JP2022105251A - Semiconductor heat dissipation package structure - Google Patents
Semiconductor heat dissipation package structure Download PDFInfo
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- JP2022105251A JP2022105251A JP2021026656A JP2021026656A JP2022105251A JP 2022105251 A JP2022105251 A JP 2022105251A JP 2021026656 A JP2021026656 A JP 2021026656A JP 2021026656 A JP2021026656 A JP 2021026656A JP 2022105251 A JP2022105251 A JP 2022105251A
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- 230000017525 heat dissipation Effects 0.000 title claims abstract description 47
- 239000004065 semiconductor Substances 0.000 title claims abstract description 38
- 239000012790 adhesive layer Substances 0.000 claims abstract description 49
- 239000000758 substrate Substances 0.000 claims abstract description 48
- 239000010410 layer Substances 0.000 claims abstract description 38
- 238000000034 method Methods 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 230000005855 radiation Effects 0.000 claims 2
- 239000010409 thin film Substances 0.000 description 7
- 239000000945 filler Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- 238000000576 coating method Methods 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
- H01L23/3672—Foil-like cooling fins or heat sinks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/563—Encapsulation of active face of flip-chip device, e.g. underfilling or underencapsulation of flip-chip, encapsulation preform on chip or mounting substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3121—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
- H01L23/5387—Flexible insulating substrates
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- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
Description
本発明は、半導体放熱パッケージ構造及びその製造方法に関し、特に、接着剤が溢れ出してパッケージ構造を汚染する事象を回避する半導体放熱パッケージ構造に関するものである。 The present invention relates to a semiconductor heat dissipation package structure and a method for manufacturing the same, and more particularly to a semiconductor heat dissipation package structure that avoids an event in which an adhesive overflows and contaminates the package structure.
電子製品の機能が向上するにつれ、チップが演算時に高熱を発するようになっている。チップの温度が高すぎるとチップが損壊してしまい、電子製品が使用できなくなる。
薄膜フリップチップパッケージ構造として、例えば、特許文献1に記載されたものが知られている。
As the functionality of electronic products improves, the chips generate high heat during computation. If the temperature of the chip is too high, the chip will be damaged and the electronic product cannot be used.
As a thin film flip chip package structure, for example, the one described in Patent Document 1 is known.
従来の技術では、第一放熱部材の接着層がチップ及び薄膜基板に取り付けられており、チップに対して放熱を行っている。接着層のエッジは基材、熱伝導層、及び金属層のエッジに平坦に揃えられている。このため、薄膜フリップチップパッケージ構造が圧搾された場合、接着層が外力により圧迫されることで基材、熱伝導層、及び金属層のエッジに溢れ出したり突出し、薄膜フリップチップパッケージ構造を汚染してしまう。 In the conventional technique, the adhesive layer of the first heat dissipation member is attached to the chip and the thin film substrate to dissipate heat to the chip. The edges of the adhesive layer are evenly aligned with the edges of the substrate, the heat conductive layer, and the metal layer. Therefore, when the thin film flip chip package structure is squeezed, the adhesive layer is pressed by an external force and overflows or protrudes to the edges of the base material, the heat conductive layer, and the metal layer, contaminating the thin film flip chip package structure. It ends up.
複数の薄膜フリップチップパッケージ構造を巻き取る場合、基材、熱伝導層、及び金属層のエッジに溢れ出したり突出する接着層が薄膜フリップチップパッケージ構造を相互に接着させてしまい、薄膜フリップチップパッケージ構造の品質及び歩留まりに影響を及ぼした。 When winding multiple thin film flip chip package structures, the adhesive layer that overflows or protrudes from the edges of the substrate, heat conductive layer, and metal layer causes the thin film flip chip package structure to adhere to each other, resulting in the thin film flip chip package. It affected the quality and yield of the structure.
