; Combinations of mixers
    • B01F33/80—Mixing plants; Combinations of mixers
    • B01F33/81—Combinations of similar mixers, e.g. with rotary stirring devices in two or more receptacles
    • B01F33/813—Combinations of similar mixers, e.g. with rotary stirring devices in two or more receptacles mixing simultaneously in two or more mixing receptacles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/12—Specific details about manufacturing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
    • B01L2300/0874—Three dimensional network
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0475—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure

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Abstract

To provide a flow channel device capable of increasing a capacity of a flow channel per unit volume of a flow channel structure even when the arrangement of confluent flow channels connected to confluent parts is restricted due to the arrangement of the plurality of confluent parts in the flow channel structure.SOLUTION: A flow channel structure 2 of a flow channel device 1 is such that: first flow channel confluent flow channels 30 of a plurality of first flow channels 21 include the plurality of first flow channel confluent flow channels 30 aligned along a second substrate surface 18a of each second substrate 18; first flow channel confluent parts 28 of the plurality of first flow channels 21 comprise a plurality of first flow channel confluent part open holes 28b penetrating into each first substrate 16; and second flow channel first introduction paths 32 and second flow channel second introduction paths 34 of a plurality of second flow channels 22 are aligned along the second substrate surface 18a of the second substrate 18, and are arranged in an area where the first channel confluent flow channels 30 do not exist when viewed in a direction along a lamination direction of the first substrate 16 and the second substrate 18.SELECTED DRAWING: Figure 3

Description

本発明は、流路装置に関する。 The present invention relates to a channel device.

従来、複数のマイクロチャネル（微細流路）を内部に有する流路装置が知られている。下記特許文献１には、このような流路装置の一例として、エマルションを得るための乳化用マイクロ流体デバイスが開示されている。 2. Description of the Related Art Conventionally, a channel device having a plurality of microchannels (microchannels) therein is known. Patent Literature 1 listed below discloses an emulsifying microfluidic device for obtaining an emulsion as an example of such a channel device.

下記特許文献１に開示された乳化用マイクロ流体デバイスは、互いに積層された液体導入部、分散相分配部、連続相分配部、及び、液体排出部の４つの積層体からなる。 The microfluidic device for emulsification disclosed in Patent Document 1 below is composed of four laminates, which are a liquid introduction section, a dispersed phase distribution section, a continuous phase distribution section, and a liquid discharge section, which are laminated together.

液体導入部は、連続相の液体が導入される連続相ポートと、その連続相ポートに繋がり、連続相の液体を一層上の分散相分配部へ吐出する連続相供給口と、分散相の液体が導入される分散相ポートと、その分散相ポートに繋がり、分散相の液体を一層上の分散相分配部へ吐出する分散相供給口とを有する。 The liquid introduction part includes a continuous phase port into which the liquid of the continuous phase is introduced, a continuous phase supply port connected to the continuous phase port and discharging the liquid of the continuous phase to the dispersed phase distribution part above, and the liquid of the dispersed phase. and a dispersed phase supply port connected to the dispersed phase port for discharging the liquid of the dispersed phase to the upper dispersed phase distribution section.

分散相分配部は、液体導入部と接する下面に蛇行状の分散相主流路を有する。分散相主流路は、前記分散相供給口と繋がっている。この分散相主流路には、前記分散相供給口から吐出される分散相の液体が流入して流れる。また、分散相分配部は、分散相主流路に沿って間隔をあけて配置された複数の分散相処理流路を有する。この複数の分散相処理流路は、それぞれ、分散相主流路から分散相分配部の上面まで延びる微細な開孔である。また、分散相分配部は、前記連続相供給口と繋がり、当該分散相分配部を上下方向に貫通する連続相通過口を有する。 The dispersed-phase distribution section has a meandering dispersed-phase main channel on the lower surface in contact with the liquid introduction section. The dispersed phase main channel is connected to the dispersed phase supply port. The dispersed-phase liquid discharged from the dispersed-phase supply port flows into the dispersed-phase main channel. The dispersed phase distribution section also has a plurality of dispersed phase treatment channels spaced apart along the main dispersed phase flow channel. Each of the plurality of dispersed phase treatment channels is a fine aperture extending from the dispersed phase main channel to the upper surface of the dispersed phase distribution section. Further, the dispersed phase distribution section has a continuous phase passage port connected to the continuous phase supply port and penetrating the dispersed phase distribution section in the vertical direction.

連続相分配部は、分散相分配部と接する下面に蛇行状の連続相主流路を有する。連続相主流路は、前記連続相通過口と繋がっている。この連続相主流路には、前記連続相供給口から吐出されて前記連続相通過口を通過した連続相の液体が流入して流れる。連続相主流路は、上下方向に直交する左右方向において前記分散相処理流路を挟むように配置されるとともに互いに平行に延びる２本の流路部分を有する。また、連続相分配部は、前記２本の流路部分をそれらの間で繋ぐとともに前記複数の分散相処理流路のそれぞれと連通する複数の微小な連続相処理流路を有する。連続相主流路から各連続相処理流路に流入した連続相の液体に各分散相処理流路から流入する分散相の液体が合流するようになっている。また、連続相分配部は、前記各分散相処理流路の真上の位置で前記各連続相処理流路から連続相分配部の上面までそれぞれ延びる複数の微小な液滴生成流路を有する。この各液滴生成流路内に、合流した連続相の液体と分散相の液体とがシースフローの状態で流入し、当該各液滴生成流路内で分散相の液滴が形成され、その分散相の液滴と連続相の液体とからなるエマルションが生成されるようになっている。 The continuous-phase distribution section has a meandering continuous-phase main channel on the lower surface in contact with the dispersed-phase distribution section. The continuous-phase main flow path is connected to the continuous-phase passage port. The continuous-phase liquid discharged from the continuous-phase supply port and passed through the continuous-phase passage port flows into the continuous-phase main channel. The continuous-phase main channel has two channel portions that are arranged so as to sandwich the dispersed-phase treatment channel in the horizontal direction orthogonal to the vertical direction and that extend parallel to each other. Further, the continuous phase distribution part has a plurality of minute continuous phase processing channels connecting the two channel portions therebetween and communicating with each of the plurality of dispersed phase processing channels. The continuous-phase liquid flowing from the continuous-phase main flow path into each continuous-phase treatment flow path joins with the dispersed-phase liquid flowing from each dispersed-phase treatment flow path. In addition, the continuous phase distribution section has a plurality of fine droplet generation channels each extending from each of the continuous phase processing channels to the upper surface of the continuous phase distribution section at a position directly above each of the dispersed phase processing channels. The combined continuous-phase liquid and dispersed-phase liquid flow into each of the droplet-generating channels in a sheath flow state, and dispersed-phase droplets are formed in the droplet-generating channels. An emulsion is produced consisting of droplets of the dispersed phase and a liquid of the continuous phase.

液体排出部は、連続相分配部と接する下面に蛇行状のエマルション主流路を有する。このエマルション主流路は、前記複数の液滴生成流路と繋がっている。このエマルション主流路には、前記複数の液滴生成流路のそれぞれにおいて生成されたエマルションがそれらの液滴生成流路から流入し、その流入したエマルションが当該エマルション主流路において合流し、当該エマルション主流路から排出されるようになっている。 The liquid discharge part has a meandering emulsion main channel on the lower surface in contact with the continuous phase distribution part. The emulsion main channel is connected to the plurality of droplet generation channels. The emulsion generated in each of the plurality of droplet generation channels flows into this emulsion main flow channel from the droplet generation flow channels, and the inflowing emulsions merge in the emulsion main flow channel to form the emulsion main flow channel. It is designed to be discharged from the road.

特許第５２１２３１３号公報Japanese Patent No. 5212313

ところで、上記特許文献１に開示されたマイクロ流体デバイスでは、連続相の液体に対して分散相の液体を合流させる箇所を増やすために、分散相流路に沿って多数の分散相処理流路を設けているが、この構成では、分散相処理流路を通って連続相処理流路へ流入する分散相の液体の流量が分散相流路の上流側と下流側とで変化するのを避けるために、分散相処理流路の径を分散相流路の径に比べて著しく小さくする必要がある。このような構成では、分散相の液体に異物が混入している場合等に分散相処理流路において閉塞が生じる虞がある。そのため、このような構成は採用しにくい。 By the way, in the microfluidic device disclosed in Patent Document 1, in order to increase the number of points where the dispersed phase liquid joins with the continuous phase liquid, a large number of dispersed phase treatment channels are provided along the dispersed phase channel. However, in this configuration, the flow rate of the dispersed phase liquid entering the continuous phase processing channel through the dispersed phase processing channel varies between the upstream side and the downstream side of the dispersed phase channel. In addition, the diameter of the dispersed phase treatment channel must be significantly smaller than the diameter of the dispersed phase channel. In such a configuration, there is a possibility that the dispersed phase treatment channel may be clogged when foreign matter is mixed in the liquid of the dispersed phase. Therefore, such a configuration is difficult to adopt.

前記のような閉塞を避けつつ、第１液体と第２液体とを合流させる箇所を増やしてその第１液体と第２液体とによる相互作用の処理量を増やすためには、例えば、積層型の流路構造体において、第１の基板にその表面から裏面へ貫通する複数の合流部を設けるとともに、その第１の基板の表面に沿って、第１液体が導入される複数の第１導入路と第２液体が導入される複数の第２導入路とをそれぞれ前記複数の合流部の対応するものに繋がるように配列し、さらに、その第１の基板の裏面に接合される別の第２の基板の表面に沿って、前記各合流部で合流した第１液体と第２液体との合流液体が流れる複数の合流流路をそれぞれ前記複数の合流部の対応するものに繋がるように配列し、このような２つの基板の積層構造を繰り返し設けることが考えられる。 In order to increase the number of places where the first liquid and the second liquid join together while avoiding the clogging as described above, and to increase the throughput of the interaction between the first liquid and the second liquid, for example, a layered type In the flow channel structure, the first substrate is provided with a plurality of confluence portions penetrating from the front surface to the back surface thereof, and along the surface of the first substrate, a plurality of first introduction paths through which the first liquid is introduced. and a plurality of second introduction passages into which the second liquid is introduced are arranged so as to be connected to corresponding ones of the plurality of confluence portions, and further, another second introduction passage bonded to the back surface of the first substrate along the surface of the substrate, a plurality of confluence flow paths through which confluence liquids of the first liquid and the second liquid merge at the confluence portions flow are arranged so as to be connected to corresponding ones of the plurality of confluence portions; It is conceivable to repeatedly provide such a laminated structure of two substrates.

しかしながら、この場合には、前記第２の基板の表面に沿って配列される複数の合流流路の配置が前記第１の基板に設けられた複数の合流部の配置によって制約を受けることから、第２の基板の表面に沿う領域において流路を配置できない無駄なスペースが生じ、その結果、流路構造体の単位体積当たりにおける流路の容量が低下するという問題がある。 However, in this case, since the arrangement of the plurality of confluence channels arranged along the surface of the second substrate is restricted by the arrangement of the plurality of confluence portions provided on the first substrate, In the area along the surface of the second substrate, there is a wasted space in which the channel cannot be arranged, and as a result, there is a problem that the capacity of the channel per unit volume of the channel structure is reduced.

本発明の目的は、流路構造体内における複数の合流部の配置によりそれらの合流部に繋がる合流流路の配置が制約を受ける場合であっても、流路構造体の単位体積当たりにおける流路の容量を増やすことが可能な流路装置を提供することである。 An object of the present invention is to provide a flow path per unit volume of a flow path structure, even if the arrangement of a plurality of confluences in the flow path structure restricts the arrangement of the confluence flow paths connected to those confluences. To provide a channel device capable of increasing the capacity of

本発明により提供される流路装置は、第１液体と第２液体とをそれぞれ合流させて流通させる複数の第１流路及び複数の第２流路を備える流路装置である。この流路装置は、前記複数の第１流路及び前記複数の第２流路が内部に設けられた流路構造体を備える。前記複数の第１流路は、前記第１液体が導入される第１流路第１導入路と、前記第２液体が導入される第１流路第２導入路と、前記第１流路第１導入路の下流側の端部及び前記第１流路第２導入路の下流側の端部に繋がり、前記第１流路第１導入路を流れた前記第１液体と前記第１流路第２導入路を流れた前記第２液体とを合流させる第１流路合流部と、前記第１流路合流部の下流側に繋がり、前記第１流路合流部で合流した前記第１液体と前記第２液体との合流液体を流通させる第１流路合流流路と、をそれぞれ有する。前記複数の第２流路は、前記第１液体が導入される第２流路第１導入路と、前記第２液体が導入される第２流路第２導入路と、前記第２流路第１導入路の下流側の端部及び前記第２流路第２導入路の下流側の端部に繋がり、前記第２流路第１導入路を流れた前記第１液体と前記第２流路第２導入路を流れた前記第２液体とを合流させる第２流路合流部と、前記第２流路合流部の下流側に繋がり、前記第２流路合流部で合流した前記第１液体と前記第２液体との合流液体を流通させる第２流路合流流路と、をそれぞれ有する。前記流路構造体は、複数の第１基板及び複数の第２基板であってそれらの板厚方向に沿って交互に積層されたものを有する。前記複数の第１基板のそれぞれは、その板厚方向における一方側の面である第１基板表面、及び、前記第１基板表面と反対側の面である第１基板裏面を有する。前記複数の第２基板のそれぞれは、その板厚方向における一方側の面であってその第２基板上に積層される前記第１基板の前記第１基板裏面に密着した面である第２基板表面、及び、前記第２基板表面と反対側の面であってその第２基板が積層される前記第１基板の前記第１基板表面に密着した面である第２基板裏面を有する。前記複数の第１流路の前記第１流路第１導入路は、前記複数の第１基板のそれぞれの前記第１基板表面に沿って配列された複数の第１流路第１導入路を含む。前記複数の第１流路の前記第１流路第２導入路は、前記複数の第１基板のそれぞれの前記第１基板表面に沿って配列された複数の第１流路第２導入路を含む。前記複数の第１流路の前記第１流路合流流路は、前記複数の第２基板のそれぞれの前記第２基板表面に沿って配列された複数の第１流路合流流路を含む。前記複数の第１流路の前記第１流路合流部は、前記複数の第１基板のそれぞれをそれらの板厚方向に貫通する複数の第１流路合流部貫通孔からなる。前記複数の第２流路の前記第２流路第１導入路及び前記複数の第２流路の前記第２流路第２導入路は、前記複数の第２基板のそれぞれの前記第２基板表面に沿って配列されるとともに、前記第１基板と前記第２基板との積層方向に沿う方向から見て、前記複数の第１流路合流流路が存在しない領域に配置されている。 A flow channel device provided by the present invention is a flow channel device comprising a plurality of first flow channels and a plurality of second flow channels for merging and circulating a first liquid and a second liquid. The flow path device includes a flow path structure in which the plurality of first flow paths and the plurality of second flow paths are provided. The plurality of first flow paths includes a first flow path through which the first liquid is introduced, a first flow path and a second introduction flow through which the second liquid is introduced, and the first flow path. The first liquid and the first flow that are connected to the downstream end of the first introduction path and the downstream end of the first flow path and the second introduction path and flow through the first flow path. a first flow path confluence section for merging the second liquid that has flowed through the second introduction path; and a first flow path confluence flow path for circulating the merged liquid of the liquid and the second liquid. The plurality of second flow paths includes a second flow path through which the first liquid is introduced, a second flow path through which the second liquid is introduced, a second flow path, and a second flow path. The first liquid and the second flow connected to the downstream end of the first introduction path and the downstream end of the second flow path second introduction path and flowed through the second flow path first introduction path a second flow path merging portion for merging the second liquid that has flowed through the second introduction path; and a second flow path confluence flow path for circulating the merged liquid of the liquid and the second liquid. The flow path structure has a plurality of first substrates and a plurality of second substrates alternately laminated along the plate thickness direction. Each of the plurality of first substrates has a first substrate surface that is one side surface in the plate thickness direction and a first substrate back surface that is a surface opposite to the first substrate surface. Each of the plurality of second substrates is a second substrate which is a surface on one side in the plate thickness direction and which is a surface in close contact with the rear surface of the first substrate of the first substrate laminated on the second substrate. It has a front surface and a back surface of a second substrate which is a surface opposite to the surface of the second substrate and which is in close contact with the surface of the first substrate on which the second substrate is laminated. The first flow path first introduction paths of the plurality of first flow paths include a plurality of first flow path first introduction paths arranged along the first substrate surface of each of the plurality of first substrates. include. The first channel second introduction paths of the plurality of first channels comprise a plurality of first channel second introduction paths arranged along the first substrate surface of each of the plurality of first substrates. include. The first flow convergence flow path of the plurality of first flow paths includes a plurality of first flow convergence flow paths arranged along the second substrate surface of each of the plurality of second substrates. The first flow path confluence portion of the plurality of first flow paths includes a plurality of first flow path confluence portion through-holes penetrating through each of the plurality of first substrates in the thickness direction thereof. The second flow path first introduction path of the plurality of second flow paths and the second flow path second introduction path of the plurality of second flow paths are arranged on the respective second substrates of the plurality of second substrates. They are arranged along the surface and arranged in a region where the plurality of first flow passages confluence flow passages do not exist when viewed from the direction along the stacking direction of the first substrate and the second substrate.

この流路装置では、第２基板表面に沿って配列された複数の第２流路第１導入路及び複数の第２流路第２導入路が、その第２基板表面に沿う領域において複数の第１流路合流流路が存在しない領域に配置されているため、第１基板に設けられた複数の第１流路合流部の配置により第２基板表面に沿って配列される複数の第１流路合流流路の配置が制約を受けることで第２基板表面に沿う領域において第１流路合流流路を配置できなくなるスペースが、複数の第２流路第１導入路及び複数の第２流路第２導入路を配置するスペースとして有効に活用される。このため、複数の第１流路合流部の配置によりそれらの第１流路合流部に繋がる第１流路合流流路の配置が制約を受ける場合であっても、流路構造体内において流路が配置されていない無駄なスペースを削減して流路構造体の単位体積当たりにおける流路の容量を増やすことができる。 In this flow path device, the plurality of second flow path first introduction paths and the plurality of second flow path second introduction paths arranged along the surface of the second substrate are arranged in a region along the surface of the second substrate. Since the confluence of the first flow paths is arranged in a region where no flow path exists, the plurality of first flow paths arranged along the surface of the second substrate by the arrangement of the plurality of confluence portions of the first flow paths provided on the first substrate. The space in which the first flow path confluence flow path cannot be arranged in the region along the surface of the second substrate due to restrictions on the arrangement of the flow path convergence flow path is divided into a plurality of second flow path first introduction paths and a plurality of second flow paths. It is effectively used as a space for arranging the channel second introduction path. Therefore, even if the arrangement of the plurality of first flow path junctions restricts the arrangement of the first flow path junction flow paths connected to the first flow path junctions, the flow paths in the flow path structure It is possible to reduce the wasted space where the is not arranged and increase the capacity of the channel per unit volume of the channel structure.

前記複数の第２流路の前記第２流路合流部は、前記複数の第１基板のそれぞれをそれらの板厚方向に貫通する複数の第２流路合流部貫通孔からなり、前記複数の第２流路の前記第２流路合流流路は、前記複数の第１基板のそれぞれの前記第１基板表面に沿って配列された複数の第２流路合流流路を含み、前記第１基板表面に沿って配列された前記複数の第２流路合流流路は、前記積層方向に沿う方向から見て、前記複数の第１流路第１導入流路及び前記複数の第１流路第２導入流路が存在しない領域に配置されていることが好ましい。 The second flow path junction of the plurality of second flow paths comprises a plurality of second flow path junction through-holes penetrating through the plurality of first substrates in the thickness direction thereof, and the plurality of The second flow path convergence flow path of the second flow path includes a plurality of second flow convergence flow paths arranged along the first substrate surface of each of the plurality of first substrates, and The plurality of second flow passages confluence flow passages arranged along the substrate surface are the plurality of first flow passages, the first introduction flow passages, and the plurality of first flow passages when viewed from the direction along the stacking direction. It is preferable that the second introduction channel is arranged in an area where there is no second introduction channel.

この構成では、第１基板表面に沿って配列された複数の第２流路合流流路が、その第１基板表面に沿う領域において複数の第１流路第１導入路及び複数の第１流路第２導入路が存在しない領域に配置されることから、第１基板表面に沿う領域において第１流路第１導入路及び第１流路第２導入路が配置されないスペースを複数の第２流路合流流路を配置するスペースとして有効に活用できる。このため、流路構造体内において流路が配置されていない無駄なスペースをより削減でき、流路構造体の単位体積当たりにおける流路の容量をより増やすことができる。 In this configuration, the plurality of second flow passages confluence flow passages arranged along the surface of the first substrate are combined with the plurality of first flow passages first introduction passages and the plurality of first flow passages in the region along the first substrate surface. Since the second introduction path is arranged in a region where the second introduction path does not exist, the space where the first introduction path and the second introduction path are not arranged in the area along the surface of the first substrate is divided into a plurality of second introduction paths. It can be effectively used as a space for arranging flow passages and confluence flow passages. Therefore, it is possible to further reduce the wasted space in the flow channel structure in which the flow channel is not arranged, and to further increase the capacity of the flow channel per unit volume of the flow channel structure.

