JP2021030361A - Diamond-coated cutting tool - Google Patents
Diamond-coated cutting tool Download PDFInfo
- Publication number
- JP2021030361A JP2021030361A JP2019152586A JP2019152586A JP2021030361A JP 2021030361 A JP2021030361 A JP 2021030361A JP 2019152586 A JP2019152586 A JP 2019152586A JP 2019152586 A JP2019152586 A JP 2019152586A JP 2021030361 A JP2021030361 A JP 2021030361A
- Authority
- JP
- Japan
- Prior art keywords
- bond
- diamond
- peak intensity
- intensity ratio
- tool
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 71
- 239000010432 diamond Substances 0.000 title claims abstract description 71
- 238000005520 cutting process Methods 0.000 title claims abstract description 31
- 239000000758 substrate Substances 0.000 claims abstract description 22
- 239000013078 crystal Substances 0.000 claims abstract description 17
- 238000001069 Raman spectroscopy Methods 0.000 claims abstract description 13
- 239000000463 material Substances 0.000 abstract description 39
- 239000004918 carbon fiber reinforced polymer Substances 0.000 abstract description 17
- 238000005259 measurement Methods 0.000 abstract description 2
- 239000011247 coating layer Substances 0.000 description 11
- 239000000843 powder Substances 0.000 description 9
- 239000011248 coating agent Substances 0.000 description 8
- 238000000576 coating method Methods 0.000 description 8
- 239000010410 layer Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- NNBZCPXTIHJBJL-UHFFFAOYSA-N decalin Chemical compound C1CCCC2CCCCC21 NNBZCPXTIHJBJL-UHFFFAOYSA-N 0.000 description 2
- 230000032798 delamination Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- CXWXQJXEFPUFDZ-UHFFFAOYSA-N tetralin Chemical compound C1=CC=C2CCCCC2=C1 CXWXQJXEFPUFDZ-UHFFFAOYSA-N 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 238000001237 Raman spectrum Methods 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000740 bleeding effect Effects 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- -1 mesityrene Chemical compound 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000013081 microcrystal Substances 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 239000012188 paraffin wax Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- FHHJDRFHHWUPDG-UHFFFAOYSA-N peroxysulfuric acid Chemical compound OOS(O)(=O)=O FHHJDRFHHWUPDG-UHFFFAOYSA-N 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001308 synthesis method Methods 0.000 description 1
- 238000009210 therapy by ultrasound Methods 0.000 description 1
- PXXNTAGJWPJAGM-UHFFFAOYSA-N vertaline Natural products C1C2C=3C=C(OC)C(OC)=CC=3OC(C=C3)=CC=C3CCC(=O)OC1CC1N2CCCC1 PXXNTAGJWPJAGM-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Landscapes
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Chemical Vapour Deposition (AREA)
- Drilling Tools (AREA)
Abstract
Description
この発明は、ＣＦＲＰ材等の難削材の切削加工において、長期にわたって優れた耐摩耗性を発揮するダイヤモンド被覆切削工具に関するものである。 The present invention relates to a diamond-coated cutting tool that exhibits excellent wear resistance over a long period of time in cutting difficult-to-cut materials such as CFRP materials.
近年、航空機や自動車の構造材として、炭素繊維を束ねてエポキシ系の樹脂で固めたＣＦＲＰ（Ｃａｒｂｏｎ Ｆｉｂｅｒ Ｒｅｉｎｆｏｒｃｅｄ Ｐｌａｓｔｉｃｓ）材やＣＦＲＰ／金属スタック材(以下、スタック材と称する）が構造材に占める割合が大きくなっている。ＣＦＲＰ材の切削加工には、主にダイヤモンド被覆切削工具が使用されており、加工時間の短縮やコストの低減のための更なる寿命向上が求められている。 In recent years, as structural materials for aircraft and automobiles, the ratio of CFRP (Carbon Fiber Reinforced Plastics) materials and CFRP / metal stack materials (hereinafter referred to as stack materials), which are made by bundling carbon fibers and hardening them with an epoxy resin, in the structural materials Is getting bigger. Diamond-coated cutting tools are mainly used for cutting CFRP materials, and further improvement in life is required for shortening the machining time and reducing costs.
