JP2021524921A - ガス検出用複合体、その製造方法、前記ガス検出用複合体を含むガスセンサ、及びその製造方法 - Google Patents
ガス検出用複合体、その製造方法、前記ガス検出用複合体を含むガスセンサ、及びその製造方法 Download PDFInfo
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Abstract
Description
<反応式1>
O−+H2O→2OH+e−
先ず、270mlの蒸留水に30mlの過酸化水素水(H2O2、30wt% in H2O)を添加した後、最終的に300mlに製造される溶液を製造した後、0.1Mに該当するシュウ酸スズ(Tin oxalate、SnC2O4)を混合した後、24時間撹拌させた。この溶液に0.5Mに該当するスクロースを混合して5分間撹拌させて噴霧溶液を製造した。準備された噴霧溶液にスズ(Sn)/テルビウム(Tb)の元素比が100/0(比較例1)、99/1(実施例1−3)、95/5(実施例1−1)、及び85/15(実施例1−2)に該当するように計算して塩化テルビウム6水和物(Tb chloride hexahydrate)を添加した後、5分間撹拌させた後、超音波噴霧した。合成された前駆体は5L min−1の流量に(in O2)噴霧と同時に噴霧出口と連結された電気炉(1000℃)を経由しながらすぐに熱処理され、テルビウム(Tb)がスズ(Sn)の総元素量を基準に0at%(比較例1)、1at%(実施例1−3)、5at%(実施例1−1)、15at%(実施例1−2)ドーピングされた酸化スズ(SnO2)卵黄構造が形成された。このように得られた卵黄構造微粉末を600℃で2時間熱処理した。合成された微粉末を3次蒸留水と混合して金(Au)電極が形成されているアルミナ基板にドロップコーティングし、500℃で2時間熱処理してガスセンサを製作した。製作したセンサを450℃で乾燥雰囲気の空気及び80%相対湿度雰囲気の空気又は乾燥雰囲気の空気+混合ガス及び80%相対湿度雰囲気の空気+混合ガスを交互に注入しながら、抵抗の変化を測定した。ガスは予め混合させた後、4−ウェイバルブを利用して濃度を急激に変化させた。総流量は200sccmに固定してガス濃度が変化する時に、温度差が出ないようにした。
先ず、297mLの蒸留水に3mLの塩酸(HCl、35.0%乃至37.0%)を添加した後、0.1Mの塩化スズ(Tin chloride)と0.025Mのクエン酸単一水和物(Citricacid monohydrate)を入れ、5分間撹拌させた後、超音波噴霧した。超音波を通じて形成されたマイクロサイズの液滴は20L min−1の流量に(in air)700℃の反応炉を経由しながら、酸化スズ(SnO2)中空構造が形成された(比較例2)。このように得られた中空構造微粉末を有機バインダーと混合して金(Au)電極が形成されているアルミナ基板にスクリーン印刷し、70℃で2時間乾燥した後に、600℃で2時間熱処理してSnO2ガス感応膜を製造した。その後、電子ビーム蒸着器(Electron Beam Evaporator)を通じてテルビウムソースを利用して厚さが100nmになるように蒸着し、550℃で2時間熱処理してテルビウム(Tb)が塗布された酸化スズ(SnO2)ガスセンサを製造した(実施例2)。製造されたガスセンサのガス感応測定は実施例1−1と同一であるが測定温度のみ400℃に変更した。
先ず、300mLの蒸留水に0.2Mの硝酸亜鉛水和物(Zinc Nitrate Hydrate)を入れ、5分間撹拌させた後、超音波噴霧した。超音波を通じて形成されたマイクロサイズの液滴は20L min−1の流量に(in air)700℃の反応炉を経由しながら、酸化亜鉛(ZnO)中空構造が形成された(比較例3)。このように得られた中空構造微粉末を有機バインダーと混合して金(Au)電極が形成されているアルミナ基板にスクリーン印刷し、70℃で2時間乾燥した後に、600℃で2時間熱処理して酸化亜鉛(ZnO)ガス感応膜を製造した。その後、電子ビーム蒸着器(Electron Beam Evaporator)を通じてテルビウムソースを利用して厚さが100nmになるように蒸着し、550℃で2時間熱処理してTbが塗布されたZnOガスセンサを製造した(実施例3)。製造されたガスセンサのガス感応測定は実施例2と同一である。