前記複数の第１基板のそれぞれの前記第１基板表面に沿って配列された前記複数の第１流路第１導入路は、前記第１基板表面とその第１基板表面に密着した前記第２基板裏面との少なくとも一方に形成された複数の第１流路第１導入溝からなり、前記複数の第１基板のそれぞれの前記第１基板表面に沿って配列された前記複数の第１流路第２導入路は、前記第１基板表面とその第１基板表面に密着した前記第２基板裏面との少なくとも一方に形成された複数の第１流路第２導入溝からなり、前記複数の第２基板のそれぞれの前記第２基板表面に沿って配列された前記複数の第１流路合流流路は、前記第２基板表面とその第２基板表面に密着した前記第１基板裏面との少なくとも一方に形成された複数の第１流路合流溝からなり、前記複数の第２基板のそれぞれの前記第２基板表面に沿って配列された前記複数の第２流路第１導入路は、前記第２基板表面とその第２基板表面に密着した前記第１基板裏面との少なくとも一方に形成された複数の第２流路第１導入溝からなり、前記複数の第２基板のそれぞれの前記第２基板表面に沿って配列された前記複数の第２流路第２導入路は、前記第２基板表面とその第２基板表面に密着した前記第１基板裏面との少なくとも一方に形成された複数の第２流路第２導入溝からなり、前記複数の第１基板のそれぞれの前記第１基板表面に沿って配列された前記複数の第２流路合流流路は、前記第１基板表面とその第１基板表面に密着した前記第２基板裏面との少なくとも一方に形成された複数の第２流路合流溝からなることが好ましい。 The plurality of first flow paths arranged along the first substrate surface of each of the plurality of first substrates comprises the first substrate surface and the second flow path in close contact with the first substrate surface. The plurality of first flow passages, which are composed of a plurality of first flow passages and first introduction grooves formed on at least one of the substrate back surface and arranged along the first substrate surface of each of the plurality of first substrates. The second introduction path is composed of a plurality of first flow path second introduction grooves formed in at least one of the first substrate surface and the second substrate back surface in close contact with the first substrate surface, The plurality of first flow passages confluence flow passages arranged along the second substrate surface of each of the two substrates are arranged at least between the second substrate surface and the first substrate back surface in close contact with the second substrate surface. The plurality of second flow path first introduction paths, which are composed of a plurality of first flow path confluence grooves formed on one side and arranged along the surface of each of the second substrates of the plurality of second substrates, a plurality of second flow path first introduction grooves formed in at least one of a second substrate surface and a back surface of the first substrate in close contact with the surface of the second substrate; The plurality of second flow paths arranged along the surfaces of the two substrates are formed on at least one of the surface of the second substrate and the rear surface of the first substrate in close contact with the surface of the second substrate. , and arranged along the first substrate surface of each of the plurality of first substrates; It is preferable to comprise a plurality of second flow path confluence grooves formed on at least one of the back surface of the second substrate which is in close contact with the front surface of the first substrate.

この構成によれば、第１基板表面及び／又は第１基板裏面に複数の溝が形成された各第１基板と、第２基板表面及び／又は第２基板裏面に複数の溝が形成された各第２基板とを、交互に積層して、その各第１基板の第１基板裏面に第２基板表面を密着させるとともに各第２基板の第２基板裏面に第１基板表面を密着させるという簡単な作業で、複数の第１流路第１導入路、複数の第１流路第２導入路、複数の第１流路合流流路、複数の第２流路第１導入路、複数の第２流路第２導入路、及び、複数の第２流路合流流路を流路構造体内に形成できる。 According to this configuration, each first substrate having a plurality of grooves formed on the first substrate surface and/or the first substrate rear surface, and a plurality of grooves formed on the second substrate surface and/or the second substrate rear surface. The second substrates are alternately laminated, and the surface of the second substrate is brought into close contact with the rear surface of the first substrate of each first substrate, and the surface of the first substrate is brought into close contact with the rear surface of the second substrate of each second substrate. A plurality of first flow passages, a plurality of first flow passages, a plurality of first flow passages, a plurality of second flow passages, a plurality of first flow passages, a plurality of second flow passages, a plurality of first flow passages, and a plurality of The second flow channel The second introduction channel and the plurality of second flow channel convergence channels can be formed in the flow channel structure.

前記第１流路第１導入路を構成する前記第１流路第１導入溝は、前記第１基板表面とその第１基板表面に密着した前記第２基板裏面とのいずれか一方のみに設けられ、前記第１流路第２導入路を構成する前記第１流路第２導入溝は、前記第１基板表面とその第１基板表面に密着した前記第２基板裏面とのいずれか一方のみに設けられ、前記第１流路合流流路を構成する前記第１流路合流溝は、前記第２基板表面とその第２基板表面に密着した前記第１基板裏面とのいずれか一方のみに設けられ、前記第２流路第１導入路を構成する前記第２流路第１導入溝は、前記第２基板表面とその第２基板表面に密着した前記第１基板裏面とのいずれか一方のみに設けられ、前記第２流路第２導入路を構成する前記第２流路第２導入溝は、前記第２基板表面とその第２基板表面に密着した前記第１基板裏面とのいずれか一方のみに設けられ、前記第２流路合流流路を構成する前記第２流路合流溝は、前記第１基板表面とその第１基板表面に密着した前記第２基板裏面とのいずれか一方のみに設けられていることが好ましい。 The first flow channel first introduction groove constituting the first flow channel first introduction channel is provided only on either one of the first substrate surface and the second substrate back surface in close contact with the first substrate surface. and the first channel second introduction groove constituting the first channel second introduction channel is formed only on one of the surface of the first substrate and the back surface of the second substrate in close contact with the surface of the first substrate. The first flow merging groove that constitutes the first flow merging flow is provided in either one of the surface of the second substrate and the back surface of the first substrate that is in close contact with the surface of the second substrate. The second flow path first introduction groove that is provided and constitutes the second flow path first introduction path is formed on either the surface of the second substrate or the back surface of the first substrate that is in close contact with the surface of the second substrate. The second flow channel second introduction groove provided only in the second flow channel and constituting the second flow channel second introduction channel is provided on either the second substrate surface or the first substrate back surface in close contact with the second substrate surface. The second flow merging groove, which is provided only in one of the two and constitutes the second flow merging flow, is either the first substrate surface or the second substrate back surface in close contact with the first substrate surface. It is preferable that it is provided only on one side.

この構成によれば、第１流路第１導入溝、第１流路第２導入溝、及び、第２流路合流溝が第１基板表面と第２基板裏面の両面に設けられ、第２流路第１導入溝、第２流路第２導入溝、及び、第１流路合流溝が第１基板裏面と第２基板表面の両面に設けられている場合のように、第１基板と第２基板とを積層して流路構造体を形成するときに両面に設けられた第１流路第１導入溝同士、第１流路第２導入溝同士、及び、第２流路合流溝同士を合わせる必要がないとともに両面に設けられた第２流路第１導入溝同士、第２流路第２導入溝同士、及び、第１流路合流溝同士を合わせる必要がない。このため、流路構造体を作成するときの作業を簡素化できる。 According to this configuration, the first flow path first introduction groove, the first flow path second introduction groove, and the second flow path joining groove are provided on both the front surface of the first substrate and the back surface of the second substrate, The first substrate and the first substrate, such as the case where the flow path first introduction groove, the second flow path second introduction groove, and the first flow path joining groove are provided on both the back surface of the first substrate and the front surface of the second substrate. First flow path first introduction grooves, first flow path second introduction grooves, and second flow path merging grooves provided on both sides when laminating the second substrate to form a flow path structure There is no need to match the first introduction grooves of the second flow paths, the second introduction grooves of the second flow paths, and the joining grooves of the first flow paths provided on both surfaces. Therefore, it is possible to simplify the work when creating the flow path structure.

前記第１基板と前記第２基板の積層方向における前記第１基板の特定の枚数ごとに、前記第１流路第１導入路、前記第１流路第２導入路、及び、前記第２流路合流流路が、同じ配列パターンで前記第１基板表面に沿って配列されていることが好ましい。 For each specific number of the first substrates in the stacking direction of the first substrate and the second substrate, the first flow path first introduction path, the first flow path second introduction path, and the second flow path It is preferable that the confluence channels are arranged along the surface of the first substrate in the same arrangement pattern.

この構成によれば、第１基板の特定の枚数ごとに第１流路第１導入路、第１流路第２導入路、及び、第２流路合流流路の同じ配列パターンを適用できるため、各第１基板ごとに第１基板表面に沿って配列される第１流路第１導入路、第１流路第２導入路、及び、第２流路合流流路の配列パターンが異なる場合に比べて、流路構造体を生産するときの生産性を向上できる。 According to this configuration, the same arrangement pattern of the first flow passage, the first introduction passage, the first flow passage, the second introduction passage, and the second flow passage can be applied for each specific number of first substrates. , the arrangement pattern of the first flow path, the first flow path, the first flow path, the second flow path, and the second flow path, which are arranged along the surface of the first substrate for each first substrate, is different. Compared to , the productivity can be improved when producing the channel structure.

前記複数の第１基板のそれぞれの前記第１基板表面に沿って配置される前記第１流路第１導入路、前記第１流路第２導入路、及び、前記第２流路合流流路の配列パターンは、同じであることが好ましい。 the first flow path first introduction path, the first flow path second introduction path, and the second flow path confluence flow path arranged along the surface of each of the first substrates of the plurality of first substrates; are preferably the same.

この構成によれば、流路構造体を生産するときの生産性をより向上できる。 According to this configuration, it is possible to further improve the productivity when producing the flow path structure.

前記積層方向における前記第２基板の特定の枚数ごとに、前記第２流路第１導入路、前記第２流路第２導入路、及び、前記第１流路合流流路が、同じ配列パターンで前記第２基板表面に沿って配列されていることが好ましい。 The first introduction path of the second flow path, the second introduction path of the second flow path, and the confluence flow path of the first flow path are arranged in the same pattern for each specific number of the second substrates in the stacking direction. are arranged along the surface of the second substrate.

この構成によれば、第２基板の特定の枚数ごとに第２流路第１導入路、第２流路第２導入路、及び、第１流路合流流路の同じ配列パターンを適用できるため、各第２基板ごとに第２基板表面に沿って配列される第２流路第１導入路、第２流路第２導入路、及び、第１流路合流流路の配列パターンが異なる場合に比べて、流路構造体を生産するときの生産性を向上できる。 According to this configuration, the same arrangement pattern of the second channel first introduction channel, the second channel second introduction channel, and the first channel confluence channel can be applied for each specific number of second substrates. , when the arrangement pattern of the second flow path, the first introduction path, the second flow path, the second flow path, and the first flow path, which are arranged along the surface of the second substrate, is different for each second substrate Compared to , the productivity can be improved when producing the channel structure.

前記複数の第２基板のそれぞれの前記第２基板表面に沿って配置される前記第２流路第１導入路、前記第２流路第２導入路、及び、前記第１流路合流流路の配列パターンは、同じであることが好ましい。 the second flow path first introduction path, the second flow path second introduction path, and the first flow path confluence flow path arranged along the surface of each of the second substrates of the plurality of second substrates; are preferably the same.

この構成によれば、流路構造体を生産するときの生産性をより向上できる。 According to this configuration, it is possible to further improve the productivity when producing the flow path structure.

前記第１流路第１導入路は、前記第１液体を受け入れる箇所である第１流路第１流入口を有し、前記第１流路第２導入路は、前記第２液体を受け入れる箇所である第１流路第２流入口を有し、前記第２流路第１導入路は、前記第１液体を受け入れる箇所である第２流路第１流入口を有し、前記第２流路第２導入路は、前記第２液体を受け入れる箇所である第２流路第２流入口を有し、前記複数の第１流路の前記第１流路第１流入口は、前記流路構造体の任意の側面における特定の領域に集中して配置され、前記複数の第１流路の前記第１流路第２流入口は、前記流路構造体の任意の側面における特定の領域に集中して配置され、前記複数の第２流路の前記第２流路第１流入口は、前記流路構造体の任意の側面における特定の領域に集中して配置され、前記複数の第２流路の前記第２流路第２流入口は、前記流路構造体の任意の側面における特定の領域に集中して配置されていてもよい。 The first flow path first introduction path has a first flow path first inlet that is a portion for receiving the first liquid, and the first flow path second introduction path is a location for receiving the second liquid. The second flow channel has a second inlet, and the second flow channel has a first inlet that receives the first liquid, and the second flow channel has a first inlet that receives the first liquid. The channel second introduction channel has a second channel second inlet that is a portion for receiving the second liquid, and the first channel first inlet of the plurality of first channels is the channel The first channel second inlets of the plurality of first channels are concentrated in a specific region on any side surface of the structure, and the first channel second inlets of the plurality of first channels are arranged in the specific region on any side surface of the channel structure The second flow channel first inlets of the plurality of second flow channels are concentratedly arranged in a specific region on any side surface of the flow channel structure, and the plurality of second flow channels are arranged in a concentrated manner. The second flow channel second inlets of the flow channel may be concentrated in a specific region on any side surface of the flow channel structure.

この構成によれば、複数の第１流路第１流入口が分散して配置されている場合に比べて複数の第１流路第１流入口に第１液体を分配するための装置の接続が容易になるとともに、複数の第１流路第２流入口が分散して配置されている場合に比べて複数の第１流路第２流入口に第２液体を分配するための装置の接続が容易になる。また、複数の第２流路第１流入口が分散して配置されている場合に比べて複数の第２流路第１流入口に第１液体を分配するための装置の接続が容易になるとともに、複数の第２流路第２流入口が分散して配置されている場合に比べて複数の第２流路第２流入口に第２液体を分配するための装置の接続が容易になる。 According to this configuration, the connection of the device for distributing the first liquid to the plurality of first flow path first inlets is more efficient than when the plurality of first flow path first inlets are arranged in a distributed manner. connection of the device for distributing the second liquid to the plurality of first channel second inlets compared to the case where the plurality of first channel second inlets are distributed becomes easier. In addition, it becomes easier to connect a device for distributing the first liquid to the plurality of first inlets of the second flow path compared to the case where the plurality of first inlets of the second flow path are arranged in a distributed manner. At the same time, it becomes easier to connect a device for distributing the second liquid to the plurality of second flow path second inlets compared to the case where the plurality of second flow path second inlets are arranged in a distributed manner. .

前記流路装置は、前記複数の第１流路の前記第１流路第１流入口を一括して覆うように前記流路構造体に取り付けられ、それらの第１流路第１流入口へ前記第１液体を分配する第１流路第１分配ヘッダと、前記複数の第１流路の前記第１流路第２流入口を一括して覆うように前記流路構造体に取り付けられ、それらの第１流路第２流入口へ前記第２液体を分配する第１流路第２分配ヘッダと、前記複数の第２流路の前記第２流路第１流入口を一括して覆うように前記流路構造体に取り付けられ、それらの第２流路第１流入口へ前記第１液体を分配する第２流路第１分配ヘッダと、前記複数の第２流路の前記第２流路第２流入口を一括して覆うように前記流路構造体に取り付けられ、それらの第２流路第２流入口へ前記第２液体を分配する第２流路第２分配ヘッダと、をさらに備えることが好ましい。 The flow path device is attached to the flow path structure so as to collectively cover the first flow path first inlets of the plurality of first flow paths. A first distribution header for distributing the first liquid and a first flow path second inlet of the plurality of first flow paths are attached to the flow path structure so as to collectively cover them, A first flow passage second distribution header for distributing the second liquid to the first flow passage second inlets, and collectively covering the second flow passage first inlets of the plurality of second flow passages. a second flow path first distribution header attached to the flow path structure to distribute the first liquid to the second flow path first inlets thereof; a second flow path second distribution header attached to the flow path structure so as to collectively cover the flow path second inlets and distributing the second liquid to the second flow path second inlets; is preferably further provided.

この構成によれば、複数の第１流路第１流入口にそれぞれ第１液体を供給する第１液体供給部を個別に接続し、複数の第１流路第２流入口にそれぞれ第２液体を供給する第２液体供給部を個別に接続する場合に比べて、簡素な構成で、各第１流路第１流入口へ第１液体を分配して供給できるとともに各第１流路第２流入口へ第２液体を分配して供給できる。また、同様に、複数の第２流路第１流入口にそれぞれ第１液体を供給する第１液体供給部を個別に接続し、複数の第２流路第２流入口にそれぞれ第２液体を供給する第２液体供給部を個別に接続する場合に比べて、簡素な構成で、各第２流路第１流入口へ第１液体を分配して供給できるとともに各第２流路第２流入口へ第２液体を分配して供給できる。 According to this configuration, the first liquid supply units that supply the first liquid are individually connected to the first inlets of the first flow paths, and the second liquid is supplied to the second inlets of the first flow paths. , the first liquid can be distributed and supplied to the first inlets of the first flow passages with a simpler configuration than the case where the second liquid supply portions that supply the second liquid supply portions for supplying the A second liquid can be distributed and supplied to the inlet. Similarly, a first liquid supply unit that supplies the first liquid to each of the first inlets of the second flow path is individually connected, and the second liquid is supplied to each of the second inlets of the second flow path. Compared to the case where the second liquid supply parts to be supplied are individually connected, the first liquid can be distributed and supplied to the first inlets of the respective second flow paths, and the second liquid can be supplied to the respective second flow paths with a simple configuration. A second liquid can be distributed to the inlet.

前記第１流路合流流路は、当該第１流路合流流路を流れた前記合流液体が流出する箇所である第１流路流出口を有し、前記第２流路合流流路は、当該第２流路合流流路を流れた前記合流液体が流出する箇所である第２流路流出口を有し、前記複数の第１流路の前記第１流路流出口は、前記流路構造体の任意の側面における特定の領域に集中して配置され、前記複数の第２流路の前記第２流路流出口は、前記流路構造体の任意の側面における特定の領域に集中して配置されていることが好ましい。 The first flow convergence channel has a first flow channel outlet, which is a portion from which the merged liquid that has flowed through the first flow convergence flow channel flows out, and the second flow convergence flow channel includes: a second flow channel outlet from which the merged liquid that has flowed through the second flow channel flows out, wherein the first flow channel outlet of the plurality of first flow channels is connected to the flow channel arranged concentrated in a specific region on any side surface of the structure, and the second flow channel outlets of the plurality of second flow channels are concentrated in a specific region on any side surface of the flow channel structure; are preferably arranged in the same direction.

前記流路装置は、前記複数の第１流路の前記第１流路流出口を一括して覆うように前記流路構造体に取り付けられ、それらの第１流路流出口から流出する前記合流液体を受けて回収する第１流路回収ヘッダと、前記複数の第２流路の前記第２流路流出口を一括して覆うように前記流路構造体に取り付けられ、それらの第２流路流出口から流出する前記合流液体を受けて回収する第２流路回収ヘッダと、をさらに備えることが好ましい。 The flow path device is attached to the flow path structure so as to collectively cover the first flow path outlets of the plurality of first flow paths, and the confluence flowing out from the first flow path outlets a first channel recovery header for receiving and recovering a liquid; It is preferable to further include a second channel recovery header that receives and recovers the merged liquid flowing out from the channel outlet.

この構成によれば、複数の第１流路流出口に個別に合流液体を回収するための回収部を接続する場合に比べて簡素な構成で、各第１流路流出口から流出する合流液体を回収できるとともに、複数の第２流路流出口に個別に合流液体を回収するための回収部を接続する場合に比べて簡素な構成で、各第２流路流出口から流出する合流液体を回収できる。 According to this configuration, the combined liquid flowing out from each of the first flow channel outlets is simpler than the case where the recovery unit for individually collecting the combined liquid is connected to the plurality of first flow channel outlets. can be recovered, and the combined liquid flowing out from each of the second channel outlets can be recovered with a simpler configuration compared to the case where recovery units for individually recovering the combined liquid are connected to the plurality of second channel outlets. can be recovered.

前記複数の第１流路のそれぞれの前記第１流路合流流路は、それらの第１流路合流流路における前記合流液体の単位時間当たりの流量が等しくなるように構成され、前記複数の第１流路のそれぞれの前記第２流路合流流路は、それらの第２流路合流流路における前記合流液体の単位時間当たりの流量が等しくなるように構成されていることが好ましい。 The first flow convergence flow paths of the plurality of first flow paths are configured such that the flow rates per unit time of the converged liquid in the first flow convergence flow paths are equal, and the plurality of It is preferable that each of the second flow passages of the first flow passages is configured such that the flow rate per unit time of the merged liquid in the second flow passages of the second flow passages is equal.

この構成によれば、各第１流路合流流路において合流液体が流れる条件を同じ条件に近づけることができるとともに、各第２流路合流流路において合流液体が流れる条件を同じ条件に近づけることができる。 According to this configuration, the conditions under which the combined liquid flows can be brought close to the same in each of the first combined channels, and the conditions under which the combined liquid flows can be brought closer to the same in each of the second combined channels. can be done.

前記複数の第１流路のそれぞれの前記第１流路合流流路は、その第１流路合流流路における前記合流液体の流れ方向に対して直交する方向の断面である第１合流流路断面を有し、それらの第１流路合流流路の前記第１合流流路断面の面積は、同じであり、前記複数の第２流路のそれぞれの前記第２流路合流流路は、その第２流路合流流路における前記合流液体の流れ方向に対して直交する方向の断面である第２合流流路断面を有し、それらの第２流路合流流路の前記第２合流流路断面の面積は、同じであることが好ましい。 The first confluence passage of each of the plurality of first confluence passages is a first confluence passage that is a cross section in a direction perpendicular to the flow direction of the merged liquid in the first confluence passage. each of the plurality of second flow passages has a cross-section, the first flow passage cross-section area of the first flow flow convergence flow passages is the same, and the second flow passage convergence flow passage of each of the plurality of second flow passages is having a second confluence channel cross section that is a cross section in a direction perpendicular to the flow direction of the merged liquid in the second confluence channel, and the second confluence flow of the second confluence channel It is preferable that the cross-sectional areas of the roads are the same.

この構成によれば、各第１流路合流流路において第１合流流路断面の面積の違いによる単位時間当たりの合流液体の流量の差が生じるのを防ぐことができるとともに、各第２流路合流流路において第２合流流路断面の面積の違いによる単位時間当たりの合流液体の流量の差が生じるのを防ぐことができる。 According to this configuration, it is possible to prevent a difference in the flow rate of the merged liquid per unit time due to the difference in the cross-sectional area of the first merged flow path in each of the first flow paths. It is possible to prevent a difference in the flow rate of the merged liquid per unit time from occurring due to the difference in the cross-sectional area of the second merged flow path in the merged flow path.

前記複数の第１流路のそれぞれの前記第１流路合流流路の前記第１合流流路断面の形状は、同じであり、前記複数の第２流路のそれぞれの前記第２流路合流流路の前記第２合流流路断面の形状は、同じであることが好ましい。 Each of the plurality of first flow paths has the same first flow path cross section, and each of the plurality of second flow paths merges with the second flow path. It is preferable that the cross sections of the second confluence flow paths of the flow paths have the same shape.

