JP2020504302A - Inspection probe and socket - Google Patents

Inspection probe and socket Download PDF

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JP2020504302A
JP2020504302A JP2019536173A JP2019536173A JP2020504302A JP 2020504302 A JP2020504302 A JP 2020504302A JP 2019536173 A JP2019536173 A JP 2019536173A JP 2019536173 A JP2019536173 A JP 2019536173A JP 2020504302 A JP2020504302 A JP 2020504302A
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contact
contact member
probe
inspection
inspected
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JP6873247B2 (en
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ベク，ソン−ハ
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リーノ インダストリアル インコーポレイテッド
リーノ インダストリアル インコーポレイテッド
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0416—Connectors, terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06738—Geometry aspects related to tip portion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06722—Spring-loaded
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
    • G01R31/2808—Holding, conveying or contacting devices, e.g. test adapters, edge connectors, extender boards

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Geometry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

曲面筒状の被検査接触端子を有する被検査体の検査用プローブを提供する。検査用プローブは、Ｖ状に設けられ、前記被検査接触端子の相互離隔された位置にそれぞれ接触する一対の接触面を有する接触部と、前記接触部から長さ方向に沿って後方に一体に延長する延長部とを有する第１接触部材を備える。本発明の検査用プローブによれば、スマートフォン用の超小型カメラモジュールのような被検査体の部分曲面筒状の被検査接触端子に効果的に接触して検査エラーを防止することができる。An inspection probe for an object to be inspected having a curved cylindrical contact terminal to be inspected is provided. The inspection probe is provided in a V shape, and has a contact portion having a pair of contact surfaces that respectively contact the mutually separated positions of the contact terminals to be inspected, and are integrally formed rearward from the contact portion along the length direction. A first contact member having an extension that extends. ADVANTAGE OF THE INVENTION According to the probe for an inspection of this invention, it can contact a to-be-inspected contact terminal of a partial curved surface of an object to be inspected like a micro camera module for smart phones, and can prevent an inspection error.

Description

本発明は、スマートフォンのような小型モバイル機器に適用される超小型カメラモジュールのような曲面状の被検査端子を有する被検査体を検査する検査プローブ及び検査ソケットに関する。   The present invention relates to an inspection probe and an inspection socket for inspecting an object to be inspected having a curved terminal to be inspected, such as a micro camera module applied to a small mobile device such as a smartphone.

カメラモジュール１０は、図９に示すように、部分曲面筒状の被検査接触端子１２を具備している。カメラモジュール１０の被検査接触端子１２は、金属ストリップを部分曲面筒状に折り曲げて形成する。このようなカメラモジュール１０の検査は、一般的なポゴピン２０のプランジャー２２を被検査接触端子１２に接触させて行う。ポゴピン２０のプランジャー２２は、検査時に、鉛でできたバンプ端子を突き得るように尖った１つ又は複数のチップ２４を有する。検査時に、プランジャー２２の鋭いチップ２４は部分曲面筒状の被検査接触端子１２に当接する。   As shown in FIG. 9, the camera module 10 includes a contact terminal 12 to be inspected having a partially curved cylindrical shape. The inspection contact terminal 12 of the camera module 10 is formed by bending a metal strip into a partially curved cylindrical shape. Such an inspection of the camera module 10 is performed by bringing a plunger 22 of a general pogo pin 20 into contact with the contact terminal 12 to be inspected. The plunger 22 of the pogo pin 20 has one or more tips 24 that are pointed to allow bumps made of lead to be bumped during testing. At the time of inspection, the sharp tip 24 of the plunger 22 comes into contact with the contact terminal to be inspected 12 having a partially curved cylindrical shape.

カメラモジュール１０の被検査接触端子１２は、鉛でできたバンプ端子と違い、通常、硬い金属で作られる。したがって、プランジャー２２のチップ２４は、膨らんだ曲面状の被検査接触端子１２に接触すると滑り外れる。このような滑りによる接触エラーは、検査エラーを招く。また、様々な公差や整列誤差などによって検査エラーはさらに多く発生する。しかも、多数の反復テストは不純物転移現象を生じさせ、その結果、正常のカメラモジュールを不良として誤認することもある。このようなプローブとカメラモジュールの端子との不安定な接触は、装備の停止、クリーニング作業、誤判読などを引き起こし、量産収率に悪い影響を与えることになる。   The contact terminals 12 to be inspected of the camera module 10 are usually made of hard metal, unlike bump terminals made of lead. Therefore, when the tip 24 of the plunger 22 comes into contact with the contact terminal 12 to be inspected which has a curved surface, the tip 24 slips off. Such a contact error due to slippage causes an inspection error. Inspection errors occur more frequently due to various tolerances and alignment errors. In addition, a large number of repetitive tests cause an impurity transfer phenomenon, and as a result, a normal camera module may be erroneously recognized as defective. Such unstable contact between the probe and the terminal of the camera module causes stoppage of equipment, cleaning work, misreading, and the like, which adversely affects the mass production yield.