ダイヤモンド被覆切削工具を用いて、ＣＦＲＰ材、スタック材のような難削材を切削加工する際、ダイヤモンド皮膜の摩耗はアブレシブ摩耗が支配的である。このため、長期の使用により、脱粒に起因する摩耗面上の凹凸が大きくなり、これを起点としたチッピング等の異常損傷の発生、さらには、工具基体の露出が発生し、工具寿命に至る要因の一つとなって、被削材の加工面品質を低下させてしまう虞がある。特に、被削材にＡｌ合金等の金属材が含まれる場合、ダイヤモンド皮膜の結晶粒が粗大化するほど、前記の消耗が著しく進行し早期に寿命に至る虞がある。そこで、ダイヤモンド皮膜の耐摩耗性の向上のために、従来から多くの提案がなされている。 When cutting difficult-to-cut materials such as CFRP materials and stack materials using a diamond-coated cutting tool, the wear of the diamond film is dominated by abrasive wear. For this reason, with long-term use, unevenness on the worn surface due to shedding becomes large, causing abnormal damage such as chipping starting from this, and further, exposure of the tool substrate, which is a factor that extends the tool life. As one of the above, there is a risk of deteriorating the quality of the machined surface of the work material. In particular, when the work material contains a metal material such as an Al alloy, the coarser the crystal grains of the diamond film, the more the wear thereof progresses and the life may be reached earlier. Therefore, many proposals have been made conventionally for improving the wear resistance of the diamond film.
例えば、特許文献１には、ダイヤモンド被膜が、表面およびダイヤモンドの結晶成長方向と略直角な断面の結晶粒径が２μｍ以下となるように、核付着処理および結晶成長処理を繰り返して形成された微結晶の多層構造を成していることを特徴とするダイヤモンド被覆工具が記載されている。 For example, in Patent Document 1, a fine particle formed by repeating a nuclear adhesion treatment and a crystal growth treatment so that the crystal particle size of the surface and the cross section substantially perpendicular to the crystal growth direction of diamond is 2 μm or less. A diamond-coated tool characterized by having a multi-layered structure of crystals is described.
前記特許文献１に記載されたダイヤモンド被覆工具では、チッピングおよび脱粒サイズの微小化による長寿命なダイヤモンド被覆工具を実現するため、結晶層間に核生成処理を実施することで微結晶層を積層構造化させ皮膜の耐摩耗性を向上させた。しかし、この特許文献１に記載されたダイヤモンド被覆工具は、近年、航空機や自動車の構造材として使用割合が高まっているＣＦＲＰ材等の難削材に対して十分な耐久性を有していない。 In the diamond coating tool described in Patent Document 1, in order to realize a diamond coating tool having a long life by reducing the chipping and bleeding size, the microcrystal layer is laminated and structured by performing a nucleation process between the crystal layers. The abrasion resistance of the film was improved. However, the diamond-coated tool described in Patent Document 1 does not have sufficient durability against difficult-to-cut materials such as CFRP materials, which are increasingly used as structural materials for aircraft and automobiles in recent years.
そこで、本発明が解決しようとする課題、すなわち、本発明の目的は、ＣＦＲＰ材、スタック材等の難削材に対して、長期にわたって十分な耐久性を有するダイヤモンド被覆工具を提供することにある。 Therefore, the problem to be solved by the present invention, that is, an object of the present invention is to provide a diamond-coated tool having sufficient durability for a long period of time with respect to difficult-to-cut materials such as CFRP materials and stack materials. ..
前記課題を解決すべく本発明者は鋭意検討を行ったところ、ダイヤモンド皮膜中のｓｐ３結合／ｓｐ２結合のピーク強度比率が所定範囲にあり、かつ、ｓｐ３結合／ｓｐ２結合のピーク強度比率の標準偏差およびその最大値と最小値との差が、共に、所定の値以下であるとき、チッピングの原因となるダイヤモンド皮膜を構成するダイヤモンド結晶内の欠陥を低下させ、また、ダイヤモンド結晶の結晶粒径を小さくし、高耐摩耗性と微粒組織を兼ね備えた耐チッピング特性に優れたダイヤモンド皮膜となり、ダイヤモンド被覆工具の寿命を飛躍的に延ばすことができるという新規な知見を得た。 Where the present inventors to solve the above problems intensive studies, the peak intensity ratio of sp 3 bonds / sp 2 bonds in the diamond film is in the predetermined range, and the peak intensity of sp 3 bond / sp 2 bond When the standard deviation of the ratio and the difference between the maximum value and the minimum value are both less than or equal to a predetermined value, the defects in the diamond crystal constituting the diamond film causing chipping are reduced, and the diamond crystal We have obtained a new finding that the life of a diamond-coated tool can be dramatically extended by reducing the crystal grain size and forming a diamond film with excellent chipping resistance that has both high wear resistance and a fine-grained structure.