この構成によれば、各第１流路合流流路において第１合流流路断面の形状の違いによる単位時間当たりの合流液体の流量の差が生じるのを防ぐことができるとともに、各第２流路合流流路において第２合流流路断面の形状の違いによる単位時間当たりの合流液体の流量の差が生じるのを防ぐことができる。 According to this configuration, it is possible to prevent a difference in the flow rate of the merged liquid per unit time due to the difference in the shape of the cross section of the first merged flow path in each of the first flow paths. It is possible to prevent a difference in the flow rate of the merged liquid per unit time due to the difference in the shape of the cross section of the second merged flow path in the merged flow path.

前記複数の第１流路のそれぞれの前記第１流路合流流路の流路長は、同じであり、前記複数の第２流路のそれぞれの前記第２流路合流流路の流路長は、同じであることが好ましい。 The flow path length of the first flow converging flow path of each of the plurality of first flow paths is the same, and the flow path length of the second flow converging flow path of each of the plurality of second flow paths are preferably the same.

この構成によれば、各第１流路合流流路において流路長の差による合流液体の流通時間の差が生じるのを防ぐことができるとともに、各第２流路合流流路において流路長の差による合流液体の流通時間の差が生じるのを防ぐことができる。 According to this configuration, it is possible to prevent a difference in circulation time of the merged liquid from occurring due to a difference in flow path length in each of the first flow converging flow paths. It is possible to prevent a difference in circulation time of the merged liquid from occurring due to a difference in .

前記複数の第１流路のそれぞれの前記第１流路合流流路は、その第１流路合流流路において前記合流液体が流れる向きを変化させるように折れ曲がった箇所である少なくとも１つの第１合流流路曲折箇所を有し、それらの第１流路合流流路における前記第１合流流路曲折箇所の数は、同じであり、前記複数の第２流路のそれぞれの前記第２流路合流流路は、その第２流路合流流路において前記合流液体が流れる向きを変化させるように折れ曲がった箇所である少なくとも１つの第２合流流路曲折箇所を有し、それらの第２流路合流流路における前記第２合流流路曲折箇所の数は、同じであることが好ましい。 Each of the plurality of first flow paths has at least one first flow path where the first flow path is bent to change the flow direction of the merged liquid in the first flow path. The second flow path of each of the plurality of second flow paths has a confluence flow path bending point, the number of the first confluence flow path bending points in the first flow path confluence flow path is the same, and the second flow path of each of the plurality of second flow paths The merging flow path has at least one second merging flow path bending point that is a point at which the combined liquid changes the flow direction in the second flow path merging flow path, and those second flow paths It is preferable that the number of the second confluence channel bending points in the confluence channel is the same.

この構成によれば、各第１流路合流流路が少なくとも１つの第１合流流路曲折箇所を有することにより、各第１流路合流流路の全体が直線的に延びている場合に比べて各第１流路合流流路の流路長を拡大できるとともに、各第２流路合流流路が少なくとも１つの第２合流流路曲折箇所を有することにより、各第２流路合流流路の全体が直線的に延びている場合に比べて各第２流路合流流路の流路長を拡大できる。このため、各第１流路合流流路及び各第２流路合流流路における合流液体の流通時間をより大きく確保できるとともに、流路構造体の単位体積当たりにおける流路の容量をより増やすことができる。しかも、この構成では、各第１流路合流流路における第１合流流路曲折箇所の数が同じであることから、各第１流路合流流路において第１合流流路曲折箇所の数の差による単位時間当たりの合流液体の流量の差が生じるのを防ぐことができ、また、各第２流路合流流路における第２合流流路曲折箇所の数が同じであることから、各第２流路合流流路において第２合流流路曲折箇所の数の差による単位時間当たりの合流液体の流量の差が生じるのを防ぐことができる。 According to this configuration, since each first flow convergence flow path has at least one first convergence flow path bending portion, compared to the case where each first flow convergence flow path extends linearly as a whole, The length of each first flow convergence flow channel can be increased by using a As compared with the case where the whole of is extended linearly, the channel length of each second channel confluence channel can be increased. Therefore, it is possible to secure a longer flow time for the merged liquid in each of the first and second confluence channels, and to further increase the capacity of the channels per unit volume of the channel structure. can be done. Moreover, in this configuration, since the number of first merging flow path bending points in each first flow merging flow path is the same, the number of first merging flow path bending points It is possible to prevent a difference in the flow rate of the merged liquid per unit time from occurring due to the difference. It is possible to prevent a difference in the flow rate of the merged liquid per unit time from occurring due to the difference in the number of bends in the second merged flow path in the two-flow merged flow path.

以上のように、本発明によれば、流路構造体内における複数の合流部の配置によりそれらの合流部に繋がる合流流路の配置が制約を受ける場合であっても、流路構造体の単位体積当たりにおける流路の容量を増やすことが可能な流路装置が提供される。 As described above, according to the present invention, even when the arrangement of a plurality of confluences in the flow path structure imposes restrictions on the arrangement of the confluence flow paths connected to those confluences, the unit of the flow path structure A channel device is provided that can increase the capacity of the channel per unit volume.

本発明の一実施形態による流路装置の斜視図である。1 is a perspective view of a channel device according to one embodiment of the present invention; FIG. 本発明の一実施形態による流路装置の流路構造体の分解図である。1 is an exploded view of a channel structure of a channel device according to an embodiment of the present invention; FIG. 本発明の一実施形態における流路構造体において互いに積層された第１基板と第２基板をそれらの積層方向に沿って見た場合の第１流路と第２流路の配置を示す図である。FIG. 11 is a diagram showing the arrangement of the first flow channel and the second flow channel when the first substrate and the second substrate laminated to each other in the flow channel structure according to the embodiment of the present invention are viewed along the stacking direction; be. 本発明の一実施形態において流路構造体を構成する第１基板の平面図であってその第１基板表面を示す図である。FIG. 2 is a plan view of the first substrate that constitutes the channel structure in one embodiment of the present invention, showing the surface of the first substrate. 本発明の一実施形態において流路構造体を構成する第２基板の平面図であってその第２基板表面を示す図である。FIG. 4 is a plan view of the second substrate that constitutes the flow channel structure in one embodiment of the present invention, showing the surface of the second substrate. 互いに積層された第１基板及び第２基板の図３中のＶＩ－ＶＩ位置における断面図である。FIG. 4 is a cross-sectional view of the first substrate and the second substrate laminated to each other at the position VI-VI in FIG. 3; 互いに積層された第１基板及び第２基板の図３中のＶＩＩ－ＶＩＩ位置における断面図である。FIG. 4 is a cross-sectional view of the first substrate and the second substrate laminated to each other at the VII-VII position in FIG. 3; 本発明の比較例における流路構造体において互いに積層された第１基板と第２基板をそれらの積層方向に沿って見た場合の第１流路と第２流路の配置を示す図である。FIG. 6 is a diagram showing the arrangement of the first flow channel and the second flow channel when the first substrate and the second substrate laminated to each other in the flow channel structure in the comparative example of the present invention are viewed along the stacking direction. . 前記比較例において流路構造体を構成する第１基板の平面図であってその第１基板表面を示す図である。FIG. 10 is a plan view of the first substrate that constitutes the flow path structure in the comparative example, showing the surface of the first substrate. 前記比較例において流路構造体を構成する第２基板の平面図であってその第２基板表面を示す図である。FIG. 4 is a plan view of a second substrate that constitutes the flow path structure in the comparative example, showing the surface of the second substrate. 本発明の第１変形例における流路構造体において互いに積層された第１基板と第２基板をそれらの積層方向に沿って見た場合の第１流路と第２流路の配置を示す図である。FIG. 11 is a diagram showing the arrangement of the first flow channel and the second flow channel when the first substrate and the second substrate laminated to each other in the flow channel structure according to the first modification of the present invention are viewed along the stacking direction thereof; is. 前記第１変形例において流路構造体を構成する第１基板の平面図であってその第１基板表面を示す図である。It is a top view of the 1st board|substrate which comprises a flow-path structure in the said 1st modification, and is a figure which shows the 1st board|substrate surface. 前記第１変形例において流路構造体を構成する第２基板の平面図であってその第２基板表面を示す図である。It is a top view of the 2nd board|substrate which comprises a flow-path structure in the said 1st modification, and is a figure which shows the 2nd board|substrate surface. 本発明の第２変形例による流路構造体の分解図である。FIG. 11 is an exploded view of a channel structure according to a second modification of the invention; 前記第２変形例において第１基板と第２基板の積層方向における複数の第１基板のうちの２枚目の第１基板の平面図であってその第１基板表面を示す図である。FIG. 10 is a plan view of a second first substrate among the plurality of first substrates in the stacking direction of the first substrates and the second substrates in the second modification, showing the surface of the first substrate;

以下、本発明の実施形態について図面を参照して説明する。 BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described with reference to the drawings.

図１は、本発明の一実施形態による流路装置１の斜視図である。本実施形態による流路装置１は、第１液体と第２液体とを合流させて流通させる複数の第１流路２１（図３参照）及び複数の第２流路２２（図３参照）を備える装置である。各第１流路２１及び各第２流路２２は、微小な流路径を有するマイクロチャネルである。この流路装置１は、第１液体と第２液体とを合流させて相互作用させる各種処理のために用いられる。例えば、当該流路装置１は、連続相である第１液体と分散相である第２液体とを合流させてエマルションを生成する処理、互いに化学反応を生じ得る第１液体と第２液体とを合流させてそれらの液体同士の化学反応を生じさせる処理、もしくは、抽出対象物質を含有する第１液体と抽出剤である第２液体とを合流させて第１液体から抽出対象物質を抽出して第２液体中へ移動させる抽出処理などに用いられる。 FIG. 1 is a perspective view of a channel device 1 according to one embodiment of the present invention. The flow path device 1 according to the present embodiment includes a plurality of first flow paths 21 (see FIG. 3) and a plurality of second flow paths 22 (see FIG. 3) for merging and circulating the first liquid and the second liquid. It is a device provided. Each first flow path 21 and each second flow path 22 are microchannels having minute diameters. This channel device 1 is used for various processes in which the first liquid and the second liquid are merged and interacted with each other. For example, the flow channel device 1 performs a process of combining a first liquid that is a continuous phase and a second liquid that is a dispersed phase to generate an emulsion, A process of causing a chemical reaction between these liquids by joining them together, or a process of joining a first liquid containing a substance to be extracted and a second liquid as an extractant to extract the substance to be extracted from the first liquid. It is used for extraction processing to move into the second liquid.

前記複数の第１流路２１のそれぞれは、図３に示すように、第１流路第１導入路２４と、第１流路第２導入路２６と、第１流路合流部２８と、第１流路合流流路３０と、を有する。 As shown in FIG. 3, each of the plurality of first flow paths 21 includes a first flow path first introduction path 24, a first flow path second introduction path 26, a first flow path junction 28, and a first flow path confluence flow path 30 .

第１流路第１導入路２４は、第１液体が分配されて導入される流路部分である。この第１流路第１導入路２４は、その上流側の端部に位置していて第１液体が流入する箇所である第１流路第１流入口２４ａを有する。 First channel The first introduction channel 24 is a channel portion through which the first liquid is distributed and introduced. The first flow path first introduction path 24 has a first flow path first inlet 24a which is located at the upstream end thereof and is a portion into which the first liquid flows.

第１流路第２導入路２６は、第２液体が分配されて導入される流路部分である。この第１流路第２導入路２６は、その上流側の端部に位置していて第２液体が流入する箇所である第１流路第２流入口２６ａを有する。 The first channel second introduction channel 26 is a channel portion through which the second liquid is distributed and introduced. The first channel second introduction channel 26 has a first channel second inlet 26a located at the upstream end thereof and into which the second liquid flows.

第１流路合流部２８は、第１流路第１導入路２４を流れた第１液体と第１流路第２導入路２６を流れた第２液体とを合流させる箇所である。第１流路合流部２８は、第１流路第１導入路２４の下流側の端部から第１液体が流入するとともに第１流路第２導入路２６の下流側の端部から第２液体が流入するようにそれらの下流側の端部に繋がっている。 The first flow path confluence portion 28 is a portion where the first liquid that has flowed through the first flow path first introduction path 24 and the second liquid that has flowed through the first flow path second introduction path 26 are merged. The first flow path confluence portion 28 receives the first liquid from the downstream end of the first flow path first introduction path 24 and the second flow path from the downstream end of the first flow path second introduction path 26 . They are connected to their downstream ends for liquid inflow.

第１流路合流流路３０は、第１流路合流部２８で合流した第１液体と第２液体との合流液体が流れる流路部分である。この第１流路合流流路３０は、第１流路合流部２８の下流側に繋がっている。この第１流路合流流路３０において、合流液体が下流側へ流れながらその合流液体中の第１液体と第２液体との間での処理が行われる。第１流路合流流路３０は、その下流側の端部に位置していて合流液体が流出する箇所である第１流路流出口３０ａを有する。 The first flow path confluence flow path 30 is a flow path portion through which the merged liquid of the first liquid and the second liquid that are merged at the first flow path confluence portion 28 flows. The first flow path confluence flow path 30 is connected to the downstream side of the first flow path confluence portion 28 . In the first flow convergence flow channel 30, the first liquid and the second liquid in the converged liquid are processed while the converged liquid flows downstream. The first flow path confluence flow path 30 has a first flow path outlet 30a, which is located at the downstream end thereof and is a portion from which the merged liquid flows out.

また、前記複数の第２流路２２のそれぞれは、図３に示すように、第２流路第１導入路３２と、第２流路第２導入路３４と、第２流路合流部３６と、第２流路合流流路３８と、を有する。 3, each of the plurality of second flow paths 22 includes a second flow path first introduction path 32, a second flow path second introduction path 34, and a second flow path joining portion 36. , and a second flow path confluence flow path 38 .

第２流路第１導入路３２は、第１液体が分配されて導入される流路部分である。この第２流路第１導入路３２は、その上流側の端部に位置していて第１液体が流入する箇所である第２流路第１流入口３２ａを有する。 The second channel The first introduction channel 32 is a channel portion through which the first liquid is distributed and introduced. The second flow path first introduction path 32 has a second flow path first inlet 32a, which is positioned at the upstream end thereof and is a portion into which the first liquid flows.

第２流路第２導入路３４は、第２液体が分配されて導入される流路部分である。この第２流路第２導入路３４は、その上流側の端部に位置していて第２液体が流入する箇所である第２流路第２流入口３４ａを有する。 Second flow path The second introduction path 34 is a flow path portion through which the second liquid is distributed and introduced. The second flow path second introduction path 34 has a second flow path second inlet 34a which is positioned at the upstream end thereof and is a portion into which the second liquid flows.

第２流路合流部３６は、第２流路第１導入路３２を流れた第１液体と第２流路第２導入路３４を流れた第２液体とを合流させる箇所である。第２流路合流部３６は、第２流路第１導入路３２の下流側の端部から第１液体が流入するとともに第２流路第２導入路３４の下流側の端部から第２液体が流入するようにそれらの下流側の端部に繋がっている。 The second flow path confluence portion 36 is a portion where the first liquid that has flowed through the second flow path first introduction path 32 and the second liquid that has flowed through the second flow path second introduction path 34 are merged. The second flow path confluence portion 36 receives the first liquid from the downstream end of the second flow path first introduction path 32 and the second flow path from the downstream end of the second flow path second introduction path 34 . They are connected to their downstream ends for liquid inflow.

第２流路合流流路３８は、第２流路合流部３６で合流した第１液体と第２液体との合流液体が流れる流路部分である。この第２流路合流流路３８は、第２流路合流部３６の下流側に繋がっている。この第２流路合流流路３８において、合流液体が下流側へ流れながらその合流液体中の第１液体と第２液体との間での処理が行われる。第２流路合流流路３８は、その下流側の端部に位置していて合流液体が流出する箇所である第２流路流出口３８ａを有する。 The second flow path confluence flow path 38 is a flow path portion through which the merged liquid of the first liquid and the second liquid merged at the second flow path confluence portion 36 flows. The second flow path confluence flow path 38 is connected to the downstream side of the second flow path confluence portion 36 . In the second flow convergence flow channel 38, the first liquid and the second liquid in the converged liquid are processed while the converged liquid flows downstream. The second flow path confluence flow path 38 has a second flow path outlet 38a which is positioned at the downstream end thereof and is a portion from which the merged liquid flows out.

そして、本実施形態による流路装置１は、図１に示すように、流路構造体２と、第１流路第１分配ヘッダ４と、第１流路第２分配ヘッダ６と、第１流路回収ヘッダ８と、第２流路第１分配ヘッダ１０と、第２流路第２分配ヘッダ１２と、第２流路回収ヘッダ１４と、を有する。 As shown in FIG. 1, the flow path device 1 according to the present embodiment includes a flow path structure 2, a first flow path first distribution header 4, a first flow path second distribution header 6, and a first It has a channel recovery header 8 , a second channel first distribution header 10 , a second channel second distribution header 12 , and a second channel recovery header 14 .

流路構造体２は、その内部に前記複数の第１流路２１及び前記複数の第２流路２２が設けられたブロック状（直方体状）の構造体である。この流路構造体２は、互いに積層された、複数の第１基板１６、複数の第２基板１８、及び、封止基板１９を有する。 The channel structure 2 is a block-shaped (rectangular parallelepiped) structure in which the plurality of first channels 21 and the plurality of second channels 22 are provided. The flow channel structure 2 has a plurality of first substrates 16, a plurality of second substrates 18, and a sealing substrate 19 which are laminated together.

第１基板１６と第２基板１８は、図１及び図２に示すように、それらの板厚方向に沿う方向において交互に積層されている。その積層方向における一端に配置された第１基板１６の上に封止基板１９が積層されている。それらの積層された複数の第１基板１６、複数の第２基板１８、及び、封止基板１９は、それらの基板の互いに接触する面同士が密着されることによって一体化され、その積層されて一体化された複数の第１基板１６、複数の第２基板１８、及び、封止基板１９によって流路構造体２が形成されている。 As shown in FIGS. 1 and 2, the first substrate 16 and the second substrate 18 are alternately laminated in the thickness direction thereof. A sealing substrate 19 is laminated on the first substrate 16 arranged at one end in the lamination direction. The laminated plurality of first substrates 16, the plurality of second substrates 18, and the sealing substrate 19 are integrated by contacting the mutually contacting surfaces of the substrates, and are laminated. The plurality of first substrates 16 , the plurality of second substrates 18 , and the sealing substrate 19 integrated together form the flow path structure 2 .

第１基板１６、複数の第２基板１８、及び、封止基板１９の互いに接触する面同士を密着させる手法としては、種々の手法が採用される。例えば、前記面同士を拡散接合により密着させる手法、前記面同士を焼結により接合させて密着させる手法、前記面同士を接着剤により接着して密着させる手法、もしくは、流路装置１が、積層された複数の第１基板１６、複数の第２基板１８及び封止基板１９をその積層方向における両側から押圧する図略の押圧具を有していて、その押圧により前記面同士を密着させる手法などが採用される。なお、押圧によって前記面同士を密着させる場合には、それらの面の周辺部に配置されたガスケットを挟み込んだ状態でそれらの面同士を密着させてそれらの面同士の間における封止性を高めるようにしてもよい。 Various methods are employed as a method for bringing the surfaces of the first substrate 16, the plurality of second substrates 18, and the sealing substrate 19, which are in contact with each other, into close contact with each other. For example, a method of bonding the surfaces together by diffusion bonding, a method of bonding the surfaces together by sintering them, a method of bonding the surfaces together with an adhesive, or a method of bonding the surfaces together with an adhesive; A pressing tool (not shown) is provided for pressing the plurality of first substrates 16, the plurality of second substrates 18, and the sealing substrate 19 from both sides in the stacking direction, and the surfaces are brought into close contact with each other by the pressing. etc. are adopted. In addition, when the surfaces are brought into close contact with each other by pressing, the surfaces are brought into close contact with each other with gaskets arranged on the periphery of the surfaces sandwiched between them, thereby enhancing the sealing performance between the surfaces. You may do so.

各第１基板１６には、複数の第１流路２１の第１流路第１導入路２４、第１流路第２導入路２６、及び、第１流路合流部２８と、複数の第２流路２２の第２流路合流部３６及び第２流路合流流路３８とが形成される。 Each of the first substrates 16 includes a first channel first introduction channel 24, a first channel second introduction channel 26, and a first channel junction 28 of the plurality of first channels 21, and a plurality of first A second flow path confluence portion 36 and a second flow path confluence flow path 38 of the two flow paths 22 are formed.

具体的に、各第１基板１６（図４参照）は、その第１基板１６の板厚方向に沿う方向から見て矩形状をなしている。各第１基板１６は、その第１基板１６の板厚方向に沿う方向において一方側を向く面である第１基板表面１６ａと、その第１基板表面１６ａと反対側を向く面である第１基板裏面１６ｂ（図６及び図７参照）と、を有する。各第１基板表面１６ａ（図４参照）には、複数の第１流路第１導入路２４を構成する複数の第１流路第１導入溝２４ｂと、複数の第１流路第２導入路２６を構成する複数の第１流路第２導入溝２６ｂと、複数の第２流路合流流路３８を構成する複数の第２流路合流溝３８ｂとが形成されている。また、各第１基板１６には、複数の第１流路合流部２８を構成する複数の第１流路合流部貫通孔２８ｂ（図４及び図６参照）と、複数の第２流路合流部３６を構成する複数の第２流路合流部貫通孔３６ｂ（図４及び図７参照）とが、第１基板表面１６ａから第１基板裏面へ当該第１基板１６を板厚方向に貫通するように形成されている。 Specifically, each first substrate 16 (see FIG. 4) has a rectangular shape when viewed from a direction along the plate thickness direction of the first substrate 16 . Each first substrate 16 has a first substrate surface 16a that faces one side in the direction along the plate thickness direction of the first substrate 16, and a first substrate surface 16a that faces the opposite side to the first substrate surface 16a. and a substrate rear surface 16b (see FIGS. 6 and 7). Each first substrate surface 16a (see FIG. 4) has a plurality of first flow path first introduction grooves 24b constituting a plurality of first flow path first introduction paths 24 and a plurality of first flow path second introduction grooves 24b. A plurality of first flow path second introduction grooves 26b that form the path 26 and a plurality of second flow path joining grooves 38b that form a plurality of second flow path joining grooves 38 are formed. Each first substrate 16 has a plurality of first flow path junction through-holes 28b (see FIGS. 4 and 6) constituting a plurality of first flow path junctions 28, and a plurality of second flow path junctions. A plurality of second passage merging portion through-holes 36b (see FIGS. 4 and 7) constituting the portion 36 pass through the first substrate 16 in the plate thickness direction from the first substrate front surface 16a to the first substrate rear surface. is formed as

複数の第１流路第１導入溝２４ｂは、矩形状の第１基板表面１６ａの一辺からその一辺に直交する方向に直線的に延びてその方向における第１基板１６の中央部に至っている。これらの第１流路第１導入溝２４ｂは、互いに平行に隣接して並ぶように配置されている。 The plurality of first flow path first introduction grooves 24b linearly extend from one side of the rectangular first substrate surface 16a in a direction orthogonal to that side to reach the central portion of the first substrate 16 in that direction. These first flow path first introduction grooves 24b are arranged so as to be adjacent to each other in parallel.

