JP2022100939A5 - - Google Patents
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- JP2022100939A5 JP2022100939A5 JP2020215232A JP2020215232A JP2022100939A5 JP 2022100939 A5 JP2022100939 A5 JP 2022100939A5 JP 2020215232 A JP2020215232 A JP 2020215232A JP 2020215232 A JP2020215232 A JP 2020215232A JP 2022100939 A5 JP2022100939 A5 JP 2022100939A5
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- workpiece
- roof
- processing
- drip
- processing apparatus
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- 238000005498 polishing Methods 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims description 7
- 238000007599 discharging Methods 0.000 claims description 2
Description
一態様では、ワークピースを処理する処理ヘッドを有する処理モジュールと、前記処理ヘッドの下方に位置し、前記処理モジュールが水平方向に移動可能となるように、前記処理モジュールの一部が内部に配置される開口部を有するベースプレートと、前記ワークピースに処理液を供給する処理液供給ノズルと、前記ベースプレートよりも下方に配置され、かつ前記処理モジュールに連結され、前記処理モジュールを移動させるモジュール駆動装置と、前記開口部を覆う防滴機構を備えている、ワークピース処理装置が提供される。
一態様では、前記ワークピース処理装置は、前記処理モジュールの移動に伴って伸縮し、前記開口部を塞ぐ伸縮カバーをさらに備える。
一態様では、前記防滴機構は、前記開口部を覆う第１の防滴機構と、少なくとも前記第１の防滴機構の一部を覆う第２の防滴機構を備え、前記第１の防滴機構は、前記開口部の少なくとも１つの辺に沿って上方に延びた側壁と、前記側壁の上方に配置され、前記側壁を覆うカバー部材を備え、前記カバー部材は、前記側壁よりも高い位置にある第１屋根部と、前記第１屋根部の外側端部から下方に延びる下垂壁を有し、前記第２の防滴機構は、前記カバー部材の上方に配置された第２屋根部を備え、前記第２屋根部は、前記第１屋根部および前記下垂壁を覆っている。
In one aspect , a processing module having a processing head for processing a workpiece; and a portion of the processing module located below the processing head such that the processing module is movable in a horizontal direction. a base plate having an opening in which is disposed ; a processing liquid supply nozzle for supplying a processing liquid to the workpiece; a processing liquid supply nozzle disposed below the base plate and connected to the processing module; A workpiece processing apparatus is provided, comprising a module drive for moving the workpiece, and a drip-proof mechanism for covering the opening .
In one aspect, the workpiece processing device further includes a telescoping cover that expands and contracts as the processing module moves and closes the opening.
In one aspect, the drip-proof mechanism includes a first drip-proof mechanism that covers the opening and a second drip-proof mechanism that covers at least a part of the first drip-proof mechanism, and the drip-proof mechanism includes a first drip-proof mechanism that covers at least a part of the first drip-proof mechanism. The drip mechanism includes a side wall extending upwardly along at least one side of the opening, and a cover member disposed above the side wall and covering the side wall, the cover member being located at a higher level than the side wall. and a hanging wall extending downward from an outer end of the first roof, and the second drip-proof mechanism includes a second roof located above the cover member. The second roof portion covers the first roof portion and the hanging wall.
一態様では、前記第１屋根部の内側端部は、前記処理モジュールに接続されている。
一態様では、前記第１屋根部および前記第２屋根部は、前記開口部から離れる方向において下方に傾斜している。
一態様では、前記第２屋根部は、前記第１屋根部と非接触となるように、前記ベースプレートに固定されている。
一態様では、前記第２屋根部は、前記第１屋根部に固定されている。
一態様では、前記ベースプレートは、前記ベースプレート上に溜まった前記処理液を排出するための少なくとも１つの排液口を有し、前記ワークピース処理装置は、前記排液口に向かって下方に傾斜している傾斜板をさらに備えている。
一態様では、前記ワークピース処理装置は、ワークピースを研磨するための研磨装置であり、前記処理モジュールは、研磨ヘッドを有する研磨ヘッドモジュールである。
In one aspect, an inner end of the first roof is connected to the processing module.