本発明の目的は、上述した従来の問題を解決するためのもので、カメラモジュールのような部分曲面筒状の被検査接触端子を有する被検査体を安定的に検査するに好適な検査プローブ及び検査ソケットを提供することにある。   An object of the present invention is to solve the conventional problem described above, and an inspection probe suitable for stably inspecting an inspected object having an inspected contact terminal having a partially curved cylindrical shape such as a camera module. To provide an inspection socket.

上述した課題を解決するための曲面状の被検査接触面を有する被検査体の検査用プローブが提供される。検査用プローブは、Ｖ状に設けられ、前記被検査接触端子の相互離隔された位置にそれぞれ接触する一対の接触面を有する接触部と、前記接触部から長さ方向に沿って後方に一体に延長している延長部とを有する第１接触部材を備える。これによれば、曲面筒状の被検査端子を囲みながら接触して２接触点で連結されるので、接触不良を防止できる他、異物汚染による接触抵抗の上昇を防止することができる。   An inspection probe for an object to be inspected having a curved contact surface to be inspected for solving the above problem is provided. The inspection probe is provided in a V-shape, and has a contact portion having a pair of contact surfaces that respectively contact the mutually separated positions of the contact terminals to be inspected, and are integrally formed rearward from the contact portion along the length direction. A first contact member having an extending extension. According to this, since the contact is made at two contact points while being in contact while surrounding the terminal to be inspected having a curved cylindrical shape, it is possible to prevent a contact failure and to prevent an increase in contact resistance due to foreign matter contamination.

検査用プローブは、検査回路の検査接点に接触する第２接触部材と、前記第１接触部材と前記第２接触部材との間に配置され、前記第１接触部材及び前記第２接触部材の少なくとも一つを付勢する弾性体と、を備えることができる。   An inspection probe is disposed between the first contact member and the second contact member, the second contact member being in contact with an inspection contact of an inspection circuit, and at least one of the first contact member and the second contact member. And an elastic body for urging one.

検査用プローブは、検査回路の検査接点に接触する第２接触部材、前記第１接触部材の下端に接触する第３接触部材、及び前記第２接触部材と前記第３接触部材との間に配置され、前記第２接触部材及び前記第３接触部材の少なくとも一つを付勢する弾性体を有するプローブをさらに備えることができる。   An inspection probe is disposed between the second contact member that contacts an inspection contact of an inspection circuit, a third contact member that contacts a lower end of the first contact member, and the second contact member and the third contact member. The apparatus may further include a probe having an elastic body for urging at least one of the second contact member and the third contact member.

本発明の実施例に係る検査用プローブソケットは、Ｖ状に設けられ、前記被検査接触端子の相互離隔された位置にそれぞれ接触する一対の接触面を有する第１接触部材を支持する接触部材支持体と、検査回路の検査接点に接触する第２接触部材、前記第１接触部材の下端に接触する第３接触部材、前記第２接触部材と前記第３接触部材との間に配置され、前記第２接触部材及び前記第３接触部材の少なくとも一つを付勢する弾性体を有するプローブを支持するプローブ支持体と、を備える。   An inspection probe socket according to an embodiment of the present invention is provided with a contact member supporting a first contact member provided in a V-shape and having a pair of contact surfaces respectively in contact with mutually separated positions of the contact terminals to be inspected. A body, a second contact member that contacts an inspection contact of an inspection circuit, a third contact member that contacts a lower end of the first contact member, and the second contact member is disposed between the second contact member and the third contact member; A probe support that supports a probe having an elastic body that biases at least one of the second contact member and the third contact member.