基板とヒートシンクとの間に設置している接着層がヒートシンクに溢れ出したり突出するのを回避し、半導体放熱パッケージ構造を汚染しないようにする。また、複数の半導体放熱パッケージ構造を巻き取る際に、ヒートシンクに溢れ出したり突出する接着層がこれら半導体放熱パッケージ構造を相互に接着させる事象も回避する。
本発明は、上述に鑑みてなされたものであり、その目的は、半導体放熱パッケージ構造を提供することにある。
It prevents the adhesive layer installed between the substrate and the heat sink from overflowing or protruding into the heat sink, and does not contaminate the semiconductor heat dissipation package structure. Further, when the plurality of semiconductor heat dissipation package structures are wound up, the phenomenon that the adhesive layer overflowing or protruding from the heat sink adheres these semiconductor heat dissipation package structures to each other is avoided.
The present invention has been made in view of the above, and an object of the present invention is to provide a semiconductor heat dissipation package structure.
本発明の半導体放熱パッケージ構造は、回路層を有している基板と、前記回路層に電気的に接続しているチップと、前記基板に設置され、前記チップを包囲している接着層と、キャリア及び放熱層を有し、前記放熱層は前記キャリアに設置しているヒートシンクと、を備え、前記ヒートシンクは前記放熱層を介して前記チップの露出面に接触し、取付部により前記接着層に取り付け、前記取付部と前記基板との間に前記接着層を包囲している空間を形成している。 The semiconductor heat dissipation package structure of the present invention includes a substrate having a circuit layer, a chip electrically connected to the circuit layer, and an adhesive layer installed on the substrate and surrounding the chip. It has a carrier and a heat radiating layer, the heat radiating layer includes a heat sink installed on the carrier, and the heat sink comes into contact with the exposed surface of the chip via the heat radiating layer, and is attached to the adhesive layer by a mounting portion. It is attached, and a space surrounding the adhesive layer is formed between the attachment portion and the substrate.
本発明の半導体放熱パッケージ構造の製造方法は、チップは基板に結合し前記基板の回路層に電気的に接続している基板及びチップを提供する工程と、前記チップを包囲している接着層を前記基板に設置する工程と、ヒートシンクはキャリア及び放熱層を有し、前記放熱層は前記キャリアに設置し、前記ヒートシンクは前記放熱層を介して前記チップの露出面に接触し、前記ヒートシンクは取付部により前記接着層に取り付け、前記取付部と前記基板との間には前記接着層を包囲している空間を形成している前記ヒートシンクを前記基板に設置する工程と、を含む。 The method for manufacturing a semiconductor heat sink package structure of the present invention includes a step of providing a substrate and a chip in which the chip is bonded to the substrate and electrically connected to the circuit layer of the substrate, and an adhesive layer surrounding the chip. The step of installing on the substrate, the heat sink has a carrier and a heat sink, the heat sink is installed on the carrier, the heat sink contacts the exposed surface of the chip through the heat sink, and the heat sink is attached. A step of installing the heat sink, which is attached to the adhesive layer by a portion and forms a space surrounding the adhesive layer between the attachment portion and the substrate, is provided on the substrate.
本発明は、基板にヒートシンクを設置し、ヒートシンクの放熱層は基板に設置しているチップに接触し、チップに対する放熱を行う。 In the present invention, a heat sink is installed on the substrate, and the heat dissipation layer of the heat sink contacts the chip installed on the substrate to dissipate heat to the chip.
本発明は、取付部と基板との間に位置している空間が接着層を包囲し、圧搾されて溢れ出した接着層を収容し、接着層がヒートシンクに溢れ出したり突出する事象を回避している。また、複数の半導体放熱パッケージ構造を巻き取る際に、これら半導体放熱パッケージ構造が相互に接着する事象も回避し、製品の品質及び歩留まりに影響を及ぼさないようにしている。 In the present invention, the space located between the mounting portion and the substrate surrounds the adhesive layer, accommodates the adhesive layer that has been squeezed and overflowed, and avoids the phenomenon that the adhesive layer overflows or protrudes into the heat sink. ing. Further, when winding a plurality of semiconductor heat dissipation package structures, the phenomenon that these semiconductor heat dissipation package structures adhere to each other is avoided so as not to affect the quality and yield of the product.