複数の第１流路第２導入溝２６ｂは、第１基板表面１６ａの前記一辺に対して反対側の辺からその辺に直交する方向に直線的に延びてその方向における第１基板１６の中央部に至っている。これらの第１流路第２導入溝２６ｂは、互いに平行に隣接して並ぶように配置されている。また、各第１流路第２導入溝２６ｂは、対応する前記第１流路第１導入溝２４ｂの延長線上に配置されてその第１流路第１導入溝２４ｂと同方向に延びている。前記複数の第１流路第１導入溝２４ｂ及び当該複数の第１流路第２導入溝２６ｂは、それらの延び方向に対して直交する方向における第１基板表面１６ａの半分の領域に配置されている。 The plurality of first channel second introduction grooves 26b linearly extend in a direction perpendicular to the side of the first substrate surface 16a from the opposite side of the one side of the first substrate surface 16a. has reached the department. These first channel second introduction grooves 26b are arranged so as to be adjacent to each other in parallel. Each first flow path second introduction groove 26b is arranged on an extension line of the corresponding first flow path first introduction groove 24b and extends in the same direction as the first flow path first introduction groove 24b. . The plurality of first flow passage first introduction grooves 24b and the plurality of first flow passage second introduction grooves 26b are arranged in a half region of the first substrate surface 16a in the direction orthogonal to their extending direction. ing.

前記複数の第１流路合流部貫通孔２８ｂは、それぞれ、前記複数の第１流路第１導入溝２４ｂの各々と前記複数の第１流路第２導入溝２６ｂの対応するものとが繋がる箇所にそれぞれ設けられている。各第１流路合流部貫通孔２８ｂは、丸孔であり、第１流路第１導入路２４の延び方向に直交する方向の幅、及び、第１流路第２導入路２６の延び方向に直交する方向の幅と等しい孔径を有する。換言すれば、各第１流路合流部貫通孔２８ｂは、第１流路第１導入溝２４ｂの延び方向に直交する方向の幅、及び、第１流路第２導入溝２６ｂの延び方向に直交する方向の幅と等しい孔径を有する。 Each of the plurality of first flow path first introduction grooves 24b and the corresponding one of the plurality of first flow path second introduction grooves 26b are respectively connected to the plurality of first flow path confluence portion through holes 28b. provided at each location. Each first flow path confluence portion through-hole 28b is a round hole, and has a width in a direction perpendicular to the extending direction of the first flow path first introduction path 24 and an extension direction of the first flow path second introduction path 26. has a pore diameter equal to the width in the direction perpendicular to the In other words, each first flow path confluence through-hole 28b has a width in a direction perpendicular to the extending direction of the first flow path first introduction groove 24b and a width in the extending direction of the first flow path second introduction groove 26b. It has a pore diameter equal to the width in the orthogonal direction.

前記複数の第２流路合流溝３８ｂは、第１基板表面１６ａのうち前記複数の第１流路第１導入溝２４ｂ及び前記複数の第１流路第２導入溝２６ｂが配置された半分の領域以外の残り半分の領域に配置されている。これらの第２流路合流溝３８ｂは、前記第１流路第１導入溝２４ｂの一端と前記第１流路第２導入溝２６ｂの一端とがそれぞれ設けられた第１基板表面１６ａの二辺と直交する残り二辺のうち前記第１流路第１導入溝２４ｂ及び前記第１流路第２導入溝２６ｂが配置されていない側の辺から前記第１流路第１導入溝２４ｂ及び前記第１流路第２導入溝２６ｂの延び方向に対して斜めに延びている。これらの第２流路合流溝３８ｂは、互いに平行に隣接して並ぶように配置されている。 The plurality of second flow path merging grooves 38b are half of the first substrate surface 16a where the plurality of first flow path first introduction grooves 24b and the plurality of first flow path second introduction grooves 26b are arranged. It is placed in the remaining half of the area other than the area. These second flow path joining grooves 38b are formed on two sides of the first substrate surface 16a where one end of the first flow path first introduction groove 24b and one end of the first flow path second introduction groove 26b are respectively provided. From the side on which the first flow path first introduction groove 24b and the first flow path second introduction groove 26b are not arranged, the first flow path first introduction groove 24b and the The first channel extends obliquely to the extending direction of the second introduction groove 26b. These second flow path merging grooves 38b are arranged so as to be adjacent to each other in parallel.

前記複数の第２流路合流部貫通孔３６ｂは、それぞれ、第１基板１６のうち前記複数の第２流路合流溝３８ｂの端部に対応する箇所に設けられている。各第２流路合流部貫通孔３６ｂは、丸孔であり、第２流路第１導入路３２の延び方向に直交する方向の幅、及び、第２流路第２導入路３４の延び方向に直交する方向の幅と等しい孔径を有する。換言すれば、各第２流路合流部貫通孔３６ｂは、後述の第２流路第１導入溝３２ｂの延び方向に直交する方向の幅、及び、後述の第２流路第２導入溝３４ｂの延び方向に直交する方向の幅と等しい孔径を有する。 The plurality of second flow path merging portion through-holes 36b are provided on the first substrate 16 at positions corresponding to the ends of the plurality of second flow path merging grooves 38b. Each second flow path confluence portion through-hole 36b is a round hole, and has a width in a direction perpendicular to the extending direction of the second flow path first introduction path 32 and an extension direction of the second flow path second introduction path 34. has a pore diameter equal to the width in the direction perpendicular to the In other words, each second flow passage confluence portion through-hole 36b has a width in a direction perpendicular to the extending direction of a second flow passage first introduction groove 32b described later and a second flow passage second introduction groove 34b described later. It has a hole diameter equal to the width in the direction orthogonal to the extension direction of the.

複数の第１基板１６と複数の第２基板１８からなる積層体のうちその積層方向における一端に配置された第１基板１６の第１基板表面１６ａには、封止基板１９が密着される。この封止基板１９によって、前記一端に配置された第１基板１６の第１基板表面１６ａに形成された複数の第１流路第１導入溝２４ｂの開口、複数の第１流路第２導入溝２６ｂの開口、及び、複数の第２流路合流溝３８ｂの開口は、封止されている。また、前記積層体のうち前記積層方向における一端以外に配置された各第１基板１６の第１基板表面１６ａに形成された複数の第１流路第１導入溝２４ｂの開口、複数の第１流路第２導入溝２６ｂの開口、及び、複数の第２流路合流溝３８ｂの開口は、その各第１基板表面１６ａに密着した第２基板１８によって封止されている。 A sealing substrate 19 is adhered to the first substrate surface 16a of the first substrate 16 arranged at one end in the stacking direction of the laminate composed of the plurality of first substrates 16 and the plurality of second substrates 18 . By this sealing substrate 19, openings of a plurality of first channel first introduction grooves 24b formed on the first substrate surface 16a of the first substrate 16 arranged at the one end, and a plurality of first channel second introduction grooves 24b are formed. The opening of the groove 26b and the openings of the plurality of second flow path confluence grooves 38b are sealed. Further, openings of a plurality of first flow path first introduction grooves 24b formed in the first substrate surface 16a of each first substrate 16 arranged in the laminate other than one end in the lamination direction, and a plurality of first introduction grooves 24b The opening of the channel second introduction groove 26b and the openings of the plurality of second channel joining grooves 38b are sealed by the second substrate 18 in close contact with the respective first substrate surfaces 16a.

以上のように各第１基板表面１６ａにおける各々の開口が封止された複数の第１流路第１導入溝２４ｂによって各第１基板表面１６ａに沿って並ぶ複数の第１流路第１導入路２４が形成され、同様に各第１基板表面１６ａにおける各々の開口が封止された複数の第１流路第２導入溝２６ｂによって各第１基板表面１６ａに沿って並ぶ複数の第１流路第２導入路２６が形成されている。また、各第１基板１６に形成された複数の第１流路合流部貫通孔２８ｂによって、その第１基板１６に形成された複数の第１流路第１導入路２４と複数の第１流路第２導入路２６とに繋がる複数の第１流路合流部２８が形成されている。 As described above, the plurality of first flow path first introduction grooves 24b in which the openings in each first substrate surface 16a are sealed are arranged along each first substrate surface 16a. A plurality of first flow paths 24 are formed and similarly aligned along each first substrate surface 16a by a plurality of first flow path second introduction grooves 26b each opening of which is sealed in each first substrate surface 16a. A second introduction path 26 is formed. Further, the plurality of first flow path first introduction paths 24 formed in the first substrate 16 and the plurality of first flow paths 24 and the plurality of first flow paths 24 formed in the first substrate 16 are separated by the plurality of first flow passage junction through-holes 28b formed in each first substrate 16 . A plurality of first channel confluence portions 28 connected to the channel second introduction channel 26 are formed.

また、各第１基板表面１６ａにおける各々の開口が封止された複数の第２流路合流溝３８ｂによって、各第１基板表面１６ａに沿って並ぶ複数の第２流路合流流路３８が形成されている。また、各第１基板１６に形成された複数の第２流路合流部貫通孔３６ｂによって、その第１基板１６に形成された複数の第２流路合流流路３８の上流側の端部に繋がる複数の第２流路合流部３６が形成されている。このように形成された複数の第２流路合流流路３８は、前記積層方向に沿う方向から見て、前記複数の第１流路第１導入路２４、前記複数の第１流路第２導入路２６、及び、前記複数の第１流路合流部２８が存在しない領域、すなわち、前記複数の第１流路第１導入路２４、前記複数の第１流路第２導入路２６、及び、前記複数の第１流路合流部２８が配置された領域以外の領域に配置されている。 A plurality of second flow path confluence channels 38 arranged along each first substrate surface 16a are formed by a plurality of second flow path confluence grooves 38b each having an opening in each first substrate surface 16a sealed. It is In addition, the plurality of second flow path confluence portion through holes 36b formed in each first substrate 16 allow the upstream ends of the plurality of second flow path confluence flow paths 38 formed in the first substrate 16 to A plurality of connected second flow path confluence portions 36 are formed. The plurality of second flow passages confluence flow passages 38 formed in this way are the plurality of first flow passage first introduction passages 24 and the plurality of first flow passages second flow passages 24 when viewed from the direction along the stacking direction. A region where the introduction path 26 and the plurality of first flow path confluence portions 28 do not exist, that is, the plurality of first flow path first introduction paths 24, the plurality of first flow path second introduction paths 26, and , are arranged in an area other than the area where the plurality of first flow path confluence portions 28 are arranged.

各第１基板表面１６ａに沿って配列された複数の第２流路合流流路３８は、それらの第２流路合流流路３８における前記合流液体の単位時間当たりの流量が等しくなるように構成されている。よって、流路構造体２内に設けられた全ての第２流路２２のそれぞれの第２流路合流流路３８は、それらの第２流路合流流路３８における前記合流液体の単位時間当たりの流量が等しくなるように構成されている。 The plurality of second flow convergence channels 38 arranged along each first substrate surface 16a are configured so that the flow rate per unit time of the converged liquid in the second flow convergence flow channels 38 is equal. It is Therefore, each of the second flow path convergence flow paths 38 of all the second flow paths 22 provided in the flow path structure 2 can be are configured so that the flow rates of

また、この各第１基板表面１６ａに沿って配列された複数の第２流路合流流路３８のそれぞれは、その第２流路合流流路３８における前記合流液体の流れ方向に対して直交する方向の断面を有する。この各第２流路合流流路３８の断面の形状は、同じであり、その結果、当該各第２流路合流流路３８の断面の面積は、同じになっている。よって、流路構造体２内に設けられた全ての第２流路２２のそれぞれの第２流路合流流路３８の前記合流液体の流れ方向に対して直交する方向の断面の形状は同じであり、その断面の面積は同じになっている。また、各第１基板表面１６ａに沿って配列された複数の第２流路合流流路３８の流路長は、同じである。よって、流路構造体２内に設けられた全ての第２流路２２のそれぞれの第２流路合流流路３８の流路長は、同じになっている。 In addition, each of the plurality of second flow convergence flow channels 38 arranged along each first substrate surface 16a is perpendicular to the flow direction of the converged liquid in the second flow convergence flow channel 38. It has a cross-section of the direction. The cross-sectional shape of each of the second flow converging flow paths 38 is the same, and as a result, the cross-sectional area of each of the second flow converging flow paths 38 is the same. Therefore, the shape of the cross section in the direction perpendicular to the flow direction of the merged liquid of each of the second flow confluence flow paths 38 of all the second flow paths 22 provided in the flow path structure 2 is the same. and the cross-sectional areas are the same. Further, the channel lengths of the plurality of second channel confluence channels 38 arranged along each first substrate surface 16a are the same. Therefore, the channel lengths of the second channel merging channels 38 of all the second channels 22 provided in the channel structure 2 are the same.

各第２基板１８には、複数の第１流路２１の第１流路合流流路３０と、複数の第２流路２２の第２流路第１導入路３２及び第２流路第２導入路３４とが形成される。 Each of the second substrates 18 has a first flow path confluence flow path 30 of the plurality of first flow paths 21 , a second flow path first introduction path 32 of the plurality of second flow paths 22 and a second flow path second flow path 30 . An introduction path 34 is formed.

具体的に、各第２基板１８（図５参照）は、その第２基板１８の板厚方向に沿う方向から見て第１基板１６と同様の矩形状をなしている。各第２基板１８は、その第２基板１８の板厚方向に沿う方向において一方側を向く面であってその第２基板１８上に積層された第１基板１６の第１基板裏面１６ｂ（図６参照）に密着した面である第２基板表面１８ａと、その第２基板表面１８ａと反対側を向く面である第２基板裏面（図６参照）と、を有する。各第２基板表面１８ａ（図５参照）には、複数の第２流路第１導入路３２を構成する複数の第２流路第１導入溝３２ｂと、複数の第２流路第２導入路３４を構成する複数の第２流路第２導入溝３４ｂと、複数の第１流路合流流路３０を構成する複数の第１流路合流溝３０ｂとが形成されている。 Specifically, each second substrate 18 (see FIG. 5) has a rectangular shape similar to that of the first substrate 16 when viewed from the direction along the plate thickness direction of the second substrate 18 . Each second substrate 18 has a first substrate rear surface 16b (see FIG. 6), and a second substrate rear surface (see FIG. 6), which is a surface facing away from the second substrate surface 18a. Each second substrate surface 18a (see FIG. 5) has a plurality of second flow path first introduction grooves 32b constituting a plurality of second flow path first introduction paths 32, and a plurality of second flow path second introduction grooves 32b. A plurality of second flow channel second introduction grooves 34b forming the channel 34 and a plurality of first flow channel joining grooves 30b forming the plurality of first flow channel joining channels 30 are formed.

前記複数の第２流路第１導入溝３２ｂは、矩形状の第２基板表面１８ａの一辺からその一辺に直交する方向に直線的に延びてその方向における第２基板１８の中央部に至っている。これらの第２流路第１導入溝３２ｂは、互いに平行に隣接して並ぶように配置されている。 The plurality of second channel first introduction grooves 32b linearly extend from one side of the rectangular second substrate surface 18a in a direction orthogonal to that side to reach the central portion of the second substrate 18 in that direction. . These second flow channel first introduction grooves 32b are arranged so as to be adjacent to each other in parallel.

前記複数の第２流路第２導入溝３４ｂは、第２基板表面１８ａの前記一辺に対して反対側の辺からその辺に直交する方向に直線的に延びてその方向における第２基板１８の中央部に至っている。これらの第２流路第２導入溝３４ｂは、互いに平行に隣接して並ぶように配置されている。また、各第２流路第２導入溝３４ｂは、対応する前記第２流路第１導入溝３２ｂの延長線上に配置されてその第２流路第１導入溝３２ｂと同方向に延びている。前記複数の第２流路第１導入溝３２ｂ及び当該複数の第２流路第２導入溝３４ｂは、それらの延び方向に対して直交する方向における第２基板表面１８ａの半分の領域に配置されている。また、前記積層方向から見て各第２流路第１導入溝３２ｂ及び各第２流路第２導入溝３４ｂは、各第１流路第１導入溝２４ｂ及び各第１流路第２導入溝２６ｂと直交する方向に延びている。 The plurality of second flow path second introduction grooves 34b linearly extend in a direction perpendicular to the side of the second substrate surface 18a opposite to the one side of the second substrate surface 18a to extend the second substrate 18 in that direction. reaching the central part. These second flow channel second introduction grooves 34b are arranged so as to be adjacent to each other in parallel. Each second flow path second introduction groove 34b is arranged on an extension line of the corresponding second flow path first introduction groove 32b and extends in the same direction as the second flow path first introduction groove 32b. . The plurality of second flow path first introduction grooves 32b and the plurality of second flow path second introduction grooves 34b are arranged in a half region of the second substrate surface 18a in the direction orthogonal to their extending direction. ing. In addition, when viewed from the stacking direction, each second flow path first introduction groove 32b and each second flow path second introduction groove 34b correspond to each first flow path first introduction groove 24b and each first flow path second introduction groove 24b. It extends in a direction perpendicular to the groove 26b.

前記複数の第１流路合流溝３０ｂは、第２基板表面１８ａのうち前記複数の第２流路第１導入溝３２ｂ及び前記複数の第２流路第２導入溝３４ｂが配置された半分の領域以外の残り半分の領域に配置されている。これらの第１流路合流溝３０ｂは、前記第２流路第１導入溝３２ｂの一端と前記第２流路第２導入溝３４ｂの一端とがそれぞれ設けられた第２基板表面１８ａの二辺と直交する残り二辺のうち前記第２流路第１導入溝３２ｂ及び前記第２流路第２導入溝３４ｂが配置されていない側の辺から前記第２流路第１導入溝３２ｂ及び前記第２流路第２導入溝３４ｂの延び方向に対して斜めに延びている。これらの第１流路合流溝３０ｂは、互いに平行に隣接して並ぶように配置されている。 The plurality of first flow path merging grooves 30b are half of the second substrate surface 18a where the plurality of second flow path first introduction grooves 32b and the plurality of second flow path second introduction grooves 34b are arranged. It is placed in the remaining half of the area other than the area. These first flow path merging grooves 30b are formed on two sides of the second substrate surface 18a where one end of the second flow path first introduction groove 32b and one end of the second flow path second introduction groove 34b are respectively provided. From the side on which the second flow path first introduction groove 32b and the second flow path second introduction groove 34b are not arranged, the second flow path first introduction groove 32b and the The second channel extends diagonally with respect to the extending direction of the second introduction groove 34b. These first flow path confluence grooves 30b are arranged so as to be parallel and adjacent to each other.

各第２基板１８の第２基板表面１８ａに形成された複数の第２流路第１導入溝３２ｂの開口、複数の第２流路第２導入溝３４ｂの開口、及び、複数の第１流路合流溝３０ｂの開口は、その第２基板表面１８ａに密着した第１基板１６によって封止されている。このように各第２基板表面１８ａにおける各々の開口が封止された複数の第２流路第１導入溝３２ｂによって各第２基板表面１８ａに沿って並ぶ複数の第２流路第１導入路３２が形成され、同様に各第２基板表面１８ａにおける各々の開口が封止された複数の第２流路第２導入溝３４ｂによって各第２基板表面１８ａに沿って並ぶ複数の第２流路第２導入路３４が形成されている。また、各第２基板表面１８ａにおける各々の開口が封止された複数の第１流路合流溝３０ｂによって、各第２基板表面１８ａに沿って並ぶ複数の第１流路合流流路３０が形成されている。前記のように形成された複数の第２流路第１導入路３２及び複数の第２流路第２導入路３４は、前記積層方向に沿う方向から見て、前記複数の第１流路合流流路３０が存在しない領域、すなわち前記複数の第１流路合流流路３０が配置された領域以外の領域に配置されている。 Openings of a plurality of second flow path first introduction grooves 32b, openings of a plurality of second flow path second introduction grooves 34b, and a plurality of first flow paths formed on the second substrate surface 18a of each second substrate 18 The opening of the path joining groove 30b is sealed by the first substrate 16 in close contact with the second substrate surface 18a. A plurality of second channel first introduction grooves 32b in which the respective openings on each second substrate surface 18a are sealed in this manner are aligned along each second substrate surface 18a. 32 are formed and similarly aligned along each second substrate surface 18a by a plurality of second flow channel second introduction grooves 34b each opening of which is sealed in each second substrate surface 18a. A second introduction path 34 is formed. In addition, a plurality of first flow path confluence channels 30 arranged along each second substrate surface 18a are formed by a plurality of first flow path confluence grooves 30b each having an opening in each second substrate surface 18a sealed. It is The plurality of second flow path first introduction paths 32 and the plurality of second flow path second introduction paths 34 formed as described above converge the plurality of first flow paths when viewed from the direction along the stacking direction. It is arranged in an area where the flow path 30 does not exist, that is, in an area other than the area where the plurality of first flow path confluence flow paths 30 are arranged.