前記接触部材支持体は、前記プローブ支持体に着脱可能に支持され、汚染による装備の整備、クリーニング、及び誤り判読などの作業に効果的に対処することができる。   The contact member support is detachably supported by the probe support, and can effectively deal with operations such as maintenance of equipment due to contamination, cleaning, and misreading.

本発明に係る検査用プローブ及びプローブソケットによれば、曲面筒状の被検査接触端子は、プローブをＶ状接触部によって２地点で接触させるので、接触不良を防止できる他、Ｖ状接触部の接触点に転移する異物の蓄積を減らし、汚染による接触抵抗の上昇を防止することができる。   ADVANTAGE OF THE INVENTION According to the test probe and probe socket which concern on this invention, since a contact terminal to be inspected of a curved surface cylindrical shape makes a probe contact at two points by a V-shaped contact part, in addition to being able to prevent poor contact, the V-shaped contact part Accumulation of foreign matter transferred to the contact point can be reduced, and an increase in contact resistance due to contamination can be prevented.

本発明の実施例に係る検査用プローブソケットの斜視図である。FIG. 2 is a perspective view of the inspection probe socket according to the embodiment of the present invention. 本発明の実施例に係る検査用プローブソケットの分解斜視図である。FIG. 2 is an exploded perspective view of the inspection probe socket according to the embodiment of the present invention. 本発明の実施例に係る検査用プローブソケットの部分断面図である。FIG. 2 is a partial cross-sectional view of the inspection probe socket according to the embodiment of the present invention. 本発明の他の実施例に係る検査用プローブソケットの部分断面図である。FIG. 6 is a partial cross-sectional view of an inspection probe socket according to another embodiment of the present invention. 様々な接触部材の形状を示す斜視図である。It is a perspective view which shows the shape of various contact members. 様々な接触部材の形状を示す斜視図である。It is a perspective view which shows the shape of various contact members. 様々な接触部材の形状を示す斜視図である。It is a perspective view which shows the shape of various contact members. 本発明の他の実施例に係る検査用プローブソケットの部分断面図である。FIG. 6 is a partial cross-sectional view of an inspection probe socket according to another embodiment of the present invention. 従来の検査用プローブソケットの部分断面図である。It is a partial sectional view of the conventional inspection probe socket.

以下、本発明の一実施例を、添付の図面を参照して述べる。   Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings.

図１〜図３はそれぞれ、本発明の実施例に係る検査用プローブソケット１を示す斜視図、分解斜視図及び部分断面図である。図示のように、プローブソケット１は、多数の接触部材１１０を収容して支持する接触部材支持体１００、接触部材支持体１００をフローティング状態で収容して支持するハウジング３００、及び前記ハウジング３００の下部に収容されて支持され、前記多数の接触部材１１０に対応する位置に配置された多数のプローブ２００を支持するプローブ支持体４００を含む。   1 to 3 are a perspective view, an exploded perspective view, and a partial cross-sectional view, respectively, showing an inspection probe socket 1 according to an embodiment of the present invention. As shown, the probe socket 1 includes a contact member support 100 that accommodates and supports a large number of contact members 110, a housing 300 that accommodates and supports the contact member support 100 in a floating state, and a lower portion of the housing 300. And a probe support 400 for supporting a plurality of probes 200 disposed at positions corresponding to the plurality of contact members 110.

例えば、カメラモジュールのような被検査体１０は、金属板材を‘Ｕ’字状に折り曲げた部分曲面筒状の被検査端子１２を有している。   For example, a test object 10 such as a camera module has a test terminal 12 having a partially curved cylindrical shape obtained by bending a metal plate into a “U” shape.