以下、本発明による実施形態を図面に基づいて説明する。なお、複数の実施形態において実質的に同一の構成部位には同一の符号を付し、説明を省略する。 Hereinafter, embodiments according to the present invention will be described with reference to the drawings. In the plurality of embodiments, substantially the same constituent parts are designated by the same reference numerals, and the description thereof will be omitted.
(第一実施形態)
本発明の第一実施形態について図1から図6に基づいて説明する。
(First Embodiment)
The first embodiment of the present invention will be described with reference to FIGS. 1 to 6.
図1から図6は本発明の第一実施形態に係る半導体放熱パッケージ構造100の製造方法を示す概略図である。
図1及び図2に示すように、基板110及びチップ120を備える。チップ120は基板110に結合し、基板110の回路層111に電気的に接続している。
本実施形態では、回路層111は基板110の表面に設置し、保護層112により回路層111を被覆し、回路層111の複数のインナーピン111aを露出させている。チップ120の複数のバンプ121は回路層111のこれらインナーピン111aに結合している。充填剤113を基板110とチップ120との間に充填し、充填剤113によりこれらバンプ121を被覆している。
1 to 6 are schematic views showing a method of manufacturing the semiconductor heat
As shown in FIGS. 1 and 2, the
In the present embodiment, the
図3及び図4に示すように、接着層130は基板110に設置し、チップ120を包囲している。
本実施形態では、接着層130は基板110に設置しているだけではなく、充填剤113にも設置している。
As shown in FIGS. 3 and 4, the
In this embodiment, the
接着層130は塗布方式で基板110に設置している。
The
図5及び図6に示すように、ヒートシンク140を基板110に設置し、半導体放熱パッケージ構造100を形成している。ヒートシンク140はキャリア141及び放熱層142を備え、放熱層142はキャリア141に設置し、ヒートシンク140は放熱層142の接触面142aを介してチップ120の露出面122に接触している。接触面142aの接触面積は露出面122の表面積未満ではない。このため、放熱層142がチップ120の露出面122を全面的に被覆し、放熱又は熱伝導面積を増加させ、放熱効果を高めている。
As shown in FIGS. 5 and 6, the
図5及び図6に示すように、ヒートシンク140の取付部140aはチップ120を包囲している接着層130に取り付け、取付部140aはチップ120を包囲し、取付部140aと基板110との間に接着層130を包囲している空間Sを形成している。
本実施形態では、ヒートシンク140は取付部140aに位置している放熱層142により接着層130に取り付けている。
As shown in FIGS. 5 and 6, the
In the present embodiment, the
図5及び図6に示すように、本実施形態では、取付部140aのエッジ140bは基板110に垂直に投影し、基板110に空間Sの極度エッジS1を形成している。
空間Sの極度エッジS1と接着層130の外縁131との間には20μm以上である間隔を有している。
As shown in FIGS. 5 and 6, in the present embodiment, the
There is a distance of 20 μm or more between the extreme edge S1 of the space S and the
図5に示すように、取付部140aと基板110との間に位置している空間Sは接着層130を包囲し、圧搾されて変形するか溢れ出した接着層130を収容するために用い、接着層130がヒートシンク140に溢れ出したり突出する事象を回避し、半導体放熱パッケージ構造100が汚染されないようにしている。また、複数の半導体放熱パッケージ構造100を巻き取る過程で相互に接着する事象も回避し、これら半導体放熱パッケージ構造100の品質及び歩留まりに影響を及ぼさないようにしている。
As shown in FIG. 5, the space S located between the
(その他の実施形態) (Other embodiments)
接着層は塗布方式で基板に設置している限りではなく、その他の実施形態では、予め環状接着層を形成し、環状接着層を基板110に取り付け、チップ120を包囲している。
The adhesive layer is not limited to being installed on the substrate by a coating method, and in other embodiments, an annular adhesive layer is formed in advance, the annular adhesive layer is attached to the
図7に示すように、その他の実施形態では、ヒートシンク140は取付部140aに位置しているキャリア141により接着層130に取り付けている。
As shown in FIG. 7, in other embodiments, the
その他の実施形態の他の基本的構成は、第一実施形態と同様である。 Other basic configurations of the other embodiments are the same as those of the first embodiment.