先ず、300mLの蒸留水に0.05Mの硝酸インジウム水和物(Indium Nitrate Hydrate)と0.15Mのスクロースを入れ、5分間撹拌させた後、超音波噴霧した。超音波を通じて形成されたマイクロサイズの液滴は20L min−1の流量に(in air)900℃の反応炉を経由しながら、酸化インジウム(In2O3)中空構造が形成された(比較例3)。このように得られた中空構造微粉末を有機バインダーと混合して金(Au)電極が形成されているアルミナ基板にスクリーン印刷し、70℃で2時間乾燥した後に、600℃で2時間熱処理して酸化インジウム(In2O2)ガス感応膜を製造した。その後、電子ビーム蒸着器(Electron Beam Evaporator)を通じてテルビウムソースを利用して厚さが100nmになるように蒸着し、550℃で2時間熱処理してテルビウム(Tb)が塗布されたIn2O3ガスセンサを製造した(実施例4)。製造されたガスセンサのガス感応測定は実施例2と同一である。
先ず、20mLの蒸留水にスズ(Sn)/テルビウム(Tb)の元素比が95/5に該当するように計算して酸化スズ(SnO2)商用微粉末(比較例5)と塩化テルビウム6水和物(Tb chloride hexahydrate)を添加した後、80℃の温度で2時間撹拌させた。この溶液を70℃の電気オーブンで24時間乾燥させた後、600℃の電気炉で2時間熱処理した(実施例5)。その後、センサの製作方法及びガス感応の測定は実施例1−1と同様に遂行した。
先ず、20mLの蒸留水にインジウム(In)/テルビウム(Tb)の元素比が97.5/2.5に該当するように計算して酸化インジウム(SnO2)商用微粉末(比較例6)と塩化テルビウム6水和物(Tb chloride hexahydrate)を添加した後、80℃の温度で2時間撹拌させた。この溶液を70℃の電気オーブンで24時間乾燥させた後、600℃の電気炉で2時間熱処理した(実施例6)。その後、センサの製作方法及びガス感応の測定は実施例1−1と同様に遂行した。
Claims (13)
- ガス検出用複合体において、
酸化物半導体で提供されるナノ構造体と、
前記ナノ構造体に担持されたテルビウム(Tb)添加剤と、を含むガス検出用複合体。 - 前記酸化物半導体は、酸化スズ(SnO2)、酸化亜鉛(ZnO)、及び酸化インジウム(In2O3)からなされた群から選択された請求項1に記載のガス検出用複合体。
- 前記ナノ構造体は、中空構造又は卵黄構造に提供される請求項1に記載のガス検出用複合体。
- 前記酸化物半導体は、酸化スズ(SnO2)で提供され、
前記テルビウム(Tb)添加剤は、前記ナノ構造体のスズ(Sn)の総元素量を基準に0.5at%乃至20at%の含量に担持される請求項1に記載のガス検出用複合体。 - 前記被検ガスは、アセトン、一酸化炭素、アンモニア、トルエン、キシレン、ベンゼン、及びその混合物からなされた群から選択された還元性ガスである請求項1に記載のガス検出用複合体。
- 基板と、
前記基板上に提供され、被検ガスに感応するガス検出用複合体を含む感応層と、
前記感応層上に提供されるテルビウム(Tb)層と、を含み、
前記ガス検出用複合体は、酸化物半導体で提供されるナノ構造体を含むガス検出用ガスセンサ。 - 前記テルビウム(Tb)層の厚さは、50nm以上250nm以下に提供される請求項6に記載のガス検出用ガスセンサ。
- 前記ガス検出用複合体は、前記ナノ構造体に担持されたテルビウム(Tb)添加剤をさらに含む請求項6に記載のガス検出用ガスセンサ。
- 前記酸化物半導体は、酸化スズ(SnO2)、酸化亜鉛(ZnO)及び酸化インジウム(In2O3)からなされた群から選択された請求項6に記載のガス検出用ガスセンサ。
- 前記ナノ構造体は、中空構造又は卵黄構造に提供される請求項6に記載のガス検出用ガスセンサ。
- スズ(Sn)塩、亜鉛(Zn)塩、及びインジウム(In)塩からなされた群から選択された少なくとも1つの塩と、テルビウム(Tb)塩と、有機酸又は糖を含む溶液を製造する溶液製造段階と、
前記溶液を超音波噴霧熱分解装置を通じて噴射して超音波噴霧熱分解反応を遂行する超音波噴霧熱分解段階と、
前記超音波噴霧熱分解反応結果として微粉末を得る取得段階と、を含むガス検出用複合体の製造方法。 - 前記スズ(Sn)塩は、SnC2O4、SnCl4・xH2O、及びその混合物からなされた群から選択されたものであり、前記亜鉛(Zn)塩は、Zn(NO3)2・xH2O及びその混合物からなされた群から選択されたものであり、前記インジウム(In)塩は、In(NO3)3・xH2O及びその混合物からなされた群から選択されたものであり、前記テルビウム(Tb)塩は、TbCl3・6H2O及びその混合物からなされた群から選択されたものであり、前記有機酸は、クエン酸及びその混合物からなされた群から選択されたものであり、前記糖は、スクロース及びその混合物からなされた群から選択されたものである請求項11に記載のガス検出用複合体製造方法。
- 前記超音波噴霧熱分解段階では、前記溶液製造段階から製造された溶液を5L/m以上20L/m以下の噴射速度で、700℃以上1000℃以下に加熱された電気炉の内部に噴射する請求項11に記載のガス検出用複合体製造方法。
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