接触部材１１０は、図１及び図３に示すように、Ｖ状に設けられた一対の接触面１１２，１１４を有する接触部１１１、及び該接触部１１１から半径方向に拡張して後方に延長している延長部１１３を備える。ここで、一対の接触面１１２，１１４は、部分曲面筒状、例えば‘Ｕ’字状の被検査端子１２を収容して接触する時、離隔している２地点Ｐ１，Ｐ２で被検査端子１２と接触する。その結果、接触部材１１０は、整列誤差及び公差による２接触点Ｐ１，Ｐ２の位置誤差がある程度発生しても、被検査端子１２との接触を確実に達成することができる。また、反復したテストによって異物、例えばスズが接触面１１２，１１４に移動しても、接触時に移動した異物が傾斜面に沿ってＶ状の溝に押し下げられて蓄積され、接触地点Ｐ１，Ｐ２に累積されずに済む。ここで、接触部材１１０は、プローブのプランジャー自体であってもよい。通常、被検査体１０は、多数の被検査端子のピッチが非常に狭く配置されている。したがって、接触部１１１は、多数の被検査端子１２のピッチを考慮して狭い幅で形成した第１板部１１５、及び強度向上のために第１板部１１５よりも広い幅で形成した第２板部１１６を備える。接触部材１１０は全体的に同一厚さの板状に製作してもよいが、強度及び耐久度が低いため、隣り合う被検査端子との接触を避け得る程度の長さだけを第１板部１１５とし、残りはより広い幅の第２板部１１６又は延長部１１３として加工することが好ましい。   As shown in FIGS. 1 and 3, the contact member 110 has a contact portion 111 having a pair of contact surfaces 112 and 114 provided in a V shape, and extends radially from the contact portion 111 to extend rearward. The extension 113 is provided. Here, when the pair of contact surfaces 112 and 114 receive and make contact with the terminal to be inspected 12 having a partially curved cylindrical shape, for example, a “U” shape, the terminal to be inspected 12 is separated at two points P1 and P2. Contact with. As a result, the contact member 110 can reliably achieve contact with the terminal under test 12 even if a positional error between the two contact points P1 and P2 due to the alignment error and the tolerance occurs to some extent. Further, even if foreign matter, for example, tin moves to the contact surfaces 112 and 114 by the repeated test, the foreign matter moved at the time of contact is pushed down and accumulated in the V-shaped groove along the inclined surface, and is accumulated at the contact points P1 and P2. No need to accumulate. Here, the contact member 110 may be the plunger itself of the probe. Normally, the device under test 10 is arranged such that the pitches of a large number of terminals to be tested are very narrow. Therefore, the contact portion 111 has a first plate portion 115 formed with a narrow width in consideration of the pitch of the plurality of terminals under test 12 and a second plate portion formed with a wider width than the first plate portion 115 for improving strength. A plate 116 is provided. The contact member 110 may be manufactured in the form of a plate having the same thickness as a whole. However, since the strength and durability are low, the first plate portion has a length enough to avoid contact with an adjacent terminal to be inspected. 115, and the remainder is preferably processed as the second plate portion 116 or the extended portion 113 having a wider width.

接触部材支持体１００は、接触部１１１が部分突出するように挿入された第１接触部材支持体１２０、及びこの第１接触部材支持体１２０の下部に配置される第２接触部材支持体１３０を備える。第１接触部材支持体１２０は、接触部１１１が挿入される第１開孔１２２を有する。第２接触部材支持体１３０は、延長部１１３が挿入される第２開孔１３２を有する。接触部材支持体１００は、４個のバネ３２０によってハウジング３００の第１収容部３０２内でフローティングして支持される。ここで、第１接触部材支持体１２０と第２接触部材支持体１３０は一体に製作されてもよい。   The contact member support 100 includes a first contact member support 120 that is inserted so that the contact portion 111 partially projects, and a second contact member support 130 that is disposed below the first contact member support 120. Prepare. The first contact member support 120 has a first opening 122 into which the contact portion 111 is inserted. The second contact member support 130 has a second opening 132 into which the extension 113 is inserted. The contact member support 100 is floatingly supported in the first housing portion 302 of the housing 300 by four springs 320. Here, the first contact member support 120 and the second contact member support 130 may be integrally formed.

ハウジング３００は、上部に接触部材支持体１００を収容する第１収容部３０２と、下部にプローブ支持体４００を収容する第２収容部が設けられている。第１収容部３０２と第２収容部との間には、後述するプローブ２００の第１プランジャー２１０が収容される第３開孔３３０が配置されている。   The housing 300 is provided with a first housing portion 302 for housing the contact member support 100 at an upper portion, and a second housing portion for housing the probe support 400 at a lower portion. A third opening 330 for accommodating a first plunger 210 of the probe 200 described below is disposed between the first accommodation section 302 and the second accommodation section.

