JP2020502438A - 真空ポンプのための軸受支持体 - Google Patents
真空ポンプのための軸受支持体 Download PDFInfo
- Publication number
- JP2020502438A JP2020502438A JP2019531997A JP2019531997A JP2020502438A JP 2020502438 A JP2020502438 A JP 2020502438A JP 2019531997 A JP2019531997 A JP 2019531997A JP 2019531997 A JP2019531997 A JP 2019531997A JP 2020502438 A JP2020502438 A JP 2020502438A
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- Prior art keywords
- polymer
- support
- bearing
- bearing support
- vacuum pump
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C27/00—Elastic or yielding bearings or bearing supports, for exclusively rotary movement
- F16C27/04—Ball or roller bearings, e.g. with resilient rolling bodies
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C27/00—Elastic or yielding bearings or bearing supports, for exclusively rotary movement
- F16C27/06—Elastic or yielding bearings or bearing supports, for exclusively rotary movement by means of parts of rubber or like materials
- F16C27/063—Sliding contact bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/056—Bearings
- F04D29/059—Roller bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
- F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
- F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C27/00—Elastic or yielding bearings or bearing supports, for exclusively rotary movement
- F16C27/06—Elastic or yielding bearings or bearing supports, for exclusively rotary movement by means of parts of rubber or like materials
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C27/00—Elastic or yielding bearings or bearing supports, for exclusively rotary movement
- F16C27/06—Elastic or yielding bearings or bearing supports, for exclusively rotary movement by means of parts of rubber or like materials
- F16C27/066—Ball or roller bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C35/00—Rigid support of bearing units; Housings, e.g. caps, covers
- F16C35/04—Rigid support of bearing units; Housings, e.g. caps, covers in the case of ball or roller bearings
- F16C35/06—Mounting or dismounting of ball or roller bearings; Fixing them onto shaft or in housing
- F16C35/07—Fixing them on the shaft or housing with interposition of an element
- F16C35/077—Fixing them on the shaft or housing with interposition of an element between housing and outer race ring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2240/00—Components
- F05B2240/50—Bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2260/00—Function
- F05B2260/96—Preventing, counteracting or reducing vibration or noise
- F05B2260/964—Preventing, counteracting or reducing vibration or noise by damping means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2280/00—Materials; Properties thereof
- F05B2280/40—Organic materials
- F05B2280/4009—Polyetherketones, e.g. PEEK
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2208/00—Plastics; Synthetic resins, e.g. rubbers
- F16C2208/20—Thermoplastic resins
- F16C2208/36—Polyarylene ether ketones [PAEK], e.g. PEK, PEEK
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
- F16C2360/44—Centrifugal pumps
- F16C2360/45—Turbo-molecular pumps