本発明は、この知見に基づくものであって、以下のとおりのものである。
「工具基体表面に、膜厚が３〜２５μｍのダイヤモンド皮膜が被覆されたダイヤモンド被覆切削工具であって、
前記ダイヤモンド皮膜の平均結晶粒径が０．８μm以上２．０μm以下で、
前記ダイヤモンド皮膜におけるラマン分光測定により求められたｓｐ３結合／ｓｐ２結合のピーク強度比率が５．０以上２０．０以下であり、
前記ｓｐ３結合／ｓｐ２結合のピーク強度比率の標準偏差が３．０以下、および、
前記ｓｐ３結合／ｓｐ２結合のピーク強度比率の最大値と最小値の差が７．０以下、
であることを特徴とするダイヤモンド皮膜を１層または２層以上有するダイヤモンド被覆切削工具。」
The present invention is based on this finding and is as follows.
"A diamond-coated cutting tool in which the surface of a tool substrate is coated with a diamond film having a thickness of 3 to 25 μm.
The average crystal grain size of the diamond film is 0.8 μm or more and 2.0 μm or less.
The peak intensity ratio of sp 3 bond / sp 2 bond determined by Raman spectroscopy on the diamond film is 5.0 or more and 20.0 or less.
The standard deviation of the peak intensity ratio of sp 3 bond / sp 2 bond is 3.0 or less, and
The difference between the maximum value and the minimum value of the peak intensity ratio of sp 3 bond / sp 2 bond is 7.0 or less.
A diamond-coated cutting tool having one or more layers of a diamond film. "
本発明のダイヤモンド被覆切削工具は、チッピングサイズを微小化でき、また、優れた耐摩耗性を有しており、ＣＦＲＰ材、スタック材等の難削材の切削加工において工具寿命を延ばすことができるという顕著な効果を奏する。 The diamond-coated cutting tool of the present invention can reduce the chipping size and has excellent wear resistance, and can extend the tool life in cutting difficult-to-cut materials such as CFRP materials and stack materials. It has a remarkable effect.
以下、本発明で規定する事項の最適な範囲の説明を含め、本発明を詳細に説明する。 Hereinafter, the present invention will be described in detail, including a description of the optimum range of matters specified in the present invention.
なお、本明細書、特許請求の範囲において、数値範囲を「〜」を用いて表す場合、その範囲は上限および下限を含むもの、すなわち、以上、以下と同義とする。
ダイヤモンド被覆層の層厚：
本発明においてダイヤモンド被覆層は、ダイヤモンド皮膜を１層または２層以上有し、その厚さ（膜厚）は、３〜２５μｍとする。ダイヤモンド被覆層の厚さをこの範囲とする理由は、下限値の３μｍは、ＣＦＲＰ材等の難削材の切削加工において満足する工具寿命を得るためであり、一方、上限値の２５μｍは工具刃先の鋭利さを確保して、加工精度を得てバリや層間剥離を防ぎ、加工面品位を低下させないためである。ダイヤモンド被覆層の層厚は、５〜１５μｍとすることがより好ましい。
In the present specification and claims, when the numerical range is represented by using "~", the range includes the upper limit and the lower limit, that is, the above and the following are synonymous.
Diamond coating layer thickness:
In the present invention, the diamond coating layer has one or more diamond coating layers, and the thickness (film thickness) thereof is 3 to 25 μm. The reason why the thickness of the diamond coating layer is within this range is that the lower limit value of 3 μm is to obtain a satisfactory tool life in cutting difficult-to-cut materials such as CFRP materials, while the upper limit value of 25 μm is the tool cutting edge. This is because the sharpness of the machine is ensured, the processing accuracy is obtained, burrs and delamination are prevented, and the quality of the machined surface is not deteriorated. The layer thickness of the diamond coating layer is more preferably 5 to 15 μm.
なお、ダイヤモンド皮膜が複数層ある場合は、各層のダイヤモンド皮膜の厚さは特に制約はなく、ダイヤモンド被覆層が全体として３〜２５μｍの厚さがあればよい。 When there are a plurality of diamond coating layers, the thickness of the diamond coating of each layer is not particularly limited, and the diamond coating layer may have a thickness of 3 to 25 μm as a whole.
ここで、ダイヤモンド被覆層の層厚は、工具基体に対して法線方向の断面（縦断面）の厚さであって、例えば、走査型電子顕微鏡（ＳＥＭ）によって、５０μｍ×５０μｍに観察範囲を設定して、３視野（刃先部分）を観察し、各視野に任意で５点の観察点を設けて、各点における厚さを求めそれらの平均値を算出した値である。
ダイヤモンド皮膜の平均結晶粒径：
ダイヤモンド皮膜の平均結晶粒径は、０．８〜２．０μｍである。この範囲とする理由は、０．８μｍ未満であると、ｓｐ２結合量が多くなりすぎて、耐摩耗性が低下してしまう虞があり、一方、２．０μｍを超えると、ダイヤモンド皮膜にかかる圧縮応力が大きくなりすぎて、剥離しやすくなる虞があるためである。
Here, the layer thickness of the diamond coating layer is the thickness of the cross section (longitudinal cross section) in the normal direction with respect to the tool substrate, and the observation range is set to 50 μm × 50 μm by, for example, a scanning electron microscope (SEM). It is a value obtained by setting and observing 3 visual fields (cutting edge portion), arbitrarily providing 5 observation points in each visual field, calculating the thickness at each point, and calculating the average value thereof.