プローブ２００は、円筒形のバレル２２０、一端がバレル２２０の一側に部分収容され、他端が接触部材１１０の下端に接触する第１プランジャー２１０、バレル２２０の他側に部分挿入される第２プランジャー２３０、及び前記バレル２２０内で第１プランジャー２１０と第２プランジャー２３０との間に介在されて、前記第１プランジャー２１０と第２プランジャー２３０を互いに遠ざかる方向に付勢するバネ２４０を備えている。   The probe 200 has a cylindrical barrel 220, one end of which is partially housed in one side of the barrel 220 and the other end of which is partially inserted into the other side of the barrel 220, the first plunger 210 which contacts the lower end of the contact member 110. The second plunger 230 and the first plunger 210 and the second plunger 230 are interposed between the first plunger 210 and the second plunger 230 in the barrel 220 to urge the first plunger 210 and the second plunger 230 away from each other. A spring 240 is provided.

プローブ支持体４００は、ハウジング３００の底面にある第２収容部内に挿入固定され、第２プランジャー２３０が外部に部分突出するようにプローブ２００を収容する第４開孔４３０を有する。プローブ支持体４００は固定ピン４１０によってハウジング３００の下部に固定される。   The probe support 400 has a fourth opening 430 for receiving and inserting the probe 200 such that the second plunger 230 partially protrudes to the outside. The probe support 400 is fixed to a lower portion of the housing 300 by a fixing pin 410.

図２に示すように、接触部材１１０を支持する接触部材支持体１００は、ハウジング３００の第１収容部３０２内に着脱可能に挿入支持される。このため、接触部材１１０の不良や寿命が尽きた場合、プローブ２００はそのまま置いて接触部材１１０だけを容易に交換することができる。   As shown in FIG. 2, the contact member support 100 that supports the contact member 110 is removably inserted and supported in the first housing portion 302 of the housing 300. Therefore, when the contact member 110 is defective or its life has expired, the probe 200 can be left as it is, and only the contact member 110 can be easily replaced.

図３は、テストのために被検査体１０を加圧した状態であり、バネ２４０は圧縮された状態である。テストが完了して被検査体１０の押下を中断すれば、バネ２４０によって第１プランジャー２４０が上方に突出しながら接触部材１１０を押し上げる。その結果、テストが完了すると接触部材１１０の接触部１１１が第１接触部材支持体１２０から外部に突出する。   FIG. 3 shows a state where the test object 10 is pressurized for the test, and the spring 240 is in a compressed state. When the test is completed and the pressing of the test object 10 is interrupted, the contact member 110 is pushed up while the first plunger 240 projects upward by the spring 240. As a result, when the test is completed, the contact portion 111 of the contact member 110 projects outside from the first contact member support 120.

図４は、本発明の他の実施例に係るプローブソケット１を示す部分断面図である。図示のように、第１プランジャー２１０’は、バレル２２０の一側に部分挿入されている。第１プランジャー２１０’は、Ｖ状の一対の接触面２１２，２１４を有する接触部２１１、及び該接触部２１１から半径方向に拡張されて後方に延長している拡張部２１６を備えている。ここで、一対の接触面２１２，２１４は、部分曲面筒状の被検査端子１２を収容して接触する時、離隔された２地点Ｐ１，Ｐ２で接触する。接触部２１１は、多数の被検査端子１２のピッチを考慮して狭い幅で形成した第１板部２１５、及び強度向上のために第１板部２１５から半径方向に拡張して後方に延長している拡張部２１６を備える。第１プランジャー２１０’は、全体的に同一厚さの板材で製作してもよいが、強度及び耐久度の向上のために、第１板部２１５は、隣り合う被検査端子との接触を避け得る程度の狭い幅で板状に形成され、拡張部２１６は、第１板部２１５より半径方向に拡張された円柱状に形成される。第２プランジャー２３０は、一側がバレル２２０の他側に部分挿入され、第２プランジャー２３０は、検査回路のパッド端子（図示せず）に接触する。バレル２２０内で第１プランジャー２１０’と第２プランジャー２３０との間にはバネ２４０が介在される。バネ２４０は、第１プランジャー２１０’及び第２プランジャー２３０を互いに遠ざかるように付勢する。   FIG. 4 is a partial sectional view showing a probe socket 1 according to another embodiment of the present invention. As shown, the first plunger 210 'is partially inserted into one side of the barrel 220. The first plunger 210 'includes a contact portion 211 having a pair of V-shaped contact surfaces 212 and 214, and an extension portion 216 that extends radially from the contact portion 211 and extends rearward. Here, when the pair of contact surfaces 212 and 214 receive and contact the terminal 12 to be inspected having a partially curved cylindrical shape, they come into contact at two separated points P1 and P2. The contact portion 211 extends radially from the first plate portion 215 and extends rearward from the first plate portion 215 formed with a narrow width in consideration of the pitch of the plurality of terminals to be inspected 12 and the strength. The expansion unit 216 is provided. The first plunger 210 ′ may be made of a plate material having the same thickness as a whole. However, in order to improve strength and durability, the first plate portion 215 makes contact with adjacent terminals to be inspected. It is formed in a plate shape with a narrow width that can be avoided, and the expanded portion 216 is formed in a column shape that is expanded in the radial direction from the first plate portion 215. One side of the second plunger 230 is partially inserted into the other side of the barrel 220, and the second plunger 230 contacts a pad terminal (not shown) of the inspection circuit. A spring 240 is interposed between the first plunger 210 'and the second plunger 230 in the barrel 220. The spring 240 biases the first plunger 210 'and the second plunger 230 away from each other.

