JP2021183543A - Sample holder storage device - Google Patents

Sample holder storage device Download PDF

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JP2021183543A
JP2021183543A JP2020104100A JP2020104100A JP2021183543A JP 2021183543 A JP2021183543 A JP 2021183543A JP 2020104100 A JP2020104100 A JP 2020104100A JP 2020104100 A JP2020104100 A JP 2020104100A JP 2021183543 A JP2021183543 A JP 2021183543A
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vacuum
sample holder
chamber
storage device
valve
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JP2020104100A
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Japanese (ja)
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佳寿恵 井上
Kazue Inoue
和夫 小沼
Kazuo Konuma
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Anmic Inc
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Anmic Inc
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Abstract

To provide a sample holder storage device having a function of separating and storing a sample holder independently while keeping the same in a vacuum.SOLUTION: There is provided a sample holder storage device, including: a chamber part that is sealed by a valve after vacuum exhaust with a sample holder attached thereto, and holds a vacuum state; a vacuum piping for connecting a pump and a chamber; and a pedestal to fix them.SELECTED DRAWING: Figure 1

Description

本発明は、試料ホルダー保管装置に関し、特に、真空に保ったまま試料ホルダーを単独に分離して保管することができる機能を有する試料ホルダー保管装置に関する。 The present invention relates to a sample holder storage device, and more particularly to a sample holder storage device having a function of independently separating and storing a sample holder while keeping it in a vacuum.

従来から材料や部品を長期保存するために、乾燥剤によって低湿度での保管する装置やポンプによって真空排気する装置など、たくさんの種類の保管装置がある。 Traditionally, there are many types of storage devices, such as devices that store materials and parts at low humidity with a desiccant and devices that evacuate with a pump for long-term storage.

特開２０１３−１７１８２４JP 2013-171824

光やＸ線、電子、イオンなどのビームを照射する分析装置では、ビームによって真空部品の表面に付着した分子などの汚染物が化学反応を起こし、本来の分析結果とは異なる結果を生じてしまうため、分析装置に導入する試料ホルダーは、分析装置の外に取り出している間は真空状態で保管することが必要である。 In an analyzer that irradiates a beam of light, X-rays, electrons, ions, etc., contaminants such as molecules adhering to the surface of the vacuum component cause a chemical reaction due to the beam, resulting in a result different from the original analysis result. Therefore, it is necessary to store the sample holder to be introduced into the analyzer in a vacuum state while it is taken out of the analyzer.

試料ホルダーは、１台の分析装置であっても傾斜機構、回転機構、加熱機構など目的に応じて使い分ける。したがって複数本の試料ホルダーを真空保管する装置が必要である。 Even if one analyzer is used, the sample holder can be used properly according to the purpose such as a tilting mechanism, a rotating mechanism, and a heating mechanism. Therefore, a device for storing a plurality of sample holders in a vacuum is required.

試料ホルダー保管装置は複数本のホルダーの保管が可能な構造になっているが、保管可能な数には限りがある。当初より試料ホルダーが増えたときは、試料ホルダー保管装置を追加で設置するか、試料ホルダー保管装置を改造して保管可能な数を増やす必要がある。試料ホルダー保管装置を追加で設置する場合、しばしば狭い実験室に入りきらない問題が生じうる。試料ホルダー保管装置を改造する場合、ポンプの排気性能により当初の想定真空度に達しない問題が生じうる。 The sample holder storage device has a structure that can store multiple holders, but the number that can be stored is limited. When the number of sample holders increases from the beginning, it is necessary to install an additional sample holder storage device or modify the sample holder storage device to increase the number that can be stored. When installing additional sample holder storage devices, problems often arise that they cannot fit in a small laboratory. When modifying the sample holder storage device, there may be a problem that the initially assumed vacuum degree is not reached due to the exhaust performance of the pump.

本発明は、上記問題を解決すべく、真空に保ったまま試料ホルダーを単独に分離して保管する機能を有する試料ホルダー保管装置を提供することを目的とする。 An object of the present invention is to provide a sample holder storage device having a function of independently separating and storing a sample holder while keeping it in a vacuum in order to solve the above problems.