Average grain size of diamond film:
The average crystal grain size of the diamond film is 0.8 to 2.0 μm. The reason for setting this range is that if it is less than 0.8 μm, the amount of sp 2 bond becomes too large and the wear resistance may be lowered, while if it exceeds 2.0 μm, the diamond film is applied. This is because the compressive stress becomes too large and there is a risk of easy peeling.
ここで、平均結晶粒径は、以下のように測定される。すなわち、ダイヤモンド皮膜の工具基体表面に垂直断面１５μｍ×１５μｍの領域を集束イオンビーム（ＦＩＢ）法により加工し、加工面を透過型電子顕微鏡（ＴＥＭ）により観察し、工具基体表面と平行な方向に５μｍの線分を任意で５本画定し、それぞれの線分を横切る結晶粒の数で除した平均値とした。
ラマン分光測定により求められるｓｐ３結合／ｓｐ２結合のピーク強度比率：
ラマン分光測定により求められるｓｐ３結合／ｓｐ２結合のピーク強度比率とは、波長５３２ｎｍのレーザー光で得られたラマンスペクトルを波形分離し、波形分離後の１３３２ｃｍ−１付近にみられるｓｐ３結合のピーク強度と１５８０ｃｍ−１付近にみられるｓｐ２結合のピーク強度を測定して、ｓｐ３結合／ｓｐ２結合のピーク強度比率を算出するものである。
Here, the average crystal grain size is measured as follows. That is, a region having a vertical cross section of 15 μm × 15 μm is machined on the surface of the tool substrate of the diamond film by the focused ion beam (FIB) method, and the machined surface is observed with a transmission electron microscope (TEM) in a direction parallel to the surface of the tool substrate. Five 5 μm line segments were arbitrarily defined, and the average value was obtained by dividing by the number of crystal grains crossing each line segment.
Peak intensity ratio of sp 3 bond / sp 2 bond determined by Raman spectroscopy:
The peak intensity ratio of sp 3 bond / sp 2 bond obtained by Raman spectroscopy is the sp 3 bond found in the vicinity of 1332 cm -1 after waveform separation of the Raman spectrum obtained by laser light with a wavelength of 532 nm. The peak intensity of sp 3 bond / sp 2 bond is calculated by measuring the peak intensity of sp 3 bond and the peak intensity of sp 2 bond observed in the vicinity of 1580 cm -1.
本発明では、このｓｐ３結合／ｓｐ２結合のピーク強度比率を５．０〜２０．０とする。この範囲とする理由は、５．０未満であると、皮膜に占めるｓｐ２結合の割合が多くなりすぎて、耐摩耗性が低下し、一方、２０．０を超えると、皮膜にかかる圧縮応力が大きくなりすぎて、剥離しやすくなる虞があるためである。ｓｐ３結合／ｓｐ２結合のピーク強度比率は、７．０〜１５．０がより好ましい範囲である。
ラマン分光測定により求められるｓｐ３結合／ｓｐ２結合のピーク強度比率の標準偏差：
ラマン分光測定により求められるｓｐ３結合／ｓｐ２結合の標準偏差は、３．０以下とする。その理由は、３．０を超えるとダイヤモンド皮膜面内のｓｐ３結合／ｓｐ２結合のピーク強度比率差が大きい箇所が破壊やチッピングを生じやすく、十分な工具寿命を得ることができないためである。
ラマン分光測定により求められるｓｐ３結合／ｓｐ２結合のピーク強度比率の最大値と最小値の差：
ラマン分光測定により求められるｓｐ３結合／ｓｐ２結合のピーク強度比率の最大値と最小値の差は、７．０以下とする。その理由は、７．０を超えるとダイヤモンド皮膜面内のｓｐ３結合／ｓｐ２結合のピーク強度比率差が大きい箇所がチッピングの起点となり、さらにチッピング単位も大きくなり、十分な工具寿命を得ることができないためである。
ラマン分光測定により求められるｓｐ３結合／ｓｐ２結合のピーク強度比率の測定法：
ラマン分光測定により求められるｓｐ３結合／ｓｐ２結合のピーク強度比率は、ダイヤモンド皮膜表面において、０．５μｍ間隔で２０μｍの直線領域を任意で３箇所測定する。各測定位置で得られたｓｐ３結合／ｓｐ２結合のピーク強度比率に対して、標準偏差および最大値と最小値の差を算出した。
工具基体：
工具基体は、本発明の目的の達成を阻害しないものであれば特に限定されず、例えば、ＷＣを主体とする公知のものを挙げることができる。
ダイヤモンド皮膜の製造方法：
本発明のダイヤモンド被覆切削工具におけるダイヤモンド皮膜は、一般に広く知られている成膜法であるフィラメントＣＶＤ法、高周波プラズマＣＶＤ法、マイクロ波プラズマＣＶＤ法等の合成法を用いて製造可能である。
In the present invention, the peak intensity ratio of sp 3 bond / sp 2 bond is set to 5.0 to 20.0. The reason for setting this range is that if it is less than 5.0, the ratio of sp 2 bonds in the film becomes too large and the wear resistance decreases, while if it exceeds 20.0, the compressive stress applied to the film is applied. This is because there is a risk that the amount will become too large and the material will be easily peeled off. The peak intensity ratio of sp 3 bond / sp 2 bond is more preferably 7.0 to 15.0.