図５は、本発明の他の実施例に係る接触部材５１０を示す。ここで、接触部材５１０は、別個として分離製造され、図３に示すように、プローブ２００の第１プランジャー２１０に接触する。接触部材５１０は、図４に示したように第１プランジャー２１０’の部分として適用されてもよい。接触部材５１０は、本体部５１１、本体部５１１から半径方向に拡張するフランジ部５１２、Ｖ状接触面を有する接触部５１６が形成された第１板部５１４、及び第１板部５１４とフランジ部５１２との間で第１板部５１４よりも広い幅を有する第２板部５１３を備える。本体部５１１は円柱状であり、長さ方向に平面加工された少なくとも一つの平面部５１５を有する。平面部５１５は、多数の接触部材５１０を配置する時、多数の第１板部５１４が平行で一定に配置され得るようにする。第１板部５１４は、狭いピッチで隣り合う被検査端子１２の干渉を避けるために形成される。フランジ部５１２を省略してもよい。本体部５１１は、第２板部５１３に置き換えることができる。同様に、第２板部５１３は、第１板部５１４に置き換えることができる。すなわち、第１板部５１４がフランジ部５１２又は本体部５１１から直接に延長されてもよい。しかし、幅の狭い第１板部５１４は、長さが長くなると耐久性が低下したり歪むことがあり、ピッチの大きい被検査端子にのみ適用可能である。   FIG. 5 shows a contact member 510 according to another embodiment of the present invention. Here, the contact member 510 is separately manufactured separately, and contacts the first plunger 210 of the probe 200 as shown in FIG. The contact member 510 may be applied as a part of the first plunger 210 'as shown in FIG. The contact member 510 includes a main body 511, a flange 512 extending radially from the main body 511, a first plate 514 having a contact 516 having a V-shaped contact surface, and a first plate 514 and a flange. A second plate portion 513 having a width wider than the first plate portion 514 between the first plate portion 514 and the second plate portion 514 is provided. The main body 511 has a columnar shape and has at least one flat portion 515 that is flattened in the length direction. The flat part 515 allows the plurality of first plate parts 514 to be arranged in parallel and uniformly when the plurality of contact members 510 are arranged. The first plate portion 514 is formed to avoid interference between the terminals under test 12 that are adjacent at a narrow pitch. The flange portion 512 may be omitted. The main body 511 can be replaced with a second plate 513. Similarly, the second plate portion 513 can be replaced with a first plate portion 514. That is, the first plate portion 514 may be directly extended from the flange portion 512 or the main body portion 511. However, if the first plate portion 514 having a small width is long, the durability may be reduced or distorted if the length is long, and thus the first plate portion 514 can be applied only to a terminal to be inspected having a large pitch.