以上、本発明は、上記実施形態に限定されるものではなく、その要旨を逸脱しない範囲において種々の形態で実施可能である。 As described above, the present invention is not limited to the above embodiment, and can be implemented in various forms without departing from the gist thereof.
100 半導体放熱パッケージ構造、
110 基板、
111 回路層、
111a インナーピン、
112 保護層、
113 充填剤、
120 チップ、
121 バンプ、
122 露出面、
130 接着層、
131 外縁、
140 ヒートシンク、
140a 取付部、
140b エッジ、
141 キャリア、
142 放熱層、
142a 接触面、
S 空間、
S1 極度エッジ。
100 semiconductor heat dissipation package structure,
110 board,
111 circuit layer,
111a inner pin,
112 protective layer,
113 Filler,
120 chips,
121 bumps,
122 exposed surface,
130 adhesive layer,
131 outer edge,
140 heat sink,
140a mounting part,
140b edge,
141 carrier,
142 heat dissipation layer,
142a contact surface,
S space,
S1 Extreme edge.
Claims (12)
前記回路層に電気的に接続しているチップと、
前記基板に設置され、前記チップを包囲している接着層と、
キャリア及び放熱層を有し、前記放熱層は前記キャリアに設置しているヒートシンクと、を備え、
前記ヒートシンクは前記放熱層を介して前記チップの露出面に接触し、取付部により前記接着層に取り付け、前記取付部と前記基板との間に前記接着層を包囲している空間を形成していることを特徴とする半導体放熱パッケージ構造。 A board with a circuit layer and
With a chip electrically connected to the circuit layer,
An adhesive layer installed on the substrate and surrounding the chip,
It has a carrier and a heat sink, and the heat sink includes a heat sink installed on the carrier.
The heat sink contacts the exposed surface of the chip via the heat dissipation layer, is attached to the adhesive layer by a mounting portion, and forms a space surrounding the adhesive layer between the mounting portion and the substrate. A semiconductor heat sink package structure characterized by the fact that it is present.
前記チップを包囲している接着層を前記基板に設置する工程と、
ヒートシンクはキャリア及び放熱層を有し、前記放熱層は前記キャリアに設置し、前記ヒートシンクは前記放熱層を介して前記チップの露出面に接触し、前記ヒートシンクは取付部により前記接着層に取り付け、前記取付部と前記基板との間には前記接着層を包囲している空間を形成している前記ヒートシンクを前記基板に設置する工程と、を含むことを特徴とする半導体放熱パッケージ構造の製造方法。 The process of providing a substrate and a chip that are coupled to the substrate and electrically connected to the circuit layer of the substrate.
The process of installing the adhesive layer surrounding the chip on the substrate, and
The heat sink has a carrier and a heat radiating layer, the heat radiating layer is installed on the carrier, the heat sink contacts the exposed surface of the chip via the heat radiating layer, and the heat sink is attached to the adhesive layer by a mounting portion. A method for manufacturing a semiconductor heat dissipation package structure, which comprises a step of installing the heat sink forming a space surrounding the adhesive layer between the mounting portion and the substrate on the substrate. ..