この各第２基板表面１８ａに沿って配列された複数の第１流路合流流路３０は、それらの第１流路合流流路３０における前記合流液体の単位時間当たりの流量が等しくなるように構成されている。よって、流路構造体２内に設けられた全ての第１流路２１のそれぞれの第１流路合流流路３０は、それらの第１流路合流流路３０における前記合流液体の単位時間当たりの流量が等しくなるように構成されている。 The plurality of first flow convergence flow paths 30 arranged along each second substrate surface 18a are arranged so that the flow rate per unit time of the converging liquid in the first flow convergence flow paths 30 is equal. It is configured. Therefore, each of the first flow path confluence flow paths 30 of all the first flow paths 21 provided in the flow path structure 2 has are configured so that the flow rates of

また、この各第２基板表面１８ａに沿って配列された複数の第１流路合流流路３０のそれぞれは、その第１流路合流流路３０における前記合流液体の流れ方向に対して直交する方向の断面を有する。この各第１流路合流流路３０の断面の形状は、同じであり、その結果、当該各第１流路合流流路３０の断面の面積は、同じになっている。よって、流路構造体２内に設けられた全ての第１流路２１のそれぞれの第１流路合流流路３０の前記合流液体の流れ方向に対して直交する方向の断面の形状は同じであり、その断面の面積は同じになっている。また、各第２基板表面１８ａに沿って配列された複数の第１流路合流流路３０の流路長は、同じである。よって、流路構造体２内に設けられた全ての第１流路２１のそれぞれの第１流路合流流路３０の流路長は、同じになっている。 Also, each of the plurality of first flow convergence flow channels 30 arranged along each of the second substrate surfaces 18a is orthogonal to the flow direction of the merged liquid in the first flow convergence flow channel 30. It has a cross-section of the direction. The cross-sectional shape of each first flow convergence flow channel 30 is the same, and as a result, the cross-sectional area of each first flow convergence flow channel 30 is the same. Therefore, all the first flow paths 21 provided in the flow path structure 2 have the same cross-sectional shape in the direction orthogonal to the flow direction of the merged liquid of the first flow path confluence flow path 30 . and the cross-sectional areas are the same. Further, the channel lengths of the plurality of first channel confluence channels 30 arranged along each second substrate surface 18a are the same. Therefore, the channel lengths of the first channel confluence channels 30 of all the first channels 21 provided in the channel structure 2 are the same.

また、流路構造体２は、第１基板１６と第２基板１８との積層方向に対して直交する各方向をそれぞれ向く４つの側面を有している。前記各第１流路２１の第１流路第１流入口２４ａと、前記各第１流路２１の第１流路第２流入口２６ａと、前記各第１流路２１の第１流路流出口３０ａと、前記各第２流路２２の第２流路第１流入口３２ａと、前記各第２流路２２の第２流路第２流入口３４ａと、前記各第２流路２２の第２流路流出口３８ａとは、それぞれ、流路構造体２の前記４つの側面のうちの任意の領域に集中して配置されている。 In addition, the channel structure 2 has four side surfaces facing in directions orthogonal to the stacking direction of the first substrate 16 and the second substrate 18 . First channel first inlet 24a of each first channel 21, first channel second inlet 26a of each first channel 21, and first channel of each first channel 21 Outlet 30a, second channel first inlet 32a of each second channel 22, second channel second inlet 34a of each second channel 22, and each second channel 22 The second channel outflow ports 38a are concentrated in arbitrary regions of the four side surfaces of the channel structure 2, respectively.

具体的には、各第１流路２１の第１流路第１流入口２４ａは、流路構造体２の前記４つの側面のうちの一側面に設けられ、その一側面のうち前記積層方向と直交する方向における中央から片側の領域に集中して配置されている。また、各第１流路２１の第１流路第２流入口２６ａは、流路構造体２の前記４つの側面のうち第１流路第１流入口２４ａが設けられた側面に対して反対側の側面に設けられ、その側面のうち前記積層方向と直交する方向における中央から前記第１流路第１流入口２４ａが集中配置された側と同じ側の領域に集中して配置されている。また、各第１流路２１の第１流路流出口３０ａは、第１流路第１流入口２４ａが設けられた側面と同じ側面に設けられ、その側面のうち第１流路第１流入口２４ａが集中配置された側に対して反対側の領域に集中して配置されている。 Specifically, the first flow channel first inlet 24a of each first flow channel 21 is provided on one side of the four side surfaces of the flow channel structure 2, and are concentrated in one side area from the center in the direction orthogonal to the In addition, the first channel second inlet 26a of each first channel 21 is opposite to the side on which the first channel first inlet 24a is provided among the four side surfaces of the channel structure 2. side surface, and are concentrated in a region on the same side as the side where the first flow path first inlets 24a are collectively arranged from the center in the direction perpendicular to the stacking direction of the side surface. . In addition, the first flow path outlet 30a of each first flow path 21 is provided on the same side as the side on which the first flow path first inlet 24a is provided. The inlets 24a are centrally arranged in the area opposite to the side where the inlets 24a are centrally arranged.

また、各第２流路２２の第２流路第１流入口３２ａは、流路構造体２の前記４つの側面のうち前記第１流路第１流入口２４ａが設けられた側面及び前記第１流路第２流入口２６ａが設けられた側面以外の残り２つの側面の一方に設けられ、その側面において、前記積層方向と直交する方向における中央から前記第１流路第２流入口２６ａ寄りの領域に集中して配置されている。また、各第２流路２２の第２流路第２流入口３４ａは、流路構造体２の前記残り２つの側面のうち第２流路第１流入口３２ａが設けられた側面に対して反対側の側面に設けられ、その側面のうち前記積層方向と直交する方向における中央から前記第２流路第１流入口３２ａが集中配置された側と同じ側の領域に集中して配置されている。また、各第２流路２２の第２流路流出口３８ａは、第２流路第１流入口３２ａが設けられた側面と同じ側面に設けられ、その側面のうち第２流路第１流入口３２ａが集中配置された側に対して反対側の領域に集中して配置されている。 In addition, the second flow path first inlet 32a of each second flow path 22 is the side surface provided with the first flow path first inlet 24a among the four side surfaces of the flow path structure 2 and the first flow path first inlet 24a. It is provided on one of the remaining two side surfaces other than the side surface on which the first flow path second inlet 26a is provided, and on the side surface, the first flow path second inlet 26a side from the center in the direction orthogonal to the stacking direction are concentrated in the area of In addition, the second flow channel second inlet 34a of each second flow channel 22 is arranged with It is provided on the side surface on the opposite side, and is concentrated in a region on the same side as the side on which the second flow passage first inlets 32a are concentrated from the center in the direction perpendicular to the stacking direction of the side surface. there is In addition, the second flow channel outlet 38a of each second flow channel 22 is provided on the same side as the side on which the second flow channel first inlet 32a is provided. The inlets 32a are concentrated in the area opposite to the side where the inlets 32a are concentrated.

従って、流路構造体２では、各第１流路第１流入口２４ａが集中配置される領域と、各第１流路第２流入口２６ａが集中配置される領域と、各第１流路流出口３０ａが集中配置される領域と、各第２流路第１流入口３２ａが集中配置される領域と、各第２流路第２流入口３４ａが集中配置される領域と、各第２流路流出口３８ａが集中配置される領域とが、重ならないように別々の位置にある。 Therefore, in the channel structure 2, a region where the first channel first inlets 24a are concentrated, a region where the first channel second inlets 26a are concentrated, and each first channel A region where the outlets 30a are centrally arranged, a region where the second channel first inlets 32a are centrally arranged, a region where the second channel second inlets 34a are centrally arranged, and each second The areas where the flow path outlets 38a are concentrated are located separately so as not to overlap each other.

前記第１流路第１分配ヘッダ４は、流路構造体２が有する全ての第１流路２１の第１流路第１流入口２４ａへ第１液体を分配するものである。この第１流路第１分配ヘッダ４は、流路構造体２が有する全ての第１流路２１の第１流路第１流入口２４ａを一括して覆うようにそれらの第１流路第１流入口２４ａが形成された流路構造体２の側面に取り付けられている。これにより、第１流路第１分配ヘッダ４の内側の空間と各第１流路第１流入口２４ａとが連通している。第１流路第１分配ヘッダ４には、その第１流路第１分配ヘッダ４へ第１液体を供給する図略の第１液体供給配管が接続される。その第１液体供給配管を通じて第１流路第１分配ヘッダ４へ供給された第１液体がその第１流路第１分配ヘッダ４の内側の空間から各第１流路第１流入口２４ａへ分配されてその第１流路第１流入口２４ａから各第１流路第１導入路２４に流入するようになっている。 The first flow path first distribution header 4 distributes the first liquid to the first flow path first inlets 24 a of all the first flow paths 21 of the flow path structure 2 . The first flow path first distribution header 4 is arranged so as to collectively cover the first flow path first inlets 24 a of all the first flow paths 21 of the flow path structure 2 . 1 is attached to the side surface of the flow path structure 2 in which the inlet 24a is formed. As a result, the space inside the first flow path first distribution header 4 communicates with each of the first flow path first inlets 24a. A first liquid supply pipe (not shown) for supplying a first liquid to the first flow path first distribution header 4 is connected to the first flow path first distribution header 4 . The first liquid supplied to the first flow path first distribution header 4 through the first liquid supply pipe flows from the space inside the first flow path first distribution header 4 to each of the first flow path first inlets 24a. It is distributed and flows into each first flow path first introduction path 24 from the first flow path first inlet 24a.

第１流路第２分配ヘッダ６は、流路構造体２が有する全ての第１流路２１の第１流路第２流入口２６ａへ第２液体を分配するものである。この第１流路第２分配ヘッダ６は、流路構造体２が有する全ての第１流路２１の第１流路第２流入口２６ａを一括して覆うようにそれらの第１流路第２流入口２６ａが形成された流路構造体２の側面に取り付けられている。これにより、第１流路第２分配ヘッダ６の内側の空間と各第１流路第２流入口２６ａとが連通している。第１流路第２分配ヘッダ６には、その第１流路第２分配ヘッダ６へ第２液体を供給する図略の第２液体供給配管が接続される。その第２液体供給配管を通じて第１流路第２分配ヘッダ６へ供給された第２液体がその第１流路第２分配ヘッダ６の内側の空間から各第１流路第２流入口２６ａへ分配されてその第１流路第２流入口２６ａから各第１流路第２導入路２６に流入するようになっている。なお、第１流路第２分配ヘッダ６が取り付けられた流路構造体２の側面は、第１流路第１分配ヘッダ４が取り付けられた側面と反対側の側面である。 The first channel second distribution header 6 distributes the second liquid to the first channel second inlets 26 a of all the first channels 21 of the channel structure 2 . The first flow path second distribution header 6 is arranged so as to collectively cover the first flow path second inlets 26 a of all the first flow paths 21 of the flow path structure 2 . It is attached to the side surface of the channel structure 2 in which the two inlets 26a are formed. As a result, the space inside the first flow path second distribution header 6 communicates with each of the first flow path second inlets 26a. A second liquid supply pipe (not shown) for supplying a second liquid to the first flow path second distribution header 6 is connected to the first flow path second distribution header 6 . The second liquid supplied to the first flow path second distribution header 6 through the second liquid supply pipe flows from the space inside the first flow path second distribution header 6 to each of the first flow path second inlets 26a. It is distributed and flows into each of the first flow path second introduction paths 26 from the first flow path second inlet 26a. The side surface of the flow path structure 2 to which the first flow path second distribution header 6 is attached is the side surface opposite to the side surface to which the first flow path first distribution header 4 is attached.

第１流路回収ヘッダ８は、流路構造体２が有する全ての第１流路２１の第１流路流出口３０ａから流出する第１液体と第２液体との合流液体を受けて回収するものである。この第１流路回収ヘッダ８は、流路構造体２が有する全ての第１流路２１の第１流路流出口３０ａを一括して覆うようにそれらの第１流路流出口３０ａが形成された流路構造体２の側面に取り付けられている。これにより、第１流路回収ヘッダ８の内側の空間と各第１流路流出口３０ａとが連通しており、各第１流路２１の第１流路合流流路３０を流れた合流液体が各第１流路流出口３０ａから第１流路回収ヘッダ８の内側の空間へ流出するようになっている。第１流路回収ヘッダ８には、図略の第１排出配管が接続されており、各第１流路流出口３０ａから当該第１流路回収ヘッダ８の内側の空間に流出して回収された合流液体は、この第１排出配管を通じて排出されるようになっている。この第１流路回収ヘッダ８が取り付けられた流路構造体２の側面は、第１流路第１分配ヘッダ４が取り付けられた側面と同じ側面である。その側面において、第１流路第１分配ヘッダ４と第１流路回収ヘッダ８とは、互いに干渉しないように並んで設けられている。 The first flow path recovery header 8 receives and collects the combined liquid of the first liquid and the second liquid flowing out from the first flow path outlets 30a of all the first flow paths 21 of the flow path structure 2. It is a thing. The first flow path recovery header 8 has the first flow path outlets 30a formed so as to collectively cover the first flow path outlets 30a of all the first flow paths 21 of the flow path structure 2. It is attached to the side surface of the flow channel structure 2 that is formed. As a result, the space inside the first flow path recovery header 8 communicates with each of the first flow path outlets 30a, and the merged liquid that has flowed through the first flow path confluence flow path 30 of each first flow path 21 flows into the space inside the first flow path recovery header 8 from each of the first flow path outlets 30a. A first discharge pipe (not shown) is connected to the first flow path recovery header 8, and the water flows out from the first flow path outlets 30a into the space inside the first flow path recovery header 8 and is recovered. The merged liquid is discharged through this first discharge pipe. The side surface of the channel structure 2 to which the first channel recovery header 8 is attached is the same as the side surface to which the first channel first distribution header 4 is attached. On the side surface, the first channel first distribution header 4 and the first channel recovery header 8 are arranged side by side so as not to interfere with each other.

第２流路第１分配ヘッダ１０は、流路構造体２が有する全ての第２流路２２の第２流路第１流入口３２ａへ第１液体を分配するものである。この第２流路第１分配ヘッダ１０は、流路構造体２が有する全ての第２流路２２の第２流路第１流入口３２ａを一括して覆うようにそれらの第２流路第１流入口３２ａが形成された流路構造体２の側面に取り付けられている。これにより、第２流路第１分配ヘッダ１０の内側の空間と各第２流路第１流入口３２ａとが連通している。第２流路第１分配ヘッダ１０には、その第２流路第１分配ヘッダ１０へ第１液体を供給する図略の第１液体供給配管が接続される。その第１液体供給配管を通じて第２流路第１分配ヘッダ１０へ供給された第１液体がその第２流路第１分配ヘッダ１０の内側の空間から各第２流路第１流入口３２ａへ分配されてその第２流路第１流入口３２ａから各第２流路第１導入路３２に流入するようになっている。この第２流路第１分配ヘッダ１０が取り付けられた流路構造体２の側面は、第１流路第１分配ヘッダ４が取り付けられた側面及び第１流路第２分配ヘッダ６が取り付けられた側面に対して垂直な別の一側面である。 The second flow path first distribution header 10 distributes the first liquid to the second flow path first inlets 32 a of all the second flow paths 22 of the flow path structure 2 . The second flow path first distribution header 10 is arranged so as to collectively cover the second flow path first inlets 32a of all the second flow paths 22 of the flow path structure 2. 1 is attached to the side surface of the flow path structure 2 in which the inlet 32a is formed. As a result, the space inside the second flow path first distribution header 10 communicates with each of the second flow path first inlets 32a. A first liquid supply pipe (not shown) for supplying the first liquid to the second flow path first distribution header 10 is connected to the second flow path first distribution header 10 . The first liquid supplied to the second flow path first distribution header 10 through the first liquid supply pipe flows from the space inside the second flow path first distribution header 10 to the second flow path first inlets 32a. It is distributed and flows into each of the second flow path first introduction paths 32 from the second flow path first inlet 32a. The side surface of the flow path structure 2 to which the second flow path first distribution header 10 is attached is divided into the side surface to which the first flow path first distribution header 4 is attached and the side surface to which the first flow path first distribution header 6 is attached. another side perpendicular to the side

第２流路第２分配ヘッダ１２は、流路構造体２が有する全ての第２流路２２の第２流路第２流入口３４ａへ第２液体を分配するものである。この第２流路第２分配ヘッダ１２は、流路構造体２が有する全ての第２流路２２の第２流路第２流入口３４ａを一括して覆うようにそれらの第２流路第２流入口３４ａが形成された流路構造体２の側面に取り付けられている。これにより、第２流路第２分配ヘッダ１２の内側の空間と各第２流路第２流入口３４ａとが連通している。第２流路第２分配ヘッダ１２には、その第２流路第２分配ヘッダ１２へ第２液体を供給する図略の第２液体供給配管が接続される。その第２液体供給配管を通じて第２流路第２分配ヘッダ１２へ供給された第２液体がその第２流路第２分配ヘッダ１２の内側の空間から各第２流路第２流入口３４ａへ分配されてその第２流路第２流入口３４ａから各第２ら各第２流路第２導入路３４に流入するようになっている。この第２流路第２分配ヘッダ１２が取り付けられた流路構造体２の側面は、第２流路第１分配ヘッダ１０が取り付けられた側面と反対側の側面である。 The second flow path second distribution header 12 distributes the second liquid to the second flow path second inlets 34 a of all the second flow paths 22 of the flow path structure 2 . The second flow channel second distribution header 12 is arranged so as to collectively cover the second flow channel second inlets 34 a of all the second flow channels 22 of the flow channel structure 2 . It is attached to the side surface of the channel structure 2 in which the two inlets 34a are formed. Thereby, the space inside the second flow path second distribution header 12 communicates with each of the second flow path second inlets 34a. A second liquid supply pipe (not shown) for supplying the second liquid to the second flow path second distribution header 12 is connected to the second flow path second distribution header 12 . The second liquid supplied to the second flow path second distribution header 12 through the second liquid supply pipe flows from the space inside the second flow path second distribution header 12 to each of the second flow path second inlets 34a. It is distributed and flows into each of the second flow passage second introduction passages 34 from the second flow passage second inlet 34a. The side of the channel structure 2 to which the second channel second distribution header 12 is attached is the side opposite to the side to which the second channel first distribution header 10 is attached.

第２流路回収ヘッダ１４は、流路構造体２が有する全ての第２流路２２の第２流路流出口３８ａから流出する第１液体と第２液体との合流液体を受けて回収するものである。この第２流路回収ヘッダ１４は、流路構造体２が有する全ての第２流路２２の第２流路流出口３８ａを一括して覆うようにそれらの第２流路流出口３８ａが形成された流路構造体２の側面に取り付けられている。これにより、第２流路回収ヘッダ１４の内側の空間と各第２流路流出口３８ａとが連通しており、各第２流路２２の第２流路合流流路３８を流れた合流液体が各第２流路流出口３８ａから第２流路回収ヘッダ１４の内側の空間へ流出するようになっている。第２流路回収ヘッダ１４には、図略の第２排出配管が接続されており、各第２流路流出口３８ａから当該第２流路回収ヘッダ１４の内側の空間に流出して回収された合流液体は、この第２排出配管を通じて排出されるようになっている。この第２流路回収ヘッダ１４が取り付けられた流路構造体２の側面は、第２流路第１分配ヘッダ１０が取り付けられた側面と同じ側面である。その側面において、第２流路第１分配ヘッダ１０と第２流路回収ヘッダ１４とは、互いに干渉しないように並んで設けられている。 The second flow path recovery header 14 receives and collects the combined liquid of the first liquid and the second liquid flowing out from the second flow path outlets 38a of all the second flow paths 22 of the flow path structure 2. It is a thing. The second flow path recovery header 14 has the second flow path outlets 38a formed so as to collectively cover the second flow path outlets 38a of all the second flow paths 22 of the flow path structure 2. It is attached to the side surface of the flow channel structure 2 that is formed. As a result, the space inside the second flow path recovery header 14 communicates with each of the second flow path outlets 38 a , and the combined liquid that has flowed through the second flow path confluence flow path 38 of each of the second flow paths 22 flows into the space inside the second flow path recovery header 14 from each of the second flow path outlets 38a. A second discharge pipe (not shown) is connected to the second flow path recovery header 14, and the water flows out from the second flow path outlets 38a into the space inside the second flow path recovery header 14 and is recovered. The merged liquid is discharged through this second discharge pipe. The side surface of the channel structure 2 to which the second channel recovery header 14 is attached is the same as the side surface to which the second channel first distribution header 10 is attached. On the side surface, the second channel first distribution header 10 and the second channel recovery header 14 are arranged side by side so as not to interfere with each other.

本実施形態では、第２基板表面１８ａに沿って配列された複数の第２流路第１導入路３２及び複数の第２流路第２導入路３４が、その第２基板表面１８ａに沿う領域において複数の第１流路合流流路３０が存在しない領域に配置されているため、第１基板１６に設けられた複数の第１流路合流部２８の配置により第２基板表面１８ａに沿って配列される複数の第１流路合流流路３０の配置が制約を受けることで第２基板表面１８ａに沿う領域において第１流路合流流路３０を配置できなくなるスペースが、複数の第２流路第１導入路３２及び複数の第２流路第２導入路３４を配置するスペースとして有効に活用される。このため、複数の第１流路合流部２８の配置によりそれらの第１流路合流部２８に繋がる第１流路合流流路３０の配置が制約を受ける場合であっても、流路構造体２内において流路が配置されていない無駄なスペースを削減して流路構造体２の単位体積当たりにおける流路の容量を増やすことができる。 In this embodiment, the plurality of second channel first introduction channels 32 and the plurality of second channel second introduction channels 34 arranged along the second substrate surface 18a are arranged along the second substrate surface 18a. , the plurality of first flow path confluence flow paths 30 are arranged in an area where there are no first flow path confluences 30. Therefore, due to the arrangement of the plurality of first flow path confluence portions 28 provided on the first substrate 16, along the second substrate surface 18a The space in which the first flow path confluence flow path 30 cannot be arranged in the area along the second substrate surface 18a due to restrictions on the arrangement of the plurality of arranged first flow path confluence flow paths 30 is formed by the plurality of second flow paths. The space is effectively utilized as a space for arranging the first introduction path 32 and the plurality of second introduction paths 34 . Therefore, even if the arrangement of the plurality of first flow path junctions 28 restricts the arrangement of the first flow path junctions 30 connected to the first flow path junctions 28, the flow path structure It is possible to reduce the wasted space in which no flow path is arranged in the flow path structure 2 and increase the flow path capacity per unit volume of the flow path structure 2 .