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
- Support Of The Bearing (AREA)
- Compressor (AREA)
- Mounting Of Bearings Or Others (AREA)
Abstract
Description
34 外側
35 可撓性部材
36 支持体
37、38 ビーム
39、40 円筒面
41、42 面
43 端面
44、45 スロット
Claims (18)
- 半径方向及び軸方向の両方での真空ポンプの回転子軸受の弾性支持で使用するためのポリマー軸受支持体であって、前記軸受支持体が、前記回転子軸受に結合されるように構成された内側部分と、前記真空ポンプのハウジングに結合されるように構成された外側部分とを含み、前記内側部分及び外側部分は、少なくとも1つの可撓性部材によって接続され、前記少なくとも1つの可撓性部材は、内側環状部分及び外側環状部分と実質的に同心の細長い弓形部材である、ポリマー軸受支持体。
- 前記ポリマー支持体は、約50〜約500N/mmの範囲の半径方向剛性を有する、請求項1に記載のポリマー軸受支持体。
- 前記ポリマー支持体は、約300N/mmよりも大きな軸方向剛性を有する、請求項1又は2に記載のポリマー軸受支持体。
- 前記軸方向剛性が、前記半径方向剛性よりも大きい、請求項1から3の何れかに記載のポリマー軸受支持体。
- 前記内側部分及び/又は外側部分が環状である、請求項1から4の何れかに記載のポリマー軸受支持体。
- 前記可撓性部材は環状であり、少なくとも1つの半径方向ビームによって前記内側部分に接合され、少なくとも1つの第2の半径方向ビームによって前記外側部分に接合される、請求項1に記載のポリマー軸受支持体。
- 前記可撓性部材は、約0.1mm〜約1mm、好ましくは約0.3mm〜約0.7mmの厚みを有する、請求項1から6の何れかに記載のポリマー軸受支持体。
- 前記支持体は、約50GPa未満の引張係数を有するポリマーを含む、請求項1から7の何れかに記載のポリマー軸受支持体。
- 前記支持体は、≧100℃のガラス遷移温度を有するポリマーを含む、請求項1から8の何れかに記載のポリマー軸受支持体。
- 前記支持体は、締まり嵌め(圧入)を用いて前記ハウジング及び/又は前記軸受に結合される、請求項1から9の何れかに記載のポリマー軸受支持体。
- 前記支持体は、成形、押出、プリント、機械加工、鋳造、スピン鋳造、レーザマイクロジェット機械加工又はマイクロウォータージェット機械加工が行われる、請求項1から10の何れかに記載のポリマー軸受支持体。
- 前記支持体は、ポリエーテルエーテルケトン(PEEK)を含む、請求項1から11の何れかに記載のポリマー軸受支持体。
- 半径方向及び軸方向の両方での真空ポンプの回転子軸受の弾性支持で使用するためのポリマー軸受支持体であって、前記軸受支持体は、内側及び外側環状部分と、少なくとも1つの第1の半径方向ビームによって前記内側環状部分に接合され、少なくとも1つの第2の半径方向ビームによって前記外側環状部分に接合された少なくとも1つの中間環状部分と、を含む、ポリマー軸受支持体。
- 軸受機構によって支持された回転子を含む真空ポンプであって、前記軸受機構が、請求項1から13の何れかに記載のポリマー支持体によって半径方向及び軸方向の両方で支持された軸受を含む、真空ポンプ。
- 軸受機構によって支持された回転子を含む真空ポンプであって、前記軸受機構が、少なくとも1つの可撓性部材によって接続された内側環状部分及び外側環状部分を含む弾性ポリマー支持体によって半径方向及び軸方向の両方で支持された軸受を含む、真空ポンプ。
- 半径方向及び軸方向の両方で真空ポンプにおいて回転子軸受を弾性的に支持するように、少なくとも1つの可撓性部材によって接続された内側部分及び外側部分を含む弾性支持体におけるポリマーの使用法。
- ポリマーを成形、押出、プリント又は機械加工、鋳造、又はスピン鋳造して、支持体を形成するステップを含む、弾性ポリマー軸受支持体を製造する方法であって、前記支持体は、前記軸受に結合されるように構成された内側部分と、真空ポンプのハウジングに結合されるように構成された外側部分とを含み、前記内側及び外側部分は、少なくとも1つの可撓性部材によって接続される、弾性ポリマー軸受支持体を製造する方法。
- 軸受支持体を含む真空ポンプを組立てる方法であって、前記方法は、前記軸受支持体を前記真空ポンプから取り外すステップと、ポリマー軸受支持体、好ましくは本発明の他の態様のうちの1又は2以上による軸受支持体と前記軸受支持体を交換するステップと、を含む、方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1621361.3A GB2557676A (en) | 2016-12-15 | 2016-12-15 | Bearing support for a vacuum pump |
GB1621361.3 | 2016-12-15 | ||
PCT/GB2017/053739 WO2018109474A1 (en) | 2016-12-15 | 2017-12-14 | Bearing support for a vacuum pump |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020502438A true JP2020502438A (ja) | 2020-01-23 |
JP7275029B2 JP7275029B2 (ja) | 2023-05-17 |
Family
ID=58284403
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019531997A Active JP7275029B2 (ja) | 2016-12-15 | 2017-12-14 | 真空ポンプのための軸受支持体 |
Country Status (6)
Country | Link |
---|---|
US (1) | US10808713B2 (ja) |
EP (1) | EP3555490B1 (ja) |
JP (1) | JP7275029B2 (ja) |
CN (1) | CN110050133B (ja) |
GB (1) | GB2557676A (ja) |
WO (1) | WO2018109474A1 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3499044B1 (de) * | 2017-12-18 | 2022-05-04 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
FR3094048B1 (fr) * | 2019-03-18 | 2021-04-23 | Skf Aerospace France | Elément de liaison, et procédé de fabrication d’une bague pour un tel élément de liaison |
