JP2020503503A - 複数のガスの濃度を決定および場合により測定するためのセンサ機構、およびセンサ構造を製造する方法 - Google Patents
複数のガスの濃度を決定および場合により測定するためのセンサ機構、およびセンサ構造を製造する方法 Download PDFInfo
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- 230000007246 mechanism Effects 0.000 title claims abstract description 26
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 6
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 69
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 69
- 229910052751 metal Inorganic materials 0.000 claims abstract description 58
- 239000002184 metal Substances 0.000 claims abstract description 58
- 239000011159 matrix material Substances 0.000 claims abstract description 51
- 239000002121 nanofiber Substances 0.000 claims description 40
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 28
- 239000000758 substrate Substances 0.000 claims description 28
- 239000002105 nanoparticle Substances 0.000 claims description 16
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 claims description 14
- 239000005751 Copper oxide Substances 0.000 claims description 14
- 229910000431 copper oxide Inorganic materials 0.000 claims description 14
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- 239000011787 zinc oxide Substances 0.000 claims description 14
- 150000002739 metals Chemical class 0.000 claims description 13
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 13
- 229910001887 tin oxide Inorganic materials 0.000 claims description 13
- 238000001816 cooling Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 230000001235 sensitizing effect Effects 0.000 claims description 2
- 239000000203 mixture Substances 0.000 abstract description 7
- 230000035945 sensitivity Effects 0.000 description 4
- 238000007306 functionalization reaction Methods 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 206010070834 Sensitisation Diseases 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000004378 air conditioning Methods 0.000 description 1
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- 238000010586 diagram Methods 0.000 description 1
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- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
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- 238000007740 vapor deposition Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
- G01N27/127—Composition of the body, e.g. the composition of its sensitive layer comprising nanoparticles
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0031—General constructional details of gas analysers, e.g. portable test equipment concerning the detector comprising two or more sensors, e.g. a sensor array
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- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Description
[先行技術文献]
[特許文献]
[特許文献1] 米国特許出願公開第2011/0120866号明細書
[特許文献2] 欧州特許出願公開第0527258号明細書
−基板が準備されること、
−マトリクスに配置された導電素子と多数の接点とを含む、それぞれ異なる金属および/または金属酸化物からなるセンサ構造が基板に装着されること、
−センサ構造に構成されたセンサが機能化されること。
Claims (15)
- マトリクスに配置された導電素子と多数の接点とを有するセンサ構造を備え、前記導電素子は前記接点と接続されている、複数のガスの濃度を決定および場合により測定するためのセンサ機構において、混合ガス中で2つを超えるガスを互いに単離して測定するために、前記導電素子がそれぞれ異なる金属および/または金属酸化物を有するように形成されるセンサ機構。
- 前記マトリクスは金属フィルムおよび/または金属酸化物フィルムを含む、請求項1に記載のセンサ機構。
- 前記センサ構造はナノ繊維を含む、請求項1または2に記載のセンサ機構。
- 接触部材、特に金属および/または金属酸化物の接触部材が設けられており、前記ナノ繊維が前記接触部材の間に配置される、請求項3に記載のセンサ機構。
- 前記ナノ繊維がドーピングされる、請求項3または4に記載のセンサ機構。
- 前記センサ構造はセンサをそれぞれ別様に感応化するためにナノ粒子を含む、請求項1から5のいずれか1項に記載のセンサ機構。
- 前記マトリクスに配置された前記導電素子は少なくとも部分的に酸化錫および/または酸化亜鉛および少なくとも部分的に酸化銅から形成されており、たとえば酸化錫および/または酸化亜鉛はn型ドーピングされ、酸化銅はp型ドーピングされる、請求項1から6のいずれか1項に記載のセンサ機構。
- 前記マトリクスは金属フィルムおよび/または金属酸化物フィルムを含み、互いにほぼ垂直に配置された金属フィルムおよび/または金属酸化物フィルムの間の交差点でそれぞれ異なるドーピングを含む領域の間の接合部が構成される、請求項1から7のいずれか1項に記載のセンサ機構。
- 前記センサ機構はフレキシブルにコンフィグレーション可能である、請求項1から8のいずれか1項に記載のセンサ機構。
- 前記センサ機構は前記センサ機構を規定された温度にするために、または定義された温度サイクルに暴露するために加熱装置および/または冷却装置を含む、請求項1から9のいずれか1項に記載のセンサ機構。
- それぞれ異なるガスを同時に決定するための、請求項1から10のいずれか1項に記載のセンサ機構の利用法。
- 複数のガスの濃度を決定および場合により測定するためのセンサ機構、特に請求項1から10のいずれか1項に記載のセンサ機構を製造する方法において、
基板が準備される段階と、