図６は、本発明のさらに他の実施例に係る接触部材６１０を示す。ここで、接触部材６１０は別個として分離製造され、図３に示したようにプローブ２００の第１プランジャー２１０に接触する。接触部材６１０は、図４に示したように第１プランジャー２１０’の部分として適用されてもよい。接触部材６１０は、円柱状の本体部６１１、本体部６１１から半径方向に拡張するフランジ部６１２、Ｖ状接触面を有する接触部６１６が形成された第１板部６１４、及び第１板部６１４と本体部６１１との間において第１板部６１４よりも広い幅を有する第２板部６１３を備える。フランジ部６１２は、本体部６１１を中心に半径方向に向かい合って延長されている。フランジ部６１２は、四角柱の形状を有する。フランジ部６１２は、多数の接触部材６１０を配置する時、多数の第１板部６１４が平行に並んで一定の方向に配置され得るようにする。第１板部６１４は、非常に狭いピッチで隣り合う被検査端子１２の干渉を避けるために狭幅で形成される。   FIG. 6 shows a contact member 610 according to still another embodiment of the present invention. Here, the contact member 610 is separately manufactured separately, and contacts the first plunger 210 of the probe 200 as shown in FIG. The contact member 610 may be applied as a part of the first plunger 210 'as shown in FIG. The contact member 610 includes a cylindrical main body 611, a flange 612 extending in a radial direction from the main body 611, a first plate 614 on which a contact 616 having a V-shaped contact surface is formed, and a first plate 614. A second plate portion 613 having a wider width than the first plate portion 614 is provided between the first plate portion 614 and the main body portion 611. The flange portion 612 extends in the radial direction around the main body portion 611. The flange portion 612 has the shape of a quadrangular prism. The flange part 612 allows a plurality of first plate parts 614 to be arranged in a certain direction in parallel when a plurality of contact members 610 are arranged. The first plate portion 614 is formed with a narrow width in order to avoid interference between the terminals under test 12 that are adjacent at a very narrow pitch.

図７は、本発明のさらに他の実施例に係る接触部材を示す。ここで、接触部材７１０は、別個として分離製造され、図３に示したようにプローブ２００の第１プランジャー２１０に接触する。接触部材７１０は、図４に示したように第１プランジャー２１０’の部分として適用されてもよい。接触部材７１０は、四角柱状の本体部７１１、本体部７１１から半径方向に拡張するフランジ部７１２、Ｖ状接触面を有する接触部７１６が形成された第１板部７１４、及び第１板部７１４と本体部７１１との間で第１板部７１４よりも広い幅の第２板部７１３を備える。フランジ部７１２は、本体部７１１を中心に幅方向に向かい合って延長されている。フランジ部７１２は、四角柱の形状を有する。フランジ部７１２は、多数の接触部材７１０を配置する時、多数の第１板部７１４が平行に並んで同一方向に配置され得るようにする。第１板部７１４は、ピッチの狭い隣り合う被検査端子１２との干渉を避けるために狭い幅で形成される。   FIG. 7 shows a contact member according to still another embodiment of the present invention. Here, the contact member 710 is separately manufactured separately and comes into contact with the first plunger 210 of the probe 200 as shown in FIG. The contact member 710 may be applied as a part of the first plunger 210 'as shown in FIG. The contact member 710 includes a quadrangular prism-shaped main body portion 711, a flange portion 712 extending radially from the main body portion 711, a first plate portion 714 having a contact portion 716 having a V-shaped contact surface, and a first plate portion 714. A second plate portion 713 having a wider width than the first plate portion 714 is provided between the first plate portion 714 and the main body portion 711. The flange portion 712 extends in the width direction around the main body portion 711. Flange portion 712 has the shape of a square pole. The flange part 712 allows a plurality of first plate parts 714 to be arranged in parallel and arranged in the same direction when a plurality of contact members 710 are arranged. The first plate portion 714 is formed with a narrow width in order to avoid interference with adjacent terminals to be inspected 12 having a small pitch.

図８は、他の実施例に係る検査用プローブソケットの部分断面図である。図示のように、被検査端子１２の部分曲面筒状部分に接触する接触部材１１０と第１プローブ２００の他に、被検査端子１２の平面部分に接触する第２プローブ８００を備えている。第２プローブ８００は、限定されないポゴピンの形状にすることができる。このように接触部材１１０と第１プローブ２００及び第２プローブ８００を同時に適用することは、検査の信頼性を向上させるためである。   FIG. 8 is a partial sectional view of an inspection probe socket according to another embodiment. As shown, in addition to the contact member 110 and the first probe 200 that are in contact with the partially curved cylindrical portion of the terminal under test 12, a second probe 800 that is in contact with the plane portion of the terminal under test 12 is provided. The second probe 800 can be in the shape of a non-limiting pogo pin. The simultaneous application of the contact member 110 and the first probe 200 and the second probe 800 is to improve the reliability of the inspection.