FR3094051B1 (fr) | 2019-03-18 | 2021-04-23 | Skf Aerospace France | Bague à cage de type écureuil en bi-matière composite et métal, et ensemble de roulement à éléments roulants équipé d’une telle bague |
CN110043561A (zh) * | 2019-04-25 | 2019-07-23 | 西安交通大学 | 一种应用于涡轮增压器的压力自供给气体静压径向滑动轴承 |
GB2584076B (en) * | 2019-05-03 | 2022-04-20 | Edwards Ltd | Lubricant supply system and vacuum pump |
GB2584676B (en) * | 2019-06-10 | 2021-11-10 | Edwards Ltd | Rotor support and vacuum pump with such a rotor support |
GB2588434B (en) * | 2019-10-24 | 2022-08-10 | Edwards Ltd | Bearing support and pump |
KR20220127908A (ko) * | 2020-01-16 | 2022-09-20 | 생-고뱅 퍼포먼스 플라스틱스 렌콜 리미티드 | 조향 조립용 베어링 |
US20220056979A1 (en) * | 2020-08-18 | 2022-02-24 | Illinois Tool Works Inc. | Silicone free rotational spring hinge dampener |
US11971079B2 (en) * | 2022-07-11 | 2024-04-30 | GM Global Technology Operations LLC | Dual deflection ring vibration reduction system |
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US2874008A (en) * | 1956-02-23 | 1959-02-17 | Skf Svenska Kullagerfab Ab | Bearing mounting for silent running rotating machine parts |
JPH06213239A (ja) * | 1992-12-01 | 1994-08-02 | Dana Corp | 軸受アセンブリ |
US5425584A (en) * | 1987-05-29 | 1995-06-20 | Ide; Russell D. | Fluid dampened support for rolling element bearings |
JP2010516972A (ja) * | 2007-01-29 | 2010-05-20 | エドワーズ リミテッド | 真空ポンプ |
CN203430998U (zh) * | 2013-08-23 | 2014-02-12 | 桐乡辰宇机械有限公司 | 用于传动轴的防震轴承座 |
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EP0317621B1 (en) * | 1987-05-29 | 1998-07-22 | IDE, Russell, D. | Hydro dynamic bearing and methods of making same |
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JP6599626B2 (ja) * | 2015-03-23 | 2019-10-30 | Ntn株式会社 | 軸受装置および機械装置 |
JP6523728B2 (ja) * | 2015-03-24 | 2019-06-05 | Ntn株式会社 | 軸受装置 |
-
2016
- 2016-12-15 GB GB1621361.3A patent/GB2557676A/en not_active Withdrawn
-
2017
- 2017-12-14 CN CN201780078056.0A patent/CN110050133B/zh active Active
- 2017-12-14 JP JP2019531997A patent/JP7275029B2/ja active Active
- 2017-12-14 US US16/468,975 patent/US10808713B2/en active Active
- 2017-12-14 EP EP17817837.2A patent/EP3555490B1/en active Active
- 2017-12-14 WO PCT/GB2017/053739 patent/WO2018109474A1/en unknown
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2874008A (en) * | 1956-02-23 | 1959-02-17 | Skf Svenska Kullagerfab Ab | Bearing mounting for silent running rotating machine parts |
US5425584A (en) * | 1987-05-29 | 1995-06-20 | Ide; Russell D. | Fluid dampened support for rolling element bearings |
JPH06213239A (ja) * | 1992-12-01 | 1994-08-02 | Dana Corp | 軸受アセンブリ |
JP2010516972A (ja) * | 2007-01-29 | 2010-05-20 | エドワーズ リミテッド | 真空ポンプ |
CN203430998U (zh) * | 2013-08-23 | 2014-02-12 | 桐乡辰宇机械有限公司 | 用于传动轴的防震轴承座 |
Also Published As
Publication number | Publication date |
---|---|
US10808713B2 (en) | 2020-10-20 |
GB201621361D0 (en) | 2017-02-01 |
CN110050133B (zh) | 2021-07-30 |
GB2557676A (en) | 2018-06-27 |
EP3555490B1 (en) | 2021-02-03 |
CN110050133A (zh) | 2019-07-23 |
EP3555490A1 (en) | 2019-10-23 |
WO2018109474A1 (en) | 2018-06-21 |
US20190383299A1 (en) | 2019-12-19 |
JP7275029B2 (ja) | 2023-05-17 |
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