マトリクスに配置された導電素子と多数の接点とを含む、それぞれ異なる金属および/または金属酸化物からなるセンサ構造が前記基板に装着される段階と、
前記センサ構造に構成されたセンサが機能化される段階と、
の各段階を含む方法。 - 前記センサ構造はナノ粒子によって機能化される、請求項12に記載の方法。
- 前記マトリクスに配置された接触部材の間で、特に金属および/または金属酸化物の接触部材の間で、ナノ繊維が前記基板の上に酸化される、請求項12または13に記載の方法。
- 金属フィルムおよび/または金属酸化物フィルムが前記基板に装着される、請求項12から14のいずれか1項に記載の方法。
Applications Claiming Priority (3)
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ATA51174/2016A AT519492B1 (de) | 2016-12-22 | 2016-12-22 | Sensoranordnung zur Bestimmung und gegebenenfalls Messung einer Konzentration von mehreren Gasen und Verfahren zur Herstellung einer Sensoranordnung |
ATA51174/2016 | 2016-12-22 | ||
PCT/AT2017/060330 WO2018112486A1 (de) | 2016-12-22 | 2017-12-12 | Sensoranordnung zur bestimmung und gegebenenfalls messung einer konzentration von mehreren gasen und verfahren zur herstellung einer sensoranordnung |
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JP2020503503A true JP2020503503A (ja) | 2020-01-30 |
JP7484067B2 JP7484067B2 (ja) | 2024-05-16 |
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EP (1) | EP3559659B1 (ja) |
JP (1) | JP7484067B2 (ja) |
KR (1) | KR102480785B1 (ja) |
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WO (1) | WO2018112486A1 (ja) |
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DE102018220607A1 (de) * | 2018-11-29 | 2020-06-04 | Robert Bosch Gmbh | Gassensorvorrichtung sowie Verfahren zu ihrer Herstellung und zu ihrem Betrieb |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5766347A (en) * | 1980-10-09 | 1982-04-22 | Hitachi Ltd | Detector for mixture gas |
JPH07294470A (ja) * | 1994-04-28 | 1995-11-10 | Sogo Keibi Hosho Co Ltd | 半導体繊維ガスセンサ |
US20090101501A1 (en) * | 2007-10-17 | 2009-04-23 | Tao Xiao-Ming | Room temperature gas sensors |
JP2011112642A (ja) * | 2009-11-23 | 2011-06-09 | Korea Electronics Telecommun | 環境ガスセンサー及びその製造方法 |
GB2527340A (en) * | 2014-06-19 | 2015-12-23 | Applied Nanodetectors Ltd | Gas sensors and gas sensor arrays |
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DE4423289C1 (de) * | 1994-07-02 | 1995-11-02 | Karlsruhe Forschzent | Gassensor für reduzierende oder oxidierende Gase |
DE19718584C1 (de) * | 1997-05-05 | 1998-11-19 | Fraunhofer Ges Forschung | Sensor zur Detektion von oxidierenden und/oder reduzierenden Gasen oder Gasgemischen |
KR100812357B1 (ko) * | 2005-12-23 | 2008-03-11 | 한국과학기술연구원 | 초고감도 금속산화물 가스센서 및 그 제조방법 |
WO2013140663A1 (ja) | 2012-03-19 | 2013-09-26 | 三菱電機株式会社 | 半導体モジュール及びその製造方法 |
MY177552A (en) * | 2012-12-07 | 2020-09-18 | Mimos Berhad | A method of fabricating a resistive gas sensor device |
GB2519110B (en) * | 2013-10-09 | 2018-04-18 | Nokia Technologies Oy | An apparatus and associated methods for analyte detection |
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- 2017-12-12 EP EP17816396.0A patent/EP3559659B1/de active Active
- 2017-12-12 JP JP2019528623A patent/JP7484067B2/ja active Active
- 2017-12-12 WO PCT/AT2017/060330 patent/WO2018112486A1/de active Search and Examination
- 2017-12-12 KR KR1020197017069A patent/KR102480785B1/ko active IP Right Grant
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5766347A (en) * | 1980-10-09 | 1982-04-22 | Hitachi Ltd | Detector for mixture gas |
JPH07294470A (ja) * | 1994-04-28 | 1995-11-10 | Sogo Keibi Hosho Co Ltd | 半導体繊維ガスセンサ |
US20090101501A1 (en) * | 2007-10-17 | 2009-04-23 | Tao Xiao-Ming | Room temperature gas sensors |
JP2011112642A (ja) * | 2009-11-23 | 2011-06-09 | Korea Electronics Telecommun | 環境ガスセンサー及びその製造方法 |
GB2527340A (en) * | 2014-06-19 | 2015-12-23 | Applied Nanodetectors Ltd | Gas sensors and gas sensor arrays |
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KR20190099405A (ko) | 2019-08-27 |
EP3559659A1 (de) | 2019-10-30 |
JP7484067B2 (ja) | 2024-05-16 |
EP3559659B1 (de) | 2024-07-31 |
AT519492A1 (de) | 2018-07-15 |
AT519492B1 (de) | 2019-03-15 |
KR102480785B1 (ko) | 2022-12-23 |
WO2018112486A1 (de) | 2018-06-28 |
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