Standard deviation of peak intensity ratio of sp 3- bond / sp 2- bond determined by Raman spectroscopy:
The standard deviation of sp 3- bond / sp 2- bond determined by Raman spectroscopy shall be 3.0 or less. The reason is that if it exceeds 3.0, fractures and chipping are likely to occur in places where the difference in peak intensity ratio of sp 3 bond / sp 2 bond is large in the diamond film surface, and a sufficient tool life cannot be obtained. ..
Difference between maximum and minimum peak intensity ratios of sp 3- bond / sp 2- bond determined by Raman spectroscopy:
The difference between the maximum value and the minimum value of the peak intensity ratio of sp 3 bond / sp 2 bond obtained by Raman spectroscopy shall be 7.0 or less. The reason is that when it exceeds 7.0, the point where the difference in peak intensity ratio of sp 3 bond / sp 2 bond in the diamond film surface is large becomes the starting point of chipping, and the chipping unit also becomes large, so that a sufficient tool life can be obtained. This is because it cannot be done.
Measurement method of peak intensity ratio of sp 3 bond / sp 2 bond obtained by Raman spectroscopy:
The peak intensity ratio of sp 3- bond / sp 2- bond determined by Raman spectroscopy is measured at three arbitrary linear regions of 20 μm at 0.5 μm intervals on the surface of the diamond film. The standard deviation and the difference between the maximum value and the minimum value were calculated for the peak intensity ratio of sp 3 bond / sp 2 bond obtained at each measurement position.
Tool base:
The tool substrate is not particularly limited as long as it does not hinder the achievement of the object of the present invention, and examples thereof include known tool substrates mainly composed of WC.
Diamond film manufacturing method:
The diamond film in the diamond-coated cutting tool of the present invention can be produced by using a synthesis method such as a filament CVD method, a high-frequency plasma CVD method, or a microwave plasma CVD method, which are generally widely known film forming methods.
次に、実施例について説明する。 Next, an embodiment will be described.
ここでは、本発明に係るダイヤモンド被覆切削工具の具体例として、ダイヤモンド被覆ドリルについて述べるが、本発明はこれに限られるものではなく、ダイヤモンド被覆エンドミル、ダイヤモンド被覆インサート等のダイヤモンド切削工具に適用できることは言うまでもない。
（ａ）工具基体の製造工程
原料粉末として、０．５〜０．９μｍの範囲内の所定の平均粒径を有するＷＣ粉末、Ｃｏ粉末、ＴａＣ粉末、ＮｂＣ粉末、Ｃｒ３Ｃ２粉末を表１に示される割合に配合し、さらにバインダーとしてパラフィンと溶剤としてトルエン、キシレン、メシチレン、テトラリン、デカリンの中から選定した一つの溶剤を加えてアセトン中で２４時間ボールミル混合し、減圧乾燥した。その後、いずれも押出プレス成形し、直径が１０ｍｍ、長さが１５０ｍｍの丸棒圧粉体とし、これらの丸棒圧粉体を、１Ｐａの真空雰囲気中、１３８０〜１５００℃の温度で１〜２時間保持する条件で焼結して焼結体を得た。その後、前記焼結体を研磨加工することにより、ＷＣ基超硬合金焼結体を製造した。
Here, a diamond-coated drill will be described as a specific example of the diamond-coated cutting tool according to the present invention, but the present invention is not limited to this, and can be applied to diamond-coated cutting tools such as diamond-coated end mills and diamond-coated inserts. Needless to say.