以上の如く、本発明を限定された例示的な実施例及び図面を用いて説明したが、本発明は、上記の例示的な実施例に限定されるものではなく、本発明の属する分野における通常の知識を有する者にとって上記の記載から様々な修正及び変形が可能である。   As described above, the present invention has been described with reference to the limited exemplary embodiments and the drawings. However, the present invention is not limited to the above-described exemplary embodiments, and is generally used in the field to which the present invention pertains. Various modifications and variations are possible from the above description for those skilled in the art.

したがって、本発明の範囲は、説明された例示的な実施例に限定されず、後述する特許請求の範囲とその均等物によって定められるべきである。   Therefore, the scope of the present invention should not be limited to the described illustrative embodiments, but should be defined by the appended claims and equivalents thereof.

１：プローブソケット
１００：第１接触部材支持体
１１０，５１０，６１０，７１０：接触部材
１２０：第２接触部材支持体
２００：プローブ
２１０：第１プランジャー
２２０：バレル
２３０：第２プランジャー
２４０：バネ
３００：ハウジング
４００：プローブ支持体 1: Probe socket 100: First contact member support 110, 510, 610, 710: Contact member 120: Second contact member support 200: Probe 210: First plunger 220: Barrel 230: Second plunger 240: Spring 300: Housing 400: Probe support

Claims (5)

曲面形状の被検査接触端子を有する被検査体の検査用プローブであって、
Ｖ状に設けられ、前記被検査接触端子の相互離隔された位置にそれぞれ接触する一対の接触面を有する接触部、及び前記接触部から長さ方向に沿って後方に一体に延長する延長部とを有する第１接触部材を備えることを特徴とする、検査用プローブ。 An inspection probe for an object to be inspected having a contact terminal to be inspected having a curved surface,
A contact portion provided in a V-shape and having a pair of contact surfaces respectively in contact with mutually separated positions of the contact terminals to be inspected, and an extension portion integrally extending rearward along the length direction from the contact portion; An inspection probe, comprising: a first contact member having: 検査回路の検査接点に接触する第２接触部材と、
前記第１接触部材と前記第２接触部材との間に配置され、前記第１接触部材及び前記第２接触部材の少なくとも一つを付勢する弾性体と、
を備えることを特徴とする、請求項１に記載の検査用プローブ。 A second contact member that contacts a test contact of the test circuit;
An elastic body disposed between the first contact member and the second contact member, for urging at least one of the first contact member and the second contact member;
The inspection probe according to claim 1, further comprising: 検査回路の検査接点に接触する第２接触部材、前記第１接触部材の下端に接触する第３接触部材、及び前記第２接触部材と前記第３接触部材との間に配置され、前記第２接触部材と前記第３接触部材の少なくとも一つを付勢する弾性体を有するプローブをさらに備えることを特徴とする、請求項１に記載の検査用プローブ。   A second contact member that contacts an inspection contact of an inspection circuit, a third contact member that contacts a lower end of the first contact member, and the second contact member that is disposed between the second contact member and the third contact member; The inspection probe according to claim 1, further comprising a probe having an elastic body for urging at least one of the contact member and the third contact member. 曲面状の被検査接触端子を有する被検査体の検査用プローブを支持するプローブソケットであって、
Ｖ状に設けられ、前記被検査接触端子の相互離隔された位置にそれぞれ接触する一対の接触面を有する第１接触部材を支持する接触部材支持体と、
検査回路の検査接点に接触する第２接触部材、前記第１接触部材の下端に接触する第３接触部材、前記第２接触部材と前記第３接触部材との間に配置され、前記第２接触部材及び前記第３接触部材の少なくとも一つを付勢する弾性体を有するプローブを支持するプローブ支持体と、
を備えることを特徴とする、検査用プローブソケット。 A probe socket for supporting a probe for inspection of an object to be inspected having a curved contact terminal to be inspected,
A contact member support that is provided in a V-shape and supports a first contact member having a pair of contact surfaces that respectively contact the mutually separated positions of the contact terminals to be inspected;
A second contact member that contacts an inspection contact of an inspection circuit; a third contact member that contacts a lower end of the first contact member; and a second contact member that is disposed between the second contact member and the third contact member. A probe support that supports a member and a probe having an elastic body that biases at least one of the third contact members;
An inspection probe socket, comprising: 前記接触部材支持体は、前記プローブ支持体に着脱可能に支持されることを特徴とする、請求項４に記載の検査用プローブソケット。   The probe socket for inspection according to claim 4, wherein the contact member support is detachably supported by the probe support.
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