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Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6354485B1 (en) * | 1996-10-24 | 2002-03-12 | Tessera, Inc. | Thermally enhanced packaged semiconductor assemblies |
JP2008028396A (en) * | 2006-07-20 | 2008-02-07 | Samsung Electronics Co Ltd | Cof semiconductor package |
CN101577263A (en) * | 2008-05-06 | 2009-11-11 | 南茂科技股份有限公司 | Chip packaging structure and chip packaging coiling tape |
JP2010251357A (en) * | 2009-04-10 | 2010-11-04 | Panasonic Corp | Semiconductor module device |
KR20100135161A (en) * | 2009-06-16 | 2010-12-24 | 주식회사 동부하이텍 | Heat releasing semiconductor package, method for manufacturing the same and display apparatus including the same |
JP2012164846A (en) * | 2011-02-08 | 2012-08-30 | Renesas Electronics Corp | Semiconductor device, semiconductor device manufacturing method and display device |
US20180342437A1 (en) * | 2015-12-02 | 2018-11-29 | Novatek Microelectronics Corp. | Chip on film package and heat-dissipation structure for a chip package |
TWM602725U (en) * | 2020-07-31 | 2020-10-11 | 大陸商河南烯力新材料科技有限公司 | Chip on film package structure and display device |
TWM611792U (en) * | 2020-12-31 | 2021-05-11 | 頎邦科技股份有限公司 | Heat-dissipating semiconductor package |
JP2022081373A (en) * | 2020-11-19 | 2022-05-31 | ▲き▼邦科技股▲分▼有限公司 | Circuit board |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3119649B2 (en) * | 1999-03-30 | 2000-12-25 | 大衆電腦股▲ふん▼有限公司 | Semiconductor device having heat dissipation structure on both sides and method of manufacturing the same |
TWI618205B (en) * | 2015-05-22 | 2018-03-11 | 南茂科技股份有限公司 | Chip on film package and heat dissipation method thereof |
-
2020
- 2020-12-31 TW TW109147118A patent/TWI744156B/en active
-
2021
- 2021-02-22 KR KR1020210023228A patent/KR102485002B1/en active IP Right Grant
- 2021-02-22 JP JP2021026656A patent/JP7152544B2/en active Active
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6354485B1 (en) * | 1996-10-24 | 2002-03-12 | Tessera, Inc. | Thermally enhanced packaged semiconductor assemblies |
JP2008028396A (en) * | 2006-07-20 | 2008-02-07 | Samsung Electronics Co Ltd | Cof semiconductor package |
CN101577263A (en) * | 2008-05-06 | 2009-11-11 | 南茂科技股份有限公司 | Chip packaging structure and chip packaging coiling tape |
JP2010251357A (en) * | 2009-04-10 | 2010-11-04 | Panasonic Corp | Semiconductor module device |
KR20100135161A (en) * | 2009-06-16 | 2010-12-24 | 주식회사 동부하이텍 | Heat releasing semiconductor package, method for manufacturing the same and display apparatus including the same |
JP2012164846A (en) * | 2011-02-08 | 2012-08-30 | Renesas Electronics Corp | Semiconductor device, semiconductor device manufacturing method and display device |
US20180342437A1 (en) * | 2015-12-02 | 2018-11-29 | Novatek Microelectronics Corp. | Chip on film package and heat-dissipation structure for a chip package |
TWM602725U (en) * | 2020-07-31 | 2020-10-11 | 大陸商河南烯力新材料科技有限公司 | Chip on film package structure and display device |
JP2022081373A (en) * | 2020-11-19 | 2022-05-31 | ▲き▼邦科技股▲分▼有限公司 | Circuit board |
TWM611792U (en) * | 2020-12-31 | 2021-05-11 | 頎邦科技股份有限公司 | Heat-dissipating semiconductor package |
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JP7152544B2 (en) | 2022-10-12 |
TW202230642A (en) | 2022-08-01 |
TWI744156B (en) | 2021-10-21 |
KR20220097094A (en) | 2022-07-07 |
KR102485002B1 (en) | 2023-01-04 |
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