In one aspect, the first roof part and the second roof part are sloped downward in a direction away from the opening.
In one aspect, the second roof part is fixed to the base plate so as not to be in contact with the first roof part.
In one aspect, the second roof part is fixed to the first roof part.
In one aspect, the base plate has at least one drain port for discharging the processing liquid accumulated on the base plate, and the workpiece processing device is inclined downward toward the drain port. It also has a sloping board.
In one embodiment, the workpiece processing device is a polishing device for polishing a workpiece, and the processing module is a polishing head module having a polishing head.
Claims (9)
前記処理ヘッドの下方に位置し、前記処理モジュールが水平方向に移動可能となるように、前記処理モジュールの一部が内部に配置される開口部を有するベースプレートと、
前記ワークピースに処理液を供給する処理液供給ノズルと、
前記ベースプレートよりも下方に配置され、かつ前記処理モジュールに連結され、前記処理モジュールを移動させるモジュール駆動装置と、
前記開口部を覆う防滴機構を備えている、ワークピース処理装置。 a processing module having a processing head for processing a workpiece ;
a base plate located below the processing head and having an opening in which a portion of the processing module is disposed so that the processing module is movable in a horizontal direction ;
a processing liquid supply nozzle that supplies processing liquid to the workpiece;
a module drive device that is disposed below the base plate, is connected to the processing module, and moves the processing module;
A workpiece processing apparatus, comprising a drip-proof mechanism that covers the opening .
前記第１の防滴機構は、 The first drip-proof mechanism is
前記開口部の少なくとも１つの辺に沿って上方に延びた側壁と、 a side wall extending upwardly along at least one side of the opening;
前記側壁の上方に配置され、前記側壁を覆うカバー部材を備え、 a cover member disposed above the side wall and covering the side wall;
前記カバー部材は、 The cover member is
前記側壁よりも高い位置にある第１屋根部と、 a first roof portion located at a higher position than the side wall;
前記第１屋根部の外側端部から下方に延びる下垂壁を有し、 a hanging wall extending downward from the outer end of the first roof part;
前記第２の防滴機構は、前記カバー部材の上方に配置された第２屋根部を備え、 The second drip-proof mechanism includes a second roof portion disposed above the cover member,
前記第２屋根部は、前記第１屋根部および前記下垂壁を覆っている、請求項１に記載のワークピース処理装置。 The workpiece processing apparatus according to claim 1, wherein the second roof portion covers the first roof portion and the hanging wall.
前記ワークピース処理装置は、前記排液口に向かって下方に傾斜している傾斜板をさらに備えている、請求項１に記載のワークピース処理装置。 The base plate has at least one drain port for discharging the processing liquid accumulated on the base plate,
The workpiece processing apparatus according to claim 1 , further comprising an inclined plate inclined downward toward the drain port.
前記処理モジュールは、研磨ヘッドを有する研磨ヘッドモジュールである、請求項１に記載のワークピース処理装置。 The workpiece processing device is a polishing device for polishing a workpiece,
The workpiece processing apparatus of claim 1 , wherein the processing module is a polishing head module having a polishing head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020215232A JP2022100939A (en) | 2020-12-24 | 2020-12-24 | Workpiece processing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020215232A JP2022100939A (en) | 2020-12-24 | 2020-12-24 | Workpiece processing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2022100939A JP2022100939A (en) | 2022-07-06 |
| JP2022100939A5 true JP2022100939A5 (en) | 2023-12-25 |
Family
ID=82271344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020215232A Pending JP2022100939A (en) | 2020-12-24 | 2020-12-24 | Workpiece processing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2022100939A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116587108B (en) * | 2023-06-27 | 2024-02-23 | 杭州安耐特实业有限公司 | Brake block steel backing is grinding device in batches |
-
2020
- 2020-12-24 JP JP2020215232A patent/JP2022100939A/en active Pending
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