As a production process raw material powder (a) tool substrate, WC powder, Co powder, TaC powder, NbC powder, Table 1 Cr 3 C 2 powder having a predetermined average particle size in the range of 0.5~0.9μm The mixture was blended in the ratio shown in (1), further added paraffin as a binder and one solvent selected from toluene, xylene, mesityrene, tetraline and decalin as a solvent, mixed in a ball mill for 24 hours in acetone, and dried under reduced pressure. After that, all of them were extruded and press-molded to obtain round bar pressure powders having a diameter of 10 mm and a length of 150 mm, and these round bar pressure powders were subjected to 1-2 at a temperature of 1380 to 1500 ° C. in a 1 Pa vacuum atmosphere. A sintered body was obtained by sintering under the condition of holding for a long time. Then, the sintered body was polished to produce a WC-based cemented carbide sintered body.
次いで、前記ＷＣ基超硬合金焼結体を、溝形成部の外径寸法が７ｍｍとなるように研削加工することにより、ＷＣ基超硬合金製ドリル工具基体（以下、単に「ドリル基体」または「基体」という）α、βを製造した。 Next, by grinding the WC-based cemented carbide sintered body so that the outer diameter of the groove-forming portion is 7 mm, a WC-based cemented carbide drill tool substrate (hereinafter, simply "drill substrate" or simply "drill substrate" or Α and β (referred to as “base”) were produced.
前記ドリル基体α、βにダイヤモンド皮膜を成膜する前に、ダイヤモンド皮膜と基体との付着強度を向上させるため、アルカリ溶液（村上試薬）と酸溶液（Ｃａｒｏ酸）を用いた２段階の化学処理を実施した。また、前記ドリル基体を、イソプロピルアルコールに粒径が１〜２μｍのダイヤモンド粉末を含む溶液で１０分間の超音波処理を施すことにより傷つけ処理をした。 Before forming a diamond film on the drill substrates α and β, a two-step chemical treatment using an alkaline solution (Murakami reagent) and an acid solution (Caro acid) is performed in order to improve the adhesion strength between the diamond film and the substrate. Was carried out. Further, the drill substrate was damaged by subjecting the drill substrate to ultrasonic treatment for 10 minutes with a solution containing diamond powder having a particle size of 1 to 2 μm in isopropyl alcohol.
続いて、前記ドリル基体α、βを熱フィラメントＣＶＤ装置に装入し、表２に記載された成膜条件でダイヤモンド皮膜が１層（単層）のダイヤモンド被覆層を成膜した。なお、以下の「％」は、「容量（体積）％」であって、以下の数値範囲は表２に記載された成膜工程を示したものである。
ガス組成 ＣＨ４／Ｈ２：０．７〜２．０％
ＣＯ／Ｈ２：０．５〜２．０％
ガス流量 ＣＨ４：１４〜４０ｓｃｃｍ
ＣＯ：１０〜４０ｓｃｃｍ
Ｈ２：２０００ｓｃｃｍ
圧力 ７００〜１０００Ｐａ
ドリル基体温度 ８５０±５０℃
フィラメント温度 ２３００℃
前記ドリル基体に表２に記載された成膜条件で、表４に示す本発明被覆工具１〜８を作製し、ダイヤモンド被覆層の層厚、ダイヤモンド皮膜の平均結晶粒径、ラマン分光測定により求められたｓｐ３結合／ｓｐ２結合のピーク強度比率、ｓｐ３結合／ｓｐ２結合のピーク強度比率の標準偏差、ｓｐ３結合／ｓｐ２結合のピーク強度比率の最大値と最小値の差を求めた。
Subsequently, the drill substrates α and β were charged into a thermal filament CVD apparatus to form a diamond coating layer having one diamond film (single layer) under the film forming conditions shown in Table 2. The following "%" is "capacity (volume)%", and the following numerical range indicates the film forming process shown in Table 2.
Gas composition CH 4 / H 2 : 0.7 to 2.0%
CO / H 2 : 0.5 to 2.0%
Gas flow rate CH 4 : 14-40 sccm
CO: 10-40 sccm
H 2 : 2000sccm
Pressure 700-1000Pa
Drill substrate temperature 850 ± 50 ° C
Filament temperature 2300 ℃
The coating tools 1 to 8 of the present invention shown in Table 4 were prepared on the drill substrate under the film forming conditions shown in Table 2, and were determined by the layer thickness of the diamond coating layer, the average crystal grain size of the diamond film, and Raman spectroscopy. was sp 3 bond / sp 2 bond peak intensity ratio, determine the difference between the maximum value and the minimum value of sp 3 bond / sp 2 standard deviations of the binding of the peak intensity ratio, sp 3 bond / sp 2 bond peak intensity ratio It was.