本発明の試料ホルダー保管装置は、試料ホルダーが装着された状態で真空排気後にバルブによって密封され真空保持するチャンバー部、ポンプとチャンバー部を接続するための真空配管部、これらを固定する台座部からなることを特徴とする。 The sample holder storage device of the present invention has a chamber portion that is sealed by a valve and held in a vacuum after vacuum exhaust with the sample holder attached, a vacuum piping portion for connecting the pump and the chamber portion, and a pedestal portion for fixing these. It is characterized by becoming.

真空チャンバー部は、バルブを介して真空配管部と脱着が可能な接続フランジと連結されていることを特徴とする。 The vacuum chamber portion is characterized in that it is connected to the vacuum piping portion via a valve with a detachable connection flange.

真空配管部は、真空引き口ニップル、分岐配管、バルブ、リークバルブ、接続フランジから構成され、分岐配管により複数の真空チャンバーの取り付けが可能なことを特徴とする。 The vacuum pipe portion is composed of a vacuum lead nipple, a branch pipe, a valve, a leak valve, and a connection flange, and is characterized in that a plurality of vacuum chambers can be attached by the branch pipe.

台座部は、真空チャンバー部および真空配管部の固定ができ、真空チャンバー部の脱着が可能であることを特徴とする。 The pedestal portion is characterized in that the vacuum chamber portion and the vacuum piping portion can be fixed, and the vacuum chamber portion can be attached and detached.

本発明の試料ホルダー保管装置によれば、試料ホルダーを清浄な状態で保管することができ、分析装置内への汚染物の導入を防ぐことによって取得データの悪化および装置の真空の劣化を防止する効果をもたらす。 According to the sample holder storage device of the present invention, the sample holder can be stored in a clean state, and by preventing the introduction of contaminants into the analyzer, deterioration of acquired data and deterioration of the vacuum of the device are prevented. Bring the effect.

は、真空に保ったまま試料ホルダーを単独に分離して保管する機能を有する試料ホルダー保管装置の一例を示す図である。Is a diagram showing an example of a sample holder storage device having a function of separately separating and storing a sample holder while keeping it in a vacuum. は、試料ホルダー保管装置の真空排気回路を示す図である。Is a diagram showing a vacuum exhaust circuit of a sample holder storage device.

本発明の試料ホルダー保管装置は、試料ホルダーが装着された状態で真空排気後にバルブによって密封され真空保持するチャンバー部、ポンプとチャンバー部を接続するための真空配管部、これらを固定する台座部からなることを特徴とする。 The sample holder storage device of the present invention has a chamber portion that is sealed by a valve and held in a vacuum after vacuum exhaust with the sample holder attached, a vacuum piping portion for connecting the pump and the chamber portion, and a pedestal portion for fixing these. It is characterized by becoming.

図１を参照すれば、真空チャンバー部は、試料ホルダー４が取り付け可能なチャンバー３が、バルブ４と接続フランジ６を介して真空排気部に接続され、バルブ開閉つまみ５によりバルブ４を開閉して真空排気、真空密封、大気リークの制御を行う。接続フランジ６は真空排気部との連結が可能であり、バルブ４を閉めて真空排気部を真空密封したまま、分離することが可能である。 Referring to FIG. 1, in the vacuum chamber portion, the chamber 3 to which the sample holder 4 can be attached is connected to the vacuum exhaust portion via the valve 4 and the connection flange 6, and the valve 4 is opened and closed by the valve opening / closing knob 5. Controls vacuum exhaust, vacuum sealing, and air leaks. The connection flange 6 can be connected to the vacuum exhaust portion, and can be separated while the valve 4 is closed and the vacuum exhaust portion is vacuum-sealed.

図１を参照すれば、真空排気部は、前記真空チャンバーと接続するための接続フランジ７と、大気圧開放のためのリークバルブ９と、バルブ１１と、分岐配管１２と、真空引き口ニップル１３からなる。前記の真空引き口ニップル１３は真空ポンプに接続される。リークバルブ９はリークバルブ開閉つまみ１１を開閉して、真空排気部へ大気リークの制御を行う。バルブ１１はバルブ開閉つまみ１０により前記の真空引き口ニップル１３を介して真空ポンプによる前記真空排気部の真空排気の制御を行う。 Referring to FIG. 1, the vacuum exhaust section includes a connection flange 7 for connecting to the vacuum chamber, a leak valve 9 for opening the atmospheric pressure, a valve 11, a branch pipe 12, and a vacuum lead nipple 13. Consists of. The vacuum pull-out nipple 13 is connected to a vacuum pump. The leak valve 9 opens and closes the leak valve opening / closing knob 11 to control an atmospheric leak to the vacuum exhaust unit. The valve 11 controls the vacuum exhaust of the vacuum exhaust portion by the vacuum pump via the vacuum pull-out nipple 13 by the valve opening / closing knob 10.