また、本実施形態では、第１基板表面１６ａに沿って配列された複数の第２流路合流流路３８が、その第１基板表面１６ａに沿う領域において複数の第１流路第１導入路２４及び複数の第１流路第２導入路２６が存在しない領域に配置されることから、第１基板表面１６ａに沿う領域において第１流路第１導入路２４及び第１流路第２導入路２６が配置されないスペースを複数の第２流路合流流路３８を配置するスペースとして有効に活用される。このため、流路構造体２内において流路が配置されていない無駄なスペースをより削減でき、流路構造体２の単位体積当たりにおける流路の容量をより増やすことができる。 In addition, in the present embodiment, the plurality of second flow passages confluence flow passages 38 arranged along the first substrate surface 16a has a plurality of first flow passages and first introduction passages in the region along the first substrate surface 16a. 24 and the plurality of first flow path second introduction paths 26 are arranged in a region where there is no first flow path first introduction path 24 and the first flow path second introduction path 24 in the region along the first substrate surface 16a. The space where the channel 26 is not arranged is effectively used as the space for arranging the plurality of second flow convergence channels 38 . Therefore, it is possible to further reduce the wasted space where no flow path is arranged in the flow path structure 2, and to further increase the capacity of the flow path per unit volume of the flow path structure 2. FIG.

さらに、本実施形態では、流路構造体２において、各第１基板１６の第１基板表面１６ａに沿って複数の第１流路第１導入路２４、複数の第１流路第２導入路２６、及び、複数の第２流路合流流路３８が配列されているとともに、各第２基板１８の第２基板表面１８ａに沿って複数の第２流路第１導入路３２、複数の第２流路第２導入路３４、及び、複数の第１流路合流流路３０が配列されている。このため、流路構造体２の単位体積当たりにおける流路の容量を増やすことができる。 Furthermore, in the present embodiment, in the flow path structure 2, along the first substrate surface 16a of each first substrate 16, the plurality of first flow path first introduction paths 24 and the plurality of first flow path second introduction paths 26 , and a plurality of second flow passages merging flow passages 38 are arranged, and along the second substrate surface 18 a of each second substrate 18 , a plurality of second flow passage first introduction passages 32 , a plurality of second flow passages 32 A two-channel second introduction channel 34 and a plurality of first channel confluence channels 30 are arranged. Therefore, the capacity of the channel per unit volume of the channel structure 2 can be increased.

具体的には、例えば、図８～図１０に示す比較例のように、第１基板１０１の第１基板表面１０１ａに沿って複数の流路１０３の第１導入路１０４及び第２導入路１０６のみが配列され、第２基板１０２の第２基板表面１０２ａに沿って複数の流路１０３の合流流路１１０のみが配列され、第１基板１０１に各第１導入路１０４と各第２導入路１０６と各合流流路１１０との対応するもの同士をそれぞれ繋ぐ複数の合流部１０８が当該第１基板１０１を板厚方向に貫通するように形成されている構成では、第１基板１０１及び第２基板１０２において流路１０３が設けられていない無駄な領域が多くなる。このため、このような比較例の構成では、流路構造体の単位体積当たりにおける流路の容量が少なくなる。 Specifically, for example, as in the comparative example shown in FIGS. are arranged along the second substrate surface 102 a of the second substrate 102 , and only the confluence channels 110 of the plurality of channels 103 are arranged along the second substrate 102 , and the first substrate 101 has each first introduction channel 104 and each second introduction channel 106 and the corresponding confluence channels 110 are formed to penetrate the first substrate 101 in the plate thickness direction. A waste area in which the channel 103 is not provided on the substrate 102 increases. Therefore, in the configuration of such a comparative example, the capacity of the channel per unit volume of the channel structure is reduced.

これに対し、本実施形態では、前記のように、各第１基板１６の第１基板表面１６ａに沿って複数の第１流路第１導入路２４及び複数の第１流路第２導入路２６に加えて複数の第２流路合流流路３８が配列されているとともに、各第２基板１８の第２基板表面１８ａに沿って複数の第２流路第１導入路３２及び複数の第２流路第２導入路３４に加えて複数の第１流路合流流路３０が配列されているので、各第１基板１６及び各第２基板１８において第１流路２１と第２流路２２のいずれも配置されていない無駄な領域を削減することができる。このため、流路構造体２の単位体積当たりにおける流路の容量を増やすことができる。 On the other hand, in the present embodiment, as described above, along the first substrate surface 16a of each first substrate 16, the plurality of first flow path first introduction paths 24 and the plurality of first flow path second introduction paths 26, a plurality of second flow passages confluence flow passages 38 are arranged, and along the second substrate surface 18a of each second substrate 18, a plurality of second flow passage first introduction passages 32 and a plurality of second flow passages 32 are arranged. In addition to the two-channel second introduction channel 34, a plurality of first channel confluence channels 30 are arranged, so that the first channel 21 and the second channel in each first substrate 16 and each second substrate 18 are arranged. 22 can be reduced. Therefore, the capacity of the channel per unit volume of the channel structure 2 can be increased.

また、本実施形態では、第１流路第１導入溝２４ｂ、第１流路第２導入溝２６ｂ、及び、第２流路合流溝３８ｂが第１基板表面１６ａのみに設けられ、第２流路第１導入溝３２ｂ、第２流路第２導入溝３４ｂ、及び、第１流路合流溝３０ｂが第２基板表面１８ａのみに設けられている。仮に、第１流路第１導入溝、第１流路第２導入溝、及び、第２流路合流溝が第１基板表面と第２基板裏面の両面に設けられ、第２流路第１導入溝、第２流路第２導入溝、及び、第１流路合流溝が第１基板裏面と第２基板表面の両面に設けられている場合には、第１基板と第２基板とを積層して流路構造体を形成するときに両面に設けられた第１流路第１導入溝同士、第１流路第２導入溝同士、及び、第２流路合流溝同士を合わせる必要があるとともに、両面に設けられた第２流路第１導入溝同士、第２流路第２導入溝同士、及び、第１流路合流溝同士を合わせる必要がある。これに対し、本実施形態では、このような両面に設けられた溝同士を合わせる作業を行う必要がないため、流路構造体２を形成するときの作業を簡素化できる。 Further, in the present embodiment, the first channel first introduction groove 24b, the first channel second introduction groove 26b, and the second channel joining groove 38b are provided only on the first substrate surface 16a, and the second flow channel A channel first introduction groove 32b, a second channel second introduction groove 34b, and a first channel joining groove 30b are provided only on the second substrate surface 18a. Suppose that the first flow path first introduction groove, the first flow path second introduction groove, and the second flow path joining groove are provided on both sides of the first substrate surface and the second substrate back surface, and the second flow path first When the introduction groove, the second introduction groove of the second flow path, and the first flow path joining groove are provided on both the back surface of the first substrate and the front surface of the second substrate, the first substrate and the second substrate are separated. When laminating to form a flow path structure, it is necessary to align the first flow path first introduction grooves, the first flow path second introduction grooves, and the second flow path confluence grooves provided on both sides. In addition, it is necessary to align the second flow path first introduction grooves, the second flow path second introduction grooves, and the first flow path confluence grooves provided on both surfaces. On the other hand, in the present embodiment, it is not necessary to align the grooves provided on both sides, so the work for forming the flow path structure 2 can be simplified.

また、本実施形態では、流路装置１が上記のように流路構造体２に取り付けられた第１流路第１分配ヘッダ４、第１流路第２分配ヘッダ６、第１流路回収ヘッダ８、第２流路第１分配ヘッダ１０、第２流路第２分配ヘッダ１２、及び、第２流路回収ヘッダ１４を有する。このため、流路構造体２内に設けられた全ての第１流路２１の第１流路第１流入口２４ａにそれぞれ第１液体を供給する第１液体供給部を個別に接続し、その全ての第１流路２１の第１流路第２流入口２６ａにそれぞれ第２液体を供給する第２液体供給部を個別に接続する場合に比べて、簡素な構成で各第１流路第１流入口２４ａに第１液体を分配して供給するとともに各第１流路第２流入口２６ａに第２液体を分配して供給することができる。また、同様に、流路構造体２内に設けられた全ての第２流路２２の第２流路第１流入口３２ａにそれぞれ第１液体を供給する第１液体供給部を個別に接続し、その全ての第２流路２２の第２流路第２流入口３４ａにそれぞれ第２液体を供給する第２液体供給部を個別に接続する場合に比べて、簡素な構成で各第２流路第１流入口３２ａに第１液体を分配して供給するとともに各第２流路第２流入口３４ａに第２液体を分配して供給することができる。また、流路構造体２内に設けられた全ての第１流路２１の第１流路流出口３０ａに個別に合流液体を回収するための回収部を接続する場合に比べて、簡素な構成で各第１流路流出口３０ａから流出する合流液体を回収することができるとともに、流路構造体２内に設けられた全ての第２流路２２の第２流路流出口３８ａに個別に合流液体を回収するための回収部を接続する場合に比べて、簡素な構成で各第２流路流出口３８ａから流出する合流液体を回収することができる。 Further, in the present embodiment, the first flow path first distribution header 4, the first flow path second distribution header 6, the first flow path recovery header 4, the first flow path second distribution header 6, and the first flow path recovery header 4 attached to the flow path structure 2 as described above. It has a header 8 , a second channel first distribution header 10 , a second channel second distribution header 12 and a second channel recovery header 14 . For this reason, the first liquid supply units for supplying the first liquid are individually connected to the first flow channel first inlets 24a of all the first flow channels 21 provided in the flow channel structure 2, and the Compared to the case where the second liquid supply units that supply the second liquid are individually connected to the first flow channel second inlets 26a of all the first flow channels 21, each first flow channel 26a can have a simple configuration. The first liquid can be distributed and supplied to the first inlet 24a, and the second liquid can be distributed and supplied to each of the first channel second inlets 26a. Similarly, the first liquid supply units for supplying the first liquid are individually connected to the second flow channel first inlets 32a of all the second flow channels 22 provided in the flow channel structure 2. , and the second flow passage second inlets 34a of all of the second flow passages 22 are individually connected to the second liquid supply units that supply the second liquid, respectively. A first liquid can be distributed and supplied to the channel first inlets 32a, and a second liquid can be distributed and supplied to each of the second channel second inlets 34a. In addition, the configuration is simpler than in the case where recovery units for individually recovering merged liquid are connected to the first channel outlets 30a of all the first channels 21 provided in the channel structure 2. can recover the merged liquid flowing out from each first flow channel outlet 30a, and the second flow channel outlets 38a of all the second flow channels 22 provided in the flow channel structure 2 can be individually collected. The combined liquid flowing out from each of the second channel outlets 38a can be recovered with a simpler configuration than in the case of connecting a recovery unit for recovering the combined liquid.

また、本実施形態では、各第２基板１８の第２基板表面１８ａに沿って並列に配置された複数の第１流路合流流路３０は、それらの第１流路合流流路３０における合流液体の単位時間当たりの流量が等しくなるように構成されているとともに、各第１基板１６の第１基板表面１６ａに沿って並列に配置された複数の第２流路合流流路３８は、それらの第２流路合流流路３８における合流液体の単位時間当たりの流量が等しくなるように構成されている。このため、各第２基板１８の第２基板表面１８ａに沿って並列に配置された複数の第１流路合流流路３０において第１液体と第２液体との間での相互作用による処理時間に差が生じるのを防ぐことができるとともに、各第１基板１６の第１基板表面１６ａに沿って並列に配置された複数の第２流路合流流路３８において第１液体と第２液体との間での相互作用による処理時間に差が生じるのを防ぐことができる。 In addition, in the present embodiment, the plurality of first flow path confluence flow paths 30 arranged in parallel along the second substrate surface 18a of each second substrate 18 merge at the first flow path confluence flow paths 30. A plurality of second flow path convergence flow paths 38 arranged in parallel along the first substrate surface 16a of each first substrate 16 are arranged so that the flow rate of the liquid per unit time is equal. The flow rate per unit time of the merged liquid in the second flow path confluence flow path 38 is equal. Therefore, the processing time due to the interaction between the first liquid and the second liquid in the plurality of first flow converging flow paths 30 arranged in parallel along the second substrate surface 18a of each second substrate 18 is In addition, the first liquid and the second liquid can be prevented from being different from each other in the plurality of second flow converging flow paths 38 arranged in parallel along the first substrate surface 16a of each first substrate 16. It is possible to prevent a difference in processing time from occurring due to the interaction between

（変形例）
本発明による流路装置は、前記実施形態のようなものに必ずしも限定されない。本発明による流路装置には、例えば以下のような技術を採用することが可能である。 (Modification)
The flow channel device according to the present invention is not necessarily limited to the above embodiments. For example, the following techniques can be employed in the channel device according to the present invention.

（１）各第１流路の第１流路合流流路は、その第１合流流路において合流液体が流れる向きを変化させるように折れ曲がった箇所である少なくとも１つの第１合流流路曲折箇所を有していてもよく、各第２流路の第２流路合流流路は、その第２流路合流流路において合流液体が流れる向きを変化させるように折れ曲がった箇所である少なくとも１つの第２合流流路曲折箇所を有していてもよい。図１１～図１３には、このような技術が適用された本発明の第１変形例による流路装置における第１流路と第２流路の配置が示されている。 (1) The first confluence flow path of each first flow path has at least one first confluence flow path bending portion where the first confluence flow path is bent so as to change the flow direction of the merged liquid. and the second flow path confluence of each second flow path is at least one bend that changes the direction of flow of the merged liquid in the second flow path confluence. You may have a 2nd confluence|merging flow-path bending location. FIGS. 11 to 13 show the arrangement of the first channel and the second channel in the channel device according to the first modified example of the invention to which such technology is applied.

この第１変形例による流路装置１の各第１流路２１の第１流路合流流路３０と各第２流路２２の第２流路合流流路３８以外の構成は、前記実施形態による流路装置１の構成と同様である。当該第１変形例では、各第１流路２１の第１流路合流流路３０が２つの第１合流流路曲折箇所３１を有し、各第２流路２２の第２流路合流流路３８が第２合流流路曲折箇所３９を有する。 The configuration of the channel device 1 according to the first modification, other than the first channel junction channels 30 of the respective first channels 21 and the second channel junction channels 38 of the respective second channels 22, is similar to that of the above-described embodiment. is the same as the configuration of the flow channel device 1 according to In the first modified example, the first flow path confluence flow path 30 of each first flow path 21 has two first flow path bending points 31, and the second flow path confluence of each second flow path 22 Channel 38 has a second confluence channel bend 39 .

各第１合流流路曲折箇所３１は、第１流路合流流路３０において第１液体と第２液体との合流液体が流れる向きを変化させるように折れ曲がった箇所である。また、各第２合流流路曲折箇所３９は、第２流路合流流路３８において第１液体と第２液体との合流液体が流れる向きを変化させるように折れ曲がった箇所である。この第１変形例では、各第２基板１８の第２基板表面１８ａに沿って配列された複数の第１流路合流流路３０における第１合流流路曲折箇所３１の数は、同じであり、また、各第１基板１６の第１基板表面１６ａに沿って配列された複数の第２流路合流流路３８における第２合流流路曲折箇所３９の数は、同じである。各第１流路２１の第１流路合流流路３０は、２つの第１合流流路曲折箇所３１を有していることにより蛇行しており、各第２流路２２の第２流路合流流路３８は、２つの第２合流流路曲折箇所３９を有していることにより蛇行している。 Each first confluence channel bending portion 31 is a portion where the first confluence channel 30 is bent so as to change the flow direction of the confluence of the first liquid and the second liquid. Further, each second confluence channel bending portion 39 is a portion where the second confluence channel 38 is bent so as to change the flow direction of the confluence liquid of the first liquid and the second liquid. In this first modified example, the number of first converging flow path bending points 31 in the plurality of first flow converging flow paths 30 arranged along the second substrate surface 18a of each second substrate 18 is the same. In addition, the number of second confluence channel bending portions 39 in the plurality of second flow confluence channels 38 arranged along the first substrate surface 16a of each first substrate 16 is the same. The first merging flow path 30 of each first flow path 21 meanders by having two first merging flow path bending points 31, and the second flow path of each second flow path 22 is meandering. The confluence channel 38 meanders by having two second confluence channel bends 39 .

この第１変形例では、各第１流路合流流路３０が２つの第１合流流路曲折箇所３１を有することにより、各第１流路合流流路３０の全体が直線的に延びている場合に比べて各第１流路合流流路３０の流路長を拡大できるとともに、各第２流路合流流路３８が２つの第２合流流路曲折箇所３９を有することにより、各第２流路合流流路３８の全体が直線的に延びている場合に比べて各第２流路合流流路３８の流路長を拡大できる。このため、各第１流路合流流路３０及び各第２流路合流流路３８における合流液体の流通時間をより大きく確保でき、その結果、その各第１流路合流流路３０及び各第２流路合流流路３８における第１液体と第２液体との間での相互作用による処理時間をより大きく確保できる。 In this first modification, each first flow convergence flow path 30 has two first convergence flow path bending points 31, so that the entire first flow convergence flow path 30 extends linearly. The channel length of each first flow convergence channel 30 can be increased compared to the case, and each second flow convergence flow channel 38 has two second convergence flow channel bending portions 39. The channel length of each second flow convergence channel 38 can be increased compared to the case where the entire flow channel convergence channel 38 extends linearly. Therefore, it is possible to secure a longer flow time for the merged liquid in each of the first flow convergence flow passages 30 and each of the second flow flow convergence flow passages 38. A longer processing time due to the interaction between the first liquid and the second liquid in the two-flow convergence flow path 38 can be ensured.

しかも、この第１変形例では、各第１流路合流流路３０における第１合流流路曲折箇所３１の数が同じであることから、各第１流路合流流路３０において第１合流流路曲折箇所３１の存在による単位時間当たりの合流液体の流量の差が生じるのを防ぐことができる。また、各第２流路合流流路３８における第２合流流路曲折箇所３９の数が同じであることから、各第２流路合流流路３８において第２合流流路曲折箇所３９の存在による単位時間当たりの合流液体の流量の差が生じるのを防ぐことができる。 Moreover, in the first modified example, since the number of the first merging flow path bending points 31 in each first flow confluence flow path 30 is the same, the first confluence flow in each first flow flow confluence flow path 30 is the same. It is possible to prevent a difference in the flow rate of the merged liquid per unit time from occurring due to the presence of the road bending portion 31 . In addition, since the number of second merging flow path bending points 39 in each second flow merging flow path 38 is the same, It is possible to prevent a difference in the flow rate of the merged liquid per unit time from occurring.

なお、各第１流路合流流路３０が有する第１合流流路曲折箇所３１の数及び各第２流路合流流路３８が有する第２合流流路曲折箇所３９の数は、それぞれ任意に設定されればよい。 In addition, the number of the first converging flow path bending points 31 that each first flow converging flow path 30 has and the number of the second converging flow path bending points 39 that each of the second flow converging flow paths 38 have are arbitrarily set. It should be set.

（２）また、第１基板表面に沿って配列される第１流路第１導入路、第１流路第２導入路、及び、第２流路合流流路の配列パターンは、前記積層方向において第１基板の２枚以上の枚数ごとに同じであってもよい。図１４及び図１５には、このような技術が適用された本発明の第２変形例による流路装置における流路の配列パターンが示されている。 (2) In addition, the arrangement pattern of the first flow path, the first flow path, the first flow path, the second flow path, and the second flow path, which are arranged along the surface of the first substrate, is the stacking direction. may be the same for every two or more first substrates. FIGS. 14 and 15 show the arrangement pattern of channels in a channel device according to a second modified example of the present invention to which such technology is applied.

この第２変形例では、流路構造体に含まれる複数の第１基板１６のうち前記積層方向における第１基板１６の２枚ごとに同じ配列パターンで第１基板表面１６ａに沿って第１流路第１導入路２４と第１流路第２導入路２６と第２流路合流流路３８が配列されている。 In this second modification, every two first substrates 16 in the stacking direction among the plurality of first substrates 16 included in the flow path structure have the same arrangement pattern along the first substrate surface 16a to form the first flow. A first introduction passage 24, a first passage second introduction passage 26, and a second passage confluence passage 38 are arranged.

具体的には、前記積層方向における複数の第１基板１６のうち１枚目の第１基板１６と、図示を省略しているが、それ以降の２枚目ごと（３枚目、５枚目、・・・）の第１基板１６において、同じ配列パターンで第１流路第１導入路２４と第１流路第２導入路２６と第２流路合流流路３８が配列されている。 Specifically, the first substrate 16 among the plurality of first substrates 16 in the stacking direction and every second substrate after that (not shown) (third substrate, fifth substrate) , . . ) are arranged in the same arrangement pattern on the first substrate 16 .