また、比較の目的で、前記ドリル基体に表３に記載された成膜条件で、表５に示す比較被覆工具１〜８を作製し、前記本発明被覆工具１〜８と同様にダイヤモンド被覆層の層厚、ダイヤモンド皮膜の平均結晶粒径、ラマン分光測定により求められたｓｐ３結合／ｓｐ２結合のピーク強度比率、ｓｐ３結合／ｓｐ２結合のピーク強度比率の標準偏差、ｓｐ３結合／ｓｐ２結合のピーク強度比率の最大値と最小値の差を求めた。 Further, for the purpose of comparison, comparative coating tools 1 to 8 shown in Table 5 were produced on the drill substrate under the film forming conditions shown in Table 3, and a diamond coating layer was prepared in the same manner as the coating tools 1 to 8 of the present invention. layer thickness, average crystal grain size, sp 3 bond / sp 2 bond peak intensity ratio determined by Raman spectroscopy, sp 3 bond / sp 2 bond of the standard deviation of the peak intensity ratio of the diamond film, sp 3 bond / The difference between the maximum value and the minimum value of the peak intensity ratio of the sp 2 bond was determined.
次に、本発明被覆工具１〜８、および、比較被覆工具１〜８について、以下に示す被削材の貫通孔加工による切削試験を実施し、いずれも寿命到達切削穴数を測定した。
被削材：ＣＦＲＰ
ＣＦＲＰ（ＰＡＮ系クロス材、厚さ２０ｍｍ）
送り：０．１５ｍｍ／ｒｅｖ
切削速度：１５０ｍ／ｍｉｎ
表６に、切削試験の結果を示す。到達寿命穴数は、ＣＦＲＰ材を５０回穴貫通した後、工具刃先に基体の露出あるいは、欠損、チッピングを生じた時点で寿命とした。また、ワークの加工面にバリが発生しない、層間剥離が加工面より１ｍｍ以内に抑えられていれば寿命に到達していないとした。
Next, the covering tools 1 to 8 of the present invention and the comparative covering tools 1 to 8 were subjected to a cutting test by drilling through holes of the work material shown below, and the number of cut holes reached the end of life was measured in each of them.
Work material: CFRP
CFRP (PAN-based cloth material, thickness 20 mm)
Feed: 0.15 mm / rev
Cutting speed: 150m / min
Table 6 shows the results of the cutting test. The number of holes reached was defined as the life when the substrate was exposed, chipped, or chipped on the tool edge after penetrating the CFRP material 50 times. Further, if burrs do not occur on the machined surface of the work and delamination is suppressed within 1 mm from the machined surface, the life has not been reached.
表６に示される結果から明らかなように、本発明のダイヤモンド被覆切削工具（本発明被覆工具）はＣＦＲＰ材等の難削材に対して、長期にわたって十分な耐久性を有している。これに対して、本発明のダイヤモンド被覆切削工具を規定する事項を一つでも満足しない比較被覆工具は、ＣＦＲＰ材等の難削材の切削加工において、短期で寿命に至っている。 As is clear from the results shown in Table 6, the diamond-coated cutting tool of the present invention (the coated tool of the present invention) has sufficient durability against difficult-to-cut materials such as CFRP materials for a long period of time. On the other hand, the comparative covering tool which does not satisfy even one of the matters defining the diamond-coated cutting tool of the present invention has reached the end of its life in a short time in the cutting process of a difficult-to-cut material such as CFRP material.
前述のように、本発明の被覆工具は、ＣＦＲＰ材、スタック材等の難削材の切削加工だけでなく、各種の被削材の被覆工具として用いることができ、しかも、長期の使用にわたって優れた切削性能を発揮することで、切削装置の高性能化並びに切削加工の省力化および省エネ化、さらには低コスト化に十分に満足できる対応が可能である。 As described above, the coating tool of the present invention can be used not only for cutting difficult-to-cut materials such as CFRP materials and stack materials, but also as a coating tool for various work materials, and is excellent over a long period of use. By demonstrating the cutting performance, it is possible to fully satisfy the high performance of the cutting equipment, labor saving and energy saving of the cutting process, and cost reduction.
Claims (1)
前記ダイヤモンド皮膜の平均結晶粒径が０．８μm以上２．０μm以下で、
前記ダイヤモンド皮膜におけるラマン分光測定により求められたｓｐ３結合／ｓｐ２結合のピーク強度比率が５．０以上２０．０以下であり、
前記ｓｐ３結合／ｓｐ２結合のピーク強度比率の標準偏差が３．０以下、および、
前記ｓｐ３結合／ｓｐ２結合のピーク強度比率の最大値と最小値の差が７．０以下、
であることを特徴とするダイヤモンド皮膜を１層または２層以上有するダイヤモンド被覆切削工具。 A diamond-coated cutting tool in which the surface of a tool substrate is coated with a diamond film having a thickness of 3 to 25 μm.
The average crystal grain size of the diamond film is 0.8 μm or more and 2.0 μm or less.
The peak intensity ratio of sp 3 bond / sp 2 bond determined by Raman spectroscopy on the diamond film is 5.0 or more and 20.0 or less.