図１を参照すれば、チャンバー３をガラスまたは樹脂など透明な素材で製作すれば、試料ホルダー４の先端部分の状態が観察可能である。また素材を透過可能な波長の光を照射することにより加熱や化学反応誘起によって試料ホルダーの表面に付着した分子などの汚染物の除去が可能である。 With reference to FIG. 1, if the chamber 3 is made of a transparent material such as glass or resin, the state of the tip portion of the sample holder 4 can be observed. Further, by irradiating the material with light having a wavelength that can be transmitted, it is possible to remove contaminants such as molecules adhering to the surface of the sample holder by heating or inducing a chemical reaction.

図１を参照すれば、リークバルブ９に不活性ガス供給装置を接続することで、チャンバー内に不活性ガスを封入し、チャンバー３の内部および試料ホルダー４の表面を不活性ガスで覆うことが可能であり、チャンバー３および試料ホルダー４への表面への汚染物の元となる分子付着を低減させることが可能である。 Referring to FIG. 1, by connecting an inert gas supply device to the leak valve 9, an inert gas can be sealed in the chamber, and the inside of the chamber 3 and the surface of the sample holder 4 can be covered with the inert gas. It is possible, and it is possible to reduce the adhesion of molecules that cause contaminants to the surface of the chamber 3 and the sample holder 4.

このような本発明の試料ホルダー保管装置は、真空中で分析する装置において装置内への汚染物の導入を防ぐことによって取得データの悪化および装置の真空の劣化を防止することが可能であり、広範な範囲での分野において有益である。 Such a sample holder storage device of the present invention can prevent deterioration of acquired data and deterioration of the vacuum of the device by preventing the introduction of contaminants into the device in the device for analysis in vacuum. It is useful in a wide range of fields.

１ 台座
２ 試料ホルダー
３ チャンバー
４ バルブ
５ バルブ開閉つまみ
６ 接続フランジ
７ 接続フランジ
８ リークバルブ開閉つまみ
９ リークバルブ
１０ バルブ開閉つまみ
１１ バルブ
１２ 分岐配管
１３ 真空引き口ニップル1 Pedestal 2 Sample holder 3 Chamber 4 Valve 5 Valve open / close knob 6 Connection flange 7 Connection flange 8 Leak valve open / close knob 9 Leak valve 10 Valve open / close knob 11 Valve 12 Branch piping 13 Vacuum pull port nipple

Claims (5)

試料ホルダーが装着された状態で真空排気後にバルブによって密封され真空保持するチャンバー部、ポンプとチャンバー部を接続するための真空配管部、これらを固定する台座部からなる試料ホルダー保管装置。 A sample holder storage device consisting of a chamber part that is sealed by a valve after vacuum exhaust with the sample holder attached and holds the vacuum, a vacuum piping part for connecting the pump and the chamber part, and a pedestal part that fixes them. 前記チャンバー部が複数接続可能なように、真空排気部には複数の接続フランジがある請求項１記載の装置。 The device according to claim 1, wherein the vacuum exhaust unit has a plurality of connection flanges so that a plurality of chamber portions can be connected. 前記チャンバー部が真空密封されたまま単独に分離し、保管することができる機能を有する請求項１記載の装置。 The device according to claim 1, wherein the chamber portion has a function of being independently separated and stored while being vacuum-sealed. 前記チャンバー部のチャンバーが透明な素材で製作されており、光を透過する機能を有する請求項１記載の装置。 The device according to claim 1, wherein the chamber of the chamber portion is made of a transparent material and has a function of transmitting light. 前記真空排気部のリークバルブに不活性ガス供給装置を接続し、チャンバー内に不活性ガスを封入させ、チャンバー内および試料ホルダー表面を不活性ガスで覆う機能を有する請求項１記載の装置。 The device according to claim 1, wherein an inert gas supply device is connected to the leak valve of the vacuum exhaust unit, the chamber is filled with the inert gas, and the inside of the chamber and the surface of the sample holder are covered with the inert gas.
JP2020104100A 2020-05-20 2020-05-20 Sample holder storage device Pending JP2021183543A (en)

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