そして、前記積層方向における複数の第１基板１６のうち２枚目の第１基板１６と、図示を省略しているが、それ以降の２枚目ごと（４枚目、６枚目、・・・）の第１基板１６において、同じ配列パターンで第１流路第１導入路２４と第１流路第２導入路２６と第２流路合流流路３８が配列されている。この配列パターンは、前記１枚目から２枚目ごとの第１基板１６における第１流路第１導入路２４と第１流路第２導入路２６と第２流路合流流路３８の配列パターンと異なる。具体的には、この配列パターンでは、第２流路合流流路３８が、前記１枚目から２枚目ごとの第１基板１６における配列パターンでの第２流路合流流路３８に比べて、より急角度で第２流路合流部３６から延びて第１基板１６の第１流路第１流入口２４ａが設けられた辺に達し、その辺において第２流路流出口３８ａが設けられている。 Then, the second first substrate 16 among the plurality of first substrates 16 in the stacking direction and every second substrate thereafter (4th, 6th, . . . ), the first flow path first introduction path 24, the first flow path second introduction path 26, and the second flow path confluence flow path 38 are arranged in the same arrangement pattern. This arrangement pattern is the arrangement of the first flow path first introduction path 24, the first flow path second introduction path 26, and the second flow path confluence flow path 38 on every second substrate 16 from the first sheet. different from the pattern. Specifically, in this arrangement pattern, the second flow path confluence flow paths 38 are compared to the second flow path confluence flow paths 38 in the arrangement pattern of the first substrate 16 for every second substrate 16. , extending from the second flow path confluence portion 36 at a steeper angle to reach the side of the first substrate 16 where the first flow path first inlet 24a is provided, and the second flow path outlet 38a is provided on that side. ing.

この第２変形例では、第１基板１６の特定の枚数ごとに第１流路第１導入路２４、第１流路第２導入路２６、及び、第２流路合流流路３８の同じ配列パターンを適用できるため、各第１基板１６ごとに第１流路第１導入路２４、第１流路第２導入路２６、及び、第２流路合流流路３８の配列パターンが異なる場合に比べて、流路構造体２を生産するときの生産性を向上できる。 In this second modification, the same arrangement of the first flow path first introduction path 24, the first flow path second introduction path 26, and the second flow path confluence flow path 38 is provided for each specific number of first substrates 16. Since the pattern can be applied, when the arrangement pattern of the first channel first introduction channel 24, the first channel second introduction channel 26, and the second channel confluence channel 38 is different for each first substrate 16, In comparison, the productivity when producing the flow path structure 2 can be improved.

なお、この第２変形例では、前記積層方向における複数の第１基板１６のうち２枚目の第１基板１６とそれ以降の２枚目ごとの第１基板１６に配列された複数の第２流路合流流路３８の第２流路流出口３８ａは、前記積層方向に沿う方向から見て、複数の第１流路２１の第１流路流出口３０ａが集中配置された領域と重なる領域に集中して配置される。このため、前記第１流路回収ヘッダ８によって、複数の第１流路２１の第１流路流出口３０ａに加えて、この２枚目の第１基板１６とそれ以降の２枚目ごとの第１基板１６に配列された複数の第２流路合流流路３８の第２流路流出口３８ａも一括して覆い、それらの第２流路流出口３８ａから流出する合流液体を各第１流路流出口３０ａから流出する合流液体とともに第１流路回収ヘッダ８で回収するようにしてもよい。 In this second modification, the second first substrate 16 among the plurality of first substrates 16 in the stacking direction and the plurality of second substrates arranged on every second first substrate 16 thereafter. The second flow outlet 38a of the flow merging flow path 38 overlaps the area where the first flow outlets 30a of the plurality of first flow paths 21 are concentrated when viewed from the direction along the stacking direction. are concentrated in the Therefore, in addition to the first flow path outlets 30a of the plurality of first flow paths 21, the first flow path recovery header 8 allows the second first substrate 16 and every second substrate thereafter to The second flow channel outlets 38a of the plurality of second flow channel confluence channels 38 arranged on the first substrate 16 are also collectively covered, and the combined liquid flowing out of the second flow channel outlets 38a is prevented from flowing into each of the first substrates 16. It may be recovered by the first channel recovery header 8 together with the merged liquid flowing out from the channel outlet 30a.

また、第１基板表面に沿って配列される第１流路第１導入路、第１流路第２導入路、及び、第２流路合流流路の配列パターンと同様の概念を適用して、第２基板表面に沿って配列される第２流路第１導入路、第２流路第２導入路、及び、第１流路合流流路の配列パターンは、前記積層方向において第２基板の２枚以上の枚数ごとに同じであってもよい。その場合、第２流路第１導入路、第２流路第２導入路、及び、第１流路合流流路の配列パターンとして複数の異なる配列パターンを採用してもよい。 In addition, applying the same concept as the arrangement pattern of the first channel first introduction channel, the first channel second introduction channel, and the second channel confluence channel arranged along the surface of the first substrate , the second flow path, the second flow path, the second flow path, the second flow path, and the first flow path, which are arranged along the surface of the second substrate, are arranged along the surface of the second substrate. may be the same for every two or more sheets. In that case, a plurality of different arrangement patterns may be adopted as the arrangement pattern of the second flow path first introduction path, the second flow path second introduction path, and the first flow path confluence flow path.

（３）また、第２流路の第２流路合流流路は、その第２流路の第２流路第１導入路及び第２流路第２導入路が配列された第２基板表面に対して密着した第１基板の第１基板表面に必ずしも配列されていなくてもよく、その第２流路合流流路が配列された第２基板表面に対して反対側の第２基板裏面に密着した第１基板の第１基板表面に沿って配列されてもよい。 (3) In addition, the second flow path confluence flow path of the second flow path is the second substrate surface on which the second flow path first introduction path and the second flow path second introduction path of the second flow path are arranged. It may not necessarily be arranged on the first substrate surface of the first substrate that is in close contact with the second substrate, and on the back surface of the second substrate opposite to the second substrate surface on which the second flow path confluence flow path is arranged They may be arranged along the first substrate surface of the first substrate in close contact with each other.

（４）第１流路第１導入路を構成する第１流路第１導入溝は、第２基板裏面に形成されてもよく、第１基板表面と第２基板裏面の両方に形成されてもよい。第１流路第１導入溝が第１基板表面と第２基板裏面の両方に形成されている場合には、その第１基板表面と第２基板裏面の両方に形成された第１流路第１導入溝同士が、第１基板表面と第２基板裏面とが密着されることによって合わさり、その合わさった第１流路第１導入溝によって第１流路第１導入路が構成される。 (4) First flow path The first introduction groove forming the first introduction path may be formed on the back surface of the second substrate, and may be formed on both the front surface of the first substrate and the back surface of the second substrate. good too. When the first introduction grooves for the first flow path are formed on both the first substrate surface and the second substrate back surface, the first flow path first introduction grooves formed on both the first substrate surface and the second substrate back surface are used. The first introduction grooves are joined by the first substrate front surface and the second substrate back surface being brought into close contact with each other, and the combined first flow passage first introduction grooves constitute the first flow passage first introduction passage.

（５）また、第１流路第２導入路を構成する第１流路第２導入溝は、第２基板裏面に形成されてもよく、第１基板表面と第２基板裏面の両方に形成されてもよい。第１流路第２導入溝が第１基板表面と第２基板裏面の両方に形成されている場合には、その第１基板表面と第２基板裏面の両方に形成された第１流路第２導入溝同士が、第１基板表面と第２基板裏面とが密着されることによって合わさり、その合わさった第１流路第２導入溝によって第１流路第２導入路が構成される。 (5) Further, the first channel second introduction groove constituting the first channel second introduction channel may be formed on the back surface of the second substrate, and may be formed on both the front surface of the first substrate and the back surface of the second substrate. may be When the first channel second introduction groove is formed on both the first substrate surface and the second substrate back surface, the first channel second introduction groove formed on both the first substrate surface and the second substrate back surface The two introduction grooves are joined by the first substrate front surface and the second substrate back surface being in close contact with each other, and the combined first channel second introduction channel constitutes the first channel second introduction channel.

（６）また、第１流路合流流路を構成する第１流路合流溝は、第１基板裏面に形成されてもよく、第１基板裏面と第２基板表面の両方に形成されてもよい。第１流路合流溝が第１基板裏面と第２基板表面の両方に形成されている場合には、その第１基板裏面と第２基板表面の両方に形成された第１流路合流溝同士が、第１基板裏面と第２基板表面とが密着されることによって合わさり、その合わさった第１流路合流溝によって第１流路合流流路が構成される。 (6) In addition, the first flow converging groove that constitutes the first flow converging flow channel may be formed on the rear surface of the first substrate, or may be formed on both the rear surface of the first substrate and the front surface of the second substrate. good. When the first flow path merging grooves are formed on both the back surface of the first substrate and the front surface of the second substrate, the first flow merging grooves formed on both the back surface of the first substrate and the front surface of the second substrate However, the rear surface of the first substrate and the front surface of the second substrate are brought together by being brought into close contact with each other, and the combined first flow passage confluence groove constitutes the first flow passage confluence passage.

（７）また、第２流路第１導入路を構成する第２流路第１導入溝は、第１基板裏面に形成されてもよく、第１基板裏面と第２基板表面の両方に形成されてもよい。第２流路第１導入溝が第１基板裏面と第２基板表面の両方に形成されている場合には、その第１基板裏面と第２基板表面の両方に形成された第２流路第１導入溝同士が、第１基板裏面と第２基板表面とが密着されることによって合わさり、その合わさった第２流路第１導入溝によって第２流路第１導入路が構成される。 (7) Further, the second channel first introduction groove constituting the second channel first introduction channel may be formed on the back surface of the first substrate, and may be formed on both the back surface of the first substrate and the front surface of the second substrate. may be When the second channel first introduction groove is formed on both the back surface of the first substrate and the front surface of the second substrate, the second channel first introduction groove formed on both the back surface of the first substrate and the front surface of the second substrate The first introduction grooves are joined together by the back surface of the first substrate and the front surface of the second substrate being brought into close contact with each other.

（８）また、第２流路第２導入路を構成する第２流路第２導入溝は、第１基板裏面に形成されてもよく、第１基板裏面と第２基板表面の両方に形成されてもよい。第２流路第２導入溝が第１基板裏面と第２基板表面の両方に形成されている場合には、その第１基板裏面と第２基板表面の両方に形成された第２流路第２導入溝同士が、第１基板裏面と第２基板表面とが密着されることによって合わさり、その合わさった第２流路第２導入溝によって第２流路第２導入路が構成される。 (8) In addition, the second channel second introduction groove constituting the second channel second introduction channel may be formed on the back surface of the first substrate, and may be formed on both the back surface of the first substrate and the front surface of the second substrate. may be When the second channel second introduction groove is formed on both the back surface of the first substrate and the front surface of the second substrate, the second channel second introduction groove formed on both the back surface of the first substrate and the front surface of the second substrate The two introduction grooves are joined together by the back surface of the first substrate and the front surface of the second substrate being brought into close contact with each other.

（９）また、本発明において、各第１基板ごとに複数の第１流路第１流入口が集中して配置される領域は、前記積層方向に沿う方向から見て互いにずれていてもよい。また、各第１基板ごとに複数の第１流路第２流入口が集中して配置される領域は、前記積層方向に沿う方向から見て互いにずれていてもよい。また、各第１基板ごとに複数の第２流路流出口が集中して配置される領域は、前記積層方向に沿う方向から見て互いにずれていてもよい。 (9) In addition, in the present invention, the regions where the plurality of first flow channel first inlets are arranged intensively for each first substrate may be shifted from each other when viewed from the direction along the stacking direction. . Also, the regions where the plurality of first channel second inlets are arranged intensively for each of the first substrates may be displaced from each other when viewed from the direction along the stacking direction. In addition, the areas where the plurality of second flow path outlets are arranged intensively for each first substrate may be displaced from each other when viewed from the direction along the stacking direction.

（１０）また、本発明において、各第２基板ごとに複数の第２流路第１流入口が集中して配置される領域は、前記積層方向に沿う方向から見て互いにずれていてもよい。また、各第２基板ごとに複数の第２流路第２流入口が集中して配置される領域は、前記積層方向に沿う方向から見て互いにずれていてもよい。また、各第２基板ごとに複数の第１流路流出口が集中して配置される領域は、前記積層方向に沿う方向から見て互いにずれていてもよい。 (10) In addition, in the present invention, the areas where the plurality of first inlets of the second flow paths are arranged intensively for each of the second substrates may be displaced from each other when viewed from the direction along the stacking direction. . In addition, the regions where the plurality of second flow passage second inlets are arranged intensively for each second substrate may be shifted from each other when viewed from the direction along the stacking direction. In addition, the regions where the plurality of first flow channel outlets are arranged intensively for each second substrate may be displaced from each other when viewed from the direction along the stacking direction.

（１１）また、本発明において、各第１基板は、その板厚方向に分割された２枚の基板が積層されて一体化されたものからなっていてもよい。この場合、その２枚の基板のうち第１基板表面を構成する一方の基板に、複数の第１流路第１導入溝を形成するための複数の第１流路第１導入スリットと、複数の第１流路第２導入溝を形成するための複数の第１流路第２導入スリットと、複数の第２流路合流溝を形成するための複数の第２流路合流スリットとを、その一方の基板を板厚方向に貫通するように設けるとともに、第１基板裏面を構成する他方の基板のうち複数の第１流路合流部の設置位置に対応する各位置において複数の第１流路合流部貫通孔を形成するための複数の貫通孔を当該他方の基板を板厚方向に貫通するように設け、また、当該他方の基板のうち複数の第２流路合流部の設置位置に対応する各位置において複数の第２流路合流部貫通孔を形成するための複数の貫通孔を当該他方の基板を板厚方向に貫通するように設けてもよい。 (11) In the present invention, each first substrate may be formed by laminating and integrating two substrates divided in the thickness direction. In this case, a plurality of first flow path first introduction slits for forming a plurality of first flow path first introduction grooves in one of the two substrates constituting the surface of the first substrate; a plurality of first flow path second introduction slits for forming the first flow path second introduction grooves, and a plurality of second flow path confluence slits for forming a plurality of second flow path confluence grooves, One of the substrates is provided so as to penetrate in the plate thickness direction, and a plurality of first flow paths is provided at each position corresponding to the installation position of the plurality of first flow path confluence portions of the other substrate constituting the back surface of the first substrate. A plurality of through-holes for forming channel junction through-holes are provided so as to penetrate the other substrate in the plate thickness direction, and a plurality of second channel junctions are installed on the other substrate. A plurality of through-holes for forming a plurality of second flow path confluence portion through-holes may be provided at corresponding positions so as to penetrate the other substrate in the plate thickness direction.

この構成では、前記一方の基板に設けられた複数の第１流路第１導入スリットの裏面側の開口が前記他方の基板で封止されることによって複数の第１流路第１導入溝が形成されるとともに、前記一方の基板に設けられた複数の第１流路第２導入スリットの裏面側の開口が前記他方の基板で封止されることによって複数の第１流路第２導入溝が形成され、また、前記一方の基板に設けられた複数の第２流路合流スリットの裏面側の開口が前記他方の基板で封止されることによって複数の第２流路合流溝が形成される。また、前記他方の基板に設けられた複数の第１流路合流部貫通孔を形成するための複数の貫通孔のそれぞれと、前記一方の基板に設けられた複数の第１流路第１導入スリットの対応するものの端部及び複数の第１流路第２導入スリットの対応するものの端部とが繋がることによって、複数の第１流路合流部貫通孔が形成され、また、前記他方の基板に設けられた複数の第２流路合流部貫通孔を形成するための複数の貫通孔のそれぞれと前記一方の基板に設けられた複数の第２流路合流スリットの対応するものの端部とが繋がることによって、複数の第１流路合流部貫通孔が形成される。 In this configuration, the plurality of first flow path first introduction grooves are formed by sealing the openings on the back side of the plurality of first flow path first introduction slits provided in the one substrate with the other substrate. A plurality of first channel second introduction grooves are formed by sealing openings on the back side of the plurality of first channel second introduction slits provided in the one substrate with the other substrate. is formed, and a plurality of second flow path merging grooves are formed by sealing the openings on the back side of the plurality of second flow path merging slits provided in the one substrate with the other substrate. be. In addition, each of the plurality of through-holes for forming the plurality of first flow path confluence portion through-holes provided in the other substrate and the plurality of first flow path first introduction holes provided in the one substrate By connecting the corresponding end portions of the slits and the corresponding end portions of the plurality of first flow channel second introduction slits, a plurality of first flow channel confluence portion through-holes are formed, and the other substrate each of the plurality of through-holes for forming the plurality of second flow path confluence portion through-holes provided in the substrate and the corresponding ends of the plurality of second flow path confluence slits provided in the one substrate By connecting, a plurality of first passage confluence portion through-holes are formed.

（１２）また、本発明において、各第２基板は、その板厚方向に分割された２枚の基板が積層されて一体化されたものからなっていてもよい。この場合、その２枚の基板のうち第２基板表面を構成する一方の基板に、複数の第２流路第１導入溝を形成するための複数の第２流路第１導入スリットと、複数の第２流路第２導入溝を形成するための複数の第２流路第２導入スリットと、複数の第１流路合流溝を形成するための複数の第１流路合流スリットとを、その一方の基板を板厚方向に貫通するように設けてもよい。 (12) In addition, in the present invention, each second substrate may be formed by laminating and integrating two substrates divided in the thickness direction thereof. In this case, a plurality of second channel first introduction slits for forming a plurality of second channel first introduction grooves in one of the two substrates constituting the surface of the second substrate; a plurality of second flow channel second introduction slits for forming the second flow channel second introduction grooves and a plurality of first flow channel confluence slits for forming a plurality of first flow channel confluence grooves, You may provide so that the one board|substrate may be penetrated in a board|plate thickness direction.

この構成では、前記一方の基板に設けられた複数の第２流路第１導入スリットの裏面側の開口が前記２枚の基板のうち第２基板裏面を構成する他方の基板で封止されることによって複数の第２流路第１導入溝が形成されるとともに、前記一方の基板に設けられた複数の第２流路第２導入スリットの裏面側の開口が前記他方の基板で封止されることによって複数の第２流路第２導入溝が形成され、また、前記一方の基板に設けられた複数の第１流路合流スリットの裏面側の開口が前記他方の基板で封止されることによって複数の第１流路合流溝が形成される。 In this configuration, the openings on the back surface side of the plurality of second channel first introduction slits provided in one of the substrates are sealed by the other of the two substrates, which constitutes the back surface of the second substrate. As a result, a plurality of first introduction grooves for the second flow path are formed, and the openings on the back side of the plurality of second introduction slits for the second flow path provided in the one substrate are sealed with the other substrate. Thus, a plurality of second introduction grooves for the second flow paths are formed, and the openings on the back side of the plurality of first flow path confluence slits provided on the one substrate are sealed with the other substrate. Thus, a plurality of confluence grooves for the first flow paths are formed.

１ 流路装置
２ 流路構造体
４ 第１流路第１分配ヘッダ
６ 第１流路第２分配ヘッダ
８ 第１流路回収ヘッダ
１０ 第２流路第１分配ヘッダ
１２ 第２流路第２分配ヘッダ
１４ 第２流路回収ヘッダ
１６ 第１基板
１６ａ 第１基板表面
１６ｂ 第１基板裏面
１８ 第２基板
１８ａ 第２基板表面
１８ｂ 第２基板裏面
２１ 第１流路
２２ 第２流路
２４ 第１流路第１導入路
２４ａ 第１流路第１流入口
２４ｂ 第１流路第１導入溝
２６ 第１流路第２導入路
２６ａ 第１流路第２流入口
２６ｂ 第１流路第２導入溝
２８ 第１流路合流部
２８ｂ 第１流路合流部貫通孔
３０ 第１流路合流流路
３０ａ 第１流路流出口
３０ｂ 第１流路合流溝
３１ 第１合流流路曲折箇所
３２ 第２流路第１導入路
３２ａ 第２流路第１流入口
３２ｂ 第２流路第１導入溝
３４ 第２流路第２導入路
３４ａ 第２流路第２流入口
３４ｂ 第２流路第２導入溝
３６ 第２流路合流部
３６ｂ 第２流路合流部貫通孔
３８ 第２流路合流流路
３８ａ 第２流路流出口
３８ｂ 第２流路合流溝
３９ 第２合流流路曲折箇所 1 channel device 2 channel structure 4 first channel first distribution header 6 first channel second distribution header 8 first channel recovery header 10 second channel first distribution header 12 second channel second Distribution header 14 Second channel recovery header 16 First substrate 16a First substrate front surface 16b First substrate back surface 18 Second substrate 18a Second substrate front surface 18b Second substrate back surface 21 First channel 22 Second channel 24 First first Flow path first introduction path 24a First flow path first inlet 24b First flow path first introduction groove 26 First flow path second introduction path 26a First flow path second inlet 26b First flow path second introduction Groove 28 First flow path joining portion 28b First flow path joining portion through hole 30 First flow path joining flow path 30a First flow path outlet 30b First flow path joining groove 31 First flow path bending portion 32 Second second Flow path first introduction path 32a Second flow path first inlet 32b Second flow path first introduction groove 34 Second flow path second introduction path 34a Second flow path second inlet 34b Second flow path second introduction Groove 36 Second flow path joining portion 36b Second flow path joining portion through hole 38 Second flow path joining flow path 38a Second flow path outlet 38b Second flow path joining groove 39 Second flow path bending portion

Claims (17)

第１液体と第２液体とをそれぞれ合流させて流通させる複数の第１流路及び複数の第２流路を備える流路装置であって、
前記複数の第１流路及び前記複数の第２流路が内部に設けられた流路構造体を備え、
前記複数の第１流路は、前記第１液体が導入される第１流路第１導入路と、前記第２液体が導入される第１流路第２導入路と、前記第１流路第１導入路の下流側の端部及び前記第１流路第２導入路の下流側の端部に繋がり、前記第１流路第１導入路を流れた前記第１液体と前記第１流路第２導入路を流れた前記第２液体とを合流させる第１流路合流部と、前記第１流路合流部の下流側に繋がり、前記第１流路合流部で合流した前記第１液体と前記第２液体との合流液体を流通させる第１流路合流流路と、をそれぞれ有し、
前記複数の第２流路は、前記第１液体が導入される第２流路第１導入路と、前記第２液体が導入される第２流路第２導入路と、前記第２流路第１導入路の下流側の端部及び前記第２流路第２導入路の下流側の端部に繋がり、前記第２流路第１導入路を流れた前記第１液体と前記第２流路第２導入路を流れた前記第２液体とを合流させる第２流路合流部と、前記第２流路合流部の下流側に繋がり、前記第２流路合流部で合流した前記第１液体と前記第２液体との合流液体を流通させる第２流路合流流路と、をそれぞれ有し、
前記流路構造体は、複数の第１基板及び複数の第２基板であってそれらの板厚方向に沿って交互に積層されたものを有し、
前記複数の第１基板のそれぞれは、その板厚方向における一方側の面である第１基板表面、及び、前記第１基板表面と反対側の面である第１基板裏面を有し、
前記複数の第２基板のそれぞれは、その板厚方向における一方側の面であってその第２基板上に積層される前記第１基板の前記第１基板裏面に密着した面である第２基板表面、及び、前記第２基板表面と反対側の面であってその第２基板が積層される前記第１基板の前記第１基板表面と密着した面である第２基板裏面を有し、
前記複数の第１流路の前記第１流路第１導入路は、前記複数の第１基板のそれぞれの前記第１基板表面に沿って配列された複数の第１流路第１導入路を含み、
前記複数の第１流路の前記第１流路第２導入路は、前記複数の第１基板のそれぞれの前記第１基板表面に沿って配列された複数の第１流路第２導入路を含み、
前記複数の第１流路の前記第１流路合流流路は、前記複数の第２基板のそれぞれの前記第２基板表面に沿って配列された複数の第１流路合流流路を含み、
前記複数の第１流路の前記第１流路合流部は、前記複数の第１基板のそれぞれをそれらの板厚方向に貫通する複数の第１流路合流部貫通孔からなり、
前記複数の第２流路の前記第２流路第１導入路及び前記複数の第２流路の前記第２流路第２導入路は、前記複数の第２基板のそれぞれの前記第２基板表面に沿って配列されるとともに、前記第１基板と前記第２基板との積層方向に沿う方向から見て、前記複数の第１流路合流流路が存在しない領域に配置されている、流路装置。 A flow path device comprising a plurality of first flow paths and a plurality of second flow paths for merging and circulating a first liquid and a second liquid,
A channel structure in which the plurality of first channels and the plurality of second channels are provided;
The plurality of first flow paths includes a first flow path through which the first liquid is introduced, a first flow path and a second introduction flow through which the second liquid is introduced, and the first flow path. The first liquid and the first flow that are connected to the downstream end of the first introduction path and the downstream end of the first flow path and the second introduction path and flow through the first flow path. a first flow path confluence section for merging the second liquid that has flowed through the second introduction path; each having a first flow path confluence flow path for circulating the merged liquid of the liquid and the second liquid,
The plurality of second flow paths includes a second flow path through which the first liquid is introduced, a second flow path through which the second liquid is introduced, a second flow path, and a second flow path. The first liquid and the second flow connected to the downstream end of the first introduction path and the downstream end of the second flow path second introduction path and flowed through the second flow path first introduction path a second flow path merging portion for merging the second liquid that has flowed through the second introduction path; a second flow path confluence flow path for circulating the merged liquid of the liquid and the second liquid,
The flow path structure has a plurality of first substrates and a plurality of second substrates alternately laminated along the plate thickness direction,
Each of the plurality of first substrates has a first substrate surface that is one side surface in the plate thickness direction and a first substrate back surface that is a surface opposite to the first substrate surface,
Each of the plurality of second substrates is a second substrate which is a surface on one side in the plate thickness direction and which is a surface in close contact with the rear surface of the first substrate of the first substrate laminated on the second substrate. and a back surface of a second substrate, which is a surface opposite to the surface of the second substrate and in close contact with the surface of the first substrate on which the second substrate is laminated,
The first flow path first introduction paths of the plurality of first flow paths include a plurality of first flow path first introduction paths arranged along the first substrate surface of each of the plurality of first substrates. including
The first channel second introduction paths of the plurality of first channels comprise a plurality of first channel second introduction paths arranged along the first substrate surface of each of the plurality of first substrates. including
the first flow convergence flow channel of the plurality of first flow channels includes a plurality of first flow convergence flow channels arranged along the surface of each of the second substrates of the plurality of second substrates;
the first flow path junction of the plurality of first flow paths comprises a plurality of first flow path junction through-holes penetrating through each of the plurality of first substrates in the plate thickness direction;
The second flow path first introduction path of the plurality of second flow paths and the second flow path second introduction path of the plurality of second flow paths are arranged on the respective second substrates of the plurality of second substrates. The flow paths are arranged along the surface and arranged in a region where the plurality of first flow path confluence flow paths does not exist when viewed from the direction along the lamination direction of the first substrate and the second substrate. road device. 前記複数の第２流路の前記第２流路合流部は、前記複数の第１基板のそれぞれをそれらの板厚方向に貫通する複数の第２流路合流部貫通孔からなり、
前記複数の第２流路の前記第２流路合流流路は、前記複数の第１基板のそれぞれの前記第１基板表面に沿って配列された複数の第２流路合流流路を含み、
前記第１基板表面に沿って配列された前記複数の第２流路合流流路は、前記積層方向に沿う方向から見て、前記複数の第１流路第１導入流路及び前記複数の第１流路第２導入流路が存在しない領域に配置されている、請求項１に記載の流路装置。 the second flow path junction of the plurality of second flow paths comprises a plurality of second flow path junction through-holes penetrating through each of the plurality of first substrates in the plate thickness direction;
the second flow convergence flow channel of the plurality of second flow channels includes a plurality of second flow convergence flow channels arranged along the first substrate surface of each of the plurality of first substrates;
When viewed from the stacking direction, the plurality of second flow passages arranged along the surface of the first substrate are the plurality of first flow passages, the first introduction flow passages, and the plurality of first introduction flow passages. 2. The channel device according to claim 1, wherein the one-channel second introduction channel is arranged in an area where there is no second introduction channel. 前記複数の第１基板のそれぞれの前記第１基板表面に沿って配列された前記複数の第１流路第１導入路は、前記第１基板表面とその第１基板表面に密着した前記第２基板裏面との少なくとも一方に形成された複数の第１流路第１導入溝からなり、
前記複数の第１基板のそれぞれの前記第１基板表面に沿って配列された前記複数の第１流路第２導入路は、前記第１基板表面とその第１基板表面に密着した前記第２基板裏面との少なくとも一方に形成された複数の第１流路第２導入溝からなり、
前記複数の第２基板のそれぞれの前記第２基板表面に沿って配列された前記複数の第１流路合流流路は、前記第２基板表面とその第２基板表面に密着した前記第１基板裏面との少なくとも一方に形成された複数の第１流路合流溝からなり、
前記複数の第２基板のそれぞれの前記第２基板表面に沿って配列された前記複数の第２流路第１導入路は、前記第２基板表面とその第２基板表面に密着した前記第１基板裏面との少なくとも一方に形成された複数の第２流路第１導入溝からなり、
前記複数の第２基板のそれぞれの前記第２基板表面に沿って配列された前記複数の第２流路第２導入路は、前記第２基板表面とその第２基板表面に密着した前記第１基板裏面との少なくとも一方に形成された複数の第２流路第２導入溝からなり、
前記複数の第１基板のそれぞれの前記第１基板表面に沿って配列された前記複数の第２流路合流流路は、前記第１基板表面とその第１基板表面に密着した前記第２基板裏面との少なくとも一方に形成された複数の第２流路合流溝からなる、請求項２に記載の流路装置。 The plurality of first flow paths arranged along the first substrate surface of each of the plurality of first substrates comprises the first substrate surface and the second flow path in close contact with the first substrate surface. Consisting of a plurality of first flow path first introduction grooves formed on at least one of the back surface of the substrate,
The plurality of first flow passages and the second introduction passages arranged along the first substrate surface of each of the plurality of first substrates comprise the first substrate surface and the second flow path in close contact with the first substrate surface. Consisting of a plurality of first channel second introduction grooves formed on at least one of the back surface of the substrate,
The plurality of first flow passages confluence flow passages arranged along the second substrate surface of each of the plurality of second substrates comprises the second substrate surface and the first substrate in close contact with the second substrate surface. Consisting of a plurality of first flow path confluence grooves formed on at least one of the back surface and
The plurality of second flow paths arranged along the second substrate surface of each of the plurality of second substrates, the plurality of first introduction paths are arranged on the surface of the second substrate and the first introduction path in close contact with the surface of the second substrate. Consisting of a plurality of second channel first introduction grooves formed on at least one of the back surface of the substrate,
The plurality of second flow paths arranged along the second substrate surface of each of the plurality of second substrates includes the second substrate surface and the first flow path in close contact with the second substrate surface. Consisting of a plurality of second flow path second introduction grooves formed on at least one of the back surface of the substrate,
The plurality of second flow passages arranged along the surface of the first substrate of each of the plurality of first substrates includes the surface of the first substrate and the second substrate in close contact with the surface of the first substrate. 3. The channel device according to claim 2, comprising a plurality of second channel merging grooves formed on at least one of the back surface and the back surface. 前記第１流路第１導入路を構成する前記第１流路第１導入溝は、前記第１基板表面とその第１基板表面に密着した前記第２基板裏面とのいずれか一方のみに設けられ、
前記第１流路第２導入路を構成する前記第１流路第２導入溝は、前記第１基板表面とその第１基板表面に密着した前記第２基板裏面とのいずれか一方のみに設けられ、
前記第１流路合流流路を構成する前記第１流路合流溝は、前記第２基板表面とその第２基板表面に密着した前記第１基板裏面とのいずれか一方のみに設けられ、
前記第２流路第１導入路を構成する前記第２流路第１導入溝は、前記第２基板表面とその第２基板表面に密着した前記第１基板裏面とのいずれか一方のみに設けられ、
前記第２流路第２導入路を構成する前記第２流路第２導入溝は、前記第２基板表面とその第２基板表面に密着した前記第１基板裏面とのいずれか一方のみに設けられ、
前記第２流路合流流路を構成する前記第２流路合流溝は、前記第１基板表面とその第１基板表面に密着した前記第２基板裏面とのいずれか一方のみに設けられている、請求項３に記載の流路装置。 The first flow channel first introduction groove constituting the first flow channel first introduction channel is provided only on either one of the first substrate surface and the second substrate back surface in close contact with the first substrate surface. be
The first channel second introduction groove constituting the first channel second introduction channel is provided only on one of the surface of the first substrate and the back surface of the second substrate in close contact with the surface of the first substrate. be
the first flow convergence groove constituting the first flow convergence flow channel is provided only on either the surface of the second substrate or the back surface of the first substrate in close contact with the surface of the second substrate,
The second channel first introduction groove constituting the second channel first introduction channel is provided only on either the surface of the second substrate or the back surface of the first substrate in close contact with the surface of the second substrate. be
The second channel second introduction groove constituting the second channel second introduction channel is provided only on either the surface of the second substrate or the back surface of the first substrate in close contact with the surface of the second substrate. be
The second flow merging groove forming the second flow merging flow path is provided only on either the surface of the first substrate or the rear surface of the second substrate in close contact with the surface of the first substrate. 4. The flow path device according to claim 3. 前記第１基板と前記第２基板の積層方向における前記第１基板の特定の枚数ごとに、前記第１流路第１導入路、前記第１流路第２導入路、及び、前記第２流路合流流路が、同じ配列パターンで前記第１基板表面に沿って配列されている、請求項２～４のいずれか１項に記載の流路装置。 For each specific number of the first substrates in the stacking direction of the first substrate and the second substrate, the first flow path first introduction path, the first flow path second introduction path, and the second flow path The channel device according to any one of claims 2 to 4, wherein the confluence channels are arranged along the first substrate surface in the same arrangement pattern. 前記複数の第１基板のそれぞれの前記第１基板表面に沿って配置される前記第１流路第１導入路、前記第１流路第２導入路、及び、前記第２流路合流流路の配列パターンは、同じである、請求項５に記載の流路装置。 the first flow path first introduction path, the first flow path second introduction path, and the second flow path confluence flow path arranged along the surface of each of the first substrates of the plurality of first substrates; 6. The flow channel device according to claim 5, wherein the arrangement patterns of the are the same. 前記積層方向における前記第２基板の特定の枚数ごとに、前記第２流路第１導入路、前記第２流路第２導入路、及び、前記第１流路合流流路が、同じ配列パターンで前記第２基板表面に沿って配列されている、請求項２～６のいずれか１項に記載の流路装置。 The first introduction path of the second flow path, the second introduction path of the second flow path, and the confluence flow path of the first flow path are arranged in the same pattern for each specific number of the second substrates in the stacking direction. 7. The channel device according to any one of claims 2 to 6, wherein the channel device is arranged along the surface of the second substrate by . 前記複数の第２基板のそれぞれの前記第２基板表面に沿って配置される前記第２流路第１導入路、前記第２流路第２導入路、及び、前記第１流路合流流路の配列パターンは、同じである、請求項７に記載の流路装置。 the second flow path first introduction path, the second flow path second introduction path, and the first flow path confluence flow path arranged along the surface of each of the second substrates of the plurality of second substrates; 8. The flow channel device according to claim 7, wherein the arrangement patterns of are the same. 前記第１流路第１導入路は、前記第１液体を受け入れる箇所である第１流路第１流入口を有し、
前記第１流路第２導入路は、前記第２液体を受け入れる箇所である第１流路第２流入口を有し、
前記第２流路第１導入路は、前記第１液体を受け入れる箇所である第２流路第１流入口を有し、
前記第２流路第２導入路は、前記第２液体を受け入れる箇所である第２流路第２流入口を有し、
前記複数の第１流路の前記第１流路第１流入口は、前記流路構造体の任意の側面における特定の領域に集中して配置され、
前記複数の第１流路の前記第１流路第２流入口は、前記流路構造体の任意の側面における特定の領域に集中して配置され、
前記複数の第２流路の前記第２流路第１流入口は、前記流路構造体の任意の側面における特定の領域に集中して配置され、
前記複数の第２流路の前記第２流路第２流入口は、前記流路構造体の任意の側面における特定の領域に集中して配置されている、請求項１～８のいずれか１項に記載の流路装置。 The first flow path first introduction path has a first flow path first inlet that is a portion for receiving the first liquid,
The first channel second introduction channel has a first channel second inlet that is a portion for receiving the second liquid,
The second flow path first introduction path has a second flow path first inlet that is a portion for receiving the first liquid,
the second flow path second introduction path has a second flow path second inlet for receiving the second liquid,
the first inlets of the plurality of first channels are concentrated in a specific region on any side surface of the channel structure;
The first flow channel second inlets of the plurality of first flow channels are concentrated in a specific region on any side surface of the flow channel structure,
the second flow channel first inlets of the plurality of second flow channels are concentrated in a specific region on any side surface of the flow channel structure;
9. Any one of claims 1 to 8, wherein the second flow channel second inlets of the plurality of second flow channels are concentrated in a specific region on any side surface of the flow channel structure. 4. The flow channel device according to claim 1. 前記複数の第１流路の前記第１流路第１流入口を一括して覆うように前記流路構造体に取り付けられ、それらの第１流路第１流入口へ前記第１液体を分配する第１流路第１分配ヘッダと、
前記複数の第１流路の前記第１流路第２流入口を一括して覆うように前記流路構造体に取り付けられ、それらの第１流路第２流入口へ前記第２液体を分配する第１流路第２分配ヘッダと、
前記複数の第２流路の前記第２流路第１流入口を一括して覆うように前記流路構造体に取り付けられ、それらの第２流路第１流入口へ前記第１液体を分配する第２流路第１分配ヘッダと、
前記複数の第２流路の前記第２流路第２流入口を一括して覆うように前記流路構造体に取り付けられ、それらの第２流路第２流入口へ前記第２液体を分配する第２流路第２分配ヘッダと、をさらに備える、請求項９に記載の流路装置。 attached to the channel structure so as to collectively cover the first inlets of the plurality of first channels, and distributes the first liquid to the first inlets of the first channels; a first flow path first distribution header to
attached to the channel structure so as to collectively cover the first channel second inlets of the plurality of first channels, and distributing the second liquid to the first channel second inlets; a first flow path second distribution header to
attached to the channel structure so as to collectively cover the first inlets of the second channels of the plurality of second channels, and distributes the first liquid to the first inlets of the second channels; a second flow path first distribution header;
attached to the flow channel structure so as to collectively cover the second flow channel second inlets of the plurality of second flow channels, and distributes the second liquid to the second flow channel second inlets of the plurality of second flow channels; 10. The flow path device of claim 9, further comprising a second flow path second distribution header. 前記第１流路合流流路は、当該第１流路合流流路を流れた前記合流液体が流出する箇所である第１流路流出口を有し、
前記第２流路合流流路は、当該第２流路合流流路を流れた前記合流液体が流出する箇所である第２流路流出口を有し、
前記複数の第１流路の前記第１流路流出口は、前記流路構造体の任意の側面における特定の領域に集中して配置され、
前記複数の第２流路の前記第２流路流出口は、前記流路構造体の任意の側面における特定の領域に集中して配置されている、請求項１～１０のいずれか１項に記載の流路装置。 The first flow convergence channel has a first flow channel outlet, which is a portion from which the converged liquid that has flowed through the first flow convergence flow channel flows out,
The second flow convergence channel has a second flow channel outlet, which is a portion from which the converged liquid that has flowed through the second flow convergence flow channel flows out,
The first flow channel outlets of the plurality of first flow channels are concentrated in a specific region on any side surface of the flow channel structure,
11. Any one of claims 1 to 10, wherein the second flow channel outlets of the plurality of second flow channels are concentrated in a specific region on any side surface of the flow channel structure. The channel device as described. 前記複数の第１流路の前記第１流路流出口を一括して覆うように前記流路構造体に取り付けられ、それらの第１流路流出口から流出する前記合流液体を受けて回収する第１流路回収ヘッダと、
前記複数の第２流路の前記第２流路流出口を一括して覆うように前記流路構造体に取り付けられ、それらの第２流路流出口から流出する前記合流液体を受けて回収する第２流路回収ヘッダと、をさらに備える、請求項１１に記載の流路装置。 attached to the flow channel structure so as to collectively cover the first flow channel outlets of the plurality of first flow channels, and receives and recovers the combined liquid flowing out from the first flow channel outlets; a first channel recovery header;
attached to the flow channel structure so as to collectively cover the second flow channel outlets of the plurality of second flow channels, and receives and recovers the combined liquid flowing out from the second flow channel outlets; 12. The flow path device of claim 11, further comprising a second flow path collection header. 前記複数の第１流路のそれぞれの前記第１流路合流流路は、それらの第１流路合流流路における前記合流液体の単位時間当たりの流量が等しくなるように構成され、
前記複数の第１流路のそれぞれの前記第２流路合流流路は、それらの第２流路合流流路における前記合流液体の単位時間当たりの流量が等しくなるように構成されている、請求項１～１２のいずれか１項に記載の流路装置。 The first flow convergence flow paths of the plurality of first flow paths are configured such that the flow rates per unit time of the converged liquid in the first flow convergence flow paths are equal,
wherein the second confluence passages of the plurality of first confluence passages are configured so that the flow rates per unit time of the merged liquid in the second confluence passages are equal to each other; 13. The flow channel device according to any one of items 1 to 12. 前記複数の第１流路のそれぞれの前記第１流路合流流路は、その第１流路合流流路における前記合流液体の流れ方向に対して直交する方向の断面である第１合流流路断面を有し、それらの第１流路合流流路の前記第１合流流路断面の面積は、同じであり、
前記複数の第２流路のそれぞれの前記第２流路合流流路は、その第２流路合流流路における前記合流液体の流れ方向に対して直交する方向の断面である第２合流流路断面を有し、それらの第２流路合流流路の前記第２合流流路断面の面積は、同じである、請求項１３に記載の流路装置。 The first confluence passage of each of the plurality of first confluence passages is a first confluence passage that is a cross section in a direction perpendicular to the flow direction of the merged liquid in the first confluence passage. having a cross-section, and the areas of the first confluence cross-sections of the first confluence channels are the same,
The second flow confluent channel of each of the plurality of second flow channels is a second confluent flow channel that is a cross section in a direction perpendicular to the flow direction of the converged liquid in the second flow confluent flow channel. 14. The flow path device according to claim 13, wherein the second flow path cross-sections of the second flow path merge flow paths have the same area. 前記複数の第１流路のそれぞれの前記第１流路合流流路の前記第１合流流路断面の形状は、同じであり、
前記複数の第２流路のそれぞれの前記第２流路合流流路の前記第２合流流路断面の形状は、同じである、請求項１４に記載の流路装置。 the shape of the cross-section of the first converging flow path of each of the first flow converging flow paths of the plurality of first flow paths is the same;
15. The flow channel device according to claim 14, wherein the second flow channel cross-section of each of the plurality of second flow channels has the same shape. 前記複数の第１流路のそれぞれの前記第１流路合流流路の流路長は、同じであり、
前記複数の第２流路のそれぞれの前記第２流路合流流路の流路長は、同じである、請求項１３～１５のいずれか１項に記載の流路装置。 the channel lengths of the first channel confluence channel of each of the plurality of first channels are the same, and
The channel device according to any one of claims 13 to 15, wherein channel lengths of said second channel confluence channels of said plurality of second channels are the same. 前記複数の第１流路のそれぞれの前記第１流路合流流路は、その第１流路合流流路において前記合流液体が流れる向きを変化させるように折れ曲がった箇所である少なくとも１つの第１合流流路曲折箇所を有し、それらの第１流路合流流路における前記第１合流流路曲折箇所の数は、同じであり、
前記複数の第２流路のそれぞれの前記第２流路合流流路は、その第２流路合流流路において前記合流液体が流れる向きを変化させるように折れ曲がった箇所である少なくとも１つの第２合流流路曲折箇所を有し、それらの第２流路合流流路における前記第２合流流路曲折箇所の数は、同じである、請求項１３～１６のいずれか１項に記載の流路装置。 Each of the plurality of first flow paths has at least one first flow path where the first flow path is bent to change the flow direction of the merged liquid in the first flow path. having a merging flow path bending point, the number of said first merging flow path bending points in those first flow path merging flow paths is the same,
Each of the second flow passages of the plurality of second flow passages has at least one second flow passage that is a bent portion so as to change the flow direction of the merged liquid in the second flow flow convergence flow passage. 17. The flow path according to any one of claims 13 to 16, having confluence flow path bending points, wherein the number of said second confluence flow path bending points in those second flow path confluence paths is the same. Device.
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