The standard deviation of the peak intensity ratio of sp 3 bond / sp 2 bond is 3.0 or less, and
The difference between the maximum value and the minimum value of the peak intensity ratio of sp 3 bond / sp 2 bond is 7.0 or less.
A diamond-coated cutting tool having one or more layers of a diamond film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019152586A JP7313604B2 (en) | 2019-08-23 | 2019-08-23 | diamond coated cutting tools |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019152586A JP7313604B2 (en) | 2019-08-23 | 2019-08-23 | diamond coated cutting tools |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2021030361A true JP2021030361A (en) | 2021-03-01 |
| JP7313604B2 JP7313604B2 (en) | 2023-07-25 |
Family
ID=74674686
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019152586A Active JP7313604B2 (en) | 2019-08-23 | 2019-08-23 | diamond coated cutting tools |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP7313604B2 (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20140082402A (en) * | 2012-12-24 | 2014-07-02 | 홍성필 | Diamond coated cutting tool with excellent surface roughness and method of coating diamond with excellent surface roughness for cutting tool |
| WO2017188154A1 (en) * | 2016-04-25 | 2017-11-02 | 京セラ株式会社 | Cutting tool |
| JP2018027616A (en) * | 2013-09-30 | 2018-02-22 | 京セラ株式会社 | Cutting tool and method for manufacturing cut product |
| JP2019089146A (en) * | 2017-11-13 | 2019-06-13 | 三菱マテリアル株式会社 | Diamond-coated cutting tool |
| JP2019093521A (en) * | 2017-11-27 | 2019-06-20 | 三菱マテリアル株式会社 | Cutting tool made by diamond-coated hard metal |
-
2019
- 2019-08-23 JP JP2019152586A patent/JP7313604B2/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20140082402A (en) * | 2012-12-24 | 2014-07-02 | 홍성필 | Diamond coated cutting tool with excellent surface roughness and method of coating diamond with excellent surface roughness for cutting tool |
| JP2018027616A (en) * | 2013-09-30 | 2018-02-22 | 京セラ株式会社 | Cutting tool and method for manufacturing cut product |
| WO2017188154A1 (en) * | 2016-04-25 | 2017-11-02 | 京セラ株式会社 | Cutting tool |
| JP2019089146A (en) * | 2017-11-13 | 2019-06-13 | 三菱マテリアル株式会社 | Diamond-coated cutting tool |
| JP2019093521A (en) * | 2017-11-27 | 2019-06-20 | 三菱マテリアル株式会社 | Cutting tool made by diamond-coated hard metal |
Also Published As
| Publication number | Publication date |
|---|---|
| JP7313604B2 (en) | 2023-07-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101386856B1 (en) | Surface-coated cutting tool | |
| JP5124790B2 (en) | Diamond coated cutting tool | |
| WO2018174139A1 (en) | Diamond coated cemented carbide cutting tool | |
| JP5716861B1 (en) | Diamond-coated cemented carbide cutting tool and method for manufacturing the same | |
| JP2011104687A (en) | Diamond coating tool having excellent peeling resistance and wear resistance | |
| EP2965842A1 (en) | Coated cutting tool | |
| WO2016158717A1 (en) | Coated cutting tool | |
| US11065692B2 (en) | Diamond-coated tool | |
| JP2019005894A (en) | Coated cutting tool | |
| JP5850396B2 (en) | Diamond coated cemented carbide cutting tool with excellent toughness and wear resistance | |
| JP5499771B2 (en) | Diamond coated cutting tool | |
| JP2021030361A (en) | Diamond-coated cutting tool | |
| JP6102613B2 (en) | Diamond coated cemented carbide cutting tool with improved cutting edge strength | |
| JP6040698B2 (en) | Diamond-coated cemented carbide drill | |
| JP2020142306A (en) | Diamond-coated cutting tool | |
| JP5292900B2 (en) | Diamond coated tool with excellent fracture resistance and wear resistance | |
| JP2020142305A (en) | Diamond-coated cutting tool | |
| JP2011131347A (en) | Diamond-coated cemented carbide cutting tool | |
| JP2019089146A (en) | Diamond-coated cutting tool | |
| JP5838858B2 (en) | Diamond coated cemented carbide drill with excellent wear resistance | |
| JP5187572B2 (en) | Diamond coated cemented carbide cutting tool | |
| JP5246597B2 (en) | Diamond coated tools | |
| EP3674441A1 (en) | Diamond film for cutting tools | |
| JP7216915B2 (en) | Diamond-coated cemented carbide tools | |
| KR102298304B1 (en) | Diamond coated cutting tool |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20220331 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20221214 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20221226 |
|
| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20230224 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230227 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20230608 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20230621 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 7313604 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |